JP7408235B2 - processing equipment - Google Patents

Description

The present invention relates to a processing device that includes a holding table and a processing unit, and uses the processing unit to process a plate-shaped workpiece held by the holding table.

In the manufacturing process of device chips and electronic components used in electronic devices such as mobile phones and computers, plate-shaped workpieces such as semiconductor wafers and ceramic substrates are processed using various processing devices. For example, a plurality of dividing lines that intersect with each other are set on the surface of the wafer. For example, devices such as ICs (Integrated Circuits) and LSIs (Large Scale Integrations) are formed in each region defined by the dividing line on the surface of the wafer. Thereafter, the wafer is divided along the planned division lines to form individual device chips.

The division of a workpiece such as a wafer is performed by a processing device such as a cutting device having a cutting unit or a laser processing device having a laser processing unit. The processing device includes an imaging unit that captures an image of the workpiece. When processing a workpiece along a line to be divided by a processing unit such as a cutting unit or a laser processing unit, an image of the front side of the workpiece is captured in advance by an imaging unit. Then, the position and direction of the planned dividing line are detected, and the relative position and direction of the processing unit and the workpiece are adjusted (see Patent Document 1).

Further, the processing device includes a control unit including a computer or the like that controls each component. The control unit has a storage section in which information such as processing conditions for processing various workpieces is registered. The control unit reads the machining conditions registered in the storage section, controls the machining unit, etc. according to the machining conditions, and processes the workpiece along the planned dividing line.

Japanese Patent Application Publication No. 2005-85973

While processing various workpieces, a worker who operates a processing device may find precautions or problems specific to each workpiece. The worker then uses an information terminal or an information terminal installed along with the processing equipment so that he or other workers can refer to this information when processing the workpiece or similar workpieces later. The information is recorded on various media such as a recording notebook. When processing a workpiece with a processing device, the operator checks whether information useful for processing the workpiece is recorded on the medium, and operates the processing device after confirming the information. do.

Here, information such as precautions and problems that should be recorded may occur at specific points on the surface of the workpiece. In this case, the position information of the specific point needs to be recorded along with characters etc. indicating the content of the information. However, it is time-consuming to record position information on a medium external to the processing device. Furthermore, when attempting to capture an image of a specific point on the surface of a workpiece with an imaging unit in order to confirm the content of information recorded on the medium, the operator takes an image based on the positional information recorded on the medium. The unit and workpiece must be moved precisely, which takes time and effort.

The present invention has been made in view of such problems, and its purpose is to provide a processing device that can easily register information regarding a workpiece together with position information.

According to one aspect of the present invention, there is provided a processing apparatus for processing a plate-shaped workpiece, including a holding table for holding the workpiece, and a processing apparatus for processing the workpiece held by the holding table. unit, an imaging unit configured to take an image of the workpiece held on the holding table, a display unit, an input unit, and a control unit, the control unit configured to display the captured image captured by the imaging unit. a position selection screen display section that causes the display unit to display a position selection screen that allows the input unit to select a specific point of the workpiece displayed in the captured image; an information input column display section for displaying on the display unit an information input column in which character information can be entered in the input unit when the specific point of the workpiece is selected on the position selection screen; A processing device is provided that includes a storage unit that stores the input character information and coordinate information of the specific point on the workpiece in association with each other.

Preferably, the control unit includes an information selection screen that includes a schematic diagram representing the shape of the workpiece, and displays a mark arranged on the schematic diagram and indicating the position of the specific point based on the coordinate information. an information selection screen display section that causes the display unit to display an information selection screen display section; The information display unit further includes an information display section that causes the display unit to display character information.

Furthermore, preferably, when the landmark displayed on the information selection screen is selected by the input unit, the information display section selects the imaging unit and the holding unit based on the coordinate information stored in the storage section. The table is moved relatively, and an image taken by the imaging unit of the specific point on the workpiece is displayed on the display unit together with the text information.

Alternatively, preferably, the storage section associates and stores the character information, the coordinate information, and the captured image captured by the imaging unit, and the information display section displays the text information on the information selection screen. When the marked mark is selected by the input unit, the captured image stored in the storage section is displayed on the display unit together with the character information.

Alternatively, preferably, the control unit includes a first holding position registration section that registers the position of the workpiece on the holding table as a first holding position in the storage section, and a first holding position registration section that registers a position of the workpiece on the holding table as a first holding position; a second holding position registration unit for registering the position of the new workpiece in the holding table as a second holding position in the storage unit when the workpiece is held in the holding table; a positional deviation correction unit that calculates a positional deviation amount between the registered first holding position and the second holding position and corrects the coordinate information stored in the storage unit using the positional deviation amount; and the information display unit displays the image pickup unit and the holding unit based on the coordinate information corrected by the positional deviation correction unit when the landmark displayed on the information selection screen is selected by the input unit. The table is moved relatively, the imaging unit is caused to image the new workpiece at a position corresponding to the specific point on the workpiece, and an image of the new workpiece is displayed together with the text information. display on the unit.

Further, preferably, the input unit is a touch panel overlaid on the display unit.

In the processing apparatus according to one aspect of the present invention, an operator can record the position of a specific point as coordinate information simply by viewing a captured image displayed on a display unit and selecting a specific point. By simply inputting characters, character information can be associated with coordinate information and registered in the processing device. Further, the processing device can automatically move the workpiece etc. based on the coordinate information. The operator can check the captured image showing the specific point on the workpiece simply by selecting the information he or she wants to check. Therefore, the time and effort required to input, manage, and confirm information can be significantly reduced.

Therefore, the present invention provides a processing device that can easily register information regarding a workpiece together with position information.

FIG. 2 is a perspective view schematically showing a frame unit. FIG. 2 is a perspective view schematically showing a processing device. FIG. 3(A) is a cross-sectional view schematically showing a workpiece held on a holding table, and FIG. 3(B) is an image of the surface of the workpiece held on a holding table with an imaging unit. FIG. 3C is a cross-sectional view schematically showing how the imaging unit and the holding table are moved relative to each other. FIG. 2 is a block diagram illustrating the configuration of a control unit. FIG. 3 is a front view schematically showing a display unit that displays a position selection screen. FIG. 3 is a front view schematically showing a display unit that displays an information input field. FIG. 3 is a front view schematically showing a display unit that displays an information selection screen. FIG. 2 is a front view schematically showing a display unit that displays information.

Embodiments according to one aspect of the present invention will be described with reference to the accompanying drawings. The processing apparatus according to the present embodiment is, for example, a processing apparatus such as a cutting apparatus that cuts a workpiece or a laser processing apparatus that processes a workpiece with a laser beam. FIG. 1 is a perspective view schematically showing a frame unit 11 including a workpiece 1 processed by a processing device. First, the workpiece 1 will be explained.

The workpiece 1 is made of, for example, materials such as Si (silicon), SiC (silicon carbide), GaN (gallium nitride), GaAs (gallium arsenide), or other semiconductors, or sapphire, glass, quartz, etc. A substrate made of the same material. Examples of the glass include alkali glass, non-alkali glass, soda lime glass, lead glass, borosilicate glass, and quartz glass.

A plurality of planned dividing lines 3 that intersect with each other are set on the surface 1a side of the workpiece 1. A device 5 such as an IC (Integrated Circuit) or an LSI (Large Scale Integration) is formed in each area partitioned by the planned dividing line 3 .

Note that the workpiece 1 may be other than a disk-shaped wafer, and there are no restrictions on the material, shape, structure, etc. of the workpiece 1. For example, a substrate made of materials such as ceramics, resin, metal, etc. can also be used as the workpiece 1. Furthermore, there are no restrictions on the type, quantity, arrangement, etc. of the devices 5. The workpiece 1 on which a plurality of devices 5 are formed on the front surface 1a is thinned by grinding from the rear surface 1b side, and the workpiece 1 is divided along the dividing lines 3 to obtain individual device chips.

Before being carried into a processing device and processed, the workpiece 1 is integrated with an adhesive tape 7 having a base material layer and an adhesive layer, and an annular frame 9 made of a material such as metal to form a frame unit. It becomes 11. In the frame unit 11, an adhesive tape 7 is attached to the annular frame 9 so as to close the opening of the annular frame 9, and the adhesive tape 7 exposed at the opening of the annular frame 9 is attached to the back surface 1b of the workpiece 1. It is pasted. That is, the workpiece 1 is supported by the annular frame 9 via the adhesive tape 7.

Next, a processing apparatus according to this embodiment will be explained. The processing device processes and divides the workpiece 1 along the dividing line 3. For example, the processing device is a cutting device including a cutting unit provided with an annular cutting blade as a processing unit. Alternatively, it is a laser processing apparatus including a laser processing unit that focuses a laser beam on the workpiece 1 along the dividing line 3. Hereinafter, a case where the processing device according to the present embodiment is a cutting device will be described as an example, but the processing device according to the present embodiment is not limited to this.

FIG. 2 is a perspective view schematically showing the cutting device (processing device) 2. As shown in FIG. The cutting device 2 includes a base 4 that supports each component. At the upper center of the base 4, there is an X-axis moving table 6, an X-axis moving mechanism for moving the X-axis moving table 6 in the X-axis direction (processing feed direction), and a drainage channel that covers the X-axis moving mechanism. 20 are provided. The X-axis direction movement mechanism includes a pair of X-axis guide rails 12 parallel to the X-axis direction, and an X-axis movement table 6 is slidably attached to the X-axis guide rails 12.

A nut portion (not shown) is provided on the lower surface side of the X-axis moving table 6, and an X-axis ball screw 14 parallel to the X-axis guide rail 12 is screwed into this nut portion. An X-axis pulse motor 16 is connected to one end of the X-axis ball screw 14 . When the X-axis ball screw 14 is rotated by the X-axis pulse motor 16, the X-axis moving table 6 moves in the X-axis direction along the X-axis guide rail 12.

A holding table 8 for sucking and holding the workpiece 1 is provided on the X-axis moving table 6. The holding table 8 is connected to a rotational drive source (not shown) such as a motor, and is rotatable around a rotation axis perpendicular to the upper surface of the holding table 8. Further, the holding table 8 is sent in the X-axis direction by the above-mentioned X-axis direction movement mechanism.

A disk-shaped porous member corresponding to the diameter of the workpiece 1 is exposed at the upper part of the holding table 8, and the upper surface of the porous member serves as a holding surface 8a that sucks and holds the workpiece 1. Become. A suction source (not shown) is connected to this porous member via a suction path (not shown) formed inside the holding table 8. A clamp 10 for fixing the annular frame 9 of the frame unit 11 is disposed around the holding surface 8a.

FIG. 3(A) is a cross-sectional view schematically showing the workpiece 1 held by the holding table 8. As shown in FIG. The annular frame 9 of the frame unit 11 is held by a clamp 10. The workpiece 1 is then held by suction on the holding table 8 via the adhesive tape 7.

A support structure 22 that supports two cutting units 18 that cut the workpiece 1 is arranged on the upper surface of the base 4 so as to straddle the X-axis direction movement mechanism. A cutting unit moving mechanism is provided at the upper front surface of the support structure 22 to move the two cutting units 18 in the Y-axis direction (index feed direction) and the Z-axis direction, respectively.

The cutting unit moving mechanism includes a pair of Y-axis guide rails 24 arranged in front of the support structure 22 and parallel to the Y-axis direction. Two Y-axis moving plates 26 corresponding to each of the two cutting units 18 are slidably attached to the Y-axis guide rail 24. A nut portion (not shown) is provided on the back side of each Y-axis moving plate 26, and a Y-axis ball screw 28 parallel to the corresponding Y-axis guide rail 24 is screwed into this nut portion. are combined.

A Y-axis pulse motor 28a is connected to one end of each Y-axis ball screw 28. When the Y-axis ball screw 28 is rotated by the Y-axis pulse motor 28a, the corresponding Y-axis moving plate 26 moves in the Y-axis direction along the Y-axis guide rail 24. A pair of Z-axis guide rails 30 parallel to the Z-axis direction are provided on the front surface (front surface) of the Y-axis moving plate 26, respectively. A Z-axis moving plate 32 is slidably attached to each Z-axis guide rail 30.

A nut portion (not shown) is provided on the back side (rear side) of the Z-axis moving plate 32, and a Z-axis ball screw 34 parallel to the Z-axis guide rail 30 is screwed into this nut portion. ing. A Z-axis pulse motor 36 is connected to one end of the Z-axis ball screw 34 . When the Z-axis ball screw 34 is rotated by the Z-axis pulse motor 36, the Z-axis moving plate 32 moves in the Z-axis direction (cutting feed direction) along the Z-axis guide rail 30.

At the bottom of each of the two Z-axis moving plates 32, there is a cutting unit (processing unit) 18 for cutting (processing) the workpiece 1 held by the holding table 8, and a cutting unit (processing unit) 18 for cutting (processing) the workpiece 1 held by the holding table 8. 1 is fixed. When the Y-axis moving plate 26 is moved in the Y-axis direction, the cutting unit 18 and the imaging unit 38 are moved in the Y-axis direction (index feed direction). When the Z-axis moving plate 32 is moved in the Z-axis direction, the cutting unit 18 and the imaging unit 38 are moved in the Z-axis direction (infeeding direction).

The cutting unit 18 includes a spindle 18a (see FIG. 3(B)) that constitutes a rotation axis parallel to the Y-axis direction. An annular cutting blade 18b (see FIG. 3(B)) is attached to the tip of the spindle 18a. A rotational drive source (not shown) such as a motor is connected to the other end of the spindle 18a. When the spindle 18a is rotated using the rotational drive source, the cutting blade 18b attached to the tip of the spindle 18a rotates.

FIG. 3(B) includes a side view schematically showing the cutting blade 18b. The cutting blade 18b has, for example, an annular base 18c and an annular cutting edge 18d fixed to the outer periphery of the base 18c. A substantially circular mounting hole passing through the base 18c is provided in the center of the base 18c, and when the cutting blade 18b is mounted on the cutting unit 18, the spindle 18a is inserted through the mounting hole. be done.

The cutting edge 18d of the cutting blade 18b includes a binding material made of metal, resin, or the like, and a plurality of diamond abrasive grains dispersed and fixed to the binding material, and is also called a grindstone portion. Diamond abrasive grains are exposed from the binding material, and when the cutting blade 18b is rotated and cut into the workpiece 1, the exposed diamond abrasive grains come into contact with the workpiece 1 and cut into the workpiece 1. is cut.

When cutting the workpiece 1 held by the holding table 8, the cutting device 2 first images the surface 1a of the workpiece 1 with the imaging unit 38, and detects the position and orientation of the planned dividing line 3. do. Then, the holding table 8 is rotated to align the planned dividing line 3 with the X-axis direction (processing feed direction). Thereafter, the cutting blade 18b is positioned above the extension line of the planned dividing line 3. Then, the cutting unit 18 is lowered along the Z-axis direction to position the cutting blade 18b at a predetermined height position.

Thereafter, the X-axis direction movement mechanism is operated to move the holding table 8 in the processing feed direction, and the cutting blade 18b rotating at high speed is cut into the workpiece 1 to cut the workpiece 1. After cutting the workpiece 1 with the cutting blade 18b along one dividing line 3, the cutting unit 18 is moved in the indexing and feeding direction, and the workpiece 1 is similarly cut along another adjacent dividing line 3. to cut.

After cutting the workpiece 1 along all the dividing lines 3 along one direction, the holding table 8 is rotated to cut the workpiece 1 along the dividing lines 3 along the other direction. do. Then, when the workpiece 1 is cut along all of the planned division lines 3 of the workpiece 1, cutting of the workpiece 1 by the cutting device 2 is completed.

The cutting device 2 further includes a display unit that displays the status of the cutting device 2, an operation screen, a warning screen, etc., and an input unit that inputs various commands to the cutting device 2. The display unit is, for example, a liquid crystal display. Further, the input unit is, for example, a keyboard and a mouse.

Furthermore, the input unit may be a touch panel overlaid on the display unit. In this case, the cutting device 2 will be equipped with a touch panel display 40 in which a display unit and an input unit are integrated. A worker using the cutting device 2 can operate the cutting device 2 using a touch panel, and can input information such as processing conditions into the cutting device 2. Hereinafter, a case in which the input unit is a touch panel stacked on a display unit will be described as an example, but the processing apparatus according to the present embodiment is not limited to this.

The cutting device 2 further includes a control unit 42. The control unit 42 has a function of controlling each component of the cutting device 2, such as the cutting unit 18, the holding table 8, each moving mechanism, the imaging unit 38, and the display unit. The control unit 42 controls each component of the cutting device 2 according to predetermined processing conditions to process the workpiece 1.

The control unit 42 is configured by a computer including, for example, a processing device such as a CPU (Central Processing Unit), a main storage device such as a DRAM (Dynamic Random Access Memory), and an auxiliary storage device such as a flash memory. The functions of the control unit 42 are realized by operating the processing device and the like according to software stored in the auxiliary storage device.

In the cutting device 2, workpieces 1 of the same type are successively carried in, processed, and carried out. Here, the operator operating the cutting device 2 may find precautions or problems specific to the workpiece 1 when processing the workpiece 1.

At this time, the worker uses an information terminal or a recording notebook installed along with the cutting device 2 so that he or other workers can refer to this information when processing the same type of workpiece 1 later. The information is recorded on various media such as. When processing the workpiece 1 with the cutting device 2, the operator checks whether information useful for processing the workpiece 1 is recorded on the medium, and checks the information before cutting. Operate device 2.

Here, information to be recorded such as precautions and problems may occur at a specific point on the surface 1a of the workpiece 1. In this case, positional information indicating the position of the specific point on the workpiece 1 needs to be recorded along with characters etc. that explain the content of the information. However, it takes time and effort to accurately record position information on a medium outside the cutting device 2.

Furthermore, in order to confirm the content of the information recorded on the medium on the workpiece 1, it is necessary to image a specific point on the surface 1a of the workpiece 1 with the imaging unit 38. Therefore, the operator must operate the cutting device 2 to precisely move the imaging unit 38 and the workpiece 1 based on the position information recorded on the medium, which also takes time and effort.

Therefore, in the cutting device 2, which is a processing device according to the present embodiment, regarding a specific point where information to be recorded is generated on the surface 1a of the workpiece 1, coordinate information indicating the position and characters expressing the content of the information are provided. Information can be registered in the control unit 42. The cutting device 2 can move the holding table 8 and the imaging unit 38 based on the registered coordinate information, and can automatically display the captured image of the specific point on the display unit. The configuration of the control unit 42 for realizing such functions will be described below.

FIG. 4 is a block diagram schematically showing the configuration of the control unit 42. As shown in FIG. The functions of each part constituting the control unit 42 are realized, for example, by software on hardware such as a computer. The control unit 42 includes a storage section 44 that stores various information, software, and the like.

Next, a function of storing information regarding a specific point on the surface 1a of the workpiece 1 in the storage section 44 of the control unit 42 will be explained. First, the control unit 42 causes the display unit to display a position selection screen in which a specific point on the workpiece 1 can be selected using the input unit. That is, the control unit 42 includes a position selection screen display section 46 that causes the display unit to display a position selection screen.

FIG. 5 is a front view schematically showing the position selection screen 60 displayed on the touch panel display 40 functioning as a display unit. The position selection screen 60 includes, for example, a screen description field 62 indicating that the screen displayed on the touch panel display 40 is the position selection screen 60. Further, the position selection screen 60 may include an interface image 70 such as buttons used when inputting various commands to the control unit 42 using a touch panel, for example.

Further, the position selection screen 60 includes a captured image 64 captured and acquired by the imaging unit 38. The captured image 64 shows an enlarged image of the surface 1a of the workpiece 1. For example, the captured image 64 shows the dividing line 3 on the surface 1a of the workpiece 1, the device 5, and the like.

First, an operator using the cutting device 2 operates the cutting device 2 to relatively move the holding table 8 and the imaging unit 38 so that a specific point where information to be stored is shown in the captured image 64. move it. FIG. 3B includes a side view schematically showing the holding table 8 and the imaging unit 38 that have been moved so that the specific point on the surface 1a of the workpiece 1 is captured in the captured image 64. .

Next, the operator selects the specific point appearing in the captured image 64. For example, by touching the specific point in the captured image 64 with a touch panel, the specific point is selected. At this time, the control unit 42 controls the position of the particular point on the surface 1a of the workpiece 1 based on the position of the particular point on the captured image 64 and the positional relationship between the holding table 8 and the imaging unit 38. Create coordinate information.

When the specific point of the workpiece 1 is selected on the position selection screen 60 displayed on the display unit, the control unit 42 displays on the display unit an information input field in which character information can be entered using the input unit. The information input column display section 48 is provided. FIG. 6 is a front view schematically showing an information input screen 66 displayed on the touch panel display 40 functioning as a display unit.

The information input screen 66 is formed, for example, by displaying an information input field 68 overlapping the position selection screen 60. The screen description column 62 included in the information input screen 66 displays, for example, that the screen displayed on the touch panel display 40 is the information input screen 66. The operator operating the cutting device 2 uses the input unit to input text information into the information input field 68 that describes the content of the information to be stored for the particular point.

For example, an interface image 70 for inputting characters into the information input field 68 using a touch panel may be displayed on the information input screen 66, and the operator inputs character information into the information input field 68 using the touch panel. . Alternatively, a keyboard may be connected to the cutting device 2 as an input unit, and the operator may input text information into the information input field 68 using the keyboard. Here, the character information includes numbers, symbols, etc. in addition to characters.

Note that when performing character input, the operator does not need to select and type characters one by one. For example, if there is a character string that is input relatively frequently as information regarding the specific point, the interface image 70 may include a shortcut input button that allows the operator to input the character string with a single touch. may use the abbreviated input button for input.

Here, there is no particular limitation on the content of the character information input into the information input field 68. For example, when registering a key pattern for pattern recognition in the control unit 42, if it is not desired to set the device 5 formed at the specific point as the key pattern, character information indicating this is inputted. It is entered in column 68.

Furthermore, for example, there is a TEG (Test Element Group) formed on the planned dividing line 3 at the specific point, and there is a machining mark formed when the workpiece 1 is processed along the planned dividing line 3. If width testing is not to be performed at the particular point, textual information indicating this is entered. Furthermore, for example, if the specific point is not suitable for evaluating chipping, which is formed on the outline of machining marks formed on the workpiece 1 along the planned dividing line 3, textual information indicating this is displayed. is input.

When character information is input in the information input field 68, the control unit 42 associates the character information input in the information input field 68 with the coordinate information of the specific point on the workpiece 1, and stores the information in the storage section. 44. Therefore, the operator does not need to separately input information regarding the position of the specific point on the workpiece 1.

For example, when a worker expresses and records information regarding the position of a particular point using words, pictures, etc., it takes considerable time and effort. Furthermore, it is not easy to accurately record information regarding location. On the other hand, in the processing apparatus according to this embodiment, the operator can generate coordinate information of a specific point by simply looking at the captured image 64 and specifying the specific point. Therefore, character information regarding the specific point can be recorded extremely easily and accurately in association with the coordinate information.

Next, the function of displaying the information stored in the storage section 44 on the display unit and the configuration of the control unit 42 that realizes this function will be explained. First, the cutting device 2 causes the display unit to display an information selection screen from which the operator can select information to be displayed on the display unit. The control unit 42 includes an information selection screen display section 50 that causes the display unit to display the information selection screen.

FIG. 7 is a front view schematically showing an information selection screen 72 displayed on the touch panel display 40 functioning as a display unit. The information selection screen 72 includes a screen explanation column 62 and a schematic diagram 74 representing the shape of the workpiece 1, and a mark 76 indicating the position of the specific point is displayed on the schematic diagram 74.

Here, the marks 76 displayed superimposed on the schematic diagram 74 are generated by the number of pieces of coordinate information stored in the storage unit 44, and are arranged on the schematic diagram 74 based on the respective pieces of coordinate information. FIG. 7 illustrates a case where three marks 76 are displayed on the schematic diagram 74. In this case, it can be seen that there are three specific points at which information is stored in the storage unit 44. It can also be seen that information related to the specific point indicated by each mark 76 is stored in the storage unit 44.

Note that the mark 76 may be displayed on the schematic diagram 74 in a color or shape depending on the type of text information associated with the coordinate information. Further, the information selection screen 72 may display an information type selection button that displays only the mark 76 corresponding to the text information of the selected type on the schematic diagram 74. The information selection screen display section 50 displays only the marks 76 that correspond to a specific type on the schematic diagram 74 when the information type selection button is used by the operator.

When the mark 76 displayed on the information selection screen 72 is selected by the input unit, the control unit 42 causes the character information stored in the storage unit 44 to be associated with the specific point corresponding to the mark 76. The information display unit 52 further includes an information display unit 52 that displays the text information on the display unit. FIG. 8 is a front view schematically showing the information display screen 78 displayed on the touch panel display 40 functioning as a display unit.

The information display screen 78 includes, for example, a schematic diagram 74 of the workpiece 1 in which the position of the selected specific point is indicated by the position of the mark 76, a text information display field 80, and a screen explanation field 62. included. The information display unit 52 reads the text information associated with the specific point from the storage unit 44 and displays the text information in the text information display field 80. In this way, the operator using the cutting device 2 can extremely easily confirm the contents of the recorded text information by simply selecting the mark 76 displayed over the schematic diagram 74 on the information selection screen 72.

Furthermore, when the mark 76 displayed on the information selection screen 72 is selected by the input unit, the information display section 52 displays the image 64 captured by the imaging unit 38 of the specific point on the workpiece 1 as the character. It may be displayed on the display unit together with the information. That is, the information display screen 78 may include the captured image 64.

The information display unit 52 relatively moves the imaging unit 38 and the holding table 8 based on the coordinate information of the specific point stored in the storage unit 44, and positions the specific point below the imaging unit 38. . FIG. 3 includes a side view schematically showing how the imaging unit 38 and the holding table 8 move relative to each other based on the coordinate information of the specific point.

In this case, the operator using the cutting device 2 can not only check the textual information regarding the specific point, but also the captured image 64 that shows the specific point, so the operator can see the state of the specific point in more detail. I can understand it. At this time, since the imaging unit 38 and the holding table 8 are automatically moved, the operator does not need to perform an operation to move the imaging unit 38 and the holding table 8. Moreover, there is no possibility that the operator will make a mistake in the operation and image a position other than the specific point.

In addition, even after the workpiece 1 is carried out from the holding table 8 after the processing of the workpiece 1 is completed, the cutting device 2 continues to use the specific information of the workpiece 1 stored in the storage unit 44. It may also include a function that allows you to check information regarding points. In this case, for example, the storage unit 44 stores the captured image 64 captured by the imaging unit 38 so that the captured image 64 showing the specific point can be checked even after the workpiece 1 is carried out from the holding table 8. may be stored.

That is, the storage unit 44 may store the text information regarding the specific point, the coordinate information, and the captured image 64 of the workpiece 1 captured by the imaging unit 38 in association with each other. good. Note that, for example, when the specific point of the workpiece 1 is selected on the position selection screen 60 displayed on the display unit, the captured image 64 included in the position selection screen 60 is stored in the storage unit 44. be remembered.

Then, when the mark 76 displayed on the information selection screen 72 is selected by the input unit, the information display unit 52 reads the captured image 64 stored in the storage unit 44 and displays it on the display unit together with the character information. let In this case, even after the workpiece 1 is removed from the holding table 8, the operator can check the captured image 64 showing the specific point together with the character information registered in the storage unit 44.

Further, when the captured image 64 showing the workpiece 1 before being processed is stored in the storage unit 44, the captured image 64 is useful even before the workpiece 1 is carried out from the holding table 8. . For example, it is also possible to compare an image captured by the imaging unit 38 of the processed workpiece 1 with a captured image 64 of the processed workpiece 1 stored in the storage unit 44 before processing.

By the way, in the cutting device 2, a plurality of workpieces 1 of the same type are continuously machined one after another. Then, in a new workpiece different from the workpiece 1 that was used to register the character information and coordinate information regarding the specific point in the storage unit 44, the character information regarding the specific point and the coordinate information in the new workpiece are stored. You may want to check the status of a specific point.

In this case, when the information selection screen display section 50 of the control unit 42 displays the information selection screen 72 on the display unit and the operator selects the mark 76 on the schematic diagram 74, the coordinate information registered in the storage section 44 is displayed. It is conceivable to move the imaging unit 38 and the like based on this. However, the position of the workpiece 1 on the holding surface 8a of the holding table 8 when the coordinate information is acquired is not necessarily the same as the position of the new workpiece on the holding surface 8a.

To explain in more detail, in the cutting device 2, the holding table 8, the cutting unit 18, and the imaging unit 38 are relatively moved by the X-axis direction movement mechanism and the cutting unit movement mechanism. The control unit 42 controls the relative positional relationship between the holding table 8, the imaging unit 38, etc., so that the imaging and processing of the workpiece 1 is carried out in a predetermined manner. Move object 1.

Therefore, for practical purposes, when registering the coordinate information of the specific point on the workpiece 1, the positional relationship between the holding table 8 and the imaging unit 38 etc. is stored in the storage unit 44 as the coordinate information. There may be cases. Note that as long as the position of the workpiece 1 on the holding surface 8a of the holding table 8 does not change, there is no particular problem even if the positional relationship is stored in the storage unit 44 as the coordinate information.

However, a problem may arise when a new workpiece is held on the holding table 8 instead of the workpiece 1. That is, even if the relative positions of the holding table 8 that holds the new workpiece and the imaging unit 38 are adjusted based on the coordinate information registered in the storage unit 44, a specific point on the new workpiece is not fixed. There are cases where it cannot be positioned below the imaging unit 38. This is because the fixing positions of the holding table 8 on the holding surface 8a of the workpiece 1 and the new workpiece are not necessarily completely the same.

Therefore, the cutting device 2, which is the processing device according to the present embodiment, has a point registered in the storage unit 44 in order to position the specific point on the new workpiece held on the holding table 8 below the imaging unit 38. Correct the coordinate information. That is, the amount of positional deviation between the fixed positions on the holding surface 8a of the holding table 8 between the workpiece 1 and the new workpiece is calculated, the coordinate information is corrected by the amount of positional deviation, and the coordinate information is corrected based on the corrected positional information. The holding table 8 and the imaging unit 38 are moved relatively.

The control unit 42 includes a first holding position registration section 56 that registers the position of the workpiece 1 on the holding table 8 in the storage section 44 as a first holding position. Further, when a new workpiece of the same type as the workpiece 1 is held on the holding table 8, the control unit 42 stores the position of the new workpiece on the holding table 8 as a second holding position in the storage unit 44. It has a second holding position registration section 58 for registration.

Here, the positions of the workpiece 1 and the new workpiece on the holding table 8 are detected by the imaging unit 38, for example, in order to process the workpiece 1 etc. along the dividing line 3. It is preferable to carry out this process when detecting the position and orientation of the planned dividing line 3 by capturing an image of the dividing line 3.

The control unit 42 calculates the positional deviation amount between the first holding position and the second holding position registered in the storage unit 44, and corrects the coordinate information stored in the storage unit 44 using the positional deviation amount. It further includes a positional deviation correction section 54 that performs the following. Then, when the mark 76 displayed on the information selection screen 72 is selected by the input unit, the information display section 52 displays the imaging unit 38 and the holding table 8 based on the coordinate information corrected by the positional deviation correction section 54. Move relatively.

That is, the information display section 52 causes the imaging unit 38 to image the new workpiece at a position corresponding to the specific point on the workpiece 1. Then, the information display section 52 generates an information display screen 78 by displaying an image of the new workpiece together with the character information regarding the specific point on the display unit. In this way, if the coordinate information stored in the storage unit 44 can be corrected, no matter which workpiece 1 is held on the holding table 8 in the process of continuously processing a plurality of workpieces 1, A captured image 64 showing the specific point can be displayed on the display unit.

Note that the present invention is not limited to the description of the embodiments described above, and can be implemented with various modifications. For example, in the above embodiment, a case has been described in which text information and coordinate information regarding a specific point on the workpiece 1 are displayed on the touch panel display 40 of the processing device (cutting device 2). Such processing equipment is not limited to this. That is, various types of information stored in the storage unit 44 may be displayed on a display device external to the processing device.

For example, the information stored in the storage unit 44 may be extracted and transferred to a computer or the like external to the processing device via wire, wireless, or storage medium, and displayed on a monitor of the computer or the like. In this case, the monitor becomes a display unit.

In addition, the structure, method, etc. according to the above embodiments can be modified and implemented as appropriate without departing from the scope of the objective of the present invention.

1 Workpiece 1a Front side 1b Back side 3 Planned dividing line 5 Device 7 Adhesive tape 9 Annular frame 11 Frame unit 2 Cutting device (processing device)
4 Base 6 X-axis moving table 8 Holding table 8a Holding surface 10 Clamp 12, 24, 30 Guide rail 14, 28, 34 Ball screw 16, 28a, 36 Pulse motor 18 Cutting unit (processing unit)
18a spindle 18b cutting blade 18c base 18d cutting edge 20 drainage channel 22 support structure 26, 32 moving plate 38 imaging unit (camera)
40 Display with touch panel 42 Control unit 44 Storage section 46 Position selection screen display section 48 Information input field display section 50 Information selection screen display section 52 Information display section 54 Position deviation correction section 56 First holding position registration section 58 Second holding section Location registration section 60 Location selection screen 62 Screen explanation field 64 Captured image 66 Information input screen 68 Information input field 70 Interface image 72 Information selection screen 74 Schematic diagram 76 Landmark 78 Information display screen 80 Text information display field

Claims (6)

A processing device for processing a plate-shaped workpiece,
a holding table that holds the workpiece;
a processing unit that processes the workpiece held by the holding table;
an imaging unit that images the workpiece held by the holding table;
a display unit;
an input unit,
comprising a control unit;
The control unit includes:
a position selection screen display section that causes the display unit to display a position selection screen that includes a captured image captured by the imaging unit and allows the input unit to select a specific point of the workpiece displayed in the captured image; ,
an information input field display that causes the display unit to display an information input field in which character information can be entered with the input unit when the specific point of the workpiece is selected on the position selection screen displayed on the display unit; Department and
A processing device comprising: a storage unit that associates and stores the character information input in the information input field and coordinate information of the specific point on the workpiece. The control unit includes:
Information that causes the display unit to display an information selection screen that includes a schematic diagram representing the shape of the workpiece and displays a mark arranged on the schematic diagram and indicating the position of the specific point based on the coordinate information. a selection screen display section;
an information display unit that causes the display unit to display the character information stored in the storage unit in association with the specific point when the landmark displayed on the information selection screen is selected by the input unit; The processing apparatus according to claim 1, further comprising: a. The processing device according to claim 2,
The information display section relatively displays the imaging unit and the holding table based on the coordinate information stored in the storage section when the landmark displayed on the information selection screen is selected using the input unit. A processing apparatus characterized by moving the workpiece and displaying an image taken by the imaging unit of the specific point of the workpiece on the display unit together with the text information. The processing device according to claim 2,
The storage unit stores the character information, the coordinate information, and the captured image captured by the imaging unit in association with each other,
The information display unit is characterized in that when the landmark displayed on the information selection screen is selected by the input unit, the captured image stored in the storage unit is displayed on the display unit together with the text information. processing equipment. The processing device according to claim 2,
The control unit includes:
a first holding position registration unit that registers the position of the workpiece on the holding table as a first holding position in the storage unit;
a second holding position in which, when a new workpiece of the same type as the workpiece is held on the holding table, the position of the new workpiece on the holding table is registered in the storage unit as a second holding position; Registration department and
a positional deviation correction unit that calculates a positional deviation amount between the first holding position and the second holding position registered in the storage unit, and corrects the coordinate information stored in the storage unit by the positional deviation amount; and further has
When the landmark displayed on the information selection screen is selected by the input unit, the information display section relative to the imaging unit and the holding table based on the coordinate information corrected by the positional deviation correction section. moving the new workpiece, causing the imaging unit to image the new workpiece at a position corresponding to the specific point on the workpiece, and displaying an image of the new workpiece together with the text information on the display unit. A processing device characterized by: 6. The processing apparatus according to claim 1, wherein the input unit is a touch panel overlaid on the display unit.

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