JP7372998B2 - Braking unit and tower lift - Google Patents

Description

TECHNICAL FIELD The present invention relates to a braking unit and a tower lift.

Generally, a production line in a semiconductor or display manufacturing factory is composed of multiple layers. Equipment for performing processes such as deposition, exposure, etching, ion implantation, and cleaning may be installed at each layer of a semiconductor manufacturing line. The equipment arranged in each layer can repeatedly perform a series of unit processes on a semiconductor wafer used as a semiconductor substrate or a glass substrate used as a display substrate.

Meanwhile, the transfer of articles between each layer of a semiconductor manufacturing line, ie, the transfer of articles such as semiconductor wafers or glass substrates, can be performed by a tower lift installed vertically through each layer.

A typical tower lift has a carriage module for transporting articles and a rail module for vertically guiding the carriage module. A drive belt, such as a timing belt, is installed on the rail module to move the carriage module up and down. The timing belt is coupled to the carriage module and moves the carriage module in the vertical direction. However, if the timing belt is driven in such a typical tower lift, particles may be generated. For example, a timing belt is driven by friction with a pulley, and particles may be generated as the timing belt and pulley rub against each other.

To solve this problem, a method may be considered in which the carriage module moves along the rail module using a magnetic levitation method. The carriage module can be moved vertically without contacting the rail module and suspended in the air by power generated by a linear motor installed in the carriage module or the rail module. In the case of a tower lift in which a carriage module moves along a rail module using a magnetic levitation method, there is no description on the rail module that physically connects the carriage module, such as a timing belt or rope. If the electricity that drives the tower lift is cut off, the tower lift carriage module will fall (free fall).

Korean Patent Publication No. 10-2007-0106754

An object of the present invention is to provide a braking unit capable of braking the free fall of a moving body when the power driving the magnetically levitated vertical drive module is interrupted.

Another object of the present invention is to provide a braking unit and a tower lift capable of braking the free fall of a carriage module when power for driving the tower lift is interrupted.

The object of the present invention is not limited to this, and other objects not mentioned will be clearly understood by a person having ordinary knowledge in the technical field to which the present invention pertains from the following description. It will be possible.

The present invention provides a tower lift. The tower lift includes a vertically extending rail module and a carriage module movable in a magnetic levitation manner along the rail module, and the carriage module is disconnected from electric power for driving the tower lift. For example, a braking unit may be installed to brake the carriage module from falling.

According to one embodiment, the braking unit includes a braking body that is selectively brought into contact with the rail module to brake the fall of the carriage module, and a braking body that holds the braking body only when the electric power is applied. The brake system may include a holding member that selectively contacts the brake body and the rail module.

According to one embodiment, the brake body may be configured to be movable in a direction oblique to the vertical direction, and may include a brake pad provided on a surface facing the rail module.

According to one embodiment, the braking unit may further include a tensioning member that moves the braking body in an upwardly inclined direction to bring the braking body into contact with the rail module when the power is interrupted.

According to an embodiment, the holding member may further include an electromagnet that generates a magnetic force when the power is applied to hold the brake body such that the brake body is separated from the rail module. .

According to one embodiment, the braking unit further includes a base body whose relative position with respect to the carriage module is fixed, and one end of the tension member is fixed to a base body locking part formed on the base body, The other end of the tension member may be fixed to a brake body locking part formed on the brake body.

According to an embodiment, the braking unit moves the braking body in a downwardly inclined direction to bring the braking body back into its original state after the braking body is moved in an upwardly inclined direction and contacts the rail module. The device may further include a restoring member for positioning.

According to one embodiment, the brake body is rotatable about a rotation axis that is horizontal to the ground, and has an asymmetric cam shape with respect to the rotation axis, and when the brake body is rotated, Serrations may be formed on the outer diameter of the brake body that contacts the module.

According to one embodiment, the braking unit may further include a tensioning member that rotates the braking body in a first direction to bring the braking body into contact with the rail module when the power is interrupted.

According to one embodiment, the brake unit further includes a base body in which an arc-shaped guide groove is formed around the rotation axis, and the brake body includes a guide protrusion that is inserted into the guide groove. one end of the tension member may be fixed to a base body locking part formed on the base body, and the other end of the tension member may be fixed to the guide protrusion.

According to one embodiment, the holding member includes a holding head and a solenoid for linearly moving the holding head, and when the electric power is applied, the holding head holds the guide protrusion and the braking body Rotation in the first direction can be prevented.

According to an embodiment, the braking unit rotates the braking body in a second direction opposite to the first direction after the braking body is rotated in the first direction and comes into contact with the rail module. The brake body may further include a restoring member that rotates to return the brake body to its original position.

According to one embodiment, the braking unit includes a first braking unit and a second braking unit, and the first braking body, which is the braking body of the first braking unit, is arranged with respect to the vertical direction. The second braking body, which is the braking body of the second braking unit, is configured to be movable in an inclined direction and includes a braking pad provided on a surface facing the rail module. The cam is rotatable about the rotation axis and has an asymmetrical cam shape with respect to the rotation axis, and the outer diameter of the brake body that contacts the rail module when the brake body is rotated has a sawtooth shape. I can do it.

According to one embodiment, the first braking unit may be installed at a higher position than the second braking unit.

The invention also provides a braking unit. A braking unit is installed on a movable body movable in a magnetic levitation manner along a rail module extending in the vertical direction, and brakes an emergency fall of the movable body when power for moving the movable body is interrupted. is selectively contacted with the rail module to brake the falling of the moving body, is configured to be movable in a direction inclined with respect to the vertical direction, and is provided on a surface facing the rail module. a brake body including a pad; holding the brake body to selectively contact the brake body and the rail module only when the power is applied; and a magnetic force when the power is applied; a holding member including an electromagnet for generating electricity and holding the brake body so that the brake body is separated from the rail module, and moving the brake body in an upwardly inclined direction when the power is interrupted to apply the brake A tension member may be included to bring the body into contact with the rail module.

According to an embodiment, the invention further includes a base body fixed to the movable body, one end of the tension member is fixed to a base body locking part formed on the base body, and the other end of the tension member is fixed to the base body locking part formed on the base body. The brake body may be fixed to a brake body locking portion formed on the brake body.

According to an embodiment, after the brake body is moved in an upwardly tilted direction and comes into contact with the rail module, a restoring member is provided that moves the brake body in a downwardly tilted direction to return the brake body to its original position. It can further include:

According to one embodiment, the mobile body is installed in a mobile body provided to be movable by magnetic levitation along a vertically extending rail module, and when the power for moving the mobile body is interrupted, an emergency of the mobile body is provided. A braking unit that brakes falling is selectively contacted with the rail module to brake the falling of the moving body, and is rotatable about a rotational axis that is horizontal to the ground, and is asymmetrical with respect to the rotational axis. a brake body having a cam shape and having saw teeth formed on an outer diameter of the brake body that is rotated in a first direction and comes into contact with the rail module; and a brake body that holds the brake body only when the power is applied. ) a holding member including a solenoid that selectively contacts the brake body and the rail module, but prevents the brake body from being rotated in the first direction when the power is applied; The tension member may include a tensioning member that rotates the brake body in the first direction to bring the sawtooth into contact with the rail module when power is interrupted.

According to an embodiment, the brake body further includes a base body in which an arc-shaped guide groove is formed around the rotation axis, and the brake body is formed with a guide protrusion that is inserted into the guide groove to extend the tension. One end of the member may be fixed to a base body locking part formed on the base body, and the other end of the tension member may be fixed to the guide protrusion.

According to an embodiment, after the brake body is rotated in the first direction and contacted with the rail module, the brake body is rotated in a second direction opposite to the first direction to apply the brake. The device may further include a restoring member for repositioning the body.

According to one embodiment of the present invention, the free fall of the moving object can be braked when the power driving the magnetically levitated vertical drive module is interrupted.

Also, according to one embodiment of the present invention, free fall of the carriage module can be braked if the power driving the tower lift is interrupted.

The effects of the present invention are not limited to the above-mentioned effects, and the effects not mentioned will be clearly understood by a person having ordinary knowledge in the technical field to which the present invention pertains from this specification and the attached drawings. be able to be understood.

1 is a diagram schematically showing a semiconductor manufacturing line in which a tower lift according to an embodiment of the present invention is installed; 1 is a perspective view showing a rail module and a carriage module of a tower lift according to an embodiment of the present invention; FIG. 1 is a plan cross-sectional view showing a rail module and a carriage module of a tower lift according to an embodiment of the present invention. 1 is a diagram showing a braking unit according to an embodiment of the present invention. 5 is a diagram showing how the braking unit of FIG. 4 brakes a carriage module falling along a rail module. 5 is a diagram showing the brake body of FIG. 4 being moved to its original position by a restoring member; FIG. FIG. 6 is a perspective view showing a rail module and a carriage module of a tower lift according to another embodiment of the present invention. 5 is a diagram showing a braking unit according to another embodiment of the present invention. 9 is a diagram showing an internal view of the braking unit of FIG. 8; 9 is a diagram showing the braking unit of FIG. 8 being rotated in a first direction; FIG. 9 is a diagram showing how the braking unit of FIG. 8 brakes a carriage module falling along a rail module. 9 is a diagram showing the brake body of FIG. 8 being rotated in a second direction by a restoring member and returned to its original position; FIG. Similarly, this is a diagram showing the brake body of FIG. 8 being rotated in a second direction by a restoring member and returned to its original position. Similarly, this is a diagram showing the brake body of FIG. 8 being rotated in a second direction by a restoring member and returned to its original position. 5 is a diagram showing a tower lift according to another embodiment of the present invention.

DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings so that those skilled in the art can easily implement the present invention. However, the present invention can be implemented in various forms and is not limited to the embodiments described herein. In addition, in describing the preferred embodiments of the present invention in detail, if it is determined that a specific explanation of related known functions or configurations may unnecessarily obscure the gist of the present invention, the detailed explanation will be omitted. The explanation will be omitted. Further, the same reference numerals are used throughout the drawings for parts having similar functions and actions.

'Including' an element does not exclude other elements unless specifically stated to the contrary, but means that the other elements can also be included. Specifically, the words "comprising" and "having" are used to indicate the presence of features, numbers, steps, acts, components, parts, or combinations thereof described in the specification. However, it is to be understood that this does not exclude in advance the existence or possibility of addition of one or more other features, figures, steps, acts, components, parts or combinations thereof.

The singular term includes the plural term unless the context clearly dictates otherwise. In addition, the shapes and sizes of elements in the drawings may be exaggerated for clearer explanation.

The tower lift according to this embodiment can be used to return goods. In particular, the tower lift according to this embodiment can return containers containing articles. The article may be a wafer glass substrate or a reticle. Further, the container in which the article is stored may be a FOUP (Front Opening Unified Pod). Further, the container in which the article is stored may be a POD. Further, the container in which the articles are stored may be a magazine for storing a plurality of printed circuit boards, a tray for storing a plurality of semiconductor packages, or the like.

FIG. 1 is a diagram schematically showing a semiconductor manufacturing line in which a tower lift according to an embodiment of the present invention is installed. Referring to FIG. 1, the semiconductor manufacturing line 10 may have a multilayer structure. For example, the semiconductor manufacturing line 10 may include a first layer 11, a second layer 12, and a third layer 13. However, the present invention is not limited thereto, and the multilayer structure of the semiconductor manufacturing line 10 may be modified in various ways.

The semiconductor manufacturing line 10 may be provided with a tower lift 100, a container storage unit 400, a return rail 500, and a semiconductor manufacturing device (not shown) for performing a semiconductor manufacturing process.

The tower lift (an example of a magnetic levitation vertical drive module) 100 can return containers (F) containing articles between the layers 11, 12, 13 of the semiconductor manufacturing line 10. Tower lift 100 may include a stage module 120, a rail module 140, and a carriage module 160.

The stage module 120 may be installed at the bottom of each layer 11 , 12 , 13 of the semiconductor manufacturing line 10 . The stage module 120 may be coupled with a return rail 500 that returns the container (F) to the container storage unit 400. When the tower lift 100 returns the containers (F) to each layer 11, 12, 13, the containers returned to each layer 11, 12, 13 can be returned to the container storage unit 400 by the return rail 500.

The rail module 140 can be extended vertically. The rail module 140 may extend vertically between at least two layers of the semiconductor manufacturing line 10. The rail module 140 can guide the movement of a carriage module 160, which will be described later. Furthermore, the rail module 140 can vertically move a carriage module 160, which will be described later.

The carriage module (an example of a moving body) 160 can be configured to be movable along the rail module 140. For example, carriage module 160 may be configured to be vertically movable along rail module 140. Carriage module 160 may include a carriage 162 for returning articles. A plurality of carriage modules 160 may be provided. For example, the number of the carriage module 160 may be modified in various ways.

The carriage module 160 may have a storage shelf on which containers (F) containing articles are placed. Alternatively, the carriage module 160 can also include a robot that grips the container (F). The carriage module 160 can be modified to have various structures capable of moving the container (F).

Hereinafter, the rail module 140 and carriage module 160 according to an embodiment of the present invention will be described in detail.

FIG. 2 is a perspective view showing a rail module and a carriage module of a tower lift according to an embodiment of the present invention, and FIG. 3 is a perspective view showing a rail module and a carriage module of a tower lift according to an embodiment of the present invention. This is a plan cross-sectional view showing the

Referring to FIGS. 2 and 3, the rail module 140 may include a frame 142, a linear motor coil 144, a guide rail 146, and a power transmitter 148.

The frame 142 may extend along the vertical direction. The length of the frame 142 may be vertical. The frame 142 may be fixedly installed on the wall (W) of the semiconductor manufacturing line 10. A linear motor coil 144, a guide rail 146, and a power transmitter 148, which will be described later, may be coupled to the frame 142. Although the frame 142 may have an 'H' shape when viewed from above, the shape of the frame 142 is not limited thereto, and the shape of the frame 142 may be modified in various ways.

形状を有することができる。 The linear motor coil 144 can move the carriage 162 in the vertical direction by interacting with a linear motor magnet 164, which will be described later. The interaction may be due to magnetic force generated by the linear motor coil 144 and/or the linear motor magnet 164. A linear motor coil 144 may be installed on the frame 142. The linear motor coil 144 may be installed on a surface of the frame 142 that faces the carriage module 160 when viewed from above. The linear motor coil 144 is generally

It can have a shape.

Further, an interface line (not shown) such as a power line may be connected to the linear motor coil 144. Further, a plurality of the pair of linear motor coils 144 may be provided. A plurality of pairs of linear motor coils 144 may be installed on the frame 142 to be spaced apart from each other along the vertical direction in which the frame 142 is extended.

The guide rail 146 can restrict some of the degrees of freedom of the carriage module 160. The guide rail 146 can constrain the remaining degrees of freedom except for the vertical movement of the carriage module 160. The guide rail 146 may be separated from a guide portion 166 of a carriage module 160, which will be described later, by a repulsive force caused by magnetic force. An interface line (not shown) such as a power line may be connected to the guide rail 146. In addition, a gap sensor (not shown) is provided on one of the guide rail 146 and the guide part 166, and the magnetic force can be controlled based on the measurement value measured by the gap sensor. Additionally, the distance between the guide rail 146 and the guide part 166 can be controlled to be substantially constant.

At least one guide rail 146 may be provided. For example, a plurality of guide rails 146 may be provided. One of the guide rails 146 may be installed on one side of the frame 142, and the other guide rail 146 may be installed on the other side of the frame 142. For example, one of the guide rails 146 may be installed on one side wall of the frame 142, and the other guide rail 146 may be installed on the other side wall of the frame 142. Further, the length direction of the guide rail 146 may be equal to the length direction of the frame 142.

The power transmitter 148 can transmit power to a power receiver 168 of the carriage module 160, which will be described later. For example, the power transmitter 148 may be one of a contactless power supply (HID) configuration that supplies power in a contactless manner. The power transmitter 148 may be installed on the frame 142. The power transmitter 148 may be installed on one of the sides of the frame 142 on which the guide rail 146 is installed. For example, the power transmitter 148 may be installed on one side of the frame 142 on which the guide rail 146 is installed. An interface line (not shown) such as a power line may be connected to the power transmitter 148.

The carriage module 160 can return the container (F) containing the article. The carriage module 160 may be configured to be vertically movable along the rail module 140. The carriage module 160 is moved vertically along the rail module 140 and can return containers (F) containing articles to each layer 11, 12, 13 of the semiconductor manufacturing line 10. The carriage module 160 may include a carriage 162, a linear motor magnet 164, connection bodies 165a and 165b, a guide part 166, and a power receiving part 168.

The carriage 162 may have a shelf shape on which a container (F) containing articles can be placed. The carriage 162 may be provided with a robot (not shown) that grips a container (F) containing articles. In FIG. 2, the carriage 162 is shown as having a three-tiered shelf shape, but the shape of the carriage 162 is not limited to this, and the shape of the carriage 162 can be modified in various ways.

A linear motor magnet 164 may be coupled to the carriage 162 . The linear motor magnet 164 can move the carriage 162 in the vertical direction by interacting with the linear motor coil 144 described above. The interaction may be due to magnetic force generated by the linear motor coil 144 and/or the linear motor magnet 164.

形状を有することができる。これに、リニアモータコイル１４４の一部がリニアモータマグネット１６４の開放された部分に挿入されることができる。 Also, when viewed from above, the linear motor magnet 164 looks

It can have a shape. Additionally, a portion of the linear motor coil 144 may be inserted into the open portion of the linear motor magnet 164.

The connecting bodies 165a and 165b can couple a guide part 166 and a power receiving part 168, which will be described later, to the carriage 162. The connection bodies 165a and 165b may include a first connection body 165a and a second connection body 165b. The first connection body 165a and the second connection body 165b may have different shapes. The second connecting body 165b can couple the guide part 166 and the power receiving part 168 to the carriage 162. The first connection body 165a may connect the guide part 166 to the carriage 162.

形状を有することができる。ガイド部１６６にはガイドレール１４６が挿入されることができる。これに、ガイド部１６６はガイドレール１４６と共にキャリッジモジュール１６０の垂直方向移動の自由度を除いて残りの自由度を拘束することができる。また、ガイドレール１４６とガイド部１６６のうちで何れか一つには、ギャップセンサー(図示せず)が提供され、ギャップセンサーが測定する測定値に根拠して前記磁気力を制御することができる。これに、ガイドレール１４６とガイド部１６６との間の間隔は、実質的に一定に制御されることができる。 The guide part 166 may be coupled to the carriage 162 by connection bodies 165a and 165b. Furthermore, when the carriage 162 is moved, the guide part 166 can be moved along the vertical direction together with the carriage 162. The guide part 166 may have a shape that surrounds at least a portion of the guide rail 146 installed on the frame 142. When viewing the guide section 166 from above

It can have a shape. The guide rail 146 may be inserted into the guide part 166. In addition, the guide part 166 can restrict the remaining degrees of freedom of the carriage module 160 except for the vertical movement of the carriage module 160 together with the guide rails 146 . In addition, a gap sensor (not shown) is provided on either the guide rail 146 or the guide part 166, and the magnetic force can be controlled based on the measurement value measured by the gap sensor. . Additionally, the distance between the guide rail 146 and the guide part 166 can be controlled to be substantially constant.

The power receiving section 168 can receive the power transmitted by the power transmitting section 148. Further, the power receiving unit 168 may be installed to face the power transmitting unit 148. The power receiving unit 168 may be one of a contactless power supply device (HID) that supplies power in a contactless manner. The second connecting body 165b can be coupled to the carriage 162. Additionally, if the carriage 162 is moved, the power receiving unit 168 can be moved along the vertical direction together with the carriage 162.

The carriage module 160 according to one embodiment of the present invention includes a linear motor magnet 164 that can interact with the linear motor coil 144 to move the carriage 162 along the rail module 140 . That is, the carriage module 160 according to an embodiment of the present invention can move along the rail module 140 using a magnetic levitation method. In a typical tower lift, the carriage module is moved by friction between a timing belt and a pulley, but particles can be generated in this case. However, the carriage module 160 according to an embodiment of the present invention can move along the rail module 1400 using a magnetic levitation method. In addition, the problem of particle generation can be minimized.

Further, the carriage module 160 includes a power receiving unit 168 and can receive power from the power transmitting unit 148 in a contactless manner. That is, the power necessary to drive the carriage module 160 can be transmitted in a non-contact manner. Further, the present invention may include a carriage module 160 in which a linear motor coil 144 that requires power line connection is installed on the frame 142, and a linear motor magnet 164 that does not require power line connection. That is, all interface lines such as power lines may be connected to the components of the rail module 140, and no interface lines may be connected to the carriage module 160. When interface lines are connected to the carriage module 160, the connected interface lines act as an element that obstructs the operation of the plurality of carriage modules 160. Since the carriage modules 160 are not connected, the operation of the plurality of carriage modules 160 is made easier.

Further, the pair of linear motor coils 144 included in the rail module 140 may be provided in plurality and installed on the frame 142 so as to be spaced apart from each other along the length direction of the frame 142.

The controller 600 can control the tower lift 100. The controller 600 can control the tower lift 100 so that the carriage module 160 can move along the rail module 140 in a magnetic levitation manner. The controller 600 also includes a process controller using a microprocessor (computer) that executes control of the tower lift 100, a keyboard through which an operator inputs commands to manage the tower lift 100, and an operating status of the tower lift 100. A user interface such as a display that visualizes and displays the information, a control program for controlling the process executed by the tower lift 100 under the control of the process controller, various data, and processing conditions to make each component execute the process. A storage unit may be provided in which programs, ie, processing recipes, are stored. The user interface and storage may also be connected to the process controller. The processing recipe may be stored in a storage medium in the storage unit, and the storage medium may be a hard disk, a portable disk such as a CD-ROM or DVD, or a semiconductor memory such as a flash memory. .

As described above, the carriage module 160 according to an embodiment of the present invention can be moved along the rail module 140 using a magnetic levitation method. In addition, if the power to drive the carriage module 160 is interrupted, the carriage module 160 may fall (free fall). Additionally, a first braking unit 200 may be installed in the carriage module 160 of the tower lift 100 according to an embodiment of the present invention. If the power for driving the tower lift 100 is cut off, the carriage module 160 may fall, but the first braking unit 200 can brake the fall of the carriage module 160 even when the power is cut off.

FIG. 4 is a diagram showing a braking unit according to an embodiment of the present invention. Specifically, FIG. 4 shows the first braking unit 200 in a state where power is applied to the tower lift 100. Referring to FIG. 4, a first braking unit 200, which is a braking unit according to an embodiment of the present invention, includes a first base body 210, a first braking body 220, a sliding roller 230, a first tension member 240, and a first holding member. 250 and a first restoring member 260 .

The relative position of the first base body 210 with respect to the carriage module 160 may be fixed. For example, the first base body 210 may be fixedly coupled to the carriage module 160. The first base body 210 may be provided with a plurality of guide pins 212 that are inserted into guide holes 222, which will be described later. The guide pin 212 is inserted into a guide hole 222 of a first brake body 220, which will be described later, and can guide the movement direction of the first brake body 220. Further, the first base body 210 may be provided with a first base body locking part 214 . The first base body locking part 214 may be fixed by a locking hook, which may be one end of a first tension member 240, which will be described later.

The first braking body 220 may selectively contact the rail module 140, more specifically, the frame 142 of the rail module 140, to damp the free fall of the carriage module 160. When viewed from the front, the first brake body 220 may have a right triangular shape with the corners including acute angles cut off.

In addition, the first brake body 220 may include a brake pad 221 provided on a surface of the rail module 140 that faces the frame 142 . The spacing (G1) between the brake pad 221 and the frame 142 may be approximately 3 to 5 mm. In addition, a guide hole 222 may be formed in the first brake body 220 so that the guide pin 212 described above can be inserted therein. The guide hole 222 may have a long hole shape that is inclined upward in the direction in which the frame 142 is directed. In addition, the first brake body 220 can be moved in a direction inclined with respect to the vertical direction. Further, the first brake body 220 may be provided with a first brake body locking part 224 . A locking latch, which may be the other end of a first tension member 240, which will be described later, may be sandwiched and fixed to the first brake body locking part 224.

A sliding roller 230 may be provided between the first base body 210 and the first brake body 220. For example, the sliding roller 230 may be provided between the inclined surface of the first brake body 220 and the first base body 210. The sliding roller 230 helps the first brake body 220 move more smoothly when the first brake body 220 moves in an inclined direction.

The first tensioning member 240 may move the first braking body 220 in an upwardly inclined direction when the power is interrupted, thereby bringing the first braking body 220 into contact with the frame 142 of the rail module 140 . The first tension member 240 may include a tension spring and two hooks connected to the tension spring, and one of the two hooks may be connected to the first base described above. The body locking part 214 is fixed, and the other one of the two hooks can be fixed by being sandwiched between the first brake body locking part 224 described above.

The first holding member 250 may hold the first brake body 220 and selectively contact the first brake body 220 with the frame 142 of the rail module 140 only when power is applied. For example, the first holding member 250 may hold the first brake body 220 when power is applied to the tower lift 100, and may not hold the first brake body 220 when power is not applied to the tower lift 100. be.

In addition, the first holding member 250 may include an electromagnet 252 and a holding frame 254. The holding frame 254 may fix an electromagnet 252 to the carriage module 160, and a first power source 256 for driving the tower lift 100 may be connected to the electromagnet 252. For example, when the first power source 256 applies power to the tower lift 100 and the first brake unit 200, power is applied to the electromagnet 252, and the electromagnet 252 generates magnetic force to hold the first brake body 220. be able to. In this case, the first brake body 220 and the frame 142 of the rail module 140 may be separated from each other.

The first restoring member 260 can move the first brake body 220. For example, the first restoring member 260 may move the first brake body 220 in a downwardly inclined direction. The first restoring member 260 may include a first driver 262 and a first restoring body 264 . The first driver 262 can be a motor. The first driver 262 can rotate the first restoring body 264 . The first restoring body 264 is formed on the first brake body 220 and can push down the restoring protrusion 226 protruding forward to move the first brake body 220 in a downwardly inclined direction.

FIG. 5 is a diagram showing how the braking unit of FIG. 4 brakes a carriage module falling along a rail module. Referring to FIG. 5, if the power to drive the tower lift 100 is interrupted, the power applied to the electromagnet 252 is also interrupted. In this case, the electromagnet 252 cannot generate magnetic force and cannot hold the first brake body 220. In addition, the first brake body 220 may be moved in an upwardly inclined direction due to the tensile force of the first tension member 240 . In addition, the brake pad 221 of the first brake body 220 is brought into contact with the frame 142 of the rail module 140, and the free fall of the carriage module 160 on which the first brake unit 200 is installed can also be braked.

FIG. 6 is a diagram showing the brake body of FIG. 4 being moved to its original position by a restoring member. Referring to FIG. 6, after the first brake body 220 is moved upwardly and comes into contact with the frame 142 of the rail module 140, power can be applied to the tower lift 100 again. In this case, the first restoring body 264 of the first restoring member 260 may be rotated to move the first brake body 220 in a downwardly inclined direction, thereby returning the first brake body 220 to its original position. When the first brake body 220 is placed in its original position, the electromagnet 252 generates magnetic force, and the first holding member 250 holds the first brake body 220 again.

FIG. 7 is a perspective view showing a rail module and a carriage module of a tower lift according to another embodiment of the present invention. Referring to FIG. 7, a second braking unit 300 may be installed in the carriage module 160.

FIG. 8 is a diagram showing a braking unit according to another embodiment of the present invention, and FIG. 9 is a diagram showing an internal view of the braking unit of FIG. 8. Specifically, FIGS. 8 and 9 show the second braking unit 300 in a state where power is applied to the tower lift 100. Referring to FIGS. 8 and 9, the second braking unit 300 includes a first base body 310, a second braking body 320, a second tension member 340, a second holding member 350, and a second restoring member 360. can be included.

The second base body 310 may be located at the rear of the second brake body 320. For example, the second base body 310 may be positioned closer to the wall (W) than the second brake body 320. The second base body 310 may be provided with a locking pin 312 on which a first locking end 321 and a second locking end 322 of a second brake body 320, which will be described later, are engaged. The locking pin 312 may be protruded toward the second base body 310.

In addition, a first guide groove 315 and a second guide groove 316 may be formed in the second base body 310 in an arc shape around a rotation axis around which a second brake body 320 (described later) is rotated. In the first guide groove 315 and the second guide groove 315, a first guide protrusion 325 is formed on a second brake body 320, which will be described later, and projects from the second brake body 320 in a direction toward the second base body 310, and Second guide protrusions 326 can be respectively inserted. Additionally, when the second brake body 320 is rotated, the first guide protrusion 325 and the second guide protrusion 326 can be moved along the first guide groove 315 and the second guide groove 315, respectively.

Further, the second base body 310 may be provided with a second base body locking part 314 to which a hook, which is one end of a second tension member 340 (described later), is hooked.

The second brake body 320 may selectively contact the frame 142 of the rail module 140 to brake the carriage module 160 from falling. The second brake body 320 may be rotatable about a rotation axis that is horizontal to the ground.

Further, the second brake body 320 may have an asymmetric cam shape with respect to the rotation axis. Saw teeth 324 may be formed on the outer diameter of the second brake body 320 when the second brake body 320 is rotated and comes into contact with the frame 142 of the rail module 140 . Further, when the second brake body 320 is held by the second holding member 350, the distance (G2) between the second brake body 320 and the frame 142 may be approximately 5 mm.

Further, the second brake body 320 has a first locking end 321 and a second locking end 322, and the first locking end 321 and the second locking end 322 prevent the second brake body 320 from being rotated. Therefore, the locking pin 312 of the second base body 310 may be caught. In addition, the rotatable angle of the second brake body 320 may be limited by a set angle by the first locking end 321, the second locking end 322, and the locking pin 312. In addition, the sliding part 323 may be a part that comes into contact with the locking pin 312 while the second brake body 320 is rotated.

A latch that is one end of the second tension member 340 is fixed to the first guide protrusion 325, and a latch that is the other end of the second tension member 340 is fixed to a second base provided on the second base body 310. The body locking part 314 can be engaged and fixed. Additionally, when power is interrupted to the tower lift 100, the second tensioning member 340 rotates the second braking body 320 in the first direction (for example, clockwise in the example shown in FIG. 9). can be brought into contact with the frame 142 of the rail module 140. The structure of the second tension member 340 is the same or similar to the first tension member 240 described above, so repeated description will be omitted.

The second holding member 350 holds the second braking body 320 from rotating in the first direction only when power is applied, and selectively brings the second braking body 320 into contact with the frame 142 of the rail module 140. can. The second holding member 350 may include a solenoid 352 and a holding head 354. Solenoid 352 can move holding head 354 in a straight line. For example, when the second power source 356 applies power to the solenoid 352, which can be the power source that applies power to drive the tower lift 100, the solenoid 352 can advance the holding head 354. Alternatively, if power is interrupted to the solenoid 352, the solenoid 352 can retract the holding head 354. Further, the holding head 354 may have an inclined surface. Further, when power is applied to the solenoid 352 of the tower lift 100, the holding head 354 may hold the second guide protrusion 326 to prevent the second brake body 320 from rotating in the first direction.

The second restoring member 360 rotates the second brake body 320 in a second direction opposite to the first direction after the second brake body 320 is rotated in the first direction and comes into contact with the frame 142 of the rail module 140. The second brake body 320 can be placed in its original position. The second restoring member 360 may include a second driver 362, which is a motor, and a second restoring body 364. The second restoring body 364 can be rotated in a second direction. The second restoring body 364 can rotate the second guide protrusion 326 in a second direction to rotate the second braking body 320 in a second direction.

FIG. 10 is a diagram showing the braking unit of FIG. 8 being rotated in a first direction. Referring to FIG. 10, when power is cut off to the tower lift 100, the holding head 354 moves backward. Accordingly, the second holding member 350 no longer holds the second guide protrusion 326.

FIG. 11 is a diagram showing how the braking unit of FIG. 8 brakes the carriage module falling along the rail module. Referring to FIG. 11, since the second holding member 350 does not hold the second guide protrusion 326, the tensile force of the second tension member 340 can rotate the first guide protrusion 325 in the first direction. Accordingly, the saw teeth 324 of the second brake body 320 may be brought into contact with the frame 142. Additionally, the carriage module 160 can brake the fall.

12, 13, and 14 are views showing the brake body of FIG. 8 being rotated in the second direction by the restoring member and returned to its original position. When power is again applied to the tower lift 100, the second restoring member 360 can rotate the second guide protrusion 326 in a second direction that is opposite to the first direction, as shown in FIG. Additionally, the second brake body 320 can be rotated in a second direction. Thereafter, as shown in FIG. 13, the end of the holding head 354 enters between the second guide protrusion 326 and the second restoring body 364. Accordingly, the second holding member 350 can again hold the rotation of the second brake body 320. Thereafter, the second restoration body 364 may be returned to its original position as shown in FIG. 14.

As previously mentioned, the braking unit 200300 of the present invention is configured such that it can be contacted with the rail module 140 in the event of power interruption. In addition, it is possible to prevent the carriage module 160 from falling freely due to power interruption to the tower lift 100.

In addition, the first braking unit 200 has a large contact area and can stably brake the fall of the carriage module 160. Further, the second braking unit 300 has the advantage of shortening the braking distance of the carriage module 160 by the saw teeth 324.

In order to have all the advantages of the first braking unit 200 and the second braking unit 300, the first braking unit 200 and the second braking unit 300 are all installed in the carriage module 160 as shown in FIG. can be done. Also, in this case, since the first braking unit 200 has a large contact area, the first braking unit 200 is installed at a higher position than the second braking unit 300 in order to minimize shaking when the carriage module 160 is braked. It is desirable that

In the above example, the tower lift 100 is provided to a semiconductor manufacturing line, but the present invention is not limited thereto. For example, the tower lift 100 can be identically or similarly applied to various manufacturing lines where return of goods is required.

The foregoing detailed description is illustrative of the invention. In addition, the foregoing description is intended to illustrate and explain desirable or various embodiments for implementing the technical idea of the present invention, and the present invention may be used in various other combinations, modifications, and environments. I can do it. That is, changes or modifications can be made within the scope of the inventive concept disclosed in this specification, within the scope of equivalency to the contents of the author's disclosure, and/or within the scope of technology or knowledge in the art. Therefore, the foregoing detailed description of the invention is not intended to limit the invention to the disclosed embodiments. Additionally, the appended claims should be construed as including other implementations. Such modified implementations should not be understood individually from the technical idea and prospects of the present invention.

10 Semiconductor manufacturing line 11 First layer 12 Second layer 13 Third layer 100 Tower lift 120 Stage module 140 Carriage module 200 First braking unit 210 First base body 212 Guide pin 214 First base body locking part 220 First braking Body 221 Brake pad 222 Guide hole 224 First brake body locking part 226 Restoration protrusion 230 Sliding roller 240 First tension member 250 First holding member 252 Electromagnet 254 Holding frame 256 First power supply 260 First restoration member 262 First drive machine 264 First restoring body 300 Second braking unit 310 Second base body 312 Locking pin 314 Second base body locking part 315 First guide groove 316 Second guide groove 320 Second brake body 321 First locking end 322 2 locking end 323 sliding part 324 sawtooth 325 first guide protrusion 326 second guide protrusion 340 second tension member 350 second holding member 352 solenoid 354 holding head 356 second power supply 360 second restoring member 362 second drive machine 364 2 restoration body 400 container storage section 500 return rail 600 controller

Claims (13)

In the tower lift,
a vertically extending rail module;
a carriage module movable in a magnetic levitation manner along the rail module;
The carriage module includes:
A braking unit is installed to brake the fall of the carriage module if power for driving the tower lift is interrupted ;
The braking unit includes:
a brake body configured to be movable in a direction tilted with respect to the vertical direction, and selectively contacts the rail module to brake the fall of the carriage module;
a holding member that selectively contacts the brake body and the rail module by holding the brake body only when the electric power is applied;
a tensioning member that moves the brake body in an upwardly tilted direction to bring the brake body into contact with the rail module when the power is interrupted;
a base body whose relative position with respect to the carriage module is fixed;
including;
one end of the tension member is fixed to a base body locking portion formed on the base body;
The tower lift according to claim 1, wherein the other end of the tension member is fixed to a brake body locking portion formed on the brake body . The braking body is
The tower lift according to claim 1 , further comprising a braking pad provided on a surface facing the rail module. The holding member is
The tower lift of claim 1 , further comprising an electromagnet that generates a magnetic force when the power is applied to hold the brake body so that the brake body is separated from the rail module. The braking unit includes:
After the brake body is moved in an upwardly tilted direction and comes into contact with the rail module, the brake body may further include a restoring member that moves the brake body in a downwardly tilted direction to return the brake body to its original position. A tower lift according to claim 1 . In the tower lift,
a vertically extending rail module;
a carriage module movable in a magnetic levitation manner along the rail module;
The carriage module includes:
A braking unit is installed to brake the fall of the carriage module if power for driving the tower lift is interrupted;
The braking unit includes:
a braking body rotatable about a rotation axis horizontal to the ground and selectively contacted with the rail module to brake the fall of the carriage module;
a holding member that selectively contacts the brake body and the rail module by holding the brake body only when the electric power is applied;
a tensioning member for rotating the brake body in a first direction to bring the brake body into contact with the rail module when the power is interrupted;
a base body in which an arc-shaped guide groove is formed around the rotation axis;
including;
The braking body is
The cam has an asymmetrical shape with respect to the rotation axis,
Serrations are formed on an outer diameter of the brake body when the brake body is rotated and comes into contact with the rail module ;
A guide protrusion is formed on the brake body to be inserted into the guide groove,
one end of the tension member is fixed to a base body locking portion formed on the base body;
The other end of the tension member is fixed to the guide protrusion.
A tower lift that is characterized by: The holding member is
a holding head; and a solenoid for linearly moving the holding head;
The tower lift of claim 5 , wherein the holding head holds the guide protrusion to prevent the brake body from rotating in the first direction when the power is applied. The braking unit includes:
After the brake body is rotated in the first direction and comes into contact with the rail module, a restoring member rotates the brake body in a second direction opposite to the first direction to return the brake body to its original position. The tower lift according to claim 6 , further comprising: In the tower lift,
a vertically extending rail module;
a carriage module movable in a magnetic levitation manner along the rail module;
The carriage module includes:
A braking unit is installed to brake the fall of the carriage module if power for driving the tower lift is interrupted;
The braking unit includes:
a braking body that selectively contacts the rail module and brakes the carriage module from falling;
a holding member that selectively contacts the brake body and the rail module by holding the brake body only when the electric power is applied;
including;
The braking unit includes:
including a first braking unit and a second braking unit;
The first brake body, which is a brake body included in the first brake unit, is
configured to be movable in a direction tilted with respect to the vertical direction,
a braking pad provided on a surface facing the rail module;
The second brake body, which is a brake body included in the second brake unit,
Provided to be rotatable around a rotation axis horizontal to the ground,
The cam has an asymmetrical shape with respect to the rotation axis,
When the second brake body is rotated and comes into contact with the rail module, an outer diameter of the second brake body has a sawtooth shape.
Tower lift. The tower lift according to claim 8 , wherein the first braking unit is installed at a higher position than the second braking unit. A braking unit is installed on a movable body movable in a magnetic levitation manner along a vertically extending rail module, and brakes an emergency fall of the movable body when power for moving the movable body is interrupted. In,
a braking pad configured to selectively contact the rail module to brake the fall of the moving object, to be movable in a direction inclined with respect to the vertical direction, and provided on a surface facing the rail module; , a brake body;
The brake body and the rail module are brought into selective contact by holding the brake body only when the power is applied , and when the power is applied, a magnetic force is generated to apply the brake. a holding member including an electromagnet for holding the brake body such that the body is separated from the rail module ;
a tensioning member that moves the brake body in an upwardly tilted direction to bring the brake body into contact with the rail module when the power is interrupted ;
a base body fixed to the moving body;
including;
one end of the tension member is fixed to a base body locking portion formed on the base body;
The other end of the tension member is fixed to a brake body locking part formed on the brake body.
A braking unit characterized by: After the brake body is moved in an upwardly tilted direction and comes into contact with the rail module, the brake body may further include a restoring member that moves the brake body in a downwardly tilted direction to return the brake body to its original position. Braking unit according to claim 10 . A braking unit is installed on a movable body movable in a magnetic levitation manner along a vertically extending rail module, and brakes an emergency fall of the movable body when power for moving the movable body is interrupted. In,
a first cam that is selectively contacted with the rail module to brake the fall of the moving body, is rotatable about a rotation axis that is horizontal to the ground, and has an asymmetrical cam shape with respect to the rotation axis; a braking body having saw teeth formed on an outer diameter of the braking body that is rotated in a direction and comes into contact with the rail module;
The brake body and the rail module are selectively brought into contact by holding the brake body only when the power is applied , and the brake body is brought into contact with the first rail module only when the power is applied. a holding member including a solenoid that prevents the holding member from being rotated in the direction ;
a tensioning member that rotates the brake body in the first direction to bring the sawtooth into contact with the rail module when the power is interrupted ;
a base body in which an arc-shaped guide groove is formed around the rotation axis;
including;
The brake body includes:
A guide protrusion is formed to be inserted into the guide groove,
one end of the tension member is fixed to a base body locking portion formed on the base body;
The other end of the tension member is fixed to the guide protrusion.
A braking unit characterized by: a restoring member that rotates the brake body in a second direction opposite to the first direction to return the brake body to its original position after the brake body is rotated in the first direction and comes into contact with the rail module; 13. The braking unit of claim 12 , further comprising.

Images