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JP7079044B2 - Heating device and heating method - Google Patents

Heating device and heating method Download PDF

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JP7079044B2
JP7079044B2 JP2021522313A JP2021522313A JP7079044B2 JP 7079044 B2 JP7079044 B2 JP 7079044B2 JP 2021522313 A JP2021522313 A JP 2021522313A JP 2021522313 A JP2021522313 A JP 2021522313A JP 7079044 B2 JP7079044 B2 JP 7079044B2
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heating
heating device
heated
heat
insertion portion
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JPWO2020241490A1 (en
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利彰 神吉
貴大 木邊
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Kyushu Nissho KK
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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27FURNACES; KILNS; OVENS; RETORTS
    • F27BFURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B17/00Furnaces of a kind not covered by any preceding group
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27FURNACES; KILNS; OVENS; RETORTS
    • F27DDETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D11/00Arrangement of elements for electric heating in or on furnaces
    • F27D11/02Ohmic resistance heating
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27FURNACES; KILNS; OVENS; RETORTS
    • F27DDETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D19/00Arrangements of controlling devices
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27FURNACES; KILNS; OVENS; RETORTS
    • F27DDETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D3/00Charging; Discharging; Manipulation of charge
    • F27D3/12Travelling or movable supports or containers for the charge
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27FURNACES; KILNS; OVENS; RETORTS
    • F27DDETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D5/00Supports, screens, or the like for the charge within the furnace

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Resistance Heating (AREA)
  • Furnace Details (AREA)

Description

本発明は、加熱装置および加熱方法に関する。 The present invention relates to a heating device and a heating method.

特許文献1は、液晶表示パネルなどの構成部材であるガラス基板等の板状物を熱処理する加熱気体循環方式のクリーンオーブンが使用されている(例えば、特許文献1参照。)。このクリーンオーブンは、ガラス基板などの被熱処理物を恒温槽内に収容し、この恒温槽内においてファンによって循環する加熱気体を用いて被加熱物の熱処理を行うものである。
加熱気体循環方式のクリーンオーブンの場合、ガラス基板などの被加熱物を多段状に収容する構造を採用しやすいので、スペース効率に優れている反面、加熱温度分布を均一化することが困難であり、加熱気体の攪拌によりクリーン度が低下する可能性が高い。また、被加熱物が比較的軽量である場合、加熱気体の循環対流によって被加熱物が所定の位置から移動することがある。
Patent Document 1 uses a heated gas circulation type clean oven that heat-treats a plate-like object such as a glass substrate which is a constituent member of a liquid crystal display panel or the like (see, for example, Patent Document 1). In this clean oven, an object to be heat-treated such as a glass substrate is housed in a constant temperature bath, and the heat-treated object is heat-treated using a heated gas circulated by a fan in the constant temperature bath.
In the case of a heated gas circulation type clean oven, it is easy to adopt a structure that accommodates objects to be heated such as a glass substrate in multiple stages, so it is excellent in space efficiency, but it is difficult to make the heating temperature distribution uniform. There is a high possibility that the degree of cleanliness will decrease due to the stirring of the heated gas. Further, when the object to be heated is relatively lightweight, the object to be heated may move from a predetermined position due to circulating convection of the heated gas.

特許文献2は、内部に発熱体を有する放熱板の両面に遠赤外線放射セラミックスの薄層が被覆され、この放熱板の加熱によって両面から遠赤外線を放射する両面加熱式の遠赤外線パネルヒータからなる多数の棚状ヒータが、炉本体内に上下方向に一定間隔で多段配置され、これらの棚状ヒータの間に形成される各空間部分をそれぞれ乾燥室とした加熱炉を開示している。
特許文献2記載の加熱炉の場合、上下方向に配置された多数の棚状ヒータから発される熱は、加熱炉内を上昇して炉内の天壁寄りの領域に集まる傾向があるため、炉内上部領域の温度は、炉内下部領域の温度より高くなっており、このような炉内上部領域と炉内下部領域との間の温度差をなくすことは極めて困難である。
Patent Document 2 comprises a double-sided heating type far-infrared panel heater in which a thin layer of far-infrared radiation ceramics is coated on both sides of a heat-dissipating plate having a heating element inside, and far-infrared rays are radiated from both sides by heating the heat-dissipating plate. Disclosed is a heating furnace in which a large number of shelf-shaped heaters are arranged in a plurality of stages in the furnace body at regular intervals in the vertical direction, and each space formed between these shelf-shaped heaters is used as a drying chamber.
In the case of the heating furnace described in Patent Document 2, the heat generated from a large number of shelf-shaped heaters arranged in the vertical direction tends to rise in the heating furnace and collect in the region near the top wall in the furnace. The temperature of the upper region of the furnace is higher than the temperature of the lower region of the furnace, and it is extremely difficult to eliminate such a temperature difference between the upper region of the furnace and the lower region of the furnace.

特開2001-56141号公報Japanese Unexamined Patent Publication No. 2001-56141 特開2001-317872号公報Japanese Unexamined Patent Publication No. 2001-317872 特開2013-200077号公報Japanese Unexamined Patent Publication No. 2013-200077 特開2005-352306号公報Japanese Unexamined Patent Publication No. 2005-352306 特開2005-055152号公報Japanese Unexamined Patent Publication No. 2005-055152

特許文献3-5は、温度分布の均一性及びクリーン度を改善するための加熱装置を開示している。
従来においては、さらなる温度分布の均一性及びクリーン度の向上に対する要請が存在した。
Patent Document 3-5 discloses a heating device for improving the uniformity and cleanliness of the temperature distribution.
In the past, there has been a demand for further improvement in temperature distribution uniformity and cleanliness.

本発明が解決しようとする課題は、温度分布の均一性及びクリーン度に優れた加熱装置および加熱方法を提供することにある。 An object to be solved by the present invention is to provide a heating device and a heating method having excellent temperature distribution uniformity and cleanliness.

本発明の加熱装置は、距離を隔てて対向配置された複数の加熱用壁体と、
前記複数の加熱用壁体の各々に設けられた複数の発熱手段と、
複数の前記加熱用壁体の対向領域に上下方向に距離を隔てて棚状に配置されて前記加熱用壁体からの熱を伝導させる金属製の複数の熱放射部材と、を備え、
前記複数の加熱用壁体と前記複数の熱放射部材とは、被加熱物をそれぞれ収容するための複数の収容スペースを上下方向に画定し、
前記複数の収容スペースは、前記加熱用壁体と前記熱放射部材とにより画定される開口部を前面側および背面側に有し、前記背面側の開口部は、閉塞部材により閉塞されている。
The heating device of the present invention comprises a plurality of heating walls arranged opposite to each other at a distance from each other.
A plurality of heat generating means provided in each of the plurality of heating walls, and
A plurality of metal heat radiating members, which are arranged in a shelf shape at intervals in the vertical direction in the facing regions of the plurality of heating walls and conduct heat from the heating walls, are provided.
The plurality of heating walls and the plurality of heat radiating members define a plurality of accommodating spaces for accommodating objects to be heated in the vertical direction.
The plurality of accommodation spaces have openings defined by the heating wall body and the heat radiating member on the front side and the back side, and the opening on the back side side is closed by the closing member.

好適には、前記前面側の開口部を閉塞する閉塞部と、前記収容スペース内に挿入され、前記加熱用壁体または前記熱放射部材と直接接触する挿入部と、を有する金属製の引き出し機構をさらに有する。 Preferably, a metal pull-out mechanism having a closing portion that closes the opening on the front surface side and an insertion portion that is inserted into the accommodation space and is in direct contact with the heating wall or the heat radiating member. Further have.

さらに好適には、前記挿入部は、被加熱物を搭載可能に形成されている。 More preferably, the insertion portion is formed so that an object to be heated can be mounted.

本発明の加熱方法は、上記の加熱装置を用いて被加熱物を加熱する。 In the heating method of the present invention, the object to be heated is heated by using the above-mentioned heating device.

本発明によれば、温度分布の均一性及びクリーン度に優れた加熱装置およびこの加熱装置を用いた加熱方法が提供される。 According to the present invention, there is provided a heating device having excellent uniformity of temperature distribution and cleanliness, and a heating method using the heating device.

本発明の第1実施形態に係る加熱装置を示す正面図。The front view which shows the heating apparatus which concerns on 1st Embodiment of this invention. 図1の加熱装置の側面図。The side view of the heating apparatus of FIG. コイル状ヒータの構成を示す図。The figure which shows the structure of the coil type heater. 図1の加熱装置の断面図であって、コイル状ヒータの配置を示す断面図。FIG. 6 is a cross-sectional view of the heating device of FIG. 1 showing the arrangement of coiled heaters. 本発明の第2実施形態に係る加熱装置の要部拡大図。The enlarged view of the main part of the heating apparatus which concerns on 2nd Embodiment of this invention. 図5の加熱装置の側面図。FIG. 5 is a side view of the heating device of FIG. 本発明の第3実施形態に係る加熱装置の要部拡大図。The enlarged view of the main part of the heating apparatus which concerns on 3rd Embodiment of this invention. 図7の加熱装置の側面図。A side view of the heating device of FIG. 7. 本発明の第4実施形態に係る加熱装置の上面図。The top view of the heating apparatus which concerns on 4th Embodiment of this invention. 図9の加熱装置の側面図。FIG. 9 is a side view of the heating device of FIG. 本発明の第5実施形態に係る加熱装置の上面図。The top view of the heating apparatus which concerns on 5th Embodiment of this invention. 図11の加熱装置の側面図。FIG. 11 is a side view of the heating device of FIG.

以下、図面を参照しつつ本発明の実施形態である加熱装置100について説明する。
図1に示すように、加熱装置100は、距離を隔てて対向配置された複数の加熱用壁体10(10A~10C)と、加熱用壁体10に設けられた発熱手段である複数のコイル状ヒータ11と、複数の加熱用壁体10の対向領域に上下方向A1,A2に距離を隔てて棚状に配置された複数の熱放射部材12と、上下方向に隣り合う熱放射部材12の間に設けられた被加熱物Wの収容スペース14と、両端部に配置された左側加熱用壁体10Aおよび右側加熱用壁体10Cの外壁面を覆うように設けられた断熱材23と、左側加熱用壁体10Aおよび右側加熱用壁体10Cの外壁面に断熱材23を介して設けられた複数の突起部材50(50A,50B)と、を備えている。
Hereinafter, the heating device 100 according to the embodiment of the present invention will be described with reference to the drawings.
As shown in FIG. 1, the heating device 100 includes a plurality of heating wall bodies 10 (10A to 10C) arranged to face each other at a distance from each other, and a plurality of coils as heat generating means provided on the heating wall body 10. The shape heater 11, a plurality of heat radiating members 12 arranged in a shelf shape in the facing regions of the plurality of heating walls 10 at intervals in the vertical directions A1 and A2, and the heat radiating members 12 adjacent to each other in the vertical direction. A storage space 14 for the object to be heated W provided between them, a heat insulating material 23 provided so as to cover the outer wall surfaces of the left side heating wall 10A and the right side heating wall 10C arranged at both ends, and the left side. A plurality of protruding members 50 (50A, 50B) provided on the outer wall surface of the heating wall body 10A and the right side heating wall body 10C via the heat insulating material 23 are provided.

加熱用壁体10の上端側及び下端側はそれぞれ天板16及び底板17によって連結され、底板17の下面は、架台ユニット30によって支持されている。 The upper end side and the lower end side of the heating wall body 10 are connected by the top plate 16 and the bottom plate 17, respectively, and the lower surface of the bottom plate 17 is supported by the gantry unit 30.

加熱用壁体10は、アルミニウム合金やステンレス鋼等の金属で形成され、箱型の本加熱装置100の両側面及び中央の仕切り壁をなす構造部材であるとともに、加熱装置の熱源となる部材である。本実施形態では、左側加熱用壁体10A、中央加熱用壁体10B、右側加熱用壁体10Cの3枚からなる。各加熱用壁体10には、正面側から背面側まで水平方向に複数の貫通孔24が開設され、これらの貫通孔24内にそれぞれコイル状ヒータ11が着脱可能に挿入されている。 The heating wall 10 is a structural member made of a metal such as an aluminum alloy or stainless steel, which forms a partition wall on both side surfaces and a center of the box-shaped main heating device 100, and is a member that serves as a heat source for the heating device. be. In the present embodiment, the left side heating wall body 10A, the central heating wall body 10B, and the right side heating wall body 10C are composed of three pieces. A plurality of through holes 24 are formed in each heating wall 10 in the horizontal direction from the front side to the back side, and coiled heaters 11 are detachably inserted into the through holes 24.

コイル状ヒータ11は、詳細を図3に示すように、金属管(シース)11sの内部にコイル状に巻いた発熱線11wを収容した構造になっている。図3では簡略化して示しているが、コイル状に巻いた発熱線11wは右端から左端へ往復し、右端から2本のリード線が延出している。往復の発熱線11wの間及び発熱線11wと金属管11sの間は、粉末状の酸化マグネシウムを固めた絶縁層で絶縁されている。
コイル状ヒータ11は、発熱線11wの巻き線ピッチが、両端部W1,W1では小さく、中央部W2では大きくし、両端部での発熱量が中央部の発熱量よりも大きくなるように形成されている。
As shown in FIG. 3 in detail, the coil-shaped heater 11 has a structure in which a heating wire 11w wound in a coil shape is housed inside a metal tube (sheath) 11s. Although shown in a simplified manner in FIG. 3, the heating wire 11w wound in a coil shape reciprocates from the right end to the left end, and two lead wires extend from the right end. The space between the reciprocating heating wire 11w and the heating wire 11w and the metal tube 11s are insulated by an insulating layer made of powdered magnesium oxide.
The coiled heater 11 is formed so that the winding pitch of the heating wire 11w is small at both ends W1 and W1 and large at the central portion W2, and the calorific value at both ends is larger than the calorific value at the central portion. ing.

各加熱用壁体10におけるコイル状ヒータ11の配置は、図4に示すように、下部で間隔が狭く上部で間隔が広く配置された全ての貫通孔24にそれぞれ挿入されている。これにより、各加熱用壁体10の上下方向A1,A2については、コイル状ヒータ11の配置間隔の小さい下部で発熱量が大きくなるので、温度が低くなりがちな下部の温度を高めている。また、奥行方向B1,B2については、温度が低下しがちな奥行方向両端部の発熱量を大きくし、温度分布が均一になるようにしている。 As shown in FIG. 4, the arrangement of the coiled heaters 11 in each heating wall 10 is inserted into all the through holes 24 in which the spacing is narrow at the bottom and wide at the top. As a result, in the vertical directions A1 and A2 of each heating wall 10, the calorific value increases in the lower portion where the arrangement interval of the coil-shaped heater 11 is small, so that the temperature of the lower portion, which tends to be low, is increased. Further, in the depth directions B1 and B2, the amount of heat generated at both ends in the depth direction, where the temperature tends to decrease, is increased so that the temperature distribution becomes uniform.

各加熱用壁体10には、また図1に示すように、正面側から水平方向に別の複数の貫通孔25が開設され、温度センサー15が挿入されている。温度センサー15の検出温度が目標温度に追従するように、各加熱用壁体10にそれぞれ設けられた複数のコイル状ヒータ11の各々の発熱量が、温調手段(図示省略)により独立に制御されている。または、複数のコイル状ヒータ11が複数にグループ化され、グループ毎に発熱量が独立に制御される。
なお、上記したコイル状ヒータ11の構成や配置は、温調手段により発熱手段を制御した際に、加熱用壁体10の温度の均一化を実現するためのものである。言い換えると、外乱等が原因で温調手段のみでは加熱用壁体10の温度の均一化を実現するのは難しいので、コイル状ヒータ11の構成や配置を工夫することで加熱用壁体10の温度の均一化を実現する。
As shown in FIG. 1, each heating wall 10 is provided with another plurality of through holes 25 in the horizontal direction from the front side, and a temperature sensor 15 is inserted therein. The calorific value of each of the plurality of coiled heaters 11 provided on each heating wall 10 is independently controlled by the temperature controlling means (not shown) so that the detected temperature of the temperature sensor 15 follows the target temperature. Has been done. Alternatively, a plurality of coiled heaters 11 are grouped into a plurality of groups, and the calorific value is independently controlled for each group.
The configuration and arrangement of the coiled heater 11 described above are for realizing uniform temperature of the heating wall 10 when the heat generating means is controlled by the temperature controlling means. In other words, it is difficult to make the temperature of the heating wall 10 uniform only by the temperature control means due to disturbance or the like. Therefore, by devising the configuration and arrangement of the coiled heater 11, the heating wall 10 can be used. Achieves temperature uniformity.

熱放射部材12は、加熱用壁体10の対向領域に上下方向に距離を隔てて棚状に配置されて前記加熱用壁体10からの熱を伝導させる部材である。本実施形態では、両側の加熱用壁体10に形成された溝に嵌め込まれて棚状に配置されている。各熱放射部材12は、表面に黒色メッキを施したアルミニウム板で形成され、すぐれた熱放射機能が得られるようになっている。 The heat radiating member 12 is a member that is arranged in a shelf shape at a distance in the vertical direction in the facing region of the heating wall body 10 to conduct heat from the heating wall body 10. In the present embodiment, they are fitted into grooves formed in the heating wall bodies 10 on both sides and arranged in a shelf shape. Each heat radiating member 12 is formed of an aluminum plate whose surface is plated with black, so that an excellent heat radiating function can be obtained.

各収容スペース14は、両側の加熱用壁体10と、上下の熱放射部材12とで画定されたスペースで、被加熱物を1枚ずつ収容して、上下の熱放射部材12からの放射熱で加熱処理するようになっている。加熱用壁体10は、各々の収容スペース14に面する側の各壁面の互いに対応する位置に、収容スペースの奥行方向B1,B2に延在する溝10tが形成され、その溝10tの下側内面が、平板状の被加熱物Wの幅方向の各側縁部の裏面を受け止める支持面となっている。所定の搬送装置を用いて、被加熱物をその左右方向両端部が各溝10tに入るように搬入し、前記支持面に載置することができる。被加熱物Wの両側縁部が熱的に開放されていると被加熱物Wの温度が両側縁部で不均一となりやすい。このため、溝10tの支持面を通じて被加熱物Wの両側縁部に直接伝熱することで、被加熱物Wの温度の均一化を図っている。 Each accommodation space 14 is a space defined by the heating walls 10 on both sides and the upper and lower heat radiating members 12, and accommodates one object to be heated one by one and radiates heat from the upper and lower heat radiating members 12. It is designed to be heat-treated with. In the heating wall body 10, a groove 10t extending in the depth directions B1 and B2 of the accommodation space is formed at a position corresponding to each other on the wall surface on the side facing each accommodation space 14, and the lower side of the groove 10t is formed. The inner surface is a support surface for receiving the back surface of each side edge portion in the width direction of the flat plate-shaped object W to be heated. Using a predetermined transport device, the object to be heated can be carried in so that both ends in the left-right direction thereof enter each groove 10t, and can be placed on the support surface. When both side edges of the object W to be heated are thermally opened, the temperature of the object W to be heated tends to be non-uniform at both edge portions. Therefore, by directly transferring heat to both side edges of the object to be heated W through the support surface of the groove 10t, the temperature of the object to be heated W is made uniform.

各収容スペース14の前面側には開口部14a(図2参照)が形成されている。各収容スペース14の背面側の開口部14bは、閉塞部材としての背壁部材26により閉塞されている。すなわち、各収容スペース14は、前面側の開口部14aでのみ開口している。前面側に開口部14aを設けることで、収容スペースの内部で加熱されて膨張した空気が外部に逃げられるようになっている。背面側の開口部14bが閉塞されているので、収容スペースの内部で加熱されて膨張した空気やガスが外部に逃げたとしても、外部から収容スペース14内に空気が流入しにくい構造となっている。 An opening 14a (see FIG. 2) is formed on the front surface side of each accommodation space 14. The opening 14b on the back surface side of each accommodation space 14 is closed by a back wall member 26 as a closing member. That is, each accommodation space 14 is opened only at the opening 14a on the front side. By providing the opening 14a on the front side, the air heated and expanded inside the accommodation space can escape to the outside. Since the opening 14b on the back side is closed, even if the air or gas heated and expanded inside the accommodation space escapes to the outside, the structure is such that the air does not easily flow into the accommodation space 14 from the outside. There is.

最上部の2枚の熱放射部材12の間及び最底部の2枚の熱放射部材12の間は、それぞれ被加熱物Wを導入しない空きスペースで、空気の断熱層を形成するための断熱スペース20T,20Bである。 Between the two heat radiating members 12 at the top and between the two heat radiating members 12 at the bottom, there is an empty space in which the object to be heated W is not introduced, and a heat insulating space for forming an air heat insulating layer. It is 20T and 20B.

架台ユニット30は、加熱装置100が設置される床面に配置され、底板17及びその上の加熱装置本体を搭載している。加熱装置100の熱が床面に伝達しないようにする断熱機能や、床面の振動が加熱装置本体に伝達しないようにする防振機能等を備えている。 The gantry unit 30 is arranged on the floor on which the heating device 100 is installed, and mounts the bottom plate 17 and the heating device main body on the bottom plate 17. It has a heat insulating function that prevents the heat of the heating device 100 from being transmitted to the floor surface, a vibration isolating function that prevents the vibration of the floor surface from being transmitted to the heating device main body, and the like.

断熱材23は、外気からの左側加熱用壁体10Aおよび右側加熱用壁体10Cへの熱的外乱を最小限に抑えるために設けられており、ガラス繊維等の熱絶縁性の材料で形成されている。 The heat insulating material 23 is provided to minimize thermal disturbance to the left side heating wall body 10A and the right side heating wall body 10C from the outside air, and is formed of a heat insulating material such as glass fiber. ing.

次に、本発明の加熱装置100の動作について説明する。
加熱装置100を使用する場合、所定の搬送装置を用いて、各収容スペース14の前面側の開口部14aを通じて各被加熱物をそれぞれの収容スペース14に搬入する。コイル状ヒータ11に通電を開始すれば、所定のプログラムに従って熱処理を行うことができる。
図示しない温調手段により、各温度センサー15の検出温度が目標温度になるように、複数のコイル状ヒータ11の発熱量が個々にまたはグループ毎に独立に制御される。
Next, the operation of the heating device 100 of the present invention will be described.
When the heating device 100 is used, each object to be heated is carried into each storage space 14 through the opening 14a on the front side of each storage space 14 by using a predetermined transfer device. If the coiled heater 11 is energized, the heat treatment can be performed according to a predetermined program.
By a temperature controlling means (not shown), the calorific value of the plurality of coiled heaters 11 is controlled individually or independently for each group so that the detected temperature of each temperature sensor 15 becomes the target temperature.

各収容スペース14の左右には、加熱用壁体10が配置され、上下には、熱放射部材12が配置されているので、コイル状ヒータ11の熱によって昇温した左右の加熱用壁体10から放射される熱と、これらの加熱用壁体からの熱伝導により発熱する熱放射部材12から上下に放射される熱とによって加熱される。
各加熱用壁体10が目標温度になるように加熱され、各熱放射部材12も加熱用壁体10と同じ温度に加熱されるため、収容スペース14の相互間の温度均一性が高い。
ここで、コイル状ヒータ11として、発熱線11wの巻き線ピッチが、両端部で小さく、中央部で大きいので、加熱用壁体10の奥行方向において、温度が低下しがちな奥行方向B1,B2の両端部の発熱量が大きくなり、温度分布が均一化されている。このため、各収容スペース14内の奥行方向の温度分布も均一化されている。
このため、それぞれの収容スペース14内はむらなく均等に加熱され、加熱装置100全体における温度分布の均一性も良好である。
Since the heating walls 10 are arranged on the left and right sides of each accommodation space 14 and the heat radiating members 12 are arranged above and below, the left and right heating walls 10 heated by the heat of the coiled heater 11 are arranged. It is heated by the heat radiated from the heat radiating member 12 and the heat radiated up and down from the heat radiating member 12 that generates heat by heat conduction from these heating walls.
Since each heating wall 10 is heated to a target temperature and each heat radiating member 12 is also heated to the same temperature as the heating wall 10, the temperature uniformity between the accommodation spaces 14 is high.
Here, as the coiled heater 11, the winding pitch of the heating wire 11w is small at both ends and large at the center, so that the temperature tends to decrease in the depth direction of the heating wall 10 in the depth directions B1 and B2. The amount of heat generated at both ends of the coil is large, and the temperature distribution is uniform. Therefore, the temperature distribution in the depth direction in each accommodation space 14 is also made uniform.
Therefore, the inside of each accommodation space 14 is heated evenly and evenly, and the uniformity of the temperature distribution in the entire heating device 100 is also good.

また、各収容スペース14は、上記構成により、熱気の上昇に起因する上部空間における熱蓄積現象及び過熱現象が発生しない。また、ファンによって加熱気体を攪拌したり、循環させたりすることもないので、クリーン度も優れており、気体流によって被加熱物が移動することもない。 Further, each of the accommodation spaces 14 does not generate a heat accumulation phenomenon and an overheating phenomenon in the upper space due to the rise of hot air due to the above configuration. Further, since the heated gas is not agitated or circulated by the fan, the cleanliness is excellent and the object to be heated does not move due to the gas flow.

なお、前述した加熱装置100は本発明に係る加熱装置を例示するものであり、本発明は加熱装置100に限定されない。
発熱手段はコイル状ヒータに限られず、その他のヒータや、ヒートパイプでもよい。
The above-mentioned heating device 100 exemplifies the heating device according to the present invention, and the present invention is not limited to the heating device 100.
The heat generating means is not limited to the coiled heater, and other heaters or heat pipes may be used.

第2実施形態
図5および図6に第2実施形態に係る加熱装置を示す。
図5および図6に示す加熱装置100Aは、引き出し機構80を備えている以外は、第1実施形態と同様の構成である。
引き出し機構80は、金属プレートで形成され、前面側の開口部14aを閉塞する閉塞部81と、収容スペース14内に挿入されるプレート状に形成された挿入部82を有する。
閉塞部81は、前面側の開口部14aを閉じた際に、図5および図6に示すように、閉塞部81の上端部と開口部14aの上端側との間に所定の隙間Gpが形成されるように形成されている。
挿入部82は、熱放射部材12上に直接接触するように載置される。
2nd Embodiment FIGS. 5 and 6 show the heating apparatus according to the second embodiment.
The heating device 100A shown in FIGS. 5 and 6 has the same configuration as that of the first embodiment except that the drawing mechanism 80 is provided.
The pull-out mechanism 80 is formed of a metal plate and has a closing portion 81 that closes the opening 14a on the front surface side, and a plate-shaped insertion portion 82 that is inserted into the accommodation space 14.
When the opening 14a on the front surface side is closed, the closed portion 81 forms a predetermined gap Gp between the upper end portion of the closed portion 81 and the upper end side of the opening portion 14a, as shown in FIGS. 5 and 6. It is formed to be.
The insertion portion 82 is placed so as to be in direct contact with the heat radiating member 12.

被加熱物Wは、上記した溝10tに装着されてもよいし、引き出し機構80の挿入部82に直接載置又は治具を介して載置してもよい。挿入部82は、熱放射部材12上に直接接触しているので、熱放射部材12や加熱用壁体10と同じ温度に加熱される。このため、挿入部82に載置された被加熱物Wも熱放射部材12や加熱用壁体10と同様の温度に加熱される。 The object W to be heated may be mounted in the groove 10t described above, or may be placed directly on the insertion portion 82 of the drawer mechanism 80 or placed via a jig. Since the insertion portion 82 is in direct contact with the heat radiating member 12, it is heated to the same temperature as the heat radiating member 12 and the heating wall body 10. Therefore, the object to be heated W placed on the insertion portion 82 is also heated to the same temperature as the heat radiating member 12 and the heating wall body 10.

閉塞部81の所定の隙間Gpは、開口部14aの開口面積が大きすぎるような場合には、開口部14aを開放していると、収容スペース14内に外部から大量の空気が流入し、被加熱物Wの温度均一性を低下させる可能性がある。このため、閉塞部81で開口部14aを閉じると、収容スペース14内に外部から大量の空気が流入するのを防ぐことができる。所定の隙間Gpを設けるのは、加熱されて膨張した空気が収容スペース14の外部に逃げられるようにするためである。隙間Gpが小さすぎると外部への空気の流れが速くなり、隙間のGp付近の被加熱物Wの温度均一性が低下すると考えられる。また収容スペース14が完全に密閉していると、加熱された空気の流れが収容スペース14内に生じるため、空気循環が低下するので熱伝達が弱くなり、長時間の加熱時間が必要となる。すなわち、所定の隙間Gpで開口部14aの開口面積を最適化することで、被加熱物Wの温度均一性を良好に保つことができるかつ加熱時間の最適化を図ることができる。また、所定の隙間Gpを設けることにより、被加熱物Wから出るアウターガスの排出にも効果的である。
なお、所定の隙間Gpを形成しない構成も採用可能である。
When the opening area of the opening 14a is too large, the predetermined gap Gp of the closing portion 81 is covered with a large amount of air flowing into the accommodation space 14 from the outside when the opening 14a is opened. It may reduce the temperature uniformity of the heated material W. Therefore, when the opening 14a is closed by the closing portion 81, it is possible to prevent a large amount of air from flowing into the accommodation space 14 from the outside. The predetermined gap Gp is provided so that the heated and expanded air can escape to the outside of the accommodation space 14. It is considered that if the gap Gp is too small, the air flow to the outside becomes faster and the temperature uniformity of the object to be heated near the gap Gp decreases. Further, when the accommodating space 14 is completely sealed, a flow of heated air is generated in the accommodating space 14, so that air circulation is reduced, so that heat transfer is weakened and a long heating time is required. That is, by optimizing the opening area of the opening 14a with a predetermined gap Gp, the temperature uniformity of the object to be heated W can be kept good and the heating time can be optimized. Further, by providing a predetermined gap Gp, it is also effective for discharging the outer gas emitted from the object to be heated W.
A configuration that does not form a predetermined gap Gp can also be adopted.

第3実施形態
図7および図8に第3実施形態に係る加熱装置を示す。
図7および図8に示す加熱装置100Bは、引き出し機構180を備えている以外は、第1実施形態と同様の構成である。
引き出し機構180は、上記の引き出し機構80と同様に、閉塞部181と挿入部182とを備えているが、挿入部182は、溝10tに装着される点で、上記の挿入部82と異なる。この場合には、被加熱物Wは、挿入部182上に直接又は治具を介して載置される。
閉塞部181と開口部14aとの間には、上記と同様、所定の隙間Gpが形成される。
挿入部182を溝10tに保持させることで、加熱用壁体10と挿入部182とが直接接触することになり、挿入部182は加熱用壁体10と同様の温度に保たれる。したがって、被加熱物Wの温度均一性を良好に保つことができかつ加熱時間の最適化を図ることができる。
Third Embodiment FIGS. 7 and 8 show a heating device according to the third embodiment.
The heating device 100B shown in FIGS. 7 and 8 has the same configuration as that of the first embodiment except that the heating device 100B is provided with a drawer mechanism 180.
The pull-out mechanism 180 includes a closing portion 181 and an insertion portion 182 like the above-mentioned pull-out mechanism 80, but the insertion portion 182 is different from the above-mentioned insertion portion 82 in that it is mounted in the groove 10t. In this case, the object to be heated W is placed directly on the insertion portion 182 or via a jig.
A predetermined gap Gp is formed between the closed portion 181 and the opening portion 14a as described above.
By holding the insertion portion 182 in the groove 10t, the heating wall body 10 and the insertion portion 182 come into direct contact with each other, and the insertion portion 182 is maintained at the same temperature as the heating wall body 10. Therefore, the temperature uniformity of the object W to be heated can be kept good, and the heating time can be optimized.

第4実施形態
図9および図10に第4実施形態に係る加熱装置を示す。
図9および図10に示す加熱装置100Cは、引き出し機構280を備えている以外は、第1実施形態と同様の構成である。また、引き出し機構280の構造は、基本的には、上記した引き出し機構80と同じである。しかし、引き出し機構280は、立体構造物からなる被加熱物Wを挿入部282に搭載するための複数の保持部材283が設けられている。保持部材283を設けることで、立体構造物からなる被加熱物Wの姿勢を保ったままで加熱することができる。
Fourth Embodiment FIGS. 9 and 10 show a heating device according to the fourth embodiment.
The heating device 100C shown in FIGS. 9 and 10 has the same configuration as that of the first embodiment except that the heating device 100C is provided with a drawer mechanism 280. Further, the structure of the drawer mechanism 280 is basically the same as that of the drawer mechanism 80 described above. However, the drawer mechanism 280 is provided with a plurality of holding members 283 for mounting the heated object W made of a three-dimensional structure on the insertion portion 282. By providing the holding member 283, it is possible to heat the object to be heated W made of a three-dimensional structure while maintaining the posture.

第5実施形態
図11および図12に第5の実施形態に係る加熱装置を示す。
図11および図12に示す引き出し機構380は、開口部14aを閉塞する閉塞部381と、溝10tに装着される挿入部382とを有する。
閉塞部381の下端側と開口部14aの下端側との間には、所定の隙間Gpが形成される。
挿入部382には、立体構造物の被加熱物Wをセットするための複数の切り欠き部384が一列に配列されている。この切り欠き部384に被加熱物Wの一部が嵌ることにより、被加熱物Wが挿入部382にセットされる。
一列に形成された切り欠き部384の両側には、ガス排出孔383が配列されている。
Fifth Embodiment FIGS. 11 and 12 show a heating device according to a fifth embodiment.
The drawer mechanism 380 shown in FIGS. 11 and 12 has a closing portion 381 that closes the opening 14a and an insertion portion 382 that is mounted in the groove 10t.
A predetermined gap Gp is formed between the lower end side of the closed portion 381 and the lower end side of the opening portion 14a.
In the insertion portion 382, a plurality of notch portions 384 for setting the object to be heated W of the three-dimensional structure are arranged in a row. By fitting a part of the object to be heated W into the notch portion 384, the object to be heated W is set in the insertion portion 382.
Gas discharge holes 383 are arranged on both sides of the notch portions 384 formed in a row.

この実施形態では、切り欠き部384にセットされた被加熱物Wが加熱されてアウターガスが放出されると、アウターガスは通常空気よりも重いので、ガス排出孔383を通じて挿入部382の裏面側へ排出される。挿入部382の裏面側へ排出されたアウターガスは、開口部14aの下端部に形成された所定の隙間Gpを通じて外部に排出される。 In this embodiment, when the object W to be heated set in the notch portion 384 is heated and the outer gas is released, the outer gas is heavier than normal air, so that the back surface side of the insertion portion 382 is passed through the gas discharge hole 383. Is discharged to. The outer gas discharged to the back surface side of the insertion portion 382 is discharged to the outside through a predetermined gap Gp formed at the lower end portion of the opening 14a.

上記した実施形態では、所定の隙間Gpを開口部14aと閉塞部381の間に形成したが、これに限定されるわけではなく、閉塞部381に開口を設けることも可能である。
また、上記加熱装置100においては、加熱用壁体10、天板16、底板17は、ステンレス鋼で形成され、熱放射部材12は、表面に黒色メッキを施したアルミニウム板で形成されている。ただし、これらの材料に限られず、加熱用壁体10A~10C、天板16、底板17などをアルミニウムやアルミニウム合金(あるいは輻射熱の発散を抑制するため光沢のない表面処理を施したアルミニウムやアルミニウム合金)で形成することもできる。また、熱放射部材12の表面処理についても黒色メッキに限定されず、輻射熱の発散を抑制することのできる表面処理、例えば、光沢のない表面処理を施したものを採用することもできる。
In the above-described embodiment, a predetermined gap Gp is formed between the opening portion 14a and the closing portion 381, but the present invention is not limited to this, and an opening may be provided in the closing portion 381.
Further, in the heating device 100, the heating wall 10, the top plate 16, and the bottom plate 17 are made of stainless steel, and the heat radiating member 12 is made of an aluminum plate whose surface is plated with black. However, the material is not limited to these materials, and the heating walls 10A to 10C, the top plate 16, the bottom plate 17, and the like are made of aluminum or an aluminum alloy (or an aluminum or aluminum alloy that has been subjected to a matte surface treatment to suppress the dissipation of radiant heat. ) Can also be formed. Further, the surface treatment of the heat radiating member 12 is not limited to black plating, and a surface treatment capable of suppressing the emission of radiant heat, for example, a surface treatment having a matte surface treatment can be adopted.

本発明に係る加熱装置は、ガラス基板や半導体リードフレームあるいはその他の金属板や合成樹脂板などの各種板状部材や立体形状物を含むあらゆる被加熱物の熱処理を行う産業分野において広く利用することができる。 The heating device according to the present invention shall be widely used in an industrial field for heat-treating all objects to be heated, including various plate-shaped members such as glass substrates, semiconductor lead frames, other metal plates and synthetic resin plates, and three-dimensional objects. Can be done.

10 :加熱用壁体
10A :左側加熱用壁体
10B :中央加熱用壁体
10C :右側加熱用壁体
10t :溝
11 :コイル状ヒータ
11s :金属管
11w :発熱線
12 :熱放射部材
14 :収容スペース
14a :開口部
14b :背面
15 :温度センサー
16 :天板
17 :底板
20B :断熱スペース
20T :断熱スペース
23 :断熱材
24 :貫通孔
25 :貫通孔
26 :背壁部材
30 :架台ユニット
50 :突起部材
80 :引き出し機構
81 :閉塞部
82 :挿入部
100 :加熱装置
100A :加熱装置
100B :加熱装置
100C :加熱装置
180 :引き出し機構
181 :閉塞部
182 :挿入部
280 :引き出し機構
282 :挿入部
283 :保持部材
380 :引き出し機構
381 :閉塞部
382 :挿入部
383 :ガス排出孔
384 :切り欠き部
Gp :隙間
W :被加熱物
W1 :端部
W2 :中央部
10: Heating wall body 10A: Left side heating wall body 10B: Central heating wall body 10C: Right side heating wall body 10t: Groove 11: Coiled heater 11s: Metal tube 11w: Heating wire 12: Heat radiating member 14: Accommodation space 14a: Opening 14b: Back surface 15: Temperature sensor 16: Top plate 17: Bottom plate 20B: Insulation space 20T: Insulation space 23: Insulation material 24: Through hole 25: Through hole 26: Back wall member 30: Mount unit 50 : Protruding member 80: Pull-out mechanism 81: Closing part 82: Inserting part 100: Heating device 100A: Heating device 100B: Heating device 100C: Heating device 180: Pull-out mechanism 181: Closing part 182: Inserting part 280: Pulling-out mechanism 282: Insertion Part 283: Holding member 380: Pull-out mechanism 381: Closing part 382: Inserting part 383: Gas discharge hole 384: Notch part Gp: Gap W: Heated object W1: End part W2: Central part

Claims (11)

距離を隔てて対向配置された複数の加熱用壁体と、
前記複数の加熱用壁体の各々に設けられた複数の発熱手段と、
複数の前記加熱用壁体の対向領域に上下方向に距離を隔てて棚状に配置されて前記加熱用壁体からの熱を伝導させる金属製の複数の熱放射部材と、を備え、
前記複数の加熱用壁体と前記複数の熱放射部材とは、被加熱物をそれぞれ収容するための複数の収容スペースを上下方向に画定し、
前記複数の収容スペースは、前記加熱用壁体と前記熱放射部材とにより画定される開口部を前面側および背面側に有し、前記背面側の開口部は、閉塞部材により閉塞されており、
前記前面側の開口部を閉塞する閉塞部と、
収容スペース内に挿入され、前記加熱用壁体または前記熱放射部材と直接接触する挿入部と、を有する金属製の引き出し機構をさらに有する、加熱装置。
Multiple heating walls arranged facing each other at a distance,
A plurality of heat generating means provided in each of the plurality of heating walls, and
A plurality of metal heat radiating members, which are arranged in a shelf shape at intervals in the vertical direction in the facing regions of the plurality of heating walls and conduct heat from the heating walls, are provided.
The plurality of heating walls and the plurality of heat radiating members define a plurality of accommodating spaces for accommodating objects to be heated in the vertical direction.
The plurality of accommodation spaces have openings defined by the heating wall body and the heat radiating member on the front side and the back side, and the openings on the back side side are closed by the closing member.
A closed portion that closes the opening on the front surface side, and a closed portion.
A heating device further comprising a metal pull-out mechanism having an insertion portion inserted into the accommodation space and in direct contact with the heating wall or the heat radiating member .
前記閉塞部は、前記前面側の開口部を閉じた際に、当該開口部との間に所定の隙間が形成されるように形成されている、請求項に記載の加熱装置。 The heating device according to claim 1 , wherein the closed portion is formed so that a predetermined gap is formed between the closed portion and the opening on the front surface side when the opening is closed. 前記所定の隙間は、前記開口部の上端側に形成される、請求項2に記載の加熱装置。 The heating device according to claim 2, wherein the predetermined gap is formed on the upper end side of the opening. 前記所定の隙間は、前記開口部の下端側に形成される、請求項2に記載の加熱装置。 The heating device according to claim 2, wherein the predetermined gap is formed on the lower end side of the opening. 前記挿入部は、被加熱物を搭載可能に形成されている、請求項に記載の加熱装置。 The heating device according to claim 1 , wherein the insertion portion is formed so that an object to be heated can be mounted. 前記挿入部には、立体構造物からなる被加熱物を搭載するための保持部材が設けられている、請求項に記載の加熱装置。 The heating device according to claim 5 , wherein the insertion portion is provided with a holding member for mounting a heated object made of a three-dimensional structure. 前記挿入部には、立体構造物からなる被加熱物を搭載するための切り欠きが形成されている、請求項に記載の加熱装置。 The heating device according to claim 5 , wherein a notch for mounting a heated object made of a three-dimensional structure is formed in the insertion portion. 前記挿入部は、前記熱放射部材上に直接載置される、請求項に記載の加熱装置。 The heating device according to claim 1 , wherein the insertion portion is directly placed on the heat radiating member. 対向する前記複数の加熱用壁体は、各々の前記収容スペースに面する側の各壁面の互いに対応する位置に直接形成された前記収容スペースの奥行方向に延在する支持面をそれぞれ有し、
前記挿入部は、両端部が前記支持面によって受け止められる、請求項に記載の加熱装置。
Each of the plurality of heating walls facing each other has a support surface extending in the depth direction of the accommodation space formed directly at a position corresponding to each other on each wall surface on the side facing the accommodation space.
The heating device according to claim 1 , wherein both ends of the insertion portion are received by the support surface.
前記複数の加熱用壁体の各々に設けられた少なくとも一の温度センサーと、
前記複数の加熱用壁体の各々に設けられた少なくとも一の温度センサーの検出温度が目標温度の追従するように、前記複数の加熱用壁体にそれぞれ設けられた複数の発熱手段の発熱量を個々に制御する、または、複数にグループ化された前記複数の発熱手段をグループ毎に発熱量を独立に制御する温調手段と、を有する請求項1ないし9のいずれかに記載の加熱装置。
At least one temperature sensor provided in each of the plurality of heating walls, and
The amount of heat generated by the plurality of heat generating means provided in each of the plurality of heating walls is set so that the detection temperature of at least one temperature sensor provided in each of the plurality of heating walls follows the target temperature. The heating device according to any one of claims 1 to 9 , further comprising a temperature control means for individually controlling or grouping the plurality of heat generating means for independently controlling the amount of heat generated for each group.
請求項1ないし10のいずれかに記載の加熱装置を用いて被加熱物を加熱する、加熱方法。
A heating method for heating an object to be heated using the heating device according to any one of claims 1 to 10 .
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JP2009115425A (en) 2007-11-09 2009-05-28 Kyushu Nissho:Kk Heat treatment apparatus
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