JP6953117B2 - Light modulators for MEMS displays - Google Patents

Description

Related US patent documents are: U.S. Patent Application No. 12/584465 filed on September 3, 2009 and became U.S. Patent No. 7995261, U.S. Patent Application No. 14/589699 filed on January 5, 2015, January 2015. U.S. Patent Application No. 14/589634 filed on 5th, U.S. Patent Application No. 14/589434 filed on January 5, 2015, U.S. Patent Application No. 14 / filed on January 5, 2015. 589551, US Patent Application No. 14/589715 filed January 5, 2015, which are incorporated herein by reference.

The present invention generally relates to displays. More specifically, the present invention relates to a display including an electromechanical image element.

Liquid crystal displays are currently dominant in the flat panel display market.

Display based on electromechanical light modulators has been proposed as a viable alternative to LCDs. The present invention discloses electromechanical light modulators and displays that can compete with LCDs in terms of image performance, light efficiency and cost.

The following is a schematic description of exemplary embodiments of the invention. This is not intended to limit the scope of the claims attached to the present specification in any aspect so that those skilled in the art can understand the present invention in detail, as described below. It is provided as an introduction to facilitate a quicker understanding of the detailed design discussions described.

The present specification discloses several electromechanical light modulators. According to an exemplary embodiment of the invention, the modulator is provided with one or two electrostatic actuators and a plurality of supports attached to the shutter at the first and second ends of the shutter on the surface of the substrate. Includes an optical shutter supported above. During operation, the actuator applies force to the shutter. The shutter support limits the movement of the shutter in the direction of force, allowing the shutter to move substantially laterally with respect to the force. The shutter moves laterally between the first and second positions without physical contact with the stationary or surface. Each electrostatic actuator includes two electrodes that are substantially parallel and placed at close distances to each other. In some embodiments, the shutter is conductive and acts as one of the actuator electrodes. In another design, the shutter includes a flange extending vertically from the edge of the shutter to form an electrostatic actuator with a fixed electrode. The fixed electrodes are placed substantially in close proximity to the flange, which can form an efficient electrostatic actuator.

The shutter supports are arranged between the shutter and the surface, so that in the display, the shutters are arranged substantially in close proximity to each other, only allowing space for shutter movement between them. sell. In some modulators, the shutter is supported on the surface by a cantilever. The present invention discloses a cantilever and a method of manufacturing a shutter supported by a cantilever. The present invention also includes a light absorbing layer having a light transmitting region, a backlight including a back reflector for reflecting light toward the light absorbing layer, and a shutter arranged between the backlight and the light absorbing layer. Discloses a display that includes multiple modulators, each including a shutter that faces a light-transmitting region and a light-reflecting surface that faces the backlight and reuses the light emitted from the backlight. The light incident on the light transmitting region of the shutter from the backlight is transmitted through the light transmitting region of the light absorbing layer when the shutter is in the first position, and is absorbed when the shutter is in the second position. Absorbed by the layer.

The present invention also discloses another display comprising a plurality of modulators, each including a shutter having a light transmissive region and a surface and a substrate having a plurality of embedded reflectors, by which light is emitted by the embedded light reflector. Escape from the surface of the substrate to the outside of the substrate and focus on each light-transmitting region of the shutter.

The aforementioned and other objects of the invention are shown in the accompanying drawings and are described herein below.

FIG. 3 is a perspective view of a shutter assembly according to an exemplary embodiment herein. It is a front view of the shutter assembly shown in FIG. 1A. FIG. 3 is a top view of an exemplary mold for manufacturing the shutter assembly shown in FIG. 1A. It is sectional drawing along the straight line 2B of FIG. 2A. FIG. 3 is a perspective view of an optical modulator according to an exemplary embodiment of the present invention. It is a front view of the light modulator shown in FIG. 3A. It is a front view of the light modulator shown in FIG. 3A showing the shutter located at the first position. It is a front view of the light modulator shown in FIG. 3A showing the shutter located at the second position. It is a perspective view of the light modulator according to an exemplary embodiment of the present invention. It is a front view of the light modulator shown in FIG. 4A. It is a perspective view of the light modulator according to an exemplary embodiment of the present invention. It is a front view of the light modulator shown in FIG. 5A. It is a perspective view of the light modulator according to an exemplary embodiment of the present invention. It is a side view of the light modulator shown in FIG. 6A. It is a perspective view which shows the shutter support part of the light modulator shown in FIG. 6A. It is a top view of the light modulator shown in FIG. 6A. It is a top view of the light modulator shown in FIG. 6A showing the shutter located at the first position. It is a top view of the light modulator shown in FIG. 6A showing the shutter located at the second position. It is a top view of the light modulator according to an exemplary embodiment of the present invention. It is a side view of the light modulator shown in FIG. 7A. It is a top view which shows the shutter support part of the light modulator shown in FIG. 7A. It is a top view of the light modulator shown in FIG. 7A showing the shutter located at the first position. It is a perspective view of the shutter support part according to an exemplary embodiment of the present invention. It is a perspective view of the mold for manufacturing the shutter support part shown in FIG. 8A. It is sectional drawing along the straight line CC of FIG. 8B which shows the step for manufacturing the shutter support part shown in FIG. 8A. It is a top view which shows the step for manufacturing the shutter support part shown in FIG. 8A. It is a front view which shows the stage for manufacturing the shutter support part shown in FIG. 8A. It is a front view which shows the stage for manufacturing the shutter support part shown in FIG. 8A. It is a top view which shows the step for manufacturing the shutter support part shown in FIG. 8A. It is a side view which shows the step for manufacturing the shutter support part shown in FIG. 8A. It is a perspective view of the shutter according to an exemplary embodiment of the present invention. 9 is a perspective view of a mold for manufacturing the shutter shown in FIG. 9A. 9 is a cross-sectional view taken along the straight line CC of FIG. 9B showing the steps of manufacturing the shutter shown in FIG. 9A. It is a perspective view which shows the stage of manufacturing the shutter shown in FIG. 9A. 9 is a cross-sectional view taken along the straight line EE of FIG. 9D showing the steps of manufacturing the shutter shown in FIG. 9A. 9 is a cross-sectional view taken along the straight line FF of FIG. 9D showing a stage of manufacturing the shutter shown in FIG. 9A. FIG. 3 is a perspective view of a display backlight according to an exemplary embodiment of the present invention. It is a side view of the display backlight shown in FIG. 10A. It is an enlarged view of the region shown by 10C in FIG. 10B. FIG. 5 is a cross-sectional view showing a step for manufacturing an optical layer having an embedded light reflector according to an exemplary embodiment of the present invention. FIG. 5 is a cross-sectional view showing a step for manufacturing an optical layer having an embedded light reflector according to an exemplary embodiment of the present invention. FIG. 5 is a cross-sectional view showing a step for manufacturing an optical layer having an embedded light reflector according to an exemplary embodiment of the present invention. FIG. 5 is a cross-sectional view showing a step for manufacturing an optical layer having an embedded light reflector according to an exemplary embodiment of the present invention. FIG. 5 is a cross-sectional view showing a step for manufacturing a substrate having an embedded light reflector according to an exemplary embodiment of the present invention. FIG. 5 is a cross-sectional view showing a step for manufacturing a substrate having an embedded light reflector according to an exemplary embodiment of the present invention. FIG. 5 is a cross-sectional view showing a step for manufacturing a substrate having an embedded light reflector according to an exemplary embodiment of the present invention. FIG. 5 is a plan view of a display cover assembly according to an exemplary embodiment of the present invention. It is sectional drawing along the straight line 13B in FIG. 13A. FIG. 5 is a cross-sectional view of a display according to an exemplary embodiment of the present invention showing a shutter located at a first position. FIG. 6 is a cross-sectional view of the display shown in FIG. 14A showing a shutter located at a second position. FIG. 5 is a cross-sectional view of a display according to an exemplary embodiment of the present invention showing a shutter located at a first position. FIG. 5 is a cross-sectional view of the display shown in FIG. 15A showing a shutter located at a second position.

FIG. 1A is a perspective view of a shutter assembly 100 according to an exemplary embodiment of the present invention, and FIG. 1B is a front view. The shutter assembly 100 includes an optical shutter 101 supported above the surface 103 of the transparent substrate 102 by the supports 104 and 105. The support portion 104 is attached to the first end portion 106 of the shutter 101, and the support portion 105 is attached to the second end portion 107 of the shutter 101. The supports 104 and 105 are substantially linear, inclined with respect to each other and with respect to the surface 103, forming an angle 113 of 70 ° to 85 ° with respect to the surface 103. The support portions 104 and 105 are attached to the surface 103 of the substrate 102 by a pad 109 at a distance 114 larger than the distance 115 between the attachment points of the support portions 104 and 105 of the shutter 101. The shutter assembly 100 may be constructed to have supports 104 and 105 tilted relative to each other, or may be attached to the surface 103 at a distance 114 less than the distance 115. The supports 104 and 105 and the pads 109 are formed from a thin film conductive material and provide an electrical connection from the surface 103 to the shutter 101. The shutter 101 is also formed from a thin film conductive material or a multilayer film containing a conductive layer. The shutter 101 includes a light transmitting region 108 and a light blocking region or a light blocking region 110. The light blocking region 110 is larger (wider and longer) than the light transmitting region 108. The light transmitting region 108 transmits 90% or more of the light incident on the light transmitting region 108, and the light blocking region 110 blocks at least 99% of the light.

The outer edge or all edges of the shutter 101 are sloped to prevent the shutter 101 from bending. The shutter assembly 100 can be manufactured on a mold from metals such as aluminum and silicon alloys. In one implementation, all surfaces of the shutter 101 may have a light absorbing finish. In other embodiments, the shutter 101 may have a light-reflecting first surface 120 and a light-absorbing second surface 121. The light-reflecting surface 120 reflects 80% or more of the light, and the light-absorbing surface 121 absorbs 80% or more of the light.

By forming an aluminum layer on the smooth surface of the mold, a shutter 101 having a mirror-like first surface 120 is provided, and a black oxide layer is anodized onto the second surface 121. Can be formed. The black oxide layer may be formed after etching the light transmission region 108, so that the inner edge of the light transmission region 108 will be covered with the black oxide layer.

Chromium oxides or niobium oxides may be deposited, or black organic resins may be applied to the surface of the shutter 101 to form a light-absorbing surface.

Without limitation, a part of the shutter assembly 100 may have the following sizes. The shutter 101 can have a width of 115 of 50 to 1000 micrometers and a thickness of 0.5 to 5 micrometers. The light transmission region 108 can have a width 122 of 2 to 50 micrometers. Supports 104 and 105 can have a width of 2 to 20 micrometers and a thickness of 0.5 to 5 micrometers. The supports 104 and 105 may have a length 112 that is 1.5 to 3 times larger than the width 122 of the light transmissive region 108.

2A and 2B show the mold 200 for manufacturing the shutter assembly 100. FIG. 2A is a top view of the mold 200, and FIG. 2B is a cross-sectional view taken along the straight line 2B of FIG. 2A.

The mold 200 is formed on the surface 103 of the substrate 102 using grayscale mask photolithography or multiple mask photolithography. The layer of sacrificial material 201 is formed on the surface 103. The groove 203 and the recessed region 206 are formed on the surface 205 of the layer 201. The shutter assembly 100 is formed by forming a thin layer of a conductive thin film on the surface of the mold 200 and selectively etching it. The support portions 104 and 105 are formed on the side wall 204 of the groove 203. The side wall 204 has the same inclination angle 113 as the support portions 104 and 105 with respect to the surface 103. The recessed region 206 is provided to form a shutter 101 with an inclined edge. The beveled edges help prevent the shutter 101 from bending or bending. The combination of directional film formation and shape-following film formation of the conductive material can be used to control the relative thickness of the supports 104 and 105 as well as the shutter 101.

3A-3D show the light modulator 300 according to an exemplary embodiment of the present invention.

With reference to FIGS. 3A and 3B, the modulator 300 includes the shutter assembly 100 and the cover assembly 303 of FIG. 1A. The cover assembly 303 includes a transparent substrate 304 supported above the surface 103 of the substrate 102 by spacers 306 and 307. The two electrodes 308 and 309 are formed on the inner surface 305 of the substrate 304.

The electrodes 308 and the conductive shutter 101 form the first electrostatic actuator 311 and the electrodes 309 and the conductive shutter 101 form the second electrostatic actuator 312. During operation, the voltage potential applied between the electrode 308 and the shutter 101 pulls the support 104 attached to the first end 106 of the shutter 101 closer to perpendicular to the surface 103. An electrostatic force (FIG. 3C) that moves the shutter 101 laterally (FIG. 3C) to the first position is generated, or the voltage potential applied between the electrode 309 and the shutter 101 is the second of the shutter 101. The support portion 105 attached to the end portion 107 of the above is pulled to a position closer to perpendicular to the surface 103, and an electrostatic force (FIG. 3D) that moves the shutter 101 laterally (FIG. 3D) to the second position is applied. generate.

The mechanical force accumulated in the supports 104 and 105 pulls the shutter 101 back from the first or second position to the mechanically stable or neutral position, as shown in FIG. 3B.

In the modulator 300, the first actuator 311 and the second actuator 312 each apply a force to the shutter 101 in substantially the same direction to move the shutter 101 laterally in opposite directions.

In FIG. 3C, arrow 314 indicates the direction of the force applied to the shutter 101 by the first actuator 311 and arrow 315 is the direction of lateral movement of the shutter 101 from the mechanically stable position to the first position. Is shown. The shutter 101 moves laterally from the mechanically stable position to the first position at least five times more than in the direction of the force applied to the shutter 101 by the first actuator 311.

In FIG. 3D, arrow 316 indicates the direction of the force applied to the shutter 101 by the second actuator 312, and arrow 317 indicates the direction of lateral movement of the shutter 101 to the second position.

When a gradually increasing voltage is applied to the actuator 311 and a gradually decreasing voltage is applied to the actuator 312, the shutter gradually moves between the first position and the second position, and a fixed voltage is applied to the actuator 311. Even if the voltage is applied and a variable voltage is applied to the actuator 312, the shutter gradually moves between the first position and the second position.

In the display, the electrodes 308 and 309 may be broader and shared by multiple shutter assemblies located in consecutive rows or columns.

4A and 4B show the light modulator 400 according to an exemplary embodiment of the present invention. The modulator 400 includes a shutter assembly 401 and a cover assembly 418. The shutter assembly 401 includes a shutter 410 supported above the surface 403 of the transparent substrate 402 by supports 406 and 407. The support portion 407 is attached to the first end portion 408 of the shutter 410, and the support portion 406 is attached to the second end portion 409 of the shutter 410. The shutter 410 is formed of an electrical insulator or dielectric material and includes a light transmitting region 411 and a light blocking region 412. The shutter 410 further includes a first electrode 405 and a second electrode 404. The support 407 provides an electrical connection from the surface 403 to the electrode 405, and the support 406 provides an electrical connection from the surface 403 to the electrode 404.

The cover assembly 418 includes a transparent substrate 413 supported above the surface 403 by spacers 416 and 417. The cover assembly 418 further includes a transparent conductive layer 415 formed on the inner surface 414 of the substrate 413 from a material such as indium tin oxide.

In the modulator 400, the first electrode 405 having the conductive layer 415 forms the first electrostatic actuator 418, and the second electrode 404 having the conductive layer 415 forms the second electrostatic actuator 419. ..

During operation, the first actuator pulls the support 407 to a position close to perpendicular to the surface 403, laterally moves the shutter 410 to the first position, and the second actuator laterally pulls the support 406. The shutter 410 is pulled laterally to a second position by pulling it to a position close to perpendicular to the surface 403. The mechanical force accumulated in the supports 406 and 407 pulls the shutter 410 back from the first or second position to the mechanically stable or neutral position, as shown in FIG. 4B.

5A and 5B show the light modulator 500 according to an exemplary embodiment of the present invention. The modulator 500 includes spacers 508 and 509 formed from a polymer on the surface 502 of substrate 501 and a shutter assembly 503. The shutter assembly 503 includes a shutter 507 and shutter supports 505 and 506 formed from a conductive material and attached to spacers 508 and 509 with conductive pads 512 and 513.

The modulator 500 further includes two electrodes 510 and 511 formed on the surface 502 of the substrate 501. The electrode 510 and the conductive shutter 507 form a first electrostatic actuator 514, and the electrode 511 and the conductive shutter 507 form a second electrostatic actuator 515.

The shutter assembly 503 may be formed in the same manner as the shutter assembly 401, and the two electrodes 510 and 511 can be replaced with a transparent conductive layer.

6A-6F show the light modulator 600 according to an exemplary embodiment of the present invention. Referring to FIGS. 6A-6C, the modulator 600 includes a light shutter 601 formed of a conductive material, including a light transmitting region 602 and a light blocking region 603.

The shutter 601 is between the shutter 601 and the surface 605 and is supported on the surface 605 of the substrate 604 by four cantilever beams 606 and 607 formed substantially within the boundary of the shutter 601. (Fig. 6C). The first ends of the cantilever beams 606 and 607 are attached to the surface 605 by posts 609 and conductive pads 610, and the second ends are attached to the shutter 601 by posts 608. The cantilever beam 606 is attached at the first end 618 of the shutter 601 and the cantilever 607 is attached at the second end 617 of the shutter 601. The beams 606 and 607 are arranged substantially parallel to the surface 605 and are spaced apart from the surface 605 by a first gap 619. The beams 606 and 607 are also arranged substantially parallel to the shutter 601 and spaced apart from the shutter 601 by a second gap 620. The cantilever beams 606 and 607 may be formed thin and long so that they can be bent and deformed without requiring a large force. The beams 606 and 607 may also be formed to have sufficient height oriented perpendicular to the surface 605 to support the weight of the shutter 601.

The shutter 601 further includes a first flange 613 extending from the first end or edge 618 of the shutter 601 toward the surface 605 within 5 ° of the normal to the surface 605. The shutter 601 also includes a second flange 615 extending from the second edge 617 to the surface 605 within 5 ° of the normal to the surface 605.

The beams 606 and 607 are tilted with respect to the surface 629 of the flange 613 to form an angle 628 between 70 and 89 ° (FIG. 6D).

The modulator 600 further includes two electrodes 614 and 616 extending from the surface 605 in a direction close to a right angle. The electrode 614 is attached to the surface 605 with a conductive pad 611, and the electrode 616 is attached to the surface 605 with a conductive pad 612. The electrodes 614 and flange 613 form a first electrostatic actuator 622, and the electrodes 616 and flange 615 form a second electrostatic actuator 621.

During operation, the actuator 622 applies a first force 625 to the shutter 601 and pulls a beam 606 attached to the first end 618 of the shutter 601 to force the shutter 601 substantially against the first force 625. 626 in the lateral direction (FIG. 6E), the actuator 621 applies a second force 627 to the shutter 601 and a beam 607 attached to the second end 617 of the shutter 601. To move the shutter 601 to the second position substantially laterally 628 with respect to the second force 627 (FIG. 6F). The shutter 601 moves laterally 626 at least five times more than in the direction of the first force 625.

The mechanical force accumulated in the beams 606 and 607 pulls the shutter 601 back from the first or second position to the mechanically stable or neutral position, as shown in FIG. 6D. The shutter 601 moves between a first position and a second position in a plane substantially parallel to the surface 605.

When the shutter 601 moves from the mechanically stable position (FIG. 6D) to the first position (FIG. 6E), the linear distance between the posts 608 and 609 attached to the end of the beam 607 increases. Therefore, the beam 607 is formed in a slightly curved shape to compensate for the increase in the linear distance between the posts 608 and 609.

7A-7D show the light modulator 700 according to an exemplary embodiment of the present invention. The modulator 700 includes an optical shutter 701 formed of a conductive material, and includes a light transmitting region 702 and a light blocking region 703. The shutter 701 further includes a first flange 708 attached to the shutter 701 at the first end 706. The shutter 701 is supported on the surface 704 of the substrate 705 by four cantilever beams 712 and 714 (FIG. 7C).

The first ends of the cantilever beams 712 and 714 are attached to the surface 704 with posts 716 and conductive pads 717, and the second ends are attached to the shutter 701 with posts 715. The cantilever beam 714 is attached at the first end 706 of the shutter 701 and the cantilever 712 is attached at the second end 707 of the shutter 701. The cantilever beams 712 and 714 are substantially linear. The cantilever beam 714 is tilted with respect to the flange 708 to form an angle 730 between 70 ° and 89 °, and the cantilever beam 712 forms an angle 731 close to 90 ° with respect to the flange 708.

The modulator 700 further includes an electrode 709 extending vertically from the surface 704 and attached to the surface 704 with a conductive pad 710. The electrodes 709 and flange 708 of the shutter 701 form an electrostatic actuator 711.

During operation, the actuator 711 pulls the beam 714 attached at the first end 706 of the shutter 701 in the direction 720 and pulls the shutter 701 substantially laterally 721 with respect to the direction 720 to the first position. Move (Fig. 7D). The mechanical force accumulated in the beams 712 and 714 pulls the shutter 701 back from the first position to the mechanically stable or neutral position (FIG. 7A). The shutter 701 moves between a plurality of positions in a plane substantially parallel to the surface 704.

The modulator 700 further extends vertically from a second flange 722 attached to the shutter 701 at the second end 707 and a plane 704 and attached to the surface 704 with a conductive pad 724. A second electrostatic actuator 725 formed by the electrodes 723 may be included. In the modulator 700, the support 712 limits the shutter 701 and the second flange 722 from moving closer to the second electrode 723, so that the second electrode 723 is efficient. It may be located close to the second flange 722 to form the actuator.

In the display, a pixel addressing voltage may be applied to the second actuator 725 to selectively hold the shutter 701 in a mechanically neutral position.

8A-8F show the manufacturing steps of the shutter support 800 according to an exemplary embodiment of the invention, similar to the support in the modulators 600 and 700. FIG. 8A shows a shutter support 800 including a cantilever 803. The first end of the beam 803 is attached to a first post 804 that connects the beam 803 to the surface 801 of the substrate 802 with a pad 805, and the second end of the beam 803 is later connected to the shutter. It is attached to the post 806 of 2. The first post 804 and the second post 806 each have three sides and one top.

The support portion 800 is formed on the mold 807. The first manufacturing step is the step of forming the mold 807 from the sacrificial material on the surface 801 of the substrate 802 (FIG. 8B). The mold 807 is formed in the shape of a rectangular parallelepiped and has four side walls 808, 809, 810, and 811 and a top 812. The side walls are oriented perpendicular to the surface 801 within +/- 5 ° with respect to the normal. In the next step, a shape-following layer of the conductive material 814 is formed on the surface and surface 801 of the mold 807 by magnetron sputtering, and a positive photoresist 815 is formed on the conductive layer 814 by electrophoretic film formation or spraying. This is the stage of applying the shape-following layer of (FIG. 8C).

In the next step, a first photomask 816 is placed above the mold 807 (FIG. 8D) and the photoresist layer 815 deviates less than 2 degrees and 45 ° from the side walls 808 and 809 with respect to the surface 801. It is a step of irradiating with a UV light source having a collimated and inclined light beam having an inclination angle of 817 between 1 and 75 ° (FIGS. 8E and 8F). The mold 807 and the first photomask 816 emit UV light from a region on the photoresist layer 815 that defines the geometry of the cantilever 803, the first post 804, the second post 806 and the pad 805. Cut off. A further step is to place a second photomask 818 above the mold 807 (FIG. 8G) and irradiate the photoresist layer 815 from the direction of the side wall 811 (FIG. 8J). This will irradiate the photoresist layer 815 applied to the lower portion of the side wall 811. The steps shown in FIGS. 8G and 8J are omitted if the second post 806 is formed with only two sides formed on the side walls 808 and 809 of the mold 807 and on the top. Can be done.

After irradiation from all three directions, the photoresist layer 815 is developed and the unprotected region of the conductive layer 814 is removed by etching. The cantilever beam 803 formed on the mold 807 has a width equal to the thickness of the conductive layer 814.

If the conductive layer 814 is formed from a material such as aluminum capable of reflecting UV light, a light absorbing layer may be applied on or on the conductive layer 814 before applying the photoresist layer 815. It may be formed. This will reduce the reflection of UV light from the horizontal and vertical surfaces. To reduce reflections from the surface of the photoresist layer 815, the mold and mask can be immersed in a liquid having a refractive index similar to that of the photoresist layer 815.

9A-9F show the manufacturing steps of the shutter 900 and electrode 905 according to an exemplary embodiment of the invention similar to the modulators 600 and 700.

FIG. 9A shows a shutter 900 including a light transmitting region 901 and a flange 902. The shutter 900 is connected to the post 806 of the support 800 described above. FIG. 9A further shows an electrode 905 attached to the surface 801 of the substrate 802 with a pad 904.

The first manufacturing step is to form a mold 910 containing two rectangular parallelepipeds 911 and 912 from the sacrificial material on the surface 801 of the substrate 802 (FIG. 9B). The rectangular parallelepiped 911 includes four side walls 914, 915, 916, 917 and a top 918. The rectangular parallelepiped 912 includes four side walls 920, 921, 923, 924 and a top 925. The side walls are oriented perpendicular to the surface 801 within +/- 5 ° from the normal. A via hole 926 for connecting the shutter 900 to the post 806 of the support portion 800 is formed on the top 918 of the rectangular parallelepiped 911.

The next step is to form a shape-following layer of the conductive material 930 on the surface and surface 801 of the mold 910, and to form a shape-following layer of the negative photoresist 931 on the conductive layer 930. There is (Fig. 9C).

Subsequent steps are the steps in which the photomask 932 is placed above the mold 910 (FIG. 9D) and the photoresist layer 931 is irradiated from the directions of the side walls 916 and 924 with a UV light source having collimated and inclined light rays. (FIGS. 9E and 9F).

The mask 932 blocks UV light irradiation of the photoresist layer 931 applied to the surfaces of the side walls 915, 916, 917, 920 and 923 on which the light transmitting region 901 of the shutter 900 is formed and the region of the top surface 918. The mold blocks the lower portion of the surface of the side walls 914 and 921 on which the flange 902 and the electrode 905 are formed and the portion of the surface 801 between the side walls 914 and 921.

After irradiation from both directions, the photoresist layer 931 is developed and the unprotected region of the conductive layer 930 is etched.

The next step is to remove the sacrificial layer and release the shutter 900 and the support 800.

The shutter 900 may be formed to include a flange, such as a flange 902, on all four edges of the shutter 900. These flanges can effectively block stray light from the display, thereby improving contrast.

10A, 10B and 10C show a display backlight 1000 according to an exemplary embodiment of the present invention. 10A is a perspective view of the backlight 1000, FIG. 10B is a side view of the backlight 1000, and FIG. 10C is an enlarged view of a region shown as 10C in FIG. 10B.

The backlight 1000 generally includes a flat plate light guide 1001 made of acrylic or another transparent material having a refractive index n1 of a value of 1.45 to 1.6. The optical guide 1001 includes a top surface 1002, a bottom surface 1003, opposing side surfaces 1004 and 1005, and an optical input end 1006.

The bottom surface 1003 is tilted with respect to the top surface 1002 and forms an angle 1009 having a value between about 0.1 and 2.0 ° (FIG. 10B). The bottom plane 1003 converges on the top surface 1002 in a direction away from the light input end 1006.

The backlight 1000 further includes a light absorbing film 1010 arranged close to a plurality of light sources 1011 arranged close to the bottom surface 1003 of the light guide 1001 and the light input end 1006.

The backlight 1000 also includes a first optical layer 1015 formed of a substantially transparent material having a refractive index n2, which is a value of about 1.45 to 1.6. The first optical layer 1015 includes a light escape surface 1016, a light input surface 1017, and a plurality of embedded light reflectors 1018 arranged between the light input surface 1017 and the light escape surface 1016. The light reflector 1018 is formed from a thin light-reflecting material such as aluminum or silver. The light reflector 1018 may have a substantially flat surface or a bent surface with a cross section having a radius of curvature of about 20-80 microns. The light reflector 1018 is inclined with respect to the top surface 1002 of the light guide 1001 and forms an angle 1026 having a value of about 20-40 °.

The backlight 1000 also includes a second optical layer 1020 formed between the light input surface 1017 of the first optical layer 1015 and the top surface 1002 of the light guide 1001. The second optical layer 1020 is formed from a fluoropolymer or other substantially transparent material having a refractive index n3, which is a value between about 1.3 and 1.4.

During operation, the light beam 1023 entering from the light input end 1006 of the light guide 1001 is reflected from the top surface 1002 and the bottom surface 1003 and changes its angle in a direction perpendicular to the top surface 1002. When the angle of incidence on the top surface 1002 is smaller than the critical angle 1024 (FIG. 10C) defined by the index of refraction n1 of the light guide 1001 and the index of refraction n3 of the second optical layer 1020, the light beam 1023 is directed by the light guide 1001. Exit. The light beam 1023 that has passed through the second optical layer 1020 enters the first optical layer 1015 from the light input surface 1017 and changes the angle defined by the refractive index n2 of the first optical layer 1015. Most of the light rays 1023 that have entered the first optical layer 1015 are reflected inward from the light escape surface 1016. The light rays are reflected from the embedded light reflector 1018 to exit the first optical layer 1015 from the light escape surface 1016. The light rays reflected from the bent light reflector 1018 exit the first optical layer 1015 from the light escape surface 1016 and are focused at a distance of 1025 from the light escape surface 1016.

The backlight 1000 may also include a transparent substrate such as a glass substrate and a layer of a dichroic filter interposed between the first optical layer 1015 and the second optical layer 1020.

The steps of manufacturing the optical layer 1108 with an embedded light reflector or light reflecting facet 1106 are shown in FIGS. 11A-11D. In step (A), microprisms 1101 are formed on substrate 1103 using photolithography from a clear UV curable liquid polymer. In step (B), the substrate 1103 is tilted by an angle of 1105 (FIG. 11B), and the extension 1104 of the microprism 1101 is formed from the same liquid polymer. The microprism 1101 with the extension 1104 may also be formed by molding. In step (C), a reflector film is formed on each facet of the extension 1104 to form a light-reflecting facet 1106. In step (D), groove 1107 is filled with the same UV curable liquid polymer. FIG. 11D shows that the formation of the optical layer 1108 with the embedded light-reflecting facets 1106 has been completed.

The optical layer 1108 may be combined with the shutter assembly 100 or 401 of the modulators 300 and 400 described above. The optical layer 1108 may be formed on a substrate arranged between the shutter supports before forming the shutter assembly 100 or 401. For modulators 500, 600 or 700 with shutters located close to the substrate surface, the embedded light modulator may be formed within the substrate.

12A, 12B and 12C show the steps of manufacturing a glass substrate 1200 having an embedded light reflector 1205 according to an exemplary embodiment of the present invention. The first step is to etch the groove 1203 in the glass substrate 1200. The next three steps are similar to the steps B, C and D described above. The second step is to tilt the substrate 1200 to form an extension 1204 from the UV curable liquid polymer inside each groove. The third step is a step of forming a reflecting mirror film on the extension portion 1204 to form a light reflecting facet 1205. The fourth step is to fill the grooves with the same UV curable liquid polymer. FIG. 12C shows a glass substrate 1200 formed with an embedded light reflector 1205. The cured polymer preferably has a refractive index substantially the same as that of the glass substrate 1200. In the backlight 1000, the first optical layer 1015 may be replaced by a glass substrate 1200, and the modulators 500, 600, or 700 may be formed on the glass substrate 1200.

13A and 13B show a display cover assembly 1400 according to an exemplary embodiment of the present invention. The cover assembly 1400 includes a transparent substrate 1401 having a first surface 1402 and a second surface 1403. The cover assembly 1400 also includes a light diffusing layer 1404 formed on the first surface 1402 and a light absorbing layer 1405 formed on the light diffusing layer 1404. For thin substrates with a thickness of 200 micrometers or less, the diffusion layer 1404 may be formed on the second surface or the outer surface 1403, and the light absorption layer 1405 may be formed on the inner surface 1402 of the substrate 1401. May be done. The light absorption layer 1405 includes a light transmission region 1407 and an opaque light absorption region 1406. The cover assembly 1400 further comprises electrodes 308 and 309 of the modulator 300 formed on an opaque light absorption region 1406 of the light absorption layer 1405 having a light reflective mirror surface or a transparent conductive layer such as electrodes 415 of the modulator 400. Electrodes may be further included.

The light absorption layer 1405 may be formed of a conductive material. The conductive light absorption layer 1405 may serve as an electrode for an actuator such as an EMI or electrostatic shield of a display or an actuator of a modulator 400.

The light absorption layer 1405 may be one that absorbs 80% or more of the light incident on the opaque light absorption region 1406 and transmits only less than 1% of the light.

A display based on electromechanical light modulators may include a large number of modulators arranged in rows and columns. Each image element or pixel in the display may include one or more modulators. For purposes of illustration, the drawings below show a display with only one modulator.

14A and 14B show a cross-sectional view of Display 1500 according to an exemplary embodiment of the present invention. The display 1500 includes a cover assembly 1501, a modulator 1502, and a backlight 1503 including a back reflector 1504. The cover assembly 1501 includes a transparent substrate 1505, a light diffusing layer 1506 formed on the first surface 1507 of the substrate 1505, and a light absorbing layer 1508 formed on the light diffusing layer 1506. The light absorbing layer 1508 includes a light transmitting region 1509 and an opaque light absorbing region 1510. The modulator 1502 includes a shutter 1511 having a light transmitting region 1514 and a light blocking region 1515. The surface of the shutter 1511 facing the backlight 1503 is a light-reflecting surface, and the surface facing the light-absorbing layer 1508 is a light-absorbing surface. The light transmitting region 1509 of the light absorbing layer 1508 is larger than the light transmitting region 1514 of the shutter 1511 and smaller than the light blocking region 1515 of the shutter 1511. In FIG. 14A, the shutter 1511 is in the first position or the on position, and in FIG. 14B, the shutter 1511 is in the second position or the OFF position. The light 1520 from the backlight 1503 incident on the light transmission region 1514 of the shutter 1511 passes through the light transmission region 1509 of the light absorption layer 1508 when the shutter 1511 is in the first position (FIG. 14A), and the shutter is the first. When in position 2 (FIG. 14B), it is absorbed by the light absorbing layer 1508. The light incident on the light blocking region 1515 of the shutter 1511 is reflected back toward the backlight 1503 and recirculated by being reflected from the back reflector 1504. The modulator 1502 may be any of the above-mentioned modulators, or a shutter having a light-reflecting surface facing the backlight 1503 to recirculate the light emitted from the backlight 1503. It may be a modulator including.

It is important to design the modulator so that the shutter support does not occupy a substantially larger display surface than is required by the shutter, so the shutter moves the shutter and to some extent between them. They can be placed substantially close to each other so that only space for the conductors is allowed.

The shutter assembly described above meets this requirement. In the shutter assembly disclosed above, the shutter support is the shutter, as compared to some prior art shutter assemblies in which the shutter support is located on the side of the shutter and occupies more than 50% of the display surface. The shutter is disposed above the surface on which it is supported and is substantially located within the boundaries of the shutter, including the movement of the shutter between the first and second positions.

This improves light efficiency and reduces gaps between rows and columns of the display by increasing the total light transmission area relative to the display surface.

In the display 1500, the light absorbing layer 1508 may be formed from a conductive material and can replace the electrode 415 in the modulator 400 described above.

The electrodes 308 and 309 of the modulator 300 may be formed on a light absorbing layer 1508 having a light reflective surface facing the backlight 1503, and the shutter 101 may be supported on the surface 1522 of the substrate 1521. good. The shutter 601 of the modulator 600 and the shutter 701 of the modulator 700 may also be supported on the surface 1522 of the substrate 1521. The spacers 508 and 509 of the modulator 500 may be formed on the light absorption layer 1508, and the shutter 503 may be suspended from the spacers 508 and 509.

In the display 1500, the backlight 1503 may be an edge-illuminated or direct-illuminated backlight known for LCD displays that emits surface light.

15A and 15B show a cross-sectional view of the display 1700 according to an exemplary embodiment of the present invention. The display 1700 includes a cover assembly 1701, a modulator 1702 and a backlight 1703. The cover assembly 1701 includes a transparent substrate 1705, a light diffusing layer 1706 formed on the first surface 1707 of the substrate 1705, and a light absorbing layer 1708 formed on the light diffusing layer 1706. The light absorbing layer 1708 includes a light transmitting region 1709 and a light absorbing region 1710. The modulator 1702 includes a shutter 1711 having a light transmitting region 1714 and a light blocking region 1715. The surface of the shutter 1711 facing the backlight 1703 may be a light-reflecting surface or a light-absorbing surface, and the surface facing the light-absorbing layer 1708 is a light-absorbing surface. The light transmitting region 1709 of the light absorbing layer 1708 is larger than the light transmitting region 1714 of the shutter 1711 and smaller than the light blocking region 1715 of the shutter 1711. Modulator 1702 further includes a substrate 1716 with a light escape surface 1721 and an embedded light reflection facet 1717. The facet 1717 bends to allow the light 1720 from the backlight 1703 to escape from the substrate 1716 and be focused in the light transmissive region 1714 of the shutter 1711. The shutter 1711 is supported on the surface 1721 of the substrate 1716. The backlight 1703 includes an optical guide 1719 and an optical layer 1718 located between the optical guide 1719 and the substrate 1716. The backlight 1703 is similar to the backlight 1000 of FIGS. 10A to 10C. The backlight 1703 further includes a light absorbing layer 1704 disposed behind the light guide 1719 to absorb stray light or light reflected from the shutter 1711.

In FIG. 15A, the shutter 1711 is in the first or on position, and in FIG. 15B, the shutter 1711 is in the second or off position. The light 1720 emitted from the substrate 1716 passes through the light transmitting region 1714 of the shutter 1711 and the light transmitting region 1709 of the light absorbing layer 1708 when the shutter 1711 is in the first position (FIG. 15A), and the shutter 1711 is the first. When it is in the position 2 (FIG. 15B), it is blocked by the light blocking region 1715 of the shutter 1711. The light reflected and returned from the light blocking region 1715 of the shutter 1711 is absorbed by the light absorbing layer 1704.

In the display 1700, the bent reflector 1717 increases the viewing angle of the display and reduces the required travel distance of the shutter 1711 between the on and off positions as compared to a flat reflector.

The above-mentioned displays further include spacers for maintaining an accurate distance between substrates, row and column conductors formed on one or both substrates, and 1 for addressing display pixels. It may include one or more thin film transistors and storage capacitors, a ground or power plane, a common interconnect for resetting display pixels, a dichroic filter or color filter, and an antireflection coating.

The displays described above may be referred to as electromechanical displays, micromechanical displays, microelectromechanical displays or microelectromechanical system (MEMS) displays. The display described above may be a black-and-white display, a color display or a color sequential display.

The present invention will be described in detail as required by patent law, and those skilled in the art will make changes or improvements in individual parts or their associated assembly or manufacturing methods to meet specific requirements or conditions. There will be no difficulty. Such changes and improvements may be made without departing from the scope and ideas of the invention, as described in the claims below.

100 Shutter Assembly 101 Light Shutter 102 Board 103 Surface 104 Support 105 Support 106 First End 107 Second End 108 Light Transmitting Area 109 Pad 110 Light Blocking Area 120 Light Reflecting Surface 121 Light Absorbing Surface 200 Mold 201 Sacrificial material 203 Groove 204 Side wall 206 Recess area 300 Optical modulator 303 Cover assembly 304 Transparent substrate 306, 307 Spacer 308, 309 Electrode 311 First electrostatic actuator 312 Second electrostatic actuator 400 Optical modulator 401 Shutter assembly 402 Transparent substrate 403 Surface 404, 405 Electrodes 406, 407 Support 408 First end 409 Second end 410 Shutter 411 Light transmission area 412 Light blocking area 413 Board 414 Inner surface 415 Transparent conductive layer 416, 417 Spacer 418 Cover Assembly 500 Optical Modulator 501 Substrate 502 Surface 503 Shutter Assembly 505, 506 Shutter Support 507 Shutter 508, 509 Spacer 510, 511 Electrode 514 First Electrostatic Electr 515 Second Electrostatic Actuator 600 Modulator 601 Optical Shutter 602 Light Transmission area 603 Light blocking area 605 Surface 606, 607 Cantilever beam 608, 609 Post 610, 611 Conductive pad 614 Electrode 615 Flange 616 Electrode 619 First gap 621 Second electrostatic actuator 622 First electrostatic actuator 700 Light modulator 701 Light shutter 702 Light transmission area 703 Light blocking area 705 Board 708 Flange 709 Electrode 710 Conductive pad 711 Electrostatic actuator 712, 714 Cantilever beam 715, 716 Post 717 Conductive pad 722 Second flange 723 Second Electrode 724 Conductive pad 800 Shutter support 802 Substrate 803 Cantilever beam 804 First post 806 Second post 807 Mold 814 Conductive layer 815 Photoresist layer 816 First photomask 900 Shutter 901 Light transmission area 1000 Backlight 1001 Light guide 1002 Top surface 1003 Bottom Part surface 1004, 1005 Side surface 1006 Light input end 1010 Light absorption film 1011 Light source 1015 First optical layer 1016 Light escape surface 1017 Light input surface 1018 Light reflector 1020 Second optical layer 1023 Light ray 1024 Critical angle 1101 Micro prism 1103 Substrate 1104 Extension 1106 Light Reflection Facet 1107 Groove 1108 Optical Layer 1200 Glass Substrate 1203 Groove 1204 Extension 1205 Embedded Light Reflector 1400 Cover Assembly 1401 Transparent Substrate 1402 First Surface 1403 Second Surface 1404 Light Diffuse Layer 1405 Light Absorption Layer 1406 Light absorption area 1407 Light transmission area 1500 Display 1501 Cover assembly 1502 Modulator 1503 Backlight 1504 Back reflector 1505 Transparent substrate 1506 Light diffusion layer 1507 First surface 1508 Light absorption layer 1509 Light absorption area 1510 Light absorption area 1511 Shutter 1514 Light transmission area 1515 Light blocking area 1520 Light 1700 Display 1701 Cover assembly 1702 Modulator 1703 Backlight 1705 Transparent substrate 1706 Light diffusion layer 1707 First surface 1708 Light absorption layer 1709 Light transmission area 1710 Light absorption area 1711 Shutter 1714 Light transmission Area 1715 Light blocking area 1716 Substrate 1717 Embedded light reflection facet 1718 Optical layer 1719 Light guide 1721 Light escape surface

Claims (10)

Includes first and second electrostatic actuators and shutters with first and second ends.
The shutter is supported above the surface of the substrate by a plurality of supports attached to the first end and a plurality of supports attached to the second end.
The longitudinal direction of the support portion attached to the first end portion of the shutter is inclined with respect to the longitudinal direction of the support portion attached to the second end portion of the shutter, and the shutter is said to be said. The longitudinal direction of the first end and the support attached to the second end is inclined with respect to the surface of the substrate.
The first end and the second end are on the edge of the shutter perpendicular to the direction of movement of the shutter.
The first electrostatic actuator pulls the support portion attached to the first end portion to a position close to perpendicular to the surface of the substrate, and moves the shutter to the first position. An electric machine in which a second electrostatic actuator pulls the support portion attached to the second end portion to a position close to perpendicular to the surface of the substrate and moves the shutter to the second position. Display element. A claim that the first and second electrostatic actuators each apply a force to the shutter in substantially the same direction and move the shutter laterally and in the opposite direction to the applied force. The electromechanical display element according to 1. The surface of the substrate further includes first and second electrodes provided so as to face the shutter, and the first electrode and the shutter form the first electrostatic actuator, and the second electrode is formed. The electromechanical display element according to claim 1, wherein the electrode and the shutter form the second electrostatic actuator. A transparent substrate is further included, and the shutter is arranged between the substrate and the transparent substrate.
The surface of the transparent substrate further includes first and second electrodes provided so as to face the shutter, and the first electrode and the shutter form the first electrostatic actuator, and the first electrode is formed. The electromechanical display element according to claim 1, wherein the electrode 2 and the shutter form the second electrostatic actuator. A transparent substrate is further included, and the shutter is arranged between the substrate and the transparent substrate.
A first electrode (405) and a second electrode (404) formed on the shutter are further included, and the first electrode (405) is arranged on the surface of the transparent substrate so as to face the shutter. is the first electrostatic actuator formed conductive layer with (415), said second electrode (404) form a second electrostatic actuator together with the conductive layer (415), according to claim 1 The electromechanical display element according to. The shutter comprises first and second electrodes, and the support attached to the first end of the shutter provides a first electrical connection from the surface of the substrate to the first electrode. The electromechanical display according to claim 1, wherein the support attached to the second end of the shutter provides a second electrical connection from the surface of the substrate to the second electrode. element. The electromechanical display element according to claim 1, wherein the shutter includes a light absorbing surface. The electromechanical display element according to claim 1, wherein the shutter includes a light-absorbing first surface and a light-reflecting second surface. The electromechanical display element according to claim 1, wherein each of the supports forms an angle of 70 to 85 ° with respect to the surface of the substrate. The electromechanical display element according to claim 1, wherein the shutter includes an inclined edge.

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