JP7550828B2 - DEFORMATION APPARATUS, EXPOSURE APPARATUS, AND METHOD FOR MANUFACTURING ARTICLE - Google Patents

Description

The present invention relates to a deformation device that deforms an object, an exposure device that uses the same, and a method for manufacturing an article.

Deformation devices are known that drive and displace multiple points on an object to deform the object into a desired shape. One example of a deformation device is a deformable mirror device mounted on large telescopes used in the field of astronomy. A deformable mirror device supports a mirror having a light-reflecting surface at multiple points, and deforms the mirror into a desired shape by driving and displacing each point with an actuator. It is used as a component of a correction optical system that corrects the effects of atmospheric turbulence during astronomical observations. Patent Document 1 discloses a deformable mirror that deforms a mirror using multiple actuators.

Another example of a deformation device is an optical correction device mounted on an exposure device for manufacturing semiconductor devices, etc. The optical correction device, for example, corrects the optical characteristics of the exposure device by deforming an optical element provided in the exposure device. Patent Document 2 discloses that a plurality of actuators are used to deform a parallel flat glass plate to correct overlay errors that may occur due to aberrations in the projection optical system or distortion of a pattern formed on a substrate. Patent Document 3 discloses that a plurality of actuators are used to deform a variable blade for defining a slit-shaped illumination light.

JP 2012-18290 A JP 2013-236026 A Patent No. 4581639

In general, objects such as mirrors deformed by a deformable mirror device and optical elements deformed by an optical correction device (hereinafter, sometimes simply referred to as "objects") are made of brittle materials and have the property of being broken when a large stress is applied to them. In other words, when an object is deformed using an actuator, if the stress generated in the object exceeds the breaking stress, the object may be broken. Normally, the actuator is controlled so that the stress generated in the object is less than the breaking stress, but if an actuator control error occurs at this time, a large displacement may be unintentionally applied to the object, causing the object to be broken. For this reason, it is advisable to provide a fail-safe to prevent damage to the object even if a control error occurs.

Patent document 1 discloses a mechanism that individually limits the movable range (i.e., the drive stroke) of the movable end of each actuator. However, simply limiting the drive stroke of each actuator individually can result in excessive load being placed on the object depending on the displacement difference between adjacent points among multiple points on the object, which can cause the object to be damaged.

The present invention aims to provide an advantageous technology for reducing damage to an object when the object is deformed.

One aspect of the present invention relates to a deformation device that deforms an object, the deformation device comprising a plurality of movable parts that respectively hold a plurality of locations on the object, a plurality of driving parts that move the plurality of movable parts in a direction perpendicular to a surface of the object, a limiting mechanism including a first limiting member provided on one of adjacent movable parts among the plurality of movable parts and a second limiting member provided on the other of the plurality of movable parts, and a control unit that controls the plurality of driving parts, wherein the limiting mechanism limits the movement of the adjacent movable parts by the first limiting member and the second limiting member abutting against each other.

Further objects and other aspects of the present invention will become apparent from the following description of preferred embodiments thereof with reference to the accompanying drawings.

The present invention can provide, for example, an advantageous technique for reducing damage to an object when the object is deformed.

FIG. 1 is a schematic diagram showing a configuration example of a deformation device according to a first embodiment; FIG. 2 is a diagram illustrating a configuration example of a displacement unit according to the first embodiment; FIG. 1 is a diagram for explaining a configuration example of a limiting mechanism according to a first embodiment; FIG. 13 is a diagram for explaining the effect of providing the limiting mechanism according to the first embodiment; FIG. 13 is a diagram for explaining the effect of providing the limiting mechanism according to the first embodiment; FIG. 13 is a schematic diagram showing a configuration example of a deformation device according to a second embodiment; FIG. 13 is a diagram for explaining a configuration example of a limiting mechanism according to a second embodiment; FIG. 13 is a diagram for explaining a modification of the limiting mechanism according to the second embodiment; FIG. 13 is a diagram illustrating a configuration example of a displacement unit according to a third embodiment; FIG. 13 is a diagram for explaining a configuration example of a limiting mechanism according to a third embodiment; FIG. 13 is a diagram for explaining a configuration example of a limiting mechanism according to a third embodiment; FIG. 13 is a schematic diagram showing a configuration example of a deformation device according to a fourth embodiment; FIG. 13 is a diagram illustrating a configuration example of a displacement unit according to a fourth embodiment; FIG. 13 is a diagram illustrating a configuration example of a displacement unit according to a fourth embodiment; FIG. 13 is a diagram illustrating a configuration example of a displacement unit according to a fifth embodiment; FIG. 1 is a schematic diagram showing an example of the configuration of an exposure apparatus; Diagram for explaining the problem of the deformation device Diagram for explaining the problem of the deformation device

The following embodiments are described in detail with reference to the attached drawings. Note that the following embodiments do not limit the invention according to the claims. Although the embodiments describe multiple features, not all of these multiple features are necessarily essential to the invention, and multiple features may be combined in any manner. Furthermore, in the attached drawings, the same reference numbers are used for the same or similar configurations, and duplicate explanations are omitted.

First, the issues with a deformation device that deforms an object will be described with reference to Figs. 17 and 18. Fig. 17 is a perspective view that shows a schematic example of a configuration for deforming a plane-parallel glass plate G as an object. The arrows in the figure indicate actuators ACT that drive and displace each of multiple points on the plane-parallel glass plate G. In other words, Fig. 17 shows an example of a configuration in which each actuator ACT drives and displaces each point on the plane-parallel glass plate G. This example configuration is placed, for example, in the optical path of the projection optical system of an exposure device, and is used for distortion correction of the optical system, etc.

The upper diagram in FIG. 18 is a side view (viewed from the Y-axis direction) that shows a schematic diagram of an example configuration (example configuration in FIG. 17) for deforming a plane-parallel glass plate G. The upper diagram in FIG. 18 shows a plurality of actuators ACT1 to ACT6 arranged on one side of the plane-parallel glass plate G. The lower diagram in FIG. 18 is a graph showing the shapes of the plane-parallel glass plate G that can be generated by the plurality of actuators ACT1 to ACT6. The graph shows the surface shape of the plane-parallel glass plate G when each part of the plane-parallel glass plate G is displaced by each actuator. The graph shows two types of shapes: Shape 1 (solid line) and Shape 2 (dashed line).

The plane-parallel glass plate G is a brittle material and can break if the stress generated in the plane-parallel glass plate G exceeds the breaking stress. For example, the plane-parallel glass plate G can break if the difference in displacement between adjacent points (hereinafter sometimes simply referred to as "adjacent points") among the multiple points to which displacement is applied by actuators ACT1 to ACT6 exceeds the allowable range R. The allowable range R of the difference in displacement between adjacent points is indicated by the dotted arrow below the graph.

One method for keeping the displacement difference between adjacent parts within the allowable range R is to provide a mechanical limit for each actuator to keep the drive stroke of each actuator within the allowable range R. However, this method may narrow the deformable range of the parallel flat plate glass G. For example, as shown in the lower diagram of FIG. 18, if shapes 1 and 2 are required, there may be some parts where the drive stroke of the actuator ("required stroke" in the diagram) must be larger than the allowable range R to realize these shapes. In other words, if the drive stroke of each actuator itself is mechanically limited, it may be difficult to generate the required shapes 1 and 2. Therefore, in order to expand the deformable range of the parallel flat plate glass G and realize shapes 1 and 2, it is necessary to make the drive stroke of each actuator larger than the allowable range R.

Another method for keeping the displacement difference between adjacent locations within the allowable range R is to set control limitations on each actuator so that the displacement difference between adjacent locations falls within the allowable range R. However, with this method, if a control error occurs in each actuator (e.g., an error in the drive command system or an error in the control system), a large displacement (load) may be unintentionally applied to each location on the plane-parallel glass plate G, causing the plane-parallel glass plate G to break.

Therefore, in the deformation device according to the present invention, a limiting mechanism is provided for keeping the displacement difference between adjacent parts of an object within an allowable range. The allowable range R can be set to a range of displacement difference that can avoid damage to the object, in other words, a range of displacement difference that makes the stress generated in the object equal to or less than the breaking stress of the object. The limiting mechanism may be understood as a mechanism that makes the displacement difference between adjacent parts of an object less than a specified value. In this case, the specified value can be set to a limit value of displacement difference that can avoid damage to the object, in other words, a limit value of displacement difference that makes the stress generated in the object equal to or less than the breaking stress of the object.

Below, an embodiment of the present invention will be described. In the following embodiment, a plane-parallel glass plate is exemplified as an object to be deformed by the deformation device of the present invention. However, the object is not limited to a plane-parallel glass plate, and may be any member. The object may be configured in a plate or line shape. As an example, the object may be a member (such as a mirror, glass plate, or variable blade) for correcting the characteristics of a telescope, a lithography device (including an exposure device), or the like.

First Embodiment
A first embodiment of the present invention will be described. FIG. 1 is a schematic diagram showing a configuration example of a deformation device 100 of this embodiment. The deformation device 100 of this embodiment is a device that deforms a plane-parallel glass plate 120 by displacing a plurality of locations on the plane-parallel glass plate 120. The deformation device 100 can be applied, for example, as an optical correction device for correcting the optical characteristics of a lithography device used in the manufacture of semiconductor devices, a telescope used in the astronomy field, and the like. In this specification and drawings, directions are shown in an XYZ coordinate system in which the direction perpendicular to the surface (top surface) of the plane-parallel glass plate 120 is the Z direction. In addition, the plane-parallel glass plate 120 is assumed to have a rectangular shape having sides extending in the X direction and sides extending in the Y direction, and may be simply referred to as "plate glass 120" below.

The deformation device 100 includes a plurality of displacement units A101-A112 that displace a plurality of displacement target locations (points of action) on the glass sheet 120 in the Z direction. In this embodiment, as shown in FIG. 1, the plurality of displacement units A101-A112 are provided in groups of six on each of two sides of the glass sheet 120 that extend in the X direction and are opposite each other. Specifically, the six displacement units A101-A106 are spaced apart in the X direction from the side on the -Y direction side, and the six displacement units A107-A112 are spaced apart in the X direction from the side on the +Y direction side. Note that, although 12 displacement units A101-A112 are provided in the deformation device 100 in this embodiment, the number of displacement units can be any number.

The deformation device 100 also includes a control unit CNT that controls the deformation of the glass sheet 120 by controlling the multiple displacement units A101-A112. The control unit CNT can be configured, for example, by a computer including a processor such as a CPU (Central Processing Unit) and a storage unit such as a memory. By individually controlling each of the multiple displacement units A101-A112, the control unit CNT can individually displace each of the multiple displacement target locations on the glass sheet 120 in the Z direction, and deform the glass sheet 120 into a desired shape.

[Example of the configuration of the displacement part]
Next, a configuration example of each of the multiple displacement units A101 to A112 will be described with reference to Fig. 2. The multiple displacement units A101 to A112 have the same configuration, and Fig. 2 shows a schematic configuration example of one displacement unit 130. Fig. 2 shows one displacement unit 130 as viewed from the +X direction side. The displacement unit 130 can include, for example, a holding unit HD that holds the glass sheet 120, and a drive unit DR that drives the holding unit HD. Note that Fig. 2 shows only the end of the glass sheet 120.

The holding unit HD is a mechanism for holding the portion of the glass sheet 120 to be displaced, and may include, for example, a Z slide unit 131 and a clamp unit 132. The clamp unit 132 is a member for clamping (holding, gripping) the glass sheet 120, and is supported by the Z slide unit 131. The clamp unit 132 is arranged to sandwich the portion of the glass sheet 120 to be displaced from above and below (±Z direction), and serves as a point of action that applies force to the portion of the glass sheet 120 to be displaced and displace it. The Z slide unit 131 is a movable unit that is driven in the Z direction by the drive unit DR, and is connected to the portion of the glass sheet 120 to be displaced via the clamp unit 132. The Z slide unit 131 is mounted on a Z linear guide 136 that uses a linear guide mechanism composed of, for example, a bearing, a rail, and a slider, and is guided by the Z linear guide 136 to be able to move only in the Z direction.

The driving unit DR is a mechanism (actuator) that drives the holding unit HD (Z slide unit 131) in the Z direction. In this embodiment, the driving unit DR can be configured with a ball nut 133, a ball screw 134, and a motor 135. The ball nut 133 is disposed (inserted) inside the Z slide unit 131, and the ball screw 134 is rotated by the motor 135. By rotating the ball screw 134 by the motor 135, the ball nut 133 is moved in the Z direction along the ball screw 134, and the Z slide unit 131 in which the ball nut 133 is disposed can be driven in the Z direction accordingly. The motor 135 and the Z linear guide 136 are supported by, for example, a main body 137 that constitutes the frame of the deformation device 100. Here, in this embodiment, an actuator including the ball nut 133, the ball screw 134, and the motor 135 is used as the driving unit DR, but this is not limited thereto, and other actuators such as a linear motor or an air cylinder may be used.

In this way, each of the multiple displacement units A101 to A112 is configured to include a holding unit HD and a driving unit DR. In other words, the deformation device 100 is equipped with multiple holding units HD (i.e., multiple Z slide units 131 (movable units)) that respectively hold multiple displacement target locations on the glass sheet 120, and multiple driving units DR that drive and displace each of the multiple holding units HD. In this way, the control unit CNT can deform the glass sheet 120 into a desired shape by individually controlling each of the multiple driving units DR.

In the deformation device 100 that applies forced displacement to the glass sheet 120 to deform it, as described above, the glass sheet 120 may be locally deformed significantly depending on the displacement difference between adjacent displacement target locations of the glass sheet 120. In this case, if stress equal to or greater than the breaking stress of the glass sheet 120 occurs in the glass sheet 120, the glass sheet 120 may be broken. Therefore, the deformation device 100 of this embodiment is equipped with a limiting mechanism LM. The limiting mechanism LM is a mechanism that mechanically limits the relative positional deviation in the Z direction between adjacent Z slide parts 131 (movable parts) so that the displacement difference in the Z direction between adjacent displacement target locations of the glass sheet 120 is within the allowable range R. The limiting mechanism LM may be understood as a mechanism that limits the relative position in the Z direction between adjacent Z slide parts 131 so that the adjacent Z slide parts 131 are not separated by a predetermined distance or more in the Z direction.

As described above, the allowable range R is the range of displacement difference that can avoid breakage of the glass sheet 120, in other words, the range of displacement difference in which the stress generated in the glass sheet 120 is equal to or less than the breaking stress of the glass sheet 120. The allowable range R can be set in advance, for example, by calculating the breaking stress of the glass sheet 120 in advance using an experiment or a simulation (e.g., strength calculation). In addition, adjacent displacement target locations of the glass sheet 120 refer to two adjacent displacement target locations among the multiple displacement target locations in the glass sheet 120, and may be simply referred to as "adjacent displacement target locations" below.

[Example of the restriction mechanism]
Next, a configuration example of the limiting mechanism LM will be described with reference to FIG. 3. FIG. 3 is a view of the deformation device 100 of this embodiment as seen from the -Y direction side, and shows six displacement parts A101 to A106 provided on the -Y direction side of the glass plate 120 among the multiple displacement parts A101 to A112. Note that in FIG. 3, in order to make the drawing easier to understand, only the Z slide part 131 and the Z linear motion guide 136 in each of the displacement parts A101 to A106 are extracted and shown, and other parts such as the drive part HD are omitted. Also, the limiting mechanism LM shown in FIG. 3 was simply omitted from FIGS. 1 and 2.

The limiting mechanism LM has a first limiting member 138 (abutment portion) provided on one of the adjacent Z slide portions 131 (movable portions), and a second limiting member 139 (abutment portion) provided on the other. The first limiting member 138 can be configured to protrude from one side toward the other side, and the second limiting member 139 can be configured to protrude from the other side toward the one side. The first limiting member 138 and the second limiting member 139 are arranged to limit the relative positional deviation in the Z direction between the adjacent Z slide portions 131 by abutting against each other when the displacement difference between the adjacent displacement target locations reaches the limit of the allowable range R.

For example, focusing on the displacement parts A101-A102, a limiting mechanism LM for limiting the relative positional deviation between the Z slide parts 131 of the displacement parts A101-A102 is provided between the Z slide part 131 of the displacement part A101 and the Z slide part 131 of the displacement part A102. In this limiting mechanism LM, a first limiting member 138 is attached to the side of the Z slide part 131 of the displacement part A101 that faces the displacement part A102, and a second limiting member 139 is attached to the side of the Z slide part 131 of the displacement part A102 that faces the displacement part A101. In addition, two first limiting members 138 are arranged to sandwich the second limiting member 139 in the vertical direction (±Z direction), and a concave shape is formed by the two first limiting members 138. The second limiting member 139 is inserted between the two first limiting members 138 arranged in a concave shape, and the movement of the second limiting member 139 in the Z direction is limited between the two first limiting members 138. This configuration of the limiting mechanism LM makes it possible to limit the relative positional deviation in the Z direction between the Z slide portions 131 of the displacement portions A101-A102 so that the displacement difference between adjacent displacement target portions displaced by the displacement portions A101-A102 falls within the allowable range R. The limiting mechanisms LM provided between the displacement portions A102-A106 and between the displacement portions A107-A112 have the same configuration as between the displacement portions A101-A102.

Here, the first limiting member 138 and the second limiting member 139 may be understood as parts of each Z slide portion 131. In this case, the multiple Z slide portions 131 can be interpreted as adjacent Z slide portions 131 partially butting against (contacting) each other when the displacement difference between adjacent displacement target locations reaches the limit value of the allowable range R.

As described above, the deformation device 100 of this embodiment is provided with a limiting mechanism LM composed of a first limiting member 138 and a second limiting member 139. This limiting mechanism LM mechanically limits the relative positional deviation in the Z direction between adjacent Z slide parts 131 so that the displacement difference in the Z direction between adjacent displacement target parts is limited within the allowable range R. In other words, the limiting mechanism LM functions as a mechanical stopper that limits the relative position between adjacent Z slide parts 131. Since the relative position between adjacent Z slide parts 131 is limited by the limiting mechanism LM in this way, even if a control error occurs in each drive unit DR or each drive unit DR runs out of control due to a malfunction, damage to the plate glass 120 can be avoided. In addition, the first limiting member 138 and the second limiting member 139 of the limiting mechanism LM may have sufficient mechanical strength and rigidity to prevent deformation (damage) even if they collide with each other due to the maximum thrust that the drive unit DR (motor 135) can output.

[Effect of the limiting mechanism]
Next, the effect obtained by providing the limiting mechanism LM will be described with reference to FIGS. 4 and 5. FIG. 4 is a view of the deformation device 100 of this embodiment as seen from the -Y direction side, similar to FIG. 3, and shows six displacement parts A101 to A106 provided on the -Y direction side of the glass sheet 120 among the multiple displacement parts A101 to A112. FIG. 4 shows a state in which adjacent Z slide parts 131 are shifted in the Z direction from the state shown in FIG. 3. Specifically, FIG. 4 shows a state in which the Z slide parts 131 of the displacement parts A101 to A103 are driven downward (-Z direction) and the Z slide parts 131 of the displacement parts A104 to A106 are driven upward (+Z direction) so that the displacement of the center position of the glass sheet 120 does not change. In the example of FIG. 4, the adjacent displacement target parts of the glass sheet 120 have reached the limit of the allowable range R. On the other hand, FIG. 5 shows a state in which the displacement portions A101 to A106 are driven generally downward (in the -Z direction) from the state shown in FIG. 4 without changing the positional relationship of the Z slide portions 131.

What is noteworthy here is that in each of the displacement units A101 to A106, the drive unit DR can drive the Z slide unit 131 in the Z direction with a drive stroke larger than the allowable range R. In the conventional method of avoiding damage to the glass sheet 120 by individually limiting the drive stroke (drivable range) of the drive unit DR of each displacement unit, it is difficult to achieve a large change in the surface shape of the glass sheet 120, as shown in Figures 4 and 5. In other words, the deformation device 100 of this embodiment can avoid (reduce) damage to the glass sheet 120 caused by the displacement difference between adjacent displacement target locations while sufficiently increasing the drive stroke of the drive unit DR of each displacement unit.

Second Embodiment
A second embodiment of the present invention will be described. This embodiment basically follows the first embodiment, and can follow the first embodiment except for the matters mentioned below.

Figure 6 is a view of the deformation device 100 of this embodiment as seen from the +Z direction. The deformation device 100 of this embodiment further includes a detection unit 140 that detects contact between the first limiting member 138 and the second limiting member 139 of the limiting mechanism LM. The detection unit 140 is electrically connected to the first limiting member 138 and the second limiting member 139 by a signal line 142 (collision signal cable), and can be configured to detect contact between the first limiting member 138 and the second limiting member 139 based on a signal flowing through the signal line 142. Here, when the first limiting member 138 and the second limiting member 139 are configured as part of each Z slide portion 131, the detection unit 140 may be understood as detecting partial contact of multiple Z slide portions 131.

The control unit CNT is also electrically connected to the drive units DR of each of the displacement units A101 to A112 by signal lines 143 (drive cables) and controls the drive units DR of each of the displacement units A101 to A112. The control unit CNT is also electrically connected to the detection unit 140 by signal lines 144 (detection signal cables) and acquires the detection results of the detection unit 140. In this embodiment, when the detection unit 140 detects contact between the first limiting member 138 and the second limiting member 139, the control unit CNT stops (halts) the deformation of the glass sheet 120 by each of the displacement units A101 to A112 (each drive unit DR).

Figure 7 is a view of the deformation device 100 of this embodiment from the -Y direction side, showing six displacement units A101 to A106 provided on the edge of the glass sheet 120 on the -Y direction side. Note that in Figure 7, in order to make the figure easier to understand, only the components necessary for explaining this embodiment are shown. In Figure 7, the same reference numerals are given to components that have the same functions as in the first embodiment, and detailed explanations of these components will be omitted.

In the deformation device 100 of this embodiment, the first limiting member 138 and the second limiting member 139 each have an electrode. The electrode of the first limiting member 138 is electrically connected to the detection unit 140 via a signal line 142-1. The electrode of the second limiting member 139 is electrically connected to the detection unit 140 via a signal line 142-2. When the first limiting member 138 and the second limiting member 139 come into contact with each other, the electrodes also come into contact with each other, and the signal lines 142-1 and 142-2 are electrically connected. The detection unit 140 can detect contact between the first limiting member 138 and the second limiting member 139 based on a signal (e.g., a current) flowing through the signal line due to the electrical connection between the signal lines 142-1 and 142-2.

In the example of FIG. 7, the electrodes of the first limiting member 138 provided in each of the displacement sections A101 to A105 are electrically connected in parallel to the detection section 140 by a signal line 142-1. The electrodes of the second limiting member 139 provided in each of the displacement sections A102 to A106 are electrically connected in parallel to the detection section 140 by a signal line 142-2. In this case, multiple pairs of the first limiting member 138 and the second limiting member 139 are configured, and contact between the first limiting member 138 and the second limiting member 139 in any of the multiple pairs can be detected.

When the detector 140 detects contact between the first limiting member 138 and the second limiting member 139, a detection signal is sent to the controller CNT via the signal line 144. In this case, the controller CNT immediately stops each of the displacement units A101-A112 (each of the drive units DR) in response to receiving the detection signal. With this configuration, the deformation of the glass sheet 120 is immediately stopped (aborted) when the displacement difference between adjacent displacement target locations reaches the limit value of the allowable range R, and it is possible to avoid the application of large localized stress to the glass sheet 120, i.e., damage to the glass sheet 120.

Here, in this embodiment, a signal line (cable) must be connected to each of the multiple first limiting members 138 and each of the multiple second limiting members 139, and the signal line must be implemented to the detection unit 140. However, since the deformation of the glass sheet 120 is immediately stopped in response to detection of contact between the first limiting member 138 and the second limiting member 139, the mechanical strength of the first limiting member 138 and the second limiting member 139 is not required. In other words, the first limiting member 138 and the second limiting member 139 can be made smaller than in the first embodiment. The configuration of this embodiment is particularly effective when multiple displacement units are densely arranged or when miniaturization of the deformation device 100 is required.

[Modification]
A modified example of the second embodiment will be described below. Fig. 8 is a view of the deformation device 100 of this embodiment as seen from the -Y direction side, similar to Fig. 7, and shows six displacement units A101 to A106 provided on the edge of the glass sheet 120 on the -Y direction side. Note that in Fig. 8, in order to make the drawing easier to understand, only the components necessary for the explanation of this embodiment are extracted and shown.

The example in FIG. 8 differs from the example in FIG. 7 in the implementation of the signal lines (cables). In the example in FIG. 8, the electrodes of the first limiting member 138 provided in each of the displacement sections A101 to A105 are electrically connected in series by a signal line 145. The electrodes of the second limiting member 139 provided in each of the displacement sections A102 to A106 are electrically connected in series by a signal line 146. With this configuration, contact between the first limiting member 138 and the second limiting member 139 can be detected with only two signal lines 145 to 146, which has the advantage of simplifying the configuration (implementation).

Third Embodiment
A third embodiment of the present invention will be described. This embodiment basically follows the first embodiment, and may follow the first embodiment except for the matters mentioned below. This embodiment may also follow the second embodiment.

In the deformation device 100 of this embodiment, the configuration of each displacement unit is different from that of the first embodiment. Figure 9 shows a schematic configuration example of one displacement unit 130' in this embodiment, and is a view of one displacement unit 130' viewed from the +X direction side. Note that in Figure 9, the same reference numerals are used for components having the same functions as in the first and second embodiments, and detailed explanations of these components will be omitted.

In the displacement unit 130' of this embodiment, for example, the clamp unit 132, the Y slide unit 149a, the Z slide unit 149b, and the wedge linear guide 147 may be included in the holding unit HD. The Y slide unit 149a is mounted on a Y linear guide 148 using a linear guide mechanism composed of, for example, a bearing, a rail, and a slider, and is guided by the Y linear guide 148 to be able to move only in the Y direction. The Z slide unit 149b is mounted on a Z linear guide 136 using a linear guide mechanism composed of, for example, a bearing, a rail, and a slider, and is guided by the Z linear guide 136 to be able to move only in the Z direction. The displacement unit 130' is configured such that when the Y slide unit 149a is driven in the Y direction, the driving direction is converted to the Z direction by the wedge structure, and the Z slide unit 149b is driven in the up and down direction (Z direction). This allows the displacement target portion of the glass plate 120 held by the Z slide portion 149b via the clamp portion 132 to be driven and displaced in the Z direction.

The clamp unit 132 is a member for clamping the glass sheet 120, and is supported by the Z slide unit 149b. The Y slide unit 149a is a structure (first structure) that is guided by the Y linear guide 148 and can move in the Y direction (first direction), and is driven by the drive unit DR. The Z slide unit 149b is a structure (second structure) that is guided by the Z linear guide 136 and can move in the Z direction (second direction). The upper surface of the Y slide unit 149a and the lower surface of the Z slide unit 149b are formed as inclined surfaces (wedge-like inclined surfaces) that incline toward the -Z direction as they proceed in the +Y direction.

A wedge linear guide 147 is disposed between the upper surface of the Y slide portion 149a and the lower surface of the Z slide portion 149b. The lower side of the wedge linear guide 147 is connected to the upper surface of the Y slide portion 149a, and the upper side of the wedge linear guide 147 is connected to the lower surface of the Z slide portion 149b. The wedge linear guide 147 linearly guides and slides the Z slide portion 149b parallel to the upper surface of the Y slide portion 149a, which is an inclined surface. When the Y slide portion 149a moves in the Y direction, the overlap amount of the inclined surfaces between the Y slide portion 149a and the Z slide portion 149b changes. As a result, when the Y slide portion 149a is driven in the Y direction by the drive unit DR, the Z slide portion 149b is driven in the Z direction accordingly. In other words, the inclined surfaces formed on the Y slide portion 149a and the Z slide portion 149b and the wedge linear guide 147 form a conversion mechanism (wedge mechanism) that converts the movement of the Y slide portion 149a in the Y direction into the movement of the Z slide portion 149b in the Z direction.

Such a conversion mechanism may be called a "reduction mechanism" when the amount of movement (movement speed) of the Z slide portion 149b in the Z direction is smaller than the amount of movement (movement speed) of the Y slide portion 149a in the Y direction. For example, if the angle of the inclined surface is about 15°, the amount of movement in the Z direction is reduced to about 1/4 of the amount of movement in the Y direction. In this case, it is possible to improve the resolution when driving and displacing the target portion of the glass plate 120, and also to reduce the force required for driving.

The driving unit DR that drives the Y slide portion 149a may be composed of a ball nut 133, a ball screw 134, and a motor 135, as in the first embodiment. The ball nut 133 is disposed (inserted) inside the Y slide portion 149a, and the ball screw 134 is rotated by the motor 135. The ball screw 134 is rotated by the motor 135, so that the ball nut 133 moves along the ball screw 134 in the Y direction, and the Y slide portion 149a in which the ball nut 133 is disposed can be driven in the Y direction accordingly. In addition, the driving unit DR of this embodiment is provided with a rotation guide RG that guides (supports) the ball screw 134 rotatably. The rotation guide RG may be composed of, for example, a ball bearing. Here, in this embodiment, an actuator including the ball nut 133, the ball screw 134, and the motor 135 is used as the driving unit DR, but this is not limited thereto, and other actuators such as a linear motor or an air cylinder may be used.

Next, an example of the configuration of the limiting mechanism LM will be described with reference to FIG. 10. FIG. 10 is a diagram of the deformation device 100 of this embodiment as viewed from the +Z direction, and shows three displacement units A101 to A103, which are provided on the edge of the glass plate 120 on the -Y direction side, out of the multiple displacement units A101 to A112. Note that FIG. 10 shows only the components necessary for explaining this embodiment.

In the first embodiment described above, the limiting mechanism LM (first limiting member 138, second limiting member 139) was attached to the Z slide portion 131 movable in the Z direction, but in this embodiment, the limiting mechanism LM is attached to the Y slide portion 149a movable in the Y direction. The configuration of the limiting mechanism LM is basically as described in the first embodiment, but the limiting mechanism LM in this embodiment is attached so as to limit the relative positional deviation between the Y slide portions 149a in the Y direction. Specifically, two first limiting members 138 are arranged to sandwich the second limiting member 139 in the left-right direction (±Y direction), and a concave shape is formed by the two first limiting members 138. The second limiting member 139 is inserted between the two first limiting members 138 arranged in a concave shape, and the movement of the second limiting member 139 in the Y direction is limited between the two first limiting members 138. This configuration of the limiting mechanism LM makes it possible to limit the relative positional deviation in the Y direction between the Y slide sections 149a so that the displacement difference between adjacent displacement target locations is within the allowable range R.

Like FIG. 10, FIG. 11 is a view of the deformation device 100 of this embodiment seen from the +Z direction, and shows three displacement parts A101 to A103 in isolation. FIG. 11 shows a state in which the Y slide part 149a of the displacement part A103 has been driven to its limit in the -Y direction, as opposed to the state shown in FIG. 10. At this time, the second limiting member 139 provided on the displacement part A103 abuts against the first limiting member 138 provided on the displacement part A102, thereby limiting the relative positional deviation between the Y slide parts 149a of the displacement parts A102 to A103.

Here, in the first embodiment, the configuration is to limit the drive in the Z direction, but in this embodiment, the configuration is to limit the drive in the Y direction. According to the configuration of this embodiment, the drive limit range is widened, and the setting accuracy of the limit range is relaxed. For example, when the limit of the positional deviation in the Z direction is set to 20 μm, in the first embodiment, the gap between the first limiting member 138 and the second limiting member 139 in the limiting mechanism LM must be set to ±10 μm, and further, their positional relationship must be set to high accuracy (about 1 μm). In contrast, in this embodiment, if the reduction rate of the movement amount in the Z direction to the movement amount in the Y direction in the conversion mechanism is 1/4, the gap between the first limiting member 138 and the second limiting member 139 in the limiting mechanism LM may be set to ±40 μm, which is four times that of the first embodiment. In other words, the configuration of this embodiment has the advantage that the assembly adjustment of the displacement part 130' is easy. In addition, because the driving force in the Y direction is amplified and transmitted in the Z direction by the conversion mechanism, the driving force in the Y direction for driving the Y slide portion 149a can be reduced. As a result, the force when the first limiting member 138 and the second limiting member 139 hit each other in the limiting mechanism LM is also reduced, so the mechanical strength and rigidity of the first limiting member 138 and the second limiting member 139 can be reduced, which has the advantage of enabling miniaturization.

In this embodiment, a configuration has been described in which the limiting mechanism LM is provided only for the Y slide portion 149a. However, this is not limited to this, and the limiting mechanism LM may be provided for the Z slide portion 149b in addition to or instead of the Y slide portion 149a.

Fourth Embodiment
A fourth embodiment of the present invention will be described. This embodiment basically follows the first embodiment, and may follow the first embodiment except for the matters mentioned below. This embodiment may also follow the second and third embodiments.

Figure 12 is a view of the deformation device 100 of this embodiment from the -Y direction side, and shows three displacement units A101 to A103 provided on the edge of the glass plate 120 on the -Y direction side. Note that in Figure 12, in order to make the figure easier to understand, only the components necessary for explaining this embodiment are shown. In Figure 12, the same reference numerals are used for components that have the same functions as in the first embodiment, and detailed explanations of these components will be omitted.

As shown in FIG. 12, the deformation device 100 of this embodiment further includes switches 150a-150b (sensors) and a detection unit 150 (second detection unit). Each switch 150a-150b is provided on one of the adjacent Z slide sections 131, and is arranged so as to come into contact with the other of the adjacent Z slide sections 131 when the displacement difference between adjacent displacement target locations reaches the limit of the allowable range R. Then, based on a signal from each switch 150a-150b, the detection unit 150 detects the contact of the other switch with each of the switches 150a-150b.

Focusing on the displacement parts A101-A102, the switch 150a is provided on a first support member 151 protruding from the side of the Z slide part 131 of the displacement part A101 on the displacement part A102 side. The first support member 151 is a member for supporting (holding) the switch 150a, and may have a configuration similar to that of the second limiting member 139 of the limiting mechanism LM described above. The first support member 151 may be understood as a part of the Z slide part 131 of the displacement part A101. The switch 150a is arranged on the first support member 151 so as to come into contact with the first limiting member 138 provided on the Z slide part 131 of the displacement part A102 when the displacement difference between adjacent displacement target parts reaches the limit of the allowable range R. Switch 150a has an internal electrical contact, and when first limiting member 138 comes into contact with switch 150a and switch 150a is pressed, the electrical conduction state changes, and a signal is output indicating that first limiting member 138 has come into contact. Note that first limiting member 138 is a member attached to the side of Z slide portion 131 of displacement portion A102 on the displacement portion A101 side, and may be understood as a part of Z slide portion 131 of displacement portion A102.

On the other hand, the switch 150b is provided on a second support member 152 protruding from the side of the Z slide portion 131 of the displacement portion A102 on the displacement portion A101 side. The second support member 152 is a member for supporting (holding) the switch 150b, and may have a configuration similar to that of the first limiting member 138 of the limiting mechanism LM described above. The second support member 152 may be understood as a part of the Z slide portion 131 of the displacement portion A102. The switch 150b is arranged on the second support member 152 so as to come into contact with the first support member 151 of the Z slide portion 131 of the displacement portion A101 when the displacement difference between adjacent displacement target portions reaches the limit of the allowable range R. The switch 150b has an electrical contact inside, and when the first support member 151 comes into contact and the switch 150b is pressed, the electrical conduction state changes, and a signal indicating that the first support member 151 has come into contact is output.

The detection unit 150 detects the contact of the first limiting member 138 with the switch 150a or the contact of the first support member 151 with the switch 150b based on signals from the switches 150a to 150b. When the detection unit 150 detects contact with each of the switches 150a to 150b, a detection signal is sent from the detection unit 150 to the control unit CNT. In response to receiving the detection signal, the control unit CNT immediately stops (halts) the deformation of the glass sheet 120 by each of the displacement units A101 to A112 (each drive unit DR). With this configuration, when the displacement difference between adjacent displacement target locations reaches the limit value of the allowable range R, the deformation of the glass sheet 120 is immediately stopped (halted), and it is possible to avoid the application of large local stress to the glass sheet 120, i.e., damage to the glass sheet 120.

In addition, switches 150a to 150b are provided for each of the adjacent Z slide sections 131 in the multiple displacement sections A101 to A112. This allows the detection section 150 to determine (judge) which adjacent Z slide section 131 has detected contact with the switches 150a to 150b. This makes it possible to select the displacement section whose drive should be stopped and stop only the drive section DR of that displacement section. Another advantage is that it becomes easier to determine in which direction the drive section DR of which displacement section should be driven when returning after detecting contact.

In this embodiment, an example has been described in which switches with internal electrical contacts are used as each of the switches 150a to 150b, but similar effects can also be obtained by using other types of switches, such as photointerrupters. In precision optical devices that require highly accurate positioning, using switches that generate heat, such as photointerrupters, can cause errors due to position shifts caused by thermal distortion, so it may be better to use switches with electrical contacts that do not generate heat.

It is generally advisable to use normally closed switches for each of the switches 150a-150b. If normally open switches are used, there is a possibility that the glass plate 120 will be damaged because contact cannot be detected if the signal line is broken due to some influence. On the other hand, if normally closed switches are used, when the signal line is broken, the state transitions to the same state as when contact is detected. Therefore, it is possible to stop the drive unit DR and reduce damage to the glass plate 120.

Here, in this embodiment, an example using the switches 150a to 150b has been described, but a sensor (detection unit) that detects the position of the Z slide unit 131 in the Z direction may be provided, and the position may be constantly monitored (detected) by the sensor. In this case, the control unit CNT constantly calculates the relative positional deviation between the adjacent Z slide units 131 based on the detection result of the sensor, and when the positional deviation reaches a predetermined value, the deformation of the glass plate 120 by the driving unit DR may be stopped. This method is generally realized by software because of calculation processing, etc., but since it does not function if there is a bug, the method of the above-mentioned embodiment is better in terms of safety. However, there is an advantage that it can be easily realized because assembly adjustment is not required. Note that the predetermined value is, for example, the positional deviation when the displacement difference between adjacent displacement target parts reaches the limit of the allowable range R, and can be set in advance using experiments, simulations, etc.

Figure 13 shows an example of a configuration in which a rotary encoder 153 is provided as a sensor (detection unit) on the motor shaft of the motor 135. In this example, the control unit CNT can obtain the detection result of the rotation angle of the motor 135 by the rotary encoder 153 via a signal line 154, and obtain (determine, calculate) the Z-direction position of the Z slide unit 131 based on the detection result. Also, Figure 14 shows an example of a configuration in which a linear encoder LE is provided as a sensor (detection unit). The linear encoder LE includes a scale 155 and a head 156. The scale 155 is attached to the Z slide unit 131. The head 156 is attached to the main body unit 137. In this example, the control unit CNT can obtain the detection result of the Z-direction position of the Z slide unit 131 by the linear encoder LM via the signal line 154. Note that the same effect can be obtained by using a capacitance switch or a distance measuring switch using light as a method for detecting the Z-direction position of the Z slide unit 131.

Fifth Embodiment
A fifth embodiment of the present invention will be described. This embodiment basically follows the first embodiment, and may follow the first embodiment except for the matters mentioned below. This embodiment may also follow the second to fourth embodiments.

In the deformation device 100 of this embodiment, a rotation limiting mechanism 160 that limits the rotation amount of the motor 135 so that the displacement difference between adjacent displacement target parts falls within the allowable range R can be provided as the limiting mechanism LM. FIG. 15(a) shows an example of the configuration of a drive unit DR (ball nut 133, ball screw 134, motor 135) provided in one displacement unit. The rotation limiting mechanism 160 provided in the drive unit DR of this embodiment can include a disk member 161 having a notch 161a in a part thereof and a stopper 162. The disk member 161 is attached to the rotation shaft of the motor 135. The stopper 162 is disposed (inserted) in the notch 161a of the disk member 161 and limits the rotation amount of the disk member 161. With this configuration, the relative positional deviation in the Z direction between adjacent Z slide parts 131 can be mechanically limited, and damage to the glass plate 120 can be avoided.

<Embodiments of Exposure Apparatus>
A configuration example of an apparatus equipped with the deformation apparatus 100 of the above embodiment will be described. The deformation apparatus 100 of the above embodiment can be applied, for example, as an optical correction apparatus for correcting the optical characteristics of a lithography apparatus used in the manufacture of semiconductor devices or a telescope used in the field of astronomy. An example of applying the deformation apparatus 100 to an exposure apparatus, which is a type of lithography apparatus, will be described below.

Figure 16 is a schematic diagram showing an example configuration of an exposure apparatus 200. The exposure apparatus 200 is a lithography apparatus that is employed in a lithography process, which is a manufacturing process for semiconductor elements and liquid crystal display devices, and forms a pattern on a substrate P. The exposure apparatus 200 can transfer the pattern of a mask M (original) onto the substrate P by exposing the substrate P to light that has passed through the mask M. The exposure apparatus 200 of this embodiment is a step-and-scan type exposure apparatus (a so-called scanning exposure apparatus), but may also be a step-and-repeat type exposure apparatus or an exposure apparatus using another exposure method.

The exposure apparatus 200 has an illumination optical system 201, a mask stage 202, a projection optical system 203, and a substrate stage 204. The illumination optical system 201 is an optical system that illuminates the mask M with light from a light source (not shown), and is composed of a lens group and a fly-eye lens (not shown). A pattern to be formed on the substrate P is formed on the mask M. The mask M is held by the mask stage 202, and the substrate P is held by the substrate stage 204. The mask M and the substrate P are arranged in positions that are approximately optically conjugate via the projection optical system 203.

The projection optical system 203 is an optical system that projects a pattern image of the mask M placed on the object plane onto the substrate P placed on the image plane. The projection optical system 203 can be a reflective, refractive, or catadioptric optical system. In this embodiment, the projection optical system 203 has a predetermined projection magnification, and projects the pattern formed on the mask M by slit light onto the substrate P. Then, the mask stage 202 and the substrate stage 204 are scanned in a direction parallel to the object plane of the projection optical system 203 at a speed ratio according to the projection magnification of the projection optical system 203. This allows the pattern image of the mask M to be transferred onto the substrate P.

The deformation device 100 of the above embodiment is disposed in the exposure optical path in the projection optical system 203. The deformation device 100 deforms a parallel plane glass plate to correct the pattern image transferred onto the substrate P. For example, the deformation device 100 can correct the imaging characteristics of the projection optical system 203, such as aberration, by deforming the parallel plane glass plate. This makes it possible to improve the overlay accuracy of the patterns required when forming a device on the substrate. In addition, even if the pattern formed on the underlying substrate P is distorted, it is also possible to correct the transferred pattern image to match the shape of the distortion. As a result, it is possible to realize high-performance electronic devices and display devices.

<Embodiments of a method for manufacturing an article>
The method for manufacturing an article according to an embodiment of the present invention is suitable for manufacturing an article such as a microdevice such as a semiconductor device or an element having a fine structure. The method for manufacturing an article according to the present embodiment includes a step of forming a latent image pattern on a photosensitive agent applied to a substrate using the above-mentioned exposure apparatus (a step of exposing the substrate), a step of processing (developing) the substrate on which the latent image pattern is formed, and a step of manufacturing an article from the processed substrate. Furthermore, such a manufacturing method includes other well-known steps (oxidation, film formation, deposition, doping, planarization, etching, resist stripping, dicing, bonding, packaging, etc.). The method for manufacturing an article according to the present embodiment is advantageous in at least one of the performance, quality, productivity, and production cost of the article compared to conventional methods.

Summary of the embodiment
The disclosure of the present specification includes at least the following deformation apparatus, exposure apparatus, and method for manufacturing an article.

(Item 1)
A deformation device for deforming an object, comprising:
A plurality of movable parts respectively connected to a plurality of points on the object;
A plurality of drive units that drive and displace the plurality of movable units, respectively;
a control unit that controls the deformation of the object by controlling each of the plurality of drive units;
a limiting mechanism that mechanically limits relative positional deviation between adjacent movable parts among the plurality of movable parts so that a displacement difference between adjacent parts among the plurality of parts falls within an allowable range;
A deformation device comprising:

(Item 2)
2. The deformation device according to item 1, wherein the tolerance is set to a range of the displacement difference that can avoid damage to the object.

(Item 3)
the limiting mechanism includes a first limiting member provided on one of the adjacent movable parts and a second limiting member provided on the other of the adjacent movable parts,
The deformation device according to item 1 or 2, characterized in that the first limiting member and the second limiting member are arranged to mechanically limit the positional deviation by abutting against each other when the displacement difference reaches the limit of the allowable range.

(Item 4)
The first restricting member is configured to protrude from the one side toward the other side,
4. The deformation device according to item 3, wherein the second restricting member is configured to protrude from the one side toward the other side.

(Item 5)
The deformation device described in item 3 or 4, characterized in that the limiting mechanism has two first limiting members provided on one side so as to sandwich the second limiting member, and is configured to limit movement of the second limiting member between the two first limiting members.

(Item 6)
a first detection unit that detects contact between the first limiting member and the second limiting member,
6. The deformation device according to any one of items 3 to 5, wherein the control unit stops control of the deformation of the object when the contact is detected by the first detection unit.

(Item 7)
The deformation device described in item 6, characterized in that the first detection unit includes a signal line that is electrically connected by contact between the first limiting member and the second limiting member, and detects the contact based on a signal flowing through the signal line.

(Item 8)
each of the plurality of movable parts includes a first structure movable in a first direction by being driven by a corresponding driving part; a second structure connected to the object and movable in a second direction different from the first direction; and a conversion mechanism that converts the movement of the first structure in the first direction into the movement of the second structure in the second direction;
8. The deformation device according to any one of items 1 to 7, wherein the limiting mechanism is provided for the first structure.

(Item 9)
each of the plurality of movable parts includes a first structure movable in a first direction by being driven by a corresponding driving part; a second structure connected to the object and movable in a second direction different from the first direction; and a conversion mechanism that converts the movement of the first structure in the first direction into the movement of the second structure in the second direction;
9. The deformation device according to any one of items 1 to 8, wherein the limiting mechanism is provided for the second structure.

(Item 10)
A deformation device for deforming an object, comprising:
A plurality of movable parts respectively connected to a plurality of points on the object;
A plurality of drive units that drive and displace the plurality of movable units, respectively;
a control unit that controls the deformation of the object by controlling each of the plurality of drive units;
a switch that is provided on one of the adjacent movable parts among the plurality of movable parts and that is arranged so as to come into contact with the other of the adjacent movable parts when a displacement difference between adjacent parts among the plurality of parts reaches a limit of an allowable range;
A second detection unit that detects the other contact with the switch;
Equipped with
The deformation device, characterized in that the control unit stops control of the deformation of the object when the contact is detected by the second detection unit.

(Item 11)
11. The deformation device according to any one of items 1 to 10, wherein the object is a plate-shaped or linear member.

(Item 12)
12. The deformation apparatus according to any one of claims 1 to 11, wherein the object is a glass plate.

(Item 13)
An exposure apparatus for exposing a substrate, comprising:
a projection optical system that projects a pattern image of an original onto the substrate;
A deformation device according to any one of items 1 to 12 that deforms an object;
Equipped with
13. An exposure apparatus, wherein the object deformed by the deformation device is an optical element included in the projection optical system.

(Item 14)
an exposure step of exposing a substrate using the exposure apparatus according to item 13;
a processing step of processing the substrate exposed in the exposure step;
a manufacturing process for manufacturing an article from the substrate processed in the processing process;
A method for producing an article, comprising:

The invention is not limited to the above-described embodiment, and various modifications and variations are possible without departing from the spirit and scope of the invention. Therefore, the following claims are appended to disclose the scope of the invention.

100: Deformation device, 120: Parallel flat glass plate, 130: Displacement unit, 131: Z slide unit (movable unit), 132: Clamp unit, HD: Holding unit, DR: Driving unit

Claims (23)

A deformation device for deforming an object, comprising:
A plurality of movable parts each holding a plurality of points on the object;
a plurality of drive units that move the plurality of movable units in a direction perpendicular to a surface of the object ;
a limiting mechanism including a first limiting member provided on one of adjacent movable parts among the plurality of movable parts and a second limiting member provided on the other movable part;
A control unit that controls the plurality of drive units;
Equipped with
The deformation device, characterized in that the limiting mechanism limits movement of the adjacent movable parts by the first limiting member and the second limiting member abutting against each other. 2 . The deformation device according to claim 1 , wherein the limiting mechanism limits movement of the adjacent movable parts such that a difference in displacement between adjacent parts among the plurality of parts falls within an allowable range. The deformation device according to claim 2, characterized in that the allowable range is set to a range of the displacement difference that can avoid damage to the object. The first restricting member is configured to protrude from the one side toward the other side,
The deformation device according to claim 1 , wherein the second restricting member is configured to protrude from the one side toward the other side. The deformation device according to claim 3, characterized in that the limiting mechanism has two first limiting members provided on one side so as to sandwich the second limiting member, and is configured to limit the movement of the second limiting member between the two first limiting members. a first detection unit that detects that the first limiting member and the second limiting member come into contact with each other,
2. The deformation device according to claim 1, wherein the control unit controls the deformation of the object so as not to become large when the first detection unit detects that the first limiting member and the second limiting member have come into contact with each other. The deformation device according to claim 6, characterized in that the first detection unit includes a signal line that is electrically connected by contact between the first limiting member and the second limiting member, and detects the contact based on a signal flowing through the signal line. The deformation device according to claim 6, characterized in that the control unit stops controlling the object when the first detection unit detects that the first limiting member and the second limiting member have come into contact with each other. each of the plurality of movable parts includes a first structure driven by each driving part in a direction parallel to the surface of the object , a second structure that holds the object and is movable in the direction perpendicular to the surface of the object , and a wedge mechanism that converts the movement of the first structure into the movement of the second structure;
The deformation device according to claim 1 , wherein the limiting mechanism is provided for the first structure. each of the plurality of movable parts includes a first structure driven by each driving part in a direction parallel to the surface of the object , a second structure that holds the object and is movable in the direction perpendicular to the surface of the object , and a wedge mechanism that converts the movement of the first structure into the movement of the second structure;
The deformation device according to claim 1 , wherein the limiting mechanism is provided for the second structure. Further, a switch is provided on one of the adjacent movable parts,
The deformation device according to claim 1 , wherein the control unit detects that the first restricting member and the second restricting member are in contact with each other when the switch is pressed. The deformation device according to claim 11, characterized in that the switch is arranged so that the other of the adjacent movable parts presses the switch when the displacement difference between the adjacent parts reaches the limit of the allowable range. The transformation device according to claim 11, characterized in that the control unit stops controlling the object when the switch is pressed. The deformation device according to claim 1, characterized in that the object is a plate-shaped or linear member. The deformation device according to claim 1, characterized in that the object is a glass plate. A deformation device for deforming an object, comprising:
A plurality of movable parts each holding a plurality of points on the object;
a plurality of drive units that move the plurality of movable units in a direction perpendicular to a surface of the object ;
A control unit that controls the plurality of drive units;
Equipped with
The control unit limits the movement of adjacent movable parts among the plurality of movable parts by software control so that the displacement difference between a first location and a second location adjacent to each other among the plurality of locations is within an allowable range. A detector for detecting positions of the plurality of movable parts is further provided,
The deformation device according to claim 16 , wherein the control unit limits movements of the adjacent movable parts based on a result obtained by the detection unit. The deformation device according to claim 16, characterized in that the tolerance range is set to a range of the displacement difference that can avoid damage to the object. 17. The deformation device according to claim 16, wherein each of the plurality of movable parts includes a first structure driven by a respective driving part in a direction parallel to the surface of the object, a second structure holding the object and movable in the direction perpendicular to the surface of the object , and a wedge mechanism that converts movement of the first structure into movement of the second structure. The deformation device according to claim 16, characterized in that the object is a plate-shaped or linear member. The deformation device according to claim 16, characterized in that the object is a glass plate. An exposure apparatus for exposing a substrate, comprising:
a projection optical system that projects a pattern image of an original onto the substrate;
A deformation device according to any one of claims 1 to 21, which deforms an object;
Equipped with
13. An exposure apparatus, wherein the object deformed by the deformation device is an optical element included in the projection optical system. an exposure step of exposing a substrate using the exposure apparatus according to claim 22;
a processing step of processing the substrate exposed in the exposure step;
a manufacturing process for manufacturing an article from the substrate processed in the processing process;
A method for producing an article, comprising: