JP7167425B2 - Physical quantity sensors, inertial measurement devices, mobile positioning devices, portable electronic devices, electronic devices, and mobile objects - Google Patents

Description

The present invention relates to physical quantity sensors, inertial measurement devices, mobile positioning devices, portable electronic devices, electronic devices, and mobile objects.

In recent years, physical quantity sensors manufactured using silicon MEMS (Micro Electro Mechanical System) technology have been developed. As such a physical quantity sensor, for example, Patent Document 1 discloses an element provided with a movable electrode and a fixed electrode that are arranged in a comb shape and face each other. describes a capacitive acceleration sensor that detects a physical quantity (angular velocity) by In this configuration, a large number of movable electrodes and fixed electrodes are provided in order to increase detection sensitivity.

U.S. Patent Application No. 8468886

However, in the configuration of the physical quantity sensor described in Patent Document 1, it is necessary to reduce the number of movable electrodes and fixed electrodes in order to achieve miniaturization, and there is a problem that detection sensitivity is lowered.

The present invention has been made to solve at least part of the above problems, and can be implemented as the following forms or application examples.

[Application Example 1] A physical quantity sensor according to this application example includes a substrate and a detection section provided on the substrate for detecting a physical quantity, and the detection section includes a fixed detection electrode fixed to the substrate. a movable detection electrode that can be displaced in a first direction that is a detection axis direction of the physical quantity with respect to the substrate; a first fixing portion that fixes the movable detection electrode to the substrate; a first spring portion connecting with the movable detection electrode, wherein the fixed detection electrode includes a plurality of fixed detection electrode fingers provided along a second direction that intersects with the first direction. and the movable detection electrode has a first stem provided along the first direction, and a first stem provided along the second direction from the first stem, and the fixed detection electrode finger and the first direction. a plurality of movable sensing electrode fingers spaced apart from each other; and a second support portion connected to the first spring portion, and the distance between the first support portion and the fixed detection electrode in the first direction is equal to the distance between the second support portion and the fixed detection electrode. It is characterized by being smaller than the distance from the electrode in the first direction.

According to this application example, the distance in the first direction between the fixed detection electrode of the first supporting portion that constitutes the first connecting portion that connects the first stem of the movable detecting electrode and the first spring portion is the second supporting portion. Since it is smaller than the distance in the first direction between the portion and the fixed detection electrode, the first support portion can be regarded as a movable detection electrode finger facing the fixed detection electrode finger. Therefore, it is possible to increase the capacitance between the movable detection electrode and the fixed detection electrode, thereby increasing the detection sensitivity. Therefore, it is possible to obtain a physical quantity sensor in which a decrease in detection sensitivity is reduced even when miniaturization is attempted.

Application Example 2 In the physical quantity sensor according to the application example described above, it is preferable that the length of the first supporting portion in the second direction is substantially equal to the length of the movable detection electrode finger in the second direction.

According to this application example, the length of the first supporting portion in the second direction is substantially equal to the length of the movable detecting electrode finger in the second direction, so that the side surface of the first supporting portion and the side surface of the fixed detecting electrode finger are separated from each other. The facing area can be substantially equal to the facing area between the side surface of the movable detection electrode finger and the side surface of the fixed detection electrode finger.

[Application Example 3] In the physical quantity sensor according to the application example described above, the distance between the first supporting portion and the fixed detection electrode in the first direction is equal to the distance between the fixed detection electrode finger and the movable detection electrode finger. It is preferably substantially equal to the spacing in one direction.

According to this application example, the above-described facing areas are equal, and the spacing in the first direction between the first supporting portion and the fixed detection electrode is substantially equal to the spacing in the first direction between the fixed detection electrode finger and the movable detection electrode finger. Therefore, the capacitance between the first support portion and the fixed detection electrode can be made substantially equal to the capacitance between the fixed detection electrode finger and the movable detection electrode finger.

Application Example 4 A physical quantity sensor according to this application example includes a substrate and a detection unit provided on the substrate for detecting a physical quantity, and the detection unit includes a fixed detection electrode fixed to the substrate. a movable detection electrode that can be displaced in a first direction that is a detection axis direction of the physical quantity with respect to the substrate; a first fixing portion that fixes the movable detection electrode to the substrate; a first spring portion connecting with the movable detection electrode, wherein the fixed detection electrode includes a plurality of fixed detection electrode fingers provided along a second direction that intersects with the first direction. and the movable detection electrode has a first stem provided along the first direction, and a first stem provided along the second direction from the first stem, and the fixed detection electrode finger and the first direction. and a first connecting portion connected to the first stem, wherein the length of the first connecting portion in the second direction is the movable The length of the detection electrode finger in the second direction is substantially equal to the length of the detection electrode finger in the second direction, and the distance in the first direction between the first connecting portion and the fixed detection electrode is the first distance between the fixed detection electrode finger and the movable detection electrode finger. It is characterized by being approximately equal to the interval in the direction.

According to this application example, the length of the first connecting portion in the second direction is substantially equal to the length of the movable detection electrode finger in the second direction, and the distance between the first connecting portion and the fixed detection electrode in the first direction is , and the interval in the first direction between the fixed detection electrode finger and the movable detection electrode finger. can be approximately equal to the capacitance between Therefore, since the first connecting portion can be regarded as a movable detection electrode finger facing the fixed detection electrode finger, the capacitance between the movable detection electrode and the fixed detection electrode can be increased, and the detection sensitivity can be increased. can do. Therefore, it is possible to obtain a physical quantity sensor in which a decrease in detection sensitivity is reduced even when miniaturization is attempted.

[Application Example 5] In the physical quantity sensor according to the application example described above, a drive section provided on the substrate and capable of driving the detection section is provided, and the drive section is a fixed drive electrode fixed to the substrate. connecting a movable drive electrode displaceable in the second direction with respect to the substrate, a second fixing portion fixing the movable drive electrode to the substrate, and the second fixing portion and the movable drive electrode. and a second spring portion, wherein the fixed drive electrode has a plurality of fixed drive electrode fingers provided along the second direction, and the movable drive electrode extends along the first direction. a second stem provided, a plurality of movable drive electrode fingers provided along the second direction from the second stem and spaced apart from the fixed drive electrode fingers in the first direction; a second connecting portion connected to the second stem, wherein the second connecting portion includes a third support portion connected to the second stem; and a fourth support portion connected to the second spring portion. , and the distance between the third support portion and the fixed drive electrode in the first direction is preferably smaller than the distance between the fourth support portion and the fixed drive electrode in the first direction.

According to this application example, the distance in the first direction between the fixed drive electrode and the third support portion that constitutes the second connection portion that connects the second stem of the movable drive electrode and the second spring portion is equal to the fourth support portion. Since it is smaller than the distance in the first direction between the portion and the fixed drive electrode, the third support can be regarded as a movable drive electrode finger facing the fixed drive electrode finger. Therefore, the capacitance between the movable drive electrode and the fixed drive electrode can be increased, so that the vibration displacement of the detection section can be increased, and the detection sensitivity can be increased. Therefore, it is possible to obtain a physical quantity sensor in which deterioration in detection sensitivity is further reduced even when miniaturization is attempted.

Application Example 6 In the physical quantity sensor according to the application example described above, it is preferable that the length of the third supporting portion in the second direction is substantially equal to the length of the movable drive electrode finger in the second direction.

According to this application example, the length of the third supporting portion in the second direction is substantially equal to the length of the movable drive electrode finger in the second direction, so that the side surface of the third supporting portion and the side surface of the fixed drive electrode finger The opposing area can be made substantially equal to the opposing area between the side surfaces of the movable drive electrode fingers and the side surfaces of the fixed drive electrode fingers.

[Application Example 7] In the physical quantity sensor according to the application example described above, the distance between the third supporting portion and the fixed drive electrode in the first direction is equal to the distance between the fixed drive electrode finger and the movable drive electrode finger. It is preferably substantially equal to the spacing in one direction.

According to this application example, the above-described facing areas are equal, and the distance between the third supporting portion and the fixed drive electrode in the first direction is substantially equal to the distance between the fixed drive electrode finger and the movable drive electrode finger in the first direction. Therefore, the capacitance between the third supporting portion and the fixed drive electrode can be made substantially equal to the capacitance between the fixed drive electrode finger and the movable drive electrode finger.

Application Example 8 An inertial measurement device according to this application example includes the physical quantity sensor according to the above application example, and a control circuit that controls driving of the physical quantity sensor.

According to this application example, it is possible to obtain the effects of the physical quantity sensor as described above, and to obtain an inertial measurement device with high reliability.

[Application Example 9] A mobile positioning device according to this application example includes the inertial measurement device according to the above application example, a receiving unit for receiving a satellite signal superimposed with position information from a positioning satellite, and an acquisition unit that acquires the position information of the receiving unit based on the signal; a calculation unit that calculates the attitude of the moving object based on the inertia data output from the inertial measurement device; and based on the calculated attitude. and a calculating unit that calculates the position of the moving body by correcting the position information using the position information.

According to this application example, the effect of the physical quantity sensor as described above can be enjoyed, and a highly reliable mobile object positioning device can be obtained.

[Application Example 10] A portable electronic device according to this application example includes the physical quantity sensor according to the above application example, a case containing the physical quantity sensor, and output data from the physical quantity sensor contained in the case. , a display unit housed in the case, and a translucent cover closing the opening of the case.

According to this application example, the effect of the physical quantity sensor as described above can be enjoyed, and a highly reliable portable electronic device can be obtained.

[Application Example 11] An electronic device according to this application example includes the physical quantity sensor according to the above application example, and a control unit that performs control based on a detection signal output from the physical quantity sensor. and

According to this application example, the effect of the physical quantity sensor as described above can be enjoyed, and a highly reliable electronic device can be obtained.

[Application Example 12] A moving object according to this application example includes the physical quantity sensor according to the above application example, and an attitude control section that controls the attitude based on the detection signal output from the physical quantity sensor. It is characterized by

According to this application example, the effect of the physical quantity sensor as described above can be enjoyed, and a highly reliable moving body can be obtained.

1 is a plan view showing a physical quantity sensor according to a first embodiment of the invention; FIG. FIG. 2 is a cross-sectional view along the line AA in FIG. 1; FIG. 2 is a plan view showing an element portion included in the physical quantity sensor of FIG. 1; FIG. 4 is an enlarged plan view of a B portion in FIG. 3; FIG. 4 is an enlarged plan view of a reversed-phase spring included in the element portion of FIG. 3; FIG. 4 is an enlarged plan view of a reversed-phase spring included in the element portion of FIG. 3; FIG. 4 is a schematic diagram for explaining vibration modes of the element portion shown in FIG. 3 ; The top view which shows a part of detection part which the physical quantity sensor which concerns on 2nd Embodiment of this invention has. The top view which shows the element part which the physical quantity sensor which concerns on 3rd Embodiment of this invention has. FIG. 10 is an enlarged plan view of a C portion in FIG. 9; 1 is an exploded perspective view showing a schematic configuration of an inertial measurement device; FIG. FIG. 3 is a perspective view showing an arrangement example of inertial sensor elements of an inertial measurement device; 1 is a block diagram showing the overall system of a mobile positioning device; FIG. The figure which shows typically the effect|action of a mobile positioning apparatus. 1 is a plan view schematically showing the configuration of a portable electronic device; FIG. FIG. 2 is a functional block diagram showing a schematic configuration of a portable electronic device; 1 is a perspective view schematically showing the configuration of a mobile personal computer, which is an example of an electronic device; FIG. 1 is a perspective view schematically showing the configuration of a smart phone (mobile phone), which is an example of an electronic device; FIG. 1 is a perspective view showing the configuration of a digital still camera as an example of electronic equipment; FIG. 1 is a perspective view showing the configuration of an automobile, which is an example of a moving object; FIG.

A physical quantity sensor, an inertial measurement device, a mobile positioning device, a portable electronic device, an electronic device, and a mobile object according to the present invention will be described below in detail based on embodiments shown in the accompanying drawings. It should be noted that the embodiments described below do not unduly limit the scope of the invention described in the claims. Moreover, not all the configurations described in the present embodiment are essential constituent elements of the present invention.

<Physical quantity sensor>
[First embodiment]
First, a physical quantity sensor 1 according to a first embodiment of the present invention will be described with reference to FIGS. 1 to 7. FIG. FIG. 1 is a plan view showing a physical quantity sensor according to a first embodiment of the invention. FIG. 2 is a cross-sectional view taken along line AA in FIG. 3 is a plan view showing an element portion included in the physical quantity sensor of FIG. 1. FIG. 4 is an enlarged plan view of a portion B in FIG. 3. FIG. 5 and 6 are enlarged plan views of the anti-phase springs of the element portion of FIG. 3, respectively. FIG. 7 is a schematic diagram for explaining vibration modes of the element shown in FIG. 1 to 7 and FIGS. 8 to 10 shown later, the X-axis, the Y-axis and the Z-axis are illustrated as three mutually orthogonal axes, and each of the element portions 4 bonded to the substrate 2 The plane on which the parts are arranged is the X-axis and the Y-axis, and the direction in which the substrate 2 and the lid 3 are joined is the Z-axis. In addition, the direction parallel to the X axis is "X-axis direction" or "second direction", the direction parallel to Y-axis is "Y-axis direction" or "first direction", and the direction parallel to Z-axis is "Z-axis direction". Also called "direction". Also, the arrow tip side of each axis is also called the "plus side", and the opposite side is also called the "minus side". The positive side in the Z-axis direction is also called "upper or upper", and the negative side in the Z-axis direction is also called "lower or lower".

A physical quantity sensor 1 shown in FIG. 1 is an angular velocity sensor capable of detecting an angular velocity ωz about the Z-axis. The physical quantity sensor 1 has a substrate 2 , a lid 3 and an element section 4 .

As shown in FIG. 1, the substrate 2 has a plate shape having a rectangular planar shape when viewed from the Z-axis direction. Further, the substrate 2 has a concave portion 21 that opens to the upper surface, which is the upper surface. The concave portion 21 functions as a relief portion for preventing (suppressing) contact between the element portion 4 and the substrate 2 . The substrate 2 also has a plurality of mounts 22 (221, 222, 223, 224, 225) projecting from the bottom surface of the recess 21. As shown in FIG. The element section 4 is joined to the upper surfaces of these mounts 22 . Thereby, the element section 4 can be fixed to the substrate 2 while the contact with the substrate 2 is prevented. The substrate 2 also has grooves 23, 24, 25, 26, 27, and 28 that are open to the upper surface.

As the substrate 2, for example, a glass material (eg, Tempax (registered trademark) glass, Pyrex ( A glass substrate composed of borosilicate glass such as (registered trademark) glass) can be used. As a result, for example, as described later, the substrate 2 and the element section 4 can be anodically bonded, and can be firmly bonded. Moreover, since the substrate 2 having optical transparency is obtained, the state of the element section 4 can be visually recognized from the outside of the physical quantity sensor 1 through the substrate 2 . However, the constituent material of the substrate 2 is not particularly limited, and a silicon substrate, a ceramic substrate, or the like may be used.

As shown in FIG. 1, wirings 73, 74, 75, 76, 77 and 78 are arranged in the grooves 23, 24, 25, 26, 27 and 28, respectively. The wirings 73 , 74 , 75 , 76 , 77 and 78 are electrically connected to the element section 4 respectively. One ends of the wirings 73, 74, 75, 76, 77, and 78 are exposed outside the lid 3 and function as electrode pads P for electrical connection with an external device.

As shown in FIG. 1, the lid body 3 has a plate shape having a rectangular plan view shape when viewed from the Z-axis direction. Further, as shown in FIG. 2, the lid 3 has a recess 31 that opens downward. The lid 3 is joined to the upper surface of the substrate 2 so as to accommodate the element section 4 in the recess 31 . A housing space S for housing the element section 4 is formed inside the lid 3 and the substrate 2 .

Moreover, as shown in FIG. 2, the lid 3 has a communication hole 32 that communicates the inside and the outside of the storage space S with each other. Therefore, the storage space S can be replaced with a desired atmosphere through the communication hole 32 . A sealing member 33 is arranged in the communication hole 32 , and the communication hole 32 is airtightly sealed by the sealing member 33 . The storage space S is preferably in a decompressed state, particularly in a vacuum state. As a result, the viscous resistance is reduced, and the element section 4 can be efficiently vibrated.

A silicon substrate, for example, can be used as such a lid body 3 . However, the lid 3 is not particularly limited, and for example, a glass substrate or a ceramics substrate may be used. In addition, the method of bonding the substrate 2 and the lid 3 is not particularly limited, and may be appropriately selected depending on the materials of the substrate 2 and the lid 3. For example, anodic bonding, bonding surface activated by plasma irradiation Activation bonding for bonding them together, bonding with a bonding material such as glass frit, diffusion bonding for bonding metal films formed on the upper surface of the substrate 2 and the lower surface of the lid 3, and the like can be mentioned. In this embodiment, the substrate 2 and the lid body 3 are joined via a glass frit 39 (low-melting-point glass).

The element section 4 is arranged in the storage space S and is joined to the upper surface of the mount 22 . The element portion 4 can be formed, for example, by patterning a conductive silicon substrate doped with impurities such as phosphorus (P) and boron (B) by a dry etching method (silicon deep etching). The element portion 4 will be described in detail below. In the following description, a straight line that intersects the center O of the element portion 4 and extends in the Y-axis direction is also referred to as a "virtual straight line α" when viewed from above in the Z-axis direction.

As shown in FIG. 3, the shape of the element portion 4 is symmetrical with respect to the virtual straight line α. Further, the element section 4 has driving sections 41A and 41B arranged on both sides of the virtual straight line α. The drive units 41A and 41B can drive the detection units 44A and 44B. and staggered fixed drive electrodes 412A. Similarly, the drive section 41B includes, as movable electrode sections, comb-shaped movable drive electrodes 411B and comb-shaped fixed drive electrodes 412B arranged alternately with the movable drive electrodes 411B with a gap therebetween. have.

In addition, the fixed drive electrode 412A is positioned outside the movable drive electrode 411A (farther from the virtual straight line α), and the fixed drive electrode 412B is positioned outside the movable drive electrode 411B (farther from the virtual straight line α). is doing. The fixed drive electrodes 412A and 412B are respectively joined to the upper surface of the mount 221 and fixed to the substrate 2. As shown in FIG. The movable drive electrodes 411A and 411B are electrically connected to the wiring 73 respectively, and the fixed drive electrodes 412A and 412B are electrically connected to the wiring 74 respectively.

Further, the element unit 4 includes four fixing portions (first fixing portion 42A, second fixing portion 421A) arranged around the driving portion 41A, and four fixing portions (second fixing portion 421A) arranged around the driving portion 41B. 1 fixing portion 42B and a second fixing portion 421B). The first fixing parts 42A, 42B and the second fixing parts 421A, 421B are joined to the upper surface of the mount 222 and fixed to the substrate 2. As shown in FIG.

Further, the element portion 4 includes four drive springs 43A as second spring portions that connect the first fixed portion 42A and the second fixed portion 421A and the movable drive electrode 411A, the first fixed portion 42B and the second fixed portion It has drive springs 43B as four second spring portions that connect 421B and the movable drive electrode 411B. Each drive spring 43A elastically deforms in the X-axis direction to allow displacement of the movable drive electrode 411A in the X-axis direction. Directional displacement is allowed.

When a drive voltage is applied between the movable drive electrodes 411A and 411B and the fixed drive electrodes 412A and 412B via the wirings 73 and 74, the voltage between the movable drive electrode 411A and the fixed drive electrode 412A and between the movable drive electrode 411B and the fixed drive electrode 412A is applied. An electrostatic attractive force is generated between each electrode 412B. Due to this electrostatic attraction, the movable drive electrode 411A vibrates in the X-axis direction while elastically deforming the drive spring 43A in the X-axis direction, and the movable drive electrode 411B elastically deforms the drive spring 43B in the X-axis direction while vibrating in the X-axis direction. vibrate in one direction. Since the driving portions 41A and 41B are arranged symmetrically with respect to the virtual straight line α, the movable driving electrodes 411A and 411B vibrate in the X-axis direction in opposite phases so as to repeatedly approach and separate from each other. Therefore, vibrations of the movable drive electrodes 411A and 411B are canceled, and vibration leakage can be reduced. Hereinafter, this vibration mode is also referred to as "driving vibration mode".

Note that the physical quantity sensor 1 of the present embodiment employs an electrostatic driving method that excites the driving vibration mode by electrostatic attraction, but the method for exciting the driving vibration mode is not particularly limited. An electromagnetic drive system using the Lorentz force of a magnetic field or the like can also be applied.

The element section 4 also has detection sections 44A and 44B arranged between the drive sections 41A and 41B. The detection section 44A has, as a movable electrode section, a comb-shaped movable detection electrode 441A and fixed detection electrodes 442A and 443A which are comb-shaped and are alternately arranged with a gap from the movable detection electrode 441A. is doing. The fixed detection electrodes 442A and 443A are arranged side by side in the Y-axis direction. The fixed detection electrode 442A is positioned on the positive side in the Y-axis direction with respect to the center of the movable detection electrode 441A, and the fixed detection electrode 443A is positioned on the negative side in the Y-axis direction. is located. A pair of fixed detection electrodes 442A and 443A are arranged so as to sandwich the movable detection electrode 441A from both sides in the X-axis direction.

Similarly, the detection section 44B includes, as movable electrode sections, a comb-shaped movable detection electrode 441B and fixed detection electrodes 442B and 443B which are alternately arranged with a space between the comb-shaped movable detection electrode 441B and the movable detection electrode 441B. ,have. The fixed detection electrodes 442B and 443B are arranged side by side in the Y-axis direction. The fixed detection electrode 442B is positioned on the positive side in the Y-axis direction with respect to the center of the movable detection electrode 441B, and the fixed detection electrode 443B is positioned on the negative side in the Y-axis direction. is located. A pair of fixed detection electrodes 442B and 443B are arranged so as to sandwich the movable detection electrode 441B from both sides in the X-axis direction.

Movable detection electrodes 441A and 441B are each electrically connected to wiring 73, fixed detection electrodes 442A and 443B are each electrically connected to wiring 75, and fixed detection electrodes 443A and 442B are each electrically connected to wiring 76. is electrically connected to When the physical quantity sensor 1 is driven, an electrostatic capacitance Ca is formed between the movable detection electrode 441A and the fixed detection electrode 442A and between the movable detection electrode 441B and the fixed detection electrode 443B. and between the movable detection electrode 441B and the fixed detection electrode 442B.

The element section 4 also has two first fixing sections 451 and 452 arranged between the detection sections 44A and 44B. The first fixing parts 451 and 452 are respectively joined to the upper surface of the mount 224 and fixed to the substrate 2 . The first fixing portions 451 and 452 are arranged in the Y-axis direction and spaced apart. In this embodiment, the movable drive electrodes 411A and 411B and the movable detection electrodes 441A and 441B are electrically connected to the wiring 73 via the first fixed portions 451 and 452 .

Further, the element portion 4 includes four detection springs 46A as first spring portions connecting the movable detection electrode 441A and the first fixed portions 42A, 451 and 452, the movable detection electrode 441B and the first fixed portions 42B and 451. , 452, and detection springs 46B as four first spring portions. Elastic deformation of each detection spring 46A in the X-axis direction allows displacement of the movable detection electrode 441A in the X-axis direction, and elastic deformation in the Y-axis direction allows displacement of the movable detection electrode 441A in the Y-axis direction. Permissible. Similarly, each detection spring 46B is elastically deformed in the X-axis direction to allow displacement of the movable detection electrode 441B in the X-axis direction, and elastically deformed in the Y-axis direction allows the movable detection electrode 441B to move in the Y-axis direction. displacement is allowed.

Therefore, the movable detection electrodes 441A and 441B can be displaced in the first direction (Y-axis direction), which is the detection axis direction, by the angular velocity ωz about the Z-axis, and the angular velocity ωz about the Z-axis can be detected.

Further, as shown in FIG. 4, the detection section 44B includes a movable detection electrode 441B having a plurality of movable detection electrode fingers 51 arranged in a comb shape, and a plurality of fixed detection electrode fingers arranged in a comb shape. 53 of the movable detection electrode 441B and fixed detection electrodes 443B staggered with a gap therebetween.

The fixed detection electrode 443B has a plurality of fixed detection electrode fingers 53 extending along the second direction (X-axis direction) that intersects the first direction (Y-axis direction). there is In addition, the movable detection electrode 441B includes the first trunk 50 extending along the Y-axis direction and the first trunk 50 extending along the X-axis direction. 53 and a plurality of movable detection electrode fingers 51 spaced apart in the Y-axis direction;

Furthermore, the first connecting portion 52 has a first supporting portion 521 connected to the first stem 50 and a second supporting portion 522 connected to the detection spring 46B. The distance G1 in the Y-axis direction from the electrode 443B is smaller than the distance G2 in the Y-axis direction between the second support portion 522 and the fixed detection electrode 443B. That is, the first support portion 521 is arranged closer to the fixed detection electrode 443B than the second support portion 522 is. In addition, since the second support portion 522 is provided, the detection spring 46B can be lengthened, and the movable detection electrode 441B can be more easily displaced.

Also, the length L1 of the first support portion 521 in the X-axis direction is substantially equal to the length L2 of the movable detection electrode finger 51 in the X-axis direction. Therefore, the facing area between the side surface of the first support portion 521 and the side surface of the fixed detection electrode finger 53 can be made equal to the facing area between the side surface of the movable detection electrode finger 51 and the side surface of the fixed detection electrode finger 53 .

A space G1 in the Y-axis direction between the first support portion 521 and the fixed detection electrode 443B is substantially equal to a space G3 in the Y-axis direction between the fixed detection electrode finger 53 and the movable detection electrode finger 51 . In other words, since the facing areas are also substantially equal, the capacitance between the first support portion 521 and the fixed detection electrode 443B is made equal to the capacitance between the fixed detection electrode finger 53 and the movable detection electrode finger 51. be able to.

Therefore, the length L1 of the first support portion 521 and the length L2 of the movable detection electrode finger 51 are equal, and the distance G1 between the first support portion 521 and the fixed detection electrode 443B and the fixed detection electrode finger 53 and the movable detection electrode finger 53 are equal to each other. 51 in the Y-axis direction is substantially equal, the first support portion 521 and the fixed detection electrode 443B correspond to a pair of the fixed detection electrode finger 53 and the movable detection electrode finger 51 . Therefore, the first supporting portion 521 can be regarded as the movable detection electrode fingers 51, and the movable detection electrode fingers 51 can be increased without changing the dimension of the detection portion 44B in the Y-axis direction. That is, it is possible to increase the capacitance between the movable detection electrode 441B and the fixed detection electrode 443B, thereby improving the detection sensitivity. Also, it is possible to achieve a size reduction while maintaining the same detection sensitivity.

In the present embodiment, as shown in FIG. 3, both ends in the Y-axis direction of the detection unit 44B, the ends in the −Y-axis direction and the ends in the −X-axis direction have been described as an example. , the end of the detection unit 44B in the −Y-axis direction and the end in the +X-axis direction, the end of the detection unit 44B in the +Y-axis direction and both ends in the X-axis direction, and both ends in the Y-axis direction of the detection unit 44A. , and both ends in the X-axis direction have the same configuration.

Returning to FIG. 3, the element section 4 further includes a reverse-phase spring 47A which is positioned between the drive section 41A and the detection section 44A and connects the movable drive electrode 411A and the movable detection electrode 441A, and the drive section 41B and the detection element 47A. and a reversed-phase spring 47B positioned between the portion 44B and connecting the movable drive electrode 411B and the movable detection electrode 441B. The movable detection electrode 441A can be displaced in the X-axis direction with respect to the movable drive electrode 411A by elastically deforming the reverse-phase spring 47A in the X-axis direction. Similarly, the movable detection electrode 441B can be displaced in the X-axis direction with respect to the movable drive electrode 411B by elastically deforming the reverse-phase spring 47B in the X-axis direction.

As shown in FIG. 5, the reverse-phase spring 47A includes a spring body 471A, a beam 477A connecting the spring body 471A and the movable drive electrode 411A, a beam 478A connecting the spring body 471A and the movable detection electrode 441A, have. The spring body 471A has a shape extending in the Y-axis direction and is elastically deformable in the X-axis direction, and an arm 472A having a shape extending in the Y-axis direction and is elastically deformable in the X-axis direction. 473A and. Arms 472A and 473A are arranged with a gap in the X-axis direction, beam 477A is connected to the center of arm 472A, and beam 478A is connected to the center of arm 473A. The spring main body 471A also has a connecting portion 474A connecting one ends of the arms 472A and 473A and a connecting portion 475A connecting the other ends of the arms 472A and 473A. Therefore, the spring main body 471A has a frame shape with an opening at the center.

The reverse-phase spring 47B has the same configuration as the reverse-phase spring 47A, and as shown in FIG. and a beam 478B connecting with the detection electrode 441B.

Here, as shown in FIG. 7, in the drive vibration mode, the vibration of the movable drive electrode 411A is transmitted to the movable detection electrode 441A via the antiphase spring 47A. It vibrates in the X-axis direction in conjunction with it. Similarly, since the vibration of the movable drive electrode 411B is transmitted to the movable detection electrode 441B via the antiphase spring 47B, the movable detection electrode 441B vibrates in the X-axis direction in conjunction with the vibration of the movable drive electrode 411B. Further, as described above, since the movable drive electrodes 411A and 411B vibrate in the X-axis direction in opposite phases, the movable detection electrodes 441A and 441B also vibrate in the X-axis direction in opposite phases so as to repeatedly approach and separate from each other. . Therefore, vibrations of the movable detection electrodes 441A and 441B are canceled, and vibration leakage to the substrate 2 can be reduced.

Furthermore, in the drive vibration mode, the elastic deformation of the antiphase spring 47A is used to vibrate the movable detection electrode 441A in the X-axis direction in the opposite phase so as to repeatedly approach and separate from the movable drive electrode 411A. Similarly, by utilizing the elastic deformation of the anti-phase spring 47B, the movable detection electrode 441B vibrates in the X-axis direction in anti-phase so as to repeatedly approach and separate from the movable drive electrode 411B. As a result, at least part of the vibration of the movable detection electrode 441A and the movable drive electrode 411A is canceled, and at least part of the vibration of the movable detection electrode 441B and the movable drive electrode 411B is cancelled. Therefore, compared with the case where the movable detection electrode 441A and the movable drive electrode 411A and the movable detection electrode 441B and the movable drive electrode 411B vibrate in the same phase, vibration leakage to the substrate 2 can be reduced more effectively. In order to vibrate the movable detection electrode 441A and the movable drive electrode 411A in the opposite phase in the driving vibration mode, for example, the spring constant of the reverse phase spring 47A between them may be adjusted. and the movable driving electrode 411B can be vibrated in opposite phases, for example, the spring constant of the opposite phase spring 47B between them may be adjusted.

The resonance frequency f1 of the opposite phase mode in which the movable detection electrode 441A and the movable drive electrode 411A and the movable detection electrode 441B and the movable drive electrode 411B vibrate in opposite phases, respectively, and the movable detection electrode 441A, the movable drive electrode 411A and the movable detection electrode 441B and the resonance frequency f2 of the common mode at which the movable drive electrode 411B vibrates in the same phase, the larger the difference is, the easier it is to vibrate in the opposite phase mode, and the more difficult the common mode is to couple (that is, the opposite phase mode is dominant). Specifically, for example, when the resonance frequency f1 of the antiphase mode is about 30 kHz, the resonance frequency f2 of the common mode is preferably separated from the resonance frequency by 3 kHz or more (ie, 10% or more). This makes it difficult for common-mode coupling to occur sufficiently, so that it is possible to more stably drive in reverse-phase mode.

It should be noted that "the movable detection electrode 441A (441B) and the movable drive electrode 411A (411B) are vibrated in opposite phases" means that the opposite phase mode is dominant when vibrations other than the opposite phase mode are not coupled. If so, other vibration modes (eg, the common mode mode described above) may be coupled. Further, for example, it includes not only the case where there is no phase difference between the oscillations of the movable detection electrode 441A and the movable drive electrode 411A, but also the case where there is a phase difference. The case where there is no phase difference means, for example, that the time when the movable drive electrode 411A starts to be displaced to the positive side in the X-axis direction and the time when the movable detection electrode 441A starts to be displaced to the negative side in the X-axis direction are coincident. . Further, when there is a phase difference, for example, it means that the movable detection electrode 441A starts to displace to the X-axis direction minus side after the time when the movable drive electrode 411A starts to displace to the X-axis direction plus side.

When an angular velocity ωz is applied to the physical quantity sensor 1 while it is being driven in such a drive vibration mode, the movable detection electrodes 441A and 441B are moved by the Coriolis force as indicated by the arrow A in FIG. While elastically deforming 46A and 46B in the Y-axis direction, they vibrate in the opposite phase in the Y-axis direction (this vibration is also called "detection vibration mode"). In the detection vibration mode, since the movable detection electrodes 441A and 441B vibrate in the Y-axis direction, the gap between the movable detection electrode 441A and the fixed detection electrodes 442A and 443A and the gap between the movable detection electrode 441B and the fixed detection electrodes 442B and 443B are increased. Each changes, and the capacitances Ca and Cb change accordingly. Therefore, the angular velocity ωz can be obtained based on changes in the capacitances Ca and Cb.

In the detection vibration mode, when the capacitance Ca increases, the capacitance Cb decreases, and conversely, when the capacitance Ca decreases, the capacitance Cb increases. Therefore, the detection signal output from the QV amplifier connected to the wiring 75 (the signal corresponding to the capacitance Ca) and the detection signal output from the QV amplifier connected to the wiring 76 (the capacitance Cb By performing a differential operation (subtraction processing: Ca−Cb) on the signal corresponding to the magnitude of the signal), noise can be canceled and the angular velocity ωz can be detected with higher accuracy.

Here, in the drive vibration mode, the amplitude of the movable detection electrode 441A becomes larger than the amplitude of the movable drive electrode 411A due to the expansion and contraction of the anti-phase spring 47A, and the amplitude of the movable detection electrode 441B increases due to the expansion and contraction of the anti-phase spring 47B. 411B amplitude. Therefore, it is possible to increase the amplitude of the movable detection electrodes 441A and 441B in the driving vibration mode, and a correspondingly larger Coriolis force acts. Therefore, the detection sensitivity of the angular velocity ωz is improved. Moreover, since the movable detection electrodes 441A and 441B can be largely vibrated with a small driving force, power consumption can also be reduced.

Further, as shown in FIG. 3, the element section 4 has a frame 48 located in its central portion (between the detection section 44A and the detection section 44B). The frame 48 has a shape along the contour of the letter "H", that is, a so-called H shape, and has a missing portion 481 (recess) located on the positive side in the Y-axis direction and a missing portion 482 (recessed portion) located on the negative side in the Y-axis direction. recesses). A first fixing portion 451 is arranged over the inside and outside of the cutout portion 481 , and a first fixing portion 452 is arranged over the inside and outside of the cutout portion 482 . As a result, the first fixing portions 451 and 452 can be elongated in the Y-axis direction, which increases the bonding area with the substrate 2 and increases the bonding strength between the substrate 2 and the element portion 4 .

In addition, the element portion 4 is positioned between the first fixing portion 451 and the frame 48 to connect them, and the frame spring 488 is positioned between the first fixing portion 452 and the frame 48 to connect them. a frame spring 489;

The element portion 4 also includes a connection spring 40A positioned between the frame 48 and the movable detection electrode 441A to connect them, and a connection spring positioned between the frame 48 and the movable detection electrode 441B to connect them. 40B and. The connection spring 40A supports the movable detection electrode 441A together with the detection spring 46A, and the connection spring 40B supports the movable detection electrode 441B together with the detection spring 46B. Therefore, the movable detection electrodes 441A and 441B can be supported in a stable posture, and unwanted vibration (spurious) of the movable detection electrodes 441A and 441B can be reduced.

In the drive vibration mode, the elastic deformation of the connection springs 40A and 40B allows the vibration of the movable bodies 4A and 4B composed of the movable detection electrodes 441A and 441B and the movable drive electrodes 411A and 411B. Then, the connecting springs 40A and 40B and the frame springs 488 and 489 are elastically deformed, and the frame 48 is rotated around the center O, so that the movable detection electrodes 441A and 441B are allowed to vibrate in the Y-axis direction.

The element section 4 also has monitor sections 49A and 49B for detecting the vibration state of the movable drive electrodes 411A and 411B in the drive vibration mode. The monitor part 49A is arranged on the movable detection electrode 441A, and includes a movable monitor electrode 491A having a plurality of electrode fingers arranged in a comb shape, and a movable monitor electrode 491A having a plurality of electrode fingers arranged in a comb shape. and fixed monitor electrodes 492A, 493A staggered with a gap therebetween. The fixed monitor electrode 492A is positioned on the positive side in the X-axis direction with respect to the movable monitor electrode 491A, and the fixed monitor electrode 493A is positioned on the negative side in the X-axis direction with respect to the movable monitor electrode 491A.

Similarly, the monitor section 49B is arranged on the movable detection electrode 441B and includes a movable monitor electrode 491B having a plurality of electrode fingers arranged in a comb shape, and a movable monitor electrode 491B having a plurality of electrode fingers arranged in a comb shape. It has fixed monitor electrodes 492B and 493B alternately arranged with an electrode finger of monitor electrode 491B and a gap therebetween. The fixed monitor electrode 492B is positioned on the negative side in the X-axis direction with respect to the movable monitor electrode 491B, and the fixed monitor electrode 493B is positioned on the positive side in the X-axis direction with respect to the movable monitor electrode 491B.

These fixed monitor electrodes 492A, 493A, 492B, and 493B are respectively bonded to the upper surface of mount 225 and fixed to substrate 2 . In addition, the movable monitor electrodes 491A and 491B are each electrically connected to the wiring 73, the fixed monitor electrodes 492A and 492B are respectively electrically connected to the wiring 77, and the fixed monitor electrodes 493A and 493B are each electrically connected to the wiring 73. , are electrically connected to the wiring 78 . Also, the wirings 77 and 78 are connected to QV amplifiers (charge-voltage conversion circuits), respectively. When the physical quantity sensor 1 is driven, a capacitance Cc is formed between the movable monitor electrode 491A and the fixed monitor electrode 492A and between the movable monitor electrode 491B and the fixed monitor electrode 492B, and the movable monitor electrode 491A and the fixed monitor electrode 493A are formed. and between movable monitor electrode 491B and fixed monitor electrode 493B.

As described above, in the driving vibration mode, since the movable detection electrodes 441A and 441B vibrate in the X-axis direction, the gap between the movable monitor electrode 491A and the fixed monitor electrodes 492A and 493A, the movable monitor electrode 491B and the fixed monitor electrode 492B, The gaps with 493B change, respectively, and the capacitances Cc and Cd change accordingly. Therefore, based on changes in the capacitances Cc and Cd, it is possible to detect the vibration state (especially the amplitude in the X-axis direction) of the movable bodies 4A and 4B.

In the driving vibration mode, as the capacitance Cc increases, the capacitance Cd decreases, and conversely, as the capacitance Cc decreases, the capacitance Cd increases. Therefore, the detection signal obtained from the QV amplifier connected to the wiring 77 (the signal corresponding to the magnitude of the capacitance Cc) and the detection signal obtained from the QV amplifier connected to the wiring 78 (the magnitude of the capacitance Cd). By performing a differential operation (subtraction processing: Cc-Cd) between the two signals, the noise can be canceled, and the vibration state of the movable bodies 4A and 4B can be detected with higher accuracy.

The vibration state (amplitude) of the movable bodies 4A and 4B detected by the outputs from the monitor sections 49A and 49B is fed back to the drive circuit that applies the voltage V2 to the movable bodies 4A and 4B. The drive circuit changes the frequency and duty ratio of the voltage V2 so that the amplitude of the movable bodies 4A and 4B becomes the target value. As a result, the movable bodies 4A and 4B can be vibrated with a predetermined amplitude more reliably, and the detection accuracy of the angular velocity ωz is improved.

As described above, the physical quantity sensor 1 according to the first embodiment has the following features.
The Y-axis between the fixed detection electrodes 442A, 442B, 443A, and 443B of the first support portion 521 that constitutes the first connection portion 52 that connects the first trunks 50 of the movable detection electrodes 441A, 441B and the detection springs 46A, 46B. The directional interval G1 is smaller than the Y-axis directional interval G2 between the second support portion 522 and the fixed detection electrodes 442A, 442B, 443A, and 443B. In addition, the length L1 of the first support portion 521 in the X-axis direction and the length L2 of the movable detection electrode finger 51 in the X-axis direction are equal, and the first support portion 521 and the fixed detection electrodes 442A, 442B, 443A, and 443B are equal to each other. is substantially equal to the Y-axis distance G3 between the fixed detection electrode finger 53 and the movable detection electrode finger 51 . Therefore, the first support portion 521 and the fixed detection electrodes 442A, 442B, 443A, 443B correspond to a pair of the fixed detection electrode finger 53 and the movable detection electrode finger 51. As shown in FIG. Therefore, the first supporting portion 521 can be regarded as the movable detection electrode fingers 51, and the movable detection electrode fingers 51 can be increased without changing the dimensions of the detection portions 44A and 44B in the Y-axis direction. That is, it is possible to increase the capacitance between the movable detection electrodes 441A, 441B and the fixed detection electrodes 442A, 442B, 443A, 443B, thereby improving the detection sensitivity. Therefore, it is possible to obtain the physical quantity sensor 1 that reduces the decrease in detection sensitivity even when miniaturization is attempted.

[Second embodiment]
Next, a physical quantity sensor 1a according to a second embodiment of the invention will be described with reference to FIG. FIG. 8 is a plan view showing part of a detection unit of a physical quantity sensor according to the second embodiment of the invention. In addition, FIG. 8 corresponds to the B part of FIG.

The physical quantity sensor 1a according to the present embodiment is the same as the physical quantity sensor 1 according to the first embodiment described above, except mainly for the configuration of the first connecting portions 52a of the detection portions 44A and 44B.

In the following description, regarding the physical quantity sensor 1a of the second embodiment, differences from the above-described embodiment will be mainly described, and descriptions of similar items will be omitted. Moreover, in FIG. 8, the same code|symbol is attached|subjected about the structure similar to embodiment mentioned above.

Among the detection units 44A and 44B of the physical quantity sensor 1a according to the second embodiment, the detection unit 44B will be described as an example. As shown in FIG. 8, the detection portion 44B has a first connecting portion 52a that connects the first stem 50 and the detection spring 46B. The length L3 in the X-axis direction of the first connecting portion 52a is substantially equal to the length L4 in the X-axis direction of the movable detection electrode finger 51, and the distance G4 in the Y-axis direction between the first connecting portion 52a and the fixed detection electrode 443B is equal to the length L4 in the X-axis direction. is substantially equal to the distance G5 between the fixed detection electrode finger 53 and the movable detection electrode finger 51 in the Y-axis direction. Therefore, the capacitance between the first connecting portion 52a and the fixed detection electrode 443B can be substantially equal to the capacitance between the fixed detection electrode finger 53 and the movable detection electrode finger 51. FIG. Therefore, since the first connecting portion 52a can be regarded as the movable detection electrode finger 51 facing the fixed detection electrode finger 53, the capacitance between the movable detection electrode 441B and the fixed detection electrode 443B can be increased. , the detection sensitivity can be increased. Therefore, it is possible to obtain the physical quantity sensor 1a in which the decrease in detection sensitivity is reduced even when the size is reduced.

In this embodiment, as in the first embodiment, referring to FIG. 3, at both ends in the Y-axis direction of the detection unit 44B, the ends in the −Y-axis direction and the ends in the −X-axis direction was described as an example, the −Y-axis direction end of the detection unit 44B and the +X-axis direction end, the +Y-axis direction end of the detection unit 44B and both ends in the X-axis direction, and the detection unit 44A Both ends in the Y-axis direction of , and both ends in the X-axis direction have the same configuration.

The physical quantity sensor 1a of the second embodiment has been described above. Such a second embodiment can also exhibit the same effect as the first embodiment described above.

[Third Embodiment]
Next, a physical quantity sensor 1b according to a third embodiment of the invention will be described with reference to FIGS. 9 and 10. FIG. FIG. 9 is a plan view showing an element part of a physical quantity sensor according to a third embodiment of the invention. 10 is an enlarged plan view of a portion C in FIG. 9. FIG.

The physical quantity sensor 1b according to this embodiment is the same as the physical quantity sensor 1 according to the first embodiment described above, except that the configurations of the drive units 41A and 41B are mainly different.

In the following description, regarding the physical quantity sensor 1b of the third embodiment, differences from the above-described embodiments will be mainly described, and descriptions of the same items will be omitted. Further, in FIGS. 9 and 10, the same reference numerals are given to the same configurations as in the above-described embodiment.

Among the driving units 41A and 41B of the physical quantity sensor 1b according to the third embodiment, the driving unit 41B will be described as an example. As shown in FIGS. 9 and 10, the drive section 41B includes a movable drive electrode 411B having a plurality of movable drive electrode fingers 61 arranged in a comb shape, and a plurality of fixed drive electrodes arranged in a comb shape. It has movable drive electrode fingers 61 of movable drive electrode 411B having fingers 63 and fixed drive electrodes 412B staggered with a gap.

The fixed drive electrode 412B has a plurality of fixed drive electrode fingers 63 extending along the second direction (X-axis direction) that intersects the first direction (Y-axis direction). there is In addition, the movable detection electrode 441B includes the second trunk 60 extending along the Y-axis direction and the second trunk 60 extending along the X-axis direction. 63 and a plurality of movable drive electrode fingers 61 spaced apart in the Y-axis direction;

Further, the second connecting portion 62 has a third supporting portion 621 connected to the second trunk 60 and a fourth supporting portion 622 connected to the drive spring 43B. A distance G6 in the Y-axis direction from the electrode 412B is smaller than a distance G7 in the Y-axis direction between the fourth support portion 622 and the fixed drive electrode 412B. That is, the third support portion 621 is arranged closer to the fixed drive electrode 412B side than the fourth support portion 622 is.

Also, the length L5 of the third support portion 621 in the X-axis direction is substantially equal to the length L6 of the movable drive electrode finger 61 in the X-axis direction. Therefore, the facing area between the side surface of the third support portion 621 and the side surface of the fixed drive electrode finger 63 can be substantially equal to the facing area between the side surface of the movable drive electrode finger 61 and the side surface of the fixed drive electrode finger 63 .

The Y-axis distance G6 between the third support portion 621 and the fixed drive electrode 412B is substantially equal to the Y-axis distance G8 between the fixed drive electrode finger 63 and the movable drive electrode finger 61 . In other words, since the opposing areas are also substantially equal, the capacitance between the third support portion 621 and the fixed drive electrode 412B and the capacitance between the fixed drive electrode finger 63 and the movable drive electrode finger 61 can be substantially equalized. can.

Therefore, the length L5 of the third support portion 621 in the X-axis direction and the length L6 of the movable drive electrode finger 61 in the X-axis direction are substantially equal, and the length of the Y-axis direction between the third support portion 621 and the fixed drive electrode 412B is approximately the same. Since the interval G6 and the interval G8 in the Y-axis direction between the fixed drive electrode fingers 63 and the movable drive electrode fingers 61 are substantially equal, the third support portion 621 and the fixed drive electrode 412B are arranged in a pair of fixed drive electrode fingers 63 and the movable drive electrodes 412B. It corresponds to the electrode finger 61 . Therefore, the third supporting portion 621 can be regarded as the movable drive electrode fingers 61, and the movable drive electrode fingers 61 can be increased without changing the dimension of the drive portion 41B in the Y-axis direction. That is, it is possible to increase the capacitance between the movable drive electrode 411B and the fixed drive electrode 412B.

By increasing the electrostatic capacity of the drive section 41B, the movable drive electrode 411B and the movable body 4B of the detection section 44B can be largely oscillated and displaced in the X-axis direction. As a result, the detection unit 44B can be largely displaced in the Y-axis direction, which is the detection axis direction, so that the detection sensitivity can be improved. Therefore, a physical quantity sensor 1b having high detection sensitivity can be obtained. In addition, even if miniaturization is attempted, the physical quantity sensor 1b can be obtained in which the decrease in detection sensitivity is further reduced.

In the present embodiment, as shown in FIG. 9, the ends in the -Y-axis direction at both ends of the driving portion 41B in the Y-axis direction have been described as an example. Both ends of the driving portion 41A in the Y-axis direction have the same configuration.

According to such a third embodiment, the same effects as those of the above-described first embodiment are exhibited, and static electricity between the movable drive electrodes 411A and 411B and the fixed drive electrodes 412A and 412B in the drive sections 41A and 41B is reduced. The capacitance can be increased, and the vibration displacement of the detectors 44A and 44B can be increased. Therefore, it is possible to obtain the physical quantity sensor 1b in which the decrease in detection sensitivity is further reduced even if it is miniaturized.

<Inertial measurement device>
Next, an inertial measurement unit (IMU: Inertial Measurement Unit) 2000 to which the physical quantity sensor 1 according to one embodiment of the invention is applied will be described with reference to FIGS. 11 and 12. FIG. FIG. 11 is an exploded perspective view showing a schematic configuration of the inertial measurement device. FIG. 12 is a perspective view showing an arrangement example of inertial sensor elements of the inertial measurement device.

An inertial measurement unit 2000 (IMU: Inertial Measurement Unit) shown in FIG. 11 is a device that detects the posture and behavior (inertial momentum) of a moving body (wearable device) such as an automobile or a robot. The inertial measurement device 2000 functions as a so-called 6-axis motion sensor including a 3-axis acceleration sensor and a 3-axis angular velocity sensor.

The inertial measurement device 2000 is a cuboid with a substantially square planar shape. In addition, screw holes 2110 are formed as fixing portions in the vicinity of two vertices located in the diagonal direction of the square. By passing two screws through the two screw holes 2110, the inertial measurement device 2000 can be fixed to a mounting surface of a mounting body such as an automobile. It should be noted that it is also possible to reduce the size to a size that can be mounted on a smartphone or a digital camera, for example, by selecting parts or changing the design.

The inertial measurement device 2000 includes an outer case 2100, a joint member 2200, and a sensor module 2300. The sensor module 2300 is inserted into the outer case 2100 with the joint member 2200 interposed therebetween. there is Also, the sensor module 2300 has an inner case 2310 and a substrate 2320 .

The external shape of the outer case 2100 is a rectangular parallelepiped with a substantially square planar shape, similar to the overall shape of the inertial measurement device 2000, and screw holes 2110 are formed in the vicinity of two vertices located in the diagonal direction of the square. there is In addition, the outer case 2100 is box-shaped, and the sensor module 2300 is accommodated therein.

The inner case 2310 is a member that supports the substrate 2320 and has a shape that fits inside the outer case 2100 . Further, the inner case 2310 is formed with a concave portion 2311 for preventing contact with the substrate 2320 and an opening 2312 for exposing a connector 2330 to be described later. Such an inner case 2310 is joined to the outer case 2100 via a joining member 2200 (for example, packing impregnated with an adhesive). A substrate 2320 is bonded to the lower surface of the inner case 2310 with an adhesive.

As shown in FIG. 12, a connector 2330, an angular velocity sensor 2340z for detecting angular velocity around the Z-axis, an acceleration sensor 2350 for detecting acceleration in each of the X-, Y-, and Z-axis directions are mounted on the upper surface of the substrate 2320. is implemented. Further, on the side surface of the substrate 2320, an angular velocity sensor 2340x for detecting angular velocity around the X axis and an angular velocity sensor 2340y for detecting angular velocity around the Y axis are mounted. Note that the angular velocity sensors 2340z, 2340x, and 2340y are not particularly limited, and for example, a vibration gyro sensor using the Coriolis force, such as the physical quantity sensor 1 described above, can be used. Moreover, the acceleration sensor 2350 is not particularly limited, and for example, a capacitive acceleration sensor can be used.

A control IC 2360 as a control circuit is mounted on the bottom surface of the substrate 2320 . The control IC 2360 is an MCU (Micro Controller Unit), incorporates a storage section including a nonvolatile memory, an A/D converter, and the like, and controls each section of the inertial measurement device 2000 . The storage unit stores a program that defines the order and contents for detecting acceleration and angular velocity, a program that digitizes detected data and incorporates it into packet data, and accompanying data. A plurality of other electronic components are also mounted on the substrate 2320 .

The inertial measurement device 2000 has been described above. Such an inertial measurement device 2000 includes angular velocity sensors 2340z, 2340x, 2340y and an acceleration sensor 2350 as physical quantity sensors 1, a control IC 2360 (control circuit) for controlling driving of these sensors 2340z, 2340x, 2340y, 2350, contains. As a result, the effects of the physical quantity sensor 1 described above can be enjoyed, and the inertial measurement device 2000 with high reliability is obtained.

<Mobile positioning device>
Next, a mobile positioning device 3000 to which the physical quantity sensor 1 according to one embodiment of the present invention is applied will be described with reference to FIGS. 13 and 14. FIG. FIG. 13 is a block diagram showing the overall system of the mobile positioning device. FIG. 14 is a diagram schematically showing the action of the mobile positioning device.

A mobile object positioning device 3000 shown in FIG. 13 is a device that is attached to a mobile object and used to perform positioning of the mobile object. The mobile body is not particularly limited, and may be any of bicycles, automobiles (including four-wheeled vehicles and motorcycles), trains, airplanes, ships, etc. In this embodiment, a four-wheeled vehicle will be described. The mobile positioning device 3000 includes an inertial measurement unit 3100 (IMU), an arithmetic processing unit 3200, a GPS receiving unit 3300, a receiving antenna 3400, a position information acquisition unit 3500, a position synthesizing unit 3600, and a processing unit 3700. , a communication unit 3800 and a display unit 3900 . As the inertial measurement device 3100, for example, the inertial measurement device 2000 described above can be used.

The inertial measurement device 3100 also has a triaxial acceleration sensor 3110 and a triaxial angular velocity sensor 3120 . An arithmetic processing unit 3200 as an arithmetic unit receives acceleration data from the acceleration sensor 3110 and angular velocity data from the angular velocity sensor 3120, performs inertial navigation arithmetic processing on these data, and produces inertial navigation positioning data (acceleration and data including posture).

A GPS receiving section 3300 as a receiving section receives signals from GPS satellites (GPS carrier waves, satellite signals superimposed with position information) via a receiving antenna 3400 . In addition, the position information acquisition unit 3500 as an acquisition unit, based on the signal received by the GPS reception unit 3300, the position (latitude, longitude, altitude), speed, and direction of the mobile positioning device 3000 (mobile body) GPS Output positioning data. This GPS positioning data also includes status data indicating the reception state, reception time, and the like.

A position synthesizing unit 3600 serving as a calculating unit calculates the position of the moving body, the specific , the position on the ground where the moving object is running is calculated. For example, even if the position of the mobile object included in the GPS positioning data is the same, as shown in FIG. The moving body is running. Therefore, the accurate position of the moving object cannot be calculated only with GPS positioning data. Therefore, the position synthesizing unit 3600 uses inertial navigation positioning data (in particular, data regarding the attitude of the moving body) to calculate where on the ground the moving body is running. The determination can be made relatively easily by calculation using a trigonometric function (inclination θ with respect to the vertical direction).

The position data output from the position synthesizing section 3600 is subjected to predetermined processing by the processing section 3700 and displayed on the display section 3900 as the positioning result. Also, the position data may be transmitted to the external device by the communication unit 3800 .

The mobile positioning device 3000 has been described above. As described above, the mobile positioning device 3000 includes an inertial measurement device 3100, a GPS receiving section 3300 (receiving section) for receiving satellite signals on which position information is superimposed from positioning satellites, and the received satellite signals. Based on the position information acquisition unit 3500 (acquisition unit) that acquires the position information of the GPS reception unit 3300, and the inertial navigation positioning data (inertial data) output from the inertial measurement device 3100, the attitude of the moving object is determined. It includes an arithmetic processing unit 3200 (calculation unit) that performs calculations, and a position synthesizing unit 3600 (calculation unit) that calculates the position of the moving object by correcting the position information based on the calculated orientation. As a result, the effect of the physical quantity sensor 1 (inertial measurement device 2000) described above can be enjoyed, and a highly reliable mobile object positioning device 3000 can be obtained.

<Portable electronic devices>
Next, a portable electronic device to which the physical quantity sensor 1 according to one embodiment of the invention is applied will be described with reference to FIGS. 15 and 16. FIG. FIG. 15 is a plan view schematically showing the configuration of the portable electronic device. FIG. 16 is a functional block diagram showing a schematic configuration of a portable electronic device;
A wristwatch type activity meter (active tracker) will be described below as an example of a portable electronic device.

As shown in FIG. 15, the wrist device 1000, which is a wristwatch-type activity meter (active tracker), is attached to a site (subject) such as a user's wrist by means of bands 1032, 1037, etc., and a digital display 150 is displayed. It is equipped and capable of wireless communication. The physical quantity sensor 1 according to the present invention described above is incorporated in the wrist device 1000 as a sensor that measures angular velocity.

The wrist device 1000 includes a case 1030 that houses at least the physical quantity sensor 1, a processing unit 100 (see FIG. 16) that is housed in the case 1030 and processes output data from the physical quantity sensor 1, and a housing that is housed in the case 1030. and a translucent cover 1071 closing the opening of the case 1030 . A bezel 1078 is provided outside the case 1030 of the translucent cover 1071 of the case 1030 . A plurality of operation buttons 1080 and 1081 are provided on the side surface of case 1030 . A more detailed description will be given below with reference to FIG. 16 as well.

The acceleration sensor 113 detects acceleration in each of three axial directions that intersect (ideally orthogonal) and outputs a signal (acceleration signal) corresponding to the magnitude and direction of the detected three-axis acceleration. Further, the angular velocity sensor 114 as the physical quantity sensor 1 detects angular velocities in each of the three axial directions that intersect (ideally orthogonal) each other, and signals (angular velocity signal).

The liquid crystal display (LCD) that constitutes the display unit 150 uses, for example, the position information using the GPS sensor 110 or the geomagnetic sensor 111, the amount of movement, and the angular velocity sensor 114 included in the physical quantity sensor 1 according to various detection modes. Exercise information such as the amount of exercise exercised, biological information such as the pulse rate using the pulse sensor 115 or the like, or time information such as the current time are displayed. It should be noted that the environmental temperature using the temperature sensor 116 can also be displayed.

The communication unit 170 performs various controls for establishing communication between a user terminal and an information terminal (not shown). The communication unit 170 is, for example, Bluetooth (registered trademark) (including BTLE: Bluetooth Low Energy), Wi-Fi (registered trademark) (Wireless Fidelity), Zigbee (registered trademark), NFC (Near field communication), ANT+ (registered (trademark), etc., and the communication unit 170 includes a connector compatible with a communication bus standard such as USB (Universal Serial Bus).

The processing unit 100 (processor) is configured by, for example, an MPU (Micro Processing Unit), a DSP (Digital Signal Processor), an ASIC (Application Specific Integrated Circuit), and the like. The processing unit 100 executes various processes based on the programs stored in the storage unit 140 and signals input from the operation unit 120 (for example, operation buttons 1080 and 1081). Processing by the processing unit 100 includes data processing for each output signal of the GPS sensor 110, the geomagnetic sensor 111, the pressure sensor 112, the acceleration sensor 113, the angular velocity sensor 114, the pulse sensor 115, the temperature sensor 116, and the clock unit . display processing for displaying an image on the display, sound output processing for outputting sound to the sound output unit 160, communication processing for communicating with the information terminal via the communication unit 170, power control processing for supplying power from the battery 180 to each unit, etc. is included.

Such a wrist device 1000 can have at least the following functions.
1. Distance: Measure the total distance from the start of measurement using the highly accurate GPS function.
2. Pace: Displays the current running pace from the pace distance measurement.
3. Average speed: Calculates and displays the average speed from the start of running to the present.
4. Altitude: The altitude is measured and displayed using the GPS function.
5. Stride: Measures and displays stride length even in tunnels where GPS radio waves do not reach.
6. Pitch: Measures and displays the number of steps per minute.
7. Heart rate: Heart rate is measured and displayed by the pulse sensor.
8. Gradient: Measure and display the gradient of the ground during training and trail running in mountainous areas.
9. Auto lap: Automatically measures laps when running a certain distance or time set in advance.
10. Calorie consumption during exercise: Displays the calorie consumption.
11. Steps: Displays the total number of steps since the start of exercise.

The wrist device 1000 can be widely applied to a running watch, a runner's watch, a multi-sport runner's watch such as duathlon or triathlon, an outdoor watch, and a satellite positioning system such as a GPS watch equipped with GPS.

Also, in the above description, GPS (Global Positioning System) is used as the satellite positioning system, but other global navigation satellite systems (GNSS) may be used. For example, one or more satellite positioning systems such as EGNOS (European Geostationary satellite Navigation Overlay Service), QZSS (Quasi Zenith Satellite System), GLONASS (GLOBal NAvigation Satellite System), GALILEO, BeiDou (BeiDou Navigation Satellite System), etc. may be used. In addition, at least one of the satellite positioning systems may use a geostationary satellite type satellite navigation augmentation system (SBAS: Satellite Based Augmentation System) such as WAAS (Wide Area Augmentation System), EGNOS (European Geostationary satellite Navigation Overlay Service). .

Since such a portable electronic device includes the physical quantity sensor 1 and the processing section 100, it has excellent reliability.

<Electronic equipment>
Next, an electronic device to which the physical quantity sensor 1 according to one embodiment of the invention is applied will be described with reference to FIGS. 17 to 19. FIG.

First, referring to FIG. 17, a mobile personal computer 1100, which is an example of electronic equipment, will be described. FIG. 17 is a perspective view schematically showing the configuration of a mobile personal computer, which is an example of electronic equipment.

In this figure, a personal computer 1100 includes a main body 1104 having a keyboard 1102 and a display unit 1106 having a display 1108. The display unit 1106 rotates with respect to the main body 1104 via a hinge structure. movably supported. Such a personal computer 1100 incorporates a physical quantity sensor 1 functioning as an angular velocity sensor, and based on the detection data of the physical quantity sensor 1, a control unit 1110 can perform control such as attitude control.

FIG. 18 is a perspective view schematically showing the configuration of a smart phone (mobile phone), which is an example of electronic equipment.

In this figure, a smart phone 1200 incorporates the physical quantity sensor 1 described above. Detection data (angular velocity data) detected by the physical quantity sensor 1 is transmitted to the control unit 1201 of the smartphone 1200 . The control unit 1201 includes a CPU (Central Processing Unit), recognizes the posture and behavior of the smartphone 1200 from the received detection data, and changes the display image displayed on the display unit 1208. , You can play warning sounds and sound effects, and drive the vibration motor to vibrate the main body. In other words, motion sensing of the smart phone 1200 is performed, and based on the measured posture and behavior, it is possible to change display content, generate sound, vibration, and the like. In particular, when executing a game application, it is possible to enjoy a sense of presence close to reality.

FIG. 19 is a perspective view showing the configuration of a digital still camera, which is an example of electronic equipment. In addition, this figure also briefly shows connections with external devices.

A display unit 1310 is provided on the back of a case (body) 1302 of the digital still camera 1300, and is configured to perform display based on imaging signals from the CCD. The display unit 1310 displays an object as an electronic image. Also works as a finder. A light receiving unit 1304 including an optical lens (imaging optical system) and a CCD is provided on the front side (rear side in the figure) of the case 1302 .

When the photographer confirms the subject image displayed on the display unit 1310 and presses the shutter button 1306 , the CCD imaging signal at that time is transferred and stored in the memory 1308 . In this digital still camera 1300, a video signal output terminal 1312 and an input/output terminal 1314 for data communication are provided on the side surface of the case 1302. As shown in FIG. As shown in the figure, a television monitor 1430 is connected to the video signal output terminal 1312, and a personal computer 1440 is connected to the input/output terminal 1314 for data communication as required. Furthermore, the imaging signal stored in the memory 1308 is output to the television monitor 1430 or the personal computer 1440 by a predetermined operation. Such a digital still camera 1300 has a built-in physical quantity sensor 1 functioning as an angular velocity sensor, and based on the detection data of the physical quantity sensor 1, a control unit 1316 can perform control such as camera shake correction.

Since such an electronic device includes the physical quantity sensor 1 and the controllers 1110, 1201, and 1316, it has excellent reliability.

In addition to the personal computer 1100 shown in FIG. 17, the smartphone (mobile phone) 1200 shown in FIG. 18, and the digital still camera 1300 shown in FIG. Dispensing devices (e.g. inkjet printers), laptop personal computers, televisions, video cameras, video tape recorders, car navigation devices, pagers, electronic notebooks (including those with communication functions), electronic dictionaries, calculators, electronic game machines, word processors, Workstations, videophones, security TV monitors, electronic binoculars, POS terminals, medical equipment (e.g. electronic thermometers, sphygmomanometers, blood glucose meters, electrocardiogram measuring devices, ultrasonic diagnostic devices, electronic endoscopes), fish finders, etc. Measuring instruments, instruments (e.g. vehicles, aircraft, and ship instruments), flight simulators, seismometers, pedometers, inclinometers, vibration meters that measure hard disk vibrations, attitude control devices for flying objects such as robots and drones, It can be applied to control devices and the like used for inertial navigation for automatic driving of automobiles.

<Moving body>
Next, a moving object to which the physical quantity sensor 1 according to one embodiment of the invention is applied will be described with reference to FIG. FIG. 20 is a perspective view showing the configuration of an automobile, which is an example of a mobile object.

As shown in FIG. 20, an automobile 1500 as a moving body has a built-in physical quantity sensor 1. For example, the physical quantity sensor 1 can detect the posture of a vehicle body 1501. As shown in FIG. A detection signal from the physical quantity sensor 1 is supplied to a vehicle body posture control device 1502 as a posture control unit that controls the posture of the vehicle body. It is possible to control the hardness of the suspension or control the braking of individual wheels 1503 according to the conditions. In addition, the physical quantity sensor 1 is also used for keyless entry, immobilizer, car navigation system, car air conditioner, anti-lock braking system (ABS), air bag, tire pressure monitoring system (TPMS: Indium Tire Pressure Monitoring System), It can be widely applied to electronic control units (ECUs) such as engine controls and battery monitors for hybrid and electric vehicles.

In addition to the above examples, the physical quantity sensor 1 applied to a moving body can be used for posture control of bipedal robots, trains, etc., remote-controlled or autonomous systems such as radio-controlled airplanes, radio-controlled helicopters, and drones. Use for attitude control of flying objects, attitude control of agricultural machinery (agricultural machinery) or construction machinery (construction machinery), control of rockets, artificial satellites, ships, AGVs (automated guided vehicles), bipedal walking robots, etc. can be done. As described above, the physical quantity sensor 1 and respective controllers (not shown) are incorporated in order to realize attitude control of various mobile bodies.

Such a moving object has excellent reliability because it includes the physical quantity sensor 1 and a control section (for example, the vehicle body posture control device 1502 as a posture control section).

As described above, the physical quantity sensors 1, 1a, 1b, the inertial measurement device 2000, the mobile positioning device 3000, the portable electronic device (1000), the electronic devices (1100, 1200, 1300), and the mobile body (1500) are However, the present invention is not limited to this, and the configuration of each part can be replaced with any configuration having similar functions. Also, other optional components may be added to the present invention.

In the above-described embodiment, the X-axis, Y-axis, and Z-axis are orthogonal to each other, but they are not limited to this as long as they intersect each other. , the Y axis may be slightly inclined with respect to the normal direction of the XZ plane, and the Z axis may be slightly inclined with respect to the normal direction of the XY plane. Note that "slightly" means a range in which the physical quantity sensors 1, 1a, and 1b can exhibit their effects, and the specific tilt angle (numerical value) varies depending on the configuration and the like.

1, 1a, 1b... physical quantity sensor, 2... substrate, 21... concave portion, 22, 221, 222, 223, 224, 225... mount, 23, 24, 25, 26, 27, 28... groove portion, 3... lid body, DESCRIPTION OF SYMBOLS 31... Recessed part, 32... Communication hole, 33... Sealing member, 39... Glass frit, 4... Element part, 4A, 4B... Movable body, 41A, 41B... Drive part, 411A, 411B... Movable drive electrode, 412A, 412B ... fixed drive electrodes 42A, 42B ... first fixed portion 421A, 421B ... second fixed portion 43A, 43B ... drive springs as second spring portions 44A, 44B ... detectors 441A, 441B ... movable detection electrodes , 442A, 442B, 443A, 443B... fixed detection electrodes, 451, 452... first fixed parts, 46A, 46B... detection springs as first spring parts, 47A, 47B... reverse phase springs, 471A, 471B,... spring bodies , 472A, 473A... arms, 474A, 475A... connection parts, 477A, 477B, 478A, 478B... beams, 48... frames, 481, 482... missing parts, 488, 489... frame springs, 49A, 49B... monitor parts, 491A , 491B... Movable monitor electrode 492A, 492B, 493A, 493B... Fixed monitor electrode 50... First trunk 51... Movable detection electrode finger 52, 52a... First connection part 521... First support part 522... Second support 53 Fixed detection electrode finger 60 Second trunk 61 Movable drive electrode finger 62 Second connection 621 Third support 622 Fourth support 63 Fixed drive Electrode fingers 73, 74, 75, 76, 77, 78 Wiring 1000 Wrist device as a portable electronic device 1100 Personal computer 1200 Smartphone (mobile phone) 1300 Digital still camera 1500 Movement Automobile as a body 2000 Inertial measurement device 3000 Mobile positioning device G1, G2, G3, G4, G5, G6, G7, G8 Interval L1, L2, L3, L4, L5, L6 Length .

Claims (12)

When the three mutually orthogonal axes are the X-axis, the Y-axis and the Z-axis,
a substrate including a first surface and a second surface that are perpendicular to the Z-axis and have a front-back relationship with each other;
an element portion supported on the first surface of the substrate;
including
The element unit includes a detection unit that detects angular velocity based on changes in capacitance and includes a plurality of electrode fingers,
The detection unit is
fixed sensing electrodes fixed to the substrate;
a movable detection electrode that can be displaced in the Y-axis direction;
a first fixing portion fixed to the substrate;
a first spring portion connecting the first fixed portion and the movable detection electrode;
including
The fixed detection electrodes are
including a plurality of fixed sensing electrode fingers along the X-axis;
The movable detection electrode is
a first trunk provided along the Y-axis;
a plurality of movable detection electrode fingers provided along the X-axis from the first trunk and spaced from the fixed detection electrode fingers in the Y-axis direction;
a first connecting portion connected to the first stem and provided along the X-axis ;
including
the width of the first connecting portion along the Y-axis is greater than the width of the movable detection electrode finger along the Y-axis;
the first stem is connected to the first spring portion via the first connecting portion;
The distance in the Y-axis direction between the fixed detection electrode fingers adjacent to the first connecting portion and the first connecting portion is
an interval in the Y-axis direction between the fixed detection electrode finger adjacent to the movable detection electrode finger on the plus side of the Y-axis and the movable detection electrode finger , and
The element unit includes a drive unit capable of driving the detection unit,
The drive unit
a fixed drive electrode fixed to the substrate;
a movable drive electrode displaceable in the X-axis direction;
a second fixing portion fixed to the substrate;
a second spring portion connecting the second fixed portion and the movable drive electrode;
A physical quantity sensor comprising : In claim 1,
The first connecting part is
a first support connected to the first stem;
a second support portion having one end connected to the first support portion and the other end connected to the first spring portion;
including
A physical quantity sensor, wherein the length of the first support portion along the X-axis is substantially equal to the length of the movable detection electrode finger along the X-axis. In claim 2,
A physical quantity sensor, wherein the width of the first supporting portion along the Y-axis is different from the width of the second supporting portion along the Y-axis. When the three mutually orthogonal axes are the X-axis, the Y-axis and the Z-axis,
a substrate including a first surface and a second surface that are perpendicular to the Z-axis and have a front-back relationship with each other;
an element portion supported on the first surface of the substrate;
including
The element unit includes a detection unit that detects angular velocity based on changes in capacitance and includes a plurality of electrode fingers,
The detection unit is
fixed sensing electrodes fixed to the substrate;
a movable detection electrode that can be displaced in the Y-axis direction;
a first fixing portion fixed to the substrate;
a first spring portion connecting the first fixed portion and the movable detection electrode;
including
The fixed detection electrodes are
including a plurality of fixed sensing electrode fingers along the X-axis;
The movable detection electrode is
a first trunk provided along the Y-axis;
a plurality of movable detection electrode fingers provided along the X-axis from the first trunk and spaced from the fixed detection electrode fingers in the Y-axis direction;
a first connecting portion connected to the first stem and provided along the X-axis ;
including
the width of the first connecting portion along the Y-axis is greater than the width of the movable detection electrode finger along the Y-axis;
the first stem is connected to the first spring portion via the first connecting portion;
the length of the first connecting portion along the X-axis is substantially equal to the length of the movable detection electrode finger along the X-axis;
The distance in the Y-axis direction between the fixed detection electrode finger adjacent to the first connection portion and the first connection portion is such that the movable detection electrode finger and the fixed detection electrode adjacent to the positive side of the Y-axis are substantially equal to the distance in the Y-axis direction between the finger and the movable detection electrode finger,
The element unit includes a drive unit capable of driving the detection unit,
The drive unit
a fixed drive electrode fixed to the substrate;
a movable drive electrode displaceable in the X-axis direction;
a second fixing portion fixed to the substrate;
a second spring portion connecting the second fixed portion and the movable drive electrode;
A physical quantity sensor comprising : In any one of claims 1 to 4,
The fixed drive electrode is
including a plurality of fixed drive electrode fingers along the X-axis;
The movable drive electrode is
a second trunk provided along the Y-axis;
a plurality of movable drive electrode fingers provided along the X-axis from the second trunk and spaced apart from the fixed drive electrode fingers in the Y-axis direction;
a second connecting portion connected to the second stem;
including
The second connecting part is
a third support connected to the second stem;
a fourth support connected to the second spring;
including
The distance in the Y-axis direction between the fixed drive electrode finger adjacent to the third support part and the third support part is the distance in the Y-axis direction between the fourth support part and the fixed drive electrode finger. A physical quantity sensor characterized by being smaller. In claim 5,
A physical quantity sensor, wherein the length of the third supporting portion along the X-axis is substantially equal to the length of the movable drive electrode finger along the X-axis. In claim 5 or 6,
The distance in the Y-axis direction between the fixed drive electrode finger adjacent to the third support portion and the third support portion is such that the fixed drive electrode finger adjacent to the movable drive electrode finger and the fixed drive electrode adjacent to the positive side of the Y-axis is A physical quantity sensor, wherein the distance between the finger and the movable drive electrode finger in the Y-axis direction is substantially equal. A physical quantity sensor according to any one of claims 1 to 7;
a control circuit for controlling driving of the physical quantity sensor;
An inertial measurement device comprising: an inertial measurement device according to claim 8;
a receiving unit that receives a satellite signal on which position information is superimposed from a positioning satellite;
an acquisition unit that acquires position information of the reception unit based on the received satellite signal;
a computing unit that computes the attitude of the moving body based on the inertia data output from the inertial measurement device;
a calculation unit that calculates the position of the moving body by correcting the position information based on the calculated posture;
A mobile positioning device comprising: A physical quantity sensor according to any one of claims 1 to 7;
a case housing the physical quantity sensor;
a processing unit housed in the case and processing output data from the physical quantity sensor;
a display unit accommodated in the case;
a translucent cover closing the opening of the case;
A portable electronic device comprising: A physical quantity sensor according to any one of claims 1 to 7;
a control unit that performs control based on a detection signal output from the physical quantity sensor;
An electronic device comprising: A physical quantity sensor according to any one of claims 1 to 7;
an attitude control unit that controls an attitude based on a detection signal output from the physical quantity sensor;
A mobile object comprising:

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