JP7368138B2 - processing equipment - Google Patents

Description

The present invention relates to a processing device that photographs and displays a workpiece held on a chuck table.

In order to divide various plate-shaped workpieces such as semiconductor wafers, ceramics, resin package substrates, SiC wafers, and sapphire wafers into individual chips, processing equipment such as cutting equipment using cutting blades and laser processing equipment using laser beams are used. used. Such a processing device performs processing along the planned dividing line to form processing marks (cutting grooves and laser processing marks). Such processing equipment has a function that allows the operator to stop the processing periodically or at any time and observe the processing marks (cutting grooves and laser processing marks) in order to check the processing results. (See Patent Document 1).

Japanese Patent Application Publication No. 2016-197702

For example, when checking whether a single scheduled dividing line has been processed without meandering, the operator can move the observation position (photographing position) from one end of the scheduled dividing line to the other, and check the image displayed on the display unit. Visually check the meandering of the machining marks. At this time, the operator moves the observation position (photography position) while holding down the operation button for moving the observation position (photography position), but if this operation is to be performed on all workpieces, the operator must There was a problem that button operations had to be performed repeatedly, which was troublesome. Further, when it has been decided to observe along a predetermined dividing line, it is necessary to search for the dividing line while operating this operation button, which causes the problem that the task of searching is also time-consuming. As described above, conventional processing apparatuses have a problem in that the operator's work time and man-hours are taken up by the task of observing each workpiece at a fixed position.

The present invention has been made in view of such problems, and its purpose is to provide a processing device that can reduce the working time and man-hours for observing a fixed position of a workpiece. .

In order to solve the above-mentioned problems and achieve the objects, the processing apparatus of the present invention includes a chuck table that holds a workpiece with a dividing line on a holding surface, and a chuck table that holds a workpiece having a dividing line on a holding surface, and a A processing device comprising a processing unit that processes the workpiece along the dividing line, a camera that photographs the workpiece held on the chuck table, and a display unit that displays the image photographed by the camera. A movement unit that moves the chuck table relative to the processing unit and the camera in an X direction and a Y direction parallel to the holding surface, and a control unit that controls each component, the control unit sets an inspection route on the dividing line in which the moving unit moves the camera that photographs the workpiece relative to the chuck table, and the inspection route set on the dividing line is set on the dividing line. The chuck table is provided with an inspection route registration section to be registered, and at each inspection position between the start point and the end point of the inspection route registered in the inspection route registration section, the chuck table is arranged according to the inspection route registered in the inspection route registration section. The present invention is characterized in that an image taken of the workpiece by the camera moving relative to the object is displayed on the display unit.

The camera may include an image recording section that records images taken by the camera. Further, when the predetermined dividing line is selected, the control unit sets the entire area from one end of the prescribed dividing line to the other end as the inspection route, and registers the inspection route. You may register with the department. Further, the control unit may set the traced portion as the inspection route and register it in the inspection route registration section. Further, the control unit may automatically correct the traced portion to a position on the nearest scheduled division line, set it as the inspection route, and register it in the inspection route registration section.

The present invention can reduce the work time and man-hours required for observing a fixed position of a workpiece.

FIG. 1 is a perspective view showing a configuration example of a processing device according to a first embodiment. FIG. 2 is a diagram showing an example of a setting screen for an inspection route registration method in the processing apparatus according to the first embodiment. FIG. 3 is a top view illustrating an example of inspection route registration in the processing apparatus according to the first embodiment. FIG. 4 is a top view illustrating an example of an inspection route registered in the processing apparatus according to the first embodiment. FIG. 5 is a diagram showing an example of an image photographed according to a registered inspection route in the processing apparatus according to the first embodiment. FIG. 6 is a top view illustrating an example of inspection route registration in the processing apparatus according to the second embodiment. FIG. 7 is a top view illustrating an example of an inspection route registered in the processing apparatus according to the second embodiment.

DESCRIPTION OF THE PREFERRED EMBODIMENTS Modes (embodiments) for carrying out the present invention will be described in detail with reference to the drawings. The present invention is not limited to the contents described in the following embodiments. Further, the constituent elements described below include those that can be easily assumed by those skilled in the art and those that are substantially the same. Furthermore, the configurations described below can be combined as appropriate. Further, various omissions, substitutions, or changes in the configuration can be made without departing from the gist of the present invention.

[Embodiment 1]
A processing apparatus 1 according to Embodiment 1 of the present invention will be described based on the drawings. FIG. 1 is a perspective view showing a configuration example of a processing device 1 according to the first embodiment. The processing apparatus 1 according to the first embodiment is an apparatus that cuts a workpiece 200 and forms cutting grooves 300 (see FIG. 5, etc.) that are processing marks on the workpiece 200. The processing device 1 also detects a cutting groove 300 on a preset inspection route 400 (see FIG. 4) among the cutting grooves 300 formed by cutting during or at any timing after processing the workpiece 200. It is also a device that captures, displays, and stores images. Note that, in the present invention, the processing device 1 is not limited to this, and processes the workpiece 200 by irradiating the workpiece 200 with a laser beam and processes the workpiece 200 with a laser beam, and processes marks formed by the laser processing and on the inspection route 400. It may be a laser processing device that images a certain laser processing groove, displays it, and stores it.

In the first embodiment, the workpiece 200 cut by the processing apparatus 1 is, as shown in FIG. 1, a disk-shaped semiconductor wafer whose base material is silicon, sapphire, silicon carbide (SiC), gallium arsenide, or the like. and optical device wafers. A device 203 is formed on a workpiece 200 in an area defined by a plurality of dividing lines 202 formed in a lattice shape on a flat surface 201 . The workpiece 200 has an adhesive tape 205 attached to the back surface 204 on the back side of the front surface 201, and an annular frame 206 attached to the outer edge of the adhesive tape 205. In the present invention, the workpiece 200 is not limited thereto, and may be a rectangular package substrate having a plurality of devices sealed with resin, a ceramic plate, a glass plate, or the like.

As shown in FIG. 1, the processing apparatus 1 includes a chuck table 10, a processing unit 20 that performs cutting, a camera 30, a display unit 40, a movement unit 50, and a control unit 60. As shown in FIG. 1, the processing device 1 is a so-called facing dual type cutting device that includes two processing units 20, that is, a two-spindle dicer.

The chuck table 10 holds a workpiece 200 having a plurality of planned dividing lines 202 on a holding surface 11 . The chuck table 10 has a flat holding surface 11 for holding a workpiece 200 formed on the upper surface, and a disk-shaped suction section made of porous ceramic or the like having a large number of porous holes, and a suction section located at the center of the top surface. It is disc-shaped and includes a frame that is fitted into the recess and fixed. The chuck table 10 is movable by an X-axis moving unit 51 of a moving unit 50, and is rotatably provided by a rotational drive source (not shown). The chuck table 10 has a suction section connected to a vacuum suction source (not shown) via a vacuum suction path (not shown), and suctions and holds the workpiece 200 on the entire holding surface 11 . Further, around the chuck table 10, as shown in FIG. 1, a plurality of clamp parts 12 for clamping the annular frame 206 are provided.

The processing unit 20 processes the workpiece 200 held on the chuck table 10 along the dividing line 202 to form a cutting groove 300 . The processing unit 20 includes a cutting blade 21, a spindle, and a spindle housing 22. The cutting blade 21 is rotated about the Y axis to cut the workpiece 200 held on the chuck table 10 . The spindle is provided along the Y-axis direction, and supports the cutting blade 21 rotatably around the Y-axis at its tip. The spindle housing 22 accommodates the spindle so that it can rotate around the Y axis. The processing unit 20 is provided with a spindle housing 22 movable in the Y-axis direction by a Y-axis movement unit 52 of a movement unit 50 with respect to a workpiece 200 held on the chuck table 10, and It is provided movably in the Z-axis direction by a Z-axis moving unit 53.

The camera 30 plays a part in the observation support process by photographing the workpiece 200 held on the chuck table 10. In the first embodiment, the camera 30 is fixed to the processing unit 20 so as to move integrally with the processing unit 20. The camera 30 is an image sensor that captures an image of a dividing line 202 of the workpiece 200 before the cutting process held on the chuck table 10 and a cutting groove 300 that is a machining mark on the workpiece 200 after the cutting process. It is equipped with The image sensor is, for example, a CCD (Charge-Coupled Device) image sensor or a CMOS (Complementary MOS) image sensor.

The camera 30 captures an image of the workpiece 200 held on the chuck table 10 before cutting processing, and obtains an image for performing alignment for aligning the workpiece 200 and the cutting blade 21. The obtained image is output to the control unit 60. Further, the camera 30 images the cut workpiece 200 held on the chuck table 10 and outputs the obtained image to the control unit 60.

The display unit 40 is constituted by a liquid crystal display device, etc., which displays each cutting operation and image, and the image of the cutting groove 300 captured by the camera 30, and is electrically connected to the control unit 60 so as to be able to communicate information. . The display unit 40 is also linked to a notification unit 41 and an input unit 42, which are electrically connected to the control unit 60 so as to be able to communicate information.

The notification unit 41 includes a light emitting diode (LED), etc. that provides notification based on the status of each operation related to observation support processing including cutting and kerf checking. The input unit 42 is used by the operator to input and register information such as machining conditions for cutting and the inspection route 400, and includes at least a touch panel provided on the display unit 40, a keyboard, etc. Consists of one.

The moving unit 50 includes an X-axis moving unit 51, a Y-axis moving unit 52, and a Z-axis moving unit 53, as shown in FIG. The X-axis moving unit 51 processes and feeds the chuck table 10 along the X-axis direction, which is one horizontal direction, relative to the processing unit 20. The Y-axis moving unit 52 indexes and feeds the processing unit 20 relative to the chuck table 10 along the Y-axis direction, which is another horizontal direction and perpendicular to the X-axis direction. The Z-axis moving unit 53 cuts and feeds the processing unit 20 relative to the chuck table 10 along the Z-axis direction, which is orthogonal to both the X-axis direction and the Y-axis direction and parallel to the vertical direction.

The control unit 60 controls each component of the processing apparatus 1 and causes the processing apparatus 1 to perform various operations related to observation support processing including cutting and kerf checking on the workpiece 200.

Control unit 60 includes a computer system in the first embodiment. The control unit 60 includes an arithmetic processing device having a microprocessor such as a CPU (central processing unit), a storage device having a memory such as a ROM (read only memory) or a RAM (random access memory), and an input/output interface device. and has. The arithmetic processing device performs arithmetic processing according to the computer program stored in the storage device, and outputs control signals for controlling the processing device 1 to each component of the processing device 1 via the input/output interface device. do.

The control unit 60 includes an inspection route registration section 61 and an image recording section 62. Both the inspection route registration section 61 and the image recording section 62 are realized by the storage device of the control unit 60. The inspection route registration unit 61 registers an inspection route 400 along which the moving unit 50 moves the camera 30 that photographs the workpiece 200 relative to the chuck table 10. More specifically, the inspection route registration unit 61 registers an inspection route 400 whose route includes a fixed position of the workpiece 200 observed by the operator. The image recording unit 62 records images taken by the camera 30. More specifically, the image recording unit 62 records images of the workpiece 200 taken by the camera 30 at each position on the inspection route 400.

As shown in FIG. 1, the processing apparatus 1 also includes a cassette 70 that stores the workpieces 200 before and after cutting, a temporary storage unit 71 that temporarily stores the workpieces 200 before and after the cassette 70 is stored, and The apparatus further includes a cleaning unit 90 that cleans the workpiece 200 after processing, and a transport unit 80 that transports the workpiece 200 between the chuck table 10, the cassette 70, the temporary storage unit 71, and the cleaning unit 90.

In the processing apparatus 1 , after processing conditions including information such as the number of planned dividing lines 202 of the workpiece 200 and the interval between the planned dividing lines 202 are registered in the control unit 60 , the transport unit 80 transfers the processed material from within the cassette 70 . After one workpiece 200 is taken out and positioned at a predetermined position by the temporary placement unit 71, it is placed on the holding surface 11 of the chuck table 10. The processing device 1 sucks and holds the workpiece 200 on the holding surface 11 of the chuck table 10 and performs alignment, and then supplies cutting water from the processing unit 20 to the workpiece 200 while using a rotational drive source and movement. The unit 50 relatively moves the chuck table 10 and the processing unit 20 along the planned dividing line 202, and the cutting blade 21 of the processing unit 20 cuts the planned dividing line 202 of the workpiece 200 to form the cutting groove 300. form. When the processing device 1 cuts all the scheduled dividing lines 202 of the workpiece 200, the workpiece 200 is cleaned by the cleaning unit 90 and then stored in the cassette 70.

FIG. 2 is a diagram showing an example of a setting screen 110 for the inspection route registration method in the processing apparatus 1 according to the first embodiment. FIG. 3 is a top view illustrating an example of inspection route registration in the processing apparatus 1 according to the first embodiment. FIG. 4 is a top view illustrating an inspection route 400 that is an example of an inspection route registered in the processing apparatus 1 according to the first embodiment. FIG. 5 is a diagram showing an example of an image photographed according to the registered inspection route 400 in the processing apparatus 1 according to the first embodiment. Note that the adhesive tape 205 and the annular frame 206 are omitted in FIGS. 3 and 4. Below, details of the observation support processing performed by the processing apparatus 1 according to the first embodiment will be explained using FIGS. 2 to 5.

In the observation support process performed by the processing apparatus 1 according to the first embodiment, the control unit 60 first includes in the path a position on the workpiece 200 that is to be observed by the operator after the alignment ends and before the start of the cutting process. The inspection route 400 and the timing for displaying an image of the inspection route 400 on the display unit 40 are registered. In the observation support process performed by the processing apparatus 1 according to the first embodiment, for example, the inspection route 400 is displayed using a setting screen 110 for the inspection route registration method in the processing apparatus 1 according to the first embodiment as shown in FIG. 2 as a user interface. Accepts input of registration method. As shown in FIG. 2, the setting screen 110 for the inspection route registration method in the processing apparatus 1 according to the first embodiment allows selection of either a method of selecting the planned division line 202 or a method of tracing the inspection route 400. This is the screen for setting and registering.

The method of selecting the planned dividing line 202 is a method of setting and registering the selected scheduled dividing line 202 to be included in the entire inspection route 400 from one end to the other end. Note that the method of selecting the scheduled dividing line 202 was provided in response to the necessity that the observation target in the observation support process is often limited to the scheduled dividing line 202.

The method of tracing the inspection route 400 is a method of setting and registering the traced portion to be included in the inspection route 400 as it is. In addition, in the method of tracing the inspection route 400, the selected part is automatically corrected to the position on the nearest planned dividing line 202, and the planned dividing line 202 is selected, similar to the method of selecting the planned dividing line 202. You can set and register as follows. Furthermore, in the method of tracing the inspection route 400, unlike the method of selecting the planned dividing line 202 without making such correction, it is also possible to set and register a line other than the planned dividing line 202 as an observation target in the observation support process. can.

In the first embodiment, a method for selecting the planned dividing line 202 will be described. A method of tracing the inspection route 400 will be explained in Embodiment 2, which will be described later. Note that the inspection route registration method in the processing apparatus 1 according to the first embodiment is not limited to these methods, but any method that allows setting and registration via the input unit 42 may be used. Any method may be adopted.

In addition, in the following, a method of selecting the planned division line 202 along the X-axis direction, a method of selecting the planned dividing line 202 along the Y-axis direction, and a method of selecting both planned dividing lines 202 are explained below. , are the same except for the direction of the scheduled dividing line 202, so only the detailed explanation along the X-axis direction will be given, and the detailed explanation of the ones along the Y-axis direction etc. will be omitted.

In the inspection route registration method in the processing apparatus 1 according to the first embodiment, first, before the processing unit 20 performs the cutting process to form the cutting groove 300, the control unit 60 refers to the processing conditions etc. An image of a part or the entire surface 201 of the workpiece 200 is displayed on the display unit 40. Specifically, this alignment image is a top view of the workpiece 200 in which the cutting groove 300 is not formed, as shown in FIG. It should be noted that the control unit 60 detects and recognizes the position and orientation of the holding surface 11 of the chuck table 10 of all scheduled division lines 202 in XY coordinates at the time of performing the alignment. It is now possible to define accurately.

In the inspection route registration method in the processing apparatus 1 according to the first embodiment, the control unit 60 next receives, via the input unit 42, the operator's selection of the planned dividing line 202 to be included in the observation target. In the inspection route registration method in the processing apparatus 1 according to the first embodiment, the control unit 60 allows the operator to display and select the planned dividing line 202-1 and the planned dividing line 202-2 shown in FIG. 3 on the screen, for example. Then, the selection of the planned dividing line 202-1 and the planned dividing line 202-2 is accepted. In the inspection route registration method in the processing apparatus 1 according to the first embodiment, when the control unit 60 receives the selection of the planned division lines 202-1 and 202-2, the control unit 60 selects the following on the screen displayed on the display unit 40: The division schedule lines 202-1 and 202-2 whose selections have been accepted may be highlighted so that the operator can visually recognize that the selections of the division schedule lines 202-1 and 202-2 have been accepted.

In the inspection route registration method in the processing apparatus 1 according to the first embodiment, the control unit 60 next selects the other planned dividing lines 202 while accepting the selection of the planned dividing lines 202-1 and 202-2. When the acceptance is completed, as shown in FIG. 4, an inspection route 400 including the scheduled dividing lines 202-1 and 202-2 is generated. Specifically, in the inspection route registration method in the processing apparatus 1 according to the first embodiment, the control unit 60 creates a first inspection route that includes the entire route from one end of the scheduled dividing line 202-1 to the other end. A portion 401, a third inspection route portion 403 that includes the entire route from one end of the scheduled dividing line 202-2 to the other end, and a first inspection route portion 401 and a third inspection route portion 403 in the shortest possible time. A second inspection route portion 402 for connection is generated, respectively, and an inspection route 400 is generated by connecting the first inspection route portion 401, the second inspection route portion 402, and the third inspection route portion 403.

In addition, in the inspection route registration method in the processing apparatus 1 according to the first embodiment, for the inspection route portions 401 and 403 based on the selected division line 202, the end on the −X direction side is set as one end, that is, the starting point, and the +X Although the end on the direction side is set as the other end, that is, the end point, the present invention is not limited to this, and the direction of the inspection route part can be reversed by reversing the settings of the start point and end point, or the start point and end point can be reversed. The setting of the orientation of the inspection route portion can be changed as appropriate, such as by alternating the settings for each scheduled dividing line 202 and alternating the orientation of the inspection route portion.

In the inspection route registration method in the processing apparatus 1 according to the first embodiment, the control unit 60 causes the inspection route registration section 61 to register the inspection route 400 generated as described above.

In the observation support process performed by the processing apparatus 1 according to the first embodiment, the control unit 60 next performs the X The camera 30 is moved along the XY plane by the axis movement unit 51 and the Y-axis movement unit 52, and the camera 30 photographs a portion of each inspection position on the inspection route 400 of the workpiece 200, thereby obtaining each photographed image. get.

In the observation support process performed by the processing apparatus 1 according to the first embodiment, the control unit 60 specifically determines the inspection position 411 including the starting point on the first inspection route portion 401 of the inspection route 400 and the first inspection route. An inspection position 412 containing the midpoint on the section 401 , an inspection position 413 containing the end point on the first inspection route section 401 , every inspection position between the inspection positions 411 and 412 , and the inspection position 412 and each inspection position 413 , an inspection position 414 including the starting point on the third inspection route portion 403 of the inspection route 400 , and an inspection position 415 including the midpoint on the third inspection route portion 403 . , a test position 416 including the end point on the third test route portion 403 , all test positions between test positions 414 and 415 , and all test positions between test positions 415 and 416 . At the inspection position, the workpiece 200 is photographed to obtain each photographed image.

In the observation support process performed by the processing apparatus 1 according to the first embodiment, the control unit 60 controls the inspection positions 411, 412, and 413, as shown in FIGS. In each case, a photographed image is obtained in which the planned dividing line 202 of the workpiece 200 and the cutting groove 300 formed along the planned dividing line 202 are photographed.

In the observation support process performed by the processing apparatus 1 according to the first embodiment, the control unit 60 controls the first inspection route 400, including the captured images shown in FIGS. The images taken at all the inspection positions on the inspection route portion 401 are displayed one after another on the display unit 40 at a predetermined speed that is visible to the operator. In addition, in the observation support process performed by the processing apparatus 1 according to the first embodiment, the control unit 60 also performs the following operations on the third inspection route portion 403 of the inspection route 400 in the same way as the first inspection route portion 401 of the inspection route 400. Each photographed image is displayed one after another on the display unit 40. In this way, the operator can easily observe the division lines 202-1 and 202-2 selected by the operator, which are fixed positions on the workpiece 200, without spending much time or man-hours. For example, the presence or absence of meandering in the cut grooves 300 formed on the scheduled dividing lines 202-1 and 202-2 can be easily inspected. The control unit 60 allows the operator to easily visually determine the occurrence of meandering in the cut groove 300 by displaying each photographed image one after another in a moving image on the display unit 40 in this way.

Further, the control unit 60 is not limited to this display form in the present invention, and may, for example, selectively display only the photographed images at the inspection positions 411, 412, and 413 sequentially, or may display these photographed images side by side at once. In these cases as well, the operator can easily visually determine the occurrence of meandering in the cut groove 300, similar to the display format described above. Further, when implementing such a display form, the control unit 60 registers the inspection positions 411, 412, and 413, which are locations where photographed images are selectively displayed, in the inspection route registration section 61 together with the inspection route 400.

Since the processing apparatus 1 according to the first embodiment has the above configuration, the control unit 60 performs an inspection in which the movement unit 50 moves the camera 30 for photographing the workpiece 200 relative to the chuck table 10. It is equipped with an inspection route registration section 61 that registers a route 400, and captures an image of the workpiece 200 with a camera 30 that moves relative to the chuck table 10 according to the inspection route 400 registered in the inspection route registration section 61. Displayed on the display unit 40. For this reason, the processing apparatus 1 according to the first embodiment requires troublesome work such as the operator moving the observation position (photographing position) of the workpiece 200 while continuously pressing an operation button to move the observation position (photographing position). Since this method does not require , it is possible to reduce the working time and man-hours required for observing a fixed position of the workpiece 200. Further, for this reason, the processing apparatus 1 according to the first embodiment has the effect that the operator does not need to be skilled in the task of observing a fixed position of the workpiece 200.

Furthermore, the processing apparatus 1 according to the first embodiment further includes an image recording unit 62 that records images taken by the camera 30 moving along the inspection route 400. Therefore, the processing apparatus 1 according to the first embodiment allows the operator to easily re-observe the fixed position of the workpiece 200. Further, for this reason, the processing device 1 according to the first embodiment enables other inspections such as a kerf check using the captured image, for example, when the captured image is along the division planned line 202. It has the following effects. Further, for this reason, the processing apparatus 1 according to the first embodiment has the effect of being able to automatically accumulate data such as photographed images that can be used as proof of processing of the workpiece 200 and traceability.

In addition, the processing apparatus 1 according to the first embodiment uses an image of the workpiece 200 for performing alignment, etc., to accept the selection of the planned dividing line 202, and to apply the selected dividing planned line 202 to the selected dividing planned line 202. An inspection route 400 including a portion along the route is generated. Therefore, the processing apparatus 1 according to the first embodiment does not require the operator to perform the troublesome work of searching for a predetermined dividing line 202 when the operator has decided to observe the specified dividing line 202. This has the effect that the work time and man-hours required for observing the planned division line 202 can be reduced. The processing apparatus 1 according to the first embodiment uses the alignment performed before the cutting process to generate the inspection route 400 based on the planned dividing line 202, so that the holding surface of the chuck table 10 of the workpiece 200 is Even if the placement position on the image forming apparatus 11 is shifted, the intended dividing line 202 to be observed can be suitably observed.

[Embodiment 2]
A processing apparatus 1 according to a second embodiment of the present invention will be described based on the drawings. FIG. 6 is a top view illustrating an example of inspection route registration in the processing apparatus 1 according to the second embodiment. FIG. 7 is a top view illustrating an example of the inspection route 430 registered in the processing apparatus 1 according to the second embodiment. Note that in FIGS. 6 and 7, the adhesive tape 205 and the annular frame 206 are omitted as in FIGS. 3 and 4. In FIGS. 6 and 7, the same parts as those in Embodiment 1 are denoted by the same reference numerals, and the description thereof will be omitted.

The processing apparatus 1 according to the second embodiment is the same as the apparatus configuration in the first embodiment, except that the inspection route registration method is changed from the method of selecting the planned dividing line 202 to the method of tracing the inspection route 430. . Here, the tracing method of the inspection route registration method may be a method of registering the inspection route 430 in a single stroke, or by registering the points of the inspection route 430, the shortest route connecting the points is taken. may be calculated and the inspection route 430, which looks like a single stroke, is registered. Note that the processing apparatus 1 according to the second embodiment is not limited to the position on the planned dividing line 202, and may register a predetermined device 203, for example.

In the inspection route registration method in the processing apparatus 1 according to the second embodiment, the control unit 60 traces the planned division line 202-1 shown in FIG. 6 from the end in the +X direction toward the end in the -X direction, for example. Trace along the path 420 from the -X direction end of the division plan line 202-1 to the -X direction end of the division plan line 202-2 shown in FIG. It accepts input of a series of route lines traced from the end on the +X direction side to the end on the +X direction side. In the inspection route registration method in the processing apparatus 1 according to the second embodiment, when the control unit 60 receives an input by tracing the inspection route 430, the control unit 60 displays the traced inspection route 430 on the screen displayed on the display unit 40. The part where the input by tracing the inspection route 430 has been accepted is highlighted, so that the operator can visually recognize that the input by tracing the inspection route 430 has been accepted.

In the inspection route registration method in the processing apparatus 1 according to the second embodiment, next, when the control unit 60 completes the operation of tracing the inspection route 430 while receiving the input of a series of route lines as described above, As shown in FIG. 7, an inspection route 430 including the scheduled dividing lines 202-1 and 202-2 is generated. Specifically, in the inspection route registration method in the processing apparatus 1 according to the second embodiment, the control unit 60 traces the first inspection route portion 431 corresponding to the traced portion and orientation of the planned division line 202-1, and A second inspection route portion 432 corresponding to the traced route 420 and a third inspection route portion 433 corresponding to the traced portion and direction of the planned dividing line 202-2 are generated, and the first inspection route portion 431 , a second test route portion 432 and a third test route portion 433 are connected to generate a test route 430.

Here, the inspection route 430 according to the second embodiment has a direction opposite to that of the inspection route 400 according to the first embodiment at the portion of the planned division line 202-2. Accordingly, in the processing apparatus 1 according to the second embodiment, the control unit 60 determines the acquisition order of images to be photographed by the camera 30, the sliding direction in sliding display on the display unit 40, and the images to be recorded in the image recording unit 62. The recording order of each will be reversed.

Since the processing apparatus 1 according to the second embodiment has the above-described configuration, the control unit 60 includes the same inspection route registration section 61 and image recording section 62 as in the processing apparatus 1 according to the first embodiment, An image taken of the workpiece 200 by the camera 30 moving according to the inspection route 400 registered in the inspection route registration section 61 is displayed on the display unit 40. Therefore, the processing apparatus 1 according to the second embodiment has the same effects as the processing apparatus 1 according to the first embodiment.

Furthermore, the processing apparatus 1 according to the second embodiment accepts input of the inspection route 430 by tracing the inspection route 430 using an image of the workpiece 200 for performing alignment. Therefore, the processing apparatus 1 according to the second embodiment can determine the inspection route 430 in accordance with the senses of the operator, so that the operator can perform tasks such as observing the planned dividing line 202 that is sensually comfortable. It has the effect of being able to.

Note that the present invention is not limited to the above embodiments. That is, various modifications can be made without departing from the gist of the invention.

1 Processing device 10 Chuck table 11 Holding surface 20 Processing unit 30 Camera 40 Display unit 50 Movement unit 60 Control unit 61 Inspection route registration section 62 Image recording section 200 Workpiece 202, 202-1, 202-2 Scheduled dividing line 300 Cutting Groove 400, 430 Inspection route 401, 431 First inspection route portion 402, 432 Second inspection route portion 403, 433 Third inspection route portion 411, 412, 413, 414, 415, 416 Inspection position

Claims (5)

A processing device comprising: a chuck table that holds a workpiece having a scheduled dividing line on a holding surface; and a processing unit that processes the workpiece held on the chuck table along the scheduled dividing line,
a camera that photographs the workpiece held on the chuck table;
a display unit that displays images taken with the camera;
a moving unit that moves the chuck table relative to the processing unit and the camera in an X direction and a Y direction parallel to the holding surface;
A control unit that controls each component,
The control unit includes:
An inspection route in which the moving unit moves the camera that photographs the workpiece relative to the chuck table is set on the dividing line, and the inspection route set on the dividing line is registered. Equipped with an inspection route registration section,
At each inspection position between the start point and the end point of the inspection route registered in the inspection route registration section, the inspection device moves relative to the chuck table according to the inspection route registered in the inspection route registration section. A processing device that displays an image of a workpiece captured by a camera on the display unit. The processing apparatus according to claim 1, further comprising an image recording section in which an image photographed by the camera is recorded. When the predetermined dividing scheduled line is selected, the control unit sets the entire predetermined dividing scheduled line from one end to the other end as the inspection route, and sets it in the inspection route registration section. The processing device according to claim 1, wherein the processing device is registered. The processing apparatus according to claim 1, wherein the control unit sets the traced portion as the inspection route and registers it in the inspection route registration section. The processing apparatus according to claim 1, wherein the control unit automatically corrects the traced portion to a position on the nearest planned division line, sets it as the inspection route, and registers it in the inspection route registration section. .

Images