JP6631871B2 - Optical processing equipment - Google Patents

Description

  The present invention relates to an optical processing device.

  2. Description of the Related Art Conventionally, there has been known an optical processing apparatus that transports a processing object, relatively moves a portion to be processed of the processing object with respect to a processing area of the optical processing apparatus, and performs a processing process on the processing object.

  For example, Patent Literature 1 discloses a laser processing apparatus that irradiates a work with a laser beam (working light) from a light source to pattern an ITO thin film on the work or cut a work itself made of a thin metal plate. It has been disclosed. In this laser processing apparatus, the work is held in a work supply part in a state of being wound in a roll shape, and the work is pulled out from the work supply part and the processed part of the work is moved to a processing area of the laser processing apparatus. Then, the laser beam from the light source is scanned in a two-dimensional direction by a galvanomirror (optical scanning means) to process the processed portion of the work in the processing area. After the processing, the workpiece is further pulled out and the next processed part is moved to the processing area of the laser processing apparatus, and the next processed part is processed.

  2. Description of the Related Art Generally, in an optical processing apparatus that processes a processing object using processing light, when the processing object is displaced in the optical axis direction of the processing light applied to the processing object, the focus of the processing light on the processing object is reduced. The position fluctuates, so that stable processing accuracy cannot be obtained. Therefore, it is necessary to ensure the flatness of the processing target on a processing base member such as a platen for positioning the processing target in the optical axis direction.

  However, it is difficult to maintain the flatness of the processing object in the optical processing apparatus that performs the processing as needed by moving the processing object.

To solve the problems described above, the present invention, as the processed portion of the workpiece on the table surface of the work table member is sequentially moved, the the pressurized machining object by applying tension to the workpiece An optical processing apparatus comprising: moving means for moving; and light irradiating means for two-dimensionally scanning and irradiating processing light onto a processing target portion mounted on a table surface of the processing table member, Suction means for adsorbing the object to be processed on the surface of the table by a suction force from a suction hole formed on the surface of the table, and moving the object during a predetermined suction period during movement of the object by the moving means. wherein possess a suction control means for controlling the suction means so as to adsorb to the base surface, in a state in which tension by the moving means to the workpiece is exerted, characterized that you adsorbing the processing object on said platform surface And

  ADVANTAGE OF THE INVENTION According to this invention, the flatness of a to-be-processed object can be maintained in the optical processing apparatus which performs a process by moving a to-be-processed object.

It is a schematic diagram which shows the structure of the principal part of the laser patterning apparatus in embodiment. FIG. 3 is a schematic diagram illustrating a configuration example of a laser oscillator in the laser patterning device. It is a schematic diagram which shows the modification of the optical scanning means in the same laser patterning apparatus. It is a schematic diagram which shows an example of a structure of the work conveyance part in the same laser patterning apparatus. It is a top view of the same work conveyance part. It is a schematic diagram which shows other structures of the work conveyance part in the same laser patterning apparatus. FIG. 3 is an explanatory diagram showing optical paths of laser light when carriages in the laser patterning apparatus are respectively located at different positions in a main scanning direction. 5 is a flowchart illustrating an example of a patterning process performed by the laser patterning device of the embodiment. It is a flowchart which shows an example of the flow of the work sending process in embodiment. It is explanatory drawing which shows the processing order in the case of dividing the to-be-processed area | region on a workpiece | work into 12 pieces, and performing a processing process sequentially. It is explanatory drawing which shows an example of the wiring pattern which should be continued between pieces (processed part).

Hereinafter, an embodiment in which the optical processing apparatus according to the present invention is applied to a laser patterning apparatus will be described.
The object to be processed in the laser patterning apparatus of the present embodiment is a work in which an ITO thin film is formed on a base material, and the ITO thin film on the work is irradiated with laser light (processing light) to partially remove the ITO thin film. By removing it, the ITO thin film is patterned. However, the optical processing apparatus according to the present invention is not limited to the laser patterning apparatus according to the present embodiment, but is an apparatus that performs other patterning processing, an apparatus that performs other processing such as cutting, a non-laser light The present invention can also be applied to an apparatus for processing by using as a processing light.

FIG. 1 is a schematic diagram illustrating a configuration of a main part of the laser patterning apparatus according to the present embodiment.
The laser patterning device according to the present embodiment includes a laser output unit 1, a laser scanning unit 2, a work transfer unit 3, and a control unit 4.
The laser output unit 1 has a laser oscillator 11 as a light source and a beam expander 12 for expanding a beam diameter of a laser beam L as processing light output from the laser oscillator 11.
The laser scanning unit 2 rotates two galvanometer mirrors 21a for scanning in the X-axis direction and for scanning in the Y-axis direction, which reflect the laser light L, with a stepping motor 21b, so that the laser light L is emitted in the X-axis direction and the Y-axis direction. A galvano scanner 21 as an optical scanning means for scanning, and a laser beam L scanned by the galvano scanner 21 is applied to the inside of the work (a predetermined surface from the work surface) such as the surface (working surface) of the work 35 or the interface between the base material and the ITO film. Lens 22 as light collecting means for collecting light at a position offset by a depth.

  The laser oscillator 11 of the laser output section 1 is controlled by the laser driver section 10. Specifically, the laser driver unit 10 controls light emission of the laser oscillator 11 in conjunction with the scanning operation of the galvano scanner 21 of the laser scanning unit 2. As the laser oscillator 11, for example, a pulse fiber laser with a pulse oscillation of 100 [ns] or less, which causes less damage to the base material due to thermal influence, can be used, but another light source may be used.

FIG. 2 is a schematic diagram illustrating a configuration example of the laser oscillator 11 of the present embodiment.
The laser oscillator 11 of the present embodiment is a pulse fiber laser called MOPA (Master Oscillator Power Amplifier). The laser oscillator 11 generates a seed light by oscillating a seed LD 74 with a pulse generator 73 to generate a seed light, and amplifies the laser light L output from the pulse engine unit 70 in a plurality of stages by an optical fiber amplifier. It comprises an output fiber 71 for guiding light, and an output head 72 for emitting a laser beam L as a substantially parallel light beam by a collimating optical system 83 as a parallel light beam forming means. In this embodiment, only the output head unit 72 is provided in the laser output unit 1.

  The pulse engine unit 70 includes a preamplifier having an optical fiber 78, a pump LD 76 and a coupler 77, and a main amplifier having an optical fiber 82, a pump LD 80 and a coupler 81. The optical fiber has a double clad structure in which a core is doped with a rare earth element. The laser light is repeatedly reflected between mirrors installed at the output end and the incident end of the fiber by absorption of the excitation light from the excitation LD 76 to generate laser oscillation. Reach. Reference numeral 75 in FIG. 2 is an isolator that blocks light in the reverse direction, and reference numeral 79 in FIG. 2 is a bandpass filter that removes ASE light.

In the present embodiment, the wavelength of the seed LD 74 is set to 1064 [nm] in the near infrared. However, the material of the work such as 532 [nm] as the second harmonic and 355 [nm] as the third harmonic may be used. A suitable wavelength can be selected accordingly. Incidentally, in the laser oscillator 11 may use a solid laser ₄ laser, YVO causing laser oscillation by irradiating excitation light to a laser medium consisting of yttrium vanadate crystals.

  In the galvano scanner 21 of the laser scanning unit 2, each stepping motor 21 b for rotating each galvanometer mirror 21 a for scanning in the X-axis direction and for scanning in the Y-axis direction is controlled by the galvano scanner control unit 20. The galvano-scanner control unit 20 responds to the line segment element data (line segment start point coordinates and line segment end point coordinates) constituting the processing pattern by tilting the laser beam incident on the reflection surface of the galvanometer mirror 21a with respect to the reflection surface. Each stepping motor 21b is controlled so that the inclination angle of the reflection surface with respect to the optical axis changes in the direction corresponding to the X-axis direction or the direction corresponding to the Y-axis direction. Thus, each galvanomirror 21a can be rotated from the scan start tilt angle to the scan end tilt angle in accordance with the XY coordinates of the start point and end point of the line segment element.

  In this embodiment, as the optical scanning means, both the scanning in the X-axis direction and the scanning in the Y-axis direction are constituted by galvano scanners. However, the present invention is not limited to this, and widely known optical scanning means can be used. Further, the optical scanning unit for scanning in the X-axis direction and the optical scanning unit for scanning in the Y-axis direction may be optical scanning units having different configurations. For example, as shown in FIG. 3, a galvano scanner 21 is used for scanning means for scanning in the Y-axis direction, and a polygon scanner 91 for rotating a polygon mirror 91a by a motor 91b is used for scanning means for scanning in the X-axis direction. Is also good. As shown in FIG. 3, the optical scanning control in the X-axis direction can be performed based on the light receiving timing at which the optical sensor 93 receives the laser beam L reflected by the polygon mirror 91a via the lens 92.

  The laser scanning unit 2 is mounted on a carriage 25 movable in the main scanning direction (X-axis direction). The carriage 25 is mounted on a timing belt 27 that is stretched over a driving pulley 27a and a driven pulley 27b. By driving the stepping motor 26 connected to the drive pulley 27a, the timing belt 27 moves, and the carriage 25 on the timing belt 27 moves along the linear guide 29 (see FIG. 4) extending in the main scanning direction. In the direction (X-axis direction). The position of the carriage 25 in the main scanning direction can be detected based on an output signal (address signal) from the linear encoder 28. The stepping motor 26 is controlled by the main scanning control unit 24.

  In the present embodiment, a moving unit using a timing belt is employed as a moving unit of the carriage 25 on which the laser scanning unit 2 is mounted. However, the moving unit is not limited to this, and may be a linearly movable unit such as a linear stage. Alternatively, a moving means for moving in a two-dimensional direction may be used.

  The work transport unit 3 includes a registration roller pair 32 including a driving roller 32a and a driven roller 32b. The driving roller 32a is driven by a registration motor 31 including a stepping motor via a timing belt 31a. The registration motor 31 is controlled by the sub-scanning control unit 30, and can move the work 35 held between the registration roller pairs 32 to a target feed position in the sub-scanning direction (Y-axis direction). As a result, the processed portion on the workpiece is sequentially fed into the processing region 36 which is the scanning range of the laser beam L emitted from the laser scanning unit 2.

  Specifically, the work transport unit 3 includes monitor cameras 33 and 34 that capture images of alignment marks 37 (reference positions) formed on the work surface near both ends of the work 35 in the main scanning direction. The sub-scanning control unit 30 sequentially captures the image data output from the monitor cameras 33 and 34 while step-feeding the work 35 in the work feed direction B (sub-scanning direction) by a small amount by the registration motor 31. Then, the alignment mark 37 is detected by a pattern matching process or the like, the amount of work movement to the target feed position is calculated, and the registration motor 31 is controlled based on the calculation result to set the position of the work 35 in the sub-scanning direction. Move to the feed position.

FIG. 4 is a schematic diagram showing an example of the configuration of the work transfer section 3, and FIG. 5 is a plan view thereof.
The work 35 in the present embodiment is held in a roll supply unit 50 as an unwinding holding unit in a state of being wound on a supply spool shaft 51 in a roll shape. The pair of registration rollers 32 are sandwiched between the nips of the pair of registration rollers 32 and are set on a processing table 53 as a processing table member by driving the registration roller pair 32. The supply spool shaft 51 is connected to an unwinding motor 56 composed of a DC motor via an unwinding powder clutch 59 as a transmission torque changing unit, and is driven to rotate in a direction to unwind the work 35 by the driving force of the unwinding motor 56. It is configured to be possible.

  The processing table 53 is formed of a light transmitting member that transmits the laser light L. Thereby, damage to the processing table 53 by the laser beam L can be suppressed, and the life of the processing table 53 can be extended.

  In addition, countless pores (suction holes) are formed on the surface (table surface) of the processing table 53, and the suction pump 58 sucks air in the hollow portion 57 formed on the back surface of the processing table 53, so that the work The workpiece 35 is attracted to the surface of the processing table 53 to ensure the flatness of the workpiece 35 in the processing area 36. In the present embodiment, when processing is performed on the work 35 that is attracted onto the surface of the processing table 53, the work is prevented from moving by the electromagnetic brake as a braking means so that the work 35 is not moved by the pair of registration rollers 32. The registration brake pair 38 prevents the registration roller pair 32 from rotating. Thus, the work 35 can be inhibited from moving by the registration roller pair 32 during the processing, and stable processing can be realized.

  The work after processing is wound in a roll shape on a winding spool shaft 67 and held by a roll discharging unit 60 as a winding holding unit. The take-up spool shaft 67 is connected to a take-up motor 62 composed of a DC motor via a take-up powder clutch 63 as a transmission torque changing means, and rotates in a direction in which the work 35 is taken up by the driving force of the take-up motor 62. It is configured to be drivable.

  In the present embodiment, the work after processing is configured to be wound around the take-up spool shaft 67 after removing the processing dust adhering to the surface with a pair of clean rollers 64. The processing dust adsorbed on the clean roller 64 is transferred to the adhesive roller 65 and collected. Further, in order to protect the work surface after processing from scratches and the like, a laminated film is stuck on the front and back of the processed work 35 and then wound around the take-up spool shaft 67. The laminate film is unwound from the laminating roll 66 and wound around the take-up spool shaft 67 together with the processed workpiece.

  In the present embodiment, a roll-to-roll method is used in which the work after processing is wound up in a roll shape. However, as shown in FIG. 6, a roll-to-sheet method in which the work after processing is discharged as a cut sheet is adopted. Is also good. In the configuration illustrated in FIG. 6, the processed workpiece is cut into predetermined sizes by moving the cutter 54 in the main scanning direction, and is discharged to the tray 55.

  The control unit 4 includes a control PC 40 that manages and controls the entire laser patterning apparatus. The control PC 40 is connected to the laser driver unit 10, the galvano scanner control unit 20, the main scanning control unit 24, the sub-scanning control unit 30, and the like, and manages respective statuses and controls a processing sequence.

  The beam expander 12 of the laser output unit 1 is composed of a plurality of lenses, and the position of the lens 39 closest to the fθ lens 22 of the laser scanning unit 2 on the laser optical path can be moved in the optical axis direction of the laser light. It is configured. By moving the position of the lens 39, fine adjustments can be made so that the condensing distances when the carriage on which the laser scanning unit 2 is mounted is stopped at each stop target position in the main scanning direction will be uniform, as described later. That is, the beam expander 12 has a focusing function of finely adjusting the laser beam L incident on the galvano scanner 21 so as to be a parallel light beam.

In the present embodiment, each of the maximum lengths L in the X-axis direction and the Y-axis direction of the processing area 36, which is the scanning range of the laser light L on the work 35, is defined by the respective galvanomirrors 21a, where f is the focal length of the fθ lens 22. Is obtained from the following equation (1) using the maximum inclination angle θ (for example, ± 20 °).
L = f × θ (1)
As shown in Expression (1), the width of the processing area 36 is limited by the scanning range of the galvano scanner 21 (the maximum tilt angle of the galvanometer mirror 21a). Here, as the scanning range of the galvano scanner 21 increases, it becomes more difficult to appropriately collect light on the workpiece 35, and thus it becomes more difficult to maintain the uniformity of processing in the processing area 36. Therefore, there is a limit in increasing the scanning range of the galvano scanner 21, that is, the maximum tilt angle θ of the galvanometer mirror 21a. Therefore, there is a limit to increasing the scanning range of the galvano scanner 21 (the maximum tilt angle θ of the galvanometer mirror 21a) to increase the width of the processing area 36.

  On the other hand, according to the equation (1), if the focal length f of the fθ lens 22 is increased, the area of the processing area 36 can be increased. However, the longer the focal length f, the more it is necessary to arrange the fθ lens 22 away from the work 35, which causes a problem that the laser patterning apparatus becomes large.

In addition, each processing resolution σ in the X-axis direction and the Y-axis direction can be obtained from the following equation (2), where P is the number of pulses of the stepping motor 21b.
σ = f × (2π / P) (2)
As shown in this equation (2), the longer the focal length f of the fθ lens 22, the lower the processing resolution σ. Therefore, there is a trade-off between realizing high-definition processing with a high processing resolution σ and realizing a wider processing area. Therefore, in consideration of the processing resolution σ, there is a limit in increasing the focal length f and increasing the width of the processing region 36.

  On the other hand, a method of providing a moving mechanism that not only moves the work 35 in the sub-scanning direction (Y-axis direction) but also moves it in the main scanning direction (X-axis direction) by the work transfer unit 3 is also conceivable. According to this method, it is possible to perform the processing on each of the processed portions while sequentially replacing the processed portions of the work 35 with respect to the processed region 36 in the main scanning direction. Processing can be performed on a work having a length in the direction.

  However, providing a moving mechanism that moves the work not only in the sub-scanning direction (Y-axis direction) but also in the main scanning direction (X-axis direction) causes an increase in the size of the laser patterning apparatus. In particular, in the present embodiment, since the work length in the sub-scanning direction is large enough to exceed the processing area 36, such a large work 35 is further moved in the main scanning direction (X-axis direction). In addition, a large moving mechanism is required in order to move it. In addition, since such a large work 35 has a large weight, it has a problem that it has a large inertial force, it is difficult to move at high speed, and the productivity is low.

  Thus, in the present embodiment, a configuration is employed in which the work 35 is not moved in the main scanning direction (X-axis direction) but the scanning range of the laser light L is moved in the main scanning direction. Specifically, the laser scanning unit 2 is mounted on the carriage 25, and the laser scanning unit 2 is configured to be movable in the main scanning direction. Thus, the range in which the laser beam L scanned by the galvano scanner 21 scans the surface of the work, that is, the processing region 36 is moved in the main scanning direction (X-axis direction) without moving the work 35 in the main scanning direction (X-axis direction). Relative movement. Accordingly, the processing can be performed by sequentially moving the processed portion of the work 35 to the processing area 36, and even if the width of the processing area 36 in the main scanning direction (X-axis direction) is small, the processing area 36 is larger than the width. Processing can be performed on the work 35.

  As a result, it is possible to perform the processing on the large workpiece 35 exceeding the processing area 36 without forcibly expanding the processing area 36, thereby maintaining a high processing resolution σ. Processing can be realized. Moreover, in the present embodiment, the load mounted on the carriage 25 as a moving unit that moves in the main scanning direction (X-axis direction) is substantially only the laser scanning unit 2, that is, the galvano scanner 21 and the fθ Only the lens 22 is provided. Since the weight of the load is much lighter than that of the work 35, the carriage 25 can be moved at a high speed in the main scanning direction, and high productivity can be obtained.

  It should be noted that the mounted object mounted on the carriage 25 only needs to have at least the fθ lens 22 as a light collecting means. Therefore, the lightest configuration is a configuration in which only the fθ lens 22 is mounted on the carriage 25. On the other hand, other components may be mounted on the carriage 25 together with the fθ lens 22 as long as the components are lightweight for the work 35. For example, an optical scanning unit such as the galvano scanner 21 may be mounted on the carriage as in this embodiment, or a part or all of the laser output unit 1 may be mounted on the carriage.

  In this embodiment, the optical path of the laser light L incident on the carriage 25 moving in the main scanning direction, that is, the optical path of the laser light L output from the laser output unit 1 is parallel to the X-axis direction. Therefore, as shown in FIG. 7, the laser beam L output from the laser output unit 1 is incident from the same position on the carriage 25 regardless of the position of the carriage 25 in the main scanning direction (X-axis direction). Therefore, even if the carriage 25 moves in the main scanning direction (X-axis direction), the optical path of the laser beam L after entering the carriage 25 is the same, and the processing regions 36-1 and 36-2 different from each other in the main scanning direction. , The same processing can be realized.

  However, in the present embodiment, when the carriage 25 moves, the optical path length of the laser light L before entering the carriage 25 changes. Therefore, when the laser light L incident on the carriage 25 is not parallel-converged, the focal point of the laser light L applied to the work 35 changes depending on the position of the carriage 25 in the main scanning direction, and the laser light L on the work 35 The processing accuracy is affected, for example, the spot diameter changes.

  In the present embodiment, the laser light L output from the laser oscillator 11 is a substantially parallel light beam, is emitted from the beam expander 12 via the two reflection mirrors 14 and 15, is reflected by the reflection mirror 16, and is output by the laser mirror. The laser beam L output from the unit 1 is also a substantially parallel light beam. Therefore, if the laser beam L incident on the carriage 25 is substantially parallel and converged, the focal point of the laser beam L applied to the work 35 substantially changes even if the carriage 25 moves and the position in the main scanning direction changes. Therefore, there is no influence such as a change in the spot diameter of the laser beam L on the work 35. Therefore, even when processing is performed in different processing areas 36-1 and 36-2 in the main scanning direction, the processing can be performed with the same processing accuracy without performing operations such as focus adjustment, and higher production can be achieved. Nature can be realized.

  However, if the entire laser output unit 1 is mounted on the carriage 25 in addition to the laser scanning unit 2, that is, if the light source itself such as the laser oscillator 11 is mounted on the carriage 25, the carriage 25 Does not change the focal point of the laser beam L applied to the work 35. However, it is necessary to consider that it becomes difficult to realize high-speed movement of the carriage 25 because the weight of the load on the carriage 25 increases.

FIG. 8 is a flowchart illustrating an example of a patterning process performed by the laser patterning device of the present embodiment.
First, the control PC 40 executes a work feed process of moving the work 35 in the work transport direction B along the sub-scanning direction and stopping at the target feed position (S2). Before the work feed process, the suction pump is used. The drive of 58 is started (S1), and the work 35 is brought into a state of being sucked on the processing table 53. Therefore, in the present embodiment, the work feeding process is performed on the work 35 that is sucked on the processing table 53 by the suction force of the suction pump 58. When the work 35 is stopped at the target feed position by the work feed processing, the work 35 is held on the processing table 53 by the suction force of the suction pump 58, so that the position of the work 35 is held so as not to move easily. Is done. A specific description of the work feeding process will be described later.

  After that, the control PC 40 sets the processed part number N for specifying the processed part on the work 35 to zero (S3), and then controls the stepping motor 26 by the main scanning control unit 24 to shift to the standby position. The carriage 25 that is waiting is moved in the carriage feed direction A (direction away from the laser output unit 1) along the main scanning direction, and the carriage position to be stopped at a predetermined home position is initialized (S4).

  In the initialization process, the control PC 40 acquires the position of the carriage 25 stopped in the home position in the main scanning direction based on the address signal from the linear encoder 28. Specifically, based on the address signal from the linear encoder 28, a difference between the home position managed by the control PC 40 and the position of the carriage 25 actually stopped is detected, and this difference is set as an offset value, and the subsequent carriage 25 For the main scanning direction position control.

  Next, the control PC 40 sets the processed part number N of the work 35 to 1 (S5). After that, the control PC 40 controls the stepping motor 26 by the main scanning control unit 24 to move the carriage 25 located at the home position in the carriage feed direction A, and moves the carriage 25 on the workpiece 35 on which processing is first performed. The part to be processed N = 1 is stopped at the first processing position for processing (S6).

  Here, in the present embodiment, in order to realize a high processing resolution with a position accuracy of 5 μm or less, the laser beam scanning range on the work scanned by the galvano scanner 21, that is, the size of the processing area 36 is set to 150 [mm] × 150 [mm]. mm]. Therefore, when processing is performed on a workpiece 35 whose processing area is, for example, 450 [mm] (main scanning direction) × 600 [mm] (sub-scanning direction), the processing area is moved in the main scanning direction by three times. It is divided into pieces and divided into four pieces in the sub-scanning direction. Then, by sequentially processing these 12 pieces (the processed portions N = 1 to 12), the entire processed region is processed.

  That is, the carriage 25 is sequentially moved from the home position to the first processing position, the second processing position, and the third processing position, and at each processing position, the corresponding processing target portion on the work 35 is processed. When the processing at the processing position is completed, the operation of returning to the home position is repeated (S5 to S8). On the other hand, in the sub-scanning direction, after the carriage 25 is moved to the third processing position and the processing is completed (Yes in S8), the control PC 40 is not activated until the next processing at the first processing position is started. Similarly to the processing step S2, a work feeding process of moving and holding the work 35 in the work transfer direction B by 150 [mm] is executed (S10). Then, again, the carriage 25 is sequentially moved to the first processing position, the second processing position, and the third processing position to perform the processing (S4 to S8). When such an operation is repeated four times (Yes in S9), the processing of the entire processing area of 450 [mm] × 600 [mm] is completed.

  In the case where the roll-shaped workpiece 35 is partially unwound and processed as in this embodiment, the processing is performed by sequentially moving the carriage 25 to the first processing position, the second processing position, and the third processing position. After that, the operation of moving the work 35 in the work transfer direction B by 150 [mm] is repeatedly performed up to the roll end (S2 to S11). Then, when the roll end is reached (Yes in S11), the driving of the suction pump 58 is stopped (S12), and the process is terminated.

Next, a work feeding process for moving the work 35 in the sub-scanning direction will be described.
FIG. 9 is a flowchart illustrating an example of the flow of the work feeding process according to the present embodiment.
In the work feeding process of the present embodiment, the control PC 40 first energizes the registration motor 31 composed of a stepping motor to make it excited (S21), and then starts driving the winding motor 62 (S22). At this time, the winding powder clutch 63 is energized at a predetermined current value and is controlled so as to obtain a target transmission torque. Therefore, the winding spool shaft 67 is rotationally driven by the driving torque of the winding motor 62. Then, the work 35 is wound on the winding spool shaft 67. By this work winding operation, the work 35 is pulled out from the roll supply unit 50 that holds the work 35 in a roll shape, and the work 35 on the processing table 53 is transported in the sub-scanning direction.

Here, in the present embodiment, as described above, the suction pump 58 has already been driven before the work feeding processing, and the work 35 is in a state of being sucked on the processing table 53. For this reason, the value of the current flowing through the winding powder clutch 63 is set such that a transmission torque capable of securing a transport force capable of transporting the work 35 in the sub-scanning direction against the transport load due to the suction is obtained.
Further, during the work take-up operation by the take-up motor 62, the registration brake 38 is OFF, and the load of the registration motor 31 in the excited state becomes the transport load. Therefore, the value of the current flowing through the winding powder clutch 63 is set so as to obtain a transmission torque capable of securing a transport force capable of transporting the work 35 even when the transport load of the registration motor 31 is present.

  Also, during the work take-up operation by the take-up motor 62, the unwinding powder clutch 59 is also energized with a predetermined current value, is controlled so as to obtain a target transmission torque, and the unwinding motor 56 is also driven. are doing. When the work 35 is unwound from the roll supply unit 50 only by the work take-up operation by the take-up motor 62, the transfer load generated in the roll supply unit 50 acts on the work 35 between the roll supply unit 50 and the roll discharge unit 60. This is because the applied tension may be excessive. However, the work unwinding operation by the unwinding motor 56 is not necessarily performed as long as the tension acting on the work 35 does not become excessive even if there is a transport load generated in the roll supply unit 50.

  When unwinding the work 35 from the roll supply unit 50 while performing not only the work unwinding operation by the winding motor 62 but also the work unwinding operation by the unwinding motor 56, the rotation speed of the unwinding motor 56 and the winding motor 62 Is lower than the speed at which the work 35 is unwound from the roll supply unit 50 by the work unwinding operation by the unwinding motor 56, than the speed at which the work 35 is wound onto the roll discharge unit 60 by the work winding operation by the winding motor 62. Is set slightly faster. This prevents the work 35 between the roll supply unit 50 and the roll discharge unit 60 from becoming loose in the sub-scanning direction. At this time, the current value flowing through the unwinding powder clutch 59 and the winding powder clutch 63 so that excessive tension in the sub-scanning direction is not generated in the work 35 between the roll supply unit 50 and the roll discharge unit 60. Is set as appropriate. According to the present embodiment, as a result of maintaining the tension acting on the work 35 at an appropriate tension, it is possible to suppress deterioration in machining accuracy due to looseness or elongation of the work.

  In this way, when the work 35 is unwound from the roll supply unit 50 and the work 35 on the processing table 53 is transported by the specified amount in the sub-scanning direction, the registration brake 38 is turned on (S23), and the registration roller pair 32 is moved. Disable rotation. As a result, the work 35 held between the pair of registration rollers 32 is prohibited from moving in the sub-scanning direction, and the alignment mark 37 formed on the surface of the work 35 is positioned within the imaging area of the monitor cameras 33 and 34. I do. At this time, by controlling the registration brake 38 to stop the transfer of the work 35, the transfer of the work 35 can be immediately and reliably stopped, and the transfer stop position of the work 35 can be accurately controlled.

  When the work 35 stops, the control PC 40 detects the alignment mark 37 on the work 35 from the image data of the monitor cameras 33 and 34 that image the work 35 on the processing table 53 (S24). Then, the amount of movement of the work to the target feed position is calculated from the detection result of the alignment mark 37 (S25), and the sub-scanning control unit 30 controls the registration motor 31 based on the calculation result (S26). At this time, the registration brake 38 is turned off. As a result, the work 35 is conveyed to the target feed position by the registration roller pair 32. When the work 35 is conveyed by the calculated work movement amount (S27), the registration brake 38 is turned on (S28), and the work 35 is conveyed. To stop. As a result, the workpiece 35 is positioned with high accuracy at the target feed position. After the conveyance of the work 35 is stopped, both the registration motor 31 and the winding motor 62 are stopped (S29, S30). In addition, the unwinding motor 56 is stopped as necessary.

  Here, in the present embodiment, the position of the work 35 is detected by detecting the alignment mark 37 on the work 35 from the image data of the monitor cameras 33 and 34. In such position detection, if the position of the work 35 in the Z-axis direction, that is, the position of the work 35 in the normal direction of the surface of the processing table 53 changes, a position detection error of the work 35 occurs, and the accurate position of the work 35 is changed. Cannot be detected. In this case, an error occurs in the calculation result of the work moving amount to the target feed position, and the work 35 cannot be positioned with high accuracy at the target feed position. In particular, as in the present embodiment, since the configuration is such that the workpiece is unwound from a roll and is unwound from the work, the work 35 on the processing table 53 remains bent or bent when it is wound into a roll. The position of the work 35 in the Z-axis direction is likely to change.

  In the present embodiment, the suction pump 58 has already been driven before the workpiece feeding process, and the workpiece 35 has been sucked onto the processing table 53. Therefore, even when the alignment marks 37 on the work 35 are imaged by the monitor cameras 33 and 34, the work 35 is attracted to the processing table 53, and the work 35 in the imaging area always has flatness. Secured. Accordingly, since the position of the work 35 in the Z-axis direction in the imaging region does not change, the accurate position of the work 35 can be detected based on the image data of the monitor cameras 33 and 34, and the work 35 can be accurately moved to the target feed position. Can be positioned.

  In the present embodiment, the position of the work 35 is detected from the image data of the monitor cameras 33 and 34, but the position of the work 35 may be detected by other means. For example, a means for detecting a mark on the work with an electric, magnetic or optical sensor may be used. Even when the position of the work 35 is detected by using other means, a position detection error may occur due to a change in the position of the work 35 in the Z axis direction. It is effective to ensure the nature.

FIG. 10 is an explanatory diagram showing a processing order in a case where a processing area on a work is divided into 12 pieces and processing is sequentially performed.
In FIG. 10, the numbers shown in the respective processed parts 36-1 to 36-24 indicate the processing order.

  As long as the portions to be processed on the work are independent from each other, the respective processing positions of the carriage 25 may be positions where the respective processing regions 36 are separated from each other. However, when the processed portions are not independent, but are processed by a plurality of processed portions, the processing positions of the carriage 25 are adjusted such that the respective processing regions 36 are adjacent or partially overlap. It is necessary to be a position. In particular, when performing patterning processing such that a wiring pattern is made continuous between the processed parts as in the present embodiment, it is possible to avoid that a wiring pattern to be continuous between the processed parts is shifted and becomes discontinuous. Will be needed.

  In the present embodiment, the processing position in the main scanning direction shifts each time the carriage 25 stops due to a so-called pitching error, which is a posture error about an axis orthogonal to the moving direction (main scanning direction) due to the reciprocating movement of the carriage 25. There is. In addition, the position of the work 35 in the sub-scanning direction may have an error. If processing is performed with such an error occurring, there is a possibility that the wiring pattern that should be continuous between the processed portions is shifted and becomes discontinuous.

  For this reason, in the present embodiment, an overlap region of about several tens [μm] is provided between twelve pieces (processed portions), and each piece (processed portion) is overlapped so that adjacent processed portions partially overlap each other. Processing part) is set. By providing such an overlap region, it is possible to prevent the wiring pattern from becoming discontinuous even if some error occurs.

  Further, in the present embodiment, as shown in FIG. 1, a monitor camera 23 is provided on the carriage 25 so that a pattern after processing in an overlap region between pieces (processed portions) can be observed. In the present embodiment, the monitor camera 23 captures an image of the processed pattern in the overlap region, compares the captured image data with the target processed data, and detects a deviation of the processed pattern from the target processed position. Using this detection result, the XY coordinate offset value when processing the processed portion including the pattern to be continued from the processed pattern is finely adjusted. Such fine adjustment corrects not only the stop target position shift of the carriage 25 but also the processing position shift due to the attitude error of the carriage 25, and high processing accuracy can be realized.

FIG. 11 is an explanatory diagram illustrating an example of a wiring pattern that should be continuous between pieces (processed portions).
FIG. 11 illustrates an example of a wiring pattern that extends over each piece of the processed part number N = 1, N = 2, and N = 4. A hatched area in FIG. 10 is an overlap area, a broken line in FIG. 11 indicates an ideal processing position based on the target processing data, and a solid line in FIG. This is the actual wiring pattern after processing the processed part.

  As shown in FIG. 11, pieces N = 2 adjacent to the piece N = 1 in the main scanning direction (X-axis direction) and pieces N = 3 adjacent to the piece N = 1 in the main scanning direction (X-axis direction). Sets the offset of the Y-axis coordinate and corrects the position of the workpiece 35 in the sub-scanning direction. On the other hand, with respect to the piece N = 4 adjacent to the piece N = 1 in the sub-scanning direction (Y-axis direction) and the pieces N = 7 and 10 arranged next to the piece N = 1, an offset of the X-axis coordinate is set. Correct the position in the scanning direction. These offset values are written in the memory of the control PC 40 in advance, read out during the processing of each piece, and offset the coordinate origin of the processing data.

  It should be noted that pieces arranged in the main scanning direction, in other words, pieces processed by the same carriage feed have straightness due to the straightness of the linear guide 29, so that the offset of the Y-axis coordinate is uniform. On the other hand, as for the pieces arranged in the sub-scanning direction, since the displacement occurs due to the attitude of the carriage 25 as described above, the pattern after processing the pieces adjacent to each other in the sub-scanning direction is imaged by the monitor camera 23, and the captured image is obtained. It is preferable to update the offset of the X-axis coordinates written in the memory to the latest value with the offset value newly obtained based on.

  As described above, in the present embodiment, the monitor camera 23 on the carriage 25 captures an image of the processed pattern (reference position) in the overlap region between the pieces (processed portions), and the image of the processed pattern with respect to the target processing position is taken. Detects deviation. Therefore, if the position of the work 35 in the Z-axis direction in the imaging area of the monitor camera 23, that is, the position of the work 35 in the normal direction of the surface of the processing table 53 changes, the position of the processed pattern cannot be accurately detected. In this case, an appropriate offset value for correcting the position of the work 35 in the sub-scanning direction or the main scanning direction cannot be set, and it is difficult to achieve high processing accuracy. In particular, as in the present embodiment, when the work 35 on the processing table 53 still bends or bends when it is wound in a roll shape, the position of the work 35 in the Z-axis direction is likely to change, resulting in high processing. It is more difficult to achieve accuracy.

  In the present embodiment, even when the monitor camera 23 captures an image of the processed pattern in the overlap area, the work 35 is in a state of being sucked on the processing table 53, and the work 35 in the imaging area is always flat. Is ensured. Accordingly, since the position of the work 35 in the Z-axis direction in the imaging region does not change, the accurate position of the processed pattern can be detected based on the image data of the monitor camera 23, and high processing accuracy can be realized.

  In the description of the present embodiment, when patterning a portion to be processed on the work 35 by scanning the laser light L, the processing is performed with the work 35 and the carriage 25 stopped. However, the processing can be performed on the workpiece 35 moving in the sub-scanning direction, and the processing can be performed on the workpiece 35 while moving the carriage 25 in the main scanning direction. .

  When the processing is performed on the workpiece 35 moving in the sub-scanning direction, if the position of the workpiece 35 in the Z-axis direction in the processing area changes, the focal position of the processing light with respect to the processing target fluctuates, and the processing is stabilized. Processing accuracy cannot be obtained. The work transfer unit 3 described in the present embodiment can realize movement of the work 35 in the sub-scanning direction even when the work 35 is sucked on the processing table 53 by the suction pump. Therefore, even when processing is performed on the work 35 moving in the sub-scanning direction, the processing can be performed without changing the position of the work 35 in the Z-axis direction in the processing area, and stable processing accuracy can be achieved. You can't get it.

  Further, in the present embodiment, in order to stably adsorb the work 35 on the processing table 53, the suction of the suction pump 58 according to the type of the work 35 (thickness, material, strength, etc.). Preferably, the force is controlled. For example, as the work 35 is thicker or stiffer, a larger suction force is required to stably adsorb it on the processing table 53. However, if the suction force is excessive, flatness of the thin work 35 or the like may not be ensured. Therefore, it is preferable to control the suction pump 58 so as to obtain an appropriate suction force according to the type of the work 35.

  On the other hand, when the suction force of the suction pump 58 changes, the transfer load when transferring the work 35 also changes, so that the work 35 can be stably transferred and the tension required for maintaining the work 35 in an appropriate range. The torque changes. Therefore, when controlling the suction force of the suction pump 58, it is preferable to control the current values of the unwinding powder clutch 59 and the winding powder clutch 63 accordingly.

  Further, as the work 35 is transported, the roll diameter of the work 35 held by the roll supply unit 50 decreases and the roll diameter of the work 35 held by the roll discharge unit 60 increases. When the roll diameter changes, the load during the transfer of the work 35 changes, so that the torque required to maintain the tension of the work 35 in an appropriate range changes. Therefore, the unwinding powder clutch 59 and the winding powder clutch 63 are changed according to the change in the roll diameter of the work 35 held by the roll supply unit 50 and the roll diameter of the work 35 held by the roll discharge unit 60. It is preferable to control the current value.

What has been described above is merely an example, and a specific effect is obtained for each of the following aspects.
(Aspect A)
A moving means such as a work transfer unit 3 for moving a processing target such as a work 35 mounted on a table surface of a processing table member such as a processing table 53; and a moving unit mounted on the table surface of the processing table member. In a light processing apparatus such as a laser patterning apparatus having a laser output unit 1 and a laser irradiation unit such as a laser scanning unit 2 for irradiating a processing light such as a laser beam L to a processing target portion, Suction means such as a cavity 57 and a suction pump 58 for sucking the object to be processed onto the base surface by suction force from a suction hole such as a formed pore, and a moving object during movement of the object by the moving means. And a suction control means such as a control PC for controlling the suction means so as to cause the workpiece to be sucked to the table surface during a predetermined suction period.
According to this aspect, during the predetermined suction period during the movement of the processing target by the moving means, the processing target can be sucked on the table surface of the processing base member. Therefore, in the optical processing apparatus that performs processing by moving the processing target, the flatness of the processing target can be maintained.
Further, it is also possible to solve various problems caused by not holding the processing object on the processing base member while the processing object is moving.
The various problems include, for example, the following problems.
In order to position the workpiece with high accuracy in the direction (the X-axis direction and the Y-axis direction in the present embodiment) orthogonal to the optical axis direction of the processing light applied to the workpiece, with respect to the processing area. In some cases, the processing target is moved based on the result of detecting the position of the processing target, and the processing target is positioned at a target position. In this case, it is desirable that the position for detecting the position of the processing target be as close as possible to the processing region. The reason for this is that, as the position where the position of the object to be processed is detected is away from the processing area, the positioning error caused by expansion and contraction, bending, and the like of the processing object generated between the point and the processing area increases. Therefore, it is preferable to detect the position of the processing target on the processing base member near the processing area. However, even in this case, if the processing object is displaced in the optical axis direction of the processing light applied to the processing object, an error occurs in position detection, and the positioning accuracy of the processing object deteriorates. Therefore, when the position of the processing target is detected and moved on the processing base member close to the processing area and the processing target is positioned at the target position, the processing target is positioned on the processing base member even during the movement. Otherwise, there arises a problem that the positioning accuracy of the workpiece deteriorates.
Further, in an optical processing apparatus that performs a processing process while moving a processing target, stable processing accuracy cannot be obtained unless the processing target is adsorbed on a processing base member even during the movement. Problems arise.
Further, in an optical processing apparatus that sends out a processing target object from a roll of the processing target object wound in a roll shape and conveys the processing target region to a processing region, the conveying direction of the processing target object is, as in the roll-to-sheet method illustrated in FIG. There is a case where the workpiece is transported by a force for sending out the workpiece without substantially applying a transporting force to the distal end side. In this case, the workpiece portion sent out from the roll remains bent or bent when it is wound in a roll shape, which tends to cause abnormal transport of the workpiece. For this reason, unless the processing target is adsorbed on the processing base member even during the transfer of the processing target, there is a problem that the processing target is likely to be transported abnormally due to bending or bending of the processing target.
This embodiment can also solve such various problems.

(Aspect B)
In the aspect A, position detecting means such as monitor cameras 23, 33, and 34 for detecting a position of a processing target portion placed on the table surface in a direction parallel to the table surface of the processing table member; It has a sub-scanning control unit 30 for controlling the moving unit based on the detection result of the detecting unit, and a moving control unit such as the control PC 40.
According to this, among the problems caused by not holding the processing object on the processing base member even during the movement of the processing object, there is a problem that the accuracy of the movement control of the processing object is deteriorated. Can be solved.

(Aspect C)
In the aspect B, the position detecting means captures an image of a reference position such as an alignment mark 37 or a pattern after processing of a processing target portion placed on the platform by an image capturing means such as the monitor cameras 23, 33, and 34. Then, the position of the processing object portion is detected from the obtained captured image data.
According to this, the position of the processing target can be detected with high accuracy.

(Aspect D)
In any one of Aspects A to C, the suction control means performs control for changing a magnitude of a suction force by the suction means.
If the type (thickness, material, stiffness, etc.) of the processing target changes, the suction force required to stably attract the processing target onto the processing base member changes. According to this aspect, even if the type (thickness, material, stiffness, etc.) of the processing target changes, the processing target can be stably adsorbed on the processing base member.

(Aspect E)
In any one of Aspects A to D, the moving means may include an unwinding motor that conveys the workpiece so that a portion to be processed of the workpiece sequentially moves on a table surface of the processing table member. It is characterized by including conveying means such as 56 and a winding motor 62.
According to this, when the workpiece is being conveyed so that the portion to be processed of the workpiece moves sequentially on the table surface of the workpiece base member, the workpiece is not adsorbed on the workpiece base member. Can be solved.

(Aspect F)
In the above aspect E, the transporting means includes an unwinding and holding unit such as a roll supply unit 50 that holds the processing object in a rolled state, and a roll-shaped processing object held by the unwinding and holding unit. First drive means such as an unwinding motor 56 for rotating an object in an unwinding direction, an unwinding powder clutch 59, and a processing object unwound from the unwinding holding portion and passing over the table surface of the processing table member A winding and holding unit such as a roll discharging unit 60 that holds an object portion in a rolled state; a winding motor 62 that rotates and drives a workpiece to be wound by the winding and holding unit in a winding direction; It is characterized by including a second driving means such as a take-off powder clutch 63 and a driving control means such as a sub-scanning control unit 30 for controlling the first driving means and the second driving means.
According to this, since the processing object before and after the processing can be held in a roll shape, the installation space of the optical processing apparatus including the processing object before and after the processing can be saved.

(Aspect G)
In the aspect F, at least one of the first driving unit and the second driving unit is configured to change a transmission torque of an unwinding powder clutch 59 or a winding powder clutch 63 that can change a transmission torque. Means, and the drive control means controls the transmission torque changing means so that the tension of the workpiece between the unwinding holding section and the winding holding section is maintained in a target range. It is characterized by the following.
According to this, it is possible to stably maintain the tension of the workpiece between the unwinding holding unit and the winding holding unit within the target range, suppress bending and elongation of the workpiece, and achieve stable operation. Processing accuracy can be realized.

(Aspect H)
In the aspect G, the drive control means controls the transmission torque changing means in accordance with a roll diameter of a roll-shaped workpiece rotated by the at least one drive means.
The roll diameter of the workpiece held by the unwinding holding unit or the winding holding unit changes as the workpiece is transported. When the roll diameter changes, the load during the transfer of the processing object changes, so that the torque required to maintain the tension of the processing object in an appropriate range changes. According to this aspect, by controlling the transmission torque changing means in accordance with the roll diameter of the workpiece held by the take-out holding unit or the winding holding unit, the tension of the workpiece is changed even when the roll diameter changes. It is possible to maintain an appropriate range. Therefore, the bending and elongation of the processing target can be suppressed, and stable processing accuracy can be realized.

(Aspect I)
In the aspect G or H, the suction control means performs control for changing the magnitude of the suction force by the suction means, and the drive control means performs control in accordance with the magnitude of the suction force by the suction means. The transmission torque changing means is controlled.
When the magnitude of the suction force by the suction means changes, the transport load when transporting the workpiece also changes, so that the workpiece is transported stably and the tension of the workpiece is set within an appropriate range. The torque required to achieve maintenance will vary. According to this aspect, by controlling the transmission torque changing means in accordance with the magnitude of the suction force by the suction means, even if the magnitude of the suction force by the suction means changes, the tension of the workpiece is set within an appropriate range. It is possible to maintain. Therefore, the bending and elongation of the processing target can be suppressed, and stable processing accuracy can be realized.

(Aspect J)
In any one of the modes FI to I, the suction control unit may cause the processing object to be suctioned to the table surface during the light irradiation period in which the processing object is irradiated with the processing light by the light irradiation unit. The suction means is controlled as described above, and the drive control means stops the rotation drive of the workpiece by the first drive means and the second drive means during the light irradiation period.
According to this, it is possible to prevent the processing target from being moved by the first driving unit or the second driving unit during the light irradiation period in which the processing target is irradiated with the processing light (during the processing), Stable processing accuracy can be realized.

(Aspect K)
In any one of Aspects A to J, the processing base member is formed of a light transmitting member that transmits the processing light.
According to this, damage to the processing base member due to the processing light can be suppressed, and the life of the processing base member can be extended.

DESCRIPTION OF SYMBOLS 1 Laser output part 2 Laser scanning part 3 Work conveyance part 4 Control part 10 Laser driver part 20 Galvano scanner control part 21 Galvano scanner 22 fθ lens 23 Monitor camera 24 Main scanning control part 25 Carriage 26 Stepping motor 28 Linear encoder 29 Linear guide 30 Sub-scanning control unit 31 Registration motor 32 Registration roller pair 33, 34 Monitor camera 35 Workpiece 36 Processing area 37 Alignment mark 38 Registration brake 50 Roll supply unit 51 Supply spool shaft 53 Processing table 56 Unwinding motor 57 Cavity 58 Suction pump 59 winding Outgoing powder clutch 60 Roll discharge unit 62 Winding motor 63 Winding powder clutch 67 Winding spool shaft

JP 2003-205384 A

Claims (10)

As the processed portion of the workpiece on the table surface of the work table member is sequentially moved, a moving means for by applying tension to the workpiece by moving the the pressurized machining object,
A light irradiation unit for two-dimensionally scanning and irradiating a processing light on a processing target portion mounted on a table surface of the processing table member,
Suction means for suctioning the workpiece to the work surface by suction force from suction holes formed in the work surface of the work table member;
Possess a suction control means for controlling said suction means so as to adsorb the processing object on said platform surface to a predetermined suction time during the movement of the workpiece by the moving means,
Wherein in a state in which tension by the moving means in the object is applied, the optical processing apparatus characterized that you adsorbing the processing object on said platform surface. The optical processing device according to claim 1,
Position detection means for detecting the position of the processing target portion placed on the table surface in a direction parallel to the table surface of the processing table member,
An optical processing device comprising: a movement control unit that controls the movement unit based on a detection result of the position detection unit. The optical processing device according to claim 2,
The position detecting means captures an image of a reference position of the processing object portion mounted on the platform by an imaging means, and detects a position of the processing object portion from obtained captured image data. Optical processing equipment. The optical processing device according to any one of claims 1 to 3,
The optical processing apparatus, wherein the suction control unit performs control for changing a magnitude of a suction force by the suction unit. The optical processing device according to any one of claims 1 to 4 ,
The mobile hand stage, first causes the the unwinding holding portion for holding a state wound with the object to roller-shaped, rotatably driven unwinding direction a rolled workpiece held by the holding portion out the winding A driving unit; a winding and holding unit configured to hold a processing target portion unwound from the unwinding and holding unit and passing over the table surface of the processing base member in a roll shape, and the winding and holding unit Optical processing, comprising: a second driving unit that rotationally drives a workpiece to be wound in a winding direction in a winding direction; and a drive control unit that controls the first driving unit and the second driving unit. apparatus. The optical processing device according to claim 5 ,
At least one of the first driving unit and the second driving unit, the driving unit includes a transmission torque changing unit capable of changing the transmission torque,
The drive control unit controls the transmission torque changing unit such that the tension of the workpiece between the unwinding holding unit and the winding holding unit is maintained in a target range. Processing equipment. The optical processing device according to claim 6 ,
The optical processing apparatus according to claim 1, wherein the drive control unit controls the transmission torque changing unit according to a roll diameter of a roll-shaped processing target that is rotationally driven by the at least one drive unit. The optical processing apparatus according to claim 6 or 7,
The suction control means performs control to change the magnitude of the suction force by the suction means,
The optical processing apparatus according to claim 1, wherein the drive control unit controls the transmission torque changing unit according to a magnitude of a suction force of the suction unit. The optical processing apparatus according to any one of claims 5乃optimum 8,
The suction control unit, during a light irradiation period in which the light irradiation unit is irradiating the processing light to the processing target, controls the suction unit to suction the processing target object to the table surface,
The optical processing apparatus, wherein the drive control unit stops the rotation drive of the workpiece by the first drive unit and the second drive unit during the light irradiation period. The optical processing apparatus according to any one of claims 1乃Itaru 9,
The optical processing apparatus, wherein the processing base member is formed of a light transmitting member that transmits the processing light.

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