JP6539769B1 - Floating unit - Google Patents

Abstract

The present invention provides a floating unit which, even when used in a horizontal direction, does not cause positional deviation due to a work and its own weight until immediately before insertion or press-fitting. A floating unit (10) has a fixed block (20) to which a fluid is supplied and a first space (BS1) is formed inside, and a part is accommodated in the first space (BS1) and configured to be slidable in a direction in which a bottom surface extends. An intermediate block 50 in which the second space BS2 is formed inside, and a movable block 80 that is partially accommodated in the second space BS2 and configured to be able to contact and separate from the fixed block. . The fixed block 20 has a stop means 40 for stopping the intermediate block using the pressure of the supplied fluid. When the movable block approaches the fixed block from the outside, the restricting means 40 applies a force in a direction in which the movable block approaches the fixed block and interlocks with the movable block to shut off the pressure of the fluid and cancel the stopped state of the intermediate block. [Selected figure] Figure 1

Description

  The present invention relates to a floating unit, and in particular, a robot for reliably inserting or pressing a work into a hole of a part when inserting or pressing a work such as a shaft member into a hole of a part having a hole formed therein. The present invention relates to a floating unit connected between a hand and a chuck and capable of correcting a deviation between a central axis of a hole of a part and a central axis of a workpiece.

  BACKGROUND ART Conventionally, as a floating unit for reliably inserting or pressing a work into a hole of a part, the one described in Patent Document 1 is known.

  The floating unit described in Patent Document 1 includes a cylindrical main body having a bottom plate. A center boss is disposed inside the main body. Furthermore, an annular retainer disposed around the center boss is disposed to include the ball for slidably supporting the center boss with respect to the bottom plate portion of the main body, and to position the ball in a predetermined positional relationship. Ru. A center spring as a first spring member applying a force in a direction to hold the center boss in a central portion of the retainer, and a second spring member applying a force in a direction holding the center boss in a central portion of the bottom plate portion of the main body Disc spring.

  The floating unit described in Patent Document 1 is also used when inserting or pressing a work in the horizontal direction. Also in this case, the center boss is intended to maintain a position near the center of the floating unit by the action of the first and second spring members.

JP, 2016-203274, A

  However, in the floating unit described in Patent Document 1, the function of maintaining the position of the center boss depends on the elastic force of the first spring member and the second spring member, and the floating unit is in the horizontal direction. In the case of being used for the above, it is inevitable that a slight displacement occurs due to the weight of the work and the weight of the center boss etc. itself.

  In particular, when inserting or press-fitting a precision part, if the positioning error by the robot hand is added to the positional deviation by the floating unit, the positional deviation between the workpiece and the hole exceeds the range of correction by the floating unit. It may also cause

  Therefore, an object of the present invention is to provide a floating unit which is used in the horizontal direction but does not cause positional deviation due to a work and its own weight until immediately before insertion or press-fitting.

  The floating unit according to the present invention is supplied with a fluid having a pressure higher than a predetermined level, a first space is formed inside, and at least a part of the fixed block having the bottom and the first space of the fixed block is accommodated. An intermediate block in which the second space is formed on the inner side, and at least a part of the intermediate block is accommodated in the second space of the intermediate block, and A floating unit comprising a movable block configured to be attachable / detachable and having a top surface, wherein the fixed block has a stopping means for stopping the intermediate block using the pressure of the supplied fluid. When the movable block approaches the fixed block, the restraining means is externally applied with a force that causes the movable block to approach the fixed block. In conjunction with click shut the pressure of the fluid, releasing the restrained state of the intermediate block.

  According to the present invention, when the bottom surface of the fixed block is fixed to the robot hand and the chuck for gripping the workpiece is connected to the top surface of the movable block, the robot hand attempts to insert or press-fit the workpiece in the horizontal direction. Since the fixed block includes the stopping means for stopping the intermediate block by utilizing the pressure of the supplied fluid, the intermediate block in which the fixed block is at least partially housed, and the intermediate block at least partially The movable block to be stored can be restrained at its basic position even if the gravity due to the weight of the work, the intermediate block and the movable block is exerted. Then, at the moment when the workpiece connected to the top face of the movable block comes in contact with the peripheral edge of the hole of the part to be inserted or pressed in, the drag in the direction against the movement of the workpiece moved in the insertion or pressing direction is It acts from the peripheral edge of the hole. Here, the component of the force in the opposite direction to the insertion or press-in direction, of the reaction force, acts on the floating unit as a force directed to move the movable block coupled to the workpiece to the fixed block. The movable block is configured to be at least partially housed in the second space of the intermediate block and capable of coming into and coming out of contact with the fixed block, so the movable block approaches the fixed block by the component of the force. Then, according to the present invention, the stopping means acts on the movable block in a direction in which the movable block approaches the fixed block from the outside, and shuts off the fluid pressure in conjunction with the movable block when the movable block approaches the fixed block. Because the intermediate block is released from the stop condition, the moment the work contacts the peripheral edge of the hole, the stop condition of the intermediate block, the movable block and the work is released with the approach of the movable block to the fixed block. The component of force in the direction perpendicular to the insertion or press-in direction of the reaction force acts on the intermediate block, the movable block and the work, which are configured to be slidable in the direction in which the bottom extends, The workpiece can be inserted or press-fit into the hole by being corrected.

  The floating unit according to the present invention may be configured as follows. That is, the restraining means has an inlet to which a fluid having a constant pressure is supplied from the outside, and an outlet from which the fluid flows out, and the lock cylinder forming the bottom surface, the lock cylinder A piston guide disposed inside with a gap and further forming a fluid space for storing fluid inside, and reciprocably housed in the fluid space of the piston guide toward the bottom surface and the top surface A lock piston which moves toward the top block located on the top side by the pressure of the fluid stored in the fluid space of the piston guide and which stops the middle block; a lock cylinder and the piston guide And a switching valve reciprocable toward the bottom surface and the top surface in the gap, and between the movable block and the switching valve. And a valve shaft that interlocks the movable block and the switching valve, and the piston guide passes the fluid when the fluid flows into the fluid space and the fluid when the fluid flows out from the fluid space. A flow path through which the fluid passes, and the switching valve is connected to the inlet and can be connected to the path of the piston guide, and an outflow path connected to the outlet and can be connected to the path of the piston guide , And connects the inflow path and the path of the piston guide when it is on the top side, and connects the outflow path and the path of the piston guide when it is on the bottom side, and the movable block In accordance with the contact and separation of the fixed block, the valve shaft is interlocked to reciprocate between the top surface side and the bottom surface side to connect the inflow path and the path of the piston guide, the outflow path, and Switching the connection between the piston guide path, and may be configured so.

  According to the present invention, at the moment when the workpiece connected to the top face of the movable block contacts the peripheral edge of the hole of the part to be inserted or pressed, the movement of the workpiece moved in the insertion or pressing direction is resisted When the directional drag is applied from the peripheral edge of the hole, a valve shaft located between the movable block and the switching valve and interlocking the movable block with the switching valve allows the lock cylinder and the piston guide A switching valve, which is disposed in the gap between them and is reciprocable toward the bottom and the top in the gap, moves toward the bottom. The switching valve has an inlet path connected to the inlet and connectable to the path of the piston guide, and an outlet path connected to the outlet and connectable to the path of the piston guide; When located on the surface side, connect the inflow path with the path of the piston guide, and when located on the bottom side, connect the outflow path with the path of the piston guide, and move the moving block to the fixed block Accordingly, it is interlocked by the valve shaft, and reciprocates between the top surface side and the bottom surface side to connect the inflow path and the path of the piston guide, and connect the outflow path and the path of the piston guide. The switching valve moves to the bottom side at the moment when the workpiece connected to the top face of the movable block contacts the peripheral edge of the hole of the part to be inserted or press-fit, and the inflow path and the piston By switching the connection with the passage of the id to the connection between the passage of the outflow and the passage of the piston guide, a fluid supplied from the outside and having a constant pressure is pressing via the passage of the passage and the passage of the piston guide The stopping state of the intermediate block by the lock piston is released.

  The floating unit according to the present invention may be configured as follows. That is, the lock piston is biased by the first spring member so that the fluid stored in the fluid space of the piston guide flows out of the path of the piston guide, and the switching valve moves toward the top surface The switching valve is biased by the second spring member so that the switching valve is driven by the biasing force of the second spring member when the movable block is not applied with a force in the direction approaching the fixed block from the outside. , The inflow path of the switching valve is connected to the path of the piston guide, and the fluid flows from the inlet through the inflow path and the path of the piston guide into the fluid space of the piston guide, and the fluid If the pressure of the fluid stored in the space moves the lock piston toward the intermediate block against the biasing force of the first spring member, the intermediate block is arrested, The force is transmitted from the movable block to the switching valve through the valve shaft when the movable block is subjected to a force in a direction approaching the fixed block and the force is greater than the biasing force of the second spring member. And the force causes the switching valve to move toward the bottom surface, the outflow path of the switching valve and the path of the piston guide are connected, and the lock piston biased to the first spring member is the piston guide Pressing the fluid stored in the fluid space releases the stopped state of the intermediate block by the fluid flowing out of the fluid space of the piston guide through the flow path of the piston guide and the outflow path from the outlet. It may be configured as follows.

  According to the present invention, until the workpiece connected to the top face of the movable block contacts the peripheral edge of the hole of the part to be inserted or pressed in, it resists the movement of the workpiece moving in the insertion or pressing direction. No force is acting on the direction. That is, when the movable block is not applied with a force in the direction approaching the fixed block from the outside, the switching valve moves toward the top surface by the biasing force of the second spring member, and the inflow path of the switching valve and the piston guide The fluid flows from the inlet into the fluid space of the piston guide through the inflow pathway and the path of the piston guide, and the pressure of the fluid stored in the fluid space is the pressure of the first spring member. The intermediate block is restrained by moving the lock piston towards the intermediate block against the biasing force. On the other hand, at the moment when the workpiece connected to the top face of the movable block comes in contact with the peripheral edge of the hole of the part to be inserted or pressed in, the drag in the direction against the movement of the workpiece moved in the insertion or pressing direction is It acts from the peripheral edge of the hole. That is, the floating unit is externally applied with a force that causes the movable block to approach the fixed block. And, when the drag in the direction against the movement of the workpiece is applied, the magnitude of the drag acting on the workpiece to be inserted or pressed in by the robot hand is exerted with a sufficiently large magnitude of force, The force in the direction in which the movable block approaches the fixed block from the outside is greater than the biasing force of the second spring member. Then, the force is transmitted from the movable block to the switching valve via the valve shaft, the switching valve moves toward the bottom surface by the force, and the outflow path of the switching valve and the path of the piston guide are connected, The lock piston urged to the first spring member presses the fluid stored in the fluid space of the piston guide, and the fluid flows from the fluid space of the piston guide to the flow path and the outflow path of the piston guide The intermediate block is released from the stopped state by flowing out through the outlet.

  The floating unit according to the present invention may be configured as follows. That is, the lock piston has an engagement recess which is bored from the top surface toward the bottom, the intermediate block has an engagement projection projecting toward the bottom, and the stopping means is The lock and piston may be moved toward the intermediate block, and the engagement recess may be engaged with the engagement projection to restrain the intermediate block.

  According to the invention, the restraining means does not slide the intermediate block in the direction of extension of the bottom surface by the lock and piston moving toward the intermediate block and the engagement recess engaging with the engagement projection. It can be stopped.

  The floating unit according to the present invention may be configured as follows. That is, the fixed block and the intermediate block may be configured to have position return means for returning the intermediate block to a predetermined position in the direction in which the bottom surface extends.

  According to the present invention, after inserting or pressing in the work, the intermediate block and the movable block which have been slid to correct the positional deviation of the work can be returned to the predetermined position which is the basic position by the position return means. .

  The floating unit according to the present invention may be configured as follows. That is, the fixed block and the intermediate block have position return means for returning the intermediate block to a predetermined position in the direction in which the bottom surface extends, and the engagement recess of the lock and piston makes the top surface side of the lock and piston larger. A first conical surface formed in a frusto-conical shape having a small opening on the bottom side while reducing the opening diameter from the top side of the lock piston to the bottom side, and a first conical side A cylindrical surface which is bored cylindrically from the peripheral edge on the bottom side toward the bottom surface, and conically bored from the peripheral edge on the bottom side of the cylindrical surface toward the bottom surface The engagement convex portion of the intermediate block has a hemispherical surface formed in a hemispherical shape projecting toward the bottom surface, and the position return means is pressed by the fluid. The · The intermediate block is engaged by moving toward the top surface while the first conical surface of the engagement recess of the piston abuts against the hemispherical surface of the engagement convex portion of the intermediate block that slides in the direction in which the bottom surface extends. It may be configured to return to a position on the central axis of the joint recess.

  According to the present invention, the engagement convex portion of the intermediate block, which has been slid to correct the displacement of the work after insertion or press-fitting of the work, has a hemispherical surface formed in a hemispherical shape projecting toward the bottom surface have. The engagement recess of the lock piston opens the top surface side of the lock piston largely and reduces the opening diameter from the top surface side of the lock piston toward the bottom surface while opening the bottom surface small. A first conical surface perforated and formed in a frusto-conical shape, a cylindrical surface bored cylindrically from the peripheral edge on the bottom side of the first conical surface toward the bottom surface, and a cylindrical surface Since the second conical surface is formed by being perforated in a conical shape toward the bottom surface from the peripheral edge on the bottom surface side of the housing, the position return means is a lock piston pressed by the fluid. The intermediate block is engaged with the engagement concave portion by moving toward the top surface while the first conical surface of the engagement concave portion abuts against the hemispherical surface of the engagement convex portion of the intermediate block sliding in the extension direction of the bottom surface. Position on central axis To return.

  The floating unit according to the present invention may be configured as follows. That is, the movable block is provided with a retainer for rotatably holding a plurality of balls on the bottom surface side, and the fixed block has a spacer serving as a backing plate for the plurality of balls held by the retainer. The spacer may be configured to be disposed so as to be sandwiched between the plurality of balls held by the retainer and the valve shaft.

  According to the present invention, the movable block is provided with a retainer rotatably holding the plurality of balls on the bottom surface side, and the fixed block is a spacer serving as a backing plate of the plurality of balls held by the retainer. Since the spacer is disposed so as to be sandwiched between the plurality of balls held by the retainer and the valve shaft, the bottom side is provided with the retainer for rotatably holding the plurality of balls. The movable block is connected to the valve shaft via a spacer serving as a backing plate of a plurality of balls held by the retainer. And since the movable block is partially accommodated in the intermediate block, it slides along with the intermediate block in the direction in which the bottom surface extends. However, movement of the movable block in the direction of the valve shaft and the bottom surface or top surface The movement of the bottom surface in the extending direction is not interlocked by being slidable by the spacer and the plurality of balls held by the retainer.

  The floating unit according to the present invention may be configured as follows. That is, the intermediate block has a cylindrical portion formed in a cylindrical shape extending toward the top surface and opening the top surface side, and the cylindrical portion forms a second space on the inner side, and the cylindrical portion And a shaft, stopper, and guide hole which are holes formed to penetrate in a direction perpendicular to the central axis of the movable block, the movable block extends toward the bottom surface and is formed with a diameter equal to the inner diameter of the cylindrical portion The shaft / stopper / guide hole has an opening diameter in the height direction of the shaft / stopper which is a rod-like member inserted in a direction perpendicular to the central axis of the connection shaft. The connecting shaft is formed to be larger than the diameter of the stopper, and formed so that the opening diameter in the direction in which the bottom surface extends is the same diameter as the diameter of the shaft / stopper. The cylindrical portion is inserted from the top surface side toward the bottom surface on the inner surface of the cylindrical portion, and reciprocably fitted to the bottom surface and the top surface, and the shaft stopper is inserted into the shaft stopper guide hole of the cylindrical portion. By loosely fitting, the movable block may be configured to be capable of coming into and coming off of the fixed block and not being able to be removed from the intermediate block.

  According to the present invention, the intermediate block has a cylindrical portion formed in a cylindrical shape extending toward the top surface and opening the top surface side, and the cylindrical portion forms a second space inside thereof The movable block has a connecting shaft extending toward the bottom surface and having a diameter equal to the inner diameter of the cylindrical portion, and the connecting shaft is inserted into the inner surface of the cylindrical portion from the top surface side toward the bottom surface The movable block is capable of coming into and coming out of contact with the fixed block because it is reciprocably fitted toward the bottom surface and the top surface. Furthermore, the cylindrical portion has a shaft-stopper-guide hole which is a hole formed to penetrate in a direction orthogonal to the central axis of the cylindrical portion, and the movable block is in the direction orthogonal to the central axis of the connecting shaft The shaft, stopper, which is a rod-like member inserted, has a shaft, stopper, and guide hole formed so that the opening diameter in the height direction is larger than the diameter of the shaft, stopper, and The shaft is substantially oval shaped so that the opening diameter in the extending direction is the same diameter as the diameter of the shaft / stopper, and the shaft / stopper is loosely fitted in the shaft / stopper / guide hole of the cylindrical portion, · Since the shaft stopper can be moved in the height direction in the stopper, guide hole, the movable block can move in and out of the fixed block, but the shaft screw Tsu is impossible disengaged from the intermediate block by the shaft stopper contacts the uppermost point of the path-guide hole. As a result, the movable block can be prevented from coming off together with the work to be connected, and approaching the fixed block by contacting the peripheral edge of the hole of the part to be inserted or press-fitted with the work. Can.

  The floating unit according to the present invention may be configured as follows. That is, the switching valve is constituted by a cylindrical portion formed in a cylindrical shape, and the cylindrical portion is a surface portion, that is, an outer surface located radially outward, an inner surface located radially inward, and the ceiling It has an upper surface located on the surface side and a lower surface located on the bottom surface side, and is formed so that the width which is the distance between the outer surface and the inner surface is approximately equal to the width of the gap. The inner side surface is an inner surface upper portion located on the upper surface side of the inner surface, and an inner side surface surface surface that is a protrusion formed so as to project radially inward in a cross sectional view The outer side surface is constituted by an outer side surface circumferential groove which is a groove which is formed by notching radially inward and is formed circumferentially in a circumferential direction of the cylindrical portion. Has passed the path of the piston guide to the outside surface of the The outer surface circumferential groove is a portion connected to the inflow port of the lock cylinder on the outer surface so that the body can flow out to the upper surface side, and further, the fluid flowing from the inflow port is a cylindrical portion Groove for guiding in order to extend circumferentially to the outer surface of the outer circumferential surface, and the cylindrical portion radially penetrates the groove bottom of the outer surface circumferential groove of the outer surface and the inner surface circumferential ridge of the inner surface A side through hole which is a through hole is formed, and the side through hole is a path passing through the inside of the cylindrical portion when the fluid flowing in from the inlet flows toward the fluid space through the outer circumferential groove. Furthermore, upper and lower through-holes are formed in the cylindrical portion, which are through-holes penetrating the cylindrical portion in the height direction across the upper surface and the lower surface, and the upper and lower through holes are formed from the upper surface side of the cylindrical portion to the lower surface Of the inner side surface is a hole for guiding fluid to the The connection portion has an upper and lower opening for feeding in the fluid flowing in from the side through hole, and the lower surface is notched from the bottom side toward the top surface, and the inner peripheral edge of the lower surface And the outer circumferential edge, the lower surface circumferential groove, which is an annular groove, is formed, and the lower surface circumferential groove is the flow of the fluid flowing from the upper and lower through holes to the lower surface. A groove for guiding to the outlet, the inflow path is constituted by the outer surface circumferential groove, the side through hole and the upper and lower opening, and the outflow route is constituted by the lower surface circumferential groove, the upper and lower through hole and the inner surface upper portion It may be done.

  According to the present invention, the fluid flowing in from the inflow port is guided by the outer peripheral surface circumferential groove of the switching valve constituting the inflow path, and spreads over the entire circumference of the cylindrical portion of the switching valve, and the side through holes from the outer surface side of the cylindrical portion It can flow into the inner side through the through hole and can be fed from the upper and lower opening ports and can flow into the fluid space through the path of the piston guide. Furthermore, the fluid stored in the fluid space flows from the path of the piston guide to the upper surface side of the cylindrical portion of the switching valve through the upper part of the inner side surface of the switching valve constituting the outflow path, It travels through the through hole to the lower surface side, is guided to the lower surface peripheral groove of the cylindrical portion, and flows out from the outlet of the lock cylinder.

  Therefore, according to the floating unit according to the present invention, even when used in the horizontal direction, positional deviation due to the work and the weight does not occur until immediately before the insertion or press-in.

It is a typical sectional view of the floating unit concerning the present invention, and is a typical sectional view showing the state where the middle block is stopped and the resistance which a work receives. FIG. 5 is a schematic cross-sectional view of the floating unit according to the present invention, showing a state in which the intermediate block is released from the stopped state as a result of the action of the component of the force in the height direction of the resistance received by the work. Cross-sectional view. FIG. 7 is a schematic cross-sectional view of the floating unit according to the present invention, wherein the intermediate block is released from the restraining state, and furthermore, as a result of the action of the component of the direction of extension of the bottom of the resistance received by the work It is a typical sectional view showing the state where a block and a movable block slid in the direction where the bottom extends. It is a typical sectional view of a floating unit concerning the present invention, and is a typical sectional view showing the 1st space, the 2nd space, and fluid space. FIG. 7 is a schematic partial enlarged cross-sectional view of the floating unit according to the present invention, showing a process in which the switching valve connects the inflow path to the path of the piston guide and the fluid flows into the fluid space. FIG. 7 is a schematic partial enlarged cross-sectional view of the floating unit according to the present invention, showing a process in which the switching valve connects the outflow path to the path of the piston guide and the fluid flows out of the fluid space. It is a figure showing a lock cylinder of a fixed block of a floating unit concerning the present invention, (A) is a top view, (B) is a typical sectional view in a dashed dotted line of (A). It is a figure which shows the piston guide of the fixed block of the floating unit which concerns on this invention, (A) is a top view, (B) is a cross section in the height direction which passes along the center of (A). FIG. It is a figure which shows the lock piston of the fixed block of the floating unit which concerns on this invention, (A) is a top view, (B) is in the cross section along the height direction which passes along the center of (A). FIG. It is a figure showing a change valve of a fixed block of a floating unit concerning the present invention, (A) is a bottom view, (B) is a typical sectional view in a dashed dotted line of (A), C) is a cross-sectional view taken along dashed dotted line in (B). It is a figure which shows the switching valve of the fixed block of the floating unit which concerns on this invention, Comprising: (A) is a partial expanded sectional view which shows the a part enclosed with the dashed-two dotted line in (B) of FIG. (B) is a partially enlarged cross-sectional view showing a portion b enclosed by a two-dot chain line in (B) of FIG. It is a figure which shows the switching valve of the fixed block of the floating unit which concerns on this invention, Comprising: (A) is seen from the inside of the switching valve containing the a part enclosed with the dashed-two dotted line in (B) of FIG. FIG. 10 (B) is a partially enlarged perspective view seen from the outside of the switching valve including an a portion surrounded by a two-dot chain line in FIG. 10 (B). FIG. 5 is a side view of the valve shaft of the fixed block of the floating unit according to the invention; It is a figure showing a main part case of a fixed block of a floating unit concerning the present invention, and (A) is a top view and (B) is a section in the section which met in the height direction which passes along the center of (A). FIG. It is a bottom view showing the main part case of the fixed block of the floating unit concerning the present invention. It is a figure which shows the ball | bowl board (upper) of the fixed block of the floating unit which concerns on this invention, (A) is a top view, (B) is a side view. It is a figure showing a ball pad plate (bottom) of a fixed block of a floating unit concerning the present invention, (A) is a front view, and (B) is a bottom view. It is a figure which shows the stationary block spacer of the floating unit which concerns on this invention, (A) is a top view, (B) is a cross section in the section which met in the height direction which passes along the center of (A). FIG. It is a perspective view which shows the O-ring for the 1st-6th O-rings of a fixed block of the floating unit concerning this invention, and a shaft. It is a perspective view showing the 1st spring member and the 2nd spring member of the fixed block of the floating unit concerning the present invention. It is a figure showing a lock pin of a middle block of a floating unit concerning the present invention, and (A) is a top view and (B) is a section in a height direction which passes along a center of (A). It is a sectional view and (C) is a side view. It is a figure which shows the omnidirectional retainer of the intermediate block of the floating unit which concerns on this invention, (A) is a top view, (B) is in the cross section along the height direction which passes along the center of (A). FIG. It is a figure showing an X direction retainer of a middle block of a floating unit concerning the present invention, and (A) is a top view and (B) is a section in the height direction which passes along the center of (A). FIG. It is a figure showing a ball backing plate (middle) of a middle block of a floating unit concerning the present invention, (A) is a top view, (B) is a side view, and (C) is a front view It is. It is a figure showing a Y direction retainer of a middle block of a floating unit concerning the present invention, and (A) is a top view and (B) is a section in the height direction which passes along the center of (A). FIG. It is a figure which shows the top plate of the movable block of the floating unit which concerns on this invention, (A) is a top view, (B) is a cross section in the section along the height direction which passes along the center of (A). FIG. It is a bottom view showing a top plate of a movable block of a floating unit concerning the present invention. It is a figure showing a top plate all direction retainer of a movable block of a floating unit concerning the present invention, and (A) is a top view and (B) is along a height direction which passes along a center of (A). It is a cross-sectional view in a cross section. It is a figure which shows the top-plate connection shaft of the movable block of the floating unit which concerns on this invention, (A) is a top view, (B) is a cross section along the height direction which passes along the center of (A). (C) is a bottom view. It is a front view which shows the top-plate connection shaft stopper of the movable block of the floating unit which concerns on this invention.

  Hereinafter, a floating unit according to an embodiment of the present invention will be described in detail with reference to the drawings. The directions and terms used in the following description are defined as follows. The "robot hand" corresponds to the arm of an industrial robot. The "work" is transferred to the robot hand and inserted or pressed in. The "chuck" is to hold or hold a work. The "bottom" is the surface where the floating unit connects with the robot hand. The "top" is the surface where the floating unit connects with the chuck. The direction in which the plane formed by the bottom surface extends is taken as the “direction in which the bottom surface extends”. Of the directions in which the bottom extends, the left and right direction in FIG. 1 is taken as the Y direction, and the front and back direction in FIG. 1 is taken as the X direction. The direction perpendicular to the direction in which the bottom surface extends is taken as the height direction. Furthermore, the height direction is configured by the direction toward the bottom of the floating unit and the direction toward the top. Furthermore, in all the drawings, the bottom is shown as the bottom, and the top is shown as the top, with the bottom facing downward and the top facing upward. Also, seeing the direction in which the bottom surface extends from the center in plan view of the floating unit having a circular shape in plan view, the radially outer side is the outer side, and the radially inner side is the inner side. Further, in the present specification, “slide” is a motion that includes a sliding motion of a certain member and another member, and a rolling motion of a ball held by a retainer. In this specification, "insertion" includes inserting a member into a hole with little resistance, and applying pressure to press the member into the hole while receiving frictional resistance. The embodiment described below is an example embodying the present invention and does not limit the technical scope of the present invention.

  The floating unit 10 is, for example, a robot hand (shown in the drawing) in order to securely insert a work into a hole of a part when a work (not shown) such as a shaft member is inserted into a hole of the part having a hole formed. (Not shown) and a chuck (not shown) for correcting the deviation between the central axis of the hole of the part and the central axis of the workpiece. The floating unit 10 is formed such that its outer shape is substantially cylindrical. The configuration and operation of the floating unit 10 will be described below.

  As shown in FIG. 1, the floating unit 10 comprises a fixed block 20 connected and fixed to the robot hand, and an intermediate block 50 housed and coupled to the fixed block 20 on the side further away from the robot hand. And a movable block 80 housed and coupled to the intermediate block 50 on the side away from the robot hand. The fixed block 20, the intermediate block 50, and the movable block 80 are stacked so that their diameters are substantially the same as in the floating unit 10 whose outer shape is a substantially cylindrical shape. Each component will be described in detail below.

(Fixed block)
The fixed block 20 is located on the robot hand side of the floating unit 10, that is, on the lower side of FIG. 1, forms a first space BS1 inside, and accommodates the intermediate block 50 in the first space BS1. The intermediate block 50 is supported by a plurality of members in combination. The bottom surface 224bp (bottom surface in FIG. 1) of the fixed block 20 is a surface connected to a robot hand (not shown) when the floating unit 10 is used. Furthermore, the fixing block 20 has a stopping means 40 for stopping the intermediate block 50 which is slidable in the direction in which the bottom surface extends relative to the fixing block 20 as described later.

  The fixed block 20 is, as shown in FIG. 1 etc., a lock cylinder 22, a piston guide 24, a lock piston 26, a switching valve 28, a valve shaft 30, a body case 32, a ball contact plate (upper) 34 and a ball. A pressure plate (lower) 36 and a spacer 38 are provided. Further, as shown in FIG. 1 and the like, the restraining means 40 includes a lock cylinder 22, a piston guide 24, a lock piston 26, a first spring member SP1, a switching valve 28, a second spring member SP2 and a valve. It comprises a shaft 30 and a spacer 38.

  As shown in FIG. 1 and the like, the lock cylinder 22 is a substantially cylindrical member whose upper surface side is open and whose lower surface side is closed. The lock cylinder 22 is formed on the lower surface with a bottom surface 224bp for connecting the floating unit 10 with the robot hand. The lock cylinder 22 is disposed on the lowermost surface side of the floating unit 10, is connected to the robot hand, and supports the floating unit 10 at the tip of the robot hand. At the same time, the lock cylinder 22 forms the lower profile of the fixed block 20. The lock cylinder 22 is for supporting the fixed block 20 that receives the force Ftb of the component in the height direction of the reaction force F received by the work when the work held by the chuck is inserted. It is. As shown in FIG. 7, the lock cylinder 22 has a cylindrical portion 222 forming a cylindrical surface extending upward in the height direction, and a bottom plate portion 224 forming a bottom surface on the inner side and lower side of the cylindrical portion 222. The inner diameter of the cylindrical portion 222 and the outer diameter of the bottom plate portion 224 coincide with each other.

  The cylindrical portion 222 is formed in a cylindrical shape outside the lock cylinder 22. The cylindrical portion 222 is smoothly formed so that its inner side can slide on the outer side of the switching valve 28. That is, the cylindrical portion 222 is formed such that the inner diameter thereof matches the outermost diameter of the switching valve 28.

  The cylindrical portion 222 is formed with four bolt holes 22bh penetrating in the height direction from the lower surface to the upper surface. The four bolt holes 22bh are formed in the cylindrical portion 222 at intervals of 90 degrees in plan view. The bolt hole 22bh is formed on the lower side of the cylindrical portion 222 in a diameter and depth in which the head of the bolt 22b is accommodated, and on the upper side thereof is formed in a diameter in which the shaft of the bolt 22b is inserted.

  The cylindrical portion 220 is formed with one inlet 22i for introducing a fluid, for example, compressed air, from the side surface toward the center in plan view. The inlet 22i is an inlet for supplying the floating unit 10 with the fluid which is introduced into and stored in the fluid space FS formed inside the large diameter cylindrical portion 244 of the piston guide 24 as described later. And a pressure device provided outside the floating unit 10 for applying a pressure higher than a predetermined level, for example, a connection port of a pipe connecting the floating unit 10 and a pump (not shown). The inflow port 22i is formed from the outer surface to the inner surface of the cylindrical portion 220, toward the center of the cylindrical portion 220 in a plan view and in parallel with the direction in which the bottom surface extends. The inlet 22 i is disposed above the upper surface 224 tp of the bottom plate portion 224. The inlet 22i is disposed between the bolt hole 22bh and the bolt hole 22bh in plan view. The inflow port 22i is in radial communication with the inflow path 28ir of the switching valve 28, as described later.

  Furthermore, the cylindrical portion 220 is formed with one outlet 22 o for fluid outflow from the center to the side in a plan view. The outlet 22 o is an outlet for the fluid stored in the fluid space FS to flow out of the floating unit 10 as described later. The outlet 22 o is disposed below the inlet 22 i and below the upper surface 224 tp of the bottom plate portion 224. The outlet 22 o is formed to extend from the outer surface of the cylindrical portion 220 into the member of the bottom plate portion 224, and turns upward from the bottom plate portion 224 to open at the upper surface 224 tp of the bottom plate portion 224. ing. The outlet 22 o is disposed to overlap the inlet 22 i in the top and bottom in plan view. That is, the outlet 22 o and the inlet 22 i open on the outer surface of the cylindrical portion 220 so as to extend in parallel. The outlet 22 o communicates with the outlet path 28 or of the switching valve 28 in the height direction, as described later.

  The bottom plate portion 224 extends inward from the lower side and the inner side of the cylindrical portion 222 and is formed in a disc shape, and is a portion that closes the lower side of the cylindrical portion 222. The bottom plate portion 224 is formed in a substantially planar shape so that the lower surface is a bottom surface 224 bp and the bottom surface 224 bp can be connected to the robot hand. The bottom plate portion 224 is formed flat so that the upper surface 224tp can contact the lower surface of the switching valve 28, the lower end edge of the large diameter cylindrical portion 242 of the piston and guide 24, and the lower surface of the lock piston 26. There is.

  A portion of the upper surface 224tp of the bottom plate portion 224 and inside the lower end edge of the large diameter cylindrical portion 242 of the piston guide 24 described later is a surface that forms a fluid space FS described later. On the other hand, a portion of the upper surface 224 tp of the bottom plate portion 224 outside the lower end edge of the large diameter cylindrical portion 242 of the piston guide 24 described later and inside the inner surface of the cylindrical portion 222 is the lower surface of the switching valve 28 This is a surface that forms the outflow path of the switching valve 28 in combination with the lower surface circumferential groove 28bprd formed in the. The inner opening of the outlet 22 o is open at one point of the surface of the upper surface 224 tp of the bottom plate portion 224 that forms the outflow path of the switching valve 28.

  The cylindrical portion 222 and the bottom plate portion 224 are directed downward in the height direction of the reaction force F received from the work through the movable block 80, the spacer 38, the body case 32 and the piston guide 24 described later. It is formed such that it is strong and rigid so that it does not break and deform even if it receives the force component Ftb.

  The piston guide 24 is a member for independently reciprocably holding the lock piston 26 and the switching valve 28 in the height direction inside the lock cylinder 22 as shown in FIG. As shown in FIG. 8, the piston guide 24 is formed in an annular shape in a plan view, and in a front view, a cylindrical surface is formed to extend vertically from a substantially planar member. The piston guide 24 is a cylindrical small diameter cylindrical portion 242 extending upward at the innermost side, and a large diameter cylindrical cylinder positioned outward from the small diameter cylindrical portion 242 and extending downward. A disk-like portion that extends outward from the lower side of the small diameter cylindrical portion 242 and extends inward from the upper side of the large diameter cylindrical portion 244 to be a bottom plate of the small diameter cylindrical portion 242 and the large diameter cylindrical portion 244. An inner collar portion 246 and an outer collar portion 248 extending outward from the upper side of the large diameter cylindrical portion 244 and formed in a disk shape are formed.

  As shown in FIG. 1 etc., the small diameter cylindrical portion 242 accommodates the small shaft portion 264 inside so that the small shaft portion 264 described later of the lock and piston 26 can reciprocate in the height direction, and the small shaft portion It is for supporting H.264 from the outer side. The small diameter cylindrical portion 242 is formed such that the inner diameter thereof matches the outer diameter of the small shaft portion 264 of the lock piston 26. The small diameter cylindrical portion 242 is formed such that its height is smaller than the height of the small shaft portion 264 of the lock piston 26. Accordingly, when the lock piston 26 is at the uppermost point, the upper surface of the small shaft portion 264 of the lock piston 26 is positioned above the upper surface of the small diameter cylindrical portion 242. The small diameter cylindrical portion 242 is formed such that the outer diameter thereof matches the inner diameter of a ball pad plate (lower) 36 described later. The small diameter cylindrical portion 242 is formed such that the upper surface thereof is located below the upper surface of the ball backing plate (lower) 36. In addition, the small diameter cylindrical portion 242 is positioned above the lowermost point of the engagement convex portion 522 cc of the lock and pin 52, and is smaller than the lower surface of the main shaft portion 522 of the lock and pin 52. It is formed to be located on the lower side. The upper surface of the small diameter cylindrical portion 242 faces the lower surface of the main body shaft 522. The small shaft portion 264 of the lock and piston 26 is disposed inside the inner side surface of the small diameter cylindrical portion 242, and the engagement convex portion 522cc of the lock pin 52 is disposed further inside.

  The large diameter cylindrical portion 244 is a portion for forming a fluid space FS for storing a fluid supplied from the outside inside as shown in FIG. As shown in FIG. 8, the large diameter cylindrical portion 244 is disposed outside and below the small diameter cylindrical portion 242 with the inner collar portion 246 interposed therebetween. The large diameter cylindrical portion 244 is surrounded by the inner side surface, the lower surface of the small diameter cylindrical portion 242, the lower surface of the inner flange portion 246 connected thereto, and the upper surface 224tp of the bottom plate portion 224 of the lock cylinder 22. A fluid space FS is formed. Then, the large diameter cylindrical portion 244 accommodates a main body portion 262 described later of the lock / piston 26 in the fluid space FS. That is, the large diameter cylindrical portion 244 accommodates the main body portion 262 inside and supports the main body portion 262 from the outer side surface so that the main body portion 262 of the lock / piston 26 can reciprocate in the height direction. The large diameter cylindrical portion 244 is formed such that the inner diameter of its inner side surface matches the outer diameter of the main body portion 262 of the lock piston 26. Furthermore, the large diameter cylindrical portion 244 is formed such that the inner diameter thereof is the diameter necessary to form the fluid space FS. The large diameter cylindrical portion 244 is formed such that its height extending downward from the lower surface of the inner collar 246 is a height greater than the height of the main body 262 of the lock piston 26. Furthermore, the large diameter cylindrical portion 244 is formed such that its height extending downward from the lower surface of the inner collar portion 246 is the height necessary to form the fluid space FS. The large-diameter cylindrical portion 244 has an O-ring groove 244od formed by cutting the inner side surface upward from the lower end edge thereof in an L-shape in a sectional view. A fifth O-ring OR5 for sealing the fluid space FS is engaged with the O-ring groove 244od. The O-ring groove 244od is formed such that the depth in the height direction and the radial direction matches the thickness (cross-sectional diameter) of the fifth O-ring OR5. That is, the radial thickness between the inner side surface and the outer side surface of the large diameter cylindrical portion 244 is formed to be larger than the thickness (cross sectional diameter) of the fifth O ring OR5. In addition, the large diameter cylindrical portion 244 is formed such that its thickness and strength are the thickness and strength necessary as a partition for fluid having a constant pressure stored in the fluid space FS.

  Furthermore, as shown in FIG. 1 and the like, the large diameter cylindrical portion 244 is a portion for accommodating the switching valve 28 on the outer side thereof so as to be capable of reciprocating in the height direction. The large diameter cylindrical portion 244 is disposed at a clearance inside the inner side surface of the cylindrical portion 222 of the lock cylinder 22. That is, the large diameter cylindrical portion 244 is formed such that the outer diameter of the outer side surface thereof is smaller than the inner diameter of the cylindrical portion 222 of the lock cylinder 22. Then, an annular gap (without a reference numeral) is formed between the inner side surface of the cylindrical portion 222 of the lock cylinder 22 and the outer side surface of the large diameter cylindrical portion 244. The switching valve 28 is accommodated in the gap so as to be capable of reciprocating in the height direction. That is, the large diameter cylindrical portion 244 is formed such that the outer diameter of the outer side surface thereof matches the diameter of the inner side surface 28 ip of the switching valve 28.

  The large diameter cylindrical portion 244 is a hole formed so as to penetrate from the outer surface to the inner surface as shown in FIG. 8 and is a path 24 ior that is four holes positioned 90 degrees apart from each other in plan view. Have. In the passage 24ior, when the fluid flows into the fluid space FS, the fluid passes from the outer surface side to the inner surface side of the large diameter cylindrical portion 244 and when the fluid flows out from the fluid space FS, the inside of the large diameter cylindrical portion 244 It is a path for fluid to pass from the side to the outside. The path 24ior is formed so as to be connectable to the inflow path 28ir of the switching valve 28 and the outflow path 28or according to the movement of the switching valve 28 in the height direction, as described later. The passage 24ior is formed in the large diameter cylindrical portion 244 so as to have a height substantially in the middle of the large diameter cylindrical portion 244 in the height direction and in communication with the inflow passage 28ir of the switching valve 28 located at the uppermost point. It is done.

  The inner collar 246 extends outward from the lower portion of the small diameter cylindrical portion 242 and extends inward from the upper portion of the large diameter cylindrical portion 244, as shown in FIG. In order to connect the lower side portion and the upper side portion of the large diameter cylindrical portion 244 in the extending direction of the bottom surface, it is a portion formed in a disc shape. The inner collar portion 246 is formed such that the upper surface thereof matches the upper surface of the large diameter cylindrical portion 244 and the lower surface thereof matches the lower surface of the small diameter cylindrical portion 242. The inner collar portion 246 is formed such that the lower surface thereof faces the upper surface of the main body portion 262 of the lock piston 26 so that the main body portion 262 can contact and separate in the height direction. Furthermore, the inner collar portion 246 is connectable to the upper surface of the first spring member SP1 inserted in the spring recess 262sd of the main body portion 262 of the lock piston 26, as described later. , Is formed.

  The inner collar 246 has a thickness and a strength in the height direction of the main body 262 of the lock piston 26 pressed at its lower surface by the fluid having a constant pressure stored in the fluid space FS. It is formed to have the necessary thickness and strength for supporting via the spring member SP1.

  As shown in FIG. 8, the outer collar portion 248 is a portion that extends outward from the upper side of the large diameter cylindrical portion 244 and is formed in a disc shape. The outer collar portion 248 is a portion that forms the outer shape of the fixed block 20 together with the lock cylinder 22 and the main body case 32. The outer collar portion 248 is formed such that the upper surface thereof is flush with the upper surface of the inner collar portion 246 and the upper surface of the large diameter cylindrical portion 244 continuously. The outer collar portion 248 is formed such that the upper surface thereof can be connected to the lower surface of the main body case 32. The outer collar portion 248 is formed such that its lower surface is located slightly lower than the lower surface of the inner collar portion 246. More specifically, outer shell portion 248 is formed such that the lower surface thereof is in contact with or accessible to the upper surface of switching valve 28, and locks the reciprocating distance in the height direction of switching valve 28. It is formed to define between the upper surface 224 tp of the bottom plate portion 224 of the cylinder 22. The outer collar portion 248 is formed such that the outer diameter thereof matches the outer diameter of the cylindrical portion 222 of the lock cylinder 22 and the outer diameter of the cylindrical portion 322 of the main body case 32 described later. That is, the outer shape of the fixed block 20 is such that the outer collar portion 248 is sandwiched by the cylindrical portion 222 of the lock cylinder 22 located on the lower side and the cylindrical portion 322 of the main body case 32 located on the upper side. Form.

  As shown in FIG. 8, bolt holes 24 bh which are four holes for the bolts 22 b to be inserted in the height direction are formed in the outer collar portion 248. The bolt holes 24bh are formed slightly inward from the outer peripheral edge of the outer collar portion 248 and formed to penetrate in the height direction from the lower surface to the upper surface, and the cylindrical portion 222 of the lock cylinder 22 located on the lower side. It is formed to communicate with the bolt holes 22bh and the bolt recesses 32bd of the main body case 32 located on the upper side. That is, the four bolt holes 24bh are formed in the outer collar portion 248 at intervals of 90 degrees in plan view, similarly to the bolt holes 22bh.

  As shown in FIG. 8, the outer collar portion 248 is formed with a shaft hole 24 sh which is four holes through which a valve shaft 30 described later is inserted in the height direction. The shaft hole 24sh is located inside the bolt hole 24bh of the outer collar portion 248 and outside the outer surface of the large diameter cylindrical portion 244, and is formed to penetrate in the height direction from the lower surface to the upper surface. It communicates with the upper surface of the switching valve 28 located in the and the shaft hole 32 sh described later of the main body case 32 located on the upper side. The shaft hole 24 sh is formed such that its diameter matches the diameter of the valve shaft 30. The shaft hole 24sh is formed with a smooth surface so as to be slidable with the valve shaft 30 reciprocating in the height direction. The shaft hole 24sh has a shaft O-ring groove 24shod formed by cutting out the upper portion of the inner side surface toward the outside in an L-shape in cross-sectional view and an annular shape in plan view. The shaft O-ring groove 24shod is connected to be fitted with a shaft O-ring ORS described later. Thereby, the shaft O-ring ORS seals so that the fluid passing through the outflow path 28or of the switching valve 28 located on the lower surface side of the shaft hole 24sh does not leak above the shaft hole 24sh.

  The fifth O-ring OR5 is an annular metal member in plan view as shown in FIG. The fifth O-ring OR5 is housed and connected in an O-ring groove 244od of the large diameter cylindrical portion 244 of the piston and guide 24 as shown in FIG. That is, the fifth O ring OR5 is formed such that its diameter in plan view matches the diameter of the O ring groove 244od. The fifth O-ring OR5 is large from the connection position of the fluid stored in the fluid space FS with the upper surface 224tp of the bottom plate portion 224 of the lock cylinder 22 and the lower end edge of the large diameter cylindrical portion 244 of the piston guide 24. The fluid space FS is sealed by sealing so as not to leak to the outer side than the diameter cylindrical portion 244, that is, the lower surface 28bp side of the switching valve 28, which will be described later.

  As shown in FIGS. 1 to 3, the lock piston 26 is accommodated in the fluid space FS formed by the piston guide 24 so as to be capable of reciprocating in the height direction, and the pressure of the fluid supplied from the outside to the fluid space FS Constitutes a part of the position return means 70 for returning the intermediate block 50 which slides in the direction in which the bottom surface extends to the basic position, and the intermediate block using the pressure of the fluid supplied from the outside to the fluid space FS Is a member that constitutes a part of the restraining means 40 for restraining the As shown in FIG. 9, the lock / piston 26 extends upward from the main body 262 in the same axis as the main body 262 which is formed in a disk shape and accommodated in the fluid space FS, and the main body 262. And, it is constituted by a small shaft portion 264 whose diameter is smaller than that of the main body portion 262.

  As shown in FIG. 1 and the like, the main body portion 262 is formed such that the outer diameter thereof matches the inner diameter of the large diameter cylindrical portion 244 of the piston guide 24. The outer surface of the main body portion 262 is slidable with respect to the inner side surface of the large diameter cylindrical portion 244 of the piston guide 24, and the fluid stored in the fluid space FS is from the lower surface side of the main body portion 262 The fluid can flow outward from the path 24ior of the piston guide 24 between the outer surface of the portion 262 and the inner surface of the large diameter cylindrical portion 244, and the fluid flowing inward can flow from the passage 24ior the body portion It is formed so as to be able to flow into the fluid space FS located on the lower surface side of the main body portion 262 via the space between the outer side surface of the large diameter cylindrical portion 244 and the outer side surface of the large diameter cylindrical portion 244. The main body portion 262 is capable of contacting the upper surface 224 tp of the bottom plate portion 224 when the lower surface thereof faces the upper surface 224 tp of the bottom plate portion 224 of the lock cylinder 22 and the lock piston 26 is located at the lowest point. It is formed. The body portion 262 is formed such that its height is smaller than the height of the large diameter cylindrical portion 244 of the piston guide 24. Furthermore, the main body portion 262 is formed such that the difference between the height thereof and the height of the large diameter cylindrical portion 244 is the movement length in the height direction necessary for the position return means 70 and the stopping means 40. The body portion 262 is formed such that its upper surface is in contact with or accessible to the inner flange 246 of the piston guide 24 and the lower surface of the small diameter cylindrical portion 242.

  As shown in FIG. 9, the main body portion 262 has spring concave portions 262 sd which are four concave portions formed by being bored in a cylindrical shape downward from the upper surface thereof. The spring recess 262sd is a recess into which the first spring member SP1 is inserted so as to be extensible and to receive the first spring member SP1. The spring recess 262 sd is disposed inside the outer side surface of the main body portion 262 and is disposed outside the outer side surface of the small shaft portion 264. Furthermore, the four spring recesses 262 sd are formed 90 degrees apart from each other so as to surround the small shaft portion 264 in a plan view, and in parallel in a side view. The spring recess 262sd is formed such that its depth is shorter than the shortest length of the first spring member SP1. The spring recess 262 sd has a diameter in the cross section equal to or slightly larger than the diameter of the first spring member SP 1, and the difference between the outer diameter of the main body 262 and the outer diameter of the small shaft 264 It is formed to be smaller than the length. The first spring member SP1 is accommodated in the spring recess 262sd located on the upper surface side of the main body 262 with the axes of the first spring member SP1 aligned with each other, whereby the main body 262, that is, the lock piston 26 is directed downward by the first spring member SP1. It is energized to move.

  In the main body portion 262, an O-ring groove 262od having a concave shape in sectional view and an annular shape in plan view is formed on the upper side portion of the outer side surface from the outside toward the inside and over the entire outer side surface. The O-ring groove 262od is fitted such that a sixth O-ring OR6 described later for enhancing airtightness so that fluid flowing in and out of the path 24ior of the piston guide 24 does not leak to the upper surface side of the main body 262 It is a groove for being connected. The O-ring groove 262od is formed such that the depth and the width in a cross-sectional view thereof match the thickness of the sixth O-ring OR6. The O-ring groove 262od is disposed such that its heightwise position is located above the path 24ior of the piston guide 24 when the lock piston 26 is at the lowest point. As a result, regardless of the position of the lock piston 26 that can be reciprocated in the height direction in the fluid space FS, the fluid flowing in and out of the path 24ior of the piston guide 24 by the sixth O ring OR6. Will not leak to the upper surface side of the main body portion 262.

  As shown in FIG. 9, the small shaft portion 264 is an axial portion extending upward than the main body portion 262, and is brought into contact with or separated from the intermediate block 50 on which the lock piston 26 capable of reciprocating in the height direction is located on the upper side. Directly contacting the intermediate block 50 so as to return the intermediate block 50 sliding in the direction in which the bottom surface extends to the basic position, and further to stop the intermediate block 50 returning to the basic position. It is the part that works. The small shaft portion 264 is formed such that its outer diameter in a plan view is approximately twice as large as the diameter of an engagement convex portion 522 cc of the lock / pin 52 described later of the intermediate block 50. Furthermore, the small shaft portion 264 is formed such that the outer side surface thereof can slide on the inner side surface of the small diameter cylindrical portion 242. The small shaft portion 264 has a height extending from the main body portion 262 larger than the height of the small diameter cylindrical portion 242, and enters the first space BS1 described later when the lock piston 26 is positioned at the uppermost point The lock piston 26 is formed to have a height that retracts below the first space BS1 when the lock piston 26 is at the lowest point.

  The small shaft portion 264 has an engagement recess 264 cd which is a recess formed by being bored downward from the upper surface thereof. The engagement recess 264 cd is moved on the bottom surface of the intermediate block 50 by the lock and piston 26 moving toward the intermediate block 50 to engage with the engagement projection 522 cc of the lock pin 52 described later of the intermediate block 50. Stop the slide in the extension direction. Specifically, the engagement recess 264 cd opens the upper surface side of the small shaft portion 264 of the lock / piston 26 largely and reduces the opening diameter downward from the upper surface side of the small shaft portion 264 and opens the lower side small. A first conical surface 264co1 formed in a frusto-conical shape and a cylindrical surface 264cy formed in a cylindrical shape downward from the lower peripheral edge of the first conical surface 264co1, A second conical surface 264co2 is formed by being perforated in a conical shape downward from the lower peripheral edge of the cylindrical surface 264cy.

  The first conical surface 264co1 is not a surface formed in a perfect conical surface shape, but a frusto-conical surface formed in a mortar shape in which the apex of the conical shape is cut off. The first conical surface 264co1 moves upward by the pressure of the fluid stored in the fluid space FS in the engagement recess 264cd of the small shaft portion 264, so that the engagement surface has the hemispherical surface of the lock pin 52 at its inclined surface. A lock / pin 52 constituting an intermediate block 50 slidable in a direction in which the bottom surface extends by pressing the engagement convex portion 522cc toward the central axis of the small shaft portion 264 slidably in contact with the joint convex portion 522cc. Is a portion that acts directly to return to the basic position. The first conical surface 264co1 is formed such that its maximum diameter is smaller than the outer diameter of the small shaft portion 264 and larger than the diameter of the engagement projection 522cc of the lock pin 52. It is done. The maximum diameter of the first conical surface 264co1 is, for example, about 1.5 to 2 times the diameter of the engagement convex portion 522cc. The first conical surface 264 co 1 is formed such that its height is approximately half the height of the small shaft portion 264. Further, the first conical surface 264co1 is formed such that the inclination angle of the oblique line in the cross section along the height direction is approximately 45 degrees. The central axis of the first conical surface 264co1 coincides with the central axis of the small shaft portion 264 and the main portion 262.

  The cylindrical surface 264cy is a cylindrical surface connected to the lower peripheral edge of the first conical surface 264co1 and extending downward with a diameter equal to the opening diameter of the lower peripheral edge of the first conical surface 264co1. In the cylindrical surface 264cy, when the engaging recess 264cd is engaged with the engaging protrusion 522cc of the lock pin 52, the later-described hemispherical surface of the engaging protrusion 522cc faces downward from the lower opening of the first conical surface 264co1. And the lower peripheral edge of the first conical surface 264co1, ie, the upper peripheral edge of the cylindrical surface 264cy, to the hemispherical surface of the engagement convex portion 522cc while accommodating the bulging portion in the height direction, It is a portion that prevents the slide in the extension direction of the bottom surface of the middle block 50 provided with the lock pin 52. The height in the height direction of the cylindrical surface 264cy is about one third of the radius of the engagement protrusion 522cc. The central axis of the cylindrical surface 264cy coincides with the central axis of the small shaft portion 264 and the main portion 262.

  The second conical surface 264co2 is connected to the lower peripheral edge of the cylindrical surface 264cy and becomes the apex at the lowest point while decreasing the opening diameter downward from the opening diameter of the lower peripheral edge of the cylindrical surface 264cy It is a conical surface. When the hemispherical surface of the engagement protrusion 522cc bulges further downward than the lower peripheral edge of the cylindrical surface 264cy, the second conical surface 264co2 accommodates and engages the bulged portion It is a portion for preventing interference with the lowest point of the recess 264 cd. The second conical surface 264co2 is formed such that the inclination angle of the oblique line in the cross section along the height direction is approximately 45 degrees or an angle slightly smaller than 45 degrees with the direction in which the bottom surface extends There is. The central axis of the second conical surface 264co2 coincides with the central axis of the small shaft portion 264 and the main portion 262.

  The fluid space FS is, as shown in FIG. 1 and the like, in particular, in FIG. 4, the upper surface 224 tp of the bottom plate portion 224 of the lock cylinder 22, the inner surface of the large diameter cylindrical portion 244 of the piston guide 24, and the inside of the piston guide 24. It is a cylindrical space surrounded by the lower surface of the bowl-like portion 246. In the fluid space FS, the main body portion 262 of the lock / piston 26 is accommodated so as to be reciprocable in the height direction. The fluid space FS between the lower surface of the main body portion 262 of the lock piston 26 and the upper surface 224 tp of the bottom plate portion 224 of the lock cylinder 22 is a path via the outer surface of the main body portion 262 of the lock piston 26. 24 ior is in communication. The path 24ior is a path through which the inward fluid passes to flow into the fluid space FS, and the outward fluid can flow out of the fluid space FS. Then, the fluid that has flowed into the fluid space FS via the path 24ior can push the lower surface of the main body portion 262 of the lock piston 26 upward. Further, the lower surface of the main body 262 of the lock piston 26 biased downward by the first spring member SP1 presses the fluid stored in the fluid space FS so as to flow out through the path 24ior Do. The actual maximum volume of the fluid stored in the fluid space FS is the difference between the height of the large diameter cylindrical portion 244 and the height of the body portion 262 of the lock piston 26 (ie, the moving length of the lock piston 26 in the height direction). It is a volume calculated by × area of the lower surface of the main body portion 262 of the lock piston 26.

  The sixth O-ring OR6 is an annular metal member in plan view as shown in FIG. The sixth O-ring OR6 is housed in and connected to an O-ring groove 262od of the main body portion 262 of the lock piston 26, as shown in FIG. That is, the sixth O-ring OR6 is formed such that its diameter in plan view matches the diameter of the O-ring groove 262od. The sixth O-ring OR6 is sealed so that the fluid stored in the fluid space FS does not leak to the upper surface side of the main body 262, that is, the lower surface side of the inner flange 246 and the small diameter cylindrical portion 242 of the piston guide 24. To ensure the air tightness of the fluid space FS.

  As shown in FIG. 1 and the like, the switching valve 28 moves the path of the fluid flowing into the fluid space FS from the inlet 22 i and the path of the fluid flowing out of the fluid space FS to the outlet 22 o as the movable block 80 moves. It is a member for interlockingly switching in the fixed block 50. The switching valve 28 is a member formed in a substantially cylindrical shape. The switching valve 28 is configured by a cylindrical portion 282 as shown in FIGS. 10 to 12. The cylindrical portion 282 has its outer surface 28 op, inner surface 28 ip, upper surface 28 tp and lower surface 28 bp. The switching valve 28 has a height, which is the distance between the upper surface 28 tp and the lower surface 28 bp, of the gap formed between the inner surface of the cylindrical portion 222 of the lock cylinder 22 and the outer surface of the large diameter cylindrical portion 244. The height is formed to be smaller than the height, ie, the distance in the height direction between the lower surface of the shell-like portion 248 of the piston guide 24 and the upper surface 224 tp of the bottom plate portion 224 of the lock cylinder 22. ing. The cylindrical portion 282 is formed flat so that the upper surface 28 tp can contact or approach the lower surface of the outer rib portion 248 of the piston guide 24. The cylindrical portion 282 is formed flat so that the lower surface 28 bp can contact the upper surface of the upper surface 224 tp of the bottom plate portion 224 of the lock cylinder 22. The switching valve 28 has a width which is the distance between the outer surface 28 op and the inner surface 28 ip is the width of the gap, that is, the inner surface of the cylindrical portion 222 of the lock cylinder 22 and the large diameter cylindrical portion of the piston guide 24. It is formed to have a distance substantially equal to the radial direction (the direction in which the bottom surface extends) with the outer surface of the H.244. The cylindrical portion 282 is formed in a smooth cylindrical surface so that the outer side surface 28op can contact and slide with the inner side surface of the cylindrical portion 222 of the lock cylinder 22. The cylindrical portion 282 is formed in a smooth cylindrical surface so that the inner side surface 28 ip can contact and slide with the outer side surface of the large diameter cylindrical portion 244 of the piston guide 24. Also, the switching valve 28 is connected to the inlet 22 i and is connectable to the path 24 ior of the piston guide 24, and an outlet path connected to the outlet 22 o and connectable to the path ior of the piston guide 24. And 28 or. Further, the switching valve 28 is configured to be able to reciprocate in the height direction in conjunction with a movable block 80 that reciprocates in the height direction by a valve shaft 30 described later.

  The upper surface 28 tp of the cylindrical portion 282 of the switching valve 28 is an annular flat surface in plan view. The upper surface 28 tp is formed with an upper opening of upper and lower through holes 28 tbh which are eight holes penetrating the switching valve 28 in the vertical direction as described later in plan view. The upper surface 28 tp is formed such that the lower end of a valve shaft 30 described later can abut. Thereby, when the valve shaft 30 moves downward, the upper surface 28t is pressed downward to the lower end edge of the valve shaft 30, and the switching valve 28 moves downward.

  The lower surface 28bp of the cylindrical portion 282 of the switching valve 28 is an annular flat surface in plan view. The lower surface 28 bp is opposed to the bottom plate portion 224 of the lock cylinder 22 and is opposed to the outlet 22 o opened in the bottom plate portion 224. The lower surface 28bp is formed with an opening on the lower side of upper and lower through holes 28tbh, which are eight holes penetrating the switching valve 28 in the vertical direction in plan view. Furthermore, the lower surface 28bp is a cross-sectional view from the lower side to the upper side between the inner peripheral edge which is the lower edge of the inner surface 28ip and the connecting edge and the outer peripheral edge which is the connecting edge of the lower surface 28op. It has a lower surface circular groove 28bprd which is an annular groove formed so as to be cut in a U-shape and to be along the inner peripheral edge and the outer peripheral edge of the lower surface 28bp. The lower surface circumferential groove 28bprd is a groove for guiding the fluid flowing out to the lower surface 28bp side through the upper and lower through holes 28tbh of the switching valve 28 to the outlet 22o opened at one point of the bottom plate portion 224. The lower surface circumferential groove 28bprd has a width smaller than the width of the lower surface 28bp in a sectional view cut in the height direction and a width slightly larger than the diameter at the lower opening of the upper and lower through holes 28tbh It is formed. The lower surface circumferential groove 28bprd is a part constituting an outflow path 28or described later.

  The upper and lower through holes 28tbh are eight holes formed through the cylindrical portion 282 in the height direction so as to connect the upper surface 28tp and the lower surface 28bp of the cylindrical portion 282 of the switching valve 28. The eight upper and lower through holes 28tbh are disposed in the cylindrical portion 282 at 45 degrees apart from each other in plan view. The upper and lower through holes 28tbh open at a diameter larger than the diameter of the upper opening from the middle position in the height direction to the lower side. The lower side portion of the upper and lower through holes 28 tbh can accommodate a second spring member SP2 described later, with their axes aligned. The switching valve 28 is biased to move upward by the second spring member SP2 housed in the upper and lower through holes 28tbh. That is, the upper and lower through holes 28tbh are holes for guiding the fluid from the upper surface 28tp side to the lower surface 28bp side of the switching valve 28 and for housing the second spring member SP2 biasing the switching valve 28 upward. is there. The upper and lower through holes 28tbh are part of the outflow path 28or.

  The switching valve 28 has a height in the height direction, ie, a length between the upper surface 28 tp and the lower surface 28 bp, smaller than the height of the large diameter cylindrical portion 244 of the piston guide 24 and the lock cylinder 22. Of the inner surface of the cylindrical portion 222 is smaller than the height of the inner surface above the upper surface 224 tp of the bottom plate portion 224. Furthermore, in other words, the height in the height direction of the switching valve 28 is smaller than the length between the lower surface of the outer peripheral portion 248 of the piston guide 24 and the upper surface 224 tp of the lock cylinder 22. Due to this difference in height, the switching valve 28 can be reciprocated in the height direction within the gap between the lock cylinder 22 and the piston guide 24. The difference in height of the switching valve 28 is the movement length in the height direction. The switching valve 28 is formed such that the moving length in the height direction is equal to or slightly larger than the thickness of the first O-ring OR1. Thereby, as shown in FIG. 5, the switching valve 28 is moved upward in the height direction to connect the inflow path 28ir located below the first O ring OR1 to the path 28ior of the piston guide 6, and as shown in FIG. 6, it moves downward in the height direction to cut off the connection between the inflow path 28ir below the first O-ring OR1 and the path 28ior of the piston guide. At the same time, the outflow path 28or above the first O-ring OR1 can be connected to the path 28ior of the piston guide.

  The inner side surface 28 ip of the cylindrical portion 282 of the switching valve 28 is a substantially cylindrical surface that defines the inner diameter of the substantially cylindrical switching valve 28. The inner side surface 28 ip is formed such that its diameter substantially matches the outer diameter of the large diameter cylindrical portion 244 of the piston guide 24. The upper portion of the inner surface 28ip faces the outer surface of the large diameter cylindrical portion 244 of the piston guide 24 and passes through the path 24ior of the piston guide 24 with the outer surface of the large diameter cylindrical portion 244. It is formed so that the fluid can flow out to the upper surface 28 tp side. More specifically, the inner side surface 28 ip is a groove which is formed by cutting out the inner side upper portion 28 ipt and the inner side upper portion 28 ipt outward from the upper side in the circumferential direction of the switching valve 28 in a sectional view A first O-ring groove 28ipod1 and a first O-ring groove 28ipod1 located on the lower side of the first O-ring groove 28ipod1 for supporting the first O-ring OR1 fitted from the lower side The inner side surface projecting ridge 28iprc, which is a projection formed so as to project inward from the groove bottom of the O ring groove 28ipod1 in a sectional view and is a circumferentially circling direction of the switching valve 28, and the inner surface circumferential surface projecting ridge 28iprc A second O-ring, which is a groove that is formed on the side and notched outward as in the case of the first O-ring groove 28 ipod 1, and is a groove that circulates in the circumferential direction of the switching valve 28. A groove 28Ipod2, is constituted by.

  The inner surface upper portion 28ip is a portion on the top side of the inner surface 28ip, and is a portion formed so that the diameter thereof substantially matches the outer diameter of the large diameter cylindrical portion 244 of the piston guide 24. The inner upper surface portion 28ip is formed between the outer surface of the large diameter cylindrical portion 244 of the piston guide 24 so that the fluid passing through the path 24ior of the piston guide 24 can flow out to the upper surface 28tp side. ing. That is, the inner upper surface portion 28 ip forms a slight gap for fluid flow between the inner surface upper portion 28 ip and the outer surface of the large diameter cylindrical portion 244 of the piston guide 24. The inner upper surface portion 28ip forms a part of the outflow path 28or as described later.

  The first O-ring groove 28ipod1 is formed at a substantially intermediate position in the height direction of the switching valve 28 and above the side through holes 28ioh described later. The first O-ring groove 28ipod1 is formed on the inner side surface 28ip so as to be cut outward from the inner side upper portion 28ip and to be along the substantially annular circumferential direction of the switching valve 28. The first O-ring groove 28ipod1 is formed such that the depth in the radial direction (the direction in which the bottom surface extends) and the width in the height direction match the thickness of the first O-ring OR1. The first O-ring groove 28ipod1 is switched so as to be positioned above the path 24ior of the piston guide 24 when the switching valve 28 is positioned at the uppermost point by the biasing force of the second spring member SP2 and When the valve 28 is positioned at the lowest point by the reaction force F acting on the movable block 80 through the valve shaft 30 as described later, the valve 28 is positioned below the path 24ior of the piston guide 24. It is formed in the side 28ip.

  The inner surface side circumferential ridges 28 iprc are ridges forming the lower partition of the first O-ring groove 28 ipod 1 and the upper partition of the second O-ring groove 28 ipod 2. That is, the inner surface side circumferential ridges 28iprc support the first O ring OR1 accommodated and connected to the first O ring groove 28ipod1 from the lower side, and are accommodated and connected to the second O ring groove 28ipod2 It is a ridge for supporting the second O-ring OR2 from the upper side. The inner surface side circumferential ridges 28iprc are formed at the same height position as the side through holes 28ioh described later at the position in the height direction inside the switching valve 28. And, the inner side surface salient ridge 28iprc has an upper and lower opening 28iprco for sending in the fluid flowing in from the side through hole 28ioh at the connecting portion with the side through hole 28ioh as described later. .

  The second O-ring groove 28ipod2 is substantially at the middle position in the height direction of the switching valve 28, and is formed on the lower side than the side through holes 28ioh, that is, the inner side surface salient ridges 28iprc. The second O-ring groove 28ipod2 is spaced apart in the height direction from the inner surface side circumferential rib 28iprc in parallel with the lower side of the first O-ring groove 28ipod1 and, like the first O-ring groove 28ipod1, goes outward The inner side surface 28 ip is formed along the substantially annular circumferential direction of the switching valve 28. The second O-ring groove 28ipod2 is formed such that the depth in the radial direction (the direction in which the bottom surface extends) and the width in the height direction match the thickness of the second O-ring OR2.

  The outer side surface 28op of the cylindrical portion 282 of the switching valve 28 is a substantially cylindrical surface that defines the outer diameter of the substantially cylindrical switching valve 28. The outer side surface 28op is formed such that its diameter matches the inner diameter of the cylindrical portion 222 of the lock cylinder 22. The outer side surface 28op is formed to face the inner side surface of the cylindrical portion 222 of the lock cylinder 22. More specifically, the third outer surface 28op is a groove that is formed by cutting away from the upper end edge of the outer surface 28op inward from the upper side in the circumferential direction of the switching valve 28 in order from the upper side. A ring groove 28opod3 and an outer surface surface protruding ridge (upper) 28oprcu, which is a protrusion located under the third O-ring groove 28opod3 and protruding outward in a cross sectional view and circling in the circumferential direction of the switching valve 28; The outer surface circumferential projection (upper) 28oprcu is located on the lower side, and the outer circumferential surface projection (upper) 28oprcu is formed by being cut inward from the radially outermost point of the radial direction, and circumferentially circulates the switching valve 28 The outer side surface circumferential groove 28oprd which is a groove, and the outer side which is a protrusion which is located below the outer surface side circumferential groove 28oprd and protrudes outward in a cross sectional view and which revolves in the circumferential direction of the switching valve 28 It is cut inward from the radially outermost point of the outer surface circling ridge (lower) 28 oprcb located under the circling ridge (lower) 28 oprcb and the outer surface circling ridge (lower) 28 oprcb And a fourth O-ring groove 28 opod 4 which is a groove that circulates in the circumferential direction of the switching valve 28.

  The third O-ring groove 28 opod 3 is formed at the upper position in the height direction of the switching valve 28 and above the side through holes 28 i oh described later. The third O-ring groove 28 opod 3 is formed at a position facing the inner side upper portion 28 ipt of the inner side surface 28 ip in the radial direction of the switching valve 28. The third O-ring groove 28opod3 is formed in the outer side surface 28op so as to be cut inward from the upper end edge of the outer side surface 28op and to be along the substantially annular circumferential direction of the switching valve 28. The third O-ring groove 28opod3 is formed such that the depth in the radial direction (the direction in which the bottom surface extends) and the width in the height direction match the thickness of the third O-ring OR3.

  The outer surface surface projecting ridge (upper) 28oprcu is a portion serving as a partition for separating the outer surface surface circumferential groove 28oprd located on the lower side thereof from the third O ring groove 28opod3 located on the upper side thereof, The third O-ring OR3 accommodated and connected to the third O-ring groove 28opod3 is supported from the lower side. The outer side surface projecting ridge (upper) 28 oprcu is formed such that the radial outer side surface thereof slidably contacts the inner side surface of the cylindrical portion 222 of the lock cylinder 22.

  The outer surface circumferential groove 28oprd is an intermediate position in the height direction of the switching valve 28, and is a portion connected to the inlet 22i of the lock cylinder 22 at the outer surface 28op of the switching valve 28, and further, the inlet 22i. The groove is a groove for guiding the fluid flowing in from the outer circumferential surface 28op of the switching valve 28 in the circumferential direction. The outer surface circumferential groove 28oprd has a groove bottom which is an inner surface of the outer surface 28op, an outer surface circumferential ridge (upper) 28 oprcu located on the upper side, and an outer circumferential surface ridge (lower) 28 oprcb located on the lower side. The fluid flowing from the inflow port 22i is substantially confined in an annular space (without a reference numeral) surrounded by the inner surface of the cylindrical portion 222 of the lock cylinder 22, and the circumferential direction of the switching valve 28 The fluid can be guided to the opposite side of the inlet 22i. The space formed by the outer circumferential surface groove 28oprd is not a completely closed space, but the inlet 22i is opened radially outward, and the side through holes 28ioh are opened radially inward. ing. That is, the outer surface circumferential groove 28oprd is formed with a side through hole 28ioh which is radially inward at the bottom of the groove and penetrates the inner surface 28ip of the switching valve 28 and the outer surface 28op to communicate with each other. There is.

  The outer surface surface projecting ridge (lower) 28 oprcb is a portion serving as a partition for separating the outer surface surface circumferential groove 28 oprd located on the upper side thereof and the fourth O ring groove 28 opod 4 located on the lower side thereof. The fourth O-ring OR4 accommodated and connected to the fourth O-ring groove 28opod4 is supported from the upper side. The outer circumferential surface projecting ridge (lower) 28 oprcb is formed such that its radial outer surface is in slidable contact with the inner circumferential surface of the cylindrical portion 222 of the lock cylinder 22.

  The fourth O-ring groove 28 opod 4 is formed at a lower position in the height direction of the switching valve 28 and lower than the side through holes 28 i oh. In addition, the fourth O-ring groove 28 opod 4 is formed at a position facing the lower portion of the inner side surface 28 ip (without the reference numeral) in the radial direction of the switching valve 28. The fourth O-ring groove 28 opod 4 is formed on the outer side surface 28 op so as to be cut inward of the lower end edge of the outer side surface 28 op and to follow the substantially annular circumferential direction of the switching valve 28. The fourth O-ring groove 28 opod 4 is formed such that the depth in the radial direction (the direction in which the bottom surface extends) and the width in the height direction match the thickness of the fourth O-ring OR 4.

  Four side through holes 28ioh are formed so as to radially pass through the inner surface corresponding to the groove bottom of the outer surface circumferential groove 28oprd of the outer surface 28op and the inner circumferential surface protruding ridge 28iprc of the inner surface 28ip. It is a through hole. The four side through holes 28ioh are formed such that the circumferential direction of the switching valve 28 is separated by 90 degrees in plan view. The side through holes 28ioh constitute a part of an inflow path 28ir described later, and the fluid flowing in from the inflow port 22i is switched when flowing toward the fluid space FS via the outer circumferential groove 28oprd. A path is formed through the valve 28. The side through holes 28ioh are formed at the same angular position as the path 24ior of the piston guide 24 in the circumferential direction in plan view. Furthermore, when the switching valve 28 is located at the uppermost point, it is formed so as to have substantially the same height as the path 24ior of the piston guide 24 in the height direction. That is, when the switching valve 28 is located at the uppermost point, the side through holes 28ioh are formed to communicate with the path 24ior of the piston guide 24.

  As shown in FIG. 11 and FIG. 12, the side through holes 28ioh are connected to the upper and lower openings 28iprco which open a part of the inner side of the inner side surface turnout ridge 28iprc at the connection end with the inner side surface turnout ridge 28iprc. ing. The upper and lower openings 28iprco extend radially outward from the connection edge between the inner side surface circumferential protrusion 28iprc and the groove bottom of the first O-ring groove 28ipod1 and the second O-ring groove 28ipod2. It is a hole formed so as to penetrate the inner surface side circumferential ridges 28 iprc in the height direction with a diameter smaller than the radial width. As shown in FIG. 5, when the switching valve 28 is positioned at the uppermost point, the fluid flowing inward from the upper and lower opening ports 28iprco is provided to the first O ring OR1 and the second O ring OR2 directly above and directly below it. It is guided and guided to the path 24ior of the piston guide 24. On the other hand, as shown in FIG. 6, the fluid flowing inward from the upper and lower opening 28iprco is the first O ring OR1 and the second O ring OR2, and the piston The outer surface of the large diameter cylindrical portion 244 of the guide 24 is enclosed and blocked to stop the flow.

  As shown in FIG. 5, the inflow path 28 ir is configured by an outer surface surface peripheral groove 28 oprd of the switching valve 28, a side through hole 28 ioh and an upper and lower opening 28 iprco. The inflow path 28ir is connected to the inflow port 22i and is connectable to the path 24ior of the piston guide 24. In detail, the inflow path 28ir is connected to the path 24ior of the piston guide 24 when the switching valve 28 is located at the uppermost point. Then, when the switching valve 28 is located at the uppermost point, the fluid flowing in from the inflow port 22i flows into the path 24ior of the piston guide 24 through the inflow path 28ir. That is, when the switching valve 28 is positioned at the uppermost point, the fluid flowing in from the inflow port 22i enters the outer surface circumferential groove 28oprd, passes through the outer surface circumferential groove 28oprd and spreads around the entire switching valve 28; It goes to the inner surface 28ip side of the switching valve 28 through the two side through holes 28ioh, exits from the upper and lower opening 28iprco, is guided to the first O ring OR1 and the second O ring OR2, and the path of the piston guide 24 It flows into 24 ior.

  As shown in FIG. 6, the outflow path 28or is configured by the lower surface circumferential groove 28bprd of the switching valve 28, the upper and lower through holes 28tbh, and the inner side upper portion 28ipt. The outflow path 28or is connected to the outlet 22o and is connectable to the path 24ior of the piston guide 24. In particular, the outflow path 28or is connected to the path 24ior of the piston guide 24 when the switching valve 28 is at the lowest point. Then, when the switching valve 28 is at the lowest point, the fluid flowing out of the fluid space FS through the path 24ior of the piston guide 24 flows out to the outlet 22o of the lock cylinder 22 through the outlet path 28or. . That is, when the switching valve 28 is located at the lowest point, the fluid that has flowed out of the fluid space FS through the path 24ior of the large diameter cylindrical portion 244 of the piston guide 24 has its flow direction directed to the first O ring OR1. When turned upward, the inner upper surface 28ipt guides the upper surface 28tp of the switching valve 28 to the outer surface of the large diameter cylindrical portion 244 of the piston guide 24. Then, the fluid guided to the upper surface 28 tp goes to the lower surface 28 bp side through the upper and lower through holes 28 tbh. The fluid that has reached the lower surface 28 bp side is guided by the lower surface circumferential groove 28 bprd between the upper surface 224 tp of the bottom plate portion 224 of the lock cylinder 22, and the flow is open at only one point on the upper surface 224 tp of the bottom plate portion 224. It goes to the outlet 22 o and flows out of the outlet 22 o to the outside of the floating unit 10.

  As shown in FIG. 19, the first O-ring OR1 and the second O-ring OR2 are annular metal members in plan view. As shown in FIG. 1 and the like, the first O-ring OR1 is housed and connected to the first O-ring groove 28ipod1 of the inner side surface 28ip of the switching valve 28. The second O-ring OR2 is accommodated in and connected to the second O-ring groove 28ipod2 of the inner circle 28ip of the switching valve 28. The first O ring OR1 and the second O ring OR2 are both formed in an annular shape having the same diameter in plan view. The first O-ring OR1 and the second O-ring OR2 are both wire-like members having the same diameter in cross-sectional view. In the first O-ring OR1 and the second O-ring OR2, the fluid flowing in from the inflow port 22i through the side through hole 28ioh is formed from the upper and lower opening 28iprc formed in the inner side surface revolving ridge 28iprc and the piston guide 24 The upper and lower openings of the upper and lower opening 28iprc are sealed to guide the fluid to flow into the path 24i. In other words, the first O-ring OR1 seals at the inner side surface 28ip so that the fluid does not leak to the upper inner side surface 28iprc, and the second O-ring OR2 seals so as not to leak the lower side. Stop.

  Further, in the first O-ring OR1, when the switching valve 28 switches between the inflow path 28ir and the outflow path 28or by reciprocating the switching valve 28 in the height direction, between the inflow path 28ir and the outflow path 28or It is a member to isolate the That is, the first O ring OR1 seals the upper and lower opening 28irco which is the innermost side of the inflow path 28ir at the upper side, and seals the lower end of the inner side upper surface 28ipt which is the innermost side of the outflow path 28or at the lower side. Thereby, the fluid having a certain pressure or more flowing into the inflow path 28ir does not leak to the outflow path 28or, and similarly, the pressure by the urging force of the first spring member SP1 flowing out to the outflow path 28or There is no possibility that the fluid having the will leak to the inflow path 28ir. The first O-ring OR1 is located above the path 24ior of the piston guide 24 when the switching valve 28 is at the uppermost point, and guides the fluid that has passed through the inflow path 28ir to the path 24ior . On the other hand, when the switching valve 28 is located at the lowest point, the first O-ring OR1 guides the fluid that has passed through the path 24ior to the outflow path 28or.

  The third O-ring OR3 and the fourth O-ring OR4 are annular metal members in plan view as shown in FIG. As shown in FIG. 1 and the like, the third O-ring OR3 is accommodated and connected to the third O-ring groove 28opod3 of the outer surface 28op of the switching valve 28. The fourth O-ring OR4 is accommodated in and connected to the fourth O-ring groove 28opod 4 of the outer surface 28op of the switching valve 28. The third O ring OR3 and the fourth O ring OR4 are both formed in an annular shape having the same diameter in plan view. The third O-ring OR3 and the fourth O-ring OR4 are both wire-like members having the same diameter in cross-sectional view. The third O-ring OR3 and the fourth O-ring OR4 are provided with outer side surface salient ridges so that fluid flowing from the inlet 22i into the outer surface side circumferential groove 28oprd does not leak to the upper side and the lower side of the switching valve 28 (Upper) 28 oprct and outer surface side surface protruding ridge (lower) 28 oprcb is a member to be sealed.

  The valve shaft 30 is a member located between the movable block 80 and the switching valve 28 in the height direction, as shown in FIG. 1 and the like, for interlocking the movable block 80 and the switching valve 28. As shown in FIG. 13, the valve shaft 30 is formed in a cylindrical shape, and is a rod-like member extending in the height direction. The valve shaft 30 is housed slidably and reciprocably in the height direction inside a cylindrical portion 322 of the main body case 32 described later of the intermediate block 50. The height (length) of the valve shaft 30 is substantially equal to the length between the lower surface of the ball 85 held by the top plate all-direction retainer 84 described later of the movable block 80 and the upper surface 28 tp of the switching valve 28. It is formed to match. More precisely, the valve shaft 30 is formed such that its height (length) coincides with the length between the lower surface of the spacer 38 described later and the upper surface 28 tp of the switching valve 28. The valve shaft 30 is formed such that its lower surface abuts on the upper surface 28 tp of the switching valve 28. The valve shaft 30 is formed such that its upper surface abuts on the lower surface of the spacer 38. That is, the valve shaft 30 is sandwiched between the switching valve 28 and the spacer 38 in the height direction. When the reaction force F is applied to the top plate 82 of the movable block 80, the valve shaft 30 has the ball 85 whose downward force component Ftb of the reaction force F is held by the top plate retainer 84. Acted through spacer 38. When the reaction force F is applied to the top plate 82 of the movable block 80, the valve shaft 30 transmits the component Ftb of the downward force of the reaction force F to the switching valve 28. On the other hand, when the reaction force F is not applied to the top plate 82 of the movable block 80, the valve shaft 30 is biased upward by the second spring member SP2, so the upper surface of the switching valve 28 is It is pressed upward by 28 tp. Then, the valve shaft 30 acts on the top plate 82 via the ball 85 and the spacer 38 held by the top plate all-direction retainer 84, with the upward biasing force of the second spring member SP2. The valve shaft 30 is inserted into the cylindrical portion 322 of the main body case 32 and held slidably in the height direction.

  As shown in FIG. 1 etc., the main body case 32 is a member which should become a main body of the fixed block 20, and is a substantially cylindrical member which forms the external shape in planar view of the fixed block 20. As shown in FIG. As shown in FIGS. 14 and 15, the main body case 32 has a cylindrical portion 322 formed in a substantially cylindrical shape, and an inner collar portion 324 extending in a disc shape from the upper portion of the cylindrical portion 322 inward. , Is composed of. The main body case 32 forms a first space BS1 for housing the intermediate block 50 on the inner side of the cylindrical portion 322 and on the lower side of the inner collar portion 324.

  The cylindrical portion 322 is formed such that its outer diameter matches the outer diameter of the cylindrical portion 222 of the lock cylinder 22. The cylindrical portion 322 is formed so that the inner diameter thereof substantially matches the outer diameter of the intermediate block 50, more specifically, the outer diameter of the hooked portion 524 of the lock pin 52 described later. The cylindrical portion 322 is formed such that its height is the height necessary to accommodate the intermediate block 50 inside. The cylindrical portion 322 is formed such that the upper surface thereof can face and be close to the lower surface 822 bp of the top plate 82 described later of the movable block 80. The cylindrical portion 322 receives, at its upper surface, the reaction F received by the work held by the top plate 82 of the movable block 80 via the ball 85 held by the top plate all-direction retainer 84 described later and the spacer 38. Thus, the movable block 80 and the work can be supported. The cylindrical portion 322 is formed such that its lower surface can contact the upper surface of the outer collar portion 248 of the piston guide 24.

  As shown in FIG. 14, a spacer groove 322 rd is formed on the upper surface of the cylindrical portion 322 so as to slidably move the spacer 38 in the height direction. The spacer groove 322rd is formed in a U-shape cut downward from the upper surface of the cylindrical portion 322 in a cross sectional view, and formed circumferentially along the outer surface of the cylindrical portion 322 in a plan view. Spacer groove 322rd is formed such that the width in the radial direction in plan view (the direction in which the bottom surface extends) matches the width of spacer 38. The spacer groove 322rd has a height (depth) in the height direction that is sufficiently larger than the width of the spacer 38 and is further larger than the moving distance of the switching valve 28 in the height direction. As it is, it is formed.

  As shown in FIG. 14, the cylindrical portion 322 is cut out in an L shape in cross-sectional view from the upper surface to the outer surface outside the spacer groove 322rd, and is formed circumferentially in plan view A movable range groove 322od is provided. The movable range groove 322od is formed so as to be able to abut on an inner side surface of a cylindrical portion 824 described later of the top plate 82 of the movable block 80. That is, the movable range groove 322od is a cylindrical portion of the top plate 82 when the top plate 82 slides in the direction in which the bottom surface extends due to the component Fxy of the force in the direction in which the bottom surface extends. When the inner surface of the movable range groove 824 abuts on the inner surface of the movable range groove 322od, the slide is limited, and the movable range of the movable block 80 in the extending direction of the bottom surface is defined.

  The cylindrical portion 322 is formed with a shaft hole 322sh, which is four holes for penetrating in the height direction and slidingly and reciprocably storing the valve shaft 30 in the height direction. The four shaft holes 322sh are formed between the inner surface and the outer surface of the spacer groove 322rd in a plan view and separated from each other by 90 degrees in a plan view. The shaft hole 322sh is formed to penetrate in the height direction from the groove bottom of the spacer groove 322rd to the lower surface of the cylindrical portion 322. The shaft hole 322sh is formed such that its diameter matches the diameter of the valve shaft 30. The shaft hole 322sh is formed such that its height in the height direction is smaller than the length in the longitudinal direction of the valve shaft 30. Thus, the valve shaft 30 housed in the shaft hole 322sh can be positioned at the upper end above the upper end of the shaft hole 322sh by moving in the height direction, and the lower end thereof can be the shaft hole It can also be located below the lower end of 322sh.

  The cylindrical portion 322 is formed with a bolt recess 322 bd for screwing in a bolt 32 b connecting the main body case 32 with the cylindrical portion 222 of the lock cylinder 22 with the outer collar portion 248 of the piston guide 24 interposed therebetween. . The bolt recess 322bd is formed outside the shaft hole 322sh in a plan view, and further, the bolt hole 22bh of the cylindrical portion 222 of the lock cylinder 22 and the bolt hole 24bh of the outer collar portion 248 of the piston guide 24. It is formed in the position which overlaps with. In the bolt recess 322bd, an internal thread corresponding to the external thread of the shaft portion of the bolt 32b is formed. The bolt 32b is screwed into the bolt hole 22bh of the cylindrical portion 222 of the lock cylinder 22, and then screwed into the bolt hole 24bh of the outer collar portion 248 of the piston guide 24 and subsequently into the bolt recess 322bd. By screwing in, the lock cylinder 22, the piston guide 24 and the body case 32 are integrally fastened and fixed.

  In the cylindrical portion 322, a space forming concave portion 322bsd which is a concave portion for forming the first space BS1 for housing the intermediate block 50 is formed inside thereof. The space forming concave portion 322bsd is formed by cutting the inner side surface of the cylindrical portion 322 radially outward, and is formed to be a cylindrical concave surface which is circular in a bottom view. The inner surface of the space forming recess 322bsd is formed such that its diameter is larger than the outer diameter of the intermediate block 50, more specifically, the outer diameter of the hooked portion 524 of the lock pin 52. . In addition, the space forming recess 322bsd is formed such that its height in the height direction is sufficiently larger than the height of the hooked portion 524 of the lock pin 52. Thus, the space forming recess 322bsd forms a space in which the flange portion 524 of the lock pin 52 of the intermediate block 50 can slide in the direction in which the bottom surface extends, and a ball contact plate (described later in the height direction) The lower portion 36, an omnidirectional retainer 54, an X direction retainer 56, a ball support plate (middle) 58, and a Y direction retainer 60 form a space which can be supported while being slidable. At the lowermost portion of the space forming recess 322bsd, a ball rest plate (lower) 36 is screwed to a ball rest plate (lower) female thread portion 322 bsdf formed on the inner side surface.

  The ball abutment plate (lower) female screw portion 322 bsdf is formed such that the diameter thereof substantially matches the outer diameter of the outer surface of the ball abutment plate (lower) 36. The ball abutment plate (lower) female screw portion 322 bsdf is formed such that the height thereof substantially matches the height of the ball abutment plate (lower) 36. The ball screw plate (lower) female screw portion 322bsdf is formed with a female screw extending in the height direction. The diameter of the valley of the female screw of the ball screw plate (lower) female screw portion 322 bsdf is equal to the diameter of the thread of the male screw portion 36 m formed on the outer surface of the ball rubber plate (lower) 36.

  The inner collar portion 324 is an upper portion of the cylindrical portion 322 and is formed to annularly extend inward from the inner surface. The inner collar portion 324 is a portion for connecting the ball support plate (upper) 34 to the lower surface side and supporting the intermediate block 50 housed inside the main body case 32 from the upper side. The inner collar portion 324 is formed such that the upper surface thereof has the same height as the upper surface of the cylindrical portion 322 excluding the interspaced groove 322rd. That is, the inner collar portion 324 is formed such that the upper surface thereof can face and be close to the lower surface 822 bp of the top plate 82 described later of the movable block 80. The inner collar portion 324 is formed such that its inner diameter is larger than the outer diameter of the cylindrical portion 526 of the lock pin 52 described later. That is, the cylindrical portion 526 of the lock pin 52 of the intermediate block 50 configured to be slid slides in the radial direction (the direction in which the bottom surface extends) in the radial width formed by the inner side surface of the inner collar portion 324 can do. The inner collar portion 324 is formed so that the lower surface thereof is fitted and connected to the upper inner side surface of the cylindrical portion 322 except the space forming concave portion 322bsd of the cylindrical portion 322. There is.

  The inner flange portion 324 is formed with bolt holes 324bd, which are two bolt holes for inserting bolts 34b for bolting the ball pad plate (upper) 34 from the upper surface to the lower surface. The two bolt holes 324bd are formed 180 degrees apart from each other in the circumferential direction of the inner collar portion 324 in plan view. The bolt hole 324bd is formed such that the upper part thereof is opened to a large diameter which can accommodate the head of the bolt 34b, and the lower part thereof is formed to a diameter capable of inserting the axis of the bolt 34b.

  The ball abutment plate (upper) 34 is fastened to the lower surface of the inner collar portion 324 of the main body case 32 as shown in FIG. 1 and the like, and holds the ball 61 held by the Y direction retainer 60 of the intermediate block 50 described later. While supporting from the upper side, the rolling direction of the balls 61 is limited in the Y direction. As shown in FIG. 16, the ball rest plate (upper) 34 is formed in an annular shape in a plan view, and in a substantially square shape in a side view. The ball support plate (upper) 34 is formed such that the upper surface thereof can contact the lower surface of the inner collar portion 324 of the main body case 32. The ball abutment plate (upper) 34 is formed such that the inner diameter thereof matches the inner diameter of the inner collar portion 324 of the main body case 32. That is, the inner side surface of the ball backing plate (upper) 34 forms the same cylindrical concave as the inner side surface of the inner collar portion 324 of the main body case 32. The ball abutment plate (upper) 34 is formed such that its outer diameter matches the inner diameter of the upper inner side surface of the cylindrical portion 322 excluding the space forming recess 322 b sd. The ball rest plate (upper) 34 is disposed so as to be in contact with the lower surface of the inner collar portion 324 and to be fitted to the upper inner side surface of the cylindrical portion 322 excluding the space forming recess 322bsd. .

  In the ball backing plate (upper) 34, bolt holes 34bh, which are two bolt holes for screwing in the shaft of the bolt 34b, are formed. The two bolt holes 34bh are formed 180 degrees apart from each other in the circumferential direction in a plan view of the ball backing plate (upper) 34. The bolt holes 34bh are formed such that their positions are the same as the bolt holes 324bd of the inner collar portion 324 of the main body case 32 in plan view.

  The ball abutment plate (upper) 34 is a groove formed by drilling in a V shape in cross section from the lower surface to the upper surface side, as shown in FIG. 16, and is formed to extend in the Y direction Two grooves, Y-direction ball guide grooves 34 bady, are formed. The Y-direction ball and guide groove 34 bady is a groove for limiting the rolling direction of the balls 61 held by the Y-direction retainer 60 described later in the Y direction. The Y-direction ball guide groove 34 bady is formed such that its width is the width necessary to hold the ball 61. Specifically, in the Y-direction ball and guide groove 34 bady, the opening width of the lower opening is as wide as the diameter of the ball 61, and the upper groove bottom is smaller than the diameter of the ball 61. So, it is formed. The Y-direction ball and guide groove 34 bady is formed such that the depth of the groove in the height direction is approximately equal to the radius of the ball 61 or slightly shorter than the radius of the ball 61. The two Y-direction ball guide grooves 34bady extend in the Y-direction, and are arranged in parallel so as to face each other across a hole (not numbered) open at the center of the ball-placement plate (upper) 34. It is disposed on the lower surface of (upper) 34. Furthermore, the two Y-direction ball and guide grooves 34bady are formed to face the two-row arrangement formed by the plurality of ball holes 60h of the Y-direction retainer 60 disposed on the lower side thereof.

  The bolt 34 b is screwed into the bolt hole 324 bd of the inner collar portion 324 of the main body case 32 and the bolt hole 34 bh of the ball support plate (upper) 34, as shown in FIG. The ball backing plate (upper) 34 is integrally fastened. Thus, even if the intermediate block 50 housed inside the main body case 32 slides in the direction in which the bottom surface extends, the main body case 32 and the ball support plate (upper) 34 receive the intermediate block 50 in the main body case 32 Support from above.

  As shown in FIG. 1 and the like, the ball backing plate (bottom) 36 is screwed to a female thread portion 322 bsdf for ball backing plate (bottom) formed in the lower portion of the space forming recess 322 bsd located inside the cylindrical portion 322 of the main body case 32. It is a member for supporting from below the ball 51 rollably held by the omnidirectional retainer 54 described later on the upper surface thereof. That is, even if the intermediate block 50 housed inside the main body case 32 slides in the direction in which the bottom surface extends, the ball support plate (lower) 36 is supported from the lower side with the intermediate block 50 housed in the main body case 32 can do. As shown in FIG. 17, the ball backing plate (lower) 36 is formed in an annular shape in a plan view, and in a square shape in a side view. The ball bearing plate (bottom) 36 is formed such that the inner diameter thereof matches the outer diameter of the small diameter cylindrical portion 242 of the piston guide 24. The ball rest plate (bottom) 36 is formed such that its upper surface can contact and roll the ball 51 held by the omnidirectional retainer 54. In addition, the height of the upper surface of the ball support plate (lower) 36 is set to a height slightly lower than the lower surface of the main body shaft 522 of the lock pin 52 of the intermediate block 50 described later. It is formed. And, the ball support plate (lower) 36 is formed so that the upper surface thereof can be opposed to the lower surface of the main body shaft 522 of the lock pin 52 slid in the extending direction of the lower surface with a slight gap. There is. The ball bearing plate (lower) 36 is provided with an external thread portion 36m having an external thread extending in the height direction on its outer side surface. The male screw portion 36 m can be screwed to the female screw portion 322 bsdf for the ball contact plate (lower) of the cylindrical portion 322 of the main body case 32. Thus, the ball support plate (lower) 36 can be screwed to the lower portion of the cylindrical portion 322 of the main body case 32.

  The spacer 38 is slidably fitted in the spacer groove 322rd on the upper surface of the cylindrical portion 322 of the main body case 32 in the height direction as shown in FIG. 1 and the like, and the top plate of the movable block 80 is on the upper surface. A member for supporting the movable block 80 from the lower side while making the movable block 80 slideable in the extending direction of the bottom surface by bringing the ball 85 held by the top plate omnidirectional retainer 84 connected to 82 into contact with each other; It is a member for transmitting the component Ftb of the force in the height direction of the resistance F received by the work held by the movable block 80 to the switching valve 28 via the valve shaft 30 in contact with the lower surface thereof. As shown in FIG. 18, the spacer 38 is formed in an annular shape in a plan view, and in a flat shape in a side view. Spacer 38 is formed such that the inner diameter and the outer diameter thereof match the inner diameter and the outer diameter of space groove 322rd. Spacer 38 supports movable block 80 and transmits resistance component Ftb from movable block 80 such that the thickness in the height direction is smaller than the depth in the height direction of spacer groove 322rd. It is formed to have a thickness that provides the strength required to Spacer 38 is formed such that the top surface thereof is rollable and contactable. Spacer 38 is formed such that its lower surface can contact the upper end of valve shaft 30. Furthermore, when the spacer 38 and the valve shaft 30 are located at the uppermost point, the length between the lower surface of the spacer 38 and the upper surface of the spacer groove 322rd of the cylindrical portion 322 of the main body case 32 is the switching valve 28. It is configured to coincide with the moving length in the height direction of.

  The first space BS1 is a space formed inside the inner side surface of the cylindrical portion 322 of the main body case 32, as shown in FIG. 1 and the like, and particularly from the lower surface of the ball backing plate (upper) 34. This space is also a lower space, and is a space formed above the upper surface of the ball support plate (lower) 36 and above the upper surface of the small diameter cylindrical portion 242 of the piston guide 24. In the first space BS 1, a part of the intermediate block 50, that is, the upper portion of the main shaft portion 522 of the lock pin 52 described later, the engagement convex portion 522 cc, the flange portion 524 and the lower portion of the cylindrical portion 526 The omnidirectional retainer 54, the ball 55, the X direction retainer 56, the ball 57, the ball support plate (middle) 58, the Y direction retainer 60, and part of the ball 61 are accommodated.

  As shown in FIG. 1 and the like, the fixed block 20 has a stopping means 40 for stopping the intermediate block 50 using the pressure of the fluid supplied from the outside to the inflow port 22i. The stopping means 40 is composed of the lock cylinder 22, the piston guide 24, the lock piston 26, the switching valve 28, the valve shaft 30 and the spacer 38.

  In a state where a chuck for gripping a workpiece is connected to a top surface 822 tp of the top plate 82 of the movable block 80 described later, when the workpiece does not contact the peripheral edge of the hole of the part to be inserted, the workpiece and the movable In block 80, the resistance F against the movement is not acted. At this time, the switching valve 28 is moved to the uppermost point by the biasing force of the second spring member SP2. With the upward movement of the switching valve 28, the valve shaft 30, spacer 38 and top plate 82 also move upward. When the switching valve 28 is located at the uppermost point, the switching valve 28 connects the inflow path 28 ir to the path 24 ior of the piston guide 24. Since the inlet 22i is connected to the inflow path 28ir, the fluid supplied from the outside to the inflow port 22i at a constant pressure or more from the inflow path 22ir and the path 24ior from the inflow port 22i according to the pressure. And flow into the fluid space FS formed by the piston guide 24 and stored. The fluid flowing into and stored in the fluid space FS pushes the bottom surface of the body portion 262 of the lock piston 26 stored in the fluid space FS upward with the pressure. The lock / piston 26 pressed upward brings the engagement recess 264 cd of the small shaft portion 264 into contact with the engagement protrusion 522 cc of the main shaft portion 522 of the lock pin 52 of the intermediate block 50. Then, the engagement recess 264 cd engages with the engagement protrusion 522 cc to restrain the intermediate block 50 so that sliding in the direction in which the bottom surface of the intermediate block 50 extends can not be performed.

  On the other hand, in a state where the chuck for gripping the work is connected to the top surface 822 tp of the top plate 82 of the movable block 80 described later, when the work contacts the peripheral edge of the hole of the part to be inserted In block 80, a drag force F is applied to resist the movement. The component Ftb of the force in the height direction of the drag force F is transmitted to the switching valve 32 through the ball 85 supporting the top plate 82, the spacer 38 and the valve shaft 30. The reaction force F is a sufficiently large force, and therefore a force larger than the biasing force of the second spring member SP2 that biases the switching valve 32 upward, and causes the switching valve 32 to move downward. When the switching valve 32 is located at the lowermost point, the switching valve 32 includes the side through hole 28ioh, which is the inflow path 22ir, and the upper and lower opening 28iprco, the lower portion of the outer surface of the large diameter cylindrical portion 244 of the piston guide 24 and the first. As it is surrounded by the O-ring OR1 and the second O-ring OR2, the pressure of the fluid toward the fluid space FS located inside the large diameter cylindrical portion 244 of the piston guide 24 is shut off. At the same time, the switching valve 32 connects the outflow path 28or to the path 24ior of the piston guide 24. The path 24ior communicates with the fluid space FS. The fluid stored in the fluid space FS below the bottom surface of the body portion 262 of the lock piston 26 is biased by the first spring member that biases the lock piston 26 downward. From the outer surface of the main body portion 262, pass through the path 24ior to the outflow path 28or. Since the outflow path 28or is connected to the outlet 22o of the lock cylinder 22, the fluid flows out to the outside. As the fluid flows out, the lock piston 26 is directed downward, that is, toward the bottom surface 224 bp. Thereby, the engagement convex portion 522cc of the main shaft portion 522 of the lock pin 52 of the lock block 52 of the intermediate block 20 engaged and restrained by the engagement recess 264cd of the small shaft portion 264 of the lock / piston 26 of the fixed block 20 is It is separated from the engagement recess 264 cd and released from the engaged and restrained state.

  That is, when the movable block 80 approaches the fixed block 20 from the outside, the restriction means 40 is applied with a force in the downward direction, that is, toward the fixed block 20 and the fluid pressure is interlocked with the movable block 80. Then, the intermediate block 50 is released from the stopped state.

(Intermediate block)
As shown in FIG. 1 and the like, the intermediate block 50 is at least partially housed in the first space BS1 of the fixed block 20, and is configured to be slidable in the direction in which the bottom surface extends. It is a block configured in combination. The middle block 50 has a second space BS2 formed therein, and accommodates at least a part of the fixed block 80 in the second space BS2. The intermediate block 50 slides the movable block 80 to be stored in the direction in which the bottom surface extends by sliding in the direction in which the bottom surface extends. Further, the intermediate block 50 accommodates the movable block 80 slidably in the height direction. The intermediate block 50 includes a lock pin 52, an omnidirectional retainer 54, a ball 55, an X direction retainer 56, a ball 57, a ball abutment plate 58, a Y direction retainer 60 and a ball 61.

  The lock pin 52 is a member that forms the main body of the intermediate block 50 as shown in FIG. 1 and the like, and is a member that forms a second space BS2 inside and stores a part of the movable block 80, It is a member which has the convex part engaged and restrained by the stop means 40 of the fixed block 20 in the lower part. As shown in FIG. 21, the lock pin 52 has a cylindrical main body shaft 522 extending in the height direction, and a convex shape downwardly from the center of the lower surface of the main body shaft 522, and has a hemispherical shape. An engaging convex portion 522 cc formed, an annular portion 524 connected to the upper surface of the main body shaft portion 522 and extending radially outward from the outer surface of the main body axial portion 522; And a cylindrical portion 526 formed in a cylindrical shape extending upward from a position inside the outer diameter of the main body shaft 522. The lock pin 52 is housed in the first space BS1 formed by the fixed block 20, the main body shaft 522, a part of the engagement convex part 522cc, the hooked part 524 and the part of the cylindrical part 526. .

  In the main shaft portion 522, the movable block 80 is movable in the extending direction of the bottom surface extending in the height direction at a position between the movable block 80 positioned on the upper side and the restraining means 40 of the fixed block 20 positioned on the lower side. It is the part that becomes the axis to support the The main body shaft portion 522 is formed such that the lower surface thereof faces the upper surface of the ball support plate (lower) 36 with a slight gap. The main body shaft 522 is formed such that the upper surface thereof has substantially the same height as the upper surface of the omnidirectional retainer 54 mounted on the upper surface of the ball support plate (lower) 36. The main body shaft 522 is formed such that its outer diameter is substantially equal to the inner diameter of the ball contact plate (lower) 36.

  The engagement projection 522 cc is engaged with the engagement recess 264 cd of the lock piston 26 of the fixed block 20 as shown in FIG. 21 to extend the bottom surface of the entire intermediate block 50 having the lock pin 52. It is a convex part for a slide to be stopped. The lock pin 52 having the engagement projection 522 cc constitutes a part of the position return means 70. The engagement convex portion 522 cc is formed such that the semispherical lowermost point thereof is positioned lower than the upper surface of the small diameter cylindrical portion 242 of the piston guide 24. The hemispherical diameter of the engagement protrusion 522 cc is smaller than the outer diameter of the main body shaft 522, and is approximately half the length of the inner diameter of the small diameter cylindrical portion 242 of the piston guide 24. It is formed. The gap between the side surface of the engagement protrusion 522cc and the inner surface of the small diameter cylindrical portion 242 of the piston guide 24 defines a sliding movable range in the direction in which the bottom surface of the engagement protrusion 522cc extends. The engagement protrusion 522cc is formed to be a smooth hemispherical surface. Thus, the engagement convex portion 522cc can be guided to the first conical surface 264co1 and guided to the cylindrical surface 264cy by abutting on the first conical surface 264co1 of the engagement recess 264cd. Furthermore, the engagement protrusion 522cc can be circumferentially engaged with the lower surface of the engagement protrusion 522cc on the cylindrical surface 264cy of the engagement recess 264cd. Thereby, the entire intermediate block 50 having the lock pin 52 can be restrained in the direction in which the bottom surface extends.

  The bowl-shaped portion 524 is extended to the outside of the lock pin 52, and is held by the ball 55 held by the omnidirectional retainer 54 located at the lower side thereof and the ball 57 held by the X-direction retainer 56 positioned above the same. It is a portion which is pinched to make the lock pin 52 slideable in the direction in which the bottom surface extends, and is also supported so as not to move in the height direction. The flange portion 524 has an outer surface opposed to the inner surface of the space forming recess 322bsd of the cylindrical portion 322 of the main body case 32, and the outer diameter thereof is smaller than the diameter of the space forming recess 322bsd. And, it is formed to have a diameter larger than the inner diameter of the ball backing plate (lower) 36. The area of the bowl-shaped portion 524 is such that the lower surface thereof can contact the plurality of balls 55 held by the omnidirectional retainer 54 and the plurality of balls 55 slide in the direction in which the bottom surface extends. It is formed to have. Furthermore, the bowl-shaped portion 524 is formed such that its lower surface faces the upper surface of the ball pad (lower) 36. Further, the inner portion of the lower surface of the flange portion 524 is integrally connected to the upper surface of the main body shaft 522. The flanged portion 524 is formed such that the upper surface thereof faces the X-direction retainer 56 described later. The ridged portion 524 has a thickness in the height direction sufficient to form a groove depth of an X-direction ball / guide groove 524badx described later, and is connected to the main body shaft portion 522. The lock pin 52 is formed to have a thickness necessary to be supported from the upper and lower sides.

  In the bowl-like portion 524, as shown in FIG. 21, the ball 57 held by the X-direction retainer 56 on its upper surface is restricted so that it can only roll in the X direction relative to the lock pin 52. An X-direction ball guide groove 524badx is formed as a groove for The X-direction ball and guide groove 524badx is a groove formed by being perforated in a cross-sectional view from the upper surface to the lower surface side of the bowl-like portion 524, and is a groove formed to extend in the X direction It is. The X-direction ball guide groove 524badx is formed such that its width is the width necessary to hold the ball 57. Specifically, the X-direction ball guide groove 524badx has an opening width at the upper side equal to the diameter of the ball 57, and a lower groove bottom has a width smaller than the diameter of the ball 57. So, it is formed. The X-direction ball guide groove 524badx is formed such that the depth of the groove in the height direction is approximately equal to the radius of the ball 57 or slightly shorter than the radius of the ball 57. Two X-direction ball and guide grooves 524badx extend in the X-direction, and are disposed on the upper surface of the brim-like portion 524 so as to be opposite to and in parallel with each other with the cylindrical portion 526 interposed therebetween. Furthermore, the two X-direction ball guide grooves 524badx are formed to face the two-row arrangement formed by the plurality of ball holes 56h of the X-direction retainer 56 disposed on the upper side thereof.

  As shown in FIG. 21, the cylindrical portion 526 extends upward from the innermost portion of the upper surface of the bowl-shaped portion 524 and is formed in an annular shape in plan view. The cylindrical portion 526 has an inner side surface 526isp that forms a cylindrical surface on the inner side. The inner side surface 526isp is a portion forming the second space BS2 in the middle block 50. The cylindrical portion 526 is an inner side surface 526isp that forms the second space BS2, and is a portion that slidably houses a top plate connecting shaft 86, which will be described later, of the movable block 80 in the height direction. The cylindrical portion 526 is formed such that the height of the upper surface thereof is equal to or slightly lower than the height of the upper surface of the cylindrical portion 322 and the inner collar portion 324 of the main body case 32. There is. The outer diameter of the outer surface forming the cylindrical surface of the cylindrical portion 526 is smaller than the inner diameter of the inner collar portion 324 of the main body case 32 and the inner diameter of the ball support plate (upper) 34 connected below it. It is formed. The difference between the outer diameter of the cylindrical portion 526 and the inner diameter of the inner collar portion 324 of the main body case 32 and the inner diameter of the ball support plate (upper) 34 connected therebelow is movable in the extending direction of the bottom surface of the cylindrical portion 526 Define the scope. The cylindrical portion 526 is formed such that the inner diameter of the inner side surface 526isp is a diameter necessary to support the top plate connecting shaft 86 that constitutes the movable block 80. Further, the lower portion of the inner side surface 526isp is formed to extend downward from the lower surface of the cylindrical portion 526, and is formed to be bored to the inside of the collar portion 524. That is, the inner side surface 526 isp is a cylindrically formed recess that extends in the height direction across the inside of the cylindrical portion 526 and the inside of the bowl-shaped portion 524, and opens the upper surface of the cylindrical portion 526. The recess formed by the inner side surface 526isp forms a second space BS2.

  In the cylindrical portion 526, as shown in FIG. 21, a shaft / stopper / guide hole 526ssh which is a hole penetrating the central axis of the cylindrical shape in the radial direction substantially at an intermediate position in the height direction of the cylindrical portion 526. Is formed. The shaft stopper / guide hole 526ssh is a hole for accommodating the top plate connecting shaft / stopper 88, which radially penetrates the top plate connecting shaft 86 described later of the movable block 80, so as to be movable in the height direction. is there. That is, the shaft stopper / guide hole 526ssh is a retaining member for preventing the top plate connecting shaft 86 constituting the movable block 80 from moving upward from the second space BS while being able to reciprocate the top plate connecting shaft 86 in the height direction. The top plate connecting shaft / stopper 88 is a hole for defining the movable range in the height direction. The shaft, stopper, and guide hole 526 ssh may be formed so as to penetrate the central axis of the cylindrical portion 526 in either the X direction or Y direction orthogonal to that of the cylindrical portion 526. The central axis is formed to penetrate in the Y direction. The shaft, stopper, and guide holes 526 ssh are formed as two holes on one side and the other side of the side surface of the cylindrical portion 526 in the Y direction. The shaft stopper / guide hole 526 ssh is formed in a substantially oval shape slightly extended in the height direction in a front view as viewed from the Y direction. The shaft, stopper, and guide hole 526ssh have a diameter such that the opening diameter in the extending direction of the bottom, which is the lateral width when viewed from the Y direction, matches the diameter (thickness) of the top plate connecting shaft and stopper 88. It is formed. The shaft, stopper, and guide hole 526ssh are formed so that the opening diameter in the height direction, which is the height as viewed from the Y direction, is larger than the diameter (thickness) of the top plate connecting shaft and stopper 88. It is done. In detail, in the front view viewed from the Y direction, the difference between the opening diameter in the height direction and the diameter of the top plate connecting shaft stopper 88 in the shaft / stopper / guide hole 526ssh is the height of the movable block 80 It is formed to have a height such as to coincide with the reciprocation distance in the direction, that is, the reciprocation distance in the height direction of the switching valve 28.

  The omnidirectional retainer 54 rotatably holds a plurality of balls 55 as shown in FIG. 1 and the like, and by the balls 55, the lower surface of the flange portion 526 of the lock pin 52 and the ball support plate (lower) 36 It is a member located between the upper surface and for slidably supporting the hook-like portion 526 of the lock pin 52 in the direction extending from the lower surface side to the bottom surface. As shown in FIG. 22, the omnidirectional retainer 54 is formed in an annular shape in plan view and in a flat plate shape in side view. The omnidirectional retainer 54 is formed with a plurality of ball holes 54h penetrating the upper surface and the lower surface in the height direction. The plurality of ball holes 54 h are evenly distributed in the circumferential direction in the annular shape of the omnidirectional retainer 54. The ball holes 54 h are formed such that the diameter in plan view matches the diameter of the balls 55. The omnidirectional retainer 54 is formed such that the inner diameter of its annular shape is larger than the outer diameter of the main body shaft 522 of the lock pin 52. The omnidirectional retainer 54 is formed such that its annular outer diameter is smaller than the diameter of the space forming recess 322 bsd of the cylindrical portion 322 of the main body case 32. The omnidirectional retainer 54 has a thickness in the height direction smaller than the diameter of the ball 55 and has a height equal to or greater than the height of the main shaft 522 of the lock pin 52. It is formed to be of small height. Thus, the omnidirectional retainer 54 holding the plurality of balls 55 has a bottom surface between the outer surface of the main body shaft 522 of the lock pin 52 and the side surface of the space forming recess 322bsd of the cylindrical portion 322 of the main body case 32. It can slide in any direction in the extending direction.

  The plurality of balls 55 are held by the plurality of ball holes 54h of the omnidirectional retainer 54, as shown in FIG. 1 and the like, and the lower surface of the hooked portion 526 of the lock pin 52 is placed on the uppermost point of the plurality of balls 55. The ball is a ball for slidably supporting the lock pin 52 in the direction in which the bottom surface extends above the ball support plate (bottom) 36. The plurality of balls 55 are formed such that their diameter is slightly larger than the height of the body shank 522 of the lock pin 52. The plurality of balls 55 have the strength and rigidity necessary to slidably support the lock pin 52 in the direction from the bottom side to the bottom side.

  The X-direction retainer 56 rotatably holds a plurality of balls 57 as shown in FIG. 1 and the like, and the balls 57 allow the upper surface of the hook-like portion 526 of the lock pin 52 and a ball contact plate (middle) to be described later. Located between the lower surface of the ball bearing 58 and the lower surface of the ball bearing plate 58, the collar 526 of the lock pin 52 is slidably supported in the X direction relative to the ball bearing plate 58 from the upper surface side. It is a member. As shown in FIG. 23, the X-direction retainer 56 is formed in an annular shape in plan view and in a flat plate shape in side view. The X-direction retainer 56 is formed with a plurality of ball holes 56h which penetrate the upper surface and the lower surface in the height direction and are arranged in the X direction. Rows formed by the plurality of ball holes 56h are arranged in two rows, and in the annular shape of the X-direction retainer 56, are arranged symmetrically on one side and the other side in the Y-direction across the inner hole There is. The ball holes 56 h are formed such that the diameter in plan view matches the diameter of the balls 57. The X-direction retainer 56 is formed such that the inner diameter of its annular shape is larger than the outer diameter of the cylindrical portion 526 of the lock pin 52. The X-direction retainer 56 is formed such that the outer diameter of the annular shape thereof is smaller than the diameter of the space forming recess 322 bsd of the cylindrical portion 322 of the main body case 32. The X-direction retainer 56 has a thickness in the height direction smaller than the diameter of the ball 57, and the upper surface of the hook-like portion 524 of the lock pin 52 and the lower surface of the ball support plate (middle) 58 Are formed to be smaller in height than the distance between them. Thus, the X-direction retainer 56 holding the plurality of balls 57 can slide between the outer surface of the cylindrical portion 526 of the lock pin 52 and the inner surface of the cylindrical portion 322 of the main body case 32.

  The plurality of balls 57 are held by the plurality of ball holes 64 of the X-direction retainer 56 as shown in FIG. 1 and the like, and the upper surfaces of the plurality of balls 57 are formed on the lower surface of the ball support plate (middle) 58 The X-direction ball guide groove 58badx can be rotatably fitted, and the lower surface side of the plurality of balls 57 can be rolled to the X-direction ball guide groove 524badx formed on the upper surface of the hook portion 524 of the lock pin 52 And a ball for sliding and supporting the lock pin 52 relative to the ball pad 58 (middle). That is, the plurality of balls 57 are sandwiched between the X-direction ball / guide groove 58badx and the X-direction ball / guide groove 524badx, and the plurality of balls 57 roll only in the X direction relative to the ball abutment plate 58 (middle). By moving, the lock pin 52 can slide only in the X direction relative to the ball abutment plate 58 (middle). The plurality of balls 57 are formed such that their diameter is the diameter necessary to fit in the X-direction ball guide groove 58badx and the X-direction ball guide groove 524badx. The plurality of balls 57 have the strength and rigidity necessary to slidably support the lock pin 52 in the direction from the top to the bottom.

  As shown in FIG. 1 and the like, the ball support plate (middle) 58 is a lock pin via an X-direction retainer 56 that holds the ball 57 while making the lock pin 52 slidable in the X and Y directions. It is a member for supporting 52 from the upper side. As shown in FIG. 24, the ball backing plate (middle) 58 is formed in an annular shape in a plan view, and is formed in a substantially square shape in a side view. The outer surface of the ball abutment plate 58 faces the side surface of the space forming recess 322bsd of the cylindrical portion 322 of the main body case 32, and the outer diameter of the outer surface is the space forming recess 322bsd of the cylindrical portion 322 of the main body case 32. It is formed to be smaller in diameter than the diameter of. The inner surface of the ball support plate (middle) 58 faces the outer surface of the cylindrical portion 526 of the lock pin 52, and the inner diameter of the inner surface is larger than the outer diameter of the cylindrical portion 526 of the lock pin 52. It is formed as it is. The ball backing plate (middle) 58 is restricted so that the balls 57 held on the lower surface thereof by the X-direction retainer 56 can only roll in the X direction relative to the ball backing plate (middle). The X-direction ball / guide groove 58badx, which is a groove, is formed, and the ball 61 held by the Y-direction retainer 60 described later on its upper surface rolls only in the Y direction relative to the ball support plate (middle) A Y-direction ball guide groove 58bady is formed, which is a groove for limiting as possible.

  As shown in FIG. 24, the X-direction ball guide groove 58badx is a groove formed by being perforated in a cross-sectional view from the lower surface to the upper surface side of the ball backing plate (middle) 58. It is a groove formed to extend in the direction. The X-direction ball guide groove 58badx is formed such that its width is the width necessary to hold the ball 57. Specifically, in the X-direction ball guide groove 58badx, the opening width of the lower opening is about the same as the diameter of the ball 57, and the upper groove bottom is smaller than the diameter of the ball 57. So, it is formed. The X-direction ball guide groove 58badx is formed such that the depth of the groove in the height direction is approximately equal to the radius of the ball 57 or slightly shorter than the radius of the ball 57. The X-direction ball guide groove 58badx extends in the X direction, and is disposed on the lower surface of the ball backing plate (middle) 58 so as to face and be parallel to each other across the central hole of the ball backing plate (middle) 58. Are arranged. Further, the two X-direction ball guide grooves 58badx are formed to face the two-row arrangement formed by the plurality of ball holes 56h of the X-direction retainer 56 disposed on the lower side thereof.

  As shown in FIG. 24, the Y-direction ball guide groove 58bady is a groove formed by being perforated in a cross-sectional view from the upper surface to the lower surface side of the ball backing plate (middle) 58, It is a groove formed to extend in the direction. The Y-direction ball guide groove 58 bady is formed such that its width is the width necessary to hold the ball 61. Specifically, in the Y-direction ball guide groove 58 bady, the opening width of the opening on the upper side is about the same as the diameter of the ball 61, and the groove bottom on the lower side is smaller than the diameter of the ball 61 So, it is formed. The Y-direction ball guide groove 58bady is formed such that the depth of the groove in the height direction is approximately the same as the radius of the ball 61 or slightly shorter than the radius of the ball 61. The Y-direction ball guide groove 58bady extends in the Y direction, and is disposed on the upper surface of the ball backing plate (middle) 58 so as to face and be parallel to each other across the hole on the center side of the ball backing plate (middle) 58. Are arranged. Further, the two Y-direction ball guide grooves 58bady are formed to face the two-row arrangement formed by the plurality of ball holes 60h of the Y-direction retainer 60 disposed on the upper side thereof.

  The Y-direction retainer 60 rotatably holds a plurality of balls 61 as shown in FIG. 1 and the like, and the upper surface of the ball support plate (middle) 58 and the lower surface of the ball support plate (upper) 34 , And is a member for supporting the ball contact plate (middle) 58 slidably in the Y direction relative to the ball contact plate (upper) 34 from the upper surface side. As shown in FIG. 25, the Y-direction retainer 60 is formed in an annular shape in plan view and in a flat plate shape in side view. The Y-direction retainer 60 is formed with a plurality of ball holes 60h which penetrate the upper surface and the lower surface in the height direction and are aligned in the Y direction. The rows formed by the plurality of ball holes 60h are arranged in two rows, and in the annular shape of the Y direction retainer 60, they are arranged symmetrically on one side and the other side in the X direction across the inner holes. There is. The ball hole 60 h is formed such that the diameter in plan view matches the diameter of the ball 61. The Y-direction retainer 60 is formed such that the inner diameter of its annular shape is larger than the outer diameter of the cylindrical portion 526 of the lock pin 52. The Y-direction retainer 60 is formed such that the outer diameter of the annular shape thereof is smaller than the inner diameter of the cylindrical portion 322 of the main body case 32. The Y-direction retainer 60 has a thickness in the height direction smaller than the diameter of the ball 61, and between the upper surface of the ball support plate (middle) 58 and the lower surface of the ball support plate (upper) 34. It is formed to be smaller in height than the distance. Thus, the Y-direction retainer 60 holding the plurality of balls 61 can slide between the outer surface of the cylindrical portion 526 of the lock pin 52 and the inner surface of the cylindrical portion 322 of the main body case 32.

  The second space BS2 is a space formed inside the cylindrical portion 526 of the lock pin 52, as shown in FIG. In the second space BS2, a part of the movable block 80, that is, a top plate connecting shaft 86 and a portion of the top plate connecting shaft / stopper 88 described later are accommodated.

  The fixed block 20 and the intermediate block 50 have position return means 70 for returning the intermediate block 50 which slides in the direction in which the bottom surface extends relative to the fixed block 20 to a predetermined basic position in the direction in which the bottom surface extends. The position return means 70 is composed of an engagement recess 264 cd of the lock piston 26 of the fixed block 20 and an engagement projection 522 cc of the lock pin 52 of the intermediate block 50. The position return means 70 is an intermediate position in which the first conical surface 264co1 of the engagement recess 264cd of the lock piston 26 pressed by the fluid slides in the direction in which the bottom surface extends from the state of FIG. 3 to the state of FIG. The intermediate block 50 is returned to the position on the central axis of the engagement recess 264 cd by moving upward while abutting on the hemispherical surface of the engagement convex portion 522 cc of the block 50.

(Movable block)
The movable block 80 is a block formed by combining a plurality of members located on the chuck side of the floating unit 10, that is, the upper side of FIG. The movable block 80 is configured such that at least a part is accommodated in the second space BS2 of the intermediate block 50, is capable of coming into and coming out of contact with the fixed block 20, and has a top surface 822tp. A top surface 822 tp (upper surface in FIG. 1) of the movable block 80 is a surface connected to a chuck for gripping a workpiece when the floating unit 10 is used. The movable block 80 includes a top plate 82, a top plate all-direction retainer 84, balls 85, a top plate connecting shaft 86, and a top plate connecting shaft / stopper 88. The movable block 80 has the top plate connecting shaft 86 housed in the lock pin 52 forming the second space BS, and the lock pin 52 of the intermediate block 50 is returned to the central position by the position return means 70, Return to the center position.

  The top plate 82 is a member located on the top of the movable block 80 as shown in FIG. 1 and the like, and is a member connected to a chuck for gripping a work. The top plate 82 extends cylindrically from the outermost part of the main body 822 downward from the outermost part of the main body 822 as shown in FIG. 26 and FIG. And a cylindrical portion 824 formed as described above. The main body portion 822 has a top surface 822 tp connected to a chuck for gripping a workpiece, and a lower surface 822 bp opposite to the fixed block 20 and the intermediate block 50. Further, a bolt hole 822bh is formed in the main body 822 so as to penetrate the center in plan view from the top surface 822tp to the lower surface 822bp in the height direction. Further, the main body portion 822 is formed with a shaft fitting concave portion 822 cd which is a concave portion having a circumferential shape in a bottom view circumferentially formed by drilling around the bolt hole 822 bh from the lower surface 822 bp toward the top surface 822 tp. ing. Furthermore, the main body portion 822 is bored upward in the upper surface inside of the shaft fitting recess 822 cd and between the side surface of the shaft fitting recess 822 cd and the bolt hole 822 bh by 180 degrees apart from each other in a bottom view A rotation stop pin recess 822pd which is two recesses is formed. The bolt hole 822bh is formed such that the upper part has a diameter and depth in which the head of the bolt 86b can be accommodated, and the lower part is formed so as to have a diameter through which the shaft of the bolt 86b is inserted. The shaft fitting recess 822 cd is a recess in which the upper end portion of the top plate connecting shaft 86 is fitted and the top plate 82 and the top plate connecting shaft 86 are connected. The shaft fitting recess 822 cd is formed such that the diameter of its side surface matches the diameter of the top plate connecting shaft 86. The lower end of the bolt hole 822bh opens at the center of the shaft fitting recess 822cd. Furthermore, the rotation stop pin recess 822pd is a recess for engaging the rotation stop pin 86p described later so that the top plate 82 and the top plate connection shaft 86 do not rotate relative to each other.

  The main body portion 822 is formed such that a top surface 822 tp which is the upper surface thereof can be connected to a chuck for gripping a work. The main body portion 822 is formed so as to have a disk shape in a plan view and a substantially square shape in a side view. The main body portion 822 is formed such that the outer diameter of the outer side surface thereof matches the outer diameter of the main body case 32 and the lock cylinder 22. The thickness in the height direction of the main body portion 822 supports the chuck and the work connected to the top surface 822 tp, and the strength and rigidity necessary for inserting the work into the hole of the part in which the hole is formed It is shaped to be holdable. When the movable block 80 is positioned at the lowermost point, the lower surface 822 bp of the main body 822 is the upper surface of the cylindrical portion 322 of the main body case 32 of the fixed block 20 and the upper surface of the inner flange portion 324; It is formed to face the upper end edge of the cylindrical portion 526 of the lock pin 52 with a slight gap.

  The cylindrical portion 824 is opposed to the inner side surface of the movable range groove 322od of the cylindrical portion 322 of the main body case 32 at a constant distance when the movable block 80 is positioned at the basic center position. Then, as shown in FIG. 3, in the cylindrical portion 824, when the movable block 80 slides in the direction in which the bottom surface extends, the inner surface of the cylindrical portion 824 abuts against the inner surface of the movable range groove 322od. The movable range of 80 can be limited. The cylindrical portion 824 is formed such that the height thereof substantially matches the depth in the height direction of the movable range groove 322od.

  The top plate omnidirectional retainer 84 is connected to the outer portion of the lower surface 822bp of the main body 822 of the top plate 82 as shown in FIG. It faces the upper surface of the spacer 38 and supports the top plate 82 slidably in the direction in which the bottom surface extends on the upper surface of the spacer 38. As shown in FIG. 28, the top plate full-direction retainer 84 is formed in an annular shape in a plan view, and in a flat shape in a side view. The top plate full-direction retainer 84 is formed with a plurality of ball holes 84 h penetrating the upper surface and the lower surface in the height direction. The plurality of ball holes 84 h are uniformly distributed in the circumferential direction in the annular shape of the top plate full-direction retainer 84. The ball holes 84 h are formed such that the diameter in plan view matches the diameter of the balls 85. The top plate omnidirectional retainer 84 is formed such that the inner diameter of its annular shape is larger than the inner diameter of the spacer 38. The top plate omnidirectional retainer 84 is formed such that the outer diameter of its annular shape is smaller than the outer diameter of the spacer 38. That is, the top-plate omnidirectional retainer 84 is formed in a shape and size that can be placed on the upper surface of the spacer 38 in plan view. The top plate omnidirectional retainer 84 is formed such that its thickness in the height direction is smaller than the diameter of the ball 55 and smaller than the height of the cylindrical portion 824 of the top plate 82. It is done. The top-plate all-direction retainer 84 holding the plurality of balls 85 extends on the upper surface of the spacer 38 housed in the spacer groove 322rd of the cylindrical portion 322 of the main body case 32 of the fixed block 20, and the bottom surface extends. It can slide in any direction in the direction.

  The plurality of balls 85 are held in the plurality of ball holes 84h of the top plate all-direction retainer 84 as shown in FIG. 1 and the like, and the lower surface 822 bp of the main body 822 of the top plate 82 is A ball for mounting and mounting on the upper surface of the spacer 38 of the fixed block 20 and supporting the movable block 80 provided with the top plate 82 on the upper surface of the spacer 38 slidably in the direction in which the bottom surface extends. is there. The plurality of balls 85 have a diameter slightly larger than a depth obtained by subtracting the thickness of the spacer 38 from the depth in the height direction of the spacer groove 322rd of the main body case 32 of the fixed block 20, It is formed. The plurality of balls 55 have the strength and rigidity necessary to support the top plate 82 slidably in the extending direction from the lower side to the bottom side.

  The top plate connection shaft 86 extends in the height direction to be a central axis of the movable block 80 and is formed in a substantially cylindrical shape for supporting the top plate 82 in the height direction at its center, as shown in FIG. Member. As shown in FIG. 29, the top plate connecting shaft 86 is formed so that its shape is circular in plan view, and is substantially rectangular extending in the height direction in side view. That is, the top plate connecting shaft 86 is formed in a substantially cylindrical shape. The top plate connecting shaft 86 is formed such that the diameter of the circular shape in a plan view thereof matches the inner diameter of the inner side surface 526isp of the cylindrical portion 526 of the lock pin 52 of the intermediate block 50, ie, the diameter of the second space BS2. It is done. Also, the height in the height direction of the top plate connecting shaft 86 matches the depth in the height direction of the inner side surface 526isp of the cylindrical portion 526 of the lock pin 52, that is, the depth of the second space BS2. , Is formed. Thereby, the top plate connecting shaft 86 which is a part of the movable block 80 can be accommodated in the second space BS2.

  The top plate connecting shaft 86 has a bolt recess 86 bd which is a center in a plan view and is bored downward from the upper surface thereof. The bolt recess 86 bd is a recess for screwing the axis of the bolt 86 b into the top plate connecting shaft 86. The bolt recess 86 bd is formed such that its diameter matches the diameter of the shaft of the bolt 86 b. The bolt recess 86bd is formed such that its depth is slightly shorter than the axial length of the bolt 86b. In the bolt recess 86bd, an internal thread corresponding to an external thread formed on the shaft of the bolt 86b is formed. In the top plate connecting shaft 86, in a plan view, the rotation stopping pin recess 86pd is formed so as to be separated from each other by 180 degrees with respect to the bolt recess 86bd and downward from the upper surface. The rotation stop pin recess 86pd is a recess for preventing rotation of the top plate 82 and the top plate connection shaft 86 relative to each other when the rotation stop pin 86p is fitted. The top plate connection shaft 86 is formed with a shaft / stopper through hole 86 ssh so as to radially penetrate the center from the side surface at an intermediate position in the height direction. The shaft / stopper through hole 86ssh is a hole through which the top plate connecting shaft / stopper 88 is inserted and fitted. The shaft / stopper through hole 86 ssh is formed such that the diameter in a side view matches the diameter of the top plate connecting shaft / stopper 88. Further, the top plate connection shaft 86 is formed with a shaft / stopper retaining bolt hole 86 ssbh communicating with the shaft / stopper through hole 86 ssh from the center point of the lower surface upward. The shaft / stopper retaining bolt hole 86 ssbh is a hole for inserting a bolt 88 b which locks upward in a bolt engagement groove 88 bd described later of the top plate connecting shaft / stopper 88.

  The bolt 86b is connected to the bolt hole 822bh of the top plate 82 and the top plate in a state where the upper end portion of the top plate connecting shaft 86 is fitted to the shaft fitting concave portion 822cd of the top plate 82 as shown in FIG. The top plate 82 and the top plate connection shaft 86 are integrally fastened and fixed by screwing into the bolt recess 86 bd of the shaft 86. Further, the rotation stop pin 86p is engaged with the rotation stop pin recess 822pd of the top plate 82 and the rotation stop pin recess 86pd of the top plate connection shaft 86, and the top plate 82 is bolted to one bolt 86b. And the top plate connecting shaft 86 are prevented from rotating relative to each other to prevent the fastening state from being loosened.

  The top plate connecting shaft / stopper 88 is a shaft / stopper of the cylindrical portion 526 when the top plate connecting shaft 86 is inserted into the cylindrical portion 526 of the lock pin 52 of the intermediate block 50 as shown in FIG. The rod-shaped member is inserted into the guide hole 526ssh and the shaft / stopper through hole 86ssh of the top plate connection shaft 86 to prevent the top plate connection shaft 86 from coming upward from the cylindrical portion 526. The top plate connection shaft stopper 88 has a length in the direction in which the bottom surface extends is greater than the diameter of the top plate connection shaft 86 in plan view, and the diameter of the outer surface of the cylindrical portion 526 of the lock pin 52 It is formed to be of substantially the same length. The top plate connecting shaft / stopper 88 is fitted in the shaft / stopper through hole 86ssh of the top plate connecting shaft 86, and loosely fitted in the shaft / stopper / guide hole 526ssh of the cylindrical portion 526 of the lock pin 52. ing. As a result, the top plate connecting shaft 86 can be reciprocated in the height direction inside the shaft / stopper / guide hole 526 ssh, and the movable block 80 including the top plate connecting shaft 86 is the cylindrical portion 526 of the lock pin 52. Can be reciprocated in the height direction. That is, the movable block 80 provided with the top plate connection shaft 86 can be brought into contact with and separated from the fixed block 20 and can not be separated from the intermediate block 50. Further, as shown in FIG. 30, the top plate connecting shaft / stopper 88 has a width (in a middle position of the length in the extending direction of the bottom surface so as to be narrower than the cylindrical side surface of the top plate connecting shaft / stopper 88). A bolt engagement groove 88bd is formed with a reduced diameter). The bolt engagement groove 88bd is a recess for locking the tip of a bolt 88b described later and preventing the top plate connection shaft / stopper 88 from coming out of the shaft / stopper through hole 86ssh of the top plate connection shaft 86. It is. The bolt engagement groove 88bd is formed such that its depth and width are the same as the depth and width of the tip of the shaft of the bolt 88b.

  The bolt 88b is, as shown in FIG. 1 etc., the shaft / stopper removal of the top plate connecting shaft 86 in a state where the top plate connecting shaft / stopper 88 is inserted into the shaft / stopper through hole 86ssh of the top plate connecting shaft 86. By screwing upward from the set bolt hole 86ssbh, it locks in the bolt engagement groove 88bd of the top plate connection shaft / stopper 88 to prevent the top plate connection shaft / stopper 88 from coming out of the shaft / stopper through hole 86ssh can do.

(Modification)
The present invention is not limited to the above embodiment, and various modifications can be made based on the concept of the present invention. Hereinafter, other embodiments of the present invention will be described.

  For example, the spacer 38, the top plate all-direction retainer 84, and the balls 85 can move in the height direction while making the top plate 82 of the movable block 80 and the valve shaft 30 of the fixed block 50 slidable in the bottom extension direction. As long as the configuration interlocks with the above, it may not be provided in the floating unit 10.

  Also, for example, the means for transferring and inserting the work connected to the bottom surface 224 bp of the floating unit 10 is not limited to the robot hand.

  Further, for example, even if the inflow port 22i is not formed on the outer surface of the cylindrical portion 2222 of the lock cylinder 22, it may be provided at a position connected to the inflow path 28ir of the switching valve 28. Similarly, the outlet 22o may be provided at a position where it is connected to the outlet path 28or of the switching valve 28, even if it is not formed on the outer surface of the cylindrical portion 2222 of the lock cylinder 22.

  Also, for example, the fluid may be air, which is a compressible fluid, or water or oil, which is an incompressible fluid.

As described above, the embodiments of the present invention are disclosed in the above description, but the present invention is not limited thereto.
That is, various changes can be added to the embodiments described above with respect to the mechanism, the shape, the material, the number, the position, the arrangement, and the like without departing from the scope of the technical idea and object of the present invention. And they are included in the present invention.

DESCRIPTION OF SYMBOLS 10 floating unit 20 fixed block 22 lock cylinder 222 cylinder part 22bh bolt hole 224 bottom plate part 224tp top surface 224bp bottom face 22i inlet 22o outlet 24 piston guide 242 small diameter cylindrical part 244 large diameter cylindrical part 24ior path 244od O ring groove 246 Inner collar 248 Outer collar 24bh Bolt hole 24sh Shaft hole 24shod Shaft O-ring groove 26 Lock and piston 262 Body 262sd Spring recess 262od O-ring groove 264 Small shaft 264cd Engagement recess 264co1 1st conical surface 264cy Cylinder Surface 264co2 Second conical surface 28 Switching valve 282 Cylindrical portion 28tp Upper surface 28bp Lower surface 28bprd Lower surface circumferential groove 28tbh Upper and lower through holes 28ip Inner surface 28ipt Inner surface upper portion 28ipod1 First O-ring groove 28ipod2 second O-ring groove 28iprc inner side surface circumferential protrusion 28iprco upper and lower opening 28op outer surface 28opod3 third O-ring groove 28opod4 fourth O-ring groove 28oprd outer surface circumferential groove 28oprct outer surface circumferential surface protrusion )
28oprcb Outer side surface rib (bottom)
28ioh side through hole 28ir inflow path 28or outflow path 30 valve shaft 32 body case 32b bolt 322 cylindrical portion 322bd bolt recess 322sh shaft hole 322rd spacer groove 322od movable range groove 322bsd space forming recess 322bsdf internal thread for ball contact plate (bottom) 324 Inner collar 324bd Bolt hole 34 Ball backing plate (top)
34bh bolt hole 34 bady Y direction ball guide groove 34b bolt 36 ball backing plate (bottom)
36 m Male thread 38 Space 40 Stop means 50 Intermediate block 52 Lock pin 522 Body shaft 522 cc Engaging convex 524 Ridge 524 badx X direction ball guide groove 526 Cylindrical part 526isp Inner side 526 ssh Shaft stopper guide hole 54 All Direction Retainer 54h Ball Hole 55 Ball 56 X Direction Retainer 56h Ball Hole 57 Ball 58 Ball Pad (Medium)
58badx X-direction ball guide groove 58bady Y-direction ball guide groove 60 Y direction retainer 60h ball hole 61 ball 70 position return means 80 movable block 82 top plate 822 main portion 822tp top surface 822bp bottom surface 822bh bolt hole 822cd shaft fitting recess 822pd Retaining pin recessed part 824 Cylindrical part 84 Top plate for all direction retainer 84h Ball hole 85 Ball 86 Top plate connecting shaft 86b Bolt 86p Retaining pin 86bd Bolt recessed part 86pd Retaining pin recessed part 86ssh Shaft stopper through hole 86ssbh shaft stopper stopper Bolt hole 88 top plate connection shaft / stopper 88b bolt 88bd bolt engagement groove BS1 first space BS2 second space FS fluid space SP1 first spring member SP2 second spring member OR1 1st O-ring OR2 2nd O-ring OR3 3rd O-ring OR4 4th O-ring OR5 5th O-ring OR6 6th O-ring ORS Shaft O-ring F Drag Ftb Drag force height direction force Component of Fxy: The component of the force in the direction of extension of the bottom of the drag

Claims (9)

A fixed block having a bottom surface, which is supplied with a fluid having a pressure higher than a predetermined level and in which a first space is formed inside;
An intermediate block which is at least partially accommodated in the first space of the fixed block and configured to be slidable in the direction in which the bottom surface extends, and in which the second space is formed inside;
A movable block at least a part of which is accommodated in the second space of the intermediate block and configured to be accessible to and separated from the fixed block, the movable block having a top surface,
The stationary block has restraining means for restraining the intermediate block using the pressure of the supplied fluid,
When the movable block approaches the fixed block, the blocking means interlocks with the movable block to shut off the fluid pressure and release the stopped state of the intermediate block when the movable block approaches the fixed block. Floating unit. Means for stopping
A lock cylinder having an inlet through which fluid having a constant pressure is supplied from the outside, and an outlet through which the fluid flows out, and forming the bottom surface;
A piston guide which is disposed inside the lock cylinder with a gap and which further forms a fluid space for storing fluid inside;
An intermediate portion of the piston guide housed in the fluid space of the piston guide so as to reciprocate toward the bottom surface and the top surface, and positioned on the top surface side by the pressure of fluid stored in the fluid space of the piston guide A lock piston moving towards the block to stop the intermediate block;
A switching valve disposed in a gap between the lock cylinder and the piston guide and reciprocable in the gap toward the bottom surface and the top surface;
A valve shaft located between the movable block and the switching valve and interlocking the movable block with the switching valve;
Configured by
The piston guide has a path through which the fluid passes when the fluid flows into the fluid space, and through which the fluid passes when the fluid flows out of the fluid space.
The switching valve is
An inlet path connected to the inlet and connectable to a path of the piston guide, and an outlet path connected to the outlet and connectable to the path of the piston guide;
When located on the top side, connect the inflow path and the path of the piston guide,
When located on the bottom side, connecting the outflow path and the path of the piston guide,
The movable block is interlocked with the fixed block by the valve shaft and reciprocates between the top surface side and the bottom surface side to connect the inflow path and the path of the piston guide, the outflow path, and the piston.・ Switch between the connection with the guide path,
A floating unit according to claim 1. The lock piston is biased by the first spring member so that fluid stored in the fluid space of the piston guide flows out of the path of the piston guide
The switching valve is biased by the second spring member so as to move toward the top surface,
Means for stopping
When the movable block is not acted upon from the outside in such a direction that the movable block approaches the fixed block, the switching valve moves toward the top surface by the biasing force of the second spring member, and the inflow path of the switching valve and the path of the piston guide And the fluid flows from the inlet into the fluid space of the piston guide through the inflow path and the path of the piston guide, and the pressure of the fluid stored in the fluid space is the biasing force of the first spring member. Stop the middle block by moving the lock piston towards the middle block against the
When a force is applied from the outside in a direction in which the movable block approaches the fixed block, and the force is greater than the biasing force of the second spring member, the force is applied to the switching valve from the movable block via the valve shaft Is transmitted, the switching valve is moved toward the bottom by the force, the outflow path of the switching valve and the path of the piston guide are connected, and the lock piston biased to the first spring member is the piston By pressing the fluid stored in the fluid space of the guide, the intermediate block is released from the stopped state by the fluid flowing out of the fluid space of the piston and guide through the flow path and the outflow path of the piston and guide from the outlet. Do,
A floating unit according to claim 2. The lock piston has an engagement recess which is bored from the top side toward the bottom,
The intermediate block has an engagement protrusion projecting toward the bottom surface,
The stopping means stops the intermediate block by moving the lock and piston toward the intermediate block and the engagement recess engages with the engagement projection.
A floating unit according to any one of claims 2 or 3.   The floating unit according to any one of claims 1 to 4, wherein the fixed block and the intermediate block have position return means for returning the intermediate block to a predetermined position in the direction in which the bottom surface extends. The fixed block and the intermediate block have position return means for returning the intermediate block to a predetermined position in the direction in which the bottom surface extends.
The engagement recess of the lock / piston has a large opening on the top surface side of the lock / piston and a small opening on the bottom surface side while reducing the opening diameter from the top surface to the bottom surface of the lock / piston A first conical surface formed in a conical shape, a cylindrical surface formed in a cylindrical shape toward the bottom surface from a peripheral edge on the bottom side of the first conical surface, and the cylindrical surface And a second conical surface which is perforated in a frusto-conical shape from the peripheral edge on the bottom side toward the bottom,
The engagement convex portion of the intermediate block has a hemispherical surface formed in a hemispherical shape projecting toward the bottom surface,
The position return means is provided on the top surface while the first conical surface of the engagement recess of the lock / piston pressed by the fluid is in contact with the hemispherical surface of the engagement protrusion of the intermediate block slid in the extension direction of the bottom surface. By moving towards, the intermediate block is returned to the position on the central axis of the engagement recess,
A floating unit according to claim 4. The movable block is provided with a retainer for rotatably holding a plurality of balls on the bottom surface side,
The fixing block has a spacer that acts as a backing plate for a plurality of balls held by the retainer,
The spacer is arranged to be sandwiched between the plurality of balls held by the retainer and the valve shaft,
A floating unit according to any of claims 2 to 4 or claim 6. The intermediate block has a cylindrical cylindrical portion extending toward the top surface and opening the top surface side,
The cylindrical portion has a shaft stopper guide hole which is a hole formed to form a second space inside and to penetrate in a direction perpendicular to the central axis of the cylindrical portion,
The movable block is a shaft / stopper which is a rod-like member which extends toward the bottom surface and has a diameter equal to the inner diameter of the cylindrical portion and a rod-like member inserted in a direction perpendicular to the central axis of the connection shaft. And have
The shaft, stopper, and guide holes are formed such that the opening diameter in the height direction is larger than the diameter of the shaft and stopper, and the opening diameter in the direction in which the bottom surface extends is the same as the diameter of the shaft and stopper It is a roughly oval shape, so formed
The connection shaft is inserted into the inner surface of the cylindrical portion from the top surface side toward the bottom surface, and is fitted so as to reciprocate toward the bottom surface and the top surface.
The movable block can be attached to and separated from the fixed block and can not be separated from the intermediate block by the shaft and the stopper being loosely fitted in the cylindrical shaft, the stopper, and the guide hole.
A floating unit according to any of the preceding claims. The switching valve is constituted by a cylindrical portion formed in a cylindrical shape,
The cylindrical part is
It has an outer surface located radially outward, an inner surface located radially inward, an upper surface located on the top surface side, and a lower surface located on the bottom surface, which are the surface portions,
The width, which is the distance between the outer surface and the inner surface, is formed to be substantially equal to the width of the gap,
The inner side surface is an inner surface upper portion located on the upper surface side of the inner surface, and an inner side surface surface surface that is a protrusion formed so as to project radially inward in a cross sectional view Composed of
The outer side surface is constituted by an outer side surface circumferential groove which is a groove which is formed by being notched radially inward and which is circumferentially wound in the cylindrical portion,
The upper inner surface is formed between the outer surface of the piston and the guide so that the fluid passing through the path of the piston and the guide can flow out to the upper surface,
The outer surface side circumferential groove is a portion connected to the inflow port of the lock cylinder on the outer surface, and further, for guiding fluid flowing in from the inflow port to circumferentially spread over the outer surface of the cylindrical portion. A ditch,
The cylindrical portion is formed with a side through hole which is a through hole radially passing through the groove bottom of the outer circumferential groove on the outer surface and the inner circumferential rib on the inner surface,
The side through hole is a path passing through the inside of the cylindrical portion when the fluid flowing in from the inlet flows toward the fluid space through the outer circumferential groove.
Furthermore, upper and lower through holes, which are through holes penetrating the cylindrical portion in the height direction, are formed in the cylindrical portion over the upper and lower surfaces,
The upper and lower through holes are holes for guiding the fluid from the upper surface side to the lower surface side of the cylindrical portion,
The inner side surface turnout ridges have upper and lower opening ports for sending in the fluid flowing in from the side through holes at the connecting portion with the side through holes,
The lower surface has a lower surface circumferential groove which is an annular groove formed so as to be cut from the bottom surface toward the top surface and to be along the inner peripheral edge and the outer peripheral edge of the lower surface,
The lower surface circumferential groove is a groove for guiding the fluid flowing out to the lower surface side through the upper and lower through holes to the outlet of the lock cylinder,
The inflow path is composed of an outer circumferential groove, a side through hole and an upper and lower opening,
The outflow path is constituted by the lower surface circumferential groove, the upper and lower through holes, and the upper inner surface.
A floating unit according to any of claims 2 to 4, 6 or 7.

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