JP6441701B2 - Fluid rectifier - Google Patents

Description

  The present invention relates to a fluid rectifying member using a fiber-reinforced ceramic composite material.

Since the fiber reinforced ceramic composite material has heat resistance, strength, and toughness, it is used in various fields.
As a use of the fiber reinforced ceramic composite material, it is used as a fluid rectifying member for high-temperature and high-speed fluid by utilizing high heat resistance and strength.
The fiber reinforced ceramic composite material is a material obtained by adding ceramic fibers as an aggregate to a base material (matrix) made of ceramic. Although ceramic as a base material has heat resistance and strength, it is a brittle material due to the characteristics of a ceramic material having a high elastic modulus. The fiber reinforced ceramic composite material is a material in which brittleness, which is a weak point of a ceramic base material, is improved by further combining ceramic fibers.

Patent Document 1 describes a carbon component made of a carbon fiber reinforced carbon composite material which is one of fiber reinforced ceramic composite materials. This carbon component is a carbon component characterized by comprising a base material composed of a deposited layer in which carbon fibers are deposited in layers, and a coating layer composed of a high-purity and hard substance covering the surface of the base material. Specifically, a gas rectifying member for a semiconductor manufacturing apparatus is described.
This gas rectifying member is a member for rectifying the inert gas introduced through the introducing portion and reliably guiding it into the quartz crucible in the semiconductor manufacturing apparatus.

This carbon component is manufactured through a coating layer forming step of forming a coating layer made of pyrolytic carbon on the surface after suction molding a slurry in which carbon fibers are suspended in a liquid, drying, firing, and purification. Yes.
For this reason, since it has heat resistance, strength, and chemical stability and does not contain an element that becomes an impurity to the semiconductor, it is suitably used as a gas rectifying member for a semiconductor manufacturing apparatus. .

JP 2002-68851 A

  However, in the carbon component (fiber reinforced ceramic composite material) as described above, the fiber is deformed when thermal expansion or physical force is applied. If the fibers are used in bundles, the fibers may break if the degree of deformation exceeds the limit. If the fiber is thinned, the fiber is difficult to break, but the density of the fiber bundle increases and becomes unnecessarily heavy.

  In view of the above problems, an object of the present invention is to provide a fluid rectifying member having a structure with a sufficient surface strength while suppressing an increase in weight.

  The fluid rectifying member of the present invention for solving the above-mentioned problem is a fluid rectifying member having a cylindrical portion surrounding a central axis, and the cylindrical portion includes an inner ceramic fiber layer and an outermost ceramic layer. A ceramic matrix covering the support material, and the ceramic fiber layer is composed of strands in which a plurality of unit ceramic fibers are bundled, and the cross-sectional area of the unit ceramic fibers is The closer to the outermost ceramic fiber layer, the smaller.

The fluid rectifying member has a cylindrical portion surrounding the central axis. The cylindrical portion includes a support material composed of an inner ceramic fiber layer and an outermost ceramic fiber layer, and a ceramic matrix covering the support material.
The ceramic fiber layer is composed of a strand in which a plurality of unit ceramic fibers are bundled, and the unit ceramic fiber has a smaller cross-sectional area as it is closer to the outermost ceramic fiber layer. For this reason, since the strand is formed of unit ceramic fibers having a smaller cross-sectional area as it is closer to the outermost ceramic fiber layer, the outermost layer strand can be formed at a high density to ensure strength.
In addition, since the cross-sectional shape of the unit ceramic fiber is usually roundness enough to be regarded as a circle, it can be said that the cross-sectional area of the unit ceramic fiber is smaller as it is closer to the outermost layer.

As a result, the outermost ceramic fiber layer that is most prone to breakage in the vicinity of the fluid is formed with unit ceramic fibers having a small cross-sectional area, so that even if the strand is deformed, the unit ceramic fibers are not easily broken, and the fluid is less likely to break as a whole. A flow straightening member can be provided.
In addition, unit ceramic fibers having a small cross-sectional area by focusing on the outermost ceramic fiber layer can be used, and unit ceramic fibers having a larger cross-sectional area than the unit ceramic fibers of the outermost layer can be used in the ceramic fiber layers other than the outermost layer. Therefore, excessive weight increase can be suppressed.
The fluid flow refers to the case where the fluid moves relative to the fluid rectifying member. The case where the fluid flows relative to the fluid rectifying member and the case where the fluid rectifying member moves within the fluid. Including.

Furthermore, it is desirable that the fluid flow regulating member of the present invention has the following aspect.
(1) The unit ceramic fiber has the highest density in the outermost ceramic fiber layer.
Since the unit ceramic fibers have the highest density in the outermost ceramic fiber layer, the fluid rectifying member of the present invention can ensure the strength by forming the outermost strands at a high density.
Note that the high density of the unit ceramic fibers can be achieved by putting a large number of unit ceramic fibers having a small cross-sectional area in the same cross-sectional area so as to reduce the size between the axis lines of the unit ceramic fibers so as to be dense.

(2) The angle formed by the strands constituting the outermost ceramic fiber layer and the plane including the central axis is 80 to 90 degrees.
For this reason, in the fluid rectifying member of the present invention, when the angle formed between the plane including the central axis and the strands constituting the outermost ceramic fiber layer is 80 degrees to 90 degrees, the air flow smoothly along the strands. Can flow.
In addition, since the unevenness caused by the size of the cross-sectional area of the strand is stretched in the direction of the central axis by 1 / sin 20 times (2.92 times) or more, the turbulence of the fluid can be reduced and the resistance can be reduced. Thereby, the strength of the outermost ceramic fiber layer can be further increased.

(3) Both ends of the cylindrical portion along the central axis are open.
In the fluid rectifying member of the present invention, both end portions along the central axis of the cylindrical portion are open, so that the fluid can flow smoothly along the outer peripheral surface and the inner peripheral surface of the cylindrical portion. For this reason, the fluid rectifying member of the present invention can be used as a pipe for flowing a fluid therein, a flying body moving in the fluid, a propelling body, or the like.

(4) The cylindrical portion has a lid at at least one of both end portions along the central axis and is closed.
The fluid rectifying member of the present invention has a lid at at least one of both ends along the central axis of the cylindrical portion and is closed, so that the fluid flows smoothly along the outer peripheral surface of the cylindrical portion. be able to. For this reason, the flow regulating member for fluid of the present invention can be used as a flying object moving in the fluid.

(5) The other end surface contour shape of the cylindrical part is larger than the one end surface contour shape.
Since the cylindrical portion has a shape in which the other end surface contour shape is larger than the one end surface contour shape, the fluid flow regulating member of the present invention has a shape similar to, for example, a cone or a truncated cone. In such a shape, the cross-sectional area changes smoothly, so that the generation of vortex flow can be suppressed and the fluid flow can be made smooth. In this way, when the fluid flows along a shape in which the other end surface contour shape is larger than the one end surface contour shape, the flow velocity of the fluid differs between one and the other of the cylindrical portions, and the elastic fluid further has a density. Will also be different. For this reason, the inner surface or the outer surface of the cylindrical portion in contact with the fluid has a strong interaction with the fluid, and in particular, it is easy to generate fluid turbulence. Since the other end face contour shape is larger than the one end face contour shape, the cylindrical portion in the fluid rectifying member of the present invention can make it difficult to generate turbulence in the fluid flow. For this reason, the fluid rectifying member of the present invention can be suitably used as a flying body, a propelling body, or the like that moves in piping or fluid.

(6) The ceramic matrix is SiC.
Since SiC has high strength, the strength of the fluid rectifying member can be increased. Further, SiC is excellent in corrosion resistance and oxidation resistance, and by using SiC for the ceramic matrix, the fluid rectifying member can be suitably used even in a high temperature and corrosive atmosphere.

(7) The unit ceramic fiber is a SiC fiber.
Since SiC fiber has excellent corrosion resistance and oxidation resistance and high strength, even if the ceramic matrix is damaged in a corrosive atmosphere at high temperature by using SiC as the support material, the unit ceramic fiber will develop cracks. Can be stopped and used safely.

(8) The central axis is disposed in the fluid flow direction.
By disposing the central axis in the fluid flow direction, the cylindrical portion surrounding the central axis is also disposed in the fluid flow direction, so that the fluid flow is not disturbed.

  According to the present invention, since the cross-sectional area of the unit ceramic fiber forming the outermost ceramic fiber layer close to the fluid is small, even if the strand is deformed, the unit ceramic fiber is not easily broken and is not easily damaged as a whole. In the ceramic fiber layer other than the outermost layer, a strand having a larger cross-sectional area than the outermost layer strand can be used. Thereby, the fluid rectification | straightening member of a structure where the intensity | strength of surface is sufficient is suppressed by suppressing excessive weight increase.

(A) is process drawing which shows the winding process by the hoop winding of the strand in the manufacturing method of the fluid rectification member which concerns on this invention, (B) and (C) are the manufacturing method of the rectification member for fluids which concerns on this invention It is process drawing which shows the winding process by helical winding of the strand in (D), and (D) is process drawing which shows the axial direction arrangement | positioning process of a strand. (A) is sectional drawing which shows the state in which the support material used as a cylindrical part was formed in the circumference | surroundings of a core material, (B) is sectional drawing which shows the state from which a core material is taken out and a cylindrical part is formed. is there. (A) is the perspective view of the rectification | straightening member for fluids of 1st Embodiment, (B) is the side view which looked at one strand from C direction in (A). (A) is a perspective view of the outermost cross section of the ceramic fiber layer, (B) is a cross sectional view of the strand in the outermost ceramic fiber layer, and (C) is a strand of the ceramic fiber layer other than the outermost layer. It is sectional drawing. It is a perspective view of the rectification member for fluids of a 2nd embodiment. (A) is sectional drawing which shows the state in which the support material used as a cylindrical part and a cover part was formed in the circumference | surroundings of a core material in 3rd Embodiment, (B) took out a core material, and a cylindrical part and a lid | cover It is sectional drawing which shows the state in which a part is formed. The manufacturing process of the rectification | straightening member for fluids of embodiment of this invention is shown, (A) is the manufacturing process manufactured in order of a support material formation process, a matrix formation process, and a centering process, (B) is a support material formation process, centering. The manufacturing process which manufactures in order of a process and a matrix formation process, (C) shows the manufacturing process manufactured in order of a support material formation process, a matrix formation process, a centering process, and a matrix formation process. The detailed manufacturing process of the support material formation process of the flow straightening member of embodiment of this invention is shown, (A) is a manufacturing process with the winding process first and last, (B) has a winding process first. Manufacturing process, (C) shows the manufacturing process with the winding process at the end. It is an application example of the fluid rectifying member of the embodiment of the present invention, specifically, an application example of the silicon single crystal pulling apparatus to the gas rectifying member.

  The fluid rectifying member of the present invention will be described.

  The fluid rectifying member of the present invention for solving the above-mentioned problem is a fluid rectifying member having a cylindrical portion surrounding a central axis, and the cylindrical portion includes an inner ceramic fiber layer and an outermost ceramic layer. A ceramic matrix covering the support material, and the ceramic fiber layer is composed of strands in which a plurality of unit ceramic fibers are bundled, and the cross-sectional area of the unit ceramic fibers is The closer to the outermost ceramic fiber layer, the smaller.

The fluid rectifying member has a cylindrical portion surrounding the central axis. The cylindrical portion includes a support material composed of an inner ceramic fiber layer and an outermost ceramic fiber layer, and a ceramic matrix covering the support material.
The ceramic fiber layer is composed of a strand in which a plurality of unit ceramic fibers are bundled, and the unit ceramic fiber has a smaller cross-sectional area as it is closer to the outermost ceramic fiber layer. For this reason, since the strand is formed of unit ceramic fibers having a smaller cross-sectional area as it is closer to the outermost ceramic fiber layer, the outermost layer strand can be formed at a high density to ensure strength.

As a result, the outermost ceramic fiber layer that is most prone to breakage in the vicinity of the fluid is formed with unit ceramic fibers having a small cross-sectional area, so that even if the strand is deformed, the unit ceramic fibers are not easily broken, and the fluid is less likely to break as a whole. A flow straightening member can be provided.
In addition, unit ceramic fibers having a small cross-sectional area by focusing on the outermost ceramic fiber layer can be used, and unit ceramic fibers having a larger cross-sectional area than the unit ceramic fibers of the outermost layer can be used in the ceramic fiber layers other than the outermost layer. Therefore, excessive weight increase can be suppressed.
The fluid flow refers to the case where the fluid moves relative to the fluid rectifying member. The case where the fluid flows relative to the fluid rectifying member and the case where the fluid rectifying member moves within the fluid. Including.

Furthermore, it is desirable that the fluid flow regulating member of the present invention has the following aspect.
(1) The unit ceramic fiber has the highest density in the outermost ceramic fiber layer.
Since the unit ceramic fibers have the highest density in the outermost ceramic fiber layer, the fluid rectifying member of the present invention can ensure the strength by forming the outermost strands at a high density.
Note that the high density of the unit ceramic fibers can be achieved by putting a large number of unit ceramic fibers having a small cross-sectional area in the same cross-sectional area so as to reduce the size between the axis lines of the unit ceramic fibers to be dense.

(2) The angle formed by the strands constituting the outermost ceramic fiber layer and the plane including the central axis is 80 to 90 degrees.
For this reason, in the fluid rectifying member of the present invention, when the angle formed between the plane including the central axis and the strands constituting the outermost ceramic fiber layer is 80 degrees to 90 degrees, the air flow smoothly along the strands. Can flow.
In addition, since the unevenness caused by the size of the cross-sectional area of the strand is stretched in the direction of the central axis by 1 / sin 20 times (2.92 times) or more, the turbulence of the fluid can be reduced and the resistance can be reduced. Thereby, the strength of the outermost ceramic fiber layer can be further increased.

(3) Both ends of the cylindrical portion along the central axis are open.
In the fluid rectifying member of the present invention, both end portions along the central axis of the cylindrical portion are open, so that the fluid can flow smoothly along the outer peripheral surface and the inner peripheral surface of the cylindrical portion. For this reason, the fluid rectifying member of the present invention can be used as a pipe for flowing a fluid therein, a flying body moving in the fluid, a propelling body, or the like.

(4) The cylindrical portion has a lid at at least one of both end portions along the central axis and is closed.
The fluid rectifying member of the present invention has a lid at at least one of both ends along the central axis of the cylindrical portion and is closed, so that the fluid flows smoothly along the outer peripheral surface of the cylindrical portion. be able to. For this reason, the flow regulating member for fluid of the present invention can be used as a flying object moving in the fluid.

(5) The other end surface contour shape of the cylindrical part is larger than the one end surface contour shape.
Since the cylindrical portion has a shape in which the other end surface contour shape is larger than the one end surface contour shape, the fluid flow regulating member of the present invention has a shape similar to, for example, a cone or a truncated cone. In such a shape, the cross-sectional area changes smoothly, so that the generation of vortex flow can be suppressed and the fluid flow can be made smooth. In this way, when the fluid flows along a shape in which the other end surface contour shape is larger than the one end surface contour shape, the flow velocity of the fluid differs between one and the other of the cylindrical portions, and the elastic fluid further has a density. Will also be different. For this reason, the inner surface or the outer surface of the cylindrical portion in contact with the fluid has a strong interaction with the fluid, and in particular, it is easy to generate fluid turbulence. Since the other end face contour shape is larger than the one end face contour shape, the cylindrical portion in the fluid rectifying member of the present invention can make it difficult to generate turbulence in the fluid flow. For this reason, the fluid rectifying member of the present invention can be suitably used as a flying body, a propelling body, or the like that moves in piping or fluid.

(6) The ceramic matrix is SiC.
Since SiC has high strength, the strength of the fluid rectifying member can be increased. Further, SiC is excellent in corrosion resistance and oxidation resistance, and by using SiC for the ceramic matrix, the fluid rectifying member can be suitably used even in a high temperature and corrosive atmosphere.

(7) The unit ceramic fiber is a SiC fiber.
Since SiC fiber has excellent corrosion resistance and oxidation resistance and high strength, even if the ceramic matrix is damaged in a corrosive atmosphere at high temperature by using SiC as the support material, the unit ceramic fiber will develop cracks. Can be stopped and used safely.

(8) The central axis is disposed in the fluid flow direction.
By disposing the central axis in the fluid flow direction, the cylindrical portion surrounding the central axis is also disposed in the fluid flow direction, so that the fluid flow is not disturbed.

(First embodiment)
A first embodiment of the present invention will be described below.
The manufacturing method of the flow straightening member of the present invention includes a support material forming step, a matrix forming step, and a centering step. After the support material is first formed, a centering process and a matrix forming process are performed. The order of the centering step and the matrix forming step is not particularly limited, and the matrix forming step may be performed before and after the centering step.
FIG. 7A to FIG. 7C show the manufacturing process of the fluid flow regulating member according to the first embodiment of the present invention. 7A is a manufacturing process for manufacturing in the order of the support material forming process, the matrix forming process, and the centering process, and FIG. 7B is a manufacturing process for manufacturing in the order of the support material forming process, the centering process, and the matrix forming process, FIG. 7C shows a manufacturing process for manufacturing in the order of the support material forming process, the matrix forming process, the centering process, and the matrix forming process.

Next, a support material formation process is demonstrated. In the support material forming step, a strand is wound around the core material to form a support material. The support material forming step is finely classified by the arrangement and winding method of the strands. A support material formation process consists of the winding process orientated in the direction orthogonal to an axial direction, and the axial direction arrangement | positioning process orientated along an axial direction. The winding process further includes a helical winding process and a hoop winding process.
FIG. 8A to FIG. 8C show the detailed manufacturing process of the support material forming process of the fluid flow regulating member of the first embodiment of the present invention.

FIG. 8A shows a manufacturing process in which the winding process is the first and last. By this manufacturing method, the outermost ceramic fiber layer covering the inner and outer ceramic fiber layers of the support material is centered on the center axis. The fluid rectifying member can be constituted by strands that are orthogonally oriented with respect to each other.
FIG. 8B shows a manufacturing process in which the winding process is the first and not the last, and by this manufacturing method, the outermost ceramic fiber layer covering the inner surface of the ceramic fiber layer as the inner layer of the support material is the center. The fluid rectifying member can be constituted by strands oriented perpendicular to the axis.
FIG. 8C shows a manufacturing process that is not the first process in which the winding process is the last. By this manufacturing method, the outermost ceramic fiber layer covering the outer surface of the ceramic fiber layer as the inner layer of the support material is the central axis. The fluid rectifying member can be constituted by strands that are oriented perpendicularly to each other. During the first or last winding step, the arrangement, the winding method, the number of times, and the order of the strands are not limited and can be freely combined.
At this time, in the first and last winding steps, the strands are wound at a higher density than the inter-fiber density of the strands used in the steps in between. Moreover, the arrangement | positioning of a strand, the winding method, the frequency | count, and an order are not limited between the first or the last winding process, It can combine freely.

Next, the matrix forming process will be described. In the matrix forming process, the ceramic matrix is filled around the strands that are aggregates.
The ceramic matrix may be anything and is not particularly limited. For example, SiC, alumina, Si ₃ N ₄ , B ₄ C, or the like can be used. The ceramic matrix may be formed by any method. For example, a precursor method in which a precursor (precursor) that is an organic substance is thermally decomposed to obtain a ceramic matrix, a CVD method in which a raw material gas is thermally decomposed to obtain a ceramic matrix, and the like can be used. These may be used in combination.

Hereinafter, the precursor method and the CVD method will be described.
In the precursor method, a precursor from which ceramic can be obtained by thermal decomposition is appropriately selected. In the precursor method, a liquid matrix is applied to or impregnated on a support, and then heat-treated and finally fired to obtain a ceramic matrix. In the heat treatment, various treatments are performed depending on the form of the precursor. When the precursor is a solution, the solvent is dried. When the precursor is a monomer, dimer or oligomer, a polymerization reaction is performed. When the precursor is a polymer, a thermal decomposition reaction is performed.

The precursor is used in liquid form. As the liquid, a solution obtained by dissolving a precursor in a solvent, a liquid precursor, a liquid precursor obtained by heating and melting a solid precursor, and the like can be used. In the precursor method, the precursor is finally fired to form a ceramic matrix.
For example, the following can be used as the precursor. When the precursor is carbon, a phenol resin, a furan resin, or the like can be used. When the precursor is SiC, polycarbosilane (PCS) can be used. A ceramic matrix can be obtained by impregnating these resins between the strands and thermally decomposing them.
In addition, the precursor method has an axial arrangement step at the end of the support material formation step, and when the strands arranged in the axial direction are on the outermost layer, the precursor method may be used as a binder for preventing the strands from dropping or fluffing. it can. In this case, since the precursor can maintain the state in which the strands are bonded in the process of drying, polymerization, or thermal decomposition, it can be suitably used.

In the CVD method, a support material is placed in a CVD furnace, and a source gas is introduced in a heated state. The source gas diffuses in the CVD furnace, and when it contacts the heated support material, thermal decomposition occurs, and a ceramic matrix corresponding to the source gas is formed on the surface of the strand constituting the support material.
The source gas used in the CVD method is appropriately selected depending on the type of ceramic matrix.

When the target ceramic matrix is carbon, hydrocarbon gases such as methane, ethane, and propane can be used.
When the target ceramic matrix is SiC, a mixed gas of hydrocarbon gas and silane-based gas, organosilane-based gas containing carbon and silicon, or the like can be used. As these source gases, gas in which hydrogen is replaced with halogen can also be used. Silane-based gases include chlorosilane, dichlorosilane, trichlorosilane, tetrachlorosilane, and organic silane-based gases such as methyltrichlorosilane, methyldichlorosilane, methylchlorosilane, dimethyldichlorosilane ( Dimethyldichlorosilane), trimethyldichlorosilane, etc. can be used. Further, these raw material gases may be used by mixing them as appropriate, and can also be used as a carrier gas such as hydrogen or argon. When hydrogen is used as the carrier gas, it can be involved in equilibrium adjustment.

In the case of other ceramic materials, the source gas can be appropriately selected according to the target ceramic matrix.
The CVD temperature can be appropriately selected according to the decomposition temperature and decomposition rate of the source gas, and is, for example, 800 to 2000 ° C. The CVD pressure can be appropriately selected according to the state of deposition of the ceramic matrix. The usable range may be, for example, a low pressure CVD method of 0.1 to 100 kPa, or an atmospheric pressure CVD method in which the pressure is not controlled.

Next, the centering process will be described.
There are three patterns depending on the position of the centering process.
When the centering step is after the matrix forming step, the support material forming step, the matrix forming step, and the centering step are manufactured in this order (FIG. 7A).
When the centering step is before the matrix forming step, the support material forming step, the centering step, and the matrix forming step are manufactured in this order (FIG. 7B).
When the centering step is in the matrix forming step, the support material forming step, the matrix forming step, the centering step, and the matrix forming step are manufactured in this order (FIG. 7C).

  As shown in FIG. 7A, when the centering step is after the matrix forming step, the ceramic fiber reinforced ceramic composite material is already formed at the stage of separation in the centering step. The member itself. In this case, since the core is cored when the shape is fixed, a fluid rectifying member with high dimensional accuracy can be obtained.

  As shown in FIG. 7B, when the centering step is before the matrix forming step, what is separated in the centering step is the support material itself made of the ceramic fiber layer. In this case, the ceramic matrix can be simultaneously formed on the inner side surface and the outer side surface of the support material, and the fluid rectifying member can be obtained efficiently.

  As shown in FIG. 7C, when the centering step is in the matrix forming step, the product is an intermediate stage product of the ceramic fiber reinforced ceramic composite material at the stage of being separated in the centering step. In this case, the ceramic matrix can be simultaneously formed on the inner side surface and the outer side surface of the support member, and a fluid rectifying member with high dimensional accuracy can be obtained efficiently.

Any method may be used, but it is preferable to use a manufacturing method (see FIG. 7C) in which the centering step is in the matrix forming step.
When the core forming process is in the matrix forming process, the core material is removed after the ceramic matrix is formed between the ceramic fibers of the support and becomes a ceramic fiber reinforced ceramic composite material. It can be made difficult to deform later.

  In this case, since the ceramic matrix can be formed from both the outer side surface and the inner side surface of the support after the core material is removed, the strand can be surely covered with the ceramic matrix, and is more resistant to fraying and stronger. A ceramic fiber reinforced ceramic composite material can be obtained.

  Moreover, when there exists a centering process in a matrix formation process, the matrix formation process before and behind a centering process may use the same method, and may use a different method. In particular, it is preferable to use a precursor method before the centering step and to use a CVD method after the centering step. In the precursor method, the support can be hardened by a simple method, and deformation can be prevented. In the CVD method, a dense and strong film can be obtained, so that it can be suitably used as a film constituting the outermost surface of the fluid rectifying member.

Based on FIGS. 1A to 1D and FIGS. 2A to 2B, a method for manufacturing a fluid rectifying member will be described.
The fluid rectifying member 10 </ b> A is manufactured by a winding step of winding the strand 21 along the circumferential direction with respect to the central axis CL of the core material 11 formed in a columnar shape, and parallel to the central axis CL of the core material 11. And an axial arrangement step of arranging the strands 21 in the axial direction.
The strand 21 is formed by bundling a large number of unit ceramic fibers 40 (see FIGS. 4B and 4C).

In the winding step, as shown in FIGS. 1 (A), 1 (B), and 1 (C), the strand 21 is wound around the outer peripheral surface of the core material 11 that rotates about the central axis CL, and the ceramic fiber is wound. Layer 22 is formed.
FIG. 1 (A) shows the winding process of the strand 21 by hoop winding, FIG. 1 (B) shows the outward path of the winding process of the strand 21 by helical winding, and FIG. 1 (C) shows the strand 21 by the helical winding. The return path of a winding process is shown.

At this time, the roll 211 that accommodates the strand 21 is moved from one end side (right end side in FIGS. 1A and 1B) to the other end side (FIGS. 1A and 1B). The strand 21 can be wound around the outer surface of the core material 11 by moving to the left end side (see arrow A).
In the return path of the winding step of the strand 21 by helical winding shown in FIG. 1C, the roll 211 that accommodates the strand 21 is connected to the core 11 from the other end side (the left end side in FIG. 1C) to one end. To the side (right end side in FIG. 1C) (see arrow B).

At this time, the strand 21 is wound spirally in the winding process of the strand 21 by hoop winding. The form of the strand 21 wound varies depending on the feed speed of the roll 211. That is, the inter-axis distance can be adjusted by adjusting the feed speed of the roll 211, and the density between fibers can be set to a desired density. A winding method of slowing the feeding speed and feeding the roll 211 by the amount covered with the strand 21 and winding the strand 21 like a ring is called hoop winding, and the inter-fiber density becomes high. The winding method in which the roll 211 is fed so that the feeding speed is increased and the strands 21 are spaced apart and the strands 21 are spirally wound is referred to as helical winding. In this case, the density between fibers becomes low.
When the cylindrical portion has a substantially conical shape, the helical angle of the helical winding can be set to 40 to 65 degrees by appropriately adjusting the rotation speed of the core member 11 and the feed speed of the roll 211.

In the hoop winding, the feed speed of the roll 211 is about the same as the cross-sectional area of the strand 21, and the ceramic fiber layer 22 can be formed by covering almost the entire outer peripheral surface of the core material 11 with the strand 21 by feeding in one direction. .
On the other hand, in helical winding, the entire outer peripheral surface of the core material 11 cannot be covered by a single feed, so the ceramic fiber layer 22 is formed on the outer peripheral surface of the core material 11 while repeatedly feeding the roll 211. .

Assuming that the unidirectional feeding of the strand 21 is 1 unit, when the hoop winding is repeated, the strand 21 of an arbitrary unit has a contact point with the 1 strand 21 of the front and rear respectively.
On the other hand, in helical winding, since one unit of strand 21 cannot cover the entire outer peripheral surface of the core material 11, an arbitrary unit of strand 21 comes into contact with a plurality of units of strands 21 in the front and rear directions.

Further, when the ceramic fiber layer 22 is a combination of hoop winding and helical winding, the interface has many contact points of the strands 21 crossing each other, and a high strength ceramic fiber reinforced ceramic composite material is obtained. Can do.
In the drawing, for easy understanding, the interval between adjacent strands 21 is shown large.

In the fluid rectifying member 10A of the first embodiment, the outermost ceramic fiber layer 22 (outermost ceramic fiber layer 222) covering the outer side of the inner ceramic fiber layer of the cylindrical portion 20A is orthogonal to the central axis CL. The strands 215 are oriented.
In order to obtain such a cylindrical part 20A, the ceramic fiber layer 22 is formed by a winding process as the outermost layer on the outer side of the cylindrical part 20A.

In the axial arrangement step, for example, as shown in FIG. 1D, locking portions 212 and 213 are provided on one end side and the other end side of the core material 11, and the locking portion 212 and the locking portion 213 are provided. By alternately hooking the strands 21 to each other, the strands 21 are arranged along the central axis CL of the core material 11 to form the ceramic fiber layer 22. Therefore, the fiber interval is determined by the interval between the locking portions 212 and 213, and the density between fibers can be set.
This is performed on the entire circumference along the outer surface of the core material 11. At this time, the strands 21 may be arranged obliquely with respect to the plane including the central axis CL depending on the cross-sectional areas and arrangements of the locking portions 212 and 213, but the adjacent strands 21 are very close to each other. Therefore, it can be said that they are arranged parallel to the central axis CL. In FIG. 1D, the interval between adjacent strands 21 is shown large for easy understanding.

Before the uppermost layer is formed, the ceramic fiber layer 22 is laminated by repeatedly performing the winding process and the axial arrangement process. The order of the winding process and the axial arrangement process and the number of executions are arbitrary.
For example, the winding process and the axial arrangement process can be alternately performed once, but the winding process and the axial arrangement process can be alternately performed by performing each of the plurality of times. The winding process includes helical winding and hoop winding. For this reason, the ceramic fiber layer 22 is laminated while appropriately selecting three processes of a winding process by helical winding (helical winding process), a winding process by hoop winding (hoop winding process), and an axial arrangement process. The unit 20A can be configured (see FIG. 8).

Thus, a plurality of ceramic fiber layers 22 are deposited to form a cylindrical base material 23 in which a support material is formed on the surface of the core material (see FIG. 2A). The base material 23 has a shape similar to, for example, a cylinder, a cone, a truncated cone, and the like. In the following, a case of a cone shape will be exemplified.
At this time, in the outermost ceramic fiber layer 222 farthest from the side surface 111 of the core material 11 in the base material 23, the strands 21 extend along the plane PL (see FIG. 3) orthogonal to the central axis CL (become parallel). Thus, the base material 23 is manufactured.

At this time, as shown in FIG. 4A, the outermost ceramic fiber layer 222 is formed with the strands 215, and the ceramic fiber layer 223 other than the outermost layer is formed with the strands 215. The direction of the strand 215 that forms the ceramic fiber layer 223 preferably intersects with the strand 215 that forms the outermost ceramic fiber layer 222.
As shown in FIG. 4B, the strand 215 forming the outermost ceramic fiber layer 222 is formed by bundling unit ceramic fibers 41 having a small cross-sectional area. The strands 215 forming the ceramic fiber layer 223 other than the outermost layer are formed of unit ceramic fibers 42 having a larger cross-sectional area than the unit ceramic fibers 41.
Thereby, when the cross-sectional areas of the strand 215 and the strand 215 are the same, the unit ceramic fibers 41 of the strand 215 are formed at a higher density than the unit ceramic fibers 42 of the strand 215.

  Next, a ceramic matrix is formed between the strands 21 of the support to form a cylindrical portion 20A that surrounds the central axis CL. In the first embodiment, the ceramic matrix is formed by a CVD method. The support material having the ceramic fiber layer 22 is put into a CVD furnace, and methyltrichlorosilane gas is introduced into the CVD furnace to form a SiC ceramic matrix.

Then, as shown in FIG. 2B, in the separating step, the cylindrical portion 20A is removed from the core material 11, the cylindrical portion 20A is baked, and the fluid rectifying member 10A is manufactured.
Without being limited thereto, the step of separating the cylindrical portion 20A from the core material 11 may be any stage before forming the ceramic matrix and after forming the ceramic matrix (see FIG. 7). .

In addition, although the case where both end surfaces along the central axis CL of the cylindrical portion 20A are open here is shown, the same manufacturing can be performed when one end surface is closed.
When one end surface is closed, for example, a method of depositing a ceramic matrix using a base material 23 having a cylindrical portion 20A and a lid, a method of combining the lid later, or the like can be used.

Next, the fluid rectifying member 10A will be described.
As shown in FIG. 3A, the fluid rectifying member 10A has a cylindrical portion 20A surrounding the central axis CL. The fluid straightening member 10A can be used, for example, by arranging the central axis CL in the fluid flow direction (see arrow F in FIG. 2B).
The cylindrical portion 20 </ b> A can be formed so that the contour shape of the other end surface 204 is larger than the contour shape of the one end surface 203. Moreover, as for cylindrical part 20A, one end surface 203 and the other end surface 204 are opening. Note that the cylindrical portion 20A may be formed in a cylindrical shape with both ends opened (not shown).

  The cylindrical portion 20A has a base material 23 (see FIG. 2) on which a ceramic fiber layer 22 formed by a support material made of a strand 21 made of SiC fiber is laminated. A ceramic matrix is formed on the strand 21 by a CVD method. To obtain a fiber-reinforced ceramic composite material. The strand 21 can be a strand in which ceramic fibers are bundled.

  The outermost ceramic fiber layer (outermost layer) 222 of the cylindrical portion 20A is a ceramic fiber layer 22 formed so that the strands 215 are along a virtual plane PL orthogonal to the central axis CL.

Here, the angle θ formed by the strand 215 constituting the outermost ceramic fiber layer 222 and the plane PL2 including the central axis CL (see FIG. 3A) is 80 to 90 degrees (FIG. 3B). )reference).
That is, as shown in FIG. 3A, when the cross section of the cylindrical portion 20A cut by the virtual plane PL2 including the central axis CL is viewed along the plane PL2 (see arrow C in FIG. 3A). ), As shown in FIG. 3B, the strand 215 intersects the plane PL2 at an angle θ.

Next, the operation and effect of the fluid rectifying member 10A of the first embodiment will be described.
According to the flow straightening member 10A of the first embodiment, the ceramic fiber layer 22 is composed of the strands 21 in which a plurality of unit ceramic fibers 40 are bundled, and the unit ceramic fibers 40 are the outermost ceramic fibers of the outermost layer. The closer to layer 222, the smaller the cross-sectional area.
As a result, the outermost ceramic fiber layer 222 that is most prone to breakage in the vicinity of the fluid is formed by the unit ceramic fibers 41 having a small cross-sectional area. It is possible to provide a fluid rectifying member 10A that is difficult to perform.
Further, the unit ceramic fibers 41 having a small cross-sectional area that is confined to the outermost ceramic fiber layer 222 are used. In the ceramic fiber layers 223 other than the outermost layer, unit ceramic fibers 42 having a larger cross-sectional area than the unit ceramic fibers 41 of the outermost layer are used. Since it can be used, excessive weight increase can be suppressed.

  According to the fluid rectifying member 10A of the first embodiment, since the unit ceramic fibers 40 are the highest density in the outermost ceramic fiber layer 222, the outermost strands 215 are formed at a high density to ensure strength. be able to.

According to the flow straightening member 10A of the first embodiment, when the angle θ between the strand 215 constituting the outermost ceramic fiber layer 222 and the plane PL2 including the central axis CL is 80 degrees to 90 degrees, The airflow can flow smoothly along the line 21.
In addition, since the unevenness caused by the size of the cross-sectional area of the strand 21 is stretched in the direction of the central axis CL by 1 / sin 20 degrees (2.92 times) or more, the turbulence of the fluid can be reduced and the resistance can be reduced.

  According to the fluid rectifying member 10A of the first embodiment, when both ends along the central axis CL are open, the cylindrical portion 20A is along the outer peripheral surface and the inner peripheral surface of the cylindrical portion 20A. The fluid can flow and the fluid can be rectified. For this reason, it can be used as a flying object that moves in a pipe or fluid.

According to the fluid rectifying member 10A of the first embodiment, the cylindrical portion 20A has a shape in which the other end surface contour shape is larger than the one end surface contour shape, and thus resembles, for example, a cone or a truncated cone. It has a shape.
When one end face 203 having a small end face contour shape is not open, the resistance caused by the outermost ceramic fiber layer 222 of the cylindrical portion 20A is reduced by the fluid flowing relatively from the one end face 203. be able to. Further, when one end face 203 is also open, fluid can flow along the outermost ceramic fiber layer 222 and the innermost ceramic fiber layer 221 of the cylindrical portion 20A. It is possible to reduce the resistance of the fluid flowing along. For this reason, 10 A of fluid rectification members can be utilized as a flying body which moves in piping or fluid.

According to the flow straightening member 10A of the first embodiment, the ceramic matrix is SiC.
Since SiC is excellent in corrosion resistance and oxidation resistance and has high strength, the fluid rectifying member can be suitably used even in a high temperature and corrosive atmosphere by using SiC for the ceramic matrix.

According to the flow straightening member 10A of the first embodiment, the ceramic fiber is a SiC fiber.
Since SiC fiber is excellent in corrosion resistance and oxidation resistance and has high strength, it can be safely used even when the ceramic matrix is damaged in a high temperature and corrosive atmosphere by using SiC as a support material.

According to the fluid rectifying member 10A of the first embodiment, the central axis CL is arranged in the fluid flow direction.
By disposing the central axis CL in the fluid flow direction, the cylindrical portion 20A surrounding the central axis CL is also disposed in the fluid flow direction, so that the resistance of the fluid can be reduced.

  Moreover, according to the manufacturing method of the fluid rectifying member of the first embodiment, the strand 21 is wound along the circumferential direction with respect to the central axis CL of the core 11 formed in the columnar shape in the winding step, and the axial direction In the arranging step, the strands 21 are arranged in parallel to the central axis CL of the core material 11. Thus, the base material 23 of the cylindrical portion 20 </ b> A is formed by the plurality of ceramic fiber layers 22. At this time, the strand 215 forming the outermost ceramic fiber layer 222 is composed of the unit ceramic fibers 41 having a small cross-sectional area. The unit ceramic fiber 41 is assumed to have a smaller cross-sectional area than the unit ceramic fiber 42 constituting the ceramic fiber layer 223 other than the outermost layer.

Next, a ceramic matrix is formed so as to penetrate between the strands 21 of the substrate 23.
The ceramic matrix may be anything and is not particularly limited. For example, SiC, alumina, Si ₃ N ₄ , B ₄ C, etc. can be used. The ceramic matrix may be formed by any method. For example, a precursor method in which a precursor (precursor) that is an organic substance is thermally decomposed to obtain a ceramic matrix, a CVD method in which a raw material gas is thermally decomposed to obtain a ceramic matrix, and the like can be used.

Hereinafter, the precursor method and the CVD method will be described.
In the precursor method, a precursor from which ceramic can be obtained by thermal decomposition is appropriately selected. In the precursor method, a liquid precursor is applied to or impregnated on a support, followed by heat treatment to obtain a ceramic matrix. In the heat treatment, various treatments are performed depending on the form of the precursor.
When the precursor is a solution, the solvent is dried. When the precursor is a monomer, dimer or oligomer, a thermal decomposition reaction is performed after the polymerization reaction. When the precursor is a polymer, a thermal decomposition reaction is performed. Is called.
The precursor is used in liquid form. As the liquid, a solution obtained by dissolving a precursor in a solvent, a liquid precursor, a liquid precursor obtained by heating and melting a solid precursor, and the like can be used. In the precursor method, the precursor is finally fired to form a ceramic matrix.

In the CVD method, a support material is placed in a CVD furnace, and a source gas is introduced in a heated state. The source gas diffuses in the CVD furnace, and when it contacts the heated support material, thermal decomposition occurs, and a ceramic matrix corresponding to the source gas is formed on the surface of the strand constituting the support material.
Next, the cylindrical portion 20 </ b> A is removed from the core material 11. Thereby, the rectification | straightening member for fluids can be manufactured.

(Second Embodiment)
Next, a second embodiment will be described.
In addition, the same code | symbol is attached | subjected to the site | part which is common in 10 A of fluid rectifying members of 1st Embodiment mentioned above, and the overlapping description is abbreviate | omitted.
As shown in FIG. 5, in the fluid rectifying member 10 </ b> B of the second embodiment, the innermost ceramic fiber layer 221 and the outermost ceramic fiber layer 222 of the cylindrical portion 20 </ b> B have the strands 21 orthogonal to the central axis CL. The ceramic fiber layer 22 is formed along a virtual plane PL (see FIG. 3A).
Further, in the innermost ceramic fiber layer 221 and the outermost ceramic fiber layer 222, the strands 216 and 214 composed of the unit ceramic fibers 41 having a small cross-sectional area are used, and the strands are compared with the other ceramic fiber layers 223. 21 is formed with high density.

As a result, the strength of the outermost ceramic fiber layer 222 and the innermost ceramic fiber layer 221 can be increased, so that the strength of the support material can be sufficiently exerted, and a high-strength fiber that prevents useless weight increase can be prevented. A fluid rectifying member 10B made of a reinforced ceramic composite material is obtained.
In addition, it is difficult to make ups and downs that obstruct the flow of the fluid, and the fluid is less likely to be disturbed. Here, the flow of the fluid means a case where the fluid moves relative to the fluid rectifying member 10B. The case where the fluid flows relative to the fluid rectifying member 10B and the case where the fluid rectifying member 10B passes through the fluid. Includes moving case.
In addition, the manufacturing method demonstrated in 1st Embodiment can be used for the manufacturing method of the rectification | straightening member 10B for fluids. This can be obtained by having the winding step at the beginning and end of the support material forming step.

(Third embodiment)
Next, a third embodiment will be described.
In addition, the same code | symbol is attached | subjected to the site | part which is common in 10 A of fluid rectification members of 1st Embodiment mentioned above, and the fluid rectification member 10B of 2nd Embodiment, and the overlapping description is abbreviate | omitted.
As shown in FIGS. 6A and 6B, the fluid rectifying member 10C of the third embodiment has a lid on one end surface 203 of the cylindrical portion 20C, and is in the direction of the central axis CL. Not penetrated.
For this reason, in the cylindrical part 20C, only the strands 215 of the outermost ceramic fiber layer 222 may be formed of the strands 215 formed of the unit ceramic fibers 41 having a small cross-sectional area. Moreover, what is necessary is just to become the ceramic fiber layer 22 formed so that the virtual plane PL (refer FIG. 3 (A)) orthogonal to the central axis CL may be followed. The strands of the innermost ceramic fiber layer (outermost layer) 221 can also be formed along a virtual plane PL (see FIG. 3A) orthogonal to the central axis CL.

Thereby, even if the ceramic fiber bundle is deformed by the flow of the fluid, the ceramic fibers are not easily broken and are not easily damaged as a whole. In the ceramic fiber layer other than the outermost layer, a strand having a larger cross-sectional area than the outermost layer strand can be used. Thereby, the fluid rectification | straightening member of a structure where the intensity | strength of surface is sufficient is suppressed by suppressing excessive weight increase.
In addition, the manufacturing method demonstrated in 1st Embodiment can be used for the manufacturing method of 10 C of fluid rectifying members.

The fluid rectifying member of the present invention is not limited to the above-described embodiments, and appropriate modifications and improvements can be made.
That is, in each of the above-described embodiments, the outermost ceramic fiber layer 22 is illustrated as being formed by the strands 21 wound in the direction orthogonal to the central axis CL. It is also applicable when 22 is formed by strands 21 oriented in a direction along the central axis CL.

FIG. 9 shows an application example of the fluid rectifying member described in each embodiment of the present invention, specifically, an application example of the silicon single crystal pulling apparatus 300 to the gas rectifying member 312.
A silicon single crystal pulling apparatus 300 shown in FIG. 9 is for obtaining a high-purity silicon ingot by heating and melting a silicon material and then pulling silicon as a single crystal.

  An introduction portion 303 for introducing an inert gas into the inside of the sealed main body 302 constituting the silicon single crystal pulling apparatus 300 is provided therein. Inside the sealed main body 302, there are a quartz crucible 304, a crucible 305, a rotating shaft 306, a heater 307, a heat insulating cylinder 308, an upper ring 309, a lower ring 310, a bottom heat shield plate 311 and a gas rectifying member 312 (fluid rectifying member). Etc. are housed.

  The quartz crucible 304 into which the silicon material is charged is held by the crucible 305 disposed on the outside thereof. The central portion of the bottom surface of the crucible 305 is supported from below by a rotating shaft 306. When the rotating shaft 306 is rotated by a driving means (not shown), the crucible 305 is rotated accordingly. The crucible 305 is heated by a heater 307 disposed around the side of the crucible 305 so that the silicon material is melted. A heat retaining cylinder 308 provided around the side of the heater 307 is supported between the upper ring 309 and the lower ring 310. A bottom heat shield plate 311 for preventing heat from escaping from the bottom surface is disposed on the inner bottom surface of the sealed main body 302.

The gas rectifying member 312 is a tapered member having a tapered shape, and the end on the large diameter side is fixed to the inside of the upper surface of the sealed body 302 with the end on the small diameter side facing downward.
The fluid rectifying member of the present invention can also be applied to the gas rectifying member 312 of such a silicon single crystal pulling apparatus 300.

Example 1
Next, a specific example of the fluid rectifying member will be shown. Here, a strand in which ceramic fibers are bundled is used as the strand 21, and the fiber density is adjusted by the interval between the bundled ceramic fibers (strands).
First, a yarn composed of 1600 fibers / bundle with a filament diameter of 7.5 μm is used as a weft, and the innermost layer is formed by filament winding.
Next, a yarn composed of a bundle of 800 fibers / bundle with a filament diameter of 10 μm is used as an oblique yarn, and the second layer from the inside is formed by filament winding.
A yarn composed of a bundle of 800 fibers / bundle with a filament diameter of 10 μm is used as a weft, and the third layer from the inside is formed by filament winding.
A yarn having a filament diameter of 10 μm and composed of 800 bundles / bundle is used as an oblique yarn, and the fourth layer from the inside is formed by filament winding.
A yarn composed of 800 bundles / bundle with a filament diameter of 10 μm is used as a weft yarn, and the fifth layer from the inside is formed by filament winding.
As the fiber bundle, Tyranno-SA (Tyranno is a registered trademark) manufactured by Ube Industries, Ltd. can be used.

  The fluid rectifying member of the present invention can be used for fluid piping, a flying body exterior, a burner nozzle, and the like, and the production thereof.

10A, 10B, 10C Fluid rectifying members 20A, 20B, 20C Cylindrical portion 203 One end face (both ends)
204 The other end face (both ends)
21 Strand 22 Ceramic fiber layer 221 Innermost ceramic fiber layer (outermost layer)
222 Outermost ceramic fiber layer (outermost layer)
223 Ceramic fiber layer (other than the outermost layer)
40 Unit ceramic fiber 41 Unit ceramic fiber (outermost layer)
42 unit ceramic fiber (other than outermost layer)
CL center axis PL plane

Claims (4)

A fluid rectifying member having a cylindrical portion surrounding a central axis arranged in a fluid flow direction ,
Both end portions along the central axis of the cylindrical portion are opened, and the fluid moving relative to the fluid rectifying member is rectified along the outer peripheral surface and the inner peripheral surface of the cylindrical portion. ,
The cylindrical portion comprises a support material comprising a ceramic fiber layer made of an inner layer SiC fiber and an outermost surface ceramic fiber layer located on the outer peripheral surface and / or the inner peripheral surface so as to be close to the fluid ; A ceramic matrix made of SiC covering the support material,
The ceramic fiber layer is constituted by filament winding a strand in which a plurality of unit ceramic fibers are bundled,
The fluid rectifying member having a smaller cross-sectional area of the unit ceramic fiber as it is closer to the outermost ceramic fiber layer. The fluid rectifying member according to claim 1,
The unit ceramic fiber is a fluid rectifying member having the highest density in the outermost ceramic fiber layer. The fluid rectifying member according to claim 1 or 2,
A fluid rectifying member in which an angle formed between the strand constituting the outermost ceramic fiber layer and a plane including the central axis is 80 to 90 degrees. The fluid rectifying member according to any one of claims 1 to 3 ,
The fluid rectifying member having the other end surface contour shape larger than the one end surface contour shape of the cylindrical portion.

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