JP6384074B2 - Channel structure, liquid jet head, and printing apparatus - Google Patents

Description

  The present invention relates to a technique for ejecting a liquid such as ink.

  Conventionally, a liquid ejecting head that ejects liquid such as ink from a plurality of nozzles has been proposed. For example, Patent Document 1 discloses a configuration in which a surface of a substrate on which a groove is formed is sealed with a film to form a flow path for air supplied to a liquid ejecting head or air for pressurizing an ink cartridge. ing. In the technique of Patent Document 1, a pipe (tube) is connected to a supply port or an outlet formed on a side surface of a substrate, and ink or air supplied from the supply side pipe to the supply port is supplied from the outlet to the outlet side. To be discharged. In Patent Document 2, a plurality of substrates are stacked to form a channel between the substrates, and the channel is supplied to the channel from a pipe connected to a supply port (ink suction port) formed on the side surface of the substrate. A configuration for distributing ink into a plurality is disclosed.

JP 2004-330717 A JP-T-2005-500916

  However, in the techniques of Patent Document 1 and Patent Document 2, the supply port and the outlet are formed on the side surface of the substrate for forming the flow path, and the piping is connected so as to protrude from the side surface of the substrate. There is a problem that it is difficult to reduce the size of the liquid jet head as viewed from the direction. In view of the above circumstances, one aspect of the present invention aims to reduce the size of a liquid jet head.

  In order to solve the above problems, a flow channel structure according to a preferred embodiment of the present invention includes a plate-like base portion, a supply port formed on one surface of the base portion, and the other surface of the base portion. The base portion is formed with a flow path that communicates the supply port with the plurality of outlets. In the above configuration, a supply port is formed on one surface of the base portion and a plurality of outflow ports are formed on the other surface. Therefore, supply ports and outflow ports are formed on the side surface of the substrate to connect the pipes. Compared with the techniques of Patent Document 1 and Patent Document 2, the size of the flow path structure viewed from the direction perpendicular to the base portion (and thus the size of the liquid jet head on which the flow path structure is mounted) is reduced.

  In the flow channel structure according to the first aspect of the present invention, the base portion includes a substrate including a first surface on which a supply port is formed and a second surface on which a plurality of outflow ports are formed, and extends in the first direction. A first front groove formed on the first surface so as to communicate with the supply port, and communicated with the plurality of outlets through the through holes formed in the substrate; And a film-like first sealing portion that seals the front groove portion and forms at least a part of the flow path. In the above aspect, since the flow path is formed by installing the film-like first sealing portion on the first surface of the substrate, for example, compared with a configuration in which a flow path is formed between the substrates by joining a plurality of substrates. And there exists an advantage that thickness reduction of a flow-path structure is easy.

  A flow channel structure according to a preferred example of the first aspect includes a back-side groove formed on the second surface, and a film-like second sealing portion that is installed on the second surface and seals the back-side groove. The back side groove portion communicates with the supply port through a through hole formed in the substrate, and the first front side groove portion communicates with the back side groove portion through a through hole formed in the substrate. In the above aspect, the supply port and the first front side groove communicate with each other via the back side groove formed on the second surface of the substrate. For example, the supply port and the first front side groove via the flow path inside the substrate. There is an advantage that the substrate can be easily manufactured as compared with the configuration in which the part is communicated.

  The flow channel structure according to a preferred example of the first aspect includes a second front groove portion formed on the first surface so as to extend in the first direction, and the first front groove portion and the second front groove portion. Each communicates with the backside groove through a through hole formed in the substrate. For example, the first front-side groove and the second front-side groove are positioned on opposite sides of the supply port in plan view. In the above aspect, since the 1st front side groove part and the 2nd front side groove part are connected via a back side groove part, there exists an advantage that the flow path covering the wide range of a 1st direction can be formed.

  In a preferred example of the first aspect, the substrate is formed of a thermoplastic resin material, and surfaces of the first sealing portion and the second sealing portion formed of the resin material are welded to the substrate. In the above aspect, since the surfaces of the first sealing portion and the second sealing portion are welded to the substrate, for example, the first sealing portion and the second sealing portion are bonded to the substrate with an adhesive. There is an advantage that the first sealing portion and the second sealing portion are easily installed as compared with the first sealing portion.

  In a preferred example of the first aspect, the first sealing portion and the second sealing portion are separate film-like members. In the above aspect, since the first sealing portion and the second sealing portion are separate members, the first sealing portion and the second sealing portion are first compared with the configuration in which the first sealing portion and the second sealing portion are continuous. There exists an advantage that the operation | work which installs a sealing part and a 2nd sealing part in a board | substrate is easy.

  In the channel structure according to the second aspect of the present invention, the base portion includes a first substrate including a first surface on which a supply port is formed, and a second substrate including a second surface on which a plurality of outflow ports are formed. A first flow path surface of the first substrate opposite to the first surface and a second flow path surface of the second substrate opposite to the second surface are joined together to form a first flow path surface And a flow path is formed by the groove part formed in at least one of the 2nd flow path surface. In the above aspect, since the flow path is formed by joining the first substrate and the second substrate, the flow path machine is compared with the first aspect in which the flow path is formed by the film-like sealing portion. There is an advantage that sufficient strength can be secured.

  In a preferred example of each aspect illustrated above (including both the first aspect and the second aspect), each of the plurality of outlets is a tubular portion protruding from the second surface, and among the plurality of outlets The height with respect to the second surface is different between one outlet and the other outlet. In the above aspect, since the heights of the respective outlets on the second surface are different, in the step of mutually fixing the flow path structure and the connection target in a state where the respective outlets are inserted into the connection target supply ports. The time points at which the stress acts on the connection target from the respective outlets are dispersed in time. Therefore, there is an advantage that the deformation or breakage of the connection target due to the stress from each outlet of the flow channel structure can be prevented.

  In a preferred example of the flow channel structure according to the present invention, a supply port, a plurality of outlets, and a channel from the supply port to the plurality of outlets are formed for each of the plurality of fluids. In the above aspect, since a plurality of flow paths corresponding to different fluids are formed in the substrate, it is possible to distribute the plurality of fluids into a plurality.

  In a preferred embodiment of the present invention, the plurality of fluids include a liquid and a gas, and the flow path of the liquid extends linearly in a plan view, while the gas flow path is an attachment for fixing the substrate in a plan view. It is formed in a bent shape so as to bypass the hole. In the above aspect, the liquid flow path extends linearly, and the gas flow path is formed in a shape that bypasses the mounting hole. Therefore, there is an advantage that the attachment hole can be formed while reducing the flow path resistance of the liquid flow path. On the other hand, even if the gas flow path is bent into a shape that bypasses the mounting hole, the flow path resistance does not become a particular problem.

  In a preferred embodiment of the present invention, the plurality of fluids includes a plurality of gases that are pressurized independently of each other. In the above aspect, since a plurality of gases pressurized independently of each other are distributed by the flow path structure, for example, each of the plurality of gases is individually used for control of the liquid flow path (opening / closing and pressure adjustment). Is possible. In addition, the difference of each kind of several gas is not ask | required. For example, the plurality of gases can be air.

  In a preferred example of the first aspect, the plurality of fluids include a first liquid, a second liquid, and a gas, and the gas flow path includes a flow path of the first liquid and a flow path of the second liquid in a plan view. Located between. In the above aspect, there is an advantage that the flow channel structure can be easily connected to a connection target in which a gas supply port is formed between the first liquid supply port and the second liquid supply port.

  A liquid jet head according to a preferred aspect of the present invention includes the flow path structure according to each of the above aspects. Specifically, the liquid jet head according to the present invention includes the flow channel structure according to each of the above-described embodiments that distributes each of a plurality of fluids including liquid and gas, and the gas of each system after distribution by the flow channel structure. A flow path control unit that controls the flow path of the liquid of each system after distribution by the flow path structure, and a liquid ejection unit that ejects liquid from the plurality of nozzles via the flow path control unit To do. According to each aspect described above, since the size of the flow path structure is reduced, there is an advantage that the liquid ejecting head is reduced in size.

  In a preferred example of the second aspect, the liquid ejecting unit includes a liquid distributing unit that distributes the liquid of each system via the flow path control unit, and a plurality of liquids of each system after being distributed by the liquid distributing unit according to the drive signal. A plurality of ejection head units that eject from the nozzles, and a wiring board that is installed between the flow path structure and the liquid distribution unit and on which wiring for transmitting drive signals is formed. In the above aspect, the wiring board is installed between the flow path structure and the liquid distributor. That is, the liquid is distributed on one side and the other side of the wiring board. Accordingly, for example, the size of the liquid ejecting head viewed from the direction perpendicular to the wiring substrate can be reduced as compared with a configuration in which the liquid flow path is provided only between the wiring substrate and the plurality of ejecting heads. In addition, compared to a configuration in which both the flow path structure and the liquid distribution unit are installed between the wiring board and the plurality of jet head units, there is an advantage that the distance between each jet head unit and the wiring board is shortened. is there.

  In a preferred example of the second aspect, the liquid distribution unit includes an opening corresponding to each of the plurality of ejection head units, and each of the plurality of ejection head units is connected to the wiring substrate via the opening of the liquid distribution unit. A flexible wiring board connected is included. In the above aspect, since the flexible wiring substrate of each ejection head unit is connected to the wiring substrate through each opening of the liquid distribution unit, the size required for the flexible wiring substrate is reduced (and eventually). Manufacturing cost is reduced).

  A liquid jet head according to another aspect of the present invention uses a flat channel structure that distributes each of a plurality of fluids including liquid and gas, and gas of each system after distribution by the channel structure. A flow path control unit that controls the flow path of the liquid of each system after distribution by the flow path structure, and a liquid ejection unit that ejects liquid from the plurality of nozzles via the flow path control unit, The liquid ejecting unit ejects the liquid of each system via the flow path control unit from the plurality of nozzles according to the drive signal and the flat liquid distributing unit that distributes the liquid of each system and the liquid after the distribution by the liquid distributing unit. The flow path control unit includes a plurality of ejection head units, and is positioned between the flow path structure and the liquid distribution unit that overlap each other in plan view. In the above aspect, since each of the plurality of fluids including the liquid and the gas is distributed by the flat channel structure, the liquid is compared with the configuration in which the liquid and the gas are distributed to the plurality by separate mechanisms. It is possible to reduce the size of the ejection head. In addition, since the liquid of each system after distribution by the flow channel structure is distributed to a plurality of parts by a liquid distribution unit separate from the flow channel structure, compared with a configuration in which the liquid is distributed only by a single element. There is an advantage that the size of the liquid ejecting head viewed from the direction perpendicular to the flow path structure is reduced. The above-described effects are obtained by a configuration in which the number of distributions by the flow channel structure and the liquid distribution unit is large (for example, a configuration in which the number of distribution of one liquid by the flow channel structure exceeds the number K of liquid types, In which the number of distributions exceeds the number K of liquid types).

  In a preferred aspect of the present invention, the liquid distributor includes a first flow path substrate, a second flow path substrate, and a third flow path substrate that are stacked on each other, and a plurality of first liquids among a plurality of fluids. A first flow path that distributes to the ejection head portions is formed between the first flow path substrate and the second flow path substrate, and a second liquid of the plurality of fluids is distributed to the plurality of ejection head portions. A flow path is formed between the second flow path substrate and the third flow path substrate. In the above aspect, the first flow path is formed between the first flow path substrate and the second flow path substrate, and the second flow path is formed between the second flow path substrate and the third flow path substrate. Therefore, there is an advantage that the planar size of the liquid distributor is reduced as compared with the configuration in which both the first channel and the second channel are formed between the pair of substrates.

  In a preferred example of the liquid ejecting head according to the present invention, each of the plurality of ejecting head units includes a liquid storage chamber for storing the liquid after distribution by the liquid distributing unit, and a plurality of pressures filled with the liquid ejected from the nozzle. And a plurality of supply passages for supplying the liquid stored in the liquid storage chamber to the plurality of pressure chambers. In the above aspect, the liquid is divided into a plurality by the flow channel structure, the liquid after the distribution by the flow channel structure is divided into a plurality by the liquid distribution unit, and the liquid after the distribution by the liquid distribution unit is supplied to each supply flow channel. And distributed to a plurality of pressure chambers.

  In a preferred example of the liquid ejecting head according to the present invention, the flow path structure distributes the liquid to the plurality of outlets arranged along the first direction, and the plurality of pressure chambers in each of the plurality of ejecting head portions includes , Arranged along a second direction different from the first direction. In the above aspect, since the plurality of pressure chambers are arranged along the second direction different from the first direction in which the plurality of outlets of the flow channel structure are arranged, for example, the plurality of pressure chambers are along the first direction. Compared with the arrangement arranged in this manner, it is possible to form a plurality of nozzles of each ejection head portion at a high density along the first direction.

  A liquid ejecting apparatus according to a preferred aspect of the invention includes the liquid ejecting head according to each of the above aspects. A good example of the liquid ejecting apparatus is a printing apparatus that ejects ink, but the use of the liquid ejecting apparatus according to the present invention is not limited to printing.

1 is a configuration diagram of a printing apparatus according to a first embodiment of the present invention. FIG. 3 is an exploded perspective view of a liquid ejecting head. FIG. 3 is an exploded perspective view of a liquid ejecting head. FIG. 3 is a plan view of the liquid ejecting head as viewed from the print medium side. It is explanatory drawing of the flow path of a liquid jet head. It is the side view and top view of a flow-path structure. It is sectional drawing of the VII-VII line in FIG. It is explanatory drawing of the relationship between a flow-path structure and the supply pipe | tube of an ink and air. It is a block diagram which paid its attention to the flow path of 1 system ink among flow path control parts. It is a disassembled perspective view of a liquid injection unit. It is the top view which looked at the filter part, the communicating member, and the wiring board from the printing medium side. It is a disassembled perspective view of a liquid distribution part. FIG. 3 is a perspective view of a liquid distributor as viewed from the print medium side. It is explanatory drawing of the flow path formed in the inside of a liquid distribution part. It is sectional drawing of an ejection head part. It is the side view and top view of the flow-path structure in 2nd Embodiment. It is the side view and top view of the flow-path structure in 3rd Embodiment. It is sectional drawing of the XVIII-XVIII line in FIG.

  FIG. 1 is a partial configuration diagram of an ink jet printing apparatus 100 according to a first embodiment of the present invention. The printing apparatus 100 according to the first embodiment is a liquid ejecting apparatus that ejects ink, which is an example of a liquid, onto a printing medium (ejecting target) M such as printing paper. And a pump 16. A liquid container (ink cartridge) 18 that stores ink I of a plurality of colors is mounted on the printing apparatus 100. In the first embodiment, four colors of ink I of cyan (C), magenta (M), yellow (Y), and black (B) are stored in the liquid container 18.

  The control device 10 comprehensively controls each element of the printing device 100. The transport mechanism 12 transports the print medium M in the Y direction under the control of the control device 10. The pump 16 is an air supply device that supplies two systems of air A (A 1, A 2) to the liquid jet head 14 under the control of the control device 10. The air A1 and the air A2 are gases used for controlling the flow path inside the liquid jet head 14. The pump 16 of the first embodiment can pressurize the air A1 and the air A2 independently of each other. The liquid ejecting head 14 ejects the ink I supplied from the liquid container 18 onto the print medium M under the control of the control device 10. The liquid jet head 14 according to the first embodiment is a line head that is long in the X direction intersecting the Y direction. A direction perpendicular to the XY plane (a plane parallel to the surface of the print medium M) is hereinafter referred to as a Z direction. The ejection direction of the ink I by the liquid ejecting head 14 corresponds to the Z direction.

  2 and 3 are exploded perspective views of the liquid jet head 14. As illustrated in FIGS. 2 and 3, the liquid jet head 14 according to the first embodiment includes a flow channel structure G1, a flow channel control unit G2, and a liquid jet unit G3. Schematically, a flow path controller G2 is installed between the flow path structure G1 and the liquid ejecting section G3. That is, the channel structure G1, the channel controller G2, and the liquid ejecting unit G3 overlap each other when viewed from the Z direction. The liquid ejecting unit G3 is a structure in which six liquid ejecting units U3 are accommodated and supported in the housing 142.

  FIG. 4 is a plan view of a surface facing the print medium M in the liquid ejecting unit G3. As illustrated in FIG. 4, the six liquid ejecting units U3 are arranged along the X direction. Each liquid ejecting unit U3 includes a plurality (six in the example of the first embodiment) of ejecting heads 70 arranged along the X direction. Each ejection head unit 70 includes a head chip that ejects ink I from a plurality of nozzles N. The plurality of nozzles N of one ejection head unit 70 are arranged in two rows along the W direction inclined at a predetermined angle with respect to the X direction and the Y direction. Four systems (four colors) of ink I are supplied in parallel to each ejection head unit 70 of the liquid ejection unit U3. The plurality of nozzles N of one ejection head unit 70 are divided into four groups, and different inks I are ejected for each group.

  FIG. 5 is a configuration diagram of the liquid ejecting head 14 focusing on the flow path of the fluid (ink I and air A). As understood from FIG. 5, four systems of ink I are supplied from the liquid container 18 and two systems of air A (A1, A2) are supplied from the pump 16 to the flow path structure G1. The flow path structure G1 distributes each of the four systems of ink I and each of the two systems of air A into six systems corresponding to different liquid ejecting units U3. That is, the distribution number (6) of one system of ink I by the flow path structure G1 exceeds the number of ink I types K (K = 4).

  2 and 3 is an element that controls the flow path (for example, opening and closing of the flow path and the pressure in the flow path) of the liquid ejecting head 14, and corresponds to different liquid ejecting units U3. Each flow path control unit U2 is configured. As illustrated in FIG. 5, four inks I and two airs A are supplied in parallel to the six flow path control units U2 by distribution in the flow path structure G1. Each flow path control unit U2 controls opening / closing and pressure of the flow paths of the four systems of ink I distributed by the flow path structure G1 to each liquid ejecting unit U3 according to the two systems of air A.

  After distribution in the flow path structure G1, four systems of ink I are supplied in parallel to the six liquid ejection units U3 via the flow path control units U2. Each liquid ejecting unit U3 includes a liquid distributor 60. The liquid distribution unit 60 distributes each of the four systems of ink I supplied from the upstream flow path control unit U2 to six systems corresponding to different ejection head units 70. That is, the four systems of ink I after being distributed by the liquid distribution unit 60 are supplied in parallel to each of the six ejection head units 70. Each ejection head unit 70 ejects each of the four systems of ink I from different nozzles N. Specific examples of the elements (the flow channel structure G1, the flow channel control unit G2, and the liquid ejection unit G3) of the liquid jet head 14 outlined above will be described in detail below.

<Flow channel structure G1>
6 is a side view and a plan view of the flow path structure G1, and FIG. 7 is a cross-sectional view taken along line VII-VII in FIG. As illustrated in the side view of FIG. 6, the flow path structure G1 of the first embodiment includes a substrate 20, a plurality of sealing portions 25 (25a, 25b, 25c), and a plurality of sealing portions 26 (26a, 26b). ). In addition, illustration of each sealing part 25 and each sealing part 26 was abbreviate | omitted for convenience in the top view of FIG.

  The substrate 20 of the first embodiment is a flat plate that is long in the X direction, and includes a first surface 21 and a second surface 22 that are parallel to the XY plane. In FIG. 6, a plan view of the first surface 21 and a plan view of the second surface 22 are shown together. The first surface 21 is the surface (upper surface) opposite to the flow path control unit G2 and the liquid ejecting unit G3, and the second surface 22 is the surface opposite to the first surface 21 (flow channel control unit G2). Opposite surface). The substrate 20 of the first embodiment is formed of a thermoplastic resin material (for example, polypropylene).

  As illustrated in FIG. 6, the first surface 21 of the substrate 20 includes a region 31a, a region 31b, and a region 31c. Four supply ports SI1 corresponding to the ink I of each system are formed between the region 31a and the region 31b on the first surface 21, and between the region 31b and the region 31c on the first surface 21. Are formed with two supply ports SA1 corresponding to the air A of each system.

  FIG. 8 is an explanatory diagram of the connection state of the flow path structure G1. As illustrated in FIG. 8, each of the four supply ports SI <b> 1 is connected to the end portion of the supply pipe TI <b> 1 of each ink I through a connection portion (joint) 381 installed on the first surface 21. . Each supply pipe TI1 extends along the X direction on the surface of the region 31a, and the end opposite to the supply port SI1 is connected to the liquid container 18. On the other hand, the ends of the supply pipes TA1 for the air A (A1, A2) are connected to each of the two supply ports SA1 through a connection part 382 installed on the first surface 21. Each supply pipe TA1 extends in the X direction on the surface of the region 31b and the region 31a, and the end opposite to the supply port SA1 is connected to the pump 16. In the above configuration, the four systems of ink I (C, M, Y, K) stored in the liquid container 18 are supplied in parallel to the four supply ports SI1 through the supply pipes TI1, and are supplied from the pump 16. The two systems of air A (A1, A2) sent out are supplied in parallel to the two supply ports SA1 via each supply pipe TA1.

  As illustrated in FIG. 6, four grooves 341 a corresponding to each ink I are formed in the region 31 a of the first surface 21 of the substrate 20. Similarly, four groove portions 341b are formed in the region 31b, and four groove portions 341c are formed in the region 31c. The groove portion 341a and the groove portion 341b are located on opposite sides of the supply port SI1 in plan view (that is, when viewed from the Z direction perpendicular to the substrate 20). In addition, two grooves 342 a corresponding to each air A are formed in the region 31 a of the first surface 21 of the substrate 20. Similarly, two grooves 342b are formed in the region 31b, and two grooves 342c are formed in the region 31c. The groove part 342b and the groove part 342c are located on opposite sides of the supply port SA1 in plan view. As illustrated in FIG. 6, in each region 31 (31 a, 31 b, 31 c) of the first surface 21, the ink I is formed on both sides of the two groove portions 342 (342 a, 342 b, 342 c) corresponding to the air A. Corresponding grooves 341 (341a, 341b, 341c) are located.

  Each groove part 341 (341a, 341b, 341c) and each groove part 342 (342a, 342b, 342c) are roughly grooves (front-side groove parts) formed to extend in the X direction. Specifically, in the first embodiment, each groove portion 341 corresponding to the ink I extends substantially linearly along the X direction, and each groove portion 342 corresponding to the air A is an attachment formed on the substrate 20. It is formed in a bent shape so as to bypass the hole 23. Each mounting hole 23 is a through-hole used for fixing the substrate 20, and specifically, a screw hole into which a screw (not shown) for fixing the flow path structure G1 to the flow path control unit G2 is inserted. is there.

  As illustrated in the side view of FIG. 6, separate sealing portions 25 (25 a, 25 b, 25 c) are installed in each region 31 (31 a, 31 b, 31 c) of the first surface 21. Specifically, the sealing portion 25a is installed in the region 31a, the sealing portion 25b is installed in the region 31b, and the sealing portion 25c is installed in the region 31c. Each sealing portion 25 is a film-like member (film thickness of about 0.1 mm) attached to the first surface 21 of the substrate 20, and each groove portion 341 and each groove portion 342 formed on the first surface 21. Is sealed (closed) to form a flow path.

  On the other hand, the second surface 22 of the substrate 20 includes a region 32a and a region 32b as illustrated in FIG. The region 32a is a region that overlaps the region of the gap between the region 31a and the region 31b of the first surface 21 (that is, the region where the four supply ports SI1 are formed) in plan view, and the region 32b is the first surface 21. This is an area that overlaps the area of the gap between the area 31b and the area 31c (that is, the area where the two supply ports SA1 are formed) in plan view.

  In the region 32a of the second surface 22, four groove portions 351a corresponding to each ink I and two groove portions 352a corresponding to each air A are formed. Similarly, four grooves 351b and two grooves 352b are formed in the region 32b. Each groove portion 351 (351a, 351b) and each groove portion 352 (352a, 352b) are grooves (back side groove portions) formed on the second surface 22. In the region 32b, the four groove portions 351b are located outside the two groove portions 352b, while in the region 32a, the groove portions 352a are located in the gap between the pair of groove portions 351a.

  In FIG. 6, the boundary of each liquid ejecting unit U3 is illustrated by a wavy line. As illustrated in FIG. 6, the second surface 22 has four outlets DI1 corresponding to each ink I and two outlets DA1 corresponding to each air A, and six liquid ejecting units U3. (Each of the six flow path control units U2). Each of the outlets DI1 and each of the outlets DA1 is a tubular portion protruding from the second surface 22 in the Z direction.

  Six outflow ports DI1 corresponding to any one system of ink I are substantially equally spaced so as to overlap each of the grooves 341 (341a, 341b, 341c) corresponding to the ink I in the first surface 21 in plan view. As shown in FIG. 7, each of the grooves 341 communicates with each groove 341 through a through hole H that penetrates the substrate 20 in the Z direction. Similarly, the six outlets DA1 corresponding to any one system of air A overlap with the grooves 342 (342a, 342b, 342c) corresponding to the air A in the first surface 21 in plan view. They are arranged along the X direction at substantially equal intervals, and communicate with the grooves 342 through the through holes H of the substrate 20.

  As illustrated in the side view of FIG. 6, separate sealing portions 26 (26 a, 26 b) are installed in each region 32 (32 a, 32 b) of the second surface 22. Specifically, the sealing portion 26a is installed in the region 32a, and the sealing portion 26b is installed in the region 32b. Each sealing part 26 is a film-like member (film thickness of about 0.1 mm) adhered to the second surface 22, and similarly to the sealing part 25 on the first surface 21 side, the second surface 22. The flow path is configured by sealing the respective groove portions 351 (351a, 351b) and the respective groove portions 352 (352a, 352b) formed in FIG. As described above, in the first embodiment, since the film-like sealing portion 25 and the sealing portion 26 are installed on the substrate 20, for example, by sticking a flat plate material having a predetermined plate thickness to the substrate 20. There is an advantage that the dimension (thickness) in the Z direction of the flow channel structure G1 can be reduced as compared with the configuration in which the flow channel is formed. In the first embodiment, since the plurality of sealing portions 25 are installed on the first surface 21, the sealing portion 25 is compared with a configuration in which the entire first surface 21 is covered with the single sealing portion 25. Can be easily installed (the sealing failure of each groove can be reduced). The same applies to the sealing portion 26.

  Each sealing portion 25 and each sealing portion 26 of the first embodiment has a surface layer formed of a material common to the substrate 20 (a thermoplastic resin material such as polypropylene), and the surface of the surface layer is heated in the heated state. Is welded to the substrate 20. Therefore, there exists an advantage that installation of each sealing part 25 and each sealing part 26 is easy. For example, the sealing part 25 and the sealing part 26 are suitably configured by stacking PET and polypropylene. Moreover, in 1st Embodiment, each sealing part 25 and each sealing part 26 are formed in a different body mutually. Therefore, there is an advantage that the sealing portion 25 and the sealing portion 26 can be easily installed as compared with a configuration in which the sealing portion 25 and the sealing portion 26 are integrally formed.

  As illustrated in FIGS. 6 and 7, the groove portion 351 a of the second surface 22 communicates with the supply port SI 1 of the first surface 21 through the through hole H of the substrate 20. In addition, each groove portion 351 (351a, 351b) on the second surface 22 communicates with each groove portion 341 on the first surface 21 via the through hole H of the substrate 20. Specifically, as understood from FIG. 6, the groove portion 351a communicates with the groove portion 341a and the groove portion 341b, and the groove portion 351b communicates with the groove portion 341b and the groove portion 341c. That is, the groove part 341a, the groove part 341b, and the groove part 341c of the first surface 21 communicate with each other via the groove part 351a and the groove part 351b of the second surface 22. As understood from the above description, the six outlets DI1 of the second surface 22 from any one supply port SI1 via the grooves 351 of the second surface 22 and the grooves 341 of the first surface 21. 5 is formed for each of the four systems of ink. That is, the flow path PI1 is a flow path that distributes one system of ink I supplied to the supply port SI1 to the six outlets DI1.

  On the other hand, each groove portion 352 b of the second surface 22 in FIG. 6 communicates with the supply port SA 1 of the first surface 21 through the through hole H of the substrate 20. Further, each groove portion 352 (352a, 352b) on the second surface 22 communicates with each groove portion 342 on the first surface 21 through the through hole H of the substrate 20. Specifically, the groove part 352a communicates with the groove part 342a and the groove part 342b, and the groove part 352b communicates with the groove part 342b and the groove part 342c. That is, the groove part 342a, the groove part 342b, and the groove part 342c of the first surface 21 communicate with each other via the groove part 352a and the groove part 352b of the second surface 22. As understood from the above description, the six outlets DA1 of the second surface 22 from any one supply port SA1 through the groove portions 352 of the second surface 22 and the groove portions 342 of the first surface 21. 5 is formed for each of the two systems of air A. That is, the flow path PA1 is a flow path that distributes one system of air A (A1, A2) supplied to the supply port SA1 to the six outlets DA1. The flow path PA1 of the first embodiment is bent in the XY plane so as to bypass the mounting hole 23. When the flow path PI1 for supplying ink I is bent in the same manner, an increase in flow path resistance becomes a problem. However, since the fluid flowing through the flow path PA1 is air A, it is caused by the bending of the flow path PA1. The increased flow resistance does not become a particular problem.

  As described above, the flow path structure G1 of the first embodiment includes the flow paths (PI1, PA1) from the supply ports (SI1, SA1) to the plurality of outlets (DI1, DA1), the ink I and the air A. Are formed for each of a plurality of fluids. As understood from FIG. 6, in the first embodiment, two four flow paths PI1 for distributing the ink I are located on both sides of the two flow paths PA1 for distributing the air A. The configuration of the flow path structure G1 according to the first embodiment is as described above.

  As described above, in the first embodiment, each supply port (SI1, SA1) is formed on the first surface 21 of the substrate 20, and each outlet (DI1, DI2) is formed on the second surface 22 of the substrate 20. Therefore, the size of the flow path structure G1 viewed from the Z direction is reduced as compared with the configurations of Patent Document 1 and Patent Document 2 in which a supply port and an outlet are formed on the side surface of the substrate to connect the pipes. . Therefore, the liquid ejecting head 14 can be reduced in size.

<Flow path control unit G2>
As illustrated in FIG. 2, four supply ports SI2 and two supply ports SA2 are formed on the surface of the flow path control unit U2 of the flow path control unit G2 facing the flow path structure G1. The In a state where the flow path structure G1 and each flow path control unit U2 are fixed to each other, the outlet DI1 of the flow path structure G1 is inserted into the supply port SI2 of the flow path control unit U2, and the flow path structure G1 The outlet DA1 is inserted into the supply port SA2 of the flow path control unit U2. Therefore, as can be understood from FIG. 5, the ink I of each system is supplied to each supply port SI2 of the flow path control unit U2 from each outlet DI1 of the flow path structure G1, and each flow path control unit U2 Air A of each system is supplied from the outlet DA1 of the flow path structure G1 to the supply port SA2. As described above, in the first embodiment, since the outlet DI1 of the flow path structure G1 and the supply port SI2 of each flow path control unit U2 are directly connected, for example, the outlet DI1 and the supply port SI2 Can be achieved by reducing the number of parts and preventing liquid leakage.

  On the other hand, as illustrated in FIG. 3, four outflow ports DI2 are formed on the surface of each flow path control unit U2 facing the liquid ejecting portion G3. As illustrated in FIG. 5, the flow path control unit U2 includes four systems of flow paths PI2 extending from the supply ports SI2 to the outlets DI2. Each of the four systems of ink I supplied to each flow path control unit U2 after being distributed by the flow path structure G1 passes through each flow path PI2 from the four outlets DI2 in parallel to the subsequent liquid jet unit U3. Supplied.

  As illustrated in FIG. 5, in the flow path control unit U2, a negative pressure generating section 42, a flow path opening / closing section 44, and a pressure adjusting section 46 are installed for each of the four systems of flow paths PI2. Further, the flow path control unit U2 of the first embodiment includes a flow path PA2_1 that distributes the air A1 supplied to the supply port SA2 to four systems corresponding to each flow path PI2, and the air A2 supplied to the supply port SA2. Includes a flow path PA2_2 that distributes the four flows corresponding to each flow path PI2. The air A1 distributed in the flow path PA2_1 is supplied in parallel to the four flow path opening / closing sections 44 of the flow path control unit U2, and the air A2 distributed in the flow path PA2_2 is set to the four pressures of the flow path control unit U2. It is supplied to the adjustment unit 46 in parallel.

  FIG. 9 is a configuration diagram paying attention to the flow path PI2 of the arbitrary ink I of the flow path control unit U2. As illustrated in FIG. 9, the negative pressure generating unit 42 is installed on the flow path PI2 and maintains a predetermined negative pressure in the flow path PI2. Specifically, in the normal state, the flow path PI2 is closed, and flows autonomously when the negative pressure in the flow path PI2 reaches a predetermined value due to the ejection (consumption) of the ink I by the liquid ejecting unit U3. A pressure control valve that opens the path PI2 and introduces the ink I is preferably employed as the negative pressure generating section 42. As illustrated in FIG. 9, the channel opening / closing unit 44 is installed on the downstream side of the negative pressure generating unit 42 in the channel PI <b> 2, and the pressure adjusting unit 46 is installed on the downstream side of the channel opening / closing unit 44. That is, the channel opening / closing part 44 is located between the negative pressure generating part 42 and the pressure adjusting part 46 on the channel PI2.

  The flow path opening / closing section 44 is a mechanism (choke valve) that controls the opening / closing (closing / opening) of the flow path PI2 in accordance with the air A1 supplied through the flow path PA2_1. 9 includes a flexible member 442 interposed between the flow path PI2 of ink I and the flow path PA2_1 of air A1, and biases the flexible member 442 toward the flow path PA2_1. And an elastic body 444. In the normal state (depressurized state) where the air A1 in the flow path PA2_1 is not pressurized, the flow path PI2 is opened, and when the air A1 is pressurized by the pump 16, as shown by the broken line in FIG. The flexible member 442 is deformed against the urging by the 444, and the flow path PI2 is closed.

  9 is a mechanism that adjusts the pressure in the flow path PI2 (volume of the flow path PI2), and is, for example, a negative pressure release valve that releases the negative pressure in the flow path PI2. Specifically, the pressure adjusting unit 46 in FIG. 9 attaches the flexible member 462 interposed between the flow path PI2 of ink I and the flow path PA2_2 of air A2 and the flexible member 462 to the flow path PA2_2 side. And an elastic body 464 for energizing. In a normal state, when the air A2 in the flow path PA2_2 is set to atmospheric pressure (atmospheric release) and the air A2 is pressurized by the pump 16, it opposes the urging by the elastic body 464 as shown by the broken line in FIG. As the flexible member 462 is deformed to the flow path PI2 side (the volume of the flow path PI2 decreases), the pressure of the flow path PI2 increases to the extent that the negative pressure generated by the negative pressure generator 42 is released.

  For example, when cleaning the liquid ejecting unit U3 (ejection head unit 70), the negative pressure in the flow path of the ink I is released and the ink I is ejected from each nozzle N. However, in a state where the negative pressure generating unit 42 is effective, the release of the negative pressure by the pressure adjusting unit 46 can be inhibited. Accordingly, there is a possibility that the ink I is not sufficiently discharged from each nozzle N and that bubbles may enter from each nozzle N. Therefore, in the first embodiment, the air pressure A1 in the flow path PA2_1 is closed by the flow path opening / closing section 44 by pressurizing the air A1 in the flow path PA2_1, and then the pressure adjustment section 46 is pressurized by pressurizing the air A2 in the flow path PA2_2. Release the negative pressure in the flow path PI. According to the above operation, the negative pressure generating unit 42 and the pressure adjusting unit 46 are isolated from each other by the blockage of the flow channel PI2 by the flow channel opening / closing unit 44 (that is, the application of the negative pressure by the negative pressure generating unit 42 is invalid). In this state, the release of the negative pressure by the pressure adjusting unit 46 is executed, so that there is an advantage that the negative pressure in the flow channel on the downstream side of the flow channel opening / closing unit 44 can be effectively released.

  As can be understood from the above description, the negative pressure generating unit 42, the flow channel opening / closing unit 44, and the pressure adjusting unit 46 of the first embodiment function as elements that control the flow channel PI2 of each ink I. The control unit G2 is comprehensively expressed as an element that controls each flow path PI2 using air A (A1, A2) of each system after distribution by the flow path structure G1. The configuration of each flow path control unit U2 of the flow path control unit G2 according to the first embodiment is as described above.

<Liquid injection part G3>
The liquid ejecting unit G3 ejects the ink I of each system from the nozzle N via the flow path control unit G2. As illustrated in FIG. 2, four supply ports SI3 are formed on the surface of each liquid ejecting unit U3 of the liquid ejecting section G3 facing the flow path control section G2. In a state where the flow path control unit G2 and the liquid ejection unit G3 (housing 142) are fixed to each other, each supply port SI3 of each liquid ejection unit U3 is inserted into each outlet DI2 of the flow path control unit U2. . Therefore, as can be understood from FIG. 5, the ink I of each system is supplied in parallel from the outlet DI2 of the flow path control unit U2 to the four supply ports SI3 of each liquid ejecting unit U3.

  FIG. 10 is an exploded perspective view of any one liquid ejecting unit U3. As illustrated in FIG. 10, the liquid ejecting unit U <b> 3 includes a filter unit 52, a communication member 54, a wiring board 56, a liquid distribution unit 60, six ejecting head units 70, and a fixed plate 58. The liquid distribution unit 60 is installed between the six ejection head units 70 and the filter unit 52, and the communication member 54 and the wiring board 56 are installed between the liquid distribution unit 60 and the filter unit 52. As understood from the above description, the flow path control unit G2 (flow path control unit U2), the filter unit 52, and the communication member 54 are disposed between the flow path structure G1 and the liquid distribution unit 60 that overlap each other in plan view. And a wiring board 56 are installed. Further, a housing 142 that accommodates and supports the six liquid ejecting units U3 is also positioned between the flow path structure G1 and the liquid distributor 60.

  The filter unit 52 is an element that removes bubbles and foreign matters contained in each ink I supplied from the flow path control unit G2, and as illustrated in FIG. 10, is fixed in a state of facing each other. A member 522 and a second member 524 and four filters 526 corresponding to each ink I are configured. The first member 522 and the second member 524 are flat plate materials formed of a resin material such as Zylon (registered trademark), for example. On the surface of the first member 522 opposite to the second member 524, four supply ports SI3 to which the respective inks I are supplied via the flow path control unit G2 are formed.

  FIG. 11 is a plan view of the lamination of the filter unit 52, the communication member 54, and the wiring board 56 as viewed from the ejection head unit 70 side. The illustration of the liquid distribution unit 60 and the ejection head unit 70 is omitted in FIG. 11 for convenience. As illustrated in FIG. 11, four outflow ports 528 corresponding to each ink I are formed in the vicinity of the periphery (four corners) of the second member 524 in the filter portion 52. 4 between the first member 522 and the second member 524 so that one line of ink I supplied to any one supply port SI3 passes through the filter 526 and reaches one outlet 528. A number of filters 526 are installed. The filter unit 52 of the first embodiment is configured separately from the liquid distribution unit 60 and is fixed to the liquid distribution unit 60 by fixing means (not shown) such as screws. On the other hand, it is possible to remove the filter part 52 from the liquid distribution part 60 by releasing the fixation between them. That is, the filter unit 52 and the liquid distribution unit 60 are fixed to each other in a detachable state.

  10 communicates each outlet 528 of the filter unit 52 with the liquid distribution unit 60. The communication member 54 of the first embodiment is a flat plate formed of an elastic material (for example, rubber), and a plurality of through holes 542 corresponding to the outlets 528 of the filter unit 52 are provided as illustrated in FIG. It is formed. Specifically, each through hole 542 is located at each corner (four corners) of the communication member 54 in plan view.

  The wiring board 56 in FIG. 10 is a board on which wiring for transmitting a drive signal and a power supply voltage to each ejection head unit 70 is formed. An electronic circuit that generates a drive signal and a power supply voltage can be mounted on the wiring board 56. A cutout 562 is formed at a position corresponding to each outlet 528 (each through hole 542 of the communication member 54) of the filter unit 52 in the wiring board 56 of the first embodiment. Therefore, as understood from FIG. 11, in a state where the wiring board 56 is installed on the side opposite to the filter portion 52 with the communication member 54 interposed therebetween, the wiring board 56 has each through hole 542 (each outlet 528 in plan view). ).

  The liquid distributor 60 shown in FIG. 10 has four systems of ink I supplied through the through holes 542 of the communication member 54 (four systems of ink I that have passed through the flow path controller G2 after being distributed by the flow path structure G1). ) Are distributed to six systems corresponding to the respective ejection head units 70. That is, the distribution number (6) of one system of ink I by the liquid distribution unit 60 exceeds the number K of ink I types (K = 4). In the first embodiment, since the liquid distribution unit 60 is installed on the side of each ejection head unit 70 when viewed from the wiring substrate 56, the wiring board 56 is installed between the liquid distribution unit 60 and each ejection head unit 70. In comparison, the total number of flow paths passing through the plane including the wiring board 56 is reduced. Therefore, there is an advantage that the degree of freedom of the planar shape of the wiring board 56 can be sufficiently secured.

  As illustrated in FIG. 10, the liquid distribution unit 60 of the first embodiment includes a first flow path substrate 62, a second flow path substrate 64, and a third flow path substrate 66 that are connected to each ejection head from the wiring substrate 56 side. It is a flat structure laminated in the above order toward the part 70 side. The first flow path substrate 62, the second flow path substrate 64, and the third flow path substrate 66 are molded from a resin material such as xylon and fixed to each other with an adhesive. As understood from the above description, the rigidity (mechanical strength against external force) of the liquid distributor 60 exceeds the rigidity of the flow path structure G1.

  FIG. 12 is an exploded perspective view of the liquid distributor 60. For convenience, the outline of the wiring board 56 laminated on the first flow path substrate 62 is shown by a broken line in FIG. As illustrated in FIG. 12, supply ports 60 </ b> A corresponding to the respective inks I are formed at four positions (four corners) corresponding to the notches 562 of the wiring substrate 56 in the first flow path substrate 62. The communication member 54 is pressed toward the wiring board 56 in a state where the wiring board 56 is sandwiched between the communication member 54 and the liquid distributor 60, whereby the first flow path is formed inside each notch 562 of the wiring board 56. The substrate 62 and the communication member 54 are in close contact with each other. As a result, each through hole 542 (each outlet 528 of the filter unit 52) of each communication member 54 and each supply port 60A of the liquid distribution unit 60 communicate with each other. . That is, each of the four systems of ink I via the filter unit 52 and the communication member 54 is supplied in parallel to the supply ports 60 </ b> A of the liquid distribution unit 60. Since the liquid distribution part 60 of the first embodiment is formed of a material having higher rigidity than the flow path structure G1, for example, the liquid distribution part 60 is compared with a configuration in which the liquid distribution part 60 is formed of the same material as the flow path structure G1. Thus, it is possible to effectively prevent deformation and breakage of the liquid distribution unit 60 due to the pressing force from the communication member 54.

  FIG. 13 is a perspective view of the third flow path substrate 66 of the liquid distribution unit 60 as viewed from the ejection head unit 70 side. For convenience, the outline of each ejection head section 70 is shown by a broken line in FIG. As illustrated in FIG. 13, on the third flow path substrate 66, four outflow ports 60 </ b> B corresponding to the four systems of ink I are formed for each of the six ejection head units 70 (that is, a total of 36). The

  FIG. 14 is an explanatory diagram of the flow path formed inside the liquid distributor 60. As illustrated in FIG. 14, four channels Q (Q 1, Q 2) are formed inside the liquid distributor 60 of the first embodiment. The four channels Q include two channels Q1 and two channels Q2. A pair of one flow path Q1 and one flow path Q2 is formed in the vicinity of the peripheral edge located on each of the positive side and the negative side in the Y direction of the liquid distributor 60 in plan view. Each flow path Q distributes the ink I supplied to one supply port 60 </ b> A to six outflow ports 60 </ b> B corresponding to different ejection head units 70. Specifically, each flow path Q includes one basic portion qA extending in the X direction, and six branch portions qB branching in the W direction from different positions in the X direction among the basic portions qA. It is comprised including. A supply port 60A communicates with the trunk portion qA of each flow path Q, and an outlet 60B communicates with each end of each of the six branch portions qB of each flow path Q.

  As illustrated in FIG. 12, a groove portion 642 corresponding to each flow path Q1 is formed on the surface of the second flow path substrate 64 facing the first flow path substrate 62. The groove portion 642 on the surface of the second flow path substrate 64 is closed by the surface of the first flow path substrate 62 (the surface facing the second flow path substrate 64), thereby forming the flow path Q1. As understood from FIG. 12, the trunk portion qA of the flow channel Q1 (groove portion 642) communicates with the supply port 60A through a through hole formed in the first flow channel substrate 62, and each branch portion of the flow channel Q1. qB communicates with the outflow port 60B through a through-hole formed in the second flow path substrate 64 and the third flow path substrate 66. In the illustration of FIG. 12, the flow path Q1 is formed by the groove 642 on the surface of the second flow path substrate 64. However, the flow path Q1 is formed on the surface of the first flow path substrate 62 facing the second flow path substrate 64. A configuration in which the flow channel Q1 is formed by the groove portion, or a configuration in which the flow channel Q1 (particularly the backbone portion qA) is formed by a combination of groove portions formed on the opposing surfaces of the first flow path substrate 62 and the second flow path substrate 64. Can also be employed.

  As illustrated in FIG. 12, a groove 662 corresponding to each flow path Q <b> 2 is formed on the surface of the third flow path substrate 66 facing the second flow path substrate 64. The groove portion 662 on the surface of the third flow path substrate 66 is closed by the surface of the second flow path substrate 64 (joint surface with the third flow path substrate 66), thereby forming the flow path Q2. As understood from FIG. 12, the trunk portion qA of the flow channel Q2 (groove portion 662) communicates with the supply port 60A through a through hole formed in the first flow channel substrate 62 and the second flow channel substrate 64. Each branch part qB of the flow path Q2 communicates with the outflow port 60B via a through hole formed in the third flow path substrate 66. In the illustration of FIG. 12, the flow path Q2 is formed by the groove 662 on the surface of the third flow path substrate 66. However, the flow path Q2 is formed on the surface of the second flow path substrate 64 facing the third flow path substrate 66. A configuration in which the flow channel Q2 is formed by the groove portion, or a configuration in which the flow channel Q2 (particularly the backbone portion qA) is formed by a combination of groove portions formed on the opposing surfaces of the second flow path substrate 64 and the third flow path substrate 66. Can also be employed.

  As illustrated above, each flow path Q1 is formed between the first flow path substrate 62 and the second flow path substrate 64, and each flow path Q2 is the second flow path substrate 64 and the third flow path substrate 66. Formed between. That is, the position in the Z direction is different between the flow path Q1 and the flow path Q2. As a result of adopting the above configuration, as understood from FIGS. 12 and 14, the flow path Q1 and the flow path Q2 partially overlap in plan view. Therefore, for example, the size of the liquid distribution unit 60 (and hence the size of the liquid ejecting head 14) viewed from the Z direction is reduced as compared with a configuration in which both the flow path Q1 and the flow path Q2 are formed between a pair of substrates. There are advantages. Specific examples of the structure of the liquid distributor 60 in the first embodiment are as described above.

  Each of the six ejection head units 70 in FIG. 10 ejects four systems of ink I supplied from each outlet 60B of the liquid distribution unit 60 from each nozzle N. FIG. 15 is a cross-sectional view (a cross section perpendicular to the W direction) of one ejection head unit 70. As illustrated in FIG. 15, in the ejection head unit 70 of the first embodiment, the pressure chamber forming substrate 72 and the vibration plate 73 are laminated on one surface of the flow path forming substrate 71 and the nozzle plate 74 on the other surface. And a head chip provided with a compliance unit 75. The plurality of nozzles N are formed on the nozzle plate 74. As will be understood from FIG. 15, the structure corresponding to each row of nozzles N is formed in one jet head unit 70 in a substantially line symmetrical manner. The structure of the ejection head unit 70 will be described focusing on the above.

  The flow path forming substrate 71 is a flat plate material constituting the flow path of the ink I. An opening 712, a supply channel 714, and a communication channel 716 are formed in the channel forming substrate 71 of the first embodiment. The supply channel 714 and the communication channel 716 are formed for each nozzle N, and the opening 712 is continuous over a plurality of nozzles N that eject one system of ink I. The pressure chamber forming substrate 72 is a flat plate material in which a plurality of openings 722 corresponding to different nozzles N are formed. The flow path forming substrate 71 and the pressure chamber forming substrate 72 are formed of, for example, a silicon single crystal substrate.

  15 is a mechanism that suppresses (absorbs) pressure fluctuations in the flow path of the ejection head unit 70, and includes a sealing plate 752 and a support body 754. The sealing plate 752 is a flexible film-like member, and the support 754 flows the sealing plate 752 so that the opening 712 and each supply channel 714 of the channel forming substrate 71 are closed. It fixes to the path | route formation board | substrate 71. FIG.

  A diaphragm 73 is installed on the surface of the pressure chamber forming substrate 72 in FIG. 15 opposite to the flow path forming substrate 71. The vibration plate 73 is a plate-like member that can elastically vibrate, and is configured by stacking an elastic film formed of an elastic material such as silicon oxide and an insulating film formed of an insulating material such as zirconium oxide. Is done. As understood from FIG. 15, the diaphragm 73 and the flow path forming substrate 71 are opposed to each other with an interval inside each opening 722 formed in the pressure chamber forming substrate 72. The space sandwiched between the flow path forming substrate 71 and the diaphragm 73 inside each opening 722 functions as a pressure chamber (cavity) C that applies pressure to the ink. As understood from FIG. 4, the plurality of pressure chambers C are arranged along the W direction.

  A plurality of piezoelectric elements 732 corresponding to different nozzles N are formed on the surface of the diaphragm 73 opposite to the pressure chamber forming substrate 72. Each piezoelectric element 732 is a laminated body in which a piezoelectric body is interposed between electrodes facing each other. As the drive signal is supplied, the piezoelectric element 732 vibrates together with the diaphragm 73, whereby the pressure in the pressure chamber C fluctuates and the ink I in the pressure chamber C is ejected from the nozzle N. Each piezoelectric element 732 is sealed and protected by a protective plate 76 fixed to the vibration plate 73.

  As illustrated in FIG. 15, a support body 77 is fixed to the flow path forming substrate 71 and the protection plate 76. The support body 77 is integrally formed by molding a resin material, for example. In the support 77 of the first embodiment, a space 772 that forms a liquid storage chamber (reservoir) R together with the opening 712 of the flow path forming substrate 71 and a supply port 774 that communicates with the liquid storage chamber R are formed. . Each supply port 774 communicates with each outlet 60 </ b> B of the liquid distributor 60. Therefore, the ink I of each system after being distributed by the liquid distributor 60 is supplied and stored in the liquid storage chamber R from the outlet 60B via the supply port 774 of the ejection head unit 70. The ink I stored in the liquid storage chamber R is distributed and filled into the pressure chambers C by the plurality of supply channels 714, and passes from the pressure chambers C through the communication channels 716 and the nozzles N to the outside (print medium). M side).

  As illustrated in FIG. 15, the end portion of the wiring board 78 is joined to the diaphragm 73. The wiring board 78 is a flexible board (flexible wiring board) on which wiring for transmitting a drive signal and a power supply voltage to each piezoelectric element 732 is formed, and an opening formed in the protection plate 76 and the support body 77. It passes through the part (slit) and protrudes to the wiring board 56 side.

  As illustrated in FIG. 10, the liquid distribution unit 60 (the first flow path substrate 62, the second flow path substrate 64, and the third flow path substrate 66) has an opening corresponding to the wiring substrate 78 of each ejection head unit 70. A portion (slit) 60C is formed. The wiring board 78 of each ejection head unit 70 protrudes toward the wiring board 56 through each opening 60 </ b> C of the liquid distribution unit 60, and the end opposite to the ejection head unit 70 is connected to the wiring board 56. The drive signal and the power supply voltage are supplied from the wiring board 56 to the piezoelectric elements 732 of the ejection head units 70 via the wiring boards 78.

  As illustrated in FIGS. 12 to 14, each opening 60C of the liquid distributor 60 extends in the W direction in a region between the branch part qB of each flow path Q1 and the branch part qB of each flow path Q1. It is formed in a long shape. As illustrated above, in the first embodiment, since the flexible wiring board 78 of the ejection head unit 70 is connected to the wiring board 56 via the opening 60C of the liquid distribution unit 60, for example, the liquid distribution unit 60 The size of the wiring board 78 can be reduced (and thus the manufacturing cost can be reduced) as compared with the configuration in which the wiring board 78 is bent so as to pass outside the periphery of the wiring board and connected to the wiring board 56.

  The fixing plate 58 in FIG. 10 is a flat plate made of a highly rigid metal such as stainless steel. As illustrated in FIG. 10, the fixing plate 58 is formed with six openings 582 corresponding to different ejection head portions 70. Each opening 582 is a substantially rectangular through-hole that is long in the W direction in plan view. Each ejection head unit 70 is fixed to the surface of the fixing plate 58 with, for example, an adhesive in a state where the nozzle plate 74 is positioned inside the opening 582. The configuration of each liquid ejecting unit U3 according to the first embodiment is as described above.

  As described above, in the first embodiment, each ink I is distributed by the flow path structure G1 and the liquid distribution unit 60 that are configured separately from each other. Accordingly, there is an advantage that the size of the liquid ejecting head 14 viewed from the Z direction is reduced as compared with the configuration in which the ink I is distributed in the same number by a single element.

  In the first embodiment, the flow path control unit G2 that controls the opening / closing of the flow path PI2 of each ink I and the pressure in the flow path PI2 is installed between the flow path structure G1 and the liquid distributor 60. Compared with the configuration in which the flow path control unit G2 is installed on the upstream side of the flow path structure G1, there is also an advantage that variation in pressure loss in each flow path PI1 in the flow path structure G1 can be reduced.

  In the first embodiment, since the filter unit 52 is installed between the flow channel structure G1 and the liquid distribution unit 60 (upstream side of the liquid distribution unit 60), for example, the filter unit 52 on the downstream side of the liquid distribution unit 60, for example. Compared with the configuration in which the liquid is installed, it is possible to reduce the possibility of bubbles and foreign matter flowing into the liquid distributor 60. Moreover, since the filter part 52 of 1st Embodiment can be removed from the liquid distribution part 60, there exists an advantage that the washing | cleaning of each filter 526 is easy.

Second Embodiment
A second embodiment of the present invention will be described. In addition, about the element which an effect | action and function are the same as that of 1st Embodiment in each form illustrated below, the code | symbol used in 1st Embodiment is diverted and each detailed description is abbreviate | omitted suitably.

  FIG. 16 is a side view and a plan view of the flow path structure G1 in the second embodiment. In the first embodiment, the height of each circular outlet (DI1, DA1) formed on the second surface 22 is made common. In the second surface 22 of the flow path structure G1 of the second embodiment, a plurality of types of outlets having different heights with respect to the second surface 22 are formed. Specifically, as illustrated in FIG. 16, the height hA of the outlet DA1 of each air A exceeds the height hI of the outlet DI1 of each ink I. A configuration in which the height hI of each outlet DI1 exceeds the height hA of each outlet DA1 can also be adopted.

  In the configuration of the first embodiment in which the outlets D (DI1, DA1) of the second surface 22 are formed at the same height, the outlets D (DI1, DA1) of the channel structure G1 are connected to the channel controller. In the process of inserting into each of the supply ports S (SI2, SA2) of G2 (the assembly process of the liquid jet head 14), the stress from all the outlets D acts on the flow path control unit G2 at the same time. There is a possibility that the flow path control unit G2 is deformed due to the stress from G1. On the other hand, in the second embodiment, the heights of the outlet DI 1 and the outlet DA1 are different from each other. Therefore, in the assembly process of the liquid ejecting head 14, the stress starts to be applied to the flow path control unit G2 from each outlet DI1. And the point in time when stress begins to act on the flow path control part G2 from each outlet DA1. That is, the time points at which the stress acts on the flow path control unit G2 from each outlet D are dispersed in time. Therefore, as compared with the first embodiment, there is an advantage that deformation and breakage of the flow path control unit G2 can be prevented in the assembly process of the liquid jet head 14.

  In the example of FIG. 16, the height of the outlet A D1 of the air A and the outlet D I1 of the ink I are made different from each other, but the method of selecting the outlet D that makes the height different is not limited to the above examples. . For example, the configuration in which the heights of the respective outlets DI1 corresponding to the different inks I are made different, or the heights of the respective outlets D (DI1, DA1) for each region where the second surface 22 is divided along the X direction, for example. A configuration with different heights may also be employed. However, from the viewpoint of alleviating the concentration of stress on the flow path control unit G2, the outlet D having the height hA and the outlet D having the height hB are distributed substantially evenly in the plane of the second surface 22. Is preferred. In the example of FIG. 16, two types of heights of the outlet D are illustrated, but three or more types of outlets D can be formed on the second surface 22.

<Third Embodiment>
17 is a side view and a plan view of the flow path structure G1 in the third embodiment, and FIG. 18 is a cross-sectional view taken along the line XVIII-XVIII in FIG. 17 (a cross section parallel to the XZ plane). In the first embodiment, the flow path structure G1 having a structure in which the film-like sealing portion 25 and the sealing portion 26 are bonded to the substrate 20 is exemplified. The flow path structure G1 of the third embodiment is a flat structure in which the first substrate 27 and the second substrate 28 are joined in a state of facing each other, as illustrated in FIG. The 1st board | substrate 27 and the 2nd board | substrate 28 are flat plate materials long in the X direction similarly to the board | substrate 20 of 1st Embodiment, for example, are formed with thermoplastic resin materials, such as a polypropylene. The first substrate 27 includes a first surface 271 on the side opposite to the second substrate 28 and a first flow path surface (a surface facing the second substrate 28) 272 on the side opposite to the first surface 271. Similarly, the second substrate 28 includes a second surface 281 opposite to the first substrate 27 and a second flow path surface (opposite surface to the first substrate 27) 282 opposite to the second surface 281. Include.

  Similarly to the first surface 21 of the substrate 20 in the first embodiment, each system of ink I (C, M, Y, K) is supplied to the first surface 271 of the first substrate 27 from the liquid container 18. Four supply ports SI1 and two supply ports SA1 to which two systems of air A (A1, A2) are supplied from the pump 16 are formed. Further, on the second surface 281 of the second substrate 28, as with the second surface 22 of the substrate 20 in the first embodiment, four outlets DI1 corresponding to the ink I of each system, and the air of each system Two outlets DA1 corresponding to A are individually formed for each of the six liquid ejecting units U3. Six outlets DI1 corresponding to any one system of ink I are arranged in the X direction at substantially equal intervals, and six outlets DA1 corresponding to any one system of air A are arranged in the X direction at substantially equal intervals. Array.

  As illustrated in FIGS. 17 and 18, the first flow path surface 272 of the first substrate 27 has four groove portions 273 corresponding to the ink I of each system and two pieces of air corresponding to the air A of each system. A groove 274 is formed. Each groove portion 273 and each groove portion 274 extend substantially linearly along the X direction over substantially the entire range in which the six flow path control units U2 are arranged in plan view. Each groove portion 273 is formed so as to overlap with one supply port SI1 for supplying ink I in a plan view, and as understood from FIG. 18, the groove portion 273 is formed through the through hole H1 formed in the first substrate 27. It communicates with the supply port SI1. Similarly, each groove portion 274 is formed so as to overlap with one supply port SA1 for supplying air A in plan view, and communicates with the supply port SA1 through a through hole H1 formed in the first substrate 27. To do.

  On the second flow path surface 282 of the second substrate 28, four groove portions 283 corresponding to the ink I of each system and two groove portions 284 corresponding to the air A of each system are formed. Each groove portion 283 extends substantially linearly along the X direction so as to overlap the six outlets DI1 corresponding to one system of ink I in plan view, and as illustrated in FIG. It communicates with each outlet DI1 through a through-hole H2 formed in 28. Similarly, each groove portion 284 extends substantially linearly along the X direction so as to overlap the six outlets DA1 corresponding to one system of air A in plan view, and the through hole H2 of the second substrate 28. And communicate with each outlet DA1.

  The first flow path surface 272 of the first substrate 27 and the second substrate 28 are arranged such that the groove portions 273 and the groove portions 283 overlap each other in a plan view and the groove portions 274 and the groove portions 284 overlap each other in a plan view. The second flow path surface 282 is joined to each other. For joining the first substrate 27 and the second substrate 28, known techniques such as welding (for example, ultrasonic welding) and adhesion can be arbitrarily employed. In the state where the first substrate 27 and the second substrate 28 are bonded to each other, as illustrated in FIG. 18, the space surrounded by the inner peripheral surface of each groove portion 273 and the inner peripheral surface of each groove portion 283 is ink. The space surrounded by the inner peripheral surface of each groove portion 274 and the inner peripheral surface of each groove portion 284 functions as the air flow channel PA1.

  As understood from the above description, the flow path PI1 is a flow path that connects one supply port SI1 and six flow outlets DI1, and the flow path PA1 includes six supply ports SA1 and six flow paths DI1. This is a flow path that communicates with the outlet DA1. Similar to the first embodiment, four flow paths PI1 (groove parts 273, groove parts) corresponding to the ink I are provided on both sides of the two flow paths PA1 (groove parts 274, 284) corresponding to the air A in plan view. 283) is located. The configuration in which each flow path PA1 (groove portion 273, groove portion 283) corresponding to the air A is bent in a plan view so as to bypass the attachment hole 23 is the same as in the first embodiment. The configuration of each element other than the flow path structure G1 is the same as that of the first embodiment.

  In the third embodiment, the same effect as in the first embodiment is realized. In the third embodiment, since the flow path PI1 and the flow path PA1 are formed by joining the first substrate 27 and the second substrate 28, the film-like sealing portion 25 and the sealing portion 26 are attached to the substrate 20. Compared to the first embodiment, the mechanical strength of the flow path PI1 and the flow path PA1 can be sufficiently maintained (breakage of each flow path can be prevented). On the other hand, in the first embodiment, the flow path PI1 and the flow path PA1 are formed by sticking the film-like sealing portion 25 and the sealing portion 26 to the substrate 20, so that the first substrate 27 and the second substrate As compared with the third embodiment in which the flow path structure G1 is joined to the third embodiment, there is an advantage that the flow path structure G1 can be easily thinned. In the third embodiment in which a flow path is formed on the joint surface between the first substrate 27 and the second substrate 28, the first flow path surface 272 of the first substrate 27 and the second flow path surface 282 of the second substrate 28 are provided. Although high flatness is required, in the first embodiment, the flexible sealing portion 25 and the sealing portion 26 are attached to the substrate 20, so that they are required for the substrate 20 compared to the third embodiment. There is also an advantage that the condition of flatness is relaxed (a low-flatness and inexpensive substrate 20 can be used).

  The structure in which the substrate 20 and the sealing portions (25, 26) in the first embodiment are stacked, and the structure in which the first substrate 27 and the second substrate 28 in the third embodiment are stacked include a supply port. (SI1, SA1) and a plurality of outlets (DI1, DA1) are comprehensively expressed as a plate-like structure (base portion) in which flow paths (PI1, PA1) are provided to communicate with each other. Supply ports (SI1, SA1) are formed on one surface of the base portion, and a plurality of outlets (DI1, DA1) are formed on the other surface of the base portion.

  In the above example, the groove portions (273, 274, 283, 284) are formed on both the first substrate 27 and the second substrate 28, but the groove portion is formed only on one of the first substrate 27 and the second substrate 28. It is also possible to do. Further, the configuration of the second embodiment in which the heights of the respective outlets (DI1, DA1) are different can be similarly applied to the third embodiment.

<Modification>
The form illustrated above can be variously modified. Specific modifications are exemplified below. Two or more aspects arbitrarily selected from the following examples can be appropriately combined as long as they do not contradict each other.

(1) In each of the above-described embodiments, the flow path structure G1 distributes both the ink I and the air A. However, the flow path structure G1 can be used for distributing either the ink I or the air A. . That is, one of the flow path PI1 for distributing the ink I and the flow path PA1 for distributing the air A can be omitted. Further, in each of the above-described embodiments, the flow path control unit G2 is installed between the flow path structure G1 and the liquid ejecting unit G3. However, the configuration in which the flow path control unit G2 is omitted or the upstream of the flow path structure G1. A configuration in which the flow path control unit G2 is installed on the side can also be adopted. In the configuration in which the flow path control unit G2 is omitted, the flow path PA1 for distributing the air A is omitted from the flow path structure G1, and each ink I after distribution by the flow path structure G1 is supplied to the liquid ejecting part G3 (each liquid To the injection unit U3).

(2) In each of the above-described embodiments, the flow path control unit G2 is composed of a plurality of flow path control units U2 formed separately from each other, but the function of the flow path control unit G2 is realized by a single device. Is also possible. That is, the configuration in which the flow path control unit G2 is separated into a plurality of flow path control units U2 is not essential in the present invention. In each of the above-described embodiments, the liquid ejecting unit G3 is configured by a plurality of liquid ejecting units U3 formed separately from each other. However, the function of the liquid ejecting unit G3 can be realized by a single device. . That is, the configuration in which the liquid ejecting unit G3 is separated into the plurality of liquid ejecting units U3 is not essential in the present invention.

(3) In the first embodiment, the grooves 341 (341a, 341b, 341c) formed on the first surface 21 of the substrate 20 of the flow path structure G1 are replaced with the grooves 351 (351a, 351b) of the second surface 22. However, it is also possible to connect each groove 341 to the supply port SI1 through a flow path formed in the substrate 20. That is, each groove portion 351 of the second surface 22 can be omitted. However, according to the configuration in which the groove portion 351 is formed on the second surface 22 as in each of the above-described embodiments, the substrate 20 can be easily formed by, for example, injection molding as compared with the configuration in which the flow path is formed in the substrate 20. There is an advantage that you can. In the above example, the groove portion 341 of the ink I is focused, but the groove portion 342 for supplying the air A can be similarly communicated with the supply port SA1 through a flow path formed inside the substrate 20. is there. As understood from the above description, the configuration of the first embodiment is comprehensively expressed as a configuration in which the front side groove formed in the first surface 21 communicates with the supply ports (SI1, SA1). The configuration for communicating the gas to the supply port is arbitrary.

(4) In 1st Embodiment, although the sealing part 25 and the sealing part 26 which are installed in the board | substrate 20 were made into the film form, the form of the sealing part 25 and the sealing part 26 is not limited to the above illustration. For example, the flow path can be formed by sticking a flat plate formed of a resin material to the substrate 20 as the sealing portion 25 or the sealing portion 26. However, from the viewpoint of reducing the thickness of the flow path structure G1, a configuration in which the thickness of the sealing portion 25 and the sealing portion 26 is less than the thickness of the substrate 20 is preferable.

(5) The element that ejects ink from each nozzle N is not limited to the piezoelectric element 732 described above. For example, instead of the piezoelectric element 732, a heating element that varies the pressure in the pressure chamber C by generating bubbles due to heating and ejects ink from the nozzle N can be used. The piezoelectric element 732 and the heating element are included as an element (pressure generating element) for changing the pressure inside the pressure chamber C, and the method of changing the pressure (piezo method / thermal method) or the specific configuration is not limited to the present invention. Is unquestionable.

(6) The printing apparatus 100 exemplified in each of the above embodiments can be employed in various apparatuses such as a facsimile apparatus and a copying machine in addition to apparatuses dedicated to printing. However, the use of the liquid ejecting apparatus of the present invention is not limited to printing. For example, a liquid ejecting apparatus that ejects a solution of a coloring material is used as a manufacturing apparatus that forms a color filter of a liquid crystal display device. Further, a liquid ejecting apparatus that ejects a solution of a conductive material is used as a manufacturing apparatus that forms wiring and electrodes of a wiring board.

DESCRIPTION OF SYMBOLS 100 ... Printing apparatus (liquid ejecting apparatus), M ... Printing medium, 10 ... Control apparatus, 12 ... Conveyance mechanism, 14 ... Liquid ejecting head, 16 ... Pump, 18 ... Liquid container, G1 ... Flow path structure, 20 ... substrate, 21 ... first surface, 22 ... second surface, 23 ... mounting hole, 25 (25a, 25b, 25c) ... sealing part (first sealing part) , 26 (26a, 26b) ...... sealing part (second sealing part), 27 ... first substrate, 271 ... first surface, 272 ... first flow path surface, 28 ... second substrate, 281 …… Second surface, 282 …… Second flow path surface, 273, 274, 283, 384 …… Groove, 31 (31a, 31b, 31c), 32 (32a, 32b) …… Region, 341 (341a, 341b, 341c), 342 (342a, 342b, 342c)... Groove (front groove), 351 (351a, 351b, 351c), 52 (352a, 352b, 352c) ... groove (back side groove), G2 ... flow path control unit, U2 ... flow path control unit, 42 ... negative pressure generating part, 44 ... flow path opening / closing part, 46 ... ... pressure adjusting unit, G3 ... liquid jetting unit, U3 ... liquid jetting unit, 52 ... filter unit, 522 ... first member, 524 ... second member, 526 ... filter, 54 ... communicating member, 56... Wiring substrate, 58... Fixing plate, 60... Liquid distributor, 62... First flow path substrate, 64. ... groove part, qA ... backbone part, qB ... branching part, 70 ... jetting head part, 71 ... flow path forming substrate, 72 ... pressure chamber forming substrate, 73 ... vibration plate, 732 ... piezoelectric element, 74 ... Nozzle plate, N ... Nozzle, 75 ... Compliance section, 76 ... Protection plate, 77 ... Support Holding body, C ... Pressure chamber, R ... Liquid storage chamber, SI1, SA1, SI2, SA2, SI3, 60A, 774 ... Supply port, DI1, DI2, 528, 60B ... Outlet port, PI1, PA1, PI2, PA2_1, PA2_2, Q1, Q2 ... Flow path.

Claims (18)

A plate-like base portion;
A supply port formed on one surface of the base portion;
A plurality of outlets formed on the other surface of the base portion,
The base portion is formed with a flow path that connects the supply port and the plurality of outflow ports,
The base portion is
A first substrate including a first surface on which the supply port is formed;
A second substrate including a second surface on which the plurality of outlets are formed,
A first flow path surface opposite to the first surface of the first substrate and a second flow path surface opposite to the second surface of the second substrate are bonded to each other,
The channel is formed by a groove formed in at least one of the first channel surface and the second channel surface,
Each of the plurality of outlets is a tubular portion protruding from the second surface,
Of the plurality of outlets, one outlet and the other outlet have different heights relative to the second surface.
Flow channel structure. A plate-like base portion;
A supply port formed on one surface of the base portion;
A plurality of outlets formed on the other surface of the base portion,
The base portion is formed with a flow path that connects the supply port and the plurality of outflow ports,
Each of the plurality of outlets is a tubular portion protruding from the other surface of the base portion ,
The flow channel structure in which one outlet and the other outlet out of the plurality of outlets are different in height from the other surface of the base portion . A plate-like base portion;
A supply port formed on one surface of the base portion;
A plurality of outlets formed on the other surface of the base portion,
The base portion is formed with a flow path that connects the supply port and the plurality of outflow ports,
The supply port and the plurality of outlets and flow paths from the supply port to the plurality of outlets are formed for each of a plurality of fluids,
The plurality of fluids include a liquid and a gas,
The liquid flow path extends linearly in plan view, while the gas flow path is formed in a bent shape so as to bypass the fixing hole for fixing the base body in plan view. Structure. A plate-like base portion;
A supply port formed on one surface of the base portion;
A plurality of outlets formed on the other surface of the base portion,
The base portion is formed with a flow path that connects the supply port and the plurality of outflow ports,
The supply port and the plurality of outlets and flow paths from the supply port to the plurality of outlets are formed for each of a plurality of fluids,
The plurality of fluids include a plurality of gases that are pressurized independently of each other. A plate-like base portion;
A supply port formed on one surface of the base portion;
A plurality of outlets formed on the other surface of the base portion,
The base portion is formed with a flow path that connects the supply port and the plurality of outflow ports,
The supply port and the plurality of outlets and flow paths from the supply port to the plurality of outlets are formed for each of a plurality of fluids,
The plurality of fluids include a first liquid, a second liquid, and a gas,
The gas flow path is a flow path structure positioned between the first liquid flow path and the second liquid flow path in plan view. A plate-like base portion;
A supply port formed on one surface of the base portion;
A plurality of outlets formed on the other surface of the base portion,
The base portion is formed with a flow path that connects the supply port and the plurality of outflow ports,
The base portion is
A first substrate including a first surface on which the supply port is formed;
A second substrate including a second surface on which the plurality of outlets are formed,
A first flow path surface opposite to the first surface of the first substrate and a second flow path surface opposite to the second surface of the second substrate are bonded to each other,
The channel is formed by a groove formed in at least one of the first channel surface and the second channel surface,
The supply port and the plurality of outlets and flow paths from the supply port to the plurality of outlets are formed for each of a plurality of fluids,
The plurality of fluids include a liquid and a gas,
The flow path of the liquid extends linearly in plan view, while the flow path of the gas is bent so as to bypass the fixing holes for fixing the first substrate and the second substrate in plan view. Formed in the flow channel structure. The base portion is
A first substrate including a first surface on which the supply port is formed;
A second substrate including a second surface on which the plurality of outlets are formed,
A first flow path surface opposite to the first surface of the first substrate and a second flow path surface opposite to the second surface of the second substrate are bonded to each other,
The channel is formed by a groove formed in at least one of the first channel surface and the second channel surface.
The flow channel structure according to any one of claims 2 to 5 . The flow path structure according to any one of claims 3 to 6 , which distributes each of a plurality of fluids including a liquid and a gas;
A flow path control unit that controls the flow path of the liquid of each system after distribution by the flow path structure using the gas of each system after distribution by the flow path structure;
A liquid ejecting head comprising: a liquid ejecting section that ejects the liquid that has passed through the flow path control section from a plurality of nozzles. A channel structure you distributing each of the plurality of fluid containing a liquid and a gas,
A flow path control unit that controls the flow path of the liquid of each system after distribution by the flow path structure using the gas of each system after distribution by the flow path structure;
A liquid ejecting unit that ejects the liquid from the plurality of nozzles via the flow path control unit ;
The channel structure is
A plate-like base portion;
A supply port formed on one surface of the base portion;
A plurality of outlets formed on the other surface of the base portion,
The base portion is formed with a flow path that connects the supply port and the plurality of outflow ports,
The liquid ejecting head in which the supply port, the plurality of outflow ports, and flow paths from the supply port to the plurality of outflow ports are formed for each of a plurality of fluids . The liquid ejecting unit is
A liquid distributor that distributes the liquid of each system via the flow path controller;
A plurality of ejection head units that eject liquid of each system after being distributed by the liquid distribution unit from a plurality of nozzles according to a drive signal;
10. The liquid ejecting head according to claim 8, further comprising: a wiring board that is installed between the flow path structure and the liquid distributor and on which wiring for transmitting the driving signal is formed. The liquid distribution unit includes an opening corresponding to each of the plurality of ejection head units,
The liquid ejecting head according to claim 10 , wherein each of the plurality of ejecting head units includes a flexible wiring substrate connected to the wiring substrate through the opening of the liquid distributing unit. A flat channel structure that distributes each of a plurality of fluids including liquid and gas;
A flow path control unit that controls the flow path of the liquid of each system after distribution by the flow path structure using the gas of each system after distribution by the flow path structure;
A liquid ejecting unit that ejects the liquid from the plurality of nozzles via the flow path control unit;
The liquid ejecting unit is
A plate-like liquid distributor that distributes the liquid of each system via the flow path controller;
A plurality of ejection head units that eject the liquid of each system after being distributed by the liquid distribution unit from a plurality of nozzles according to a drive signal;
The flow path control unit is located between the flow path structure and the liquid distribution unit that overlap each other in a plan view. The liquid distributor includes a first flow path substrate, a second flow path substrate, and a third flow path substrate stacked on each other,
A first flow path for distributing a first liquid of the plurality of fluids to the plurality of ejection head portions is formed between the first flow path substrate and the second flow path substrate;
According claim 10 in which the second flow path for distributing the second liquid of said plurality of fluid to the plurality of ejection head is formed between the third flow path substrate and the second flow path substrate Item 13. The liquid jet head according to any one of Items 12 . Each of the plurality of ejection head portions is
A liquid storage chamber for storing the liquid after distribution by the liquid distribution unit;
A plurality of pressure chambers filled with liquid ejected from the nozzle;
The liquid jet head according to claim 12 or claim 13 and a plurality of supply flow path for supplying the liquid stored in the liquid storing chamber to the plurality of pressure chambers. The flow path structure distributes the liquid to a plurality of outlets arranged along a first direction,
The liquid ejecting head according to claim 14 , wherein the plurality of pressure chambers in each of the plurality of ejecting head portions are arranged along a second direction different from the first direction. The plurality of fluids include K types of liquids,
Distribution number of the one liquid by the flow channel structure, one of the liquid jet head according to claim 15 claim 12 which exceeds the number of types K of the liquid. The plurality of fluids include K types of liquids,
The distribution number of the one liquid by the liquid distribution unit, either of the liquid jet head according to claim 16 claim 12 which exceeds the number of types K of the liquid. Printing apparatus having any of the liquid jet head according to claim 17 claim 8.

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