JP7166599B2 - Diaphragm valves and flow controllers - Google Patents

Description

The present invention relates to a diaphragm valve, a flow control device, a fluid control device, a fluid control method, a semiconductor manufacturing apparatus, and a semiconductor manufacturing method.

Patent Document 1 measures the flow rate of a gas with a pressure sensor and an orifice, and feedback-controls a diaphragm valve driven by a laminated piezoelectric actuator based on the measured flow rate value to flow the gas at the indicated flow rate. Disclosed is a pressure-type flow controller that is capable of and miniaturized.

International publication number WO2017/033423A1

In order to increase the flow rate while reducing the size of the flow control device as described above, it is necessary to increase the opening degree of the diaphragm valve driven by the laminated piezoelectric actuator.
However, the stroke amount of the laminated piezoelectric actuator is not sufficient, and the laminated piezoelectric actuator needs to be enlarged in order to extend the stroke amount, making it difficult to meet the demand for miniaturization.

SUMMARY OF THE INVENTION One of the objects of the present invention is to provide a diaphragm valve using a multi-layered piezoelectric actuator capable of achieving a large flow rate while maintaining a small size.

A diaphragm valve of the present invention comprises: a piezoelectric actuator containing stacked piezoelectric elements that actuate a diaphragm;
a hydraulic chamber having a first opening and a second opening smaller in area than the first opening and filled with liquid; and displaceable or deformable to the first opening. a first isolation member provided in the second opening to separate the hydraulic pressure chamber from the outside and receive the extension of the piezoelectric actuator; and a hydraulic displacement magnifying mechanism comprising a second isolation member separating the .

Preferably, the first separating member and the second separating member are arranged to face each other with the hydraulic pressure chamber interposed therebetween.
More preferably, at least one of the first and second isolating members is a diaphragm.

Alternatively, the first isolating member may comprise a diaphragm and the second isolating member may comprise a bellows.

The diaphragm valve of the present invention is connected to the hydraulic displacement magnifying mechanism while holding the piezoelectric actuator so that the expansion of the piezoelectric actuator is directly input to the first isolation member of the hydraulic displacement magnifying mechanism. It has a holding mechanism.

Preferably, the holding mechanism has first and second pillars extending along the longitudinal direction of the piezoelectric actuator and fitted to the outer peripheral surface of the piezoelectric actuator,
The first and second pillars may be configured such that distal ends are connected to each other and base ends are connected to liquid chamber members that define the hydraulic pressure chambers of the hydraulic displacement magnifying mechanism. can.

The flow control device of the present invention has the diaphragm valve configured as described above.

A fluid control device of the present invention is a fluid control device in which a plurality of fluid devices are arranged from upstream to downstream,
The plurality of fluid devices include the diaphragm valves or flow control devices configured as described above.

The semiconductor manufacturing apparatus of the present invention uses the diaphragm valve or the flow rate control device described above for controlling the process gas in a semiconductor device manufacturing process that requires a processing step using a process gas in a sealed chamber.

According to the semiconductor manufacturing information of the present invention, the diaphragm valve or the flow rate control device having the configuration described above is used for controlling the process gas in a semiconductor device manufacturing process that requires a processing step using a process gas in a sealed chamber.

According to the present invention, it is possible to increase the opening of the diaphragm valve by amplifying the elongation of the laminated piezoelectric actuator while maintaining the miniaturization.

1 is an external perspective view of a piezoelectric actuator unit according to one embodiment of the present invention; FIG. FIG. 2 is a longitudinal sectional view of the piezoelectric actuator unit of FIG. 1; 1 is a perspective view of a hydraulic displacement magnifying mechanism according to one embodiment of the present invention; FIG. 3B is a cross-sectional view of the hydraulic displacement magnifying mechanism of FIG. 3A; FIG. FIG. 4 is a cross-sectional view for explaining the operation of the hydraulic displacement magnifying mechanism; 1 is an external perspective view of a flow control device according to an embodiment of the present invention; FIG. FIG. 6 is a longitudinal sectional view of the flow control device of FIG. 5; FIG. 4 is a cross-sectional perspective view showing the relationship between the operating member and the piezoelectric actuator unit; FIG. 4 is an enlarged cross-sectional view of a hydraulic displacement magnifying mechanism according to another embodiment of the present invention; Schematic diagram showing an application example of the diaphragm valve of the present invention to a semiconductor manufacturing process. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a perspective view showing an example of a flow control device and a fluid control device using a diaphragm according to an embodiment of the present invention;

Hereinafter, embodiments of the present disclosure will be described with reference to the drawings. In the description, the same reference numerals are given to the same elements, and overlapping descriptions are omitted as appropriate.
FIG. 1 is an external perspective view of a piezoelectric actuator unit 50 according to one embodiment of the present invention, and FIG. 2 is a longitudinal sectional view of the piezoelectric actuator unit 50 of FIG. Note that the piezoelectric actuator 2 is not shown in cross section in FIG.
A piezoelectric actuator unit 50 is used to actuate the diaphragm of a diaphragm valve, as described below.

The piezoelectric actuator unit 50 has a piezoelectric actuator 2, a displacement enlarging mechanism 100, and a holding member 120 as a holding mechanism.
The piezoelectric actuator 2 incorporates laminated piezoelectric elements (not shown) in a cylindrical case 2h. The case 2h is made of a metal such as a stainless alloy, and has a semispherical end surface 2b on the side of the distal end 2a and an end surface 2d on the side of the base end that are closed. By applying a voltage to the laminated piezoelectric element to extend the case 2h, the end surface 2b of the case 2h on the side of the tip 2a is elastically deformed, and the hemispherical tip 2a is displaced in the longitudinal direction. That is, the case 2h extends its full length from the tip portion 2a to the end surface 2d by applying a voltage to the laminated piezoelectric elements. In this embodiment, the tip portion 2a of the piezoelectric actuator 2 is hemispherical, but the shape is not limited to this, and the tip portion may be flat.

The holding member 120 is made of a metal material or the like and has a substantially cylindrical shape. , a connecting portion 122 connecting the distal end portions of the first and second column portions 121, 121, and a connecting portion 123 protruding outward from the base end portions of the first and second column portions 121, 121, respectively. and The surfaces of the first and second pillars 121, 121 facing the outer peripheral surface 2c of the piezoelectric actuator 2 are curved in an arc shape so as to fit into the outer peripheral surface 2c. The connecting portion 122 serves as a receiving surface 122b that receives the end surface 2d of the piezoelectric actuator 2 when the piezoelectric actuator 2 is extended. The holding member 120 is integrally formed and holds the piezoelectric actuator 2 with the structure described above. The reason why the cylindrical portion of the holding member 120 is divided into the first and second columnar portions 121, 121 is to prevent the dimension in the width direction from increasing when the holding member 120 is incorporated into a diaphragm valve, which will be described later.

As shown in FIGS. 3A and 3B, the displacement enlarging mechanism 100 includes a liquid chamber member 101, a large-diameter diaphragm 105, a small-diameter diaphragm 106, and a liquid L such as silicon oil filled in the liquid chamber member 101. have Note that the liquid L is not limited to silicone oil.
The liquid chamber member 101 is made of a metal alloy, and the contours of the upper surface 101 a and the lower surface 101 b are formed so as to substantially match the contours of the lower end surface of the holding member 120 . A cylindrical outer peripheral surface 101c of the liquid chamber member 101 is chamfered at two opposing portions to form parallel flat surfaces 101d in order to prevent the dimension in the width direction from increasing. Connecting portions 103, 103 projecting outward from two opposing locations on the outer peripheral surface 101c are formed with threaded holes 104 penetrating from the upper surface 101a to the lower surface 101b. The connecting portion 122 of the holding member 120 is fixed to the upper surface 101 a of the liquid chamber member 101 by screwing the bolt BT into the screw hole 104 .
The hydraulic chamber 102 is formed of a large-diameter hydraulic chamber 102a formed on the upper surface 101a side and a concentric small-diameter hydraulic chamber 102b communicating with the large-diameter hydraulic chamber 102a. The large-diameter hydraulic chamber 102a has an opening 102c that opens at the top surface 101a, and the small-diameter hydraulic chamber has an opening 102d that opens at the bottom surface 101b.
The opening 102c on the upper surface 101a side has a larger area than the opening 102d on the lower surface 101b side.
A flat plate-like large-diameter diaphragm 105 is fixed to the upper surface 101a so as to close the opening 102c.
A flat plate-like small-diameter diaphragm 106 is fixed to the lower surface 101b so as to close the opening 102d.
The large-diameter diaphragm 105 and the small-diameter diaphragm 106 are made of, for example, a metal plate such as a nickel alloy thin plate, a stainless steel thin plate, or a nickel-cobalt alloy thin plate, and are elastically deformable when subjected to an external force.
The large-diameter diaphragm 105 and the small-diameter diaphragm 106 are fixed to the upper surface 101a and the lower surface 101b of the liquid chamber member 101 by welding, for example.
The liquid L is filled into the hydraulic pressure chamber 102 through a supply port (not shown) formed in the liquid chamber member 101, and the supply port is sealed after filling. A closed space defined by the large-diameter diaphragm 105, the small-diameter diaphragm 106, and the hydraulic chamber 102 is filled with the liquid L.

The operation of the displacement magnifying mechanism 100 will be described with reference to FIG.
The large-diameter diaphragm 105 is in a flat state when no external force is applied, but as shown in FIG. do. As a result, pressure is applied to the liquid in the hydraulic chamber 102, and the small diameter diaphragm 106 is also elastically deformed to bulge downward from the lower surface 101b.
Assuming that the maximum displacement of the large-diameter diaphragm 105 from the upper surface 101a of the liquid chamber member 101 is d1 and the maximum displacement of the small-diameter diaphragm 106 from the lower surface 101b of the liquid chamber member 101 is d2, the maximum displacement d2 on the output side is the maximum displacement on the input side. larger than the maximum displacement d1. The pressure receiving area of the large diameter diaphragm 105 is determined by the area of the opening 102c, and the pressure receiving area of the small diameter diaphragm 106 is determined by the area of the opening 102d. Therefore, the displacement (elongation) of the piezoelectric actuator 2 input to the large-diameter diaphragm 105 is enlarged (amplified) according to the area ratio between the openings 102c and 102d.
In the displacement magnifying mechanism 100, the expansion of the piezoelectric actuator 2 is inputted to the large diameter diaphragm 105, expanded and amplified, and outputted from the small diameter diaphragm 106 as the deformation amount of the small diameter diaphragm 106. FIG.

5 and 6 show a pressure-type flow control device 1 in which a diaphragm valve is driven by the piezoelectric actuator unit 50 described above.
In FIG. 5, a cover that covers the entire flow control device 1 and a board for feedback control are actually present, but are not shown for convenience of explanation.
In addition to the piezoelectric actuator unit 50, the flow control device 1 includes a valve body 16, a downstream block 25, an operating member 8, a spring 9, a diaphragm 17, a diaphragm presser 19, a presser adapter 20, a pressure detector 22, an orifice 21, O It has a ring 14 , a pressure detector 26 , a positioning pin 11 , a support plate 3 , a bonnet 10 , a pair of displacement transmission members 5 , a connecting member 6 , an adjusting screw 7 and a locking nut 13 .

Flow passages 16a, 16b, and 16c are formed in the valve body 16. The flow passage 16a opens at the upper portion of the valve body 16, and a valve seat is formed around this opening with which the diaphragm 17 abuts and separates. . An annular presser adapter 20 is in contact with the outer peripheral edge of the diaphragm 17 , and is airtightly fixed to the valve body 16 by pressing the lower end of the bonnet 10 through the presser adapter 20 . When the diaphragm 17 is pressed by the diaphragm retainer 19 and comes into contact with the valve seat, communication between the flow paths 16a and 16b is cut off, and the diaphragm 17 is separated from the valve seat, thereby separating the flow paths 16a and 16b. communicates with. In this manner, a diaphragm valve is configured within the flow control device 1 .

The operation member 8 is made of a metal material such as a stainless alloy, and a synthetic resin diaphragm presser 19 for pressing the diaphragm 17 is attached to the tip of the operation member 8 . In the present embodiment, the diaphragm 17 is made of a metal thin plate such as special stainless steel or a nickel-cobalt alloy thin plate, and is formed into a spherical shell shape in which the upward convex arc shape is in a natural state by bulging the central portion upward. ing. The diaphragm 17 is made of, for example, metal such as stainless steel, NiCo-based alloy, or fluorine-based resin so as to be elastically deformable into a spherical shell.

A spring 9 is arranged between the operating member 8 and the support plate 3 and biases the operating member 8 toward the diaphragm 17 .
An orifice 21 (a gasket type orifice in this embodiment) is provided in the flow path 16b on the downstream side of the diaphragm 17 . An upstream pressure detector 22 for detecting pressure is provided in the flow path 16c on the upstream side of the orifice 21 .
The downstream block 25 is connected to the valve body 16 by bolts, has a downstream flow path 25a communicating with the flow path 16b on the downstream side of the valve body 16, and detects the pressure in the downstream flow path 25a. pressure detector 26 is provided.
A controller (not shown) controls the opening and closing of the diaphragm valve based on the values detected by the pressure detectors 22 and 26 .

The valve body 16 includes a flow path 16c connected to the pressure detector 22 on the upstream side, and a flow path 16b connecting the flow path 16c and the gasket-type orifice 21. As shown in FIG. In this embodiment, the channels 16b and 16c have a circular cross-sectional shape and an inner diameter of 0.5 mm to 1.0 mm. As a result, the internal volume of the flow path 16b between the diaphragm 17 of the piezoelectrically driven valve and the gasket-type orifice 21 can be reduced to about half or less compared to the conventional pressure type flow control device. can be improved.
The valve body 16 , pressure detectors 22 and 26 and downstream block 25 are designed to have substantially the same width as the piezoelectric actuator 2 .

Since the valve body 16, the pressure detectors 22 and 26, and the downstream block 25 of the flow control device 1 are formed to have substantially the same width as the piezoelectric actuator 2, the entire device can be made thinner.

The support plate 3 is made of a metal material such as stainless steel and has a width dimension that is the same as or about the same as the external dimensions of the piezoelectric actuator 2 . ing. Here, the equivalent size refers to a size within a range of about ±1 mm with respect to the width (diameter) size of the piezoelectric actuator 2 . In the following description, the equivalent dimension refers to a dimension within the above numerical range. In this embodiment, the maximum width dimension of the support plate 3 is slightly smaller than the width (diameter) dimension of the piezoelectric actuator 2 .
The small diameter diaphragm 106 of the displacement enlarging mechanism 100 of the piezoelectric actuator unit 50 is in contact with the upper surface of the support plate 3 .

The pair of displacement transmission members 5 is formed of a metal material such as Invar having a small coefficient of thermal expansion, has an arc-shaped inner peripheral surface along the outer peripheral surface of the piezoelectric actuator unit 50, and extends parallel to the arc-shaped inner peripheral surface. It is formed in a long plate shape having side surfaces. The pair of displacement transmission members 5 are formed by cutting the opposing portions of a metal cylindrical member having a size surrounding the piezoelectric actuator unit 50 in parallel and dividing the cylindrical member into two along the longitudinal direction. ing. As a result, the maximum width of the pair of displacement transmission members 5 is formed to be the same as or approximately the same as the width (diameter) of the piezoelectric actuator unit 50 . In this embodiment, the maximum width dimension of the pair of displacement transmission members 5 is slightly larger than the width (diameter) dimension of the piezoelectric actuator unit 50 .

Upper ends of the pair of displacement transmission members 5 are connected by a connecting member 6 . The connecting member 6 is fixed to each displacement transmitting member 5 by a set screw 12 . The maximum width dimension of the connecting member 6 is slightly larger than the width (diameter) dimension of the piezoelectric actuator 2 .

An adjusting screw 7 is screwed into the central portion of the connecting member 6 so as to be vertically movable, and the tip of the adjusting screw 7 is in contact with the recessed portion 122 a of the holding member 120 .
By adjusting the tightening degree of the adjustment screw 7, the relative height position of the pair of displacement transmission members 5 with respect to the holding member 120 can be adjusted. A locking nut 13 is screwed onto the adjusting screw 7 .

Here, the relationship between the piezoelectric actuator unit 50 and the operating member 8 that operates the diaphragm 17 will be described with reference to FIG.
As shown in FIG. 7, the operating member 8 includes arm portions 8a with which locking portions 5a formed at the lower end portions of the pair of displacement transmission members 5 are engaged. The operating member 8 is biased downward A2 by the spring 9 as described above. When the piezoelectric actuator 2 expands, the expansion of the piezoelectric actuator 2 is input to the large-diameter diaphragm 105 of the displacement enlarging mechanism 100, and as described with reference to FIG. be done. When the small-diameter diaphragm 106 expands from the lower surface 101b of the liquid chamber member 101, the lower surface 101b of the liquid chamber member 101 moves upward A1 from the upper surface 3a of the support plate 3, and the holding member 120 is pushed upward A1. , the pair of displacement transmission members 5 are also pushed up in the upward direction A1. As a result, the operating member 8 is also lifted upward A1 by the pair of displacement transmitting members 5 against the biasing force of the spring 9 .
The amount of movement of the operating member 8 in the upward direction A1 is magnified by the displacement magnifying mechanism 100 more than the extension of the piezoelectric actuator 2 alone. Since the lift amount in the upward direction A1 of the diaphragm retainer 19 at the tip of the operating member 8 is also greater than the extension of the piezoelectric actuator 2 alone, the lift amount of the diaphragm 17 not shown in FIG. It is expanded more than the elongation of only a single unit. By increasing the lift amount of the diaphragm 17, it becomes possible to increase the flow rate of the diaphragm valve.

According to this embodiment, the fluid pressure chamber 102 of the displacement enlarging mechanism 100 is formed by the plate-like fluid chamber member 101, and the large diameter diaphragm 105 and the small diameter diaphragm 105 made of thin plates are formed on the upper surface 101a and the lower surface 101b of the liquid chamber member 101. 106 is fixed. Therefore, the displacement magnifying mechanism 100 can be thinned. In addition, since the outer shape of the displacement magnifying mechanism 100 is substantially the same as the outer shape of the holding member 120, an increase in the size of the piezoelectric actuator unit 50 as a whole can be suppressed as much as possible.
Since the displacement magnifying mechanism 100 is thin, it has high responsiveness and can maintain high frequency characteristics of the control system that feedback-controls the diaphragm valve based on the detection values of the pressure detectors 22 and 26 .
In this embodiment, the displacement magnifying mechanism 100 is arranged between the piezoelectric actuator 2 and the support plate 3, but the configuration is not limited to this, and the arrangement of the displacement magnifying mechanism 100 can be changed as appropriate.
In this embodiment, by connecting the displacement magnifying mechanism 100 and the piezoelectric actuator 2 with the holding member 120 to form a unit, it is possible to inspect the unit alone. Note that it is also possible to dispose the displacement enlarging mechanism 100 and the piezoelectric actuator 2 separately.
In this embodiment, the large-diameter diaphragm 105 and the small-diameter diaphragm 106 are arranged to face each other.

FIG. 8 shows a displacement magnifying mechanism according to another embodiment of the present invention.
A difference between the displacement magnifying mechanism 100A according to this embodiment and the displacement magnifying mechanism 100 is that a bellows 107 is provided instead of the small-diameter diaphragm 106 .
The bellows 107 is made of metal material or synthetic resin material. The amount of deformation of the large-diameter diaphragm 105 is increased to extend the bellows 107 .
By adopting the bellows 107, it becomes easier to obtain a large amount of deformation as compared with the diaphragm.

In each of the above embodiments, the large-diameter diaphragm 105 is used as the first isolation member, and the small-diameter diaphragm 106 or bellows 107 is used as the second isolation member, but the present invention is not limited to these. For example, a bellows can be employed instead of the large-diameter diaphragm 105, and a piston can be displaceably provided with respect to the hydraulic pressure chamber as the first and second isolation members.

Next, another application example of the diaphragm valve described above will be described with reference to FIG.
A semiconductor manufacturing apparatus 980 shown in FIG. 9 is an apparatus for executing a semiconductor manufacturing process by an atomic layer deposition method (ALD), 981 is a process gas supply source, 982 is a gas box, and 983 is a tank. , 984 denotes an open/close valve, 985 denotes a controller, 986 denotes a processing chamber, and 987 denotes an exhaust pump. For example, in the ALD method and the like, it is required to stably supply a processing gas used in a processing process for depositing a film on a substrate at a higher flow rate.
The gas box 982 is an integrated gas system (fluid control system) in which various fluid control devices such as on-off valves, regulators, mass flow controllers, etc. equipment).
The tank 983 functions as a buffer that temporarily stores the processing gas supplied from the gas box 982 .
The opening/closing valve 984 is a diaphragm valve incorporating the above-described displacement enlarging mechanism.
The control unit 985 executes flow rate adjustment control by controlling the supply of the operation gas to the opening/closing valve 984 .
Processing chamber 986 provides an enclosed processing space for deposition of films on substrates by ALD methods.
An exhaust pump 987 evacuates the processing chamber 986 .

According to the system configuration as described above, the flow rate of the processing gas can be controlled by sending a control command from the controller 985 to the open/close valve 984 .

In addition, this invention is not limited to embodiment mentioned above. Those skilled in the art can make various additions, modifications, etc. within the scope of the present invention. For example, in the above application example, the opening/closing valve 984 is used in a semiconductor manufacturing process by the ALD method, but the present invention is not limited to this. ), etc., and can be applied to any object that requires precise flow rate adjustment.

In the above embodiment, the opening/closing valve 984 is arranged outside the gas box 982 as a fluid control device. It is also possible for the device to include the diaphragm valve of the above embodiment.

Another example of a fluid control device to which the present invention is applied will be described with reference to FIG.
The fluid control device shown in FIG. 10 is provided with metal base plates BS arranged along width directions W1 and W2 and extending in longitudinal directions G1 and G2. W1 indicates the front side, W2 indicates the rear side, G1 indicates the upstream side, and G2 indicates the downstream side. Various fluid devices 991A to 991E are installed on the base plate BS via a plurality of flow path blocks 992, and a flow path (not shown) through which the fluid flows from the upstream side G1 to the downstream side G2 through the plurality of flow path blocks 992. are formed respectively.

Here, the term “fluid device” refers to a device used in a fluid control device for controlling the flow of fluid, comprising a body defining a fluid flow path, and having at least two flow path openings on the surface of the body. It is a device that has Specifically, an on-off valve (two-way valve) 991A, a regulator 991B, a pressure gauge 991C, an on-off valve (three-way valve) 991D, a mass flow controller 991E, etc. are included, but are not limited to these. The introduction pipe 993 is connected to the upstream side port of the flow path (not shown).

The present invention can be applied to various diaphragm valves such as the on-off valves 991A and 991D and the regulator 991B.

Reference Signs List 1: Flow control device 2: Piezoelectric actuator 2a: Tip portion 2b: End surface 2d: End surface 2h: Case 3: Support plate 3a: Upper surface 5: Displacement transmission member 5a: Locking portion 6: Connecting member 7: Adjusting screw 8: Operation Member 8a : Arm 9 : Disc spring 10 : Bonnet 11 : Positioning pin 12 : Locking screw 13 : Locking nut 14 : O-ring 16 : Valve body 16a : Channel 16b : Channel 16c : Channel 17 : Diaphragm 19 : Diaphragm Presser 20: Presser adapter 21: Orifice 22: Pressure detector 25: Downstream block 25a: Downstream channel 26: Pressure detector 50: Piezoelectric actuator units 100, 100A: Displacement enlarging mechanism 101: Liquid chamber member 101a: Upper surface 101b : Lower surface 101c : Outer peripheral surface 101d : Flat surface 102 : Hydraulic pressure chamber 102a : Hydraulic pressure chamber 102b : Hydraulic pressure chamber 102c : Opening 102d : Opening 103 : Connecting portion 104 : Screw hole 105 : Large diameter diaphragm 106 : Small diameter diaphragm 107 : Bellows 120 : Holding member 121 : Second column 122 : Connecting part 122a : Recessed part 122b : Receiving surface 123 : Connecting part 980 : Semiconductor manufacturing equipment 982 : Gas box 983 : Tank 984 : Opening/closing valve 985 : Control part 986 : Processing chamber 987 : Exhaust pumps 991A to 991E : Fluid device 992 : Channel block 993 : Introduction pipe A1 : Upward direction A2 : Downward direction BS : Base plate BT : Bolt G1 : Longitudinal direction (upstream side)
G2: Longitudinal direction (downstream side)
L: liquids W1, W2: width direction d1: maximum displacement d2: maximum displacement

Claims (9)

a piezoelectric actuator containing stacked piezoelectric elements that actuate the diaphragm;
a hydraulic chamber having a first opening and a second opening smaller in area than the first opening and filled with liquid; and displaceable or deformable to the first opening. a first isolation member provided in the hydraulic pressure chamber and the outside and to which the expansion of the piezoelectric actuator is input;
a hydraulic displacement magnifying mechanism comprising a second separating member that is displaceably or deformably provided in the second opening and separates the hydraulic chamber from the outside;
a holding mechanism connected to the hydraulic displacement magnifying mechanism while holding the piezoelectric actuator such that the extension of the piezoelectric actuator is directly input to the first isolation member of the hydraulic displacement magnifying mechanism;
The holding mechanism has first and second pillars extending along the longitudinal direction of the piezoelectric actuator and fitted to side surfaces of the piezoelectric actuator,
The first and second pillars have distal ends connected to each other and proximal ends connected to liquid chamber members that define the hydraulic pressure chambers of the hydraulic displacement magnifying mechanism.diaphragm valve. 2. The diaphragm valve according to claim 1, wherein said first isolation member and said second isolation member are opposed to each other via said hydraulic chamber. 3. A diaphragm valve according to claim 1 or 2, wherein at least one of said first and second isolation members comprises a diaphragm. 4. A diaphragm valve according to any one of claims 1 to 3, wherein said first isolating member comprises a diaphragm and said second isolating member comprises a bellows. 2. The diaphragm valve according to claim 1 , wherein a connecting portion that connects tip portions of said first and second column portions has a receiving surface that receives one end of said piezoelectric actuator. A flow control device comprising the diaphragm valve according to any one of claims 1 to 5 . A fluid control device in which a plurality of fluid devices are arranged from upstream to downstream,
A fluid control device, wherein the plurality of fluid devices includes the diaphragm valve according to any one of claims 1 to 5 or the flow control device according to claim 6 . The diaphragm valve according to any one of claims 1 to 5 or the flow rate control device according to claim 6 is used to control the process gas in a semiconductor device manufacturing process that requires a treatment process using a process gas in a sealed chamber. used, semiconductor manufacturing equipment. The diaphragm valve according to any one of claims 1 to 5 or the flow rate control device according to claim 6 is used to control the process gas in a semiconductor device manufacturing process that requires a treatment process using a process gas in a sealed chamber. used, semiconductor manufacturing method.

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