JP6216200B2 - Substrate processing equipment - Google Patents

Description

  This invention etches various substrates such as semiconductor wafers, glass substrates for liquid crystal display devices, glass substrates for plasma displays, optical disk substrates, magnetic disk substrates, magneto-optical disk substrates, photomask substrates, The present invention relates to a substrate processing apparatus applied for performing liquid processing such as cleaning and drying.

  For example, in a semiconductor device manufacturing process, a process of cleaning a semiconductor wafer (hereinafter simply referred to as “wafer”) is one of important processes.

  An apparatus for performing a cleaning process includes a spin chuck that horizontally holds and rotates a wafer, and a blocking plate that is disposed opposite to the upper surface of the wafer held by the spin chuck. After cleaning the top surface of the wafer by discharging a processing solution such as chemicals or pure water from the supply port provided in the central portion of the shield plate, the shield plate is placed close to the top surface of the wafer after the cleaning to shut off the wafer. In a state where an inert gas such as nitrogen gas is supplied to the space between the plates and filled with nitrogen gas, the wafer is rotated at a high speed by a spin chuck, and the pure water adhering to the wafer is shaken off and dried. (For example, refer to Patent Document 1). Filling the space between the wafer and the shielding plate with nitrogen gas prevents the atmosphere containing pure water or oxygen from entering the space and prevents the generation of watermarks due to the reaction of pure water, oxygen, and silicon. It is for suppressing.

  However, in the apparatus having such a configuration, after the cleaning of the wafer is completed, the processing liquid may undesirably fall on the wafer from the supply port, and the processing may fail. In addition, in this type of apparatus, it has also been proposed to prevent such a failure by providing a so-called suck back valve in the processing liquid supply piping system and slightly pulling back the processing liquid in the vicinity of the supply port after the end of discharge.

Japanese Patent Laid-Open No. 10-41261

  However, when the suck back valve is used in this way, the number of parts increases accordingly, and the suck back valve needs to be controlled, so that the configuration of the substrate processing apparatus becomes complicated and causes an increase in cost. Further, a general suck-back valve has a limited amount of processing liquid to be pulled back, and can only pull back a limited amount of processing liquid in the vicinity of the supply port. For this reason, if the pressure near the supply port decreases for some reason and becomes negative pressure, the processing liquid in the piping system, etc. reaches the vicinity of the supply port and drops from the supply port even if it is pulled back by the suck back valve. There was a risk that it would end up.

  SUMMARY OF THE INVENTION An object of the present invention is to provide a substrate processing apparatus that can reliably prevent an undesired drop of a processing solution with a simple configuration. Another object of the present invention is to provide a substrate processing apparatus that can reliably prevent an undesired drop of the processing liquid even when the vicinity of the supply port becomes a negative pressure.

In order to achieve the above object, the invention according to claim 1 is a substrate processing apparatus for supplying a processing liquid to an upper surface of a substrate (W) for processing, and a holding mechanism (1) for holding the substrate, and the holding mechanism. A processing liquid supply line (4) for supplying the processing liquid to a supply port (252a) for discharging the processing liquid onto the upper surface of the substrate (W) located above the substrate (W) held in (1). 252) and the processing liquid supply conduit (4, 252) communicating with the supply port (252a), and the tip 7a opens at a position lower than the height of the supply port (252a). A reverse flow prevention mechanism (60, 63) for preventing a reverse flow in the direction of the processing liquid supply pipe (4, 252) in the pull-back pipe (7). The mechanism (60, 63) has a container (60) for storing liquid. For example, a substrate processing apparatus is characterized in that positions the front end (7a) of the pull-back piping submerged liquid in the container (60) (7).

  The treatment liquid may be pure water or functional water such as carbonated water, ionic water, reducing water (hydrogen water), or magnetic water.

In addition, the alphanumeric characters in parentheses represent corresponding components in the embodiments described later. The same applies hereinafter.
[Operation / Effect] According to the above-described configuration, the pullback pipe (7) communicates with the processing liquid supply pipe (4, 252), and the tip (7a) is at a position lower than the supply port (252a). When the supply of the processing liquid from the processing liquid supply pipe (4, 252) is stopped, the processing liquid in the processing liquid supply pipe (4, 252) is discharged through the pullback pipe (7) according to the principle of siphon. Undesirable dropping of the processing liquid onto the substrate (W) can be reliably prevented.

Further , according to the above configuration, even if the space between the shielding plate 2 and the upper surface of the wafer W becomes negative pressure, the backflow of the atmosphere to the pull-back pipe is prevented, which may adversely affect the processing of the substrate. Absent.

Further , according to the above configuration, even when the space between the blocking plate 2 and the upper surface of the wafer W becomes negative pressure, the tip (7a) is sealed with the container (60), and is returned to the pull-back pipe (7). Backflow of the atmosphere is prevented.

In the substrate processing apparatus described in the present reverse flow blocking mechanism (60, 63) is Ru can be configured from the valve (63) provided in the pull-out return pipe (7). According to this configuration, even if the space between the blocking plate 2 and the upper surface of the wafer W becomes negative pressure, the backflow of the atmosphere to the pull-back pipe (7) is prevented by closing the valve (63).

According to a second aspect of the present invention, in a substrate processing apparatus for processing by supplying a processing liquid to the upper surface of a substrate (W), a holding mechanism (1) for holding the substrate and a substrate held by the holding mechanism (1) A processing liquid supply line (4, 252) for supplying the processing liquid to a supply port (252a) for discharging the processing liquid onto the upper surface of the substrate (W) located above (W); and the supply port A pull-back pipe (7) branched from the middle of the processing liquid supply pipe (4, 252) communicating with (252a) and having a tip 7a opened at a position lower than the height of the supply port (252a). Provided with a backflow prevention mechanism (60, 63) for preventing a backflow in the direction of the processing liquid supply pipe (4, 252) in the pullback pipe (7), and the backflow prevention mechanism (60, 63) made from the valve (63) provided in the pull-back pipe (7), wherein Is a substrate processing apparatus, characterized in that the check valve is opened by the supply pressure of the processing solution during processing solution supply.

The invention of claim 4 Symbol mounting, in the substrate processing apparatus for processing by supplying a processing liquid to the upper surface of the substrate (W), a holding mechanism for holding the substrate (1), held by the holding mechanism (1) A treatment liquid supply line (4, 252) for supplying the treatment liquid to a supply port (252a) for discharging the treatment liquid onto the upper surface of the substrate (W) located above the substrate (W); A pull-back pipe (7) branched from the middle of the processing liquid supply pipe (4, 252) communicating with the opening (252a) and having a tip 7a opened at a position lower than the height of the supply opening (252a); And a reverse flow blocking mechanism (60, 63) for blocking a reverse flow in the direction of the processing liquid supply pipe (4, 252) is provided in the pull-back pipe (7). The reverse flow blocking mechanism (60, 63) the pullback pipe made of a valve (63) provided in (7), wherein Is a substrate processing apparatus, characterized in that the negative pressure in the supply port near the time of substrate processing a check valve to be closed.

According to a fifth aspect of the present invention, in a substrate processing apparatus for processing by supplying a processing liquid to the upper surface of a substrate (W), a holding mechanism (1) for holding the substrate and a substrate held by the holding mechanism (1) A processing liquid supply line (4, 252) for supplying the processing liquid to a supply port (252a) for discharging the processing liquid onto the upper surface of the substrate (W) located above (W); and the supply port A pull-back pipe (7) branched from the middle of the processing liquid supply pipe (4, 252) communicating with (252a) and having a tip 7a opened at a position lower than the height of the supply port (252a). The substrate processing apparatus is characterized in that a tip portion (7a) of the pull-back pipe has a throttle portion for narrowing the inner diameter of the pipe. With this configuration, the amount of processing liquid flowing from the pullback pipe (7) can be reduced, and the processing liquid supply pipe (4, 252) and the pullback pipe (7) can be easily filled with liquid. Realized reliably.

  According to the substrate processing apparatus of the present invention, the undesired dropping of the processing liquid can be reliably prevented with a simple configuration, and the undesired dropping of the processing liquid even if the vicinity of the supply port becomes negative pressure. Can be reliably prevented.

It is a figure which shows typically the structure of the substrate processing apparatus which concerns on 1st Embodiment of this invention. It is a block diagram which shows the electric constitution of the said substrate processing apparatus. It is a figure which shows typically the structure of the substrate processing apparatus which concerns on 2nd Embodiment of this invention. It is a figure which shows typically the structure of the substrate processing apparatus which concerns on 2nd Embodiment of this invention. It is a figure which shows typically the structure of the substrate processing apparatus which concerns on 3rd Embodiment of this invention.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.
<<<< first embodiment >>
<< Overall configuration of substrate processing apparatus >>

  FIG. 1 is a diagram schematically showing a configuration of a substrate processing apparatus according to a first embodiment of the present invention. This substrate processing apparatus is an apparatus that supplies a processing liquid to the upper surface of a wafer W that is an example of a substrate, cleans the wafer W one by one, and performs a process of drying the cleaned wafer W. The substrate processing apparatus is provided with a substantially bottomed cylindrical cup C2 for performing substrate processing, a rotation drive mechanism 14, a lifting drive mechanism 23, an extendable shaft 27, etc., which will be described later, in a chamber outer box C1 constituting a processing chamber. Configured. A spin chuck 1 is provided in the cup C2 to hold and rotate the wafer W substantially horizontally. The spin chuck 1 includes, for example, a spin shaft 11 extending in a substantially vertical direction, a spin base 12 attached to an upper end of the spin shaft 11, and a plurality of chuck pins disposed on a peripheral portion of the spin base 12. 13, and the wafer W is held in a horizontal state by sandwiching the end face of the wafer W in cooperation with a plurality of chuck pins 13. Further, a rotation drive mechanism 14 including a drive source such as a motor is coupled to the spin shaft 11 outside the cup C2, and the wafer W is held horizontally by the chuck pins 13 from the rotation drive mechanism 14. By inputting a rotational force to the spin shaft 11, the wafer W can be rotated in a substantially horizontal plane.

  A drainage exhaust port C21 is formed at the bottom of the cup C2, and a pipe C22 is connected to the drainage facility and exhaust facility of the factory via a gas-liquid separation mechanism (not shown). Similarly, a drainage exhaust port C11 is formed at the bottom of the chamber outer box C1, and a pipe C12 is connected to a factory drainage facility and exhaust facility via a gas-liquid separation mechanism (not shown).

  Above the spin chuck 1, a disc-shaped blocking plate 2 provided substantially horizontally is provided. The blocking plate 2 is formed to have a diameter that is substantially the same as or slightly larger than that of the wafer W, and is a cylindrical support that is disposed on an axis common to the spin axis 11 (rotation axis of the wafer W). It is connected to the lower end of the shaft 21. An arm 22 is provided above the blocking plate 2, and the support shaft 21 is rotatably supported in a state where it is suspended from the tip of the arm 22. The support shaft 21 is provided with a rotation driving mechanism (not shown) so that the blocking plate 2 can be driven to rotate in synchronization with the wafer W. An elevating drive mechanism 23 is installed and fixed at the bottom of the chamber outer box C1 and on the side of the cup C2. The elevating drive mechanism 23 is connected to the arm 22 via the telescopic shaft 27. The elevating drive mechanism 23 can elevate the arm 22 by elongating and retracting the telescopic shaft 27 to bring the blocking plate 2 close to and away from the upper surface of the wafer W held by the spin chuck 1. ing.

  An opening 24 is formed at the center of the blocking plate 2, and the hollow portion of the support shaft 21 communicates with the opening 24. A pipe member 25 having a first dry gas flow passage 251 and a liquid flow passage 252 is inserted into the hollow portion of the support shaft 21 in a non-contact state with the support shaft 21. The distal end (lower end) of the tube member 25 is located at the same height as the lower surface of the blocking plate 2 in the opening 24. The distal ends of the first dry gas flow passage 251 and the liquid flow passage 252 are opened at the distal end surface of the pipe member 25 to form a first dry gas supply port 251a and a liquid supply port 252a, respectively. That is, the first dry gas supply port 251 a and the liquid supply port 252 a are located at the same height as the lower surface of the blocking plate 2. The first dry gas supply port 251a and the liquid supply port 252a are first on the upper surface of the wafer W, as will be described later, with the blocking plate 2 positioned above the wafer W held by the spin chuck 1. Dry gas and processing liquid (that is, cleaning liquid and pure water) can be discharged.

The first dry gas supply pipe 3 is connected to the first dry gas flow passage 251. The first dry gas supply pipe 3 is selectively supplied with nitrogen gas (N ₂ ) or nitrogen gas (IPA + N ₂ ) containing IPA (isopropyl alcohol) vapor as a first dry gas via a valve 31 or a valve 32. It comes to be supplied. The nitrogen gas supplied to the first dry gas supply pipe 3 or the nitrogen gas containing IPA vapor passes through the first dry gas flow passage 251 and passes through the first dry gas flow passage 251 at the first dry gas supply port 251a. Are discharged toward the center of the upper surface of the wafer W held by the spin chuck 1.

  A liquid supply pipe 4 is connected to the liquid flow path 252, and the liquid supply pipe 4 is connected to a chemical supply source (a utility in the factory) (not shown) via valves 41 and 42, and the cleaning liquid and One of pure water (DIW) is selectively supplied. The liquid supply pipe 4 and the liquid flow path 252 constitute a continuous processing liquid supply pipe that reaches the liquid supply port 252a, and the blocking plate 2 is used as a spin chuck for the cleaning liquid and pure water supplied to the liquid supply pipe 4. The upper surface of the wafer W held by the spin chuck 1 from the liquid supply port 252a at the tip of the liquid flow path 252 through the liquid flow path 252 while being positioned above the wafer W held by the It is discharged toward the center of the. Although not shown, a liquid supply port that discharges cleaning liquid and pure water toward the center of the “lower surface” of the wafer W, a liquid flow passage, a liquid supply pipe, a valve, and the like associated therewith are provided on the wafer. It is provided in the same manner as the above configuration on the W upper surface side.

Further, a space 26 having a ring-shaped cross section is formed between the inner peripheral surface of the support shaft 21 and the pipe member 25, and the second drying gas is supplied from the second drying gas supply pipe 5 to the space 26. As described above, nitrogen gas (N ₂ ) is supplied. The nitrogen gas supplied to the space 26 is directed from the second dry gas supply port 26 a at the lower end surface of the space 26 between the periphery of the opening 24 and the tube member 25 toward the upper surface of the wafer W held by the spin chuck 1. Discharged. That is, the space 26 between the inner peripheral surface of the support shaft 21 and the pipe member 25 is a second dry gas flow passage through which nitrogen gas as the second dry gas flows, and this second dry gas flow passage. 26 is discharged from the second dry gas supply port 26a, and surrounds the position where the first dry gas is supplied on the upper surface of the wafer W and the position where the liquid is supplied from the liquid supply port 252a. Supplied to the area. A valve 51 for controlling the supply of nitrogen gas to the second dry gas flow passage 26 is interposed in the middle of the second dry gas supply pipe 5.

  The configuration of the liquid supply pipe 4 and its periphery will be described in more detail. The liquid supply pipe 4 is disposed and fixed along the surface of the arm 22 from the distal end side of the arm 22 connected to the liquid flow path 252 to the base side of the arm 22 (the telescopic shaft 27 side). After further extending, the branching portion 4A branches in two directions. One of the branches is connected to a supply source of pure water (not shown) via a valve 41, and the other is connected to a supply source of cleaning liquid (not shown) via a valve 42. In FIG. 1, the liquid supply pipe 4 is described as extending horizontally from the base side of the arm 22. However, if the liquid supply pipe 4 is finally connected to a supply source of pure water and cleaning liquid, the direction of extension is shown. Does not matter.

  Further, the liquid supply pipe 4 is provided with a branch part 4B in the middle of the downstream side of the branch part 4A and in the vicinity of the base part side of the arm 22, and a return pipe 7 is branched from the branch part 4B. The pull-back pipe 7 extends downward along the surface of the telescopic shaft 27 from the branch portion 4B, and the tip 7a of the pull-back pipe 7 opens at the bottom in the chamber outer box C1. Here, the positional relationship between the pullback pipe 7 and the liquid discharge port 252a is fixed, and the tip 7a of the pullback pipe 7 is at the height of the liquid supply port 252a (this In the embodiment, it is installed so as to be at a height position lower than the same as the height of the lower surface of the blocking plate 2. As shown in an enlarged view in a circle in FIG. 1, the tip 7a of the pull-back pipe 7 has a narrowed shape that is narrowed down in both the inner diameter and outer shape of the pipe as compared with the portion other than the tip 7a. This restricts the flow rate of the slow leak that flows through the pull-back pipe 7 during a time other than during the pull-back operation as will be described later, thereby reducing the consumption of the processing liquid and pulling back in order to realize the principle of the siphon described later. This is to realize and maintain a state in which the inside of the pipe 7 and the liquid supply pipe 4 is filled with the liquid.

FIG. 2 is a block diagram showing an electrical configuration of the substrate processing apparatus. The substrate processing apparatus further includes a control device 6 including a microcomputer, for example. The control device 6 controls the operations of the rotation drive mechanism 14, the rotation drive mechanism (not shown) of the shielding plate 2 and the elevation drive mechanism 23 according to a predetermined program for processing the wafer W. Controls the opening / closing of the valves 31, 32, 41, 42, 51.
<< Overall Operation of Substrate Processing Apparatus >>
<1. Cleaning with cleaning liquid>

  When the wafer W to be processed is delivered to the spin chuck 1, first, a process for cleaning the wafer W is performed. In this cleaning process, for example, the elevation drive mechanism 23 is controlled so that the arm 22 is set to a height at which the arm 22 waits upward away from the spin chuck 1 (hereinafter referred to as a raised height). 252a is located above the wafer W. Then, the rotation drive mechanism 14 is controlled, and the valve 42 is opened while the wafer W is rotated at a predetermined low rotational speed, and the cleaning liquid is supplied from the liquid supply port 252a to the upper surface of the rotating wafer W. Is supplied. The cleaning liquid supplied to the upper surface of the wafer W receives centrifugal force due to the rotation of the wafer W and flows from the supply position toward the periphery of the wafer W. Thereby, the cleaning liquid spreads over the entire upper surface of the wafer W, and the upper surface of the wafer W is cleaned by the cleaning liquid.

Examples of cleaning liquids include chemical liquids such as hydrofluoric acid, hydrochloric acid, ammonia and their aqueous hydrogen peroxide solutions, pure water, and functional water such as carbonated water, ionic water, reducing water (hydrogen water), or magnetic water. Can do. The cleaning liquid is supplied to the upper surface of the wafer W from the liquid supply port 252 a of the liquid flow path 252.
<2. Rinse with pure water>

After the cleaning with the cleaning liquid, pure water is immediately supplied to the upper surface of the wafer W so that the wafer W does not dry, and a rinsing process is performed to wash away the cleaning liquid adhering to the surface of the wafer W after the chemical cleaning. . The pure water for the rinsing process is supplied to the upper surface of the wafer W from the liquid supply port 252a. Specifically, when the cleaning process is completed, the arm 22 does not move at the raised height above the wafer W, and the rotation is performed while the blocking plate 2 and the liquid supply port 252a are positioned above the wafer W. The drive mechanism 14 is controlled to keep the wafer W rotationally driven at a relatively low speed. In this state, the valve 41 is controlled and opened to supply pure water to the upper surface of the wafer W from the liquid supply port 252a. Is done. The pure water supplied to the upper surface of the wafer W spreads on the upper surface of the wafer W and flows out from the periphery of the wafer W by centrifugal force.
<3. Pure water shake-off>

  After rinsing with pure water, the wafer W is rotated at a high speed to shake off the pure water adhering to the surface and dry it. Specifically, when the rinsing process is finished, the valve 41 is controlled and closed, the supply of pure water from the liquid supply port 252a to the upper surface of the wafer W is stopped, and at the same time, the elevation drive mechanism 23 is driven, The arm 22 descends from a height above the wafer W to a height at which the blocking plate 2 approaches the wafer W. The distance between the wafer W and the blocking plate 2 at this time is, for example, about 1 mm to 5 mm. Then, the rotation drive mechanism 14 is controlled while maintaining a distance from the blocking plate 2 to rotate the wafer W at a relatively high speed, and the pure water adhering to the upper surface of the wafer W is spun off from the periphery of the wafer W by centrifugal force. . At the same time, the blocking plate 2 is also driven to rotate in the same direction as the wafer W. Further, during the swing-off drying, the valves 31 and 51 are controlled so that nitrogen as a first drying gas is supplied from the first drying gas supply port 251a and the second drying gas supply port 26a to the upper surface of the wafer W, respectively. Gas and nitrogen gas as the second drying gas are supplied.

During the shake-off drying process, the pure water droplets that have been shaken off collide with the inner surface of the cup C2 to generate mist. For example, the cup C2 has an atmosphere containing pure water mist. However, the upper surface of the wafer W is covered with the shielding plate 2, the gap between the wafer W and the shielding plate 2 is as small as about 1 mm to 5 mm, and the nitrogen gas supplied to the upper surface of the wafer W from the gap is the wafer W. Therefore, the surface of the wafer W does not come into contact with the atmosphere containing pure water mist in the cup C2, and the surface of the wafer W is kept clean after being cleaned. It is.
<4. Function of pull-back piping 7>

At the time of rinsing with pure water described above, when the valve 41 is opened, pure water from the pure water supply source passes through the valve 41, passes through the liquid supply pipe 4, and is discharged from the liquid supply port 252a to allow rinsing. It becomes. At this time, a slow leak in which the pure water flows through the branch portion 4B of the liquid supply pipe 4 to the pull-back pipe 7 is also performed. The pure water that has flowed due to the slow leak flows from the tip 7a to the bottom of the chamber outer box C1, is discharged from the drainage outlet C11 to the outside of the apparatus, is sent to a factory drainage facility, and is discarded. Since this discarded pure water does not contribute to the rinsing process, it is desirable that the amount be as small as possible. For this reason, the distal end 7a of the pull-back pipe 7 has a narrowed shape in which both the inner diameter and outer shape of the pipe are narrowed compared to the portion other than the distal end 7a. In other words, the liquid supply pipe 4 and the pull-back pipe 7 are pipes having a diameter of 4 mm, but the tip 7 a has a throttle shape in which a small-diameter opening having a diameter of 0.7 mm is formed. As a result, the flow resistance of the pull-back pipe 7 is increased, and the flow rate flowing to the pull-back pipe 7 is significantly smaller than the flow rate flowing to the liquid supply port 252a during the rinsing process, thereby reducing the consumption of processing liquid and rinsing. The amount of pure water that does not contribute to treatment is reduced.
When the rinsing process is completed and the process moves to the shake-off drying process, the valve 41 is closed and the supply of pure water to the liquid supply pipe 4 is stopped. Then, since the water pressure applied to the liquid supply pipe 4 disappears, the discharge of pure water from the liquid supply port 252a stops. At this time, the processing liquid supply pipe (the liquid supply pipe 4 and the liquid flow path 252) and the pullback pipe 7 communicate with each other, and the tip 7a of the pullback pipe 7 is in this state (that is, the height position of the arm 22). Is lower than the height of the liquid supply port 252a (that is, the height of the lower surface of the blocking plate 2) in a state where the processing liquid is supplied from the liquid supply port 252a during the rinsing process. In position. Therefore, when the water pressure applied to the liquid supply pipe 4 disappears, the portion of the processing liquid supply pipe (the liquid supply pipe 4 and the liquid flow path 252) downstream from the branch part 4B of the liquid supply pipe 4 and the return pipe 7 The pure water inside falls from the tip 7a of the pull-back pipe 7 to the bottom of the chamber outer box C1 by the siphon principle. As a result, all the liquid in the liquid supply pipe 4 is removed, and thereafter, the processing liquid does not undesirably fall onto the wafer W from the liquid supply port 252a, and the processing does not fail.

  Here, in order for the siphon principle to work, the liquid supply pipe 4 and the pullback pipe 7 on the downstream side of the branch portion 4B must be an upper body filled with the liquid, but the tip 7a of the pullback pipe 7 has a small diameter. Because of the narrowed shape, the liquid supplied to the inside of the pull-back pipe 7 and the liquid supply pipe 4 is difficult to be discharged therefrom, and a state filled with the liquid is easily realized and maintained.

Further, after the rinsing process with pure water, the wafer W is rotated at a high speed to perform a shake-off drying process in which pure water adhering to the surface is shaken off and dried. The wafer W and the shielding plate 2 are driven to rotate at a relatively high speed, and the space between the shielding plate 2 and the upper surface of the wafer W is negative depending on conditions such as the supply amount of the first drying gas. There is a possibility of pressure. However, according to this configuration, since the processing liquid (pure water) does not remain in the downstream portion of the liquid supply pipe 4 from the branching portion 4B, the space between the shielding plate 2 and the upper surface of the wafer W is temporarily negative. Even in this case, the processing liquid does not undesirably fall onto the wafer W from the liquid supply port 252a, and the processing does not fail. In addition, according to this configuration, there is no need to provide and control a mechanism such as a so-called suck back valve, and the device configuration can be realized at a low cost.
<< Modification of First Embodiment >>

  In the first embodiment, the positional relationship between the return pipe 7 and the liquid discharge port 252a is fixed, and the tip 7a of the return pipe 7 is connected to the liquid supply port 252a regardless of the height position of the arm 22. However, the present invention is not limited to this. For example, even if the height of the tip 7a of the pull-back pipe 7 changes according to the elevation of the arm 22, the liquid supply It suffices if the tip 7a is at a lower position when the discharge of the liquid from the mouth 252a is stopped. However, if the height difference is too small, the liquid in the liquid supply pipe 4 or the like may not be sufficiently removed. For example, if the pipe has a pipe diameter of about 4 mm, the height difference should be set to about 120 mm or more. .

Moreover, in the said 1st Embodiment, although it was set as the structure which rotates the interruption | blocking board 2 at the time of a shake-off drying process, the interruption | blocking board 2 does not necessarily need to rotate and a rotation drive mechanism may be abbreviate | omitted. The first dry gas supply port 251a and the liquid supply port 252a are set at the same height as the lower surface of the blocking plate 2, but are not necessarily the same. For example, the first dry gas supply port 251a and the liquid supply port The supply port 252a may be set at a position higher than the lower surface of the blocking plate 2.
<<< Second Embodiment >>
<< Configuration of Substrate Processing Apparatus >>

  3 and 4 are views schematically showing the configuration of the substrate processing apparatus according to the second embodiment of the present invention. In the following description with reference to this figure, the same or corresponding parts as those in the first embodiment are denoted by the same or corresponding reference numerals, the description thereof will be omitted, and different parts will be described.

The pull-back pipe 7 has a certain length in the height direction, and is installed so that the tip 7 a having a small diameter of the pull-back pipe 7 also moves up and down as the arm 22 moves up and down. A liquid container 60 is attached and fixed to the base portion to which the telescopic shaft 27 is fixed. The lower part of the pullback pipe 7 is inserted into the liquid container 60, and the liquid flowing out from the pullback pipe 7 flows into the liquid container 60. A drain pipe 61 is attached to the side surface of the intermediate height of the liquid container 60. When the liquid flows into the liquid container 60, the drain pipe 61 discharges excess liquid to the bottom of the chamber outer box C1, and keeps the liquid level at the height of the drain pipe 61. When the arm 22 shown in FIG. 4 is raised most (when the blocking plate 2 is separated from the wafer W and supplies the liquid to the wafer W), the tip 7a of the pull-back pipe 7 is higher than the liquid level. When the arm 22 shown in FIG. 3 is lowered most (when the blocking plate 2 approaches the surface of the wafer W and performs the wafer W swing-off drying process), the tip 7a of the pull-back pipe 7 is at the liquid level. It is set so that it may be located below (tip 7a of pull-back piping 7 sinks below the liquid level).
<< Function of the pull-back pipe 7 >>

  Also in the second embodiment, the pull-back pipe 7 has the same function as that of the first embodiment described above. That is, in this embodiment, when the rinsing process is finished and the process moves to the shake-off drying process, if the valve 41 is closed and the supply of pure water to the liquid supply pipe 4 is stopped, the liquid supply pipe 4 is applied. Since the water pressure disappears, the discharge of pure water from the liquid supply port 252a stops. At this time, the processing liquid supply pipe (the liquid supply pipe 4 and the liquid flow path 252) and the pullback pipe 7 communicate with each other, and the tip 7a of the pullback pipe 7 is in this state (that is, the height position of the arm 22). Is lower than the height of the liquid supply port 252a (that is, the height of the lower surface of the blocking plate 2) in a state where the processing liquid is supplied from the liquid supply port 252a during the rinsing process. In position. Therefore, when the water pressure applied to the liquid supply pipe 4 disappears, the portion of the processing liquid supply pipe (the liquid supply pipe 4 and the liquid flow path 252) downstream from the branch part 4B of the liquid supply pipe 4 and the return pipe 7 The pure water inside falls from the tip 7a of the pull-back pipe 7 to the bottom of the chamber outer box C1 by the siphon principle. As a result, all the liquid in the liquid supply pipe 4 is removed, and thereafter, the processing liquid does not undesirably fall onto the wafer W from the liquid supply port 252a, and the processing does not fail.

  Further, after the rinsing process with pure water, the wafer W is rotated at a high speed to perform a shake-off drying process in which pure water adhering to the surface is shaken off and dried. The wafer W is driven to rotate at a relatively high speed, and the space between the shielding plate 2 and the upper surface of the wafer W can be negative depending on conditions such as the supply amount of the first drying gas. There is sex. However, according to this configuration, there is no processing liquid (pure water) in the downstream portion of the liquid supply pipe 4 from the branching portion 4B, so that the space between the blocking plate 2 and the upper surface of the wafer W is assumed to be negative. Even if this occurs, the processing liquid does not undesirably fall onto the wafer W from the liquid supply port 252a, and the processing does not fail. In addition, according to this configuration, there is no need to provide and control a mechanism such as a so-called suck back valve, and the device configuration can be realized at a low cost.

After that, if the space between the blocking plate 2 and the upper surface of the wafer W becomes negative pressure, in the first embodiment, the atmosphere in the chamber outer box C1 is pulled back from the tip 7a of the pull-back pipe 7. There is a possibility that the liquid flows back into the pipe 7 and reaches the surface of the wafer W through the liquid supply pipe 4 and the liquid supply port 252a. The atmosphere inside the chamber outer box C1 is not necessarily clean, and may contain dust, mist of the chemical component returned from the drainage exhaust port C11, and the like, which may adversely affect the processing of the wafer W. There is sex. However, in the second embodiment, when the arm 22 is set to the lowest position for the swing-off drying process, the tip 7a of the pull-back pipe 7 is located below the liquid level in the liquid container 60, and the tip 7a is Seal with water. Accordingly, when performing the swing-off drying process, the shielding plate 2 is brought close to the upper surface of the wafer W, and the wafer W is rotated at a relatively high speed, so that the space between the shielding plate 2 and the upper surface of the wafer W becomes negative pressure. Even so, the pressure to raise the water in the liquid container 60 to the liquid supply pipe 4 is not reached, and the atmosphere in the chamber outer box C1 does not reach the surface of the wafer W, which may adversely affect the processing. Absent.
<<< Third Embodiment >>>
<< Configuration of Substrate Processing Apparatus >>

  FIG. 5 is a diagram schematically showing the configuration of the substrate processing apparatus according to the third embodiment of the present invention. In the following description with reference to this figure, the same or corresponding parts as those in the first embodiment are denoted by the same or corresponding reference numerals, the description thereof will be omitted, and different parts will be described.

Although the tip 7a of the pull-back pipe 7 is set at a height position lower than the height of the liquid supply port 252a at the time of swing-off drying after rinsing with pure water, this is the same as in the first embodiment. In the third embodiment, a check valve 63 is further provided at the tip 7a. The check valve 63 has a container 65 having a conical surface 64 formed on the upper upstream side and an open lower side, and the tip 7 a of the pull-back pipe 7 is connected to the upper end of the conical surface 64. A spherical valve body 66 is contained in the container 65, and is normally closed by being pressed against the conical surface 65 with a predetermined pressure (described later) by a spring (not shown).
<< Function of the pull-back pipe 7 >>

  In this embodiment, pure water is discharged from the liquid supply port 252a during the rinsing process, and the valve body 66 of the check valve 63 also resists the pressure of the spring by the supply pressure of pure water in the pull-back pipe 7. The check valve 63 is pushed down and the check valve 63 is opened, and pure water flows into the check valve 63 through the pull-back pipe 7. The pure water that has flowed into the check valve 63 flows down from the open bottom to the bottom of the chamber outer box C1.

  When the rinsing process is finished and the process moves to the shake-off drying process, if the valve 41 is closed and the supply of pure water to the liquid supply pipe 4 is stopped, the water pressure applied to the liquid supply pipe 4 is lost. The discharge of pure water from the liquid supply port 252a stops. At this time, the supply pressure of pure water from the direction of the valve 41 to the pull-back pipe 7 disappears, but the tip 7a of the pull-back pipe 7 is at a height position lower than the height of the liquid supply port 252a. In addition, the water pressure at which pure water tends to escape from the tip 7a of the pull-back pipe 7 works due to the siphon principle. The predetermined pressure at which the spring of the check valve 63 presses the spherical valve body 66 against the conical surface 65 is set lower than that so that the check valve 63 is opened by the “water pressure at which pure water is about to escape”. The Accordingly, at this time, similarly to the second embodiment, the processing liquid supply pipe (the liquid supply pipe 4 and the liquid flow path 252) is in the portion downstream of the branch portion 4B of the liquid supply pipe 4 and in the return pipe 7. Due to the siphon principle, the pure water passes through the check valve 63 from the tip 7a of the pull-back pipe 7 and falls to the bottom in the chamber outer box C1. As a result, all the liquid in the liquid supply pipe 4 is removed, and thereafter, the processing liquid does not undesirably fall onto the wafer W from the liquid supply port 252a, and the processing does not fail.

Further, if the space between the blocking plate 2 and the upper surface of the wafer W becomes negative pressure, the check valve 63 is closed, so that the atmosphere in the chamber outer box C1 flows into the pull-back pipe 7 and flows into the wafer W. It never reaches the surface.
<< Modification of Third Embodiment >>

  In the third embodiment described above, the check valve 63 is opened by the water pressure at which pure water is about to escape from the tip 7a of the pull-back pipe 7 by the siphon principle when shifting to the swing-off drying process. It was configured as follows. Instead, the above-described spring is not used, and the spherical valve body 66 is made of, for example, a float made of a light material, and this occurs when the space between the blocking plate 2 and the upper surface of the wafer W becomes negative pressure. The valve body 66 may be lifted by negative pressure and sucked to the conical surface 65, and the check valve 63 may be closed. In this case, when the rinsing process is completed and the process moves to the shake-off drying process, the valve 41 is closed and the supply of pure water to the liquid supply pipe 4 is stopped, but the wafer W is not yet rotated, or When the rotational speed is low, such negative pressure does not occur, so the check valve 63 opens and the downstream side of the branch 4B of the liquid supply pipe 4 in the processing liquid supply pipe (liquid supply pipe 4 and liquid flow path 252). Due to the siphon principle, the pure water in the part and the pull-back pipe 7 passes through the check valve 63 from the tip 7a of the pull-back pipe 7 and falls to the bottom in the chamber outer box C1.

  In addition, when it is desired to arbitrarily control the operation of the return pipe 7 including the above-described operation, a general air valve or the like may be used instead of the check valve 63. In that case, the control device 6 controls the air valve. The present invention is not limited to the above-described embodiment, and various design changes can be made within the scope of the matters described in the claims.

DESCRIPTION OF SYMBOLS 1 Spin chuck 2 Blocking board 3 1st dry gas supply pipe 4 Liquid supply pipe 5 2nd dry gas supply pipe 6 Control apparatus 7 Pull-back pipe 7a Tip 24 Opening 25 Pipe member 252 Liquid flow path 252a Liquid supply port 26 Second dry gas Flow path 26a Second dry gas supply port 31 Valve 32 Valve 41 Valve 42 Valve 51 Valve 60 Liquid container 63 Check valve W Wafer

Claims (7)

In a substrate processing apparatus for processing by supplying a processing liquid to the upper surface of a substrate,
A holding mechanism for holding the substrate;
A processing liquid supply line for supplying the processing liquid to a supply port for discharging the processing liquid to the upper surface of the substrate located above the substrate held by the holding mechanism;
A return pipe that branches off from the middle of the treatment liquid supply line communicating with the supply port and has a tip opened at a position lower than the height of the supply port;
Equipped with a,
A backflow prevention mechanism for preventing backflow in the direction of the processing liquid supply pipe is provided in the pullback pipe.
The substrate processing apparatus , wherein the backflow prevention mechanism includes a container for storing a liquid, and the tip of the pull-back pipe is positioned below the water surface of the liquid in the container . In a substrate processing apparatus for processing by supplying a processing liquid to the upper surface of a substrate,
A holding mechanism for holding the substrate;
A processing liquid supply line for supplying the processing liquid to a supply port for discharging the processing liquid to the upper surface of the substrate located above the substrate held by the holding mechanism;
A return pipe that branches off from the middle of the treatment liquid supply line communicating with the supply port and has a tip opened at a position lower than the height of the supply port;
With
A backflow prevention mechanism for preventing backflow in the direction of the processing liquid supply pipe is provided in the pullback pipe .
The backflow prevention mechanism consists of a valve provided in the pull-back pipe,
The substrate processing apparatus according to claim 1, wherein the valve is a check valve that is opened by a supply pressure of the processing liquid when the processing liquid is supplied . The substrate processing apparatus according to claim 2,
The valve is a substrate processing apparatus according to claim check valve der Rukoto to be closed by the negative pressure in the supply port near the time of substrate processing. In a substrate processing apparatus for processing by supplying a processing liquid to the upper surface of a substrate,
A holding mechanism for holding the substrate;
A processing liquid supply line for supplying the processing liquid to a supply port for discharging the processing liquid to the upper surface of the substrate located above the substrate held by the holding mechanism;
A return pipe that branches off from the middle of the treatment liquid supply line communicating with the supply port and has a tip opened at a position lower than the height of the supply port;
With
A backflow prevention mechanism for preventing backflow in the direction of the processing liquid supply pipe is provided in the pullback pipe.
It said backflow prevention mechanism is Ri Na from the valve provided on the pull-back pipe,
The valve is a substrate processing apparatus according to claim check valve der Rukoto to be closed by the negative pressure in the supply port near the time of substrate processing. In a substrate processing apparatus for processing by supplying a processing liquid to the upper surface of a substrate,
A holding mechanism for holding the substrate;
A processing liquid supply line for supplying the processing liquid to a supply port for discharging the processing liquid to the upper surface of the substrate located above the substrate held by the holding mechanism;
A return pipe that branches off from the middle of the treatment liquid supply line communicating with the supply port and has a tip opened at a position lower than the height of the supply port;
With
Wherein the distal end of the pullback pipe, a substrate processing apparatus which is characterized that you have an aperture stop portion squeezing small inner diameter of the pipe. The substrate processing apparatus according to claim 5 ,
A substrate processing apparatus , wherein a reverse flow prevention mechanism for preventing a reverse flow in the direction of the processing liquid supply pipe is provided in the pull-back pipe . The substrate processing apparatus according to claim 6 ,
Said backflow prevention mechanism is Rukoto group Itasho management apparatus, characterized in that the valve provided on the pull-back pipe.

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