JP7298073B2 - 光学部材 - Google Patents
光学部材 Download PDFInfo
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- JP7298073B2 JP7298073B2 JP2020531312A JP2020531312A JP7298073B2 JP 7298073 B2 JP7298073 B2 JP 7298073B2 JP 2020531312 A JP2020531312 A JP 2020531312A JP 2020531312 A JP2020531312 A JP 2020531312A JP 7298073 B2 JP7298073 B2 JP 7298073B2
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- optical member
- refractive index
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- optical
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- Prior art date
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- 230000003287 optical effect Effects 0.000 title claims description 316
- 239000000758 substrate Substances 0.000 claims description 145
- 239000011521 glass Substances 0.000 claims description 102
- 238000002834 transmittance Methods 0.000 claims description 75
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 53
- 239000000463 material Substances 0.000 claims description 45
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 35
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 30
- 239000000126 substance Substances 0.000 claims description 29
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 26
- 239000010703 silicon Substances 0.000 claims description 26
- 229910052710 silicon Inorganic materials 0.000 claims description 24
- 241000428199 Mustelinae Species 0.000 claims description 22
- 239000000203 mixture Substances 0.000 claims description 21
- 229910052742 iron Inorganic materials 0.000 claims description 20
- 238000000034 method Methods 0.000 claims description 19
- 239000005340 laminated glass Substances 0.000 claims description 18
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 17
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 17
- 230000005540 biological transmission Effects 0.000 claims description 12
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 12
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 claims description 10
- 229910001928 zirconium oxide Inorganic materials 0.000 claims description 10
- QPLDLSVMHZLSFG-UHFFFAOYSA-N Copper oxide Chemical compound [Cu]=O QPLDLSVMHZLSFG-UHFFFAOYSA-N 0.000 claims description 9
- 239000005751 Copper oxide Substances 0.000 claims description 9
- 229910000431 copper oxide Inorganic materials 0.000 claims description 9
- 229910018072 Al 2 O 3 Inorganic materials 0.000 claims description 8
- 229910052782 aluminium Inorganic materials 0.000 claims description 8
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 8
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 claims description 8
- 238000007373 indentation Methods 0.000 claims description 8
- 230000008859 change Effects 0.000 claims description 7
- 239000002241 glass-ceramic Substances 0.000 claims description 6
- 239000010980 sapphire Substances 0.000 claims description 6
- 229910052594 sapphire Inorganic materials 0.000 claims description 6
- 229910000420 cerium oxide Inorganic materials 0.000 claims description 4
- 239000010949 copper Substances 0.000 claims description 4
- 239000012634 fragment Substances 0.000 claims description 4
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 claims description 4
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 claims description 4
- 229910001887 tin oxide Inorganic materials 0.000 claims description 4
- 239000005341 toughened glass Substances 0.000 claims description 4
- 239000006121 base glass Substances 0.000 claims description 3
- 229910052804 chromium Inorganic materials 0.000 claims description 3
- 239000010941 cobalt Substances 0.000 claims description 2
- 229910017052 cobalt Inorganic materials 0.000 claims description 2
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 claims description 2
- ORUIBWPALBXDOA-UHFFFAOYSA-L magnesium fluoride Chemical compound [F-].[F-].[Mg+2] ORUIBWPALBXDOA-UHFFFAOYSA-L 0.000 claims description 2
- 229910001635 magnesium fluoride Inorganic materials 0.000 claims description 2
- 239000011651 chromium Substances 0.000 claims 2
- 239000000395 magnesium oxide Substances 0.000 claims 2
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 claims 2
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 claims 2
- 239000011572 manganese Substances 0.000 claims 2
- 239000011669 selenium Substances 0.000 claims 2
- ODINCKMPIJJUCX-UHFFFAOYSA-N Calcium oxide Chemical compound [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 claims 1
- 229910052684 Cerium Inorganic materials 0.000 claims 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims 1
- PWHULOQIROXLJO-UHFFFAOYSA-N Manganese Chemical compound [Mn] PWHULOQIROXLJO-UHFFFAOYSA-N 0.000 claims 1
- BUGBHKTXTAQXES-UHFFFAOYSA-N Selenium Chemical compound [Se] BUGBHKTXTAQXES-UHFFFAOYSA-N 0.000 claims 1
- GWXLDORMOJMVQZ-UHFFFAOYSA-N cerium Chemical compound [Ce] GWXLDORMOJMVQZ-UHFFFAOYSA-N 0.000 claims 1
- 229910052802 copper Inorganic materials 0.000 claims 1
- JEIPFZHSYJVQDO-UHFFFAOYSA-N ferric oxide Chemical compound O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 claims 1
- 229910052748 manganese Inorganic materials 0.000 claims 1
- 229910052711 selenium Inorganic materials 0.000 claims 1
- 239000010408 film Substances 0.000 description 179
- 239000010410 layer Substances 0.000 description 173
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 14
- 230000015572 biosynthetic process Effects 0.000 description 14
- 239000007789 gas Substances 0.000 description 14
- 238000000151 deposition Methods 0.000 description 12
- 230000008021 deposition Effects 0.000 description 12
- 239000012790 adhesive layer Substances 0.000 description 9
- 239000005357 flat glass Substances 0.000 description 9
- 230000003595 spectral effect Effects 0.000 description 9
- 230000004075 alteration Effects 0.000 description 8
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 7
- 229910052786 argon Inorganic materials 0.000 description 7
- 238000006243 chemical reaction Methods 0.000 description 7
- 238000005259 measurement Methods 0.000 description 7
- 229910044991 metal oxide Inorganic materials 0.000 description 7
- 150000004706 metal oxides Chemical class 0.000 description 7
- 238000012360 testing method Methods 0.000 description 7
- 238000000576 coating method Methods 0.000 description 6
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 5
- 230000000052 comparative effect Effects 0.000 description 5
- 238000013461 design Methods 0.000 description 5
- 239000001301 oxygen Substances 0.000 description 5
- 229910052760 oxygen Inorganic materials 0.000 description 5
- 229920005989 resin Polymers 0.000 description 5
- 239000011347 resin Substances 0.000 description 5
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 238000006124 Pilkington process Methods 0.000 description 4
- 238000004031 devitrification Methods 0.000 description 4
- 238000011156 evaluation Methods 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 239000012788 optical film Substances 0.000 description 4
- 239000005361 soda-lime glass Substances 0.000 description 4
- 229910004298 SiO 2 Inorganic materials 0.000 description 3
- 229910052681 coesite Inorganic materials 0.000 description 3
- 229910052906 cristobalite Inorganic materials 0.000 description 3
- 230000006866 deterioration Effects 0.000 description 3
- 238000006073 displacement reaction Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000000465 moulding Methods 0.000 description 3
- 229910000484 niobium oxide Inorganic materials 0.000 description 3
- URLJKFSTXLNXLG-UHFFFAOYSA-N niobium(5+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Nb+5].[Nb+5] URLJKFSTXLNXLG-UHFFFAOYSA-N 0.000 description 3
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 description 3
- 239000000377 silicon dioxide Substances 0.000 description 3
- 235000012239 silicon dioxide Nutrition 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 229910052682 stishovite Inorganic materials 0.000 description 3
- 238000005728 strengthening Methods 0.000 description 3
- 229910001936 tantalum oxide Inorganic materials 0.000 description 3
- 238000005496 tempering Methods 0.000 description 3
- 229910052905 tridymite Inorganic materials 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- GOLCXWYRSKYTSP-UHFFFAOYSA-N Arsenious Acid Chemical compound O1[As]2O[As]1O2 GOLCXWYRSKYTSP-UHFFFAOYSA-N 0.000 description 2
- 229920000089 Cyclic olefin copolymer Polymers 0.000 description 2
- CWYNVVGOOAEACU-UHFFFAOYSA-N Fe2+ Chemical compound [Fe+2] CWYNVVGOOAEACU-UHFFFAOYSA-N 0.000 description 2
- KKCBUQHMOMHUOY-UHFFFAOYSA-N Na2O Inorganic materials [O-2].[Na+].[Na+] KKCBUQHMOMHUOY-UHFFFAOYSA-N 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 2
- 239000005354 aluminosilicate glass Substances 0.000 description 2
- 238000000149 argon plasma sintering Methods 0.000 description 2
- 238000005452 bending Methods 0.000 description 2
- WMWLMWRWZQELOS-UHFFFAOYSA-N bismuth(iii) oxide Chemical compound O=[Bi]O[Bi]=O WMWLMWRWZQELOS-UHFFFAOYSA-N 0.000 description 2
- 239000005388 borosilicate glass Substances 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 238000004090 dissolution Methods 0.000 description 2
- 239000005038 ethylene vinyl acetate Substances 0.000 description 2
- 238000000869 ion-assisted deposition Methods 0.000 description 2
- 238000010030 laminating Methods 0.000 description 2
- JKQOBWVOAYFWKG-UHFFFAOYSA-N molybdenum trioxide Chemical compound O=[Mo](=O)=O JKQOBWVOAYFWKG-UHFFFAOYSA-N 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 229920001200 poly(ethylene-vinyl acetate) Polymers 0.000 description 2
- 229920002037 poly(vinyl butyral) polymer Polymers 0.000 description 2
- DLYUQMMRRRQYAE-UHFFFAOYSA-N tetraphosphorus decaoxide Chemical compound O1P(O2)(=O)OP3(=O)OP1(=O)OP2(=O)O3 DLYUQMMRRRQYAE-UHFFFAOYSA-N 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 229910052726 zirconium Inorganic materials 0.000 description 2
- 229910020599 Co 3 O 4 Inorganic materials 0.000 description 1
- 229910018068 Li 2 O Inorganic materials 0.000 description 1
- 241001074085 Scophthalmus aquosus Species 0.000 description 1
- 229910006404 SnO 2 Inorganic materials 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 229910000272 alkali metal oxide Inorganic materials 0.000 description 1
- 230000003373 anti-fouling effect Effects 0.000 description 1
- ADCOVFLJGNWWNZ-UHFFFAOYSA-N antimony trioxide Inorganic materials O=[Sb]O[Sb]=O ADCOVFLJGNWWNZ-UHFFFAOYSA-N 0.000 description 1
- CETPSERCERDGAM-UHFFFAOYSA-N ceric oxide Chemical compound O=[Ce]=O CETPSERCERDGAM-UHFFFAOYSA-N 0.000 description 1
- 229910000422 cerium(IV) oxide Inorganic materials 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000003280 down draw process Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000006025 fining agent Substances 0.000 description 1
- QZQVBEXLDFYHSR-UHFFFAOYSA-N gallium(III) oxide Inorganic materials O=[Ga]O[Ga]=O QZQVBEXLDFYHSR-UHFFFAOYSA-N 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 238000007496 glass forming Methods 0.000 description 1
- 230000009477 glass transition Effects 0.000 description 1
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(III) oxide Inorganic materials [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 1
- BIZCJSDBWZTASZ-UHFFFAOYSA-N iodine pentoxide Inorganic materials O=I(=O)OI(=O)=O BIZCJSDBWZTASZ-UHFFFAOYSA-N 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 150000002736 metal compounds Chemical class 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 239000010955 niobium Substances 0.000 description 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000005871 repellent Substances 0.000 description 1
- 238000007372 rollout process Methods 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000004611 spectroscopical analysis Methods 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- YEAUATLBSVJFOY-UHFFFAOYSA-N tetraantimony hexaoxide Chemical compound O1[Sb](O2)O[Sb]3O[Sb]1O[Sb]2O3 YEAUATLBSVJFOY-UHFFFAOYSA-N 0.000 description 1
- 229920005992 thermoplastic resin Polymers 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C4/00—Compositions for glass with special properties
- C03C4/0092—Compositions for glass with special properties for glass with improved high visible transmittance, e.g. extra-clear glass
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/208—Filters for use with infrared or ultraviolet radiation, e.g. for separating visible light from infrared and/or ultraviolet radiation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B60—VEHICLES IN GENERAL
- B60J—WINDOWS, WINDSCREENS, NON-FIXED ROOFS, DOORS, OR SIMILAR DEVICES FOR VEHICLES; REMOVABLE EXTERNAL PROTECTIVE COVERINGS SPECIALLY ADAPTED FOR VEHICLES
- B60J1/00—Windows; Windscreens; Accessories therefor
- B60J1/001—Double glazing for vehicles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B60—VEHICLES IN GENERAL
- B60J—WINDOWS, WINDSCREENS, NON-FIXED ROOFS, DOORS, OR SIMILAR DEVICES FOR VEHICLES; REMOVABLE EXTERNAL PROTECTIVE COVERINGS SPECIALLY ADAPTED FOR VEHICLES
- B60J1/00—Windows; Windscreens; Accessories therefor
- B60J1/02—Windows; Windscreens; Accessories therefor arranged at the vehicle front, e.g. structure of the glazing, mounting of the glazing
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B27/00—Tempering or quenching glass products
- C03B27/04—Tempering or quenching glass products using gas
- C03B27/0413—Stresses, e.g. patterns, values or formulae for flat or bent glass sheets
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
- C03C17/3417—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials all coatings being oxide coatings
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
- C03C17/3429—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating
- C03C17/3435—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating comprising a nitride, oxynitride, boronitride or carbonitride
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C3/00—Glass compositions
- C03C3/04—Glass compositions containing silica
- C03C3/076—Glass compositions containing silica with 40% to 90% silica, by weight
- C03C3/083—Glass compositions containing silica with 40% to 90% silica, by weight containing aluminium oxide or an iron compound
- C03C3/085—Glass compositions containing silica with 40% to 90% silica, by weight containing aluminium oxide or an iron compound containing an oxide of a divalent metal
- C03C3/087—Glass compositions containing silica with 40% to 90% silica, by weight containing aluminium oxide or an iron compound containing an oxide of a divalent metal containing calcium oxide, e.g. common sheet or container glass
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C3/00—Glass compositions
- C03C3/04—Glass compositions containing silica
- C03C3/076—Glass compositions containing silica with 40% to 90% silica, by weight
- C03C3/089—Glass compositions containing silica with 40% to 90% silica, by weight containing boron
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C4/00—Compositions for glass with special properties
- C03C4/10—Compositions for glass with special properties for infrared transmitting glass
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/28—Interference filters
- G02B5/281—Interference filters designed for the infrared light
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/28—Interference filters
- G02B5/285—Interference filters comprising deposited thin solid films
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
- C03C17/3429—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating
- C03C17/3482—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating comprising silicon, hydrogenated silicon or a silicide
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/70—Properties of coatings
- C03C2217/73—Anti-reflective coatings with specific characteristics
- C03C2217/734—Anti-reflective coatings with specific characteristics comprising an alternation of high and low refractive indexes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
- G01S17/88—Lidar systems specially adapted for specific applications
- G01S17/93—Lidar systems specially adapted for specific applications for anti-collision purposes
- G01S17/931—Lidar systems specially adapted for specific applications for anti-collision purposes of land vehicles
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/481—Constructional features, e.g. arrangements of optical elements
- G01S7/4811—Constructional features, e.g. arrangements of optical elements common to transmitter and receiver
- G01S7/4813—Housing arrangements
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Description
本明細書において、特定の波長域について、透過率が例えば78%以上とは、その全波長領域において透過率が78%を下回らないことをいう。同様に、透過率が例えば1%以下とは、その全波長領域において透過率が1%を超えないことをいう。
本明細書において、数値範囲を表す「~」では、上限値と下限値を数値の範囲に含む。
なお、以下の説明において、T(1)min≧86.5%を(1-1)の要件、ΔT(1)≦9%を(1-2)の要件ともいう。
本実施形態において、透明基板1は互いに対向する第1の主面1aおよび第2の主面1bを有する。透明基板1は、ガラス、ガラスセラミックス、ケイ素およびサファイヤから選ばれる少なくとも1つの物質を含み、700nm以上1800nm以下の波長域における最小透過率(以下、「TB700-1800」ともいう。)が78%以上である。なお、上記のとおり、透明基板1は必要に応じて、部分的に要件(A)を満たさなくてもよいが、以下では、透明基板1が全体として要件(A)を満たす場合を例に説明する。
SiO2 :55%~85%、
Al2O3 :0%~30%、
B2O3 :0%~20%、
CaO :0%~20%、
MgO :0%~15%、
BaO :0%~20%、
Na2O :0%~25%、
K2O :0%~20%。
光干渉膜2は、透明基板1の第1の主面1a上に形成され、得られる光学部材10Aが要件(1)を満たすように機能する。光干渉膜2は、例えば、得られる光学部材10Aにおいて、波長λsの光に対して、入射角0度~60度の範囲で、透明基板1を単独で使用した場合に比べて反射率を低下させることで、光学部材10Aが要件(1)を満たすように機能する。光干渉膜2は、さらに、得られる光学部材10Aが要件(2)~(4)から選ばれる1つ以上の要件を満たすように機能することが好ましい。
(ii)t21=0.260λs、t22=0.140λs、t23=0.311λs
ただし、これらの係数は代表値であり、光学膜厚は、実質的にこれらの値の±5%程度の幅を有してもよい。以下に示す例でも同様である。
透明基板として、表1に組成、光学特性およびマルテンス硬度を示す、5種類のガラス基板を用いた。なお、ガラス基板の光学特性およびマルテンス硬度は、後述の光学部材の評価に用いられる方法と同様の方法で測定した。ガラス基板GA、GB、GC、GEは要件(A)を満たすガラス基板であり、ガラス基板GDは、要件(A)を満たさず、TB700-1800が78%未満である。表1において、ガラス基板GAの組成における「Co」はコバルト(Co)酸化物の成分を示す。
(1)光学性能
分光光度計(V-570、日本分光社製)を用いて、以下の光学特性を測定した。測定光は、光学部材の第1の光干渉膜に対して照射した。図2Aおよび図3Aは、それぞれ例1の光学部材および例2の光学部材の入射角0度と60度における分光透過率曲線を示す。
200nm~1800nmの波長域において入射角0度から5度おきに入射角60度まで13の透過率を測定した。この13の透過率曲線から、波長λsにおける透過率の最小値および最大値をそれぞれ求めた。表3および表4に、透過率の最小値および最大値をそのときの入射角(θ2、θ1)と共に、T(1)min(θ2)、T(1)max(θ1)として、それらの差をΔT(1)として示す。なお、T(1)minが入射角60度のときの透過率である場合、すなわち、θ2が60度のときに最小値をとる場合、括弧つきの角度の記載は省略した。同様に、T(1)maxが入射角0度のときの透過率である場合、すなわち、θ1が0度のときに最大値をとる場合、括弧つきの角度の記載は省略した。
分光光度計および絶対反射治具を用い、入射角5度における透過率および反射率を測定した。波長λsにおいて、100%から反射率と透過率を減じた値を、光損失とした。
光学部材を、温度60℃、相対湿度80%の環境に48時間暴露した前後において、波長λsにおける入射角0度の透過率の変化(試験前の透過率と試験後の透過率との差)を評価した。透過率の変化が1%以下であることが求められる。
PICODENTOR(HM500、フィッシャー・インスツルメンツ社製)を用いて、光学部材の第1の光干渉膜の表面でマルテンス硬度を測定した。押し込み深さを50±10nmとして、測定を15回行った。15回の平均値をマルテンス硬度とした。光干渉膜を有しない例16~19に対しては、測定は行わなかった。
600度、および660度に加熱したバッチ炉に光学部材を入れ、10分保持した後、取り出し、波長λsにおける入射角0度の透過率の変化(試験前の透過率と試験後の透過率との差)を評価した。透過率の変化が1%以下であることが求められる。
レーザー干渉式の平坦度計(Zygo社製、Verifire MarkIV)による表面形状の測定結果からチル卜成分を除いた残渣を基に表面形状を求め、表面形状の最大値と最小値の差を波面収差とした。測定は、直径φ80mmの範囲に対して行った。波面収差は、例23~29の光学部材について、上記660度の加熱試験の前後で測定した。
1 透明基板
2 光干渉膜
10B 光学部材(フロントガラス)
3 開口部
4 遮蔽層
20 フロントガラス
5 光学接着層
40 LiDARセンサ本体
Claims (24)
- ガラス、ガラスセラミックス、ケイ素およびサファイヤから選ばれる少なくとも1つの物質を含み、700nm以上1800nm以下の波長域における光透過率が78%以上である赤外線高透過領域を有する透明基板と、
前記赤外線高透過領域に対応する前記透明基板の主面に配置された光干渉膜と、
を備える光学部材であって、
700nm以上1800nm以下の波長域内の少なくとも一つの波長λsにおける前記透明基板の前記赤外線高透過領域に対応する前記光学部材の領域の光の透過率が、入射角が0度以上60度以下の範囲で、86.5%以上の最小値を有し、かつ9%以下の最小値と最大値の差を有し、
車両と周囲の物体との距離を測定するLiDARセンサ用であってLiDARがセンシングに用いる赤外光の透過用である、光学部材。 - 前記透明基板が非晶質材料からなる、請求項1に記載の光学部材。
- 前記透明基板の前記赤外線高透過領域に対応する前記光学部材の領域において、入射角5度で照射した前記波長λsの光における光損失が3%以下である、請求項1または2に記載の光学部材。
- 前記光学部材を、温度60℃、相対湿度80%の環境に48時間暴露した前後において、前記透明基板の前記赤外線高透過領域に対応する前記光学部材の領域において、前記波長λsにおける入射角0度の透過率の変化が1%以下である、請求項1~3のいずれか1項に記載の光学部材。
- 前記光学部材の前記光干渉膜の表面で測定される押込み深さ50nmのマルテンス硬度が、前記透明基板の表面に対して測定される押込み深さ50nmのマルテンス硬度よりも大きい、請求項1~4のいずれか1項に記載の光学部材。
- 前記光干渉膜は、低屈折率層と高屈折率層を含む2層以上からなる請求項1~5のいずれか1項に記載の光学部材。
- 前記低屈折率層と前記高屈折率層は互いに隣接し、隣接する前記低屈折率層と前記高屈折率層との屈折率差は0.1以上である請求項6に記載の光学部材。
- 前記低屈折率層は、酸化ケイ素およびフッ化マグネシウムから選ばれる少なくとも1つの物質を主成分とする請求項6または7に記載の光学部材。
- 前記高屈折率層は、窒化ケイ素、酸窒化ケイ素、窒化アルミニウム、酸窒化アルミニウム、酸化ジルコニウム、酸化スズ、酸化セリウム、ケイ素および酸化銅から選ばれる少なくとも1つの物質を主成分とする請求項6~8のいずれか1項に記載の光学部材。
- 前記光干渉膜は、互いに隣接する前記低屈折率層と前記高屈折率層を有し、さらに中間屈折率層を有する請求項6~9のいずれか1項に記載の光学部材。
- 前記中間屈折率層は、酸化アルミニウム、酸窒化ケイ素、酸窒化アルミニウム、酸化ケイ素と酸化ジルコニウムの混合物、および酸化ケイ素と窒化アルミニウムの混合物から選ばれる少なくとも1つの物質を主成分とする請求項10に記載の光学部材。
- 前記光干渉膜を構成する層の少なくとも1層は幾何学的厚みが50nm以上である請求項6~11のいずれか1項に記載の光学部材。
- 前記光干渉膜の幾何学的総膜厚が300nm以上である請求項1~12のいずれか1項に記載の光学部材。
- 前記透明基板は、基本のガラス100質量%に対して、三酸化二鉄(Fe2O3)換算で1~500質量ppmの鉄(Fe)を含有する鉄含有ガラスからなる請求項1~13のいずれか1項に記載の光学部材。
- 前記鉄含有ガラスは、前記基本のガラス100質量%に対して、さらに、クロム(Cr)酸化物、コバルト(Co)酸化物、マンガン(Mn)酸化物、セリウム(Ce)酸化物、銅(Cu)酸化物およびセレン(Se)酸化物からなる群より選択される少なくとも1つの物質を0.0001~2.5質量%含有する請求項14に記載の光学部材。
- 前記基本のガラスは、酸化アルミニウム(Al2O3)、酸化マグネシウム(MgO)および酸化カルシウム(CaO)を合計で0.1~30質量%含有する請求項14または15に記載の光学部材。
- 前記透明基板は、強化ガラスである請求項1~16のいずれか1項に記載の光学部材。
- JIS R 3211に準拠した方法により前記透明基板を破砕したとき、50mm×50mmの正方形の領域からの破片の数が、40個以上400個以下である請求項17に記載の光学部材。
- 前記透明基板は、合わせガラスである請求項1~16のいずれか1項に記載の光学部材。
- JIS R 3211に準拠した方法により前記透明基板を破砕したとき、前記透明基板の衝撃面の反対側の面からの剥離破片の総質量が、20g以下である請求項19に記載の光学部材。
- 前記透明基板の厚みが1.5~4.5mmである請求項1~20のいずれか1項に記載の光学部材。
- 前記波長λsが840nm以上1000nm以下である請求項1~21のいずれか1項に記載の光学部材。
- 前記波長λsが1400nm以上1600nm以下である請求項1~21のいずれか1項に記載の光学部材。
- 前記波長λsが840nm以上1000nm以下および1400nm以上1600nm以下の範囲にそれぞれ1つ以上存在する請求項1~21のいずれか1項に記載の光学部材。
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2019
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- 2019-07-16 WO PCT/JP2019/027906 patent/WO2020017495A1/ja unknown
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WO2000033110A1 (fr) | 1998-11-30 | 2000-06-08 | Asahi Glass Company Ltd. | Film antireflet pour fenetre de materiel de transport, verre a film antireflet, verre feuillete et leur procede de production |
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Also Published As
Publication number | Publication date |
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EP3825742A1 (en) | 2021-05-26 |
EP3825742A4 (en) | 2022-05-04 |
CN112424654A (zh) | 2021-02-26 |
CN112424654B (zh) | 2023-09-19 |
WO2020017495A1 (ja) | 2020-01-23 |
US11994699B2 (en) | 2024-05-28 |
JPWO2020017495A1 (ja) | 2021-08-19 |
US20210132273A1 (en) | 2021-05-06 |
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