JP6423438B2 - Magnetic sensor - Google Patents

Description

  The present invention relates to a magnetic sensor.

Conventionally, a giant magneto-resistance (GMR) element and a tunnel magneto-resistance (TMR) element for detecting presence or absence of a predetermined one-way magnetism have been known. In addition, a magnetic sensor in which these magnetoresistive elements and a magnetic converging unit are combined is known. (For example, refer patent documents 1-8).
Patent Document 1 Japanese Patent Application Laid-Open No. 2006-3116 Patent Document 2 Japanese Patent Application Laid-Open No. 2006-10461 Patent Document 3 Japanese Patent Application Laid-Open No. 7-169026 Patent Document 4 Japanese Patent Application Laid-Open No. 2002-71381 Patent Document 5 Japanese Patent Application Laid-Open No. 2004-6752 Patent Literature 6 JP 2003-282996 A Patent Literature 7 International Publication No. 2011/068146 Patent Literature 8 US Patent Application Publication No. 2011/0309829

  However, when detecting magnetic fields in three orthogonal directions such as XYZ directions using such a magnetic sensor, a plurality of magnetic sensors are arranged in each direction corresponding to the direction to be detected. Etc. increased.

  According to a first aspect of the present invention, there is provided a magnetic sensor including a first magnetic detection unit, wherein the first magnetic detection unit includes a first magnetic focusing member extending in a first direction, and a first magnetic focusing member. A first magnetic flux concentrator having a second magnetic flux concentrator member connected to an end on the positive side in one direction and extending in a negative side in a second direction different from the first direction; and a first direction of the first magnetic flux concentrator member Closer to the positive side in the first direction than the negative side end, closer to the negative side in the first direction than the second magnetic focusing member, closer to the negative side in the second direction than the first magnetic focusing member, and Connected to the negative end of the second magnetic converging member in the second direction and the third magnetic converging member extending from the negative end of the second magnetic converging member to the negative side of the second direction. And a second magnetic focusing member that extends to the positive side in the first direction from the end on the positive side in the first direction of the first magnetic focusing member. An air converging unit, a first magnetic detecting unit disposed between the second magnetic converging member and the third magnetic converging member, and extending in the second direction; and on the positive side in the first direction from the second magnetic converging member Provided is a magnetic sensor including a second magnetic detection unit that is disposed close to and extends in a second direction.

  In the second aspect of the present invention, the magnetic sensor includes the first magnetic detection unit, and when the magnetic field component is input in the first direction, the magnetic field component is changed to the first magnetic field component in the first direction. When the magnetic field component is converted into the second magnetic field component in the first direction and in the opposite direction, and the magnetic field component is input in the second direction different from the first direction, the magnetic field component is converted into the third magnetic field component in the first direction and the first direction. And a first magnetic field for detecting one of the first and second magnetic field components and one of the third and fourth magnetic field components. A magnetic sensor is provided that includes a detection unit, and a second magnetic detection unit that detects the other of the first and second magnetic field components and the other of the third and fourth magnetic field components.

  In the third aspect of the present invention, the first magnetic focusing member extending in the first direction and the second magnetic focusing connected to the end of the first magnetic focusing member and extending in the second direction different from the first direction. A member, a first magnetic detector disposed near the positive side in the first direction of the second magnetic flux concentrator member, and a second arranged near the negative side in the first direction of the second magnetic flux concentrator member. And a magnetic sensor.

(General disclosure)
The magnetic sensor may include a first magnetic detection unit.
The first magnetic detection unit may include a first magnetic convergence unit.
The first magnetic flux concentrator may include a first magnetic flux concentrator member that extends in the first direction.
The first magnetic flux concentrator may include a second magnetic flux concentrator member that is connected to an end portion on the positive side in the first direction of the first magnetic flux concentrator member and extends to the negative side in the second direction different from the first direction. .
The first magnetic detection unit may include a second magnetic convergence unit.
The second magnetic flux concentrating portion is closer to the positive side in the first direction than the end portion on the negative side in the first direction of the first magnetic flux concentrating member, is closer to the negative side in the first direction than the second magnetic converging member, A third magnetic converging member that extends closer to the negative side in the second direction than the one magnetic converging member and extends to the negative side in the second direction from the negative end of the second magnetic converging member in the second direction It's okay.
The second magnetic flux concentrator is connected to the negative end portion of the third magnetic flux concentrator member in the second direction, and is more positive in the first direction than the positive end portion of the first magnetic converging member in the first direction. You may have the 4th magnetic focusing member extended.
The first magnetic detection unit may include a first magnetic detection unit that is disposed between the second magnetic focusing member and the third magnetic focusing member and extends in the second direction.
The first magnetic detection unit may include a second magnetic detection unit that is disposed closer to the positive side in the first direction than the second magnetic flux concentrating member and extends in the second direction.
The first magnetic detection unit may include a third magnetic detection unit disposed between the second magnetic focusing member and the third magnetic focusing member.
The first magnetic detection unit may have a smaller distance to the third magnetic focusing member than the second magnetic focusing member.
The third magnetic detection unit may have a smaller distance to the second magnetic focusing member than the third magnetic focusing member.
The first magnetic detection unit may include a first sub magnetic flux concentrator member that is connected to a negative end of the second magnetic flux concentrator member in the second direction and extends in the first direction.
The first magnetic detection unit may include a second sub magnetic flux concentrator member that is connected to the positive end of the third magnetic flux concentrator member in the second direction and extends in the first direction.
The second magnetic flux concentrator may include a fifth magnetic flux concentrator member that is connected to an end portion on the positive side in the first direction of the fourth magnetic flux concentrator member and extends to the positive side in the second direction.
The second magnetic detection unit may be disposed between the second magnetic focusing member and the fifth magnetic focusing member.
The first magnetic detection unit may include a fourth magnetic detection unit disposed between the second magnetic focusing member and the fifth magnetic focusing member.
The second magnetic detection unit may have a smaller distance to the second magnetic focusing member than the fifth magnetic focusing member.
The distance from the fourth magnetic detection unit to the fifth magnetic focusing member may be smaller than that of the second magnetic focusing member.
The first magnetic detection unit may include a third sub magnetic flux concentrator member that is connected to the positive end of the fifth magnetic flux concentrator member in the second direction and extends in the first direction.
The magnetic sensor is arranged to be substantially mirror image with the first magnetic detection unit with respect to a surface substantially orthogonal to the first direction at the negative end of the first magnetic converging member in the first direction. A magnetic detection unit may be provided.
The magnetic sensor is arranged so as to be a substantially mirror image with the first magnetic detection unit with respect to the first magnetic flux concentrator member or a surface substantially perpendicular to the second direction on the positive side in the second direction with respect to the first magnetic flux concentrator member. A second magnetic sensing unit may be provided.
The magnetic sensor is arranged so as to be a substantially mirror image with the first magnetic detection unit with respect to a surface substantially perpendicular to the first direction on the positive side in the first direction with respect to the fifth magnetic converging member. A unit may be provided.
The magnetic sensor is arranged so as to be a substantially mirror image of the first magnetic detection unit with respect to the fourth magnetic flux concentrator member or a surface substantially perpendicular to the second direction on the negative side in the second direction relative to the fourth magnetic flux concentrator member. A second magnetic sensing unit may be provided.
The magnetic sensor is configured such that each magnetic converging member to which the first magnetic detecting unit and the second magnetic detecting unit are connected has a surface substantially orthogonal to the second direction, or a positive side in the second direction from each magnetic converging member. You may provide the 3rd magnetic detection unit arrange | positioned so that it may become a 1st magnetic detection unit and a substantially mirror image with respect to the surface substantially orthogonal to two directions.
The magnetic sensor is configured such that each magnetic converging member to which the first magnetic detecting unit and the second magnetic detecting unit are connected has a surface substantially orthogonal to the second direction, or a positive side in the second direction from each magnetic converging member. You may provide the 4th magnetic detection unit arrange | positioned so that it may become a mirror image with a 2nd magnetic detection unit with respect to the surface substantially orthogonal to two directions.
The magnetic sensor is disposed so as to be a substantially mirror image with the first magnetic detection unit with respect to a plane substantially orthogonal to the first direction on the positive side in the first direction with respect to the first magnetic detection unit and the second magnetic detection unit. A third magnetic detection unit may be provided.
The magnetic sensor is disposed so as to be a substantially mirror image with the second magnetic detection unit with respect to a surface substantially perpendicular to the first direction on the positive side in the first direction with respect to the first magnetic detection unit and the second magnetic detection unit. A fourth magnetic detection unit may be provided.
The magnetic sensor includes a first magnetic detection unit and a second magnetic detection unit on the negative side magnetic convergence member in the second direction, a surface substantially orthogonal to the second direction, or the first magnetic detection unit and the second magnetic detection unit. In addition, a third magnetic detection unit may be provided which is arranged so as to be substantially a mirror image with the first magnetic detection unit with respect to a surface substantially orthogonal to the second direction on the negative side of the second direction.
The magnetic sensor includes a first magnetic detection unit and a second magnetic detection unit on the negative side magnetic convergence member in the second direction, a surface substantially orthogonal to the second direction, or the first magnetic detection unit and the second magnetic detection unit. In addition, a fourth magnetic detection unit may be provided which is arranged so as to be substantially a mirror image with the second magnetic detection unit with respect to a surface substantially orthogonal to the second direction on the negative side of the second direction.
Each magnetic detection unit in the first to fourth magnetic detection units may form a Wheatstone bridge.
The magnetic sensor may include a plurality of first to fourth magnetic detection units.
The magnetic sensor may further include an auxiliary magnetic converging member disposed outside the first and second magnetic detection units.
The magnetic sensor may further include an auxiliary magnetic converging member disposed outside the first and fourth magnetic detection units.
The auxiliary magnetic flux concentrator member may be disposed outside the first direction.
The magnetic sensor may include a calculation unit that calculates a magnetic field component in the first direction and a magnetic field component in the second direction based on outputs of the magnetic detection units in the first and second magnetic detection units.
The calculation unit may calculate a magnetic field component in a third direction different from the first and second directions based on outputs of the magnetic detection units in the first and second magnetic detection units.
The magnetic sensor may include a calculation unit that calculates a magnetic field component in the first direction and a magnetic field component in the second direction based on outputs of the magnetic detection units in the first to fourth magnetic detection units.
The calculation unit may calculate a magnetic field component in a third direction different from the first and second directions based on outputs of the magnetic detection units in the first to fourth magnetic detection units.
The calculation unit may calculate each magnetic field component by linearly combining the outputs of the magnetic detection units.
The magnetic sensor may include a first magnetic detection unit.
When a magnetic field component is input in the first direction, the first magnetic detection unit converts the magnetic field component into a first magnetic field component in the first direction and a second magnetic field component in the opposite direction to the first direction, When a magnetic field component is input in a second direction different from the first direction, the magnetic field direction conversion converts the magnetic field component into a third magnetic field component in the first direction and a fourth magnetic field component in the direction opposite to the first direction, respectively. May be provided.
The first magnetic detection unit may include a first magnetic detection unit that detects one of the first and second magnetic field components and one of the third and fourth magnetic field components.
The first magnetic detection unit may include a second magnetic detection unit that detects the other of the first and second magnetic field components and the other of the third and fourth magnetic field components.
The magnetic sensor may include a second magnetic detection unit.
The second magnetic detection unit may include a magnetic field direction conversion unit.
The second magnetic detection unit may include a third magnetic detection unit that detects the other of the first and second magnetic field components and one of the third and fourth magnetic field components.
The second magnetic detection unit may include a fourth magnetic detection unit that detects one of the first and second magnetic field components and the other of the third and fourth magnetic field components.
The magnetic sensor may include a plurality of first and second magnetic detection units.
The magnetic sensor may include a calculation unit that calculates a magnetic field component in the first direction and a magnetic field component in the second direction based on outputs of the magnetic detection units in the plurality of first and second magnetic detection units.
When a magnetic field component is input in a third direction different from the first and second directions, the magnetic field direction conversion unit converts the magnetic field component to the fifth and sixth magnetic field components in the first direction and the direction opposite to the first direction. You may convert into a 7th and 8th magnetic field component, respectively.
The first magnetic detection unit may detect one of the fifth and seventh magnetic field components.
The second magnetic detection unit may detect one of the sixth and eighth magnetic field components.
The first magnetic detection unit detects fifth magnetic detection for detecting one of the first and second magnetic field components, one of the third and fourth magnetic field components, and the other of the fifth and seventh magnetic field components. May be provided.
The first magnetic detection unit detects the other of the first and second magnetic field components, the other of the third and fourth magnetic field components, and the other of the sixth and eighth magnetic field components. May be provided.
The third magnetic detection unit may detect one of the fifth and seventh magnetic field components.
The fourth magnetic detection unit may detect one of the sixth and eighth magnetic field components.
The second magnetic detection unit detects the other of the first and second magnetic field components, one of the third and fourth magnetic field components, and the other of the fifth and seventh magnetic field components. A magnetic detection unit may be provided.
The second magnetic detection unit detects one of the first and second magnetic field components, the other of the third and fourth magnetic field components, and the other of the sixth and eighth magnetic field components. A detection unit may be provided.
The calculation unit may calculate a magnetic field component in the third direction based on outputs of the magnetic detection units in the plurality of first and second magnetic detection units.
The calculation unit may calculate each magnetic field component by linearly combining the outputs of the magnetic detection units.
The first direction and the second direction may be orthogonal to each other.
The first to third directions may be orthogonal to each other.
The magnetic sensor may include a first magnetic flux concentrating member that extends in the first direction.
The magnetic sensor may include a second magnetic focusing member connected to an end of the first magnetic focusing member and extending in a second direction different from the first direction.
A magnetic sensor may be provided with the 1st magnetic sensing part arranged near the negative side of the 1st direction of the 2nd magnetic converging member.
The magnetic sensor may include a second magnetic detection unit that is disposed closer to the positive side of the second magnetic flux concentrating member in the first direction.
The magnetic sensor may include a first sub magnetic flux concentrator member that is connected to the negative end of the second magnetic flux concentrator member in the second direction and extends in the first direction.
It should be noted that the above summary of the invention does not enumerate all the necessary features of the present invention. In addition, a sub-combination of these feature groups can also be an invention.

The 1st structural example of the magnetic sensor 100 which concerns on this embodiment is shown. An example of sectional drawing of the AA line of the magnetic sensor 100 shown in FIG. 1 is shown. An example of sectional drawing of the BB line of the magnetic sensor 100 shown in FIG. 1 is shown. In the + X-axis direction of the magnetic sensor 100 of the present embodiment shows an example of a magnetic path when given a magnetic field B _X. An example of the sectional view on the AA line of the magnetic sensor 100 shown in FIG. 4 is shown. An example of a magnetic path when a magnetic field _BY is applied in the + Y-axis direction of the magnetic sensor 100 according to the present embodiment is shown. An example of the sectional view on the AA line of the magnetic sensor 100 shown in FIG. 6 is shown. An example of a magnetic path when a magnetic field _BZ is applied in the + Z-axis direction of the magnetic sensor 100 according to the present embodiment is shown. An example of the sectional view on the AA line of the magnetic sensor 100 shown in FIG. 8 is shown. An example of the magnetic field in the X-axis direction sensed by each of the magnetic detection units when the magnetic fields B _X , B _Y , and B _Z are respectively applied to the magnetic sensor 100 according to the present embodiment is shown. An example in which a wiring unit 130 is connected to the magnetic sensor 100 according to the present embodiment is shown. An example of the circuit structure connected to the magnetic sensor 100 which concerns on this embodiment is shown. It is. The 2nd structural example of the magnetic sensor 100 which concerns on this embodiment is shown. An example of sectional drawing of the AA line of the magnetic sensor 100 shown in FIG. 13 is shown. An example of the magnetic field in the X-axis direction sensed by each of the magnetic detection units when the magnetic fields B _X , B _Y , and B _Z are respectively applied to the magnetic sensor 100 according to the present embodiment is shown. An example in which a wiring unit 130 is connected to the magnetic sensor 100 according to the present embodiment is shown. The 3rd structural example of the magnetic sensor 100 which concerns on this embodiment is shown. An example of the sectional view of the AA line of magnetic sensor 100 shown in Drawing 17 is shown. An example of the magnetic field in the X-axis direction sensed by each of the magnetic detection units when the magnetic fields B _X , B _Y , and B _Z are respectively applied to the magnetic sensor 100 according to the present embodiment is shown. An example in which a wiring unit 130 is connected to the magnetic sensor 100 according to the present embodiment is shown. The 4th structural example of the magnetic sensor 100 which concerns on this embodiment is shown. An example of the magnetic field in the X-axis direction sensed by each of the magnetic detection units when the magnetic fields B _X , B _Y , and B _Z are respectively applied to the magnetic sensor 100 according to the present embodiment is shown. An example in which a wiring unit 130 is connected to the magnetic sensor 100 according to the present embodiment is shown. An example in which a calculation unit 300 is connected to the magnetic sensor 100 according to the present embodiment is shown. The 5th structural example of the magnetic sensor 100 which concerns on this embodiment is shown. An example of the magnetic field in the X-axis direction sensed by each of the magnetic detection units when the magnetic fields B _X , B _Y , and B _Z are respectively applied to the magnetic sensor 100 according to the present embodiment is shown. An example in which a wiring unit 130 is connected to the magnetic sensor 100 according to the present embodiment is shown. An example in which a calculation unit 300 is connected to the magnetic sensor 100 according to the present embodiment is shown. The 6th structural example of the magnetic sensor 100 which concerns on this embodiment is shown. An example of the magnetic field in the X-axis direction sensed by each of the magnetic detection units when the magnetic fields B _X , B _Y , and B _Z are respectively applied to the magnetic sensor 100 according to the present embodiment is shown. The 7th structural example of the magnetic sensor 100 which concerns on this embodiment is shown. An example of the magnetic field in the X-axis direction sensed by each of the magnetic detection units when the magnetic fields B _X , B _Y , and B _Z are respectively applied to the magnetic sensor 100 according to the present embodiment is shown. The 8th structural example of the magnetic sensor 100 which concerns on this embodiment is shown. An example of the magnetic field in the X-axis direction sensed by each of the magnetic detection units when the magnetic fields B _X , B _Y , and B _Z are respectively applied to the magnetic sensor 100 according to the present embodiment is shown. An example in which a wiring unit 130 is connected to the magnetic sensor 100 according to the present embodiment is shown. The 9th structural example of the magnetic sensor 100 which concerns on this embodiment is shown. An example of the magnetic field in the X-axis direction sensed by each of the magnetic detection units when the magnetic fields B _X , B _Y , and B _Z are respectively applied to the magnetic sensor 100 according to the present embodiment is shown. 10th structural example of the magnetic sensor 100 which concerns on this embodiment is shown. An example of the magnetic field in the X-axis direction sensed by each of the magnetic detection units when the magnetic fields B _X , B _Y , and B _Z are respectively applied to the magnetic sensor 100 according to the present embodiment is shown. An eleventh configuration example of the magnetic sensor 100 according to this embodiment will be described. An example of the magnetic field in the X-axis direction sensed by each of the magnetic detection units when the magnetic fields B _X , B _Y , and B _Z are respectively applied to the magnetic sensor 100 according to the present embodiment is shown. The 12th structural example of the magnetic sensor 100 which concerns on this embodiment is shown. A thirteenth configuration example of the magnetic sensor 100 according to this embodiment will be described. 14th structural example of the magnetic sensor 100 which concerns on this embodiment is shown. The 15th structural example of the magnetic sensor 100 which concerns on this embodiment is shown. A sixteenth configuration example of the magnetic sensor 100 according to the present embodiment will be described. The schematic structural example of the change of the magnetic gain with respect to the position of the Y direction of the 1st magnetic detection part 210 which concerns on this embodiment is shown. A seventeenth configuration example of the magnetic sensor 100 according to the present embodiment will be described. An eighteenth exemplary configuration of the magnetic sensor 100 according to this embodiment will be described.

  Hereinafter, the present invention will be described through embodiments of the invention, but the following embodiments do not limit the invention according to the claims. In addition, not all the combinations of features described in the embodiments are essential for the solving means of the invention.

  FIG. 1 shows a first configuration example of a magnetic sensor 100 according to the present embodiment. The magnetic sensor 100 detects a magnetic signal in which magnetic fields directed in three orthogonal directions are mixed (synthesized). FIG. 1 shows three orthogonal directions by X, Y, and Z axes, and shows a plan view of the XY plane of the magnetic sensor 100 (a plan view seen in the Y axis direction). That is, FIG. 1 shows an example of a top view when the magnetic sensor 100 is formed on one surface of a substrate or the like. The magnetic sensor 100 includes a first magnetic detection unit 10. FIG. 1 shows an example in which the magnetic sensor 100 includes one first magnetic detection unit 10.

  The first magnetic detection unit 10 includes a first magnetic convergence unit 110, a second magnetic convergence unit 120, a first magnetic detection unit 210, a second magnetic detection unit 220, and a third magnetic detection unit 230. FIG. 1 shows an example of an arrangement pattern of the first magnetic focusing unit 110, the second magnetic focusing unit 120, the first magnetic detection unit 210, the second magnetic detection unit 220, and the third magnetic detection unit 230.

  The first magnetic focusing unit 110 and the second magnetic focusing unit 120 are formed on the same plane parallel to the XY plane. The first magnetic converging part 110 and the second magnetic converging part 120 are made of a magnetic material such as permalloy, and change the direction of the lines of magnetic force in the vicinity of the magnetic converging part. For example, the first magnetic focusing unit 110 and the second magnetic focusing unit 120 are preferably formed of a soft magnetic material such as NiFe, NiFeB, NiFeCo, and CoFe. The first magnetic focusing unit 110 includes a first magnetic focusing member 111 and a second magnetic focusing member 112. The first magnetic flux concentrator member 111 extends in the first direction. FIG. 1 shows an example in which the first direction is the + X-axis direction.

  The second magnetic flux concentrator member 112 is connected to the positive end of the first magnetic flux concentrator member 111 in the first direction, and extends to the negative side in the second direction different from the first direction. Here, the end portion of the magnetic flux concentrating member is a portion of one end of the magnetic flux concentrating member, and includes a side surface close to one end of the magnetic flux concentrating member. FIG. 1 shows an example in which the first direction and the second direction are orthogonal to each other and the second direction is the + Y-axis direction. That is, FIG. 1 is a plan view seen from the Z-axis direction, and the + X-axis direction end of the first magnetic focusing member 111 and the + Y-axis direction end of the second magnetic focusing member 112 are connected, The example in which the 1st magnetic convergence part 110 is formed is shown.

  The second magnetic convergence unit 120 includes a third magnetic convergence member 113 and a fourth magnetic convergence member 114. The third magnetic flux concentrator member 113 is closer to the positive side in the first direction than the negative end portion of the first magnetic flux concentrator member 111 in the first direction, and is closer to the negative side in the first direction than the second magnetic flux concentrator member 112. The first magnetic flux concentrator 111 extends closer to the negative side in the second direction, and the second magnetic flux concentrator member 112 extends toward the negative side in the second direction than the negative end portion in the second direction.

  That is, the third magnetic flux concentrator member 113 extends in the second direction and is disposed so as to partially overlap the second magnetic flux concentrator member 112 when viewed from the first direction. For example, the third magnetic flux concentrator member 113 is formed so as to be shifted in the −Y axis direction by a predetermined distance with respect to the second magnetic flux convergent member 112. The third magnetic flux concentrator member 113 is disposed so as to overlap the first magnetic flux concentrator member 111 when viewed from the second direction. That is, the arrangement of the X axis of the third magnetic flux concentrator member 113 is within the range in which the first magnetic flux concentrator member 111 is arranged on the X axis.

  The fourth magnetic flux concentrator member 114 is connected to the third magnetic flux concentrator member 113 and the negative end of the third magnetic flux concentrator member 113 in the second direction, and is connected to the positive side of the first magnetic flux concentrator member 111 in the first direction. It extends | stretches to the positive side of a 1st direction rather than an edge part. That is, the fourth magnetic flux concentrator member 114 extends in the first direction and is disposed so as to partially overlap the first magnetic flux concentrator member 111 when viewed from the second direction. For example, the fourth magnetic flux concentrator member 114 is formed to be shifted in the + X-axis direction by a predetermined distance with respect to the first magnetic flux concentrator member 111. FIG. 1 is a plan view seen from the Z-axis direction, and the end on the −Y-axis direction side of the third magnetic focusing member 113 and the end on the −X-axis direction side of the fourth magnetic focusing member 114 are connected, The example in which the 2nd magnetic convergence part 120 is formed is shown.

  More specifically, the second magnetic focusing member 112 and the third magnetic focusing member 112 are arranged in the order of the third magnetic focusing member 113 and the second magnetic focusing member 112 so that the second magnetic focusing member 112 and the third magnetic focusing member 113 are substantially parallel to each other in the Y-axis direction. And arranged side by side from the −X axis direction side to the + X axis direction side. Further, the second magnetic flux concentrator member 112 and the third magnetic flux concentrator member 113 are arranged so that the other of the two adjacent ones is shifted in the longitudinal direction (Y-axis direction) in a plan view as viewed from the Z-axis direction. . That is, in a plan view viewed from the Z-axis direction, the second magnetic focusing member 112 and the third magnetic focusing member 113 extend in the Y-axis direction, and the −Y-axis direction end of the third magnetic focusing member 113 is 2 The magnetic converging member 112 protrudes in the −Y axis direction from the −Y axial direction end, and the + Y axial direction end of the second magnetic converging member 112 is the + Y axial direction side of the third magnetic converging member 113. It arrange | positions so that it may protrude in the + Y-axis direction side rather than the edge of.

  In FIG. 1, the second magnetic flux concentrator member 112 and the third magnetic flux concentrator member 113 have a rectangular shape with the longitudinal direction in the Y-axis direction, and are arranged in parallel in directions parallel to the Y-axis direction. An example is shown. Instead, the shape of the second magnetic flux concentrator member 112 and the third magnetic flux concentrator member 113 is not limited to a rectangle, but may be any of a quadrilateral, a parallelogram, and a trapezoid having a longitudinal direction in a direction substantially parallel to the Y axis direction There may be. In addition, the second magnetic flux concentrator member 112 and the third magnetic flux concentrator member 113 are each parallel to the Y-axis direction, and each long side parallel to the Y-axis direction has the same length. However, instead of this, each long side may have a different length. Moreover, although the 2nd magnetic focusing member 112 and the 3rd magnetic focusing member 113 showed the example in which each short side parallel to a X-axis direction has the same length, instead of this, each short side is shown. It may be a different length.

  The magnetic sensor 100 will be described in detail later by providing the second magnetic focusing member 112 and the third magnetic focusing member 113 as described above. When a magnetic field is applied in the + Y-axis direction, the third magnetic focusing member A magnetic path from 113 to the second magnetic flux concentrator member 112 is formed. That is, the magnetic field input in the + Y axis direction generates a magnetic field in the + X axis direction between the second magnetic focusing member 112 and the third magnetic focusing member 113.

  In addition, the first magnetic flux concentrator member 111 and the fourth magnetic flux concentrator member 114 are arranged in the order of the fourth magnetic flux concentrator member 114 and the first magnetic flux concentrator member 111 so that they are substantially parallel to each other in the X axis direction. They are arranged side by side on the + Y axis direction side from the direction side. The first magnetic flux concentrator member 111 is connected to the end of the second magnetic flux concentrator member 112 on the + Y axis direction side and extends toward the −X axis direction side (the third magnetic flux concentrator member side in the X axis direction). The first magnetic flux concentrator 111 protrudes from the −X axis direction end of the third magnetic flux concentrator member 113 and / or the fourth magnetic flux concentrator member 114 of the second magnetic flux concentrator 120 when viewed from the Y-axis direction. Formed.

  The fourth magnetic flux concentrator member 114 is connected to the end of the third magnetic flux concentrator member 113 on the −Y axis direction side and extends toward the + X axis direction side (the second magnetic flux concentrator member 112 side in the X axis direction). The fourth magnetic focusing member 114 protrudes from the + X-axis direction side end of the first magnetic focusing member 111 and / or the second magnetic focusing member 112 of the first magnetic focusing unit 110 when viewed from the Y-axis direction. It is formed.

  In FIG. 1, the first magnetic converging member 111 and the fourth magnetic converging member 114 are rectangles having a longitudinal direction in the X-axis direction, and are arranged in parallel in directions parallel to the X-axis direction. An example is shown. Instead of this, the shape of the first magnetic flux concentrator member 111 and the fourth magnetic flux concentrator member 114 is not limited to a rectangle, but any of a quadrilateral, a parallelogram, and a trapezoid having a longitudinal direction in a direction substantially parallel to the X-axis direction. There may be. In addition, the first magnetic focusing member 111 and the fourth magnetic focusing member 114 are each parallel to the X-axis direction, and each long side parallel to the X-axis direction has the same length. However, instead of this, each long side may have a different length. Moreover, although the 1st magnetic focusing member 111 and the 4th magnetic focusing member 114 showed the example in which each short side parallel to a Y-axis direction has the same length, instead of this, each short side is shown. It may be a different length.

  The magnetic sensor 100 will be described in detail later by providing the first magnetic focusing member 111 to the fourth magnetic focusing member 114 as described above, but when the magnetic field is applied in the + X-axis direction, the second magnetic focusing member A magnetic path from 112 to the third magnetic flux concentrator member 113 is formed. In other words, the magnetic field input in the + X axis direction generates a magnetic field in the −X axis direction between the second magnetic focusing member 112 and the third magnetic focusing member 113. Further, the first magnetic converging part 110 and the second magnetic converging part 120 constituted by the first magnetic converging member 111 to the fourth magnetic converging member 114 are arranged so as to be substantially parallel to the substrate plane (XY plane). If the magnetic field is input in the + X-axis direction or the + Y-axis direction, a magnetic field having good symmetry can be formed on the XY plane with the point Q as the center.

  The first magnetic detection unit 210 is disposed between the second magnetic focusing member 112 and the third magnetic focusing member 113 and extends in the second direction. The first magnetic detection unit 210 is arranged such that the distance to the third magnetic focusing member 113 is smaller than the second magnetic focusing member 112.

  The second magnetic detection unit 220 is disposed closer to the positive side in the first direction than the second magnetic flux concentrator member 112 and extends in the second direction. That is, the first magnetic detection unit 210 and the second magnetic detection unit 220 are arranged to translate with the second magnetic focusing member 112 and sandwich the second magnetic focusing member 112.

  The third magnetic detection unit 230 is disposed between the second magnetic focusing member 112 and the third magnetic focusing member 113 and extends in the second direction. The third magnetic detection unit 230 is arranged so that the distance to the second magnetic focusing member 112 is smaller than the third magnetic focusing member 113.

  The first magnetic detection unit 210 to the third magnetic detection unit 230 detect a magnetic field in the X-axis direction parallel to the first direction. That is, the first magnetic detection unit 210 to the third magnetic detection unit 230 have a magnetosensitive axis that senses a magnetic field parallel to the first direction in the XY plane, and is parallel to the XY plane and in the first direction. The magnetic field in the second direction perpendicular to the first direction and the third direction (Z-axis direction) perpendicular to the first direction and the second direction is not sensed. In other words, the first magnetic detection unit 210 to the third magnetic detection unit 230 have a magnetosensitive axis in the X-axis direction without a magnetic converging unit or the like.

  The first magnetic detection unit 210 to the third magnetic detection unit 230 may be elements that sense only the magnetic field in one axis direction and change the resistance value. The first magnetic detection unit 210 to the third magnetic detection unit 230 may be any of a giant magnetoresistance (GMR) element, a tunneling magnetoresistance (TMR) element, an anisotropic magnetoresistance (AMR) element, and the like. Good. Accordingly, the first magnetic detection unit 210 to the third magnetic detection unit 230 increase any resistance value when a magnetic field in the + X-axis direction is input, and any resistance value when a magnetic field in the −X-axis direction is input. Both are formed to decrease.

  In the example of FIG. 1, although the 1st direction, the 2nd direction, and the 3rd direction show the example which is mutually orthogonally crossed, it replaces with this and should just mutually differ. That is, each may be substantially orthogonal or may be bent with respect to each other.

  Moreover, it is preferable that the 1st magnetic detection part 210 to the 3rd magnetic detection part 230 are flat form. Each of the shapes of the first magnetic detection unit 210 to the third magnetic detection unit 230 is a rectangular shape in a plan view as viewed from the Z-axis direction, but instead, a rectangular shape, a square shape, a parallelogram shape are used. Any of a trapezoid, a triangle, a polygon, a circle, and an ellipse may be used. Further, at least one of the first magnetic detection unit 210 to the third magnetic detection unit 230 may include a plurality of magnetic detection units that are subdivided and divided in the Y-axis direction. In this case, the plurality of divided magnetic detection units are connected by metal wiring or the like so as to function as a single magnetic detection unit. In other words, for example, at least one of the first magnetic detection unit 210 to the third magnetic detection unit 230 is not limited to a single magnetic detection unit, and two or more magnetic detection units are connected in series with a metal wiring. May be formed.

  The first magnetic detection unit 210 is between the second magnetic converging member 112 of the first magnetic converging unit 110 and the third magnetic converging member 113 of the second magnetic converging unit 120 in a plan view viewed from the Z-axis direction. It arrange | positions and it arrange | positions so that the 3rd magnetic flux concentrator member 113 may be adjoined. The third magnetic detection unit 230 is disposed between the second magnetic flux concentrator member 112 and the third magnetic flux concentrator member 113 in a plan view as viewed from the Z-axis direction so as to be close to the second magnetic flux convergent member 112. Be placed. In other words, in the plan view seen from the Z-axis direction, a line that is the middle of the sides where the shape of the second magnetic flux concentrator member 112 and the shape of the third magnetic flux concentrator member 113 are closest to each other is a virtual midline C Assuming −C, the shape of the first magnetic detector 210 is arranged closer to the third magnetic flux concentrator member 113 than the virtual midline CC.

  In addition, the shape of the third magnetic detection unit 230 is arranged to be closer to the second magnetic convergence member 112 than the virtual midline CC in a plan view as viewed from the Z-axis direction. In addition, the second magnetic detection unit 220 is disposed in the + X axis direction between the second magnetic flux concentrator member 112 and the third magnetic flux concentrator member 113, and is disposed so as to be close to the second magnetic flux concentrator member 112. The second magnetic detection unit 220 is preferably disposed at a position symmetrical to the third magnetic detection unit 230 with respect to a center line parallel to the Y-axis direction of the second magnetic flux concentrator member 112.

  The first magnetic detection unit 210 is disposed close to the end side along the longitudinal direction of the third magnetic flux concentrator member 113 in a plan view viewed from the Z-axis direction. More preferably, a part of the first magnetic detection unit 210 along the long side direction is covered with the third magnetic flux concentrator member 113. That is, at least a part of the first magnetic detection unit 210 and the third magnetic flux concentrator member 113 may overlap in a plan view as viewed from the Z-axis direction. The same applies to the positional relationship between the second magnetic detection unit 220 and the second magnetic focusing member 112 and the positional relationship between the third magnetic detection unit 230 and the second magnetic focusing member 112.

  Here, a plane perpendicular to the Y-axis direction between the second magnetic focusing member 112 and the third magnetic focusing member 113 intersects both the second magnetic focusing member 112 and the third magnetic focusing member 113. A range along the direction is defined as a range R1. That is, when viewed from the first direction, a range in the Y-axis direction where the second magnetic flux concentrator member 112 and the third magnetic flux concentrator member 113 overlap is defined as a range R1.

  Each of the first magnetic detection unit 210 to the third magnetic detection unit 230 is at least partially arranged in the range R1 when viewed from the first direction, and the magnetic detection unit in the range R1 is a magnetic field in the X-axis direction. It is preferable to sense. More preferably, all of the first magnetic detection unit 210 to the third magnetic detection unit 230 are arranged in a range R1 along the Y-axis direction. FIG. 1 shows an example in which the first magnetic detection unit 210 to the third magnetic detection unit 230 are arranged in the range R1 and formed in the same shape.

  FIG. 2 shows an example of a sectional view taken along line AA of the magnetic sensor 100 shown in FIG. That is, a plan view viewed from the Y-axis direction is shown. FIG. 3 shows an example of a cross-sectional view taken along line BB of the magnetic sensor 100 shown in FIG. That is, it is a plan view seen from the X-axis direction. 2 and 3 show an example of the magnetic sensor 100 formed on the substrate plane 22 which is one surface of the substrate 20. Here, the substrate plane 22 is formed as a plane substantially parallel to the XY plane.

  The substrate 20 may be any of a silicon substrate, a compound semiconductor substrate, a ceramic substrate, and the like. The substrate 20 may be a substrate on which an electronic circuit such as an IC is mounted. An insulating layer 30 or the like is formed on the substrate plane 22 of the substrate 20. The upper surface of the insulating layer 30 is formed as a surface substantially parallel to the XY plane, and is a first plane 32 in this example.

  The first magnetic focusing member 111 to the fourth magnetic focusing member 114 are formed on the first plane 32. 2 and 3, the first magnetic focusing member 111 to the fourth magnetic focusing member 114 have a thickness in the Z-axis direction and overlap (intersect or contact) the first plane 32. Further, each of the first magnetic flux concentrator member 111 to the fourth magnetic flux concentrator member 114 may be disposed so that the bottom surface is in contact with the first plane 32, and each part thereof intersects the first plane 32. It may be arranged. Moreover, although the 1st magnetic focusing member 111 to the 4th magnetic focusing member 114 show the example in which the thickness of a Z-axis direction is formed in the substantially same thickness, it replaces with this and each thickness is uneven. There may be.

  The first magnetic detection unit 210 to the third magnetic detection unit 230 are formed, for example, inside the insulating layer 30 formed on the substrate plane 22. That is, the first magnetic detection unit 210 to the third magnetic detection unit 230 are formed so as to be electrically insulated from the first magnetic convergence member 111 to the fourth magnetic convergence member 114 and the substrate 20. The first magnetic detection unit 210 to the third magnetic detection unit 230 are disposed on the second plane 34 substantially parallel to the XY plane of the insulating layer 30 and are formed so as to detect only the magnetic field in the X-axis direction.

  The first magnetic detection unit 210 to the third magnetic detection unit 230 may be arranged so that the bottom surfaces thereof are in contact with the second plane 34, and are arranged so that a part of each crosses the second plane 34. May be. 2 and 3, the first magnetic detection unit 210 to the third magnetic detection unit 230 show an example in which the thickness in the Z-axis direction is formed to be substantially the same, but instead, Each thickness may be uneven.

  The first plane 32 and the second plane 34 are arranged in the order of the substrate plane 22, the second plane 34, and the first plane 32 in the + Z-axis direction. In this case, it is possible to apply a simple method of forming a magnetic converging unit after forming a magnetic detection unit that senses only the magnetic field in the X-axis direction on the substrate 20. Such a simple method is preferable from the viewpoint of production and performance, but is not limited thereto. The magnetic sensor 100 of the present embodiment described above includes the first magnetic convergence unit 110 and the second magnetic convergence unit 120, and the first magnetic detection unit 210 to the third magnetic detection unit 230, and thus the magnetic sensor 100. The sensitivity of each magnetic detection unit with respect to the magnetic field input to is increased.

Figure 4 shows an example of a magnetic path in the case where the + X-axis direction of the magnetic sensor 100 according to this embodiment gave a magnetic field B _X. FIG. 4 is a top view of the magnetic sensor 100 (plan view as viewed in the Z-axis direction). FIG. 5 shows an example of a cross-sectional view taken along line AA of the magnetic sensor 100 shown in FIG. 4 (plan view as viewed in the Y-axis direction). In the magnetic sensor 100 shown in FIGS. 4 and 5, the same reference numerals are given to substantially the same operations as those of the magnetic sensor 100 according to the present embodiment shown in FIGS. 1 and 2, and description thereof is omitted.

When the magnetic field _BX is applied in the + X-axis direction of the magnetic sensor 100, as shown in FIG. 4, the first magnetic focusing member 111 of the first magnetic focusing unit 110 protruding in the −X-axis direction is a space in the vicinity thereof. To converge the magnetic field in That is, not only the magnetic field on the XY plane close to the first magnetic focusing member 111 but also the magnetic field on the XZ plane close to the first magnetic focusing member 111 is converged on the first magnetic focusing member 111. The magnetic field focused on the first magnetic focusing member 111 passes through the second magnetic focusing member 112 connected to the first magnetic focusing member 111 and is emitted from the second magnetic focusing member 112 in the −X axis direction and the + X axis direction. Is done. Thus, among the magnetic field B _X, the magnetic field is focused on the first magnetic flux concentrator member 111 is released from the second magnetic flux concentrator member 112 in the -X-axis direction and the + X-axis direction.

  In this case, the magnetic field emitted in the −X axis direction from the second magnetic focusing member 112 is the + X axis from the second magnetic focusing member 112 because the third magnetic focusing member 113 having a high magnetic permeability is on the −X axis direction side. It becomes larger than the magnetic field emitted in the direction. The magnetic field emitted from the second magnetic focusing member 112 in the −X-axis direction is generated between the third magnetic detection unit 230 and the first magnetic detection unit 210 between the second magnetic focusing member 112 and the third magnetic focusing member 113. It passes through and is captured by the third magnetic flux concentrator member 113. Further, the magnetic field captured by the third magnetic focusing member 113 is released in the + X axis direction through the fourth magnetic focusing member 114 connected to the third magnetic focusing member 113. In addition, the magnetic field emitted from the second magnetic flux concentrator member 112 in the + X-axis direction passes through the second magnetic detection unit 220.

Of the magnetic field B _X , the magnetic field input to the third magnetic focusing member 113 of the second magnetic focusing unit 120 is emitted from the third magnetic focusing member 113 in the + X-axis direction, and the third magnetic focusing member 113. And is released in the + X-axis direction through the fourth magnetic flux concentrating member 114 connected to the. In this case, since the input magnetic field is converged on the fourth magnetic focusing member 114 having a high magnetic permeability, the magnetic field emitted from the third magnetic focusing member 113 in the + X-axis direction passes through the fourth magnetic focusing member 114. It becomes smaller than the emitted magnetic field.

  The magnetic field emitted from the third magnetic focusing member 113 in the + X-axis direction passes through the first magnetic detection unit 210 and the third magnetic detection unit 230 between the second magnetic focusing member 112 and the third magnetic focusing member 113. And captured by the second magnetic flux concentrator member 112. Then, the magnetic field captured by the second magnetic flux concentrator member 112 is emitted in the + X axis direction and passes through the second magnetic detection unit 220.

Here, since the first magnetic flux concentrator member 111 protrudes in the -X-axis direction, the magnetic field to be input to the first magnetic flux concentrator member 111 of the magnetic field B _X is input to the third magnetic flux concentrator member 113 of the magnetic field B _X Larger than the magnetic field Therefore, the magnetic field emitted from the second magnetic focusing member 112 in the −X-axis direction is generated by the first magnetic focusing member 111 that converges more magnetic fields than the magnetic field input to the third magnetic focusing member 113. Therefore, it is larger than the magnetic field emitted from the third magnetic flux concentrator member 113 in the + X axis direction. That is, as the sum of the magnetic field emitted from the second magnetic focusing member 112 in the −X-axis direction and the magnetic field emitted from the third magnetic focusing member 113 in the + X-axis direction, the first magnetic detection unit 210 and the third magnetic The detection unit 230 generally detects a magnetic field in the −X axis direction.

In addition, as the sum of the magnetic field released from the second magnetic focusing member 112 in the + X-axis direction after being focused on the first magnetic focusing member 111 and the magnetic field released from the third magnetic focusing member 113 in the + X-axis direction, The second magnetic detection unit 220 detects a magnetic field in the + X axis direction as a whole. Thus, the first magnetic detection portion 210 third magnetic detection unit 230 senses the first direction and the magnetic field parallel which is redirecting according to the magnetic field B _X to be input to the + X-axis direction. The first magnetic detection portion 210 from the third magnetic detection unit 230 senses the magnetic field strength is proportional to the intensity of the magnetic field B _X to be input to the + X-axis direction, respectively.

FIG. 6 shows an example of a magnetic path when the magnetic field _BY is applied in the + Y-axis direction of the magnetic sensor 100 according to the present embodiment. FIG. 6 is a top view of the magnetic sensor 100 (plan view as viewed in the Z-axis direction). FIG. 7 shows an example of a cross-sectional view taken along line AA of the magnetic sensor 100 shown in FIG. 6 (plan view seen in the Y-axis direction). In the magnetic sensor 100 shown in FIGS. 6 and 7, the same reference numerals are given to the substantially same operations as those of the magnetic sensor 100 according to the present embodiment shown in FIGS. 1 and 2, and the description thereof is omitted.

When the magnetic field _BY is applied in the + Y-axis direction of the magnetic sensor 100, as shown in FIG. 6, the third magnetic focusing member 113 protruding in the -Y-axis direction converges the magnetic field in the space in the vicinity thereof. . The magnetic field converged on the fourth magnetic focusing member 114 is converged on the third magnetic focusing member 113. The magnetic field focused on the third magnetic focusing member 113 is emitted from the third magnetic focusing member 113 in the −X axis direction and the + X axis direction. In this case, the magnetic field emitted in the + X-axis direction from the third magnetic focusing member 113 is the −X-axis direction from the third magnetic focusing member 113 because the second magnetic focusing member 112 having a high permeability is on the + X-axis direction side. Becomes larger than the magnetic field emitted to

  The magnetic field emitted from the third magnetic focusing member 113 in the + X-axis direction passes through the first magnetic detection unit 210 and the third magnetic detection unit 230 between the second magnetic focusing member 112 and the third magnetic focusing member 113. And captured by the second magnetic flux concentrator member 112. Further, the magnetic field captured by the second magnetic focusing member 112 is coupled to the second magnetic focusing member 112 together with the magnetic field that is focused on the second magnetic focusing member 112 through the second magnetic detection unit 220 in the −X axis direction. The first magnetic flux concentrating member 111 is released.

Therefore, the first magnetic detection unit 210 and the third magnetic detection unit 230 detect the magnetic field in the + X axis direction according to the magnetic field emitted from the third magnetic focusing member 113 in the + X axis direction. In addition, the second magnetic detection unit 220 detects a magnetic field in the −X axis direction according to the magnetic field converged on the second magnetic focusing member 112 in the −X axis direction. From the above, the first magnetic detection unit 210 to the third magnetic detection unit 230 detect a magnetic field parallel to the first direction, the direction of which is changed according to the magnetic field _BY input in the + Y-axis direction. The first magnetic detection unit 210 to the third magnetic detection unit 230 detect the magnetic field strength proportional to the strength of the magnetic field _BY input in the + Y axis direction.

FIG. 8 shows an example of a magnetic path when the magnetic field _BZ is applied in the + Z-axis direction of the magnetic sensor 100 according to the present embodiment. FIG. 8 is a top view of the magnetic sensor 100 (plan view seen in the Z-axis direction). FIG. 9 shows an example of a cross-sectional view taken along line AA of the magnetic sensor 100 shown in FIG. 8 (plan view as viewed in the Y-axis direction). In the magnetic sensor 100 shown in FIGS. 8 and 9, the same reference numerals are given to the same components as those of the magnetic sensor 100 according to the present embodiment shown in FIGS. 1 and 2, and the description thereof is omitted.

If the magnetic field B _Z is given in the + Z-axis direction of the magnetic sensor 100, as shown in FIGS. 8 and 9, a portion of the magnetic field B _Z is bent in the -X-axis direction, the first magnetic detection portion 210 It is converged to the third magnetic flux concentrating member 113 and released. Part of the magnetic field B _Z, + X-axis direction bent, is converged on the second magnetic flux concentrator member 112 through the third magnetic detection unit 230, and released. Part of the magnetic field B _Z, bent in the -X-axis direction is converged to the second magnetic flux concentrator member 112 through the second magnetic detection unit 220, and released. Part of the magnetic field B _Z, bent in the + X-axis direction is converged on the third magnetic flux concentrator member 113, and released.

  As described above, the first magnetic detection unit 210 detects the magnetic field in the −X-axis direction among the magnetic fields converged by the third magnetic focusing member 113. In addition, the third magnetic detection unit 230 detects a magnetic field in the + X-axis direction among the magnetic fields converged by the second magnetic focusing member 112. In addition, the second magnetic detection unit 220 detects a magnetic field in the −X-axis direction among the magnetic fields converged by the second magnetic focusing member 112.

Accordingly, the first magnetic detection portion 210 third magnetic detection unit 230 senses the first direction and the magnetic field parallel which is redirecting depending on the magnetic field B _Z which is input to the + Z-axis direction. Then, the first magnetic detection portion 210 third magnetic detection unit 230 senses the magnetic field strength is proportional to the intensity of the magnetic field B _Z which inputs in the + Z-axis direction.

  In the magnetic sensor 100 of the present embodiment described above, the first magnetic converging part 110 has an L-shape formed by the first magnetic converging member 111 and the second magnetic converging member 112 in a plan view viewed from the Z-axis direction. . Similarly, the second magnetic flux concentrator 120 has an L-shape formed by the third magnetic flux concentrator member 113 and the fourth magnetic flux convergent member 114. Here, in this embodiment, the L-shape is used as a general term including an L-shaped transposition or a mirror image.

  Here, for example, the first magnetic flux concentrator member 111 may protrude toward the + X axis direction side from the + X axis direction side end of the second magnetic flux concentrator member 112 when viewed from the Y axis direction. That is, the first magnetic flux concentrator 110 may have a T shape. In this case, if the first magnetic flux concentrator member 111 does not protrude beyond the end of the fourth magnetic flux concentrator member 114 on the + X-axis direction side, the large difference from the magnetic field flow method (magnetic path) shown in FIGS. Does not occur. For example, even if another magnetic converging member is connected to the + Y-axis direction end of the first magnetic converging member 111, there is no significant difference from the magnetic field flow shown in FIGS.

FIG. 10 illustrates the X-axis direction sensed by the first magnetic detection unit 210 to the third magnetic detection unit 230 when magnetic fields B _X , B _Y , and B _Z are respectively applied to the magnetic sensor 100 according to the present embodiment. An example of a magnetic field is shown. In the magnetic sensor 100 shown in FIG. 10, the same reference numerals are given to substantially the same operations as those of the magnetic sensor 100 according to the present embodiment shown in FIG. 1, and description thereof is omitted.

When the magnetic field _BX is applied in the + X axis direction of the magnetic sensor 100, the first magnetic detection unit 210 and the third magnetic detection unit 230 detect the magnetic field in the −X axis direction. In addition, the second magnetic detection unit 220 detects a magnetic field in the + X axis direction. When the magnetic field _BY is applied in the + Y-axis direction of the magnetic sensor 100, the first magnetic detection unit 210 and the third magnetic detection unit 230 detect the magnetic field in the + X-axis direction. The second magnetic detector 220 detects a magnetic field in the −X axis direction. When the magnetic field _BZ is applied in the + Z-axis direction of the magnetic sensor 100, the first magnetic detection unit 210 and the second magnetic detection unit 220 detect the magnetic field in the −X-axis direction. The third magnetic detection unit 230 detects a magnetic field in the + X axis direction.

  Such a magnetic sensor 100 uses the first magnetic converging unit 110 and the second magnetic converging unit 120 to convert the direction of the input magnetic field into the magnetic sensitive axis direction of the magnetic detection unit. That is, the magnetic sensor 100 includes a first magnetic convergence unit 110 and a second magnetic convergence unit 120 that function as a magnetic field direction conversion unit. In other words, when a magnetic field component is input in the first direction (+ X axis direction), the magnetic sensor 100 converts the magnetic field component into the first magnetic field component in the first direction and the second magnetic field component in the direction opposite to the first direction. When the magnetic field component is input in a second direction (+ Y-axis direction) different from the first direction, the magnetic field component is converted into the third magnetic field component in the first direction and the first direction opposite to the first direction. A magnetic field direction conversion unit for converting each of the four magnetic field components is provided. In addition, when the magnetic field component is input in a third direction (+ Z-axis direction) different from the first direction and the second direction, the magnetic field direction conversion unit converts the magnetic field component into the first direction magnetic field component and the first direction. And reverse magnetic field components.

  In this case, the first magnetic detection unit 210 detects one of the first magnetic field component and the second magnetic field component and one of the third magnetic field component and the fourth magnetic field component, and the second magnetic detection unit 220. May detect the other of the first magnetic field component and the second magnetic field component and the other of the third magnetic field component and the fourth magnetic field component. In this case, the third magnetic detection unit 230 detects the other of the first magnetic field component and the second magnetic field component and one of the third magnetic field component and the fourth magnetic field component. The magnetic sensor 100 further includes a fourth magnetic detection unit that detects one of the first magnetic field component and the second magnetic field component and the other of the third magnetic field component and the fourth magnetic field component. Good. The fourth magnetic detector will be described later.

  FIG. 11 shows an example in which the wiring unit 130 is connected to the magnetic sensor 100 according to the present embodiment. The wiring part 130 may be a metal wiring. For example, the wiring unit 130 is formed inside the insulating layer 30 and connected from the first magnetic detection unit 210 to the third magnetic detection unit 230. The wiring part 130 may be formed on the second plane 34 and may be formed on a different plane in the insulating layer 30 instead. The wiring part 130 may be formed so as to electrically connect different planes. The wiring part 130 may be formed on the second plane 34 and may be formed on a different plane in the insulating layer 30 instead. The wiring part 130 may be formed so as to electrically connect different planes.

  The wiring unit 130 is connected to a terminal indicated by a rectangle in FIG. 11 and electrically connects the terminal and the magnetic detection unit. More specifically, the wiring unit 130 connects the first magnetic detection unit 210 to the third magnetic detection unit 230 and the terminal S, respectively. The wiring unit 130 connects the first magnetic detection unit 210 and the terminal A, the second magnetic detection unit 220 and the terminal B, and the third magnetic detection unit 230 and the terminal C, respectively.

  The terminals A, B, C, and the terminal S are formed of metal and are electrically connected to the outside, and exchange electric signals, power supply voltages, and / or reference potentials with the outside. The terminals A, B, C, and the terminal S may be formed on the first plane 32. Instead, they are formed inside the insulating layer 30, and a part of the insulating layer 30 is processed by etching or the like. It may be formed so as to be exposed to the outside. The terminals A, B, C, and the terminal S may be part of the wiring unit 130.

Assuming that the magnetic resistances between the terminals A-S, B-S, and C-S are R _A , R _B , and R _C , the respective magnetic resistances can be calculated as follows.
(Equation 1)
R _A = R ₀ −ΔR _X + ΔR _Y −ΔR _Z
(Equation 2)
R _B = R ₀ + ΔR _X −ΔR _Y −ΔR _Z
(Equation 3)
R _C = R ₀ −ΔR _X + ΔR _Y + ΔR _Z

Here, R ₀ is the resistance value of the magnetoresistive element in the absence of magnetic field, [Delta] R _X is the resistance change amount corresponding to the magnetic field B _X of + X-axis direction, [Delta] R _Y resistance change corresponding to the magnetic field B _Y of the + Y-axis direction The amount ΔR _Z is a resistance change amount according to the magnetic field B _Z in the + Z-axis direction. Each of the magnetic resistances of the equations (Equation 1) to (Equation 3) includes resistance change amounts ΔR _X , ΔR _Y , and ΔR _Z corresponding to the magnetic field of the triaxial component. The symbols ΔR _X , ΔR _Y , and ΔR _Z correspond to the direction of the magnetic field in the X-axis direction across the first magnetic detection unit 210 and the third magnetic detection unit 230, as shown in FIG.

From the following (Expression 3)-(Expression 2) and (Expression 1)-(Expression 2), the following expression is obtained.
(Equation 4)
_{S CB = R C -R B =} 2 (-ΔR X + ΔR Y + ΔR Z)
(Equation 5)
S _AB = R _A −R _B = 2 (−ΔR _X + ΔR _Y )

  In this way, it can be understood that the magnetic sensor 100 can extract the output signals as they are mixed without separating the orthogonal three-axis component magnetic signals. That is, the magnetic sensor 100 according to the present embodiment detects a magnetic field obtained by mixing at least a magnetic field perpendicular to the substrate and a parallel magnetic field. Here, the magnetic sensor 100 can also separate each magnetic field component from the detected result.

  For example, by calculating Equation (5), the magnetic field component parallel to the substrate can be separated from the mixed magnetic field components. Further, by subtracting (Equation 5) from (Equation 4), the magnetic field component perpendicular to the substrate can be separated from the mixed magnetic field components. Also, the magnetic field component perpendicular to the substrate can be separated by subtracting (Equation 1) from (Equation 3).

  Here, the magnetic sensor 100 can acquire a magnetic field component parallel to the substrate if at least one magnetic detection unit is disposed between the second magnetic focusing member 112 and the third magnetic focusing member 113. . For example, the magnetic sensor 100 omits the third magnetic detection unit 230 and includes the first magnetic detection unit 210 and the second magnetic detection unit 220, so that the output signals of the formulas (1) and (2) can be output. The output signal corresponding to the equation (5) can be obtained.

  Further, the magnetic sensor 100 omits the first magnetic detection unit 210 and includes the second magnetic detection unit 220 and the third magnetic detection unit 230, so that the output signals of the formulas (2) and (3) can be output. The output signal corresponding to the equation (4) can be obtained. Further, the magnetic sensor 100 omits the second magnetic detection unit 220 and includes the first magnetic detection unit 210 and the third magnetic detection unit 230, so that the output signals of the equations (1) and (3) can be output. By obtaining and subtracting, a component perpendicular to the substrate can be obtained.

  In FIG. 11, it has been described that the wiring unit 130 is a metal wiring, but instead of this, a wiring of the same material as the magnetic detection unit may be used, or both wirings may be mixed. In addition, as shown in FIG. 11, connecting one terminal of the first magnetic detection unit 210 to the third magnetic detection unit 230 to one point and connecting it to the terminal S reduces the number of output terminals. However, instead of this, one terminal of each of the first magnetic detection unit 210 to the third magnetic detection unit 230 may be connected to the output terminal.

  FIG. 12 shows an example of a circuit configuration connected to the magnetic sensor 100 according to the present embodiment. In FIG. 12, the description of the magnetic convergence portion is omitted.

  A first potential is applied to the terminal S. The first potential may be a ground potential. In addition, one terminal of the first constant current source 310 is electrically connected to the terminal A, one terminal of the second constant current source 312 is electrically connected to the terminal B, and one terminal of the third constant current source 314 is electrically connected to the terminal C. Connected to. In addition, the other terminals of the first constant current source 310 to the third constant current source 314 are electrically coupled to one point to be given a second potential. The second potential may be a predetermined power supply potential.

As an example, the first magnetic detection unit 210 to the third magnetic detection unit 230 are preliminarily generated from the first constant current source 310 to the third constant current source 314 through terminals A, B, and C connected thereto, respectively. constant current magnitude defined is I _S are supplied. Thus, the voltage _{V AS} generated between terminals AS _were subjected _{V AS = I S R A =} I S (R 0 -ΔR X + ΔR Y -ΔR Z) . Therefore, the _{I S} (the number 1) A signal is obtained. Similarly, between the terminals BS, the voltage _{V BS} and _{V CS} that occurs each between the CS, respectively (number 2), the signal is obtained by multiplying the _{I S} in equation (3).

Then, the differential voltage V _CB obtained by the voltage V _CS and the voltage V _BS becomes V _CB = V _CS −V _BS = I _S S _CB = 2I _S (−ΔR _X + ΔR _Y + ΔR _Z ), (Equation 4) signal multiplied by I _S is obtained in the equation. Similarly, as the differential voltage V _AB obtained by the voltage V _AS and the voltage V _BS , a signal obtained by multiplying the expression (5) by I _S is obtained.

In this way, the magnetic sensor 100 can extract the output signals that are mixed without separating the orthogonal three-axis component magnetic signals. Here, it is omitted third magnetic detection unit 230, similarly to the description of FIG. 11, the magnetic sensor 100 can obtain a signal obtained by multiplying the I _S to (5) below.

  In FIG. 12, the first magnetic detection unit 210 to the third magnetic detection unit 230 are connected to the third constant current source 314 from the first constant current source 310 and the current is supplied. Alternatively, for example, a switch may be provided for each of the terminals A, B, and C, and the current may be supplied to each magnetic detection unit by switching the switch from a common constant current source. Thereby, the number of constant current sources can be reduced.

  As described above, the magnetic sensor 100 according to the present embodiment can react to a magnetic field in an arbitrary direction (that is, an input magnetic field expressed by a combination of X, Y, and Z-axis components of the magnetic field). That is, the magnetic sensor 100 can detect a magnetic field in an arbitrary direction without being arranged corresponding to the direction of the magnetic field to be detected, so that the degree of freedom in designing the device is improved and the device is further downsized. And space saving can be realized. Furthermore, it is possible to realize a magnetic sensor that is small, has low power consumption, has high sensitivity, and has high accuracy, and that outputs magnetic signals of orthogonal three-axis components without being separated.

  FIG. 13 shows a second configuration example (plan view seen in the Z-axis direction) of the magnetic sensor 100 according to the present embodiment. FIG. 14 shows an example of a cross-sectional view (plan view seen in the Y-axis direction) taken along line AA of the magnetic sensor 100 shown in FIG. In the magnetic sensor 100 shown in FIG. 13 and FIG. 14, the same reference numerals are given to substantially the same operations as those of the magnetic sensor 100 according to the present embodiment shown in FIG. 1 and FIG.

  The magnetic sensor 100 of the second configuration example illustrated in FIG. 13 includes one first magnetic detection unit 10 as with the magnetic sensor 100 of the first configuration example. The first magnetic detection unit 10 is substantially parallel to the substrate plane 22 and the first to fourth magnetic detection units 210 to 240 formed on the second plane 34 substantially parallel to the substrate plane 22. A first magnetic flux concentrator 110 having a first magnetic flux concentrator member 111 and a second magnetic flux concentrator member 112 formed on the first plane 32, and a second magnetic magnet having a third magnetic flux concentrator member 113 to a fifth magnetic flux concentrator member 115. And a converging unit 120. That is, the magnetic sensor 100 of the second configuration example further includes the fifth magnetic convergence member 115 and the fourth magnetic detection unit 240 in addition to the magnetic sensor 100 of the first configuration example illustrated in FIG.

  The second magnetic flux concentrator 120 further includes a fifth magnetic flux concentrator member 115 connected to the positive end of the fourth magnetic flux concentrator member 114 in the first direction and extending to the positive side in the second direction. The fifth magnetic flux concentrator member 115 is arranged so that the second magnetic flux concentrator member 112 is sandwiched between the third magnetic flux convergent member 113 and the fifth magnetic flux convergent member 115. In other words, the second magnetic detection unit 220 is disposed between the second magnetic focusing member 112 and the fifth magnetic focusing member. The fifth magnetic flux concentrator member 115 may be formed of the same material as the first magnetic flux convergent member 111 to the fourth magnetic flux convergent member 114.

  The second magnetic focusing member 112, the third magnetic focusing member 113, the fifth magnetic focusing member 113, and the fifth magnetic focusing member 115 are substantially parallel to each other in the Y-axis direction. 5 Magnetic converging members 115 are arranged in the order of −X axis direction side to + X axis direction side, and the other side is shifted in the longitudinal direction (Y axis direction) with respect to two adjacent ones in a plan view as viewed from the Z axis direction. Arranged. In other words, the second magnetic focusing member 112, the third magnetic focusing member 113, and the fifth magnetic focusing member 115 extend in the Y-axis direction, and the third magnetic focusing member 113 and the fifth magnetic focusing member 115 are extended. The -Y-axis direction end of the second magnetic flux concentrator member 112 is disposed so as to protrude in the -Y-axis direction from the -Y-axis direction end of the second magnetic flux concentrator member 112. Further, the end on the + Y-axis direction side of the second magnetic focusing member 112 is disposed so as to protrude to the + Y-axis direction side from the + Y-axis direction end of the third magnetic focusing member 113 and the fifth magnetic focusing member 115. The

  The fifth magnetic flux concentrator member 115 has a thickness in the Z-axis direction and overlaps (intersects with or touches) the first plane 32, similarly to the second magnetic flux convergent member 112 and the third magnetic flux convergent member 113. Further, the fifth magnetic flux concentrator member 115 is a rectangle whose longitudinal direction is in the Y-axis direction, and is arranged in a direction parallel to the Y-axis direction. The shape of the fifth magnetic flux concentrator member 115 is not limited to a rectangle, and may be any of a quadrilateral having a longitudinal direction in a direction substantially parallel to the Y-axis direction, a parallelogram, and a trapezoid. In FIG. 13, the fifth magnetic flux concentrator member 115 shows an example in which the long sides parallel to the Y-axis direction have substantially the same length as the second magnetic flux concentrator member 112 and the third magnetic flux concentrator member 113. Instead of this, the long sides may be different lengths.

  The fifth magnetic focusing member 115 shows an example in which each short side parallel to the X-axis direction has the same length as the second magnetic focusing member 112 and the third magnetic focusing member 113. May be of different lengths. Further, the fifth magnetic flux concentrator member 115 shows an example in which the bottom surface is disposed so as to contact the first plane 32, but may be disposed so that a part of the bottom surface intersects the first plane 32. Moreover, although the example which made the thickness of the Z-axis direction of the 2nd magnetic focusing member 112, the 3rd magnetic focusing member 113, and the 5th magnetic focusing member 115 substantially the same is shown, instead of this, each thickness is It may be uneven.

  The fourth magnetic detection unit 240 is disposed between the second magnetic focusing member 112 and the fifth magnetic focusing member 115. Here, the second magnetic detection unit 220 has a smaller distance to the second magnetic focusing member 112 than the fifth magnetic focusing member 115, and the fourth magnetic detection unit 240 has the fifth magnetic level than the second magnetic focusing member 112. The distance to the converging member 115 is small.

  The fourth magnetic detection unit 240 has a magnetosensitive axis for detecting a magnetic field in the X-axis direction parallel to the substrate plane 22, similarly to the first magnetic detection unit 210 to the third magnetic detection unit 230. It does not sense the magnetic field in the Y-axis direction and the Z-axis direction. The fourth magnetic detection unit 240 is disposed on the second plane 34 and is formed to detect only the magnetic field in the X-axis direction. In other words, the fourth magnetic detection unit 240 has a magnetosensitive axis in the X-axis direction without a magnetic converging unit or the like. The fourth magnetic detector 240 may be formed of the same material as the first magnetic detector 210 to the third magnetic detector 230. Similarly to the first magnetic detection unit 210 to the third magnetic detection unit 230, the fourth magnetic detection unit 240 increases in resistance when a magnetic field in the + X-axis direction is input, and receives a magnetic field in the -X-axis direction. Then, it forms so that resistance value may decrease.

  Moreover, it is preferable that the 4th magnetic detection part 240 is flat form. The shape of the fourth magnetic detection unit 240 that overlaps the second plane 34 is a more preferable shape in a plan view as viewed from the Z-axis direction, but instead, for example, a quadrangle, a square, a parallelogram, Any of a trapezoid, a triangle, a polygon, a circle, and an ellipse may be used. The fourth magnetic detection unit 240 may include a plurality of magnetic detection units that are subdivided and divided in the Y-axis direction. In this case, the plurality of divided magnetic detection units are connected by metal wiring or the like so as to function as a single magnetic detection unit. In other words, for example, the fourth magnetic detection unit 240 is not limited to a single magnetic detection unit, and may be formed by connecting two or more magnetic detection units in series with metal wiring.

  The fourth magnetic detector 240 is arranged so that the bottom surface is in contact with the second plane 34, but may be arranged so that a part of the bottom surface intersects the second plane 34. Moreover, in FIG. 14, although the thickness of the Z-axis direction of the 1st magnetic detection part 210 to the 4th magnetic detection part 240 is shown substantially the same, it replaces with this and each thickness is uneven. Good.

  Assuming that a line between the shapes of the second magnetic flux concentrator member 112 and the fifth magnetic flux concentrator member 115 closest to each other in a plan view viewed from the Z-axis direction is a virtual midline DD, The 2 magnetic detection part 220 is arrange | positioned so that it may be near the 2nd magnetic convergence member 112 rather than virtual midline DD. In addition, the fourth magnetic detection unit 240 is disposed so as to be closer to the fifth magnetic convergence member 115 than the virtual midline DD. The second magnetic detection unit 220 and the fourth magnetic detection unit 240 are connected to the third magnetic detection unit 230 and the first magnetic detection unit 210 with respect to the center line parallel to the Y-axis direction of the second magnetic convergence member 112. It is preferable to arrange at a line symmetrical position.

  The fourth magnetic detection unit 240 is arranged close to the end side along the longitudinal direction of the fifth magnetic flux concentrator member 115 in a plan view as viewed from the Z-axis direction. More preferably, a part of the fourth magnetic detector 240 along the long side direction is covered with the fifth magnetic flux concentrator member 115. That is, the fourth magnetic detector 240 and the fifth magnetic flux concentrator 115 may overlap at least partially in a plan view as viewed from the Z-axis direction.

  Here, a plane perpendicular to the Y-axis direction between the second magnetic focusing member 112 and the fifth magnetic focusing member 115 intersects both the second magnetic focusing member 112 and the fifth magnetic focusing member 115. A range along the direction is defined as a range R2. That is, when viewed from the first direction, the range in the Y-axis direction where the second magnetic flux concentrator member 112 and the fifth magnetic flux concentrator member 115 overlap is defined as range R2.

  Each of the second magnetic detection unit 220 and the fourth magnetic detection unit 240 is at least partially disposed in the range R2 when viewed from the first direction, and the magnetic detection unit in the range R2 is a magnetic field in the X-axis direction. It is preferable to sense. More preferably, all of the second magnetic detection unit 220 and the fourth magnetic detection unit 240 are arranged in a range R2 along the Y-axis direction. FIG. 13 shows an example in which the second magnetic detection unit 220 and the fourth magnetic detection unit 240 are arranged in the range R2 and formed in the same shape.

  FIG. 13 shows an example in which the first magnetic detection unit 210 and the third magnetic detection unit 230 are arranged in the range R1 and formed in the same shape. More preferably, the range R1 and the range R2 are substantially the same range, and the first magnetic detection unit 210 to the fourth magnetic detection unit 240 are arranged in the ranges R1 and R2 and formed in the same shape.

FIG. 15 illustrates the X-axis direction sensed by the first magnetic detection unit 210 to the fourth magnetic detection unit 240 when the magnetic fields B _X , B _Y , and B _Z are respectively applied to the magnetic sensor 100 according to the present embodiment. An example of a magnetic field is shown. In the magnetic sensor 100 shown in FIG. 15, the same reference numerals are given to the substantially same operations as those of the magnetic sensor 100 according to the present embodiment shown in FIG. Further, the magnetic sensor 100 of the second configuration example has a configuration in which the magnetic sensor 100 of the first configuration example includes the fifth magnetic converging member 115 and the fourth magnetic detection unit 240, so that the magnetic fields B _X , B _Y , and magnetic path when the B _Z is input is substantially the same as FIGS. 4 to 9, the description thereof is omitted for substantially the same operation.

If the magnetic field _{B X} is given in the + X-axis direction of the magnetic sensor 100, the magnetic field _{B X} is converged to the first magnetic flux concentrator member 111 that protrudes in the -X axis direction. The magnetic field focused on the first magnetic focusing member 111 passes through the second magnetic focusing member 112 connected to the first magnetic focusing member 111 and is emitted from the second magnetic focusing member 112 in the −X axis direction and the + X axis direction. Is done. The magnetic field emitted from the second magnetic focusing member 112 in the −X-axis direction is generated between the third magnetic detection unit 230 and the first magnetic detection unit 210 between the second magnetic focusing member 112 and the third magnetic focusing member 113. It passes through and is captured by the third magnetic flux concentrator member 113. Further, the magnetic field captured by the third magnetic focusing member 113 is released through the fourth magnetic focusing member 114 connected to the third magnetic focusing member 113.

In addition, the magnetic field emitted from the second magnetic flux concentrator member 112 in the + X-axis direction is the second magnetic detector 220 and the fourth magnetic detector 240 between the second magnetic concentrator 112 and the fifth magnetic concentrator 115. And is captured and released by the fifth magnetic focusing member 115. Thus, the first magnetic detection portion 210 fourth magnetic detection unit 240 senses the first direction and the magnetic field parallel which is redirecting according to the magnetic field B _X to be input to the + X-axis direction. As described above, when the magnetic field _BX is applied in the + X-axis direction, the first magnetic detection unit 210 and the third magnetic detection unit 230 detect the magnetic field in the −X-axis direction. In addition, the second magnetic detection unit 220 and the fourth magnetic detection unit 240 detect a magnetic field in the + X-axis direction.

When the magnetic field _BY is applied in the + Y-axis direction of the magnetic sensor 100, the magnetic field _BY is applied to the third magnetic converging member 113 and the fifth magnetic converging member 115 of the second magnetic converging unit 120 protruding in the −Y-axis direction. Each converges. The magnetic field converged on the third magnetic converging member 113 is emitted from the third magnetic converging member 113 in the + X axis direction. The magnetic field emitted from the third magnetic focusing member 113 in the + X-axis direction passes through the first magnetic detection unit 210 and the third magnetic detection unit 230 between the second magnetic focusing member 112 and the third magnetic focusing member 113. And captured by the second magnetic flux concentrator member 112.

  Further, the magnetic field focused on the fifth magnetic flux concentrator member 115 is emitted from the fifth magnetic flux concentrator member 115 in the −X axis direction. The magnetic field emitted from the fifth magnetic focusing member 115 in the −X-axis direction is generated between the second magnetic detection member 240 and the second magnetic detection unit 220 between the second magnetic focusing member 112 and the fifth magnetic focusing member 115. It passes through and is captured by the second magnetic flux concentrator member 112. The magnetic field captured by the second magnetic focusing member 112 is emitted through the first magnetic focusing member 111 connected to the second magnetic focusing member 112.

As described above, the first magnetic detection unit 210 to the fourth magnetic detection unit 240 detect a magnetic field parallel to the first direction, the direction of which is changed according to the magnetic field _BY input in the + Y-axis direction. As described above, when the magnetic field _BY is applied in the + Y-axis direction, the first magnetic detection unit 210 and the third magnetic detection unit 230 detect the magnetic field in the + X-axis direction. In addition, the second magnetic detection unit 220 and the fourth magnetic detection unit 240 detect a magnetic field in the −X axis direction.

If the magnetic field B _Z is given in the + Z-axis direction of the magnetic sensor 100, a portion of the magnetic field B _Z, is converged on the third magnetic flux concentrator member 113 through the first magnetic detection portion 210 in the -X-axis direction, and Released. Part of the magnetic field B _Z, is converged on the second magnetic flux concentrator member 112 through the third magnetic detection unit 230 in the + X-axis direction, and released. Part of the magnetic field B _Z, is converged on the second magnetic flux concentrator member 112 through the second magnetic detection portion 220 in the -X-axis direction, and released. Part of the magnetic field B _Z, is converged to the fifth magnetic converging member 115 through the fourth magnetic detection unit 240 in the + X-axis direction, and released.

Thus, the first magnetic detection portion 210 fourth magnetic detection unit 240 senses the magnetic field parallel to a first direction which is the direction changing in response to the magnetic field B _Z which is input to the + Z-axis direction. As described above, when the magnetic field _BZ is applied in the + Z-axis direction, the first magnetic detection unit 210 and the second magnetic detection unit 220 detect the magnetic field in the −X-axis direction. In addition, the third magnetic detection unit 230 and the fourth magnetic detection unit 240 detect a magnetic field in the + X-axis direction.

  FIG. 16 shows an example in which the wiring unit 130 is connected to the magnetic sensor 100 according to the present embodiment. In the magnetic sensor 100 shown in FIG. 16, substantially the same operations as those of the magnetic sensor 100 according to the present embodiment shown in FIG. 11, FIG. 13, and FIG.

  The wiring unit 130 electrically connects the fourth magnetic detection unit 240 and the terminal S similarly to the first magnetic detection unit 210 to the third magnetic detection unit 230. Further, the wiring unit 130 electrically connects the fourth magnetic detection unit 240 and the terminal D. Similarly to the terminals A, B, C, and the terminal S, the terminal D may be formed of substantially the same material on substantially the same plane.

When the magnetoresistances between terminals A-S, B-S, C-S, and D-S are R _A , R _B , R _C , and R _D , the respective magnetic resistances are as follows: It can be calculated.
(Equation 6)
R _A = R ₀ −ΔR _X + ΔR _Y −ΔR _Z
(Equation 7)
R _B = R ₀ + ΔR _X −ΔR _Y −ΔR _Z
(Equation 8)
R _C = R ₀ −ΔR _X + ΔR _Y + ΔR _Z
(Equation 9)
R _D = R ₀ + ΔR _X −ΔR _Y + ΔR _Z

Each of the magnetic resistances of the equations (Equation 6) to (Equation 9) includes resistance change amounts ΔR _X , ΔR _Y , and ΔR _Z corresponding to the magnetic field of the triaxial component. The signs of ΔR _X , ΔR _Y , and ΔR _Z correspond to the direction of the magnetic field in the X-axis direction across the first magnetic detection unit 210 to the fourth magnetic detection unit 240, as shown in FIG.

From the following (Expression 8)-(Expression 7) and (Expression 6)-(Expression 9), the following expression is obtained.
(Equation 10)
_{S CB = R C -R B =} 2 (-ΔR X + ΔR Y + ΔR Z)
(Equation 11)
S _AD = R _A −R _D = 2 (−ΔR _X + ΔR _Y −ΔR _Z )

  In this way, it can be understood that the magnetic sensor 100 can extract output signals that are mixed without separating magnetic signals having three orthogonal axes. That is, the magnetic sensor 100 of the second configuration example can detect each magnetic field component in a state where it can be separated by mixing at least a magnetic field perpendicular to the substrate and a parallel magnetic field. Then, by adding (Equation 10) and (Equation 11), the magnetic field component parallel to the substrate can be separated from each mixed magnetic field component, and by subtracting (Equation 11) from (Equation 10), mixing is performed. A magnetic field component perpendicular to the substrate can be separated from each magnetic field component.

  Further, in the magnetic sensor 100, at least one magnetic detection unit is disposed between the second magnetic focusing member 112 and the third magnetic focusing member 113, and between the second magnetic focusing member 112 and the fifth magnetic focusing member 115, respectively. You may make it the structure which carried out. For example, if the first magnetic detector 210 is provided between the second magnetic flux concentrator member 112 and the third magnetic flux concentrator member 113, an output signal of the formula (6) can be obtained. If the fourth magnetic detection unit 240 is provided between the fifth magnetic flux concentrator members 115, an output signal of Formula (9) can be obtained, and an output signal corresponding to Formula (11) can be obtained. Similarly, by providing the second magnetic detection unit 220 and the third magnetic detection unit 230, the magnetic sensor 100 acquires the output signals of the formulas (7) and (8), and corresponds to the formula (10). Output signal can be obtained.

  In the magnetic sensor 100, a circuit is connected to the terminals A, B, C, D, and the terminal S as in the description of FIG. More specifically, the terminal S is supplied with the first potential. The output terminals A, B, C, and D are respectively connected to one terminals of the corresponding constant current sources. In addition, the other terminal of each corresponding constant current source is electrically coupled to one point to be given a second potential. In this case, the number of constant current sources may be reduced by combining constant current sources and switches.

For example, the first magnetic detection unit 210 to the fourth magnetic detection unit 240 may have a predetermined size I generated by a corresponding constant current source through terminals A, B, C, and D connected to the first magnetic detection unit 210 to the fourth magnetic detection unit 240, respectively. _S constant currents are respectively supplied. Thus, for example, the voltage _{V AS} generated between the output terminal AS _{is, V AS = I S R A} = I S (R 0 -ΔR X + ΔR Y -ΔR Z) next, _{I S} to (6) below A signal multiplied by is obtained. Similarly, voltages V _BS , V _CS , and V _DS generated between the output terminals B-S, C-S, and D-S are expressed by (Equation 7), (Equation 8), and (Equation 8), respectively. 9) obtained as a signal multiplied by I _S in formula.

Then, the differential voltage V _CB obtained by the voltage V _CS and the voltage V _BS becomes V _CB = V _CS −V _BS = I _S S _CB = 2I _S (−ΔR _X + ΔR _Y + ΔR _Z ), (Equation 10) obtained as a signal multiplied by I _S in formula. Similarly, the differential voltage V _AD obtained by the voltage V _AS and the voltage V _DS is obtained as a signal obtained by multiplying the equation (11) by I _S.

In this way, the magnetic sensor 100 can take out output signals that remain mixed without separating magnetic signals of orthogonal three-axis components. Here, be omitted second magnetic detection unit 220 and the third magnetic detection unit 230, the magnetic sensor 100 can obtain a signal obtained by multiplying the _{I S} in (11) below. Also, be omitted first magnetic detection unit 210 and the fourth magnetic detection unit 240, the magnetic sensor 100 can obtain a signal multiplied by _{I S} (the number 10).

  FIG. 17 shows a third configuration example (plan view as viewed in the Z-axis direction) of the magnetic sensor 100 according to the present embodiment. 18 shows an example of a cross-sectional view (plan view as viewed in the Y-axis direction) taken along line AA of the magnetic sensor 100 shown in FIG. In the magnetic sensor 100 shown in FIGS. 17 and 18, the same reference numerals are given to the substantially same operations as those of the magnetic sensor 100 according to the present embodiment shown in FIGS. 1 and 2, and the description thereof is omitted.

  The magnetic sensor 100 of the third configuration example includes a first magnetic detection unit 10a, a substantially mirror image, and a surface substantially orthogonal to the first direction at the negative end of the first magnetic converging member 111 in the first direction. The second magnetic detection unit 10b is further provided. That is, the first magnetic detection unit 10 described in FIG. 1 and FIG. 2 is shown as a first magnetic detection unit 10a in FIG. 17, and the second magnetic detection unit is a mirror image of the first magnetic detection unit 10a. 10b is shown.

  The magnetic sensor 100 of the third configuration example includes three magnetic detection units of the first magnetic detection unit 10a formed on the second plane 34, and the second magnetic detection unit 10b corresponding to the three magnetic detection units. Three magnetic detection units, a magnetic convergence member of the first magnetic detection unit 10a formed on the first plane 32, and a magnetic convergence member of the second magnetic detection unit 10b corresponding to the magnetic convergence member are provided.

  In addition, in FIG. 17, the 1st magnetic flux concentrator member 111 does not have a boundary in the 1st magnetic detection unit 10a and the 2nd magnetic detection unit 10b, and shows the example formed as a common magnetic convergence member. That is, the first magnetic flux concentrator 110 is disposed on the common first magnetic flux concentrator member 111, the second magnetic flux concentrator member 112a disposed on the first magnetic sensing unit 10a side, and the second magnetic sensing unit 10b side. And a seventh magnetic flux concentrator member 112b.

  The second magnetic convergence unit 120a of the first magnetic detection unit 10a includes a third magnetic convergence member 113a and a fourth magnetic convergence member 114a, and the second magnetic detection unit 10b corresponding to the second magnetic convergence unit 120a. The fourth magnetic focusing portion 120b includes an eighth magnetic focusing member 113b and a ninth magnetic focusing member 114b. The first magnetic detection unit 10a includes the first magnetic detection unit 210a to the third magnetic detection unit 230a, and the second magnetic detection unit 10b corresponding to the first magnetic detection unit 10a is the fifth magnetic detection unit 210b. To seventh magnetic detection unit 230b. The magnetic sensor 100 of the third configuration example is an example of a sensor having a plurality of magnetic detection units.

  The first magnetic detection unit 10a has substantially the same arrangement pattern as the first magnetic detection unit 10 described in FIG. The arrangement pattern of the second magnetic detection unit 10b is arranged so as to have a plane-symmetrical positional relationship on the YZ plane perpendicular to the substrate plane including the point Q located at the same distance from the first magnetic detection unit 10a. Here, the first magnetic detection unit 10 a and the second magnetic detection unit 10 b are separated from each other by a predetermined distance and are disposed on the first plane 32 and the second plane 34. The magnetic convergence member and the magnetic detection unit included in the second magnetic detection unit 10b correspond to the magnetic convergence member and the magnetic detection unit included in the first magnetic detection unit 10a, respectively, and may have substantially the same shape and material.

FIG. 19 shows an example of the magnetic field in the X-axis direction sensed by each of the magnetic sensing units when the magnetic sensors B _X , B _Y , and B _Z are given to the magnetic sensor 100 according to the present embodiment. In the magnetic sensor 100 shown in FIG. 19, substantially the same operations as those of the magnetic sensor 100 according to the present embodiment shown in FIG.

In addition, in the magnetic sensor 100 of the third configuration example, the first magnetic detection unit 10a has substantially the same configuration as the first magnetic detection unit 10 of the magnetic sensor 100 of the first configuration example, and thus the magnetic fields B _X and B The magnetic path when _{Y 1} and B _Z are input is the same as that shown in FIGS. The magnetic path when the magnetic fields B _X , B _Y , and B _Z are input to the second magnetic detection unit 10b will be described next.

If the + X-axis direction to the magnetic field _{B X} of the magnetic sensor 100 is given, a part of the magnetic field _{B X} is converged to a ninth magnetic convergence element 114b of the fourth magnetic converging portion 120b which protrudes in the -X axis direction. The magnetic field focused on the ninth magnetic focusing member 114b passes through the eighth magnetic focusing member 113b connected to the ninth magnetic focusing member 114b and is released from the eighth magnetic focusing member 113b in the −X-axis direction. The magnetic field emitted from the eighth magnetic focusing member 113b in the −X-axis direction is generated by the fifth magnetic detection unit 210b and the seventh magnetic detection unit 230b between the seventh magnetic focusing member 112b and the eighth magnetic focusing member 113b. It passes through and is captured by the seventh magnetic flux concentrator member 112b.

Part of the magnetic field _{B X,} through the sixth magnetic detection unit 220b proceeds in the + X-axis direction, are trapped in the seventh magnetic detection unit 112b. The magnetic field captured by the seventh magnetic focusing member 112b passes through the first magnetic focusing member 111 connected to the seventh magnetic focusing member 112b and the second magnetic focusing member 112a connected to the first magnetic focusing member 111. It is emitted from the second magnetic flux concentrator member 112a in the −X axis direction and the + X axis direction. The magnetic field emitted in the −X-axis direction from the second magnetic flux concentrator member 112a is generated by the third magnetic detector 230a and the first magnetic detector 210a between the second magnetic flux concentrator member 112a and the third magnetic flux concentrator member 113a. It passes through and is captured by the third magnetic flux concentrator member 113a.

The magnetic field captured by the third magnetic focusing member 113a is released through the fourth magnetic focusing member 114a connected to the third magnetic focusing member 113a. The magnetic field emitted from the second magnetic flux concentrator member 112a in the + X axis direction passes through the second magnetic detector 220a. Thus, the seventh magnetic detection unit 230b from the first magnetic detection portion 210a third magnetic detection unit 230a and the fifth magnetic detection unit 210b includes a first directionally converted according to the magnetic field _{B X} to be input to the + X-axis direction Sensing a magnetic field parallel to one direction.

As described above, when the magnetic field _BX is applied in the + X-axis direction, the first magnetic detection unit 210a, the third magnetic detection unit 230a, the fifth magnetic detection unit 210b, and the seventh magnetic detection unit 230b are in the −X-axis direction. Sense the magnetic field. Further, the second magnetic detection unit 220a and the sixth magnetic detection unit 220b detect a magnetic field in the + X-axis direction.

When the magnetic field _BY is applied in the + Y-axis direction of the magnetic sensor 100, a part of the magnetic field _BY is converged on the third magnetic converging member 113a of the second magnetic converging part 120a protruding in the -Y-axis direction. The magnetic field converged on the third magnetic focusing member 113a is emitted in the + X-axis direction from the third magnetic focusing member 113a. The magnetic field emitted from the third magnetic focusing member 113a in the + X-axis direction passes through the first magnetic detection unit 210a and the third magnetic detection unit 230a between the second magnetic focusing member 112a and the third magnetic focusing member 113a. Then, it is captured by the second magnetic flux concentrator member 112a. A part of the magnetic field _BY is captured by the second magnetic flux concentrator member 112a through the second magnetic detector 220a in the −X axis direction. The magnetic field captured by the second magnetic focusing member 112a is released through the first magnetic focusing member 111 connected to the second magnetic focusing member 112a.

Similarly, part of the magnetic field _BY is converged on the eighth magnetic converging member 113b of the fourth magnetic converging part 120b protruding in the −Y axis direction. The magnetic field converged on the eighth magnetic focusing member 113b is emitted in the −X-axis direction from the eighth magnetic focusing member 113b. The magnetic field emitted from the eighth magnetic focusing member 113b in the −X-axis direction is generated by the fifth magnetic detection unit 210b and the seventh magnetic detection unit 230b between the seventh magnetic focusing member 112b and the eighth magnetic focusing member 113b. It passes through and is captured by the seventh magnetic flux concentrator member 112b.

Further, a part of the magnetic field _BY passes through the sixth magnetic detector 220b in the + X-axis direction and is captured by the seventh magnetic convergence member 112b. The magnetic field captured by the seventh magnetic focusing member 112b is released through the first magnetic focusing member 111 connected to the seventh magnetic focusing member 112b. As described above, the first magnetic detection unit 210a to the third magnetic detection unit 230a and the fifth magnetic detection unit 210b to the seventh magnetic detection unit 230b are changed in direction according to the magnetic field _BY input in the + Y-axis direction. Sensing a magnetic field parallel to one direction.

As described above, when the magnetic field _BY is applied in the + Y-axis direction, the first magnetic detection unit 210a, the third magnetic detection unit 230a, and the sixth magnetic detection unit 220b detect the magnetic field in the + X-axis direction. The second magnetic detector 220a, the fifth magnetic detector 210b, and the seventh magnetic detector 230b detect a magnetic field in the −X axis direction.

If the magnetic sensor 100 + Z-axis direction to the magnetic field _{B Z} is given, the part of the magnetic field _{B Z,} is converged on the third magnetic flux concentrator member 113a through the first magnetic detection portion 210a to the -X-axis direction, and Released. Part of the magnetic field _{B Z,} is converged on the second magnetic flux concentrator member 112a through the second magnetic detection portion 220a to the -X-axis direction, and released. Part of the magnetic field _{B Z,} is converged on the second magnetic flux concentrator member 112a through the third magnetic detection unit 230a to the + X-axis direction, and released.

Part of the magnetic field _{B Z,} is converged to the eighth magnetic converging member 113b through the fifth magnetic detection unit 210b in the + X-axis direction, and released. Part of the magnetic field _{B Z,} is converged to a seventh magnetic converging member 112b through the sixth magnetic detection unit 220b in the + X-axis direction, and released. Part of the magnetic field _{B Z,} 7 is converged to the magnetic flux concentrator member 112b through the seventh magnetic detection unit 230b in the -X axis direction and released. Thus, the seventh magnetic detection unit 230b from the first magnetic detection portion 210a third magnetic detection unit 230a and the fifth magnetic detection unit 210b includes a first directionally converted according to the magnetic field _{B Z} which is input to the + Z-axis direction Sensing a magnetic field parallel to one direction.

As described above, when the magnetic field _BY is applied in the + Z-axis direction, the first magnetic detection unit 210a, the second magnetic detection unit 220a, and the seventh magnetic detection unit 230b detect the magnetic field in the −X-axis direction. In addition, the third magnetic detection unit 230a, the fifth magnetic detection unit 210b, and the sixth magnetic detection unit 220b detect a magnetic field in the + X-axis direction.

  FIG. 20 shows an example in which the wiring unit 130 is connected to the magnetic sensor 100 according to the present embodiment. In the magnetic sensor 100 shown in FIG. 20, the same reference numerals are given to substantially the same operations as those of the magnetic sensor 100 according to the present embodiment shown in FIGS. 11, 17, and 19, and the description thereof is omitted.

  The wiring unit 130 connects the fifth magnetic detection unit 210b to the seventh magnetic detection unit 230b to the terminal S, similarly to the first magnetic detection unit 210a to the third magnetic detection unit 230a. The wiring unit 130 electrically connects the fifth magnetic detection unit 210b to the seventh magnetic detection unit 230b and the terminals E, F, and G in a one-to-one correspondence. Similarly to the terminals A, B, C, and the terminal S, the terminals E, F, and G may be formed of substantially the same material on substantially the same plane.

Terminals A-S, B-S, C-S, E-S, F-S, and G-S have magnetoresistances R _A , R _B , R _C , R _E , R _F , If _RG , each magnetic resistance can be calculated as follows.
(Equation 12)
R _A = R ₀ −ΔR _X + ΔR _Y −ΔR _Z
(Equation 13)
R _B = R ₀ + ΔR _X −ΔR _Y −ΔR _Z
(Equation 14)
R _C = R ₀ −ΔR _X + ΔR _Y + ΔR _Z
(Equation 15)
R _E = R ₀ −ΔR _X −ΔR _Y + ΔR _Z
(Equation 16)
R _F = R ₀ + ΔR _X + ΔR _Y + ΔR _Z
(Equation 17)
R _G = R ₀ −ΔR _X −ΔR _Y −ΔR _Z

Each of the magnetic resistances of the equations (12) to (17) includes resistance change amounts ΔR _X , ΔR _Y , and ΔR _Z corresponding to the magnetic field of the three-axis component. The signs of ΔR _X , ΔR _Y , and ΔR _Z cross the first magnetic detection unit 210a to the third magnetic detection unit 230a and the fifth magnetic detection unit 210b to the seventh magnetic detection unit 230b, as shown in FIG. This corresponds to the direction of the magnetic field in the X-axis direction.

From the formulas (14)-(13), (12)-(13), (17)-(16), and (15)-(16), the following formula is obtained. .
(Equation 18)
_{S CB = R C -R B =} 2 (-ΔR X + ΔR Y + ΔR Z)
(Equation 19)
S _AB = R _A −R _B = 2 (−ΔR _X + ΔR _Y )
(Equation 20)
_{S GF = R G -R F =} 2 (-ΔR X -ΔR Y -ΔR Z)
(Equation 21)
S _EF = R _E -R _F = 2 (-ΔR _X -ΔR _Y )

  In this way, it can be understood that the magnetic sensor 100 can extract output signals that are mixed without separating magnetic signals having three orthogonal axes. That is, the magnetic sensor 100 according to the third configuration example can detect at least a magnetic field perpendicular to the substrate and a magnetic field parallel to each other and separate each magnetic field component. Then, from (Equation 19) or (Equation 21), the magnetic field component parallel to the substrate can be separated from the mixed magnetic field components, and (Equation 19) is subtracted from (Equation 18) or (Equation 20). By subtracting the equation (21), the magnetic field component perpendicular to the substrate can be separated from the mixed magnetic field components.

  In addition, the magnetic sensor 100 includes one magnetic detection unit between at least one of the second magnetic focusing member 112a and the third magnetic focusing member 113a and between the seventh magnetic focusing member 112b and the eighth magnetic focusing member 113b. You may make it the structure arrange | positioned. For example, if the third magnetic detecting unit 230a is provided between the second magnetic converging member 112a and the third magnetic converging member 113a, an output signal of the formula (14) can be obtained, and the second magnetic detecting unit 220a If provided, an output signal of Expression (18) is obtained.

Furthermore, (Expression 18) − (Expression 19), − (Expression 20) + (Expression 21), − (Expression 19) − (Expression 21), and (Expression 19) − (Expression 21) Is obtained as follows.
(Equation 22)
2ΔR _Z = S _CB -S _AB
(Equation 23)
2ΔR _Z = −S _GF + S _EF
(Equation 24)
4ΔR _X = −S _AB −S _EF
(Equation 25)
4ΔR _Y = S _AB -S _EF

  Thus, it can be understood that an output signal corresponding to the resistance change amount corresponding to the magnetic field of each axis can be extracted. In this case, two or more magnetic detection units are provided between the second magnetic focusing member 112a and the third magnetic focusing member 113a and between the seventh magnetic focusing member 112b and the eighth magnetic focusing member 113b. By arranging, one of (Expression 22), (Expression 24), and (Expression 25), or (Expression 23), (Expression 24), and (Expression 25) can be acquired. The development of the expression for obtaining the output signal corresponding to the resistance change amount corresponding to the magnetic field of each axis obtained here is an example, and is not limited to this.

  In the magnetic sensor 100, a circuit is connected to the terminals A, B, C, E, F, G, and the terminal S as in the description of FIG. More specifically, the terminal S is supplied with the first potential. The terminals A, B, C, E, F, and G are connected to one terminal of the corresponding constant current source. In addition, the other terminal of each corresponding constant current source is electrically coupled to one point to be given a second potential. In this case, the number of constant current sources may be reduced by combining constant current sources and switches.

As an example, the first magnetic detection unit 210a to the third magnetic detection unit 230a and the fifth magnetic detection unit 210b to the seventh magnetic detection unit 230b are connected to terminals A, B, C, E, F, and G, respectively. through a constant current of magnitude I _S a predetermined generated by corresponding constant current sources are supplied. Thereby, for example, the voltage V _AS generated between the terminals A and S becomes V _AS = I _S R _A = I _S (R ₀ −ΔR _X + ΔR _Y −ΔR _Z ), and I _S is expressed by Expression (12). A multiplied signal is obtained. Similarly, the voltages V _BS , V _CS , V _ES , V _FS , and V _GS generated between the terminals B-S, C-S, E-S, _FS , and _GS are respectively the signal multiplied by _{I S} is obtained from each equation (13) into equation (17).

Further, the differential voltage V _CB obtained by the voltage V _CS and the voltage V _BS is V _CB = V _CS −V _BS = I _S S _CB = 2I _S (−ΔR _X + ΔR _Y + ΔR _Z ), (Equation 18) signal multiplied by I _S is obtained in the equation. Similarly, a differential voltage V _AB obtained by the voltage V _AS and the voltage V _BS , a differential voltage V _GF obtained by the voltage V _GS and the voltage V _FS, and a differential voltage obtained by the voltage V _ES and the voltage V _FS and V _EF, each (number 19) is obtained as a signal multiplied by _{I S} (the number 20), and (expression 21) below.

In this way, the magnetic sensor 100 can take out output signals that remain mixed without separating magnetic signals of orthogonal three-axis components. Here, the magnetic sensor 100 includes one magnetic detection unit between at least one of the second magnetic focusing member 112a and the third magnetic focusing member 113a and between the seventh magnetic focusing member 112b and the eighth magnetic focusing member 113b. It may be arranged in a single configuration. For example, between the second magnetic flux concentrator member 112a and the third magnetic flux concentrator member 113a, by providing the third magnetic detection unit 230a, to obtain an output signal multiplied by _{I S} (the number 14), further second By providing the magnetic detection unit 220a, to obtain an output signal multiplied by _{I S} in equation (18).

  FIG. 21 shows a fourth configuration example (plan view seen in the Z-axis direction) of the magnetic sensor 100 according to the present embodiment. In the magnetic sensor 100 shown in FIG. 21, the same reference numerals are given to substantially the same operations as those of the magnetic sensor 100 according to the present embodiment shown in FIGS. 1 and 13, and the description thereof is omitted.

  The magnetic sensor 100 of the fourth configuration example is substantially perpendicular to the first direction at the negative end of the first magnetic converging member 111 in the first direction in the magnetic sensor 100 of the second configuration example shown in FIG. And a second magnetic detection unit 10b disposed so as to be a substantially mirror image with the first magnetic detection unit 10a. That is, the first magnetic detection unit 10 described in FIG. 13 is shown as the first magnetic detection unit 10a in FIG. 21, and the second magnetic detection unit 10b is shown to be a mirror image of the first magnetic detection unit 10a. .

  The magnetic sensor 100 of the fourth configuration example includes four magnetic detection units of the first magnetic detection unit 10a formed on the second plane 34, and two second magnetic detection units 10b corresponding to the four magnetic detection units. Four magnetic detection units, a magnetic convergence member of the first magnetic detection unit 10a formed on the first plane 32, and a magnetic convergence member of the second magnetic detection unit 10b corresponding to the magnetic convergence member are provided.

  FIG. 21 shows an example in which the first magnetic flux concentrator member 111 is formed as a common magnetic flux concentrator member without a boundary in the first magnetic detection unit 10a and the second magnetic detection unit 10b. That is, the first magnetic flux concentrator 110 is disposed on the common first magnetic flux concentrator member 111, the second magnetic flux concentrator member 112a disposed on the first magnetic sensing unit 10a side, and the second magnetic sensing unit 10b side. And a seventh magnetic flux concentrator member 112b.

  In addition, the second magnetic focusing unit 120a of the first magnetic detection unit 10a includes the third magnetic focusing member 113a to the fifth magnetic focusing member 115a, and the second magnetic detection unit 10b corresponding to the second magnetic focusing unit 120a. The fourth magnetic flux concentrator 120b includes the eighth magnetic flux concentrator member 113b to the tenth magnetic flux convergent member 115b. The first magnetic detection unit 10a includes the first magnetic detection unit 210a to the fourth magnetic detection unit 240a, and the second magnetic detection unit 10b corresponding to the first magnetic detection unit 10a is the fifth magnetic detection unit 210b. To an eighth magnetic detector 240b. The magnetic sensor 100 of the fourth configuration example is an example of a sensor having a plurality of magnetic detection units.

  The first magnetic detection unit 10a has substantially the same arrangement pattern as the first magnetic detection unit 10 described in FIG. The arrangement pattern of the second magnetic detection unit 10b is arranged so as to have a plane-symmetrical positional relationship on the YZ plane perpendicular to the substrate plane including the point Q located at the same distance from the first magnetic detection unit 10a. Here, the first magnetic detection unit 10 a and the second magnetic detection unit 10 b are separated from each other by a predetermined distance and are disposed on the first plane 32 and the second plane 34. The magnetic convergence member and the magnetic detection unit included in the second magnetic detection unit 10b correspond to the magnetic convergence member and the magnetic detection unit included in the first magnetic detection unit 10a, respectively, and may have substantially the same shape and material.

FIG. 22 shows an example of the magnetic field in the X-axis direction sensed by each of the magnetic sensing units when the magnetic sensors B _X , B _Y , and B _Z are given to the magnetic sensor 100 according to the present embodiment. In the magnetic sensor 100 shown in FIG. 22, substantially the same operations as those of the magnetic sensor 100 according to the present embodiment shown in FIG. 21 are denoted by the same reference numerals, and description thereof is omitted.

In addition, in the magnetic sensor 100 of the fourth configuration example, the first magnetic detection unit 10a has substantially the same configuration as the first magnetic detection unit 10 of the magnetic sensor 100 of the second configuration example, so that the magnetic fields B _X and B The magnetic field in the X-axis direction sensed by each magnetic detection unit when _{Y 1} and B _Z are input is the same as in FIG. Next, the magnetic field in the X-axis direction sensed by each magnetic detection unit when the magnetic fields B _X , B _Y , and B _Z in the second magnetic detection unit 10b are input will be described.

If the + X-axis direction to the magnetic field _{B X} of the magnetic sensor 100 is given, the magnetic field _{B X} is converged to a tenth magnetic convergence element 115b of the fourth magnetic converging portion 120b on the end of the -X-axis direction. A part of the magnetic field converged on the tenth magnetic flux concentrator member 115b includes a ninth magnetic flux concentrator member 114b coupled to the tenth magnetic flux concentrator member 115b and an eighth magnetic flux concentrator member 113b coupled to the ninth magnetic flux concentrator member 114b. Then, it is emitted in the −X axis direction from the eighth magnetic flux concentrator member 113b.

  The magnetic field emitted from the eighth magnetic focusing member 113b in the −X-axis direction is generated by the fifth magnetic detection unit 210b and the seventh magnetic detection unit 230b between the seventh magnetic focusing member 112b and the eighth magnetic focusing member 113b. It passes through and is captured by the seventh magnetic flux concentrator member 112b. A part of the magnetic field converged on the tenth magnetic flux concentrator member 115b is also emitted from the tenth magnetic flux concentrator member 115b in the + X-axis direction. The magnetic field emitted from the tenth magnetic focusing member 115b in the + X-axis direction passes through the eighth magnetic detection unit 240b and the sixth magnetic detection unit 220b between the seventh magnetic focusing member 112b and the tenth magnetic focusing member 115b. And captured by the seventh magnetic flux concentrator member 112b.

  Further, the magnetic field captured by the seventh magnetic focusing member 112b passes through the first magnetic focusing member 111 connected to the seventh magnetic focusing member 112b and the second magnetic focusing member 112a connected to the first magnetic focusing member 111. The second magnetic flux concentrator member 112a emits in the −X axis direction and the + X axis direction. The magnetic field emitted in the −X-axis direction from the second magnetic flux concentrator member 112a is generated by the third magnetic detector 230a and the first magnetic detector 210a between the second magnetic flux concentrator member 112a and the third magnetic flux concentrator member 113a. It passes through and is captured by the third magnetic flux concentrator member 113a. Furthermore, the magnetic field captured by the third magnetic flux concentrator member 113a is released through the fourth magnetic flux concentrator member 114a connected to the third magnetic flux convergent member 113a.

In addition, the magnetic field emitted from the second magnetic flux concentrator member 112a in the + X-axis direction includes the second magnetic detector 220a and the fourth magnetic detector 240a between the second magnetic concentrator member 112a and the fifth magnetic concentrator member 115a. Passed through and captured by the fifth magnetic focusing member 115a and released. Thus, the eighth magnetic detection unit 240b from the first magnetic detection unit 210a senses the magnetic field parallel to a first direction which is the direction changing in response to the magnetic field B _X to be input to the + X-axis direction.

As described above, when the magnetic field _BX is applied in the + X-axis direction, the first magnetic detection unit 210a, the third magnetic detection unit 230a, the fifth magnetic detection unit 210b, and the seventh magnetic detection unit 230b are in the −X-axis direction. Sense the magnetic field. In addition, the second magnetic detection unit 220a, the fourth magnetic detection unit 240a, the sixth magnetic detection unit 220b, and the eighth magnetic detection unit 240b detect a magnetic field in the + X-axis direction.

When the magnetic field _BY is applied in the + Y-axis direction of the magnetic sensor 100, a part of the magnetic field _{BY is} a part of the third magnetic convergence member 113a and the fifth magnetic convergence of the second magnetic convergence unit 120a protruding in the -Y-axis direction. It converges on each member 115a. The magnetic fields after being focused on the third magnetic focusing member 113a and the fifth magnetic focusing member 115a have been described with reference to FIG.

Further, part of the magnetic field _BY is converged on the eighth magnetic converging member 113b and the tenth magnetic converging member 115b of the fourth magnetic converging part 120b protruding in the −Y-axis direction. The magnetic field converged on the eighth magnetic focusing member 113b is emitted in the −X-axis direction from the eighth magnetic focusing member 113b. The magnetic field emitted from the eighth magnetic focusing member 113b in the −X-axis direction is generated by the fifth magnetic detection unit 210b and the seventh magnetic detection unit 230b between the seventh magnetic focusing member 112b and the eighth magnetic focusing member 113b. It passes through and is captured by the seventh magnetic flux concentrator member 112b.

Further, the magnetic field focused on the tenth magnetic flux concentrator member 115b is emitted from the tenth magnetic flux concentrator member 115b in the + X-axis direction. The magnetic field emitted in the + X-axis direction from the tenth magnetic flux concentrator member 115b passes through the eighth magnetic detector 240b and the sixth magnetic detector 220b between the seventh magnetic concentrator member 112b and the tenth magnetic concentrator member 115b. It passes through and is captured by the seventh magnetic flux concentrator member 112b. Further, the magnetic field captured by the seventh magnetic focusing member 112b is released through the first magnetic focusing member 111 connected to the seventh magnetic focusing member 112b. As described above, the first magnetic detection unit 210a to the eighth magnetic detection unit 240b detect a magnetic field parallel to the first direction, the direction of which is changed according to the magnetic field _BY input in the + Y-axis direction.

As described above, when the magnetic field _BY is applied in the + Y-axis direction, the first magnetic detection unit 210a, the third magnetic detection unit 230a, the sixth magnetic detection unit 220b, and the eighth magnetic detection unit 240b are in the + X-axis direction. Sensing a magnetic field. In addition, the second magnetic detection unit 220a, the fourth magnetic detection unit 240a, the fifth magnetic detection unit 210b, and the seventh magnetic detection unit 230b detect a magnetic field in the −X-axis direction.

If the magnetic sensor 100 + Z-axis direction to the magnetic field _{B Z} is given, the part of the magnetic field _{B Z,} is converged on the third magnetic flux concentrator member 113a through the first magnetic detection portion 210a to the -X-axis direction, and Released. Thus, for the magnetic field B _Z from the second through the fourth magnetic detection unit 240a, omitted here since described in FIG 15.

Part of the magnetic field _{B Z,} is converged to the eighth magnetic converging member 113b through the fifth magnetic detection unit 210b in the + X-axis direction, and released. Part of the magnetic field _{B Z,} is converged to a seventh magnetic converging member 112b through the sixth magnetic detection unit 220b in the + X-axis direction, and released. Part of the magnetic field _{B Z,} 7 is converged to the magnetic flux concentrator member 112b through the seventh magnetic detection unit 230b in the -X axis direction and released. Part of the magnetic field _{B Z,} is converged to the 10 magnetic converging member 115b through the eighth magnetic detection unit 240b in the -X axis direction and released. Thus, the eighth magnetic detection unit 240b from the first magnetic detection unit 210a senses the magnetic field parallel to a first direction which is the direction changing in response to the magnetic field B _Z which is input to the + Z-axis direction.

From the above, when the magnetic field _BZ is applied in the + Z-axis direction, the first magnetic detection unit 210a, the second magnetic detection unit 220a, the seventh magnetic detection unit 230b, and the eighth magnetic detection unit 240b are in the −X-axis direction. Sense the magnetic field. The third magnetic detector 230a, the fourth magnetic detector 240a, the fifth magnetic detector 210b, and the sixth magnetic detector 220b detect a magnetic field in the + X-axis direction.

  FIG. 23 shows an example in which the wiring unit 130 is connected to the magnetic sensor 100 according to the present embodiment. In the magnetic sensor 100 shown in FIG. 23, substantially the same operations as those of the magnetic sensor 100 according to the present embodiment shown in FIGS. 16, 21, and 22 are denoted by the same reference numerals, and description thereof is omitted.

  The wiring unit 130 connects the fifth magnetic detection unit 210b to the eighth magnetic detection unit 240b to the terminal S, similarly to the first magnetic detection unit 210a to the fourth magnetic detection unit 240a. The wiring unit 130 electrically connects the fifth magnetic detection unit 210b to the eighth magnetic detection unit 240b and the terminal E to the terminal H in a one-to-one correspondence. Similarly to the terminals A to D and the terminal S, the terminals E to H may be formed of substantially the same material on substantially the same plane.

If the magnetoresistance between the terminals A-S and H-S is R _A to R _H , each magnetoresistance can be calculated as follows:
(Equation 26)
R _A = R ₀ −ΔR _X + ΔR _Y −ΔR _Z
(Equation 27)
R _B = R ₀ + ΔR _X −ΔR _Y −ΔR _Z
(Equation 28)
R _C = R ₀ −ΔR _X + ΔR _Y + ΔR _Z
(Equation 29)
R _D = R ₀ + ΔR _X −ΔR _Y + ΔR _Z
(Equation 30)
R _E = R ₀ −ΔR _X −ΔR _Y + ΔR _Z
(Equation 31)
R _F = R ₀ + ΔR _X + ΔR _Y + ΔR _Z
(Expression 32)
R _G = R ₀ −ΔR _X −ΔR _Y −ΔR _Z
(Expression 33)
R _H = R ₀ + ΔR _X + ΔR _Y −ΔR _Z

Each of the magnetic resistances of the equations (26) to (33) includes resistance change amounts ΔR _X , ΔR _Y , and ΔR _Z corresponding to the magnetic field of the triaxial component. The signs of ΔR _X , ΔR _Y , and ΔR _Z correspond to the direction of the magnetic field in the X-axis direction across the first magnetic detection unit 210a to the eighth magnetic detection unit 240b, as shown in FIG.

From the formulas (28)-(27), (26)-(29), (32)-(31), and (30)-(33), the following formula is obtained. .
(Equation 34)
_{S CB = R C -R B =} 2 (-ΔR X + ΔR Y + ΔR Z)
(Equation 35)
S _AD = R _A −R _D = 2 (−ΔR _X + ΔR _Y −ΔR _Z )
(Equation 36)
_{S GF = R G -R F =} 2 (-ΔR X -ΔR Y -ΔR Z)
(Equation 37)
S _EH = R _E -R _H = 2 (-ΔR _X -ΔR _Y + ΔR _Z )

Furthermore, − (Equation 34) − (Equation 35) − (Equation 36) − (Equation 37), (Equation 34) + (Equation 35) − (Equation 36) − (Equation 37), and (Equation 34). The following equation is obtained from the equation (35)-(math 36) + (math 37).
(Equation 38)
_{8ΔR X = -S CB -S AD -S} GF -S EH
(Equation 39)
8ΔR _Y = S _CB + S _AD −S _GF −S _EH
(Equation 40)
_{8ΔR Z = S CB -S AD -S} GF + S EH

  In this way, the magnetic sensor 100 can acquire magnetic signals having three orthogonal axis components. That is, by solving the simultaneous equations relating to each magnetic resistance, each of the resistance change amounts corresponding to the magnetic field of the three-axis component can be obtained. The expansion of the simultaneous equations described here is an example, and is not limited to this.

  In the magnetic sensor 100, a circuit is connected from the terminal A to the terminal H and the terminal S as in the description of FIG. More specifically, the terminal S is supplied with the first potential. Terminals A to H are connected to one terminal of the corresponding constant current source. In addition, the other terminal of each corresponding constant current source is electrically coupled to one point to be given a second potential. In this case, the number of constant current sources may be reduced by combining constant current sources and switches.

Eighth magnetic detection unit 240b from the first magnetic detection unit 210a, as an example, through the terminal H from the terminal A connected to each constant current of corresponding magnitude I _S a predetermined generated by the constant current source Are supplied respectively. Thereby, for example, the voltage V _AS generated between the terminals A and S becomes V _AS = I _S R _A = I _S (R ₀ −ΔR _X + ΔR _Y −ΔR _Z ), and I _S is expressed by the equation (26). A multiplied signal is obtained. Similarly, _{V HS} from the voltage _{V BS} generated each between HS from between the terminals BS, the signal multiplied by _{I S} is obtained from each equation (27) into equation (33) below.

Further, the differential voltage V _CB obtained by the voltage V _CS and the voltage V _BS is V _CB = V _CS −V _BS = I _S S _CB = 2I _S (−ΔR _X + ΔR _Y + ΔR _Z ), (Equation 34) signal multiplied by I _S is obtained in the equation. Similarly, it is possible to obtain also the signal multiplied by _{I S} (the number 37) expression (Expression 35). Further, it is possible to obtain also the signal multiplied by _{I S} (the number 40) expression (Expression 38), the output signal [Delta] R _X in the X-axis _{direction, 8ΔR X = (- V CB} -V AD -V GF - can be obtained as V _EH) / _{I S.} Similarly, the output signal [Delta] R _Y in the Y-axis direction, as _{8ΔR Y = (V CB + V} AD -V GF -V EH) / I S, the output signal [Delta] R _Z in the Z-axis direction, 8ΔR _Z = _{(V CB} - as _{V AD -V GF + V EH)} / I S, can be obtained.

Here, the differential voltages V _CB , V _AD , V _GF , and V _EH are, in other words, voltages generated between the terminals C-B, A-D, _GF , and E-H, respectively. That is, between terminals C-B, between A-D, between G-F, by measuring the voltage generated between E-H directly, the signal multiplied by _{I S} (the number 37) expression (Expression 34) The output signal of each axis can be obtained by taking out. The above-described method for obtaining ΔR _X , ΔR _Y , and ΔR _Z is an example, and does not limit how to establish or solve simultaneous equations related to the resistance value of the magnetic detection unit.

  FIG. 24 shows an example in which the calculation unit 300 is connected to the magnetic sensor 100 according to the present embodiment. In the magnetic sensor 100 shown in FIG. 24, substantially the same operations as those of the magnetic sensor 100 according to the present embodiment shown in FIG.

  The calculation unit 300 calculates a magnetic field component in the first direction and a magnetic field component in the second direction based on the outputs of the magnetic detection units in the first magnetic detection unit 10a and the second magnetic detection unit 10b. The calculation unit 300 further calculates a magnetic field component in a third direction different from the first direction and the second direction based on the outputs of the magnetic detection units in the first magnetic detection unit 10a and the second magnetic detection unit 10b. . The calculation unit 300 includes a signal acquisition unit 320, a calculation unit 330, and an addition / subtraction unit 340.

The signal acquisition unit 320 acquires the signal output of the eighth magnetic detection unit 240b from the first magnetic detection unit 210a. As an example, a plurality of signal acquisition units 320 are provided corresponding to the number of magnetic detection units included in the magnetic sensor 100, and are connected to the first magnetic detection unit 210a to the eighth magnetic detection unit 240b, respectively. Signal acquiring unit 320, in accordance with the constant current I _S supplied from the outside of the constant current source to each magnetic detection unit, corresponding magnetic detection unit acquires a signal output for outputting. Alternatively, the signal acquisition unit 320 has a constant current source, the in accordance with the constant current I _S supplied from the constant current source may acquire a corresponding signal output by the magnetic detection unit outputs. The signal acquisition unit 320 supplies the acquired signal output to the calculation unit 330.

The calculation unit 330 calculates the signal output received from the signal acquisition unit 320. In FIG. 24, the calculation unit 330 is connected to two signal acquisition units 320 and subtracts two received signal outputs. More specifically, the calculation unit 330CB is connected to the signal acquisition unit 320C and the signal acquisition unit 320B, and subtracts the received signal output (V _CS and V _BS ) to obtain a signal V _CB (= V _CS −V _BS ). Is calculated. Calculation unit 330CB the calculated signal _{V CB} is divided by the current value _{I S,} may calculate the signal _{S CB} corresponding to (number 34). The calculation unit 330CB supplies the calculated signal S _CB (or signal V _CB ) to the addition / subtraction unit 340.

Similarly, the calculation unit 330AD, the calculation unit 330GF, and the calculation unit 330EH are connected to the corresponding two signal acquisition units 320, and based on the received two signal outputs, the calculated signals S _AD , S _GF , and S _EH. Is supplied to the adder / subtractor 340. That is, the calculation unit 330 calculates a signal corresponding to Equations (34) to (37).

The adder / subtractor 340 is connected to the calculator 330 and adds / subtracts the received signal to calculate and output a magnetic field component in the third direction from the first direction. The adder / subtractor 340 uses the signals S _CB , S _AD , S _GF , and S _EH to perform operations corresponding to the equations (Equation 38) to (Equation 40), and performs the X-axis direction, the Y-axis direction, and Outputs the magnetic field component in the Z-axis direction.

  The magnetic sensor 100 according to the present embodiment described above can detect magnetic signals of three orthogonal components on the same substrate, and reduce the current consumption of the entire sensor. In addition, the magnetic sensor 100 can realize a small and high-resolution three-dimensional magnetic sensor using a magnetic detection unit having a magnetosensitive axis in one direction.

  FIG. 25 shows a fifth configuration example (plan view seen in the Z-axis direction) of the magnetic sensor 100 according to the present embodiment. In the magnetic sensor 100 shown in FIG. 21, the same reference numerals are given to substantially the same operations as those of the magnetic sensor 100 according to the present embodiment shown in FIGS. 1 and 13, and the description thereof is omitted.

  The magnetic sensor 100 of the fifth configuration example is the same as the first magnetic focusing member 111 or the first magnetic focusing member 111 on the positive side in the second direction in the magnetic sensor 100 of the second configuration example shown in FIG. A second magnetic detection unit 10c is further provided so as to be a substantially mirror image with the first magnetic detection unit 10a with respect to a surface substantially orthogonal to the two directions. That is, the first magnetic detection unit 10 described in FIG. 13 is shown as the first magnetic detection unit 10a in FIG. 25, and the second magnetic detection unit 10c is shown to be a mirror image of the first magnetic detection unit 10a. .

  The magnetic sensor 100 of the fifth configuration example includes four magnetic detection units of the first magnetic detection unit 10a formed on the second plane 34, and the second magnetic detection unit 10c corresponding to the four magnetic detection units. Four magnetic detection units, a magnetic convergence member of the first magnetic detection unit 10a formed on the first plane 32, and a magnetic convergence member of the second magnetic detection unit 10c corresponding to the magnetic convergence member are provided.

  The first magnetic focusing unit 110a of the first magnetic detection unit 10a includes a first magnetic focusing member 111a and a second magnetic focusing member 112a, and the second magnetic detection unit 10c corresponding to the first magnetic focusing unit 110a The fifth magnetic flux concentrator 110c includes an eleventh magnetic flux concentrator member 111c and a twelfth magnetic flux convergent member 112c. The second magnetic convergence unit 120a of the first magnetic detection unit 10a includes the third magnetic convergence member 113a to the fifth magnetic convergence member 115a, and the second magnetic detection unit 10c corresponding to the second magnetic convergence unit 120a. The sixth magnetic flux concentrator 120c includes a thirteenth magnetic flux concentrator member 113c to a fifteenth magnetic flux concentrator member 115c.

  The first magnetic detection unit 10a includes the first magnetic detection unit 210a to the fourth magnetic detection unit 240a, and the second magnetic detection unit 10c corresponding to the first magnetic detection unit 10a is the ninth magnetic detection unit 210c. To twelfth magnetic detector 240c. The magnetic sensor 100 of the fifth configuration example is an example of a sensor having a plurality of magnetic detection units.

  The first magnetic detection unit 10a has substantially the same arrangement pattern as the first magnetic detection unit 10 described in FIG. The arrangement pattern of the second magnetic detection unit 10c is arranged so as to have a plane-symmetrical positional relationship in the XZ plane perpendicular to the substrate plane including the point Q located equidistant from the first magnetic detection unit 10a. Here, the first magnetic detection unit 10 a and the second magnetic detection unit 10 c are separated from each other by a predetermined distance and are disposed on the first plane 32 and the second plane 34.

  Instead, the first magnetic detection unit 10a and the second magnetic detection unit 10c may be arranged so that the first magnetic focusing member 111a and the eleventh magnetic focusing member 111c are in contact with each other. The first magnetic detection unit 10a and the second magnetic detection unit 10c may be arranged so that the first magnetic focusing member 111a and the eleventh magnetic focusing member 111c overlap.

  The second magnetic detection unit 10c does not have the eleventh magnetic flux concentrator member 111c, and the end of the twelfth magnetic flux concentrator member 112c on the −Y axis direction side is the end of the first magnetic flux concentrator member 111a on the + X axis direction side. May be connected. In this case, the first magnetic flux concentrator member 111a is shared by the first magnetic detection unit 10a and the second magnetic detection unit 10c. The magnetic convergence member and the magnetic detection unit included in the second magnetic detection unit 10c may correspond to the magnetic convergence member and the magnetic detection unit included in the first magnetic detection unit 10a, respectively, and may have substantially the same shape and material.

FIG. 26 shows an example of the magnetic field in the X-axis direction sensed by each of the magnetic detectors when the magnetic fields B _X , B _Y , and B _Z are respectively given to the magnetic sensor 100 according to the present embodiment. In the magnetic sensor 100 shown in FIG. 26, substantially the same operation as that of the magnetic sensor 100 according to the present embodiment shown in FIG.

Further, in the magnetic sensor 100 of the fifth configuration example, the first magnetic detection unit 10a has substantially the same configuration as the first magnetic detection unit 10 of the magnetic sensor 100 of the second configuration example. Therefore, the magnetic field in the X-axis direction sensed by each magnetic detection unit when the magnetic fields B _X , B _Y , and B _Z are input is also the same as that in FIG. Next, the magnetic field in the X-axis direction sensed by each magnetic detection unit when the magnetic fields B _X , B _Y , and B _Z are input in the second magnetic detection unit 10c will be described.

If the magnetic field _{B X} is given in the + X-axis direction of the magnetic sensor 100, a portion of the magnetic field _{B X} is converged to the 11 magnetic convergence element 111c of the fifth magnetic convergence 110c projecting in -X direction. The magnetic field converged on the eleventh magnetic focusing member 111c passes through the twelfth magnetic focusing member 112c connected to the eleventh magnetic focusing member 111c and is emitted from the twelfth magnetic focusing member 112c in the −X axis direction and the + X axis direction. Is done.

  The magnetic field emitted from the twelfth magnetic flux concentrator member 112c in the −X-axis direction is generated by the eleventh magnetic detector 230c and the ninth magnetic detector 210c between the twelfth magnetic concentrator member 112c and the thirteenth magnetic concentrator member 113c. It passes through and is captured by the thirteenth magnetic flux concentrator member 113c. Further, the magnetic field captured by the thirteenth magnetic focusing member 113c is released through the fourteenth magnetic focusing member 114c connected to the thirteenth magnetic focusing member 113c.

The magnetic field emitted from the twelfth magnetic flux concentrator member 112c in the + X-axis direction is the tenth magnetic detector 220c and the twelfth magnetic detector 240c between the twelfth magnetic concentrator member 112c and the fifteenth magnetic concentrator member 115c. Passed through and captured by the fifteenth magnetic focusing member 115c and released. Thus, the fourth magnetic detection unit 240a and the ninth twelfth magnetic detection unit 240c from the magnetic detection unit 210c from the first magnetic detection unit 210a is first directionally converted according to the magnetic field _{B X} to be input to the + X-axis direction Sensing a magnetic field parallel to one direction.

From the above, when the magnetic field _BX is applied in the + X-axis direction, the first magnetic detection unit 210a, the third magnetic detection unit 230a, the ninth magnetic detection unit 210c, and the eleventh magnetic detection unit 230c are in the −X-axis direction. Sense the magnetic field. In addition, the second magnetic detection unit 220a, the fourth magnetic detection unit 240a, the tenth magnetic detection unit 220c, and the twelfth magnetic detection unit 240c detect a magnetic field in the + X-axis direction.

When the magnetic field _BY is applied in the + Y-axis direction of the magnetic sensor 100, the magnetic field _BY is converged on the second magnetic converging unit 120a of the first magnetic detection unit 10a and then the first magnetic converging unit 110a. It is emitted from the magnetic flux concentrator 111a in the + Y-axis direction (details are omitted here since they have been described in FIG. 15).

  The magnetic field emitted from the first magnetic flux concentrator member 111a is converged on the twelfth magnetic flux concentrator member 112c of the fifth magnetic flux concentrator 110c protruding in the −Y axis direction. The magnetic field converged on the twelfth magnetic focusing member 112c is emitted from the twelfth magnetic focusing member 112c in the −X axis direction and the + X axis direction.

  The magnetic field emitted from the twelfth magnetic flux concentrator member 112c in the −X-axis direction is generated by the eleventh magnetic detector 230c and the ninth magnetic detector 210c between the twelfth magnetic concentrator member 112c and the thirteenth magnetic concentrator member 113c. It passes through and is captured by the thirteenth magnetic flux concentrator member 113c. Further, the magnetic field captured by the thirteenth magnetic focusing member 113c is released through the fourteenth magnetic focusing member 114c connected to the thirteenth magnetic focusing member 113c.

The magnetic field emitted from the twelfth magnetic flux concentrator member 112c in the + X-axis direction is the tenth magnetic detector 220c and the twelfth magnetic detector 240c between the twelfth magnetic concentrator member 112c and the fifteenth magnetic concentrator member 115c. And is captured by the fifteenth magnetic flux concentrator member 115c. Further, the magnetic field captured by the fifteenth magnetic focusing member 115c is released through the fourteenth magnetic focusing member 114c connected to the fifteenth magnetic focusing member 115c. As described above, the first magnetic detection unit 210a to the fourth magnetic detection unit 240a and the ninth magnetic detection unit 210c to the twelfth magnetic detection unit 240c change the direction according to the magnetic field _BY input in the + Y-axis direction. Sensing a magnetic field parallel to one direction.

As described above, when the magnetic field _BY is applied in the + Y-axis direction, the first magnetic detection unit 210a, the third magnetic detection unit 230a, the tenth magnetic detection unit 220c, and the twelfth magnetic detection unit 240c are in the + X-axis direction. Sensing a magnetic field. The second magnetic detection unit 220a, the fourth magnetic detection unit 240a, the ninth magnetic detection unit 210c, and the eleventh magnetic detection unit 230c detect a magnetic field in the −X-axis direction.

If the magnetic sensor 100 + Z-axis direction to the magnetic field B _Z is given (so for the first magnetic detection unit 10a described in FIG. 15 will be omitted here), the part of the magnetic field B _Z, the -X-axis direction The light is converged on the thirteenth magnetic flux concentrator member 113c through the ninth magnetic detector 210c and then released. Part of the magnetic field _{B Z,} is converged to the 12 magnetic convergence element 112c through the tenth magnetic detection unit 220c in the -X axis direction and released. Part of the magnetic field _{B Z,} is converged to the 12 magnetic convergence element 112c through the eleventh magnetic detection unit 230c in the + X-axis direction, and released. Part of the magnetic field _{B Z,} is converged to the 15 magnetic convergence element 115c through the twelfth magnetic detection unit 240c in the + X-axis direction, and released. Thus, the fourth magnetic detection unit 240a and the ninth twelfth magnetic detection unit 240c from the magnetic detection unit 210c from the first magnetic detection unit 210a is first directionally converted according to the magnetic field _{B Z} which is input to the + Z-axis direction Sensing a magnetic field parallel to one direction.

As described above, when the magnetic field _BZ is applied in the + Z-axis direction, the first magnetic detection unit 210a, the second magnetic detection unit 220a, the ninth magnetic detection unit 210c, and the tenth magnetic detection unit 220c are in the −X-axis direction. Sense the magnetic field. The third magnetic detector 230a, the fourth magnetic detector 240a, the eleventh magnetic detector 230c, and the twelfth magnetic detector 240c detect a magnetic field in the + X-axis direction.

  FIG. 27 shows an example in which the wiring unit 130 is connected to the magnetic sensor 100 according to the present embodiment. In the magnetic sensor 100 shown in FIG. 23, substantially the same operations as those of the magnetic sensor 100 according to the present embodiment shown in FIGS. 16, 25, and 26 are denoted by the same reference numerals, and description thereof is omitted.

  The wiring unit 130 connects the ninth magnetic detection unit 210c to the twelfth magnetic detection unit 240c to the terminal S, similarly to the first magnetic detection unit 210a to the fourth magnetic detection unit 240a. In addition, the wiring unit 130 electrically connects the ninth magnetic detection unit 210c to the twelfth magnetic detection unit 240c and the terminal I to the terminal L in a one-to-one correspondence. Similarly to the terminals A to D and the terminal S, the terminals I to L may be formed of substantially the same material on substantially the same plane.

When the magnetic resistance between the terminals A and S to D-S is R _A to R _D and the magnetic resistance between the terminals I and S to L-S is R _I to R _L , each magnetic resistance is expressed by the following equation: It can be calculated as follows.
(Equation 41)
R _A = R ₀ −ΔR _X + ΔR _Y −ΔR _Z
(Equation 42)
R _B = R ₀ + ΔR _X −ΔR _Y −ΔR _Z
(Equation 43)
R _C = R ₀ −ΔR _X + ΔR _Y + ΔR _Z
(Equation 44)
R _D = R ₀ + ΔR _X −ΔR _Y + ΔR _Z
(Equation 45)
R _I = R ₀ −ΔR _X −ΔR _Y −ΔR _Z
(Equation 46)
R _J = R ₀ + ΔR _X + ΔR _Y −ΔR _Z
(Equation 47)
R _K = R ₀ −ΔR _X −ΔR _Y + ΔR _Z
(Formula 48)
R _L = R ₀ + ΔR _X + ΔR _Y + ΔR _Z

Each of the magnetoresistances of the equations (41) to (48) includes resistance change amounts ΔR _X , ΔR _Y , and ΔR _Z corresponding to the magnetic field of the three-axis component. As shown in FIG. 26, the symbols ΔR _X , ΔR _Y , and ΔR _Z indicate the first magnetic detection unit 210a to the fourth magnetic detection unit 240a, and the ninth magnetic detection unit 210c to the twelfth magnetic detection unit 240c. Corresponds to the direction of the magnetic field in the X-axis direction across.

From the (Expression 43)-(Expression 42), (Expression 41)-(Expression 44), (Expression 45)-(Expression 48), and (Expression 47)-(Expression 46), the following expression is obtained. .
(Equation 49)
_{S CB = R C -R B =} 2 (-ΔR X + ΔR Y + ΔR Z)
(Equation 50)
S _AD = R _A −R _D = 2 (−ΔR _X + ΔR _Y −ΔR _Z )
(Equation 51)
S _IL = R _I −R _L = 2 (−ΔR _X −ΔR _Y −ΔR _Z )
(Formula 52)
S _KJ = R _K −R _J = 2 (−ΔR _X −ΔR _Y + ΔR _Z )

Furthermore, − (Equation 49) − (Equation 50) − (Equation 51) − (Equation 52), (Equation 49) + (Equation 50) − (Equation 51) − (Equation 52), and (Equation 49). The following formula is obtained from the formula-(Formula 50)-(Formula 51) + (Formula 52).
(Formula 53)
8ΔR _X = −S _CB −S _AD −S _IL −S _KJ
(Equation 54)
8ΔR _Y = S _CB + S _AD −S _IL −S _KJ
(Equation 55)
8ΔR _Z = S _CB -S _AD -S _IL + S _KJ

  In this way, the magnetic sensor 100 can acquire magnetic signals having three orthogonal axis components. That is, by solving the simultaneous equations relating to each magnetic resistance, each of the resistance change amounts corresponding to the magnetic field of the three-axis component can be obtained. The expansion of the simultaneous equations described here is an example, and is not limited to this.

Here, when the equations (26) to (33) and (41) to (48) are compared, the magnetic resistances R _A , R _B , R _C of the magnetic sensor 100 of the fifth configuration example are compared. , R _D , R _I , R _J , R _K , R _L are R _A , R _B , R _C , R _D , R _G , R _{H obtained} by rearranging the magnetic resistances of the magnetic sensor 100 of the fourth configuration example. , R _E , R _F respectively corresponding outputs are obtained. As described above, in the magnetic sensor 100 of the fifth configuration example, each output signal can be extracted in the amount of resistance change corresponding to the magnetic field of the three-axis component, similarly to the magnetic sensor 100 of the fourth configuration example.

  In the magnetic sensor 100, a circuit is connected from the terminal A to the terminal D, from the terminal I to the terminal L, and to the terminal S, as in the description of FIGS. More specifically, the terminal S is supplied with the first potential. Further, the terminal A to the terminal D and the terminal I to the terminal L are respectively connected to one terminal of the corresponding constant current source. In addition, the other terminal of each corresponding constant current source is electrically coupled to one point to be given a second potential. In this case, the number of constant current sources may be reduced by combining constant current sources and switches.

For example, the first magnetic detection unit 210a to the fourth magnetic detection unit 240a, and the ninth magnetic detection unit 210c to the twelfth magnetic detection unit 240c are connected to the terminal A to the terminal D and the terminal I to the terminal L, respectively. through a constant current of magnitude I _S a predetermined generated by corresponding constant current sources are supplied. Accordingly, as in the description of FIG. 23, the voltages V _AS to V _DS and V _IS to V _LS generated between the terminals A and S and between the terminals _DS and between the terminals I and S and _{LS, respectively.} the signal multiplied by _{I S} is obtained from each equation (41) into equation (48) below.

Similarly, the differential voltage, the signal multiplied by the _{I S} is obtained (number 52) expression (Expression 49). Therefore, the output signal [Delta] R _X in the X-axis direction, 8ΔR _X = - a _{(V CB -V AD -V IL -V} KJ) / I S, the output signal [Delta] R _Y in the Y-axis direction, 8ΔR _Y = _{(V CB} as _{+ V AD -V IL -V KJ)} / I S, the output signal [Delta] R _Z in the Z-axis direction, as _{8ΔR Z = (V CB -V AD} -V IL + V KJ) / I S, can be obtained.

  FIG. 28 shows an example in which the calculation unit 300 is connected to the magnetic sensor 100 according to the present embodiment. In the magnetic sensor 100 shown in FIG. 24, substantially the same operations as those of the magnetic sensor 100 according to the present embodiment shown in FIG.

  Here, from the comparison results of Equations (26) to (33) and Equations (41) to (48), the output of the magnetic resistance of the magnetic sensor 100 of the fifth configuration example is the fourth configuration. The output is substantially the same as the output in which the order of the magnetic resistance of the magnetic sensor 100 in the example is changed. Therefore, the circuit configuration for signal detection of the magnetic sensor 100 of the fifth configuration example is similar to the calculation unit 300 of the magnetic sensor 100 of the fourth configuration example shown in FIG. Therefore, in the calculation unit 300 shown in FIG. 28, the same reference numerals are given to the substantially same operations as those of the magnetic sensor 100 according to the present embodiment shown in FIG.

The signal acquisition unit 320 acquires signal outputs of the first magnetic detection unit 210a to the fourth magnetic detection unit 240a and the ninth magnetic detection unit 210c to the twelfth magnetic detection unit 240c. The signal acquisition unit 320 supplies the acquired signal output to the calculation unit 330. Calculation unit 330, is divided by the current value I _S after subtracting the signal output received from the signal acquisition unit 320 calculates respectively a signal corresponding to (number 52) expression (Expression 49), subtraction section 340 To supply. The adder / subtractor 340 uses the signal received from the calculator 330 to perform calculations corresponding to the equations (Equation 53) to (Equation 55), and generates magnetic field components in the X-axis direction, the Y-axis direction, and the Z-axis direction. Is output.

  As described above, the magnetic sensor 100 according to the present embodiment can detect three orthogonal magnetic signals on the same substrate.

  FIG. 29 shows a sixth configuration example (plan view seen in the Z-axis direction) of the magnetic sensor 100 according to the present embodiment. In the magnetic sensor 100 shown in FIG. 29, substantially the same operations as those of the magnetic sensor 100 according to the present embodiment shown in FIGS. 1 and 13 are denoted by the same reference numerals, and description thereof is omitted.

  The magnetic sensor 100 of the sixth configuration example is a surface that is substantially orthogonal to the first direction on the positive side of the first direction with respect to the fifth magnetic converging member 115 in the magnetic sensor 100 of the second configuration example shown in FIG. On the other hand, the first magnetic detection unit 10a is further provided with a second magnetic detection unit 10b arranged so as to be a substantially mirror image. That is, the first magnetic detection unit 10 described in FIG. 13 is shown as the first magnetic detection unit 10a in FIG. 29, and the second magnetic detection unit 10b is shown as a mirror image of the first magnetic detection unit 10a. .

  The magnetic sensor 100 of the sixth configuration example includes four magnetic detection units of the first magnetic detection unit 10a formed on the second plane 34, and the second magnetic detection unit 10b corresponding to the four magnetic detection units. Four magnetic detection units, a magnetic convergence member of the first magnetic detection unit 10a formed on the first plane 32, and a magnetic convergence member of the second magnetic detection unit 10b corresponding to the magnetic convergence member are provided.

  The third magnetic focusing unit 110b of the second magnetic detection unit 10b corresponding to the first magnetic focusing unit 110a of the first magnetic detection unit 10a includes a sixth magnetic focusing member 111b and a seventh magnetic focusing member 112b. Further, the fourth magnetic converging part 120b of the second magnetic detecting unit 10b corresponding to the second magnetic converging part 120a of the first magnetic detecting unit 10a includes the eighth magnetic converging member 113b to the tenth magnetic converging member 115b. The second magnetic detection unit 10b corresponding to the first magnetic detection unit 10a includes the fifth magnetic detection unit 210b to the eighth magnetic detection unit 240b. The magnetic sensor 100 of the sixth configuration example is an example of a sensor having a plurality of magnetic detection units.

  The first magnetic detection unit 10a has substantially the same arrangement pattern as the first magnetic detection unit 10 described in FIG. The arrangement pattern of the second magnetic detection unit 10b is arranged so as to have a plane-symmetrical positional relationship on the YZ plane perpendicular to the substrate plane including the point Q located at the same distance from the first magnetic detection unit 10a. Here, the first magnetic detection unit 10 a and the second magnetic detection unit 10 b are separated from each other by a predetermined distance and are disposed on the first plane 32 and the second plane 34. The magnetic convergence member and the magnetic detection unit included in the second magnetic detection unit 10b correspond to the magnetic convergence member and the magnetic detection unit included in the first magnetic detection unit 10a, respectively, and may have substantially the same shape and material.

FIG. 30 shows an example of the magnetic field in the X-axis direction sensed by each of the magnetic detectors when the magnetic fields B _X , B _Y , and B _Z are respectively given to the magnetic sensor 100 according to the present embodiment. In the magnetic sensor 100 shown in FIG. 30, the same reference numerals are given to substantially the same operations as those of the magnetic sensor 100 according to the present embodiment shown in FIG. 29, and the description thereof is omitted.

Further, in the magnetic sensor 100 of the sixth configuration example, the first magnetic detection unit 10a has substantially the same configuration as the first magnetic detection unit 10 of the magnetic sensor 100 of the second configuration example. Thus, given a magnetic field _{B X} in the + X-axis direction of the magnetic sensor 100, the magnetic field _{B X,} after being converged to the first magnetic flux concentrator member 111a and the third magnetic flux concentrator member 113a of the first magnetic detection unit 10a, It is emitted from the fifth magnetic flux concentrator member 115a in the + X-axis direction (details have been described with reference to FIG. 15 and are omitted here). That is, the magnetic field _{B X} is released from the first magnetic detection unit 10a to the second magnetic detection unit 10b.

Then, the magnetic field _{B X} is converged to a tenth magnetic convergence element 115b of the fourth magnetic converging portion 120b in the -X-axis direction of the end of the second magnetic detection unit 10b. A part of the magnetic field converged on the tenth magnetic flux concentrator member 115b includes a ninth magnetic flux concentrator member 114b coupled to the tenth magnetic flux concentrator member 115b and an eighth magnetic flux concentrator member 113b coupled to the ninth magnetic flux concentrator member 114b. Then, it is emitted in the −X axis direction from the eighth magnetic flux concentrator member 113b. The magnetic field emitted from the eighth magnetic focusing member 113b in the −X-axis direction is generated by the fifth magnetic detection unit 210b and the seventh magnetic detection unit 230b between the seventh magnetic focusing member 112b and the eighth magnetic focusing member 113b. It passes through and is captured by the seventh magnetic flux concentrator member 112b.

In addition, a part of the magnetic field converged on the tenth magnetic flux concentrator member 115b is emitted from the tenth magnetic flux concentrator member 115b in the + X-axis direction. The magnetic field emitted from the tenth magnetic focusing member 115b in the + X-axis direction passes through the eighth magnetic detection unit 240b and the sixth magnetic detection unit 220b between the seventh magnetic focusing member 112b and the tenth magnetic focusing member 115b. And captured by the seventh magnetic flux concentrator member 112b. The magnetic field captured by the seventh magnetic focusing member 112b is released through the sixth magnetic focusing member 111b connected to the seventh magnetic focusing member 112b. Thus, the eighth magnetic detection unit 240b from the first magnetic detection unit 210a senses the first direction and the magnetic field parallel which is redirecting according to the magnetic field B _X to be input to the + X-axis direction.

As described above, when the magnetic field _BX is applied in the + X-axis direction, the first magnetic detection unit 210a, the third magnetic detection unit 230a, the fifth magnetic detection unit 210b, and the seventh magnetic detection unit 230b are in the −X-axis direction. Sense the magnetic field. In addition, the second magnetic detection unit 220a, the fourth magnetic detection unit 240a, the sixth magnetic detection unit 220b, and the eighth magnetic detection unit 240b detect a magnetic field in the + X-axis direction.

When the magnetic field _BY is applied in the + Y-axis direction of the magnetic sensor 100, a part of the magnetic field _BY is converged on the second magnetic convergence unit 120a of the first magnetic detection unit 10a, and then the first magnetic convergence unit 110a. The first magnetic flux concentrating member 111a emits in the + Y-axis direction (details have been described with reference to FIG. 15 and are omitted here).

A part of the magnetic field _BY is converged on the eighth magnetic converging member 113b and the tenth magnetic converging member 115b of the fourth magnetic converging part 120b protruding in the −Y axis direction of the second magnetic detection unit 10b. The magnetic field converged on the eighth magnetic focusing member 113b is emitted in the −X-axis direction from the eighth magnetic focusing member 113b. The magnetic field emitted from the eighth magnetic focusing member 113b in the −X-axis direction is generated by the fifth magnetic detection unit 210b and the seventh magnetic detection unit 230b between the seventh magnetic focusing member 112b and the eighth magnetic focusing member 113b. It passes through and is captured by the seventh magnetic flux concentrator member 112b.

Further, the magnetic field focused on the tenth magnetic flux concentrator member 115b is emitted from the tenth magnetic flux concentrator member 115b in the + X-axis direction. The magnetic field emitted in the + X-axis direction from the tenth magnetic focusing member 115b passes through the eighth magnetic detection unit 240b and the sixth magnetic detection unit 220b between the seventh magnetic convergence member 112b and the tenth magnetic detection unit 115b. And captured by the seventh magnetic flux concentrator member 112b. Further, the magnetic field captured by the seventh magnetic focusing member 112b is released through the sixth magnetic focusing member 111b connected to the seventh magnetic focusing member 112b. As described above, the first magnetic detection unit 240a to the eighth magnetic detection unit 240b detect a magnetic field parallel to the first direction, the direction of which is changed according to the magnetic field _BY input in the + Y-axis direction.

As described above, when the magnetic field _BY is applied in the + Y-axis direction, the first magnetic detection unit 210a, the third magnetic detection unit 230a, the sixth magnetic detection unit 220b, and the eighth magnetic detection unit 240b are in the + X-axis direction. Sensing a magnetic field. In addition, the second magnetic detection unit 220a, the fourth magnetic detection unit 240a, the fifth magnetic detection unit 210b, and the seventh magnetic detection unit 230b detect a magnetic field in the −X-axis direction.

If the magnetic sensor 100 + Z-axis direction to the magnetic field B _Z is given (so for the first magnetic detection unit 10a described in FIG. 15 will be omitted here), the part of the magnetic field B _Z, first the + X-axis direction 5 is passed through the magnetic detection unit 210b, converged to the eighth magnetic focusing member 113b, and released. Part of the magnetic field _{B Z,} is converged to a seventh magnetic converging member 112b through the sixth magnetic detection unit 220b in the + X-axis direction, and released. Part of the magnetic field _{B Z,} 7 is converged to the magnetic flux concentrator member 112b through the seventh magnetic detection unit 230b in the -X axis direction and released. Part of the magnetic field _{B Z,} is converged to the 10 magnetic converging member 115b through the eighth magnetic detection unit 240b in the -X axis direction and released. Thus, the eighth magnetic detection unit 240b from the first magnetic detection unit 210a senses the magnetic field parallel to a first direction which is the direction changing in response to the magnetic field B _Z which is input to the + Z-axis direction.

From the above, when the magnetic field _BZ is applied in the + Z-axis direction, the first magnetic detection unit 210a, the second magnetic detection unit 220a, the seventh magnetic detection unit 230b, and the eighth magnetic detection unit 240b are in the −X-axis direction. Sense the magnetic field. The third magnetic detector 230a, the fourth magnetic detector 240a, the fifth magnetic detector 210b, and the sixth magnetic detector 220b detect a magnetic field in the + X-axis direction.

  In the magnetic sensor 100 of the above sixth configuration example, the wiring unit 130 is connected from the first magnetic detection unit 210a to the eighth magnetic detection unit 240b, and the value of the magnetic resistance is output to the outside. For example, the magnetic sensor 100 is connected to the calculation unit 300 or the like by the wiring unit 130 and outputs magnetic field components in the X-axis direction, the Y-axis direction, and the Z-axis direction. Here, the wiring unit 130 and the calculation unit 300 can be configured and operated in the same manner as the configuration examples of FIGS. 23 and 24, and thus description thereof is omitted here. As described above, the magnetic sensor 100 according to the present embodiment can detect three orthogonal magnetic signals on the same substrate.

  FIG. 31 shows a seventh configuration example (plan view seen in the Z-axis direction) of the magnetic sensor 100 according to the present embodiment. In the magnetic sensor 100 shown in FIG. 31, substantially the same operations as those of the magnetic sensor 100 according to the present embodiment shown in FIG. 1 and FIG.

  The magnetic sensor 100 of the seventh configuration example is similar to the magnetic sensor 100 of the second configuration example shown in FIG. 13 on the negative side in the second direction with respect to the fourth magnetic focusing member 114a or the fourth magnetic focusing member 114a. A second magnetic detection unit 10c is further provided so as to be a substantially mirror image of the first magnetic detection unit 10a with respect to a surface substantially orthogonal to the second direction. That is, the first magnetic detection unit 10 described in FIG. 13 is shown as the first magnetic detection unit 10a in FIG. 31, and the second magnetic detection unit 10c is shown to be a mirror image of the first magnetic detection unit 10a. .

  The magnetic sensor 100 of the seventh configuration example includes four magnetic detection units of the first magnetic detection unit 10a formed on the second plane 34, and the second magnetic detection unit 10c corresponding to the four magnetic detection units. Four magnetic detection units, a magnetic convergence member of the first magnetic detection unit 10a formed on the first plane 32, and a magnetic convergence member of the second magnetic detection unit 10c corresponding to the magnetic convergence member are provided.

  The fifth magnetic focusing unit 110c of the second magnetic detection unit 10c corresponding to the first magnetic focusing unit 110a of the first magnetic detection unit 10a includes an eleventh magnetic focusing member 111c and a twelfth magnetic focusing member 112c. In addition, the sixth magnetic focusing unit 120c of the second magnetic detection unit 10c corresponding to the second magnetic focusing unit 120a of the first magnetic detection unit 10a includes the thirteenth magnetic focusing member 113c to the fifteenth magnetic focusing member 115c. The second magnetic detection unit 10b corresponding to the first magnetic detection unit 10a includes the ninth magnetic detection unit 210c to the twelfth magnetic detection unit 240c. The magnetic sensor 100 of the seventh configuration example is an example of a sensor having a plurality of magnetic detection units.

  The first magnetic detection unit 10a is substantially the same arrangement pattern as the first magnetic detection unit 10 described in FIG. The arrangement pattern of the second magnetic detection unit 10c is arranged so as to have a plane-symmetrical positional relationship in the XZ plane perpendicular to the substrate plane including the point Q located equidistant from the first magnetic detection unit 10a. Here, the first magnetic detection unit 10 a and the second magnetic detection unit 10 c are separated from each other by a predetermined distance and are disposed on the first plane 32 and the second plane 34.

  Instead, the first magnetic detection unit 10a and the second magnetic detection unit 10c may be arranged such that the fourth magnetic focusing member 114a and the fourteenth magnetic focusing member 114c are in contact with each other. Further, the first magnetic detection unit 10a and the second magnetic detection unit 10c may be arranged such that the fourth magnetic focusing member 114a and the fourteenth magnetic focusing member 114c overlap. Instead, the first magnetic detection unit 10a and the second magnetic detection unit 10c may not be provided with the fourteenth magnetic focusing member 114c but may be arranged so as to share the fourth magnetic focusing member 114a. In this case, the fourth magnetic flux concentrator member 114a is connected to the + Y-axis direction ends of the thirteenth magnetic flux concentrator member 113c and the fifteenth magnetic flux convergent member 115c.

  The magnetic convergence member and the magnetic detection unit included in the second magnetic detection unit 10c may correspond to the magnetic convergence member and the magnetic detection unit included in the first magnetic detection unit 10a, respectively, and may have substantially the same shape and material. Here, the second magnetic detection unit 10c shown in FIG. 31 is different from the second magnetic detection unit 10c described in FIG. 25 with respect to the first magnetic detection unit 10a, but may be formed in substantially the same shape. .

FIG. 32 shows an example of the magnetic field in the X-axis direction sensed by each of the magnetic detection units when the magnetic sensors B _X , B _Y , and B _Z are respectively given to the magnetic sensor 100 according to the present embodiment. In the magnetic sensor 100 shown in FIG. 32, substantially the same operations as those of the magnetic sensor 100 according to the present embodiment shown in FIG. Further, in the magnetic sensor 100 of the seventh configuration example, the first magnetic detection unit 10a is substantially the same configuration as the first magnetic detection unit 10 of the magnetic sensor 100 of the second configuration example, and thus description thereof is omitted.

If the magnetic field _{B X} is given in the + X-axis direction of the magnetic sensor 100, a portion of the magnetic field _{B X} is converged to the 11 magnetic convergence element 111c of the fifth magnetic convergence 110c projecting in -X direction. The magnetic field converged on the eleventh magnetic flux concentrator member 111c is described in the same manner as the magnetic field converged on the eleventh magnetic flux concentrator member 111c of the second magnetic detection unit 10c described with reference to FIG.

That is, + if the magnetic field _{B X} is given in the X-axis direction, the first magnetic detection portion 210a, a third magnetic detection unit 230a, the ninth magnetic detection unit 210c, and the 11 magnetic detection unit 230c is the -X-axis direction Sensing a magnetic field. In addition, the second magnetic detection unit 220a, the fourth magnetic detection unit 240a, the tenth magnetic detection unit 220c, and the twelfth magnetic detection unit 240c detect a magnetic field in the + X-axis direction.

When the magnetic field _BY is applied in the + Y-axis direction of the magnetic sensor 100, the magnetic field _BY is converged on the twelfth magnetic converging member 112c of the fifth magnetic converging unit 110c protruding in the -Y-axis direction. The magnetic field converged on the twelfth magnetic focusing member 112c is described in the same manner as the magnetic field converged on the twelfth magnetic focusing member 112c of the second magnetic detection unit 10c described in FIG. 26, and passes through the fourteenth magnetic focusing member 114c. (Detailed explanation is omitted). The magnetic field emitted from the fourteenth magnetic focusing member 114c is input to the first magnetic detection unit 10a and is the same as the magnetic sensor 100 of the second configuration example shown in FIG.

That, + Y-axis direction when the magnetic field _{B Y} is given, the first magnetic detection portion 210a, a third magnetic detection unit 230a, the 10 magnetic detection unit 220c, and a 12 magnetic detection unit 240c is, + X-axis direction of the magnetic field Sense. The second magnetic detection unit 220a, the fourth magnetic detection unit 240a, the ninth magnetic detection unit 210c, and the eleventh magnetic detection unit 230c detect a magnetic field in the −X-axis direction.

Description of the case where the magnetic field B _Z is given in the + Z-axis direction of the magnetic sensor 100 is similar to the case where the magnetic field B _Z is given in the + Z-axis direction of the magnetic sensor 100 described in FIG. 26, the description here Omitted. That, + Z-axis direction when the magnetic field _{B Z} is given, the first magnetic detection unit 210a, the second magnetic detection unit 220a, the ninth magnetic detection unit 210c, and a tenth magnetic detection unit 220c is the -X-axis direction Sensing a magnetic field. The third magnetic detector 230a, the fourth magnetic detector 240a, the eleventh magnetic detector 230c, and the twelfth magnetic detector 240c detect a magnetic field in the + X-axis direction.

  In the magnetic sensor 100 of the seventh configuration example described above, the wiring unit 130 is connected to the first magnetic detection unit 210a to the fourth magnetic detection unit 240a, and the ninth to twelfth magnetic detection unit 240c, and the magnetic resistance value is set. Output to the outside. For example, the magnetic sensor 100 is connected to the calculation unit 300 or the like by the wiring unit 130 and outputs magnetic field components in the X-axis direction, the Y-axis direction, and the Z-axis direction. Here, the wiring unit 130 and the calculation unit 300 can be configured and operated in the same manner as the configuration examples of FIGS. 27 and 28, and thus description thereof is omitted here. As described above, the magnetic sensor 100 according to the present embodiment can detect three orthogonal magnetic signals on the same substrate.

  FIG. 33 shows an eighth configuration example of the magnetic sensor 100 according to the present embodiment. In the magnetic sensor 100 shown in FIG. 33, substantially the same operations as those of the magnetic sensor 100 according to the present embodiment shown in FIG. 13 and FIG.

  The magnetic sensor 100 of the eighth configuration example includes a first magnetic detection unit 10a, a substantially mirror image, and a surface substantially orthogonal to the first direction at the negative end of the first magnetic converging member 111 in the first direction. The 2nd magnetic detection unit 10b arrange | positioned so that it may become. In addition, the magnetic sensor 100 has a surface that is substantially orthogonal to the second direction in each magnetic converging member to which the first magnetic detecting unit 10a and the second magnetic detecting unit 10b are connected, or a second direction than these magnetic converging members. The third magnetic detection unit 10c, the second magnetic detection unit 10b, and the substantially mirror image are arranged so as to be substantially mirror images of the first magnetic detection unit 10a with respect to a surface that is substantially orthogonal to the second direction on the positive side. And a fourth magnetic detection unit 10d arranged so as to be.

  That is, the magnetic sensor 100 of the eighth configuration example is more positive in the second direction than the first magnetic focusing member 111 or the first magnetic focusing member 111 in the magnetic sensor 100 of the fourth configuration example shown in FIG. The third magnetic detection unit 10c and the fourth magnetic detection unit are arranged so as to be substantially mirror images of the first magnetic detection unit 10a and the second magnetic detection unit 10b with respect to a surface substantially orthogonal to the second direction on the side. 10d. That is, in FIG. 33, in addition to the first magnetic detection unit 10a and the second magnetic detection unit 10b described in FIG. 21, the third magnetic detection unit 10a and the second magnetic detection unit 10b are mirror images of each other. The detection unit 10c and the 4th magnetic detection unit 10d are shown. In addition, description is abbreviate | omitted about arrangement | positioning of the 1st magnetic detection unit 10a and the 2nd magnetic detection unit 10b.

  The magnetic sensor 100 of the eighth configuration example corresponds to the eight magnetic detection units of the first magnetic detection unit 10a and the second magnetic detection unit 10b formed on the second plane 34, and the eight magnetic detection units. The eight magnetic detection units of the third magnetic detection unit 10c and the fourth magnetic detection unit 10d, the magnetic convergence members of the first magnetic detection unit 10a and the second magnetic detection unit 10b formed on the first plane 32, and A magnetic converging member of a third magnetic detecting unit 10c and a fourth magnetic detecting unit 10d corresponding to the magnetic converging member.

  In FIG. 33, the fifth magnetic flux concentrator 110c is formed as a common magnetic concentrator with no boundaries in the third magnetic detector unit 10c and the fourth magnetic detector unit 10d, like the first magnetic concentrator 110a. An example is shown. That is, the fifth magnetic flux concentrator 110c is disposed on the common eleventh magnetic flux concentrator member 111c, the twelfth magnetic flux concentrator member 112c disposed on the third magnetic sensing unit 10c side, and the fourth magnetic sensing unit 10d side. And a seventeenth magnetic flux concentrator member 112d.

  Further, the sixth magnetic converging part 120c of the third magnetic detecting unit 10c corresponding to the second magnetic converging part 120a of the first magnetic detecting unit 10a includes the thirteenth magnetic converging member 113c to the fifteenth magnetic converging member 115c. Further, the eighth magnetic converging unit 120d of the fourth magnetic detecting unit 10d corresponding to the fourth magnetic converging unit 120b of the second magnetic detecting unit 10b includes the eighteenth magnetic converging member 113d to the twentieth magnetic converging member 115d. The third magnetic detection unit 10c includes the ninth magnetic detection unit 210c to the twelfth magnetic detection unit 240c, and the fourth magnetic detection unit 10d includes the thirteenth magnetic detection unit 210d to the sixteenth magnetic detection unit 240d. . The magnetic sensor 100 of the eighth configuration example is an example of a sensor having a plurality of magnetic detection units.

  The arrangement pattern of the third magnetic detection unit 10c and the fourth magnetic detection unit 10d is in a positional relationship that is plane-symmetric with the first magnetic detection unit 10a and the second magnetic detection unit 10b in the XZ plane perpendicular to the substrate plane including the point Q. It arrange | positions so that it may become. Here, the magnetic detection unit formed by the first magnetic detection unit 10a and the second magnetic detection unit 10b and the magnetic detection unit formed by the third magnetic detection unit 10c and the fourth magnetic detection unit 10d are determined in advance. They are spaced apart by a specified distance.

  Instead, the magnetic detection unit formed by the first magnetic detection unit 10a and the second magnetic detection unit 10b and the magnetic detection unit formed by the third magnetic detection unit 10c and the fourth magnetic detection unit 10d are: You may arrange | position so that it may connect. That is, the end on the + Y axis direction side of the first magnetic flux concentrator member 111a may be disposed so as to contact the end on the −Y axis direction side of the eleventh magnetic flux concentrator member 111c. Further, the first magnetic detection unit 10a to the fourth magnetic detection unit 10d may not share the first magnetic convergence member 111a without having the eleventh magnetic convergence member 111c. In this case, the first magnetic flux concentrator member 111a is connected to the −Y-axis direction ends of the twelfth magnetic flux concentrator member 112c and the seventeenth magnetic flux convergent member 112d.

  The magnetic convergence member and the magnetic detection unit included in the third magnetic detection unit 10c and the fourth magnetic detection unit 10d correspond to the magnetic convergence member and the magnetic detection unit included in the first magnetic detection unit 10a and the second magnetic detection unit 10b, respectively. The shape and material may be formed substantially the same.

FIG. 34 shows an example of a magnetic field in the X-axis direction sensed by each of the magnetic detection units when the magnetic sensors B _X , B _Y , and B _Z are respectively given to the magnetic sensor 100 according to the present embodiment. In the magnetic sensor 100 shown in FIG. 34, substantially the same operations as those of the magnetic sensor 100 according to the present embodiment shown in FIG.

If the magnetic field _{B X} is given in the + X-axis direction of the magnetic sensor 100, a portion of the magnetic field _{B X,} is converged to the second magnetic detection unit 10b, it is discharged from the first magnetic detection unit 10a. The magnetic field B _X applied to the first magnetic detection unit 10a and the second magnetic detection unit 10b, so as described in FIG. 22, omitted here.

Part of the magnetic field _{B X,} is converged to the fourth magnetic detection units 10d, it is discharged from the third magnetic detection unit 10c. More specifically, the magnetic field _{B X} is converged to the 20 magnetic convergence element 115d of the eighth magnetic convergence 120d on the end of the -X-axis direction.

  A part of the magnetic field converged on the twentieth magnetic flux concentrator member 115d includes a nineteenth magnetic flux concentrator member 114d coupled to the twentieth magnetic flux concentrator member 115d and an eighteenth magnetic flux concentrator member 113d coupled to the nineteenth magnetic flux concentrator member 114d. Then, it is emitted in the −X-axis direction from the eighteenth magnetic flux concentrator member 113d. The magnetic field emitted from the eighteenth magnetic flux concentrator member 113d in the −X-axis direction passes through the thirteenth magnetic flux detection member 210d and the fifteenth magnetic flux detection member 230d between the seventeenth magnetic flux convergence member 112d and the eighteenth magnetic flux convergence member 113d. It is captured by the 17th magnetic flux concentrator member 112d.

  In addition, a part of the magnetic field converged on the twentieth magnetic flux concentrator member 115d is released from the twentieth magnetic flux concentrator member 115d in the + X axis direction. The magnetic field emitted in the + X-axis direction from the twentieth magnetic focusing member 115d passes through the sixteenth magnetic detection unit 240d and the fourteenth magnetic detection unit 220d between the seventeenth magnetic focusing member 112d and the twentieth magnetic focusing member 115d. And captured by the seventeenth magnetic flux concentrator member 112d.

  The magnetic field captured by the seventeenth magnetic focusing member 112d passes through the eleventh magnetic focusing member 111c connected to the seventeenth magnetic focusing member 112d and the twelfth magnetic focusing member 112c connected to the eleventh magnetic focusing member 111c. It is emitted from the twelfth magnetic flux concentrator member 112c in the −X axis direction and the + X axis direction. The magnetic field emitted from the twelfth magnetic flux concentrator member 112c in the −X-axis direction is generated by the eleventh magnetic detector 230c and the ninth magnetic detector 210c between the twelfth magnetic concentrator member 112c and the thirteenth magnetic concentrator member 113c. It passes through and is captured by the thirteenth magnetic flux concentrator member 113c. Further, the magnetic field captured by the thirteenth magnetic focusing member 113c is released through the fourteenth magnetic focusing member 114c connected to the thirteenth magnetic focusing member 113c.

The magnetic field emitted from the twelfth magnetic flux concentrator member 112c in the + X-axis direction is the tenth magnetic detector 220c and the twelfth magnetic detector 240c between the twelfth magnetic concentrator member 112c and the fifteenth magnetic concentrator member 115c. Passed through and captured by the fifteenth magnetic focusing member 115c and released. Thus, the 16 magnetic detection unit 240d from the first magnetic detection unit 210a senses the first direction and the magnetic field parallel which is redirecting according to the magnetic field B _X to be input to the + X-axis direction.

As described above, when the magnetic field _BX is applied in the + X axis direction, the first magnetic detection unit 210a, the third magnetic detection unit 230a, the fifth magnetic detection unit 210b, the seventh magnetic detection unit 230b, and the ninth magnetic detection unit 210c. The eleventh magnetic detection unit 230c, the thirteenth magnetic detection unit 210d, and the fifteenth magnetic detection unit 230d detect a magnetic field in the −X-axis direction. In addition, the second magnetic detector 220a, the fourth magnetic detector 240a, the sixth magnetic detector 220b, the eighth magnetic detector 240b, the tenth magnetic detector 220c, the twelfth magnetic detector 240c, and the fourteenth magnetic detector 220d. The sixteenth magnetic detector 240d detects a magnetic field in the + X-axis direction.

When the magnetic field _BY is applied in the + Y-axis direction of the magnetic sensor 100, the magnetic field _BY is converged on the first magnetic detection unit 10a and the second magnetic detection unit 10b and emitted from the first magnetic convergence member 111a. The magnetic field _{BY applied} to the first magnetic detection unit 10a and the second magnetic detection unit 10b has been described with reference to FIG.

A part of the magnetic field _BY emitted from the first magnetic convergence member 111a is converged on the twelfth magnetic convergence member 112c of the fifth magnetic convergence portion 120c protruding in the −Y axis direction. The magnetic field converged on the twelfth magnetic focusing member 112c is emitted from the twelfth magnetic focusing member 112c in the −X axis direction and the + X axis direction.

  The magnetic field emitted from the twelfth magnetic flux concentrator member 112c in the −X-axis direction is generated by the eleventh magnetic detector 230c and the ninth magnetic detector 210c between the twelfth magnetic concentrator member 112c and the thirteenth magnetic concentrator member 113c. It passes through and is captured by the thirteenth magnetic flux concentrator member 113c. Further, the magnetic field captured by the thirteenth magnetic focusing member 113c is released through the fourteenth magnetic focusing member 114c connected to the thirteenth magnetic focusing member 113c.

  The magnetic field emitted from the twelfth magnetic flux concentrator member 112c in the + X-axis direction is the tenth magnetic detector 220c and the twelfth magnetic detector 240c between the twelfth magnetic concentrator member 112c and the fifteenth magnetic concentrator member 115c. And is captured by the fifteenth magnetic flux concentrator member 115c. Further, the magnetic field captured by the fifteenth magnetic focusing member 115c is released through the fourteenth magnetic focusing member 114c connected to the fifteenth magnetic focusing member 115c.

Similarly, a part of the magnetic field _BY emitted from the first magnetic flux concentrator member 111a is converged on the seventeenth magnetic flux concentrator member 112d protruding in the −Y axis direction. The magnetic field converged on the seventeenth magnetic focusing member 112d is emitted from the seventeenth magnetic focusing member 112d in the −X axis direction and the + X axis direction.

  The magnetic field emitted from the seventeenth magnetic flux concentrator member 112d in the −X-axis direction passes through the fourteenth magnetic detector 220d and the sixteenth magnetic detector 240d between the seventeenth magnetic concentrator member 112d and the twentieth magnetic concentrator member 115d. It is captured by the 20th magnetic flux concentrator member 115d. Furthermore, the magnetic field captured by the twentieth magnetic focusing member 115d is released through the nineteenth magnetic focusing member 114d connected to the twentieth magnetic focusing member 115d.

Further, the magnetic field emitted from the seventeenth magnetic flux concentrator member 112d in the + X-axis direction is the fifteenth magnetic detector 230d and the thirteenth magnetic detector 210d between the seventeenth magnetic concentrator member 112d and the eighteenth magnetic concentrator member 113d. And is captured by the eighteenth magnetic flux concentrator member 113d. Further, the magnetic field captured by the eighteenth magnetic focusing member 113d is released through the nineteenth magnetic focusing member 114d connected to the eighteenth magnetic focusing member 113d. As described above, the first magnetic detection unit 210a to the sixteenth magnetic detection unit 240d detect a magnetic field parallel to the first direction, the direction of which is changed according to the magnetic field _BY input in the + Y-axis direction.

As described above, when the magnetic field _BY is applied in the + Y-axis direction, the first magnetic detector 210a, the third magnetic detector 230a, the sixth magnetic detector 220b, the eighth magnetic detector 240b, and the tenth magnetic detector 220c. The twelfth magnetic detection unit 240c, the thirteenth magnetic detection unit 210d, and the fifteenth magnetic detection unit 230d detect a magnetic field in the + X-axis direction. In addition, the second magnetic detector 220a, the fourth magnetic detector 240a, the fifth magnetic detector 210b, the seventh magnetic detector 230b, the ninth magnetic detector 210c, the eleventh magnetic detector 230c, and the fourteenth magnetic detector 220d. The sixteenth magnetic detection unit 240d detects a magnetic field in the −X axis direction.

Since the example in which a part of the magnetic field _BZ is applied to the first and second magnetic detection units 10b when the magnetic field _BZ is applied in the + Z-axis direction of the magnetic sensor 100 has been described with reference to FIG. Omitted.

Some of the magnetic field _{B Z} is 13 is converged to the magnetic flux concentrator member 113c through the ninth magnetic detection unit 210c in the -X axis direction and released. Some of the magnetic field _{B Z} is converged to the 12 magnetic convergence element 112c through the tenth magnetic detection unit 220c in the -X axis direction and released. Some of the magnetic field _{B Z} is converged to the 12 magnetic convergence element 112c through the eleventh magnetic detection unit 230c in the + X-axis direction, and released. Some of the magnetic field _{B Z} is converged to the 15 magnetic convergence element 115c through the twelfth magnetic detection unit 240c in the + X-axis direction, and released.

Part of the magnetic field _{B Z,} is converged to the 18 magnetic convergence element 113d through the second 13 magnetic detection unit 210d in the + X-axis direction, and released. Some of the magnetic field _{B Z} is converged to the 17 magnetic convergence element 112d through the second 14 magnetic detection unit 220d in the + X-axis direction, and released. Some of the magnetic field _{B Z} is 17 is converged to the magnetic flux concentrator member 112d through the first 15 magnetic detection unit 230d in the -X axis direction and released. Some of the magnetic field _{B Z} is converged to the 20 magnetic convergence element 115d through the second 16 magnetic detection unit 240d in the -X axis direction and released. Thus, the 16 magnetic detection unit 240d from the first magnetic detection unit 210a senses the magnetic field parallel to a first direction which is the direction changing in response to the magnetic field B _Z which is input to the + Z-axis direction.

As described above, when the magnetic field _BZ is applied in the + Z-axis direction, the first magnetic detector 210a, the second magnetic detector 220a, the seventh magnetic detector 230b, the eighth magnetic detector 240b, and the ninth magnetic detector 210c. The tenth magnetic detection unit 220c, the fifteenth magnetic detection unit 230d, and the sixteenth magnetic detection unit 240d detect a magnetic field in the −X-axis direction. The third magnetic detector 230a, the fourth magnetic detector 240a, the fifth magnetic detector 210b, the sixth magnetic detector 220b, the eleventh magnetic detector 230c, the twelfth magnetic detector 240c, and the thirteenth magnetic detector 210d. And the fourteenth magnetic detection unit 220d detects a magnetic field in the + X-axis direction.

As described above, the first magnetic detection unit 210a to the sixteenth magnetic detection unit 240d have two magnetic detection units in which the directions of the magnetic fields for detecting the three-axis components are substantially the same, and the directions of the magnetic fields of the three-axis components are different. It can be seen that there are eight groups of magnetic detection units. For example, the first magnetic detection unit 210a and the fifteenth magnetic detection unit 230d are magnetic fields in the −X axis direction, the + X axis direction, and the −X axis direction with respect to the three-axis component magnetic fields B _X , B _Y , and B _Z , respectively. Sense.

  Similarly, the second magnetic detection unit 220a and the sixteenth magnetic detection unit 240d, the third magnetic detection unit 230a and the thirteenth magnetic detection unit 210d, the fourth magnetic detection unit 240a and the fourteenth magnetic detection unit 220d each have a three-axis component. The direction of the magnetic field to be sensed is substantially the same with respect to the input of the magnetic field. In addition, the fifth magnetic detection unit 210b and the eleventh magnetic detection unit 230c, the sixth magnetic detection unit 220b and the twelfth magnetic detection unit 240c, the seventh magnetic detection unit 230b, the ninth magnetic detection unit 210c, and the eighth magnetic detection unit 240b. The tenth magnetic detection unit 220c has substantially the same direction of the detected magnetic field with respect to the input of the magnetic field of the three-axis component.

  FIG. 35 shows an example in which the wiring unit 130 is connected to the magnetic sensor 100 according to the present embodiment. In the magnetic sensor 100 shown in FIG. 35, substantially the same operations as those of the magnetic sensor 100 according to the present embodiment shown in FIGS. 23, 33, and 34 are denoted by the same reference numerals, and description thereof is omitted.

  The wiring unit 130 connects, in series, two magnetic detection units in which the directions of the detected magnetic fields are substantially the same with respect to the input of the magnetic field of the three-axis component. That is, for example, one end of the first magnetic detection unit 210a is connected to the other end of the fifteenth magnetic detection unit 230d. As described above, the wiring unit 130 is connected to one end of the first magnetic detection unit 210a to the eighth magnetic detection unit 240b, and the corresponding magnetic detection unit among the ninth magnetic detection unit 210c to the sixteenth magnetic detection unit 240d. Connect to the other end.

  Further, the wiring unit 130 connects one end of each of the ninth magnetic detection unit 210c to the sixteenth magnetic detection unit 240d to the terminal S. Also, the wiring section 130 is electrically connected to the other ends of the first magnetic detection section 210a to the eighth magnetic detection section 240b and the terminals A to H in a one-to-one correspondence as shown in FIG. Connect to. The terminals A to H and the terminal S may be formed of substantially the same material on substantially the same plane.

Here, if the magnetic resistance of the first magnetic detection portion 210a sixteenth magnetic detection unit 240d to the _{R 1} and _{R 16,} each of the magnetic resistance is as follows.
(Formula 56)
R ₁ = R ₁₅ = R ₀ −ΔR _X + ΔR _Y −ΔR _Z
(Equation 57)
R ₂ = R ₁₆ = R ₀ + ΔR _X −ΔR _Y −ΔR _Z
(Formula 58)
R ₃ = R ₁₃ = R ₀ −ΔR _X + ΔR _Y + ΔR _Z
(Equation 59)
R ₄ = R ₁₄ = R ₀ + ΔR _X −ΔR _Y + ΔR _Z
(Equation 60)
R ₅ = R ₁₁ = R ₀ −ΔR _X −ΔR _Y + ΔR _Z
(Equation 61)
R ₆ = R ₁₂ = R ₀ + ΔR _X + ΔR _Y + ΔR _Z
(Equation 62)
R ₇ = R ₉ = R ₀ −ΔR _X −ΔR _Y −ΔR _Z
(Equation 63)
R ₈ = R ₁₀ = R ₀ + ΔR _X + ΔR _Y −ΔR _Z

If the magnetoresistance between the terminals A-S and H-S is R _A to R _H , each magnetoresistance can be calculated as follows:
(Equation 64)
R _A = R ₁ + R ₁₅ = 2 (R ₀ −ΔR _X + ΔR _Y −ΔR _Z )
(Equation 65)
R _B = R ₂ + R ₁₆ = 2 (R ₀ + ΔR _X −ΔR _Y −ΔR _Z )
(Equation 66)
R _C = R ₃ + R ₁₃ = 2 (R ₀ −ΔR _X + ΔR _Y + ΔR _Z )
(Equation 67)
R _D = R ₄ + R ₁₄ = 2 (R ₀ + ΔR _X −ΔR _Y + ΔR _Z )
(Equation 68)
R _E = R ₅ + R ₁₁ = 2 (R ₀ −ΔR _X −ΔR _Y + ΔR _Z )
(Equation 69)
R _F = R ₆ + R ₁₂ = 2 (R ₀ + ΔR _X + ΔR _Y + ΔR _Z )
(Equation 70)
R _G = R ₇ + R ₉ = 2 (R ₀ −ΔR _X −ΔR _Y −ΔR _Z )
(Equation 71)
R _H = R ₈ + R ₁₀ = 2 (R ₀ + ΔR _X + ΔR _Y −ΔR _Z )

Each of the magnetic resistances of the equations (64) to (71) includes resistance change amounts ΔR _X , ΔR _Y , and ΔR _Z corresponding to the magnetic field of the three-axis component. The signs of ΔR _X , ΔR _Y , and ΔR _Z correspond to the direction of the magnetic field in the X-axis direction across the first magnetic detection unit 210a to the sixteenth magnetic detection unit 240d, as shown in FIG.

From the formulas (66)-(65), (64)-(67), (70)-(69), and (68)-(71), the following formula is obtained. .
(Formula 72)
_{S CB = R C -R B =} 4 (-ΔR X + ΔR Y + ΔR Z)
(Equation 73)
S _AD = R _A −R _D = 4 (−ΔR _X + ΔR _Y −ΔR _Z )
(Equation 74)
_{S GF = R G -R F =} 4 (-ΔR X -ΔR Y -ΔR Z)
(Equation 75)
S _EH = R _E -R _H = 4 (-ΔR _X -ΔR _Y + ΔR _Z )

Furthermore, − (Equation 72) − (Equation 73) − (Equation 74) − (Equation 75), (Equation 72) + (Equation 73) − (Equation 74) − (Equation 75), and (Equation 72). The following formula is obtained from the formula-(Formula 73)-(Formula 74) + (Formula 75).
(Equation 76)
_{16ΔR X = -S CB -S AD -S} GF -S EH
(Equation 77)
16ΔR _Y = S _CB + S _AD −S _GF −S _EH
(Formula 78)
16ΔR _Z = S _CB −S _AD −S _GF + S _EH

  In this way, the magnetic sensor 100 can acquire magnetic signals having three orthogonal axis components. That is, by solving the simultaneous equations relating to each magnetic resistance, each of the resistance change amounts corresponding to the magnetic field of the three-axis component can be obtained. The expansion of the simultaneous equations described here is an example, and is not limited to this.

  As shown in FIG. 35, the magnetic sensor 100 of this embodiment demonstrated the example which connects two corresponding magnetic detection parts among the 1st magnetic detection parts 210a to the 16th magnetic detection part 240d in series. Instead of this, the magnetic sensor 100 may connect two corresponding magnetic detection units in parallel. Instead, the magnetic sensor 100 may include 16 terminals and output the magnetic resistances of the first magnetic detection unit 210a to the 16th magnetic detection unit 240d, respectively.

  The magnetic sensor 100 of the eighth configuration example is connected to the calculation unit 300 and the like by the wiring unit 130, and outputs magnetic field components in the X-axis direction, the Y-axis direction, and the Z-axis direction. The calculation unit 300 calculates a magnetic field component in the first direction and a magnetic field component in the second direction based on the outputs of the magnetic detection units in the first magnetic detection unit 10a to the fourth magnetic detection unit 10d. The calculation unit 300 further calculates a magnetic field component in a third direction different from the first direction and the second direction based on the outputs of the magnetic detection units in the first magnetic detection unit 10a to the fourth magnetic detection unit 10d. .

  The calculation unit 300 may calculate each magnetic field component by linearly combining the outputs of the magnetic detection units. Here, the wiring unit 130 and the calculation unit 300 can be configured and operated in the same manner as the configuration examples of FIGS. 23 and 24, and thus description thereof is omitted here. As described above, the magnetic sensor 100 according to the present embodiment can detect three orthogonal magnetic signals on the same substrate.

  FIG. 36 shows a ninth configuration example of the magnetic sensor 100 according to the present embodiment. In the magnetic sensor 100 shown in FIG. 36, substantially the same operations as those of the magnetic sensor 100 according to the present embodiment shown in FIGS. 13 and 25 are denoted by the same reference numerals, and description thereof is omitted.

  The magnetic sensor 100 of the ninth configuration example includes the first magnetic detection unit 111 or the first magnetic detection unit with respect to a surface substantially orthogonal to the second direction on the positive side in the second direction with respect to the first magnetic convergence member 111. The second magnetic detection unit 10c is arranged so as to be a substantially mirror image of 10a. Further, the magnetic sensor 100 is substantially mirror image of the first magnetic detection unit 10a with respect to a surface that is substantially orthogonal to the first direction on the positive side of the first direction with respect to the first magnetic detection unit 10a and the second magnetic detection unit 10c. And a third magnetic detection unit 10b arranged so as to become a fourth magnetic detection unit 10d arranged so as to be substantially a mirror image with the second magnetic detection unit 10c.

  That is, the magnetic sensor 100 of the ninth configuration example is more positive in the first direction than the first magnetic detection unit 10a and the second magnetic detection unit 10c in the magnetic sensor 100 of the fifth configuration example shown in FIG. The third magnetic detection unit 10b and the fourth magnetic detection unit are arranged so as to be substantially mirror images of the first magnetic detection unit 10a and the second magnetic detection unit 10c with respect to a surface substantially orthogonal to the first direction on the side. 10d. That is, in FIG. 36, in addition to the first magnetic detection unit 10a and the second magnetic detection unit 10c described in FIG. 25, the third magnetic detection unit 10a and the second magnetic detection unit 10c are mirror images of the third magnetic detection unit 10c. The detection unit 10b and the 4th magnetic detection unit 10d are shown.

  In other words, the magnetic sensor 100 of the ninth configuration example is more similar to the magnetic sensor 100 of the sixth configuration example shown in FIG. 29 than the first magnetic detection unit 10a and the second magnetic detection unit 10b. The third magnetic detection unit 10c is arranged so as to be a substantially mirror image of the first magnetic detection unit 10a and the second magnetic detection unit 10b with respect to a plane substantially orthogonal to the second direction on the positive side of the second direction. And a fourth magnetic detection unit 10d. That is, in FIG. 36, the second magnetic detection unit 10b described in FIG. 29 is changed to the third magnetic detection unit 10b, and in addition to this, the first magnetic detection unit 10a and the third magnetic detection unit 10b are mirror images. The second magnetic detection unit 10c and the fourth magnetic detection unit 10d are shown.

  The magnetic sensor 100 of the ninth configuration example corresponds to the eight magnetic detection units of the first magnetic detection unit 10a and the second magnetic detection unit 10c formed on the second plane 34, and the eight magnetic detection units. The eight magnetic detection units of the third magnetic detection unit 10b and the fourth magnetic detection unit 10d, the magnetic convergence members of the first magnetic detection unit 10a and the second magnetic detection unit 10c formed on the first plane 32, and A magnetic convergence member of a third magnetic detection unit 10b and a fourth magnetic detection unit 10d corresponding to the magnetic convergence member.

  Further, the fourth magnetic converging part 120b of the third magnetic detecting unit 10b corresponding to the second magnetic converging part 120a of the first magnetic detecting unit 10a includes the eighth magnetic converging member 113b to the tenth magnetic converging member 115b. Further, the eighth magnetic converging part 120d of the fourth magnetic detecting unit 10d corresponding to the sixth magnetic converging part 120c of the second magnetic detecting unit 10c has the eighteenth magnetic converging member 113d to the twentieth magnetic converging member 115d. The third magnetic detection unit 10b includes the fifth magnetic detection unit 210b to the eighth magnetic detection unit 240b, and the fourth magnetic detection unit 10d includes the thirteenth magnetic detection unit 210d to the sixteenth magnetic detection unit 240d. . The magnetic sensor 100 of the ninth configuration example is an example of a sensor having a plurality of magnetic detection units.

  The arrangement pattern of the third magnetic detection unit 10b and the fourth magnetic detection unit 10d is a positional relationship that is plane-symmetric with the first magnetic detection unit 10a and the second magnetic detection unit 10c in the YZ plane perpendicular to the substrate plane including the point Q. It arrange | positions so that it may become. Here, the magnetic detection unit formed by the first magnetic detection unit 10a and the second magnetic detection unit 10c and the magnetic detection unit formed by the third magnetic detection unit 10b and the fourth magnetic detection unit 10d are determined in advance. They are spaced apart by a specified distance.

  Instead, the first magnetic detection unit 10a and the second magnetic detection unit 10c may be arranged to be connected. That is, the end on the + Y axis direction side of the first magnetic flux concentrator member 111a may be disposed so as to contact the end on the −Y axis direction side of the eleventh magnetic flux concentrator member 111c. In this case, the + Y-axis direction side end of the sixth magnetic flux concentrator member 111b is disposed so as to contact the −Y-axis direction side end of the 16th magnetic flux concentrator member 111d, and the third magnetic detection unit 10b and the fourth magnetic detection unit are arranged. The unit 10d is also arranged to be connected. Further, the first magnetic detection unit 10a to the fourth magnetic detection unit 10d do not have the eleventh magnetic convergence member 111c and the sixteenth magnetic convergence member 111d, and share the first magnetic convergence member 111a and the sixth magnetic convergence member 111b. May be.

  The magnetic convergence member and the magnetic detection unit included in the third magnetic detection unit 10b and the fourth magnetic detection unit 10d correspond to the magnetic convergence member and the magnetic detection unit included in the first magnetic detection unit 10a and the second magnetic detection unit 10c, respectively. The shape and material may be formed substantially the same.

FIG. 37 shows an example of the magnetic field in the X-axis direction sensed by each of the magnetic detectors when the magnetic fields B _X , B _Y , and B _Z are respectively applied to the magnetic sensor 100 according to the present embodiment. In the magnetic sensor 100 shown in FIG. 37, substantially the same operation as that of the magnetic sensor 100 according to the present embodiment shown in FIGS. 26, 30, and 36 is denoted by the same reference numeral, and description thereof is omitted.

  The first magnetic detection unit 10a and the second magnetic detection unit 10c shown in FIG. 37 have been described with reference to FIG. Also, the third magnetic detection unit 10b shown in FIG. 37 is the same as the second magnetic detection unit 10b described in FIG.

If the + X-axis direction to the magnetic field _{B X} of the magnetic sensor 100 is given, a part of the magnetic field _{B X,} is converged to the 11 magnetic convergence element 111c of the second magnetic detection unit 10c, emitted from the 15 magnetic flux concentrator member 115c Is done. A part of the magnetic field _{B X} emitted is focused to a 20 magnetic convergence element 115d of the eighth magnetic convergence 120d in the -X-axis direction of the end of the fourth magnetic detection units 10d.

  A part of the magnetic field converged on the twentieth magnetic flux concentrator member 115d includes a nineteenth magnetic flux concentrator member 114d coupled to the twentieth magnetic flux concentrator member 115d and an eighteenth magnetic flux concentrator member 113d coupled to the nineteenth magnetic flux concentrator member 114d. Then, it is emitted in the −X-axis direction from the eighteenth magnetic flux concentrator member 113d. The magnetic field emitted from the eighteenth magnetic flux concentrator member 113d in the −X-axis direction passes through the thirteenth magnetic flux detection member 210d and the fifteenth magnetic flux detection member 230d between the seventeenth magnetic flux convergence member 112d and the eighteenth magnetic flux convergence member 113d. It is captured by the 17th magnetic flux concentrator member 112d.

A part of the magnetic field converged on the twentieth magnetic flux concentrator member 115d is emitted from the twentieth magnetic flux concentrator member 115d in the + X-axis direction. The magnetic field emitted in the + X-axis direction from the twentieth magnetic focusing member 115d passes through the sixteenth magnetic detection unit 240d and the fourteenth magnetic detection unit 220d between the seventeenth magnetic focusing member 112d and the twentieth magnetic focusing member 115d. And captured by the seventeenth magnetic flux concentrator member 112d. The magnetic field captured by the seventeenth magnetic focusing member 112d is emitted through the sixteenth magnetic focusing member 111d connected to the seventeenth magnetic focusing member 112d. Thus, the 16 magnetic detection unit 240d from the first magnetic detection unit 210a senses the magnetic field parallel to a first direction which is the direction changing in response to the magnetic field B _X to be input to the + X-axis direction.

As described above, when the magnetic field _BX is applied in the + X axis direction, the first magnetic detection unit 210a, the third magnetic detection unit 230a, the fifth magnetic detection unit 210b, the seventh magnetic detection unit 230b, and the ninth magnetic detection unit 210c. The eleventh magnetic detection unit 230c, the thirteenth magnetic detection unit 210d, and the fifteenth magnetic detection unit 230d detect a magnetic field in the −X-axis direction. In addition, the second magnetic detector 220a, the fourth magnetic detector 240a, the sixth magnetic detector 220b, the eighth magnetic detector 240b, the tenth magnetic detector 220c, the twelfth magnetic detector 240c, and the fourteenth magnetic detector 220d. The sixteenth magnetic detector 240d detects a magnetic field in the + X-axis direction.

When the magnetic field _BY is applied in the + Y-axis direction of the magnetic sensor 100, a part of the magnetic field _BY is converged on the eighth magnetic convergence member 113b and the tenth magnetic convergence member 115b of the third magnetic detection unit 10b. , And is emitted from the sixth magnetic flux concentrator member 111b in the + Y-axis direction. The magnetic field _BY emitted in the + Y-axis direction from the sixth magnetic focusing member 111b converges on the seventeenth magnetic focusing member 112d of the seventh magnetic focusing unit 110d protruding in the −Y-axis direction of the fourth magnetic detection unit 10d. Is done. The magnetic field converged on the seventeenth magnetic focusing member 112d is emitted from the seventeenth magnetic focusing member 112d in the −X axis direction and the + X axis direction.

  The magnetic field emitted from the seventeenth magnetic flux concentrator member 112d in the −X-axis direction passes through the fourteenth magnetic detector 220d and the sixteenth magnetic detector 240d between the seventeenth magnetic concentrator member 112d and the twentieth magnetic concentrator member 115d. It is captured by the 20th magnetic flux concentrator member 115d. Furthermore, the magnetic field captured by the twentieth magnetic focusing member 115d is released through the nineteenth magnetic focusing member 114d connected to the twentieth magnetic focusing member 115d.

Further, the magnetic field emitted from the seventeenth magnetic flux concentrator member 112d in the + X-axis direction is the fifteenth magnetic detector 230d and the thirteenth magnetic detector 210d between the seventeenth magnetic concentrator member 112d and the eighteenth magnetic concentrator member 113d. And is captured by the eighteenth magnetic flux concentrator member 113d. Further, the magnetic field captured by the eighteenth magnetic focusing member 113d is released through the nineteenth magnetic focusing member 114d connected to the eighteenth magnetic focusing member 113d. As described above, the first magnetic detection unit 210a to the sixteenth magnetic detection unit 240d detect a magnetic field parallel to the first direction, the direction of which is changed according to the magnetic field _BY input in the + Y-axis direction.

As described above, when the magnetic field _BY is applied in the + Y-axis direction, the first magnetic detector 210a, the third magnetic detector 230a, the sixth magnetic detector 220b, the eighth magnetic detector 240b, and the tenth magnetic detector 220c. The twelfth magnetic detection unit 240c, the thirteenth magnetic detection unit 210d, and the fifteenth magnetic detection unit 230d detect a magnetic field in the + X-axis direction. In addition, the second magnetic detector 220a, the fourth magnetic detector 240a, the fifth magnetic detector 210b, the seventh magnetic detector 230b, the ninth magnetic detector 210c, the eleventh magnetic detector 230c, and the fourteenth magnetic detector 220d. The sixteenth magnetic detection unit 240d detects a magnetic field in the −X axis direction.

If the magnetic field _{B Z} is given in the + Z-axis direction of the magnetic sensor 100, a portion of the magnetic field _{B Z} is converged to the 18 magnetic convergence element 113d through the second 13 magnetic detection unit 210d in the + X-axis direction, and release Is done. Some of the magnetic field _{B Z} is converged to the 17 magnetic convergence element 112d through the second 14 magnetic detection unit 220d in the + X-axis direction, and released. Some of the magnetic field _{B Z} is 17 is converged to the magnetic flux concentrator member 112d through the first 15 magnetic detection unit 230d in the -X axis direction and released. Some of the magnetic field _{B Z} is converged to the 20 magnetic convergence element 115d through the second 16 magnetic detection unit 240d in the -X axis direction and released. Thus, the 16 magnetic detection unit 240d from the first magnetic detection unit 210a senses the magnetic field parallel to a first direction which is the direction changing in response to the magnetic field B _Z which is input to the + Z-axis direction.

As described above, when the magnetic field _BZ is applied in the + Z-axis direction, the first magnetic detector 210a, the second magnetic detector 220a, the seventh magnetic detector 230b, the eighth magnetic detector 240b, and the ninth magnetic detector 210c. The tenth magnetic detection unit 220c, the fifteenth magnetic detection unit 230d, and the sixteenth magnetic detection unit 240d detect a magnetic field in the −X-axis direction. The third magnetic detector 230a, the fourth magnetic detector 240a, the fifth magnetic detector 210b, the sixth magnetic detector 220b, the eleventh magnetic detector 230c, the twelfth magnetic detector 240c, and the thirteenth magnetic detector 210d. And the fourteenth magnetic detection unit 220d detects a magnetic field in the + X-axis direction.

  The magnetic sensor 100 of the ninth configuration example described above can obtain signals similar to those of the magnetic sensor 100 of the eighth configuration example shown in FIG. Therefore, in the magnetic sensor 100, the wiring unit 130 is connected from the first magnetic detection unit 210a to the sixteenth magnetic detection unit 240d, and the resistance change amount corresponding to the magnetic field of the three-axis component is obtained by acquiring the value of the magnetic resistance. Each can be calculated.

  For example, the magnetic sensor 100 is connected to the calculation unit 300 or the like by the wiring unit 130 and outputs magnetic field components in the X-axis direction, the Y-axis direction, and the Z-axis direction. Here, the wiring unit 130 and the calculation unit 300 can be configured and operated in the same manner as the configuration examples of FIGS. 23 and 24, and thus description thereof is omitted here. As described above, the magnetic sensor 100 according to the present embodiment can detect three orthogonal magnetic signals on the same substrate.

  FIG. 38 shows a tenth configuration example of the magnetic sensor 100 according to the present embodiment. In the magnetic sensor 100 shown in FIG. 38, substantially the same operations as those of the magnetic sensor 100 according to the present embodiment shown in FIGS. 21 and 33 are denoted by the same reference numerals, and description thereof is omitted.

  The magnetic sensor 100 according to the tenth configuration example includes a first magnetic detection unit 10a, a substantially mirror image, and a surface substantially orthogonal to the first direction at the negative end of the first magnetic converging member 111 in the first direction. The 2nd magnetic detection unit 10b arrange | positioned so that it may become. The magnetic sensor 100 includes a first magnetic detection unit 10a and a second magnetic detection unit 10b on the negative side magnetic convergence member in the second direction, a surface substantially orthogonal to the second direction, or the first magnetic detection unit 10a. The third magnetic detection unit 10c is arranged so as to be a substantially mirror image with the first magnetic detection unit 10a with respect to a surface substantially orthogonal to the second direction on the negative side in the second direction with respect to the second magnetic detection unit 10b. And a fourth magnetic detection unit 10d arranged to be substantially mirror image with the second magnetic detection unit 10b.

  That is, the magnetic sensor 100 of the tenth configuration example is more negative in the second direction than the first magnetic detection unit 10a and the second magnetic detection unit 10b in the magnetic sensor 100 of the fourth configuration example shown in FIG. The third magnetic detection unit 10c and the fourth magnetic detection unit are arranged so as to be substantially mirror images of the first magnetic detection unit 10a and the second magnetic detection unit 10b with respect to a surface substantially orthogonal to the second direction on the side. 10d. That is, in FIG. 38, in addition to the first magnetic detection unit 10a and the second magnetic detection unit 10b described in FIG. 21, the third magnetic detection unit 10a and the second magnetic detection unit 10b are mirror images of the first magnetic detection unit 10a and the second magnetic detection unit 10b. The detection unit 10c and the 4th magnetic detection unit 10d are shown.

  In other words, the magnetic sensor 100 of the tenth configuration example is similar to the magnetic sensor 100 of the eighth configuration example shown in FIG. 33 in the first magnetic detection unit 10a and the second magnetic detection unit 10b. An arrangement in which the arrangement and the arrangement of the third magnetic detection unit 10c and the fourth magnetic detection unit 10d are exchanged is shown. That is, the first to fourth magnetic detection units 10d included in the magnetic sensor 100 of the tenth configuration example have been described with reference to FIG.

FIG. 39 shows an example of a magnetic field in the X-axis direction sensed by each of the magnetic detection units when the magnetic fields B _X , B _Y , and B _Z are respectively given to the magnetic sensor 100 according to the present embodiment. In the magnetic sensor 100 shown in FIG. 39, substantially the same operations as those of the magnetic sensor 100 according to the present embodiment shown in FIGS. 22, 34, and 38 are denoted by the same reference numerals, and description thereof is omitted.

If the magnetic field _{B X} is given in the + X-axis direction of the magnetic sensor 100, a portion of the magnetic field _{B X} is converged to the 10 magnetic converging member 115b of the second magnetic detection unit 10b, discharged through the first magnetic detection unit 10a Is done. A part of the magnetic field _{B X} is converged to the 20 magnetic convergence element 115d of the fourth magnetic detection units 10d, it is discharged through the third magnetic detection unit 10c.

Here, a part of the magnetic field B _X is converged to the second magnetic detection unit 10b, the process of being released from the first magnetic detection unit 10a is already been described in FIG. 22, omitted here. Further, a part of the magnetic field B _X is converged to the fourth magnetic detection units 10d, the process of being discharged from the third magnetic detection unit 10c is already been described in FIG. 34, omitted here.

That is, the 16 magnetic detection unit 240d from the first magnetic detection unit 210a senses the magnetic field parallel to a first direction which is the direction changing in response to the magnetic field B _X to be input to the + X-axis direction. When the magnetic field _BX is applied in the + X-axis direction, the first magnetic detection unit 210a, the third magnetic detection unit 230a, the fifth magnetic detection unit 210b, the seventh magnetic detection unit 230b, the ninth magnetic detection unit 210c, The eleventh magnetic detection unit 230c, the thirteenth magnetic detection unit 210d, and the fifteenth magnetic detection unit 230d detect a magnetic field in the −X-axis direction. In addition, the second magnetic detector 220a, the fourth magnetic detector 240a, the sixth magnetic detector 220b, the eighth magnetic detector 240b, the tenth magnetic detector 220c, the twelfth magnetic detector 240c, and the fourteenth magnetic detector 220d. The sixteenth magnetic detector 240d detects a magnetic field in the + X-axis direction.

When the magnetic field _BY is applied in the + Y-axis direction of the magnetic sensor 100, the magnetic field _BY is converged on the twelfth magnetic converging member 112c and the seventeenth magnetic converging member 112d protruding in the -Y-axis direction. Here, the process in which the magnetic field _BY is converged on the twelfth magnetic focusing member 112c and the seventeenth magnetic focusing member 112d and emitted from the third magnetic detection unit 10c and the fourth magnetic detection unit 10d has been described with reference to FIG. This is omitted here.

The magnetic field _BY emitted in the + Y-axis direction from the third magnetic detection unit 10c and the fourth magnetic detection unit 10d is converged to the first magnetic detection unit 10a and the second magnetic detection unit 10b, and the second magnetic convergence member 112a and It is emitted from the seventh magnetic flux concentrator member 112b. The magnetic field _{BY applied} to the first magnetic detection unit 10a and the second magnetic detection unit 10b has been described with reference to FIG.

That is, the first magnetic detection unit 210a to the sixteenth magnetic detection unit 240d detect a magnetic field parallel to the first direction, the direction of which is changed according to the magnetic field _BY input in the + Y-axis direction. When the magnetic field _BY is applied in the + Y-axis direction, the first magnetic detection unit 210a, the third magnetic detection unit 230a, the sixth magnetic detection unit 220b, the eighth magnetic detection unit 240b, the tenth magnetic detection unit 220c, The twelfth magnetic detection unit 240c, the thirteenth magnetic detection unit 210d, and the fifteenth magnetic detection unit 230d detect a magnetic field in the + X-axis direction. In addition, the second magnetic detector 220a, the fourth magnetic detector 240a, the fifth magnetic detector 210b, the seventh magnetic detector 230b, the ninth magnetic detector 210c, the eleventh magnetic detector 230c, and the fourteenth magnetic detector 220d. The sixteenth magnetic detection unit 240d detects a magnetic field in the −X axis direction.

In the case where the magnetic field B _Z is applied in the + Z-axis direction of the magnetic sensor 100, an example in which the magnetic field B _Z is applied from the first magnetic detection unit 210a to the 16th magnetic detection unit 240d is the same as FIG. . That is, the 16 magnetic detection unit 240d from the first magnetic detection unit 210a senses the magnetic field parallel to a first direction which is the direction changing in response to the magnetic field B _Z which is input to the + Z-axis direction. When a magnetic field _BZ is applied in the + Z-axis direction, the first magnetic detection unit 210a, the second magnetic detection unit 220a, the seventh magnetic detection unit 230b, the eighth magnetic detection unit 240b, the ninth magnetic detection unit 210c, The tenth magnetic detection unit 220c, the fifteenth magnetic detection unit 230d, and the sixteenth magnetic detection unit 240d detect a magnetic field in the −X-axis direction. The third magnetic detector 230a, the fourth magnetic detector 240a, the fifth magnetic detector 210b, the sixth magnetic detector 220b, the eleventh magnetic detector 230c, the twelfth magnetic detector 240c, and the thirteenth magnetic detector 210d. And the fourteenth magnetic detection unit 220d detects a magnetic field in the + X-axis direction.

  The magnetic sensor 100 of the above tenth configuration example can obtain the same signal as the magnetic sensor 100 of the eighth configuration example shown in FIG. Therefore, in the magnetic sensor 100, the wiring unit 130 is connected from the first magnetic detection unit 210a to the sixteenth magnetic detection unit 240d, and the resistance change amount corresponding to the magnetic field of the three-axis component is obtained by acquiring the value of the magnetic resistance. Each can be calculated.

  For example, the magnetic sensor 100 is connected to the calculation unit 300 or the like by the wiring unit 130 and outputs magnetic field components in the X-axis direction, the Y-axis direction, and the Z-axis direction. Here, the wiring unit 130 and the calculation unit 300 can be configured and operated in the same manner as the configuration examples of FIGS. 23 and 24, and thus description thereof is omitted here. As described above, the magnetic sensor 100 according to the present embodiment can detect three orthogonal magnetic signals on the same substrate.

  FIG. 40 shows an eleventh configuration example of the magnetic sensor 100 according to the present embodiment. In the magnetic sensor 100 shown in FIG. 40, substantially the same operations as those of the magnetic sensor 100 according to the present embodiment shown in FIGS. 29 and 36 are denoted by the same reference numerals, and description thereof is omitted.

  The magnetic sensor 100 of the eleventh configuration example forms a substantially mirror image with the first magnetic detection unit 10a with respect to a surface that is substantially perpendicular to the first direction on the positive side in the first direction with respect to the fifth magnetic converging member 115. Is provided with the second magnetic detection unit 10b. Further, in the negative side magnetic convergence member in the second direction of the first magnetic detection unit 10a and the second magnetic detection unit 10b, a surface substantially orthogonal to the second direction, or the first magnetic detection unit 10a and the second magnetic detection member. A third magnetic detection unit 10c disposed so as to be substantially a mirror image of the first magnetic detection unit 10a with respect to a surface substantially perpendicular to the second direction on the negative side of the second direction with respect to the unit 10b; And a fourth magnetic detection unit 10d arranged so as to be a substantially mirror image with the detection unit 10b.

  That is, the magnetic sensor 100 of the eleventh configuration example is more negative in the second direction than the first magnetic detection unit 10a and the second magnetic detection unit 10b in the magnetic sensor 100 of the sixth configuration example shown in FIG. The third magnetic detection unit 10c and the fourth magnetic detection unit are arranged so as to be substantially mirror images of the first magnetic detection unit 10a and the second magnetic detection unit 10b with respect to a surface substantially orthogonal to the second direction on the side. 10d. That is, in FIG. 40, in addition to the first magnetic detection unit 10a and the second magnetic detection unit 10b described in FIG. 29, the third magnetic detection unit 10a and the second magnetic detection unit 10b are mirror images of the first magnetic detection unit 10a and the second magnetic detection unit 10b. The detection unit 10c and the 4th magnetic detection unit 10d are shown.

  In other words, the magnetic sensor 100 of the eleventh configuration example is the same as the magnetic sensor 100 of the ninth configuration example shown in FIG. 36 in that the first magnetic detection unit 10a and the third magnetic detection unit 10b. An arrangement in which the arrangement and the arrangement of the second magnetic detection unit 10c and the fourth magnetic detection unit 10d are exchanged is shown. That is, the first magnetic detection unit 10a to the fourth magnetic detection unit 10d included in the magnetic sensor 100 of the eleventh configuration example have been described with reference to FIG. Here, the second magnetic detection unit 10b shown in FIG. 40 corresponds to the third magnetic detection unit 10b shown in FIG. 36, and the third magnetic detection unit 10c shown in FIG. 40 is shown in FIG. In the following description, it corresponds to the second magnetic detection unit 10c.

FIG. 41 shows an example of the magnetic field in the X-axis direction sensed by each of the magnetic sensing units when the magnetic sensors B _X , B _Y , and B _Z are given to the magnetic sensor 100 according to the present embodiment. In the magnetic sensor 100 shown in FIG. 39, substantially the same operations as those of the magnetic sensor 100 according to this embodiment shown in FIGS. 30, 37, and 40 are denoted by the same reference numerals, and description thereof is omitted.

If the magnetic sensor 100 + X-axis direction to the magnetic field _{B X} is given, a part of the magnetic field _{B X} is converged to the first magnetic flux concentrator member 111a of the first magnetic detection unit 10a, discharge through the second magnetic detection unit 10b Is done. A part of the magnetic field _{B X} is converged to the 11 magnetic convergence element 111c of the third magnetic detection unit 10c, it is released through the fourth magnetic detection units 10d.

Here, a part of the magnetic field B _X is converged to the first magnetic detection unit 10a, the process of being released from the second magnetic detection unit 10b, so as described in FIG. 30, omitted here. Further, a part of the magnetic field B _X is converged to the third magnetic detection unit 10c, the process of being released from the fourth magnetic detection units 10d, since as described in Fig. 37, omitted here.

That is, the 16 magnetic detection unit 240d from the first magnetic detection unit 210a senses the magnetic field parallel to a first direction which is the direction changing in response to the magnetic field B _X to be input to the + X-axis direction. When the magnetic field _BX is applied in the + X-axis direction, the first magnetic detection unit 210a, the third magnetic detection unit 230a, the fifth magnetic detection unit 210b, the seventh magnetic detection unit 230b, the ninth magnetic detection unit 210c, The eleventh magnetic detection unit 230c, the thirteenth magnetic detection unit 210d, and the fifteenth magnetic detection unit 230d detect a magnetic field in the −X-axis direction. In addition, the second magnetic detector 220a, the fourth magnetic detector 240a, the sixth magnetic detector 220b, the eighth magnetic detector 240b, the tenth magnetic detector 220c, the twelfth magnetic detector 240c, and the fourteenth magnetic detector 220d. The sixteenth magnetic detector 240d detects a magnetic field in the + X-axis direction.

When the magnetic field _BY is applied in the + Y-axis direction of the magnetic sensor 100, the magnetic field _BY is converged on the twelfth magnetic converging member 112c and the seventeenth magnetic converging member 112d protruding in the -Y-axis direction. Here, the process in which the magnetic field _BY is converged on the twelfth magnetic focusing member 112c and the seventeenth magnetic focusing member 112d and emitted from the third magnetic detection unit 10c and the fourth magnetic detection unit 10d has been described with reference to FIG. This is omitted here.

The magnetic field _BY emitted in the + Y-axis direction from the third magnetic detection unit 10c and the fourth magnetic detection unit 10d is converged to the first magnetic detection unit 10a and the second magnetic detection unit 10b, and the second magnetic convergence member 112a and It is emitted from the seventh magnetic flux concentrator member 112b. The magnetic field _{BY applied} to the first magnetic detection unit 10a and the second magnetic detection unit 10b has been described with reference to FIG.

That is, the first magnetic detection unit 210a to the sixteenth magnetic detection unit 240d detect a magnetic field parallel to the first direction, the direction of which is changed according to the magnetic field _BY input in the + Y-axis direction. When the magnetic field _BY is applied in the + Y-axis direction, the first magnetic detection unit 210a, the third magnetic detection unit 230a, the sixth magnetic detection unit 220b, the eighth magnetic detection unit 240b, the tenth magnetic detection unit 220c, The twelfth magnetic detection unit 240c, the thirteenth magnetic detection unit 210d, and the fifteenth magnetic detection unit 230d detect a magnetic field in the + X-axis direction. In addition, the second magnetic detector 220a, the fourth magnetic detector 240a, the fifth magnetic detector 210b, the seventh magnetic detector 230b, the ninth magnetic detector 210c, the eleventh magnetic detector 230c, and the fourteenth magnetic detector 220d. The sixteenth magnetic detection unit 240d detects a magnetic field in the −X axis direction.

When the magnetic field B _Z is applied in the + Z-axis direction of the magnetic sensor 100, an example in which the magnetic sensor 100 is applied from the first magnetic detection unit 210a to the 16th magnetic detection unit 240d is the same as that in FIG. . That is, the 16 magnetic detection unit 240d from the first magnetic detection unit 210a senses the magnetic field parallel to a first direction which is the direction changing in response to the magnetic field B _Z which is input to the + Z-axis direction. When a magnetic field _BZ is applied in the + Z-axis direction, the first magnetic detection unit 210a, the second magnetic detection unit 220a, the seventh magnetic detection unit 230b, the eighth magnetic detection unit 240b, the ninth magnetic detection unit 210c, The tenth magnetic detection unit 220c, the fifteenth magnetic detection unit 230d, and the sixteenth magnetic detection unit 240d detect a magnetic field in the −X-axis direction. The third magnetic detector 230a, the fourth magnetic detector 240a, the fifth magnetic detector 210b, the sixth magnetic detector 220b, the eleventh magnetic detector 230c, the twelfth magnetic detector 240c, and the thirteenth magnetic detector 210d. And the fourteenth magnetic detection unit 220d detects a magnetic field in the + X-axis direction.

  The magnetic sensor 100 of the eleventh configuration example described above can obtain signals similar to those of the magnetic sensor 100 of the eighth configuration example shown in FIG. Therefore, in the magnetic sensor 100, the wiring unit 130 is connected from the first magnetic detection unit 210a to the sixteenth magnetic detection unit 240d, and the resistance change amount corresponding to the magnetic field of the three-axis component is obtained by acquiring the value of the magnetic resistance. Each can be calculated.

  For example, the magnetic sensor 100 is connected to the calculation unit 300 or the like by the wiring unit 130 and outputs magnetic field components in the X-axis direction, the Y-axis direction, and the Z-axis direction. Here, the wiring unit 130 and the calculation unit 300 can be configured and operated in the same manner as the configuration examples of FIGS. 23 and 24, and thus description thereof is omitted here. As described above, the magnetic sensor 100 according to the present embodiment can detect three orthogonal magnetic signals on the same substrate.

  In addition, the magnetic sensors 100 of the fourth to eleventh configuration examples described above bring about an effect of suppressing the other-axis sensitivity in which a part of the other axis component is output to the output signal of the one axis component. Therefore, it is possible to realize a magnetic sensor that detects a magnetic signal of a three-axis component with high accuracy.

  FIG. 42 shows a twelfth configuration example of the magnetic sensor 100 according to the present embodiment. In the magnetic sensor 100 shown in FIG. 42, substantially the same operations as those of the magnetic sensor 100 according to the present embodiment shown in FIGS. 33 and 35 are denoted by the same reference numerals, and description thereof is omitted.

  The magnetic sensor 100 of the twelfth configuration example includes a plurality of first magnetic detection units 10a to 10d. FIG. 42 shows an example in which the magnetic sensor 100 includes two first to fourth magnetic detection units 10d to 10d of the eighth configuration example shown in FIGS. In FIG. 42, an arrangement pattern having one each of the first magnetic detection unit 10a to the fourth magnetic detection unit 10d is referred to as a first arrangement pattern 40a and a second arrangement pattern 40b.

  In FIG. 42, two arrangement patterns are separated so as to have a predetermined interval, and are arranged in the order of the first arrangement pattern 40a and the second arrangement pattern 40b from the −X axis direction side to the + X axis direction side. An example is shown. Instead, the first arrangement pattern 40a and the second arrangement pattern 40b may be arranged in the second direction (from the −Y axis direction side to the + Y direction side).

  FIG. 42 shows an example in which the wiring part 130 is connected to the first arrangement pattern 40a and the second arrangement pattern 40b. The plurality of magnetic detection units included in the first arrangement pattern 40a and the second arrangement pattern 40b have two corresponding magnetic detection units connected in series by the wiring unit 130, as shown in FIG. For example, the wiring unit 130 connects, in series, two magnetic detection units in which the directions of the magnetic fields to be detected are substantially the same with respect to the input of the magnetic field of the three-axis component. For example, one end of the first magnetic detection unit 210a is connected to the other end of the fifteenth magnetic detection unit 230d. Here, the corresponding specific combination of the other magnetic detection units has been described with reference to FIG.

  The wiring unit 130 connects in series the two magnetic detection units connected in series in the first arrangement pattern 40a and the two corresponding magnetic detection units connected in series in the second arrangement pattern 40b. For example, the first magnetic detection unit 210a and the fifteenth magnetic detection unit 230d of the first arrangement pattern 40a and the first magnetic detection unit 210a and the fifteenth magnetic detection unit 230d of the second arrangement pattern 40a are connected in series. In this case, the wiring unit 130 may connect one terminals of the two fifteenth magnetic detection units 230d in the first arrangement pattern 40a and the second arrangement pattern 40b.

  Thus, the wiring unit 130 includes a combination of two magnetic detection units connected in series in the first arrangement pattern 40a and two magnetic detection units in the second arrangement pattern 40b that is the same as the combination of the two magnetic detection units. Are connected in series. That is, the wiring unit 130 performs wiring from 32 magnetic detection units so as to form eight sets of circuits in which four magnetic detection units are connected in series. The wiring unit 130 connects one of the eight sets of circuits to the terminal S and connects the other from the terminal A to the terminal H.

  As an example, the wiring unit 130 includes the terminal A—the first magnetic detection unit 210d of the first arrangement pattern 40a—the fifteenth magnetic detection unit 230d of the first arrangement pattern 40a—the fifteenth magnetic detection unit 230d of the second arrangement pattern 40b. The first magnetic detection unit 210a-terminal S of the second arrangement pattern 40b is wired. Thus, the magnetic sensor 100 of the twelfth configuration example includes four magnetic detection units connected in series between the terminals A to H and the terminal S, respectively. And the four magnetic detection units connected in series are combinations of two magnetic detection units respectively provided between the terminals A to S of the terminals A to H in the eighth configuration example shown in FIG. 2 sets each.

  As described above, the magnetic sensor 100 according to the twelfth configuration example serially connects a combination of two magnetic detection units used for detection in one arrangement pattern and the same combination in another arrangement pattern. Thereby, the magnetic sensor 100 can detect the magnetic field of the three-axis component orthogonal to each other with higher sensitivity than the detection by one arrangement pattern. The magnetic sensor 100 includes two arrangement patterns, but does not increase the number of terminals. Therefore, for example, the magnetic sensor 100 is connected to the calculation unit 300 shown in FIG. 24, and is connected to the X axis direction, the Y axis direction, and the Z axis. An axial magnetic field component can be output. In this case, the calculation unit 300 calculates each magnetic field component based on the output of each magnetic detection unit linearly coupled.

  In the present embodiment, the example in which the magnetic sensor 100 includes two arrangement patterns has been described. Instead, the magnetic sensor 100 may include three or more arrangement patterns. In this case, for example, the magnetic sensor 100 is arranged in parallel with the first direction and / or the second direction so that the plurality of arrangement patterns do not overlap each other. When the magnetic sensor 100 includes n arrangement patterns, the wiring unit 130 includes a combination of two magnetic detection units in one arrangement pattern and another (n−1) arrangements that are the same as the combination. The (n-1) sets of two magnetic detection units in the pattern may be connected in series.

  Moreover, the above magnetic sensor 100 demonstrated that the wiring part 130 connected two corresponding magnetic detection parts in one arrangement pattern in series. Instead, the wiring unit 130 may connect two corresponding magnetic detection units in one arrangement pattern in parallel.

  In the magnetic sensor 100 of the twelfth configuration example, it has been described that the wiring unit 130 appropriately connects a plurality of magnetic detection units in two or more arrangement patterns. Here, as an example of the arrangement pattern, an example is shown in which two arrangement patterns of the eighth configuration example shown in FIG. 33 are provided. Instead, the magnetic sensor 100 may be provided with two arrangement patterns of the first to seventh and ninth to eleventh configuration examples.

  FIG. 43 shows a thirteenth configuration example of the magnetic sensor 100 according to the present embodiment. In the magnetic sensor 100 shown in FIG. 43, substantially the same operations as those of the magnetic sensor 100 according to the present embodiment shown in FIGS. 33 and 35 are denoted by the same reference numerals, and description thereof is omitted.

  The magnetic sensor 100 according to the thirteenth configuration example further includes an auxiliary magnetic converging member disposed outside the first magnetic detection unit 10a and the second magnetic detection unit 10b. FIG. 43 further includes, as an example, an auxiliary magnetic converging member disposed outside the first magnetic detection unit 10a and the fourth magnetic detection unit 10d. Here, the auxiliary magnetic flux concentrating member is disposed outside the first direction.

  43, the magnetic sensor 100 has one arrangement pattern 40 of the magnetic sensor 100 of the eighth configuration example shown in FIGS. 33 and 35, and the magnetic sensor 100 of the eighth configuration example on both sides in the X-axis direction. Two auxiliary arrangement patterns 50 composed of only the magnetic convergence portion are provided. Here, the auxiliary arrangement pattern 50 may function as an auxiliary magnetic converging member, and instead, a part of the auxiliary arrangement pattern 50 may function as an auxiliary magnetic converging member. The specific configuration of the arrangement pattern 40 and the auxiliary arrangement pattern 50 has been described with reference to FIGS.

  43, the two auxiliary arrangement patterns 50 are arranged so that the arrangement pattern 40 is sandwiched between the first auxiliary arrangement pattern 50a and the second auxiliary arrangement pattern 50b in the order from the −X axis direction side to the + X axis direction side. The The arrangement pattern 40 and the first auxiliary arrangement pattern 50a are separated so as to have a predetermined interval. For example, the tenth magnetic flux concentrator member 115b of the arrangement pattern 40 and the fifth magnetic flux concentrator member 115a of the first auxiliary arrangement pattern 50a are arranged so as to be separated by a predetermined distance.

  Similarly, the arrangement pattern 40 and the second auxiliary arrangement pattern 50b are separated so as to have a predetermined interval. For example, the fifth magnetic flux concentrator member 115a of the arrangement pattern 40 and the tenth magnetic flux concentrator member 115b of the second auxiliary arrangement pattern 50b are arranged so as to be separated by a predetermined distance. Here, the predetermined distance is preferably approximately the same as the distance between the first magnetic detection unit 10a and the second magnetic detection unit 10b, for example.

  Here, an example in which a magnetic field in the + Y-axis direction is supplied to the arrangement pattern 40 when there is no auxiliary arrangement pattern 50 will be described. In this case, the tenth magnetic flux concentrator member 115b of the second magnetic detection unit 10b at the end on the −X axis direction side of the arrangement pattern 40 is a magnetic field in the space on the −X axis direction side with respect to the tenth magnetic flux concentrator member 115b. Converge. Then, the magnetic field that converges on the tenth magnetic flux concentrator member 115b may be larger than the magnetic field that converges on the eighth magnetic flux concentrator member 113b at the end of the second magnetic detection unit 10b on the + X-axis direction side. . Similarly, the magnetic field converging on the twentieth magnetic converging member 115d of the fourth magnetic detection unit 10d may be larger than the magnetic field converging on the eighteenth magnetic converging member 113d.

  Further, the magnetic field that converges on the fifth magnetic converging member 115a of the first magnetic detection unit 10a at the end on the + X-axis direction side of the arrangement pattern 40 is slightly larger than the magnetic field that converges on the third magnetic converging member 113a. May end up. In addition, the magnetic field that converges on the fifteenth magnetic focusing member 115c of the third magnetic detection unit 10c may be slightly larger than the magnetic field that converges on the thirteenth magnetic focusing member 113c.

  When such an imbalance exists, for example, when magnetic signals of orthogonal three-axis components are respectively calculated, the noise component may be affected. Therefore, the magnetic sensor 100 of the present embodiment is in the vicinity of the tenth magnetic focusing member 115b at the end on the −X axis direction side of the arrangement pattern 40 in order to eliminate such an imbalance of the magnetic field that converges on the magnetic focusing member. In addition, at least a part of the first auxiliary arrangement pattern 50a is arranged.

  That is, at least a part of the first auxiliary arrangement pattern 50a converges the magnetic field in the space on the −X-axis direction side with respect to the tenth magnetic focusing member 115b, so that the magnetic field converged by the tenth magnetic focusing member 115b is reduced. Thus, the magnetic field can be set to the same level as the magnetic field converged on the eighth magnetic flux concentrator member 113b. As a result, the magnetic sensor 100 of the thirteenth configuration example can uniformly input the magnetic field in the + Y axis direction to each magnetic converging member provided in the arrangement pattern 40, and the magnetic field in the + Y axis direction is high. It can be detected with accuracy.

  Similarly, at least a part of the second auxiliary arrangement pattern 50b is arranged in the vicinity of the fifth magnetic flux concentrator member 115a at the end of the arrangement pattern 40 on the + X axis direction side. At least a part of the second auxiliary arrangement pattern 50b converges the magnetic field in the space on the + X axis direction side of the fifth magnetic convergence member 115a, so that the magnetic field converged by the fifth magnetic convergence member 115a is reduced, The magnetic field can be set to the same level as the magnetic field converged on the third magnetic flux concentrator member 113a.

  Further, at least a part of the second auxiliary arrangement pattern 50b is arranged in the vicinity of the fifteenth magnetic flux concentrator member 115c at the end of the arrangement pattern 40 on the + X axis direction side, and the end of the arrangement pattern 40 on the −X axis direction side In the vicinity of the twentieth magnetic flux concentrator member 115d, at least a part of the first auxiliary arrangement pattern 50a is arranged. As a result, a magnetic field in the + Y-axis direction can be uniformly input to each magnetic flux concentrator member provided in the arrangement pattern 40.

  Although the magnetic sensor 100 of the above thirteenth configuration example has been described as including one arrangement pattern 40 of the magnetic sensor 100 of the eighth configuration example, it may include a plurality of arrangement patterns 40 instead. Good. Instead of this, the magnetic sensor 100 may be provided with the arrangement patterns of the first to seventh and ninth to eleventh configuration examples.

  FIG. 44 shows a fourteenth configuration example of the magnetic sensor 100 according to the present embodiment. In the magnetic sensor 100 shown in FIG. 44, substantially the same operations as those of the magnetic sensor 100 according to the present embodiment shown in FIGS. 33 and 35 are denoted by the same reference numerals, and description thereof is omitted.

  An example in which the magnetic sensor 100 of the fourteenth configuration example includes the arrangement pattern of the magnetic sensor 100 of the eighth configuration example shown in FIGS. 33 and 35 will be described. FIG. 44 shows the first magnetic detection units 210a to 16d of the magnetic sensor 100 of the eighth configuration example. The first magnetic detector 210a and the third magnetic detector 230a, the fifth magnetic detector 210b and the seventh magnetic detector 230b, the tenth magnetic detector 220c and the twelfth magnetic detector 240c, and the fourteenth magnetic detector 220d and One terminal of the 16-magnetic detection unit 240d is electrically coupled to one point and connected to the terminal S.

  In addition, one terminal of the second magnetic detection unit 220a and the thirteenth magnetic detection unit 210d is electrically coupled to one point and connected to the terminal M. One terminal of the fourth magnetic detector 240a and the fifteenth magnetic detector 230d is electrically coupled to one point and connected to the terminal N. One terminal of the sixth magnetic detection unit 220b and the ninth magnetic detection unit 210c is electrically coupled to one point and connected to the terminal O. One terminal of the eighth magnetic detection unit 240b and the eleventh magnetic detection unit 230c is electrically coupled to one point and connected to the terminal P.

  The other terminals of the second magnetic detection unit 220a and the third magnetic detection unit 230a are electrically coupled to one point and connected to the terminal C. The other terminals of the first magnetic detection unit 210a and the fourth magnetic detection unit 240a are electrically coupled to one point and connected to the terminal A. The other terminals of the thirteenth magnetic detection unit 210d and the sixteenth magnetic detection unit 240d are electrically coupled to one point and connected to the terminal B. The other terminals of the fourteenth magnetic detector 220d and the fifteenth magnetic detector 230d are electrically coupled to one point and connected to the terminal D. The other terminals of the sixth magnetic detector 220b and the seventh magnetic detector 230b are electrically coupled to one point and connected to the terminal G. The other terminals of the fifth magnetic detector 210b and the eighth magnetic detector 240b are electrically coupled to one point and connected to the terminal E. The other terminals of the ninth magnetic detector 210c and the twelfth magnetic detector 240c are electrically coupled to one point and connected to the terminal F. The other terminals of the tenth magnetic detection unit 220c and the eleventh magnetic detection unit 230c are electrically coupled to one point and connected to the terminal H.

  Furthermore, a predetermined first potential is applied to the terminal S. Further, the terminals M, N, O, and P are electrically coupled to one point and given a predetermined second potential.

  Thus, the magnetic sensor 100 of the fourteenth configuration example forms four Wheatstone bridges using the first magnetic detection unit 210a to the sixteenth magnetic detection unit 240d. The first bridge includes a second magnetic detection unit 220a, a third magnetic detection unit 230a, a thirteenth magnetic detection unit 210d, and a sixteenth magnetic detection unit 240d, and terminals B, C, M, and S. The second bridge includes a first magnetic detection unit 210a, a fourth magnetic detection unit 240a, a fourteenth magnetic detection unit 220d, a fifteenth magnetic detection unit 230d, and terminals A, D, N, and S. The third bridge includes a sixth magnetic detection unit 220b, a seventh magnetic detection unit 230b, a ninth magnetic detection unit 210c, and a twelfth magnetic detection unit 240c, and terminals F, G, O, and S. The fourth bridge includes a fifth magnetic detector 210b, an eighth magnetic detector 240b, a tenth magnetic detector 220c, an eleventh magnetic detector 230c, and terminals E, H, P, and S.

The first bridge to the fourth bridge are supplied with a voltage V _S predetermined by a voltage source or the like between the first potential and the second potential. That is, the voltage V _S is supplied between the terminals MS, NS, OS, and PS.

The voltages between terminals A-S, B-S, C-S, D-S, E-S, F-S, G-S, and H-S are expressed as V _AS and V _BS. , V _CS , V _DS , V _ES , V _FS , V _GS , and V _HS , the respective voltages are expressed by the following equations.
(Equation 79)
V _AS = V _S R ₁ / (R ₁ + R ₄ ) = (R ₀ −ΔR _X + ΔR _Y −ΔR _Z ) V _S / 2R ₀
(Equation 80)
V _BS = V _S R ₁₆ / (R ₁₃ + R ₁₆ ) = (R ₀ + ΔR _X -ΔR _Y -ΔR _Z ) V _S / 2R ₀
(Formula 81)
V _CS = V _S R ₃ / (R ₂ + R ₃ ) = (R ₀ −ΔR _X + ΔR _Y + ΔR _Z ) V _S / 2R ₀
(Equation 82)
V _DS = V _S R ₁₄ / (R ₁₄ + R ₁₅ ) = (R ₀ + ΔR _X −ΔR _Y + ΔR _Z ) V _S / 2R ₀
(Formula 83)
V _ES = V _S R ₅ / (R ₅ + R ₈ ) = (R ₀ −ΔR _X −ΔR _Y + ΔR _Z ) V _S / 2R ₀
(Equation 84)
V _FS = V _S R ₁₂ / (R ₉ + R ₁₂ ) = (R ₀ + ΔR _X + ΔR _Y + ΔR _Z ) V _S / 2R ₀
(Equation 85)
V _GS = V _S R ₇ / (R ₆ + R ₇ ) = (R ₀ −ΔR _X −ΔR _Y −ΔR _Z ) V _S / 2R ₀
(Equation 86)
V _HS = V _S R ₁₀ / (R ₁₀ + R ₁₁ ) = (R ₀ + ΔR _X + ΔR _Y −ΔR _Z ) V _S / 2R ₀

Each of the voltages in the equations (79) to (86) includes resistance change amounts ΔR _X , ΔR _Y , and ΔR _Z corresponding to the magnetic field of the three-axis component. The signs of ΔR _X , ΔR _Y , and ΔR _Z correspond to the direction of the magnetic field in the X-axis direction across the first magnetic detector 210a to the sixteenth magnetic detector 240d.

From the formulas (81)-(80), (79)-(82), (85)-(84), and (83)-(86), the following formula is obtained. .
(Equation 87)
V _CB = V _CS −V _BS = (− ΔR _X + ΔR _Y + ΔR _Z ) V _S / R ₀
(Equation 88)
V _AD = V _AS −V _DS = (− ΔR _X + ΔR _Y −ΔR _Z ) V _S / R ₀
(Equation 89)
V _GF = V _GS −V _FS = (− ΔR _X −ΔR _Y −ΔR _Z ) V _S / R ₀
(Equation 90)
V _EH = V _ES −V _HS = (− ΔR _X −ΔR _Y + ΔR _Z ) V _S / R ₀

Furthermore, − (Equation 87) − (Equation 88) − (Equation 89) − (Equation 90), (Equation 87) + (Equation 88) − (Equation 89) − (Equation 90), and (Equation 87). The following formula is obtained from the formula-(Formula 88)-(Formula 89) + (Formula 90).
(Equation 91)
4ΔR _X = (− V _CB −V _AD −V _GF −V _EH ) R ₀ / V _S
(Equation 92)
4ΔR _Y = (V _CB + V _AD −V _GF −V _EH ) R ₀ / V _S
(Equation 93)
4ΔR _Z = (V _CB −V _AD −V _GF + V _EH ) R ₀ / V _S

  In this way, the magnetic sensor 100 can acquire magnetic signals having three orthogonal axis components. That is, by solving the simultaneous equations for each voltage, each resistance change amount corresponding to the magnetic field of the three-axis component can be obtained. The expansion of the simultaneous equations described here is an example, and is not limited to this.

Here, the differential voltages V _CB , V _AD , V _GF , and V _EH are, in other words, voltages generated between the terminals C-B, A-D, GF, and E-H, respectively. . That is, by directly measuring the voltage generated between the terminals C-B, A-D, GF, and E-H, the signal of the formula (90) can be obtained from the formula (90). The output signal of each axis can be obtained.

  In FIG. 44, the first bridge to the fourth bridge are each supplied with the second potential. For example, each of the terminals M, N, O, and P is provided with a switch, and each switch is switched while the switch is switched. A voltage may be supplied to the bridge. In addition, it is preferable that a plurality of magnetic detection units be connected to the terminals S because the number of terminals can be reduced. However, instead of this, a plurality of terminals S are provided, and each magnetic detection unit or One of the two magnetic detection units may be connected to one of the plurality of terminals S, respectively.

  The magnetic sensor 100 of the above 14th structural example demonstrated the example using the arrangement pattern of the magnetic sensor 100 of an 8th structural example. Instead, the magnetic sensor 100 may use the arrangement patterns of the first to seventh and ninth to eleventh configuration examples.

  FIG. 45 shows a fifteenth configuration example of the magnetic sensor 100 according to the present embodiment. In the magnetic sensor 100 shown in FIG. 45, substantially the same operation as that of the magnetic sensor 100 according to the present embodiment shown in FIG.

  The magnetic sensor 100 according to the fifteenth configuration example includes a first magnetic flux concentrator member 111 extending in a first direction and a first magnetic flux concentrator member 111 connected to an end of the first magnetic flux concentrator member 111 and extending in a second direction different from the first direction. 2 near the positive side in the first direction of the second magnetic flux concentrator member 112, the first magnetic detector 210 disposed near the negative side in the first direction of the second magnetic flux concentrator member 112 And a second magnetic detection unit 220 arranged. 45 shows an arrangement pattern in which the second magnetic convergence unit 120 and the third magnetic detection unit 230 are excluded from the magnetic sensor 100 of the first configuration example shown in FIG. 1 as the magnetic sensor 100 of the fifteenth configuration example. Indicates.

  The first magnetic detection unit 210 and the second magnetic detection unit 220 may be arranged so as to be separated from the second magnetic convergence member 112 by a predetermined distance and sandwich the second magnetic convergence member 112 therebetween. . Preferably, the first magnetic detection unit 210 is disposed on the −X-axis direction side of the second magnetic converging member 112 so as to be close to the second magnetic converging member 112 in a plan view viewed from the Z-axis direction. Further, the second magnetic detection unit 220 is disposed on the + X axis direction side of the second magnetic flux concentrator member 112 so as to be close to the second magnetic flux concentrator member 112 in a plan view seen from the Z axis direction.

When the magnetic field _BX is applied in the + X-axis direction of the magnetic sensor 100, the first magnetic flux concentrator member 111 protruding in the -X-axis direction converges the magnetic field in the space in the vicinity thereof. That is, not only the magnetic field in the XY plane close to the first magnetic focusing member 111 but also the magnetic field in the XZ plane close to the first magnetic focusing member 111 is converged on the first magnetic focusing member 111. The magnetic field focused on the first magnetic focusing member 111 passes through the second magnetic focusing member 112 connected to the first magnetic focusing member 111 and is emitted from the second magnetic focusing member 112 in the −X axis direction and the + X axis direction. Is done.

The magnetic field emitted from the second magnetic focusing member 112 in the −X axis direction passes through the first magnetic detection unit 210, and the magnetic field emitted from the second magnetic focusing member 112 in the + X axis direction is the second magnetic detection unit 220. Go through. Thus, the first magnetic detection portion 210 and the second magnetic sensor 220 senses the magnetic field parallel to a first direction which is the direction changing in response to the magnetic field B _X to be input to the + X-axis direction. That is, the first magnetic detection unit 210 detects a magnetic field in the −X axis direction. In addition, the second magnetic detection unit 220 detects a magnetic field in the + X axis direction.

When the magnetic field _BY is applied in the + Y-axis direction of the magnetic sensor 100, the first magnetic detection unit 210 and the second magnetic detection unit 220 do not detect the magnetic field in the + Y-axis direction. That is, since there is no magnetic flux concentrator member to bend the magnetic field B _Y of the supplied + Y-axis direction in the X-axis direction, the magnetic sensor 100 does not sense the magnetic field.

If the magnetic field B _Z is given in the + Z-axis direction of the magnetic sensor 100, the magnetic field B _Z is converged on the second magnetic flux concentrator member 112 through the first magnetic detection portion 210 in the + X-axis direction, and released. Further, the magnetic field B _Z is converged on the second magnetic flux concentrator member 112 through the second magnetic detection portion 220 in the -X-axis direction, and released. Thus, the first magnetic detection portion 210 and the second magnetic sensor 220 senses the first direction and the magnetic field parallel which is redirecting depending on the magnetic field B _Z which is input to the + Z-axis direction. That is, the first magnetic detection unit 210 detects a magnetic field in the + X axis direction. The second magnetic detector 220 detects a magnetic field in the −X axis direction.

As described above, the magnetic sensor 100 includes the L-shaped magnetic converging unit. When the magnetic field _BX is supplied in the + X axis direction, the magnetic sensor 100 generates a magnetic field in the −X axis direction together with the magnetic field in the + X axis direction. The magnetic detection unit can sense magnetic fields in the + X axis direction and the −X axis direction. Thereby, as explained in the magnetic sensor 100 of the first to fifteenth configuration examples, it is possible to create a resistance change amount having a different sign according to the magnetic field of the three-axis component, and further, the magnetic signal of the three-axis component by calculation. Can be obtained respectively.

  FIG. 46 shows a sixteenth configuration example of the magnetic sensor 100 according to the present embodiment. In the magnetic sensor 100 shown in FIG. 46, substantially the same operations as those of the magnetic sensor 100 according to the present embodiment shown in FIG.

  The magnetic sensor 100 according to the sixteenth configuration example includes one first magnetic detection unit 10 as with the magnetic sensor 100 according to the first configuration example. The magnetic sensor 100 of the sixteenth configuration example further includes a first sub magnetic flux concentrating member 116 and a second sub magnetic detection unit 117 in addition to the magnetic sensor 100 of the first configuration example shown in FIG.

  The first sub magnetic flux concentrator member 116 is connected to the negative end of the second magnetic flux concentrator member 112 in the second direction and extends in the first direction. The first sub magnetic flux concentrator member 116 may extend in the first direction so as to overlap the second magnetic detection unit 220 and the third magnetic detection unit 230 when viewed from the second direction. The first sub magnetic flux concentrator member 116 may extend on the negative side in the first direction to the extent that it does not reach the first magnetic detector 210 when viewed from the second direction. In other words, the first sub magnetic flux concentrator member 116 projects more negatively in the first direction than the second magnetic flux concentrator member 112 when viewed from the second direction.

  The first sub magnetic flux concentrator member 116 may extend on the positive side in the first direction to the extent that it does not exceed the fourth magnetic flux concentrator member 114. The first sub magnetic flux concentrator member 116 may be formed to have substantially the same thickness as the second magnetic flux concentrator member 112 in the Z-axis direction. The first sub magnetic flux concentrator member 116 may be formed of substantially the same material as the second magnetic flux concentrator member 112.

  The second sub magnetic flux concentrator member 117 is connected to the positive end of the third magnetic flux concentrator member 113 in the second direction and extends in the first direction. The second sub magnetic flux concentrator member 117 may extend in the first direction to the extent that it overlaps the first magnetic detection unit 210 when viewed from the second direction. The second sub magnetic flux concentrating member 117 may extend on the positive side in the first direction to the extent that it does not reach the third magnetic detection unit 230 when viewed from the second direction.

  The second sub magnetic flux concentrator member 117 may extend on the negative side in the first direction to the extent that it does not exceed the first magnetic flux concentrator member 111. That is, the second sub magnetic flux concentrator member 117 protrudes more negatively in the first direction than the third magnetic flux concentrator member 113 when viewed from the second direction. The second sub magnetic flux concentrator member 117 may be formed to have substantially the same thickness as the third magnetic flux concentrator member 113 in the Z-axis direction. Further, the second sub magnetic flux concentrator member 117 may be formed of substantially the same material as the third magnetic flux concentrator member 113. The first sub magnetic flux concentrator member 116 and the second sub magnetic flux concentrator member 117 may be formed in substantially the same shape.

When the magnetic field _BY is applied in the + Y-axis direction of the magnetic sensor 100 as described above, as described in FIG. 6, the third magnetic focusing member 113 protruding in the −Y-axis direction is the third magnetic focusing member 113. The magnetic field in the space near is converged. The fourth magnetic flux concentrator member 114 converges the magnetic field in the vicinity of the fourth magnetic flux concentrator member 114 and converges it to the third magnetic flux concentrator member 113. Then, the magnetic field converged on the third magnetic flux concentrator member 113 is emitted from the third magnetic flux convergent member 113 in the −X axis direction and the + X axis direction.

  Here, the first sub magnetic flux concentrator member 116 converges by attracting a part of the magnetic field that converges to the end of the third magnetic detector 230 on the −Y axis direction side. Further, the second sub magnetic flux concentrator member 117 converges a part of the magnetic field that converges to the end portion on the + Y axis direction side of the first magnetic detector 210 to the first magnetic flux concentrator member 111 and the second magnetic flux concentrator member 112. Let As described above, the magnetic sensor 100 according to the sixteenth configuration example includes the first sub magnetic focusing member 116 and the second sub magnetic focusing member 117, and thus the magnetic field emitted from the third magnetic focusing member 113 in the + X-axis direction. Is prevented from concentrating on the + Y-axis direction end of the first magnetic detection unit 210 and the −Y-axis direction end of the third magnetic detection unit 230.

  FIG. 47 shows a schematic configuration example of a change in magnetic amplification factor with respect to the position in the Y direction of the first magnetic detection unit 210 according to the present embodiment. The horizontal axis in FIG. 47 corresponds to the position in the Y direction of the first magnetic detector 210 shown in FIG. More specifically, when the length of the first magnetic detection unit 210 is R1, the position in the Y direction is indicated by a range from 0 to R1. 47, as an example, on the horizontal axis in FIG. 46, the position of the end on the + Y direction side of the first magnetic detection unit 210 is the origin side, and the position of the end on the −Y direction side of the first magnetic detection unit 210 is + Y. The position is R1 away from the position on the direction side toward the + side.

  In addition, the vertical axis in FIG. 47 indicates the magnetic gain. The magnetic amplification factor is an example of a value obtained by magnetic field numerical analysis or the like. 47 shows the magnetic amplification factor of the first magnetic detection unit 210 included in the magnetic sensor 100 of the first configuration example shown in FIG. 1 by a solid line. 47 shows the magnetic amplification factor of the first magnetic detection unit 210 included in the magnetic sensor 100 of the sixteenth configuration example described in FIG. 46 by a dotted line. That is, FIG. 47 shows an example of a comparison result between the magnetic sensor 100 of the first configuration example described in FIG. 1 and the magnetic sensor 100 of the sixteenth configuration example described in FIG.

  47, for example, the magnetic sensor 100 of the sixteenth configuration example reduces the magnetic amplification factor on the + Y direction side of the first magnetic detection unit 210 as compared to the magnetic sensor 100 of the first configuration example. Further, the magnetic sensor 100 of the sixteenth configuration example increases the magnetic amplification factor in the vicinity of the end portion on the −Y direction side of the first magnetic detection unit 210 as compared with the magnetic sensor 100 of the first configuration example. That is, the magnetic sensor 100 of the sixteenth configuration example can prevent the magnetic gain of the first magnetic detection unit 210 from locally increasing. 47 shows an example of the change in the magnetic amplification factor of the first magnetic detection unit 210, the magnetic sensor 100 of the sixteenth configuration example includes the second magnetic detection unit 220 and the third magnetic detection unit 230. Similarly, the magnetic gain can be prevented from locally increasing.

  FIG. 48 shows a seventeenth configuration example of the magnetic sensor 100 according to the present embodiment. In the magnetic sensor 100 shown in FIG. 48, substantially the same operations as those of the magnetic sensor 100 of the second configuration example shown in FIG.

  The magnetic sensor 100 according to the seventeenth configuration example includes one first magnetic detection unit 10 as with the magnetic sensor 100 according to the second configuration example. The magnetic sensor 100 of the seventeenth configuration example is similar to the magnetic sensor 100 of the second configuration example shown in FIG. 13 in that the first sub magnetic convergence member 116, the second sub magnetic detection unit 117, and the third sub magnetic convergence. And a member 118. Here, the operations of the first sub magnetic flux concentrating member 116 and the second sub magnetic flux sensing unit 117 may be substantially the same as the operations of the sub magnetic flux converging member described in FIGS. 46 and 47, and the description thereof is omitted here. To do.

  The third sub magnetic flux concentrator member 118 is connected to the positive end of the fifth magnetic flux concentrator member 115 in the second direction and extends in the first direction. The third sub magnetic flux concentrator member 118 may extend in the first direction to the extent that it overlaps the fourth magnetic detector 240 as viewed from the second direction. The third sub magnetic flux concentrator member 118 may extend on the negative side in the first direction to the extent that it does not reach the second magnetic detection unit 220 when viewed from the second direction. That is, the third sub magnetic flux concentrator member 118 protrudes more negatively in the first direction than the fifth magnetic flux concentrator member 115 when viewed from the second direction.

  The third sub magnetic flux concentrator member 118 may extend on the positive side in the first direction so as to protrude from the fifth magnetic flux concentrator member 115. The third sub magnetic flux concentrator member 118 may be formed to have substantially the same thickness as the fifth magnetic flux concentrator member 115 in the Z-axis direction. The third sub magnetic flux concentrator member 118 may be formed of substantially the same material as the fifth magnetic flux concentrator member 115. In addition, the first sub magnetic flux concentrator member 116, the second sub magnetic flux concentrator member 117, and the third sub magnetic flux concentrator member 118 may be formed in substantially the same shape. In this case, the first sub-magnetic focusing member 116, the second sub-magnetic focusing member 117, and the third sub-magnetic focusing member 118 are line symmetric with respect to the middle line parallel to the Y-axis direction of the second magnetic focusing member 112. It is preferable to arrange | position.

When the magnetic field _BY is applied in the + Y-axis direction of such a magnetic sensor 100, the magnetic field _BY is protruded in the −Y-axis direction as in the case of the magnetic sensor 100 of the second configuration example. The first and second magnetic flux concentrator members 113 and 115 are respectively converged to 120. The magnetic field converged on the third magnetic converging member 113 is emitted from the third magnetic converging member 113 in the + X axis direction. The magnetic field emitted from the third magnetic focusing member 113 in the + X-axis direction passes through the first magnetic detection unit 210 and the third magnetic detection unit 230 between the second magnetic focusing member 112 and the third magnetic focusing member 113. And captured by the second magnetic flux concentrator member 112.

  Here, the magnetic sensor 100 of the seventeenth configuration example includes the first sub magnetic focusing member 116 and the second sub magnetic focusing member 117, similarly to the magnetic sensor 100 of the sixteenth configuration example. The magnetic field emitted from the member 113 in the + X-axis direction is prevented from concentrating on the + Y-axis direction end of the first magnetic detection unit 210 and the −Y-axis direction end of the third magnetic detection unit 230. .

  Further, the magnetic field focused on the fifth magnetic flux concentrator member 115 is emitted from the fifth magnetic flux concentrator member 115 in the −X axis direction. The magnetic field emitted from the fifth magnetic focusing member 115 in the −X-axis direction is generated between the second magnetic detection member 240 and the second magnetic detection unit 220 between the second magnetic focusing member 112 and the fifth magnetic focusing member 115. It passes through and is captured by the second magnetic flux concentrator member 112. The magnetic field captured by the second magnetic focusing member 112 is emitted through the first magnetic focusing member 111 connected to the second magnetic focusing member 112.

  Here, the first sub magnetic flux concentrator member 116 and the third sub magnetic flux concentrator member 118 are the ends of the magnetic detection unit in the Y-axis direction, similarly to the operations of the first sub magnetic flux concentrator member 116 and the second sub magnetic flux convergent member 117. A part of the magnetic field that converges to the part is drawn and converged. That is, since the magnetic sensor 100 of the seventeenth configuration example includes the first sub magnetic focusing member 116 and the third sub magnetic focusing member 118, the magnetic field emitted from the fifth magnetic focusing member 115 in the −X-axis direction. Concentration at the + Y-axis direction end of the fourth magnetic detection unit 240 and the −Y-axis direction end of the second magnetic detection unit 220 is prevented. Therefore, the magnetic sensor 100 of the seventeenth configuration example can prevent the magnetic amplification factor of the magnetic detection unit from locally increasing.

  FIG. 49 shows an eighteenth configuration example of the magnetic sensor 100 according to the present embodiment. In the magnetic sensor 100 shown in FIG. 49, substantially the same operations as those of the magnetic sensor 100 of the fifteenth configuration example shown in FIG.

  Similarly to the magnetic sensor 100 of the fifteenth configuration example, the magnetic sensor 100 of the eighteenth configuration example is similar to the magnetic sensor 100 of the first configuration example shown in FIG. An arrangement pattern excluding the magnetic detection unit 230 is shown. The magnetic sensor 100 of the eighteenth configuration example further includes a first sub magnetic flux concentrating member 116 in addition to the magnetic sensor 100 of the fifteenth configuration example shown in FIG. The operation of the first sub magnetic flux concentrator member 116 may be substantially the same as the operation described with reference to FIGS. 46 and 47, and the description thereof is omitted here.

The magnetic sensor 100 according to the eighteenth configuration example senses a magnetic field in the X-axis direction, like the magnetic sensor 100 according to the fifteenth configuration example. That, + Y-axis direction when the magnetic field B _Y is given, the first magnetic detection unit 210 senses the magnetic field of the + X-axis direction. The second magnetic detector 220 detects a magnetic field in the −X axis direction. The first sub magnetic flux concentrator member 116 prevents the magnetic field traveling in the X-axis direction from concentrating on the −Y-axis direction side ends of the first magnetic detection unit 210 and the second magnetic detection unit 220.

  The example in which the magnetic sensor 100 according to the fifteenth to eighteenth configuration examples according to the present embodiment includes one first magnetic detection unit 10 has been described. The magnetic sensor 100 is not limited to this, and may include two or more magnetic detection units 10, and in this case, may include a plurality of types of magnetic detection units 10.

  As mentioned above, although this invention was demonstrated using embodiment, the technical scope of this invention is not limited to the range as described in the said embodiment. It will be apparent to those skilled in the art that various modifications or improvements can be added to the above-described embodiment. It is apparent from the scope of the claims that the embodiments added with such changes or improvements can be included in the technical scope of the present invention.

The claims, the description, and an apparatus, operation of the system, programs, and methods, procedures, steps, and the execution order of the processes in the steps or the like, particular "earlier", "prior to It should be noted that the output can be realized in any order unless the output of the previous process is used in the subsequent process. The claims, the description, and the process flow in the drawing, for convenience "first" or "next", etc. even when described using means it is essential to implement in this order It is not a thing. According to the present specification, matters described in the following items are also disclosed.
[Item 1]
A magnetic sensor including a first magnetic detection unit,
The first magnetic detection unit includes:
A first magnetic flux concentrating member extending in a first direction and a first magnetic converging member connected to an end of the first magnetic converging member on the positive side in the first direction and extending in a negative direction in a second direction different from the first direction. A first magnetic converging unit having two magnetic converging members;
The first magnetic focusing member is closer to the positive side in the first direction than the negative side end in the first direction, the first magnetic focusing member is closer to the negative side in the first direction than the second magnetic focusing member, and the first A third magnetic converging member that is closer to the negative side in the second direction than the magnetic converging member and extends to the negative side in the second direction from the negative end of the second magnetic converging member in the second direction. And connected to the negative side end of the third magnetic flux concentrator member in the second direction, and more positive in the first direction than the positive side end of the first magnetic flux concentrator member in the first direction. A second magnetic converging part having a fourth magnetic converging member that extends,
A first magnetic detection unit disposed between the second magnetic focusing member and the third magnetic focusing member and extending in a second direction;
A second magnetic detector disposed closer to the positive side of the first direction than the second magnetic flux concentrating member and extending in the second direction;
A magnetic sensor comprising:
[Item 2]
The first magnetic detection unit includes:
A third magnetic detection unit disposed between the second magnetic focusing member and the third magnetic focusing member;
The first magnetic detection unit has a smaller distance to the third magnetic focusing member than the second magnetic focusing member,
The magnetic sensor according to item 1, wherein the third magnetic detection unit has a smaller distance to the second magnetic focusing member than the third magnetic focusing member.
[Item 3]
The first magnetic detection unit includes:
A first sub magnetic flux concentrator member connected to a negative end of the second magnetic flux concentrator member in the second direction and extending in the first direction;
The magnetic sensor according to item 1 or 2, further comprising: a second sub magnetic flux concentrator member connected to an end portion on the positive side in the second direction of the third magnetic flux concentrator member and extending in the first direction.
[Item 4]
The second magnetic convergence part is
A fifth magnetic flux concentrator member connected to an end of the fourth magnetic flux concentrator member on the positive side in the first direction and extending to the positive side in the second direction;
The magnetic sensor according to item 2 or 3, wherein the second magnetic detection unit is disposed between the second magnetic focusing member and the fifth magnetic focusing member.
[Item 5]
The first magnetic detection unit includes:
A fourth magnetic detector disposed between the second magnetic flux concentrator member and the fifth magnetic flux concentrator member;
The second magnetic detection unit has a smaller distance to the second magnetic focusing member than the fifth magnetic focusing member,
The magnetic sensor according to item 4, wherein the fourth magnetic detection unit has a smaller distance to the fifth magnetic focusing member than the second magnetic focusing member.
[Item 6]
Item 6. The item 5, wherein the first magnetic detection unit further includes a third sub magnetic flux concentrator member that is connected to an end portion on the positive side in the second direction of the fifth magnetic flux concentrator member and extends in the first direction. Magnetic sensor.
[Item 7]
The second magnetic end member is arranged so as to be substantially mirror image with the first magnetic detection unit with respect to a surface substantially perpendicular to the first direction at the negative end of the first direction of the first magnetic flux concentrating member. Item 5. The magnetic sensor according to any one of items 1 to 4, further comprising a magnetic detection unit.
[Item 8]
The second magnetic end member is arranged so as to be substantially mirror image with the first magnetic detection unit with respect to a surface substantially perpendicular to the first direction at the negative end of the first direction of the first magnetic flux concentrating member. Item 7. The magnetic sensor according to item 5 or 6, further comprising a magnetic detection unit.
[Item 9]
Arranged to be a substantially mirror image of the first magnetic sensing unit with respect to the first magnetic flux concentrating member or a surface substantially perpendicular to the second direction on the positive side of the second direction with respect to the first magnetic flux concentrating member. Item 7. The magnetic sensor according to item 5 or 6, further comprising a second magnetic detection unit.
[Item 10]
Second magnetic detection arranged so as to be a substantially mirror image with the first magnetic detection unit with respect to a surface substantially perpendicular to the first direction on the positive side of the first direction with respect to the fifth magnetic convergence member. Item 7. The magnetic sensor according to item 5 or 6, further comprising a unit.
[Item 11]
Arranged to be a substantially mirror image of the first magnetic detection unit with respect to the fourth magnetic flux concentrator member or a surface that is on the negative side of the second direction relative to the fourth magnetic flux concentrator member and substantially perpendicular to the second direction. Item 7. The magnetic sensor according to item 5 or 6, further comprising a second magnetic detection unit.
[Item 12]
In each magnetic converging member to which the first magnetic detection unit and the second magnetic detection unit are connected, the surface substantially perpendicular to the second direction, or on the positive side in the second direction from each magnetic converging member A third magnetic detection unit arranged to be substantially mirror image with the first magnetic detection unit, and a substantially mirror image to the second magnetic detection unit with respect to a surface substantially orthogonal to the second direction. The magnetic sensor according to item 8, further comprising a fourth magnetic detection unit.
[Item 13]
The first magnetic detection unit and the second magnetic detection unit are arranged so as to be substantially mirror images of the first magnetic detection unit with respect to a plane substantially perpendicular to the first direction on the positive side of the first direction. The magnetic sensor according to item 9, further comprising: a third magnetic detection unit that is arranged, and a fourth magnetic detection unit that is arranged to be substantially mirror image of the second magnetic detection unit.
[Item 14]
In the negative magnetic flux concentrating member in the second direction of the first magnetic detection unit and the second magnetic detection unit, a surface substantially orthogonal to the second direction, or the first magnetic detection unit and the second magnetic detection member. A third magnetic detection unit disposed so as to be substantially a mirror image of the first magnetic detection unit with respect to a surface substantially orthogonal to the second direction on the negative side of the second direction from the detection unit; The magnetic sensor according to item 8, further comprising a second magnetic detection unit and a fourth magnetic detection unit arranged to be substantially mirror images.
[Item 15]
In the negative magnetic flux concentrating member in the second direction of the first magnetic detection unit and the second magnetic detection unit, a surface substantially orthogonal to the second direction, or the first magnetic detection unit and the second magnetic detection member. A third magnetic detection unit disposed so as to be substantially a mirror image of the first magnetic detection unit with respect to a surface substantially orthogonal to the second direction on the negative side of the second direction from the detection unit; The magnetic sensor according to item 10, further comprising a second magnetic detection unit and a fourth magnetic detection unit arranged so as to be a substantially mirror image.
[Item 16]
The magnetic sensor according to any one of items 12 to 15, wherein each of the magnetic detection units in the first to fourth magnetic detection units forms a Wheatstone bridge.
[Item 17]
The magnetic sensor according to any one of items 12 to 16, comprising a plurality of the first to fourth magnetic detection units.
[Item 18]
The magnetic sensor according to any one of items 8 to 11, further comprising an auxiliary magnetic flux concentrating member disposed outside the first and second magnetic detection units.
[Item 19]
Item 18. The magnetic sensor according to any one of Items 12 to 17, further comprising an auxiliary magnetic flux concentrating member disposed outside the first and fourth magnetic detection units.
[Item 20]
20. The magnetic sensor according to item 18 or 19, wherein the auxiliary magnetic flux concentrator member is disposed outside the first direction.
[Item 21]
Any of items 8 to 11, further comprising a calculation unit that calculates the magnetic field component in the first direction and the magnetic field component in the second direction based on the output of each magnetic detection unit in the first and second magnetic detection units. A magnetic sensor according to claim 1.
[Item 22]
The calculation unit includes:
The magnetic sensor according to item 21, wherein a magnetic field component in a third direction different from the first and second directions is further calculated based on outputs of the magnetic detection units in the first and second magnetic detection units.
[Item 23]
Items 12 to 17, 19 further comprising a calculation unit that calculates the magnetic field component in the first direction and the magnetic field component in the second direction based on the output of each magnetic detection unit in the first to fourth magnetic detection units. The magnetic sensor as described in any one of these.
[Item 24]
The calculation unit includes:
24. The magnetic sensor according to item 23, further calculating a magnetic field component in a third direction different from the first and second directions based on outputs of the magnetic detection units in the first to fourth magnetic detection units.
[Item 25]
The calculation unit includes:
The magnetic sensor according to any one of items 21 to 24, wherein each magnetic field component is calculated by linearly combining outputs of the magnetic detection units.
[Item 26]
A magnetic sensor including a first magnetic detection unit,
The first magnetic detection unit includes:
When a magnetic field component is input in the first direction, the magnetic field component is converted into a first magnetic field component in the first direction and a second magnetic field component in a direction opposite to the first direction, and the first direction and A magnetic field direction conversion unit that converts a magnetic field component into a third magnetic field component in the first direction and a fourth magnetic field component in a direction opposite to the first direction when magnetic field components are input in different second directions; ,
A first magnetic detection unit that detects one of the first and second magnetic field components and one of the third and fourth magnetic field components;
A second magnetic detector for detecting the other of the first and second magnetic field components and the other of the third and fourth magnetic field components;
A magnetic sensor comprising:
[Item 27]
The magnetic field direction changing unit;
A third magnetic detector for detecting the other of the first and second magnetic field components and the one of the third and fourth magnetic field components;
A fourth magnetic detector for detecting the one of the first and second magnetic field components and the other of the third and fourth magnetic field components;
27. The magnetic sensor according to item 26, further comprising a second magnetic detection unit comprising:
[Item 28]
28. The magnetic sensor according to item 27, comprising a plurality of the first and second magnetic detection units.
[Item 29]
Item 27 or further comprising a calculation unit that calculates the magnetic field component in the first direction and the magnetic field component in the second direction based on outputs of the magnetic detection units in the plurality of first and second magnetic detection units. 28. The magnetic sensor according to 28.
[Item 30]
The magnetic field direction conversion unit
When a magnetic field component is input in a third direction different from the first and second directions, the magnetic field component is converted into fifth and sixth magnetic field components in the first direction and seventh and reverse directions in the first direction. Respectively converted into the eighth magnetic field component,
The first magnetic detection unit further detects one of the fifth and seventh magnetic field components,
The second magnetic detection unit further detects one of the sixth and eighth magnetic field components,
The first magnetic detection unit includes:
A fifth magnetic detector for detecting the one of the first and second magnetic field components, the one of the third and fourth magnetic field components, and the other of the fifth and seventh magnetic field components; ,
A sixth magnetic detector for detecting the other of the first and second magnetic field components, the other of the third and fourth magnetic field components, and the other of the sixth and eighth magnetic field components. When,
Item 30. The magnetic sensor according to Item 29, further comprising:
[Item 31]
The third magnetic detection unit further detects the one of the fifth and seventh magnetic field components,
The fourth magnetic detection unit further detects the one of the sixth and eighth magnetic field components,
The second magnetic detection unit includes:
Seventh magnetism for detecting the other of the first and second magnetic field components, the one of the third and fourth magnetic field components, and the other of the fifth and seventh magnetic field components. A detection unit;
Eighth magnetic detection for detecting the one of the first and second magnetic field components, the other of the third and fourth magnetic field components, and the other of the sixth and eighth magnetic field components. And
Item 31. The magnetic sensor according to Item 30, further comprising:
[Item 32]
The calculation unit includes:
32. The magnetic sensor according to item 31, further calculating a magnetic field component in the third direction based on outputs of the magnetic detection units in the plurality of first and second magnetic detection units.
[Item 33]
The calculation unit includes:
The magnetic sensor according to any one of items 29 to 32, wherein each magnetic field component is calculated by linearly combining outputs of the magnetic detection units.
[Item 34]
34. The magnetic sensor according to any one of items 1 to 33, wherein the first direction and the second direction are orthogonal to each other.
[Item 35]
The magnetic sensor according to any one of Items 22, 24, and 30 to 32, wherein the first to third directions are orthogonal to each other.
[Item 36]
A first magnetic flux concentrator member extending in a first direction;
A second magnetic focusing member connected to an end of the first magnetic focusing member and extending in a second direction different from the first direction;
A first magnetic detector disposed near the negative side of the first direction of the second magnetic flux concentrator member;
A second magnetic detector disposed near the positive side of the first direction of the second magnetic flux concentrator member;
A magnetic sensor comprising:
[Item 37]
37. The magnetic sensor according to item 36, further comprising a first sub magnetic flux concentrator member that is connected to the negative end of the second magnetic flux concentrator member in the second direction and extends in the first direction.

DESCRIPTION OF SYMBOLS 10 Magnetic detection unit, 20 board | substrate, 22 board | substrate plane, 30 insulating layer, 32 1st plane, 34 2nd plane, 40 arrangement pattern, 50 auxiliary arrangement pattern, 100 magnetic sensor, 110 magnetic convergence part, 111-115 magnetic convergence member , 116 to 118 Sub magnetic convergence member, 120 Magnetic convergence unit, 130 Wiring unit, 210 to 240 Magnetic detection unit, 300 Calculation unit, 310, 312, 314 Constant current source, 320 Signal acquisition unit, 330 Calculation unit, 340 Addition / subtraction unit

Claims (35)

A magnetic sensor including a first magnetic detection unit,
The first magnetic detection unit includes:
A first magnetic flux concentrating member extending in a first direction and a first magnetic converging member connected to an end of the first magnetic converging member on the positive side in the first direction and extending in a negative direction in a second direction different from the first direction. A first magnetic converging unit having two magnetic converging members;
The first magnetic focusing member is closer to the positive side in the first direction than the negative side end in the first direction, the first magnetic focusing member is closer to the negative side in the first direction than the second magnetic focusing member, and the first A third magnetic converging member that is closer to the negative side in the second direction than the magnetic converging member and extends to the negative side in the second direction from the negative end of the second magnetic converging member in the second direction. And connected to the negative side end of the third magnetic flux concentrator member in the second direction, and more positive in the first direction than the positive side end of the first magnetic flux concentrator member in the first direction. A second magnetic converging part having a fourth magnetic converging member that extends,
A first magnetic detection unit disposed between the second magnetic focusing member and the third magnetic focusing member and extending in a second direction;
A second magnetic detector disposed closer to the positive side of the first direction than the second magnetic flux concentrating member and extending in the second direction;
A magnetic sensor comprising: The first magnetic detection unit includes:
A third magnetic detection unit disposed between the second magnetic focusing member and the third magnetic focusing member;
The first magnetic detection unit has a smaller distance to the third magnetic focusing member than the second magnetic focusing member,
The magnetic sensor according to claim 1, wherein the third magnetic detection unit has a smaller distance to the second magnetic focusing member than the third magnetic focusing member. The first magnetic detection unit includes:
A first sub magnetic flux concentrator member connected to a negative end of the second magnetic flux concentrator member in the second direction and extending in the first direction;
3. The magnetic sensor according to claim 1, further comprising: a second sub magnetic flux concentrating member that is connected to an end portion on the positive side in the second direction of the third magnetic flux concentrating member and extends in the first direction. . The second magnetic convergence part is
A fifth magnetic flux concentrator member connected to an end of the fourth magnetic flux concentrator member on the positive side in the first direction and extending to the positive side in the second direction;
4. The magnetic sensor according to claim 2, wherein the second magnetic detection unit is disposed between the second magnetic focusing member and the fifth magnetic focusing member. The first magnetic detection unit includes:
A fourth magnetic detector disposed between the second magnetic flux concentrator member and the fifth magnetic flux concentrator member;
The second magnetic detection unit has a smaller distance to the second magnetic focusing member than the fifth magnetic focusing member,
5. The magnetic sensor according to claim 4, wherein the fourth magnetic detection unit has a distance to the fifth magnetic focusing member smaller than that of the second magnetic focusing member.   The first magnetic detection unit further includes a third sub magnetic flux concentrator member that is connected to an end portion on the positive side in the second direction of the fifth magnetic flux concentrator member and extends in the first direction. The magnetic sensor described.   The second magnetic end member is arranged so as to be substantially mirror image with the first magnetic detection unit with respect to a surface substantially perpendicular to the first direction at the negative end of the first direction of the first magnetic flux concentrating member. The magnetic sensor according to claim 1, further comprising a magnetic detection unit.   The second magnetic end member is arranged so as to be substantially mirror image with the first magnetic detection unit with respect to a surface substantially perpendicular to the first direction at the negative end of the first direction of the first magnetic flux concentrating member. The magnetic sensor according to claim 5, further comprising a magnetic detection unit.   Arranged to be a substantially mirror image of the first magnetic sensing unit with respect to the first magnetic flux concentrating member or a surface substantially perpendicular to the second direction on the positive side of the second direction with respect to the first magnetic flux concentrating member. The magnetic sensor according to claim 5, further comprising a second magnetic detection unit.   Second magnetic detection arranged so as to be a substantially mirror image with the first magnetic detection unit with respect to a surface substantially perpendicular to the first direction on the positive side of the first direction with respect to the fifth magnetic convergence member. The magnetic sensor according to claim 5, further comprising a unit.   Arranged to be a substantially mirror image of the first magnetic detection unit with respect to the fourth magnetic flux concentrator member or a surface that is on the negative side of the second direction relative to the fourth magnetic flux concentrator member and substantially perpendicular to the second direction. The magnetic sensor according to claim 5, further comprising a second magnetic detection unit.   In each magnetic converging member to which the first magnetic detection unit and the second magnetic detection unit are connected, the surface substantially perpendicular to the second direction, or on the positive side in the second direction from each magnetic converging member A third magnetic detection unit arranged to be substantially mirror image with the first magnetic detection unit, and a substantially mirror image to the second magnetic detection unit with respect to a surface substantially orthogonal to the second direction. The magnetic sensor according to claim 8, further comprising a fourth magnetic detection unit.   The first magnetic detection unit and the second magnetic detection unit are arranged so as to be substantially mirror images of the first magnetic detection unit with respect to a plane substantially perpendicular to the first direction on the positive side of the first direction. The magnetic sensor according to claim 9, further comprising: a third magnetic detection unit that is arranged, and a fourth magnetic detection unit that is arranged so as to be a substantially mirror image of the second magnetic detection unit.   In the negative magnetic flux concentrating member in the second direction of the first magnetic detection unit and the second magnetic detection unit, a surface substantially orthogonal to the second direction, or the first magnetic detection unit and the second magnetic detection member. A third magnetic detection unit disposed so as to be substantially a mirror image of the first magnetic detection unit with respect to a surface substantially orthogonal to the second direction on the negative side of the second direction from the detection unit; The magnetic sensor according to claim 8, further comprising a second magnetic detection unit and a fourth magnetic detection unit arranged to be substantially mirror images.   In the negative magnetic flux concentrating member in the second direction of the first magnetic detection unit and the second magnetic detection unit, a surface substantially orthogonal to the second direction, or the first magnetic detection unit and the second magnetic detection member. A third magnetic detection unit disposed so as to be substantially a mirror image of the first magnetic detection unit with respect to a surface substantially orthogonal to the second direction on the negative side of the second direction from the detection unit; The magnetic sensor according to claim 10, further comprising a second magnetic detection unit and a fourth magnetic detection unit arranged to be substantially mirror images.   The magnetic sensor according to claim 12, wherein each of the magnetic detection units in the first to fourth magnetic detection units forms a Wheatstone bridge.   The magnetic sensor according to claim 12, comprising a plurality of the first to fourth magnetic detection units.   The magnetic sensor according to any one of claims 8 to 11, further comprising an auxiliary magnetic flux concentrator member disposed outside the first and second magnetic detection units.   The magnetic sensor according to any one of claims 12 to 17, further comprising an auxiliary magnetic flux concentrator member disposed outside the first and fourth magnetic detection units.   The magnetic sensor according to claim 18 or 19, wherein the auxiliary magnetic flux concentrator member is disposed outside the first direction.   12. The calculation unit according to claim 8, further comprising a calculation unit configured to calculate the magnetic field component in the first direction and the magnetic field component in the second direction based on outputs of the magnetic detection units in the first and second magnetic detection units. The magnetic sensor as described in any one. The calculation unit includes:
The magnetic sensor according to claim 21, wherein a magnetic field component in a third direction different from the first and second directions is further calculated based on an output of each magnetic detection unit in the first and second magnetic detection units.   The calculation part which calculates the magnetic field component of the 1st direction and the magnetic field component of the 2nd direction further based on the output of each magnetic detection part in the 1st-the 4th magnetic detection unit, The 17th to 17th, The magnetic sensor according to any one of 19. The calculation unit includes:
24. The magnetic sensor according to claim 23, further calculating a magnetic field component in a third direction different from the first and second directions based on an output of each magnetic detection unit in the first to fourth magnetic detection units. The calculation unit includes:
The magnetic sensor according to any one of claims 21 to 24, wherein each magnetic field component is calculated by linearly combining outputs of the magnetic detection units. A magnetic sensor including a first magnetic detection unit,
The first magnetic detection unit includes:
When a magnetic field component is input in the first direction, the magnetic field component is converted into a first magnetic field component in the first direction and a second magnetic field component in a direction opposite to the first direction, and the first direction and A magnetic field direction conversion unit that converts a magnetic field component into a third magnetic field component in the first direction and a fourth magnetic field component in a direction opposite to the first direction when magnetic field components are input in different second directions; ,
A first magnetic detection unit that detects one of the first and second magnetic field components and one of the third and fourth magnetic field components;
A second magnetic detector for detecting the other of the first and second magnetic field components and the other of the third and fourth magnetic field components;
A magnetic sensor comprising: The magnetic field direction changing unit;
A third magnetic detector for detecting the other of the first and second magnetic field components and the one of the third and fourth magnetic field components;
A fourth magnetic detector for detecting the one of the first and second magnetic field components and the other of the third and fourth magnetic field components;
The magnetic sensor according to claim 26, further comprising a second magnetic detection unit comprising:   The magnetic sensor according to claim 27, comprising a plurality of the first and second magnetic detection units. Before SL based on the output of the magnetic detection unit in the first and second magnetic detection unit, further comprising a calculation unit for the first direction of the magnetic field component is calculated and said second direction of the magnetic field component according to claim 27 or 28 The magnetic sensor described in 1. The magnetic field direction conversion unit
When a magnetic field component is input in a third direction different from the first and second directions, the magnetic field component is converted into fifth and sixth magnetic field components in the first direction and seventh and reverse directions in the first direction. Respectively converted into the eighth magnetic field component,
The first magnetic detection unit further detects one of the fifth and seventh magnetic field components,
The second magnetic detection unit further detects one of the sixth and eighth magnetic field components,
The first magnetic detection unit includes:
A fifth magnetic detector for detecting the one of the first and second magnetic field components, the one of the third and fourth magnetic field components, and the other of the fifth and seventh magnetic field components; ,
A sixth magnetic detector for detecting the other of the first and second magnetic field components, the other of the third and fourth magnetic field components, and the other of the sixth and eighth magnetic field components. When,
The magnetic sensor according to claim 29, further comprising: The third magnetic detection unit further detects the one of the fifth and seventh magnetic field components,
The fourth magnetic detection unit further detects the one of the sixth and eighth magnetic field components,
The second magnetic detection unit includes:
Seventh magnetism for detecting the other of the first and second magnetic field components, the one of the third and fourth magnetic field components, and the other of the fifth and seventh magnetic field components. A detection unit;
Eighth magnetic detection for detecting the one of the first and second magnetic field components, the other of the third and fourth magnetic field components, and the other of the sixth and eighth magnetic field components. And
The magnetic sensor according to claim 30, further comprising: The calculation unit includes:
32. The magnetic sensor according to claim 31, further calculating a magnetic field component in the third direction based on outputs of the magnetic detection units in the plurality of first and second magnetic detection units. The calculation unit includes:
The magnetic sensor according to any one of claims 29 to 32, wherein each magnetic field component is calculated by linearly combining outputs of the magnetic detection units.   The magnetic sensor according to any one of claims 1 to 33, wherein the first direction and the second direction are orthogonal to each other.   The magnetic sensor according to any one of claims 22, 24, and 30 to 32, wherein the first to third directions are orthogonal to each other.

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