JP6233977B2 - Capacitance type three-dimensional sensor and manufacturing method thereof - Google Patents

Description

  The present invention relates to a capacitance type three-dimensional sensor and a method for manufacturing the same.

An electronic device such as a notebook personal computer may include a touch pad as means for moving a pointer displayed on a monitor, and a capacitive sensor may be used as the touch pad.
Conventionally, a capacitance type sensor used as a touch pad has detected a change in capacitance in a two-dimensional direction (X direction and Y direction). , Y direction and Z direction) are also being studied (Patent Document 1).
Specifically, the capacitive three-dimensional sensor not only detects the contact position of the finger or stylus pen in the X direction and Y direction, but also detects that the sensor is pressed by the finger or stylus pen. ing.
In the capacitance type three-dimensional sensor, in order to detect that the sensor has been pressed, an easily deformable body is provided between the two stacked sheet-like electrode bodies, and between the two sheet-like electrode bodies. What is necessary is just to detect the electrostatic capacitance change of a Z direction.
As an easily deformable body provided between two sheet-like electrode bodies, it is known to use a rubber dot spacer (Patent Document 2).
In addition, as an easily deformable body provided between two sheet-like electrode bodies, it is known to use a foam layer such as a sponge (Patent Document 3).

Japanese Patent No. 3681771 International Publication No. 2013/132737 JP-A-5-109342

However, when the dot spacer described in Patent Document 2 is used, the number of processes necessary for bonding the dot spacer between the electrode bodies is large, and the production of the capacitive three-dimensional sensor is not always simple. It was.
In the foamed layer described in Patent Document 3, the operability and reactivity of the capacitance type three-dimensional sensor may be deteriorated because the restoring property after being pressed for input is insufficient.
An object of the present invention is to provide a capacitance type three-dimensional sensor that is excellent in resilience after being pushed for input and can be easily manufactured, and a method for manufacturing the same.

The capacitance-type three-dimensional sensor of the present invention includes a sheet-like first electrode body having a patterned conductive film, a sheet-like second electrode body having a patterned conductive film, the first electrode body, An electrostatic capacity type three-dimensional sensor comprising an easily deformable layer disposed between the second electrode bodies, wherein the easily deformable layer is a layer in which elastic particles are dispersed in a foamed polymer.
In the capacitance-type three-dimensional sensor of the present invention, the first electrode body is a sheet-like Z-direction position detection electrode body that detects a position in the Z-direction, and the Z-direction position detection electrode body includes: An electrode sheet having a Z-direction electrode substrate sheet and a patterned conductive film provided on one surface of the Z-direction electrode substrate sheet, wherein the second electrode body detects a position in the XY direction. The XY direction position detecting electrode body is provided with an X direction electrode sheet and a Y direction electrode sheet, and the X direction electrode sheet is an X direction electrode base. A material sheet and a patterned conductive film provided on one surface of the X-direction electrode base sheet, and the Y-direction electrode sheet includes the Y-direction electrode base sheet and the Y-direction electrode base. A patterned conductive film provided on one surface of the material sheet The conductive film pattern of the X direction electrode sheet is a pattern having a plurality of X direction electrode portions formed along the X direction, and the conductive film pattern of the Y direction electrode sheet is formed along the Y direction. It is preferable that the pattern has a plurality of Y-direction electrode portions.
In the capacitance-type three-dimensional sensor of the present invention, it is preferable that the foamed polymer is foamed polyurethane and the elastic particles are polyurethane particles.

The manufacturing method of the capacitance type three-dimensional sensor of the present invention includes a first electrode body manufacturing step of forming a sheet-shaped first electrode body by forming a pattern-shaped conductive film, and forming a pattern-shaped conductive film. A second electrode body manufacturing step of manufacturing a sheet-like second electrode body, and printing or foaming ink containing a base resin, a foaming agent, elastic particles, and a dispersion medium on one surface of the first electrode body, or A foamable resin layer forming step of forming a foamable resin layer by coating, and after laminating the second electrode body on the foamable resin layer, the foamable resin layer is heated and foamed to produce a foamed polymer. An easily deformable layer in which elastic particles are dispersed, and an easily deformable layer forming joining step for joining the easily deformable layer to the first electrode body and the second electrode body.
In the method for producing a capacitive three-dimensional sensor of the present invention, in the first electrode body manufacturing step, an electrode formed along one of the surfaces of the Z-direction electrode base sheet along the X or Y direction. A sheet-like Z-direction position detection electrode body for detecting the position in the Z direction is formed by forming a patterned conductive film having a plurality of portions, and in the second electrode body manufacturing step, Forming an electrode sheet for X direction by forming a patterned conductive film having a plurality of X direction electrode portions formed along the X direction on one surface of the base sheet; The electrode sheet for Y direction which produces the electrode sheet for Y directions by forming the patterned electrically conductive film which has two or more Y direction electrode parts formed along the Y direction on one surface of the base material sheet for Y direction electrodes Production process, X-direction electrode sheet, and Y Pasted the counter electrode sheet preferably has an XY direction position sensing electrode body forming step of forming a sheet-like XY direction position sensing electrode member for detecting the XY direction position.
In the method for producing a capacitive three-dimensional sensor of the present invention, it is preferable to use polyurethane as the base resin and use polyurethane particles as the elastic particles.

The capacitive three-dimensional sensor of the present invention is excellent in resilience after being pushed for input and can be easily manufactured.
According to the method for manufacturing a capacitive three-dimensional sensor of the present invention, it is possible to easily manufacture a capacitive three-dimensional sensor having excellent resilience after being pushed for input.

It is a fragmentary sectional view showing an embodiment of a capacitance type three-dimensional sensor of the present invention. It is a top view which shows the Z direction position detection electrode body in embodiment. It is a top view which shows the electrode sheet for X directions which comprises the electrode body for XY direction position detection used by embodiment. It is a top view which shows the electrode sheet for Y directions which comprises the electrode body for XY direction position detection used by embodiment. It is a fragmentary sectional view explaining the easily deformable layer formation joining process at the time of manufacturing the capacitance type three-dimensional sensor of an embodiment.

One embodiment of a capacitive three-dimensional sensor (hereinafter abbreviated as “three-dimensional sensor”) of the present invention will be described.
FIG. 1 shows a three-dimensional sensor according to this embodiment. The three-dimensional sensor 1 of this embodiment includes a support plate 10, a Z-direction position detection electrode body 20, an easily deformable layer 30, an XY-direction position detection electrode body 40, and a protective layer 50.
Furthermore, in the three-dimensional sensor 1 of this embodiment, the XY direction position detection electrode body 40 includes an X direction electrode sheet 40a and a Y direction electrode sheet 40b, and the X direction electrode sheet 40a and the Y direction electrode sheet. 40b is bonded by the adhesive layer 40c.

In the three-dimensional sensor 1 of the present embodiment, the input area where the finger or the stylus pen is brought into contact is rectangular. In this specification, the short direction of the input area is the X direction, the long direction of the input area is the Y direction, and the direction perpendicular to the X direction and the Y direction is the Z direction.
Further, in the three-dimensional sensor of the present invention, a finger or stylus pen contacts the protective layer 50, and the protective layer 50 side is referred to as “front side” or “front side”. The support plate 10 side is referred to as “back side” or “back side”.

(Support plate)
The support plate 10 is a plate to which the Z-direction position detection electrode body 20 is bonded via the double-sided adhesive tape 11 to prevent the Z-direction position detection electrode body 20 from bending. Specifically, the support plate 10 is a plate having a thickness (average value) of 100 μm or more, preferably 200 μm or more, more preferably 500 μm or more. There is no restriction | limiting in particular in the material of the support plate 10, For example, any of a metal, resin, ceramics, and glass may be sufficient.

(Z-direction position detection electrode body)
The Z-direction position detection electrode body 20 is an electrode body used when detecting a position in the Z direction, and is provided on the front surface 10 a of the support plate 10.
The Z-direction position detecting electrode body 20 in the present embodiment has a pattern shape formed on the Z-direction electrode substrate sheet 21 and the surface 21a (first surface 21a) on the front side of the Z-direction electrode substrate sheet 21. This is an electrode sheet having a conductive film 22 and a Z-direction electrode base sheet 21 and an insulating film 23 covering the conductive film 22.
In the present invention, “conductive” means that the electric resistance value is less than 1 MΩ, and “insulation” means that the electric resistance value is 1 MΩ or more, preferably 10 MΩ or more.

As the substrate sheet 21 for Z direction electrodes, a plastic film and a glass plate can be used.
As the resin constituting the plastic film, polyethylene terephthalate, polyethylene naphthalate, polycarbonate, polyimide, triacetyl cellulose, cyclic polyolefin, acrylic resin, and the like can be used. Among these, polyethylene terephthalate or polycarbonate is preferable because of its high heat resistance and dimensional stability and low cost.
The thickness (average value) of the Z-direction electrode substrate sheet 21 is preferably 25 to 75 μm. If the thickness of the Z-direction electrode substrate sheet 21 is equal to or greater than the lower limit value, the three-dimensional sensor 1 can be easily thinned if the thickness is less than the lower limit value.

Examples of the conductive film 22 include a film formed of a conductive paste, a film containing a conductive polymer, a film containing metal nanowires, a film containing carbon, and a metal vapor deposition film formed by a metal vapor deposition method.
Examples of the conductive paste include silver paste, copper paste, and gold paste.
Examples of the conductive polymer include polythiophene, polypyrrole, and polyaniline.
Examples of metal nanowires include silver nanowires and gold nanowires.
Examples of carbon include carbon black and carbon nanotubes.
Copper, aluminum, nickel, chromium, zinc, gold, etc. can be used as the metal for forming the metal vapor deposition film. Among these, copper is preferable because of its low electrical resistance and low cost.
In the metal vapor deposition method, a thin metal film can be easily formed. The metal deposition method is not particularly limited. For example, plasma CVD method, laser CVD method, thermal CVD method, gas source CVD method, coating method, vacuum deposition method, sputtering method, reactive sputtering method, MBE (molecular beam epitaxy) Method, cluster ion beam method, ion plating method, plasma polymerization method (high frequency excitation ion plating method), and the like. Among these, the vacuum deposition method is preferable because the film forming speed is high and the cost is low.

  The surface of the conductive film 22 may be subjected to various surface treatments such as plasma treatment, ultraviolet irradiation treatment, corona treatment, and excimer light treatment. When the surface treatment is performed on the conductive film 22, the adhesion with the insulating film 23 is improved, and the contact resistance is lowered.

In the case of a film formed of a conductive paste, the thickness (average value) of the conductive film 22 is preferably 1 to 25 μm, and more preferably 5 to 15 μm.
In the case of a film containing a conductive polymer, the thickness (average value) of the conductive film 22 is preferably 0.1 to 5.0 μm, and more preferably 0.1 to 2.0 μm. .
In the case of a film containing metal nanowires, the thickness (average value) of the conductive film 22 is preferably 20 to 1000 nm, and more preferably 50 to 300 nm.
In the case of a film containing carbon, the thickness (average value) of the conductive film 22 is preferably 0.01 to 25 μm, and more preferably 0.1 to 15 μm.
In the case of a metal vapor deposition film, the thickness (average value) of the conductive film 22 is preferably 0.01 to 1.0 μm, and more preferably 0.05 to 0.3 μm.
If the thickness (average value) of the conductive film 22 is less than the lower limit, pinholes may be formed and disconnection may occur, and if the upper limit is exceeded, thinning becomes difficult.

As shown in FIG. 2, the pattern of the conductive film 22 in the present embodiment is a pattern having a plurality of strip-shaped Y-direction electrode portions 22 a having a constant width formed along the Y direction.
The width of the Y-direction electrode portion 22a is preferably 0.05 to 2 mm, and more preferably 0.1 to 1 mm. If the width of the Y-direction electrode portion 22a is equal to or larger than the lower limit value, disconnection can be prevented, and if the width is equal to or smaller than the upper limit value, position detection accuracy can be improved.
It is preferable that the space | interval (pitch) between adjacent Y direction electrode part 22a, 22a is 1-5 mm, and it is more preferable that it is 1.5-3 mm. If the interval between adjacent Y-direction electrode portions 22a, 22a is equal to or less than the upper limit value, the position detection accuracy of the three-dimensional sensor 1 can be improved. However, it is difficult to make the interval between adjacent Y-direction electrode portions 22a, 22a less than the lower limit value.

The insulating film 23 is an insulating resin film. The insulating film 23 can improve adhesion to the easily deformable layer 30 and can prevent deterioration (oxidation and corrosion) of the conductive film 22.
As the insulating resin, a thermosetting resin, a visible light curable resin, an electron beam curable resin, or an ultraviolet curable resin is used, and an ultraviolet curable resin is preferable in terms of small thermal shrinkage at the time of curing.
The insulating film 23 is preferably thin as long as insulation can be ensured. When screen printing is applied to the formation of the insulating film 23, the thickness (average value) is preferably 5 μm or more from the viewpoint of preventing pinhole formation. When ink jet printing is applied to the formation of the insulating film 23, the thickness (average value) is preferably set to 0.5 μm or more from the viewpoint of preventing pinhole formation.

Further, the Z-direction position detecting electrode body 20 includes a lead wiring 24a and an external connection terminal 24b (see FIG. 2).
The lead wiring 24a is a wiring for connecting the Y-direction electrode portion 22a and the external connection terminal 24b.
The width of the routing wiring 24a is preferably 20 to 100 μm, and more preferably 20 to 50 μm. If the width of the routing wiring 24a is equal to or greater than the lower limit value, disconnection of the routing wiring 24a can be prevented, and if the width is equal to or less than the upper limit value, the material used for the routing wiring 24a can be reduced, thereby reducing the cost.
The distance between adjacent routing wires 24a and 24a is preferably 20 to 100 μm, and more preferably 20 to 50 μm. If the distance between the adjacent routing wires 24a and 24a is equal to or smaller than the upper limit value, the three-dimensional sensor 1 can be easily downsized. However, it is difficult to make the interval between adjacent routing wires 24a, 24a less than the lower limit value.
The external connection terminal 24b is a terminal for connecting to an external circuit and is made of a conductive material. The external connection terminal 24b in the present embodiment is a rectangular conductive portion.

(Easy deformation layer)
The easily deformable layer 30 is a layer in which elastic particles 32 are dispersed in a foamed polymer 31. Further, the easily deformable layer 30 is formed so as to have a constant thickness, and does not have a convex portion such as a dot spacer.
The foamed polymer 31 is a polymer foamed to such an extent that it is compressed and deformed when pressed in the thickness direction. The foamed polymer 31 is obtained by foaming a base resin. Examples of the base resin include polyurethane, acrylic resin, and polyester.
The expansion ratio of the foamed polymer 31 is not particularly limited, but is preferably 1 to 30 times. If the expansion ratio of the foamed polymer 31 is equal to or higher than the lower limit value, the easily deformable layer 30 can be easily compressed and deformed, and if it is equal to or lower than the upper limit value, the recoverability of the easily deformable layer 30 can be sufficiently secured.

The elastic particles 32 are rubber or soft resin elastic particles, and have a function of improving the shape recoverability of the easily deformable layer 30.
Examples of the rubber constituting the elastic particles 32 include butadiene rubber, isoprene rubber, acrylic rubber, chloroprene rubber, and the like. Examples of the soft resin include polyurethane and polyamide. Among these, the elastic particles 32 are preferably polyurethane particles because they are easily available and appropriate elasticity can be obtained.
The elastic particles 32 may be composed of a plurality of particles having different elastic forces.
The volume average particle diameter of the elastic particles 32 is preferably 10 to 1000 μm. Here, the volume average particle diameter is a value measured by a laser diffraction method. The particle size distribution of the elastic particles 32 may be a single peak distribution or a distribution having a plurality of peaks. When the distribution has a plurality of peaks, it becomes easy to adjust the elastic force at the time of pressing and the restoring property after releasing the pressure.
The content ratio of the elastic particles 32 is preferably 0.1 to 20% by mass and more preferably 1 to 10% by mass when the easily deformable layer 30 is 100% by mass. When the content ratio of the elastic particles 32 is equal to or higher than the lower limit value, the recoverability of the easily deformable layer 30 is further increased.

  The thickness (average value) of the easily deformable layer 30 is preferably 250 μm or less, and more preferably 100 μm or less. On the other hand, in terms of securing the adhesive force, the thickness (average value) of the adhesive layer 40c is preferably 1 μm or more.

(XY-direction position detection electrode body)
The XY direction position detection electrode body 40 is an electrode body used when detecting positions in the X direction and the Y direction, and is provided on the front side of the easily deformable layer 30. The XY direction position detecting electrode body 40 used in the present embodiment is a laminated sheet in which a pair of electrode sheets (X direction electrode sheet 40a, Y direction electrode sheet 40b) are laminated.

The X-direction electrode sheet 40a includes an X-direction electrode substrate sheet 41, a patterned conductive film 42 formed on the surface 41a (first surface 41a) on the front side of the X-direction electrode substrate sheet 41, and conductive And an insulating film 43 covering the film 42.
As the base material sheet 41 for X direction electrodes, the thing similar to the base material sheet 21 for Z direction electrodes can be used. However, it is not necessary to be the same as the Z-direction electrode substrate sheet 21.
As the conductive film 42, the same film as the conductive film 22 can be used. However, the conductive film 22 is not necessarily the same.
As the insulating film 43, the same film as the insulating film 23 can be used. However, it is not necessary to be the same as the insulating film 23.

The pattern of the conductive film 42 in the present embodiment is a pattern having a plurality of strip-shaped X-direction electrode portions 42a formed along the X direction, as shown in FIG.
The width of the X-direction electrode portion 42a is preferably 2 to 7 mm, and more preferably 3 to 5 mm. If the width of the X-direction electrode portion 42a is equal to or greater than the lower limit value, disconnection can be prevented, and if the width is equal to or smaller than the upper limit value, position detection accuracy can be improved.
It is preferable that the space | interval of adjacent X direction electrode part 42a, 42a is 0.05-2 mm, and it is more preferable that it is 0.1-1 mm. If the distance between adjacent X-direction electrode portions 42a, 42a is equal to or smaller than the upper limit value, the three-dimensional sensor 1 can be easily downsized. However, it is difficult to make the interval between the adjacent X-direction electrode portions 42a, 42a less than the lower limit value.

The X-direction electrode sheet 40a includes a lead wiring 44a and an external connection terminal 44b (see FIG. 3). The lead wiring 44a is a wiring for connecting the X-direction electrode portion 42a and the external connection terminal 44b. The preferable width and interval of the routing wiring 44a are the same as those of the routing wiring 24a.
Examples of a method for forming the lead wiring 44a and the external connection terminal 44b include a method in which a conductive paste is screen-printed on the front side surface of the X-direction electrode base sheet 41 and then heated and cured.

The electrode sheet 40b for Y direction in this embodiment is bonded by the adhesive layer 40c to the surface 40e on the front side of the electrode sheet 40a for X direction. Moreover, the electrode sheet 40b for Y direction in this embodiment is the pattern shape formed in the surface 45a (1st surface 45a) of the front side of the base material sheet 45 for Y direction electrodes, and the base material sheet 45 for Y direction electrodes. A conductive film 46 and an insulating film 47 covering the conductive film 46 are included.
As the base sheet 45 for Y direction electrodes, the thing similar to the base sheet 21 for Z direction electrodes can be used. However, it is not necessary to be the same as the Z-direction electrode substrate sheet 21.
As the conductive film 46, the same film as the conductive film 22 can be used. However, the conductive film 22 is not necessarily the same.
As the insulating film 47, the same film as the insulating film 23 can be used. However, it is not necessary to be the same as the insulating film 23.

Similar to the pattern of the conductive film 22, the pattern of the conductive film 46 in the present embodiment is a pattern having a plurality of strip-shaped Y-direction electrode portions 46 a formed along the Y direction, as shown in FIG. 4.
The pattern of the conductive film 46 does not have to be the same as the pattern of the conductive film 22, and for example, the width may be different. When the pattern of the conductive film 46 is not the same as the pattern of the conductive film 22, the width of the conductive film 46 is preferably in the range of 0.05 to 2.0 mm, more preferably 0.05 to 1.0 mm. preferable.

The Y-direction electrode sheet 40b has a lead wiring 48a and an external connection terminal 48b (see FIG. 4). The lead wiring 48a is a wiring for connecting the Y-direction electrode portion 46a and the external connection terminal 48b. The preferable width and interval of the routing wiring 48a are the same as those of the routing wiring 24a.
Examples of a method for forming the lead wiring 48a and the external connection terminal 48b include a method in which a conductive paste is screen-printed on the front surface of the Y-direction electrode base sheet 45 and then cured by heating.
The external connection terminals 24b, 44b, and 48b are arranged so as not to overlap each other.

The adhesive layer 40c in the present embodiment may be composed of an adhesive or a double-sided pressure-sensitive adhesive tape.
As the adhesive, various adhesives such as a hot melt adhesive, a thermosetting adhesive, and a photocurable adhesive are used.
Examples of the hot melt adhesive include polyester hot melt adhesives, polyurethane hot melt adhesives, polyamide hot melt adhesives, ethylene-vinyl acetate copolymer hot melt adhesives, polyolefin hot melt adhesives, and the like. . Of these, polyester hot melt adhesives and polyurethane hot melt adhesives are preferable, and polyester hot melt adhesives are more preferable because they can be bonded at low temperatures and have excellent adhesive strength.
Examples of the thermosetting adhesive include an epoxy thermosetting adhesive, an acrylic thermosetting adhesive, and a silicone thermosetting adhesive.
Examples of the photocurable adhesive include acrylic photocurable adhesives and epoxy photocurable adhesives.

  The thickness (average value) of the adhesive layer 40c is preferably 25 μm or less, and more preferably 10 μm or less because the sensitivity and detection accuracy of X-direction position detection and Y-direction position detection are increased. On the other hand, in terms of securing the adhesive force, the thickness (average value) of the adhesive layer 40c is preferably 1 μm or more.

(Protective layer)
The protective layer 50 is a layer that is formed on the front side surface 40f of the XY direction position detecting electrode body 40 and protects the XY direction position detecting electrode body 40. In this embodiment, the protective layer 50 is bonded to the XY direction position detection electrode body 40 by the double-sided adhesive tape 51.
The protective layer 50 is made of an insulating resin or insulating elastic glass. As the insulating resin, an insulating thermoplastic resin, an insulating thermosetting resin, or an ultraviolet curable resin is used. The protective layer 50 may be decorated as necessary.
The thickness (average value) of the protective layer 50 is preferably 25 to 1000 μm. If the thickness (average value) of the protective layer 50 is equal to or greater than the lower limit value, the XY direction position detection electrode body 40 can be sufficiently protected, and if the thickness is equal to or smaller than the upper limit value, it can be easily bent when pressed. .

(Production method)
The manufacturing method of the three-dimensional sensor 1 includes a Z-direction position detection electrode body manufacturing step (first electrode body manufacturing step), an XY-direction position detection electrode body manufacturing step (second electrode body manufacturing step), and a foamable resin. The method which has a layer formation process, an easily deformable layer formation joining process, a protective layer bonding process, and a support plate bonding process is mentioned.

[Z-direction position detection electrode body manufacturing process]
In the Z-direction position detection electrode body manufacturing step in the present embodiment, the Y-direction electrode portion 22a, the routing wiring 24a, and the external connection terminal 24b are formed on the first surface 21a of the Z-direction electrode base sheet 21. In this step, the insulating film 23 is formed on the surface to obtain the Z-direction position detecting electrode body 20.
As a method of forming the Y-direction electrode portion 22a (patterned conductive film 22), a conductive film having no pattern is formed on at least a part of the surface 21a (first surface 21a) on the front side of the base sheet 21 for Z-direction electrode. There is a method of etching the conductive film so as to have a predetermined pattern after the formation.
As an etching method, a dry etching method such as a chemical etching method (wet etching method), laser etching, plasma etching using argon plasma or oxygen plasma, or ion beam etching can be applied. Among these, laser etching is preferable because the Y-direction electrode portion 22a can be formed finely.
Examples of a method for forming the routing wiring 24a and the external connection terminal 24b include a method in which a conductive paste is screen-printed on the first surface 21a of the Z-direction electrode base sheet 21 and then cured by heating.
As a method for forming the insulating film 23, various printing methods such as screen printing and ink jet printing can be applied.
After the insulating film 23 is formed, the periphery may be trimmed to make the Z-direction position detection electrode body 20 a predetermined shape.

[XY electrode position detection process]
The XY direction position detection electrode body preparation step includes an X direction electrode sheet preparation step, a Y direction electrode sheet preparation step, and an XY direction position detection electrode body formation step.
In the X-direction electrode sheet manufacturing step in the present embodiment, the X-direction electrode portion 42a, the routing wiring 44a, and the external connection terminal 44b are formed on the first surface 41a of the X-direction electrode base sheet 41, The electrode film 40a for X direction is obtained by forming the insulating film 43 in this.
In the Y-direction electrode sheet manufacturing step in the present embodiment, the Y-direction electrode portion 46a, the routing wiring 48a, and the external connection terminal 48b are formed on the first surface 45a of the Y-direction electrode base sheet 45, The Y-direction electrode sheet 40b is obtained by forming the insulating film 47 on the surface.
The formation method of the X direction electrode part 42a and the Y direction electrode part 46a is the same as the formation method of the Y direction electrode part 22a of the electrode body 20 for Z direction position detection.
The formation method of the routing wirings 44a and 48a and the external connection terminals 44b and 48b is the same as the formation method of the routing wiring 24a and the external connection terminals 24b of the Z-direction position detection electrode body 20.
After the insulating films 43 and 47 are formed, the periphery may be trimmed in order to make the X-direction electrode sheet 40a and the Y-direction electrode sheet 40b into a predetermined shape.
In the XY direction position detection electrode body forming step in the present embodiment, the X direction electrode sheet 40a and the Y direction electrode sheet 40b are bonded together by the adhesive layer 40c. In the present embodiment, specifically, the insulating film 43 of the X-direction electrode sheet 40a and the Y-direction electrode substrate sheet 45 of the Y-direction electrode sheet 40b are bonded together by the adhesive layer 40c.
For example, when the adhesive is a hot melt adhesive, an adhesive-containing liquid containing an adhesive is printed or coated on the exposed surface of the insulating film 43 of the X-direction electrode sheet 40a, and dried to form an adhesive layer. 40c is formed. Next, the Y-direction electrode substrate sheet 45 of the Y-direction electrode sheet 40b is overlapped and bonded to the adhesive layer 40c. At the time of bonding, the X-direction electrode sheet 40a, the adhesive layer 40c, and the Y-direction electrode sheet 40b are thermocompression bonded.
Alternatively, a hot-melt adhesive film may be prepared in advance, and the hot-melt adhesive film may be sandwiched between the X-direction electrode sheet 40a and the Y-direction electrode sheet 40b and thermocompression-bonded.
When the adhesive is a thermosetting adhesive, an adhesive-containing liquid containing an adhesive is printed or coated on the exposed surface of the insulating film 43 of the X-direction electrode sheet 40a, and dried as necessary. To form an uncured adhesive layer. Next, the Y-direction electrode substrate sheet 45 of the Y-direction electrode sheet 40b is overlaid on the uncured adhesive layer. Next, the X-direction electrode sheet 40a, the adhesive layer 40c, and the Y-direction electrode sheet 40b are heated, the adhesive is cured, and the adhesive layer 40c is formed and bonded.
When the adhesive is a photo-curable adhesive, an adhesive-containing liquid containing an adhesive is printed or coated on the exposed surface of the insulating film 43 of the X-direction electrode sheet 40a, and dried as necessary. To form an uncured adhesive layer. Next, the Y-direction electrode substrate sheet 45 of the Y-direction electrode sheet 40b is overlaid on the uncured adhesive layer. Next, the uncured adhesive layer is irradiated with ultraviolet rays or electron beams through the X-direction electrode sheet 40a or the Y-direction electrode sheet 40b, the adhesive is cured, and the adhesive layer 40c is formed and bonded.

[Foaming resin layer formation process]
The foamable resin layer forming step in this embodiment is a step of forming or forming a foamable resin layer by printing or coating foamable ink on one surface of the Z-direction position detecting electrode body 20. Specifically, the foamable resin layer forming step is a step of forming or forming a foamable resin layer by printing or coating foamable ink on the exposed surface of the insulating film 23 of the Z-direction position detecting electrode body 20.

The foamable ink is a liquid containing a base resin, a foaming agent, elastic particles, and a dispersion medium. The base resin and the elastic particles are as described above.
As the foaming agent, the foaming agent may be a physical foaming agent or a chemical foaming agent.
Examples of the physical blowing agent include aliphatic hydrocarbons such as propane, butane, pentane, isobutane, neopentane, isopentane, hexane and heptane; cycloaliphatic hydrocarbons such as cyclobutane and cyclopentane; methyl chloride, methylene chloride, dichloro Fluoromethane, chlorotrifluoromethane, dichlorodifluoromethane, chlorodifluoromethane, difluoromethane, trichlorofluoromethane, dichlorotetrafluoroethane, monochloropentafluoroethane, 1,1,1,2-tetrafluoroethane, 1-chloro-1, Halogenated hydrocarbons such as 1-difluoroethane, 1,2-dichloro-2,2,2-trifluoroethane, 1,1-dichloro-1-fluoroethane and the like can be mentioned. Carbon dioxide, nitrogen, and water can also be used as the physical foaming agent.
Examples of the chemical foaming agent include azodicarbonamide, dinitrosopentamethylenetetramine, azobisisobutyronitrile, sodium carbonate, sodium bicarbonate, potassium bicarbonate and the like.
Two or more of the above foaming agents can be mixed and used.

  As a dispersion medium, water, a hydrocarbon solvent, an alcohol solvent, an ether solvent, an ester solvent, a ketone solvent, or the like can be used, and two or more kinds may be used in combination.

A screen printing method, a metal mask printing method, a pad printing method, or the like can be applied as a foaming ink printing method.
As a foaming ink coating method, for example, various coating methods such as a gravure coating method, a roll coating method, a curtain flow coating method, a bar coating method, and a blade coating method can be applied.
The foamable ink may be dried after printing or coating of the foamable ink. However, in the foamable resin layer forming step, drying is preferably performed so that 5% by mass or more of the dispersion medium remains. When 5% by mass or more of the dispersion medium remains, the adhesion of the XY direction position detecting electrode body to the foamable resin layer can be improved in the easily deformable layer forming joining step.

[Easy Deformation Layer Formation Joining Process]
In the easily deformable layer forming joining step in the present embodiment, the XY direction position detecting electrode body 40 is laminated on the foamable resin layer, and then the Z direction position detecting electrode body 20 and the foamable resin layer are obtained by this lamination. And the XY direction position detecting electrode body 40 are heated. By this process, the foamable resin layer is foamed to form the easily deformable layer 30 and the easily deformable layer 30 is joined to the Z direction position detecting electrode body 20 and the XY direction position detecting electrode body 40 to obtain the Z direction position. A laminated body of the detection electrode body 20, the easily deformable layer 30, and the XY direction position detection electrode body 40 is obtained (see FIG. 5).
In the easily deformable layer forming joining step, it is preferable to use a foam molding die because the intended three-dimensional sensor 1 can be easily manufactured.
As shown in FIG. 5, when the foam molding die M is used, the laminate of the Z direction position detecting electrode body 20, the foamable resin layer 30a, and the XY direction position detecting electrode body 40 is used as the foam molding die. The foamable molding layer M is heated to foam the foamable resin layer 30a to form the easily deformable layer 30. At the same time, the easily deformable layer 30 is used for detecting the Z-direction position in the foamable mold M. The electrode body 20 and the XY direction position detecting electrode body 40 are joined.
The cavity C of the foam molding die M is preferably a shape that takes into account the volume increase due to foaming. That is, when the laminated body of the Z-direction position detecting electrode body 20, the foamable resin layer 30a, and the XY-direction position detecting electrode body 40 is disposed inside the cavity C, the Z-direction position detecting electrode body 20 or the XY direction It is preferable that the cavity C has such a size that a gap is generated between the position detection electrode body and the inner surface of the cavity C. The gap is adjusted so that the easily deformable layer 30 has a target thickness.
The heating temperature of the foam molding die M (that is, the heating temperature of the foamable resin layer 30a) is determined according to the types of the base resin and the foaming agent, and is, for example, in the range of 100 to 200 ° C.

[Protective layer bonding process]
The protective layer bonding step is a step of bonding the protective layer 50 to a laminate of the Z-direction position detecting electrode body 20, the easily deformable layer 30, and the XY-direction position detecting electrode body 40.
Specifically, in the protective layer bonding step, insulation of the XY direction position detection electrode body 40 that constitutes a laminated body of the Z direction position detection electrode body 20, the easily deformable layer 30, and the XY direction position detection electrode body 40. The protective layer 50 is bonded to the film 47 using the double-sided adhesive tape 51.

[Support plate pasting process]
A support board bonding process is a process of bonding the support board 10 to the laminated body of the electrode body 20 for Z direction position detection, the easily deformable layer 30, and the electrode body 40 for XY direction position detection.
Specifically, in the support plate bonding step, Z of the Z-direction position detection electrode body 20 constituting a laminated body of the Z-direction position detection electrode body 20, the easily deformable layer 30, and the XY-direction position detection electrode body 40. The support plate 10 is bonded to the directional electrode substrate sheet 21 using the double-sided pressure-sensitive adhesive tape 11. Thereby, the three-dimensional sensor 1 is obtained.

(how to use)
A usage example in which the three-dimensional sensor 1 is used as a capacitive touch pad of a notebook personal computer will be described.
The user of the personal computer moves his / her finger along the surface of the protective layer 50 in order to move the position in the X direction and the position in the Y direction of the pointer displayed on the monitor. At this time, the three-dimensional sensor 1 uses the XY direction position detection electrode body 40 to detect the position of the finger in the X direction and the position of the Y direction in the input area. Specifically, the positions of the fingers in the X direction and the Y direction are obtained by using the conductive films 42 and 46 to detect a change in capacitance in the X direction and a change in capacitance in the Y direction.
In addition, the user moves the position in the X direction and the position in the Y direction of the pointer to the selection area for executing the target processing, and then presses the input area of the three-dimensional sensor 1 with the finger. To do.
At this time, the XY direction position detecting electrode body 40 and the protective layer 50 are bent, and the easily deformable layer 30 is compressively deformed by the bending. Therefore, the distance between the Z-direction position detecting electrode body 20 and the X-direction electrode sheet 40a of the XY-direction position detecting electrode body 40 is shortened. At that time, a change in capacitance between the conductive film 22 and the conductive film 42, that is, a change in capacitance in the Z direction is detected, and a pressing amount is obtained from the change in capacitance. And the process according to the pressing amount is performed.

(Function and effect)
The easily deformable layer 30 constituting the three-dimensional sensor 1 of the above embodiment is a layer in which the elastic particles 32 are dispersed in the foamed polymer 31, and can be formed by a simple process such as printing or coating. In addition, since the easily deformable layer 30 plays the role of an adhesive at the same time as the easily deformable layer 30 is formed, the Z direction position detecting electrode body 20 and the XY direction position detecting electrode body 40 can be joined, and thus the three-dimensional sensor 1 is manufactured. It is possible to reduce the number of processes when performing.
Further, the easily deformable layer 30 in which the elastic particles 32 are dispersed in the foamed polymer 31 is easily compressed and deformed when pressed for input. When the pressing force is released, the easily deformable layer 30 is easily restored to the shape before pressing by the elastic force of the elastic particles 32.

(Other embodiments)
In addition, this invention is not limited to the said embodiment.
For example, in the above embodiment, the easily deformable layer is formed by printing or coating the foamable ink on the Z direction electrode substrate sheet of the Z direction position detecting electrode body, and the easily deformable layer is used for detecting the XY direction position. You may join an electrode body.
Further, the Z-direction position detection electrode body and the XY-direction position detection electrode body may not include an insulating film. For example, the insulating film of the Z direction position detecting electrode body may be omitted, and the easily deformable layer may be directly adhered to the base sheet and the conductive film of the Z direction position detecting electrode body.
Further, the widths of the X-direction electrode portion and the Y-direction electrode portion do not need to be constant. For example, the width may be periodically changed, and the thick portion and the narrower portion are alternately arranged. You may arrange in.
In the XY direction position detecting electrode body, the X direction electrode sheet having the X direction electrode portion is disposed on the protective layer side, and the Y direction electrode sheet having the Y direction electrode portion is disposed on the easily deformable layer side. It doesn't matter. In that case, the easily deformable layer is in contact with the Y-direction electrode substrate sheet of the Y-direction electrode sheet.
Further, both the X-direction electrode sheet and the Y-direction electrode sheet may be omitted, and only one of the X-direction electrode sheet and the Y-direction electrode sheet may be provided. In that case, you may arrange | position so that the electrically conductive film of the electrode body for Z direction position detection and the electrically conductive film of the electrode sheet for X directions or the electrode sheet for Y directions may oppose. Further, when the conductive film of the Z-direction position detecting electrode body and the conductive film of the X-direction electrode sheet or the Y-direction electrode sheet are opposed to each other, the insulating film is omitted and the easily deformable layer is replaced with the insulating film. You may make it also serve.
In the present invention, the first electrode body and the second electrode body may be bonded after forming the easily deformable layer in which the elastic particles are dispersed in the foamed polymer.
Moreover, in this invention, a protective layer and a support plate are arbitrary structures, As for a three-dimensional sensor, either one of a protective layer and a support plate may be abbreviate | omitted.

DESCRIPTION OF SYMBOLS 1 3D sensor 10 Support plate 11 Double-sided adhesive tape 20 Z direction position detection electrode body (1st electrode body)
21 Z-direction electrode base sheet 22 Conductive film 22a Y-direction electrode portion 23 Insulating film 24a Lead-out wiring 24b External connection terminal 30 Easy-deformable layer 30a Expandable resin layer 31 Expanded polymer 32 Elastic particle 40 XY-direction position detection electrode body (Second electrode body)
40a X-direction electrode sheet 40b Y-direction electrode sheet 40c Adhesive layer 41 X-direction electrode substrate sheet 42 Conductive film 42a X-direction electrode portion 43 Insulating film 44a Lead-out wiring 44b External connection terminal 45 Y-direction electrode substrate sheet 46 conductive film 46a Y-direction electrode portion 47 insulating film 48a lead-out wiring 48b external connection terminal 50 protective layer 51 double-sided adhesive tape

Claims (6)

A sheet-like first electrode body having a pattern-like conductive film, a sheet-like second electrode body having a pattern-like conductive film, and an easy arrangement between the first electrode body and the second electrode body A capacitive three-dimensional sensor comprising a deformable layer,
The capacitance-type three-dimensional sensor, wherein the easily deformable layer is a layer in which elastic particles are dispersed in a foamed polymer. The first electrode body is a sheet-like Z-direction position detection electrode body that detects a position in the Z-direction, and the Z-direction position detection electrode body includes a base sheet for the Z-direction electrode and the Z-direction electrode. It is an electrode sheet having a patterned conductive film provided on one surface of the base sheet,
The second electrode body is a sheet-like XY direction position detecting electrode body that detects a position in the XY direction, and the XY direction position detecting electrode body includes an X direction electrode sheet and a Y direction electrode sheet. The X-direction electrode sheet has an X-direction electrode base sheet and a patterned conductive film provided on one surface of the X-direction electrode base sheet. A directional electrode base sheet and a patterned conductive film provided on one surface of the Y directional electrode base sheet, and the conductive film pattern of the X directional electrode sheet extends along the X direction. It is a pattern which has two or more formed X direction electrode parts, and the pattern of the electrically conductive film of the electrode sheet for Y directions is a pattern which has two or more Y direction electrode parts formed along the Y direction. Capacitance type three-dimensional sensor.   The capacitive three-dimensional sensor according to claim 1 or 2, wherein the foamed polymer is polyurethane foam, and the elastic particles are polyurethane particles. A first electrode body manufacturing step of forming a sheet-shaped first electrode body by forming a patterned conductive film;
A second electrode body manufacturing step of forming a sheet-shaped second electrode body by forming a patterned conductive film;
A foamable resin layer forming step of forming or forming a foamable resin layer on one surface of the first electrode body by printing or coating a foamable ink containing a base resin, a foaming agent, elastic particles, and a dispersion medium;
After laminating the second electrode body on the foamable resin layer, the foamable resin layer is heated and foamed to form an easily deformable layer in which elastic particles are dispersed in the foamed polymer and the easily deformable layer is formed. A method of manufacturing a capacitive three-dimensional sensor, comprising: an easily deformable layer forming joining step for joining the first electrode body and the second electrode body. In the first electrode body manufacturing step, a patterned conductive film having a plurality of electrode portions formed along the X direction or the Y direction is formed on one surface of the base sheet for the Z direction electrode, and the Z direction A sheet-like Z-direction position detection electrode body for detecting the position of
In the second electrode body manufacturing step, an X direction electrode is formed by forming a patterned conductive film having a plurality of X direction electrode portions formed along the X direction on one surface of the X direction electrode base material sheet. Forming an electrode sheet for X direction for producing a sheet, and forming a patterned conductive film having a plurality of Y direction electrode portions formed along the Y direction on one surface of the base sheet for Y direction electrode; A sheet-like XY for detecting the position in the XY direction by bonding the Y-direction electrode sheet and the X-direction electrode sheet and the Y-direction electrode sheet, and preparing the Y-direction electrode sheet The method for manufacturing a capacitive three-dimensional sensor according to claim 4, further comprising an XY direction position detection electrode body forming step of forming a direction position detection electrode body.   The method for producing a capacitive three-dimensional sensor according to claim 4 or 5, wherein polyurethane is used as the base resin, and polyurethane particles are used as the elastic particles.

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