JP7192336B2 - liquid ejection head, liquid ejection unit, device for ejecting liquid - Google Patents

Description

The present invention relates to a liquid ejection head, a liquid ejection unit, and an apparatus for ejecting liquid.

In a liquid ejection head that ejects liquid, ejection characteristics fluctuate due to residual vibration that occurs along with the ejection of liquid.

Conventionally, thin portions are formed on the nozzle opening side and the ink supply port side to ensure compliance, and a vibrating plate with an island portion formed in the center is provided, and pressure is generated by a piezoelectric vibrator through the island portion. A recording head that ejects ink droplets from nozzle openings by compressing a chamber. There is known a recording head in which a mass is added to the thin portion of the ink supply port side or the thin portion on the side of the ink supply port (Patent Document 1).

JP-A-8-25632

In the configuration disclosed in Patent Document 1, it is possible to suppress the occurrence of residual vibration due to the difference in compliance between the nozzle opening side and the ink supply port side, but it is possible to suppress the residual vibration accompanying liquid ejection. The problem is that it cannot be done.

SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and an object of the present invention is to reduce variations in liquid ejection characteristics.

In order to solve the above problems, the liquid ejection head according to the present invention includes:
a diaphragm member having a vibrating region forming a displaceable wall surface of a pressure chamber communicating with a nozzle for ejecting liquid ;
The diaphragm member includes at least a thin portion forming the vibration region and facing the pressure chamber, and a thick portion provided on the opposite side of the thin portion to the pressure chamber,
The diaphragm member is provided with a recessed portion or a through hole that opens toward the pressure chamber,
The recess or the through-hole is open in the longitudinal direction of the pressure chamber so that a part thereof extends to the outside of the pressure chamber,
The interior of the recess or the through hole is filled with a filling material that forms a displaceable wall surface of the pressure chamber,
The thick portion is provided with a stepped portion in a cross-sectional shape along the longitudinal direction of the pressure chamber to form a relatively thin portion and a relatively thick portion,
The recess or the through hole is provided in the thin portion and the thin portion of the thick portion, and is not provided in the thick portion of the thick portion.
It was configured.

According to the present invention, fluctuations in liquid ejection characteristics can be reduced.

FIG. 3 is a cross-sectional explanatory view along a direction orthogonal to the nozzle arrangement direction of the liquid ejection head according to the first embodiment of the present invention; FIG. 2 is a cross-sectional explanatory view along the nozzle arrangement direction along line AA of FIG. 1; It is similarly a plane explanatory view of each member. FIG. 2 is a cross-sectional explanatory view along the nozzle arrangement direction along line BB of FIG. 1; FIG. 11 is a plan explanatory view of the diaphragm member for explaining another example of a different planar shape of the damper region; FIG. 7 is a cross-sectional explanatory view along the nozzle arrangement direction of the liquid ejection head according to the second embodiment of the present invention; FIG. 11 is a cross-sectional explanatory view along a direction perpendicular to the nozzle arrangement direction of the liquid ejection head according to the third embodiment of the present invention; FIG. 11 is a cross-sectional explanatory view along a direction perpendicular to the nozzle arrangement direction of a liquid ejection head according to a fourth embodiment of the present invention; FIG. 11 is a cross-sectional explanatory view along a direction perpendicular to the nozzle arrangement direction of a liquid ejection head according to a fifth embodiment of the present invention; It is similarly a plane explanatory view of a diaphragm member. FIG. 10 is a cross-sectional explanatory view along the nozzle arrangement direction along line CC of FIG. 9; FIG. 11 is an external perspective explanatory view of a liquid ejection head according to a sixth embodiment of the present invention; It is a cross-sectional explanatory view along the direction orthogonal to the nozzle arrangement direction similarly to FIG. 1 is a schematic illustration of an example of a device for ejecting liquid according to the present invention; FIG. It is a plane explanatory view of an example of the head unit of the apparatus. It is a block explanatory view of an example of a liquid circulation device. FIG. 10 is an explanatory plan view of essential parts of another example of the device for ejecting liquid according to the present invention; It is an explanatory side view of the main part of the device. FIG. 10 is an explanatory plan view of a main portion of another example of the liquid ejection unit according to the present invention; FIG. 11 is a front explanatory view of still another example of the liquid ejection unit according to the present invention;

BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. A first embodiment of the present invention will be described with reference to FIGS. 1 to 4. FIG. 1 is a cross-sectional explanatory view along a direction perpendicular to the nozzle arrangement direction of the liquid ejection head according to the same embodiment, FIG. 2 is a cross-sectional explanatory view along the nozzle arrangement direction along line AA of FIG. 1, and FIG. It is similarly a plane explanatory view of each member.

This liquid ejection head 100 has a nozzle plate 1, a channel plate 2, and a vibration plate member 3 as a wall member which are laminated and joined together. A piezoelectric actuator 11 that displaces a vibration region (diaphragm) 30 of the diaphragm member 3 and a common flow path member 20 that also serves as a frame member of the head are provided.

The nozzle plate 1 has a nozzle row in which a plurality of nozzles 4 for ejecting liquid are arranged.

The flow path plate 2 includes pressure chambers 6 which are a plurality of pressure chambers communicating with a plurality of nozzles 4, fluid resistance portions 7 communicating with the respective pressure chambers 6, and one or a plurality of liquid introduction chambers communicating with the one or a plurality of fluid resistance portions 7. forming part 8.

In this embodiment, the channel plate 2 is configured by stacking plate members 2A and 2B. Through grooves 6A, 7A, and 8A forming pressure chambers 6, fluid resistance portions 7, and liquid introduction portions 8 are formed in the plate-like member 2A, and pressure chambers 6 are formed in the plate-like member 2B. A through-groove 6B and a through-groove 8B forming the liquid introducing portion 8 are formed.

The vibration plate member 3 has a plurality of displaceable vibration plates (vibration regions) 30 that form the walls of the pressure chambers 6 of the channel plate 2 . Here, the diaphragm member 3 has a two-layer structure (not limited), and is composed of a first layer 3a forming a thin portion from the flow path plate 2 side and a second layer 3b forming a thick portion. A deformable vibration region 30 is formed in a portion corresponding to the pressure chamber 6 in the layer 3a.

On the opposite side of the diaphragm member 3 from the pressure chambers 6, a piezoelectric actuator 11 including an electromechanical conversion element is arranged as driving means (actuator means, pressure generating means) for deforming the vibration region 30 of the diaphragm member 3. doing.

This piezoelectric actuator 11 is formed by half-cut dicing a piezoelectric member 12 joined on a base member 13 to groove processing, and a required number of columnar piezoelectric elements 12A and 12B are arranged in a comb-like shape at predetermined intervals in the nozzle arrangement direction. is formed in

The piezoelectric element 12A is joined to a convex portion 30a, which is an island-shaped thick portion formed in the vibration region 30 of the diaphragm member 3. As shown in FIG. Also, the piezoelectric element 12B, which serves as a support, is joined to the convex portion 30b, which is the thick portion of the diaphragm member 3. As shown in FIG. A convex portion 12c is formed in a portion of the piezoelectric element 12A that is joined to the convex portion 30a.

The piezoelectric element 12 is formed by alternately laminating piezoelectric layers and internal electrodes. The internal electrodes are led out to the end surfaces and connected to external electrodes (end surface electrodes), and flexible wiring members are connected to the external electrodes. there is

Common channel member 20 forms common channel 10 . The common flow path 10 communicates with the liquid introduction section 8 via the filter section 9 provided in the diaphragm member 3 .

In the liquid ejection head 100, for example, by lowering the voltage applied to the piezoelectric element 12A from the reference potential (intermediate potential), the piezoelectric element 12A contracts, the vibration region 30 of the diaphragm member 3 is pulled, and the volume of the pressure chamber 6 increases. expands, the liquid flows into the pressure chamber 6 .

Thereafter, the voltage applied to the piezoelectric element 12A is increased to extend the piezoelectric element 12A in the stacking direction, deform the vibration region 30 of the diaphragm member 3 in the direction toward the nozzle 4, and contract the volume of the pressure chamber 6. , the liquid in the pressure chamber 6 is pressurized, and the liquid is discharged from the nozzle 4 .

The method of driving the head is not limited to the above example (pull-push-hit), and it is also possible to perform pull-hit or push-hit depending on which drive waveform is applied.

Next, the damper configuration in this embodiment will be described with reference to FIG. 4 as well. FIG. 4 is a cross-sectional explanatory view along the nozzle arrangement direction along line BB in FIG.

In this embodiment, the vibration plate member 3 is provided with a through hole 32 penetrating through the first layer 3a and the second layer 3b near the end portion on the nozzle 4 side in the longitudinal direction of the pressure chamber 6 . The interior of the through-hole 32 is filled with a filling material 33 that forms a displaceable wall surface of the pressure chamber 6 . The terms "filler" and "filler" are synonymous.

The filling material 33 may be any material that has lower rigidity than the diaphragm member 3 and absorbs or attenuates the residual vibration generated in the pressure chamber 6 .

As the filler 33, a resin is preferable, and as the resin, an ultraviolet curable resin is preferable. By using an ultraviolet-curing resin, the resin remaining on the surface of the diaphragm member 3 is removed after curing the resin in the through hole 32 with ultraviolet light, so that the resin can be easily filled locally.

Filler 33 is preferably made of a liquid-resistant material.

In this way, since the through hole 32 opening to the pressure chamber 6 is filled with the filling material 33 that forms the displaceable (deformable) wall surface of the pressure chamber 6, the piezoelectric element 12A is driven and the pressure from the nozzle 4 is increased. If residual vibration occurs when the liquid is discharged, the filler 33 is displaced, so the residual vibration is attenuated or suppressed.

As a result, stable liquid ejection characteristics can be obtained, and variations in the liquid ejection characteristics can be reduced.

In addition, by configuring the damper with the filler 33 filled in the through hole 32, even if the area functioning as a damper (damper area, which corresponds to the opening area of the through hole 32 in this embodiment) is increased, the deterioration over time does not occur. durability can be ensured.

On the other hand, for example, when the damper region is composed of the first layer 3a of the diaphragm member 3, if the area of the damper region is increased too much in order to enhance the vibration damping and suppressing function, the rigidity of the damper region becomes small. There is a risk of damage over time.

Further, by configuring the damper with the filler 33 filled in the through hole 32, the rigidity can be changed by changing the filling amount of the filler 33, and the target rigidity can be easily set. . Therefore, it is also easy to change the amount of filling material 33 in accordance with the residual vibration characteristics of the pressure chamber 6 to change the vibration damping/absorbing characteristics. That is, it is possible to easily construct a head in which at least two pressure chambers 6, 6 are filled with different filling amounts of the filling material 33. As shown in FIG.

On the other hand, for example, when the damper region is composed of the first layer 3 a of the diaphragm member 3 , it is not easy to vary the thickness and area of the damper region for each pressure chamber 6 .

The filling material 33 is arranged near the longitudinal end of the pressure chamber 6 , here near the end near the nozzle 4 and far from the fluid resistance section 7 .

Next, another example of a different planar shape of the damper region will be described with reference to FIG. FIG. 5 is an explanatory plan view of the diaphragm member.

A first example shown in FIG. 5A is an example in which the planar shape of the opening of the through hole 32 (the wall surface shape formed by the filler 33) is substantially rectangular. A second example shown in FIG. 5B is an example in which the planar shape of the opening of the through hole 32 (the wall surface shape formed by the filler 33) is an oval shape.

Even if the planar shape of the opening of the through hole 32 (the wall surface shape formed by the filler 33) has these shapes, the residual vibration in the pressure chamber 6 can be damped or suppressed.

Next, a second embodiment of the invention will be described with reference to FIG. FIG. 6 is a cross-sectional explanatory view corresponding to FIG. 4 along the nozzle arrangement direction of the liquid ejection head according to the embodiment.

In this embodiment, the diaphragm member 3 is provided with a recess 34 opening toward the pressure chamber 6, and the recess 34 is filled with a filler 33 such as resin.

With this configuration, even if the resin forming the filling material 33 deteriorates over time, the pressure chamber 6 and the opposite side (piezoelectric pressure in the above embodiment) can pass through the space between the peripheral surface of the filling material 33 and the diaphragm member 3 . It is possible to reliably prevent the liquid in the pressure chamber 6 from leaking to the actuator 11 side).

Next, a third embodiment of the invention will be described with reference to FIG. FIG. 7 is a cross-sectional explanatory view along a direction perpendicular to the nozzle arrangement direction of the liquid ejection head according to the same embodiment.

In this embodiment, the diaphragm member 3 has a three-layer structure of a first layer 3a, a second layer 3b, and a third layer 3c. The convex portion 30a to be joined to the piezoelectric element 12A is composed of two layers, the second layer 3b and the third layer 3c.

Next, a fourth embodiment of the invention will be described with reference to FIG. FIG. 8 is a cross-sectional explanatory view along a direction orthogonal to the nozzle arrangement direction of the liquid ejection head according to the same embodiment.

In this embodiment, the diaphragm member 3 has a two-layer structure of a first layer 3a and a second layer 3b as in the first embodiment, and the joint surface with the convex portion 30a of the piezoelectric element 12A is a flat surface. .

Also in this embodiment, by filling the inside of the through-hole 32 with the filler 33, it is possible to obtain the same effects as those of the above embodiments.

Next, a fifth embodiment of the present invention will be described with reference to FIGS. 9 to 11. FIG. 9 is a cross-sectional explanatory view along a direction orthogonal to the nozzle arrangement direction of the liquid ejection head according to the same embodiment, FIG. 10 is a plane explanatory view of the same diaphragm member, and FIG. 11 is also along the CC line of FIG. It is cross-sectional explanatory drawing along a nozzle arrangement direction.

In this embodiment, the through hole 32 of the diaphragm member 3 is formed so as to have an opening of such a size that a part thereof faces (faces) the outside of the pressure chamber 6 . By filling the inside of the through hole 32 with the filler 33 , the damper made of the filler 33 has a size that partially faces (faces) the outside of the pressure chamber 6 .

As a result, even if there is a positional deviation or a component error when joining the vibration plate member 3 and the flow path plate 2, it is possible to secure a damper area within a required range.

Next, a sixth embodiment of the present invention will be described with reference to FIGS. 12 and 13. FIG. FIG. 12 is an external perspective explanatory view of the liquid ejection head according to the same embodiment, and FIG. 13 is a cross-sectional explanatory view along a direction perpendicular to the nozzle arrangement direction, similar to FIG.

This liquid ejection head 100 is a circulation type liquid ejection head, and includes a nozzle plate 1, a flow path plate 2, and a vibration plate member 3 as a wall member which are laminated and bonded. A piezoelectric actuator 11 that displaces a vibration region (diaphragm) 30 of the diaphragm member 3 and a common flow path member 20 that also serves as a frame member of the head are provided.

The nozzle plate 1 has a plurality of nozzles 4 for ejecting liquid.

The flow path plate 2 includes a plurality of pressure chambers 6 each communicating with the plurality of nozzles 4 via the nozzle communication passages 5, a plurality of supply-side fluid resistance portions 7 each communicating with the plurality of pressure chambers 6, and one or a plurality of One or a plurality of liquid introduction portions 8 and the like are formed that communicate with the fluid resistance portion 7 on the supply side. The liquid introduction part 8 communicates with the common channel 10 on the supply side through the opening 19 on the supply side of the diaphragm member 3 .

In this embodiment, the channel plate 2 is constructed by stacking a plurality of plate-like members 2A to 2E, but the configuration is not limited to this.

The diaphragm member 3 has a deformable vibration area 30 forming the walls of the pressure chambers 6 of the channel plate 2 . Here, the diaphragm member 3 has a three-layer structure (not limited), and is composed of a first layer 3a forming a thin portion from the flow path plate 2 side, and a second layer 3b and a third layer 3c forming a thick portion. A deformable vibration region 30 is formed in a portion corresponding to the pressure chamber 6 in the first layer 3a.

A piezoelectric actuator 11 that deforms the vibration region 30 of the diaphragm member 3 is arranged on the opposite side of the diaphragm member 3 from the pressure chambers 6 . The piezoelectric element 12A of the piezoelectric actuator 11 is joined to the convex portion 30a of the vibration region (diaphragm) 30 of the diaphragm member 3. As shown in FIG.

In addition, the channel plate 2 includes a plurality of individual recovery channels 56 along the surface direction of the channel plate 2 each communicating with the plurality of pressure chambers 6 via the nozzle communication channels 5, and one or a plurality of individual recovery channels 56. One or a plurality of liquid lead-out portions 58 leading to are formed. The liquid lead-out portion 58 communicates with the recovery-side common flow path 50 through the recovery-side opening 59 of the diaphragm member 3 .

The common channel member 20 forms a common channel 10 on the supply side and a common channel 50 on the recovery side. The common channel 10 on the supply side communicates with the supply port 71 , and the common channel 50 on the recovery side communicates with the recovery port 72 .

In the liquid ejection head 100, for example, by lowering the voltage applied to the piezoelectric element 12A from the reference potential (intermediate potential), the piezoelectric element 12A contracts, the vibration region 30 of the diaphragm member 3 is pulled, and the volume of the pressure chamber 6 increases. expands, the liquid flows into the pressure chamber 6 .

Thereafter, the voltage applied to the piezoelectric element 12A is increased to extend the piezoelectric element 12A in the stacking direction, deform the vibration region 30 of the diaphragm member 3 in the direction toward the nozzle 4, and contract the volume of the pressure chamber 6. , the liquid in the pressure chamber 6 is pressurized, and the liquid is discharged from the nozzle 4 .

Further, the liquid that is not discharged from the nozzle 4 passes through the nozzle 4 and is recovered from the individual recovery channel 56 to the common channel 50 on the recovery side. It is supplied again to the path 10.

The method of driving the head is not limited to the above example (pull-push-hit), and it is also possible to perform pull-hit or push-hit depending on which drive waveform is applied.

Also in this embodiment, a through hole 32 that opens toward the pressure chamber 6 is provided in the diaphragm member 3, and a filling material that forms a displaceable (deformable) wall surface of the pressure chamber 6 inside the through hole 32. 33 is filled.

As a result, the residual vibration of the pressure chamber 6 can be attenuated or suppressed, stable liquid ejection characteristics can be obtained, and variations in the ejection characteristics can be reduced.

Next, an example of an apparatus for ejecting liquid according to the present invention will be described with reference to FIGS. 14 and 15. FIG. FIG. 14 is a schematic explanatory view of the same device, and FIG. 15 is a plane explanatory view of an example of a head unit of the same device.

A printing apparatus 500, which is a device for ejecting liquid, includes loading means 501 for loading a continuous body 510; It includes printing means 505 for printing to form an image by ejecting liquid onto 510 , drying means 507 for drying the continuous body 510 , carrying out means 509 for carrying out the continuous body 510 , and the like.

The continuous body 510 is sent out from the main winding roller 511 of the carry-in means 501 , guided and carried by rollers of the carry-in means 501 , the guide/conveyance means 503 , the drying means 507 and the carry-out means 509 , and is wound by the take-up roller 591 of the carry-out means 509 . is taken up by

This continuous body 510 is transported on the transport guide member 559 facing the head unit 550 and the head unit 555 in the printing means 505 , an image is formed by the liquid ejected from the head unit 550 , and the image is ejected from the head unit 555 . A post-treatment is performed with a treatment liquid to be applied.

Here, the head unit 550 includes, for example, full-line head arrays 551A, 551B, 551C, and 551D for four colors from the upstream side in the transport direction (hereinafter referred to as "head array 551" when the colors are not distinguished). are placed.

Each head array 551 is a liquid ejecting means, and ejects black K, cyan C, magenta M, and yellow Y liquids onto the conveyed continuous body 510 . Note that the types and number of colors are not limited to this.

The head array 551 is formed by, for example, arranging the liquid ejection heads (also simply referred to as “heads”) 100 according to the present invention in a zigzag manner on the base member 552, but is not limited to this.

Next, an example of the liquid circulation device will be described with reference to FIG. FIG. 16 is a block explanatory diagram of the circulation device. Although only one head is shown here, in the case of arranging a plurality of heads, a supply side liquid path and a recovery side liquid path are connected to the supply side and the recovery side of the plurality of heads via a manifold or the like. will connect.

The liquid circulation device 600 includes a supply tank 601, a recovery tank 602, a main tank 603, a first liquid-sending pump 604, a second liquid-sending pump 605, a compressor 611, a regulator 612, a vacuum pump 621, a regulator 622, and a supply-side pressure sensor 631. , recovery side pressure sensor 632 and the like.

Here, the compressor 611 and the vacuum pump 621 constitute means for creating a differential pressure between the pressure in the supply tank 601 and the pressure in the recovery tank 602 .

The supply-side pressure sensor 631 is connected to the supply-side liquid path connected to the supply port 71 of the head 100 between the supply tank 601 and the head 100 . The recovery side pressure sensor 632 is connected to the recovery side liquid path connected to the recovery port 72 of the head 100 between the head 1 and the recovery tank 602 .

One of the recovery tanks 602 is connected to the supply tank 601 via the first liquid-sending pump 604 , and the other of the recovery tanks 602 is connected to the main tank 603 via the second liquid-sending pump 605 .

As a result, the liquid flows from the supply tank 601 into the head 100 through the supply port 71 , is recovered from the recovery port 72 to the recovery tank 602 , and is transferred from the recovery tank 602 to the supply tank 601 by the first liquid feeding pump 604 . A circulation path through which the liquid circulates is constructed by being sent.

Here, a compressor 611 is connected to the supply tank 601 and controlled so that a predetermined positive pressure is detected by the supply side pressure sensor 631 . On the other hand, a vacuum pump 621 is connected to the collection tank 602 and controlled so that a predetermined negative pressure is detected by the collection side pressure sensor 632 .

Thereby, the negative pressure of the meniscus can be kept constant while the liquid is circulated through the head 100 .

Further, when the liquid is discharged from the nozzle 4 of the head 100, the amount of liquid in the supply tank 601 and the recovery tank 602 decreases. Therefore, the recovery tank 602 is replenished with liquid from the main tank 603 using the second liquid-sending pump 605 as appropriate.

The timing of liquid replenishment from the main tank 603 to the recovery tank 602 is set within the recovery tank 602, such as when the liquid level in the recovery tank 602 drops below a predetermined level. It can be controlled by the detection result of a liquid level sensor or the like.

Next, another example of a printing apparatus as an apparatus for ejecting liquid according to the present invention will be described with reference to FIGS. 17 and 18. FIG. FIG. 17 is an explanatory plan view of the essential parts of the device, and FIG. 18 is an explanatory side view of the essential parts of the same device.

The printing apparatus 500 is a serial type apparatus, and a main scanning movement mechanism 493 reciprocates the carriage 403 in the main scanning direction. The main scanning movement mechanism 493 includes a guide member 401, a main scanning motor 405, a timing belt 408, and the like. The guide member 401 is bridged between the left and right side plates 491A and 491B to movably hold the carriage 403 . A main scanning motor 405 reciprocates the carriage 403 in the main scanning direction via a timing belt 408 stretched between a drive pulley 406 and a driven pulley 407 .

The carriage 403 is equipped with a liquid ejection unit 440 in which the liquid ejection head 100 and the head tank 441 according to the present invention are integrated. The liquid ejection head 100 of the liquid ejection unit 440 ejects liquids of yellow (Y), cyan (C), magenta (M), and black (K), for example. In addition, the liquid ejection head 100 is mounted with a nozzle row having a plurality of nozzles arranged in a sub-scanning direction perpendicular to the main scanning direction, with the ejection direction directed downward.

The liquid ejection head 100 is connected to the liquid circulation device 600 described above, and the liquid of a desired color is circulated and supplied.

This printing apparatus 500 includes a transport mechanism 495 for transporting the paper 410 . The transport mechanism 495 includes a transport belt 412 as transport means and a sub-scanning motor 416 for driving the transport belt 412 .

The transport belt 412 attracts the paper 410 and transports it at a position facing the liquid ejection head 100 . The conveying belt 412 is an endless belt and stretched between a conveying roller 413 and a tension roller 414 . Adsorption can be performed by electrostatic adsorption, air suction, or the like.

The conveying belt 412 rotates in the sub-scanning direction when the conveying roller 413 is rotationally driven by the sub-scanning motor 416 via the timing belt 417 and the timing pulley 418 .

Further, on one side of the carriage 403 in the main scanning direction, a maintenance/recovery mechanism 420 for maintaining/recovering the liquid ejection head 100 is arranged on the side of the transport belt 412 .

The maintenance/recovery mechanism 420 includes, for example, a cap member 421 that caps the nozzle surface of the liquid ejection head 100 (a surface on which nozzles are formed), a wiper member 422 that wipes the nozzle surface, and the like.

The main scanning movement mechanism 493, maintenance recovery mechanism 420, and transport mechanism 495 are attached to a housing including side plates 491A and 491B and a back plate 491C.

In the printing apparatus 500 configured as described above, the paper 410 is fed onto the conveying belt 412 and attracted thereto, and the conveying belt 412 is rotated to convey the paper 410 in the sub-scanning direction.

Therefore, by moving the carriage 403 in the main scanning direction and driving the liquid ejection head 100 in accordance with the image signal, the liquid is ejected onto the stationary paper 410 to form an image.

Next, another example of the liquid ejection unit according to the invention will be described with reference to FIG. FIG. 19 is an explanatory plan view of the main part of the same unit.

Among the members constituting the liquid ejection unit 440 and the apparatus for ejecting the liquid, a housing portion composed of side plates 491A and 491B and a back plate 491C, a main scanning movement mechanism 493, a carriage 403, and liquid It is composed of an ejection head 100 .

It should be noted that a liquid ejection unit can be constructed in which the maintenance recovery mechanism 420 described above is further attached to the side plate 491B of the liquid ejection unit 440, for example.

Next, still another example of the liquid ejection unit according to the present invention will be described with reference to FIG. FIG. 20 is an explanatory front view of the same unit.

This liquid ejection unit 440 is composed of a liquid ejection head 100 to which a channel component 444 is attached, and a tube 456 connected to the channel component 444 .

Note that the channel component 444 is arranged inside the cover 442 . A head tank 441 can also be included in place of the channel component 444 . A connector 443 for electrical connection with the liquid ejection head 100 is provided above the channel component 444 .

In the present application, the liquid to be ejected is not particularly limited as long as it has a viscosity and surface tension that can be ejected from the head. It is preferable to be More specifically, solvents such as water and organic solvents, colorants such as dyes and pigments, functional-imparting materials such as polymerizable compounds, resins, and surfactants, biocompatible materials such as DNA, amino acids, proteins, and calcium. , edible materials such as natural pigments, solutions, suspensions, emulsions, etc. These are, for example, inkjet inks, surface treatment liquids, components of electronic elements and light emitting elements, and formation of electronic circuit resist patterns It can be used for applications such as liquids for liquids and material liquids for three-dimensional modeling.

Piezoelectric actuators (laminated piezoelectric element and thin film piezoelectric element), thermal actuators that use electrothermal conversion elements such as heating resistors, and electrostatic actuators that consist of a diaphragm and a counter electrode are used as energy sources for liquid ejection. includes those that

A "liquid ejection unit" is a liquid ejection head integrated with functional parts and mechanisms, and includes an assembly of parts related to ejection of liquid. For example, the "liquid ejection unit" includes a combination of at least one of a head tank, a carriage, a supply mechanism, a maintenance and recovery mechanism, a main scanning movement mechanism, and a liquid circulation device with a liquid ejection head.

Here, integration means, for example, that the liquid ejection head and functional parts or mechanisms are fixed to each other by fastening, adhesion, or engagement, or that one is held movably with respect to the other. include. Also, the liquid ejection head, the functional parts, and the mechanism may be configured to be detachable from each other.

For example, there is a liquid ejection unit in which a liquid ejection head and a head tank are integrated. Also, there is a type in which a liquid ejection head and a head tank are integrated by being connected to each other by a tube or the like. Here, it is also possible to add a unit including a filter between the head tank and the liquid ejection head of these liquid ejection units.

Further, there is a liquid ejection unit in which a liquid ejection head and a carriage are integrated.

Further, as a liquid ejection unit, there is one in which the liquid ejection head is movably held by a guide member constituting a part of the scanning movement mechanism, and the liquid ejection head and the scanning movement mechanism are integrated. Also, there is a type in which the liquid ejection head, the carriage, and the main scanning movement mechanism are integrated.

There is also a liquid ejection unit in which the liquid ejection head, the carriage, and the maintenance and recovery mechanism are integrated by fixing a cap member, which is a part of the maintenance and recovery mechanism, to a carriage to which the liquid ejection head is attached. .

Further, as a liquid ejection unit, there is one in which a tube is connected to a liquid ejection head to which a head tank or a channel component is attached, and the liquid ejection head and the supply mechanism are integrated. The liquid in the liquid storage source is supplied to the liquid ejection head through this tube.

It is assumed that the main scanning movement mechanism also includes a single guide member. Also, the supply mechanism includes a single tube and a single loading unit.

The "apparatus for ejecting liquid" includes an apparatus that includes a liquid ejection head or a liquid ejection unit, and drives the liquid ejection head to eject liquid. Devices that eject liquid include not only devices that can eject liquid onto an object to which liquid can adhere, but also devices that eject liquid into air or liquid.

The "liquid ejecting device" can include means for feeding, transporting, and ejecting an object to which liquid can adhere, as well as a pre-processing device, a post-processing device, and the like.

For example, as a "device that ejects liquid", an image forming device that ejects ink to form an image on paper, and powder is formed in layers to form a three-dimensional object (three-dimensional object). There is a three-dimensional modeling apparatus (three-dimensional modeling apparatus) that ejects a modeling liquid onto a formed powder layer.

Further, the "apparatus for ejecting liquid" is not limited to one that visualizes significant images such as characters and figures with the ejected liquid. For example, it includes those that form patterns that have no meaning per se, and those that form three-dimensional images.

The above-mentioned "substance to which a liquid can adhere" means a substance to which a liquid can adhere at least temporarily, such as a substance to which a liquid adheres and adheres, a substance which adheres and permeates, and the like. Specific examples include media such as recording media such as paper, recording paper, recording paper, film, and cloth, electronic components such as electronic substrates and piezoelectric elements, powder layers (powder layers), organ models, and test cells. Yes, and unless otherwise specified, includes anything that has liquid on it.

The material of the above-mentioned "thing to which a liquid can adhere" may be paper, thread, fiber, fabric, leather, metal, plastic, glass, wood, ceramics, etc., as long as the liquid can adhere even temporarily.

Further, the ``device for ejecting liquid'' includes a device in which a liquid ejection head and an object to which liquid can be adhered move relatively, but is not limited to this. Specific examples include a serial type apparatus in which the liquid ejection head is moved and a line type apparatus in which the liquid ejection head is not moved.

In addition, the "apparatus for ejecting liquid" also includes a treatment liquid coating device that ejects a treatment liquid onto the paper for the purpose of modifying the surface of the paper. There is an injection granulator that granulates fine particles of the raw material by injecting a composition liquid in which raw materials are dispersed in a solution through a nozzle.

The terms used in the present application, such as image formation, recording, printing, copying, printing, and molding, are synonymous.

REFERENCE SIGNS LIST 1 nozzle plate 4 nozzle 2 channel plate 3 diaphragm member 6 pressure chamber 10 common channel 11 piezoelectric actuator 20 common channel member 32 through hole 33 filler 34 concave portion 50 common channel 100 liquid ejection head 403 carriage 440 liquid ejection unit 500 printing device (device for ejecting liquid)
550 head unit 600 liquid circulation device

Claims (8)

a diaphragm member having a vibrating region forming a displaceable wall surface of a pressure chamber communicating with a nozzle for ejecting liquid ;
The diaphragm member includes at least a thin portion forming the vibration region and facing the pressure chamber, and a thick portion provided on the opposite side of the thin portion to the pressure chamber,
The diaphragm member is provided with a recessed portion or a through hole that opens toward the pressure chamber,
The recess or the through-hole is open in the longitudinal direction of the pressure chamber so that a part thereof extends to the outside of the pressure chamber,
The interior of the recess or the through hole is filled with a filling material that forms a displaceable wall surface of the pressure chamber,
The thick portion is provided with a stepped portion in a cross-sectional shape along the longitudinal direction of the pressure chamber to form a relatively thin portion and a relatively thick portion,
The recess or the through hole is provided in the thin portion and the thin portion of the thick portion, and is not provided in the thick portion of the thick portion.
A liquid ejection head characterized by: 2. The liquid ejection head according to claim 1 , wherein the recesses or the through holes that open toward the pressure chambers are arranged near the longitudinal ends of the pressure chambers. 3. The liquid ejection head according to claim 1, wherein the filler is resin. 4. The liquid ejection head according to claim 3 , wherein the resin is an ultraviolet curable resin. having a plurality of pressure chambers,
5. The liquid ejection head according to claim 3 , wherein at least two of said pressure chambers are filled with different amounts of said resin. A liquid ejection unit comprising the liquid ejection head according to claim 1 . a head tank for storing the liquid to be supplied to the liquid ejection head, a carriage for mounting the liquid ejection head, a supply mechanism for supplying the liquid to the liquid ejection head, a maintenance and recovery mechanism for maintaining and recovering the liquid ejection head, and the liquid 7. A liquid ejection unit according to claim 6 , wherein at least one of main scanning movement mechanisms for moving the ejection head in the main scanning direction is integrated with the liquid ejection head. A device for ejecting liquid, comprising the liquid ejection head according to any one of claims 1 to 5 , or the liquid ejection unit according to claim 6 or 7 .

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