JP6969512B2 - 物品搬送装置 - Google Patents
物品搬送装置 Download PDFInfo
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- JP6969512B2 JP6969512B2 JP2018128501A JP2018128501A JP6969512B2 JP 6969512 B2 JP6969512 B2 JP 6969512B2 JP 2018128501 A JP2018128501 A JP 2018128501A JP 2018128501 A JP2018128501 A JP 2018128501A JP 6969512 B2 JP6969512 B2 JP 6969512B2
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- B65G35/00—Mechanical conveyors not otherwise provided for
- B65G35/06—Mechanical conveyors not otherwise provided for comprising a load-carrier moving along a path, e.g. a closed path, and adapted to be engaged by any one of a series of traction elements spaced along the path
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
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- Microelectronics & Electronic Packaging (AREA)
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Description
物品搬送装置の第1実施形態について図面を参照して説明する。物品搬送装置100は、受取場所10から引渡場所20まで物品8を搬送するものである。このような物品搬送装置100を、例えば、半導体ウェハ、又はレチクルなどの搬送や保管を行うための物品搬送設備Fに適用することができる。以下では、一例として、物品搬送装置100が、上記のような物品搬送設備Fに適用される例について説明する。
まず、物品搬送設備Fの概略構成について説明する。
次に、物品搬送装置100の詳細な構成について説明する。
図1及び図2に示すように、経路形成部9は、受取場所10から引渡場所20に亘って延びるように設けられている。つまり、経路形成部9は、物品搬送装置100が物品8を搬送する搬送方向Lに沿って延びている。図示の例では、経路形成部9は、搬送方向Lに沿って延びる箱状に形成されており、その上端には、搬送方向Lに沿って延びる開口部91が形成されている。なお、以下では、「搬送方向L」における引渡場所20から受取場所10へ向かう側を「搬送方向第1側L1」とし、その反対側である受取場所10から引渡場所20へ向かう側を「搬送方向第2側L2」とする。そして、「搬送方向L」に対して上下方向視で直交する方向を「搬送幅方向W」とする。
荷受台Pは、物品8が載置される台であって、所定の第3高さH3(図4等参照)に固定されている。詳細には、荷受台Pは、物品8が載置される載置面PFを有しており、当該載置面PFが第3高さH3に位置するように、経路形成部9に固定されている。本実施形態では、荷受台Pは、受取場所10に設けられた受取側荷受台11Pと、引渡場所20に設けられた引渡側荷受台21Pと、を有して構成されている。受取側荷受台11P及び引渡側荷受台21Pの双方は、それぞれが有する載置面PFが上述の第3高さH3に位置するように固定されている。
搬送車30は、受取場所10と引渡場所20との間で往復移動するように構成されている。本実施形態では、搬送車30は、受取場所10から引渡場所20に物品8を搬送するように構成され、受取場所10から引渡場所20まで移動する搬送移動と、引渡場所20から受取場所10まで移動する復帰移動と、を行う。換言すれば、搬送車30は、搬送移動を行うことで、物品保管庫Sの外部から物品保管庫Sの内部に、物品8を搬送する。但し、上記のような構成に限定されることなく、受取場所10が物品保管庫Sの内部に設定され、引渡場所20が物品保管庫Sの外部に設定されている場合には、搬送車30は、物品保管庫Sの内部から物品保管庫Sの外部に、物品8を搬送する。
物品搬送装置100は、受取場所10及び引渡場所20における物品8の有無を検出する物品検出部S1と、搬送載置台31の高さを検出する高さ検出部S2と、搬送車30の搬送方向Lにおける位置を検出する位置検出部S3と、を備えている。
次に、物品搬送設備Fの制御構成について説明する。
次に、「搬送車30による物品8の受け取り」について、図4及び図5を参照して説明する。図4及び図5は、受取場所10における搬送車30の動作、より詳細には、受取場所10における昇降装置31M(搬送載置台31)の動作を示す図である。
次に、「搬送車30による物品8の引き渡し」について、図6及び図7を参照して説明する。図6及び図7は、引渡場所20における搬送車30の動作、より詳細には、引渡場所20における昇降装置31M(搬送載置台31)の動作を示す図である。
次に、搬送車30の搬送移動に伴う昇降装置31M(搬送載置台31)の動作について、図8を参照して説明する。図8は、搬送車30が搬送移動する際の昇降装置31M(搬送載置台31)の動作を、受取場所10及び引渡場所20において行われる移載の種類(直接移載または荷受台移載)に応じて場合分けしつつ、模式的な一覧表にしたものである。なお、上述のように、「搬送移動」とは、搬送車30による受取場所10から引渡場所20までの移動をいう。
次に、搬送車30の復帰移動に伴う昇降装置31M(搬送載置台31)の動作について、図9を参照して説明する。図9は、搬送車30が復帰移動する際の昇降装置31M(搬送載置台31)の動作を、引渡場所20において行われる移載の種類及び受取場所10における物品8の有無に応じて場合分けしつつ、模式的な一覧表にしたものである。なお、上述のように、「復帰移動」とは、搬送車30による引渡場所20から受取場所10までの移動をいう。
次に、物品搬送装置100の動作手順について、図10に基づいて(必要に応じて図1にも基づいて)説明する。
次に、物品搬送装置のその他の実施形態について説明する。
以下、上記において説明した物品搬送装置の概要について説明する。
前記荷受台は、前記受取場所と前記引渡場所とのそれぞれに設けられ、前記搬送車は、前記引渡場所において、前記第1高さにある前記搬送載置台から物品が取られること、又は、前記搬送載置台に物品が載置された状態で前記搬送載置台を前記第1高さから前記第2高さに下降させて前記荷受台に物品を載せることで、物品を引き渡し、前記昇降装置は、前記搬送車が前記引渡場所から前記受取場所まで移動する復帰移動を行う場合に、前記受取場所の前記荷受台における物品の有無に加えて、前記引渡場所での物品の引き渡し後の前記搬送載置台の高さにも応じて、異なる復帰動作を行うと好適である。
前記昇降装置は、前記受取場所の前記荷受台に物品が無い場合には、前記搬送車が前記受取場所に到着するまでに前記搬送載置台を前記第1高さとし、前記受取場所の前記荷受台に物品が有る場合には、前記搬送車が前記受取場所に到着するまでに前記搬送載置台を前記第2高さとするように、前記復帰動作を行うと好適である。
前記昇降装置は、前記引渡場所での物品の引き渡し後の前記搬送載置台の高さと、前記復帰動作の完了後の前記搬送載置台の高さとが同じである場合には、前記搬送車の前記復帰移動中の前記搬送載置台の高さを維持し、前記引渡場所での物品の引き渡し後の前記搬送載置台の高さと、前記復帰動作の完了後の前記搬送載置台の高さとが異なる場合には、前記搬送車の前記復帰移動中に前記搬送載置台の高さを変更すると好適である。
前記昇降装置は、前記搬送車の前記復帰移動中に前記搬送載置台の高さを変更する場合に、前記搬送載置台を、前記搬送車の移動に応じて次第に上昇又は下降させると好適である。
前記昇降装置は、前記引渡場所での物品の引き渡し後の前記搬送載置台の高さが前記第1高さであって前記受取場所の前記荷受台に物品が無い場合には、前記搬送車の前記復帰移動中の前記搬送載置台の高さを前記第1高さに維持する第1復帰動作を行い、前記引渡場所での物品の引き渡し後の前記搬送載置台の高さが前記第1高さであって前記受取場所の前記荷受台に物品が有る場合には、前記搬送車の前記復帰移動中に前記搬送載置台の高さを前記第1高さから前記第2高さに下降させる第2復帰動作を行い、前記引渡場所での物品の引き渡し後の前記搬送載置台の高さが前記第2高さであって前記受取場所の前記荷受台に物品が無い場合には、前記搬送車の前記復帰移動中に前記搬送載置台の高さを前記第2高さから前記第1高さに上昇させる第3復帰動作を行い、前記引渡場所での物品の引き渡し後の前記搬送載置台の高さが前記第2高さであって前記受取場所の前記荷受台に物品が有る場合には、前記搬送車の前記復帰移動中の前記搬送載置台の高さを前記第2高さに維持する第4復帰動作を行うと好適である。
前記受取場所に物品を搬入する搬入装置、及び、前記引渡場所から物品を搬出する搬出装置の少なくとも一方が、前記受取場所又は前記引渡場所の上方を移動する移動体が備える吊下げ式の昇降機であり、前記昇降機は、物品を把持自在な把持部を有し、前記搬送載置台又は前記荷受台に対して上方から接近するように構成されていると好適である。
前記受取場所に物品を搬入する搬入装置、及び、前記引渡場所から物品を搬出する搬出装置の少なくとも一方が、前記受取場所又は前記引渡場所に対して相対移動する移動体が備える出退フォークであり、前記出退フォークは、出退動作と昇降動作とを行い物品を下方から支持自在な支持部を有し、前記受取場所又は前記引渡場所に対して水平方向に沿って外方から接近するように構成され、前記搬送載置台又は前記荷受台は、前記出退フォークに干渉しないように構成されていると好適である。
8 :物品
9 :経路形成部
10 :受取場所
20 :引渡場所
30 :搬送車
31 :搬送載置台
31M :昇降装置
H1 :第1高さ
H2 :第2高さ
H3 :第3高さ
T1 :天井搬送車(移動体)
T11 :昇降機(搬入装置)
T111 :把持部
T112 :昇降ベルト
T2 :スタッカークレーン(移動体)
T21 :出退フォーク(搬出装置)
T211 :支持部
P :荷受台
11P :受取側荷受台(受取場所の荷受台)
21P :引渡側受台(引渡場所の荷受台)
Claims (8)
- 受取場所から引渡場所まで物品を搬送する物品搬送装置であって、
前記受取場所と前記引渡場所との間で往復移動する搬送車と、前記受取場所と前記引渡場所とを繋ぐ前記搬送車の移動経路を形成する経路形成部と、少なくとも前記受取場所に設けられた荷受台と、を備え、
前記搬送車は、物品が載置される搬送載置台と、前記搬送載置台を第1高さと当該第1高さよりも低い第2高さとに昇降させる昇降装置と、を有し、
前記荷受台は、物品が載置される台であって前記第1高さと前記第2高さとの間の第3高さに固定され、
前記搬送車は、前記受取場所において、前記第1高さにある前記搬送載置台に物品が置かれること、又は、前記荷受台に物品が載置された状態で前記搬送載置台を前記第2高さから前記第1高さに上昇させて前記搬送載置台に物品を載せることで、物品を受け取り、前記引渡場所において物品を引き渡し、
前記昇降装置は、前記搬送車が前記引渡場所から前記受取場所まで移動する復帰移動を行う場合に、前記受取場所の前記荷受台における物品の有無に応じて、異なる復帰動作を行う、物品搬送装置。 - 前記荷受台は、前記受取場所と前記引渡場所とのそれぞれに設けられ、
前記搬送車は、前記引渡場所において、前記第1高さにある前記搬送載置台から物品が取られること、又は、前記搬送載置台に物品が載置された状態で前記搬送載置台を前記第1高さから前記第2高さに下降させて前記荷受台に物品を載せることで、物品を引き渡し、
前記昇降装置は、前記搬送車が前記引渡場所から前記受取場所まで移動する復帰移動を行う場合に、前記受取場所の前記荷受台における物品の有無に加えて、前記引渡場所での物品の引き渡し後の前記搬送載置台の高さにも応じて、異なる復帰動作を行う、請求項1に記載の物品搬送装置。 - 前記昇降装置は、
前記受取場所の前記荷受台に物品が無い場合には、前記搬送車が前記受取場所に到着するまでに前記搬送載置台を前記第1高さとし、
前記受取場所の前記荷受台に物品が有る場合には、前記搬送車が前記受取場所に到着するまでに前記搬送載置台を前記第2高さとするように、前記復帰動作を行う、請求項1又は2に記載の物品搬送装置。 - 前記昇降装置は、
前記引渡場所での物品の引き渡し後の前記搬送載置台の高さと、前記復帰動作の完了後の前記搬送載置台の高さとが同じである場合には、前記搬送車の前記復帰移動中の前記搬送載置台の高さを維持し、
前記引渡場所での物品の引き渡し後の前記搬送載置台の高さと、前記復帰動作の完了後の前記搬送載置台の高さとが異なる場合には、前記搬送車の前記復帰移動中に前記搬送載置台の高さを変更する、請求項1から3のいずれか一項に記載の物品搬送装置。 - 前記昇降装置は、前記搬送車の前記復帰移動中に前記搬送載置台の高さを変更する場合に、前記搬送載置台を、前記搬送車の移動に応じて次第に上昇又は下降させる、請求項4に記載の物品搬送装置。
- 前記昇降装置は、
前記引渡場所での物品の引き渡し後の前記搬送載置台の高さが前記第1高さであって前記受取場所の前記荷受台に物品が無い場合には、前記搬送車の前記復帰移動中の前記搬送載置台の高さを前記第1高さに維持する第1復帰動作を行い、
前記引渡場所での物品の引き渡し後の前記搬送載置台の高さが前記第1高さであって前記受取場所の前記荷受台に物品が有る場合には、前記搬送車の前記復帰移動中に前記搬送載置台の高さを前記第1高さから前記第2高さに下降させる第2復帰動作を行い、
前記引渡場所での物品の引き渡し後の前記搬送載置台の高さが前記第2高さであって前記受取場所の前記荷受台に物品が無い場合には、前記搬送車の前記復帰移動中に前記搬送載置台の高さを前記第2高さから前記第1高さに上昇させる第3復帰動作を行い、
前記引渡場所での物品の引き渡し後の前記搬送載置台の高さが前記第2高さであって前記受取場所の前記荷受台に物品が有る場合には、前記搬送車の前記復帰移動中の前記搬送載置台の高さを前記第2高さに維持する第4復帰動作を行う、請求項1から5のいずれか一項に記載の物品搬送装置。 - 前記受取場所に物品を搬入する搬入装置、及び、前記引渡場所から物品を搬出する搬出装置の少なくとも一方が、前記受取場所又は前記引渡場所の上方を移動する移動体が備える吊下げ式の昇降機であり、
前記昇降機は、物品を把持自在な把持部を有し、前記搬送載置台又は前記荷受台に対して上方から接近するように構成されている、請求項1から6のいずれか一項に記載の物品搬送装置。 - 前記受取場所に物品を搬入する搬入装置、及び、前記引渡場所から物品を搬出する搬出装置の少なくとも一方が、前記受取場所又は前記引渡場所に対して相対移動する移動体が備える出退フォークであり、
前記出退フォークは、出退動作と昇降動作とを行い物品を下方から支持自在な支持部を有し、前記受取場所又は前記引渡場所に対して水平方向に沿って外方から接近するように構成され、
前記搬送載置台又は前記荷受台は、前記出退フォークに干渉しないように構成されている、請求項1から6のいずれか一項に記載の物品搬送装置。
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