JP7081969B2 - Encoder - Google Patents

Description

The present invention relates to an encoder.

Traditionally, various encoders have been used. Of these, magnetic rotary encoders that use rotating magnets and magnetic sensitive elements are often used.
For example, Patent Document 1 discloses a rotary encoder capable of detecting the movement of a magnetic scale (rotating magnet) with a phase difference of 90 ° in an electric angle.
Further, for example, in Patent Documents 2 and 3, permanent magnets (rotary magnets), Hall sensors (magnetic sensitive elements) arranged at intervals of 90 ° in mechanical angle, and mechanical angles with respect to these Hall sensors are described. A magnetic encoder (rotary encoder) including a Hall sensor arranged at a position shifted by 60 ° is disclosed.

Japanese Unexamined Patent Publication No. 2012-118000 WO2007 / 132603 Gazette WO2009 / 84346 Gazette

As disclosed in Patent Document 1, a highly accurate encoder can be obtained by detecting the movement of a magnetic scale with a phase difference of 90 ° at an electric angle.
Further, as disclosed in Patent Document 2 and Patent Document 3, a highly accurate encoder can be obtained by arranging magnetic sensing elements at a plurality of positions.
However, in a magnetic encoder (rotary encoder) having a rotating magnet, the magnetizing strength may change periodically depending on the magnetizing position as the rotating magnet rotates, and the magnetic flux may fluctuate. .. Then, the performance of the encoder may be deteriorated due to the influence of the fluctuation of the magnetic flux. Then, for example, the influence of the magnetic flux fluctuation cannot be suppressed by simply providing a plurality of units in which the magnetic sensing element is provided at a position where the magnetic angle can be detected with a phase difference of 90 °. That is, the influence of the magnetic flux fluctuation may not be suppressed depending on the position of the unit (magnetoreceptive element), the connection method between the magnetic sensory elements, and the like.

Therefore, an object of the present invention is to provide an encoder capable of suppressing the influence of magnetic flux fluctuation with high accuracy.

The encoder according to the first aspect of the present invention includes a rotating magnet in which a plurality of N poles and S poles are alternately magnetized in the circumferential direction, a first magnetizing element for detecting the position of the rotating magnet, and the first magnetizing element. A second magnetic sensing element, which is arranged at a position having a phase difference of 90 ° in electric angle with respect to the output of the magnetic sensing element and detects the position of the rotating magnet, and a plurality of magnetic sensing element sensor units having the same. The magnetic element sensor unit is provided with an equidistant magnetic element sensor unit that allows a predetermined error range with respect to the rotating magnet and is arranged at equal intervals, and the predetermined error range is equidistant. Within one cycle of the magnetic cycle from the position where The output of the first magnetic element of the second equidistant magnetic element sensor unit of the magnetic element sensor unit, the output of the second magnetic element of the first equidistant magnetic element sensor unit, and the like. Interval The output of the second magnetic element of the second magnetic element sensor unit is within a range capable of satisfying the positional relationship having a phase difference of even multiples of 180 ° in the electric angle, and the first equal interval feeling. The positive output terminal of the magnetic element sensor unit and the positive output terminal of the second equidistant magnetic element sensor unit are connected, and the negative output terminal of the first equidistant magnetic element sensor unit and the second equidistant magnetic sensing unit. It is characterized in that it is connected to the negative output terminal of the element sensor unit.

According to this aspect, since there are a plurality of magnetic element sensor units provided with magnetic elements at positions where they can be detected with a phase difference of 90 ° in electrical angle, a highly accurate encoder can be obtained. Further, the output of the first equidistant magnetic sensor units and the output of the second equidistant magnetic element sensors are 180 in electric angle within the range of one period from the equidistant position to the magnetic cycle. Arranged within a range that can satisfy the positional relationship having a phase difference of even multiples of °, and the positive output terminal of the first equidistant magnetic element sensor unit and the positive output of the second equidistant magnetic element sensor unit. The terminals are connected, and the negative output terminal of the first equidistant magnetic element sensor unit and the negative output terminal of the second equidistant magnetic element sensor unit are connected. That is, the outputs of the first equidistant magnetic element sensor unit and the second equidistant magnetic element sensor unit, which are mechanically separated from each other by one cycle in the magnetic cycle, are averaged. By doing so, the influence of magnetic flux fluctuation can be suppressed.

The encoder according to the second aspect of the present invention includes a rotating magnet in which a plurality of N poles and S poles are magnetized alternately in the circumferential direction, a first magnetizing element for detecting the position of the rotating magnet, and the first magnetic sensor. A second magnetic sensing element, which is arranged at a position having a phase difference of 90 ° in electric angle with respect to the output of the magnetic sensing element and detects the position of the rotating magnet, and a plurality of magnetic sensing element sensor units having the same. The magnetic element sensor unit is provided with an equidistant magnetic element sensor unit that allows a predetermined error range with respect to the rotating magnet and is arranged at equal intervals, and the predetermined error range is equidistant. Within one cycle of the magnetic cycle from the position where The output of the first magnetic element of the second equidistant magnetic element sensor unit of the magnetic element sensor unit, the output of the second magnetic element of the first equidistant magnetic element sensor unit, and the like. Interval The output of the second magnetic element of the second magnetic element sensor unit is within a range capable of satisfying the positional relationship having a phase difference of an odd multiple of 180 ° in the electric angle, and the first equal interval feeling. The positive output terminal of the magnetic element sensor unit and the negative output terminal of the second equidistant magnetic element sensor unit are connected, and the negative output terminal of the first equidistant magnetic element sensor unit and the second equidistant magnetic sensing unit. It is characterized in that it is connected to the positive output terminal of the element sensor unit.

According to this aspect, since there are a plurality of magnetic element sensor units provided with magnetic elements at positions where they can be detected with a phase difference of 90 ° in electrical angle, a highly accurate encoder can be obtained. Further, the output of the first equidistant magnetic sensor units and the output of the second equidistant magnetic element sensors are 180 in electric angle within the range of one period from the equidistant position to the magnetic cycle. Arranged in a range that can satisfy the positional relationship having a phase difference of an odd multiple of °, and the positive output terminal of the first equidistant magnetic element sensor unit and the negative output of the second equidistant magnetic element sensor unit. The terminals are connected, and the positive output terminal of the first equidistant magnetic element sensor unit and the negative output terminal of the second equidistant magnetic element sensor unit are connected. That is, the outputs of the first equidistant magnetic element sensor unit and the second equidistant magnetic element sensor unit that are mechanically separated from each other by 1/2 cycle in the magnetic period. By inverting one side and averaging it, the influence of magnetic flux fluctuation can be suppressed.

In the encoder according to the third aspect of the present invention, in the first or second aspect, the magnetic sensor unit has the first magnetic element and the second magnetic element in one package. It is characterized by doing.

According to this aspect, since the first magnetic sensing element and the second magnetic sensing element are provided in one package, the first magnetic sensing element and the second magnetic sensing element can be positioned with high accuracy, which is particularly high. It can be an accurate encoder.

The encoder according to the fourth aspect of the present invention is characterized in that, in any one of the first to third aspects, the first magnetic sensing element and the second magnetic sensing element are Hall elements. do.

According to this aspect, since the first magnetic sensing element and the second magnetic sensing element are Hall elements and can independently detect the direction of the magnetic field (distinguishing between the N pole and the S pole), it is possible to form an encoder at low cost. can.

The encoder according to the fifth aspect of the present invention is characterized in that, in any one of the first to third aspects, the first magnetic sensing element and the second magnetic sensing element are magnetoresistive elements. do.

According to this aspect, since the encoder can be formed by using a magnetoresistive element, the rotating magnetic field of the opposing magnet is detected. Therefore, compared with the case where the strength of the magnetic flux is detected as in the Hall element, magnetization Even if the magnetic flux strength fluctuates due to variations or runout of the rotating portion, the rotating position can be detected stably.

The encoder according to the sixth aspect of the present invention is two equidistant magnetic sensing elements in any one of the first to fifth aspects, with an arrangement of 180 ° at a mechanical angle that allows the predetermined error range. It is characterized by having a sensor unit.

According to this aspect, it is possible to inexpensively form an encoder by configuring an equidistant magnetic element sensor with, for example, an equidistant first magnetic element sensor unit and an equidistant second magnetic element sensor unit. Become. Further, by arranging the two equidistant magnetoreceptive element sensor units at a mechanical angle of 180 ° with a mechanical angle that allows a predetermined error range, the influence of magnetic flux fluctuation can be effectively suppressed.

The encoder according to the seventh aspect of the present invention is characterized in that, in any one of the first to sixth aspects, two or more sets of the two equidistant magnetic sensory element sensor units are provided.

According to this aspect, a particularly high-precision encoder can be obtained by providing two or more sets of two equidistant magnetoreceptive element sensor units.

In the encoder according to the eighth aspect of the present invention, in any one of the first to seventh aspects, the rotating magnet is the first magnet in which a plurality of N poles and S poles are alternately magnetized in the circumferential direction. A second rotating magnet that is rotatable together with the first rotating magnet and has N and S poles magnetized in the circumferential direction, and a second rotation that detects the position of the second rotating magnet. It is characterized by including a magnetic sensing element for a magnet.

According to this aspect, not only the rotation amount of the rotating magnet (first rotating magnet) but also the absolute position can be detected by the second rotating magnet and the magnetic sensitive element for the second rotating magnet.

In any one of the first to eighth aspects, the encoder according to the ninth aspect of the present invention has, as the magnetic sensor unit, the equidistant feeling in addition to the equidistant magnetic element sensor unit. It is characterized in that a close magnetic element sensor unit is provided so as to be arranged at a mechanical angle of 30 ° or less with respect to at least one of the magnetic element sensor units.

According to this embodiment, since the proximity magnetic field element sensor unit is provided at a position close to the equidistant magnetic field element sensor unit, the output of the equidistant magnetic element sensor unit and the output of the close distance magnetic element sensor unit are used ( By averaging (for example), the influence of the external magnetic flux can be suppressed.

The present invention can provide an encoder with high accuracy and capable of suppressing the influence of magnetic flux fluctuation.

It is explanatory drawing (perspective view) which shows the appearance, etc. of the encoder (rotary encoder) to which this invention is applied. It is explanatory drawing (plan view) which shows the appearance and the like of the encoder to which this invention was applied. It is a side view which shows by cutting out a part of the fixed body of the encoder to which this invention was applied. It is explanatory drawing which shows the layout of the rotary magnet and the magnetic sensor part of the encoder to which this invention is applied. It is explanatory drawing which shows the detection principle in the encoder to which this invention was applied. It is explanatory drawing which shows the detection principle in the encoder to which this invention was applied. It is explanatory drawing which shows the basic structure of the method of determining an angle position in an encoder to which this invention is applied. It is a schematic plan view for demonstrating the arrangement of the magnetic sensitive element sensor part with respect to the rotating magnet in the encoder to which this invention is applied. It is a schematic enlarged view for demonstrating the arrangement of the magnetic sensitive element sensor part with respect to the rotating magnet in the encoder to which this invention is applied. It is a figure which shows the wiring of the magnetic sensitive element sensor part in the encoder to which this invention is applied. It is a figure which shows the resage circle in the case of using one magnetic field element sensor unit, and there is no external magnetic flux, no magnetic flux fluctuation, and no rotation deviation of the rotating magnet. It is a figure which shows the risage circle in the case of using two magnetic field element sensor units, and there is no external magnetic flux, no magnetic flux fluctuation, and no rotation deviation of the rotating magnet. It is a figure which shows the detection angle error in the case of using one magnetic flux element sensor part, and there is no external magnetic flux, no magnetic flux fluctuation, and no rotation deviation of a rotating magnet. It is a figure which shows the detection angle error in the case of using two magnetic flux element sensor units, and there is no external magnetic flux, no magnetic flux fluctuation, and no rotation deviation of a rotating magnet. It is a figure which shows the resage circle in the case of using one magnetic field element sensor unit, with the external magnetic flux, no magnetic flux fluctuation, and no rotation deviation of the rotating magnet. It is a figure which shows the risage circle in the case of using two magnetic field element sensor units, with an external magnetic flux, no magnetic flux fluctuation, and no rotation deviation of a rotating magnet. It is a figure which shows the detection angle error in the case of using one magnetoreceptive element sensor part, when there is an external magnetic flux, there is no magnetic flux fluctuation, and there is no rotation deviation of a rotating magnet. It is a figure which shows the risage circle in the case of using one magnetoreceptive element sensor part, when there is an external magnetic flux, there is a magnetic flux fluctuation, and there is no rotation deviation of a rotating magnet. It is a figure which shows the risage circle in the case of using two magnetic field element sensor units, with the external magnetic flux, the magnetic flux fluctuation, and the rotation deviation of the rotating magnet. It is a figure which shows the detection angle error in the case of using one magnetoreceptive element sensor part, when there is an external magnetic flux, there is a magnetic flux fluctuation, and there is no rotation deviation of a rotating magnet. It is a figure which shows the detection angle error in the case of using two magnetic flux element sensor part, with the external magnetic flux, with the magnetic flux fluctuation, and without the rotation deviation of a rotating magnet. It is a figure which shows the risage circle in the case of using four magnetic field element sensor units, and there is an external magnetic flux, there is a magnetic flux fluctuation, and there is a rotation deviation of a rotating magnet. It is a figure which shows the detection angle error in the case of using four magnetic flux element sensor units, and there is an external magnetic flux, there is a magnetic flux fluctuation, and there is a rotation deviation of a rotating magnet. It is a schematic enlarged view for demonstrating the arrangement of the magnetic sensitive element sensor part with respect to the rotating magnet in the encoder to which this invention is applied. It is a figure which shows the wiring of the magnetic sensitive element sensor part in the encoder to which this invention is applied. It is a schematic plan view for demonstrating the arrangement of the magnetic sensitive element sensor part with respect to the rotating magnet in the encoder to which this invention is applied. It is a schematic plan view for demonstrating the arrangement of the magnetic sensitive element sensor part with respect to the rotating magnet in the encoder to which this invention is applied. It is a schematic plan view for demonstrating the arrangement of the magnetic sensitive element sensor part with respect to the rotating magnet in the encoder to which this invention is applied.

An embodiment of the encoder (rotary encoder) of the present invention will be described below.
In the following description, as the rotary encoder, a magnetic rotary encoder in which the magnetic sensor unit is composed of a magnet and a magnetic sensor (magnetic resistance element, Hall element) will be mainly described. In this case, either a configuration in which a magnet is provided in the fixed body and a magnetizing element is provided in the rotating body, or a configuration in which the magnetic sensing element is provided in the fixed body and the magnet is provided in the rotating body may be adopted. In the following description, a configuration in which a magnetic sensing element is provided on a fixed body and a rotating magnet is provided on a rotating body will be mainly described. That is, in the following "rotating magnet", when the rotating magnet is used in a configuration in which the rotating magnet does not rotate and the magnetic sensing element rotates (the rotating magnet does not rotate, but the rotating magnet and the magnetic sensing element rotate relatively). If you do) is also included. Further, in the drawings referred to below, the configurations of the rotating magnet and the magnetic sensing element are schematically shown. For example, the number of magnetic poles in the rotating magnet and the number of output lines from the magnetic sensing element are reduced. May be shown. Further, in order to make the configuration easy to understand, some component parts may be omitted (simplified).

(overall structure)
FIG. 1 is an explanatory diagram showing the appearance and the like of the encoder 1 of the present embodiment, and is a perspective view of the encoder 1 viewed from one side (L1 side) of the rotation axis direction L and from an oblique direction. Further, FIG. 2 is an explanatory view showing the appearance and the like of the encoder 1 of the present embodiment, and is a plan view seen from one side (L1 side) of the rotation axis direction L. FIG. 3 is a side view showing a part of the fixed body 10 of the encoder 1 of the present embodiment by cutting out.

The encoder 1 shown in FIGS. 1 to 3 is a device that magnetically detects the rotation of the rotating body 2 around the axis (around the rotating axis) with respect to the fixed body 10, and the fixed body 10 is fixed to a frame or the like of a motor device. The rotating body 2 is used in a state of being connected to a rotating output shaft or the like of the motor device. The fixed body 10 includes a sensor substrate 15 and a plurality of support members 11 that support the sensor substrate 15. In this embodiment, the support member 11 has a bottom plate portion 121 having a circular opening 122 formed therein. It is composed of a base body 12 provided and a sensor support plate 13 fixed to the base body 12. Although the internal configuration is omitted in FIGS. 1 to 3 for easy viewing, the configuration is similar to that of the support member 11 at a position facing the support member 11 in the drawing with reference to the rotation axis direction L. The support member 11 of the above is formed (one support member 11 is formed with the magnetic element sensor portions 61 and 62 described later, and the other support member 11 is formed with the magnetic element sensor portions 63 and 64 described later. Yes). Each support member 11 is provided with a magnetic element sensor unit 60 (magnetic element sensor units 61, 62, 63 and 64: see FIG. 4) having a magnetic sensor unit which is a Hall element, although details will be described later. Has been done. The magnetic sensitive element sensor unit 60 includes a magnetic sensitive element that detects the direction of the magnetic field formed by the first rotating magnet 30 in which a plurality of N poles and S poles are alternately magnetized on the magnetizing surface 31 in the circumferential direction. It is a magnetic sensor unit.

The sensor support plate 13 is fixed to a substantially cylindrical body portion 123 protruding from the edge portion of the opening 122 toward the L1 side, which is one side of the rotation axis direction L, by screws 191, 192, or the like in the base body 12. ing. In FIGS. 1 and 3, the side opposite to the L1 side in the rotation axis direction L is represented as the L2 side. A plurality of terminals 16 project from the sensor support plate 13 toward the L1 side in the rotation axis direction L. A protrusion 124, a hole 125, or the like is formed on the end surface of the body portion 123 located on the L1 side in the rotation axis direction L, and the sensor board 15 is screwed to the body portion 123 by using the hole 125 or the like. It is fixed by such as. At that time, the sensor substrate 15 is accurately fixed in a state of being positioned at a predetermined position by a protrusion 124 or the like.

In the sensor board 15, the connector 17 is provided on the surface on the L1 side in the rotation axis direction L. Further, the sensor substrate 15 is provided with a magnetosensitive element sensor unit 40, which is a magnetoresistive element (MR element), and a magnetically sensitive element sensor unit 50, which is a Hall element. The magnetizing element sensor unit 40 and the magnetizing element sensor unit 50 detect the direction of the magnetic field formed by the second rotating magnet 20 in which the N pole and the S pole are magnetized one by one on the magnetizing surface 21. It is a magnetically sensitive element.

The rotating body 2 has a first rotating magnet 30, a second rotating magnet 20, and the like, and is a cylindrical member arranged inside the body portion 123. Inside the rotating body 2, a rotation output shaft of a motor (shown). Is connected by a method such as fitting. Therefore, the rotating body 2 can rotate around the axis.

(Layout of rotating magnet and magnetic sensor sensor)
FIG. 4 is an explanatory diagram showing the layout of the rotating magnet and the magnetic sensor unit of the encoder 1 of the present embodiment. In FIG. 4, the arrow indicates the rotation direction of the first rotating magnet 30. Further, the data processing unit 90 in FIG. 4 includes a CPU or the like that operates based on a program stored in advance in a memory (not shown).

As shown in FIG. 3, the encoder 1 of the present embodiment includes a plurality of magnetic sensor units (four magnetic element sensor units 60 for detecting the magnetic field of the first rotating magnet 30) and a second magnetic element sensor unit, which will be described below. A magnetic element sensor unit 40 for detecting the magnetic field of the two-rotating magnet 20 and two magnetic element sensor units 50) are provided.

In the encoder 1 of the present embodiment, a plurality of N poles and S poles are alternately magnetized in the circumferential direction at positions separated from the second rotating magnet 20 on the outer side in the radial direction on the side of the rotating body 2. It has a first rotating magnet 30 that directs the magnetized surface 31 of the above to the L1 side in the rotation axis direction L. In the first rotating magnet 30 of this embodiment, a total of 32 pairs of N poles and S poles are formed. However, the number of pairs of N pole and S pole is not limited to 32 pairs. Further, in the encoder 1 of the present embodiment, the magnetizing element sensor unit 60 (magnetic sensing element) facing the fixed body 10 on the L1 side in the rotation axis direction L with respect to the magnetizing surface 31 of the first rotating magnet 30. The sensor unit 61, the magnetic sensor unit 62, the magnetic element sensor unit 63, and the magnetic element sensor unit 64) are provided. The details of the magnetically sensitive element sensor unit 60 (magnetically sensitive element sensor unit 61, magnetically sensitive element sensor unit 62, magnetically sensitive element sensor unit 63, and magnetically sensitive element sensor unit 64) will be described later.

The encoder 1 of this embodiment has a second rotating magnet 20 having a magnetized surface 21 in which an N pole and an S pole are magnetized one by one in the circumferential direction toward the L1 side in the rotation axis direction L. Further, the encoder 1 of the present embodiment has a magnetizing element sensor unit 40 facing the magnetized surface 21 of the second rotating magnet 20 on the L1 side in the rotation axis direction L, and a second magnetizing element sensor unit 40 on the side of the fixed body 10. It is provided with a magnetically sensitive element sensor unit 50 (magnetically sensitive element sensor unit 51 and magnetically sensitive element sensor unit 52) facing the magnetizing surface 21 of the rotating magnet 20 on the L1 side in the rotation axis direction L. The magnetic sensor unit 52 is arranged at a position deviated from the magnetic element sensor unit 51 by 90 ° with respect to the rotation center axis (circumferential direction) by the mechanical angle.

The first rotating magnet 30 and the second rotating magnet 20 rotate around the rotation axis integrally with the rotating body 2. The second rotating magnet 20 is made of a disk-shaped permanent magnet. The first rotating magnet 30 has a cylindrical shape and is arranged at a position separated from the second rotating magnet 20 on the outer side in the radial direction. The first rotating magnet 30 and the second rotating magnet 20 are made of a bond magnet or the like.

The magnetically sensitive element sensor unit 40 includes a phase A (SIN) reluctance pattern and a phase B (COS) reluctance pattern having a phase difference of 90 ° in electrical angle with respect to the second rotating magnet 20. It is a magnetic resistance element. In the magnetic sensor unit 40, the A-phase reluctance pattern is that of the + a-phase (SIN +) reluctance pattern 43 and the -a-phase (SIN-) that detect the movement of the rotating body 2 with a phase difference of 180 °. The magnetoresistance pattern 41 is provided. The B-phase reluctance pattern includes a + b-phase (COS +) magnetoresistance pattern 44 and a −b-phase (COS−) magnetoresistance pattern 42 that detect the movement of the rotating body 2 with a phase difference of 180 °. Here, the + a phase reluctance pattern 43 and the −a phase reluctance pattern 41 form a bridge circuit, and the + b phase reluctance pattern 44 and the −b phase reluctance pattern 42 are also of the + a phase. Similar to the reluctance pattern 43 and the -a phase reluctance pattern 41, it constitutes a bridge circuit.

In this embodiment, the magnetic sensitive element sensor unit 40, the magnetic sensitive element sensor unit 51, the magnetic sensitive element sensor unit 52, and the magnetic sensitive element sensor unit 60 (magnetic sensitive element sensor unit 61, magnetic sensitive element sensor unit 62, magnetic sensitive element sensor unit 60). Both the element sensor unit 63 and the magnetic sensor unit 64) are provided on the surface of the sensor substrate 15 on the L2 side in the rotation axis direction L (see FIG. 3). Further, the sensor substrate 15 is electrically connected to the amplifier 91 electrically connected to the magnetic sensor unit 40, the amplifier 92 electrically connected to the magnetic sensor unit 50, and the magnetic element sensor unit 60. A connected amplifier 93 is provided. Then, the output line 201 is connected from the magnetic sensor unit 61 to the data processing unit 90 via the amplifier 93, the output line 202 from the magnetic sensor unit 62 is connected to the output line 201, and the magnetic element sensor unit is connected. The output line 203 from 63 is connected to the output line 201 on the data processing unit 90 side of the connection point between the output line 201 and the output line 202, and the output line 204 from the magnetic sensing element sensor unit 64 is connected to the output line 203. Has been done. In FIG. 4, the output line 201, the output line 202, the output line 203, and the output line 204 are expressed in a simplified manner (see FIG. 10 for details).

Since the encoder 1 of this embodiment has the layout as described above, the approximate absolute position of the second rotating magnet 20 (that is, that is, from the detection results of the magnetic sensor unit 40 and the magnetic element sensor unit 50). The rough absolute position of the rotating body 2) can be detected. Further, the detailed rotation amount of the first rotating magnet 30 (that is, the detailed rotation amount of the rotating body 2) can be detected from the detection result of the magnetic sensing element sensor unit 60. Then, the detailed absolute position (angle position) of the rotating body 2 can be detected based on the detection results of the magnetic sensor unit 40 and the magnetic element sensor unit 50 and the detection results of the magnetic element sensor unit 60. ..

As described above, the encoder 1 of this embodiment uses a Hall element as the magnetically sensitive element sensor unit 60, but a magnetoresistive element (MR element) may be used as the magnetically sensitive element sensor unit 60. When a magnetoresistive element is used as the magnetically sensitive element sensor unit 60, as the first rotating magnet 30, an annular magnetization in which N poles and S poles are alternately magnetized for one round in the circumferential direction as in the present embodiment is applied. It is not a configuration having a magnetic surface 31, but a plurality of N poles and S poles are magnetized alternately on the inner side and the outer side in the circumferential direction for two rounds, and the N poles and the S poles are staggered on the inner side and the outer side (checkered pattern). : A structure having a magnetized surface 31 configured to be staggered) can be used. When a magnetic resistance element is used as the magnetic sensing element sensor unit 60, by using such a first rotating magnet 30, a change in the radial magnetic field as well as a change in the circumferential magnetic field, that is, a rotational magnetic field is detected by the magnetic resistance element. can.

(Analytical position detection principle)
FIG. 5 is an explanatory diagram showing the detection principle in the encoder 1 of the present embodiment, and is an explanatory diagram of a signal or the like output from the magnetic sensing element sensor unit. Further, FIG. 6 is an explanatory diagram showing the detection principle in the encoder 1 of the present embodiment, and is an explanatory diagram showing the relationship between the signal represented by FIG. 5 and the angular position (electrical angle) of the rotating body 2. FIG. 7 is an explanatory diagram showing a basic configuration of a method for determining an angle position in the encoder 1 of the present embodiment.

As shown in FIG. 4, in the encoder 1 of the present embodiment, the outputs of the magnetic sensor unit 40, the magnetic element sensor unit 50, and the magnetic element sensor unit 60 pass through the amplifier 91, the amplifier 92, and the amplifier 93. , It is output to the data processing unit 90 provided with a CPU or the like that performs interpolation processing and various arithmetic processing. The data processing unit 90 obtains an angular position (absolute position) of the rotating body 2 with respect to the fixed body 10 based on the outputs from the magnetic sensor unit 40, the magnetic sensor unit 50, and the magnetic element sensor unit 60.

More specifically, in the encoder 1, when the rotating body 2 makes one rotation, the magnetic flux of the magnetized surface 21 of the second rotating magnet 20 changes as represented by the top sine wave in FIG. When the rotating body 2 makes one rotation, the second rotating magnet 20 makes one rotation. Therefore, from the magnetic sensitive element sensor unit 40, the sine wave signal sin, as represented by the second sine wave from the top of FIG. cos is output for 2 cycles. Therefore, as shown in FIG. 6, in the data processing unit 90, if θ = tan ^-1 (sin / cos) is obtained from the sine and cosine signals sin and cos, the angular position θ of the rotating body 2 can be known. Further, in this embodiment, the magnetic element sensor unit 51 and the magnetic element sensor unit 52, both of which are Hall elements, are arranged at positions displaced by 90 ° from the center of the second rotating magnet 20. Therefore, as can be seen from the third waveform from the top of FIG. 5 and the bottom waveform of FIG. 5, it is possible to know which section of the sine wave signal sin or cos the current position is located. You can see the absolute angle position of.

The detailed configuration of the magnetically sensitive element sensor unit 60 will be described later, but each magnetically sensitive element sensor unit 60 (magnetically sensitive element sensor unit 61, magnetically sensitive element sensor unit 62, magnetically sensitive element sensor unit 63, and magnetically sensitive element sensor unit 60). The element sensor unit 64) has a phase difference of 90 ° between the first magnetic sensing element 70 (see FIG. 8) and the electric angle of the first magnetic sensing element 70 (phase difference based on the phase of the first rotating magnet 30). ) Is provided with a second magnetic sensitive element 79 (see FIG. 8). The encoder 1 of the present embodiment uses a first rotating magnet 30 having an annular magnetized surface 31 in which a plurality of N poles and S poles are alternately magnetized in the circumferential direction. From each magnetic element sensor unit 60 (magnetic element sensor unit 61, magnetic element sensor unit 62, magnetic element sensor unit 63, and magnetic element sensor unit 64) facing the rotating magnet 30, the rotating body 2 is The sinusoidal signals sin and cos are output each time the magnetic pole of the first rotating magnet 30 is rotated for one cycle. Specifically, the sine wave signal cos is output from the first magnetic sensing element 70, and the sine wave signal sin is output from the second magnetic sensing element 79. Therefore, as shown in FIG. 6, for the sine wave signals sin and cos output from the magnetic sensitive element sensor units 60, θ = tan ^-1 (sin / cos) can be obtained from the sine wave signals sin and cos. , The angle position θ of the rotating body 2 within the angle corresponding to one cycle of the magnetic poles of the first rotating magnet 30 can be found.

Therefore, in this embodiment, based on the absolute angle data of one rotation and one cycle (the top data of FIG. 7) and the incremental angle data of one rotation and N cycles (the second data from the top of FIG. 7). , Detects the angular position of the rotating body 2 at the moment. Therefore, even when the resolution of the absolute angle data for one rotation and one cycle is low, it is possible to obtain high-resolution absolute angle data as shown in the high-resolution absolute value data (data at the bottom of FIG. 7).

In adopting such a detection method, the second absolute angle data is created by interpolating and dividing the absolute angle data of one rotation and one cycle into the number of magnetic pole pairs of the first rotating magnet 30 (N: a positive integer of 2 or more). At the moment, the output from the magnetic sensor unit 40 and the magnetic element sensor unit 50 is in any of the cycles 1, 2, ... n-1, n, n + 1 ... N of the second absolute angle data. Detect if it is located. Further, it is detected which position in the period 1, 2, m-1, m, m + 1 ... N of the incremental angle data corresponds to the output from the magnetic sensing element sensor unit 60 at the moment. Then, which period of the second absolute angle data the output of the magnetic sensor unit 40 and the magnetic element sensor 50 at the moment is in is set as the upper data of the digital data, and the magnetic sensor unit 60 is used. The absolute angle position of the rotating body 2 at the moment is detected by setting which position of the incremental angle data the output corresponds to as the lower data of the digital data.

The data processing unit 90 shown in FIG. 4 is provided with a memory (not shown) for storing the second absolute angle data and the incremental angle data. Further, in the data processing unit 90, the output from the magnetic sensor unit 40 and the magnetic element sensor unit 50 at the moment, the output from the magnetic element sensor unit 60 at the moment, and the second stored in the memory. An angle position determination unit (not shown) for determining the absolute angle position of the rotating body 2 at the moment is provided based on the absolute angle data and the incremental angle data stored in the memory.

(Arrangement of the magnetic sensor unit 60 with respect to the first rotating magnet 30)
Next, the configuration of the magnetic sensor unit 60 of the encoder 1 of the present embodiment and the arrangement of each magnetic element sensor unit 60 with respect to the first rotating magnet 30 will be described.
Here, FIG. 8 shows the magnetically sensitive element sensor unit 60 (magnetically sensitive element sensor unit 61, magnetically sensitive element sensor unit 62, magnetically sensitive element sensor unit 63, and magnetically sensitive element 30 with respect to the first rotating magnet 30 in the encoder 1 of the present embodiment. It is a schematic plan view for demonstrating the arrangement of the element sensor part 64). In FIG. 8, the arrow indicates the rotation direction of the first rotating magnet 30. Further, FIG. 9 illustrates the arrangement of the magnetic sensor unit 61, the magnetic element sensor unit 62, the magnetic element sensor unit 63, and the magnetic element sensor unit 64 with respect to the first rotating magnet 30 in the encoder 1 of the present embodiment. It is a schematic enlarged view for this. FIG. 10 shows the wiring of the magnetic sensor unit 61, the magnetic element sensor unit 62, the magnetic element sensor unit 63, and the magnetic element sensor unit 64 with respect to the first rotating magnet 30 in the encoder 1 of the present embodiment. It is a figure.

As shown in FIGS. 8 and 9, the magnetic element sensor unit 61, the magnetic element sensor unit 62, the magnetic element sensor unit 63, and the magnetic element sensor unit 64 of this embodiment all have two senses. It includes a magnetic element (first magnetic sensing element 70 and second magnetic sensing element 79). Specifically, the magnetic sensor unit 61 is the magnetic element 71 as the first magnetic element 70, the magnetic element 72 as the second magnetic element 79, and the magnetic element sensor unit 62 is the first magnetic element. The magnetic element 73 as the 70, the magnetic element 74 as the second magnetic element 79, and the magnetic element sensor unit 63 feel as the magnetic element 75 as the first magnetic element 70 and the second magnetic element 79. The magnetic element 76 and the magnetic element sensor unit 64 include a magnetic element 77 as the first magnetic element 70 and a magnetic element 78 as the second magnetic element 79. The magnetic element sensor unit 61, the magnetic element sensor unit 62, the magnetic element sensor unit 63, and the magnetic element sensor unit 64 of this embodiment are all the same except for the arrangement with respect to the first rotating magnet 30. be.

Further, as shown in FIG. 9, the magnetic element sensor unit 61, the magnetic element sensor unit 62, the magnetic element sensor unit 63, and the magnetic element sensor unit 64 are all referred to as the first magnetic element 70. The second magnetic sensing element 79 is a position having a phase difference of 90 ° in the electric angle corresponding to the N pole and the S pole of the magnetizing surface 31 of the first rotating magnet 30 (1/4 cycle separation in the magnetic cycle). (Position). Since the magnetic sensor unit 60 of this embodiment has such a configuration, as described above, every time the rotating body 2 rotates for one cycle of the magnetic pole of the first rotating magnet 30, a sine and cosine is formed. Wave signals sin and cos are output.

Further, as shown in FIG. 9, the magnetic sensor unit 62 is located at a position having a phase difference of 540 ° in electrical angle with respect to the output of the magnetic element sensor unit 61 (one and a half cycles apart in the magnetic cycle). Position). Then, as shown in FIGS. 8 and 9, the magnetic sensor unit 63 is displaced by 180 ° in the mechanical angle from the magnetic sensor sensor unit 61 (position displaced by 180 ° in the circumferential direction). ), And the magnetic sensor unit 64 is arranged at a position deviated by 180 ° from the magnetic element sensor unit 62 by the mechanical angle.

That is, the output from the magnetic sensory element 73, which is the first magnetic sensory element of the magnetic sensory element sensor unit 62, is relative to the output from the magnetic sensory element 71, which is the first magnetic sensory element of the magnetic sensory element sensor unit 61. The sinusoidal signal cos is shifted by 1/2 cycle in the magnetic cycle. Further, the output from the magnetic sensory element 75, which is the first magnetic sensory element of the magnetic sensory element sensor unit 63, is relative to the output from the magnetic sensory element 71, which is the first magnetic sensory element of the magnetic sensory element sensor unit 61. There is no phase shift in the sinusoidal signal cos. Then, the output from the magnetic sensory element 77, which is the first magnetic sensory element of the magnetic sensory element sensor unit 64, is relative to the output from the magnetic sensory element 75, which is the first magnetic sensory element of the magnetic sensory element sensor unit 63. The sinusoidal signal cos is shifted by 1/2 cycle in the magnetic cycle.

Similarly, the output from the magnetic sensory element 74, which is the second magnetic sensitive element of the magnetic sensory element sensor unit 62, is relative to the output from the magnetic sensory element 72, which is the second magnetic sensory element of the magnetic sensory element sensor unit 61. , The sinusoidal signal sin is shifted by 1/2 cycle in the magnetic cycle. Further, with respect to the output from the magnetic sensory element 72 which is the second magnetic sensory element of the magnetic sensory element sensor unit 61, the output from the magnetic sensory element 76 which is the second magnetic sensory element of the magnetic sensory element sensor unit 63 is. There is no phase shift of the sinusoidal signal sin. Then, the output from the magnetic sensing element 78, which is the second magnetic sensing element of the magnetic sensing element sensor unit 64, is relative to the output from the magnetic sensing element 76, which is the second magnetic sensing element of the magnetic sensing element sensor unit 63. The sinusoidal signal sin is shifted by 1/2 cycle in the magnetic cycle.

From the above, in this embodiment, the wiring is as shown in FIG. Here, in the figure, VC is a voltage terminal, GND is a ground terminal, HE1P is a positive output terminal from the first magnetic sensing element 70, HE1N is a negative output terminal from the first magnetic sensing element 70, and HE2P is the second magnetic sensing element. The positive output terminal from the element 79 and HE2N represent the negative output terminal from the second magnetic sensing element 79. Specifically, the output line 202 of the magnetic sensor unit 62 is connected to the output line 201 of the magnetic sensor unit 61 with the plus and minus reversed. Then, the output line 204 of the magnetic sensor unit 64 is connected to the output line 203 of the magnetic sensor unit 63 with the plus and minus reversed. Further, the output line 203 to which the output line 204 is connected is connected to the output line 201 to which the output line 202 is connected, plus and minus.

(Effect of Encoder 1 of this example)
Next, the effect of the encoder 1 of this embodiment will be described.
Here, FIG. 11 is a diagram showing a resage circle when only one magnetoreceptive element sensor unit 61 is used, and there is no external magnetic flux, no magnetic flux fluctuation, and no rotational deviation of the rotating magnet. Further, FIG. 12 is a diagram showing a resage circle when two magnetic sensor units 61 and 62 are used, and there is no external magnetic flux, no magnetic flux fluctuation, and no rotational deviation of the rotating magnet. Further, FIG. 13 is a diagram showing a detection angle error when only one magnetoreceptive element sensor unit 61 is used, and there is no external magnetic flux, no magnetic flux fluctuation, and no rotational deviation of the rotating magnet. Further, FIG. 14 is a diagram showing a detection angle error in the case where the two magnetoreceptive element sensor units 61 and 62 are used, and there is no external magnetic flux, no magnetic flux fluctuation, and no rotation deviation of the rotating magnet. Further, FIG. 15 is a diagram showing a resage circle when only one magnetoreceptive element sensor unit 61 is used, and there is an external magnetic flux, there is no magnetic flux fluctuation, and there is no rotational deviation of the rotating magnet. Further, FIG. 16 is a diagram showing a resage circle when two magnetic sensor units 61 and 62 are used, and there is an external magnetic flux, there is no magnetic flux fluctuation, and there is no rotational deviation of the rotating magnet. Further, FIG. 17 is a diagram showing a detection angle error when only one magnetoreceptive element sensor unit 61 is used, and there is an external magnetic flux, there is no magnetic flux fluctuation, and there is no rotational deviation of the rotating magnet. Further, FIG. 18 is a diagram showing a resage circle when only one magnetoreceptive element sensor unit 61 is used, and there is an external magnetic flux, there is a magnetic flux fluctuation, and there is no rotational deviation of the rotating magnet. Further, FIG. 19 is a diagram showing a resage circle when two magnetic sensor units 61 and 62 are used, and there is an external magnetic flux, there is a magnetic flux fluctuation, and there is no rotational deviation of the rotating magnet. Further, FIG. 20 is a diagram showing a detection angle error when only one magnetoreceptive element sensor unit 61 is used, and there is an external magnetic flux, there is a magnetic flux fluctuation, and there is no rotation deviation of the rotating magnet. Further, FIG. 21 is a diagram showing a detection angle error in the case where the two magnetoreceptive element sensor units 61 and 62 are used, and there is an external magnetic flux, there is a magnetic flux fluctuation, and there is no rotation deviation of the rotating magnet. Further, FIG. 22 is a diagram showing a resage circle in the case where the four magnetic field element sensor units 61, 62, 63 and 64 are used, and there is an external magnetic flux, there is a magnetic flux fluctuation, and there is a rotation deviation of the rotating magnet. Is. FIG. 23 shows the detection angle error in the case where the four magnetoreceptive element sensor units 61, 62, 63 and 64 are used, and there is an external magnetic flux, there is a magnetic flux fluctuation, and there is a rotation deviation of the rotating magnet. It is a figure.

In FIGS. 11, 15, and 18, the maximum temperature (Max) was 25 ° C, −20 ° C, and 105 ° C, and the minimum temperature (Min) was 25 ° C, −20 ° C, and 105 ° C. In this case, the horizontal axis is the differential voltage of the magnetic sensitive element 71 (unit is V), and the vertical axis is the differential voltage of the magnetic sensitive element 72 (unit is V). Further, in FIGS. 12, 16 and 19, the horizontal axis is taken when the maximum temperature is 25 ° C., −20 ° C., 105 ° C. and the minimum temperature is 25 ° C., −20 ° C., 105 ° C. It is a resage circle in which the differential voltage (unit: V) between the magnetic sensitive element 71 and the magnetic sensitive element 73 is defined, and the vertical axis is the differential voltage (unit: V) between the magnetic sensitive element 72 and the magnetic sensitive element 74. Further, in FIG. 22, when the maximum temperature is 25 ° C., −20 ° C., and 105 ° C., and when the minimum temperature is 25 ° C., −20 ° C., 105 ° C., the horizontal axis is the magnetic sensor 71. The differential voltage (unit: V) between the magnetic element 73, the magnetic sensor 75, and the magnetic sensor 77 is defined, and the vertical axis is the difference between the magnetic element 72, the magnetic sensor 74, the magnetic sensor 76, and the magnetic element 78. It is a resage circle with a dynamic voltage (unit is V).

In addition, FIG. 13, FIG. 14, FIG. 17, FIG. 20, FIG. 21 and FIG. 22 show the case where the maximum temperature is 25 ° C., −20 ° C., 105 ° C., and the minimum temperature is 25 ° C., −20 ° C., 105. It is a graph which shows the detection angle error when the horizontal axis is the angle position (unit is deg) of the 1st rotary magnet 30 and the vertical axis is a detection angle error (unit is deg) in the case of degree temperature.

When there is no external magnetic flux, magnetic flux fluctuation, or rotational deviation of the first rotating magnet 30, if only one magnetic sensing element sensor unit 61 is used, a resage circle as shown in FIG. 11 may be formed. An angle error as represented by 13 may be detected. On the other hand, when the two magnetic sensory element sensor units 61 and 62 are used, a resage circle as shown in FIG. 12 is formed, and as shown in FIG. 14, an angle error is hardly detected.

The resage circle represented by FIG. 12 is a concentric resage circle centered on the intersection of the horizontal axis 0V and the vertical axis 0V. Therefore, as shown in FIG. 14, the detection angle error changes from 0 deg to 360 deg. It is almost 0 over. On the other hand, the resage circle represented by FIG. 11 is not a resage circle centered on the intersection of the horizontal axis 0V and the vertical axis 0V, and an angle error is detected as shown in FIG.

When the four magnetic element sensor units 61, 62, 63 and 64 are used, the shape is substantially the same as the error circle shown in FIG. 12, as in the case where the two magnetic element sensor units 61 and 62 are used. It becomes a resage circle of, and the angle error is hardly detected as in the graph of the angle error shown in FIG.

When there is an external magnetic flux and there is no magnetic flux fluctuation and no rotational deviation of the first rotating magnet 30, if only one magnetic sensing element sensor unit 61 is used, a resage circle as shown in FIG. 15 becomes a resage circle, which is shown in FIG. Angle error is detected. On the other hand, when the two magnetic sensing element sensor units 61 and 62 are used, a resage circle as shown in FIG. 16 (substantially the same as the resage circle represented by FIG. 12) is obtained, and as shown in FIG. 14, Almost no angle error is detected.

When the two magnetic element sensor units 61 and 62 are used, the angle error is hardly detected because the magnetic fields are detected at close positions like the magnetic element sensor units 61 and 62, and the detection results are obtained. This is because it is possible to cancel the influence of the change in the magnetic field due to the external magnetic field (offset of the magnetic field due to the external magnetic field) by combining (adding the signals). In particular, by inverting and combining the detection results of the magnetic sensor units 61 and 62 as in the present embodiment, the influence of the change in the magnetic field due to the external magnetic field can be effectively canceled.

When the four magnetic element sensor units 61, 62, 63 and 64 are used, the shape is substantially the same as the error circle shown in FIG. 16, as in the case where the two magnetic element sensor units 61 and 62 are used. It becomes a resage circle of, and the angle error is hardly detected as in the graph of the angle error shown in FIG.

When there is an external magnetic flux and a magnetic flux fluctuation and there is no rotational deviation of the first rotating magnet 30, if only one magnetic sensing element sensor unit 62 is used, a resage circle as shown in FIG. 18 is formed, which is shown in FIG. 20. Angle error is detected. Further, when the two magnetic sensory element sensor units 61 and 62 are used, a resage circle as shown in FIG. 19 is formed, and an angle error as shown in FIG. 21 is detected. That is, when two magnetic sensor units 61 and 62 are used, an angle error is detected, although not as much as when only one magnetic element sensor unit 62 is used.

On the other hand, when the four magnetic sensory element sensor units 61, 62, 63 and 64 are used, the resage circle having substantially the same shape as the resage circle shown in FIG. 16 is obtained, which is the same as the graph of the angle error shown in FIG. Almost no angle error is detected. When the four magnetic element sensor units 61, 62, 63 and 64 are used, the angle error is hardly detected as in the magnetic element sensor units 61 and 63 and the magnetic element sensor units 62 and 64. By detecting the magnetic fields at opposite positions (in other words, arranging them at approximately equal intervals with respect to the first rotating magnet 30) and combining the detection results (adding the signals), the magnetic field due to magnetic flux fluctuation can be detected. This is because it is possible to cancel the influence of the change (the offset of the magnetic field due to the fluctuation of the magnetic flux).

In the case where there is a magnetic flux fluctuation and there is no external magnetic flux and rotational deviation of the first rotating magnet 30, for example, the two magnetic element sensor units 61 and 63, or the magnetic element sensor units 62 and 64. Even if two are used, the angle error can be effectively suppressed. Even with such a configuration, the magnetic fields are detected at approximately equal intervals with respect to the first rotating magnet 30, and the detection results are combined (signal summation) to change the magnetic field due to magnetic flux fluctuation. This is because it is possible to cancel the influence (offset of the magnetic field due to the fluctuation of the magnetic flux).

When there are external magnetic flux, magnetic flux fluctuation, and rotational deviation of the first rotating magnet 30, if only one magnetic sensing element sensor unit 62 is used, the resage circle becomes almost the same as the resage circle as shown in FIG. , An angle error similar to the angle error as shown in FIG. 20 is detected. Further, when the two magnetic sensory element sensor units 61 and 62 are used, the resage circle is almost the same as the resage circle as shown in FIG. 19, and the angle error similar to the angle error as shown in FIG. 21 is obtained. Detected. Further, when the four magnetic sensory element sensor units 61, 62, 63 and 64 are used, a resage circle as shown in FIG. 22 is formed, and an angle error as shown in FIG. 23 is detected. In the graph of the angle error represented by FIG. 23, the angle error has the shape of a sinusoidal wave.

When the angle error has a sinusoidal shape, the angle error can be easily corrected by using a high-precision error detection device (for example, an optical encoder capable of optically detecting the angle error). .. Hereinafter, as an example of the method for correcting the angle error, a method for correcting the angle error by creating a correction table will be described. However, the method is not limited to such a correction method.

The method for correcting the angle error is a correction table creating device (data processing unit 90 in this embodiment) that creates a correction table for correcting the error of the encoder 1 that detects the angle position of the first rotary magnet 30 from the signal of the magnetic sensing element. ) Is the method (correction table creation method). Then, using a high-precision error detection device (not shown), the error of the angular position of the first rotating magnet 30 detected by the encoder 1 to be measured is calculated for one rotation, and the calculated one rotation is calculated. The intrinsic error component is measured by Fourier transforming the error, only the value of the main error period component of the calculated intrinsic error component is inverse Fourier transformed, and a correction table is created in which the amount of error at each angle position is used as the correction value. The created correction table is stored in the storage means of the encoder 1 (in this embodiment, the memory provided in the data processing unit 90). In this way, by creating a correction table based on the main error period components and creating a correction table with high accuracy, it is possible to correct the angle error.

In other words, the encoder 1 of this embodiment is a correction table creating device that creates a correction table that corrects an error of the encoder 1 that detects an angular position from a signal of a magnetic sensitive element. Then, the error of the angular position of the first rotating magnet 30 detected by the encoder 1 is calculated by the one-rotation error calculating means for calculating one rotation using the high-precision error detecting device, and the one-rotation error calculating means. Inverse Fourier transforms only the values of the eigenerror component calculation means that calculates the eigenerror component by Fourier transforming the error for one rotation and the main error period component of the eigenerror component calculated by the eigenerror component calculation means. Then, a correction table creating means for creating a correction table having an error amount at each angle position as a correction value, and a correction table saving means for storing the correction table created by the correction table creating means in the storage means of the encoder 1. It is equipped with. With such a configuration, it is possible to correct the angle error by creating a correction table based on the main error period component among the inherent error components and creating a highly accurate correction table.

Further, the encoder 1 of the present embodiment has a configuration capable of suppressing the influence of harmonics. Specifically, the encoder 1 of the present embodiment performs data processing based on the detection results (detection data) of the magnetic sensor unit 40, the magnetic sensor sensor unit 50, and the magnetic element sensor unit 60, as described above. A data processing unit 90 for obtaining an angular position of the rotating body 2 is provided, and a harmonic cancel pattern for canceling harmonics of a predetermined order (for example, 7th order) or less is provided, and the data processing unit 90 is provided with a data processing unit 90. The configuration is such that the detection data of the magnetic sensing element sensor unit 60 can be corrected by the correction data that cancels the harmonics exceeding a predetermined order. That is, it is possible to cancel harmonics of a predetermined order or less (for example, 7th order or less) by a harmonic cancellation pattern, and cancel harmonics exceeding a predetermined order (for example, exceeding 7th order) by correction data. It has become.

(Example of another configuration)
Next, an embodiment of a configuration different from that of the encoder 1 (a configuration in which the arrangement of the magnetic sensing element sensor unit 60 is different) will be described with reference to FIGS. 24 and 25. FIG. 24 is a schematic enlarged view for explaining the arrangement of the magnetic sensor unit 61, the magnetic element sensor unit 62, the magnetic sensor unit 63, and the magnetic element sensor unit 64 with respect to the first rotating magnet 30 in the encoder 1. It is a figure corresponding to FIG. FIG. 25 is a diagram showing the wiring of the magnetic sensor unit 61, the magnetic element sensor unit 62, the magnetic element sensor unit 63, and the magnetic element sensor unit 64 with respect to the first rotary magnet 30 in the encoder 1. It is a figure corresponding to FIG.

In the encoder 1 represented by FIGS. 9 and 10, the outputs of the magnetic sensor unit 61 and the magnetic sensor unit 62, and the outputs of the magnetic sensor unit 63 and the magnetic element sensor unit 64 are electric angles. The magnetic sensor unit 61 and the magnetic sensor unit 63 were arranged at an interval of 180 ° in terms of mechanical angle (see FIG. 9). On the other hand, in the encoder 1 shown in FIGS. 24 and 25, the outputs of the magnetic sensor unit 61 and the magnetic sensor unit 62, and the outputs of the magnetic sensor unit 63 and the magnetic element sensor unit 64 are electric. The magnetic sensor unit 61 and the magnetic sensor unit 63 are arranged at an interval of 360 ° at an angle, and at an interval of 180 ° at a mechanical angle plus 180 ° at an electric angle (see FIG. 24).

As described above, in the encoder 1 represented by FIGS. 9 and 10, the magnetic sensor unit 61 and the magnetic sensor unit 62, and the magnetic element sensor unit 63 and the magnetic element sensor unit 64 are They are arranged so as to be offset by 1/2 cycle in the magnetic cycle with respect to the phase of the first rotating magnet 30. The magnetic sensor unit 61 and the magnetic element sensor unit 63 are arranged without being out of phase with respect to the phase of the first rotating magnet 30. On the other hand, in the encoder 1 shown in FIGS. 24 and 25, the magnetic sensor unit 61 and the magnetic sensor unit 62, and the magnetic sensor unit 63 and the magnetic element sensor unit 64 are the first rotating magnets. They are arranged without being out of phase with respect to the phase of 30. The magnetic element sensor unit 61 and the magnetic element sensor unit 63 are arranged so as to be offset by 1/2 cycle in the magnetic cycle with respect to the phase of the first rotating magnet 30.

Therefore, the wiring of the encoder 1 shown in FIGS. 24 and 25 is as shown in FIG. 25. Specifically, the output line 202 of the magnetic sensor unit 62 is connected to the output line 201 of the magnetic sensor unit 61 with pluses and minuses. Then, the output line 204 of the magnetic sensory element sensor unit 64 is connected to the output line 203 of the magnetic sensory element sensor unit 63 with pluses and minuses. Further, the output line 203 to which the output line 204 is connected is connected to the output line 201 to which the output line 202 is connected by reversing the plus and minus.

Further, in the encoder 1 represented by FIGS. 9 and 10 and the encoder 1 represented by FIGS. 24 and 25, the magnetic sensor unit 61, the magnetic element sensor unit 63, and the magnetic sensor The unit 62 and the magnetic sensor unit 64 are arranged at intervals of 180 ° or approximately 180 ° in terms of mechanical angle, but the configuration is not limited to this. For example, the magnetic sensor units are arranged on both sides in the circumferential direction with a mechanical angle of approximately 120 ° with respect to each of the magnetic element sensor units 61 and 62 (that is, three at equal intervals or substantially equal intervals). (Place each magnetic sensor sensor unit). Similarly, four or more magnetic sensing element sensor units may be arranged at equal intervals or substantially equal intervals. However, it is preferable that the outputs of the magnetic sensor units have a phase difference of an integral multiple of 180 ° in terms of electrical angle. This is because, in such a configuration, the influence of the magnetic flux fluctuation can be effectively canceled by combining the detection results of the respective magnetizing element sensor units.

Magnetic element sensor units 61 and magnetic element sensor units 63, and magnetic element sensor units arranged at equal intervals or substantially equal intervals, such as the magnetic sensor unit 62 and the magnetic element sensor unit 64, etc. It can be expressed as an interval magnetic element sensor unit. Further, it can be expressed that the equally spaced magnetic element sensor units are arranged at equal intervals while allowing a predetermined error range. Here, the predetermined error range is within one cycle in the magnetic cycle from the position at equal intervals, and the feeling as the first equidistant magnetic element sensor unit among the equidistant magnetic element sensor units. Positions where the magnetic element sensor unit 61 and the magnetic element sensor unit 63 as the second equidistant magnetic element sensor unit of the equidistant magnetic element sensor units have a phase difference of an integral multiple of 180 ° in electrical angle. It is assumed that the relationship can be satisfied.

Here, FIG. 26 is a schematic plan view for explaining the arrangement of the magnetic sensor unit (equally spaced magnetic element sensor unit) with respect to the rotating magnet in the encoder 1 represented by FIGS. 9 and 10. In FIG. 26, the magnetic sensor unit 61 and the magnetic element sensor unit 63, which are equidistant magnetic element sensor units, and the magnetic element sensor unit 62 and the magnetic element sensor unit 64 have a mechanical angle of 180. It shows an example in which they are arranged at intervals of ° (equally spaced).

FIG. 27 is a schematic plan view for explaining the arrangement of the magnetic sensor unit (equally spaced magnetic element sensor unit) with respect to the rotating magnet in the encoder 1 different from the above. In FIG. 27, the magnetic sensor unit 61, the magnetic element sensor unit 161 and the magnetic element sensor unit 63, the magnetic element sensor unit 163, and the magnetic element sensor unit, which are equidistant magnetic sensor units, are shown. An example is shown in which 62, the magnetic sensor unit 162, the magnetic element sensor unit 62, and the magnetic element sensor unit 164 are arranged at intervals (equal intervals) of 90 ° at the mechanical angle.

FIG. 28 is a schematic plan view for explaining the arrangement of the magnetic sensor unit (equally spaced magnetic element sensor unit) with respect to the rotating magnet in the encoder 1, which is different from the above. FIG. 28 shows a magnetic sensor unit 61, a magnetic element sensor unit 261 and a magnetic element sensor unit 263, which are equidistant magnetic sensor units, and a magnetic sensor unit 62 and a magnetic element sensor unit. An example is shown in which the 262 and the magnetic sensor sensor unit 264 are arranged at intervals of approximately 120 ° in mechanical angle (approximately equal intervals: equal intervals that allow a predetermined error range).

Further, in addition to the arrangement of the magnetic sensor unit 60, the magnetic element sensor unit 40 and the magnetic element sensor unit 50 may have different configurations. That is, the encoder 1 shown in FIG. 4 has a magnetic resistance element sensor unit 40 which is a magnetic resistance element at a position facing the center of the second rotating magnet 20, and a Hall element at a position facing the second rotating magnet 20. A magnetic element sensor that is a Hall element at a position facing a certain magnetic element sensor unit 51 and a second rotating magnet 20 and at a position deviated by 90 ° from the mechanical angle in the circumferential direction. Although the unit 52 is provided, the magnetic element sensor unit 40 and the magnetic element sensor unit 50 can be configured differently if the approximate absolute position of the second rotating magnet 20 can be detected.

For example, in the encoder 1 shown in FIG. 4, the magnetic sensor unit 40 is omitted, that is, the magnetic sensor unit 51, which is a Hall element at a position facing the second rotating magnet 20, and the second rotating magnet. The configuration is such that the magnetic sensor unit 52, which is a Hall element, is provided at a position facing the 20 and at a position deviated by 90 ° from the mechanical angle in the circumferential direction with respect to the magnetic sensor unit 51. can. Even with such a configuration, since the magnetic field element sensor units 51 and 52, which are Hall elements, can detect the direction of the magnetic field from the N pole to the S pole, the rough absolute position of the second rotating magnet 20 is obtained. Can be detected.

Further, for example, in the encoder 1 shown in FIG. 4, the magnetic sensing element sensor unit 40 is omitted, and the Hall element is a Hall element at a position deviated by 180 ° by the mechanical angle in the circumferential direction with respect to the magnetic sensing element sensor unit 51. The element sensor unit may be provided, and the magnetic sensor unit, which is a Hall element, may be provided at a position deviated by 180 ° from the mechanical angle in the circumferential direction with respect to the magnetic sensor unit 52. Even with such a configuration, the magnetic sensor unit, which is a Hall element, can detect the direction of the magnetic field from the N pole to the S pole, so that the approximate absolute position of the second rotating magnet 20 can be determined. Can be detected.

Here, to summarize the encoder 1 to which the present invention can be applied, the encoder 1 to which the present invention can be applied is a first rotating magnet which is a rotating magnet in which a plurality of N poles and S poles are magnetized alternately in the circumferential direction. 30 It includes a second magnetic sensing element 79 for detecting the position of 30, and a plurality of magnetic sensing element sensor units 60 having the second magnetic sensing element 79.
Then, as shown in FIGS. 4 and 8, the magnetic sensor unit 60 is an equidistant magnetic element sensor that is arranged at equal intervals while allowing a predetermined error range with respect to the first rotating magnet 30. It has a unit (for example, a magnetic sensing element sensor unit 61).
Here, the predetermined error range is within one cycle of the magnetic cycle from the position where the intervals are equal, and is the first equidistant magnetic element sensor unit among the equidistant magnetic element sensor units (for example, feeling). The output of the first magnetic element 70 (for example, the magnetic element 71) of the magnetic element sensor unit 61) and the second equidistant magnetic element sensor unit (for example, the magnetic element sensor unit) among the magnetic element sensor units. The output of the first magnetic sensing element 70 (for example, the magnetic sensing element 75) of 63) and the second magnetic sensing element 79 (for example, feeling) of the first equidistant magnetic sensing element sensor unit (for example, the magnetic sensing element sensor unit 61). The output of the second magnetic element 79 (for example, the magnetic element 76) of the second magnetic element sensor unit (for example, the magnetic element sensor unit 63) at equal intervals to the output of the magnetic element 72) has an electric angle of 180 °. It is a range capable of satisfying a positional relationship having a phase difference of an even multiple (that is, an integral multiple of 360 °, which is one phase).
Further, as shown in FIG. 10, the positive output terminals of the first equidistant magnetic element sensor unit (for example, the positive output terminals HE1P and HE2P of the magnetic sensor unit 61) and the second equidistant magnetic element sensor unit. Is connected to the positive output terminal (for example, the positive output terminals HE1P and HE2P of the magnetic sensor unit 63), and the negative output terminal of the first equidistant magnetic element sensor unit (for example, the negative output terminal of the magnetic sensor unit 61). HE1N and HE2N) and the negative output terminals of the second equidistant magnetic sensor unit (for example, the negative output terminals HE1N and HE2N of the magnetic sensor unit 63) are connected.

By having a plurality of magnetic element sensor units 60 provided with magnetic elements at positions that can be detected with a phase difference of 90 ° in electrical angle, a highly accurate encoder can be obtained. Further, the output of the first equidistant magnetic sensor units and the output of the second equidistant magnetic element sensors are 180 in electric angle within the range of one period from the equidistant position to the magnetic cycle. Arranged within a range that can satisfy the positional relationship having a phase difference of even multiples of °, and the positive output terminals HE1P and HE2P of the first equidistant magnetic element sensor unit and the second equidistant magnetic element sensor unit. The positive output terminals HE1P and HE2P of the above are connected, and the negative output terminals HE1N and HE2N of the first equidistant magnetic element sensor unit are connected to the negative output terminals HE1N and HE2N of the second equidistant magnetic element sensor unit. That is, the first equidistant magnetic element sensor unit and the second equidistant magnetic field are arranged at positions where there is no phase shift (position where the phase is shifted by one cycle in the magnetic cycle) and mechanically separated. By averaging the output of the element sensor unit, the influence of magnetic flux fluctuation can be suppressed.

In the above description, the magnetic sensor unit 61 is used as the first equidistant magnetic element sensor unit, and the magnetic sensor unit 63 is used as the second equidistant magnetic element sensor unit. The magnetic element sensor unit 63 can be considered as a first equidistant magnetic element sensor unit, and the magnetic element sensor unit 61 can be considered as a second equidistant magnetic element sensor unit. Similarly, the magnetic sensor unit 62 is considered as the first equidistant magnetic element sensor unit, the magnetic sensor unit 64 is considered as the second equidistant magnetic element sensor unit, and the magnetic element sensor unit 64. Can be considered as a first equidistant magnetic sensor unit, and the magnetic sensor unit 62 can be considered as a second equidistant magnetic element sensor unit.

Further, as shown in FIG. 24, the predetermined error range is within one cycle of the magnetic cycle from the position at which the intervals are equal, and the first equal interval feeling in the equidistant magnetic element sensor unit. The output of the first magnetic element 70 (for example, the magnetic sensor 71) of the magnetic element sensor unit (for example, the magnetic element sensor unit 61) and the second equidistant magnetic element sensor unit of the magnetic element sensor unit (For example, the output of the first magnetic sensory element 70 (for example, the magnetic sensory element 75) of the magnetic sensory element sensor unit 63) and the first equidistant magnetic element sensor unit (for example, the magnetic sensory element sensor unit 61). 2 Output of the magnetic sensory element 79 (for example, the magnetic sensory element 72) and the output of the second magnetic sensory element 79 (for example, the magnetic sensory element 76) of the second magnetic sensory element sensor unit (for example, the magnetic sensory element sensor unit 63) at equal intervals. However, it is a range capable of satisfying a positional relationship having a phase difference of an odd multiple of 180 ° in the electric angle (that is, an integral multiple of 360 °, which is one cycle in the magnetic cycle −180 °).
Then, as shown in FIG. 25, the positive output terminals HE1P and HE2P of the first equidistant magnetic element sensor unit and the negative output terminals HE1N and HE2N of the second equidistant magnetic element sensor unit are connected to each other. The negative output terminals HE1N and HE2N of the 1 equidistant magnetic element sensor unit and the positive output terminals HE1P and HE2P of the 2nd equidistant magnetic element sensor unit are connected.

By having a plurality of magnetic element sensor units 60 provided with magnetic elements at positions that can be detected with a phase difference of 90 ° in electrical angle, a highly accurate encoder can be obtained. Further, the output of the first equidistant magnetic sensor units and the output of the second equidistant magnetic element sensors are 180 in electric angle within the range of one period from the equidistant position to the magnetic cycle. Arranged in a range that can satisfy the positional relationship having a phase difference of an odd multiple of °, and the positive output terminals HE1P and HE2P of the first equidistant magnetic element sensor unit and the second equidistant magnetic element sensor unit. The negative output terminals HE1N and HE2N of the above are connected, and the positive output terminals HE1P and HE2P of the first equidistant magnetic element sensor unit are connected to the negative output terminals HE1N and HE2N of the second equidistant magnetic element sensor unit. That is, the outputs of the first equidistant magnetic element sensor unit and the second equidistant magnetic element sensor unit that are mechanically separated from each other by 1/2 cycle in the magnetic period. By inverting one side and averaging it, the influence of magnetic flux fluctuation can be suppressed.

Further, as shown in FIGS. 8 and 9, in the encoder 1 to which the present invention can be applied, the magnetic sensor unit 60 includes the first magnetic sensor 70 and the second magnetic element 79 in one package. Have in. Therefore, the first magnetic sensing element 70 and the second magnetic sensing element 79 can be positioned with high accuracy, and the encoder 1 with particularly high accuracy can be obtained.

Further, as described above, in the encoder 1 to which the present invention can be applied, the first magnetic sensing element 70 and the second magnetic sensing element 79 are Hall elements, and the direction of the magnetic field (distinguishing between the N pole and the S pole) is independent. ) Can be detected, so that the encoder 1 can be formed at low cost.
However, as described above, the first magnetic sensing element 70 and the second magnetic sensing element 79 may be used as a magnetoresistive element. By doing so, since the rotating magnetic field of the opposing magnets is detected, the rotational position can be stably detected even if the magnetic flux intensity fluctuates due to magnetism variation or vibration of the rotating portion.

Further, the encoder 1 to which the present invention can be applied includes, for example, a set consisting of a magnetic sensor unit 61 and a magnetic element sensor unit 63, and a set consisting of a magnetic element sensor unit 62 and a magnetic element sensor unit 64. As described above, two or more sets of two equidistant magnetic element sensor units may be provided. By providing two or more sets of two equally spaced magnetic sensor units, a particularly high-precision encoder can be obtained.

Further, as shown in FIG. 4 and the like, the encoder 1 to which the present invention can be applied includes a first rotating magnet 30 in which a plurality of N poles and S poles are magnetized alternately in the circumferential direction, and a first rotating magnet. A magnetic element sensor unit 60 as a magnetizing element for a first rotating magnet that detects the position of 30, and a second magnet that is rotatable together with the first rotating magnet 30 and has north and south poles magnetized in the circumferential direction. The two-rotating magnet 20 and the magnetic-sensitive element sensor units 40 and 50, which are magnetic-sensitive elements for the second rotating magnet, for detecting the position of the second rotating magnet 20 are provided. Therefore, the second rotating magnet 20 and the magnetic sensing element sensor units 40 and 50 can detect not only the amount of rotation of the first rotating magnet 30 (rotating body 2) but also the absolute position (angle position).
The encoder 1 is provided with a second rotating magnet 20 in which an N pole and an S pole are magnetized one by one in the circumferential direction, but the absolute position (angle position) of the rotating body 2 is detected. As long as it can be configured, the second rotating magnet 20 is not limited to the configuration in which the north pole and the south pole are magnetized one by one in the circumferential direction.

Further, as shown in FIGS. 8 and 9, the encoder 1 to which the present invention can be applied is the magnetic sensor unit 60, which is a sensor unit with equal intervals (for example, a magnetic element sensor unit 61). In addition to the magnetic element sensor unit 63), the proximity magnetic element sensor unit (for example, the proximity magnetic element sensor unit) arranged at a mechanical angle of 30 ° or less with respect to at least one of the equidistant magnetic element sensor units (for example, the magnetic element sensor unit 61). For example, a magnetic sensing element sensor unit 62) is provided.
In this way, by having the proximity magnetic flux element sensor unit at a position close to the equidistant magnetic flux element sensor unit, the output of the equidistant magnetic flux element sensor unit and the output of the proximity magnetic flux element sensor unit can be used (for example). By averaging), the influence of external magnetic flux can be suppressed. For example, when a feeder line through which a large current flows is close to the outside of the encoder 1, the first magnetic element sensor unit 61 and the second magnetic element sensor unit 62 cancel the magnetic flux at the same level with respect to the generated magnetic field. Therefore, the influence of the external magnetic flux can be suppressed by arranging the machine angle at 30 ° or less.

In the above description, the magnetic sensor unit 61 and the magnetic sensor unit 63 are equal-spaced magnetic sensor units, and the magnetic sensor unit 62 is a close magnetic element sensor unit with respect to the magnetic element sensor unit 61. However, the magnetic sensor unit 61 and the magnetic sensor unit 63 are considered to be equidistant magnetic element sensor units, and the magnetic sensor unit 64 is regarded as a proximity magnetic element sensor unit with respect to the magnetic element sensor unit 63. You can also think about it. Similarly, the magnetic sensor unit 62 and the magnetic element sensor unit 64 are considered as equidistant magnetic element sensor units, and the magnetic sensor unit 61 is considered as a proximity magnetic element sensor unit with respect to the magnetic element sensor unit 62. In addition, the magnetic sensor unit 62 and the magnetic element sensor unit 64 are considered to be equidistant magnetic element sensor units, and the magnetic sensor unit 63 is considered to be a close magnetic element sensor unit with respect to the magnetic element sensor unit 64. You can also. Further, another magnetic sensing element sensor unit may be provided.

However, the magnetic sensor unit 60 may be composed of two equidistant magnetic element sensor units at an arrangement of 180 ° with a mechanical angle that allows a predetermined error range. For example, the magnetic sensor unit 61 as the first magnetic sensor unit at equal intervals and the magnetic element sensor unit 63 as the second magnetic sensor sensor unit at equal intervals are the two sensors of the magnetic element sensor at equal intervals (sensitivity). By configuring the magnetic element sensor 60), it is possible to form an encoder at low cost. Further, by arranging the two equidistant magnetoreceptive element sensor units at a mechanical angle of 180 ° with a mechanical angle that allows a predetermined error range, the influence of magnetic flux fluctuation can be effectively suppressed.

The present invention is not limited to the above-described embodiment, and can be realized with various configurations within a range not deviating from the gist thereof. For example, the technical features in the examples corresponding to the technical features in each form described in the column of the outline of the invention are for solving a part or all of the above-mentioned problems, or one of the above-mentioned effects. It is possible to replace or combine as appropriate to achieve the part or all.
Further, if the technical feature is not described as essential in the present specification, it can be appropriately deleted.

1 ... Encoder (rotary encoder), 2 ... Rotating body, 10 ... Fixed body,
11 ... Support member, 12 ... Base body, 13 ... Sensor support plate, 15 ... Sensor board,
16 ... Terminal, 17 ... Connector, 20 ... Second rotating magnet, 21 ... Magnetized surface,
30 ... 1st rotating magnet, 31 ... Magnetized surface,
40 ... Magnetic element sensor unit (magnetic element for second rotating magnet), 41 ... Magnetic resistance pattern,
42 ... Magnetic resistance pattern, 43 ... Magnetic resistance pattern, 44 ... Magnetic resistance pattern,
50 ... Magnetic element sensor unit (magnetic element for the second rotating magnet), 51 ... Magnetic element sensor unit,
52 ... Magnetic element sensor unit, 60 ... Magnetic element sensor unit (magnetic element for first rotating magnet),
61 ... Magnetic element sensor unit (first magnetic element sensor unit),
62 ... Magnetic element sensor unit (second magnetic sensor unit),
63 ... Magnetic element sensor unit (third magnetic element sensor unit),
64 ... Magnetic element sensor unit (4th magnetic sensitive element sensor unit), 70 ... 1st magnetic sensitive element,
71 ... Magnetic element, 72 ... Magnetic element, 73 ... Magnetic element, 74 ... Magnetic element,
75 ... Magnetic element, 76 ... Magnetic element, 77 ... Magnetic element, 78 ... Magnetic element,
79 ... 2nd magnetic sensory element, 90 ... data processing unit, 91 ... amplifier, 92 ... amplifier,
93 ... amplifier, 121 ... bottom plate, 122 ... opening, 123 ... body, 124 ... protrusion,
125 ... hole, 191 ... screw, 192 ... screw, 193 ... screw, 201 ... output line,
202 ... output line, 203 ... output line, 204 ... output line, GND ... ground terminal,
HE1N ... Negative output terminal, HE1P ... Positive output terminal,
HE2N ... Negative output terminal, HE2P ... Positive output terminal, VC ... Voltage terminal

Claims (8)

A rotating magnet in which multiple N poles and S poles are magnetized alternately in the circumferential direction,
A second magnetizing element that detects the position of the rotating magnet and a second magnetizing element that is arranged at a position having a phase difference of 90 ° in electrical angle with respect to the output of the first magnetic sensing element and detects the position of the rotating magnet. A plurality of magnetically sensitive element sensor units having a magnetically sensitive element, and
Equipped with
As the magnetic sensor unit, the first equidistant magnetic element sensor unit and the second equidistant magnetic element sensor unit among the magnetic element sensor units allow a predetermined error range for the rotating magnet. Has an equidistant magnetic sensor unit which is arranged at equal intervals in the rotation direction of the rotating magnet .
The predetermined error range is within one cycle in the magnetic cycle from the position at equal intervals, and is the output of the first magnetic sensor of the first equidistant magnetic element sensor unit and the second equidistant interval. The output of the first magnetic element of the magnetic sensor unit, the output of the second magnetic element of the first equidistant magnetic element sensor unit, and the output of the second equidistant magnetic element sensor unit . The output of the two magnetic sensitive elements is within the range in which it is possible to satisfy the positional relationship having a phase difference of even multiples of 180 ° in the electric angle.
The positive output terminal of the first equidistant magnetic element sensor unit and the positive output terminal of the second equidistant magnetic element sensor unit are connected, and the negative output terminal of the first equidistant magnetic element sensor unit and the above. The negative output terminal of the second equidistant magnetic sensor sensor is connected ,
As the magnetic sensor unit, in addition to the equidistant magnetic element sensor unit, a proximity magnetic element sensor arranged at a mechanical angle of 30 ° or less with respect to at least one of the equidistant magnetic element sensor units. A part is provided,
An encoder characterized by having three or more pairs of the equidistant magnetic sensor unit and the close magnetic element sensor unit . A rotating magnet in which multiple N poles and S poles are magnetized alternately in the circumferential direction,
A second magnetizing element that detects the position of the rotating magnet and a second magnetizing element that is arranged at a position having a phase difference of 90 ° in electrical angle with respect to the output of the first magnetic sensing element and detects the position of the rotating magnet. A plurality of magnetically sensitive element sensor units having a magnetically sensitive element, and
Equipped with
As the magnetic sensor unit, the first equidistant magnetic element sensor unit and the second equidistant magnetic element sensor unit among the magnetic element sensor units allow a predetermined error range for the rotating magnet. Has an equidistant magnetic sensor unit which is arranged at equal intervals in the rotation direction of the rotating magnet .
The predetermined error range is within one cycle in the magnetic cycle from the position at equal intervals, and is the output of the first magnetic sensor of the first equidistant magnetic element sensor unit and the second equidistant interval. The output of the first magnetic element of the magnetic sensor unit, the output of the second magnetic element of the first equidistant magnetic element sensor unit, and the output of the second equidistant magnetic element sensor unit . The output of the two magnetic sensitive elements is within the range in which the positional relationship having an odd multiple of 180 ° in electrical angle can be satisfied.
The positive output terminal of the first equidistant magnetic element sensor unit and the negative output terminal of the second equidistant magnetic element sensor unit are connected, and the negative output terminal of the first equidistant magnetic element sensor unit and the above. The positive output terminal of the second equidistant magnetic sensor sensor is connected ,
As the magnetic sensor unit, in addition to the equidistant magnetic element sensor unit, a proximity magnetic element sensor arranged at a mechanical angle of 30 ° or less with respect to at least one of the equidistant magnetic element sensor units. A part is provided,
An encoder characterized by having three or more pairs of the equidistant magnetic sensor unit and the close magnetic element sensor unit . In the encoder according to claim 1 or 2.
The magnetic sensor unit is an encoder having the first magnetic element and the second magnetic element in one package. In the encoder according to any one of claims 1 to 3,
An encoder in which the first magnetic sensing element and the second magnetic sensing element are Hall elements. In the encoder according to any one of claims 1 to 3,
An encoder characterized in that the first magnetic sensing element and the second magnetic sensing element are magnetoresistive elements. In the encoder according to any one of claims 1 to 5,
An encoder characterized by being provided with two equidistant magnetoreceptive element sensor units at an arrangement of 180 ° with a mechanical angle that allows the predetermined error range. In the encoder according to claim 6,
An encoder characterized by including two or more sets of the two equidistant magnetoreceptive element sensor units. In the encoder according to any one of claims 1 to 7.
The rotating magnet is a first rotating magnet in which a plurality of N poles and S poles are alternately magnetized in the circumferential direction.
A second rotating magnet that can rotate with the first rotating magnet and has N and S poles magnetized in the circumferential direction, and a magnetizing element for the second rotating magnet that detects the position of the second rotating magnet. An encoder characterized by being provided with.

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