JP6294748B2 - Cutting equipment - Google Patents

Description

  The present invention relates to a cutting apparatus.

  2. Description of the Related Art A cutting apparatus that cuts a workpiece such as a semiconductor wafer, a resin substrate, a ceramic substrate, or a glass plate by cutting means supported by a portal frame standing on an apparatus base is widely known (for example, Patent Document 1). reference). The cutting device includes blade detection means for detecting the position in the cutting feed direction of the tip (lower end) of the cutting blade, and includes a reference position (height of the holding surface of the chuck table) and a position detected by the blade detection means. The tip position of the cutting blade is determined based on the difference (see, for example, Patent Document 2). The blade detection means is provided upright on the chuck table base on which the chuck table is mounted, on the side of the chuck table that holds the workpiece.

JP 2001-298002 A JP 2001-298001 A

  However, in the cutting apparatus in which the blade detection means is provided upright on the chuck table base, the chuck table base moves along the cutting feed direction, so that the chuck is affected by the influence of heat such as heat generated by the drive unit and heat generated by the rotating shaft. There is a possibility that the accuracy of the blade detecting means becomes unstable due to the temperature change of the table base itself. In particular, in an apparatus having two spindles, it is necessary to provide two blade detection means for speeding up the detection. When the two blade detection means are erected on the chuck table base, the footprint of the apparatus main body is enlarged. Directly connected to Further, in the cutting apparatus of Patent Document 1 in which the blade detection unit is erected from the apparatus base and penetrates the upper surface of the apparatus main body, since the blade detection unit penetrates the upper surface of the apparatus main body, the cutting fluid is contained in the apparatus main body. There is a risk of inflow.

  The present invention has been made in view of the above, and an object of the present invention is to provide a cutting apparatus capable of stabilizing the detection accuracy of a cutting blade by a blade detecting unit.

In order to solve the above-described problems and achieve the object, the present invention provides a chuck table having a holding surface for holding a workpiece, and a cutting feed direction arranged on the apparatus base and parallel to the holding surface. Cutting feed means to be moved, a portal frame with an opening that stands on the apparatus base across the cutting feed means and allows movement of the chuck table, and a gate that is movable in the cutting feed direction perpendicular to the holding surface A cutting apparatus comprising: cutting means for cutting a work piece fixed to a mold frame with a cutting blade; and blade detection means for detecting a position of the cutting blade in the cutting feed direction; The blade detection means includes a support member that is fixed to a column portion of a portal frame that is erected on the apparatus base and extends to the side of the chuck table, and a light emitting portion that is attached to the tip of the support member. A blade detection mechanism having a fine light-receiving portion is composed of, the cutting means has a cutting fluid supply means for supplying a cutting fluid to the workpiece, cutting feed means, on both sides of the cutting feed direction of the chuck table The support member is protected from attachment of the cutting fluid by a bellows portion that is fixed and covers the cutting feeding means, and a bowl-shaped water case that extends along the cutting feeding means and receives the cutting fluid guided by the bellows portion. The blade detection mechanism is supported by penetrating the side wall of the water case .

  Moreover, in the said cutting device, it is preferable that a support member penetrates in the side wall of a water case, and the clearance gap between a water case and a support member is sealed by the seal ring fitted by the outer periphery of the support member.

  According to the present invention, since the blade detecting means is fixed to the column portion of the portal frame standing on the apparatus base and extends to the side of the chuck table, the blade detecting means is fixed to the movable portion such as the chuck table base. Compared with the case where it is done, the influence of heat, such as heat generation of a drive part and heat generation of a rotating shaft, becomes small. Therefore, according to the present invention, it is possible to stabilize the detection accuracy of the cutting blade by the blade detecting means.

FIG. 1 is a diagram illustrating a configuration example of a cutting apparatus according to the first embodiment. FIG. 2 is a diagram illustrating an apparatus base of the cutting apparatus according to the first embodiment. FIG. 3 is a diagram illustrating a cutting feed unit of the cutting apparatus according to the first embodiment. FIG. 4 is a diagram illustrating a blade detection unit fixed to the apparatus base of the cutting apparatus according to the first embodiment. FIG. 5 is a diagram illustrating a configuration example of blade detection means of the cutting apparatus according to the first embodiment. 6 is a cross-sectional view of the seal ring of the blade detecting means shown in FIG. FIG. 7 is a diagram illustrating a state in which the support member of the blade detection unit is loosely penetrated into the side wall of the water case of the cutting apparatus according to the first embodiment. FIG. 8 is a diagram illustrating a state in which the support member of the blade detection unit is loosely penetrated into the side wall of the water case of the cutting apparatus according to the second embodiment.

  DESCRIPTION OF EMBODIMENTS Embodiments (embodiments) for carrying out the present invention will be described in detail with reference to the drawings. The present invention is not limited by the contents described in the following embodiments. The constituent elements described below include those that can be easily assumed by those skilled in the art and those that are substantially the same. Furthermore, the structures described below can be combined as appropriate. In addition, various omissions, substitutions, or changes in the configuration can be made without departing from the scope of the present invention.

Embodiment 1
FIG. 1 is a diagram illustrating a configuration example of a cutting apparatus according to the first embodiment. FIG. 2 is a diagram illustrating an apparatus base of the cutting apparatus according to the first embodiment. FIG. 3 is a diagram illustrating a cutting feed unit of the cutting apparatus according to the first embodiment. FIG. 4 is a diagram illustrating a blade detection unit fixed to the apparatus base of the cutting apparatus according to the first embodiment. FIG. 5 is a diagram illustrating a configuration example of blade detection means of the cutting apparatus according to the first embodiment. 6 is a cross-sectional view of the seal ring of the blade detecting means shown in FIG. FIG. 7 is a diagram illustrating a state in which the support member of the blade detection unit is loosely penetrated into the side wall of the water case of the cutting apparatus according to the first embodiment. In FIG. 4, one of the two blade detection means 90 is omitted.

  A cutting apparatus 1-1 illustrated in FIG. 1 is a processing apparatus that performs a cutting process on the workpiece W. As shown in FIG. 1 to FIG. 2, the cutting device 1-1 includes a cassette elevator 10, a chuck table 20, a cutting means 30, a cutting feed means 40, a portal frame 50, an index feed means 60, The cutting feed means 70, the cleaning means 80, and the blade detection means 90 are configured. In the present embodiment, the cutting device 1-1 performs a cutting process on the workpiece W attached to the opening of the annular frame F via the attaching tape T.

  Here, the workpiece W is not particularly limited, but a semiconductor wafer or an optical device wafer on which a semiconductor device or an optical device is formed, an inorganic material substrate, a ductile resin material substrate, a ceramic substrate, a glass plate, a liquid crystal display driver, or the like. Various processing materials such as various electronic parts. In the present embodiment, the workpiece W is formed in a disk shape. Further, the cutting feed direction is perpendicular to the rotation axis of the cutting blade 31, parallel to the holding surface 20 a of the chuck table 20, and perpendicular to the vertical direction. The index feed direction is the direction of the rotation axis of the cutting blade 31 and is a direction orthogonal to the vertical direction. The cutting feed direction is a direction perpendicular to the holding surface 20a of the chuck table 20, and is a vertical direction. In this embodiment, the cutting feed direction is the direction corresponding to the X-axis direction shown in the figure, the index feed direction is the direction corresponding to the Y-axis direction shown in the figure, and the cutting feed direction is equivalent to the Z-axis direction shown in the figure. Direction.

  The cassette elevator 10 supports the apparatus main body 2 so that the cassette 11 in which a plurality of workpieces W are accommodated can be moved up and down in the vertical direction.

  The chuck table 20 is formed in a disc shape, and has a holding surface 20 a that holds the workpiece W. Further, the chuck table 20 is movable relative to the apparatus main body 2 in the cutting feed direction. The holding surface 20a is an upper end surface in the vertical direction of the chuck table 20, and is formed flat with respect to a horizontal plane. The holding surface 20a is made of, for example, porous ceramic, and sucks and holds the workpiece W by a negative pressure of a vacuum suction source (not shown). The chuck table 20 includes a plurality of frame chucks 21. The plurality of frame chucks 21 sandwich and fix the annular frame F.

  Further, as shown in FIGS. 3 and 4, the chuck table 20 is fixed on a cutting feed moving base 41 (described later) of the cutting feed means 40 via the θ-axis rotating means 22. A waterproof cover 23 is provided below the chuck table 20 in the cutting and feeding direction. The waterproof cover 23 is a cover for preventing a cutting fluid supplied from a nozzle 34 described later of the cutting means 30 from entering the apparatus main body 2.

  The cutting means 30 is for cutting the workpiece W held on the chuck table 20 with the cutting blade 31. As shown in FIG. 1, the cutting means 30 is fixed to the portal frame 50 through an index feed means 60 and a cut feed means 70 so as to be movable in a cut feed direction orthogonal to the holding surface 20a. Two cutting means 30 are arranged across the chuck table 20 in the index feed direction. The cutting means 30 includes a cutting blade 31, a spindle 32, a housing 33, a nozzle 34, and an imaging means 35. The cutting blade 31 is a cutting grindstone formed in an extremely thin disk shape and in an annular shape. The spindle 32 is detachably mounted with a cutting blade 31. The housing 33 has a drive source such as a motor, and supports the spindle 32 so as to be rotatable around a rotation axis in the indexing feed direction. The housing 33 is supported by a cut feed moving base 71 described later of the cut feed means 70. The nozzle 34 is a cutting fluid supply means for supplying a cutting fluid to the workpiece W. The image pickup means 35 picks up an image of a planned cutting line (also referred to as a street) of the workpiece W held on the chuck table 20, and has a camera having an image pickup device such as a CCD (Charge Coupled Device) image sensor. It is.

  The cutting feed means 40 is for moving the chuck table 20 in the cutting feed direction. The cutting feed means 40 includes, for example, a pulse motor, a ball screw, a guide rail, and the like, and moves the cutting feed moving base 41 relative to the apparatus main body 2 in the cutting feed direction. That is, the cutting feed movement base 41 moves the chuck table 20 relative to the apparatus main body 2 in the cutting feed direction.

  Here, the apparatus base 3 supports the cutting feed means 40 and the portal frame 50. The device base 3 is disposed in the device main body 2. As shown in FIG. 2, the device base 3 is formed in a cross shape extending in the cutting feed direction and the index feed direction as viewed in the vertical direction. A portal frame 50 is erected on the apparatus base 3 and a cutting feed means 40 is provided. The apparatus base 3 is composed of, for example, a casting block cast in a cross shape. For this reason, the device base 3 is less likely to be distorted by the influence of heat.

  Moreover, the cutting feed means 40 is protected from attachment of cutting fluid by the bellows part 42 and the water case 43, as shown in FIGS.

  The bellows portion 42 is a so-called bellows having a repeated structure of mountain folds and valley folds. Two bellows portions 42 are disposed across the waterproof cover 23 in the cutting feed direction, and are fixed to both ends of the waterproof cover 23 in the cutting feed direction. The bellows portion 42 has one end fixed to the waterproof cover 23 and the other end fixed to the apparatus main body 2 in the cutting feed direction. That is, the bellows portion 42 is fixed to both side portions of the chuck table 20 in the cutting feed direction and covers the cutting feed means 40 as viewed in the cutting feed direction. The bellows portion 42 can expand and contract in the cutting feed direction as the chuck table 20 moves in the cutting feed direction. The bellows portion 42 guides the cutting fluid to the water case 43 by flowing the cutting fluid supplied from the nozzle 34 of the cutting means 30 downward from both ends in the indexing feed direction.

  As shown in FIG. 1, the water case 43 is provided in an opening formed on the upper surface of the apparatus main body 2. The water case 43 is detachably fixed to the apparatus body 2. The water case 43 is made of, for example, stainless steel. The water case 43 is covered with a waterproof cover 23 and a bellows portion 42. The water case 43 is formed in a rectangular shape whose width in the cutting feed direction is wider than the index feeding direction in accordance with the movement range of the chuck table 20 in the cutting feed direction when viewed in the vertical direction. That is, the water case 43 is formed in a rectangular shape that extends along the cutting feed means 40.

  Further, as shown in FIGS. 3 to 4, the water case 43 has a side wall 43 a surrounding the chuck table 20, two side walls 43 a facing the index feed direction, and the cassette elevator 10 side in the cutting feed direction as viewed in the vertical direction. A bottom 43b extending from each of the side walls 43a toward the chuck table 20 and an inner wall 43c standing from the bottom 43b so as to face the side wall 43a are integrally formed. That is, the water case 43 is formed in a U-shape when viewed in the vertical direction, and is formed in a bowl shape that receives the cutting fluid guided by the bellows portion 42. The water case 43 discharges the received cutting fluid to the outside by a drain pipe 43d connected to the bottom 43b. That is, the water case 43 receives the cutting fluid guided from the bellows portion 42 and protects the cutting feed means 40 from the adhesion of the cutting fluid.

  An insertion hole 43e through which a support member 91 (described later) of the blade detection unit 90 penetrates is formed in each of the two side walls 43a facing each other in the indexing and feeding direction. As shown in FIG. 4, the insertion hole 43 e is formed to be larger than the outer diameter of a support portion 91 a described later of the support member 91. In addition, the hole diameter of the insertion hole 43e is preferably a size that does not interfere with the support portion 91a even if the water case 43 is distorted due to the influence of heat from the cutting feed means 40 or the like.

  The portal frame 50 supports the cutting means 30 so as to be movable in each of the index feed direction and the cut feed direction. As shown in FIG. 2, the portal frame 50 is erected on the apparatus base 3 across the cutting feed means 40 in the index feed direction. The portal frame 50 is constituted by, for example, a casting block cast in a portal shape with the same material as that of the device base 3. For this reason, the portal frame 50 is less likely to be distorted by the influence of heat. The portal frame 50 has a pair of pillars 50a erected from the apparatus base 3 with an interval in the indexing feed direction, and a beam horizontally mounted between the upper ends in the vertical direction of the pair of pillars 50a. Part 50b. The portal frame 50 is surrounded by a pair of pillars 50a and beams 50b, and has an opening 50c that is wider than the waterproof cover 23 in the indexing feed direction and opened above the holding surface 20a of the chuck table 20 in the vertical direction. I have. That is, the portal frame 50 includes an opening 50c that allows the chuck table 20 to move in the cutting feed direction.

  The index feeding means 60 is for moving the cutting means 30 in the index feeding direction. The index feed means 60 includes, for example, a pulse motor, a ball screw, a guide rail, and the like, and moves the index feed moving base 61 relative to the apparatus main body 2 in the index feed direction. The index feeding means 60 is supported by the portal frame 50 and supports the cut feeding means 70.

  The cutting feed means 70 moves the cutting means 30 in the cutting feed direction. The cutting feed means 70 includes, for example, a pulse motor, a ball screw, a guide rail, and the like, and moves the cutting feed moving base 71 relative to the apparatus main body 2 in the cutting feed direction. The cutting feed means 70 is supported by the index feed means 60 and supports the cutting means 30. That is, the cutting feed moving base 71 fixes the cutting means 30 to the portal frame 50 via the index feeding means 60 so as to be movable in the cutting feed direction. Further, the cutting feed means 70 detects the relative position of the cutting means 30 with respect to the apparatus main body 2 by a cutting feed position detection means including, for example, a linear scale and a sensor.

  The cleaning means 80 is for holding the workpiece W cut by the cutting means 30 with the spinner table 81 for cleaning.

  The blade detection means 90 detects the tip end portion (the lower end portion in the vertical direction) of the cutting blade 31 in the cutting feed direction after the reference position is set. Two blade detection means 90 are arranged with the chuck table 20 in between in the indexing feed direction. As shown in FIG. 5, the blade detection unit 90 includes a support member 91 and a blade detection mechanism 92. Here, the reference position is the position of the upper end surface of the chuck table 20 in the vertical direction, that is, the position of the holding surface 20a in the vertical direction. Further, the reference position is set, for example, by detecting the position in the vertical direction when the holding surface 20a and the cutting blade 31 are brought into contact with each other, by the cutting feed position detecting means.

  As shown in FIG. 4, the support member 91 is detachably fixed to the column portion 50a of the portal frame 50 by a fastening member S1 such as a bolt or a screw. The support member 91 extends in parallel in the horizontal direction from the column part 50a side to the chuck table 20 side along the indexing feed direction. That is, the support member 91 is fixed to the column portion 50 a of the portal frame 50 erected on the apparatus base 3 and extends to the side of the chuck table 20. In this embodiment, the support member 91 is extended to the side of the side wall 43a in which the insertion hole 43e was formed. The support member 91 includes a support portion 91a that supports the blade detection mechanism 92 and an attachment hole 91b to which the fastening member S1 is attached.

  The support portion 91a is formed in a columnar shape extending from one end portion of the support member 91 on the water case 43 side in the indexing feed direction. The support portion 91 a is loosely inserted into the insertion hole 43 e of the side wall 43 a of the water case 43. That is, the support member 91 passes through the side wall 43 a of the water case 43 and supports the blade detection mechanism 92. A seal ring R is fitted on the outer periphery of the support portion 91a.

  The seal ring R is made of an elastic member such as rubber having elasticity. The seal ring R is a so-called V seal. As shown in FIGS. 4 to 6, the seal ring R is formed in an annular shape, and has an annular lip Ra that is in watertight contact with the side wall 43 a. The annular lip Ra is slidably in close contact with the side wall 43a. Further, it is preferable that the annular lip Ra follows the distortion of the side wall 43a and is in close contact with the side wall 43a even when the water case 43 is distorted by the influence of heat from the cutting feed means 40 or the like. The mounting hole Rb of the seal ring R is formed smaller than the outer diameter of the support portion 91a. The seal ring R is stretched so that the diameter of the mounting hole Rb is larger than the outer diameter of the support portion 91a, and is fitted to the support portion 91a. For this reason, as shown in FIG. 7, the gap between the water case 43 and the support member 91 is sealed by the seal ring R fitted to the outer periphery of the support member 91.

  The blade detection mechanism 92 detects the tip position (lower end position in the vertical direction) of the cutting blade 31 in the cutting feed direction. As shown in FIG. 5, the blade detection mechanism 92 has a light emitting portion 92a and a light receiving portion 92b that are attached to the tip end portion of the support member 91, that is, the support portion 91a, and are opposed to each other in the indexing and feeding direction. The blade detection mechanism 92 detects the tip position of the cutting blade 31 when the cutting blade 31 enters between the light emitting unit 92a and the light receiving unit 92b in the cutting and feeding direction. The blade detection mechanism 92 is fixed to the support base 92c. The support base 92c is detachably attached to the support portion 91a. A cover 92d that covers the light emitting portion 92a and the light receiving portion 92b is provided on the support base 92c so as to be opened and closed via a hinge 92e. The cover 92d is for preventing attachment of cutting fluid and cutting waste. The cover 92d is opened when the tip position of the cutting blade 31 is detected, and is closed when the workpiece W is cut.

  Next, the basic operation of the cutting apparatus 1-1 configured as described above will be described. In the present embodiment, it is assumed that cutting is performed on the workpiece W on which the planned cutting lines are formed in a lattice shape. In this embodiment, the reference position and the position in the cutting feed direction (tip detection position) when the tip position of the cutting blade 31 is detected by the blade detection mechanism 92 are measured in advance, and the reference position and tip detection are performed. Based on the difference from the position, the tip position of the cutting blade 31 detected by the blade detection mechanism 92 in the cutting process is corrected so as to correspond to the reference position.

  The cutting device 1-1 takes out the workpiece W accommodated in the cassette 11 based on an instruction input by an operator, and then conveys it to the chuck table 20. Here, in the cutting apparatus 1-1, the tip position of the cutting blade 31 is detected by the blade detection mechanism 92. Further, in the cutting apparatus 1-1, even if the water case 43 is distorted (about several tens of μm) due to the influence of heat from the cutting feed means 40, the insertion hole 43e and the support portion 91a do not interfere with each other.

  The cutting device 1-1 injects cutting fluid from the nozzle 34, rotates the cutting blade 31 at high speed, cuts and feeds it by the cutting feed means 70, and cuts and feeds it by the cutting feed means 40. To cut. Here, in the cutting apparatus 1-1, the cutting fluid is guided from the bellows portion 42 to the water case 43, received by the water case 43, and then discharged from the drain pipe 43d to the outside. Further, in the cutting apparatus 1-1, even if the water case 43 is distorted due to the influence of heat from the cutting feed means 40 or the like, the annular lip Ra of the seal ring R follows the distortion, and the water ring is sealed by the seal ring R. 43 and the support member 91 are sealed, and leakage of the cutting fluid into the apparatus main body 2 is suppressed.

  The cutting apparatus 1-1 cuts all the scheduled cutting lines in the same direction, then rotates the chuck table 20 according to the uncut scheduled cutting line by the θ-axis rotating means 22, and ejects the cutting fluid from the nozzle 34. Meanwhile, the cutting blade 31 performs cutting on an uncut cutting line. Here, in the cutting apparatus 1-1, the gap between the water case 43 and the support member 91 is sealed by the seal ring R, and leakage of the cutting fluid into the apparatus main body 2 is suppressed.

  The cutting apparatus 1-1 cuts the workpiece W with the cutting blade 31, and then transports the workpiece W from the chuck table 20 to the spinner table 81 of the cleaning unit 80. Wash and dry. Further, the cutting device 1-1 transports the cleaned and dried workpiece W from the spinner table 81 to the cassette 11 and stores it in the cassette 11.

  Here, in the cutting apparatus 1-1, for example, when a predetermined number of workpieces W are cut, when the material of the workpiece W is changed, or the device type of the workpiece W is changed. At this time, the blade detection mechanism 92 detects the tip position of the cutting blade 31 and corrects the tip position of the cutting blade 31 to correspond to the reference position.

  As described above, according to the cutting apparatus 1-1 according to the first embodiment, the apparatus base 3 and the portal frame 50 are made of a casting that is less likely to be distorted by the influence of heat, and are erected from the apparatus base 3. The support member 91 of the blade detection means 90 is fixed to the pillar portion 50 a of the portal frame 50, and the support member 91 is allowed to pass through the insertion hole 43 e of the side wall 43 a of the water case 43. That is, according to the cutting apparatus 1-1 according to the first embodiment, the blade detection unit 90 is fixed to the portal frame 50 that is less likely to be distorted by the influence of heat, and interference of the water case 43 with the blade detection unit 90 is suppressed. . For this reason, even if distortion (several tens of μm) occurs in the water case 43 due to the influence of heat from the cutting feed means 40 or the like, the water case 43 can be prevented from interfering with the blade detection means 90. Therefore, according to the cutting device 1-1 according to the first embodiment, there is an effect that the detection accuracy of the cutting blade 31 by the blade detection unit 90 can be stabilized.

  Further, according to the cutting apparatus 1-1 according to the first embodiment, the seal ring R is fitted to the support portion 91a that penetrates the insertion hole 43e of the water case 43, and follows the distortion caused by the heat of the water case 43. As described above, the annular lip Ra of the seal ring R is brought into contact with the side wall 43a, thereby sealing the gap between the water case 43 and the support portion 91a in a watertight manner. For this reason, according to the cutting apparatus 1-1 which concerns on Embodiment 1, the leakage of the cutting fluid from the penetration hole 43e into the apparatus main body 2 can be suppressed.

  Further, according to the cutting apparatus 1-1 according to the first embodiment, by fixing the blade detection unit 90 to the portal frame 50, a member for fixing the blade detection unit 90 is disposed in the apparatus main body 2. Therefore, an increase in the footprint (installation area) of the cutting device 1-1 itself can be suppressed.

[Embodiment 2]
Next, the cutting apparatus 1-2 according to the second embodiment will be described with reference to the drawings. FIG. 8 is a diagram illustrating a state in which the support member of the blade detection unit is loosely penetrated into the side wall of the water case of the cutting apparatus according to the second embodiment.

  The cutting apparatus 1-2 according to the second embodiment is the cutting apparatus 1 according to the first embodiment described above, in that the support member 91 of the blade detecting unit 90 is allowed to pass through the side wall 43a of the water case 43 and the holding plate 43f. It is different from -1. In addition, about the structure, effect | action, and effect which are common in said Embodiment 1-1, the overlapping description is abbreviate | omitted as much as possible.

  In the cutting device 1-2 shown in FIG. 8, the support member 91 of the blade detecting means 90 is loosely penetrated by the side wall 43a and the holding plate 43f of the water case 43.

  The support member 91 is fixed to the pillar portion 50a of the portal frame 50 by the fastening member S1, and extends from the pillar portion 50a side toward the side wall 43a side of the water case 43. The support member 91 penetrates through the insertion hole 43e of the side wall 43a, and the support portion 91a penetrates through the holding plate 43f. That is, the support member 91 penetrates the holding plate 43f.

  The insertion hole 43e is formed larger than the outer diameter of the support member 91. It is preferable that the hole diameter of the insertion hole 43e is a size that allows an operator to easily attach and detach the support member 91 to and from the column part 50a through the insertion hole 43e. The insertion hole 43e is formed in, for example, a rectangular shape that is long in the cutting feed direction so that an operator can easily attach and detach the support member 91 to and from the column part 50a through the insertion hole 43e. A support member 91 is loosely inserted in the insertion hole 43e.

  The holding plate 43f is formed in a flat plate shape larger than the hole diameter of the insertion hole 43e in the side wall 43a. The holding plate 43f is detachably fixed to the inner surface of the side wall 43a (the surface facing the inner wall 43c) by, for example, a fastening member S2 such as a bolt or a screw. The holding plate 43f has an insertion hole 43g through which the support member 91 penetrates. The insertion hole 43g is formed larger than the outer diameter of the support portion 91a. The hole diameter of the insertion hole 43g is preferably a size that does not interfere with the support portion 91a even if the water case 43 itself is distorted due to the influence of heat from the cutting feed means 40 or the like. A support portion 91a is loosely inserted in the insertion hole 43g. The insertion hole 43g is watertightly sealed from the support portion 91a by a seal ring R fitted to the support portion 91a.

  The holding plate 43f holds the sealing member 43h between the side wall 43a. The sealing member 43h is a so-called O-ring that seals between the holding plate 43f and the side wall 43a in a watertight manner. The sealing member 43h seals the space between the pressing plate 43f and the side wall 43a in a watertight manner by fastening the fastening member S2 while being sandwiched between the pressing plate 43f and the side wall 43a.

  Next, the operation | work which replaces the blade detection means 90 in the cutting device 1-2 comprised as mentioned above is demonstrated.

  The worker inputs an instruction to switch the operation mode of the cutting device 1-2 from the processing mode to the maintenance mode, and removes the bellows part 42 after the operation of the cutting device 1-2 is stopped. Here, in the cutting apparatus 1-2, the cutting fluid remaining on the bellows portion 42 is guided to the water case 43, received by the water case 43, and then discharged to the outside from the drain pipe 43d.

  Next, the worker removes the blade detection mechanism 92 from the support portion 91a, removes the seal ring R from the support portion 91a, loosens the fastening member S2, and removes the holding plate 43f and the sealing member 43h from the side wall 43a. . Next, the worker loosens the fastening member S <b> 1 through the insertion hole 43 e of the side wall 43 a and removes the support member 91 from the column part 50 a of the portal frame 50.

  Next, an operator fastens fastening member S1 via insertion hole 43e of side wall 43a, and fixes support member 91 to pillar part 50a. Next, the worker causes the support portion 91a to pass through the insertion hole 43g of the holding plate 43f, and tightens the fastening member S2 while sandwiching the sealing member 43h between the holding plate 43f and the side wall 43a. Here, in the cutting device 1-2, the sealing member 43h is sandwiched between the pressing plate 43f and the side wall 43a, and the space between the pressing plate 43f and the side wall 43a is watertightly sealed.

  Next, the worker fits the seal ring R into the support portion 91a and brings the annular lip Ra of the seal ring R into contact with the holding plate 43f. Here, in the cutting device 1-2, the space between the pressing plate 43f and the support portion 91a is sealed in a water-tight manner by the seal ring R. Next, the worker attaches the bellows part 42 after attaching the blade detection mechanism 92 to the support part 91a.

  As described above, according to the cutting device 1-2 according to the second embodiment, in addition to the effects of the cutting device 1-1 according to the first embodiment, the blade detection unit 90 is easily detachable from the column 50a. Further, since the insertion hole 43e of the side wall 43a is formed, it is easy to perform maintenance such as replacement of the blade detection means 90.

  Further, according to the cutting device 1-2 according to the second embodiment, the pressing plate 43f that seals water tightly with the sealing member 43h interposed between the side wall 43a is provided, and the insertion hole 43g and the support portion 91a of the pressing plate 43f are provided. The gap is sealed with a seal ring R in a watertight manner. For this reason, according to the cutting apparatus 1-2 which concerns on Embodiment 2, it can suppress that cutting fluid leaks in the apparatus main body 2 from each penetration hole 43e and 43g.

  In the first embodiment, the cutting device 1-1 is a facing dual dicer in which the cutting blades 31 are arranged to face each other. However, the cutting device 1-1 is not limited to this. For example, an interval is provided in the cutting feed direction. A so-called parallel dual dicer in which two spindles 32 are arranged in parallel may be used, or a dicer having one cutting means 30 may be used.

  Moreover, in said Embodiment 1, although the cutting device 1-1 performed the cutting with respect to the workpiece W supported by the opening of the cyclic | annular flame | frame F via the sticking tape T, it is limited to this. For example, the workpiece W to which the sticking tape T is not stuck may be sufficient.

1-1, 1-2 Cutting device 3 Device base 20 Chuck table 20a Holding surface 30 Cutting means 31 Cutting blade 34 Nozzle (Cutting fluid supply means)
40 cutting feed means 42 bellows part 43 water case 43a side wall 50 gate-type frame 50a pillar part 50c opening 90 blade detection means 91 support member 92 blade detection mechanism 92a light emitting part 92b light receiving part R seal ring W work piece

Claims (2)

A chuck table having a holding surface for holding a workpiece; a cutting feed means disposed on an apparatus base for moving the chuck table in a cutting feed direction parallel to the holding surface; and straddling the cutting feed means, A portal frame that is provided on an apparatus base and has an opening that allows movement of the chuck table, and is fixed to the portal frame so as to be movable in a cutting feed direction orthogonal to the holding surface, and is held by the chuck table. A cutting device comprising: cutting means for cutting the workpiece with a cutting blade; and blade detecting means for detecting a position of the cutting blade in the cutting feed direction,
The blade detection means includes
A support member fixed to a pillar portion of the portal frame that stands on the apparatus base and extending to the side of the chuck table;
A blade detection mechanism mounted on the tip of the support member and having a light emitting part and a light receiving part ,
Before SL cutting means has a cutting fluid supply means for supplying a cutting fluid to the workpiece,
The cutting feed means includes a bellows portion fixed to both sides of the chuck table in the cutting feed direction and covering the cutting feed means, and the cutting liquid extending along the cutting feed means and guided by the bellows portion. Protects against the attachment of the cutting fluid by a bowl-shaped water case that catches
The support member, the water case support to that switching cutting device the blade-detecting mechanism through the side wall of the. The support member is loosely fitted on the side wall of the water casing, cutting apparatus of claim 1, wherein a gap of the water casing and the support member by a fitted seal ring on the outer periphery of the support member is sealed.

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