JP6994743B1 - Electronic component measuring device and electronic component measuring method using electronic component measuring device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a measuring device and a measuring method capable of advancing a cleaning operation of the noise source while visually recognizing a noise source of a table surface such as dust, dust and grease. SOLUTION: When the sample W is not placed on the upper surface of the transparent table 2, the noise source measurement execution button 31 is clicked to generate noise sources Ns such as dust, dust, and sebum stains on the surface of the transparent table 2. It is possible to perform cleaning work while detecting and visually recognizing the noise source mark Nsm displayed on the monitor 9 and confirming the position of the noise source Ns and the removal status. [Selection diagram] Fig. 3

Description

The present invention relates to an electronic component measuring device for measuring the height of the surface (lower surface) of a sample from below a transparent table on which a sample is placed on the upper surface, and a method for measuring electronic components using the electronic component measuring device.

Conventionally, various measuring devices for measuring the height of the surface (lower surface) of a sample from below the transparent table on which the sample is placed have been proposed.
The laser focus sensor is scanned from below the light transmissive flat plate to measure the height of the sample at each position from the upper surface of the light transmissive flat plate, and the reflection of the part of the upper surface of the light transmissive flat plate where there is no sample. The height of the upper surface of the light transmissive flat plate is measured by measuring the light, and the height data of the upper surface of the light transmissive flat plate is subtracted from the height data at each position from the upper surface of the light transmissive flat plate. , A measuring device for measuring the height of the surface (lower surface) of a sample from the upper surface of a light-transmitting flat plate is known (for example, Patent Document 1).

In addition, it is a measuring device that measures by the phase shift method, and is a reference that indicates the phase θ of each position by processing the image captured by the imaging unit from below the transparent table on which the sample is not placed. Phase data is generated, and the surface (lower surface) of the sample having a plurality of protrusions placed on the upper surface of the transparent table is processed by the image captured by the imaging unit to represent the phase θ of each position on the surface of the inspection sample A. By generating the inspection sample phase data and calculating the difference between the data representing the phase θ at each position when the inspection sample A is placed, the phase difference between the reference phase data and the inspection sample phase data at each position. Is calculated, the phase difference at each position is converted into data indicating the height, and the surface shape data (three-dimensional shape data) indicating the distance (height) between the surface of the inspection sample A and the upper surface of the transparent table is obtained. A measuring device and a measuring method for generating and specifying a region in the XY plane represented by the surface shape data and determining a representative value of a distance value at each position from the upper surface of the transparent table in the specified region are known. (For example, Patent Document 2).

Further, in a measuring device for measuring the flatness of the protruding terminals of an electronic component having a large number of downward protruding terminals placed on the upper surface of the transparent table, the lowest portion of the protruding terminals in contact with the upper surface of the table is used as a reference. , A device for measuring the floating distance (height distance) of another protruding terminal from the reference is known (for example, Patent Document 3).

A measuring device having a transparent table (hereinafter, also referred to as “lower table”) at the lower or lower part of a transparent table (hereinafter, also referred to as “sample placing table”) on which a sample is placed is known (for example, Patent Document). 4).

Japanese Patent No. 4849709 Japanese Patent No. 5385703 (Claim 1, paragraph [0044]) Japanese Unexamined Patent Publication No. 08-247735 ([Claim 1], paragraph [0011]) Japanese Unexamined Patent Publication No. 2018-028440

<Definition>
Reflections such as dust, dust, greasy stains on the surface of the transparent table, and scratches (including minute scratches that cannot be seen) of the transparent table itself (including the coated film if it is coated) are as follows. It is called a "noise source". However, for example, the reflective film, the jig, etc. provided on the upper surface of the transparent table for measurement are not included in the noise source or are excluded from the noise source.

The above-mentioned prior art is a measuring device that measures the height of the surface (lower surface) of a sample from below the transparent table on which the sample is placed, but the noise source on the transparent table surface provides information on the height level of each position. I didn't consider the impact.

When measuring the height data of the sample placed on the upper surface of the transparent table from below, when measuring the height with reference to the upper surface of the transparent table, based on the measured value of the surface (lower surface) of the reflective member provided on the upper surface of the transparent table. When measuring the height with the generated plane as the reference plane, when measuring the height with the position of the sample placed on the top surface of the transparent table in contact with the top surface of the table as the reference plane, when measuring the height with the sensor reference, etc. be. There was a common problem with all the measurement methods. It is a source of noise on the transparent table surface (both top and bottom). For this noise source, the height information of the noise source part that is not the sample is acquired in all the measurement methods in which the light is projected from the bottom of the transparent table and the height information is acquired by receiving the reflected light. This will result in a measurement error. All noise sources that affect the light affect the information about the height level at each position (x, y). Further, when acquiring the luminance information of the reflected light from the sample instead of the height information, it is also affected by the noise source.

When the measurement is performed without placing the sample, if there is no noise source on both sides of the transparent table and there is no sample, there is no height information. However, the transparent table has noise sources (dust floating in the air adhering to the upper and lower surfaces of the transparent table, dust peeled off from the sample on the transparent table, greasy stains on the operator's hand and the transparent table. There are not a few scratches on itself (including the coated film) (including minute scratches that cannot be seen), partial discoloration of the transparent table surface, etc. Reflected light is generated from these noise sources, and is there a sample? When the sample is placed on a transparent table with such a noise source and measured, the height information of the noise source part that should not be originally needed is mixed and incorrect. There was a problem that it became measurement data.

Conventional countermeasures are (1) to blow off the noise source by blowing compressed air on the upper and lower surfaces of the transparent table before placing the sample, and (2) wipe the upper and lower surfaces of the transparent table with a cloth to remove it. It was to do. In addition, the noise source was only vaguely removed without any judgment criteria.
With the removal methods (1) and (2) above, a noise source may remain, a new noise source may be generated, and scratches (fine scratches that cannot be seen) of the transparent table itself cannot be removed. ..
When the sample is placed on a transparent table and measured, it is unclear whether the noise source is the noise source information (measured value) or the correct information (measured value) on the surface (bottom surface) of the sample. There was a problem.
In addition, even if compressed air is blown onto the upper surface of the transparent table to remove it or wipe it off before measuring the measurement target, it cannot be determined whether the noise source that cannot be seen is surely removed. was there.
In addition, it is not possible or difficult to determine how much the noise source affects the measurement accuracy of the sample.
As a result, data may be generated with the noise source as the surface portion of the sample portion, and there is a problem that the measurement data of the sample becomes data including an inaccurate portion.
This problem becomes more prominent as the measurement becomes more accurate.

Further, in the invention of Patent Document 3, when there is a noise source on the lower surface of the transparent table, there is a risk that the noise source may be erroneously measured as a protruding terminal at the lowest position.
Three protruding terminals are in contact with the table surface, but it is conceivable to set a plane connecting the height positions of these three protruding terminals as a flat reference plane. At this time, for example, one When the noise source is on the lower surface of the table, there is a risk that a significantly inclined plane connecting one noise source on the lower surface of the table and the two protruding terminals may be set as the reference plane.

In the invention of Patent Document 4, since the transparent table has a double structure, there is a strong possibility that the above-mentioned problem due to the noise source will be further aggravated.

The present invention has been made in view of the above-mentioned drawbacks of the prior art, and is an electronic component measuring device and an electronic component capable of proceeding with a cleaning operation for removing the noise source while visually recognizing the noise source. The first object is to provide a method for measuring electronic components using the measuring device of the above.
A second object of the present invention is to provide a measuring device for electronic components and a method for measuring electronic components using the measuring device for electronic components, which enables the sample to be placed in a region without a noise source.
A third object of the present invention is to provide a measuring device for electronic components and a method for measuring electronic components using the measuring device for electronic components, which makes it possible to discriminate the influence of a noise source on the measurement result.
A fourth object of the present invention is to provide a measuring device for electronic components and a method for measuring electronic components using the measuring device for electronic components, which enables information on a noise source to be included in the measurement result information.

In order to achieve the above object, the present invention has the following configuration.
<First invention>
From the irradiation unit provided below the transparent table, the irradiation light transmitted through the transparent table is irradiated toward the sample placed on the upper surface of the transparent table, and the reflected light of the sample is reflected below the transparent table. The sample surface height data, which is data indicating the height at each coordinate position (x, y) of the surface of the sample, is obtained by receiving light from the light receiving unit provided in the sample and processing the sample light receiving information which is the light receiving information. In the measuring device to generate
A noise source that is a reflector other than the sample that reflects the irradiation light, such as dust, greasy stains, and scratches on the table surface, which are present on the transparent table surface.
The noise source reflected light, which is the reflected light of the noise source, of the irradiation light irradiated with the sample not placed on the upper surface of the transparent table.
The noise source reflected light is received by the light receiving unit, and the noise source light receiving information which is the light receiving information is processed to obtain the height and brightness of each coordinate position (x, y) on the surface of the noise source, or one of them. It is a measuring device for electronic parts, characterized in that it is provided with a noise source data generation unit that generates noise source data which is data indicating the above.

<Second invention>
In the first invention, a part or all of each coordinate position (x, y) portion of the noise source indicated by the noise source data is excluded from the data or generated or excluded from the measurement range at the time of measurement of the sample. A sample surface noiseless height data generation unit for generating sample surface noiseless height data, which is data indicating the height distance of each coordinate position (x, y) of the surface of the sample, which is measured and generated, is provided. It is a measuring device for electronic parts characterized by.

<Third invention>
In the first invention, the measurement area specifying unit that specifies or sets the measurement area of the sample placed on the transparent table and generates the measurement area specifying data which is the data, and the measurement area specifying unit.
A non-measurement area excluding the outside of the measurement area indicated by the measurement area specific data is defined as a non-measurement area, and a part or all of each coordinate position (x, y) portion of the noise source indicated by the noise source data in the measurement area. Data indicating the height distance of each coordinate position (x, y) of the surface of the sample in the measurement region, which was generated by excluding from the data or excluded from the measurement of the surface of the sample. It is a measuring device for electronic parts provided with a sample surface region noiseless height data generation unit for generating sample surface region noiseless height data.

The "sample surface height data" in the first, second and third inventions indicates the distance in the Z-axis direction, and the reference position thereof is the position on either side of the irradiation part and the light receiving part, or the transparent table. A plane (including a plane moved up and down) connecting three points: the position of the upper surface, the position of the surface (lower surface) of the reflective member provided on the upper surface of the transparent table, and the surface (lower surface) of the reflective member provided on the upper surface of the transparent table. ), Etc., which are included in the technical scope.

<Fourth invention>
In any one of the first to third aspects of the invention, the electronic component measuring device is provided with a noise source display unit that displays the position of the noise source on a monitor in a visually recognizable manner.

<Fifth invention>
In any of the first to fourth inventions, a determination is made to determine whether the number of each coordinate position (x, y) of the noise source data satisfies the range of each set number of coordinate positions (x, y). It is a measuring device for electronic parts characterized by being provided with a part.

<Sixth invention>
In any one of the first to fifth inventions, the electronic component measuring apparatus is provided with a repetitive measurement instruction unit for automatically and repeatedly performing a measurement processing operation for generating new noise source data. be.

<Seventh invention>
In any one of the first to sixth aspects, a noise source display unit for displaying the position of the noise source on a monitor in a form that can be visually recognized is provided.
An upper surface image, which is an image of the upper surface of the transparent table, can be displayed on the monitor.
A lower surface image, which is an image of the lower surface of the transparent table, can be displayed on the monitor.
The top surface image shows the position of the noise source on the top surface of the transparent table.
The lower surface image is a measuring device for electronic components, characterized in that the position of the noise source on the lower surface of the transparent table is displayed.

Further, in the invention of any one of the first to seventh items, a sample size storage unit for storing the dimensions of the sample is provided.
A sample placement location determination unit is provided to determine the placement OK area, which is the range in which a sample of the above dimensions can be placed without being affected by the noise source.
A measuring device for electronic components, characterized in that the previously described OK area can be displayed on the monitor, may also be used.

In the invention of any one of the above 1 to 7, the position of the noise source in the sample placement allowable area indicating the area where the sample placement is permitted and the position of the noise source in the sample placement allowable area at the time of measurement are A measuring device for electronic components may also be used, characterized in that a noise source mark shown in a visible form and a sample image showing the form and position of the sample in a visible form can be displayed on the monitor.

<Eighth invention>
From the irradiation unit provided below the transparent table, the irradiation light transmitted through the transparent table is irradiated toward the sample placed on the upper surface of the transparent table, and the reflected light of the sample is reflected below the transparent table. The sample surface height data, which is data indicating the height at each coordinate position (x, y) of the surface of the sample, is obtained by receiving light from the light receiving unit provided in the sample and processing the sample light receiving information which is the light receiving information. It is a method of measuring electronic parts using a measuring device to generate.
A noise source that is a reflector other than the sample that reflects the irradiation light, such as dust, greasy stains, and scratches on the table surface, which are present on the transparent table surface.
The noise source reflected light, which is the reflected light of the noise source, of the irradiation light irradiated with the sample not placed on the upper surface of the transparent table.
The noise source reflected light is received by the light receiving unit, and the noise source light receiving information which is the light receiving information is processed to obtain the height and brightness of each coordinate position (x, y) on the surface of the noise source, or one of them. It is a method of measuring an electronic component using an electronic component measuring device, which comprises a step of generating noise source data, which is data indicating the above.

<Ninth invention>
In the eighth invention, the noise source reflected light is received by the light receiving unit, and the noise source light receiving information which is the light receiving information is processed to increase the height of each coordinate position (x, y) on the surface of the noise source. A step of generating noise source data, which is data indicating the brightness and / or brightness, and
A part or all of each coordinate position (x, y) portion of the noise source indicated by the noise source data was generated by removing it from the data, or was measured and generated by removing it from the measurement range at the time of measuring the sample. An electron using a measuring device for an electronic component, which comprises a step of generating sample surface noiseless height data, which is data indicating a height distance of each coordinate position (x, y) on the surface of the sample. This is a method for measuring parts .

<10th invention>
In the eighth invention, the noise source reflected light is received by the light receiving unit, and the noise source light receiving information which is the light receiving information is processed to increase the height of each coordinate position (x, y) on the surface of the noise source. A step of generating noise source data, which is data indicating the brightness and / or brightness, and
A step of specifying or setting the measurement area of the sample placed on the transparent table and generating the measurement area identification data which is the data, and
A non-measurement area excluding the outside of the measurement area indicated by the measurement area specific data is defined as a non-measurement area, and a part or all of each coordinate position (x, y) portion of the noise source indicated by the noise source data in the measurement area. Indicates the height distance of each coordinate position (x, y) of the surface of the sample in the measurement region, which was generated by excluding from the data or excluded from the measurement of the surface of the sample. It is a method of measuring an electronic part using a measuring device for an electronic part, which comprises a step of generating a sample surface noiseless height data which is data.

The present invention having the above configuration has the following effects.
The "noise source" is a reflector on the transparent table surface other than the sample that reflects the irradiation light, and specific examples thereof include dust, dust, greasy stains, and the transparent table itself (including a coat film). Scratches (including minute scratches that cannot be seen), discolored parts due to deterioration of the transparent film of the transparent table, etc.

<Effect of the first invention>
A device that generates noise source data, which is data indicating the height and / or brightness of each coordinate position (x, y) on the surface of the noise source, which is measured when the sample is not placed on the transparent table. Therefore, it has the following effects.

(A) Since each coordinate position (x, y) of the noise source generates (acquires) clear noise source data, the position of the noise source is displayed on the monitor in a visible form based on the noise source data. It has the effect of being able to make it possible.
By displaying the position of the noise source on the monitor in a visually recognizable form, for example, the noise source displayed on the monitor in the first measurement processing operation and its position can be confirmed in the state where the sample is not placed. Perform the first cleaning operation to remove the remaining noise source (including moving out of the sample measurement range), execute the second noise source measurement process, and display the noise source and its position on the monitor. The second cleaning operation to remove the remaining noise source is performed, and so on, the cleaning work to remove the noise source is performed, and the removal status of the noise source and the position of the residual noise source are checked. It is possible to do it while checking.
As a result, it is possible to confirm whether the noise source has been reliably removed and enable efficient cleaning work.

(B) By displaying the position of the noise source on the monitor in a visually recognizable form, it is possible to place the sample in a place where there is no noise source. In addition, by inputting and storing the vertical and horizontal dimensions of the sample, it is possible to inform the place or area where the sample can be placed while avoiding the noise source.
In addition, it is possible to inform the state of the noise source in the area where the sample is to be placed.
Further, in the case where the measurement area of the sample is specified or set and the measurement data is generated only in the measurement area, it is possible to inform the state of the noise source in the measurement area.
(C) It becomes possible to appropriately inform the measurement operator of the location of the noise source and the influence of the noise source, and the confirmation after the noise source removal work becomes clear. Therefore, since the noise source can be appropriately removed, highly reliable measurement is possible.
In addition, it is possible to perform removal cleaning focusing on the removal of the noise source (including the movement of the noise source to the outside of the sample measurement range) at the place where the sample is placed, without removing and cleaning the entire table surface.
(D) The measurement result report, etc. should have noise source data, and for example, the image measured by placing the sample in a place without noise source is also included in the report content, so that the measurement result can be highly reliable. It is possible to do.
Judgment of the presence or absence of a noise source, countermeasures taken against the noise source, influence of the noise source on the measurement result of the sample, influence on the measurement result of the processing of the noise source, etc. It is possible to describe or attach it to a report, etc., and it is possible to add high accuracy and high reliability (safety and stability) to the measurement data of the sample.
(E) In the height measurement of the surface (bottom surface) of the sample, it is possible to use the measurement data in which all or a part of each coordinate of the noise source is excluded from the height measurement data of the surface (bottom surface) of the sample. Further, in the height measurement of the surface (lower surface) of the sample, it is possible to measure the sample surface by excluding all or a part of each coordinate position of the noise source from the measurement area and making it a non-measurement area. This process enables accurate sample measurement without erroneous data, that is, the noise source data portion, which is obviously ineffective data, is not included (excluded).
(F) It is possible to determine whether the noise source data (for example, the number of each coordinate position (x, y)) satisfies the set condition. It is also possible to quantify the degree of contamination and position information of the transparent table and determine the effect on the measurement of the sample.
(G) In the measurement of an electronic component having a large number of downward protruding terminals, when the surface connecting the three points of the lowest portions of the three protruding terminals in contact with the upper surface of the table is set as the reference plane, the noise source is used. It is possible to realize a device that is not mistaken for the contact point on the table surface of the protruding terminal.

Since the noise source data includes information indicating the height at each coordinate position (x, y) of the surface (bottom surface) of the noise source, the following effects are obtained.
(H) Based on the information indicating the height of the noise source data, it is possible to determine whether the noise source is located on the upper surface or the lower surface of the transparent table or display it on the monitor. do.
(I) In a measuring device provided with a transparent lower table that transmits irradiation light and a transparent table on which a sample is placed above or above the lower table.
It is possible to determine whether the noise source is the upper surface or the lower surface of the transparent table, or the upper surface or the lower surface of the lower table.

(J) By displaying the noise source position with luminance data having a smaller amount of information and processing amount than the height data instead of the height data, it is possible to obtain the noise source more quickly.

<Effect of the second invention>
The same effect as that of the first invention is obtained, and "a part or all of each coordinate position (x, y) portion of the noise source indicated by the noise source data is excluded from the data, or the sample is generated. The sample surface noiseless height data, which is the data indicating the height distance (distance in the Z-axis direction) of each coordinate position (x, y) of the surface of the sample, which was measured and generated by removing it from the measurement area at the time of measurement of Since it is configured to be equipped with a "sample surface noiseless height data generator" to be generated.
Indicates the height distance (distance in the Z-axis direction) of each coordinate position (x, y) on the surface of the sample that does not have (excludes) the height data of the noise source data portion, which is clearly invalid data. The sample surface noiseless height data, which is data, is generated, and the sample surface noiseless height data realizes accurate sample measurement without including (excluding) erroneous data of the noise source portion.
The sample surface noiseless height data is data in which a part or all of each coordinate position (x, y) portion of the noise source is excluded (no data) in the data indicating the height distance of the sample surface.

<Effect of the third invention>
While having the same effect as that of the first invention, "a measurement area specifying unit that specifies or sets a measurement area of the sample placed on the transparent table and generates measurement area specifying data which is the data thereof. A non-measurement area excluding the outside of the measurement area indicated by the measurement area specific data is defined as a non-measurement area, and a part or all of each coordinate position (x, y) portion of the noise source indicated by the noise source data in the measurement area. Data indicating the height distance of each coordinate position (x, y) of the surface of the sample in the measurement region, which was generated by excluding from the data or excluded from the measurement of the surface of the sample. The sample surface region noiseless height data generation unit for generating the sample surface region noiseless height data "is provided.
Since the processing is performed only in the measurement area excluding the noise source information and the sample surface height information in the area other than the measurement area, the amount of information processing can be reduced and rapid measurement can be realized.
The sample surface area noiseless height data is data in which a part or all of each coordinate position (x, y) portion of the noise source is excluded (no data) in the data indicating the height distance of the sample surface in the measurement area. ..

<Effect of the Fourth Invention>
In any one of the first to third inventions, the position of the noise source can be visually displayed on the monitor. Therefore, the items (a) to (i) of the first invention can be described. Realize.

<Effect of the fifth invention>
The same effect as that of the first to fourth inventions is obtained, and the number of each coordinate position (x, y) of the noise source data satisfies the range of each set number of coordinate positions (x, y). Since the configuration is provided with a determination unit for determining whether or not the data is present, for example, the number of each coordinate position (x, y) in the XY plane of the noise source exceeds the number of each set coordinate position (x, y), for example. If there is something, it can be determined that measurement is not possible, cleaning is required, or there is a defective noise source.

<Effect of the sixth invention>
The cleaning work can be performed while the measurement processing operation for automatically generating repetitive noise source data is performed while achieving the same effect as that of the invention according to any one of the first to fifth aspects. This makes it possible to proceed while checking the removal status of the noise source by the cleaning work, for example, on a monitor, and it is possible to proceed with the cleaning work in a concentrated and efficient manner.

<Effect of the 7th invention>
The same effect as that of the inventions 1 to 6 can be obtained, the noise sources on the upper and lower surfaces of the transparent table can be confirmed at a glance, and the removal status by cleaning can be confirmed while checking the upper surface and the lower surface, respectively. Is possible.

In any one of the first to sixth inventions, a sample dimension storage unit for storing the dimensions of the sample is provided.
A sample mounting location determination unit is provided to determine a mounting OK area, which is a range in which a sample of the above dimensions can be placed without being affected by a noise source, and the previously described OK range can be displayed on the monitor. The measuring device has the same effect as that of the first to sixth inventions, and can visually confirm the mounting OK range in which the sample does not cover the noise source, and there is a mounting OK range. In this case, it is possible to place the sample in the placement OK area and measure it without cleaning the noise source.

In any one of the first to seventh inventions, the position of the noise source in the sample placement allowable area indicating the area where the sample placement is permitted at the time of measurement and the position of the noise source in the sample placement allowable area are visually recognized. The measuring device characterized in that the noise source mark shown in a form capable of being formed and the sample image showing the form and position of the sample in a form that can be visually recognized can be displayed on the monitor is the invention of any of the first to the above-mentioned units. While achieving the same effect, it is possible to use a positional relationship image showing the positional relationship between the noise source and the sample as a part of the measurement data or the measurement result information. Therefore, it is possible to provide highly reliable measurement.

<Effect of the eighth invention>
It has the same effect as the first invention.
<Effect of Ninth Invention>
It has the same effect as the second invention.
<Effect of the tenth invention>
It has the same effect as the third invention.

The conceptual diagram of Example 1 of this invention. The screen view of the monitor before the measurement of Example 1 of this invention. The screen view of the monitor after the measurement of Example 1 of this invention. The chart which shows the processing step of Example 1 of this invention. The screen view of the monitor which shows the positional relationship between the noise source Ns and the sample W of Example 1 of this invention. The screen view of the monitor after the measurement of Example 2 of this invention. The screen view of the monitor when the sample size image of Example 2 of this invention is moved. The screen view of the monitor which shows the positional relationship between the noise source Ns and the sample W after the measurement by moving the sample dimension image of Example 2 of this invention. The explanatory view which shows the 1st processing example of the noise source of Example 3 of this invention. The explanatory view by the display screen of the monitor of the 2nd processing example of the noise source of Example 3 of this invention. The explanatory view by the display screen of the monitor of the 3rd processing example of the noise source of Example 3 of this invention. The explanatory view by the display screen of the monitor of the 4th processing example of the noise source of Example 3 of this invention. The explanatory view by the display screen of the monitor of the 5th processing example of the noise source of Example 3 of this invention. Partial block diagram of the apparatus of Example 4 of this invention. The display screen figure on the monitor of the noise source screen of Example 4 of this invention. The conceptual diagram of Example 5 of this invention. The chart which shows the processing step of Example 5 of this invention.

Hereinafter, examples of the best mode for carrying out the present invention will be described. However, the present invention is not intended to be limited to these examples only. Further, in the description of the embodiments described later, the same components of the above-described embodiments are designated by the same reference numerals, and duplicate description will be omitted.

In the first embodiment of the present invention shown in FIGS. 1 to 5, the measuring device 1 has the following configuration.
A sample W, for example, a horizontally arranged transparent table 2 on which a protrusion wt (for example, a metal terminal portion such as an electronic component or a connector) protruding from a side surface or a lower surface is placed on the upper surface.
An irradiation unit 3 provided below the transparent table 2 that irradiates the sample W with the irradiation light LR that passes through the transparent table 2.
A light receiving unit 4 provided below the transparent table 2 for receiving the sample reflected light WRE, which is the reflected light from the sample W of the irradiation light LR, and the light receiving unit 4.
An irradiation light receiving unit 6 having an irradiation unit 3 and a light receiving unit 4,
It is configured to include a control unit 5.
The irradiation / light receiving unit 6 performs horizontal scanning movement (the driving means for horizontal scanning movement is omitted (not shown)) with respect to the transparent table 2.

The noise sources Ns are dust, dust, greasy stains, scratches on the transparent table 2 itself (including the coat film) (including fine scratches that cannot be seen), and the like on the surface of the transparent table 2. It is a reflector that causes the reflected light of the irradiation light LR when it is located under the sample W placed on the upper surface of the above.

<Definition>
The Z-axis is a linear axis (in this embodiment, a vertical axis) from the irradiation / light receiving unit located below toward the transparent table located above.
The X-axis is a horizontal axis on a plane perpendicular to the Z-axis.
The Y-axis is a vertical axis on a plane perpendicular to the Z-axis, and is an axis orthogonal to the X-axis on the plane.
The XY plane is a plane including the X-axis and the Y-axis that are orthogonal to the Z-axis at right angles.
The height, height distance, and height (distance) are distances in the Z-axis direction.
Each coordinate position (x, y) (hereinafter, also referred to as “each position”) is each measurement position in the XY plane.

The control unit 5
The sample surface, which is the data indicating the height of the surface (bottom surface) of the sample W at each coordinate position (x, y), is processed by processing the sample light receiving information wreD, which is the light receiving information of the sample reflected light WRE received by the light receiving unit 4. The sample surface noiseless height data generation unit 7 that generates the noiseless height data whD, and
The irradiation light LR is irradiated toward the transparent table 2 in which the sample W is not placed, and the noise source reflected light NRE which is the reflected light from the noise source Ns on the surface of the transparent table 2 generated by the irradiation. Is processed by the noise source light receiving information nreD, which is the light receiving information of the noise source reflected light NRE, and the coordinate positions (x, y) of the surface (lower surface) of the noise source Ns are set. The noise source data generation unit 8 that generates the noise source data nsD, which is the data shown, and
Based on the noise source data nsD, the noise source display unit 10 for displaying the position of the noise source Ns on the surface of the transparent table 2 on the monitor 9 in a visible form, and the noise source display unit 10.
A repetitive measurement instruction unit 50 that instructs a measurement processing operation that repeatedly measures a noise source at predetermined time intervals, and a repetitive measurement instruction unit 50.
A determination unit 11 for determining whether the noise source data nsD satisfies the set condition is provided.

When the noise source data generation unit 8 processes the noise source light receiving information nreD without the noise source reflected light NRE, it generates information without the noise source Ns and sends it to the determination unit 11, and the determination unit 11 has no noise source. Make a judgment.

The noise source data nsD includes noise source height data nmhD indicating the height (distance) at each coordinate position (x, y) of the surface (bottom surface) of the noise source Ns, and each coordinate position (x, y). The noise source luminance data nsLD indicating the luminance in the above is included.
The determination unit 11 determines whether the number of positions of the noise source height data nshD or the number of positions of the noise source luminance data nsLD satisfies the range of each predetermined number of positions or the range of each set number of positions.

The noise source height data nshD and the noise source luminance data nsLD are acquired, but either one may be acquired, and the one having either the noise source height data nshD or the noise source luminance data nsLD is regarded as a technical category. There is.

The measurement noise source position information creating unit 70 receives the noise processing instruction nsO of the noise processing instruction unit 15 and creates the measurement noise source position information nsiD indicating the noise source position at the time of measurement.
The sample position information creating unit 71 creates sample position information WiD indicating the position of the sample W at the time of measurement based on the sample surface noiseless height data whiD or the sample surface brightness data.
The positional relationship image creation unit 72 creates a positional relationship image NWG showing the positional relationship between the noise source Ns and the sample W by using the noise source position information nsiD and the sample position information WiD at the time of measurement.
The positional relationship image NWG is displayed on the monitor 9 (see FIG. 5).
The sample position information WiD is displayed as the sample position image WiG in the positional relationship image NWG. The display of the sample position image WiG is displayed in a form in which the noise source mark Nsm existing in the same position is visually displayed.
The form to be visually displayed is, for example, the noise source mark Nsm is displayed forward (different colors are preferable), the sample position image WiG watermark display in which the noise source mark Nsm is visually displayed, and only the outline of the sample position image WiG (other than the outline). Is transparent).

As the light receiving unit, a CCD camera, a CMOS camera, a line sensor, a one-dimensional PSD (position detection element), a two-dimensional PSD and the like are known, but the light receiving unit of the present invention is not limited to these, and the irradiation unit is not limited to these. A photoelectric sensor capable of detecting the reflected light of light and acquiring light receiving information capable of measuring the distance to the sample is included in the technical scope of the present invention.
The irradiation unit is generally a laser beam, but the irradiation unit of the present invention is not limited to these, and the light receiving information (detection image) that enables measurement of the distance to the sample is combined with the light receiving unit. The irradiation unit that irradiates the irradiation light that can be obtained by the above is included in the technical scope of the present invention.

<Cleaning work 1>
The measuring device 1 enables an operation in which the measurement process of the noise source Ns and the cleaning work of the surface of the transparent table 2 are combined.
When the sample is not placed, the noise source measurement execution button 31 on the noise source processing screen 19 is clicked. Then, while checking the noise source mark Nsm displayed on the monitor 9 in the first measurement processing operation, the first cleaning operation for removing the noise source Ns (including moving out of the sample measurement range) is performed.
Click the noise source measurement execution button 31 to execute the second noise source measurement process, check the remaining noise source mark Nsm displayed on the monitor 9, and check the remaining noise source and its position. The second cleaning operation to remove the remaining noise source is performed, and so on, the cleaning work to remove the noise source Ns is performed for the noise source removal status and the remaining noise source. It is possible to perform this while visually confirming the position.
As a result, it is possible to visually confirm that the noise source has been reliably removed, and efficient cleaning work is realized.
In addition, the sample W can be placed in a region that is not affected by the noise source Ns, the measurement data can be obtained, and a report or the like with the noise source data information at the time of the measurement can be created. Enables highly reliable measurement.

<Cleaning work 2>
The measuring device 1 enables an operation that combines an automatic measurement processing operation in which the measurement processing of the noise source Ns is automatically repeated at predetermined time intervals and a cleaning operation of the surface of the transparent table 2.
"5" seconds is indicated as an initial interval in the repetition time input box 51, which is a part of the repetition measurement instruction unit 50, at the lower right of the noise source processing screen 19. An arbitrary number such as "8" or "10" can be input to the repetition time input box 51 to set a desired measurement time interval.
If you click the repetitive measurement button 50a, which is a part of the repetitive measurement instruction unit 50, at the bottom right of the noise source processing screen 19 when the sample is not placed, measurement will be performed at 5 second intervals with the default settings. Therefore, the noise source mark Nsm remaining in the sample placement allowable area 20 (the area where the sample W can be placed at the time of measurement) is indicated for each measurement.
When the stop button 50b, which is a part of the repeat measurement instruction unit 50, is clicked, the repeat measurement ends.
By cleaning the surface of the transparent table 2 while executing the repeated measurement operation at 5-second intervals, the residual noise source Ns remaining in the cleaning operation can be appropriately confirmed by the measurement result every 5 seconds. At the same time, for example, the cleaning work can be proceeded until the adverse noise source Ns is completely removed (including movement) from the area where the sample W is to be placed, and the device is operated. Instead, it is possible to perform intensive cleaning work while quickly and visually confirming the remaining noise source Ns.
This makes it possible to acquire the measurement data of the sample W that is not affected by the noise source Ns, and also to create a report with the noise source data information at the time of the measurement, providing highly reliable measurement results. Make it possible.
The repeat measurement button and the stop button (which may be one button that is also used) are not limited to those provided on the noise source processing screen 19, for example, a push button in the form of being pressed by a finger on the housing 70 containing the transparent table 2. It may be provided as a stop button.

The repeated measurement processing operation may be in a form in which a predetermined time interval is fixed to one, for example, a 3-second interval, a 4-second interval, a 5-second interval, a 10-second interval, a 20-second interval, and the like.
Further, the predetermined time interval is not fixed to one, and a repetitive measurement time setting unit may be provided so that the operator can input and set a desired time interval.
It is also possible to provide a repetitive measurement time selection setting unit that selects a favorite time interval from a plurality of displayed time intervals.

<Measurement processing of noise source>
Measurement is performed without placing the sample W on the transparent table 2, and the noise source light receiving information nreD is processed by the noise source data generation unit 8 of the noise source processing unit 13, and the noise source height data nshD and noise are processed. Generate noise source data nsD with source brightness data nsLD (see FIGS. 1 and 4).
The noise source data nsD is sent to the noise source display unit 10 and the determination unit 11 of the noise source processing unit 13 for processing, and the processing result is displayed on the monitor 9. At that time, the determination unit 11 performs determination processing corresponding to the set conditions or the conditions input by the input means 14 (keyboard, mouse, touch panel, etc.), and the determination result is displayed as the noise ratio of the monitor 9. Displayed in box 37 (see FIGS. 1 and 3). The defect determination is indicated by an alarm display, for example, the color of the noise ratio display box 37 changes and blinks.

<Measurement / judgment of sample>
The sample W is measured with the sample W placed on the transparent table 2, and the sample light receiving information wreD is processed by the sample surface noiseless height data generation unit 7 to generate the sample surface noiseless height data whD.
At that time, the noise source position information nsiD at the time of measurement by the noise source position information creation unit 70 at the time of measurement is reflected, and in the measurement of the sample W, each coordinate position portion of the noise source is removed from the sample surface height datar, and the sample surface noiseless height is obtained. Let's call it data whD. By this processing, the sample surface noiseless height data whD excluding the height data portion of the noise source is generated.
Further, in the measurement of the sample W, the measurement may be performed by excluding all or a part of each position portion of the noise source from the measurement as a non-measurement region, and the sample surface noiseless height data whD may be obtained.
The determination unit 16 determines whether the sample surface noiseless height data whD satisfies a predetermined condition, and the determination data juD is displayed on the monitor 9 from the measurement result output unit 17 (see FIG. 1).

The "sample surface height data" indicates a distance (height distance) in the Z-axis direction, and the reference position thereof is, for example, a position on either side of the irradiation unit 3 and the light receiving unit 4, for example, transparent. 3 of the position of the upper surface of the table 2 (actual measurement of the upper surface), for example, the position of the surface (lower surface) of the reflective member provided on the upper surface of the transparent table 2, and the surface (lower surface) of the reflective member provided on the upper surface of the transparent table 2. It is the position of the plane connecting the points (including the plane moved up and down), the position of the grounding portion of the sample surface W on the transparent table 2, and the like, and these are included in the technical range.

<Generation of 3D shape data>
In the sample surface three-dimensional shape data generation unit 18, it is indicated by the height (distance in the z direction) of each coordinate position (x, y) of the surface (lower surface) of the sample W based on the sample surface noiseless height data whD. The sample surface three-dimensional shape data w3D, which is data representing the three-dimensional shape of the surface of the sample W, is generated, and when the three-dimensional display button 44 on the monitor 9 screen is clicked, the measurement result output unit 17 displays it on the monitor 9. It has become like. (See FIGS. 1 and 2).
The sample surface 3D shape data w3D is placed on the upper surface position of the transparent table 2, the position of the lower surface (surface) of the reflective member provided on the upper surface of the transparent table 2, or the sample W placed on the upper surface of the transparent table 2. The position of the portion in contact with the upper surface may be used as a reference plane, and the height (distance) of the surface (lower surface) of the sample from the reference plane at each coordinate position (x, y) may be used.

<Noise source processing screen>
The noise source processing screen 19 displayed on the monitor 9 will be described with reference to FIGS. 2 and 3.
A table screen 21 showing the XY plane of the transparent table 2 having a size of 100 mm × 100 mm as the sample placement allowable area 20 is displayed, and the table screen 21 grasps the position in the sample placement allowable area 20. It is displayed in a form provided with a scale (mm) for facilitation.
On the right side of the noise source processing screen 19, an enlarged display screen 45 for magnifying and displaying a designated range or a designated noise source is provided.
Below the noise source processing screen 19, a noise source measurement execution button 31 for executing noise source measurement is provided.
FIG. 2 is a screen before the measurement of the noise source.
A noise source processing screen button 48 for displaying the noise source processing screen 19 is provided at the upper left of the screen.

The designation (setting) of the noise permissible range in the sample dimension input unit 22 will be described.
On the screen before measurement (input can be specified even after measurement) shown in FIG. 2, for example, the outer peripheral dimension of the square sample W provided with the terminal protruding from the side portion is 29 mm × 29 mm, and the dimension of the portion without terminal is 22 mm. If it is × 22 mm, enter “29” in the input box 23a, enter “29” in the input box 23b, enter “22” in the input box 24a, and enter “22” in the input box 24b. Click the noise source measurement execution button 31 to execute the noise source measurement process (see FIG. 3).
Based on the dimension input of these samples W, the table screen 21 displays the sample dimension image 38 having the noise tolerance 25 of such dimensions (see FIG. 3).
The sample size image 38 is initially displayed in the center of the screen, but can be moved to any place by touching the mouse pointer and operating the mouse.
Further, the first display location may be displayed by positioning the corner of the sample dimension image 38 at the corner of the square setting area where the sample W is set.
The input to the input box may be input after the noise source is measured. Further, the input to the input box is not essential but optional, and there is no need to input.

A sample placement location determination unit for determining a placement OK area, which is a range in which the sample W of the above dimensions can be placed without being affected by the noise source Ns, is provided, and the placement OK area 66 is displayed on the table screen 21. (See FIG. 3).
It is possible to visually confirm the placement OK area 66 in which the sample W does not cover the noise source Ns, and if there is a placement OK area 66, for example, the placement OK without cleaning the noise source Ns. It is possible to place the sample W in the region 66 and measure it. The smaller the sample W, the larger or wider the mounting OK area 66.

The enlarged display screen 45 will be described.
By pointing the pointer at the noise source mark Nsm to be enlarged and clicking it, the corresponding noise source Ns image can be enlarged and displayed (hereinafter, also referred to as "noise source enlarged image").
The noise source enlarged image is, for example, a black-and-white 256-tone shade image or a black-and-white binary image (included in the “shade image”) based on the noise source luminance data nsLD. However, the present invention is not limited to this. In FIG. 3, the edge of the noise source Ns is displayed as a black-and-white binary image that is easy to see.
Enlarged display of a grayscale image or a black-and-white binary image makes it easier to identify the type of noise source Ns, and makes it easier to perform appropriate cleaning work corresponding to the type of noise source Ns.
In the noise source enlarged image, each position is represented individually, but if there is one or more noise sources in each of a plurality of positions (for example, 10 × 10), it is represented and displayed as one noise source mark. May be good.
The enlarged display of the noise source mark Nsm can be visually recognized by changing the color or blinking while the enlarged display is in progress.

<Allowable noise ratio>
The number of each position of the noise source Ns in the area excluding the number of each position of the noise tolerance area 25 of the place where the sample size image 38 is placed determines the number of each position of the noise tolerance area 25 of the sample size image 38. The noise ratio display box 37 indicates what percentage (ratio) of the number of positions to be excluded. In FIG. 3, since there is no noise source, the display of the noise ratio display box 37 is 0.00%.

It may be possible to display the screen on the upper surface and the screen on the lower surface of the transparent table 2 separately. For example, it can be displayed as a noise source screen on the upper surface of the sample mounting table showing the noise source Ns on the upper surface of the transparent table 2 and as a noise source screen on the lower surface of the sample mounting table showing the noise source Ns on the lower surface of the transparent table 2. Is good. It is also preferable to be able to display the noise sources Ns on the upper surface and the lower surface of the transparent table 2 on one screen.

An example of the processing step will be described mainly with reference to FIG.
The sample W is not placed on the upper surface of the transparent table 2.
・ Step1
The noise source processing screen 19 is displayed on the monitor 9, and necessary information is input to the sample dimension input unit 22 if necessary (see FIG. 3).
・ Step2
Click the noise source measurement execution button 31 on the noise source processing screen 19 (see FIG. 3) to receive the noise source reflected light NRE from the noise source Ns on the surface of the transparent table 2 in which the sample W is not placed. Then, the noise source light receiving information nreD is acquired.
・ Step3
(1) The noise source light receiving information nreD is processed by the noise source data generation unit 8, and when the noise source Ns is present, it is data indicating each coordinate position (x, y) of the surface (lower surface) of the noise source Ns. Some noise source data nsD is generated.
(2) When there is no noise source reflected light NRE (no noise source Ns), the noise source data generation unit 8 generates data without a noise source Ns.
・ Step4
The noise source data nsD is sent to the determination unit 11 to determine whether the number of positions forming the noise source Ns satisfies the predetermined range of each position number or the set number of positions range, and based on the determination. The noise processing instruction nsO is created in the noise processing instruction unit 15.
When there is no noise source Ns, the instruction of the noise processing instruction nsO is the measurement of the sample W.
・ Step5
The noise source data nsD and the noise processing instruction nsO data are displayed on the monitor 9 with an "x" mark or an "○" mark in which the position of the noise source Ns can be visually recognized on the table screen 21 (see FIG. 3).
If cleaning is not required (cleaning is not required), proceed to steps 7 and 8.
If there is a need for cleaning, proceed to step6.
・ Step6
If cleaning is required, click the repeat measurement button 50a to execute the repeat measurement.
While performing the repeated measurement, the cleaning work of the surface of the transparent table 2 is performed while confirming the removal state of the noise source Ns on the table screen 21.
When the cleaning work is completed, the stop button 5b is clicked to stop the repeated measurement, and the cleaning is completed.
・ Step7
Upon receiving an instruction that cleaning is unnecessary or the cleaning is completed, the noise source position information creating unit 70 at the time of measurement creates the noise source position information nsiD at the time of measurement indicating the noise source position at the time of measurement.
・ Step8
The sample W is placed on the upper surface of the transparent table 2, the measurement of the sample W is executed, and the sample position information creating unit 71 creates the sample position information WiD indicating the position of the sample W at the time of measurement.
・ Step9
The positional relationship image creating unit 72 creates a positional relationship image NWG showing the positional relationship between the noise source Ns and the sample W by using the noise source position information nsiD and the sample position information WiD at the time of measurement.
The positional relationship image NWG is displayed on the monitor 9 (see FIG. 5).
・ Step10 (see Fig. 1, omitted in Fig. 4)
The sample W is measured with the sample W placed on the transparent table 2, and the sample light receiving information wreD is processed by the sample surface noiseless height data generation unit 7 to generate the sample surface noiseless height data whD. At that time, the noise source position information nsiD at the time of measurement by the noise source position information creation unit 70 at the time of measurement is reflected, and in the measurement of the sample W, each coordinate position portion of the noise source is removed from the sample surface height datar, and the sample surface noiseless height is obtained. Let's call it data whD. By this processing, the sample surface noiseless height data whD excluding the height data portion of the noise source is generated.
-Step 11 (see Fig. 1, omitted in Fig. 4)
The determination unit 16 determines whether or not the sample surface noiseless height data whD satisfies a predetermined condition.

The transparent table 2 has a structure in which most of the irradiation light LR is transmitted (by applying a transmission film or the like), and even if there is reflected light from the transparent table 2, the reflected light is received (detected) by the light receiving unit 4. ) It is a level that cannot be done.
When the measurement is performed in a state where the sample W is not placed, the irradiation light LR does not generate the reflected light having an intensity that can be detected by the light receiving portion because there is no sample W. Even when cleaning and measurement processing are performed without a cover covering the transparent table 2, the light receiving level of ambient light is set to a negligible light receiving sensitivity (detection sensitivity), so that the light receiving unit 4 does not receive reflected light. , Height information and brightness information cannot be acquired. However, when there is a noise source Ns, the noise source reflected light NRE from the noise source Ns is generated, so that information on the height level and the luminance level exists near the upper surface or the lower surface of the transparent table 2. Each position data indicates the coordinate position where the noise source Ns exists.

As the irradiation / light receiving unit 6, a ready-made irradiation / light receiving unit provided by the manufacturer can be used.
<Example of irradiation / light receiving unit of phase shift method>
For example, "XG-8000 Series XR-" manufactured by KEYENCE CORPORATION, which is equipped with an irradiation unit consisting of two left and right projectors and a camera (light receiving unit / photodetection unit) provided in the center of the irradiation unit using the phase shift method as a measurement method. There is an irradiation / light receiving unit of "HT40MD". This is an irradiation / light receiving unit that captures (receives light) a plurality of stripe patterns (striped patterns) projected at high speed from two left and right projectors on a sample with a central camera (light detection unit / light receiving unit). The height of each coordinate position (x, y) from the reference position on the side to the surface of the sample is measured and acquired, and the three-dimensional shape data represented by the height of each coordinate position (x, y) is obtained. be.
<Example of irradiation / light receiving unit by light cutting method>
For example, there is an irradiation / light receiving unit of "LJ-V7000 series" manufactured by KEYENCE CORPORATION, which uses a light cutting method as a measurement method. Since the optical cutting method is a method of acquiring the shape (profile) of a line-shaped cut surface, the cutting position for optical cutting is continuously changed in one direction with respect to the sample to continuously profile (line). The shape of the cut surface) is acquired, and the three-dimensional shape data is acquired by synthesizing the obtained profiles. The irradiation light is a 405 nm blue-purple laser beam.
<Example of confocal irradiation / light receiving unit>
For example, there is a "CL-3000 series irradiation / light receiving unit" manufactured by KEYENCE CORPORATION that uses a confocal method as a measurement method. This unit is arranged so that the light projection (irradiation) and the light reception are coaxial, and the sample is focused. It is designed so that only the light that matches is focused on a single point on the pinhole. By irradiating the object with light that has a different focusing position for each wavelength and detecting the wavelength focal position from the received light spectrum, the target Measure the height of an object.
The example of the irradiation / light receiving unit described above is an example, and various irradiation / light receiving units and controllers are provided by a plurality of companies.
By using the irradiation light receiving unit and the controller provided by these companies, the present invention can be carried out by those skilled in the art.

Further, as the measurement method of the present invention, the coherence method, the moire topography method, the interference fringe method, the spot light projection method, the line light projection method, the pattern projection method, the optical time difference method, the optical frequency difference method, the optical phase difference method, and the light The coherence method can be mentioned.

In the second embodiment of the present invention shown in FIGS. 6, 7, and 8, the main difference from the first embodiment is that the sample W is made larger.
Here, the sample W has a square shape and a dimension of "70 × 70", and the noise tolerance 25 has a square shape and a dimension of “60 × 60”. This dimension is input to the corresponding input box of the sample dimension input unit 22.
When the noise source measurement execution button 31 is clicked and the measurement is executed, a screen showing the measurement result as shown in FIG. 6, for example, is displayed.
Since the noise permissible range 25 is specified (set), only the noise source mark Nsm of the number "upper 003" is measured (detected), so it is indicated by "x", and the other noise source mark Nsm is "○". It is considered as a non-measurement (non-detection) noise source or unused data indicated by "".

As shown in FIG. 7, when the sample size image 28 is slightly moved to the upper part of the screen (for example, by operating the mouse or keyboard) and the arrangement is changed, the noise source mark Nsm numbered above 003 is within the noise tolerance 25. Since it is located, it will be marked with a "○".

As shown in FIG. 8, when it is desired to set the dimension of the noise tolerance 25 to "no noise tolerance" without inputting to the input boxes 24a and 24b, the noise source mark Nsm in the noise tolerance 25 is marked with "x". It becomes.

The third embodiment of the present invention shown in FIGS. 9 to 13 will be described.
In FIG. 9, there is a noise source reflected light NRE from the noise source Ns, and each coordinate position (x, y) of the noise source data nsD is set as a noise source mark Nsm (here, “x” mark) in the noise source processing image 19. It will be displayed in the sample placement allowable area 20.
The noise source mark Nsm is not limited to the “x” mark, and may have various symbols and shapes. Further, when the noise source height data nshD indicating the height (distance) at each coordinate position (x, y) of the surface (lower surface) of the noise source Ns is used, the upper surface side or the lower surface side of the transparent table 2 is not shown. For example, color coding, blinking, and comment display may be performed so that the noise source on the side can be distinguished. It is desirable that the shape of the display matches the shape of the actual transparent table 2 so that each position of the noise source mark Nsm can be intuitively understood.
At the upper part of the sample placement allowable area 20 in the noise source processing screen 19, the ratio of the total number of noise source marks Nsm to all the positions of the sample placement allowable area 20 is displayed, and , It is determined whether the ratio satisfies a predetermined condition. A noise source ratio display box 52 is provided, in which "OK" indicates that the condition is satisfied and "NG" indicates that the condition is not satisfied.
Further, for example, the number of noise source marks Nsm columns may be set to be abnormal (NG) by a set number such that two or more or three or more consecutive noise source marks Nsm columns are continuous in the X direction or the Y direction.
In the form shown in FIG. 9, the noise source mark Nsm ratio is expressed as a percentage, but the ratio is not limited to this, and may be a number. The "x" part may be displayed in different colors or may be blinked.

In the form shown in FIG. 10, the sample placement allowable area 20 is divided or divided into a plurality of box-shaped areas, and it is determined whether or not the number of noise source marks Nsm in one unit area is equal to or larger than the set value (number), and noise is generated. It is displayed on the source processing screen 19.
Here, since it is a condition for determining "NG" that is not satisfied when there are three or more noise source marks Nsm in one unit box 52, the noise source of the box number 6-2 is displayed in the noise source ratio display box 52. It is written that the number of marks Nsm is 5 (5/3) and is "NG". There is a square frame in the abnormal number display area 6-2 in FIG. 10, but this portion may be blinked or the display color may be changed.

Further, for example, the entire measurement area is divided into several equal parts, and the place where the number of each area is equal to or larger than the set value is blinked with a graphic such as a square or a circle to inform the measurement operator of the area where the noise source Ns is present. It is also good to do so. In this form, the “x” mark is not displayed, and each area that is blinking, color-coded, filled, etc. in a visually recognizable form is the noise source mark Nsm.

Depending on the measurement purpose of the sample W, the height information of only the designated region (measurement region which is a region of only a part of the sample W) on the XY plane may be sufficient. In that case, the purpose can be achieved if the noise source data only within the specified area can be evaluated. It is also possible to process each position data, visualize the designated area on the monitor, and determine whether the noise source data nsD only in the designated area satisfies the standard. If there are a plurality of areas, the judgment criteria may be different for each area and the judgment may be made. By displaying the determination status for each area on the monitor numerically or graphically, the operator may be shown the position or area where the noise source Ns exists.

In the embodiment shown in FIG. 11, the determination is made only for the noise source Ns in the measurement areas 73a and 73b of the sample W (for example, only the portion of the protrusion wt is specified (including setting and designation) as the measurement area). Areas other than the measurement areas 73a, 73b ... Are excluded from the determination process as non-measurement areas (the determination process is not performed).
Here, for example, the protrusion wt portion on the shading image of the surface of the sample W displayed on the monitor is surrounded by a frame (performed by mouse operation or the like), and the inside of the frame is specified as measurement areas 73a, 73b, and so on. And the measurement area specific data ktD is created (acquired).
When the determination is executed, the noise source ratio is expressed as a percentage in the noise source ratio display box 52 for each measurement area, and the determination unit 11 determines the result. Notated as "NG".
The frame for specifying the measurement area while visually recognizing the image displayed on the monitor is not limited to the square frame. For example, it may be a circle or an ellipse, or a frame having an arbitrary shape depending on the shape of the sample.
The area setting data is acquired by photographing the surface of the sample W and acquiring a shade image (color shade image, black-and-white 256-tone shade image, black-and-white binary image, etc.), but is not limited to this, and is not limited to this, for example, the sample. It may be acquired from the CAD data of W.

<Generation of sample surface region noiseless height data WkhD>
When the determination result of all the measurement regions is "OK", the sample surface region noiseless height data generation unit 76 excludes the outside of the measurement regions 73a, 76b ... Indicated by the measurement region specific data ktD from the measurement. As a measurement area, each coordinate position (x, y) portion of the noise source Ns indicated by the noise source data nsD in the measurement areas 73a, 76b ... Is excluded from the data or excluded when measuring the surface of the sample W. The sample surface region noiseless height data WkhD, which is data indicating the height distance of each coordinate position (x, y) of the surface of the sample W in each of the measurement regions 73a, 76b ... Generate.

As an effective example by designating a plurality of measurement regions, each lead from the upper surface of the transparent table 2 of the lead (protrusion portion wt) of the electronic component (sample W) or the lower surface of the reflective member provided on the upper surface of the transparent table 2 Height (eg, within 100 microns) may be determined. Assuming that the height of each lead from the lower surface of the reflective member is obtained, in this case, the minimum value or the average value of the height and the height from the lower surface of the reflective member may be obtained in each region of the plurality of lead portions. .. Since only the height information of only the region of the lead portion is calculated, the noise source other than the region of the lead portion does not matter. In such a case, high-speed processing is possible by designating a measurement area and excluding the area outside the measurement area as a non-measurement area or a non-processing area. Alternatively, the entire area with a plurality of reads may be designated as one area. Further, for example, the number of noise sources Ns in each region may be processed to determine whether or not the criteria are satisfied.

In the form shown in FIG. 12, for example, a jig or the like other than the sample may be placed in the measurement area on the transparent table 2, and the jig or the like may be placed on the transparent table 2. This is an example of monitor display. Since 54a and 54b are jig portions and are placed on the upper surface of the transparent table 2, they are all noise source marks Nsm (black-painted portion). However, since this region is not related to the measurement, the jig portions 54a and 54b must be excluded from the noise source data nsD. In that case, the noise source data generation unit 8 can ignore the data in the region of this jig portion and can not use it as the noise source data nsD. The jig portions 54a and 54b may be designated as a non-measurement area by creating a frame by operating the mouse while looking at the monitor and surrounding the frame, or may be designated as a non-measurement area by CAD data. .. If the measurement data of the jig portions 54a and 54b is not used as the measurement data in a region or a non-measurement region, each position data in the region can be ignored.

By visualizing and quantifying the position of the noise source of the transparent table 2 in this way, it is possible to appropriately inform the measurement operator of the location of the noise source and the influence of the noise source Ns, and the noise source Ns. Confirmation after removal work is also clarified. Therefore, since the noise source Ns can be appropriately removed, highly reliable measurement becomes possible.

Even if there is a noise source Ns in the transparent table 2, the sample W is effective unless the height information of the noise source Ns portion, that is, the height information of each coordinate position (x, y) constituting the noise source data nsD is used. Only height information is available, and measurement with little error is possible.

13 (b), (c), and (d) are partially enlarged schematic views showing one noise source mark Nsm portion, and one square represents one coordinate position (x, y). ..
(B) The frame portion represented by the thick line in the figure is the square portion of the noise source mark Nsm represented by one “x” mark in the figure (a) (coordinate position (x, which is each measurement position in the XY plane). y)).
(C) In the form shown in the figure, the noise source mark Nsm is subjected to the non-measurement portion designation process (1), and the square portion of the noise source mark Nsm is designated as it is in the non-measurement area 55 (non-measurement dot group area), and the sample is sampled. In the height measurement of W, the non-measurement area 55 portion is regarded as a non-measurement portion which is a non-measurement portion (a portion excluded from the measurement).
Then, the height of the non-measurement area 55 portion is processed as the height value of the squares (coordinate positions (x, y)) around the non-measurement area 55, or the squares (coordinates) around the non-measurement area 55 are processed. Processing is performed by a general method such as making the average value of the heights of the positions (x, y)).
(D) In the form shown in the figure, the noise source mark Nsm is subjected to the non-measurement portion designation process (2), and the area including the square portion around the square portion of the noise source mark Nsm (for example, in this case, one adjacent square) is included. Is designated as the non-measurement area 56 (non-measurement dot group area), and in the height measurement or height acquisition process of the sample W, the non-measurement area 56 part is a non-measurement part (a part excluded from the measurement). It is considered to be a part.
Then, the height of the non-measurement area 56 portion is processed as the height value of the squares (coordinate positions (x, y)) around the non-measurement area 56, or the squares (coordinates) around the non-measurement area 56 are processed. In addition to making the height value and the brightness value of the position (x, y)) or the average value of any of them, it can be supplemented by a general method such as a median filter or a moving average process.

In the measurement of the sample W, the non-measurement area or the unused portion can be supplemented by a general method such as averaging processing or supplementing with peripheral data. At least the data parts that are clearly ineffective are not used or measured, so that more accurate measurement is possible.
Since not only the position of the noise source Ns but also the position data around it may be affected by the noise source to some extent, the position data around it is regarded as unused or unmeasured. Information about the height level of each valid position may be specified.

Depending on the measurement purpose of the sample W, a partially designated area measurement (measurement area) may be sufficient for measuring by designating a part of the sample W (specifying the measurement area). In the case of this partially designated area measurement, the measurement purpose is achieved by processing the data only in this partially designated area.
For example, when the purpose of measurement is to obtain the minimum height of each lead of an electronic component from the upper surface of the transparent table 2 (the height closest to the upper surface of the transparent table 2), it adheres to the upper surface of the transparent table 2. There is a high possibility that the noise source Ns is at the minimum value (the height distance is the shortest), which causes an error. It is possible to surely avoid detection and surely acquire the measurement data of the height position of only the lead which is not affected by the noise source Ns.
Then, it becomes possible to include the processing data of the noise source Ns in the measurement data, which makes it possible to provide a highly accurate measurement result in which high reliability and high stability are guaranteed. ..
Further, since the processing is performed only in the designated area (measurement area), the measurement can be speeded up and simplified.

In the fourth embodiment of the present invention shown in FIGS. 14 and 15, the main difference from the first embodiment is that a transparent plate (quartz glass, sapphire glass, etc.) is placed below the transparent table 2 (quartz glass, sapphire glass, etc.). ) Is provided, and the irradiation / light receiving unit 6 is arranged below the lower table 60 (see FIG. 14), and the display of the sample placement allowable area 20 on the noise source processing screen 19 is displayed.
The sample mounting table top surface noise source screen 61, which shows the position of the noise source Ns on the top surface of the transparent table 2 shown in FIG. 15 (1).
The noise source screen 62 on the lower surface of the sample mounting table showing the noise source Ns on the lower surface of the transparent table 2 shown in FIG.
Lower table upper surface noise source screen 63, which shows the noise source Ns on the upper surface of the lower table 60 shown in FIG. 15 (3).
The lower table lower surface noise source screen 64, which shows the noise source Ns on the lower surface of the lower table 60, shown in FIG. (4) of FIG.
The point is that it can be displayed for each surface.
It is good to be able to display only one screen, display multiple screens, and display full screen.

The irradiation / light receiving unit 6 is located below the lower table 60, and the transparent table 2 is provided directly on the upper surface of the lower table 60 or has a space between the irradiation / light receiving unit 6 and the lower table 60 (in FIG. 14). It is provided. When there is a space 68 (including a "gap") between the transparent table 2 and the lower table 60, for example, the space 68 may be a fine space of 0.1 mm, for example, in a space of 5 mm or 10 mm. In some cases.

Around the sample placement allowable area on the upper surface of the transparent table 2, heat-resistant reflective members 69 such as a ceramic coating agent and a metal coating agent are provided in a plurality of places even in a coating form. A form in which the entire circumference of the sample placement allowable area is surrounded by one reflective member 69 may be used.
The distance (height distance) to the lower surface (surface) of the reflective member is measured, and the distance from the lower surface of the reflective member 69 to the lower surface of the sample is acquired.
Select the three reflective members 69, specify the representative values of each (average value, maximum height value, minimum height value, etc.), generate a plane connecting the three representative values, and create a flat reference surface. It is preferable to obtain the distance from the flat reference plane to the lower eye of the sample.
In this embodiment, the distance from the upper surface of the transparent table 2 to the lower surface of the sample is not measured. The transparent table 2 and the lower table 60 have a structure in which most of the irradiation light LR is transmitted (by applying a transmission film or the like), and even if there is reflected light from the surface of the transparent table 2 and the lower table 60, the reflected light thereof. Is set to a level at which light receiving (detection) cannot be received by the light receiving unit 4.

In Example 5 of the present invention shown in FIGS. 16 and 17, the main difference from the above-mentioned Example 1 is.
A measurement area specifying unit 75 for specifying or setting the measurement area of the sample W placed on the transparent table 2 and generating the measurement area specifying data ktD which is the data thereof is provided.
The outside of the measurement area indicated by the measurement area specific data ktD is excluded from the measurement, and a part or all of each coordinate position (x, y) portion of the noise source Ns indicated by the noise source data nsD in the measurement area is defined as a non-measurement area. A sample that indicates the height distance of each coordinate position (x, y) of the surface of the sample W in the measurement region, which is generated by excluding from the data or excluded from the measurement of the surface of the sample W. The measurement device 77 is provided by replacing the sample surface region noiseless height data generation unit 76 that generates the surface region noiseless height data WkhD with the sample surface noiseless height data generation unit 7 in Example 1.
Therefore, the sample surface region noiseless height data WkhD is generated instead of the sample surface noiseless height data whD generated by the sample surface noiseless height data generation unit 7 in Example 1.
Since the processing is performed only in the measurement area excluding the noise source Ns information and the height information of the sample W surface in the area other than the measurement area, the amount of information processing can be reduced and rapid measurement can be realized.
The sample surface area noiseless height data WkhD is data indicating the height of the sample W surface in the measurement area, excluding a part or all of each coordinate position (x, y) portion of the noise source (no data). be.

To specify the measurement area by the measurement area specifying unit 75, a light and shade image based on the light and shade image data ShGD, which is the brightness information of the sample W, is displayed on the monitor. It is surrounded by a frame by touch panel operation or the like, and the enclosed portion is used as a measurement area.
The shade image is, for example, a 256-tone black-and-white shade image, a black-and-white binary shade image in which the edge of the protrusion wt is emphasized, a color image, or the like.
The luminance information of the sample W may be acquired at the same time as the acquisition of the height information of the sample W, or the luminance information may be acquired before or after the acquisition of the height information of the sample W.
Further, the measurement area may be, for example, one specified and stored in advance from the CAD data of the sample W.

An example of the processing step will be described mainly with reference to FIG.
Since steps 1 to 9 are the same as those in the first embodiment, the description thereof will be omitted.
・ Step10
The measurement area is specified and the measurement area specification data ktD is generated.
・ Step11
The outside of the measurement area indicated by the measurement area specific data ktD is excluded from the measurement, and a part or all of each coordinate position (x, y) portion of the noise source Ns indicated by the noise source data nsD in the measurement area is defined as a non-measurement area. A sample that indicates the height distance of each coordinate position (x, y) of the surface of the sample W in the measurement region, which is generated by excluding from the data or excluded from the measurement of the surface of the sample W. Generate surface area noiseless height data WkhD ・ step12
The determination unit 16 determines whether or not the sample surface region noiseless height data WkhD satisfies a predetermined condition.

By acquiring the measurement area specific data ktD in advance and excluding only the measurement area based on the measurement area specific data ktD as the measurement area and excluding the area outside the measurement area as the non-measurement area when measuring the height of the sample W. It is also good to generate the sample surface region noiseless height data WkhD.

The present invention is mainly used in an industry for manufacturing electronic parts and the like, measuring flatness, and inspecting.

W: Sample,
WRE: Sample reflected light,
WiD: Sample W position information,
WiG: Sample position image,
wt: protrusion,
LR: Irradiation light,
wreD: Sample light receiving information,
whD: Sample surface noiseless height data,
Ns: Noise source,
Nsm: Noise source mark,
NRE: Noise source reflected light,
nreD: Noise source light receiving information,
nsD: Noise source data,
noise: noise source height data,
nsLD: Noise source luminance data,
nsG: Noise source image,
nsO: Noise processing instruction,
nsrR: Allowable brightness range,
nsiD: Noise source position information during measurement,
NWG: Positional image,
ShGD: shading image data,
WkhD: Sample surface area noiseless height data,
ktD; Measurement area specific data,

1: Measuring device,
2: Transparent table,
3: Irradiation part,
4: Light receiving part,
5: Control unit,
6: Irradiation and light receiving unit,
7: Sample surface noiseless height data generator,
8: Noise source data generator,
9: Monitor,
10: Noise source display,
11: Judgment unit,
12: Unit control section,
13: Noise source processing unit,
14: Input means,
15: Noise processing indicator,
16: Judgment unit,
17: Measurement result output unit,
18: Sample surface 3D shape data generator,
19: Noise source processing screen,
20: Allowable sample placement,
21: Table screen,
22: Enlarged display screen,
22: Sample dimension input section,
22a: Dimension input section,
22b: Dimension input section,
23a: Input box,
23b: Input box,
24a: Input box,
24b: Input box,
24c: Input box,
25: Noise tolerance,
26: Input box,
27a: Input box,
27b: Input box,
27c: Input box,
31: Noise source measurement execution button,
32: Allowable noise ratio input box,
37: Noise ratio display box,
38: Sample size image,
44: 3D display button,
45: Enlarged display screen,
48: Noise source processing screen button,
50: Repeated measurement indicator,
50a: Repeated measurement button,
50b: Stop button,
51: Repeat time input box,
52: Noise source ratio display box,
54a: Jig part,
54b: Jig part,
55: Non-measurement range,
56: Non-measurement range,
60: Lower table,
61: Noise source screen on the top surface of the sample mounting table,
62: Noise source screen on the underside of the sample mounting table,
63: Noise source screen on the top of the lower table,
64: Lower table bottom noise source screen,
66: Placement OK area,
68: Space,
69: Reflective member,
70: Noise source position information creation unit during measurement,
71: Sample position information creation unit,
72: Positional image creation unit,
73a: Measurement area,
73b: Measurement area,
75: Measurement area identification part,
76: Sample surface area noiseless height data generator,
77: Measuring device.

Claims (6)

From the irradiation unit provided below the transparent table, the irradiation light transmitted through the transparent table is irradiated toward the sample which is an electronic component placed on the upper surface of the transparent table, and the sample reflected light which is the reflected light is emitted. The sample surface is data indicating the height at each coordinate position (x, y) of the surface of the sample by receiving light from the light receiving unit provided below the transparent table and processing the sample light receiving information which is the light receiving information. In a measuring device for electronic components that generate height data
Reflective objects other than the sample that reflect the irradiation light, such as dust, greasy stains, and scratches on the table surface, on the transparent table surface are defined as noise sources.
The noise source reflected light, which is the reflected light of the noise source of the irradiation light irradiated with the sample not placed on the upper surface of the transparent table, is received by the light receiving unit. It is provided with a noise source data generation unit that processes information and generates noise source data which is data indicating the height and / or brightness of each coordinate position (x, y) on the surface of the noise source. A measuring device for electronic components characterized by. The measuring device for electronic components according to claim 1, further comprising a noise source display unit that displays the position of the noise source on a monitor in a form that can be visually recognized. Claim 1 is characterized in that a determination unit for determining whether the number of each coordinate position (x, y) of the noise source data satisfies the range of each set number of coordinate positions (x, y) is provided. 2. The electronic component measuring device according to any one of 2. The electronic component measuring device according to any one of claims 1 to 3, wherein a determination unit for determining whether the ratio of the noise source satisfies a predetermined condition is provided. A noise source display unit is provided to display the position of the noise source in a form that can be visually recognized on the monitor.
An upper surface image, which is an image of the upper surface of the transparent table, can be displayed on the monitor.
A lower surface image, which is an image of the lower surface of the transparent table, can be displayed on the monitor.
The top surface image shows the position of the noise source on the top surface of the transparent table.
The electronic component measuring device according to any one of claims 1 to 4, wherein the lower surface image displays the position of the noise source on the lower surface of the transparent table. From the irradiation unit provided below the transparent table, the irradiation light transmitted through the transparent table is irradiated toward the sample which is an electronic component placed on the upper surface of the transparent table, and the sample reflected light which is the reflected light is emitted. The sample surface is data indicating the height at each coordinate position (x, y) of the surface of the sample by receiving light from the light receiving portion provided below the transparent table and processing the sample light receiving information which is the light receiving information. It is a method of measuring electronic components using an electronic component measuring device that generates height data.
Reflective objects other than the sample that reflect the irradiation light, such as dust, greasy stains, and scratches on the table surface, on the transparent table surface are defined as noise sources.
The noise source reflected light, which is the reflected light of the noise source of the irradiation light irradiated with the sample not placed on the upper surface of the transparent table, is received by the light receiving unit. An electron comprising processing information to generate noise source data, which is data indicating the height and / or brightness of each coordinate position (x, y) on the surface of the noise source. A method for measuring electronic parts using a parts measuring device.

Images