JP6327835B2 - Laminated magnetic body, laminated magnetic core and manufacturing method thereof - Google Patents
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本発明は、トランスやインダクタ、リアクトル用磁心に好適な積層磁性体、積層磁心およびその製造方法に関する。 The present invention relates to a laminated magnetic body suitable for a transformer, an inductor, and a reactor magnetic core, a laminated magnetic core, and a manufacturing method thereof.
Fe基ナノ結晶合金は、高い飽和磁束密度と低い磁歪の両立が可能な軟磁性材料である。このFe基ナノ結晶合金を得るためには、非晶質構造を有する軟磁性合金組成物に対して熱処理し、微細なbccFe結晶(α−Fe)を析出させる必要がある。 The Fe-based nanocrystalline alloy is a soft magnetic material capable of achieving both high saturation magnetic flux density and low magnetostriction. In order to obtain this Fe-based nanocrystalline alloy, it is necessary to heat-treat the soft magnetic alloy composition having an amorphous structure to precipitate fine bccFe crystals (α-Fe).
しかし、微細な結晶が析出する際に自己発熱を起こし、α−Fe結晶以外にFe−B等の化合物が析出される場合がある。このFe−B等の化合物が析出される事で、所望の磁気特性が得られないという問題が生じる。 However, self-heating occurs when fine crystals are precipitated, and compounds such as Fe-B may be precipitated in addition to α-Fe crystals. The precipitation of the compound such as Fe-B causes a problem that desired magnetic properties cannot be obtained.
また、微細な結晶析出に伴う発熱が過大になると、結晶粒が成長し過ぎて充分な磁気特性が得られないという問題が生じる。 In addition, if the heat generation accompanying fine crystal precipitation becomes excessive, there is a problem that crystal grains grow too much and sufficient magnetic properties cannot be obtained.
Fe基非晶質合金の組成物にNbやZr等の金属元素が添加されていると、熱処理時における結晶の粒成長を抑制できることが知られている。しかし、これらの金属元素を添加すると、飽和磁束密度の低下や、NbやZrが高価であるため製品価格に影響するという問題が生じる。 It is known that when a metal element such as Nb or Zr is added to the composition of the Fe-based amorphous alloy, crystal grain growth during heat treatment can be suppressed. However, when these metal elements are added, there arises a problem that the saturation magnetic flux density is lowered and the product price is affected because Nb and Zr are expensive.
一方、NbやZr等の金属元素を添加しないFe基非晶質合金の組成物を用いた場合、高い飽和磁束密度を得られるが、結晶の粒成長が早いため、熱処理の昇温速度が低いと結晶が粗大化し、充分な磁気特性が得られないという問題が生じる。 On the other hand, when a composition of an Fe-based amorphous alloy not added with a metal element such as Nb or Zr is used, a high saturation magnetic flux density can be obtained, but since the crystal grain growth is fast, the heating rate of the heat treatment is low. As a result, the crystal becomes coarse and sufficient magnetic properties cannot be obtained.
ここで、α−Fe結晶やFe−B等の化合物が析出する結晶化温度について説明する。非晶質構造を有する軟磁性合金組成物を熱処理すると、α−Fe結晶やFe−B等の化合物が析出する際に、相構造の変化に伴う発熱が発生する。この発熱が発生する温度と発熱量は、示差走査型熱量分析計(DSC)で測定することで知ることができる。図3は軟磁性合金組成物の発熱挙動を示差走査型熱量分析計(DSC)で測定した結果を示す図である。図3に示されるように、非晶質構造を有する軟磁性合金組成物を熱処理すると、2つの発熱ピークが確認される。低温側のピークがα−Fe結晶の析出に伴う発熱、高温側のピークが化合物析出に伴う発熱によるものである。α−Fe結晶の結晶化が開始した温度31を第1結晶化温度(Tx1)といい、Fe−B等の化合物の結晶化が開始した温度32を第2結晶化温度(Tx2)という。第2結晶化温度と第1結晶化温度の温度差(Tx2−Tx1)はΔTで表され、ΔTが大きいと安定的に熱処理できる。
Here, the crystallization temperature at which a compound such as α-Fe crystal or Fe-B precipitates will be described. When a soft magnetic alloy composition having an amorphous structure is heat-treated, heat is generated due to a change in phase structure when a compound such as α-Fe crystal or Fe-B is precipitated. The temperature at which this heat is generated and the amount of heat generated can be known by measuring with a differential scanning calorimeter (DSC). FIG. 3 is a diagram showing the results of measuring the exothermic behavior of the soft magnetic alloy composition with a differential scanning calorimeter (DSC). As shown in FIG. 3, when the soft magnetic alloy composition having an amorphous structure is heat-treated, two exothermic peaks are confirmed. The peak on the low temperature side is due to the exotherm accompanying the precipitation of the α-Fe crystal, and the peak on the high temperature side is due to the heat generation associated with the compound precipitation. The
従来技術では、磁心を形成する場合に、軟磁性合金粉末を所望の形状に成形して作製する方法や、軟磁性合金からなる薄帯を積層して作製する方法、軟磁性合金からなる薄帯を環状に巻き込んで作製する方法等が用いられている。 In the prior art, when forming a magnetic core, a method of forming a soft magnetic alloy powder into a desired shape, a method of stacking thin ribbons made of soft magnetic alloys, a thin ribbon made of soft magnetic alloys A method of winding a ring in a ring shape is used.
図2に示すように、軟磁性合金薄帯21を環状に巻き込んで作製した磁心2では、磁心2の表面に露出する内側22や外側23よりも、軟磁性合金薄帯21を積層した厚みの中間部分である内部24は、微細な結晶析出に伴う発熱が集中しやすい。また、磁心2の内側22や外側23よりも、磁心2の内部24が最も放熱しにくいため、熱暴走を起こしやすい。特に磁心が大型の場合には、より顕著な自己発熱を起こし、充分な磁気特性が得られない。
As shown in FIG. 2, in the
微細な結晶が析出する際の自己発熱を抑制する従来の熱処理方法として、例えば特許文献1に開示された方法がある。特許文献1では、結晶化開始温度よりも高く、かつ化合物相を実質的に形成しない温度で2回以上にわたって熱処理行うことで、自己発熱による過剰な温度上昇を防止する方法が開示されている。 As a conventional heat treatment method for suppressing self-heating when fine crystals are precipitated, there is a method disclosed in Patent Document 1, for example. Patent Document 1 discloses a method for preventing an excessive temperature rise due to self-heating by performing heat treatment at least twice at a temperature higher than the crystallization start temperature and substantially not forming a compound phase.
しかしながら、従来技術は1回目の熱処理後に磁心の温度を低下させる降温工程があるため、熱処理回数を増やせば増やす分だけ時間がかかるという課題がある。 However, since the prior art includes a temperature lowering process for lowering the temperature of the magnetic core after the first heat treatment, there is a problem that if the number of heat treatments is increased, it takes time to increase.
また、結晶化に伴う発熱が開始した時点で1回目の熱処理を終了させたとしても、薄帯を積層した厚みの中間部分である磁心の内部は磁心の表面に露出する内側や外側に比べれば放熱しにくい為、温度が上昇し、所望する磁気特性が得られないという課題がある。それは、磁心が大型である程、自己発熱量の増加と放熱性の低下により、内部の温度は上昇し、磁気特性が低下する。 Moreover, even if the first heat treatment is terminated when heat generation due to crystallization starts, the inside of the magnetic core, which is the middle part of the thickness of the laminated ribbons, is compared to the inside and outside exposed on the surface of the magnetic core. Since it is difficult to dissipate heat, there is a problem that the temperature rises and the desired magnetic properties cannot be obtained. That is, the larger the magnetic core, the higher the internal temperature and the lower the magnetic properties due to the increase in the amount of self-heating and the decrease in heat dissipation.
さらに、結晶化に伴う発熱が開始した時点で1回目の熱処理を終了させたとしても、熱処理炉内の雰囲気温度が熱処理を終了した時の温度を長時間保っている場合には、やはり放熱が望むようには進まず、磁心温度が上昇し、充分な磁気特性が得られないという課題がある。この場合も、磁心が大型である程、自己発熱量の増加と放熱性の低下により、内部の温度は上昇し、磁気特性が低下する。 Furthermore, even if the first heat treatment is terminated when the heat generation due to crystallization starts, if the atmospheric temperature in the heat treatment furnace is maintained at the same temperature as when the heat treatment is terminated, the heat radiation is still performed. There is a problem that the magnetic core temperature rises and sufficient magnetic properties cannot be obtained without proceeding as desired. In this case as well, the larger the magnetic core, the higher the internal temperature increases due to the increase in the amount of self-heating and the decrease in heat dissipation, and the magnetic characteristics deteriorate.
そこで本発明は、化合物の析出を抑制し、優れた磁気特性を有する積層磁心を提供することを目的とする。 Accordingly, an object of the present invention is to provide a laminated magnetic core that suppresses the precipitation of a compound and has excellent magnetic properties.
上記の課題を解決するために、本発明によればFe基非晶質合金よりなる軟磁性薄帯を少なくとも2層積層し、一方の前記軟磁性薄帯の熱処理後の析出結晶における平均粒径が、他方の前記軟磁性薄帯の熱処理後の析出結晶における平均粒径より大きい積層磁心が得られる。 In order to solve the above problems, according to the present invention, at least two layers of soft magnetic ribbons made of an Fe-based amorphous alloy are laminated, and one of the soft magnetic ribbons has an average grain size in a precipitated crystal after heat treatment However, a laminated magnetic core larger than the average particle diameter in the precipitated crystal after heat treatment of the other soft magnetic ribbon is obtained.
また、本発明の積層磁心は前記平均粒径が大きい方の前記軟磁性薄帯1層に対し、前記平均粒径が小さい方の前記軟磁性薄帯は1層以上、10層以下を積層していることが望ましい。 In the laminated magnetic core of the present invention, the soft magnetic ribbon having the smaller average particle diameter is laminated in the range of 1 to 10 layers with respect to the soft magnetic ribbon having the larger average particle diameter. It is desirable that
また、本発明の積層磁心の前記軟磁性薄帯は、非晶質単相の軟磁性薄帯および軟磁性薄帯内部に非晶質相を残した部分結晶薄帯の2種類からなることが望ましい。 In addition, the soft magnetic ribbon of the laminated magnetic core of the present invention may be composed of two types: an amorphous single-phase soft magnetic ribbon and a partially crystalline ribbon that leaves an amorphous phase inside the soft magnetic ribbon. desirable.
また、本発明の積層磁心は占積率が80%以上であることが望ましい。 The laminated magnetic core of the present invention preferably has a space factor of 80% or more.
また、本発明の積層磁心は熱処理後の析出結晶における平均粒径が25nm以下であるが望ましい。 The laminated magnetic core of the present invention desirably has an average particle size of 25 nm or less in the precipitated crystals after heat treatment.
本発明によれば、Fe基非晶質合金よりなる非晶質単相の軟磁性薄帯と、Fe基非晶質合金よりなる軟磁性薄帯内部に非晶質相を残した部分結晶薄帯とを積層した積層磁性体が得られる。 According to the present invention, an amorphous single-phase soft magnetic ribbon made of an Fe-based amorphous alloy and a partially crystalline thin film in which an amorphous phase remains inside the soft-magnetic ribbon made of an Fe-based amorphous alloy. A laminated magnetic body in which bands are laminated is obtained.
また、本発明の積層磁性体は前記軟磁性薄帯1層に対し、前記部分結晶薄帯は1層以上、10層以下を積層していることが望ましい。 In the laminated magnetic body of the present invention, it is desirable that one layer or more and ten or less layers of the partial crystal ribbon are laminated with respect to one layer of the soft magnetic ribbon.
本発明によれば、Fe基非晶質合金よりなる非晶質単相の軟磁性薄帯を作製する工程と、Fe基非晶質合金よりなる軟磁性薄帯内部に非晶質相を残した部分結晶薄帯を作製する工程と、前記軟磁性薄帯および前記部分結晶薄帯とを積層して熱処理する工程とを有した積層磁心の製造方法が得られる。 According to the present invention, an amorphous single-phase soft magnetic ribbon made of an Fe-based amorphous alloy is produced, and an amorphous phase is left inside the soft-magnetic ribbon made of an Fe-based amorphous alloy. A method of manufacturing a laminated magnetic core having a step of manufacturing a partially crystalline ribbon and a step of laminating the soft magnetic ribbon and the partially crystalline ribbon and heat-treating them is obtained.
本発明によれば、非晶質相を残した部分結晶薄帯は既に一部が結晶化しているため、熱処理に伴う自己発熱量が少なく、軟磁性薄帯と重ねて作製した積層磁心の自己発熱総量を低減できる。 According to the present invention, since the partially crystalline ribbon that has left the amorphous phase has already been partially crystallized, the amount of self-heating generated by the heat treatment is small, and the self-heating of the laminated magnetic core produced by superimposing the soft magnetic ribbon The total amount of heat generation can be reduced.
また、放熱性を向上させる方法として、軟磁性薄帯と結晶質である放熱用の金属薄帯とを積層する方法や、放熱用の金属部材に軟磁性薄帯を巻き回すなどの方法が知られているが、これらの方法では占積率の向上のため、熱処理後に放熱用の金属薄帯や金属部材を取り除く工程が必要となる。また、放熱用の金属薄帯や金属部材を取り除いた後、再び磁性体を巻きなおしたり、積層しなおしたりする工程も必要となる。 In addition, as a method for improving heat dissipation, there are known a method of laminating a soft magnetic ribbon and a crystalline metal ribbon for heat dissipation, and a method of winding a soft magnetic ribbon around a metal member for heat dissipation. However, in these methods, in order to improve the space factor, a step of removing a metal strip or metal member for heat dissipation after heat treatment is required. Moreover, after removing the metal strip or metal member for heat dissipation, the process of rewinding a magnetic body again or restacking is also needed.
本発明によれば、部分結晶薄帯は軟磁性薄帯の自己発熱に対する放熱の役割も果たすため、これらの工程は不要となり、さらに積層磁心の過剰な温度上昇を抑制できる。 According to the present invention, since the partial crystal ribbon also plays a role of heat dissipation against the self-heating of the soft magnetic ribbon, these steps are unnecessary, and an excessive temperature rise of the laminated magnetic core can be suppressed.
以上のことより、化合物の析出を抑制し、優れた磁気特性を有する積層磁性体、積層磁心およびその製造方法が得られる。 From the above, it is possible to obtain a laminated magnetic body, a laminated magnetic core and a method for producing the same, which suppress the precipitation of the compound and have excellent magnetic properties.
以下、本発明の実施の形態について、詳細に説明する。 Hereinafter, embodiments of the present invention will be described in detail.
(第1の実施の形態)
図1は本発明による積層磁心を示す概略図である。図1に示すように、Fe基非晶質合金よりなる非晶質単相の軟磁性薄帯11と、Fe基非晶質合金よりなる軟磁性薄帯内部に非晶質相を残した部分結晶薄帯12を、重ねて巻き回し、積層磁性体を作製する。その後、熱処理を行って積層磁心1を作製している。
(First embodiment)
FIG. 1 is a schematic view showing a laminated magnetic core according to the present invention. As shown in FIG. 1, an amorphous single-phase soft
まず、Fe基非晶質合金よりなる非晶質単相の軟磁性薄帯11を作製し、Fe基非晶質合金よりなる軟磁性薄帯に熱処理を施して部分結晶薄帯12を作製する。この熱処理の条件は、α−Fe結晶を析出でき、かつFe−B等の化合物が析出しない温度と時間を適宜設定すればよい。具体的には、熱処理温度は第1結晶化温度−100℃以上、第2結晶化温度未満で行い、熱処理時間は0.01秒以上、600.00秒以下で適宜設定すればよく、高温で行う場合は短時間で熱処理を行い、低温で行う場合は長時間の熱処理を行えばよい。
First, an amorphous single-phase soft
その後、軟磁性薄帯11と部分結晶薄帯12を重ねて巻き回し、積層磁性体を作製する。作製した積層磁性体に熱処理を行うことで、積層磁性体の表面に露出する内側や外側より結晶化が始まり、薄帯を積層した厚みの中間部分である積層磁性体の内部に向かって伝熱し、軟磁性薄帯11と部分結晶薄帯12に微細なα−Fe結晶を完全に析出させることで、積層磁心1を作製する。
Thereafter, the soft
積層磁性体の熱処理条件はα−Fe結晶を析出でき、かつFe−B等の化合物が析出しない温度と時間を適宜設定すればよい。具体的には、熱処理温度は第1結晶化温度−100℃以上、第2結晶化温度未満で行い、熱処理時間は1.00秒以上、3600.00秒以下で適宜設定すればよく、高温で行う場合は短時間で熱処理を行い、低温で行う場合は長時間の熱処理を行えばよい。 The heat treatment conditions for the laminated magnetic material may be set as appropriate at a temperature and a time at which α-Fe crystals can be precipitated and a compound such as Fe-B does not precipitate. Specifically, the heat treatment temperature may be set at a first crystallization temperature of −100 ° C. or more and less than the second crystallization temperature, and the heat treatment time may be appropriately set at 1.00 seconds or more and 3600.00 seconds or less. When it is performed, the heat treatment is performed in a short time, and when it is performed at a low temperature, the heat treatment may be performed for a long time.
また、部分結晶薄帯を作製する熱処理および積層磁性体の熱処理の手段について特に制限はなく、アルゴン等の不活性ガス雰囲気下など、従来の熱処理方法を用いて行えばよい。 Further, there is no particular limitation on the heat treatment method for producing the partial crystal ribbon and the heat treatment of the laminated magnetic material, and a conventional heat treatment method such as in an inert gas atmosphere such as argon may be used.
部分結晶薄帯12は、軟磁性薄帯の一部に微細なα−Fe結晶を析出させているため、熱処理に伴う自己発熱量は少ない。そのため、この部分結晶薄帯12と軟磁性薄帯11とを積層した積層磁性体とすることによって、熱処理に伴う積層磁心1の自己発熱量を低減できる。積層磁心が大型の場合にも、熱処理に伴う積層磁心1の自己発熱量は低減する。
The
また、部分結晶薄帯12は、軟磁性薄帯の一部に微細なα−Fe結晶を析出させているため、積層磁心1が低昇温速度で熱処理を行った場合においても、結晶の粗大化を抑制できる。そのため、部分結晶薄帯12の析出結晶における平均粒径は軟磁性薄帯11の析出結晶における平均粒径より小さくなる。
In addition, since the
また、熱処理に伴う軟磁性薄帯11の自己発熱は、熱処理の空気中以外に、部分結晶薄帯12にも放熱されるため、積層磁心1の放熱性が向上し、積層磁心1の過剰な温度上昇を抑制できる。積層磁心が大型の場合にも、熱処理に伴う軟磁性薄帯11の自己発熱は、空気中や、隣接する部分結晶薄帯12に放熱されるため、薄帯を積層した厚みの中間部分である積層磁心1の内部であっても、過剰な温度上昇を抑制できる。
In addition, since the self-heating of the soft
このように、本発明によれば、自己発熱量を低減でき、積層磁心の過剰な温度上昇を抑制できるため、所望の温度条件で熱処理が可能となり、軽量で小型の積層磁心のみならず、大重量で大型の積層磁心においても、結晶の粗大化およびFe−B等の化合物の析出を抑えられ、優れた磁気特性が得られる。 As described above, according to the present invention, the amount of self-heating can be reduced, and an excessive temperature rise of the laminated magnetic core can be suppressed. Therefore, heat treatment can be performed at a desired temperature condition, and not only a lightweight and small laminated magnetic core can be used. Even in a large-sized laminated magnetic core, crystal coarsening and precipitation of a compound such as Fe-B can be suppressed, and excellent magnetic properties can be obtained.
つまり、本発明の軟磁性薄帯はNbやZr等の金属元素を添加した組成物でも、添加しない組成物でも、優れた磁気特性が得られるため、Fe−Si−B−Nb−Cu系やFe−(Nb、Zr)−B系、Fe−(Si、B、P、C)−Cu系などの、熱処理を施すことでα−Fe結晶を析出するFe基非晶質合金を用いることが可能である。また、Fe−(Si、B、P、C)−Cu系のFe基非晶質合金の組成は後述する範囲で設定することが望ましい。 That is, since the soft magnetic ribbon of the present invention can provide excellent magnetic properties with a composition to which a metal element such as Nb or Zr is added or a composition without the addition, an Fe—Si—B—Nb—Cu system, Use of an Fe-based amorphous alloy that precipitates α-Fe crystals by heat treatment, such as Fe— (Nb, Zr) —B, Fe— (Si, B, P, C) —Cu, etc. Is possible. The composition of the Fe- (Si, B, P, C) -Cu-based Fe-based amorphous alloy is preferably set within the range described below.
Fe元素は磁性を担う主元素であり、飽和磁束密度の向上および原料価格の低減のため、割合は多い方が望ましい。均質な微細結晶組織を得て、また、望ましい飽和磁束密度を得るため、Feの割合は79at%以上が望ましく、さらに高い飽和磁束密度を得るために81at%以上がより望ましい。また、Fe量が過剰になると非晶質相の形成能が低下し、結晶粒径のばらつきや粗大化が生じて磁気特性が低下するため、Feの割合は86at%以下が望ましい。 Fe element is the main element responsible for magnetism, and it is desirable that the ratio is large in order to improve the saturation magnetic flux density and reduce the raw material price. In order to obtain a homogeneous fine crystal structure and to obtain a desired saturation magnetic flux density, the Fe ratio is desirably 79 at% or more, and in order to obtain a higher saturation magnetic flux density, 81 at% or more is more desirable. Further, when the amount of Fe is excessive, the ability to form an amorphous phase is reduced, and variation in crystal grain size and coarsening occur, resulting in a decrease in magnetic properties. Therefore, the Fe ratio is desirably 86 at% or less.
Si元素は非晶質相形成を担う元素であり、必ずしも含まれなくても良いが、ΔTを拡大できるため、結晶化にあたっては微細な結晶の安定化に寄与する。Si量が過剰になると非晶質相の形成能が低下して充分な磁気特性が得られないため、Siの割合は10at%以下が望ましく、8at%以下がより望ましい。 The Si element is an element responsible for forming an amorphous phase and does not necessarily need to be included. However, since ΔT can be increased, it contributes to the stabilization of fine crystals during crystallization. If the amount of Si is excessive, the ability to form an amorphous phase is lowered and sufficient magnetic properties cannot be obtained. Therefore, the Si ratio is preferably 10 at% or less, and more preferably 8 at% or less.
B元素は非晶質相形成を担う元素であり、軟磁性薄帯を安定的に作製するため、Bの割合は1at%以上が望ましい。さらに、ΔTを拡大でき、結晶化にあたっては微細な結晶の安定化に寄与するため、5at%以上がより望ましい。また、B量が過剰になると非晶質相の形成能が低下して軟磁性薄帯の作製が困難となるため、15at%以下が望ましく、均質な微細結晶組織を得るために13at%以下がより望ましい。特に量産化のため合金組成物が低い融点を有する必要がある場合は、Bの割合は10at%以下であることがより望ましい。 The B element is an element responsible for forming an amorphous phase, and the ratio of B is preferably 1 at% or more in order to stably produce a soft magnetic ribbon. Furthermore, ΔT can be enlarged, and at the time of crystallization, it contributes to the stabilization of fine crystals. Further, if the amount of B is excessive, the ability to form an amorphous phase is lowered and it becomes difficult to produce a soft magnetic ribbon. Therefore, it is preferably 15 at% or less, and 13 at% or less for obtaining a homogeneous fine crystal structure. More desirable. In particular, when the alloy composition needs to have a low melting point for mass production, the ratio of B is more preferably 10 at% or less.
P元素は非晶質相形成を担う元素であり、微細な結晶を得るための必須元素である。軟磁性薄帯を安定的に作製するため、Pの割合は1at%以上が望ましく、均質な微細結晶組織を得られるため3at%以上がより望ましい。また、P量が過剰になるとΔTが狭くなり、安定的な熱処理が困難となるため、15at%以下が望ましい。また、望ましい飽和磁束密度を得られるため、10at%以下がより望ましく、さらに高い飽和磁束密度得られるため、8at%以下がより望ましい。 The P element is an element responsible for forming an amorphous phase and is an essential element for obtaining fine crystals. In order to stably produce a soft magnetic ribbon, the proportion of P is preferably 1 at% or more, and more preferably 3 at% or more in order to obtain a homogeneous fine crystal structure. Further, if the amount of P becomes excessive, ΔT becomes narrow and stable heat treatment becomes difficult, so 15 at% or less is desirable. Moreover, 10 at% or less is more desirable because a desired saturation magnetic flux density can be obtained, and 8 at% or less is more desirable because a higher saturation magnetic flux density can be obtained.
C元素は非晶質相形成を担う元素であり、必ずしも含まれなくても良いが、Si元素、B元素、P元素などの組み合わせにより、非晶質相の形成能や微細な結晶の安定性を高めることが可能となる。また、Cは安価であるため、Cの添加により総材料コストが低減される。但し、合金組成物が脆化して磁気特性が低下するのを防止するため、Cの割合は10at%以下が望ましい。また、合金組成物の溶解時におけるCの蒸発に起因した組成のばらつきを抑制するため、4at%以下がより望ましい。 C element is an element responsible for forming an amorphous phase and may not necessarily be included. However, by combining Si element, B element, P element, etc., the ability to form an amorphous phase and the stability of fine crystals Can be increased. Further, since C is inexpensive, the total material cost is reduced by the addition of C. However, in order to prevent the alloy composition from becoming brittle and lowering the magnetic properties, the proportion of C is preferably 10 at% or less. Further, 4 at% or less is more desirable in order to suppress variation in composition due to evaporation of C during melting of the alloy composition.
Cu元素は微細結晶化に寄与する必須元素である。微細な結晶化が困難となるため、Cuの割合は0.4at%以上が望ましい。また、Cu量が過剰になると非晶質相の形成能が低下するため、2at%以下が望ましい。また、均質な微細結晶組織が得られ、磁気特性が向上するため、1.4at%以下がより望ましく、合金組成物の脆化および酸化を考慮すると、1.1at%以下がより望ましい。 Cu element is an essential element contributing to fine crystallization. Since fine crystallization is difficult, the proportion of Cu is preferably 0.4 at% or more. In addition, when the amount of Cu is excessive, the ability to form an amorphous phase is lowered, so 2 at% or less is desirable. Moreover, since a homogeneous fine crystal structure is obtained and magnetic characteristics are improved, 1.4 at% or less is more desirable, and 1.1 at% or less is more desirable in consideration of embrittlement and oxidation of the alloy composition.
また、PとCuとの間には、強い原子間引力がある。そのため、合金組成物が特定の比率のPとCuとを含んでいると、10nm以下のサイズのクラスターが形成され、この微細なクラスターによって、微細な結晶が析出する際にα−Fe結晶は微細構造を有するようになる。本実施の形態において、Pの割合(x)とCuの割合(z)との特定の比率(z/x)は、0.06以上、1.20以下が望ましい。この範囲以外では、均質な微細結晶組織が得られず、合金組成物は優れた磁気特性を有せない。なお、特定の比率(z/x)は、合金組成物の脆化および酸化を考慮すると、0.08以上、0.55以下がより望ましい。 Further, there is a strong interatomic attractive force between P and Cu. Therefore, when the alloy composition contains a specific ratio of P and Cu, a cluster having a size of 10 nm or less is formed, and when the fine crystal is precipitated by this fine cluster, the α-Fe crystal is fine. Has a structure. In the present embodiment, the specific ratio (z / x) between the ratio (x) of P and the ratio (z) of Cu is preferably 0.06 or more and 1.20 or less. Outside this range, a homogeneous fine crystal structure cannot be obtained, and the alloy composition cannot have excellent magnetic properties. The specific ratio (z / x) is more preferably 0.08 or more and 0.55 or less in consideration of embrittlement and oxidation of the alloy composition.
また、耐食性の改善や非晶質相の形成能の向上、結晶粒成長の制御のため、Feの3at%以下をTi、Zr、Hf、Nb、Ta、Mo、W、Cr、Co、Ni、Al、Mn、Zn、Sn、As、Sb、Bi、Y、N、O、Ca、V、Ma、希土類元素および貴金属金属元素のうち1つ以上の元素で置換しても良い。更に、飽和磁束密度や磁歪を制御するため、Feの30at%以下を磁性元素であるCoやNiと置換しても良い。 Further, in order to improve corrosion resistance, improve the ability to form an amorphous phase, and control grain growth, Fe, 3 at% or less of Ti, Zr, Hf, Nb, Ta, Mo, W, Cr, Co, Ni, One or more elements of Al, Mn, Zn, Sn, As, Sb, Bi, Y, N, O, Ca, V, Ma, rare earth elements and noble metal elements may be substituted. Furthermore, in order to control the saturation magnetic flux density and magnetostriction, 30 at% or less of Fe may be replaced with Co or Ni as magnetic elements.
ここで、非晶質構造を有する軟磁性薄帯は熱処理によって脆化するという特徴がある。そのため、完全に結晶化して脆化した軟磁性薄帯を巻き回して磁心を作製することは非常に困難となる。また、大きな張力をかけると破断するため、巻き回す際の張力を大きくできず、磁心の占積率が低下する。さらには、応力によって充分な磁気特性が得られないという問題もある。 Here, the soft magnetic ribbon having an amorphous structure is characterized by embrittlement by heat treatment. Therefore, it becomes very difficult to produce a magnetic core by winding a soft magnetic ribbon that has been completely crystallized and embrittled. Moreover, since it breaks when a large tension is applied, the tension at the time of winding cannot be increased, and the space factor of the magnetic core decreases. Furthermore, there is a problem that sufficient magnetic properties cannot be obtained due to stress.
本発明では、非晶質相を残した部分結晶薄帯とすることによって、比較的靭性のある薄帯となり、磁心の形成が容易となる。また、軟磁性薄帯と積層することによって、軟磁性薄帯が部分結晶薄帯の強度を補強するため、軟磁性薄帯と部分結晶薄帯とを重ねて巻き回す際に十分な張力をかけることが可能となり、高占積率の積層磁心が得られる。 In the present invention, by using a partially crystalline ribbon that leaves an amorphous phase, the ribbon becomes relatively tough and the magnetic core can be easily formed. In addition, since the soft magnetic ribbon reinforces the strength of the partial crystal ribbon by laminating with the soft magnetic ribbon, sufficient tension is applied when the soft magnetic ribbon and the partial crystal ribbon are wound together. Therefore, a laminated core having a high space factor can be obtained.
軟磁性薄帯と部分結晶薄帯の割合は、熱処理に伴う自己発熱量の低減および放熱性の向上のため、軟磁性薄帯1層に対して部分結晶薄帯は1層以上であることが望ましい。また、脆化した部分結晶薄帯の割合が多すぎると、機械的強度が不足し、高占積率の積層磁心を作製するのが困難となるため、軟磁性薄帯1層に対して部分結晶薄帯は10層以下であることが望ましく、巻き回す際の張力をより大きくできることから7層以下であることがより望ましい。 The ratio of the soft magnetic ribbon to the partial crystal ribbon is such that the partial crystal ribbon has one or more layers for one soft magnetic ribbon in order to reduce the amount of self-heating and improve the heat dissipation associated with the heat treatment. desirable. Further, if the ratio of the embrittled partial crystal ribbon is too large, the mechanical strength is insufficient, and it becomes difficult to produce a laminated core having a high space factor. The crystal ribbon is desirably 10 layers or less, and more desirably 7 layers or less because the tension during winding can be further increased.
また、積層磁心の飽和磁束密度が低下するのを抑制するため、積層磁心の占積率は80%以上であることが望ましい。 Further, in order to suppress a decrease in the saturation magnetic flux density of the laminated magnetic core, the space factor of the laminated magnetic core is desirably 80% or more.
また、部分結晶薄帯の結晶化率は、自己発熱量を低減し、積層磁心の作製が行える脆化に抑えられるため、0.05以上、0.95以下が望ましく、自己発熱量をより低減し、より靭性のある部分結晶薄帯とすることから、0.10以上、0.80以下がより望ましい。さらに、磁心の作製をより容易とし、巻き回す際の張力をより大きくして高占積率の積層磁心を得るため、0.25以下がより望ましい。ここで、本発明の結晶化率は析出可能なα−Fe結晶の析出の割合を示しており、試料振動型磁力計(VSM)を用いて飽和磁化の上昇率の割合を示したものである。 In addition, the crystallization rate of the partial crystal ribbon is desirably 0.05 or more and 0.95 or less because the self-heating value is reduced and embrittlement that can produce a laminated magnetic core is suppressed, and the self-heating value is further reduced. In order to make the partial crystal ribbon more tough, 0.10 or more and 0.80 or less are more desirable. Further, in order to make the magnetic core easier to manufacture and increase the tension at the time of winding to obtain a laminated magnetic core having a high space factor, 0.25 or less is more desirable. Here, the crystallization rate of the present invention indicates the rate of precipitation of α-Fe crystals that can be precipitated, and indicates the rate of increase in saturation magnetization using a sample vibration magnetometer (VSM). .
また、本発明において優れた磁気特性を得るためには、熱処理後の析出結晶における平均粒径が25nm以下(0を含まず)であることが望ましく、さらに、20nm以下(0を含まず)であればより優れた磁気特性が得られる。 In order to obtain excellent magnetic properties in the present invention, it is desirable that the average particle size in the precipitated crystals after the heat treatment is 25 nm or less (excluding 0), and further 20 nm or less (excluding 0). If it is, better magnetic properties can be obtained.
また、本発明において、軟磁性薄帯および部分結晶薄帯の厚みに、特に制限はないが、軟磁性薄帯および部分結晶薄帯の製造について考慮すると100μm以下(0を含まず)が望ましく、優れた磁気特性が得られるため、50μm以下(0を含まず)がより望ましい。さらに、量産化の製造容易性などを考慮すると35μm以下(0を含まず)が望ましい。 In the present invention, the thickness of the soft magnetic ribbon and the partial crystal ribbon is not particularly limited, but is preferably 100 μm or less (excluding 0) in consideration of the production of the soft magnetic ribbon and the partial crystal ribbon. In order to obtain excellent magnetic properties, 50 μm or less (not including 0) is more desirable. Furthermore, considering the ease of mass production, 35 μm or less (not including 0) is desirable.
(実施例1)
原料として、工業鉄、Fe−B合金、Fe−P合金および電気銅を使用した。これらの原料を組成式Fe84.3B6.0P9.0Cu0.7になるように秤量し、高周波溶解で溶解した後、単ロール急冷法を用いて、幅30mm、厚さ25μmの連続薄帯を作製した。この連続薄帯については、X線回折装置により非晶質単相であることを確認した。また、示差走査熱量測定計により、第1結晶化温度は410℃、第2結晶化温度は505℃であることを確認した。
Example 1
Industrial iron, Fe-B alloy, Fe-P alloy and electrolytic copper were used as raw materials. These raw materials were weighed so as to have a composition formula of Fe 84.3 B 6.0 P 9.0 Cu 0.7 , dissolved by high-frequency dissolution, and then 30 mm wide and 25 μm thick using a single roll quenching method. A continuous ribbon was prepared. This continuous ribbon was confirmed to be an amorphous single phase by an X-ray diffractometer. Further, it was confirmed by a differential scanning calorimeter that the first crystallization temperature was 410 ° C. and the second crystallization temperature was 505 ° C.
次に、作製した連続薄帯を裁断機により10mm幅になるよう切断して、軟磁性薄帯を得た。同様にして得た軟磁性薄帯を処理温度は440℃、処理時間は10秒に設定して熱処理を行い、軟磁性薄帯内部に非晶質相を残した部分結晶薄帯を得た。この部分結晶薄帯の結晶化率はおよそ0.55であった。 Next, the produced continuous ribbon was cut to a width of 10 mm with a cutter to obtain a soft magnetic ribbon. The soft magnetic ribbon obtained in the same manner was heat-treated at a processing temperature of 440 ° C. and a processing time of 10 seconds to obtain a partially crystalline ribbon with an amorphous phase remaining inside the soft magnetic ribbon. The crystallization rate of the partial crystal ribbon was about 0.55.
作製した軟磁性薄帯と部分結晶薄帯を長さ120cmに切断した。次に、軟磁性薄帯1層と部分結晶薄帯1層とを重ねて巻き回し、外径20.0mm、内径17.5mm、高さ10.0mm、重量4gの積層磁性体を作製した。この積層磁性体の占積率は82%であった。その後、積層磁性体に処理温度430℃、処理時間10分で設定した熱処理を行い、積層磁心を作製した。 The produced soft magnetic ribbon and partial crystal ribbon were cut to a length of 120 cm. Next, one layer of the soft magnetic ribbon and one layer of the partial crystal ribbon were overlapped and wound to produce a laminated magnetic body having an outer diameter of 20.0 mm, an inner diameter of 17.5 mm, a height of 10.0 mm, and a weight of 4 g. The space factor of this laminated magnetic body was 82%. Thereafter, the laminated magnetic body was subjected to heat treatment set at a treatment temperature of 430 ° C. and a treatment time of 10 minutes to produce a laminated magnetic core.
得られた積層磁心から、軟磁性薄帯であった部分と部分結晶薄帯であった部分をサンプリングして試料を得た。この試料を、X線回折装置にて結晶の析出状態を確認したところ、軟磁性薄帯であった部分の試料および部分結晶薄帯であった部分の試料ともに、α−Feの結晶ピークのみが確認でき、Fe−BやFe−Pなどの化合物のピークはないことが確認できた。 From the obtained laminated magnetic core, a sample was obtained by sampling a portion which was a soft magnetic ribbon and a portion which was a partial crystal ribbon. As a result of confirming the crystal precipitation state of this sample with an X-ray diffractometer, only the α-Fe crystal peak was found in both the sample that was a soft magnetic ribbon and the sample that was a partial crystal ribbon. It was confirmed that there was no peak of compounds such as Fe-B and Fe-P.
(実施例2)
実施例2において、実施例1と同様にして軟磁性薄帯と部分結晶薄帯を得た後、長さ60cmに切断した。次に、軟磁性薄帯1層と部分結晶薄帯4層とを重ねて巻き回し、外径20.0mm、内径17.0mm、高さ10.0mm、重量5gの積層磁性体を作製した。この積層磁性体の占積率は81%であった。その後、積層磁性体に処理温度435℃、処理時間10分で設定した熱処理を行い、積層磁心を作製した。
(Example 2)
In Example 2, the soft magnetic ribbon and the partial crystal ribbon were obtained in the same manner as in Example 1, and then cut into a length of 60 cm. Next, the soft magnetic ribbon 1 layer and the partial crystal ribbon 4 layers were overlapped and wound to produce a laminated magnetic body having an outer diameter of 20.0 mm, an inner diameter of 17.0 mm, a height of 10.0 mm, and a weight of 5 g. The space factor of this laminated magnetic body was 81%. Thereafter, the laminated magnetic body was subjected to heat treatment set at a treatment temperature of 435 ° C. and a treatment time of 10 minutes to produce a laminated magnetic core.
得られた積層磁心から、実施例1と同様に得た試料を、X線回折装置にて結晶の析出状態を確認したところ、軟磁性薄帯であった部分の試料および部分結晶薄帯であった部分の試料ともに、α−Feの結晶ピークのみが確認でき、Fe−BやFe−Pなどの化合物のピークはないことが確認できた。 A sample obtained in the same manner as in Example 1 from the obtained laminated magnetic core was checked for the crystal precipitation state by an X-ray diffractometer. As a result, the sample of the portion that was a soft magnetic ribbon and the partial crystal ribbon were found. In both of the samples, only the α-Fe crystal peak was confirmed, and it was confirmed that there was no peak of compounds such as Fe—B and Fe—P.
(実施例3)
実施例3において、実施例1と同様にして軟磁性薄帯と部分結晶薄帯を得た後、長さ63cmに切断した。次に、軟磁性薄帯1層と部分結晶薄帯10層とを重ねて巻き回し、外径25.0mm、内径19.5mm、高さ10.0mm、重量11.7gの積層磁性体を作製した。この積層磁性体の占積率は82%であった。その後、積層磁性体に実施例1と同様に熱処理を行い、積層磁心を作製した。
(Example 3)
In Example 3, a soft magnetic ribbon and a partial crystal ribbon were obtained in the same manner as in Example 1, and then cut into a length of 63 cm. Next, one layer of soft magnetic ribbon and 10 layers of partially crystalline ribbon are overlapped and wound to produce a laminated magnetic body having an outer diameter of 25.0 mm, an inner diameter of 19.5 mm, a height of 10.0 mm, and a weight of 11.7 g. did. The space factor of this laminated magnetic body was 82%. Thereafter, the laminated magnetic body was heat treated in the same manner as in Example 1 to produce a laminated magnetic core.
得られた積層磁心から、実施例1と同様に得た試料を、X線回折装置にて結晶の析出状態を確認したところ、軟磁性薄帯であった部分の試料および部分結晶薄帯であった部分の試料ともに、α−Feの結晶ピークのみが確認でき、Fe−BやFe−Pなどの化合物のピークはないことが確認できた。 A sample obtained in the same manner as in Example 1 from the obtained laminated magnetic core was checked for the crystal precipitation state by an X-ray diffractometer. As a result, the sample of the portion that was a soft magnetic ribbon and the partial crystal ribbon were found. In both of the samples, only the α-Fe crystal peak was confirmed, and it was confirmed that there was no peak of compounds such as Fe—B and Fe—P.
(実施例4〜6)
実施例4〜6において、それぞれ表1の実施例4〜6の組成式になるように原料を秤量した後、実施例1と同様にして軟磁性薄帯および部分結晶薄帯を得た。この部分結晶薄帯の結晶化率はそれぞれ表1の実施例4〜6に示す値であった。
(Examples 4 to 6)
In Examples 4 to 6, the raw materials were weighed so as to have the composition formulas of Examples 4 to 6 in Table 1, respectively, and then a soft magnetic ribbon and a partial crystal ribbon were obtained in the same manner as in Example 1. The crystallization ratios of the partial crystal ribbons were the values shown in Examples 4 to 6 in Table 1, respectively.
作製した軟磁性薄帯1層と部分結晶薄帯1層とを重ねて巻き回し、外径20.0mm、内径17.5mm、高さ10.0mmの積層磁性体を作製した。その後、積層磁性体に処理温度430℃、処理時間10分で設定した熱処理を行い、積層磁心を作製した。 The produced soft magnetic ribbon 1 layer and the partial crystal ribbon 1 layer were overlapped and wound to produce a laminated magnetic body having an outer diameter of 20.0 mm, an inner diameter of 17.5 mm, and a height of 10.0 mm. Thereafter, the laminated magnetic body was subjected to heat treatment set at a treatment temperature of 430 ° C. and a treatment time of 10 minutes to produce a laminated magnetic core.
得られた積層磁心から実施例1と同様に得た試料を、X線回折装置にて結晶の析出状態を確認したところ、軟磁性薄帯であった部分の試料および部分結晶薄帯であった部分の試料ともに、α−Feの結晶ピークのみが確認でき、Fe−BやFe−Pなどの化合物のピークはないことが確認できた。 A sample obtained from the obtained laminated magnetic core in the same manner as in Example 1 was confirmed by the X-ray diffractometer to confirm the crystal precipitation state. As a result, the sample was a soft magnetic ribbon and a partial crystal ribbon. It was confirmed that only the α-Fe crystal peak was observed in some of the samples, and there was no peak of compounds such as Fe-B and Fe-P.
(比較例1)
比較例1において、実施例1と同様にして軟磁性薄帯を得た後、長さ300cmに切断し、外径20.0mm、内径17.5mm、高さ10.0mm、重量4gの磁心を作製した。この磁心の占積率は84%であった。その後、作製した磁心に処理温度430℃、処理時間10分で設定した熱処理を行った。
(Comparative Example 1)
In Comparative Example 1, after obtaining a soft magnetic ribbon in the same manner as in Example 1, it was cut into a length of 300 cm, and a magnetic core having an outer diameter of 20.0 mm, an inner diameter of 17.5 mm, a height of 10.0 mm, and a weight of 4 g was obtained. Produced. The space factor of this magnetic core was 84%. Thereafter, the prepared magnetic core was subjected to heat treatment set at a processing temperature of 430 ° C. and a processing time of 10 minutes.
熱処理後の磁心からサンプリングした試料を、X線回折装置にて結晶の析出状態を確認したところ、α−Feの結晶ピーク以外にも、Fe−B系の化合物が析出していることが確認できた。 A sample sampled from the magnetic core after the heat treatment was checked for the crystal precipitation state with an X-ray diffractometer, and it was confirmed that the Fe-B compound was precipitated in addition to the α-Fe crystal peak. It was.
(比較例2)
比較例2において、原料を組成式Fe83.3Si4.0B8.0P4.0Cu0.7になるように秤量した後、比較例1と同様に磁心を作製し、熱処理を行った。熱処理後の磁心から、サンプリングした試料を、X線回折装置にて結晶の析出状態を確認したところ、α−Feの結晶ピーク以外にも、Fe−B系の化合物が析出していることが確認できた。
(Comparative Example 2)
In Comparative Example 2, after the raw materials were weighed so that the composition formula Fe 83.3 Si 4.0 B 8.0 P 4.0 Cu 0.7 , a magnetic core was prepared in the same manner as in Comparative Example 1, and heat treatment was performed. went. From the magnetic core after the heat treatment, when the crystal precipitation state of the sampled sample was confirmed with an X-ray diffractometer, it was confirmed that the Fe—B compound was precipitated in addition to the α-Fe crystal peak. did it.
表1に本実施例および比較例で得られた積層磁心について、透磁率を測定した結果および透過型電子顕微鏡(TEM)を用いて析出結晶における平均粒径を算出した結果を示す。 Table 1 shows the results of measuring the magnetic permeability of the laminated magnetic cores obtained in this example and the comparative example, and the results of calculating the average particle size in the precipitated crystals using a transmission electron microscope (TEM).
表1から明らかなように、実施例1〜6の積層磁心は、高い値の透磁率が得られ、優れた磁気特性が得られている。また、部分結晶薄帯であった部分の平均粒径は軟磁性薄帯であった部分の平均粒径より小さく、平均粒径が大きい方である軟磁性薄帯でも、微細なα−Fe結晶が析出していることが確認できた。 As is clear from Table 1, the laminated magnetic cores of Examples 1 to 6 have a high magnetic permeability and excellent magnetic characteristics. The average grain size of the portion that was the partial crystal ribbon was smaller than the average grain size of the portion that was the soft magnetic ribbon, and even in the soft magnetic ribbon having the larger average particle size, fine α-Fe crystals It was confirmed that was deposited.
一方、比較例1、2の磁心は、低い透磁率しか得られなかった。また、析出結晶における平均粒径も27.0nmと30.5nmであり、結晶の粗大化が確認できた。この結果は、磁心が結晶の析出していない軟磁性薄帯で全て構成されていることから、微細な結晶析出に伴う自己発熱量が多くなり、また、実施例1〜6よりも放熱量が少ないため、自己発熱による過剰な温度上昇が起こり、磁心温度が第2結晶化温度近傍まで上昇したことが原因であると考えられる。それにより、磁気特性が著しく低下した。 On the other hand, the magnetic cores of Comparative Examples 1 and 2 obtained only low magnetic permeability. Moreover, the average particle diameters in the precipitated crystals were 27.0 nm and 30.5 nm, respectively, confirming the coarsening of the crystals. As a result, since the magnetic core is composed entirely of soft magnetic ribbons with no crystals precipitated, the amount of self-heat generation accompanying fine crystal precipitation increases, and the heat dissipation amount is higher than in Examples 1-6. Therefore, it is considered that the excessive temperature rise due to self-heating occurs and the core temperature rises to the vicinity of the second crystallization temperature. As a result, the magnetic properties were significantly reduced.
以上より、Fe基非晶質合金よりなる軟磁性薄帯と、Fe基非晶質合金よりなる軟磁性薄帯内部に非晶質相を残した部分結晶薄帯とを積層した積層磁心とすることにより、化合物の析出を抑制し、優れた磁気特性を有する積層磁性体、積層磁心およびその製造方法が得られた。 As described above, a laminated magnetic core is formed by laminating a soft magnetic ribbon made of an Fe-based amorphous alloy and a partial crystal ribbon that leaves an amorphous phase inside the soft magnetic ribbon made of an Fe-based amorphous alloy. As a result, it was possible to obtain a laminated magnetic body, a laminated magnetic core and a method for producing the same, which suppresses the precipitation of the compound and has excellent magnetic properties.
以上、本発明の実施例を説明したが、本発明は、上記に限定されるものではなく、本発明の要旨を逸脱しない範囲で、構成の変更や修正が可能である。例えば、本発明による実施の形態の一例が、軟磁性薄帯と部分結晶薄帯とを重ねて巻き回した積層磁心であって、軟磁性薄帯と部分結晶薄帯を所望の形状に打ち抜き、それらを積層して得られた積層磁心であってもよい。つまり、軟磁性薄帯と部分結晶薄帯とが積層された磁心であればどのようなものであってもよく、特に制限されない。すなわち、当業者であれば成し得るであろう各種変形、修正もまた本発明に含まれることは勿論である。 As mentioned above, although the Example of this invention was described, this invention is not limited above, The change and correction of a structure are possible in the range which does not deviate from the summary of this invention. For example, an example of an embodiment according to the present invention is a laminated magnetic core in which a soft magnetic ribbon and a partial crystal ribbon are overlapped and wound, and the soft magnetic ribbon and the partial crystal ribbon are punched into a desired shape, A laminated magnetic core obtained by laminating them may be used. That is, any magnetic core in which soft magnetic ribbons and partial crystal ribbons are laminated may be used, and is not particularly limited. That is, it is a matter of course that various modifications and corrections that can be made by those skilled in the art are also included in the present invention.
1 積層磁心
2 磁心
11、21 軟磁性薄帯
12 部分結晶薄帯
22 内側
23 外側
24 内部
31 第1結晶化温度
32 第2結晶化温度
DESCRIPTION OF SYMBOLS 1 Laminated
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