JP7147127B2 - Shape measuring device - Google Patents

Description

The present invention relates to a shape measuring apparatus having a measuring arm that moves vertically.

By moving the detector relative to the work while a contact-type detector such as a stylus is in contact with the surface to be measured of the work, various shapes of the work (roundness, straightness, surface (including roughness, waviness, dimensions, etc.) are known. Shape measuring machines are also well known that measure various shapes of workpieces using non-contact detectors such as optical probes instead of contact detectors.

Such a shape measuring machine is provided with a linear driving mechanism for vertically moving a measuring arm holding a detector. As the linear drive mechanism, a ball screw mechanism using a ball screw (see Patent Document 1), a linear motor mechanism using a linear motor (see Patent Document 2), and the like are well known. The linear drive mechanism vertically moves a carriage (movable element) that holds the measurement arm, thereby vertically moving the measurement arm integrally with the carriage.

The linear drive mechanism is normally covered with a housing (cover) for safety reasons. In addition, a gap (notch) is formed in the housing along the movement path (movement range) of the measuring arm that moves in the vertical direction. A gap is formed in each of the upper side and the lower side of the measurement arm, and each gap is covered with a sheet (screen and cover).

As such a sheet, a so-called bellows type sheet is known, in which one end side is fixed to the carriage and the other end side is fixed to the end of the movement path. The bellows-type sheet always covers the above-mentioned gaps by expanding and contracting following the vertical movement of the measurement arm.

Further, Patent Document 3 describes a constant force spring type roll screen device. If this roll screen device is applied to the linear drive mechanism of a shape measuring machine, one end of the sheet is fixed to the carriage and the other end is connected to a constant force spring. In this case, since the sheet is always pulled with a constant force by the constant force spring, one end of the sheet can be moved following the vertical movement of the measurement arm, and as a result, the gaps are always covered with the sheet. be able to.

JP-A-10-154012 JP-A-11-98886 Japanese Patent Application Laid-Open No. 2003-301677

However, when a bellows-type sheet is used, the amount of expansion and contraction of each sheet on the upper side and the lower side of the carriage changes as the carriage moves in the vertical direction. Further, since the amount of expansion and contraction of each sheet is different from each other, the magnitude and direction of force applied to the carriage from the upper and lower sheets are also different from each other. As a result, the force applied to the carriage from the upper and lower sheets cannot be balanced, which may adversely affect the movement accuracy (position accuracy) of the measuring arm and the like. In particular, when the linear drive mechanism is a linear motor, the holding force for holding the position of the carriage is weak. As a result, there is a possibility that the movement accuracy (positional accuracy) of the carriage may be adversely affected.

Further, when the roll screen device described in Patent Document 3 is used, the durability of the constant force spring is about several thousand to several tens of thousands of reciprocations. have a problem.

SUMMARY OF THE INVENTION It is an object of the present invention to provide a shape measuring apparatus capable of achieving high movement accuracy of a mover and high durability.

A shape measuring apparatus for achieving the object of the present invention comprises a driving shaft parallel to the vertical direction, a measuring arm for holding a contact or non-contact detector, and a vertical axis perpendicular to the vertical direction. a measuring arm having an arm body extending in one direction; a mover that holds the arm body and moves vertically along the drive shaft together with the measuring arm; A vertically movable counterweight provided at a position shifted in a second direction perpendicular to both of the first directions, connects the mover and the counterweight, and interlocks with the mover's vertical movement. an interlocking mechanism for moving the counterweight in a direction opposite to that of the mover; a pair of rotating shafts sandwiching the moving path of the mover and the counterweight from above and below and parallel to the second direction; A sheet winding body that rotates around a rotation center parallel to the rotation axis in accordance with the rotation of the rotation axis, and a rope provided for each rotation axis, One end side is wound around the rotating shaft in accordance with the rotation of the rotating shaft in the cord winding direction, and is paid out from the rotating shaft in accordance with the rotation of the rotating shaft in the direction opposite to the cord winding direction. A rope whose end side is connected to the counterweight, and a sheet provided for each rotating shaft, one end side of which is wound up on the sheet winding body according to the rotation of the rotating shaft in the cord feeding direction and is attached to the rotating shaft. A connecting portion that connects the other end sides of the sheet and the sheet that is let out from the sheet winding body according to the rotation in the cord winding direction, and has an insertion opening through which the arm main body portion is inserted. And prepare.

According to this shape measuring apparatus, the rotating shaft and the sheet winding body are rotated integrally in conjunction with the vertical movement of the counterweight, so that the connecting portion can be vertically moved integrally with the mover. .

In a shape measuring device according to another aspect of the present invention, a cord winding body is fitted onto each rotation shaft and rotates integrally with the rotation shaft, and the cord winding body is attached to the rotation shaft. The cord is wound according to the rotation of the cord in the cord winding direction, and the cord is paid out according to the rotation of the rotating shaft in the cord winding direction. As a result, the rotating shaft and the sheet winding body can be rotated integrally in conjunction with the vertical movement of the counterweight.

In the shape measuring device according to another aspect of the present invention, the cord winding body is formed in a tapered shape in which the diameter of the cord winding body gradually increases from one direction to the other direction in the second direction. When the winding body rotates in the winding direction, the winding position of the winding body by the winding body gradually deviates in one direction, and the winding body rotates in the winding direction. In this case, the winding position gradually shifts in the other direction. As a result, minute errors between the amount of winding and feeding of the cord by the cord winding body and the amount of feeding and winding of the sheet by the sheet winding body can be reduced.

In the shape measuring device according to another aspect of the present invention, the sheet winding body is fitted around the rotating shaft and rotates integrally with the rotating shaft.

In a shape measuring apparatus according to another aspect of the present invention, a driving winding body fitted around each rotating shaft and rotating integrally with the rotating shaft, the driving winding body around which the sheet is wound. a body, the sheet takeup contacting the drive takeup via sheets wrapped around the drive takeup, and being driven by the drive takeup in response to rotation of the drive takeup; One end of the sheet is wound into a roll by a sheet winding body that rotates in the opposite direction to the driving winding body in response to the rotation of the rotating shaft in the cord feeding direction, and the rotating shaft The sheet is fed out from the sheet winding body rotating in the opposite direction to the driving winding body through the driving winding body in accordance with the rotation of the cord body in the winding direction. This reduces the above-mentioned minute errors.

In the shape measuring device according to another aspect of the present invention, the cord body and the counterweight are connected via a tension spring. This reduces the above-mentioned minute errors.

In a shape measuring device according to another aspect of the present invention, the connecting portion is provided separately from the mover. This makes it possible to improve the movement accuracy (positional accuracy) of the mover.

In the shape measuring device according to another aspect of the present invention, the connecting portion is the mover.

INDUSTRIAL APPLICABILITY According to the present invention, it is possible to realize high movement accuracy and high durability of the mover.

It is a side view of a roundness measuring device. It is the front view which looked at the housing|casing from the table side. It is the front view which looked at the linear drive mechanism in a housing|casing, a counterweight mechanism, and a roll screen mechanism from the table side. 4 is an enlarged schematic view of the counterweight, yarn winding drum, silk, and tension spring shown in FIG. 3 as viewed from the arrow A1 direction side in FIG. 3; FIG. 4 is an enlarged schematic view of the sheet winding drum, the roll sheet, and the connecting portion shown in FIG. 3 as viewed from the arrow A2 direction side in FIG. 3; FIG. FIG. 11 is an explanatory diagram for explaining the action of the roll screen mechanism when moving the carriage downward in the Z-axis direction; FIG. 11 is an explanatory diagram for explaining the action of the roll screen mechanism when moving the carriage upward in the Z-axis direction; FIG. 5 is an explanatory diagram for explaining a change in the outer diameter of a roll sheet wound around a sheet winding drum. It is an enlarged view of the yarn winding drum of the roll screen mechanism of the second embodiment. It is the schematic of the roll screen mechanism of 3rd Embodiment. It is an explanatory view for explaining a roll screen mechanism of a 4th embodiment. It is explanatory drawing for demonstrating the modification of a cord winding direction and a cord feeding direction.

[First embodiment]
FIG. 1 is a side view of a roundness measuring device 10 corresponding to the shape measuring machine of the present invention. In the drawing, the X-axis direction (corresponding to the second direction of the present invention), the Y-axis direction (corresponding to the first direction of the present invention), and the Z-axis direction (corresponding to the vertical direction of the present invention) are mutually are orthogonal. Also, the X-axis direction and the Y-axis direction are parallel to the horizontal direction.

As shown in FIG. 1, the roundness measuring device 10 measures the straightness and roundness (cylindricity) of a columnar or cylindrical work W. As shown in FIG. This roundness measuring device 10 includes a base 12 , a table rotating mechanism 14 , a table 16 , a linear driving mechanism 18 , a measuring arm 20 , a detector 22 and a housing 24 .

The base 12 is a support (base) that supports each part of the roundness measuring device 10 . Although not shown, the table rotation mechanism 14 includes an air bearing that holds the table 16 rotatably around an axis C parallel to the Z-axis direction, and a rotation drive such as a motor that rotates the table 16 around the axis C. a mechanism; As a result, the table 16 is rotated around the axis C by the table rotation mechanism 14 .

The table 16 is disk-shaped and is held on the air bearing of the table rotation mechanism 14 so that the center of the table 16 coincides with the axis C. As shown in FIG. A workpiece W is placed on the upper surface of the table 16 . The work W is placed on the upper surface of the table 16 so that the position of the center of the shape of the work W substantially coincides with the axis C. As shown in FIG.

As the linear drive mechanism 18, various known mechanisms such as the ball screw mechanism described in Patent Document 1 or the linear motor mechanism described in Patent Document 2 are used. will be described as an example. As the linear drive mechanism 18, the one described in the specification of Japanese Patent Application No. 2018-17273 filed by the present applicant may be used.

The linear drive mechanism 18 includes a drive shaft 26 (also referred to as a shaft shaft or column) that is a stator and a carriage 28 that is a mover.

The drive shaft 26 is provided on the base 12 at a position shifted in the Y-axis direction from the table 16 and has a shape extending in the Z-axis direction perpendicular to the base 12 . The drive shaft 26 has a structure in which a plurality of permanent magnets (not shown) are joined in a known arrangement.

The carriage 28 has a substantially cylindrical shape through which the drive shaft 26 is inserted, and is supported by the drive shaft 26 so as to be movable in the Z-axis direction without contact. The carriage 28 is provided with a plurality of coils spirally wound around the drive shaft 26 along the Z-axis direction. When a current is applied to each coil of the carriage 28, the interaction between the magnetic flux generated by each magnet of the drive shaft 26 and the current flowing through each coil creates a thrust (driving force) that moves the carriage 28 along the Z-axis direction. force) occurs. Since the structure and function of the linear drive mechanism 18 (linear motor mechanism) are well-known technologies, detailed description thereof is omitted here.

The carriage 28 holds the arm body 20a of the measuring arm 20 so as to be movable in the Y-axis direction, and moves integrally with the measuring arm 20 along the Z-axis direction.

The measurement arm 20 includes an arm main body portion 20a that is held by the carriage 28 and extends (in parallel) in the Y-axis direction, and a holding portion that is provided on the tip side of the arm main body portion 20a and holds the detector 22. . As long as the measurement arm 20 has an arm body portion 20a extending in the Y-axis direction, the shape of other portions can be changed as appropriate.

The detector 22 is of a contact type having a stylus 22a (also called probe or stylus) and a displacement detector such as a differential transformer (not shown), and the stylus moves back and forth along the Y-axis direction. 22a displacement is detected. That is, the detector 22 has sensitivity in the Y-axis direction. The detector 22 then outputs a displacement detection signal (electrical signal) indicating the displacement of the stylus 22a to a data processing device (not shown). As the detector 22, for example, a non-contact type such as an optical probe (laser probe) may be used.

When measuring the straightness of the work W, the linear driving mechanism 18 and the measurement arm 20 are driven to bring the stylus 22a into contact with the outer peripheral surface of the work W. As shown in FIG. Next, by driving the linear drive mechanism 18 to move the carriage 28 in the Z-axis direction, the stylus 22a traces the outer peripheral surface of the work W along the Z-axis direction. As a result, a displacement detection signal for one trace is output from the detector 22 to a data processor (not shown). In this case, the data processing device analyzes the detection signal input from the detector 22 by a known method and calculates the straightness of the workpiece W. FIG.

When measuring the roundness of the work W, the stylus 22a is brought into contact with the outer peripheral surface of the work W in the same manner as in the straightness measurement. Next, by rotating the table 16 and the work W by the table rotation mechanism 14, the stylus 22a traces the outer peripheral surface of the work W along its circumferential direction. As a result, a displacement detection signal corresponding to one rotation of the workpiece W is output from the detector 22 to a data processing device (not shown). In this case, the data processing device analyzes the detection signal input from the detector 22 by a known method and calculates the roundness (cylindricity) of the work W. FIG.

FIG. 2 is a front view of the housing 24 viewed from the table 16 side. As shown in FIG. 2, a housing 24 (also referred to as a cover) is provided on the base 12 so as to cover the linear drive mechanism 18, a counterweight mechanism 30 and a roll screen mechanism 40 (see FIG. 3), which will be described later. It is

A side surface of the housing 24 facing the table 16 is formed with an opening 24a through which the measuring arm 20 (arm main body 20a) moved in the Z-axis direction by the linear drive mechanism 18 passes outside the housing 24. ing. The opening 24a has a substantially rectangular shape extending in the Z-axis direction along the movement path (movement range) of the measuring arm 20 that moves in the Z-axis direction.

When the measuring arm 20 moves upward in the Z-axis direction, the gap (space) generated between the measuring arm 20 and the upper end of the opening 24a in the Z-axis direction shrinks in the Z-axis direction, and the gap between the measuring arm 20 and the opening 24a in the Z-axis direction increases. The gap generated between the lower end expands in the Z-axis direction. Conversely, when the measuring arm 20 moves downward in the Z-axis direction, the gap generated between the measuring arm 20 and the upper end of the opening 24a in the Z-axis direction expands in the Z-axis direction, and the gap between the measuring arm 20 and the opening 24a increases in the Z-axis direction. A gap generated between the lower end and the lower end shrinks in the Z-axis direction. These gaps are always covered with roll sheets 54A and 54B, which will be described later.

FIG. 3 is a front view of the linear drive mechanism 18, the counterweight mechanism 30, and the roll screen mechanism 40 in the housing 24 as seen from the table 16 side.

As shown in FIG. 3 and FIG. 1 described above, the counterweight mechanism 30 includes a top plate 32, a Z-axis guide 34, a counterweight 36, and an interlocking mechanism 38.

The top plate 32 is fixed to the upper surface of the drive shaft 26 . The top plate 32 has a shape extending in the X-axis direction so as to extend over the movement path of the measurement arm 20 described above and the movement path of the counterweight 36 described later.

The Z-axis guide 34 is provided at a position shifted in the X1 direction, which is one direction in the X-axis direction, with respect to the drive shaft 26, and has a shape extending in the Z-axis direction. The Z-axis direction lower end of the Z-axis guide 34 is fixed to the base 12 and the Z-axis direction upper end is fixed to the top plate 32 .

The counterweight 36 is held by a Z-axis guide 34 so as to be movable in the Z-axis direction. That is, the counterweight 36 is movably held in the Z-axis direction by the Z-axis guide 34 at a position shifted in the X1 direction with respect to the drive shaft 26 . The weight of the counterweight 36 is determined based on the weight of each elevating member that elevates in the Z-axis direction along the driving shaft 26 such as the measuring arm 20, the detector 22, and the carriage 28.

The interlocking mechanism 38 connects the carriage 28 and the counterweight 36 , and moves the counterweight 36 in the opposite direction to the carriage 28 in conjunction with the movement (lifting) of the carriage 28 in the Z-axis direction. Note that the detailed configuration of the interlocking mechanism 38 is a known technique (see, for example, Japanese Patent Application Laid-Open No. 2015-55515), so a detailed description will be omitted here. By interlocking the carriage 28 and the counterweight 36 in this manner, the weight balance of the lifting members can be achieved by the counterweight 36 .

The roll screen mechanism 40 includes a pair of rotating shafts 42A and 42B, rotating shaft holding members 44A and 44B, yarn winding drums 46A and 46B, threads 48A and 48B, tension springs 50A and 50B, and a sheet winding drum 52A. , 52B, roll sheets 54A and 54B, and a connecting portion 56. As shown in FIG.

The pair of rotating shafts 42A and 42B has a shape extending (parallel) in the X-axis direction so as to cover the moving paths of both the measurement arm 20 and the counterweight 36 in the X-axis direction. The rotating shaft 42A is rotatably held by a rotating shaft holding member 44A at a position on the upper side of both movement paths in the Z-axis direction about a center of rotation parallel to the X-axis direction. Further, the rotary shaft 42B is held by a rotary shaft holding member 44B at a position on the lower side in the Z-axis direction of both movement paths so as to be rotatable around a rotation center parallel to the X-axis direction. As a result, both movement paths are sandwiched between the rotating shafts 42A and 42B from above and below.

A plurality of rotating shaft holding members 44A are provided along the X-axis direction, for example, on the side surface (or upper surface) of the top plate 32, and hold the rotating shaft 42A rotatably. A plurality of rotating shaft holding members 44B are provided along the X-axis direction on the upper surface of the base 12, and hold the rotating shaft 42B rotatably.

The yarn winding drums 46A and 46B correspond to the cord winding body of the present invention. The yarn winding drum 46A is externally fitted and fixed to the X1-direction end of the rotating shaft 42A, and rotates integrally with the rotating shaft 42A. The yarn winding drum 46B is externally fitted and fixed to the end of the rotation shaft 42B on the X1 direction side, and rotates integrally with the rotation shaft 42B. The positions of the yarn winding drums 46A and 46B in the X-axis direction and the Y-axis direction are the same (including substantially the same, hereinafter the same).

When the yarn winding drum 46A rotates integrally with the rotary shaft 42A in the wire winding direction RA1 (corresponding to the rope winding direction of the present invention) described later, the yarn winding drum 46A winds the wire 48A described later. When it rotates together with 42A in the later-described line feeding direction RA2 (corresponding to the cord feeding direction of the present invention), the line 48A is fed downward in the Z-axis direction. Further, when the yarn winding drum 46B rotates integrally with the rotary shaft 42B in a wire winding direction RB1 (corresponding to the cord winding direction of the present invention) described later, the yarn winding drum 46B winds the wire 48B described later. When it rotates integrally with the rotating shaft 42B in a line feeding direction RB2 (corresponding to the rope feeding direction of the present invention), the line 48B is fed upward in the Z-axis direction.

The extremities 48A and 48B correspond to the cord bodies of the present invention. In addition, the cord body includes a thread, a wire, a cord, a cable, a rope, etc., which are composed of a single wire or a twisted wire.

The line 48A has one end fixed to the yarn winding drum 46A and the other end connected to the tension spring 50A. One end of the line 48B is fixed to the yarn winding drum 46B, and the other end of the line 48B is connected to the tension spring 50B.

The tension spring 50A has one end connected to the string 48A and the other end connected to the upper end of the counterweight 36 . Thereby, the line 48A and the counterweight 36 are connected via the tension spring 50A. The tension spring 50B has one end connected to the line 48B and the other end connected to the lower end of the counterweight 36 . Thereby, the line 48B and the counterweight 36 are connected via the tension spring 50B. As a result, the lines 48A and 48B are connected via the tension spring 50A, the counterweight 36, and the tension spring 50B.

FIG. 4 is an enlarged schematic view of the counterweight 36, yarn winding drums 46A and 46B, lines 48A and 48B, and tension springs 50A and 50B shown in FIG. 3 as viewed from the direction of arrow A1 in FIG.

As shown in FIG. 4, when the counterweight 36 moves upward in the Z-axis direction via the interlocking mechanism 38, the line 48A is pushed upward in the Z-axis direction via the counterweight 36 and the tension spring 50A. , the yarn winding drum 46A is rotated integrally with the rotating shaft 42A in the line winding direction RA1. As a result, the line 48A is wound into a roll by the yarn winding drum 46A. It is preferable to use a strong line 48A (the same applies to the line 48B) so that the line 48A does not bend between the yarn winding drum 46A and the counterweight 36.

At the same time, when the counterweight 36 moves upward in the Z-axis direction, the line 48B is pulled upward in the Z-axis direction via the counterweight 36 and the tension spring 50B. is rotated in the line feeding direction RB2. As a result, the line 48B is let out upward in the Z-axis direction from the yarn winding drum 46B. Note that, in the present embodiment, the line winding direction RA1 and the line feeding direction RB2 are the same.

On the other hand, when the counterweight 36 moves downward in the Z-axis direction via the interlocking mechanism 38, the line 48A is pulled downward in the Z-axis direction via the counterweight 36 and the tension spring 50A. It is rotated integrally with the rotary shaft 42A in the line feeding direction RA2 opposite to the line winding direction RA1. As a result, the line 48A is let out downward in the Z-axis direction from the yarn winding drum 46A.

At the same time, when the counterweight 36 moves downward in the Z-axis direction, the line 48B is pushed downward in the Z-axis direction via the counterweight 36 and the tension spring 50B. Then, it rotates in the winding direction RB1 opposite to the feeding direction RB2. As a result, the line 48B is wound into a roll by the yarn winding drum 46B. Note that, in the present embodiment, the line winding direction RA1 and the line winding direction RB1 are opposite to each other.

As described above, in this embodiment, the rotating shaft 42A rotates in the wire winding direction RA1 and the rotating shaft 42B rotates in the wire feeding direction RB2 according to the movement (lifting) of the counterweight 36 in the Z-axis direction. Alternatively, the rotating shaft 42A rotates in the wire feeding direction RA2 and the rotating shaft 42B rotates in the wire winding direction RB1.

Returning to FIGS. 1 and 3, the sheet winding drums 52A and 52B correspond to the sheet winding body of the present invention. The sheet winding drum 52A is externally fixed to the end of the rotation shaft 42A in the X2 direction, which is the other direction in the X-axis direction (opposite direction to the X1 direction), and is integrated with the rotation shaft 42A and the yarn winding drum 46A. rotate to The sheet winding drum 52B is externally fitted and fixed to the X2 direction end of the rotating shaft 42B, and rotates integrally with the rotating shaft 42B and the yarn winding drum 46B. The positions of the sheet winding drums 52A and 52B in the X-axis direction and the Y-axis direction are the same.

The sheet winding drum 52A winds a roll sheet 54A described later when it rotates integrally with the rotary shaft 42A in the wire feeding direction RA2, and conversely when it rotates integrally with the rotary shaft 42A in the wire winding direction RA1. , the roll sheet 54A is fed downward in the Z-axis direction. Further, when the sheet winding drum 52B rotates integrally with the rotating shaft 42B in the line winding direction RB1, the roll sheet 54B, which will be described later, is drawn out upward in the Z-axis direction. When the roll sheet 54B is rotated to RB2, the roll sheet 54B is wound.

The roll sheet 54A has one end fixed to the sheet winding drum 52A and the other end connected to the connecting portion 56 . The roll sheet 54B has one end fixed to the sheet winding drum 52B and the other end connected to the connecting portion 56 .

The connecting portion 56 is supported by the roll sheets 54A and 54B at a position shifted in the Y-axis direction (on the table 16 side) with respect to the carriage 28 . That is, the connecting portion 56 is provided separately from the carriage 28 . The roll sheet 54A is connected to the upper end of the connecting portion 56, and the roll sheet 54B is connected to the lower end of the connecting portion 56. As shown in FIG. As a result, the other ends of the roll sheets 54A and 54B are connected to each other via the connecting portion 56. As shown in FIG. Therefore, the connecting portion 56 moves in the Z-axis direction together with the other ends of the roll sheets 54A and 54B.

The connection portion 56 is formed with an insertion opening 56a through which the arm body portion 20a of the measurement arm 20 is inserted. The opening shape of the insertion port 56a has a shape obtained by enlarging the cross-sectional shape of the arm body portion 20a. As a result, the arm main body 20a is inserted (non-contact) through the insertion opening 56a with a gap therebetween. Note that the connecting portion 56 may be integrally formed with at least one of the roll sheets 54A and 54B.

FIG. 5 shows the sheet winding drums 52A and 52B, the roll sheets 54A and 54B, and the connecting portion 56 shown in FIG. 3 viewed from the direction of arrow A2 in FIG. 3 (the same direction as in FIG. 4 described above). It is an enlarged schematic diagram.

As shown in FIG. 5 and FIG. 4, the winding direction of the roll sheet 54A on the sheet winding drum 52A and the winding direction of the line 48A on the yarn winding drum 46A are opposite to each other. Further, the winding direction of the roll sheet 54B around the sheet winding drum 52B and the winding direction of the line 48B around the yarn winding drum 46B are opposite to each other.

When the sheet take-up drum 52A rotates in the wire take-up direction RA1, the roll sheet 54A is paid out downward in the Z-axis direction from the sheet take-up drum 52A. The roll sheet 54A is wound into a roll by the take-up drum 52A. When the sheet take-up drum 52B rotates in the wire take-up direction RB1, the roll sheet 54B is delivered upward in the Z-axis direction from the sheet take-up drum 52B. The roll sheet 54B is wound into a roll by the sheet winding drum 52B.

When the sheet winding drum 52A rotates in the line winding direction RA1 and the sheet winding drum 52B rotates in the line feeding direction RB2 in accordance with the upward movement of the counterweight 36 in the Z-axis direction, the connecting portion 56 is connected. , moves downward in the Z-axis direction integrally with the other ends of the roll sheets 54A and 54B. Conversely, the connecting portion 56 rotates the sheet winding drum 52A in the line feeding direction RA2 and rotates the sheet winding drum 52B in the line winding direction RB1 in accordance with the downward movement of the counterweight 36 in the Z-axis direction. When rotated, it moves upward in the Z-axis direction integrally with the other end sides of the roll sheets 54A and 54B. As a result, the connecting portion 56 moves in the direction opposite to the counterweight 36 , that is, moves in the same direction as the carriage 28 in conjunction with the movement of the counterweight 36 in the Z-axis direction.

At this time, the moving speed (moving amount per unit time) of the connecting portion 56 in the Z-axis direction matches (including substantially matching) the moving speed (moving amount per unit time) of the carriage 28 in the Z-axis direction. ), the outer diameters of the yarn winding drums 46A and 46B and the sheet winding drums 52A and 52B are adjusted. As a result, the connecting portion 56 moves together with the carriage 28 in the Z-axis direction. As a result, the state in which the connecting portion 56 faces the carriage 28 is always maintained before and after the movement of the carriage 28 in the Z-axis direction.

It should be noted that when the rotation shafts 42A and 42B rotate due to various factors (for example, the difference between the thickness of the lines 48A and 48B and the thickness of the roll sheets 54A and 54B), the winding of the lines 48A and 48B by the yarn winding drums 46A and 46B is reduced. A minute error occurs between the amount of roll sheets 54A and 54B taken and the amounts of roll sheets 54A and 54B fed and wound by the sheet winding drums 52A and 52B. This minute error is absorbed by the tension springs 50A and 50B already described.

FIG. 6 is an explanatory diagram for explaining the action of the roll screen mechanism 40 when moving the carriage 28 downward in the Z-axis direction.

As shown in FIG. 6 , when the carriage 28 moves downward in the Z-axis direction, the counterweight 36 moves upward in the Z-axis direction via the interlocking mechanism 38 . In response to the movement of the counterweight 36, the yarn winding drum 46A and the rotating shaft 42A are integrally rotated in the yarn winding direction RA1 through the yarn 48A and the like, and the yarn winding drum 46B and the rotating shaft 42A rotate through the yarn 48B and the like. The shaft 42B is integrally rotated in the line feeding direction RB2.

Then, the sheet winding drum 52A rotates in the line winding direction RA1 integrally with the rotating shaft 42A, whereby the roll sheet 54A is fed downward in the Z-axis direction from the sheet winding drum 52A. At the same time, the roll sheet 54B is wound into a roll by the sheet winding drum 52B by rotating the sheet winding drum 52B integrally with the rotating shaft 42B in the line feeding direction RB2. As a result, the connecting portion 56 moves downward in the Z-axis direction together with the other ends of the roll sheets 54A and 54B at the same speed as the carriage 28 .

FIG. 7 is an explanatory diagram for explaining the action of the roll screen mechanism 40 when moving the carriage 28 upward in the Z-axis direction.

As shown in FIG. 7 , when the carriage 28 moves upward in the Z-axis direction, the counterweight 36 moves downward in the Z-axis direction via the interlocking mechanism 38 . In response to the movement of the counterweight 36, the yarn winding drum 46A and the rotary shaft 42A are integrally rotated in the wire feeding direction RA2 through the wire 48A and the like, and the yarn winding drum 46B and the rotary shaft are rotated through the wire 48B and the like. 42B are integrally rotated in the line winding direction RB1.

Then, the roll sheet 54A is wound into a roll by the sheet winding drum 52A by rotating the sheet winding drum 52A integrally with the rotating shaft 42A in the line feeding direction RA2. At the same time, the sheet winding drum 52B rotates in the line winding direction RB1 integrally with the rotary shaft 42B, whereby the roll sheet 54B is fed upward in the Z-axis direction from the sheet winding drum 52B. As a result, the connecting portion 56 moves upward in the Z-axis direction together with the other ends of the roll sheets 54A and 54B at the same speed as the carriage 28 .

In this way, before and after the movement of the carriage 28 in the Z-axis direction, the state in which the connecting portion 56 faces the carriage 28 is maintained. As a result, before and after the carriage 28 moves in the Z-axis direction, the gap (space) generated between the measurement arm 20 and the upper end of the opening 24a (see FIG. 2) in the Z-axis direction is covered with the roll sheet 54A. , the gap between the measuring arm 20 and the lower end of the opening 24a in the Z-axis direction is covered with the roll sheet 54B.

[Effect of this embodiment]
As described above, in this embodiment, the rotation shafts 42A and 42B and the sheet winding drums 52A and 52B are rotated integrally in conjunction with the movement of the counterweight 36 in the Z-axis direction, so that the connecting portion 56 and the carriage 28 are moved. They can be moved together in the Z-axis direction. As a result, unlike the case of using a bellows-type sheet that exerts a restoring force on the carriage 28, the movement accuracy (positional accuracy) of the carriage 28 and the like is prevented from being adversely affected. Therefore, even if the linear drive mechanism 18 has a low position holding force for the carriage 28, such as a linear motor, the accuracy of movement of the carriage 28 and the like is prevented from being adversely affected. Moreover, since a mechanism such as a constant force spring that has a limited number of times of durability is not used, the roll screen mechanism 40 is highly durable. As a result, it is possible to improve the movement accuracy of the carriage 28 and ensure the high durability of the roll screen mechanism 40 .

In addition, in the present embodiment, since the connecting portion 56 (roll sheets 54A and 54B) is provided separately from the carriage 28, it is possible to prevent force from being applied to the carriage 28 from the connecting portion 56 and the like. be. As a result, even if the linear drive mechanism 18 has a low position holding force for the carriage 28, such as a linear motor, the accuracy of movement of the carriage 28 and the like is prevented from being adversely affected.

Further, in the present embodiment, since the rotating shafts 42A, 42B and the sheet winding drums 52A, 52B are integrally rotated in conjunction with the movement of the counterweight 36 in the Z-axis direction, the sheet winding drums 52A, 52B are rotated. It is no longer necessary to provide an independent drive source for

[Second embodiment]
FIG. 8 is an explanatory diagram for explaining changes in the outer diameter of the roll sheets 54A and 54B wound on the sheet winding drums 52A and 52B.

As shown in FIG. 8, let D be the diameter of the sheet winding drums 52A and 52B, t be the thickness of the roll sheets 54A and 54B, and n be the number of turns of the roll sheets 54A and 54B around the sheet winding drums 52A and 52B. In this case, the outer diameter of the rolled roll sheets 54A and 54B is represented by "D+2nt". That is, the outer diameter increases by 2t as the number of turns n increases. Therefore, when the thickness of the lines 48A, 48B is smaller than t, the amount of winding/feeding of the lines 48A, 48B by the yarn winding drums 46A, 46B and the amount of feeding of the lines 48A, 48B by the yarn winding drums 46A, 46B and the sheet winding drums 52A, 52B increase as the number of windings n increases. The minute error caused between the feeding amount and the winding amount of the roll sheets 54A and 54B due to .

In the first embodiment, the tension springs 50A and 50B absorb the minute errors, but in the second embodiment, the roll screen mechanism 40 is provided with means for reducing the occurrence of minute errors.

FIG. 9 is an enlarged view of the yarn winding drums 60A and 60B of the roll screen mechanism 40 of the second embodiment. Note that the roll screen mechanism 40 of the second embodiment is similar to the roll screen mechanism of the first embodiment except that the yarn winding drums 60A and 60B have different shapes from the yarn winding drums 46A and 46B of the first embodiment. 40 and basically the same configuration. For this reason, the same reference numerals are given to the same functions or configurations as those of the first embodiment, and the description thereof will be omitted.

The yarn winding drums 60A and 60B are tapered such that the diameter gradually increases from one direction in the X-axis direction (either the X1 direction or the X2 direction here) to the other direction. When the yarn winding drums 60A and 60B rotate in the wire winding directions RA1 and RB1, respectively, the yarn winding drums 60A and 60B wind the wires 48A and 48B at one direction side (smaller diameter side) in the X-axis direction. ). Conversely, when the yarn winding drums 60A and 60B rotate in the wire feeding directions RA2 and RB2, respectively, the yarn winding drums 60A and 60B wind the wires 48A and 48B at the other direction side (larger side) in the X-axis direction. radial side).

In order to gradually shift the winding positions of the lines 48A and 48B in the X-axis direction according to the rotation of the yarn winding drums 60A and 60B, spiral grooves or the like are formed on the outer peripheral surfaces of the yarn winding drums 60A and 60B. good too.

As described above, in the second embodiment, the winding positions of the lines 48A and 48B by the yarn winding drums 60A and 60B are changed in the other direction (large diameter side). In addition, in the second embodiment, the winding position of the lines 48A and 48B by the yarn winding drums 60A and 60B is changed to one direction (smaller diameter side) in the X-axis direction as the outer diameter of the roll-shaped roll sheets 54A and 54B decreases. can be shifted to As a result, the outer diameter of the roll sheets 54A, 54B wound on the sheet winding drums 52A, 52B and the outer diameter of the lines 48A, 48B wound on the yarn winding drums 60A, 60B can be matched. As a result, the occurrence of the minute errors described above is reduced, so that the movement accuracy of the carriage 28 is ensured.

[Third embodiment]
FIG. 10 is a schematic diagram of the roll screen mechanism 40 of the third embodiment. In the second embodiment, the yarn winding drums 60A and 60B reduce the occurrence of the above minute errors. It has picking mechanisms 70A and 70B.

Note that the roll screen mechanism 40 of the third embodiment has basically the same configuration as the roll screen mechanism 40 of the first embodiment, except that the sheet winding mechanisms 70A and 70B are provided. For this reason, the same reference numerals are given to the same functions or configurations as those of the first embodiment, and the description thereof will be omitted.

As shown in FIG. 10, the sheet winding mechanism 70A includes a rotating shaft holding member 72A, a drive drum 74A, a guide holding member 76A, a Y-axis guide 78A, a winding drum holding member 80A, a compression coil spring 82A, and a sheet winding drum. 52A. The sheet winding mechanism 70B also includes a rotating shaft holding member 72B, a driving drum 74B, a guide holding member 76B, a Y-axis guide 78B, a winding drum holding member 80B, a compression coil spring 82B, and a sheet winding drum 52B.

72 A of rotating shaft holding members are provided in the front-end|tip part by the side of the table 16 in the upper surface of the top plate 32, and hold|maintain the rotating shaft 42A rotatably. Further, the rotating shaft holding member 72B is provided on the upper surface of the base 12 and rotatably holds the rotating shaft 42B. The positions of the rotation shafts 42A and 42B in the Y-axis direction are the same.

The drive drums 74A and 74B correspond to the drive winding body of the present invention. The drive drum 74A is externally fixed to the end of the rotation shaft 42A in the X2 direction (see FIG. 3), and rotates together with the rotation shaft 42A and the yarn winding drum 46A. The drive drum 74B is externally fitted and fixed to the X2-direction end of the rotating shaft 42B, and rotates integrally with the rotating shaft 42B and the yarn winding drum 46B. A roll sheet 54A is wound around the driving drum 74A, and a roll sheet 54B is wound around the driving drum 74B.

The guide holding member 76A is provided on the upper surface of the top plate 32 and at a position shifted in the Y-axis direction with respect to the rotating shaft holding member 72A. The guide holding member 76B is provided on the upper surface of the base 12 and at a position shifted in the Y-axis direction with respect to the rotating shaft holding member 72B.

Y-axis guides 78A and 78B have a shape extending in a direction parallel to the Y-axis direction. The Y-axis guides 78A and 78B are composed of, for example, upper and lower guides spaced apart in the Z-axis direction. Two sets of Y-axis guides 78A (upper and lower guides) are provided so as to sandwich the sheet winding drum 52A described later in the X-axis direction, and Y-axis guides 78B (upper and lower guides) are provided in the X-axis direction for sheet winding described later. Two sets are provided so as to sandwich the drum 52B.

One end of the Y-axis guide 78A in the Y-axis direction is fixed to the rotating shaft holding member 72A, and the other end in the Y-axis direction of the Y-axis guide 78A is fixed to the guide holding member 76A. One end of the Y-axis guide 78B in the Y-axis direction is fixed to the rotary shaft holding member 72B, and the other end in the Y-axis direction of the Y-axis guide 78B is fixed to the guide holding member 76B.

The winding drum holding member 80A is supported by two sets of Y-axis guides 78A spaced apart in the X-axis direction so as to be movable in the Y-axis direction along the Y-axis guides 78A. Further, the winding drum holding member 80B is supported by two sets of Y-axis guides 78B spaced apart in the X-axis direction so as to be movable in the Y-axis direction along the Y-axis guides 78B. Each winding drum holding member 80A rotatably holds the sheet winding drum 52A, and each winding drum holding member 80B rotatably holds the sheet winding drum 52B.

The compression coil spring 82A is fitted on the Y-axis guide 78A between the guide holding member 76A and the winding drum holding member 80A, and biases the winding drum holding member 80A toward the driving drum 74A. The compression coil spring 82B is fitted on the Y-axis guide 78B between the guide holding member 76B and the winding drum holding member 80B, and biases the winding drum holding member 80B toward the drive drum 74B. As a result, the sheet winding drum 52A is urged toward the driving drum 74A, and the sheet winding drum 52B is urged toward the driving drum 74B.

The sheet winding drum 52A of the third embodiment is rotatably held between the pair of winding drum holding members 80A, and the sheet winding drum 52B of the third embodiment is held between the pair of winding drum holding members 80B. rotatably held in the The positions of the two sets of Y-axis guides 78A are adjusted so that the positions of the sheet winding drum 52A and the driving drum 74A in the X-axis direction are aligned, and the positions of the sheet winding drum 52B and the driving drum 74B in the X-axis direction are adjusted. The positions of the pair of Y-axis guides 78B are adjusted so that the positions match.

The sheet winding drum 52A comes into contact with the driving drum 74A via the roll sheet 54A wound around the driving drum 74A due to the urging of the compression coil spring 82A via the winding drum holding member 80A. Therefore, the sheet winding drum 52A rotates in the opposite direction to the drive drum 74A in accordance with the rotation of the drive drum 74A.

Also, the sheet winding drum 52B contacts the driving drum 74B via the roll sheet 54B wound around the driving drum 74B due to the urging of the compression coil spring 82B via the winding drum holding member 80B. Therefore, the sheet winding drum 52B rotates in the direction opposite to the drive drum 74B in accordance with the rotation of the drive drum 74B.

One end side of the roll sheet 54A of the third embodiment is wound around the drive drum 74A and then fixed to the sheet take-up drum 52A. Therefore, when the drive drum 74A rotates in the line feeding direction RA2, the roll sheet 54A is pulled upward in the Z-axis direction by the drive drum 74A and sent toward the sheet winding drum 52A. Then, the sheet winding drum 52A is rotated by the driving drum 74A in the direction opposite to the driving drum 74A, that is, in the line winding direction RA1. As a result, the sheet winding drum 52A winds the roll sheet 54A delivered from the drive drum 74A into a roll.

Conversely, when the driving drum 74A rotates in the line winding direction RA1, the driving drum 74A rotates the sheet winding drum 52A in the direction opposite to the driving drum 74A, that is, in the line feeding direction RA2. Therefore, the drive drum 74A pulls out the roll sheet 54A from the sheet take-up drum 52A and feeds the pulled out roll sheet 54A downward in the Z-axis direction.

One end side of the roll sheet 54B of the third embodiment is wound around the driving drum 74B and then fixed to the sheet winding drum 52B. Therefore, when the drive drum 74B rotates in the line feeding direction RB2, the roll sheet 54B is pulled downward in the Z-axis direction by the drive drum 74B and delivered toward the sheet winding drum 52B. Then, the sheet winding drum 52B is rotated by the driving drum 74B in the direction opposite to the driving drum 74B, that is, in the line winding direction RB1. As a result, the sheet winding drum 52B winds the roll sheet 54B delivered from the drive drum 74B into a roll.

Conversely, when the driving drum 74B rotates in the line winding direction RB1, the driving drum 74B rotates the sheet winding drum 52B in the direction opposite to the driving drum 74B, that is, in the line feeding direction RB2. Therefore, the drive drum 74B pulls out the roll sheet 54B from the sheet take-up drum 52B and feeds the pulled out roll sheet 54B upward in the Z-axis direction.

As described above, in the third embodiment, the sheet winding drums 52A, 52B and the drive drums 74A, 74B are provided separately, so that the outer diameters of the drive drums 74A, 74B are always constant. Therefore, the amount of roll sheet 54A delivered and wound by drive drum 74A and sheet take-up drum 52A and the amount of roll sheet 54B delivered and taken up by drive drum 74B and sheet take-up drum 52B are always constant. Become. As a result, the accuracy of movement of the carriage 28 is ensured because it is possible to reduce the minute error that occurs between the winding/feeding amounts of the lines 48A and 48B and the feeding/winding amounts of the roll sheets 54A and 54B. be done.

[Fourth embodiment]
FIG. 11 is an explanatory diagram for explaining the roll screen mechanism 40 of the fourth embodiment. In the first embodiment, the other ends of the roll sheets 54A and 54B are connected by the connecting portion 56 provided separately from the carriage 28. However, as shown in FIG. In the form, the other end sides of both the roll sheets 54A and 54B are connected via the carriage 28 .

Note that the roll screen mechanism 40 of the fourth embodiment has basically the same configuration as the roll screen mechanism 40 of the first embodiment, except that the carriage 28 functions as the connecting portion of the present invention. For this reason, the same reference numerals are given to the same functions or configurations as those of the first embodiment, and the description thereof will be omitted. Reference numeral 90 in the drawing denotes an insertion opening provided in the carriage 28 and through which the arm body portion 20a of the measurement arm 20 is inserted.

A connecting portion 92A connected to the other end of the roll sheet 54A is provided at the upper end portion of the carriage 28 of the fourth embodiment. Further, a connecting portion 92B connected to the other end side of the roll sheet 54B is provided at the lower end portion of the carriage 28 of the fourth embodiment.

As described above, in the fourth embodiment, the other ends of the roll sheets 54A and 54B are connected to each other through the carriage 28. Therefore, as in the first embodiment, the movement of the carriage 28 in the Z-axis direction can be performed before and after movement. , the state where the gap of the opening 24a is covered with the roll sheets 54A and 54B is maintained. As a result, the same effects as those of the first embodiment can be obtained. In order to further improve the movement accuracy (positional accuracy) of the carriage 28 and the like, it is preferable to provide the connecting portion 56 separated from the carriage 28 as in the first embodiment.

[others]
12A and 12B are explanatory diagrams for explaining modifications of the wire winding directions RA1 and RB1 and the wire feeding directions RA2 and RB2. In the above-described embodiment, the directions RA1 and RB1 for winding the line are opposite to each other, and the directions RA2 and RB2 for feeding the line are opposite to each other. On the other hand, as shown in FIG. 12, the direction of winding the line 48A around the yarn winding drum 46A and the direction of The winding direction of the line 48B with respect to the yarn winding drum 46B may be adjusted. In this case, the winding direction of the roll sheet 54A around the sheet winding drum 52A and the winding direction of the roll sheet 54B around the sheet winding drum 52B are similarly adjusted.

In each of the above-described embodiments, the rotating shafts 42A and 42B are rotatable independently of each other. By doing so, both may be rotated synchronously. As a result, the rotating shaft 42A can be reliably rotated in the line winding direction RA1 in conjunction with the upward movement of the counterweight 36 in the Z-axis direction, and can be rotated in conjunction with the downward movement of the counterweight 36 in the Z-axis direction. The shaft 42B can be reliably rotated in the line winding direction RB1.

In each of the above-described embodiments, as an example of a shape measuring device for measuring the shape of the work W, the roundness measuring device 10 for measuring the roundness and straightness of the work W was described. The present invention can also be applied to a shape measuring apparatus for measuring other shapes such as parallelism, squareness, surface roughness, waviness, and dimensions of the workpiece W.

10... Roundness measuring device,
12 ... Base,
18 ... linear drive mechanism,
20 ... measurement arm,
20a... Arm body,
24 ... housing,
26 ... drive shaft,
28 carriage,
30 ... counterweight mechanism,
36 ... counterweight,
38 ... interlocking mechanism,
40 Roll screen mechanism,
42A, 42B ... rotating shafts,
46A, 46B... yarn winding drums,
48A, 48B ... Tegus,
50A, 50B ... tension springs,
52A, 52B... sheet winding drums,
524, 54B... roll sheet,
56 ... connecting part,
56a... Insertion opening,
60A, 60B... yarn winding drums,
70A, 70B... sheet winding mechanism,
74A, 74B ... drive drums,
92A, 92B ... connecting part

Claims (8)

a drive shaft parallel to the vertical direction;
a measuring arm holding a contact-type or non-contact-type detector, the measuring arm having an arm body extending in a first direction perpendicular to the vertical direction;
a mover that holds the arm body and moves in the vertical direction along the drive shaft integrally with the measurement arm;
a vertically movable counterweight provided at a position shifted in a second direction perpendicular to both the vertical direction and the first direction with respect to the drive shaft;
an interlocking mechanism that connects the mover and the counterweight and moves the counterweight in a direction opposite to the mover in conjunction with the vertical movement of the mover;
a pair of rotating shafts sandwiching the moving path of the mover and the counterweight from the vertical direction and parallel to the second direction;
a sheet winding body provided for each of the rotating shafts, the sheet winding body rotating about a center of rotation parallel to the rotating shaft in accordance with the rotation of the rotating shaft;
A cord body provided for each of the rotating shafts, one end of which is wound around the rotating shaft according to the rotation of the rotating shaft in the cord winding direction, and the cord winding direction of the rotating shaft is a rope that is paid out from the rotating shaft in accordance with the rotation in the opposite direction to pay out the rope, and whose other end is connected to the counterweight;
A sheet provided for each of the rotating shafts, one end side of which is wound up on the sheet winding body according to the rotation of the rotating shaft in the cord feeding direction, a sheet unwound from the sheet winding body according to the rotation;
a connecting portion connecting the other end sides of both the seats, the connecting portion having an insertion opening through which the arm main body portion is inserted;
A shape measuring device comprising: A cord winding body is fitted to the rotating shaft for each rotating shaft and rotates integrally with the rotating shaft,
The cord winding body winds the cord body according to the rotation of the rotating shaft in the cord winding direction, and pays out the cord body according to the rotation of the rotating shaft in the cord reeling-out direction. Item 1. The shape measuring device according to item 1. The cord winding body is formed in a tapered shape in which the diameter of the cord winding body gradually increases from one direction to the other direction in the second direction,
When the cord winding body rotates in the cord winding direction, the winding position of the cord body by the cord winding body gradually shifts in the one direction, and the cord winding body 3. The shape measuring device according to claim 2, wherein the winding position gradually shifts toward the other direction when the cord is rotated in the direction of drawing out the cord. The shape measuring apparatus according to any one of claims 1 to 3, wherein the sheet winding body is fitted around the rotating shaft and rotates integrally with the rotating shaft. A driving winding body that is fitted to the rotating shaft for each of the rotating shafts and rotates integrally with the rotating shaft, the driving winding body around which the sheet is wound,
The sheet winding body contacts the driving winding body through the sheet wound around the driving winding body, and is driven by the driving winding body in accordance with the rotation of the driving winding body. rotated in the opposite direction to the winding body,
One end side of the sheet is wound into a roll by the sheet winder rotating in the opposite direction to the driving winder in accordance with the rotation of the rotating shaft in the cord feeding direction. 4. A sheet according to any one of claims 1 to 3, wherein the sheet is delivered from the sheet winding body that rotates in a direction opposite to that of the driving winding body according to the rotation of the cord winding direction through the driving winding body. The shape measuring device according to . The shape measuring device according to any one of claims 1 to 5, wherein the cord and the counterweight are connected via a tension spring. The shape measuring apparatus according to any one of claims 1 to 6, wherein the connecting portion is provided separately from the mover. The shape measuring apparatus according to any one of claims 1 to 6, wherein the connecting portion is the mover.

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