JP6716136B2 - Fluid flow former and non-contact transfer device - Google Patents

Description

The present invention relates to a fluid flow former that generates a negative pressure and sucks a member.

2. Description of the Related Art In recent years, a device for non-contact transfer of plate-shaped members such as semiconductor wafers and glass substrates has been used. For example, Patent Document 1 describes a device that conveys a plate-shaped member in a non-contact manner by using the Bernoulli effect. In this device, a swirl flow is generated in a cylindrical chamber opened on the lower surface of the device and the plate-shaped member is sucked by a negative pressure at the center of the swirl flow, while the device and the plate-shaped member are discharged by a fluid flowing out from the circular chamber It is possible to carry the plate-shaped member in a non-contact manner by keeping a constant distance between the plate-shaped member and.

JP, 2005-512260, A

The present invention is a fluid flow former, comprising a plurality of fluid passages each of which supplies a fluid to a hole to generate a negative pressure, wherein a member sucked by the negative pressure is a fluid supplied from each fluid passage. It is an object of the present invention to provide a fluid flow forming body in which the moving directions are substantially the same.

In order to solve the above-mentioned problems, the present invention is formed on a main body, a flat end surface formed on the main body, a hole formed on the end surface, and an inner surface of the main body facing the hole. A first jet port, a first fluid passage for supplying a fluid from the first jet port into the hole to generate a negative pressure in the hole, and an inner surface of the body facing the hole. A second fluid passage for supplying a fluid from the second ejection outlet into the hole to generate a negative pressure in the hole; and the first and second fluid passages include the first fluid passage and the second fluid passage. (1) The outflow direction of the fluid supplied from the ejection port into the hole and outflowing from the hole along the end face is supplied from the second ejection port into the hole and outflows from the hole along the end face. Provided is a fluid flow former which is formed to be substantially the same as the outflow direction of a fluid.

In a preferred aspect, the first and second fluid passages are formed such that a direction in which the first fluid passage extends and a direction in which the second fluid passage extends are substantially orthogonal to each other.

In a further preferred aspect, the bottom surface of the hole is inclined or curved upward along the outflow direction of the fluid supplied from the first or second ejection port into the hole and outflowing from the hole along the end face. Is formed.

In a further preferred aspect, a third ejection port formed on the inner surface of the main body facing the hole, and a third nozzle for supplying a fluid into the hole from the third ejection port to generate a negative pressure in the hole A third fluid passage, a fourth ejection port formed on the inner surface of the main body facing the hole, and a fluid supplied from the fourth ejection port into the hole to generate a negative pressure in the hole. And a fourth fluid passage, wherein the third and fourth fluid passages have a fourth ejection direction in which the fluid is supplied from the third ejection port into the hole and flows out from the hole along the end face. It is formed so as to be substantially the same as the outflow direction of the fluid supplied from the outlet into the hole and flowing out from the hole along the end face.

In a further preferred aspect, the first and third ejection ports face each other across the hole, and the second and fourth ejection ports face each other across the hole.

The present invention also provides a non-contact transfer device including a plate-shaped base and one or more of the above-described fluid flow formers mounted on the base.

According to the present invention, there is provided a fluid flow forming body including a plurality of fluid passages each of which supplies a fluid to the inside of the hole to generate a negative pressure, and a member sucked by the negative pressure is supplied from each fluid passage. It is possible to provide a fluid flow former in which the directions in which the fluid is moved are substantially the same.

It is a figure which shows an example of a structure of the non-contact conveyance apparatus 1. It is a figure which shows an example of a structure of the swirl flow forming body 3. It is a figure which shows an example of the structure of the fluid flow formation body 4. It is a top view of fluid flow formation object 4A. It is a top view of fluid flow formation object 4B. It is a top view of fluid flow formation object 4C. It is a top view of fluid flow formation object 4D. It is a top view of fluid flow formation object 4E. It is a top view of the fluid flow formation body 6. 3 is a plan view of a fluid flow former 7. FIG. It is a figure which shows an example of the structure of the fluid flow formation body 4F. It is a figure which shows an example of the structure of the fluid flow formation body 8.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
1. Embodiment FIG. 1 is a diagram showing an example of the structure of a non-contact transfer device 1 according to an embodiment of the present invention. FIG. 1A is a plan view of the non-contact transfer device 1, and FIG. 1B is a side view of the non-contact transfer device 1. The non-contact transfer device 1 is a device for suction-holding and transferring a plate-shaped member such as a semiconductor wafer or a glass substrate. This non-contact transfer apparatus 1 is installed on the front surface of a base body 2 and a plurality of swirl flow forming bodies 3 that are installed on the front surface of the base body 2 to form a swirling flow of fluid. A fluid flow forming body 4 that forms a fluid flow is provided, and a plurality of guide members 5 that are installed on the front surface of the base body 2 to position the transported object. Here, the fluid is specifically a gas such as compressed air or a liquid such as pure water or carbonated water.

The base body 2 has a bifurcated fork shape and includes a rectangular grip portion 21 and two arm portions 22 branched from the grip portion 21. A circular recess (not shown) for accommodating the fluid flow former 4 is formed on one end side in the longitudinal direction of the grip portion 21, and the fluid flow former 4 is fixed in the recess by an adhesive or the like. .. A supply port 211 is formed on the back surface of the grip portion 21, and the fluid is supplied into the base 2 through the supply port 211. The arm 22 is formed with a plurality of circular recesses (not shown) for accommodating the swirl flow-forming bodies 3, and each swirl flow-forming body 3 is fixed in the recesses with an adhesive or the like. The swirl flow former 3 and the fluid flow former 4 are arranged at equal intervals on the same circumference. Further, each arm portion 22 has a protruding portion 221 protruding at an angle of about 45 degrees with respect to the longitudinal direction of the grip portion 21, and the guide member 5 is fixed to the protruding portion 221. A fluid passage 23 is formed inside the base body 2, and the fluid supplied from the supply port 211 is supplied to the swirl flow former 3 and the fluid flow former 4 through the fluid passage 23.

FIG. 2 is a diagram showing an example of the structure of the swirl flow forming body 3. 2A is a perspective view of the swirl flow forming body 3, and FIG. 2B is a plan view of the swirl flow forming body 3. The swirl flow forming body 3 is a device that sucks and holds the plate-shaped member in a non-contact manner by utilizing the Bernoulli effect. The back surface of the swirl flow forming body 3 is fixed to the bottom surface of the recess formed in the arm portion 22. The swirl flow forming body 3 includes a main body 31 which is an annular plate having a circular through hole 32 in the center, a flat end surface 33 formed on the front surface of the main body 31, and a surface of the through hole 32. The two ejection ports 34 formed on the inner side surface of the main body 31, the two supply ports 35 formed on the outer side surface of the main body 31, and the ejection ports 34 formed on the back surface of the main body 31 and the supply port 35 communicate with each other. And two groove-shaped fluid passages 36.

The two ejection ports 34 are formed so as to be point-symmetric with respect to the center of the main body 31. Similarly, the two supply ports 35 are formed so as to be point-symmetric with respect to the center of the main body 31. The supply port 35 communicates with the fluid passage 23 formed inside the base body 2. The two fluid passages 36 are formed so as to extend tangentially to the inner circumference of the main body 31, and supply the fluid from the ejection ports 34 into the through holes 32. The fluid supplied into the through hole 32 flows along the inner surface of the main body 31 due to the Coanda effect, and forms a swirling flow in the through hole 32. Most of the fluid molecules constituting the formed swirling flow flow out from the through hole 32 along the end face 33 at an angle of about 45 degrees with respect to the direction in which the fluid passage 36 to which the fluid molecules are supplied extends. In other words, the composite vector of the flow velocity vectors of the fluid molecules flowing out from the through hole 32 along the end face 33 has an angle of about 45 degrees with respect to the direction in which the fluid passage 36 to which the fluid molecules are supplied extends. The swirling flow formed in the through hole 32 entrains stationary fluid in the central portion of the through hole 32 (entrainment) to generate a negative pressure in the central portion of the through hole 32.

The two fluid passages 36 are formed so as to extend substantially parallel to each other. Therefore, the flow velocity vector of the fluid supplied from one fluid passage 36 into the through hole 32 and flowing out along the end face 33 is supplied from the other fluid passage 36 into the through hole 32 and flows out along the end face 33. It is almost opposite to the fluid velocity vector. As a result of the two flow velocity vectors having an inverse vector relationship, the plate-like member sucked by the swirl flow forming body 3 is theoretically not moved by the swirl flow.
The two fluid passages 36 are formed in the through hole 32 so as to form a swirling flow in the same direction.

FIG. 3 is a diagram showing an example of the structure of the fluid flow former 4. FIG. 3A is a perspective view of the fluid flow former 4 and FIG. 3B is a plan view of the fluid flow former 4. The fluid flow former 4 is a device that uses the Bernoulli effect to suck and hold a plate-shaped member in a non-contact manner, and moves the plate-shaped member in one direction. In other words, one-way flow formers or cross-flow formers. The back surface of the fluid flow former 4 is fixed to the bottom surface of the recess formed in the grip portion 21. The fluid flow forming body 4 includes a main body 41 that is an annular plate having a circular through hole 42 in the center, a flat end surface 43 formed on the front surface of the main body 41, and a surface of the through hole 42. Two ejection ports 44A and 44B formed on the inner side surface of the main body 41, a supply port 45 formed on the outer side surface of the main body 41, two ejection ports 44A and 44B formed on the back surface of the main body 41, and a supply port And a groove-shaped and Y-shaped fluid passage 46 communicating with 45.

The supply port 45 communicates with the fluid passage 23 formed inside the base body 2. The fluid passage 46 includes a first passage portion 461 that extends in the radial direction from the supply port 45 toward the center of the main body 41, and a second passage portion 462 and a third passage portion 463 that branch from the first passage portion 461. The first passage portion 461 communicates the supply port 45 with the second passage portion 462 and the third passage portion 463. The second passage portion 462 connects the first passage portion 461 and the ejection port 44A. The third passage portion 463 connects the first passage portion 461 and the ejection port 44B.

The second passage portion 462 is formed so as to extend tangentially to the inner circumference of the main body 41, and supplies the fluid from the ejection port 44A into the through hole 42. The fluid supplied into the through hole 42 flows along the inner surface of the main body 41 due to the Coanda effect, and forms a fluid flow in the through hole 42. Most of the fluid molecules that form the formed fluid flow do not swirl in the through hole 42, but along the end surface 43 from the through hole 42 at an angle of about 45 degrees with respect to the direction in which the second passage portion 462 extends. Flow out (see arrow A). In other words, the combined vector of the flow velocity vectors of the fluid molecules flowing out from the through hole 42 along the end surface 43 has an angle of about 45 degrees with respect to the direction in which the second passage portion 462 extends. On the other hand, some of the fluid molecules form a swirling flow in the through hole 42 (see arrow B). The fluid flow formed in the through hole 42 entrains the stationary fluid in the central portion of the through hole 42 (entrainment) to generate a negative pressure in the central portion of the through hole 42. The second passage portion 462 is an example of the first fluid passage according to the present invention. The ejection port 44A is an example of the first ejection port according to the present invention.

The third passage portion 463 is formed so as to extend in a tangential direction with respect to the inner circumference of the main body 41, and supplies the fluid from the ejection port 44B into the through hole 42. The fluid supplied into the through hole 42 flows along the inner surface of the main body 41 due to the Coanda effect, and forms a fluid flow in the through hole 42. Most of the fluid molecules that form the formed fluid flow do not swirl through the through hole 42, but along the end surface 43 from the through hole 42 at an angle of about 45 degrees with respect to the direction in which the third passage portion 463 extends. It flows out (see arrow C). In other words, the combined vector of the flow velocity vectors of the fluid molecules flowing out from the through hole 42 along the end face 43 has an angle of about 45 degrees with respect to the extending direction of the third passage portion 463. On the other hand, some of the fluid molecules form a swirling flow in the through hole 42 (see arrow D). The fluid flow formed in the through hole 42 entrains the stationary fluid in the central portion of the through hole 42 (entrainment) to generate a negative pressure in the central portion of the through hole 42. The third passage portion 463 is an example of the second fluid passage according to the present invention. The ejection port 44B is an example of the second ejection port according to the present invention.

The second passage portion 462 and the third passage portion 463 are formed so that the extending direction of the second passage portion 462 and the extending direction of the third passage portion 463 are substantially orthogonal to each other. In other words, in the second passage portion 462 and the third passage portion 463, the outflow direction of the fluid that is supplied from the ejection port 44A into the through hole 42 and flows out from the through hole along the end face 43 is the ejection port. It can also be said that it is formed so as to be substantially the same as the outflow direction of the fluid supplied from 44B into the through hole 42 and flowing out from the through hole along the end surface 43. Both outflow directions are naturally substantially parallel here. As a result of the two outflow directions being substantially the same, the fluid flow forming body 4 moves the attracted member in one direction (see arrow E). Here, the one direction is specifically the outflow direction of the fluid supplied from the ejection port 44A or 44B and flowing out from the through hole 42. In other words, it is the direction of the combined vector of the flow velocity vector of the fluid molecules when ejected from the ejection port 44A and the flow velocity vector of the fluid molecules when ejected from the ejection port 44B. The fluid flow former 4 has a gripping portion such that this one direction is substantially the same as the direction from the position where the fluid flow former is installed on the gripping portion 21 to the central portion in the longitudinal direction of the gripping portion 21. 21 is installed. Further, the second passage portion 462 and the third passage portion 463 are formed so as to form swirling flows in opposite directions in the through hole 42.

If the above two outflow directions are substantially the same, the direction in which the second passage portion 462 extends and the direction in which the third passage portion 463 extend do not necessarily need to be orthogonal. Depending on the flow rate of the fluid and the depth of the through hole 42, the two outflow directions may be substantially the same even if the extending direction of the second passage portion 462 and the extending direction of the third passage portion 463 are not necessarily orthogonal. Is possible.

The guide member 5 has a disc shape, and the outer periphery of the guide member 5 comes into contact with the edge portion of the transported object to position the transported object.

When the fluid is supplied to the non-contact transfer apparatus 1 described above through the supply port 211, the fluid reaches the swirl flow former 3 and the fluid flow former 4 through the fluid passage 23. The fluid that has reached the swirl flow forming body 3 is discharged from the ejection port 34 into the through hole 32 through the supply port 35 and the fluid passage 36. The fluid discharged into the through hole 32 is cleared as a swirl flow in the through hole 32 and then flows out from the through hole 32. At that time, when a plate-like member is present facing the end surface 33, the centrifugal force of the swirling flow is generated in a state where the inflow of the external fluid (specifically, gas or liquid) into the through hole 32 is restricted. And the entrainment reduces the density of fluid molecules per unit volume at the center of the swirling flow. That is, negative pressure is generated in the center of the swirling flow. As a result, the plate-shaped member is pressed by the surrounding fluid and drawn toward the end face 33. On the other hand, as the end surface 33 and the plate member approach each other, the amount of fluid flowing out from the through hole 32 is limited, and the pressure at the center of the swirling flow increases. As a result, the plate member does not come into contact with the end surface 33, and a constant distance is maintained between the plate member and the end surface 33.

On the other hand, the fluid that has reached the fluid flow former 4 passes through the supply port 45 and the fluid passage 46 and is discharged from the ejection ports 44A and 44B into the through hole 42. The fluid discharged into the through hole 42 forms a fluid flow in the through hole 42 and then flows out from the through hole 42. At that time, when the plate-like member is present facing the end surface 43, the centrifugal force of the fluid flow is generated in a state where the inflow of the external fluid (specifically, gas or liquid) into the through hole 42 is restricted. Due to the entrainment, the density of fluid molecules per unit volume in the central portion of the through hole 42 decreases. That is, negative pressure is generated in the central portion of the through hole 42. As a result, the plate-shaped member is pressed by the surrounding fluid and drawn toward the end face 43 side. On the other hand, as the end surface 43 and the plate member approach each other, the amount of fluid flowing out from the through hole 42 is limited, and the pressure at the center of the through hole 42 rises. As a result, the plate member does not come into contact with the end face 43, and a constant distance is maintained between the plate member and the end face 43.

The swirl flow forming body 3 theoretically does not move the plate-shaped member when holding the plate-shaped member by suction. This is because, as described above, the flow velocity vectors of the fluids supplied from the two fluid passages 36 of the swirl flow forming body 3 and flowing out from the through holes 32 are opposite to each other and cancel each other out. However, in reality, their sizes and directions do not coincide with each other, and the plate-like member is often moved in either direction by a small force. Therefore, in many cases, the plate member in the entire swirl flow forming body 3 is rotated in either direction. On the other hand, the fluid flow former 4 moves the plate-shaped member in one direction as described above when sucking and holding the plate-shaped member. Specifically, the plate member is moved from the arm portion 22 side to the grip portion 21 side (see arrow F in FIG. 1 ). The plate-shaped member moved to the grip portion 21 side by the fluid flow forming body 4 contacts the guide member 5 at two points and is stopped and positioned. Further, the rotation of the plate-shaped member is suppressed by the frictional force between the plate-shaped member and the guide member 5. Therefore, according to the non-contact conveyance device 1, the plate-shaped member can be conveyed in a non-contact manner while suppressing the rotation of the plate-shaped member. Further, since the guide member 5 is not provided on the tip end side of the arm portion 22 in the non-contact transfer apparatus 1, the thickness of the front end section of the non-contact transfer apparatus 1 is suppressed, so that the wafer cassette can be easily taken in and out.

2. Modifications The above embodiment may be modified as follows. The following modifications may be combined with each other.

2-1. Modification 1
The shape of the fluid passage 46 of the fluid flow former 4 is not limited to the Y shape. The shape may be changed according to the size of the through hole 42. For example, it may be V-shaped. FIG. 4 is a plan view of the fluid flow former 4A having a V-shaped fluid passage 47 in place of the Y-shaped fluid passage 46. In the fluid flow former 4A, the fluid passage 47 includes a first passage portion 471 and a second passage portion 472 that branch from the supply port 45. The first passage portion 471 connects the supply port 45 and the ejection port 44A. The second passage portion 472 connects the supply port 45 and the ejection port 44B.

The first passage portion 471 is formed so as to extend tangentially to the inner circumference of the main body 41 in the same manner as the second passage portion 462 described above, and supplies the fluid into the through hole 42 from the ejection port 44A to penetrate the through hole 42. A negative pressure is generated in the hole 42. The first passage portion 471 is an example of the first fluid passage according to the present invention. The second passage portion 472 is formed so as to extend tangentially to the inner circumference of the main body 41, like the above-described third passage portion 463, and supplies the fluid from the ejection port 44B into the through hole 42 to penetrate therethrough. A negative pressure is generated in the hole 42. The second passage portion 472 is an example of the second fluid passage according to the present invention.

The first passage portion 471 and the second passage portion 472 extend in the direction in which the first passage portion 471 extends and the second passage portion 472 extend in the same manner as the arrangement relationship between the second passage portion 462 and the third passage portion 463 described above. It is formed so that the directions thereof are substantially orthogonal to each other. In other words, in the first passage portion 471 and the second passage portion 472, the outflow direction of the fluid that is supplied from the ejection port 44A into the through hole 42 and flows out from the through hole along the end face 43 is from the ejection port 44B. It is formed so as to be substantially the same as the outflow direction of the fluid that is supplied into the through hole 42 and flows out from the through hole along the end surface 43. As a result of the two outflow directions being substantially the same, the fluid flow forming body 4A moves the member to be attracted in one direction (see arrow G). Here, the one direction is specifically the outflow direction of the fluid supplied from the ejection port 44A or 44B and flowing out from the through hole 42. Further, the first passage portion 471 and the second passage portion 472 are formed in the through hole 42 so as to form swirling flows in mutually opposite directions.

In addition, in the example shown in FIG. 4, the first passage portion 471 and the second passage portion 472 are connected to the supply port 45 that is a common supply port, but may be connected to different supply ports. FIG. 5 is a plan view of the fluid flow former 4B having a first passage portion 471 and a second passage portion 472 that are connected to different supply ports. In this fluid flow forming body 4B, the first passage portion 471 connects the supply port 45A and the ejection port 44A. On the other hand, the second passage portion 472 connects the supply port 45B and the ejection port 44B.

2-2. Modification 2
The shape of the main body 41 of the fluid flow former 4 is not limited to the annular shape. For example, the outer circumference and the inner circumference of the main body 41 may have an elliptical shape or an oval shape (in other words, a rounded rectangular shape). FIG. 6 is a plan view of a fluid flow former 4C having an oval-shaped main body 41A in the outer and inner circumferences instead of the annular main body 41. As another example, the inner circumference of the main body 41 may be semicircular. FIG. 7 is a plan view of a fluid flow former 4D having a main body 41B having an inner circumference of a semicircular shape instead of the main body 41 having an annular shape. As another example, the inner circumference of the main body 41 may have a heart shape. FIG. 8 is a plan view of a fluid flow former 4E having a heart-shaped main body 41C whose inner circumference is replaced with the annular main body 41.

As another example, the outer circumference and the inner circumference of the main body 41 may be formed into a substantially eight shape. FIG. 9 is a plan view of the fluid flow former 6 having a main body 61 having an approximately 8-shaped outer and inner circumferences. The fluid flow forming body 6 includes a main body 61 which is an annular plate body having a through hole 62 having a substantially 8-shape in the center, a flat end surface 63 formed on the front surface of the main body 61, and a through-hole. Two ejection ports 64A and 64B formed on the inner surface of the body 61 facing the hole 62, two supply ports 65A and 65B formed on the outer surface of the body 61, and a groove formed on the back surface of the body 61. Shaped fluid passages 66A and 66B.

The through hole 62 is composed of a first hole portion 621 and a second hole portion 622 each having a circular shape with a part of the outer periphery cut out in a linear shape. The first hole portion 621 and the second hole portion 622 are arranged such that the straight line portions on the outer circumference are in contact with each other. The length of the straight line portion is substantially the same as the radius length of the first hole portion 621 or the second hole portion 622. The outer periphery of the main body 61 has a substantially oval shape (in other words, a rounded rectangular shape), and the center of the longitudinal direction is narrowed along the shape of the through hole 62. The supply ports 65A and 65B communicate with the fluid passage 23 formed inside the base 2.

The fluid passage 66A connects the supply port 65A and the ejection port 64A. Further, the fluid passage 66A is formed so as to extend tangentially to the outer periphery (arc portion) of the first hole portion 621, and supplies the fluid from the ejection port 64A into the first hole portion 621 to supply the first hole portion 621. Negative pressure is generated inside. The fluid passage 66A is an example of the first fluid passage according to the present invention. On the other hand, the fluid passage 66B connects the supply port 65B and the ejection port 64B. Further, the fluid passage 66B is formed so as to extend tangentially to the outer periphery (arc portion) of the second hole portion 622, and supplies the fluid from the ejection port 64B into the second hole portion 622 to form the second hole portion 622. Negative pressure is generated inside. The fluid passage 66B is an example of the second fluid passage according to the present invention.

The fluid passages 66A and 66B are formed such that the extending direction of the fluid passage 66A and the extending direction of the fluid passage 66B are substantially orthogonal to each other. In other words, in the fluid passages 66A and 66B, the outflow direction of the fluid supplied from the ejection port 64A into the first hole portion 621 and flowing out from the first hole portion along the end surface 63 is from the ejection port 64B to the second hole. It is formed to be substantially the same as the outflow direction of the fluid that is supplied into the portion 622 and flows out from the second hole portion along the end surface 63. As a result of the two outflow directions being substantially the same, the fluid flow former 6 moves the member to be attracted in one direction (see arrow H). Here, the one direction is specifically the outflow direction of the fluid supplied from the ejection port 64A and flowing out from the first hole portion 621 or the outflow of the fluid supplied from the ejection port 64B and flowing out from the second hole portion 622. Direction. Further, the fluid passages 66A and 66B are formed so as to form swirling flows in directions opposite to each other.

2-3. Modification 3
The fluid flow former 4 may further have a fluid passage 71 having the same structure as the fluid passage 46, in addition to the fluid passage 46. FIG. 10 is a plan view of the fluid flow former 7 further having a fluid passage 71. In the fluid flow former 7, the fluid passage 71 includes a first passage portion 711 that extends radially from the supply port 72 toward the center of the main body 41, a second passage portion 712 that branches from the first passage portion 711, and a third passage portion 712. And a passage portion 713. The first passage portion 711 communicates the supply port 72 with the second passage portion 712 and the third passage portion 713. The second passage portion 712 connects the first passage portion 711 and the ejection port 73A. The third passage portion 713 connects the first passage portion 711 and the ejection port 73B. Here, the supply port 72 is formed on the outer surface of the main body 41. Further, the supply port 72 communicates with a fluid passage (not shown) formed inside the base body 2 and different from the fluid passage 23. This fluid passage communicates with a supply port (not shown) different from the supply port 211, and receives the supply of fluid via this supply port. The spouts 73A and 73B are formed on the inner surface of the main body 41 facing the through hole 42.

The second passage portion 712 is formed so as to extend tangentially to the inner circumference of the main body 41, and supplies a fluid from the ejection port 73A into the through hole 42 to generate a negative pressure in the through hole 42. The second passage portion 712 is an example of the third fluid passage according to the present invention. The ejection port 73A is an example of the third ejection port according to the present invention. The third passage portion 713 is formed so as to extend tangentially to the inner circumference of the main body 41, and supplies a fluid from the ejection port 73B into the through hole 42 to generate a negative pressure in the through hole 42. The third passage portion 713 is an example of the fourth fluid passage according to the present invention. The jet 73B is an example of the fourth jet according to the present invention.

The second passage portion 712 and the third passage portion 713 are formed such that the extending direction of the second passage portion 712 and the extending direction of the third passage portion 713 are substantially orthogonal to each other. In other words, in the second passage portion 712 and the third passage portion 713, the outflow direction of the fluid that is supplied from the ejection port 73A into the through hole 42 and flows out from the through hole along the end face 43 is from the ejection port 73B. It is formed so as to be substantially the same as the outflow direction of the fluid that is supplied into the through hole 42 and flows out from the through hole along the end surface 43. As a result of the two outflow directions being substantially the same, when the fluid is supplied to the supply port 72, the fluid flow former 7 moves the aspirated member in one direction (see arrow I). Here, the one direction is specifically the outflow direction of the fluid supplied from the ejection port 73A or 73B and flowing out from the through hole 42. Further, the second passage portion 712 and the third passage portion 713 are formed in the through hole 42 so as to form swirling flows in mutually opposite directions.

The fluid passage 71 and the fluid passage 46 are arranged so as to be point-symmetric with respect to the center of the main body 41. Therefore, the second passage portion 712 of the fluid passage 71 is substantially orthogonal to the second passage portion 462 of the fluid passage 46 and substantially parallel to the third passage portion 463. The third passage portion 713 of the fluid passage 71 is substantially orthogonal to the third passage portion 463 of the fluid passage 46, and is substantially parallel to the second passage portion 462. Further, the ejection port 73A and the ejection port 44A face each other across the through hole 42, and the ejection port 73B and the ejection port 44B face each other across the through hole 42.

When the fluid is supplied to the supply port 45 of the fluid flow former 7 described above, the fluid flow former 7 causes the plate-shaped member to move toward the arm portion 22 side of the base body 2 as described in the above embodiment. To the grip portion 21 side (see FIG. 1). On the other hand, when the fluid is supplied to the supply port 72 of the fluid flow former 7, the fluid flow former 7 moves the plate member from the grip portion 21 side to the arm portion 22 side. That is, the plate member is moved in the opposite direction. Thus, the fluid flow former 7 can control the moving direction of the plate member by selectively supplying the fluid to the supply port 45 and the supply port 72.

When the fluid flow former 7 is installed by rotating it about 90 degrees with respect to the base body 2, it is possible to control the rotation direction of the plate-shaped member instead of moving the grip portion 21 in the longitudinal direction.

Further, at least one of the fluid passages 46 and 71 of the fluid flow former 7 may be V-shaped as shown in FIG. 4 or 5.

The arrangement relationship between the fluid passage 71 and the fluid passage 46 is not limited to the arrangement relationship that is point-symmetric with respect to the center of the main body 41. For example, the extending direction of the first passage portion 461 and the extending direction of the first passage portion 711 may be arranged to be substantially orthogonal to each other.

2-4. Modification 4
The fluid flow former 4 may have a non-through hole (in other words, a recess) instead of the through hole 42. FIG. 11 is a diagram showing an example of the structure of the fluid flow former 4F having a recess 48 in place of the through hole 42. 11A is a plan view of the fluid flow former 4F, and FIG. 11B is a sectional view taken along the line I-I of FIG. 11A. In the fluid flow forming body 4F, the recess 48 has a substantially disc shape and is formed at the center of the back surface of the disc-shaped main body 41D. The recess 48 is an example of a hole according to the present invention. The bottom surface 481 of the recess 48 is inclined with respect to the end surface 43 of the main body 41D. More specifically, it is inclined upward along the outflow direction of the fluid that is supplied from the ejection port 44A or 44B into the recess 48 and flows out from the recess along the end surface 43. Since the bottom surface 481 of the recess 48 is inclined, the fluid flows out smoothly from the recess 48 to the end surface 43.

2-5. Modification 5
The number of ejection ports 44 of the fluid flow former 4 is not limited to two. For example, the number may be three. FIG. 12: is a figure which shows an example of the structure of the fluid flow formation body 8 which has three ejection openings 84A, 84B, and 84C. 12A is a perspective view of the fluid flow former 8 and FIG. 12B is a bottom view of the fluid flow former 8. The fluid flow former 8 includes a disk-shaped main body 81, a flat end surface 83 formed on the back surface of the main body 81, a hemispherical recess 82 formed in the center of the end surface 83, and a surface of the recess 82. The main body 81 has three ejection ports 84A, 84B and 84C formed on the inner surface 811 of the hemisphere, a supply port 85 formed on the outer side surface of the main body 81, and a fluid passage 86 having a three-pronged fork shape.

The inner surface 811 of the hemisphere (in other words, the bottom surface of the recess 82) is curved upward along the outflow direction of the fluid that is supplied into the recess 82 from the ejection openings 84A, 84B or 84C and flows out from the recess along the end surface 83. Have parts. Here, the concave portion 82 is an example of the hole according to the present invention. The fluid passage 86 is formed in the back surface of the main body 81, and has a groove-shaped first passage portion 861 extending in the radial direction from the supply port 85 toward the center of the main body 81, and branched from the first passage portion 861 to the end surface 83. It is composed of a second passage portion 862, a third passage portion 863, and a fourth passage portion 864 that are formed so as to extend at an inclination. The first passage portion 861 communicates the supply port 85 with the second passage portion 862, the third passage portion 863, and the fourth passage portion 864. The second passage portion 862 connects the first passage portion 861 and the ejection port 84A. The third passage portion 863 connects the first passage portion 861 and the ejection port 84B. The fourth passage portion 864 connects the first passage portion 861 and the ejection port 84C.

The second passage portion 862 is formed so as to extend tangentially to the hemispherical inner surface 811, and supplies a fluid from the ejection port 84A into the recess 82 to generate a negative pressure in the recess 82. The second passage portion 862 is an example of the first fluid passage according to the present invention. The third passage portion 863 is formed so as to extend tangentially to the hemispherical inner surface 811, and supplies a fluid from the ejection port 84B into the recess 82 to generate a negative pressure in the recess 82. The third passage portion 863 is formed so as to be arranged in the same straight line as the first passage portion 861 when the fluid flow former 8 is viewed in a plan view. The fourth passage portion 864 is formed so as to extend tangentially to the hemispherical inner surface 811, and supplies a fluid from the ejection port 84C into the recess 82 to generate a negative pressure in the recess 82. The fourth passage portion 864 is an example of the second fluid passage according to the present invention.

The second passage portion 862 and the fourth passage portion 864 are formed such that the direction in which the second passage portion 862 extends and the direction in which the fourth passage portion 864 extend are substantially orthogonal when the fluid flow former 8 is viewed in plan view. To be done. In other words, in the second passage portion 862 and the fourth passage portion 864, the outflow direction of the fluid that is supplied from the ejection port 84A into the concave portion 82 and flows out from the concave portion along the end surface 83 is from the ejection port 84C to the concave portion 82. It is formed so as to be substantially in the same direction as the outflow direction of the fluid that is supplied inside and flows out along the end surface 83 from the recess. Both outflow directions are substantially the same as the outflow direction of the fluid that is supplied from the ejection port 84B into the recess 82 and flows out from the recess along the end surface 83. As a result, the fluid flow former 8 moves the member to be attracted in one direction (see arrow J). Here, the one direction is specifically the outflow direction of the fluid supplied from the ejection ports 84A, 84B or 84C and flowing out from the recessed portion 82. The second passage portion 862 and the fourth passage portion 864 are formed in the recess 82 so as to form swirling flows in opposite directions.

2-6. Modification 6
The object to be transferred by the non-contact transfer device 1 is not limited to a member such as a semiconductor wafer or a glass substrate, and may be a sheet-shaped object such as paper or a photograph. Alternatively, a sheet-shaped food material such as seaweed may be used.

2-7. Modification 7
The position of the fluid flow former 4 installed in the non-contact transfer device 1 may be replaced with the position of any of the swirl flow formers 3 installed in the same device. At that time, the fluid flow forming body 4 is installed on the arm portion 22 so that the moving direction of the suctioned member is substantially the same as the direction from the arm portion 22 side of the non-contact transfer apparatus 1 toward the gripping portion 21 side. To be done.

As another example, one or more swirl flow formers 3 of the swirl flow formers 3 installed in the non-contact transfer apparatus 1 may be replaced with the fluid flow former 4. At this time, the fluid flow forming body 4 to be installed has arm portions such that the moving direction of the member to be attracted is substantially the same as the direction from the arm portion 22 side of the non-contact transfer apparatus 1 toward the gripping portion 21 side. It is installed at 22.

2-8. Modification 8
The shape of the base body 2 of the non-contact transfer device 1 is not limited to the bifurcated fork shape. For example, it may be circular (see, for example, Japanese Patent No. 5908136), oval, or rectangular. As another example, the base body 2 of the non-contact transfer device 1 is configured as a base fixedly installed on the ground (see, for example, JP-A-2014-019514), and a plurality of fluid flow formers 4 are formed on the base body 2. May be installed to replace the belt conveyor.

The number of swirl flow formers 3 and fluid flow formers 4 installed in the non-contact carrier device 1 is not limited to seven. The number of the swirl flow formers 3 and the fluid flow formers 4 may be less than 7 or 8 or more.

2-9. Modification 9
A well-known baffle (see, for example, Japanese Patent No. 5908136) that inhibits the suctioned object from entering the through hole 32 may be attached to the end surface 33 of the swirl flow forming body 3. Similarly, on the end surface 43 of the fluid flow forming body 4, a baffle plate that inhibits the inhalation object from entering the through hole 42 may be attached.

2-10. Modification 10
The swirl flow forming body 3 may be replaced with a known radial flow forming body (see, for example, Japanese Patent No. 5908136) or a known electric fan (see, for example, Japanese Patent Laid-Open No. 2011-138948).

2-11. Modification 11
The shape, number and arrangement of the guide members 5 are not limited to those illustrated in FIG. The shape, number and arrangement of the guide members 5 may be determined according to the shape of the transported object.

DESCRIPTION OF SYMBOLS 1... Non-contact conveyance device, 2... Substrate, 3... Swirl flow former, 4, 4A, 4B, 4C, 4D, 4E, 4F... Fluid flow former, 5... Guide member, 6... Fluid flow former, 7 ... Fluid flow former, 8... Fluid flow former, 21... Gripping portion, 22... Arm portion, 23... Fluid passage, 31... Main body, 32... Through hole, 33... End face, 34... Jet port, 35... Supply port , 36... Fluid passage, 41, 41A, 41B, 41C, 41D... Main body, 42... Through hole, 43... End face, 44A, 44B... Jet port, 45... Supply port, 46... Fluid passage, 47... Fluid passage, 48 ... Recesses, 61... Main body, 62... Through holes, 63... End faces, 64A, 64B... Jet ports, 65A, 65B... Supply ports, 66A, 66B... Fluid passages, 71... Fluid passages, 72... Supply ports, 73A, 73B ... Jet port, 81... Main body, 82... Recessed portion, 83... End face, 84A, 84B, 84C... Jet port, 85... Supply port, 86... Fluid passage, 211... Supply port, 221... Projection portion, 461... First passage Part, 462... second passage part, 463... third passage part, 471... first passage part, 472... second passage part, 481... bottom face, 621... first hole part, 622... second hole part, 711... 1st passage part, 712... 2nd passage part, 713... 3rd passage part, 811... Hemisphere inner side surface, 861... 1st passage part, 862... 2nd passage part, 863... 3rd passage part, 864... 4th Aisle

Claims (5)

Body,
A flat end surface formed on the main body,
A hole formed in the end face,
A first ejection port formed on the inner surface of the main body facing the hole;
A first fluid passage for supplying a fluid from the first ejection port into the hole to generate a negative pressure in the hole;
A second ejection port formed on the inner surface of the main body facing the hole;
A second fluid passage for supplying a fluid from the second ejection port into the hole to generate a negative pressure in the hole;
Equipped with
In the first and second fluid passages, the outflow direction of the fluid that is supplied from the first ejection port into the hole and flows out from the hole along the end face is supplied from the second ejection port into the hole. And is formed so as to be substantially the same as the outflow direction of the fluid flowing out from the hole along the end surface,
The bottom surface of the hole is formed so as to be inclined or curved upward along the outflow direction of the fluid supplied from the first or second ejection port into the hole and flowing out from the hole along the end surface. it characterized in that there flow body flow forming member. Body,
A flat end surface formed on the main body,
A hole formed in the end face,
A first ejection port formed on the inner surface of the main body facing the hole;
A first fluid passage for supplying a fluid from the first ejection port into the hole to generate a negative pressure in the hole;
A second ejection port formed on the inner surface of the main body facing the hole;
A second fluid passage for supplying a fluid from the second ejection port into the hole to generate a negative pressure in the hole;
A third ejection port formed on the inner surface of the main body facing the hole;
A third fluid passage for supplying a fluid from the third ejection port into the hole to generate a negative pressure in the hole;
A fourth ejection port formed on the inner surface of the main body facing the hole;
A fourth fluid passage for supplying a fluid from the fourth ejection port into the hole to generate a negative pressure in the hole,
In the first and second fluid passages, the outflow direction of the fluid that is supplied from the first ejection port into the hole and flows out from the hole along the end face is supplied from the second ejection port into the hole. And is formed so as to be substantially the same as the outflow direction of the fluid flowing out from the hole along the end surface,
In the third and fourth fluid passages, the outflow direction of the fluid that is supplied from the third ejection port into the hole and flows out from the hole along the end face is supplied from the fourth ejection port into the hole. outflow direction and flow you characterized in that it is formed as can be the substantially the same body flow forming body fluid flowing along said end surface from said hole being. The fluid flow former according to claim 2 , wherein the first and third ejection ports face each other across the hole, and the second and fourth ejection ports face each other across the hole. The first and second fluid passages are formed so that a direction in which the first fluid passage extends and a direction in which the second fluid passage extend are substantially orthogonal to each other. The fluid flow former according to item 1. A plate-shaped substrate,
A non-contact transfer apparatus, comprising: one or more fluid flow formers according to any one of claims 1 to 4 , which are installed on the substrate.

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