JP7028610B2 - Valve device - Google Patents

Description

The present invention relates to a valve device.

Conventionally, inventions relating to a valve device for controlling the supply and stop of hydrogen gas from a gas tank to a fuel cell have been known (see Patent Document 1 below). The valve device described in Patent Document 1 includes a gas flow path, a body having an accommodating hole communicating with the gas flow path, an electromagnetic valve accommodated in the accommodating hole, and a joint member fixed to the body. ..

The solenoid valve has an internal flow path leading to the gas flow path of the body. Further, the solenoid valve has a cylindrical sleeve fitted in a housing hole of the body, an opening / closing portion for opening / closing the flow path, and a driving portion for opening / closing the opening / closing portion. A sealing member is arranged between the outer wall of the sleeve and the inner wall of the accommodating hole of the body.

Further, the body is provided with a joint connection opening which is downstream of the flow path of the sleeve and is open to the outer surface of the body. A joint member is attached and fixed to this joint connection opening. Further, the body is provided with a conduction path connected to the flow path of the sleeve of the solenoid valve. The joint member is provided with a check valve that alleviates the movement of the gas toward the sleeve side of the solenoid valve in this conduction path.

According to the invention described in Patent Document 1, it is possible to reduce the burden on the sealing member arranged between the sleeve and the body of the solenoid valve and prevent damage to the components of the solenoid valve. Has an effect.

Japanese Unexamined Patent Publication No. 2016-080001

Like the valve device described above, the valve device that controls the supply of gas from the storage unit such as a gas tank to the demand unit such as a fuel cell is a second from the middle of the first flow path extending from the gas inlet communicating with the storage unit. The flow path may be branched. The inventors of the present application have found a new problem that water contained in the gas may infiltrate into the second flow path when a swirling flow of the gas flowing through the first flow path is generated in such a case.

The present invention provides a valve device capable of suppressing the intrusion of water contained in the gas flowing through the first flow path into the second flow path branched from the middle of the first flow path extending from the gas inlet. ..

One aspect of the present invention is a valve including a main body having a gas inlet and a gas outlet, a gas flow path provided in the main body and connecting the gas inlet and the gas outlet, and a valve for opening and closing the gas flow path. In the device, the gas flow path includes a first flow path extending from the gas inlet and a second flow path branching from a branch point of the first flow path, and the first flow path is the branch. The valve device is characterized in that the cross-sectional area of the downstream portion of the point is larger than the cross-sectional area of the upstream portion of the branch point.

In the valve device of the above aspect, for example, the gas inlet of the main body is connected to a storage unit such as a gas tank for storing high-pressure gas at a hydrogen station, and the gas outlet of the main body is for demand such as an in-vehicle gas tank mounted on a fuel cell vehicle. Connected to the unit. When the gas introduced into the gas inlet of the main body flows through the first flow path extending from the gas inlet, a swirling flow may occur on the upstream side of the branch point of the first flow path. Here, in the first flow path, the cross-sectional area of the downstream portion of the branch point is larger than the cross-sectional area of the upstream portion of the branch point.

Therefore, the swirling flow is expanded at the downstream portion of the branch point of the first flow path, and the gas flow is suppressed from spreading toward the second flow path. Therefore, it is possible to prevent the water contained in the gas from entering the second flow path. Further, it is possible to suppress a decrease in the flow velocity when the gas-liquid mixed flow of high-pressure gas and water reaches the downstream portion of the branch point of the first flow path. As a result, the water contained in the gas can be positively flowed from the upstream portion to the downstream portion of the branch point of the first flow path, and the water contained in the gas infiltrates into the second flow path. Can be suppressed.

Furthermore, by actively flowing water contained in the gas from the upstream portion to the downstream portion of the branch point of the first flow path, the backflow phenomenon is prevented and the pulsation of the gas at the gas inlet is suppressed. Can be done. This reduces the pulsation of the gas-liquid mixed flow of gas and water flowing through the first flow path, and facilitates the flow of water contained in the gas from the upstream side portion to the downstream side portion of the branch point of the first flow path. It is possible to prevent the water contained in the gas from entering the second flow path.

According to the valve device of the above aspect, it is possible to suppress the infiltration of water contained in the gas flowing through the first flow path into the second flow path branched from the middle of the first flow path extending from the gas inlet. ..

The schematic sectional view of the valve device which concerns on one Embodiment of this invention. An enlarged cross-sectional view of the valve device shown in FIG. An enlarged cross-sectional view illustrating the operation of the valve device shown in FIGS. 1 and 2. An enlarged cross-sectional view of a modified example of the valve device shown in FIGS. 1 and 2. An enlarged cross-sectional view illustrating a problem of a conventional valve device. FIG. 5 is an enlarged cross-sectional view of a modified example of the conventional valve device shown in FIG.

Hereinafter, an embodiment of the valve device according to the present invention will be described with reference to the drawings.

FIG. 1 is a schematic cross-sectional view of a valve device 100 according to an embodiment of the present invention. The valve device 100 of the present embodiment is mounted on a fuel cell vehicle, for example, and is connected to a storage unit such as a gas tank in which a high-pressure gas such as hydrogen gas is stored in a hydrogen station or the like. The valve device 100 of the present embodiment controls the supply of gas from such a storage unit to a demand unit that receives gas supply, such as a gas tank or a fuel cell automatically mounted on a fuel cell.

The valve device 100 includes, for example, a main body 10 provided with a gas inlet 11 and a gas outlet 12, a gas flow path 20 provided in the main body 10 connecting the gas inlet 11 and the gas outlet 12, and the gas flow path 20. It is provided with a plurality of valves V1, V2, V3, V4, which open and close the valve. Further, the gas flow path 20 provided in the main body 10 includes a first flow path 21 extending from the gas inlet 11 and a second flow path 22 branched from the branch point 21b of the first flow path 21. Although the details will be described later, in the valve device 100 of the present embodiment, the cross-sectional area of the downstream portion 21d of the branch point 21b of the first flow path 21 is a disconnection of the upstream side portion 21u of the branch point 21b of the first flow path 21. The biggest feature is that it is larger than the area. Hereinafter, the configuration of each part of the valve device 100 of the present embodiment will be described in detail.

In the following, the direction in which gas flows into the valve device 100 from the storage unit (not shown) is the horizontal direction, the direction orthogonal to the horizontal direction is the vertical direction, and the vertical and horizontal directions are the height direction. , Each part of the valve device 100 will be described. It should be noted that these directions are merely convenient directions for explaining each part of the valve device 100 of the present embodiment, and do not necessarily correspond to the horizontal direction and the vertical direction. Each figure shows a Cartesian coordinate system in which the lateral direction, the vertical direction, and the height direction of the valve device 100 of the present embodiment are the X direction, the Y direction, and the Z direction, respectively.

The main body 10 of the valve device 100 is made of a metal material such as a forged aluminum alloy. The main body 10 has a first recess 10a on one side in the horizontal direction (X direction), a second recess 10b and a third recess 10c on one side in the vertical direction (Y direction), and has a lateral recess. It has a fourth recess 10d on the other side and a fifth recess 10e on the other side in the vertical direction. The main body 10 has a gas inlet 11 at the bottom of the first recess 10a.

The main body 10 is provided with check valves V1 and V3 in the first recess 10a and the third recess 10c, respectively, and on-off valves V2 and V4 are provided in the second recess 10b and the fifth recess 10e of the main body 10, respectively. Has been done. The fourth recess 10d is closed, for example, by a closing member 13 fastened to the recess 10d with a screw. The fifth recess 10e is closed, for example, by a cover 15 fastened to the main body 10 by a bolt 14.

The first check valve V1 provided in the first recess 10a of the main body 10 has a connector portion V1a protruding outward from the first recess 10a at one end, and the other end is inserted into the first recess 10a. It is connected to a gas inlet 11 that opens at the bottom of the first recess 10a. The connector portion V1a of the first check valve V1 is connected to, for example, a gas supply pipe for supplying the high-pressure gas stored in the storage portion to the valve device 100. The first check valve V1 is configured to allow the gas flowing in from the opening at the end of the connector portion V1a to pass toward the gas inlet 11 of the main body 10 and block the gas flow in the reverse direction. ..

The gas flow path 20 provided inside the main body 10 has a first flow path 21 extending from the gas inlet 11 and a second flow path 22 branched from a branch point 21b in the middle of the first flow path 21. is doing. Further, the gas flow path 20 has, for example, a third flow path 23 that opens in the wall surface of the second recess 10b facing the height direction (Z direction) and extends in the height direction. Further, the gas flow path 20 is, for example, a fourth flow path 24 that opens in the bottom of the third recess 10c and the bottom of the fifth recess 10e and extends in the vertical direction (Y direction), and the fourth recess 10d. It has a fifth flow path 25 that opens to the bottom and extends laterally (X direction) and opens to the side wall of the bottom of the fifth recess 10e.

One end of the first flow path 21 is connected to the gas inlet 11, extends laterally from the gas inlet 11 in the gas inflow direction, bends at a substantially right angle from the gas inlet 11 and extends in the vertical direction, and the other end of the main body 10 It is open to the bottom of the second recess 10b. The first on-off valve V2 provided in the second recess 10b of the main body 10 has a valve body V2a which is provided so as to be movable in the vertical direction and opens and closes the opening at the other end of the first flow path 21. .. The first flow path 21 has a branch point 21b of the second flow path 22 in the middle of a portion extending in the vertical direction. Here, the branch point 21b of the first flow path 21 is, for example, an intersection of the center line L1 of the first flow path 21 extending in the vertical direction and the center line L2 of the second flow path 22 extending in the horizontal direction, or , The area near the intersection. The region near the intersection is, for example, a region including the intersection and the distance from the intersection is equal to or less than the radius of the first flow path 21.

FIG. 2 is an enlarged cross-sectional view of the valve device 100 shown in FIG. As described above, in the first flow path 21, the cross-sectional area of the downstream portion 21d of the branch point 21b is larger than the cross-sectional area of the upstream portion 21u of the branch point 21b. In the example shown in FIG. 1, the cross-sectional area of the downstream side portion 21d is, for example, 1.1 times or more and 3 times or less the cross-sectional area of the upstream side portion 21u, and more specifically, for example, a break of the upstream side portion 21u. It is 1.5 times or more and 2 times or less the area. Further, the first flow path 21 may have an inclined surface between the upstream side portion 21u and the downstream side portion 21d.

The second flow path 22 is branched from the branch point 21b of the first flow path 21, extends laterally, and opens to the side wall of the bottom of the fifth recess 10e, as shown in FIG. In the side wall of the bottom of the fifth recess 10e, the fifth flow path 25 opens at a position facing the opening of the second flow path 22. In the examples shown in FIGS. 1 and 2, the angle formed by the center line L2 of the second flow path 22 with respect to the center line L1 of the upstream portion 21u of the first flow path 21 is approximately 90 °. Further, in the example shown in FIG. 1, the center line L2 of the second flow path 22 and the center line L5 of the fifth flow path 25 coincide with each other. The cross-sectional area of the second flow path 22 and the cross-sectional area of the fifth flow path 25 are substantially the same, and are equal to or less than the cross-sectional area of the upstream portion 21u of the branch point 21b of the first flow path 21.

As shown in FIG. 1, the second on-off valve V4 provided in the fifth recess 10e is, for example, a solenoid valve, which is a sleeve V4a, a movable core V4b, a fixed core V4c, a solenoid V4d, and a solenoid V4d. It is equipped with a case V4e that covers the surface.

The sleeve V4a is formed in a cylindrical shape having a flow path inside. The sleeve V4a has an annular communication groove V4f extending in the circumferential direction of the sleeve V4a and communicating with the second flow path 22 and the fifth flow path 25, and a communication groove V4f extending in the axial direction of the sleeve V4a on the outer peripheral surface. It has a linear introduction path V4g that communicates with the valve chamber in the sleeve V4a. Further, the sleeve V4a is a valve seat provided between the valve chamber V4h communicating with the introduction passage V4g, the outlet passage V4i communicating with the valve chamber V4h and the fourth flow path 24, and the valve chamber V4h and the outlet passage V4i. It has V4j.

The movable iron core V4b has an outer diameter substantially equal to the inner diameter of the sleeve V4a, is housed in the sleeve V4a so as to be movable in the axial direction, and has a valve body V4k at the tip portion for opening and closing the valve seat V4j. The movable core V4b is urged toward the valve seat V4j in the axial direction extending in the vertical direction by a coil spring V4l arranged between the movable core V4b and the fixed core V4c.

In the second on-off valve V4, when the coil of the solenoid V4d is demagnetized, the movable iron core V4b is urged toward the valve seat V4j by the urging force of the coil spring V4l and the pressure of hydrogen gas, and the valve body V4k is valved. It sits on the seat V4j and the lead path V4i is closed. In this state, the gas supplied from the second flow path 22 reaches the valve chamber V4h in the sleeve V4a via the communication groove V4f, but does not reach the fourth flow path 24.

When the coil of the solenoid V4d is excited, the second on-off valve V4 is attracted to the fixed core V4c so that the movable core V4b moves away from the valve seat V4j against the urging force of the coil spring V4l. The valve body V4k is separated from the valve seat V4j, and the lead path V4i is opened. In this state, the gas supplied from the second flow path 22 reaches the valve chamber V4h in the sleeve V4a via the communication groove V4f and the introduction path V4g, and reaches the fourth flow from the valve chamber V4h via the lead path V4i. Reach road 24.

The second check valve V3 provided in the third recess 10c of the main body 10 has a connector portion V3a protruding outward from the third recess 10c at one end, and the other end is inserted into the third recess 10c. It is connected to a fourth flow path 24 that opens to the bottom of the third recess 10c. The connector portion V3a of the second check valve V3 is connected to, for example, a hydrogen gas supply pipe for supplying hydrogen gas to a fuel cell mounted on a fuel cell vehicle. The second check valve V3 is configured to allow the gas flowing in from the fourth flow path 24 to pass toward the opening at the end of the connector portion V3a and block the flow of the gas in the reverse direction.

As described above, the third flow path 23 opens in the wall surface of the second recess 10b facing the height direction (Z direction) and extends in the height direction, and is one of the height directions of the main body 10 (not shown). It is open to the side. The opening of the third flow path 23 (not shown) is connected to a demand portion such as an in-vehicle gas tank (not shown). When the gas supplied to the gas inlet 11 is filled in the in-vehicle gas tank through an opening (not shown) of the third flow path 23, the opening (not shown) of the third flow path 23 becomes the gas outlet 12. .. The third flow path 23 communicates with the first flow path 21 via the second recess 10b when the on-off valve V2 provided in the second recess 10b opens the opening of the first flow path 21, and opens and closes. When the valve V2 closes the opening of the first flow path 21, it is shut off from the first flow path 21 by the valve body V2a of the on-off valve V2.

Hereinafter, the operation of the valve device 100 according to the present embodiment will be described based on a comparison with a conventional valve device.

For example, in a hydrogen station, when high-pressure hydrogen gas stored in a storage unit such as a gas tank is filled in an in-vehicle gas tank mounted on a fuel cell vehicle, the supply pipe connected to the storage unit is connected to the valve device 100. It is connected to the connector portion V1a of the first check valve V1. Then, the opening at the end of the first flow path 21 is opened by the first on-off valve V2 of the valve device 100 to communicate the first flow path 21 and the third flow path 23, and the second on-off valve V4 is closed. The gas flow path 20 is cut off between the second flow path 22 and the fourth flow path 24. In this state, high-pressure hydrogen gas is supplied from the storage unit to the gas inlet 11 of the valve device 100 via the first check valve V1.

The hydrogen gas supplied from the storage unit to the valve device 100 via the first check valve V1 passes through the first check valve V1 and passes through the gas inlet 11 of the main body 10 to the gas flow path inside the main body 10. It flows into 20. The hydrogen gas flowing into the gas flow path 20 flows through the laterally extending portion of the first flow path 21, passes through the bent portion bent in the vertical direction, and passes through the upstream side portion 21u extending in the vertical direction. Then, at the branch point 21b, the gas is distributed to the downstream portion 21d of the first flow path 21 and the second flow path 22. Here, since the end of the second flow path 22 opposite to the branch point 21b is closed by the second on-off valve V4 of the valve device 100, the hydrogen gas that has passed through the branch point 21b is the second on-off valve. It does not reach the fourth flow path 24 ahead of V4.

Further, since the opening of the first flow path 21 at the bottom of the first recess 10a is opened by the first on-off valve V2 of the valve device 100, the hydrogen gas that has passed through the branch point 21b is the first flow path. It passes through the downstream portion 21d of 21 and flows into the second recess 10b of the main body 10. The hydrogen gas that has flowed into the second recess 10b of the main body 10 passes through the gas pipes connected to the gas outlet 12 of the third flow path 23 and the third flow path 23 that open in the wall surface of the second recess 10b. It is filled in an in-vehicle gas tank (not shown).

FIG. 5 is an enlarged cross-sectional view illustrating a problem of the conventional valve device 100X. Similar to the valve device 100 of the present embodiment, the conventional valve device 100X has, for example, a first flow path 21X extending laterally from the gas inlet 11 and bending in the vertical direction, and the vertical direction of the first flow path 21X. It has a second flow path 22X that branches laterally from the portion extending to. However, in the conventional valve device 100X, the upstream side portion 21Xu and the downstream side portion 21Xd of the branch point 21Xb of the first flow path 21X have the same cross-sectional area.

In this case, the gas G that has flowed into the first flow path 21X from the gas inlet 11 and has flowed laterally passes through the bent portion of the first flow path 21X that bends from the lateral direction to the vertical direction, and then passes through the bent portion of the first flow path 21X. A strong spiral swirling flow is generated at the portion extending in the vertical direction of. The swirling flow of the gas G generated in the portion extending in the vertical direction of the first flow path 21X is the water W contained in the gas G at the branch point 21Xb of the first flow path 21X due to the flow velocity in the circumferential direction of the first flow path 21X. Invades the second flow path 22X.

Further, when water W enters the second flow path 22X, the high-pressure gas G and the water W are mixed to form a gas-liquid mixed flow, and the volume is only increased as compared with the case where only the high-pressure gas G is used. It becomes difficult to compress. Therefore, the flow path cross-sectional area of the gas inlet 11 provided with the first check valve V1 is larger than the flow path cross-sectional area of the upstream side portion 21Xu and the downstream side portion 21Xd of the branch point 21Xb of the first flow path 21X. In this case, when the gas-liquid mixed flow of the high-pressure gas G and the water W reaches the downstream portion 21Xd of the branch point 21Xb of the first flow path 21X, the flow velocity decreases. Then, the water W contained in the high-pressure gas G may not fit in the downstream portion 21Xd of the branch point 21Xb of the first flow path 21X and may flow back and enter the second flow path 22X.

On the other hand, in the valve device 100 of the present embodiment, as described above, the main body 10 provided with the gas inlet 11 and the gas outlet 12 and the main body 10 provided with the gas inlet 11 and the gas outlet 12 are connected to each other. It includes a gas flow path 20 and a plurality of valves V1, V2, V3, V4 that open and close the gas flow path 20. Further, the gas flow path 20 provided in the main body 10 includes a first flow path 21 extending from the gas inlet 11 and a second flow path 22 branched from the branch point 21b of the first flow path 21. The cross-sectional area of the downstream portion 21d of the branch point 21b of the first flow path 21 is larger than the cross-sectional area of the upstream portion 21u of the branch point 21b of the first flow path 21.

FIG. 3 is an enlarged cross-sectional view illustrating the operation of the valve device 100 shown in FIGS. 1 and 2. In the valve device 100 of the present embodiment, when the gas G that has flowed into the first flow path 21 from the gas inlet 11 and has flowed in the lateral direction passes through the bent portion that bends from the lateral direction to the vertical direction of the first flow path 21. , A strong spiral swirling flow is generated at the upstream portion 21u of the branch point 21b extending in the vertical direction of the first flow path 21.

However, in the valve device 100 of the present embodiment, as described above, the cross-sectional area of the downstream portion 21d of the branch point 21b of the first flow path 21 is the upstream portion 21u of the branch point 21b of the first flow path 21. Larger than the cross-sectional area. Therefore, the swirling flow is expanded at the downstream portion 21d of the branch point 21b of the first flow path 21, and the flow of the gas G is suppressed from expanding toward the second flow path 22. Therefore, it is possible to prevent the water contained in the gas G from entering the second flow path 22.

Further, since the cross-sectional area of the downstream portion 21d of the branch point 21b of the first flow path 21 is larger than the cross-sectional area of the upstream portion 21u of the branch point 21b of the first flow path 21, high-pressure gas G and water are used. It is possible to suppress a decrease in the flow velocity when the gas-liquid mixed flow of the above reaches the downstream portion 21d of the branch point 21b of the first flow path 21. As a result, the water contained in the gas G can be positively flowed from the upstream portion 21u of the branch point 21b of the first flow path 21 toward the downstream portion 21d, and the water contained in the gas G can be second. It is possible to suppress the intrusion into the flow path 22.

Further, by positively flowing the water contained in the gas G from the upstream portion 21u of the branch point 21b of the first flow path 21 toward the downstream portion 21d, the backflow phenomenon is prevented and the connection to the gas inlet 11 is established. It is possible to suppress the pulsation of the gas G in the first check valve V1. As a result, the pulsation of the gas-liquid mixed flow of gas G and water flowing through the first flow path 21 is reduced, and the gas G is directed from the upstream side portion 21u to the downstream side portion 21d of the branch point 21b of the first flow path 21. It is possible to make it easier for the contained water to flow.

For example, in a hydrogen station, when the in-vehicle gas tank mounted on a fuel cell vehicle is completely filled with hydrogen gas, the first on-off valve V2 shown in FIG. 1 is closed, and the check valve V1 connector connected to the gas inlet 11 is connected. The supply pipe for supplying hydrogen gas is removed from the portion V1a. Then, the second on-off valve V4 is opened to communicate the second flow path 22 and the fourth flow path 24, and further, the first on-off valve V2 is opened to communicate the third flow path 23 and the first flow path 21. The hydrogen gas supplied from the vehicle-mounted gas tank to the third flow path 23 is transferred to the fuel cell mounted on the fuel cell vehicle via the first flow path 21, the second flow path 22, and the fourth flow path 24. Can be supplied to.

As described above, according to the present embodiment, the gas G flowing through the first flow path 21 is connected to the second flow path 22 branched from the middle of the first flow path 21 extending from the gas inlet 11 communicating with the storage unit. It is possible to provide a valve device 100 capable of suppressing the infiltration of water contained in the valve device 100. The valve device according to the present invention is not limited to the valve device 100 of the present embodiment. Hereinafter, a modified example of the valve device 100 of the present embodiment will be described.

FIG. 4 is an enlarged cross-sectional view corresponding to FIG. 3 showing a modified example of the valve device 100 according to the present embodiment. In this modification, the angle θ1 formed by the center line L1 of the upstream portion 21u of the branch point 21b of the first flow path 21 and the center line of the second flow path 22 and L2 is an acute angle, and the branch of the first flow path 21 The angle θ2 formed by the center line L1 of the downstream portion 21d of the point 21b and the center line L2 of the second flow path 22 is an acute angle. That is, the angle θ1 formed by the center line L1 of the upstream side portion 21u of the first flow path 21 and the center line L2 of the second flow path 22 is the center line L1 and the second of the downstream side portion 21d of the first flow path 21. It is smaller than the angle θ2 formed by the center line L2 of the flow path 22. As a result, it is possible to more effectively suppress the infiltration of water contained in the gas into the second flow path 22.

FIG. 6 is an enlarged cross-sectional view of a modified example of the conventional valve device 100X shown in FIG. In the modified example of the conventional valve device 100X shown in FIG. 6, the upstream side portion 21Xu and the downstream side portion 21Xd of the branch point 21Xb of the first flow path 21X have the same cross-sectional area, and the upstream side of the first flow path 21X. The angle θX1 formed by the center line LX1 of the portion 21Xu and the center line LX2 of the second flow path 22X forms the center line LX1 of the downstream side portion 21Xd of the first flow path 21X and the center line LX2 of the second flow path 22X. It is smaller than the angle θX2. In this case, the infiltration of water into the second flow path 22X can be suppressed as compared with the conventional valve device 100X shown in FIG. 5, but the valve according to the embodiment of the present invention shown in FIGS. 1 to 3. Compared with the device 100, the effect of suppressing the infiltration of water into the second flow path 22X is low.

Although the embodiment of the present invention has been described in detail with reference to the drawings, the specific configuration is not limited to this embodiment, and there are design changes and the like within a range not deviating from the gist of the present invention. Also, they are included in the present invention.

10 Main body 11 Gas inlet 12 Gas outlet 20 Gas flow path 21 First flow path 21b Branch point 21d Downstream side part 21u Upstream side part 22 Second flow path 100 Valve device V1 valve V2 valve V3 valve V4 valve

Claims (2)

A valve device including a main body having a gas inlet and a gas outlet, a gas flow path provided in the main body for connecting the gas inlet and the gas outlet, and a valve for opening and closing the gas flow path.
The gas flow path includes a first flow path extending from the gas inlet and a second flow path branching from a branch point of the first flow path.
The first flow path has a bent portion bent between the gas inlet and the branch point, and the cross-sectional area of the downstream portion of the branch point is larger than the cross-sectional area of the upstream portion of the branch point. A valve device characterized by being large. The valve device according to claim 1, wherein the bent portion is a portion that bends from the lateral direction to the vertical direction of the first flow path.

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