JP6361365B2 - Piezoelectric driving device and driving method thereof, robot and driving method thereof - Google Patents

Description

  The present invention relates to a piezoelectric driving device and a driving method thereof, a robot and a driving method thereof.

  A piezoelectric actuator (piezoelectric driving device) that drives a driven body by vibrating a piezoelectric body is used in various fields because it does not require a magnet or a coil (for example, Patent Document 1). The basic configuration of this piezoelectric drive device is a configuration in which four piezoelectric elements are arranged in two rows and two columns on each of two surfaces of the reinforcing plate, and a total of eight piezoelectric elements are included in the reinforcing plate. It is provided on both sides. Each piezoelectric element is a unit in which a piezoelectric body is sandwiched between two electrodes, and the reinforcing plate is also used as one electrode of the piezoelectric element. One end of the reinforcing plate is provided with a protrusion for rotating the rotor in contact with the rotor as a driven body. When an AC voltage is applied to two of the four piezoelectric elements arranged diagonally, the two piezoelectric elements expand and contract, and the protrusion of the reinforcing plate reciprocates or elliptically moves accordingly. I do. And according to the reciprocating motion or elliptical motion of the protrusion of the reinforcing plate, the rotor as the driven body rotates in a predetermined rotation direction. In addition, the rotor can be rotated in the reverse direction by switching the two piezoelectric elements to which the AC voltage is applied to the other two piezoelectric elements.

  Further, there is known a piezoelectric driving device having a stack structure in which piezoelectric driving bodies (piezoelectric vibrating bodies) are stacked in the thickness direction to increase the output (Patent Document 2). The piezoelectric vibrating body of this piezoelectric drive device is supported by an elastic support. Moreover, the piezoelectric drive device described in Non-Patent Document 1 uses a jumper wire to wire from the piezoelectric vibrating body to the flexible substrate fixed to the exterior.

JP 2004-320979 A JP-A-8-237971

Nanomotion website (searched July 2, 2014) URL: http://www.nanomotion.com/index.aspx?id=2574&itemID=1440

  The conventional piezoelectric drive device occupies space in the thickness direction. In particular, in order to increase the output, a large space is required when a stack structure in which piezoelectric vibrators are stacked is taken. Conventionally, even when the thickness of the piezoelectric vibrator is reduced and the piezoelectric vibrator is multilayered, a structure that does not impair the merit of thin piezoelectric vibrator has not been sufficiently studied. Further, in the conventional piezoelectric drive device, since the jumper wire is connected to the piezoelectric vibrating body, there is a possibility that the connection between the piezoelectric vibrating body and the jumper wire is broken due to vibration. In addition, since a mechanical load of a jumper wire is applied to the piezoelectric vibrator, the natural frequency (resonance frequency) may change.

  SUMMARY An advantage of some aspects of the invention is to solve at least a part of the problems described above, and the invention can be implemented as the following forms or application examples.

(1) According to one aspect of the present invention, a piezoelectric driving device is provided. The piezoelectric driving device includes a piezoelectric vibrator having a piezoelectric element, a diaphragm provided with the piezoelectric vibrator, and a portion overlapping the diaphragm as viewed from the thickness direction of the diaphragm, and is arranged in an in-plane direction. A first plate spring that is elastically deformable; and a fixing member that fixes the diaphragm and the first plate spring. According to this embodiment, if the piezoelectric vibrator is made thinner, the piezoelectric driving device can be made thinner accordingly. In addition, the piezoelectric driving device can be formed thinner than the case where a spring that can be elastically deformed in a direction perpendicular to the surface is provided without having a portion overlapping the diaphragm as viewed from the thickness direction of the diaphragm.

(2) In the piezoelectric driving device according to the above aspect, the first plate spring may be elastically deformed by a force equal to or less than a force applied to the driven body when the piezoelectric vibrating body vibrates. Good.

(3) The piezoelectric drive device according to the above aspect includes a support member that supports the piezoelectric drive device, wherein the first leaf spring includes a first portion for fixing the first leaf spring to the support member, and A second portion for overlapping the diaphragm and for fixing the first leaf spring to the diaphragm. According to this aspect, the first plate spring is deformed and the elastic force can be generated by moving the second portion relative to the first portion.

(4) In the piezoelectric drive device of the above aspect, the first leaf spring may be in contact with the piezoelectric vibrating body. According to this aspect, since the first plate spring is in contact with the piezoelectric vibrating body, the expansion and contraction of the piezoelectric vibrating body can deform the first plate spring and generate an elastic force.

(5) In the piezoelectric drive device according to the above aspect, the piezoelectric drive device includes a second plate spring that has a portion overlapping the diaphragm as viewed from the thickness direction of the diaphragm and is elastically deformable in an in-plane direction. It may be located between the first leaf spring and the second leaf spring. According to this aspect, since the second plate spring is provided in addition to the first plate spring, the elastic force can be increased. In addition, if the first plate spring and the second plate spring are provided only on one side of the diaphragm, the elastic force may be biased and the diaphragm may be bent. However, the diaphragm is not provided with the first plate spring and the second plate. If it is located between the springs, the vibration plate is less likely to bend.

(6) According to one aspect of the present invention, a robot is provided. The piezoelectric drive according to any one of claims 1 to 4, wherein the robot rotates two link parts, a joint part connecting the two link parts, and the two link parts at the joint part. An apparatus. According to this embodiment, the piezoelectric driving device can be used for driving the robot.

(7) According to one aspect of the present invention, a method for driving a robot is provided. In this driving method, the piezoelectric driving device is driven by applying an AC voltage or a pulsating voltage to the piezoelectric element of the piezoelectric driving device, and the two link portions are rotated by the joint portion.

(8) According to one aspect of the present invention, there is provided a driving method for the piezoelectric driving device according to the above aspect. In this driving method, an alternating voltage or a pulsating voltage is applied to the piezoelectric element.

  The present invention can be realized in various forms. For example, in addition to a piezoelectric driving device, a driving method of the piezoelectric driving device, a manufacturing method of the piezoelectric driving device, a robot equipped with the piezoelectric driving device, and a piezoelectric driving device. It can be realized in various forms such as a driving method of a robot to be mounted, a liquid feeding pump, and a medication pump.

The top view and sectional drawing which show schematic structure of the piezoelectric drive unit of 1st Embodiment. The top view of a diaphragm. Explanatory drawing which shows the electrical connection state of a piezoelectric vibrating body unit and a drive circuit. Explanatory drawing which shows the example of operation | movement of a piezoelectric vibrating body unit. The top view of the piezoelectric vibrating body unit as other embodiment. The perspective view which shows the piezoelectric vibrating body module of 1st Embodiment. The disassembled perspective view of the piezoelectric vibrating body module of 1st Embodiment. The top view of a piezoelectric vibrating body module when a leaf | plate spring is not deform | transforming. The top view of a piezoelectric vibrating body module when a leaf | plate spring is deform | transforming. The perspective view which shows the piezoelectric vibrating body module of 2nd Embodiment. The disassembled perspective view of a piezoelectric vibrating body module. Explanatory drawing which shows 1st Embodiment of the wiring structure of the piezoelectric vibrating body module which has several piezoelectric vibrating body units. The perspective view which shows the example of the wiring pattern of a piezoelectric vibrating body unit. An explanatory view showing other examples of wiring in the case of having a plurality of diaphragms. Explanatory drawing which shows the further another example of wiring in the case of having a some diaphragm. Explanatory drawing which shows the state which expand | deployed without folding the flexible substrate in 3rd Embodiment of wiring structure. An explanatory view showing other examples of wiring in the case of having a plurality of diaphragms. Explanatory drawing which shows an example of the robot using a piezoelectric drive device. Explanatory drawing of the wrist part of a robot. Explanatory drawing which shows an example of the liquid feeding pump using a piezoelectric drive device.

A. Embodiment of piezoelectric vibrator unit:
A1. First embodiment of piezoelectric vibrator unit:
FIG. 1A is a plan view showing a schematic configuration of a piezoelectric vibrating body unit 10 according to an embodiment of the present invention, and FIG. The piezoelectric vibrator unit 10 includes a diaphragm 200 and two piezoelectric vibrators 100 disposed on both surfaces (first surface 211 and second surface 212) of the diaphragm 200, respectively. The piezoelectric vibrating body 100 includes a substrate 120, a first electrode 130 formed on the substrate 120, a piezoelectric body 140 formed on the first electrode 130, and a second electrode formed on the piezoelectric body 140. An electrode 150. The first electrode 130 and the second electrode 150 constitute a piezoelectric element by sandwiching the piezoelectric body 140. The two piezoelectric vibrators 100 are arranged symmetrically about the diaphragm 200. In this embodiment, the piezoelectric vibrating body 100 is installed on the vibration plate 200 so that the substrate 120 and the vibration plate 200 sandwich the piezoelectric element (130, 140, 150). Since the two piezoelectric vibrators 100 have the same configuration, the configuration of the piezoelectric vibrator 100 below the diaphragm 200 will be described below unless otherwise specified.

The substrate 120 of the piezoelectric vibrating body 100 is used as a substrate for forming the first electrode 130, the piezoelectric body 140, and the second electrode 150 by a film forming process. The substrate 120 also has a function as a diaphragm that performs mechanical vibration. The substrate 120 can be formed of, for example, Si, Al ₂ O ₃ , ZrO ₂ or the like. As the Si substrate 120, for example, a Si wafer for semiconductor manufacturing can be used. In this embodiment, the planar shape of the substrate 120 is a rectangle. The thickness of the substrate 120 is preferably in the range of 10 μm to 100 μm, for example. If the thickness of the substrate 120 is 10 μm or more, the substrate 120 can be handled relatively easily during the film forming process on the substrate 120. If the thickness of the substrate 120 is 100 μm or less, the substrate 120 can be easily vibrated according to the expansion and contraction of the piezoelectric body 140 formed of a thin film.

  The first electrode 130 is formed as one continuous conductor layer formed on the substrate 120. On the other hand, as shown in FIG. 1A, the second electrode 150 is divided into five conductor layers 150a to 150e (also referred to as “second electrodes 150a to 150e”). The second electrode 150e at the center is formed in a rectangular shape covering almost the entire length of the substrate 120 at the center in the width direction of the substrate 120. The other four second electrodes 150 a, 150 b, 150 c, and 150 d have the same planar shape and are formed at the four corner positions of the substrate 120. In the example of FIG. 1, both the first electrode 130 and the second electrode 150 have a rectangular planar shape. The first electrode 130 and the second electrode 150 are thin films formed by sputtering, for example. As a material of the first electrode 130 and the second electrode 150, for example, any material having high conductivity such as Al (aluminum), Ni (nickel), Au (gold), Pt (platinum), Ir (iridium) or the like is used. Is available. Instead of the first electrode 130 being one continuous conductor layer, the first electrode 130 may be divided into five conductor layers having substantially the same planar shape as the second electrodes 150a to 150e. In addition, wiring (or wiring layer and insulating layer) for electrical connection between the second electrodes 150a to 150e, and electrical connection between the first electrode 130 and the second electrodes 150a to 150e and the drive circuit The wiring for the purpose (or the wiring layer and the insulating layer) is not shown in FIG.

  The piezoelectric body 140 is formed as five piezoelectric layers having substantially the same planar shape as the second electrodes 150a to 150e. Alternatively, the piezoelectric body 140 may be formed as one continuous piezoelectric layer having substantially the same planar shape as the first electrode 130. Five piezoelectric elements 110a to 110e (FIG. 1A) are configured by a laminated structure of the first electrode 130, the piezoelectric body 140, and the second electrodes 150a to 150e.

The piezoelectric body 140 is a thin film formed by, for example, a sol-gel method or a sputtering method. As a material of the piezoelectric body 140, any material exhibiting a piezoelectric effect such as ceramics having an ABO ₃ type perovskite structure can be used. Examples of ceramics having an ABO ₃ type perovskite structure include lead zirconate titanate (PZT), barium titanate, lead titanate, potassium niobate, lithium niobate, lithium tantalate, sodium tungstate, zinc oxide, titanium Barium strontium acid (BST), strontium bismuth tantalate (SBT), lead metaniobate, lead zinc niobate, lead scandium niobate, or the like can be used. It is also possible to use a material exhibiting a piezoelectric effect other than ceramic, such as polyvinylidene fluoride and quartz. The thickness of the piezoelectric body 140 is preferably in the range of, for example, 50 nm (0.05 μm) to 20 μm. A thin film of the piezoelectric body 140 having a thickness in this range can be easily formed using a film forming process. If the thickness of the piezoelectric body 140 is 0.05 μm or more, a sufficiently large force can be generated according to the expansion and contraction of the piezoelectric body 140. Moreover, if the thickness of the piezoelectric body 140 is 20 μm or less, the piezoelectric vibrating body unit 10 can be sufficiently downsized.

  FIG. 2 is a plan view of the diaphragm 200. The diaphragm 200 has a rectangular-shaped vibrating body portion 210 and three connecting portions 220 that extend from the left and right long sides of the vibrating body portion 210, respectively. Two attachment portions 230 are connected to each other. In FIG. 2, the vibrating body portion 210 is hatched for convenience of illustration. The attachment portion 230 is used for attaching the piezoelectric vibrating body unit 10 to another member with a screw 240. The diaphragm 200 can be formed of a metal material such as stainless steel, aluminum, an aluminum alloy, titanium, a titanium alloy, copper, a copper alloy, or an iron-nickel alloy, for example.

  The piezoelectric vibrating body 100 (FIG. 1) is bonded to the upper surface (first surface 211) and the lower surface (second surface 212) of the vibrating body portion 210 using an adhesive. The ratio of the length L to the width W of the vibrating body part 210 is preferably L: W = about 7: 2. This ratio is a preferable value for performing ultrasonic vibration (described later) in which the vibrating body portion 210 bends left and right along the plane. The length L of the vibrating body portion 210 can be set in a range of, for example, 3.5 mm to 30 mm, and the width W can be set in a range of, for example, 1 mm to 8 mm. In addition, in order for the vibrating body part 210 to perform ultrasonic vibration, the length L is preferably set to 50 mm or less. The thickness of the vibrating body part 210 (thickness of the vibration plate 200) can be in the range of, for example, 50 μm or more and 700 μm or less. If the thickness of the vibrating body portion 210 is 50 μm or more, the vibrating body portion 210 has sufficient rigidity to support the piezoelectric vibrating body 100. Further, if the thickness of the vibrating body portion 210 is 700 μm or less, a sufficiently large deformation can be generated according to the deformation of the piezoelectric vibrating body 100.

On one short side of the diaphragm 200, a protrusion 20 (also referred to as “contact portion” or “action portion”) is provided. The protrusion 20 is a member that is in contact with the driven body and applies a force to the driven body. The protrusion 20 is preferably formed of a durable material such as ceramics (for example, Al ₂ O ₃ ).

  FIG. 3 is an explanatory diagram showing an electrical connection state between the piezoelectric vibrating body unit 10 and the drive circuit 300. Among the five second electrodes 150a to 150e, a pair of diagonal second electrodes 150a and 150d are electrically connected to each other via the wiring 151, and another diagonal pair of second electrodes 150b and 150c. Are also electrically connected to each other via the wiring 152. These wirings 151 and 152 may be formed by a film forming process, or may be realized by wire-like wiring. The three second electrodes 150b, 150e, and 150a in FIG. 3 and the first electrode 130 (FIG. 1) are electrically connected to the drive circuit 300 through wirings 310, 312, 314, and 320. The drive circuit 300 ultrasonically vibrates the piezoelectric vibrator unit 10 by applying an alternating voltage or a pulsating voltage that periodically changes between the pair of second electrodes 150 a and 150 d and the first electrode 130. It is possible to rotate the rotor (driven body) in contact with the protrusion 20 in a predetermined rotation direction. Here, the “pulsating voltage” means a voltage obtained by adding a DC offset to an AC voltage, and the direction of the voltage (electric field) is one direction from one electrode to the other electrode. In addition, by applying an AC voltage or a pulsating current voltage between the other pair of second electrodes 150b and 150c and the first electrode 130, it is possible to rotate the rotor in contact with the protrusion 20 in the reverse direction. is there. Such voltage application is performed simultaneously on the two piezoelectric vibrating bodies 100 provided on both surfaces of the diaphragm 200. Note that the wirings (or wiring layers and insulating layers) constituting the wirings 151, 152, 310, 312, 314, and 320 shown in FIG. 3 are not shown in FIG.

In the embodiment shown in FIG. 3, the five piezoelectric elements 110a to 110e are divided into the following three groups of piezoelectric elements.
(1) First piezoelectric element group PG1: Piezoelectric elements 110a and 110d
(2) Second piezoelectric element group PG2: piezoelectric elements 110b and 110c
(3) Third piezoelectric element group PG3: Piezoelectric element 110e
The piezoelectric elements 110 included in each piezoelectric element group are always driven simultaneously. Further, since the first piezoelectric element group PG1 includes two piezoelectric elements 110a and 110d, the second electrodes 150a and 150d of these piezoelectric elements 110a and 110d are directly connected to each other via the wiring 151. The same applies to the second piezoelectric element group PG2. As another embodiment, one set of piezoelectric element groups can be configured by three or more piezoelectric elements 110. Generally, a plurality of piezoelectric elements are composed of N sets (N is an integer of 2 or more). It can be divided into piezoelectric element groups. Also in this case, when two or more piezoelectric elements 110 are included in the same piezoelectric element group, the second electrodes 150 are directly connected to each other through wiring. Here, “directly connected via wiring” means that passive elements (such as resistors, coils, capacitors, etc.) and active elements are not included in the middle of the wiring. In this embodiment, one conductive layer common to the five piezoelectric elements 110a to 110e is used as the first electrode 130, but the first electrode 130 is separated for each piezoelectric element. In addition, it is preferable that the first electrodes of two or more piezoelectric elements belonging to the same piezoelectric element group are also directly connected via a wiring.

  FIG. 4 is an explanatory diagram illustrating an example of the operation of the piezoelectric vibrating body unit 10. The protrusion 20 of the piezoelectric vibrating body unit 10 is in contact with the outer periphery of the rotor 50 as a driven body. In the example shown in FIG. 4A, the drive circuit 300 (FIG. 3) applies an AC voltage or a pulsating voltage between the pair of second electrodes 150a and 150d and the first electrode 130, and the piezoelectric element. 110a and 110d expand and contract in the direction of arrow x in FIG. In response to this, the vibrating body portion 210 of the piezoelectric vibrating body unit 10 is bent in the plane of the vibrating body portion 210 and deformed into a meandering shape (S-shape), and the tip of the protrusion 20 reciprocates in the direction of the arrow y. Move or elliptical. As a result, the rotor 50 rotates around the center 51 in a predetermined direction z (clockwise direction in FIG. 4). The three connection portions 220 (FIG. 2) of the diaphragm 200 described with reference to FIG. 2 are provided at the positions of the vibration nodes (interferences) of the vibration body portion 210. When the drive circuit 300 applies an AC voltage or a pulsating voltage between the other pair of second electrodes 150b and 150c and the first electrode 130, the rotor 50 rotates in the reverse direction. If the same voltage as the pair of second electrodes 150a and 150d (or the other pair of second electrodes 150b and 150c) is applied to the center second electrode 150e, the piezoelectric vibrating body unit 10 expands and contracts in the longitudinal direction. Therefore, it is possible to increase the force applied from the protrusion 20 to the rotor 50. Such an operation of the piezoelectric vibrator unit 10 (or the piezoelectric vibrator 100) is described in the above-mentioned prior art document 1 (Japanese Patent Laid-Open No. 2004-320979 or corresponding US Pat. No. 7,224,102). The disclosure of which is incorporated by reference.

  FIG. 4B shows a state in which the piezoelectric vibrating body unit 10 is also curved in the thickness direction when the piezoelectric vibrating body unit 10 vibrates in the in-plane direction as shown in FIG. Such a curvature in the thickness direction is undesirable in that it causes bending (strain) on the surface of the piezoelectric vibrating body unit 10. However, in the piezoelectric vibrating body unit 10 of the present embodiment, the piezoelectric vibrating body 100 is installed on the vibrating plate 200 so that the substrate 120 and the vibrating plate 200 sandwich the piezoelectric element 110 (130, 140, 150). Such an undesirable deflection (strain) can be suppressed by the substrate 120. 4C is an example in which the piezoelectric vibrating body 100 is installed on the diaphragm 200 so that the substrate 120 is in contact with the diaphragm 200, contrary to FIG. 4B. In the stacked structure of FIG. 4C, an undesirable deflection (strain) on the surface of the second electrode 150 may become excessively large. Therefore, as shown in FIG. 4B, it is preferable to install the piezoelectric vibrating body 100 on the vibration plate 200 so that the substrate 120 and the vibration plate 200 sandwich the piezoelectric element (130, 140, 150). In this way, it is possible to reduce the possibility of failure or damage of the piezoelectric vibrator unit 10. In particular, it is preferable that the substrate 120 be made of silicon because it is difficult to be damaged by bending (strain). In the present embodiment, the diaphragm 200 and the piezoelectric element 110 (130, 140, 150) are in contact with each other. Therefore, by forming a wiring layer on the diaphragm 200, a voltage can be applied to the piezoelectric element 110 via the wiring layer of the diaphragm 200. However, as shown in FIG. 4C, if the piezoelectric vibrating body 100 is installed on the vibration plate 200 so that the substrate 120 is in contact with the vibration plate 200, the drive circuit 300 and the piezoelectric elements 110 (130, 140, 150) are connected. Wiring between them is easier than in the example shown in FIG.

A2. Another embodiment of the piezoelectric vibrator unit:
FIG. 5A is a plan view of a piezoelectric vibrator unit 10b as still another embodiment of the present invention, and corresponds to FIG. 1A of the first embodiment. 5A to 5C, for convenience of illustration, the connection part 220 and the attachment part 230 of the diaphragm 200 are not shown. In the piezoelectric vibrating body unit 10b of FIG. 5A, the pair of second electrodes 150b and 150c are omitted. The piezoelectric vibrator unit 10b can also rotate the rotor 50 in one direction z as shown in FIG. Note that since the same voltage is applied to the three second electrodes 150a, 150e, and 150d in FIG. 5A, the three second electrodes 150a, 150e, and 150d are formed as one continuous electrode layer. May be.

  FIG. 5B is a plan view of a piezoelectric vibrating body unit 10c as still another embodiment of the present invention. In the piezoelectric vibrating body unit 10c, the second electrode 150e at the center in FIG. 1A is omitted, and the other four second electrodes 150a, 150b, 150c, and 150d have a larger area than that in FIG. Is formed. This piezoelectric vibrator unit 10c can also achieve substantially the same effect as that of the first embodiment.

  FIG. 5C is a plan view of a piezoelectric vibrator unit 10d as still another embodiment of the present invention. In the piezoelectric vibrating body unit 10d, the four second electrodes 150a, 150b, 150c, and 150d in FIG. 1A are omitted, and one second electrode 150e is formed with a large area. The piezoelectric vibrating body unit 10d only expands and contracts in the longitudinal direction, but can apply a large force to the driven body (not shown) from the protrusion 20.

  As can be understood from FIG. 1 and FIGS. 5A to 5C, at least one electrode layer can be provided as the second electrode 150 of the piezoelectric vibrating body 100. However, if the second electrode 150 is provided at the diagonal position of the rectangular piezoelectric vibrator 100 as in the embodiment shown in FIGS. 1 and 5A and 5B, the piezoelectric vibrator 100 and The diaphragm 200 is preferable in that it can be deformed into a meandering shape that bends in the plane.

B. Embodiment of piezoelectric vibrator module:
B1. First embodiment of piezoelectric vibrator module:
FIG. 6 is a perspective view showing the piezoelectric vibrating body module 11 of the first embodiment. FIG. 7 is an exploded perspective view of the piezoelectric vibrating body module 11 according to the first embodiment. The piezoelectric vibrator module 11 includes a piezoelectric vibrator unit 10 (the diaphragm 200 and the piezoelectric vibrator 100), a leaf spring 400, a module support plate 500, a fixing member 600, screws 240, 242, and 244, and washers. 245. In the present embodiment, the first plate spring 400a, the piezoelectric vibrating body unit 10, the second plate spring 400b, the module support plate 500, and the fixing member 600 are arranged in this order from the top. The first plate spring 400a and the second plate spring 400b are simply referred to as “plate springs 400” when it is not necessary to distinguish them. It should be noted that wirings 204a, 204b, and 204e for applying a voltage to the second electrodes 150a, 150b, and 150e (FIG. 3) of the piezoelectric vibrating body 100 are connected to the connection portion 220 and the attachment portion 230 (FIG. 2) of the diaphragm 200. Is formed. Note that the wirings 204a, 204b, and 204e are part of the wirings 314, 310, and 312 shown in FIG.

  In the first embodiment, the first plate spring 400a and the second plate spring 400b are arranged so as to sandwich the piezoelectric vibrating body unit 10. The shapes of the first leaf spring 400a and the second leaf spring 400b are the same. The shape and operation of the leaf spring 400 will be described later. In the first embodiment, two leaf springs 400 are used, but the number of leaf springs 400 is determined by a desired elastic force. Therefore, depending on the desired elastic force, the number of leaf springs 400 may be one, or two or more. When the number of the leaf springs 400 is one, it is preferable to dispose the leaf springs 400 so that the piezoelectric vibrating body unit 10 is sandwiched between the leaf springs 400 and the module support plate 500. When the number of the leaf springs 400 is two or more, the leaf springs 400 are preferably arranged so that the two leaf springs 400 sandwich the piezoelectric vibrating body unit 10. The leaf spring 400 may be elastically deformable with a force equal to or less than the force applied by the diaphragm 200 to the driven body 50 when the piezoelectric vibrating body unit 10 vibrates.

  A module support plate 500 is disposed at one end of the piezoelectric vibrator module 11. The module support plate 500, the two leaf springs 400a and 400b, and the piezoelectric vibrating body unit 10 are integrally fixed by screws 240.

  A fixing member 600 is disposed outside the module support plate 500. The leaf spring 400 is fixed by a fixing member 600 and a screw 242. However, the diaphragm 200 is not directly fixed to the fixing member 600 but is indirectly connected via the leaf spring 400. The fixing member 600 is fixed to a housing (not shown) of the piezoelectric driving device by screws 244.

  FIG. 8 is a plan view of the piezoelectric vibrating body module 11 when the leaf spring 400 is not deformed. In FIG. 8, the surface of the leaf spring 400 is hatched for convenience of illustration. The leaf spring 400 includes a first part 410 that is fixed to the fixing member 600, a second part 420 that is fixed to the diaphragm 200, and a third part 430 that connects the first part 410 and the second part. . In the present embodiment, the first portion 410 has an elongated shape whose longitudinal direction is parallel to the longitudinal direction of the fixing member 600, and is attached to the fixing member 600 by screws 242. However, the 1st site | part 410 should just be fixed with the fixing member 600, and the shape is arbitrary. In the present embodiment, the second portion 420 has a substantially rectangular shape, and is attached to the attachment portion 230 of the diaphragm 200 with a screw 240. Therefore, the leaf spring 400 has a portion that overlaps the diaphragm 200 when viewed from the thickness direction of the diaphragm 200. Note that the second portion 420 may be attached to the attachment portion 230 of the diaphragm 200, and the shape thereof is arbitrary. The third portion 430 is two elongated portions that connect the first portion 410 and the second portion. The leaf spring 400 can be easily formed by punching out a substantially rectangular plate in a shape of three sides excluding one side of the frame shape. The punching shape may be a shape other than the three-side shape excluding one side of the frame shape, for example, a substantially rectangular shape. In this case, the leaf spring 400 may have a substantially frame shape with a thick side. The thick side corresponds to the second part 420, the opposite side of the thick side corresponds to the first part 410, and the remaining two sides become the third part 430.

  FIG. 9 is a plan view of the piezoelectric vibrating body module 11 when the leaf spring 400 is deformed. When the piezoelectric vibrator unit 10 expands and contracts, the protrusion 20 of the diaphragm 200 presses the driven body 50 with the force F. Due to the law of action / reaction, the protrusion 20 and the diaphragm 200 receive a reaction force (−F) against the force F from the driven body 50. Here, the diaphragm 200 is connected to the second portion 420 of the leaf spring 400 with a screw 240. The second portion 420 of the diaphragm 200 and the leaf spring 400 moves to the opposite side to the driven body 50. On the other hand, since the first portion 410 of the leaf spring 400 is fixed to the fixing member 600, it does not move even if it receives a reaction force (−F) from the driven body 50. The second part 420 moves relative to the first part 410. As a result, the third portion 430 of the leaf spring 400 is deformed. The vibration plate 200 is pushed in the direction of the driven body 50 by the elastic force to restore the deformation, and the protrusion 20 is pushed by the driven body 50.

  If a leaf spring that does not overlap with the vibration plate 200 as viewed from the thickness direction of the vibration plate 200 and elastically deforms in a direction perpendicular to the surface is used, this leaf spring is, for example, the surface of the leaf spring. It arrange | positions in the position of a 3rd site | part so that a normal line direction may become parallel to the longitudinal direction of the piezoelectric vibrating body 100. FIG. In this case, the thickness of the piezoelectric vibrator module 11 is limited by the width of the leaf spring. For this reason, even if the thickness of the piezoelectric vibrating body 100 is reduced, the thickness of the piezoelectric vibrating body module 11 cannot be made smaller than the width of the leaf spring. On the other hand, in the first embodiment, since the plate spring 400 that has a portion overlapping with the vibration plate 200 when viewed from the thickness direction of the vibration plate 200 and is elastically deformable in the in-plane direction is used, the piezoelectric vibration module 11 is used. Is the sum of the thickness of the piezoelectric vibrator unit 10 and the thickness of the leaf spring 400. Therefore, if the thickness of the piezoelectric vibrating body 100 is reduced and the thickness of the piezoelectric vibrating body unit 10 is reduced, the thickness of the piezoelectric vibrating body module 11 can also be reduced. Therefore, in the case where the piezoelectric element 110 is formed by a film forming process and the thin piezoelectric vibrator 100 can be formed, the plate spring 400 that has a portion overlapping the diaphragm 200 and can be elastically deformed in the in-plane direction is used. However, the thickness of the piezoelectric vibrator module 11 can be reduced.

  According to the first embodiment, the leaf spring 400 includes a first part 410 for fixing to the fixing member 600 (support member), a second part 420 for fixing to the diaphragm 200, and the first part 410. And a third part 430 that connects the second part 420, and the second part 420 is a part that overlaps the diaphragm 200. With such a shape, an elastic force can be generated by deformation of the leaf spring 400 (deformation of the third portion 430).

  The leaf spring 400 is preferably in contact with the piezoelectric vibrating body 100. If the leaf spring 400 is in contact with the piezoelectric vibrating body 100, the expansion and contraction of the piezoelectric vibrating body 100 can deform the leaf spring 400 and generate an elastic force. The leaf spring 400 may not be in contact with the piezoelectric vibrating body 100. For example, another sheet member may be disposed between the leaf spring 400 and the piezoelectric vibrating body 100. Alternatively, the piezoelectric vibrator 100 and the leaf spring 400 may be separated by adjusting the number of washers 245 disposed between the diaphragm 200 and the leaf spring 400.

  When the piezoelectric vibrator module 11 has a plurality of leaf springs 400, for example, a first leaf spring 400a and a second leaf spring 400b, the piezoelectric vibrator unit 10 includes the first leaf spring 400a and the second leaf spring. It is preferably located between 400b. If the leaf spring 400 is provided only on one side of the vibration plate 200, the elastic force is biased and the vibration plate 200 may be bent, but the vibration plate 200 is interposed between the first leaf spring 400a and the second leaf spring 400b. If it arrange | positions, there is little possibility that the diaphragm 200 will curve.

  Thus, according to the first embodiment of the piezoelectric vibrator module, if the piezoelectric vibrator 100 is thinned, the piezoelectric vibrator unit 10 can be formed thin accordingly. Further, the piezoelectric vibrator unit 10 can be formed thinner than a case where a spring that can be elastically deformed in a direction perpendicular to the surface is provided without having a portion overlapping the diaphragm 200 when viewed from the thickness direction of the diaphragm 200. Furthermore, the bending of the diaphragm 200 can be suppressed by arranging the diaphragm 200 between the first plate spring 400a and the second plate spring 400b.

B2. Second embodiment of the piezoelectric module:
FIG. 10 is a perspective view showing the piezoelectric vibrating body module 11a of the second embodiment. FIG. 11 is an exploded perspective view of the piezoelectric vibrating body module 11a. The piezoelectric vibrator module 11 shown in FIGS. 6 and 7 has one piezoelectric vibrator unit 10, whereas the piezoelectric vibrator module 11 a is different in that there are three piezoelectric vibrator units 10. . Three leaf springs 400 (400a, 400c, 400b) are arranged between two adjacent piezoelectric vibrator units 10 (between 10a and 10b and between 10b and 10c). Two leaf springs 400 (400a and 400c) are disposed on the uppermost piezoelectric vibrator unit 10a, and two leaf springs 400 (400b and 400b) are disposed below the lowermost piezoelectric vibrator unit 10c. 400c) is arranged. As described above, in the piezoelectric vibrating body module 11a in which the plurality of piezoelectric vibrating body units 10 are stacked, the leaf spring 400 that has a portion overlapping the vibrating plate 200 and can be elastically deformed in the in-plane direction can be used. The diaphragm 200 and the leaf spring 400 are preferably arranged in a plane symmetric position with respect to the center plane.

C. Embodiment of wiring structure:
C1. First embodiment of wiring structure:
FIG. 12 is an explanatory diagram showing a first embodiment of a wiring structure of a piezoelectric vibrator module having a plurality of piezoelectric vibrator units. In the second embodiment of the piezoelectric vibrator module described above, the three leaf springs 400 are provided between the two piezoelectric vibrator units 10, but in the third embodiment, the two diaphragms 200 are not provided. It demonstrates as a structure provided with the leaf | plate spring 400 of 1 sheet in between. As described above, the number of leaf springs 400 is determined by the desired elastic force, and one leaf spring 400 may be disposed between the two piezoelectric vibrator units 10. good. In the first embodiment of the wiring structure, three piezoelectric vibrator units 10 (10a, 10b, 10c) and four leaf springs 400 are provided. The leaf spring 400 and the piezoelectric vibrator unit 10 are: Alternatingly arranged.

  FIG. 13 is a perspective view illustrating an example of a wiring pattern of the piezoelectric vibrator unit 10. The diaphragm of the piezoelectric vibrator unit 10a is called a first diaphragm 200a, the piezoelectric vibrator of the first diaphragm 200a is called a first piezoelectric vibrator 100a, and the piezoelectric elements included in the first piezoelectric vibrator 100a are first. Also called a piezoelectric element. The diaphragm 200a includes wirings 204a, 204b, and 204e and two wirings 204g in the connection part 220 and the attachment part 230. Note that the wirings 204a, 204b, and 204e of the first diaphragm 200a are also referred to as first wirings. The wirings 204a, 204b, and 204e are parts of the wirings 314, 312, and 310 shown in FIG. 3, respectively, and the wiring 204g is a part of the wiring 320. The wirings 204a, 204b, and 204e are formed so as to avoid the screw holes 200h, but the two wirings 204g do not avoid the screw holes 200h. The potential of the first electrode 130 when the piezoelectric vibrating body unit 10 is driven is a ground potential, and is connected to the housing via the wiring 204 g and the screw 240. The wirings 204a, 204b, and 204e are formed so as to avoid the screw holes 200h in order to avoid a short circuit with the ground. The diaphragm of the piezoelectric vibrator unit 10b shown in FIG. 12 is called a second diaphragm, the piezoelectric vibrator of the second diaphragm is called a second piezoelectric vibrator, and the piezoelectric element included in the second piezoelectric vibrator. Is also referred to as a second piezoelectric element. Similarly, the diaphragm of the piezoelectric vibrator unit 10c is called a third diaphragm, the piezoelectric vibrator of the third diaphragm is called a third piezoelectric vibrator, and the piezoelectric element included in the third piezoelectric vibrator is a third piezoelectric element. Also called an element. However, the wiring (204a, 204b, 204e) of the second diaphragm is called a third wiring, and the wiring (204a, 204b, 204e) of the third diaphragm is called a fourth wiring.

  The wirings 204a, 204b, 204e, and 204g are arranged on three surfaces including a first surface 211a of the first diaphragm 200a, a second surface 212a, and a side surface 213a between the first surface 211a and the second surface 212a. Is formed. The wirings 204a, 204b, 204e on the first surface 211a and the wirings 204a, 204b, 204e on the second surface 212a are connected via the wirings 204a, 204b, 204e on the side surface 213a, respectively.

  In the example shown in FIG. 12, wirings 310, 312, and 314 are formed on a flexible substrate 700 such as a flexible substrate, and the wirings 204 a, 204 b, 204e is connected to wirings 314, 310, and 312 respectively. Note that the wiring formed on the flexible substrate 700 is referred to as a second wiring. This connection may be performed by, for example, solder or conductive paste. According to this embodiment, wiring can be performed on the plurality of diaphragms 200a to 200c by one flexible substrate 700. If three wirings 310, 312, and 314 are formed on the flexible substrate 700 and connected to the wirings 204a, 204b, and 204e of the three diaphragms 200a to 200c, respectively, the piezoelectric elements of the diaphragms 200a to 200c are connected. It is also possible to control the vibrating bodies 100a to 100c independently. A device including the piezoelectric vibrator module 11, the flexible substrate 700, and the drive circuit 300 is referred to as a piezoelectric drive device.

  According to the first embodiment of the wiring structure, the wirings 204b, 204e, and 204a (first wiring) formed on the diaphragm 200a are replaced with the wirings 310, 312, and 314 (second wiring) formed on the flexible substrate 700. Since the electrical connection is performed in a state of being in contact with the wiring), the wiring from the drive circuit 300 to the piezoelectric vibrating body 100 can be easily formed.

  According to the first embodiment of the wiring structure, the wirings 204b, 204e, and 204a are also formed on the side surface 213a of the diaphragm 200a. As a result, by connecting the wirings 204b, 204e, and 204a (first wiring) and the wirings 310, 312, and 314 (second wiring) formed on the flexible substrate 700 on the side surface 213a, the first wiring and the first wiring are connected. Two wirings can be easily connected.

  Also, according to the first embodiment of the wiring structure, the second piezoelectric vibrating body 100b having the second piezoelectric element, the second vibrating plate 200b provided with the second piezoelectric vibrating body 100b, and the second vibrating plate 200b. Wirings 204b, 204e, 204a (third wiring) provided on the wiring board 204, 204e, 204a (third wiring) and wirings 310, 312, 314 (second wiring) formed on the flexible substrate 700. ) Can be easily connected to the third wiring and the second wiring. In the first embodiment of the wiring structure, the case where there are three piezoelectric vibrator units 10 has been described as an example. However, the number of piezoelectric vibrator units 10 may be one, two, or three or more. May be.

C2. Second embodiment of wiring structure:
FIG. 14 is an explanatory diagram illustrating another example of wiring when a plurality of diaphragms 200 are provided. In the second embodiment of the wiring structure, wiring is performed by three flexible substrates 701 on which wirings 310, 312, and 314 are formed. The wirings 314, 310, and 312 of each flexible substrate 701 are connected to the wirings 204a, 204b, and 204e (FIG. 12) on the first surfaces 211a, 211b, and 211c of the diaphragms 200a, 200b, and 200c. According to this embodiment, the piezoelectric vibrating body 100 of each diaphragm 200 can be controlled independently. In the second embodiment of the wiring structure, the case where there are three piezoelectric vibrating body units 10 has been described as an example. However, the number of piezoelectric vibrating body units 10 is one, two, or three or more. Also good. When the number of piezoelectric vibrator units 10 is n, n flexible substrates 701 may be used.

C3. Third embodiment of wiring structure:
FIG. 15 is an explanatory diagram showing still another example of wiring in the case where a plurality of diaphragms 200 are provided. In the fifth embodiment, wiring is performed by a single flexible substrate 702. On the flexible substrate 702, wirings 310, 312, and 314 are formed on one surface. The flexible substrate 702 is folded seven times so that the wirings 310, 312, and 314 are in contact with the wirings 204 a, 204 b, and 204 c of the diaphragms 200 a, 200 b, and 200 c. As a result, the wirings 310, 312, and 314 of the flexible substrate 702 are connected to the wirings 204a, 204b, and 204e of the first surface 211a of the first diaphragm 200a, and the first and second surfaces 211b and 212b of the second diaphragm 200b. Since the wires 204a, 204b and 204e of the third electrode 200 and the wires 204a, 204b and 204e of the second surface 212c of the third diaphragm 200c are in contact with each other, a voltage is applied to all the piezoelectric vibrators 100 by the single flexible substrate 702. I can do it. In the third embodiment of the wiring structure, the case where there are three piezoelectric vibrator units 10 has been described as an example. However, the number of piezoelectric vibrator units 10 may be one, two, or three or more. May be. When the number of piezoelectric vibrator units 10 is n, the flexible substrate 702 may be folded 2n + 1.

  FIG. 16 is an explanatory view showing a state where the flexible substrate 702 in the third embodiment of the wiring structure is unfolded and unfolded. The wirings 310, 312, and 314 of the flexible substrate 702 are divided into wirings 310a to 310c, 312a to 312c, and 314a to 314c for connecting to the wirings 204b, 204e, and 204a of each diaphragm 200, respectively. As described above, by providing the wirings 310 a to 310 c, 312 a to 312 c, and 314 a to 314 c, a voltage can be independently applied to the piezoelectric vibrating body 100 of each diaphragm 200 by one flexible substrate 702. Note that the wiring 310 may not be divided into the wirings 310a to 310c, the wiring 312 may not be divided into the wirings 312a to 312c, and the wiring 314 may not be divided into the wirings 314a to 314c. In this case, the same voltage can be applied to all the piezoelectric vibrators.

C4. Fourth embodiment of wiring structure:
FIG. 17 is an explanatory diagram illustrating another example of wiring when a plurality of diaphragms 200 are provided. In the fourth embodiment of the wiring structure, the flexible substrate 703 is connected to the wirings 204a, 204b, and 204e on the second surface 212a of the first diaphragm 200a. The electrical connection between two facing surfaces of two adjacent diaphragms 200 (for example, the first surface 211a of the first diaphragm 200a and the second surface 212b of the second diaphragm 200b) is flexible. They are connected by a wiring member 704 different from the substrate 703. The wiring member 704 includes a part of the wirings 310, 312, and 314, and the piezoelectric elements and the drive circuit 300 are connected to the piezoelectric vibrator units 10 (10 a, 10 b, and 10 c) by the wiring. Connected. Note that the wiring member 704 may or may not be flexible. In the fourth embodiment of the wiring structure, the case where there are three piezoelectric vibrator units 10 has been described as an example. However, the number of piezoelectric vibrator units 10 may be two, or three or more. When the number of piezoelectric vibrating body units 10 is n (n is an integer of 2 or more), n-1 wiring members 704 may be provided.

  In addition, in the example of FIG. 13, in addition to the first wiring (204a, 204b, 204e) on the first surface 211, the second surface 212, and the side surface 213 of each diaphragm 200, a piezoelectric element disposed on the diaphragm 200 is provided. You may further provide the dummy wiring which is not connected with the piezoelectric element 110 of the vibrating body 100. FIG. If the wiring of the wiring member 704 and the first wiring connected to the piezoelectric element 110 of each diaphragm 200 are connected, the piezoelectric element of the diaphragm 200 can be driven. On the other hand, if the second wiring and the dummy wiring are connected, the piezoelectric element of the diaphragm 200 can be prevented from being driven. That is, the wiring pattern of the flexible substrate 703, the wiring pattern of the wiring member 704, the first wiring (204a, 204b, 204e) of each diaphragm 200, and the wiring pattern of the dummy wiring are appropriately designed and wired. Then, the drive circuit 300 can drive only the piezoelectric vibrating body 100 arranged on any diaphragm 200 among the plurality of diaphragms 200.

  When there are a plurality of diaphragms 200, as described in the example of FIG. 12 and the example of FIG. 15, the wirings 310, 312, and 314 of all the diaphragms 200 are wired by one flexible substrate 700 and 702. Alternatively, as described in the example of FIG. 14, a plurality of flexible substrates 701 may be connected. Further, as described in the example of FIG. 17, wiring is performed on one diaphragm 200, for example, the wirings 310, 312, and 314 of the diaphragm 200 a by one flexible substrate 703, and the other diaphragms 200 b and 200 c. As for, wiring may be performed using the wiring member 704.

  In the description of the embodiment of the wiring structure, the configuration including the leaf spring 400 has been described as an example, but the leaf spring 400 may be omitted.

D. Embodiments of a device using a piezoelectric drive:
A piezoelectric driving device using the above-described piezoelectric vibrating body unit as a driving device can apply a large force to a driven body by utilizing resonance, and can be applied to various devices. Examples of the piezoelectric driving device include a robot (including an electronic component conveying device (IC handler)), a dosing pump, a calendar feeding device for a clock, and a printing device (for example, a paper feeding mechanism. However, in a piezoelectric driving device used for a head, It is not applicable to the head because the diaphragm is not resonated.) And can be used as a driving device in various devices. Hereinafter, representative embodiments will be described.

  FIG. 18 is an explanatory diagram showing an example of a robot 2050 using the piezoelectric driving device 800 described above. The robot 2050 includes a plurality of link portions 2012 (also referred to as “link members”) and an arm 2010 (“a” that includes a plurality of joint portions 2020 that connect the link portions 2012 in a rotatable or bendable state. It is also called “arm”. Each joint portion 2020 includes the above-described piezoelectric drive device, and the joint portion 2020 can be rotated or bent by an arbitrary angle using the piezoelectric drive device. A robot hand 2000 is connected to the tip of the arm 2010. The robot hand 2000 includes a pair of grip portions 2003. The robot hand 2000 also has a built-in piezoelectric drive device 800, and the piezoelectric drive device 800 can be used to open and close the gripping unit 2003 to grip an object. Further, a piezoelectric drive device 800 is also provided between the robot hand 2000 and the arm 2010, and the robot hand 2000 can be rotated with respect to the arm 2010 using the piezoelectric drive device 800.

  FIG. 19 is an explanatory diagram of the wrist portion of the robot 2050 shown in FIG. The wrist joint portion 2020 sandwiches the wrist rotating portion 2022, and the wrist link portion 2012 is attached to the wrist rotating portion 2022 so as to be rotatable around the central axis O of the wrist rotating portion 2022. . The wrist rotation unit 2022 includes a piezoelectric driving device 800, and the piezoelectric driving device 800 rotates the wrist link unit 2012 and the robot hand 2000 around the central axis O. The robot hand 2000 is provided with a plurality of gripping units 2003. The proximal end portion of the grip portion 2003 is movable in the robot hand 2000, and the piezoelectric drive device 800 is mounted on the base portion of the grip portion 2003. For this reason, by operating the piezoelectric driving device 800, the gripping unit 2003 can be moved to grip the object.

  The robot is not limited to a single-arm robot, and the piezoelectric drive device 800 can be applied to a multi-arm robot having two or more arms. Here, in the wrist joint 2020 and the robot hand 2000, in addition to the piezoelectric driving device 800, a power line for supplying power to various devices such as a force sensor and a gyro sensor, a signal line for transmitting a signal, and the like And requires a lot of wiring. Therefore, it is very difficult to arrange the wiring inside the joint portion 2020 and the robot hand 2000. However, since the piezoelectric drive device 800 of the above-described embodiment can reduce the drive current as compared with a normal electric motor or a conventional piezoelectric drive device, the joint portion 2020 (particularly, the joint portion at the tip of the arm 2010) or a robot hand. Wiring can be arranged even in a small space such as 2000.

  FIG. 20 is an explanatory diagram showing an example of a liquid feed pump 2200 that uses the piezoelectric driving device 800 described above. In the case 2230, the liquid feed pump 2200 includes a reservoir 2211, a tube 2212, a piezoelectric driving device 800, a rotor 2222, a deceleration transmission mechanism 2223, a cam 2202, a plurality of fingers 2213, 2214, 2215, 2216, 2217, 2218, and 2219 are provided. The reservoir 2211 is a storage unit for storing a liquid to be transported. The tube 2212 is a tube for transporting the liquid sent out from the reservoir 2211. The protrusion 20 of the piezoelectric driving device 800 is provided in a state of being pressed against the side surface of the rotor 2222, and the piezoelectric driving device 800 rotationally drives the rotor 2222. The rotational force of the rotor 2222 is transmitted to the cam 2202 via the deceleration transmission mechanism 2223. Fingers 2213 to 2219 are members for closing the tube 2212. When the cam 2202 rotates, the fingers 2213 to 2219 are sequentially pushed outward in the radial direction by the protrusion 2202A of the cam 2202. The fingers 2213 to 2219 close the tube 2212 in order from the upstream side in the transport direction (reservoir 2211 side). Thereby, the liquid in the tube 2212 is transported to the downstream side in order. In this way, it is possible to realize a small liquid feed pump 2200 that can deliver an extremely small amount with high accuracy and that is small. In addition, arrangement | positioning of each member is not restricted to what was illustrated. Further, a member such as a finger may not be provided, and a ball or the like provided on the rotor 2222 may close the tube 2212. The liquid feed pump 2200 as described above can be used for a medication device that administers a drug solution such as insulin to the human body. Here, by using the piezoelectric driving device 800 of the above-described embodiment, the driving current becomes smaller than that of the conventional piezoelectric driving device, so that the power consumption of the medication device can be suppressed. Therefore, it is particularly effective when the medication apparatus is battery-driven.

E. Variations:
The present invention is not limited to the above-described examples and embodiments, and can be implemented in various modes without departing from the gist thereof. For example, the following modifications are possible.

・ Modification 1:
In the above embodiment, the first electrode 130, the piezoelectric body 140, and the second electrode 150 are formed on the substrate 120. However, the substrate 120 is omitted, and the first electrode 130 and the piezoelectric material are formed on the vibration plate 200. The body 140 and the second electrode 150 may be formed.

Modification 2
In the above embodiment, one piezoelectric vibrating body 100 is provided on each of both surfaces of the vibration plate 200, but one of the piezoelectric vibrating bodies 100 can be omitted. However, providing the piezoelectric vibrating bodies 100 on both surfaces of the diaphragm 200 is preferable in that it is easier to deform the diaphragm 200 into a meandering shape bent in the plane.

  The embodiments of the present invention have been described above based on some examples. However, the above-described embodiments of the present invention are for facilitating the understanding of the present invention and limit the present invention. It is not a thing. The present invention can be changed and improved without departing from the spirit and scope of the claims, and it is needless to say that the present invention includes equivalents thereof.

DESCRIPTION OF SYMBOLS 10, 10a, 10b, 10c, 10d ... Piezoelectric vibrator unit 11, 11a ... Piezoelectric vibrator module 12 ... Tube 20 ... Projection part (contact part, action part)
50 ... Rotor (driven body)
51 ... Center of driven body 100, 100a, 100b ... Piezoelectric vibrator 110a, 110b, 110e ... Piezoelectric element 120 ... Substrate 130 ... First electrode 140 ... Piezoelectric body 150, 150a, 150b, 150c, 150d, 150e ... Second Electrodes 151, 152 ... wiring 200, 200a, 200b, 200c ... diaphragms 204a, 204b, 204c ... wiring 210 ... vibrating body parts 211, 211a, 211b, 211c ... first surface 212, 212a, 212b, 212c ... second surface 220 ... Connecting portion 230 ... Mounting portion 240, 242, 244 ... Screw 245 ... Washer 300 ... Drive circuit 310, 310a, 312, 312a, 314, 314a, 320 ... Wiring 400, 400a, 400b, 400c ... Leaf spring 410 ... No. 1 part 420 ... 2nd part 430 ... 3rd part Position 500 ... Module support plate 600 ... Fixing member 700, 701, 702, 703 ... Flexible substrate 704 ... Wiring member 800 ... Piezoelectric drive device 2000 ... Robot hand 2003 ... Holding part 2010 ... Arm 2012 ... Link part 2020 ... Joint part 2050 ... Robot 2200 ... Liquid feed pump 2202 ... Cam 2202A ... Projection 2211 ... Reservoir 2212 ... Tube 2213 ... Finger 2222 ... Rotor 2223 ... Deceleration transmission mechanism 2230 ... Case

Claims (8)

A piezoelectric vibrator having a piezoelectric element;
A diaphragm provided with the piezoelectric vibrator;
A first leaf spring having a portion overlapping the diaphragm as viewed from the thickness direction of the diaphragm, and elastically deformable in an in-plane direction;
A fixing member for fixing the diaphragm and the first leaf spring;
A piezoelectric drive device comprising: The piezoelectric drive device according to claim 1,
The first plate spring is a piezoelectric drive device that can be elastically deformed by a force equal to or less than a force applied by the diaphragm to the driven body when the piezoelectric vibrator vibrates. The piezoelectric drive device according to claim 2,
A support member for supporting the piezoelectric driving device;
The first leaf spring is
A first portion for fixing the first leaf spring to the support member;
A second portion for fixing the first leaf spring to the diaphragm, which is a portion overlapping the diaphragm;
A piezoelectric drive device comprising: The piezoelectric drive device according to claim 2 or 3,
The piezoelectric driving device, wherein the first leaf spring is in contact with the piezoelectric vibrating body. In the piezoelectric drive device according to any one of claims 1 to 4,
A second plate spring having a portion overlapping the diaphragm as viewed from the thickness direction of the diaphragm, and elastically deformable in an in-plane direction;
The diaphragm is a piezoelectric drive device that is located between the first plate spring and the second plate spring. Two links,
A joint part connecting the two link parts;
The piezoelectric drive device according to any one of claims 1 to 5, wherein the two link portions are rotated by the joint portion;
Robot equipped with. The robot driving method according to claim 6, wherein the piezoelectric driving device is driven by applying an AC voltage or a pulsating voltage to the piezoelectric element of the piezoelectric driving device, and the two link portions are connected to the joint portion. The robot drive method is rotated by the It is a drive method of the piezoelectric drive device according to any one of claims 1 to 5,
A driving method of a piezoelectric driving device in which an alternating voltage or a pulsating voltage is applied to the piezoelectric element.

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