JP7281611B2 - Compound automatic valve with manual operation mechanism - Google Patents

Description

The present invention relates to an integrated valve provided in a gas supply system mainly used in semiconductor manufacturing equipment, and relates to a composite automatic valve with a manual operation mechanism that performs fluid control by combining a manual valve and an automatic valve.

2. Description of the Related Art As a valve used in an integrated valve of a semiconductor manufacturing apparatus, a so-called compound valve, which is a combination of a manual valve and an automatic valve, is known. This compound valve is equipped with a manual operation part using an operation handle and an automatic operation part driven by compressed air or the like. one function is performed by one device. As a result, this composite valve can be installed in one valve space of the integrated valve unit as a valve that serves both as a manual valve and as an automatic valve.

For example, Patent Document 1 discloses a fluid controller as this type of composite valve. This fluid controller includes an automatic opening/closing operation member that moves up and down by compressed fluid introduction/discharge means to move the valve disc holder to an open position or a closed position, and a valve closing member that presses the valve disc holder downward by manual operation. A manual opening/closing actuating member for setting the state is provided. When the manual operation member closes the valve, the automatic opening/closing member cannot be moved, and when the manual operation member opens the valve, the automatic opening/closing member enables the opening/closing operation.

In this fluid controller, an operating shaft for manual operation and a tubular body are provided inside a casing, and a movable passage member and a rod-shaped body are inserted inside the tubular body. A flow path is formed in each of these parts, and a compressed fluid flow path for moving the valve element and a compressed fluid discharge flow path are formed depending on the positional relationship between them.

On the other hand, the present applicant has filed a patent document 2 for a compound automatic valve. As shown in FIG. 6, the composite automatic valve 1 has a manual operation mechanism 2 for manual operation and an air drive source (not shown) for automatic operation. Sometimes automatic operation is enabled. During automatic operation, the valve is opened when air is supplied from the air supply port 4 to one side of the piston member 3 provided inside the main body, and the upstream channel 5 and the downstream channel 6 are communicated. A gas flow path is formed by doing so.
Further, as shown in FIG. 7, when the stem 7 of the manual operation mechanism 2 is rotated by 90° while being pushed by the operation handle 8, the pressing member 9 attached to the lower part of the stem 7 moves downward. While the lower end of the pressing member 9 presses the piston member 3 to close the valve, the operation air is exhausted from the main body through the purge port 10 . At this time, the operation air pressure is cut off, and automatic operation becomes impossible.

In this composite automatic valve 1, an annular member 12 is attached between the upper outer periphery of the stem 7 and the casing portion 11, and an internal flow path 13 formed in the annular member 12 and the outer periphery of the annular member 12 are attached. The flow paths of the air supply port 4 and the purge port 10 are switched by the O-ring 14 and the O-ring 15 attached to the outer periphery of the stem 7 .
In addition to this, a stepped portion 16 is formed on the bottom side of the annular member 12, and after the operation handle 8 is pushed and turned, a parallel pin 17 attached to the stem 7 is engaged with the stepped portion 16 to close the valve. is maintained.

Here, when a composite valve combining an automatic valve and a manual valve is provided as in the above-described valves, the functions of the manual valve are (1) that the operation handle can be rotated while being pushed (after being pushed); (2) The valve can be opened and closed by rotating the operating handle by 90°, and (3) the air pressure for automatic operation can be shut off when the operating handle is operated to close the valve. When providing a composite valve to be mounted on the integrated valve unit, it is desired that the structure be such that it can exhibit the functions (1) to (3) while keeping it within a predetermined height dimension and footprint.

Japanese Patent No. 3752586 Japanese Patent No. 4108596

Since the fluid controller of Patent Document 1 has the manual operation functions (1) to (3), the manual operation mechanism becomes complicated and the number of parts increases. there is
For example, (1) in order to satisfy the function of rotating the operating handle while pushing it (after pushing it in), the upper end side of the tubular body is inserted into the operating shaft, and the tubular body and the operating shaft are combined into a tubular shape. Due to the elastically biased structure of the compression coil spring inserted inside the body, the inside becomes complicated and assembly becomes troublesome. Moreover, (2) if the stroke of the valve body is adjusted by adjusting the thread pitches of the male and female threads in order to open and close the operation handle by rotating it by 90°, the processing becomes difficult and the accuracy is low. A high design is also required. (3) In order to shut off the air pressure for automatic operation when the valve is closed by the operation handle, a cylindrical body is inserted into the casing, and a movable passage member and a rod are inserted into the cylindrical body. Since the switching flow path is formed in the inner surface, the number of parts increases, and the machining of the flow path hole becomes complicated.

Since the number of parts increases as described above, the strength after assembly decreases. In addition, there is a problem that the thickness of each part is reduced, the strength is further reduced, and the durability is greatly reduced. In addition, due to the increased number of parts, the sealing O-ring may be damaged during assembly.

On the other hand, in the compound automatic valve of Patent Document 2, the functions of the manual valves (1) to (3) can be exhibited via the annular member 12, so the structure is simpler than that of Patent Document 1. However, since the annular member 12 is provided, the number of parts increases as in the case of Document 1, and the annular member 12 is arranged so as to radially overlap the stem 7 and the casing portion 11, It is difficult to provide them with a thickness that ensures sufficient strength. Further, an internal channel 13 for switching air supply and purge channels is provided inside the annular member 12, a sealing portion by an O-ring 14 is provided on the outer circumference, and a stepped portion 16 for locking a parallel pin 17 is provided on the bottom side. Since it is difficult to process due to the presence of such a material, there is also a demand for ease of processing. Ease of assembly because it is necessary to mount the O-ring 14 on the annular member 12 and insert the annular member 12 into the casing portion 11 in a state in which the position of the stepped portion 16 is aligned with the direction of the parallel pin 17 at the time of assembly. is also desired.

The present invention was developed in order to solve the above problems, and its object is to provide a switching function between manual operation and automatic operation, and an automatic opening and closing function of the flow path during automatic operation. The number of parts is kept to a minimum to simplify the internal structure while ensuring manual operability, and the stem and casing are sufficiently thick to improve durability. to provide.

In order to achieve the above object, the invention according to claim 1 is provided with a stem above a valve opening and closing mechanism that opens and closes a flow path by operating a valve body with a piston that moves up and down in a casing, and the stem is an automatic valve opening and closing mechanism. An air flow path is formed inside for supplying operation air to the piston and opening and closing the valve body by operation, and the piston can be moved downward while being pushed around by manual operation to close the valve body. An air supply/exhaust hole communicating with either an air supply path for automatic operation or an air discharge path for purging operation air formed in the casing is provided on the upper periphery of the stem between the stem and the casing. A plurality of O-rings mounted at intervals in the axial direction of the stem are provided in communication with the air flow path. It is a composite automatic valve with a manual operation mechanism, to which a pin member is attached to stop and hold the stem in the valve closed state.

In the invention according to claim 2, when the air supply/exhaust hole provided between the plurality of O-rings communicates with the air supply path, the air discharge path is blocked, while the air passes between the plurality of O-rings. This is a composite automatic valve with a manual operation mechanism that blocks the air supply path when the air supply/exhaust hole communicates with the air discharge path.

In the invention according to claim 3, the locking stepped portion is formed of a notched groove that is locked by the pin member to restrict the stem to a rotation angle of approximately 90°. is a composite automatic valve with a manual operation mechanism portion, in which a fixed groove is formed to regulate the position of the pin member.

The invention according to claim 4 is a compound automatic valve with a manual operation mechanism section, in which a coil spring is mounted between the stem and the piston side to elastically bias the stem upward.

According to the first aspect of the invention, the function of switching between manual operation and automatic operation via the stem and the function of automatically opening and closing the flow path during automatic operation can be exhibited. In this case, an air supply/exhaust hole that can communicate with either the air supply path or the air exhaust path is formed in the upper outer circumference of the stem, and a sealing member is installed between the stem and the casing so as to communicate with the air path. and near the bottom of the stem, a pin member is attached to hold the stem in the valve closed state by engaging with the engagement stepped portion of the casing during manual operation. The structure is simplified and compact so that it can be arranged within a predetermined height dimension and footprint, and can be easily switched between automatic operation and manual operation. In this way, since new parts are not provided in the radial direction of the stem and casing, sufficient wall thicknesses can be secured for these parts to improve durability. Furthermore, the processing and assembly of the parts are facilitated, and there is no fear that the sealing O-ring will be damaged during assembly or operation. Operability is ensured during manual operation, and the valve can be reliably switched between open and closed states by pushing and turning a predetermined amount. For these reasons, if the valve is provided so that it can be automatically operated from the valve closing state to the valve closed state with a small thrust force, and the number of stages of the piston is reduced accordingly, the installation space of the valve opening and closing mechanism can be reduced, thereby increasing the overall height of the valve. The arrangement space of the air supply/exhaust hole and the pin member is set large in the longitudinal direction to provide a composite automatic valve with a structure that makes effective use of the space and does not waste space.

According to the second aspect of the invention, the outer periphery of the stem and the inner periphery of the casing are sealed by the O-ring, thereby preventing an increase in the number of parts and exhibiting high sealing performance while easily switching the flow path. The air supply/exhaust hole can be communicated with the air supply path or the air discharge path while preventing the air from being damaged and reliably preventing leakage to the outside. In this case, when the air supply/exhaust hole communicates with the air supply path through the O-ring, the air discharge path is blocked. , or by stopping the operation air, the valve body can be closed. On the other hand, when the air supply/exhaust hole communicates with the air discharge passage via the O-ring, the air supply passage is blocked. It is possible to close the valve body.

According to the third aspect of the invention, the valve can be easily manually operated to open or close by rotating the stem by approximately 90 degrees. When the stem is in the open state during manual operation, the position of the pin member is regulated by the fixed groove to prevent erroneous operation and natural rotation of the stem and maintain this state. can be returned to the valve closed state.

According to the fourth aspect of the present invention, the coil spring elastically urges the stem toward the locking stepped portion and pushes it back, so that the pin member attached to the stem is normally locked in the fixed groove to keep the valve open. When an operating force of a predetermined magnitude is applied from above against the elastic force of the coil spring, the pin member is released from the fixed groove and the stem is rotated in the valve closing direction. It becomes possible to This prevents erroneous operation of the stem and spontaneous rotation of the stem.

1 is a vertical cross-sectional view showing an embodiment of a compound automatic valve with a manual operation mechanism of the present invention; FIG. FIG. 2 is a vertical cross-sectional view showing a valve open state by automatic operation of the compound automatic valve of FIG. 1; FIG. 2 is a longitudinal sectional view showing a valve closed state by manual operation of the compound automatic valve of FIG. 1; (a) is a partially enlarged perspective view of the composite automatic valve in the valve open state. (b) is a partially enlarged perspective view showing a state in which (a) is manually closed. FIG. 4 is a partially enlarged perspective view showing the vicinity of a locking stepped portion of a casing; 1 is a longitudinal sectional view showing a conventional composite automatic valve; FIG. FIG. 7 is a vertical cross-sectional view showing the closed state of the composite automatic valve of FIG. 6 during manual operation;

An embodiment of a composite automatic valve with a manually operated mechanism portion according to the present invention will be described in detail below with reference to the drawings.
1 to 3 show longitudinal sectional views of embodiments of the compound automatic valve with a manual operation mechanism of the present invention. A composite automatic valve (hereinafter referred to as a valve body) is mounted on an integrated valve of a gas supply system used in a semiconductor manufacturing apparatus (not shown). The valve body 20 has a valve opening/closing mechanism 21 , and the valve opening/closing mechanism 21 has a valve body 30 , a valve body 31 , a casing 32 and a piston 33 . Furthermore, a stem 34 is provided above the piston 33 .

The valve box 30 is provided on the lower side of the valve main body 20, which is the mounting side of the integrated valve unit (not shown), and the valve body 31 is mounted inside the valve box 30. As shown in FIG. A fluid channel 35 through which a semiconductor manufacturing gas flows is formed inside the valve box 30 , and the fluid channel 35 has a primary side channel 36 and a secondary side channel 37 . A valve seat 38 is mounted between the primary side flow path 36 and the secondary side flow path 37 .

The valve body 31 is made of a disc-shaped diaphragm and is mounted between the primary side flow path 36 and the secondary side flow path 37 in a state that it can contact and separate from the valve seat 38 . A substantially cylindrical sliding member 40 is attached to the upper portion of the valve body 31 via a bonnet 41 , and the sliding member 40 is attached to the bonnet 41 by fixing the bonnet 41 to the inner peripheral side of the valve body 30 . On the other hand, it can move up and down within a predetermined range. With this configuration, when the sliding member 40 moves up and down, the sliding member 40 moves the valve body 31 toward and away from the valve seat 38, thereby separating the primary side passage 36 and the secondary side passage 37. It is provided so that it can be opened and closed.

The casing 32 is formed in a substantially cylindrical shape and attached to the upper portion of the valve box 30, and the stem 34 and the piston 33 are inserted therein. The casing 32 is composed of an upper casing 32a, an intermediate casing 32b, and a lower casing 32c. Among them, the intermediate casing 32b is provided integrally by fixing two upper and lower cylindrical parts. The upper casing 32a and the intermediate casing 32b are fixed by a set screw 42, and the intermediate casing 32b and the lower casing 32c are fixed by screwing, whereby the casing 32 can be arranged within a predetermined height dimension and footprint. be integrated. The lower end side of the lower casing 32c is integrated with the inner periphery of the valve box 30 by screwing, thereby positioning and fixing the bonnet 41, and preventing the displacement of the valve element 31 pressed and held by the bonnet 41. As shown in FIG.

An air supply passage 50 for automatic operation and an air discharge passage 51 for purging operation air are formed in the vicinity of the upper portion of the upper casing 32a so as to communicate with the outside toward the central through portion. An air supply/exhaust hole 52 of the stem 34, which will be described later, is provided in one of the air discharge paths 51 so as to communicate therewith. An internal thread 50a is formed on the inlet side of the air supply path 50, and an external flow path (not shown) is connected to the internal thread 50a. be.

4 and 5, a groove-like locking stepped portion 60 for restricting the rotation of the stem 34 is formed on the lower end side of the upper casing 32a. The locking stepped portion 60 is formed of notch grooves formed in a substantially fan shape at intervals of approximately 90° from the center of the upper casing 32a. The pin member 61 restricts the rotation of the stem 34 within a range of approximately 90 degrees.

A deeper fixing groove 62 with a width slightly larger than the diameter of the pin member 61 is formed at a position corresponding to the valve open position of the stem 34 of the locking stepped portion 60 , and the pin member 61 is locked in this fixing groove 62 . possible. As a result, when the pin member 61 is engaged with the fixed groove 62, its position is regulated, and the position of the stem 34 is held during automatic operation of the valves shown in FIGS. is prevented.

On the other hand, when the stem 34 is pushed downward from the state of FIG. 4(a), the pin member 61 is disengaged from the fixing groove 62, and in this state, the stem 34 is turned 90° to the right as shown in FIG. 4(b). Rotation in the direction maintains the downward movement of the stem 34 to close the valve. In this manner, unless the stem 34 is pushed around, the valve can be opened or closed by automatically supplying or stopping the supply of operation air.

A female threaded portion 67 is formed near the approximate middle of the inner circumference of the intermediate casing 32b, and a male threaded portion 68 of a pressing member 63, which will be described later, is screwed into the female threaded portion 67. As shown in FIG.

A piston 33 and a stem 34 are mounted in the casing 32 so as to be vertically movable, and a substantially cylindrical pressing member 63 is mounted between the piston 33 and the stem 34 .
The piston 33 is provided by integrally combining an upper piston 33a and a lower piston 33b, and is attached above the sliding member 40 in a state where it is prevented from slipping out of the casing 32. As shown in FIG.

O-rings 64, 64 are mounted at positions where the upper and lower pistons 33a, 33b come into contact with the inner wall of the casing 32, respectively. be done. Thereby, an upper air chamber 65 and a lower air chamber 66 are provided between the upper piston 33a, the lower piston 33b and the casing 32, respectively.

In the valve opening/closing mechanism 21, the piston 33 vertically moves (reciprocates) in the casing 32 with a predetermined stroke, and the piston 33 presses the sliding member 40, which causes the valve body 31 to open or close. It operates in the valve closing direction to open and close the fluid flow path 35 .

A through hole 70 is formed in the center of the piston 33, and an upper branch hole 70a and a lower branch hole 70b communicating with the upper air chamber 65 and the lower air chamber 66 are formed in the through hole 70, respectively. When air is supplied, it is sent from the upper branch hole 70a and the lower branch hole 70b to the upper air chamber 65 and the lower air chamber 66 so that the piston 33 operates (rises) as a two-stage piston with a small air operating pressure. It has become.

A spring 71 is elastically attached between the upper piston 33a and the casing 32, and the spring 71 normally urges the piston 33 downward, and the sliding member 40 is downwardly moved at the lower end side of the piston 33. The sliding member 40 presses the valve body 31 against the valve seat 38 to maintain the valve closed state.

The stem 34 is coaxially arranged above the piston 33 via the pressing member 63 , and a male serration portion 72 is formed on the outer periphery of the lower end of the stem 34 . The male serration portion 72 is connected to a female serration portion 73 of a pressing member 63 which will be described later. It is rotatable with respect to the casing 32 .

An air passage 80 is formed in the central portion of the stem 34, and operation air is supplied from the air passage 80 to the piston 33 by automatic operation to open and close the valve body 31. As shown in FIG. In this case, the air supply/exhaust holes 52 are formed in the air flow path 80 in the radial direction. The air supply/exhaust hole 52 is provided so as to communicate with either the air supply path 50 or the air discharge path 51 by vertical movement and rotation of the stem 34 .

A plurality of sealing members 81, 82, 83, 84 are attached to the upper periphery of the stem 34, and these sealing members 81 to 84 are made of O-rings. The O-rings 81 and 82 are attached at positions sandwiching the air supply/exhaust hole 52 from above and below, and thus the air supply/exhaust hole 52 is formed between the O-rings 81 and 82 . On the other hand, the O-rings 82 and 83 on the lower side are attached at positions sandwiching the air exhaust passage 51 from above and below when the valve is closed during manual operation in FIG.

By providing these O-rings 81-84 between the stem 34 and the casing 32, the outer circumference of the stem 34 and the inner circumference of the casing 32 are sealed, and the air supply/exhaust hole 52 is opened through the O-rings 81-83. It is provided so as to communicate with the air flow path 80 while communicating with either the air supply path 50 or the air exhaust path 51 .

In this case, when the air supply/exhaust hole 52 communicates with the air supply path 50 via the O-rings 81 to 83, the air discharge path 51 is blocked. On the other hand, when the air supply/exhaust hole 52 communicates with the air discharge path 51 through the O-rings 81 to 83, the air supply path 50 is blocked. The O-ring 84 is mounted above the O-rings 81 to 83, and the O-ring 84 allows operation air from the air supply path 50 to flow outside when the air supply/exhaust hole 52 communicates with the air discharge path 51. prevents leaks.

Specifically, as shown in FIGS. 1 and 2, when the stem 34 is in the raised position and is not rotating, the air supply/exhaust hole 52 communicates with the air supply path 50 and is blocked from the air discharge path 51. As a result, operation air can be supplied from the air supply/exhaust hole 52 to the piston 33 side through the air flow path 80 . On the other hand, as shown in FIG. 3, when the stem 34 is moved downward and rotated right (clockwise) by 90°, the air supply/exhaust hole 52 is blocked from the air supply path 50 and communicated with the air discharge path 51. In this state, the operating air inside the casing 32 (cylinder) is discharged to the outside through the air discharge passage 51 .

A mounting hole 85 is formed through the stem 34 in a direction perpendicular to the air flow path 80 at a position slightly lower than the center of the stem 34. A pin member 61 is laterally fitted into the mounting hole 85 so that both ends protrude in the radial direction. be The pin member 61 is attached to the locking stepped portion 60 of the casing 32 in a state that it can be locked during manual operation. A pin member 61 restricts the rotation of the stem 34 to an angle of approximately 90° from the open state to the closed state.

The pressing member 63 is formed in a substantially cylindrical shape, and a female serration portion 73 to which the male serration portion 72 of the stem 34 can be connected is formed on the inner circumference near the upper portion thereof. The lower end side of the stem 34 is connected to the upper inner circumference of the pressing member 63 via these male and female serrations 72 and 73, and the stem 34 is vertically movable with respect to the pressing member 63, and these It is provided to be integrally rotatable.

A male threaded portion 68 is formed on the opposite side of the pressing member 63 to the female threaded portion 67. Through the female threaded portion 67 and the male threaded portion 68, the pressing member 63 can move up and down with respect to the casing 32 as the stem 34 rotates. is coupled to The upper side of the upper piston 33 a is inserted into the lower inner circumference of the pressing member 63 via an O-ring 91 , and the pressing member 63 is provided rotatably with respect to the piston 33 .

A coil spring 92 is mounted between the stem 34 and the pressing member 63 on the piston 33 side. is biased upward against the

A handle 93 for manual operation is attached to the upper end of the stem 34 by means of a set screw 94 , and the handle 93 allows the stem 34 to be pushed around against the resilient biasing force of the coil spring 92 . When the stem 34 is pushed and turned by manual operation of the handle 93, the piston 33 is lowered to allow the valve body 31 to close.

It should be noted that the valve body 20 in the above-described embodiment is provided in a structure in which the stem 34 is pushed around through the threaded engagement between the female threaded portion 67 and the male threaded portion 68 during manual operation, but this threaded portion may be omitted. is also possible.

Further, although not shown, the handle 93 may be provided with a locking hole, and the valve body 20 may be provided with a locking hole communicating with the locking hole when the valve is opened or closed. In this case, when the valve is opened or closed, the lock hole and the stop hole are communicated with each other, and by locking these holes with a padlock or the like, the handle is fixed in a state in which manual operation cannot be performed. It becomes possible to prevent erroneous operation and the like.

Next, the operation and effect of the above-described embodiment of the compound automatic valve with a manual operation mechanism portion according to the present invention will be described.
1 and 2 show a state in which the manual operation handle 93 is operated to open, operation air is supplied or discharged by automatic operation, and the valve body 31 is operated to open or close. In this case, the stem 34 is urged upward against the pressing member 63 by the elastic force of the coil spring 92 , so that the pin member 61 is locked in the fixed groove 62 of the locking stepped portion 60 and the stem is 34 rotation is prevented. Therefore, the stem 34 is prevented from rotating, and even if a rotational force is applied to the stem 34, the force will not cause the stem 34 to rotate.
The lower end side of the pressing member 63 is separated from the stepped surface 33c of the upper piston 33a, and the distance between them is the stroke of the piston 33. As shown in FIG. The lower surface of the pressing member 63 in this handle open state is the top dead center when the piston 33 moves upward.

FIG. 1 shows a state when the supply of operation air from the air supply path 50 is stopped with the handle 93 in the open state. At this time, the air supply/exhaust hole 52 communicates with the air supply path 50 while the O-rings 81 and 82 prevent leakage to the outside, and the air discharge path 51 is blocked by the O-rings 82 and 83. in a state. When the supply of operation air is stopped, the piston 33 is urged downward by the elastic force of the spring 71, and the sliding member 40 is pressed downward by the tip side of the piston 33. As shown in FIG. Therefore, the sliding member 40 causes the valve body 31 to be seated on the valve seat 38 with an appropriate force so that the valve is closed, and the gas flow from the primary side flow path 36 to the secondary side flow path 37 in the valve box 30 . The flow is blocked.

FIG. 2 shows a state in which the valve body 31 is opened by supplying operation air from the air supply passage 50 while the handle 93 is open. In this case, the operating air is sent from the air supply path 50 through the air supply/exhaust hole 52 to the air flow path 80, and then through the through hole 70 inside the piston 33 and the upper air chamber 65 through the upper branch hole 70a and the lower branch hole 70b. , are supplied to the lower air chamber 66, respectively. As a result, a force acts to push the piston 33 upward, and this force causes the piston 33 (the upper piston 33a and the lower piston 33b) to rise against the elastic biasing force of the spring 71 by the stroke.

As a result, the sliding member 40 is released from the state of being pressed by the tip of the piston 33 and becomes movable upward, and the valve body 31 is released from being pressed by the sliding member 40 . Therefore, the valve element 31 returns to its original shape due to its own reaction force and is in the valve open state, allowing the fluid to flow from the primary side flow path 36 to the secondary side flow path 37 .

FIG. 3 shows a state in which the handle 93 is manually pushed and turned at a rotation angle of 90° in the closing direction (clockwise direction) from the state shown in FIG. In this case, since the stem 34 and the pressing member 63 are connected by the male serration portion 72 and the female serration portion 73, the stem 34 can be pushed down against the resilient biasing force of the coil spring 92. , the stem 34 moves downward with respect to the pressing member 63, whereby the pin member 61 is released downward from the fixing groove 62, and the stem 34 can be rotated. At this time, the pressing member 63 rotates integrally with the stem 34 in a state in which the stem 34 is pushed down through the serration mechanism, and descends while idling against the upper piston 33a while being sealed by the O-ring 91. It is designed to

When the stem 34 is rotated to the right (clockwise) with the stem 34 pushed down, the pin member 61 can rotate along the bottom surface of the locking stepped portion 60 . When the stem 34 is rotated approximately 90°, the pin member 61 abuts against the side surface of the locking stepped portion 60 to restrict its rotation. Therefore, there is no risk that the stem 34 will naturally return to its pre-rotation state.

When the stem 34 is pushed and turned by the handle 93 , the O-ring 81 moves below the air supply passage 50 . As a result, the air supply path 50 and the air supply/exhaust hole 52 are blocked by the sealing of the O-ring 81, and the supply of operation air to the air supply/exhaust hole 52 side is stopped.

At this time, the O-ring 82 moves below the air discharge path 51, and the air discharge path 51, which has been closed between the O-rings 82 and 83 until then, is opened and the air is supplied. It will be in a state of communication with the exhaust hole 52 . Therefore, the operating air in the valve body 20 such as the upper air chamber 65 , the lower air chamber 66 , the through hole 70 , the air passage 80 , etc. is discharged (purged) to the outside from the air discharge passage 51 through the air supply/exhaust hole 52 . be. As a result, when the stem 34 is pushed down by the handle 93, resistance due to residual operation air can be reduced, and the stem 34 can be smoothly lowered.

Subsequently, when the stem 34 is to be rotated, the stem 34 is lowered to the lowest position so that the locking of the pin member 61 is released from the fixed groove 62, thereby enabling the rotation operation. Since the handle 93 must be pushed down until the pin member 61 is removed from the fixing groove 62 to release the locked state of the stem 34, unintended contact with the handle 93 and rotation due to erroneous operation can be reliably prevented.

By pushing and turning the stem 34 by approximately 90° until the pin member 61 comes into contact with the side surface of the locking stepped portion 60 on the valve closing side, the valve can be accurately closed by manual operation. Even after the stem 34 is pushed and rotated, the stem 34 is maintained upwardly urged by the coil spring 92, so that the pin member 61 is elastically locked to the bottom surface of the locking stepped portion 60. The closed state of the valve is reliably maintained even when the hand is released.

When the valve is closed by manual operation, the portion below the piston 33 is in the same state as when the valve is closed by automatic operation in FIG. Thereby, the flow of the gas fluid from the primary side flow path 36 to the secondary side flow path 37 can be blocked. This valve closed state is not released until the valve is opened by the handle 93, and even if operation air is supplied from the air supply passage 50 in this valve closed state, the valve main body 20 will open the valve. never do.

Moreover, when the pressing member 63 descends and the rotation angle of the stem 34 reaches approximately 90° (when the valve is manually closed), the bottom surface of the pressing member 63 pushes the stepped surface 33c of the upper piston 33a from above. It is in a pressed state. As a result, even if an unexpected high pressure is applied to the valve body from the primary side flow passage 36 and this pressure is greater than the elastic biasing force of the spring 71 in the valve closing direction, the piston 33 is prevented from rising and the valve is closed. to reliably prevent the valve from being opened by mistake.

The valve body 20 in the above-described embodiment of the present invention is provided with a stem 34 above the valve opening/closing mechanism 21 that operates the valve body 31 with the piston 33 to open and close the fluid flow path 35. The stem 34 is provided with an automatic operation valve. An air flow path 80 is formed inside, and the valve body 31 is provided so as to be operable to close the valve by manual operation. An air supply/exhaust hole 52 that can communicate with either the air supply path 50 or the air discharge path 51 is formed in the upper outer periphery of the stem 34 via O-rings 81 to 83 mounted between the stem 34 and the casing 32. Therefore, the stem 34 and the casing 32 can be directly provided with a switching portion for air supply and air discharge, and it is possible to suppress the thinning of the stem 34 and the casing 32 in the radial direction.

A pin member 61 is attached to the vicinity of the lower portion of the stem 34. During manual operation, the pin member 61 is engaged with the engaging stepped portion 60 of the casing 32 to hold the stem 34 in the valve closed state. The switching of the air flow path 80 can be performed easily and accurately.
As described above, the stem 34 is provided with the air supply/exhaust hole 52 for automatic operation and the pin member 61 for manual operation, which prevents the internal structure from becoming complicated and minimizes the number of parts. can be reduced to

A minimum number of O-rings 81 to 83 for flow path switching between the stem 34 and the casing 32 can be provided, and since these O-rings 81 to 83 are mounted on the outer periphery of the stem 34, assembly is easy. This is easy and can prevent the O-rings 81-83 from being damaged during assembly and operation.

When the air supply/exhaust hole 52 is communicated with the air supply path 50 through the O-rings 81-83, the air discharge path 51 is closed, and the air supply/exhaust hole 52 is closed with air through the O-rings 81-83. Since the air supply path 50 can be shut off when communicating with the air discharge path 51, when either the air supply path 50 or the air exhaust path 51 communicates with the air supply/exhaust hole 52, the operation air to the other side is blocked. Automatic operation and manual operation can be switched in a state in which the flow of air is reliably prevented.

Since the engaging stepped portion 60 is formed on the lower end side of the upper casing 32a, the engaging stepped portion 60 can be easily processed, and the air supply path 50 and the air discharge path 51 can be easily and accurately formed. can be processed.

The present invention is not limited to the description of the above embodiments, and various modifications can be made without departing from the gist of the invention described in the claims of the present invention.

20 valve main body 21 valve opening/closing mechanism 31 valve body 32 casing 33 piston 34 stem 35 fluid passage 50 air supply passage 51 air discharge passage 52 air supply/exhaust hole 60 locking step portion 61 pin member 62 fixed groove 80 air passage 81, 82, 83 O-ring (seal member)
92 coil spring

Claims (4)

A stem is provided above a valve opening/closing mechanism that opens and closes a flow path by operating a valve body with a piston that moves up and down in a casing, and this stem automatically supplies operating air to the piston to move the valve body. An air flow path for opening and closing operations is formed inside, and is provided so as to be able to move the valve body to the valve closed state by lowering the piston while being pushed and turned by manual operation. An air supply/exhaust hole communicating with either an air supply path for automatic operation or an air discharge path for purging operation air formed in the casing is provided between the stem and the casing in the axial direction of the stem. A plurality of O-rings mounted at intervals are provided in communication with the air flow path, and in the vicinity of the lower portion of the stem are locked by a locking step formed on the casing during manual operation. A composite automatic valve with a manual operation mechanism, characterized in that a pin member is attached to hold a stem in a valve closed state. When the air supply/exhaust hole provided between the plurality of O-rings communicates with the air supply path, the air discharge path is blocked, while the air is supplied/exhausted through between the plurality of O-rings. 2. The composite automatic valve with a manual operation mechanism according to claim 1, wherein said air supply path is shut off when said hole communicates with said air discharge path. The locking stepped portion is formed of a notched groove that is locked by the pin member to restrict the stem to a rotation angle of approximately 90°. 3. The composite automatic valve with a manual operation mechanism according to claim 1, wherein a fixed groove is formed to regulate the position of the. 4. The compound automatic valve with a manual operation mechanism according to claim 3, wherein a coil spring is mounted between the stem and the piston side to elastically bias the stem upward.

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