JP7014275B2 - How to install the sensor module and sensor - Google Patents

Description

The present invention relates to a sensor module and a method of installing a sensor.

Environmental monitoring using various sensors is becoming more important for quality control and safety control at production sites in the production industry.

Patent Document 1 describes a waterproof vibration detector in which a piezoelectric vibration detector is built in a waterproof case. Specifically, it is described that mounting is facilitated and the reliability of waterproofness is improved by screwing the waterproof case from the inside through a mounting hole provided in the piezoelectric vibration detection unit.

Patent Document 2 describes a detector in which a vibration detection element is housed in a sensor case. Specifically, it is described that the waterproof performance is ensured by filling the cable outlet formed through the sensor case with a waterproof material.

Jitsukaihei 1-95634 Gazette Japanese Unexamined Patent Publication No. 2007-108187

However, heavy industry plants and the like are in harsh environments such as wind and rain, high temperature, strong vibration, and noise, and it is difficult to provide sufficient durability, specifically waterproofness and heat resistance.

The techniques of Patent Documents 1 and 2 are not sufficient in waterproofness and heat resistance. For example, the techniques of Patent Documents 1 and 2 have not been able to cope with vibration detection in a high temperature environment.

An object of the present invention is to provide a sensor module having excellent waterproofness and heat resistance, and a method for installing a sensor.

The first sensor module of the present invention is
A sensor with at least a part of the surface facing the detection target,
With the first heat conductive covering member,
Waterproof and breathable second covering member,
A water absorbing material located between the sensor and the first covering member is provided.
The first covering member is separated from the sensor and surrounds the sensor when viewed from a direction perpendicular to the partial surface.
The second covering member covers the area between the sensor and the first covering member .
The second covering member is fixed to one end face of the first covering member.
The second covering member is in contact with a surface of the sensor on the opposite side of the surface of the sensor .
The second sensor module of the present invention is
A sensor with at least a part of the surface facing the detection target,
With the first heat conductive covering member,
Waterproof and breathable second covering member,
A water absorbing material located between the sensor and the first covering member,
A third that is located between the sensor and the first covering member, is separated from the sensor and the first covering member when viewed from a direction perpendicular to the partial surface, and surrounds the sensor. Equipped with a covering member,
The first covering member is separated from the sensor and surrounds the sensor when viewed from a direction perpendicular to the partial surface.
The second covering member covers the area between the sensor and the first covering member.

The method of installing the first sensor of the present invention is as follows.
It is a method of installing a sensor on the detection target,
A sensor module including the sensor is placed in the recess provided in the detection target, and the sensor module is placed.
The sensor module is
With the sensor whose at least a part of the surface faces the detection target,
With the first heat conductive covering member,
Waterproof and breathable second covering member,
A water absorbing material located between the sensor and the first covering member is provided.
The first covering member is separated from the sensor and surrounds the sensor when viewed from a direction perpendicular to the partial surface.
The second covering member covers the area between the sensor and the first covering member .
The second covering member is fixed to one end face of the first covering member.
The second covering member is in contact with a surface of the sensor on the opposite side of the surface of the sensor .
The method of installing the second sensor of the present invention is as follows.
It is a method of installing a sensor on the detection target,
A sensor module including the sensor is placed in the recess provided in the detection target, and the sensor module is placed.
The sensor module is
With the sensor whose at least a part of the surface faces the detection target,
With the first heat conductive covering member,
Waterproof and breathable second covering member,
A water absorbing material located between the sensor and the first covering member,
A third that is located between the sensor and the first covering member, is separated from the sensor and the first covering member when viewed from a direction perpendicular to the partial surface, and surrounds the sensor. Equipped with a covering member,
The first covering member is separated from the sensor and surrounds the sensor when viewed from a direction perpendicular to the partial surface.
The second covering member covers the area between the sensor and the first covering member.

INDUSTRIAL APPLICABILITY According to the present invention, it is possible to provide a sensor module having excellent waterproofness and heat resistance and a method for installing a sensor.

It is sectional drawing which illustrates the structure of the sensor module which concerns on 1st Embodiment. FIG. 1 is a cross-sectional view taken along the line AA of FIG. It is a figure which illustrates the usage environment of a sensor module. It is a figure for demonstrating the 2nd example of the installation method of the sensor which concerns on 1st Embodiment. It is a figure for demonstrating the 2nd example of the installation method of the sensor which concerns on 1st Embodiment. It is a figure for demonstrating the 2nd example of the installation method of the sensor which concerns on 1st Embodiment. It is sectional drawing which illustrates the structure of the sensor module which concerns on 2nd Embodiment. It is sectional drawing which illustrates the structure of the sensor module which concerns on 3rd Embodiment. It is sectional drawing which shows the example which the sensor module includes a plurality of third covering members. It is sectional drawing which illustrates the structure of the sensor module which concerns on 4th Embodiment. It is sectional drawing which illustrates the structure of the sensor module which concerns on 5th Embodiment. It is a figure for demonstrating the method of attaching the sensor module which concerns on 5th Embodiment to a detection target. It is sectional drawing which illustrates the structure of the sensor module which concerns on 6th Embodiment. It is sectional drawing which illustrates the structure of the sensor module which concerns on 7th Embodiment. It is a figure for demonstrating the installation method of the sensor which concerns on 8th Embodiment. It is a figure for demonstrating the installation method of the sensor which concerns on 8th Embodiment.

Hereinafter, embodiments of the present invention will be described with reference to the drawings. In all drawings, similar components are designated by the same reference numerals, and the description thereof will be omitted as appropriate.

(First Embodiment)
FIG. 1 is a cross-sectional view illustrating the configuration of the sensor module 10 according to the first embodiment. FIG. 2 is a cross-sectional view taken along the line AA of FIG. However, the internal structure of the sensor 100 is omitted.

The sensor module 10 according to the present embodiment includes a sensor 100, a heat conductive first covering member 110, and a waterproof and breathable second covering member 120. At least a part of the surface 103 of the sensor 100 faces the detection target. The first covering member 110 is separated from the sensor 100 and surrounds the sensor 100 when viewed from a direction perpendicular to a part of the surface 103. The second covering member 120 covers the area between the sensor 100 and the first covering member 110. This will be described in detail below.

The sensor 100 provided in the sensor module 10 is not particularly limited, and may be, for example, a vibration sensor, an acoustic sensor, a displacement sensor, a temperature sensor, or the like. In the present embodiment, an example in which the sensor 100 is a vibration sensor will be described below.

A cable 102 is connected to the sensor 100, and power is supplied and signals are input and output via the cable 102. Further, the sensor 100 includes at least one surface 103 as a detection main surface, and performs sensing on an object facing the surface 103. When the sensor 100 is a vibration sensor, the sensor 100 detects the vibration of the surface facing the surface 103. Further, the sensor 100 detects vibration in a direction perpendicular to the surface 103, for example. However, the sensor 100 is not limited to the direction perpendicular to the surface 103, and may detect vibrations in a direction parallel to the surface 103, or may simultaneously detect vibrations in three directions orthogonal to the surface 103. Inside the sensor 100, for example, a MEMS vibration element, a detection circuit, or the like is included as a detection element.

The shape of the sensor 100 is not particularly limited, but is, for example, a columnar column such as a columnar column, a square columnar column, or a polygonal columnar column. When the sensor 100 is a pillar, the surface 103 is, for example, a surface corresponding to the bottom surface of the pillar.

FIG. 3 is a diagram illustrating a usage environment of the sensor module 10. In the example of this figure, the sensor module 10 is embedded and fixed in the detection target 20. In the present embodiment, the detection target 20 is not particularly limited, but is, for example, a conveyor, a crane, a filter, a sieve, a transport container, a freight car, a pipe, or the like. For example, the detection target 20 may have a high temperature of −20 ° C. or higher and 100 ° C. or lower.

The first covering member 110 is a member having thermal conductivity, and is made of a metal such as stainless steel. However, the first covering member 110 may be made of carbon, resin, or the like. The thickness of the first covering member 110 in the cross section perpendicular to the surface 103 (corresponding to FIG. 1) is, for example, 0.1 mm or more and 100 mm or less.

The first covering member 110 is separated from the sensor 100 and surrounds the sensor 100 when viewed from a direction perpendicular to a part of the surface 103 (corresponding to the AA cross section of FIG. 1). Here, it is preferable that the first covering member 110 surrounds the sensor 100 without a break. Then, the waterproofness of the sensor module 10 can be further improved.

As long as the first covering member 110 surrounds the sensor 100, its shape is not particularly limited, but it has, for example, a cylindrical shape. In the examples of FIGS. 1 and 2, the first covering member 110 has a cylindrical shape. If the first covering member 110 has a cylindrical shape, stress concentration is unlikely to occur in a specific place even when the first covering member 110 undergoes thermal expansion or contraction, and high durability can be obtained.

The second covering member 120 is a member having waterproof and breathable properties. The second covering member 120 is, for example, a flexible film-like member. The second covering member 120 includes, for example, a porous stretched polytetrafluoroethylene film. The degree of waterproof / moisture permeability of the second covering member 120 is not particularly limited, but for example, the moisture permeability resistance is 0.19 m ² · s · Pa / μg or less, and the waterproof property is 10 kPa or more.

The second covering member 120 covers the area between the sensor 100 and the first covering member 110. In other words, when viewed from the direction perpendicular to the surface 103, the second covering member 120 overlaps the region between the first covering member 110 and the sensor 100, and covers the entire region between the first covering member 110 and the sensor 100. Covering. In the example of FIG. 1, the second covering member 120 is fixed to one end face 111 of the first covering member 110. The space between the second covering member 120 and the first covering member 110 is filled with a resin, an adhesive, or the like to prevent water from entering the inside of the first covering member 110 as much as possible. The second covering member 120 may have a water-repellent film on the surface opposite to the first covering member 110.

Further, in the present embodiment, the second covering member 120 is in contact with the surface 104 on the side opposite to the surface 103 of a part of the sensor 100. However, an adhesive or the like may be interposed between the surface 104 and the second covering member 120. The second covering member 120 has a through hole through which the cable 102 is passed. The cable 102 is connected to the sensor 100 and extends to the opposite side (outside) of the sensor 100 of the second covering member 120. In the example of FIG. 1, the cable 102 penetrates the central portion of the second covering member 120, but the position through which the cable 102 penetrates is not particularly limited. Further, the gap in the through hole of the second covering member 120 is filled with a resin, an adhesive or the like and is closed.

The sensor module 10 of this embodiment further includes a bottom member 140. In the example of this figure, the bottom member 140 is fixed to the end surface 112 on the side opposite to the end surface 111 of one of the first covering members 110, and covers the region between the sensor 100 and the first covering member 110. ing. In other words, when viewed from a direction perpendicular to the surface 103, the bottom member 140 overlaps the region between the first covering member 110 and the sensor 100 and covers the entire region between the first covering member 110 and the sensor 100. There is. The bottom member 140 is a plate-shaped member, and its thickness is, for example, 0.1 mm or more and 100 mm or less. Instead of fixing the bottom member 140 to the end surface 112 of the first covering member 110, the end surface (outer peripheral surface) of the bottom member 140 is fixed to the inner surface (the surface facing the sensor 100) of the first covering member 110. You may be.

The bottom member 140 is made of a metal such as stainless steel, and the bottom member 140 and the first covering member 110 are joined by welding, for example. The bottom member 140 may be a member manufactured by cutting out integrally with the first covering member 110. However, the bottom member 140 may be made of carbon, resin, or the like. Further, the bottom member 140 and the first covering member 110 may be fixed to each other with a screw stopper or an adhesive via a heat-resistant packing. When fixed with an adhesive, the space between the bottom member 140 and the first covering member 110 is completely filled with an adhesive or the like so that water does not enter the inside of the first covering member 110 as much as possible. It is preferable to have.

From the viewpoint of preventing heat conduction from the detection target 20 or the first covering member 110 to the sensor 100, the bottom member 140 is preferably a resin member having low heat conductivity. When the bottom member 140 is a metal member, a carbon member, or the like having high thermal conductivity, a paste or the like having low thermal conductivity is interposed between the first covering member 110 and the bottom member 140. Is preferable.

In the present embodiment, the sensor 100 is located in a space surrounded by the first covering member 110, the second covering member 120, and the bottom member 140. Further, the first covering member 110 is separated from the sensor 100, and the air between the sensor 100 and the first covering member 110 functions as a heat insulating material. Further, the gas between the sensor 100 and the first covering member 110 enters and exits through the waterproof and breathable second covering member 120, and as a result, the heat dissipation performance is improved. Therefore, it is possible to prevent the sensor 100 from becoming too hot. Therefore, a sensor module 10 that is waterproof and can be used in a high temperature environment can be obtained.

In addition to the sensor 100, a signal processing means attached to the sensor 100 may be separately provided in the region surrounded by the second covering member 120, the first covering member 110, and the bottom member 140. In that case, for example, the sensor 100 including the detection element and the signal processing means may be connected by wiring, and the cable 102 may be pulled out from the signal processing means.

A method of installing the sensor 100 according to the present embodiment on the detection target 20 will be described below. Hereinafter, two methods, a first example and a second example, will be described as a method of installing the sensor 100. First, in the first example of the installation method, the sensor module 10 including the sensor 100 is installed in the recess provided in the detection target 20. The sensor module 10 has the above-mentioned configuration. That is, the sensor module 10 includes a sensor 100, a heat conductive first covering member 110, and a waterproof and breathable second covering member 120. At least a part of the surface 103 of the sensor 100 faces the detection target 20. The first covering member 110 is separated from the sensor 100 and surrounds the sensor 100 when viewed from a direction perpendicular to a part of the surface 103. The second covering member 120 covers the area between the sensor 100 and the first covering member 110.

In this method, the sensor module 10 including the sensor 100 is assembled in advance in a factory or the like to the state shown in FIG. 1, and the sensor 100 is installed as shown in FIG. 3 by fitting the sensor module 10 into the detection target 20. can. The sensor module 10 and the detection target 20 may be filled with a thermally conductive paste, an adhesive, or the like.

4 to 6 are diagrams for explaining a second example of the method of installing the sensor 100 according to the first embodiment. In this example, the sensor 100 and the first covering member 110 are arranged apart from each other in the recess 201 provided in the detection target 20, and the region between the sensor 100 and the first covering member 110 is the second covering member 120. Cover with. By doing so, the sensor module 10 is arranged in the recess 201. Here, the sensor 100 is arranged so that at least a part of the surface 103 faces the detection target 20, and the first covering member 110 is arranged so as to surround the sensor 100.

Further, in this example, the bottom member 140 is further arranged in the recess 201 of the detection target 20. In the method of this example, the sensor module 10 is assembled in the recess 201, for example, at a site where the sensor 100 is used or at a manufacturing site such as a device which is a detection target 20. This will be described in detail below.

First, the bottom member 140 is arranged in the recess 201 provided in the detection target 20 as shown in FIG. 4 as shown in FIG. The recess 201 has the same shape as the outer shape of the first covering member 110 when viewed from the direction perpendicular to the bottom surface of the recess 201, and is larger than the outer shape of the first covering member 110. When the bottom member 140 is a member having high thermal conductivity, it is preferable that a heat insulating member having low thermal conductivity is sandwiched between the bottom member 140 and the detection target 20.

Next, the sensor 100 and the first covering member 110 are arranged on the bottom member 140 as shown in FIG. The sensor 100 and the first covering member 110 can be fixed to the bottom member 140 by screwing using fasteners or the like, or by using an adhesive or the like.

Next, the second covering member 120 is arranged so as to cover the area between the sensor 100 and the first covering member 110. At this time, the cable 102 is pulled out from the through hole of the second covering member 120. Then, the edge of the second covering member 120 is fixed to the sensor 100, and the through hole of the second covering member 120 is filled with an adhesive or the like. Then, the sensor 100 is arranged on the detection target 20 as shown in FIG.

The orientation of the surface of the detection target 20 to which the sensor module 10 is attached is not particularly limited. For example, the sensor module 10 may be mounted on the wall surface of the detection target 20 so that the surface 103 of the sensor 100 is parallel to the vertical direction, or the surface 103 may be mounted so as to be perpendicular to the vertical direction. good. Further, the surface 103 may be attached so as to face the sky.

Further, the sensor module 10 may be entirely embedded in the recess 201 of the detection target 20, or may partially protrude from the recess 201 of the detection target 20.

Next, the operation and effect of this embodiment will be described. According to the method of installing the sensor module 10 and the sensor 100 according to the present embodiment, since the first covering member 110 is arranged away from the sensor 100, the air between the sensor 100 and the first covering member 110 is a heat insulating material. Functions as. Further, since the region between the sensor 100 and the first covering member 110 is covered with the second covering member 120, the sensor module 10 is waterproof. Further, the gas between the sensor 100 and the first covering member 110 enters and exits through the waterproof and breathable second covering member 120, and as a result, the heat dissipation performance is improved. Therefore, it is possible to prevent the sensor 100 from becoming too hot. Therefore, a sensor module 10 that is waterproof and can be used in a high temperature environment can be obtained.

(Second embodiment)
FIG. 7 is a cross-sectional view illustrating the configuration of the sensor module 10 according to the second embodiment. This figure corresponds to FIG. 1 of the first embodiment. The sensor module 10 according to the present embodiment is the same as the sensor module 10 according to the first embodiment except that the water absorbing material 150 located between the sensor 100 and the first covering member 110 is further provided. This will be described in detail below.

The water absorbing material 150 is, for example, a porous material, and is made of a heat-resistant material such as a sodium polyacrylate derivative. FIG. 7 shows an example in which the water absorbing material 150 is in contact with the sensor 100 and the first covering member 110, but the water absorbing material 150 may not be in contact with at least one of the sensor 100 and the first covering member 110. .. Further, in this figure, an example in which the water absorbing material 150 is in contact with the bottom member 140 and the second covering member 120 is shown, but the water absorbing material 150 is in contact with at least one of the bottom member 140 and the second covering member 120. It does not have to be. The water absorbing material 150 can be arranged before the region between the sensor 100 and the first covering member 110 is covered with the second covering member 120.

Next, the operation and effect of this embodiment will be described. In this embodiment, the same actions and effects as those in the first embodiment can be obtained. In addition, even if water enters the inside of the sensor module 10, the water absorbing material 150 absorbs the water to prevent the water from reaching the sensor 100. Further, the moisture absorbed by the water absorbing material 150 evaporates due to the heat transmitted from the first covering member 110, and the generated water vapor is discharged to the outside of the sensor module 10 through the moisture permeable second covering member 120. In this way, when the water evaporates, heat is taken away, and the temperature around the sensor 100 can be lowered. Therefore, it is possible to obtain the sensor module 10 which is more waterproof and has excellent heat resistance.

(Third embodiment)
FIG. 8 is a cross-sectional view illustrating the configuration of the sensor module 10 according to the third embodiment. This figure corresponds to FIG. 1 of the first embodiment. The sensor module 10 according to the present embodiment is the same as the sensor module 10 according to the first or second embodiment except that the third covering member 130 is further provided. FIG. 8 shows an example in which the sensor module 10 includes the water absorbing material 150 corresponding to the second embodiment. This will be described in detail below.

The third covering member 130 is located between the sensor 100 and the first covering member 110, and is separated from the sensor 100 and the first covering member 110 when viewed from a direction perpendicular to the surface 103. Further, the third covering member 130 surrounds the sensor 100 when viewed from a direction perpendicular to the surface 103. When the first covering member 110 has a cylindrical shape, for example, the third covering member 130 also has a cylindrical shape, and the third covering member 130 and the first covering member 110 are centered on the sensor 100 when viewed from a direction perpendicular to the surface 103. They are arranged concentrically. The third covering member 130 is a heat conductive member, and is a member made of metal such as stainless steel, carbon, resin, or the like. The third covering member 130 can be arranged before the region between the sensor 100 and the first covering member 110 is covered with the second covering member 120.

FIG. 9 is a cross-sectional view showing an example in which the sensor module 10 includes a plurality of third covering members 130. As shown in this figure, the sensor module 10 may include a plurality of third covering members 130. In this case, the plurality of third covering members 130 are separated from each other. By providing the plurality of third covering members 130, a sensor module 10 having further excellent waterproofness and heat resistance can be obtained.

In FIGS. 8 and 9, the water absorbing material 150 is between the first covering member 110 and the third covering member 130, between the third covering member 130 and the sensor 100, and between the plurality of third covering members 130. However, the water absorbing material 150 may not be provided in at least a part of the gaps.

Next, the operation and effect of this embodiment will be described. In this embodiment, the same actions and effects as those in the first embodiment can be obtained. In addition, the heat from the first covering member 110 is diffused by the third covering member 130, so that the heat is efficiently transferred to the gas and the water absorbing material 150 between the first covering member 110 and the sensor 100. Therefore, the heat dissipation efficiency of the sensor module 10 is further improved.

(Fourth Embodiment)
FIG. 10 is a cross-sectional view illustrating the configuration of the sensor module 10 according to the fourth embodiment. This figure corresponds to FIG. 1 of the first embodiment. The sensor module 10 according to the present embodiment is at least one of the first to third embodiments except that the end portion of the sensor 100 opposite to the surface 103 penetrates the second covering member 120. This is the same as the sensor module 10 related to the above. FIG. 10 shows an example in which the sensor module 10 includes the water absorbing material 150 corresponding to the second embodiment. This will be described in detail below.

In this embodiment, the sensor 100 penetrates the second covering member 120. That is, the surface 104 of the sensor 100 opposite to the surface 103 is located on the side opposite to the first covering member 110 when viewed from the second covering member 120. The space between the sensor 100 and the second covering member 120 is filled with a resin, an adhesive, or the like to block the sensor 100. Also in the sensor module 10 of the present embodiment, since at least the surface 103 is located between the second covering member 120 and the detection target 20, it is not exposed to excessive moisture. Therefore, it is possible to prevent an adverse effect on the sensor 100.

Next, the operation and effect of this embodiment will be described. Also in this embodiment, the same actions and effects as those in the first embodiment can be obtained.

(Fifth Embodiment)
FIG. 11 is a cross-sectional view illustrating the configuration of the sensor module 10 according to the fifth embodiment. This figure corresponds to FIG. 1 of the first embodiment. The sensor module 10 according to the present embodiment is among the first to fourth embodiments except that the first covering member 110 has the first screw portion 113 on the surface opposite to the surface facing the sensor 100. This is the same as the sensor module 10 according to at least one of them. FIG. 11 shows an example in which the sensor module 10 includes the water absorbing material 150 corresponding to the second embodiment. This will be described in detail below.

In the present embodiment, the first covering member 110 has a cylindrical shape. The first covering member 110 has a first screw portion 113 on a surface opposite to the surface facing the sensor 100.

FIG. 12 is a diagram for explaining a method of attaching the sensor module 10 according to the fifth embodiment to the detection target 20. The sensor module 10 according to this embodiment is attached to the detection target 20 as follows. First, a second screw portion 202 is provided on the side wall of the recess 201 of the detection target 20. That is, the recess 201 is a screw hole. The sensor module 10 assembled in advance is screwed into the sensor module 10, and the sensor module 10 is embedded in the recess 201 by screwing the first screw portion 113 and the second screw portion 202.

Next, the operation and effect of this embodiment will be described. In this embodiment, the same actions and effects as those in the first embodiment can be obtained. In addition, according to the sensor module 10 according to the present embodiment, since the sensor 100 is firmly fixed to the detection target 20, stable detection is possible even when the detection target 20 vibrates violently. ..

(Sixth Embodiment)
FIG. 13 is a cross-sectional view illustrating the configuration of the sensor module 10 according to the sixth embodiment. This figure corresponds to FIG. 1 of the first embodiment. The sensor module 10 according to the present embodiment is the same as the sensor module 10 according to at least one of the first to fourth embodiments except that the sensor module 10 is not embedded in the detection target 20. FIG. 13 shows an example corresponding to the second embodiment. This will be described in detail below.

The bottom member 140 according to the present embodiment has a plurality of mounting portions 141 protruding to the outside (opposite side to the sensor 100) from the outer periphery of the first covering member 110 when viewed from a direction perpendicular to the surface 103. The mounting portion 141 is provided with a through hole.

The sensor module 10 according to the present embodiment is fixed to the detection target 20 by screwing a bolt 160 through the through hole of the mounting portion 141 into the screw hole provided in the detection target 20.

Next, the operation and effect of this embodiment will be described. In this embodiment, the same actions and effects as those in the first embodiment can be obtained. In addition, the sensor module 10 can be attached without providing the recess 201 in the detection target 20.

(7th Embodiment)
14 is a cross-sectional view illustrating the configuration of the sensor module 10 according to FIGS. 14 and 7. This figure corresponds to FIG. 1 of the first embodiment. The sensor module 10 according to the present embodiment is a sensor according to at least one of the first to fourth embodiments, except that the mounting portion 114 of the first covering member 110 is fixed to the detection target 20 with a bolt 160. Similar to module 10. FIG. 14 shows an example corresponding to the second embodiment. This will be described in detail below.

The first covering member 110 according to the present embodiment has a plurality of mounting portions 114 protruding outside the outer periphery of the first covering member 110 (on the side opposite to the sensor 100) when viewed from a direction perpendicular to the surface 103. The mounting portion 114 is provided with a through hole.

The sensor module 10 according to the present embodiment is fixed to the detection target 20 by screwing a bolt 160 through the through hole of the mounting portion 114 into the screw hole provided in the detection target 20.

Next, the operation and effect of this embodiment will be described. In this embodiment, the same actions and effects as those in the first embodiment can be obtained. In addition, since the sensor module 10 is firmly fixed to the detection target 20, stable detection is possible even when the detection target 20 vibrates violently.

(8th Embodiment)
15 and 16 are diagrams for explaining the installation method of the sensor 100 according to the eighth embodiment. The installation configuration of the sensor 100 and the sensor module 10 according to the present embodiment relate to at least one of the first to fourth and seventh embodiments except that the adhesive layer 170 is provided instead of the bottom member 140. It is the same as the installation configuration of the sensor 100 and the sensor module 10. 15 and 16 show an example corresponding to the first embodiment. This will be described in detail below.

The method for installing the sensor 100 according to the present embodiment is the same as the second example of the method for installing the sensor 100 according to the first embodiment, except for the points described below. First, the first covering member 110 and the sensor 100 are arranged in the recess 201 provided in the detection target 20 as shown in FIG. At this time, an adhesive layer 170 is interposed between the sensor 100 and the bottom surface of the recess 201. Then, as shown in FIG. 16, the region between the sensor 100 and the first covering member 110 is covered with the second covering member 120. In the example of this figure, the surface 103 of the sensor 100 is in contact with the adhesive layer 170.

The adhesive layer 170 is a heat-resistant adhesive or the like, and the sensor 100 is fixed to the bottom surface of the recess 201 by the adhesive layer 170. The size of the adhesive layer 170 is not particularly limited, and may be the same as the surface 103, smaller than the surface 103, or larger. However, it is preferable that the adhesive layer 170 is separated from the first covering member 110.

The water absorbing material 150 may be provided in the region between the sensor 100 and the first covering member 110 as described in the second embodiment, or one or more as described in the third embodiment. The third covering member 130 may be provided. In that case, the water absorbing material 150 and the third covering member 130 are provided so as to be in contact with the bottom surface of the recess 201 or the adhesive layer 170.

Next, the operation and effect of this embodiment will be described. In this embodiment, the same actions and effects as those in the first embodiment can be obtained. In addition, since the contact area between the adhesive layer 170 and the detection target 20 is small, the heat conduction path from the detection target 20 to the surface 103 becomes small, and the temperature rise of the sensor 100 is suppressed.

Although the embodiments of the present invention have been described above with reference to the drawings, these are examples of the present invention, and various configurations other than the above can be adopted. In addition, the above-mentioned embodiments can be combined as long as the contents do not conflict with each other.

Although the embodiments of the present invention have been described above with reference to the drawings, these are examples of the present invention, and various configurations other than the above can be adopted.

Hereinafter, an example of the reference form will be added.
1-1. A sensor with at least a part of the surface facing the detection target,
With the first heat conductive covering member,
Equipped with a waterproof and breathable second covering member,
The first covering member is separated from the sensor and surrounds the sensor when viewed from a direction perpendicular to the partial surface.
The second covering member is a sensor module that covers an area between the sensor and the first covering member.
1-2. 1-1. In the sensor module described in
The second covering member is a sensor module fixed to one end surface of the first covering member.
1-3. 1-2. In the sensor module described in
The second covering member is a sensor module that is in contact with a surface of the sensor that is opposite to the surface of the part.
1-4. 1-2. Or 1-3. In the sensor module described in
A sensor module further comprising a bottom member fixed to an end surface of the first covering member opposite to the one end surface and covering a region between the sensor and the first covering member.
1-5. 1-1. From 1-4. In the sensor module described in any one of
A sensor module further comprising a water absorbing material located between the sensor and the first covering member.
1-6. 1-1. From 1-5. In the sensor module described in any one of
The first covering member has a cylindrical shape, and the first covering member is a sensor module having a screw portion on a surface opposite to the surface facing the sensor.
1-7. 1-1. From 1-6. In the sensor module described in any one of
A third that is located between the sensor and the first covering member, is separated from the sensor and the first covering member when viewed from a direction perpendicular to the partial surface, and surrounds the sensor. A sensor module with additional covering members.
1-8. 1-7. In the sensor module described in
A sensor module including a plurality of the third covering members separated from each other.
1-9. 1-1. From 1-8. In the sensor module described in any one of
A sensor module in which the moisture permeation resistance of the second covering member is 0.19 m ² · s · Pa / μg or less, and the waterproof property of the second covering member is 10 kPa or more.
1-10. 1-1. From 1-9. In the sensor module described in any one of
The second covering member is a sensor module including a porous stretched polytetrafluoroethylene film.
1-11. 1-1. From 1-10. In the sensor module described in any one of
The first covering member is a sensor module made of metal.
1-12. 1-1. From 1-11. In the sensor module described in any one of
The sensor is a sensor module that is a vibration sensor.
2-1. It is a method of installing a sensor on the detection target,
A sensor module including the sensor is placed in the recess provided in the detection target, and the sensor module is placed.
The sensor module is
With the sensor whose at least a part of the surface faces the detection target,
With the first heat conductive covering member,
Equipped with a waterproof and breathable second covering member,
The first covering member is separated from the sensor and surrounds the sensor when viewed from a direction perpendicular to the partial surface.
The second covering member is a method of installing a sensor that covers an area between the sensor and the first covering member.
2-2. 2-1. In the sensor installation method described in
The first covering member has a cylindrical shape, and the first covering member has a first screw portion on a surface opposite to the surface facing the sensor.
A second screw portion is provided on the side wall of the recess.
A method of installing a sensor in which the sensor module is embedded in the recess by screwing the first screw portion and the second screw portion.
2-3. 2-1. In the sensor installation method described in
The sensor and the first covering member are arranged in the recess, and the sensor and the first covering member are arranged.
A method of installing a sensor in which the sensor module is arranged by covering the area between the sensor and the first covering member with the second covering member.
2-4. 2-1. From 2-3. In the sensor installation method described in any one of the above,
A method of installing a sensor in which the second covering member in the sensor module is fixed to one end face of the first covering member.
2-5. 2-4. In the sensor installation method described in
A method of installing a sensor in which the second covering member in the sensor module is in contact with a surface of the sensor opposite to the surface of the part.
2-6. 2-4. Or 2-5. In the sensor installation method described in
The sensor module is a sensor further comprising a bottom member fixed to an end face of the first covering member opposite to the one end face and covering a region between the sensor and the first covering member. Installation method.
2-7. 2-1. From 2-6. In the sensor installation method described in any one of the above,
The sensor module is a method of installing a sensor further including a water absorbing material located between the sensor and the first covering member.
2-8. 2-1. From 2-7. In the sensor installation method described in any one of the above,
The sensor module is located between the sensor and the first covering member, and is separated from the sensor and the first covering member when viewed from a direction perpendicular to the partial surface, and the sensor is mounted on the sensor. A method of installing a sensor further comprising a surrounding third covering member.
2-9. 2-8. In the sensor installation method described in
The sensor module is a method of installing a sensor including a plurality of the third covering members separated from each other.
2-10. 2-1. From 2-9. In the sensor installation method described in any one of the above,
A method for installing a sensor, wherein the moisture permeation resistance of the second covering member is 0.19 m ² · s · Pa / μg or less, and the waterproof property of the second covering member is 10 kPa or more.
2-11. 2-1. From 2-10. In the sensor installation method described in any one of the above,
The second covering member is a method for installing a sensor including a porous stretched polytetrafluoroethylene film.
2-12. 2-1. From 2-11. In the sensor installation method described in any one of the above,
A method of installing a sensor whose first covering member is made of metal.
2-13. 2-1. From 2-12. In the sensor installation method described in any one of the above,
The sensor is a vibration sensor.

10 Sensor module 20 Detection target 100 Sensor 102 Cable 103, 104 Surface 110 First covering member 111, 112 End surface 113 First screw part 114 Mounting part 120 Second covering member 130 Third covering member 140 Bottom member 141 Mounting part 150 Water absorbing material 160 Bolt 170 Adhesive layer 201 Recess 202 Second screw part

Claims (11)

A sensor with at least a part of the surface facing the detection target,
With the first heat conductive covering member,
Waterproof and breathable second covering member,
A water absorbing material located between the sensor and the first covering member is provided.
The first covering member is separated from the sensor and surrounds the sensor when viewed from a direction perpendicular to the partial surface.
The second covering member covers the area between the sensor and the first covering member .
The second covering member is fixed to one end face of the first covering member.
The second covering member is a sensor module that is in contact with a surface of the sensor that is opposite to the surface of the part . A sensor with at least a part of the surface facing the detection target,
With the first heat conductive covering member,
Waterproof and breathable second covering member,
A water absorbing material located between the sensor and the first covering member,
A third that is located between the sensor and the first covering member, is separated from the sensor and the first covering member when viewed from a direction perpendicular to the partial surface, and surrounds the sensor. Equipped with a covering member,
The first covering member is separated from the sensor and surrounds the sensor when viewed from a direction perpendicular to the partial surface.
The second covering member is a sensor module that covers an area between the sensor and the first covering member. In the sensor module according to claim 2 ,
The second covering member is a sensor module fixed to one end surface of the first covering member. In the sensor module according to claim 2 or 3 .
A sensor module including a plurality of the third covering members separated from each other. In the sensor module according to any one of claims 1 to 4 .
A sensor module in which the moisture permeation resistance of the second covering member is 0.19 m ² · s · Pa / μg or less, and the waterproof property of the second covering member is 10 kPa or more. In the sensor module according to any one of claims 1 to 5 .
The second covering member is a sensor module including a porous stretched polytetrafluoroethylene film. In the sensor module according to any one of claims 1 to 6 .
The first covering member is a sensor module made of metal. In the sensor module according to any one of claims 1 to 7 .
The sensor is a sensor module that is a vibration sensor. It is a method of installing a sensor on the detection target,
A sensor module including the sensor is placed in the recess provided in the detection target, and the sensor module is placed.
The sensor module is
With the sensor whose at least a part of the surface faces the detection target,
With the first heat conductive covering member,
Waterproof and breathable second covering member,
A water absorbing material located between the sensor and the first covering member is provided.
The first covering member is separated from the sensor and surrounds the sensor when viewed from a direction perpendicular to the partial surface.
The second covering member covers the area between the sensor and the first covering member .
The second covering member is fixed to one end face of the first covering member.
The method for installing a sensor in which the second covering member is in contact with a surface of the sensor that is opposite to a part of the surface . It is a method of installing a sensor on the detection target,
A sensor module including the sensor is placed in the recess provided in the detection target, and the sensor module is placed.
The sensor module is
With the sensor whose at least a part of the surface faces the detection target,
With the first heat conductive covering member,
Waterproof and breathable second covering member,
A water absorbing material located between the sensor and the first covering member,
A third that is located between the sensor and the first covering member, is separated from the sensor and the first covering member when viewed from a direction perpendicular to the partial surface, and surrounds the sensor. Equipped with a covering member,
The first covering member is separated from the sensor and surrounds the sensor when viewed from a direction perpendicular to the partial surface.
The second covering member is a method of installing a sensor that covers an area between the sensor and the first covering member. In the method of installing the sensor according to claim 9 or 10.
The sensor and the first covering member are arranged in the recess, and the sensor and the first covering member are arranged.
A method of installing a sensor in which the sensor module is arranged by covering the area between the sensor and the first covering member with the second covering member.

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