JP6338340B2 - Linear actuator - Google Patents

Description

  The present invention relates to a linear actuator that decelerates the rotational motion of a motor with a speed reducer and converts it into linear motion with a screw mechanism.

As a prior art of a linear actuator, Japanese Patent Laid-Open No. 2001-231241 (see Patent Document 1) is known. This prior art supports a rotor of a motor with a hollow shaft, and a drive nut member is placed in the hollow shaft. An output shaft is provided, which is inserted through the hollow shaft and is formed with a threaded portion that engages with the threaded portion of the drive nut member on the outer peripheral surface thereof. In this prior art, the rotational power (torque) generated in the rotor of the motor is output from the output shaft as linear motion power by the screw portion of the drive nut member and the screw portion of the output shaft that are screwed together. Is.
According to such a prior art, since the rotational power generated in the rotor of the motor is output as the direct acting power, the direct acting power depends on the rotational power of the motor. Therefore, in order to increase the direct acting power, A big motor was needed.

  For example, Patent Literature 2 and Patent Literature 3 are known as conventional linear actuators in which the rotational motion of the motor is decelerated by a reduction gear and converted into linear motion by a ball screw mechanism to increase the linear motion power. Yes.

JP2001-231241 JP 2000-92811 A JP2012-225461

However, the mechanism shown in FIG. 2 as the second embodiment of Patent Document 2 has a configuration of a linear motion mechanism portion + a planetary gear reducer + a thrust bearing portion + a motor portion, and a motor and a linear actuator. The main mechanism part of the planetary gear reducer unit is directly incorporated into the housing of this type, and the linear actuator is miniaturized by omitting part of the planetary gear reducer unit housing, but the motor and thrust bearings are dead. There was a problem that it became a space and the total length was long.
Further, in the conventional linear actuator of Patent Document 3, the actuator mechanism part and the motor part are folded back and decelerated by a speed reducer or a belt / pulley at the folded part to shorten the overall length. The deceleration mechanism part of the part became a dead space.

  An object of the present invention is to solve the above-described problems of the prior art and to provide a linear actuator capable of storing an effective stroke portion and thus obtaining a linear actuator having no dead space and a short overall length.

In order to solve the above-mentioned problems, the present invention has a motor having a hollow rotary shaft formed in a cylindrical shape, and an output screw shaft inserted through the axis of the hollow rotary shaft, and formed on the peripheral surface of the output screw shaft. A drive nut member having an inner peripheral surface formed with a screw portion to be screwed into the screw portion, and transmitting the rotation of the hollow rotary shaft of the motor to the drive nut member to linearly move the output screw shaft A linear actuator having a reduction gear mechanism and a linear motion mechanism having a drive nut member provided in parallel in the axial direction of the motor, and the tip output of the hollow rotary shaft of the motor And the rotation of the hollow rotating shaft is transmitted to the drive nut member via a reduction gear mechanism built in the speed reduction mechanism portion, and the drive nut member is inserted into the drive nut member. Direct motion by screwing The output screw shaft is inserted through the same axis of the motor, the speed reduction mechanism portion, and the linear motion mechanism portion, and a planetary gear mechanism is used for the speed reduction gear mechanism, and the tip output portion of the hollow rotary shaft of the motor is used. A sun gear of the planetary gear mechanism is mounted, and a plurality of planetary gears that planetarily move while meshing with the sun gear and an internal gear provided in the speed reduction mechanism unit are provided, and the linear motion mechanism unit is rotatable. The planetary gear is pivotally supported on a built-in hollow output portion, and the driving nut member is mounted on the hollow output portion. The internal gear forms a housing of the speed reduction mechanism portion, and the straight gear A bearing holder with a rib is used as the bearing holder of the moving mechanism portion, and the exposed portion of the internal gear is covered and fixed by the rib portion of the bearing holder .
The present invention also provides a motor having a hollow rotary shaft formed in a cylindrical shape, an output screw shaft inserted through the axis of the hollow rotary shaft, and a screw portion formed on the peripheral surface of the output screw shaft. In a linear actuator for providing a drive nut member formed on the inner peripheral surface of a screw portion to be screwed, and transmitting the rotation of the hollow rotary shaft of the motor to the drive nut member to linearly move the output screw shaft. In the axial direction of the motor, a speed reduction mechanism portion incorporating a reduction gear mechanism and a linear motion mechanism portion incorporating the drive nut member are juxtaposed, and a tip output portion of a hollow rotating shaft of the motor is connected to the speed reduction mechanism. The rotation of the hollow rotary shaft is transmitted to the drive nut member through a reduction gear mechanism built in the reduction mechanism portion, and is screwed into the drive nut member to be directly inserted. The output screw shaft in dynamic motion The motor, the speed reduction mechanism portion and the linear motion mechanism portion are inserted on the same axis, and a wave gear mechanism is used as the speed reduction gear mechanism, and a wave of the wave gear mechanism is provided at the tip output portion of the hollow rotating shaft of the motor. A hollow output that is installed in the linear motion mechanism unit, and is equipped with a flexspline that rotates while meshing with the wave generator and the circular spline provided in the deceleration mechanism unit. The flex spline is provided in the part, and the driving nut member is attached to the hollow output part, and the circular spline forms a housing of the speed reduction mechanism part, and a bearing holder of the linear motion mechanism part, Using a bearing holder with a rib, the exposed part of the circular spline is In that it fixed by Ukoto.
Furthermore , the present invention provides two linear bearings for receiving a thrust load and a radial load applied to the drive nut member on the linear motion mechanism portion that houses the drive nut member. It is provided in the output unit.

According to the present invention, the following effects can be obtained.
A motor having a hollow rotary shaft formed in a cylindrical shape, and a screw portion that is inserted into an axis of the hollow rotary shaft and screwed into a screw portion formed on a peripheral surface of the output screw shaft. In a linear actuator provided with a driving nut member formed on an inner peripheral surface, and transmitting the rotation of the hollow rotating shaft of the motor to the driving nut member to linearly move the output screw shaft, A reduction mechanism portion incorporating a reduction gear mechanism and a linear motion mechanism portion incorporating the drive nut member are juxtaposed, and the tip output portion of the hollow rotating shaft of the motor is inserted into the reduction mechanism portion. And the output screw that transmits the rotation of the hollow rotary shaft to the drive nut member via a reduction gear mechanism built in the speed reduction mechanism portion, and is screwed into the drive nut member to move linearly. Shaft, said motor, A planetary gear mechanism is used for the reduction gear mechanism, and a sun gear of the planetary gear mechanism is attached to the tip output portion of the hollow rotating shaft of the motor. A plurality of planetary gears that planetarily move while meshing with the sun gear and an internal gear provided in the speed reduction mechanism unit, and the hollow output unit that is rotatably incorporated in the linear motion mechanism unit The planetary gear is pivotally supported, and the driving nut member is attached to the hollow output portion. The internal gear forms a housing of the speed reduction mechanism portion, and a rib holder is attached to the bearing holder of the linear motion mechanism portion. using the bearing holder at a rib portion of the bearing holder, since the fixing by covering the exposed portion of the internal gear, the reduction gear mechanism can be increased linear power, the output screw shaft, said motor, Since it is possible to house the effective stroke of the insertion and output screw shaft on the same axis as fast mechanism and the linear motion mechanism, it is possible dead space without overall length obtain short linear actuator.
Since the input part of the speed reduction mechanism is directly connected to the tip output part of the hollow rotating shaft of the motor, the coupling required to connect the motor and the speed reduction mechanism can be omitted, and the linear length is shorter. An actuator can be obtained.
Since the linear output mechanism portion that houses the drive nut member is provided with two bearings arranged in parallel to receive a thrust load and a radial load applied to the drive nut member in the hollow output portion, Two types of bearing mechanisms that receive rotation and linear motion thrust of the drive nut member that supports the output screw shaft can be unified, space can be saved while reducing parts, and vibration of the drive nut member can be suppressed. Can do. And by this structure, a full length can be shortened.

The linear actuator by embodiment of this invention is shown, (a) is a side view, (b) is the sectional view on the AA line of (a). It is the BB sectional view taken on the line of FIG. It is a figure which shows the graph which compared the thrust (linear motion power) by a driver current with the linear actuator of this application which employ | adopted the planetary gear reduction mechanism part. It is a longitudinal cross-sectional view which shows the linear actuator which used the wave gear mechanism for the deceleration mechanism by other embodiment of this invention. It is a side view which shows the linear actuator using the guide mechanism by other embodiment of this invention. It is a longitudinal cross-sectional view which shows the linear actuator provided with the electromagnetic brake by other embodiment of this invention. It is a longitudinal cross-sectional view which shows the linear actuator which made the non-output side of the hollow rotating shaft of the motor by other embodiment of this invention the solid shaft. It is a longitudinal cross-sectional view which shows the linear actuator using the bearing holder with a rib which covers the exposed part of the internal gear by other embodiment of this invention.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
[Embodiment 1]
FIGS. 1A, 1B, and 2 show an embodiment in which a planetary gear mechanism is adopted as a speed reduction mechanism.
First, the configuration will be described. Reference numeral 1 denotes a motor, which is driven forward and backward by a driver (not shown). Reference numeral 2 denotes a speed reduction mechanism portion incorporating a reduction gear mechanism, and 3 denotes a linear motion mechanism portion. A speed reduction mechanism unit 2 and a linear motion mechanism unit 3 are arranged in parallel in the axial direction of the motor 1.
In the motor 1, an annular stator 11 and an annular rotor 12 are arranged concentrically from the outside, and a hollow rotary shaft 13 that supports the rotor 11 is arranged concentrically on the axis of the rotor 11. Yes. In addition, an annular bracket 14 is provided in parallel with one end of the stator 11 portion and constitutes a motor housing together with the stator 11 portion. A rotation detector 15 is housed inside the bracket 14, and the open end of the bracket 14 is closed with a sensor cover 16. A flange 17 is provided at the other end of the stator 11, and the hollow rotary shaft is interposed via motor bearings 18 and 19 disposed on the inner peripheral surface side of the flange 17 and the inner peripheral surface side of the bracket 14. 13 is rotatably supported.

  The speed reduction mechanism portion 2 employs a planetary gear speed reduction mechanism 20 as a speed reduction mechanism, and includes an annular internal gear 21 from the outside, and three planetary gears 22 that revolve in rotation with the internal gear 21 and revolve. These planetary gears 22 are pivotally supported by the planetary gear shaft 23, and mesh with a sun gear 24 disposed at the center to be rotationally driven. The planetary gear shaft 23 is supported by a hollow carrier 25 that constitutes an output portion, and transmits the revolving motion of the planetary gear 22. The internal gear 21 is assembled to the outer surface of the flange 17 to form a housing for the speed reduction mechanism 2.

The linear mechanism portion 3 includes a hollow drive nut member 31 supported by the hollow carrier 25 and an output screw shaft 32 screwed into the drive nut member 31.
The drive nut member 31 is constituted by a hollow ball screw nut having a thread groove formed on the inner peripheral surface side, and the output screw shaft 32 is screwed on the outer peripheral surface side into the screw groove of the ball screw nut. The ball screw shaft is formed with a thread groove. The output screw shaft 32 is linearly driven along with the rotation of the drive nut member 31 and is inserted and accommodated on the axis of the hollow rotary shaft 13. The hollow carrier 25 to which the driving nut member 31 is attached is rotatably supported by two thrust radial bearings 33 arranged side by side. The thrust radial bearing 33 has an outer peripheral surface side. It is supported by the bearing holder 34 and the bearing cover 35. The thrust / radial bearing 33 is held on both sides of the inner ring of the thrust / radial bearing 33 via a step portion 25 a of the hollow carrier 25 and a lock nut 36. On the outer peripheral surface of the hollow carrier 25 on the planetary gear 22 side, a step portion 25a protruding in the centrifugal direction is provided. The step portion 25a supports the planetary gear shaft 23, and the step portion 25a. The inner ring of the thrust / radial bearing 33 is locked at the end face on the opposite side. Further, a screw groove is provided on the outer peripheral surface of the hollow carrier 25 opposite to the step portion 25a, and the lock nut 36 is screwed into the screw groove to oppose the thrust / radial bearing 33. The inner ring is locked and fixed.
A flange 37 is attached and closed on the open end side of the linear mechanism portion 3 provided with the bearing cover 35. The output screw shaft 32 is provided so as to be directly movable outward from an opening hole 37 a provided in the center of the flange 37.

Next, the operation of the first embodiment will be described.
In the motor 1, a hollow rotating shaft 13 is coupled to a rotor 12, and a rotating magnetic field is generated when a current flows through the stator 11 by driving of the driver, and the rotor 12 and the hollow rotating shaft 13 rotate synchronously. The sun gear 24 fastened to the hollow rotary shaft 13 also rotates synchronously with the rotor 12.
According to the principle of the planetary gear reducer, rotation is transmitted from the sun gear 24 to the planetary gear 22, and the three planetary gears 22 are rotated around the sun gear 24 after the internal gear 21. The three planetary gears 22 are respectively supported by the planetary gear shaft 23, and the rotation is transmitted to the hollow carrier 25 through the planetary gear shaft 23. Since the planetary gear shaft 23 is fastened to the hollow carrier 25, the carrier 25 rotates at a reduced speed synchronously with the revolving motion of the planetary gear 22. Since the driving nut member 31 is coupled to the hollow carrier 25, the driving nut member 31 rotates in synchronization with the hollow carrier 25.
Since the output screw shaft 32 is screwed onto the drive nut member 31 on the axis, the output screw shaft 32 stops the rotation of the output screw shaft 32 due to the screw-nut relationship with the drive nut member 31. Thus, the output screw shaft 32 performs linear motion. Since the output screw shaft 32 is provided with the speed reduction mechanism portion 2 incorporating the speed reduction gear mechanism and the linear motion mechanism portion 3 in the axial direction of the motor portion 1, the hollow rotary shaft 13 and the drive nut member 31 are arranged. The linear motion can be performed with a stroke that extends over the entire length of the motor unit 1, the speed reduction mechanism unit 2, and the linear motion mechanism unit 3. For example, a limit switch is disposed in the operating region of the output screw shaft 32. By operating the limit switch, the rotation direction of the motor 1 can be reversed and the output screw shaft 32 can be reciprocated.

A thrust / radial bearing 33 is provided on the outer periphery of the hollow carrier 25 to receive the thrust load and the radial load applied to the drive nut member 31 and the output screw shaft 32, and the inner ring of the thrust / radial bearing 33 is a hollow carrier. 25 stepped portions 25a and lock nuts 36 are used.
As the rotation of the sun gear 24 is decelerated by the planetary gear reduction mechanism 20, it appears as the linear motion power up of the output screw shaft 32. Also, the resolution is increased by the amount of deceleration.

  For example, a thrust by a driver current (linear motion power) between a linear actuator using a motor having an outer dimension of about □ 60 mm and a linear actuator of the present application in which a 1/4 planetary gear speed reduction mechanism 20 having an outer dimension of about □ 85 mm is used for this actuator. ) Is shown in FIG. It can be seen that the linear motion power is quadrupled. The resolution is 1/4.

[Embodiment 2]
FIG. 4 is a longitudinal sectional view showing a linear actuator using a wave gear mechanism as a speed reduction mechanism according to another embodiment of the present invention. The same parts as those in FIG. explain.
In the present embodiment, instead of the planetary gear speed reduction mechanism 20, a wave gear mechanism 50 that is a speed reducer using the operation of an ellipse and a perfect circle, a so-called harmonic drive (registered trademark) is used.
In the wave gear mechanism 50, a wave generator 51 of the wave gear mechanism 50 is fastened to the hollow rotary shaft 13. The wave generator 51 is usually a component in which a thin ball bearing is combined with the outer periphery of an elliptical cam, and rotates synchronously with the rotor 12. 52 is a circular spline, which is an annular part with teeth engraved on the inner periphery. The circular spline 52 is assembled to the outer surface of the flange 17 to constitute the housing of the wave gear mechanism 50. 53 is a flexspline arranged outside the outer ring 51a of the wave generator 51, and this flexspline 53 is a thin cup-shaped metal elastic body part with teeth engraved on the outer periphery of the opening. The flex spline 53 is fastened to a hollow output portion 54 corresponding to the hollow carrier 25 of the first embodiment. Alternatively, the hollow output portion 54 and the flex spline 53 can be integrally formed.

The wave gear mechanism 50 is based on the principle of the wave gear mechanism, and the rotation of the wave generator 51 is transmitted to the flex spline 53, the teeth of the circular spline 52 mesh with the long axis portion, and the teeth of the short shaft portion are complete. It will be in a state away from. When the circular spline 52 is fixed and the wave generator 51 is rotated in the clockwise direction, the flex spline 53 is elastically deformed, and the meshing position of the teeth with the circular spline 52 sequentially moves. When the wave generator 51 rotates once, the flex spline 53 moves counterclockwise by two teeth difference. Thus, the decelerated rotation is output from the flex spline 53. A hollow output portion 54 is fastened to the flex spline 53, and the drive nut member 31 is coupled to the hollow output portion 54 and rotates in synchronization with the hollow output portion 54.
As in the case of the planetary gear reduction mechanism 20, the amount of deceleration by the wave gear mechanism 50 appears as an increase in the linear motion power of the output screw shaft 32. Also, the resolution is increased by the amount of deceleration.

  In the first and second embodiments, the planetary gear reduction mechanism 20 and the wave gear mechanism 50 have been described as examples. However, any other reduction mechanism can be applied as long as the input shaft and the output shaft are concentric. It can be done.

[Embodiment 3]
FIG. 5 is an outline view showing another embodiment of the present invention. The same parts as those in FIG. 1 are denoted by the same reference numerals, and description of the same parts is omitted.
In this embodiment, a guide mechanism 6 is provided outside a linear actuator 4 including a motor unit 1, a speed reduction mechanism unit 2, and a linear motion mechanism unit 3.
The guide mechanism 6 is provided with sliding guide mechanisms 60 on both sides of the linear actuator 4, and a linear shaft 61 supported by a linear bearing provided in the sliding guide mechanism 60 is connected to the output screw shaft 32 and a connecting member 62. It is connected via.
The guide mechanism 6 can stabilize the linear motion power (thrust) increased by the speed reduction mechanism, and can also have a function of preventing the output screw shaft 32 from rotating.

[Embodiment 4]
FIG. 6 is a cross-sectional view showing another embodiment of the present invention. The same parts as those in FIG.
In the present embodiment, an electromagnetic brake 7 is attached to the opposite output shaft side of the motor unit 1. The electromagnetic brake 7 is housed in an electromagnetic brake cover 70 outside the sensor cover 16 in the axial direction and provided with an electromagnetic brake main body 71. In this case, a hollow rotary shaft 13A is formed in the electromagnetic brake 7 so as to extend in the axial direction so that the output screw shaft 32 can be introduced into the electromagnetic brake 7, and the motor portion 1, the speed reduction mechanism portion 2, and the linear motion mechanism. It is provided so as to be able to move in the axial direction over the portion 3 and the electromagnetic brake 7.
Thus, braking can be efficiently performed by the electromagnetic brake 7.

[Embodiment 5]
FIG. 7 is a cross-sectional view showing another embodiment of the present invention. The same parts as those in FIG.
In this embodiment, the non-output shaft side of the hollow rotating shaft 13 of the motor is a solid shaft 13B. By using a solid shaft, the outer diameter of the shaft can be made smaller than that of the hollow rotary shaft 13, and the rotation detector 15 and the electromagnetic brake 7 can be attached to the outside of the intermediate shaft 13B. 15 and the electromagnetic brake 7 can be reduced in size.

[Embodiment 6]
FIG. 8 is a cross-sectional view showing another embodiment of the present invention. The same parts as those in FIG.
In this embodiment, the planetary gear reduction mechanism 20 is used as in the first embodiment. The internal gear 21 of the planetary gear reduction mechanism 20 is fastened to the bearing holder 34 with a plurality of bolts. In particular, when the reduction ratio of the planetary gear speed reduction mechanism 20 is increased, in the example of the first embodiment, a large torque is applied to the internal gear 21, and the torque applied from the planetary gear 22 cannot be withstood only by the fastening force of the bolt. There is a case.
In the present embodiment, a bearing holder 34a with ribs is used, and the rib portion 34b of the bearing holder 34a is fixed by covering the exposed portion of the internal gear 21, thereby fixing the rotation direction of the internal gear 21. I do. Even in the case of a high reduction ratio, the torque applied to the internal gear 21 can be resisted by fastening the internal gear 21 to the bearing holder 34a with ribs by bolts and fixing with the ribs 34b.

According to the above embodiment, the following effects can be obtained.
In the axial direction of the motor 1, a speed reduction mechanism portion 2 including a reduction gear mechanism and a linear motion mechanism portion 3 including a drive nut member 31 using a hollow ball screw nut are provided side by side. The hollow output shaft 13 is inserted through the tip output portion of the hollow rotation shaft 13 into the speed reduction mechanism portion 2 and the planetary gear speed reduction mechanism 20 or the wave gear speed reduction mechanism 50 incorporated in the speed reduction mechanism portion 2. 13 is transmitted to the drive nut member 31, and the output screw shaft 32 using a ball screw shaft that is screwed into the drive nut member 31 and moves linearly is connected to the motor 1, the speed reduction mechanism unit 2, and Since the linear motion mechanism unit 3 is inserted on the same axis, the linear motion power can be increased by the reduction gear mechanisms 20 and 50, and the output screw shaft 32 is connected to the motor 1, the speed reduction mechanism unit 2 and the linear motion mechanism unit 3. Insert it on the axis and output Since it is possible to house the effective stroke of the shaft 32 may be a dead space is not full length to obtain a short linear actuator.
Moreover, since the input part of the speed reduction mechanism part is directly fastened to the tip output part of the hollow rotating shaft 13 of the motor 1, the coupling required for the connection between the motor 1 and the speed reduction mechanism part can be omitted. A linear actuator having a shorter overall length can be obtained.
Further, since the linear motion mechanism 3 that houses the drive nut member 31 is provided with a bearing 33 for receiving a thrust load and a radial load applied to the drive nut member 31, the output screw shaft 32 is supported. The two types of bearing mechanisms that receive the rotation and linear motion thrust of the drive nut member 31 can be unified, space can be saved while reducing the number of parts, and the swing of the drive nut member 31 can be suppressed. And by this structure, a full length can be shortened.

  The present invention is not limited to the above-described embodiment. For example, the planetary gear reduction mechanism 20 or the wave gear reduction mechanism 50 has been described as the reduction mechanism unit 2, but the input shaft and the output shaft are concentric. Any speed reduction mechanism can be applied as long as it is a speed reduction mechanism. The wave generator 51 of the wave gear mechanism 50 is directly fastened to the tip output portion of the hollow rotary shaft 13 and the tip output portion of the hollow rotary shaft 13 is directly attached to the tip output portion of the hollow rotary shaft 13. However, it is also possible to connect to the sun gear 24 via another gear or to fasten to the wave generator 51 via another mechanism. Furthermore, a load may be directly connected to the output screw shaft 32, or may be connected to the load via another connecting member. In addition, it goes without saying that the present invention can be implemented with appropriate modifications within the scope not changing the technical scope of the present invention.

DESCRIPTION OF SYMBOLS 1 Motor 2 Deceleration mechanism part 3 Linear motion mechanism part 4 Linear actuator 6 Guide mechanism 7 Electromagnetic brake 11 Stator 12 Rotor 13 Hollow rotary shaft 14 Bracket 15 Rotation detection part 16 Sensor cover 17 Flange 18, 19 Motor bearing 20 Planetary gear mechanism 21 Internal gear 22 Planetary gear 23 Planetary gear shaft 24 Sun gear 25 Hollow carrier 31 Drive nut member (ball screw nut)
32 Output screw shaft (ball screw shaft)
33 Thrust / Radial Bearing 34 Bearing Holder 35 Bearing Cover 36 Lock Nut 37 Flange 50 Wave Gear Mechanism 51 Wave Generator 52 Circular Spline 53 Flex Spline 54 Hollow Output of Flex Spline

Claims (3)

A motor having a hollow rotary shaft formed in a cylindrical shape, and a screw portion that is inserted into an axis of the hollow rotary shaft and screwed into a screw portion formed on a peripheral surface of the output screw shaft. In a linear actuator provided with a driving nut member formed on an inner peripheral surface, and transmitting the rotation of the hollow rotating shaft of the motor to the driving nut member to linearly move the output screw shaft, A reduction mechanism portion incorporating a reduction gear mechanism and a linear motion mechanism portion incorporating the drive nut member are juxtaposed, and the tip output portion of the hollow rotating shaft of the motor is inserted into the reduction mechanism portion. And the output screw that transmits the rotation of the hollow rotary shaft to the drive nut member via a reduction gear mechanism built in the speed reduction mechanism portion, and is screwed into the drive nut member to move linearly. Shaft, said motor, A planetary gear mechanism is used for the reduction gear mechanism, and a sun gear of the planetary gear mechanism is attached to the tip output portion of the hollow rotating shaft of the motor. A plurality of planetary gears that planetarily move while meshing with the sun gear and an internal gear provided in the speed reduction mechanism unit, and the hollow output unit that is rotatably incorporated in the linear motion mechanism unit The planetary gear is pivotally supported, and the driving nut member is attached to the hollow output portion. The internal gear forms a housing of the speed reduction mechanism portion, and a rib holder is attached to the bearing holder of the linear motion mechanism portion. The linear actuator is fixed by covering the exposed portion of the internal gear with the rib portion of the bearing holder . A motor having a hollow rotary shaft formed in a cylindrical shape, and a screw portion that is inserted into an axis of the hollow rotary shaft and screwed into a screw portion formed on a peripheral surface of the output screw shaft. In a linear actuator provided with a driving nut member formed on an inner peripheral surface, and transmitting the rotation of the hollow rotating shaft of the motor to the driving nut member to linearly move the output screw shaft, A reduction mechanism portion incorporating a reduction gear mechanism and a linear motion mechanism portion incorporating the drive nut member are juxtaposed, and the tip output portion of the hollow rotating shaft of the motor is inserted into the reduction mechanism portion. And the output screw that transmits the rotation of the hollow rotary shaft to the drive nut member via a reduction gear mechanism built in the speed reduction mechanism portion, and is screwed into the drive nut member to move linearly. Shaft, said motor, A speed gear unit and a linear motion mechanism unit are inserted on the same axis, and a wave gear mechanism is used as the reduction gear mechanism, and a wave generator of the wave gear mechanism is mounted at the tip output portion of the hollow rotating shaft of the motor. A flex spline that rotates while meshing with the wave generator and a circular spline provided in the speed reduction mechanism section is provided, and the flex output line that is rotatably incorporated in the linear motion mechanism section is provided in the flex output line. A spline is provided, and the drive nut member is attached to the hollow output portion. The circular spline forms a housing of the speed reduction mechanism portion, and a bearing with a rib is mounted on a bearing holder of the linear motion mechanism portion. Use a holder and cover the exposed part of the circular spline with the rib part of the bearing holder. Linear actuator characterized by. Two linear bearings for receiving a thrust load and a radial load applied to the drive nut member are provided in the hollow output portion in the linear motion mechanism portion that houses the drive nut member. The linear actuator according to claim 1 or 2 .

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