JP6318157B2 - Charged particle beam lens module and charged particle beam apparatus including the same - Google Patents

Description

  The present invention relates to a charged particle beam lens module and a charged particle beam device including the same.

  The propagation direction of charged particle beams such as electrons and helium ions can be controlled by using an electromagnetic field, and by using these charged particle beams, a microscope capable of observing the fine structure of a material has been realized. Yes.

These charged particle beam devices are charged particle sources that emit charged particles such as electrons and ions, deflectors that change the propagation direction of particles by utilizing the interaction between charged particles and electromagnetic fields, and convergent effects on charged particle beams. It is configured using an electromagnetic field type lens that gives
<Deflector>
FIG. 1 shows a cross section of a deflector having two parallel plate electrodes 10 facing each other. The plane of the paper is a plane (deflection plane) perpendicular to the parallel plate electrode 10 including the optical axis 1 of the charged particle beam device, and the electric field generated when a voltage is applied to the parallel plate electrode 10 is in the direction perpendicular to the optical axis 1. A charged particle beam (for example, an electron beam) having a negative charge incident from the upper side in the figure along the optical axis 1 receives an electromagnetic force in a direction perpendicular to the traveling direction, and its trajectory is Deflected. Using the uniform field approximation that ignores the disturbance of the electric field at both ends of the parallel plate electrode 10 and assumes that the electric field is generated only within the range of the electrode, the deflection angle β is opposite to the length L of the electrode in the optical axis direction. It is expressed by the simple relationship shown in Equation 1 using the inter-electrode distance d, the acceleration voltage V ₀ of the charged particle beam, the applied voltage V _BD and the deflection coefficient k _BD . Further, such a deflection action is reversed in the direction of a charged particle beam having a positive charge. In the present application, the discussion proceeds using the uniform field approximation unless otherwise specified.

The trajectory 2 of the charged particle beam draws a parabola in the electric field, but goes straight after exiting the electric field region. As shown in FIG. 1, the imaginary orbit 28 in which the charged particle beam orbit 2 incident along the optical axis 1 is straightly extended and the electron beam orbit after exiting the deflector are traced back in a straight line. The imaginary trajectory 29 just intersects the central part of the parallel plate electrodes. The intersection of these two imaginary straight orbits is called a deflection point 30. A plane 300 perpendicular to the optical axis where the deflection point 30 is located is located at the center of the parallel plate electrodes. As a result, the charged particle beam can be handled as being given a predetermined deflection only by a deflection point or a plane perpendicular to the optical axis including the deflection point.
<Focus adjuster>
FIG. 2 shows a focus adjuster composed of three stages of electrodes 14, 15 and 16, an equipotential line 27 representing an electric field formed by the adjuster, and a trajectory 2 of a charged particle beam that is deflected by the electric field. The figure shown in the surface containing the optical axis 1 is represented. The charged particle beam incident on the focus adjuster receives a force along the potential gradient formed by the electrode. When particles with negative charges are incident with the potentials V ₁ , V ₂ , and V ₃ of the three-stage electrodes 14, 15, and 16 being V ₂ > V ₁ = V ₃ , the charged particle beam 2 is because the particle passing through the path away from the optical axis 1 is subjected to a larger deflection action toward the central axis, so that the focus adjuster is an electrostatic charged particle beam lens (Einzel lens) that has a convergence effect. work. In addition, the shape of the electric field generated by such a focus adjuster varies greatly depending on the diameter of the opening provided in the electrode (W in FIG. 2), the distance between each electrode (D1, D2 in FIG. 2), etc. The change of the focal length as an electric field type lens with respect to the voltage applied to each electrode also depends on this. Therefore, the appropriate shape of the focus adjuster varies depending on the application.

Such convergence can be adjusted by changing the potential of the electrode, so the focus adjuster can be used as an electric field lens with a variable focal length as well as other electromagnetic lenses. When used in combination, it can be used as a focus adjuster for substantially changing the focal position of another electromagnetic lens.
<Acquisition of phase information>
Transmission type charged particle beam equipment, such as transmission electron microscope (TEM), scanning transmission electron microscope (STEM), and helium ion microscope, when charged particles pass through the sample by interfering with the charged particle beam that has passed through the substance. It is possible to obtain an image intensity based on the amplitude / phase variation received by the charged particles. In particular, the information regarding the phase change at the time of sample transmission enables quantitative evaluation of the electromagnetic field in the sample.

  In addition, it is difficult to obtain sufficient observation image contrast for samples that have a small effect on the amplitude of charged particle beams (especially substances composed of light elements such as living organisms and organic substances). It is necessary to observe the phase change when passing through the sample. To this end, techniques such as phase contrast microscopy or electron holography have been used so far.

  However, it is difficult to obtain a contrast of phase change for a structure having a large scale by phase contrast microscopy, and a reference wave that is a reference for phase change is required for electron beam holography to interfere with an electron beam. Therefore, each has a problem that the shape of the sample is limited. On the other hand, Non-Patent Document 1 proposes a method for obtaining phase information based on images obtained under a plurality of observation conditions as a method for newly obtaining phase information.

  FIG. 3 shows the spatial frequency dependence of the image contrast generated based on the amount of phase change received by the electron beam during sample transmission, among the images observed using a TEM, among other charged particle beam devices. It shows the characteristics of how much image contrast can be obtained for each structure of various sizes contained in the sample. This is called a phase contrast transfer function (PCTF) and is used to express the imaging characteristics of TEM. The horizontal axis corresponds to the spatial frequency q and has the dimension of the inverse of real space. The periodicity information corresponding to the interval separated by the distance R on the sample surface has a relationship as shown in Equation 2 with q.

  When the wavelength of the charged particle beam is λ, the spherical aberration coefficient of the objective lens is Cs, and the amount of defocusing from the in-focus condition where the observation image is focused on the sample (defocus amount) is Δf, The PCTF shown in FIG. 4 is expressed as in Equation 3 except for the influence of higher-order aberrations.

Here, χ (q, Δf) represents the wavefront shape of the charged particle beam on the diffraction surface and is called a wavefront aberration function. The PCTF changes according to the defocus amount (Δf), and (1), (2), and (3) in FIG. 3 show the PCTF at different defocus amounts. At a spatial frequency of q = 1.5 [nm ^-1 ] (corresponding to a period of about 0.67 nm in real space), the value of PCTF shown in (1) is 0, which is q = 1.5 [nm ^-1 ] This indicates that the spatial frequency information is not included in the observation image.

On the other hand, in the PCTF shown in (2) obtained under the condition where the defocus amount is changed, the value is about 1 at the spatial frequency of q = 1.5 [nm ⁻¹ ], and the corresponding spatial frequency information is positive. This represents that the contrast is obtained as a relatively white contrast in the sample image.

  In addition, when the sign of the defocus amount is reversed from the condition shown in (2), the shape of the PCTF is also reversed (for example, (3) in FIG. 3). By using such changes in the PCTF with respect to the defocus amount, images are taken under a plurality of conditions in which the defocus amount is changed, and arithmetic processing is performed on them, for example, as shown in (4). It is possible to effectively create a PCTF with a uniform value at the spatial frequency. As a result, an image having a positive contrast in a wide range of spatial frequencies compared to a conventional observation image can be obtained computationally. For samples that are generally referred to as weak phase objects and that are considered to receive only a phase change mainly when the electron beam passes through the sample, the contrast corresponding to the amount of phase change of the electron beam obtained by the method described above is used. By using it, the structure of the substance can be observed more clearly.

Tadahiro Kawasaki, Yoshizo Takai, Takashi Ikuta, Ryuichi Shimizu; Ultramicrosc., 90, 1, 47-59, 2001

  However, when observation is performed by changing the defocus amount as described above, basically, photographing is performed by changing the focus of the objective lens. Here, in general, a magnetic lens is used as the objective lens, and the following problems exist.

  First, when converging charged particles, the magnetic lens simultaneously gives an azimuthal rotation around the optical axis. For this reason, since images obtained by changing the focal point are photographed at different rotation angles, calculation processing for correcting the rotation of the azimuth angle with respect to each image is required.

  Next, since magnetic materials use magnetic material in the magnetic path of the yoke, pole piece, etc., magnetic field lenses have a hysteresis effect (hysteresis) when adjusting the focal point of the lens by changing the amount of current flowing to the coil. As a result, the coil current amount and the strength of the lens magnetic field have nonlinear characteristics.

  Since such a problem is specific to the magnetic lens, it is not a problem when an electric field lens is used. However, the electric field type lens has larger aberration than the magnetic type lens, and it has not been put into practical use as a single objective lens except for special cases such as observation of a magnetic field or a magnetic domain structure.

  As means for solving the above-mentioned problems, the present invention is provided in an optical system of an imaging lens that forms an image of a sample with a charged particle beam, and the defocus amount of the image of the sample is set as the imaging lens. An independently adjustable electrostatic charged particle beam lens, and at least two stages of deflectors that deflect the charged particle beam in conjunction with adjustment of the focal length of the electrostatic charged particle beam lens. The present invention proposes a charged particle beam lens module characterized in that the charged particle beam lens module can be disposed in an optical system of a charged particle beam apparatus that detects charged particles that have passed through the sample. Note that the lens module here is a module in which a deflector and a focus adjuster are integrated.

  As another means for solving the above-described problem, the present invention provides a charged particle beam apparatus for detecting charged particles that have passed through a sample, wherein the charged particle beam apparatus forms an image of the sample with a charged particle beam. An optical system of an imaging lens for imaging, an electrostatic charged particle beam lens capable of adjusting a defocus amount of the image of the sample independently of the imaging lens, and a focal length in the electrostatic charged particle beam lens A charged particle beam apparatus comprising: at least two stages of deflectors for deflecting the charged particle beam in conjunction with the adjustment of the charged particle beam is proposed.

  According to the present invention, the optical system of the charged particle beam apparatus can be adjusted.

Sectional view of a deflector having two parallel plate electrodes facing each other Diagram showing the equipotential lines of the electric field and the trajectory of the charged particle beam subject to deflection by the focus adjuster Graph showing the image contrast obtained based on the amount of phase change received by the electron beam when passing through the sample Diagram showing an example of the focus adjuster The figure which shows the example adjusted so that it may inject according to the optical axis of a focus adjuster using a deflector The figure which showed the example which adjusts the charged particle beam which has an incident angle with respect to the optical axis of a focus adjuster using a two-stage deflector The figure which showed the external appearance of the focus adjuster module provided with the deflector and focus adjuster of 2 steps | paragraphs The figure which showed the example of the focus adjuster module provided with the 1 step | paragraph deflector downstream from the focus adjuster downstream of the 2 step | paragraph deflector. The figure which shows the circuit structure which implements the magnitude | size of voltage Vbd1, Vbd2 applied with respect to a 1st, 2nd deflector in response to the voltage VL applied to a focus adjuster. The figure which shows the example of a circuit for making it unnecessary to exchange an output terminal with a deflector Configuration diagram with a focus adjuster module in the imaging lens system that forms the sample image The figure which showed the example which correct | amends astigmatism using two pairs of opposing parallel plate electrodes Drawing depicting the counter electrode arrangement of the deflector of the focus adjuster module from the optical axis direction Drawing depicting the counter electrode arrangement of the deflector of the focus adjuster module from the optical axis direction The figure which showed the structure which a focus adjuster module can finely move in the direction orthogonal to an optical axis The figure which showed the example regarding arrangement | positioning of the focus adjuster and deflector of a focus adjuster module The figure which showed the example regarding arrangement | positioning of the focus adjuster and deflector of a focus adjuster module The figure which showed the example regarding arrangement | positioning of the focus adjuster and deflector of a focus adjuster module The figure which shows the example of the focus adjuster module provided with the deflector using an electric field, and the deflector using a magnetic field. Diagram showing an example of a deflector using a magnetic field The figure which shows the example different from FIG. 19 in the focus adjuster module provided with the deflector using an electric field, and the deflector using a magnetic field. The figure which showed typically the composition of the charged particle beam device provided with the focus adjuster module The figure which showed the example where the focus adjuster module is arranged in the magnetic field type objective lens The figure which showed the example of the structure with which the focus adjuster module was equipped downstream from the sample and upstream from the image surface of the sample formed with an objective lens A graph showing the change in the wavefront aberration function χ obtained when the distance between the objective lens focal point and the sample (defocus amount) is changed. Diagram showing a charged particle beam device using a focus adjuster module A diagram showing how images with different focus are acquired The figure which shows the structure of the focus adjuster which has the electrode divided | segmented into four

  First, FIG. 4 shows an example of a focus adjuster (lens module). Within the plane perpendicular to the optical axis 1, two stages of deflectors are provided along the optical axis, each having an opposing parallel plate electrode 10 disposed thereon, and three stages of electrodes 14, 15,. It has a focus adjuster with 16.

  In this configuration, the electrodes 14 and 16 are set to the ground potential, and a voltage is applied to the electrode 15 from the power source 17. The focus can be changed along the optical axis 19 of the focus adjuster by controlling the voltage applied to the electrode 15. Although not shown, the electrodes 14 and 16 can be used as an electric field lens in a state where the potential is different from the ground potential.

  In FIG. 5, the charged particle beam 20 incident along the optical axis 1 passing through a position different from the optical axis 19 of the focus adjuster is incident on the optical axis 19 of the focus adjuster using a deflector. An example adjusted in this way is shown. In the first-stage and second-stage deflectors, different polar potentials are applied to the parallel plate electrodes 10. When the charged particle beam 20 is incident on such a configuration of the deflector, the traveling direction of the charged particle beam 20 is first bent in the first stage deflector. Thereafter, the charged particle beam 20 propagates linearly to the second stage deflector and is newly deflected in the direction opposite to that of the first stage deflector by the electric field formed by the second stage deflector. At this time, by appropriately controlling the potential value of each electrode, the charged particle beam incident on the two-stage deflector can be translated in a direction perpendicular to the optical axis.

  In this example, the focus adjuster is composed of only the electrodes 15 and 16, which is different from the configuration of the Einzel lens type optical system shown in FIGS. In this case, the focus adjuster functions as an immersion lens. In this case as well, it is possible to obtain an action as an electric field type lens, but the behavior is different from that of the Einzel lens.

  In FIG. 6, the charged particle beam 20 incident at an angle with respect to the optical axis 19 of the focus adjuster is incident on the optical axis 19 of the focus adjuster using a two-stage deflector. An example is shown. In the first-stage and second-stage deflectors, different polar potentials are applied to the parallel plate electrodes 10. When the charged particle beam 20 is incident on such a deflector, the traveling direction of the charged particle beam 20 is first bent in the first stage deflector. Thereafter, the charged particle beam 20 propagates linearly to the second stage deflector and is newly deflected in the direction opposite to that of the first stage deflector by the electric field formed by the second stage deflector. At this time, by appropriately controlling the potential value of each electrode, the traveling direction of the charged particle beam incident on the two-stage deflector is changed to an angle parallel to the optical axis 19 of the focus adjuster. In addition, it is possible to make the horizontal position coincide with the optical axis 19 of the focus adjuster.

  Thus, by controlling the deflection amount of the two-stage deflector, the direction and position of the charged particle beam incident on the focus adjuster module can be controlled. This makes it possible to align the optical axis 19 of the focus adjuster without performing mechanical adjustment.

  In this example, the focus adjuster is composed of only the electrodes 14 and 15, and a voltage is applied to the Einzel lens type shown in FIGS. 2 and 4 or the lower electrode as shown in FIG. Although different from the configuration of the immersion lens, in this case as well, the focus adjuster functions as an immersion lens. In this case as well, it is possible to obtain an action as an electric field type lens, and its behavior is different from that of the focus adjuster shown in FIG. 2, FIG. 4, and FIG.

  Needless to say, the present application can similarly function without depending on the type of the electric field lens of the focus adjuster as described above. In addition, the above description shows the trajectory of the charged particle beam in one plane including the optical axis. However, the same applies to the plane including other optical axes that intersect at an angle with respect to this plane. It is possible to perform the deflection operation.

  Next, FIG. 7 is a diagram showing an appearance of a focus adjuster module including a two-stage deflector and a focus adjuster. The focus adjuster is provided with an opening 21 for allowing charged particle beams to pass therethrough. In order to make the action of the focus adjuster as a lens symmetrical, the shape of the focus adjuster opening 21 is A shape as symmetrical as possible with respect to the optical axis, particularly a circular shape, is desirable. In the case of a shape other than a circle, astigmatism occurs in the lens action of the focus adjuster.

  FIG. 8 shows an example of a focus adjuster module that includes a focus adjuster downstream of a two-stage deflector and further includes a one-stage deflector downstream thereof. For example, since the first stage and second stage deflectors can be used to adjust the position of the optical axis of the focus adjuster and the third stage deflector can be used to correct astigmatism, FIG. The optical system can be controlled with a higher degree of freedom than the configuration shown in FIG.

  FIG. 9 shows an example of a circuit configuration when the magnitudes of the voltages Vbd1 and Vbd2 applied to the first and second deflectors are linked with the voltage VL applied to the focus adjuster. In this circuit, the output voltage VL from the power source 22 is introduced into the focus adjuster, and the voltages Vbd1 and Vbd2 divided by the variable resistors Rbd1 and Rbd2 are introduced into the first and second deflection plates, respectively. If the applied voltage VL is adjusted in order to adjust the focal length by the focus adjuster, the introduction voltages Vbd1 and Vbd2 to each deflector fluctuate accordingly. The ratio of the voltage introduced to each deflector can be adjusted by the variable resistors Rbd1 and Rbd2.

  FIG. 9 shows the assumption that the applied voltage to the focus adjuster is maximum on the circuit.For example, when the second deflector requires the maximum applied voltage, the output of VL The terminal may be replaced with a second deflector. Needless to say, such terminal combinations are performed in the implementation of the present application. Further, as a circuit example for eliminating the need for terminal replacement as described above, a configuration as shown in FIG. 10 may be used.

  In the above description, the example in which the magnitudes of the two potentials Vbd1 and Vbd2 are linked to the voltage VL applied to the focus adjuster has been shown. This makes it possible to control the direction and position of the charged particle beam in one direction using a two-stage deflector, but also provides a similar voltage dividing circuit for the voltage VL in another direction orthogonal thereto. By connecting and applying a circuit configuration in which the voltage applied to the first and second stage deflectors can be separately adjusted separately, the direction and position of the charged particle beam in any direction orthogonal to the optical axis can be adjusted. It becomes possible to control.

  Furthermore, by appropriately controlling the strength of the deflection action in the two orthogonal directions, astigmatism in the two orthogonal directions is intentionally created, and this astigmatism has the astigmatism of the focus adjuster. As a result, astigmatism in the entire focus adjuster module can be corrected as a result. When the focal length of the focus adjuster is changed by correcting the direction and position of the charged particle beam by the deflector and astigmatism in conjunction with the operation of the focus adjuster, it changes accordingly. It can be suitably used after correcting the amount of astigmatism. This makes it possible to adjust the position, tilt, and astigmatism of the optical axis of the focus adjuster module by itself, and it is necessary to adjust the optical system of the charged particle beam device in which the focus adjuster module is incorporated. It is possible to adjust the optical system without doing so.

  FIG. 11 shows an example of a configuration in which the above-described focus adjuster module 46 is provided in an imaging lens system that forms an image of a sample 42 in a transmission type charged particle beam apparatus. The charged particle beam 2 emitted from the charged particle source 40 is paralleled by the condenser lens 41 and irradiated onto the sample 42 installed on the sample surface 3. The charged particle beam that has passed through the sample 42 forms an intermediate image 7 on the intermediate image plane 5 by the objective lens 43. The intermediate image 7 is further formed as an observation image 6 having a different magnification on the fluorescent plate 47 by an imaging lens 48 provided downstream thereof.

  Further, a focus adjuster module 46 constituted by a deflector 44 and a focus adjuster 45 combined so that the respective operations are interlocked is provided in the above-described imaging lens system. The focus adjuster module 46 includes a fine movement mechanism, and the attachment position can be adjusted with respect to the optical axis by moving the position in a plane perpendicular to the optical axis 1 as indicated by an arrow 49.

  In general, in order to adjust the focus of the observation image 6, the focal length of the objective lens 43 is adjusted. In the configuration shown in FIG. 11, the focal length of the focus adjuster 45 provided in the focus adjuster module 46 is adjusted. It is possible to change the focus of the observation image 6 also by this. Further, at this time, the mechanical position / angle deviation and aberration of the focus adjuster 45 can be adjusted by using the deflector 44 as described above.

  FIG. 12 is a diagram showing an example in which astigmatism is corrected using two pairs of opposed parallel plate electrodes. By reversing the polarity of the potential applied to each counter electrode, an attractive force to the electrode is applied to the charged particle in one direction, and a repulsive force from the electrode is applied to the other direction orthogonal to the charged particle. It becomes possible. By combining the deflector having such a configuration with the focus adjuster, the astigmatism of the focus adjuster can be corrected using the deflector.

  By utilizing this, it is possible to simultaneously correct the direction, position and astigmatism of the charged particle beam by using a combination of three stages of deflectors. Further, by appropriately adjusting the value of the potential taken by the electrode of the deflector so as to have both the deflection action and the astigmatism correction action, the charge is applied even in the configuration having the two-stage deflector as shown in FIG. It is possible to simultaneously control the direction and position of the particle beam and correct astigmatism.

  FIGS. 13 and 14 are diagrams illustrating the arrangement of the counter electrodes of the deflector included in the focus adjuster module from the optical axis direction. When two pairs of parallel plate electrodes are arranged so as to be orthogonal to each other as shown in FIG. 13, it is possible to apply a deflection action to charged particle beams in two opposite directions of each parallel plate electrode. As a result, it is possible to apply a deflection action to an arbitrary direction orthogonal to the optical axis 19. In addition, by adjusting the potential of each electrode as described above, it is also possible to correct the asymmetry that is twice symmetric that the focus adjuster combined with the deflector has. When three pairs of parallel plate electrodes are arranged as shown in FIG. 14, in addition to the deflection action in an arbitrary direction perpendicular to the optical axis 19, the three-fold astigmatism of the focus adjuster combined with the deflector Can also be corrected. In addition to the example shown in FIG. 28 to be described later, a configuration including three or more sets of parallel flat plates can also be implemented.

  FIG. 15 is a diagram showing a configuration in which the focus adjuster module 46 can be finely moved in a direction 49 perpendicular to the optical axis 1 of the charged particle beam apparatus including the focus adjuster module 46. The focus adjuster module 46 includes a movable mechanism 60 for performing a larger movement, which is different from the fine movement mechanism described above. By moving the focus adjuster module 46 in a direction perpendicular to the optical axis 1 as indicated by 59 in the figure, the charged particle beam 2 Can be inserted into and extracted from the orbit. In this example, the focus adjuster module 46 is out of the trajectory of the charged particle beam 2 and does not affect the charged particle beam 2. In addition, by moving the focus adjuster module 46 along the movable direction 49 from this state, it is possible to change the configuration so that it can act on the charged particle beam 2.

  By adopting such a configuration, when the focus adjuster module 46 is attached to the charged particle beam apparatus, there are already provided attachment positions (attachment ports) for expanding functions, such as an objective aperture and a limited field stop. An attachment port (not shown) to which is attached can be used. As a result, the focus adjuster module 46 can be attached to and removed from the apparatus optical system without major remodeling or modification of the apparatus. By adopting such a structure that can be easily attached and detached, an appropriate focus adjuster can be easily replaced as needed.

  In addition, the focus adjuster and deflector are subject to contamination due to adhesion of carbon, nitrogen, moisture, etc. present in the charged particle device with use, or surface alteration due to reaction with oxygen etc. in the surrounding space, Although it may have an effect on unintentional charged particle beams due to local charging or formation of contact potential, it is easy even in such a case by adopting a structure in which the focus adjuster module itself can be attached and taken out. It is possible to perform processing by contact with a heat source such as a heater, or irradiation with light or charged particles, by exchanging the focus adjustment module in a cleaning space provided in the charged particle beam apparatus.

  FIG. 16 is a diagram showing an example of the arrangement of the focus adjusters and the deflectors constituting the focus adjuster module. In this case, the first deflector, the focus adjuster, and the second deflector are provided in the downward direction in the figure, which is the traveling direction of the charged particle beam 20 traveling along the optical axis 1. In such a configuration, since the charged particle beam incident on the second deflector is subjected to the lens action by the focus adjuster, the magnification change generated by the focus adjuster with respect to the deflecting action of the second deflector. Thus, the degree of freedom in designing the optical system can be increased.

  FIG. 17 is a diagram showing an example of the arrangement of the focus adjusters and the deflectors constituting the focus adjuster module. In this case, the structure is provided with a focus adjuster, a first deflector, and a second deflector in the downward direction in the figure, which is the traveling direction of the charged particle beam 20 traveling along the optical axis 1. In such a configuration, since the charged particle beam incident on both the first deflector and the second deflector is subjected to the lens action by the focus adjuster, the first deflector and the second deflector It becomes possible to add the effect of the magnification change produced by the focus adjuster to the deflection effect, and to increase the degree of freedom in designing the optical system.

  FIG. 18 is a diagram showing an example of the arrangement of the focus adjusters and the deflectors constituting the focus adjuster module. In this case, the first deflector, the second deflector, the focus adjuster, the third deflector, and the fourth deflector are arranged in the downward direction in the figure, which is the traveling direction of the charged particle beam 20 traveling along the optical axis 1. It has a configuration with a deflector. With such a configuration, even when the focus adjuster module cannot be finely moved, the focus adjuster module can be used by optical adjustment using a deflector.

  FIG. 19 is a diagram illustrating an example of a focus adjuster module including a deflector using an electric field and a deflector using a magnetic field. In the first deflector, an electric field gradient is formed between the electrodes in accordance with the voltage applied to the electrode 10, and the charged particles incident on the deflector receive a force corresponding to the magnitude of the electric charge from the electric field. In the second deflector provided downstream thereof, a magnetic field corresponding to the direction and magnitude of the current flowing in the coil 23 is formed, and the charged particle incident on the deflector applies a force corresponding to the magnitude of the charge. Receive more.

  FIG. 20 is a view showing an example of a deflector using a magnetic field, and has a structure in which four coils 23 are provided in a magnetic path 26. By applying an exciting current to each coil, each coil can function as an electromagnet as shown by the notation of N and S in the figure as an example, and a magnetic flux as shown by 34 in FIG. 20 can be created. Depending on the direction and amount of excitation of the coil, magnetic flux leaks from the magnetic path 26 and passes through the space outside the magnetic path. By using such magnetic flux, the deflection action is applied to the charged particle beam 2 passing through the deflector. Can be given.

  As described above, the deflector included in the focus adjuster module can be configured to use a magnetic field in addition to an electric field. In particular, as shown in FIG. 19, when the deflector provided upstream of the focus adjuster uses a magnetic field, the magnetic deflector acts as a substantial installation electrode and the focus adjustment provided downstream thereof. It is possible to adopt a configuration in which the number of electrodes provided in the vessel is reduced. As an example, FIG. 19 shows an example in which the focus adjuster is configured by only the electrode 15 to which a voltage is applied and the electrode 16 provided. With such a configuration, the number of members constituting the focus adjuster module can be reduced, and the focus adjuster module can be miniaturized.

  FIG. 21 is a diagram showing an example different from FIG. 19 in a focus adjuster module including a deflector using an electric field and a deflector using a magnetic field. In the first deflector, a magnetic field corresponding to the direction and magnitude of the current flowing in the coil 23 is formed, and the charged particles incident on the deflector receive a force corresponding to the magnitude of the electric charge from the magnetic field. In the second deflector provided downstream thereof, an electric field gradient is formed between the electrodes according to the voltage applied to the electrode 10, and the charged particles incident on the deflector have a force corresponding to the magnitude of the electric charge possessed. It receives from the electric field. In particular, when the first deflector uses a magnetic field as shown in FIG. 20, the first deflector does not form an electric field, and the electric field formed by the deflector using the electric field provided downstream thereof. Serves to prevent spreading toward the upstream of the first deflector. This is effective when a sample 42 that is easily affected by an external electric field such as a dielectric is arranged as the sample 42 provided upstream of the first deflector.

  FIG. 22 is a diagram schematically showing a configuration of a charged particle beam apparatus including the focus adjuster module of the present application. A charged particle source 40 is provided, and on the downstream side thereof, an accelerated tube 58 for accelerating the charged particle beam, a first condenser lens 50 for converging the charged particle beam, and a second condenser lens 51 are provided. The line is irradiated onto the sample 42. The charged particle beam that has passed through the sample 42 includes an objective lens 43 provided downstream thereof, a deflector 44 and a focus adjuster 45 constituting a focus adjuster module 46, a first image forming lens 52, a second image forming lens 53, An image is formed on the fluorescent plate 47 by the imaging lens system constituted by the third imaging lens 54 and the fourth imaging lens 55 to form an observation image 6.

  Each element constituting the charged particle beam apparatus is housed in a vacuum vessel 56, each of which is a control unit (80, 81, 82, 83, 84, 85, 86, 87, 88, 90, 91, 92). It is possible to control the operation from the control system computer 95 via When using the charged particle beam apparatus, it is possible to control the charged particle beam apparatus by inputting the contents displayed on the monitor 96 of the control system computer using the interface 97 of the control system computer.

  At this time, even if the user does not explicitly input the control content for each element constituting the charged particle beam apparatus, the control system computer automatically controls the appropriate control content based on the content input by the user. It can also be done on the unit. Such an operation is implemented in the control system computer 95 as part of the function of adjusting the optical system of the apparatus.

  In order to change the focus of the observation image 6, a means for changing the focal length of the objective lens 43 is generally performed. This means that the focal length of the focus adjuster 45 of the focus adjuster module 46 is changed. Can also be realized. In such a case, the deflection amount given to the charged particle beam by the deflector 44 can be controlled in conjunction with the focal length of the focus adjuster 45, for example, the amount of voltage applied to the focus adjuster 45. A control method in which a proportional voltage is applied to the deflector 44 is conceivable.

  Further, the observation image 6 imaged by the imaging lens system is recorded by using an image observation / recording medium 57 (for example, a TV camera or a CCD / CMOS camera), and the recorded image is an image recording / arithmetic processing unit 98. For example, in addition to displaying on the image display device 99, it is possible to perform processing such as fetching into the control system computer 95.

  In FIG. 22, the focus adjuster module 46 is drawn in a portion surrounded by a dotted line when inserted into the optical system. The insertion and extraction of the focus adjuster module 46 can be operated independently of other devices constituting the charged particle beam device.

  FIG. 22 shows an example of an optical system that can be used in a charged particle beam apparatus, for example, an electron microscope of about 60 kV to 300 kV. However, the components of the charged particle beam apparatus in FIG. It is not something that can be done. In addition to the components shown in this figure, the actual device has a different deflection system that changes the traveling direction of the charged particle beam, a diaphragm mechanism that restricts the transmission region of the charged particle beam, and the phase of the charged particle beam. There may be a phase plate or the like that mainly changes. These components are applicable to the present invention, but are omitted in this figure. Further, the charged particle beam optical system is continuously evacuated by a vacuum pump assembled in the vacuum vessel 56, and the evacuation system is also omitted in the drawing, but is applicable to the present invention.

  FIG. 23 is a diagram showing an example in which the focus adjuster module 46 is arranged in a magnetic field type objective lens. The magnetic field formed by the objective lens is formed between the pole piece upper magnetic pole 24 and the pole piece lower magnetic pole 25, and has a converging effect on the charged particle beam. The focus adjuster module and the objective lens can be operated independently, but for charged particles, they can be regarded as a set of combined lenses, in which case a charged particle beam focus adjuster is constructed. By changing the voltage applied to the electrodes 14, 15, and 16, it is possible to adjust the focus on the sample 42 as in the case where the focal position of the objective lens is changed. In addition, the focus adjuster module 46 can be operated in the direction 49 perpendicular to the optical axis 1 so that the insertion / extraction on the optical axis can be easily switched and the observation conditions can be changed. It is.

  In this embodiment, the relationship between the objective lens and the pole piece is described. However, in the same manner, other imaging lenses (the first imaging lens 52, the second imaging lens 53, the third imaging lens 54, The focus adjuster module can also be applied to the fourth imaging lens 55). In this case, the sample surface corresponds to an intermediate image (e.g., 7 in FIG. 11) formed by each lens, and the optical system obtains a demagnification according to the image magnification obtained on the surface provided with the focus adjuster module. The intensity of the electric field required when changing the focus amount changes.

  FIG. 24 is a diagram showing an example of a configuration in which the focus adjuster module 46 is provided downstream of the sample 42 and upstream of the image plane 46 of the sample 42 formed by the objective lens. The focus adjuster module 46 changes the focus with respect to the image in any case in the configuration provided between the sample 42 and the image plane formed on several planes in the imaging system downstream thereof. Can be provided.

FIG. 25 is a graph showing changes in the wavefront aberration function χ obtained when the distance between the objective lens focal point and the sample (defocus amount) is changed, the horizontal axis is the spatial frequency q, and the vertical axis is the transmission on the diffraction surface. This represents the magnitude χ of the phase difference between the wave and the diffracted wave. χ ₁ and χ ₂ correspond to χ when the defocus amounts are Δf ₁ and Δf ₂ , respectively.

Focusing on the spatial frequency expressed by q = 1 [nm ⁻¹ ] in FIG. 25, when the defocus amount is changed from Δf ₁ to Δf ₂ , the value of the wavefront aberration function χ is indicated by D in the figure. It will change by the amount. When restoring information on the amplitude and phase of the wave field of a charged particle beam that has passed through the sample using multiple images obtained by changing the defocus amount, the amount of change in D increases as the change is made under a wide range of defocus conditions. Becomes larger and images under various conditions are obtained, which is advantageous in restoring information. Specifically, it is desirable that the size of D is 2π or more. For this reason, when the information on the wave field related to the structure having the size of R is to be restored, it is preferable that the defocus change amount Df satisfies the relationship expressed by the following formula 4.

  FIG. 26 is a diagram showing a charged particle beam apparatus using a focus adjuster module, and FIG. 27 is a diagram showing how images with different focus are acquired. An image of the sample 42 is formed on the intermediate image plane 5 by the objective lens 43. In the in-focus condition where the defocus amount is 0, the sample is in focus and an image as shown in (b) of FIG. 27 is obtained. Furthermore, when a voltage is applied to the focus adjuster module 46 provided downstream of the objective lens 43, the focus of the focus adjuster module changes. As a result, the same as when the focal length of the objective lens is changed. A change is given to an observation image. That is, since the focus position of the observation image changes, the defocused image is observed and recorded. As an example, (a) shows an underfocus image when the focus is changed in the underfocus direction, and (c) shows an overfocus image when the focus is changed in the overfocus direction.

  When the real images (a), (b), and (c) are compared, it can be seen that the contrast of the image is changed and the imaging conditions are changed. The diffractograms obtained by performing Fourier transform on the images (a), (b), and (c) are shown in (d), (e), and (f), respectively. Concentric ring-shaped patterns appear in (d) and (f), and no similar pattern appears in (e). This indicates that the above-mentioned PCTF is different in each image by changing the focus, and the black ring part in each diffractogram is lost from the image because the corresponding spatial frequency information is missing. Represents that Conversely, the white ring portion indicates that the corresponding spatial frequency information is imaged with sufficient contrast and is included in the image.

  Each image obtained by changing the focus using the focus adjuster module in this manner is recorded by the image observation / recording medium 57 in FIG. 26, and the image recording / computation is performed through the image observation / recording medium control unit 93. It is captured in the processing device 98 and can perform arithmetic processing on a series of images. Further, the result obtained thereby can be displayed on the image display device 99 as necessary. By specifying the focus adjustment amount, the number of images to be acquired, and part or all of the shooting time, a series of operations such as control of the focus adjuster module, image acquisition, calculation processing, and display of processing results are automatically performed. It is possible to obtain the amplitude / phase information of the electron beam transmitted through the sample.

  FIG. 28 shows the structure of a focus adjuster having four divided electrodes. The focus adjuster is composed of electrodes 14, 15 and 16 and has an opening 21. The electrode 15 is divided into four electrodes in a plane perpendicular to the optical axis, and a power source 17 is connected to each electrode, so that an independent potential can be given. By setting the potential of each electrode 15 to a different value, it is possible to control the shape of the electric field formed in the opening 21 and to have a new function of deflecting charged particle beams or correcting astigmatism. Become. Therefore, one or more of the functions of the deflectors that are at least two stages in the other embodiments can be performed by the focus adjuster, and the number of deflectors can be reduced.

  Finally, an apparatus to which the present invention can be applied will be described. Examples of charged particles include negatively charged electrons, but some have positive charges such as ions. Although the action from the electromagnetic field is reversed depending on whether the electric charge is positive or negative, the above-described apparatus can be basically configured by using techniques in the same field. Therefore, the contents described in the present application do not limit the type of charged particles to be applied.

1: optical axis, 2: charged particle beam and its trajectory, 3: sample surface, 4: back focal plane, 5: intermediate image plane, 6: observed image, 7: intermediate image, 10: counter electrode, 12: power supply , 13: ground potential, 14: focus adjuster electrode, 15: focus adjuster electrode, 16: focus adjuster electrode, 17: power supply, 18: ground potential, 19: optical axis, 20: charged particle beam, 21: opening, 22: power supply, 23: coil, 24: pole piece upper magnetic pole, 25: pole piece upper magnetic pole, 26: magnetic path, 27: equipotential line, 28: imaginary orbit of incident electron beam, 29: Imaginary orbit of electron beam after deflection, 30: turning point by first deflector, 300: plane perpendicular to optical axis including turning point 30, 34: line showing magnetic flux, 40: charged particle source , 41: condenser lens, 42: sample, 43: objective lens, 44: deflector, 45: focus adjuster, 46: focus adjuster module, 47: fluorescent plate, 48: imaging lens, 49: focus adjuster module Fine movement direction, 50: first condenser lens, 51: second condenser lens, 52: first imaging 53: Second imaging lens, 54: Third imaging lens, 55: Fourth imaging lens, 56: Vacuum container, 57: Image observation / recording medium, 58: Accelerating tube, 59: Focus adjuster module 60: Operating mechanism of the focus adjuster module, 80: Control unit for charged particle source, 81: Control unit for acceleration feeling, 82: Control unit for first condenser lens, 83: Control unit for second condenser lens 84: Sample control unit, 85: Objective lens control unit, 86: Deflector control unit, 87: Focus adjuster control unit, 88: First imaging lens control unit, 90: Second imaging Lens control unit 91: Third imaging lens control unit 92: Fourth imaging lens control unit 93: Image observation / recording medium control unit 95: Control system computer 96: Control system computer Monitor, 97: Interface of control system computer, 98: Image recording Recording / arithmetic processing device, 99: image display device, 110: wavefront, 111: wavefront

Claims (12)

An electrostatic charged particle beam lens provided in an optical system of an imaging lens that forms an image of a sample with a charged particle beam and capable of adjusting a defocus amount of the image of the sample independently of the imaging lens; ,
A deflector at least two stages give deflection action on the charged particle beam in conjunction with the adjustment of the defocus amount in the electrostatic charged particle beam lenses, wherein the first stage providing a deflection action on the charged particle beam polarized direction And
Polarization direction unit of the two-stage viewed from the traveling direction of the charged particle beam, the electrostatic charged particle beam lenses, are arranged in order of the polarization direction device of the first stage,
Polarization direction unit of the two-stage adjusts the position of the optical axis of the electrostatic charged particle beam lenses,
Polarization direction device of the first stage is to correct astigmatism of the charged particle beam,
A charged particle beam lens module that can be disposed in an optical system of a charged particle beam apparatus that forms an image using charged particles that have passed through the sample. The charged particle beam lens module according to claim 1,
The charged particle beam lens module is movable in an arbitrary direction perpendicular to the optical axis in a space including the optical axis of the charged particle beam device, and the charged particle beam is inserted into an orbit or the A charged particle beam lens module capable of extracting a charged particle beam from an orbit. The charged particle beam lens module according to claim 1,
The charged particle beam lens module according to claim 1, wherein at least one of the deflection operations applied to the charged particle beam in the two-stage deflector is caused by an electric field. In the charged particle beam apparatus equipped with the charged particle beam lens module according to claim 1,
The charged particle beam lens module is arranged as a module movable in an arbitrary direction perpendicular to an optical axis of the charged particle beam apparatus. The charged particle beam device according to claim 4,
The charged particle beam lens module is capable of inserting a charged particle beam into or out of a trajectory or drawing out the charged particle beam from the orbit. The charged particle beam device according to claim 4,
The imaging lens is a magnetic field type objective lens, and the electrostatic charged particle beam lens and the two-stage deflector are light beams of the charged particle beam device in a space including an optical axis of the charged particle beam device. A module that can move in any direction perpendicular to the axis,
The charged particle beam lens module is disposed in the magnetic field of the magnetic field type objective lens on the downstream side of the optical axis when viewed from the sample in the traveling direction of the charged particle beam. The charged particle beam device according to claim 4,
The imaging lens is a magnetic field type objective lens, and the electrostatic charged particle beam lens and the two-stage deflector are light beams of the charged particle beam device in a space including an optical axis of the charged particle beam device. A module that can move in any direction perpendicular to the axis,
The charged particle beam lens module is located downstream of the optical axis in the traveling direction of the charged particle beam and between the magnetic field type objective lens and the image plane of the sample by the magnetic field type objective lens. A charged particle beam device characterized by being arranged. The charged particle beam device according to claim 4,
The two-stage deflector applies a deflecting action to the charged particle beam so that an optical axis of the charged particle beam device and an optical axis of the electrostatic charged particle beam lens coincide with each other. Particle beam device. The charged particle beam device according to claim 4,
2. The charged particle beam apparatus according to claim 2, wherein the two-stage deflector gives the charged particle beam a deflection action for reducing astigmatism generated by the electrostatic charged particle beam lens. The charged particle beam device according to claim 4,
When the wavelength of the charged particle beam is λ, the size of the observation object of the sample is R, and the focus modulation amount of the sample image generated by adjusting the focal length of the electrostatic charged particle beam lens is Df ,
Df> (2 × R × R) / λ
A charged particle beam device characterized by satisfying the relationship of the formula: An electrostatic charged particle beam lens provided in an optical system of an imaging lens that forms an image of a sample with a charged particle beam and capable of adjusting a defocus amount of the image of the sample independently of the imaging lens; ,
At least two stages of deflectors for deflecting the charged particle beam in conjunction with the adjustment of the defocus amount in the electrostatic charged particle beam lens;
Moreover, and a polarization direction instrument 1 stage giving deflection action on the charged particle beam,
Polarization direction unit of the two-stage viewed from the traveling direction of the charged particle beam, the electrostatic charged particle beam lenses, are arranged in order of the polarization direction device of the first stage,
Polarization direction unit of the two-stage adjusts the position of the optical axis of the electrostatic charged particle beam lenses,
Polarization direction device of the first stage is to correct astigmatism of the charged particle beam,
The electrostatic charged particle beam lens is
Having four electrodes divided in a plane substantially perpendicular to the optical axis of the charged particle beam lens;
A charged particle beam lens module, which can be disposed in an optical system of a charged particle beam apparatus that detects charged particles that have passed through the sample. The charged particle beam apparatus having the charged particle beam lens module according to claim 11,
The charged particle beam device is a charged particle beam device that detects charged particles that have passed through the sample, and the charged particle beam lens module is an optical lens that forms an image of the sample with the charged particle beam. A charged particle beam apparatus characterized by comprising a system.

Images