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JP6291742B2 - Resin composition, adhesion auxiliary layer for plating process, adhesion auxiliary layer for plating process with support, laminated board for wiring board, method for producing laminated board for wiring board, multilayer wiring board, and method for producing multilayer wiring board - Google Patents

Resin composition, adhesion auxiliary layer for plating process, adhesion auxiliary layer for plating process with support, laminated board for wiring board, method for producing laminated board for wiring board, multilayer wiring board, and method for producing multilayer wiring board Download PDF

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JP6291742B2
JP6291742B2 JP2013167467A JP2013167467A JP6291742B2 JP 6291742 B2 JP6291742 B2 JP 6291742B2 JP 2013167467 A JP2013167467 A JP 2013167467A JP 2013167467 A JP2013167467 A JP 2013167467A JP 6291742 B2 JP6291742 B2 JP 6291742B2
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auxiliary layer
adhesion auxiliary
wiring board
plating process
support
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JP2015036392A (en
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哲郎 岩倉
哲郎 岩倉
藤本 大輔
大輔 藤本
薫平 山田
薫平 山田
陽一 金子
陽一 金子
中村 真也
真也 中村
村井 曜
曜 村井
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Resonac Corp
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Hitachi Chemical Co Ltd
Showa Denko Materials Co Ltd
Resonac Corp
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  • Production Of Multi-Layered Print Wiring Board (AREA)
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Description

本発明は、樹脂組成物、めっきプロセスに用いられるめっきプロセス用接着補助層、該めっきプロセス用接着補助層を有する支持体付きめっきプロセス用接着補助層、配線板用積層板及び配線板用積層板の製造方法、並びに、多層配線板及び多層配線板の製造方法に関する。   The present invention relates to a resin composition, an adhesion auxiliary layer for plating process used in a plating process, an adhesion auxiliary layer for plating process with a support having the adhesion auxiliary layer for plating process, a laminated board for wiring board, and a laminated board for wiring board And a multilayer wiring board and a manufacturing method of the multilayer wiring board.

近年、電子機器の小型化、軽量化、多機能化が一段と進み、これに伴い、LSIやチップ部品等の高集積化が進み、その形態も多ピン化、小型化へと急速に変化している。このため、多層配線板は、電子部品の実装密度を向上するために、微細配線化の開発が進められている。これらの要求に合致する多層配線板の製造手法として、ガラスクロスを含まない絶縁樹脂(絶縁樹脂フィルム)をプリプレグの代わりに絶縁層として用い、ビアホールで接続しながら配線層を形成するビルドアップ方式の多層配線板が軽量化や小型化、微細化に適した手法として多く用いられるようになった。   In recent years, electronic devices have become increasingly smaller, lighter, and more functional, and as a result, LSIs and chip components have become more highly integrated, and their forms have rapidly changed to multi-pin and miniaturized. Yes. For this reason, in order to improve the mounting density of electronic components, multilayer wiring boards are being developed for fine wiring. As a manufacturing method of multilayer wiring boards that meet these requirements, an insulating resin (insulating resin film) that does not contain glass cloth is used as an insulating layer instead of a prepreg, and a wiring layer is formed while connecting via holes. Multilayer wiring boards have come to be widely used as methods suitable for weight reduction, miniaturization, and miniaturization.

このようなビルドアップ方式の多層配線板は、絶縁樹脂フィルムを内層回路板にラミネートし、加熱により硬化させた後、レーザー加工によりビアホールを形成する。そして、アルカリ過マンガン酸処理等によって粗化処理とスミア処理を行って無電解銅めっきを行い、第二の回路と層間接続可能とするビアホールを形成する(特許文献1〜3参照)。   In such a build-up type multilayer wiring board, an insulating resin film is laminated on an inner circuit board, cured by heating, and then a via hole is formed by laser processing. And a roughening process and a smear process are performed by an alkali permanganate process etc., electroless copper plating is performed, and the via hole which enables interlayer connection with a 2nd circuit is formed (refer patent documents 1-3).

一方、多層配線板にプリプレグの代わりにガラスクロスを含まない絶縁樹脂を絶縁層として用いた場合、実装時の反りが大きくなり、接続信頼性が低下する傾向がある。そこで、ガラスクロスを含むプリプレグが再度見直されてきているが、ガラスクロス入り基材においてもビルドアップ方式で用いられるレーザー加工によるビアホール形成や、セミアディティブ工法による高密度配線が必要となっている。   On the other hand, when an insulating resin that does not contain glass cloth is used as the insulating layer in place of the prepreg for the multilayer wiring board, warping during mounting tends to increase and connection reliability tends to decrease. Accordingly, prepregs containing glass cloth have been reviewed again. However, via holes formed by laser processing used in the build-up method and high-density wiring by a semi-additive construction method are required even for substrates containing glass cloth.

ガラスクロス入り基材に用いられる樹脂は、実装時の反りを抑制するため、低熱膨張率化が求められているが、そのような樹脂系は剛直骨格を有しているため伸びが小さく、めっき銅との接着力が小さい。そこで、無電解めっき層の代わりに極薄銅箔を給電層として用い、セミアディティブ工法により回路形成するM−SAP(Modified Semi−Additive Process)法が提案されてきた。しかしながら、この方法ではビルドアップ方式における無電解銅めっきと比較して給電層が厚すぎるため、Line/Spaceが15μm/15μm以下の微細な回路形成は困難であった(特許文献4参照)。   The resin used for the glass cloth-containing substrate is required to have a low coefficient of thermal expansion in order to suppress warping during mounting. However, such a resin system has a rigid skeleton, so that the elongation is small. Low adhesive strength with copper. Therefore, an M-SAP (Modified Semi-Additive Process) method has been proposed in which an ultrathin copper foil is used as a power feeding layer instead of the electroless plating layer, and a circuit is formed by a semi-additive method. However, in this method, since the power feeding layer is too thick as compared with the electroless copper plating in the build-up method, it is difficult to form a fine circuit with a Line / Space of 15 μm / 15 μm or less (see Patent Document 4).

そのため、ガラスクロスを含むプリプレグにめっき銅との高接着性を有する接着補助層を設けることが提案されている。上記接着補助層とプリプレグとを積層する際には、接着補助層は、未反応のエポキシ樹脂とエポキシ樹脂硬化剤とが残った状態、いわゆる半硬化の状態(Bステージ状態)のプリプレグと積層される。こうすることで、接着補助層とプリプレグは、強固に接着できると考えられる。   Therefore, it has been proposed to provide an adhesion auxiliary layer having high adhesion to plated copper on a prepreg including glass cloth. When laminating the adhesion auxiliary layer and the prepreg, the adhesion auxiliary layer is laminated with a prepreg in a state where an unreacted epoxy resin and an epoxy resin curing agent remain, a so-called semi-cured state (B stage state). The By carrying out like this, it is thought that an adhesion auxiliary layer and a prepreg can adhere firmly.

特開平7−304931号公報Japanese Patent Laid-Open No. 7-304931 特開2002−3705号公報JP 2002-3705 A 特開平11−1547号公報JP-A-11-1547 特開2003−101194号公報JP 2003-101194 A

しかし、上述の接着補助層をプリプレグに積層する方法では、接着補助層のBステージ状態における反応性が低い場合、積層時に接着補助層の成分がプリプレグ中に分散してしまい、接着補助層の特性が低下してしまう。
そこで、本発明は、Bステージ状態において良好な反応性を有し、表面粗さが小さく、且つ、めっき銅との接着性に優れる、樹脂組成物、めっきプロセスに用いられる接着補助層、支持体付きめっきプロセス用接着補助層、配線板用積層板及び配線板用積層板の製造方法、並びに、めっきプロセスにより形成される多層配線板及び多層配線板の製造方法を提供することを目的とする。
However, in the method of laminating the above-mentioned adhesion auxiliary layer on the prepreg, when the reactivity of the adhesion auxiliary layer in the B stage state is low, the components of the adhesion auxiliary layer are dispersed in the prepreg during lamination, and the characteristics of the adhesion auxiliary layer Will fall.
Accordingly, the present invention provides a resin composition having good reactivity in a B-stage state, having a small surface roughness and excellent adhesion to plated copper, an auxiliary adhesion layer used in a plating process, and a support. It is an object of the present invention to provide a method for manufacturing an adhesion auxiliary layer for a plating process, a laminated board for a wiring board and a laminated board for a wiring board, a multilayer wiring board formed by a plating process, and a method for producing a multilayer wiring board.

本発明者らは、上記課題を解決するために研究を進めた結果、多官能エポキシ樹脂、エポキシ樹脂硬化剤、フェノール性水酸基含有ポリブタジエン変性ポリアミド樹脂、及びリン系硬化促進剤を含む樹脂組成物を用いて形成されるめっきプロセス用接着補助層がプリプレグとめっき銅に対して優れた接着性を示すことを見出し、本発明に想到した。すなわち、本発明は、下記のとおりである。
<1>(A)多官能エポキシ樹脂、(B)エポキシ樹脂硬化剤、(C)フェノール性水酸基含有ポリブタジエン変性ポリアミド樹脂、及び(D)リン系硬化促進剤を含有する樹脂組成物。
<2>前記(A)多官能エポキシ樹脂がビフェニル構造を有する上記<1>に記載の樹脂組成物。
<3>前記(A)多官能エポキシ樹脂がアラルキルノボラック型エポキシ樹脂である上記<1>又は<2>に記載の樹脂組成物。
<4>前記(D)リン系硬化促進剤が第三ホスフィンとキノン類との付加物である上記<1>〜<3>のいずれに記載の樹脂組成物。
<5>上記<1>〜<4>のいずれかに記載の樹脂組成物を含有するめっきプロセス用接着補助層。
<6>前記めっきプロセス用接着補助層の厚みが1〜10μmである上記<5>に記載のめっきプロセス用接着補助層。
<7>前記めっきプロセス用接着補助層の粗化処理後の表面粗さRaが0.4μm以下である上記<5>又は<6>に記載のめっきプロセス用接着補助層。
<8>上記<5>〜<7>のいずれかに記載のめっきプロセス用接着補助層が支持体に配置された支持体付きめっきプロセス用接着補助層。
<9>上記<5>〜<7>のいずれかに記載のめっきプロセス用接着補助層と、配線板用プリプレグとを有し、該接着補助層と該配線板用プリプレグの表面とが接するように重ねられてなる配線板用積層板。
<10>上記<8>に記載の支持体付きめっきプロセス用接着補助層を、該接着補助層と配線板用プリプレグの表面とが接するように重ね、該支持体と鏡板を重ねてプレス成型し、成型後に該鏡板と該支持体とを除去する配線板用積層板の製造方法。
<11>上記<8>に記載の支持体付きめっきプロセス用接着補助層を、該接着補助層と配線板用プリプレグの表面とが接するように重ね、ラミネーターで加熱及び加圧して積層し、積層後に硬化させ、硬化後に前記支持体を除去する配線板用積層板の製造方法。
<12>上記<5>〜<7>のいずれかに記載のめっきプロセス用接着補助層と、配線板用プリプレグと、回路加工が施された配線板とがこの順番に配置された層を含む多層配線板。
<13>上記<8>に記載の支持体付きめっきプロセス用接着補助層を、該接着補助層と配線板用プリプレグの表面が接するように重ね、前記配線板用プリプレグの裏面を回路加工が施された配線板の表面に接するように重ね、該支持体と鏡板を重ねてプレス成型し、成型後に該鏡板と該支持体を除去する多層配線板の製造方法。
<14>上記<8>に記載の支持体付きめっきプロセス用接着補助層を、該接着補助層と配線板用プリプレグの表面が接するように重ね、前記配線板用プリプレグの裏面を回路加工が施された配線板の表面に接するように重ね、ラミネーターで加熱及び加圧して積層し、積層後に硬化させ、硬化後に前記支持体を除去する多層配線板の製造方法。
As a result of conducting research to solve the above problems, the present inventors have developed a resin composition containing a polyfunctional epoxy resin, an epoxy resin curing agent, a phenolic hydroxyl group-containing polybutadiene-modified polyamide resin, and a phosphorus-based curing accelerator. The present inventors have found that the adhesion auxiliary layer for plating process formed by use exhibits excellent adhesiveness to the prepreg and the plated copper, and arrived at the present invention. That is, the present invention is as follows.
<1> A resin composition containing (A) a polyfunctional epoxy resin, (B) an epoxy resin curing agent, (C) a phenolic hydroxyl group-containing polybutadiene-modified polyamide resin, and (D) a phosphorus curing accelerator.
<2> The resin composition according to <1>, wherein the (A) polyfunctional epoxy resin has a biphenyl structure.
<3> The resin composition according to the above <1> or <2>, wherein the (A) polyfunctional epoxy resin is an aralkyl novolac type epoxy resin.
<4> The resin composition according to any one of <1> to <3>, wherein the (D) phosphorus curing accelerator is an adduct of a tertiary phosphine and a quinone.
<5> An adhesion auxiliary layer for a plating process containing the resin composition according to any one of <1> to <4>.
<6> The adhesion auxiliary layer for plating process according to <5>, wherein the adhesion auxiliary layer for plating process has a thickness of 1 to 10 μm.
<7> The adhesion auxiliary layer for plating process according to <5> or <6>, wherein the surface roughness Ra after the roughening treatment of the adhesion auxiliary layer for plating process is 0.4 μm or less.
<8> An adhesion auxiliary layer for a plating process with a support, wherein the adhesion auxiliary layer for a plating process according to any one of <5> to <7> is disposed on a support.
<9> A plating process adhesion auxiliary layer according to any one of the above <5> to <7> and a wiring board prepreg, wherein the adhesion auxiliary layer and the surface of the wiring board prepreg are in contact with each other. A laminated board for a wiring board, which is laminated on.
<10> The adhesion auxiliary layer for a plating process with a support according to <8> above is overlaid so that the adhesion auxiliary layer and the surface of the prepreg for wiring board are in contact, and the support and the end plate are overlaid and press-molded. A method for producing a laminated board for a wiring board, wherein the end plate and the support are removed after molding.
<11> The support auxiliary layer for a plating process with a support according to <8> above is laminated so that the adhesion auxiliary layer and the surface of the prepreg for wiring board are in contact with each other, and is laminated by heating and pressurizing with a laminator. A method for producing a laminated board for wiring board, which is cured afterwards and the support is removed after curing.
<12> The adhesion auxiliary layer for plating process according to any one of the above <5> to <7>, a prepreg for wiring board, and a wiring board on which circuit processing has been performed are included in this order. Multilayer wiring board.
<13> The adhesion auxiliary layer for a plating process with a support according to <8> above is overlaid so that the adhesion auxiliary layer and the surface of the prepreg for wiring board are in contact with each other, and the back surface of the prepreg for wiring board is subjected to circuit processing. A method of manufacturing a multilayer wiring board, wherein the substrate and the end plate are stacked so as to be in contact with the surface of the printed wiring board, the end plate is overlapped and press molded, and the end plate and the support are removed after molding.
<14> The support auxiliary layer for plating process with support according to <8> above is overlaid so that the adhesion auxiliary layer and the surface of the prepreg for wiring board are in contact, and the back surface of the prepreg for wiring board is subjected to circuit processing. A method for producing a multilayer wiring board, wherein the multilayered wiring board is laminated so as to be in contact with the surface of the printed wiring board, laminated by heating and pressing with a laminator, cured after lamination, and the support is removed after curing.

本発明によれば、Bステージ状態において良好な反応性を有し、表面粗さが小さく、且つ、めっき銅との接着性に優れる、樹脂組成物、めっきプロセスに用いられる接着補助層、支持体付きめっきプロセス用接着補助層、配線板用積層板及び配線板用積層板の製造方法、並びに、めっきプロセスにより形成される多層配線板及び多層配線板の製造方法を提供することができる。   ADVANTAGE OF THE INVENTION According to this invention, the resin composition which has favorable reactivity in a B stage state, surface roughness is small, and is excellent in adhesiveness with plated copper, the adhesion auxiliary layer used for a plating process, a support body It is possible to provide a method for manufacturing an adhesion auxiliary layer for a plating process, a laminated board for a wiring board and a laminated board for a wiring board, a multilayer wiring board formed by a plating process, and a method for producing a multilayer wiring board.

以下、本発明について詳細に説明する。
[接着補助層用樹脂組成物]
本発明に係る樹脂組成物は、(A)多官能エポキシ樹脂(以下、(A)成分と呼ぶことがある)、(B)エポキシ樹脂硬化剤(以下、(B)成分と呼ぶことがある)、(C)フェノール性水酸基含有ポリブタジエン変性ポリアミド樹脂(以下、(C)成分と呼ぶことがある)、及び(D)リン系硬化促進剤(以下、(D)成分と呼ぶことがある)を含有することを特徴とする(以降、接着補助層用樹脂組成物と呼ぶことがある)。
以下、(A)成分〜(D)成分について説明する。
Hereinafter, the present invention will be described in detail.
[Resin composition for adhesion auxiliary layer]
The resin composition according to the present invention includes (A) a polyfunctional epoxy resin (hereinafter sometimes referred to as (A) component), (B) an epoxy resin curing agent (hereinafter sometimes referred to as (B) component). , (C) a phenolic hydroxyl group-containing polybutadiene-modified polyamide resin (hereinafter sometimes referred to as (C) component), and (D) a phosphorus-based curing accelerator (hereinafter sometimes referred to as (D) component) (Hereinafter, sometimes referred to as a resin composition for an adhesion auxiliary layer).
Hereinafter, the components (A) to (D) will be described.

<(A)成分>
(A)成分である多官能エポキシ樹脂とは、分子中に2つ以上のエポキシ基を有するエポキシ樹脂である。例えば、フェノールノボラック型エポキシ樹脂、クレゾールノボラック型エポキシ樹脂、アラルキルノボラック型エポキシ樹脂等が挙げられる。これらの多官能エポキシ樹脂は、単独で用いても、2種類以上を混合してもよい。
なかでも、めっき銅との接着力が向上する点より、ビフェニル構造を有する多官能エポキシ樹脂が好ましく、さらにアラルキルノボラック型エポキシ樹脂であることが好ましい。
アラルキルノボラック型エポキシ樹脂としては、例えば、下記式(I)で示されるビフェニル構造を有するアラルキルノボラック型エポキシ樹脂等が挙げられる。
<(A) component>
The polyfunctional epoxy resin as the component (A) is an epoxy resin having two or more epoxy groups in the molecule. For example, a phenol novolac type epoxy resin, a cresol novolak type epoxy resin, an aralkyl novolak type epoxy resin, and the like can be given. These polyfunctional epoxy resins may be used alone or in combination of two or more.
Especially, the polyfunctional epoxy resin which has a biphenyl structure is preferable from the point which the adhesive force with plated copper improves, and it is more preferable that it is an aralkyl novolak type epoxy resin.
Examples of the aralkyl novolac type epoxy resin include an aralkyl novolak type epoxy resin having a biphenyl structure represented by the following formula (I).

Figure 0006291742
(式中、pは、1〜5を示す)
Figure 0006291742
(Wherein p represents 1 to 5)

なお、当該樹脂の市販品としては、日本化薬株式会社製のNC−3000(pが1.7の式(I)のエポキシ樹脂)、NC−3000−H(pが2.8の式(I)のエポキシ樹脂)等が挙げられる。
(A)多官能エポキシ樹脂の配合量としては、接着補助層用樹脂組成物中に固形分換算で、例えば、20〜80質量%であることが好ましく、40〜70質量%であることがより好ましい。(A)成分の配合量が、20質量%以上であれば、導体層と良好な接着強度が得られ、80質量%以下であれば、十分なはんだ耐熱性を保持できる。
In addition, as a commercial item of the said resin, Nippon Kayaku Co., Ltd. NC-3000 (epoxy resin of the formula (I) whose p is 1.7), NC-3000-H (p is a formula of 2.8 ( I) epoxy resin) and the like.
(A) As a compounding quantity of a polyfunctional epoxy resin, it is preferable that it is 20-80 mass% in solid content conversion in the resin composition for adhesion auxiliary layers, for example, and it is more preferably 40-70 mass%. preferable. When the blending amount of the component (A) is 20% by mass or more, a conductor layer and good adhesive strength can be obtained, and when it is 80% by mass or less, sufficient solder heat resistance can be maintained.

<(B)成分>
(B)成分であるエポキシ樹脂硬化剤としては、例えば、各種フェノール樹脂類、酸無水物類、アミン類、ヒドラジド類等が使用できる。フェノール樹脂類としては、例えば、ノボラック型フェノール樹脂、レゾール型フェノール樹脂等が使用できる。酸無水物類としては、例えば、無水フタル酸、ベンゾフェノンテトラカルボン酸二無水物、メチルハイミック酸等が使用できる。アミン類として、例えば、ジシアンジアミド、ジアミノジフェニルメタン、グアニル尿素等が使用できる。信頼性を向上させるためには、例えば、ノボラック型フェノール樹脂であることが好ましい。
(B)成分の配合量としては、エポキシ基に対して、例えば、0.5〜1.5当量であることが好ましい。(B)成分の配合量がエポキシ基に対して0.5〜1.5当量であると、めっき銅との接着力の低下を防ぎ、且つTg(ガラス転移温度)や絶縁性の低下を防ぐことができる。
<(B) component>
As the epoxy resin curing agent as component (B), for example, various phenol resins, acid anhydrides, amines, hydrazides and the like can be used. As the phenol resins, for example, novolak type phenol resins, resol type phenol resins and the like can be used. As acid anhydrides, for example, phthalic anhydride, benzophenone tetracarboxylic dianhydride, methyl hymic acid and the like can be used. Examples of amines that can be used include dicyandiamide, diaminodiphenylmethane, and guanylurea. In order to improve the reliability, for example, a novolac type phenol resin is preferable.
(B) As a compounding quantity of a component, it is preferable that it is 0.5-1.5 equivalent with respect to an epoxy group, for example. (B) When the compounding quantity of a component is 0.5-1.5 equivalent with respect to an epoxy group, the fall of the adhesive force with plated copper is prevented, and Tg (glass transition temperature) and insulation fall are prevented. be able to.

<(C)成分>
(C)成分であるフェノール性水酸基含有ポリブタジエン変性ポリアミド樹脂は、下記式(i)、(ii)、及び(iii)で表される構造単位を有する。
<(C) component>
The phenolic hydroxyl group-containing polybutadiene-modified polyamide resin as component (C) has structural units represented by the following formulas (i), (ii), and (iii).

Figure 0006291742
式中、a、b、c、x、y及びzは、それぞれ平均重合度であって、a=2〜10、b=0〜3、c=3〜30、x=1に対しy+z=2〜300((y+z)/x)の整数を示し、さらにy=1に対しz≧20(z/y)である。R、R’、及びR’’は、それぞれ独立に、芳香族ジアミン又は脂肪族ジアミンに起因する2価の基であり、複数のR’’’は、それぞれ独立に、芳香族ジカルボン酸、脂肪族ジカルボン酸、又は両末端にカルボキシル基を有するオリゴマーに起因する2価の基である。なお、R、R’、R’’及びR’’’は、具体的には、後述するジアミン原料及びジカルボン酸原料に由来するものである。また、(C)成分の重量平均分子量は、例えば、60,000〜250,000であることが好ましく、80,000〜200,000であることがより好ましい。
Figure 0006291742
In the formula, a, b, c, x, y, and z are average polymerization degrees, respectively, and a = 2 to 10, b = 0 to 3, c = 3 to 30, and x = 1, y + z = 2. An integer of ˜300 ((y + z) / x) is shown, and z ≧ 20 (z / y) with respect to y = 1. R, R ′, and R ″ are each independently a divalent group derived from an aromatic diamine or an aliphatic diamine, and a plurality of R ′ ″ are each independently an aromatic dicarboxylic acid, A divalent group derived from an aromatic dicarboxylic acid or an oligomer having carboxyl groups at both ends. R, R ′, R ″ and R ′ ″ are specifically derived from the diamine raw material and dicarboxylic acid raw material described later. In addition, the weight average molecular weight of the component (C) is, for example, preferably 60,000 to 250,000, and more preferably 80,000 to 200,000.

(C)成分であるフェノール性水酸基含有ポリブタジエン変性ポリアミド樹脂は、例えば、ジアミンとフェノール性水酸基含有のジカルボン酸、フェノール性水酸基を含有しないジカルボン酸、両末端にカルボキシル基を有するポリブタジエンとをN−メチル−2−ピロリドン(NMP)等の有機溶媒中で、触媒として亜リン酸エステルとピリジン誘導体の存在下でカルボキシル基とアミノ基とを重縮合させることにより合成される。
本発明において、(C)成分の製造に使用するジアミン(ジアミン原料)としては、芳香族ジアミンでも脂肪族ジアミンでもよい。
The (C) component phenolic hydroxyl group-containing polybutadiene-modified polyamide resin includes, for example, diamine, phenolic hydroxyl group-containing dicarboxylic acid, dicarboxylic acid not containing phenolic hydroxyl group, and polybutadiene having carboxyl groups at both ends. It is synthesized by polycondensation of a carboxyl group and an amino group in an organic solvent such as 2-pyrrolidone (NMP) in the presence of a phosphite ester and a pyridine derivative as a catalyst.
In the present invention, the diamine (diamine raw material) used for the production of the component (C) may be an aromatic diamine or an aliphatic diamine.

芳香族ジアミンとしては、例えば、ジアミノベンゼン、ジアミノトルエン、ジアミノフェノール、ジアミノジメチルベンゼン、ジアミノメシチレン、ジアミノニトロベンゼン、ジアミノジアゾベンゼン、ジアミノナフタレン、ジアミノビフェニル、ジアミノジメトキシビフェニル、ジアミノジフェニルエーテル、ジアミノジメチルジフェニルエーテル、メチレンジアミン、メチレンビス(ジメチルアニリン)、メチレンビス(メトキシアニリン)、メチレンビス(ジメトキシアニリン)、メチレンビス(エチルアニリン)、メチレンビス(ジエチルアニリン)、メチレンビス(エトキシアニリン)、メチレンビス(ジエトキシアニリン)、イソプロピリデンジアニリン、ジアミノベンゾフェノン、ジアミノジメチルベンゾフェノン、ジアミノアントラキノン、ジアミノジフェニルチオエーテル、ジアミノジメチルジフェニルチオエーテル、ジアミノジフェニルスルホン、ジアミノジフェニルスルホキシド、ジアミノフルオレン等が挙げられる。   Examples of the aromatic diamine include diaminobenzene, diaminotoluene, diaminophenol, diaminodimethylbenzene, diaminomesitylene, diaminonitrobenzene, diaminodiazobenzene, diaminonaphthalene, diaminobiphenyl, diaminodimethoxybiphenyl, diaminodiphenyl ether, diaminodimethyldiphenyl ether, methylenediamine , Methylenebis (dimethylaniline), methylenebis (methoxyaniline), methylenebis (dimethoxyaniline), methylenebis (ethylaniline), methylenebis (diethylaniline), methylenebis (ethoxyaniline), methylenebis (diethoxyaniline), isopropylidenedianiline, diamino Benzophenone, diaminodimethylbenzophenone, diamino Ntorakinon, diaminodiphenyl thioether, diaminodiphenyl dimethyl diphenyl thioether, diaminodiphenyl sulfone, diaminodiphenyl sulfoxide, diaminofluorene and the like.

脂肪族ジアミンとしては、例えば、エチレンジアミン、プロパンジアミン、ヒドロキシプロパンジアミン、ブタンジアミン、ヘプタンジアミン、ヘキサンジアミン、ジアミノジエチルアミン、ジアミノプロピルアミン、シクロペンタンジアミン、シクロヘキサンジアミン、アザペンタンジアミン、トリアザウンデカジアミン等が挙げられる。
これら芳香族及び脂肪族ジアミンは、1種のみを用いてもよく、2種以上を混合して用いてもよい。
本発明において、(C)成分の製造に使用するフェノール性水酸基含有ジカルボン酸としては、例えば、ヒドロキシイソフタル酸が挙げられるが、これらに限定されず、ヒドロキシフタル酸、ヒドロキシテレフタル酸、ジヒドロキシイソフタル酸、ジヒドロキシテレフタル酸等であってもよい。
Examples of the aliphatic diamine include ethylenediamine, propanediamine, hydroxypropanediamine, butanediamine, heptanediamine, hexanediamine, diaminodiethylamine, diaminopropylamine, cyclopentanediamine, cyclohexanediamine, azapentanediamine, and triazaundecadiamine. Is mentioned.
These aromatic and aliphatic diamines may be used alone or in combination of two or more.
In the present invention, the phenolic hydroxyl group-containing dicarboxylic acid used for the production of the component (C) includes, for example, hydroxyisophthalic acid, but is not limited thereto, hydroxyphthalic acid, hydroxyterephthalic acid, dihydroxyisophthalic acid, It may be dihydroxyterephthalic acid or the like.

本発明において、(C)成分の製造に使用するフェノール性水酸基を含有しないジカルボン酸(ジカルボン酸原料)としては、芳香族ジカルボン酸でも脂肪族ジカルボン酸でも両末端にカルボキシル基を有するオリゴマーでもよい。
芳香族ジカルボン酸としては、例えば、フタル酸、イソフタル酸、テレフタル酸、ビフェニルジカルボン酸、メチレン二安息香酸、チオ二安息香酸、カルボニル二安息香酸、スルホニル安息香酸、ナフタレンジカルボン酸等が挙げられる。
脂肪族ジカルボン酸としては、例えば、シュウ酸、マロン酸、メチルマロン酸、コハク酸、グルタル酸、アジピン酸、マレイン酸、フマル酸、りんご酸、酒石酸、(メタ)アクリロイルオキシコハク酸、ジ(メタ)アクリロイルオキシコハク酸、(メタ)アクリロイルオキシりんご酸、(メタ)アクリルアミドコハク酸や、(メタ)アクリルアミドりんご酸等が挙げられる。
本発明において、(C)成分の製造に使用する両末端にカルボキシル基を有するポリブタジエンは、例えば、数平均分子量200〜10000であることが好ましく、数平均分子量500〜5000のオリゴマーであることがより好ましい。
(C)成分であるフェノール性水酸基含有ポリブタジエン変性ポリアミド樹脂は、市販品を使用することができ、市販品としては、例えば、日本化薬株式会社製のBPAM−155等が挙げられる。
In the present invention, the dicarboxylic acid not containing a phenolic hydroxyl group (dicarboxylic acid raw material) used for the production of the component (C) may be an aromatic dicarboxylic acid, an aliphatic dicarboxylic acid or an oligomer having carboxyl groups at both ends.
Examples of the aromatic dicarboxylic acid include phthalic acid, isophthalic acid, terephthalic acid, biphenyl dicarboxylic acid, methylene dibenzoic acid, thiodibenzoic acid, carbonyl dibenzoic acid, sulfonylbenzoic acid, and naphthalenedicarboxylic acid.
Examples of the aliphatic dicarboxylic acid include oxalic acid, malonic acid, methylmalonic acid, succinic acid, glutaric acid, adipic acid, maleic acid, fumaric acid, malic acid, tartaric acid, (meth) acryloyloxysuccinic acid, di (meta) ) Acryloyloxysuccinic acid, (meth) acryloyloxymalic acid, (meth) acrylamide succinic acid, (meth) acrylamide malic acid and the like.
In the present invention, the polybutadiene having carboxyl groups at both ends used for the production of the component (C) is preferably, for example, an oligomer having a number average molecular weight of 200 to 10,000, and more preferably an oligomer having a number average molecular weight of 500 to 5,000. preferable.
Commercially available products can be used as the phenolic hydroxyl group-containing polybutadiene-modified polyamide resin as component (C). Examples of commercially available products include BPAM-155 manufactured by Nippon Kayaku Co., Ltd.

接着補助層用樹脂組成物において、(C)成分の配合割合は、(A)成分及び(B)成分の合計100質量部に対して、5〜30質量部であることが好ましい。5質量部以上であれば、接着補助層用樹脂組成物の強靭性が高く、さらに緻密な粗化形状が得られ、めっき銅との接着力を高めることができる。また、(C)成分の配合割合が30質量部以下であれば、耐熱性の低下がなく,粗化工程時の薬液に対する耐性の低下も防ぐことができる。また、めっき銅と十分な接着性を確保できる。   In the resin composition for an adhesion auxiliary layer, the blending ratio of the component (C) is preferably 5 to 30 parts by mass with respect to 100 parts by mass in total of the component (A) and the component (B). If it is 5 mass parts or more, the toughness of the resin composition for adhesion auxiliary layers is high, and a finer roughened shape can be obtained, and the adhesive force with the plated copper can be increased. Moreover, if the mixture ratio of (C) component is 30 mass parts or less, there will be no heat resistant fall and the fall with respect to the chemical | medical solution at the time of a roughening process can also be prevented. Moreover, sufficient adhesiveness with plated copper can be ensured.

また、フェノール性水酸基含有ポリブタジエン変性ポリアミド樹脂が、エポキシ樹脂と相溶性が良いフェノール性水酸基と、エポキシ樹脂と非相容なポリブタジエンを含有するため、その配合割合が(A)成分及び(B)成分の合計100質量部に対して5〜30質量部の場合、微細な海島構造を形成すると考えられる。この海島構造の形成により、粗化処理時に海層と島層との粗化量が異なることを利用して、粗化処理時に緻密な形状を形成することが可能となると推察される。この表面形状が、微細であって、ばらつきが少ないため、アンカー効果に起因した高い物理的接着力を発現し、導体層との接着力が著しく向上すると考えられる。   In addition, since the phenolic hydroxyl group-containing polybutadiene-modified polyamide resin contains a phenolic hydroxyl group having good compatibility with the epoxy resin and polybutadiene incompatible with the epoxy resin, the blending ratio thereof is the component (A) and the component (B). In the case of 5 to 30 parts by mass with respect to 100 parts by mass in total, it is considered that a fine sea-island structure is formed. It is speculated that the formation of this sea-island structure makes it possible to form a dense shape during the roughening treatment by utilizing the fact that the amount of roughening between the sea layer and the island layer differs during the roughening treatment. Since this surface shape is fine and has little variation, it is considered that a high physical adhesive force due to the anchor effect is expressed and the adhesive force with the conductor layer is remarkably improved.

(C)成分の配合割合が5質量部以上の場合、海島構造のドメインサイズが大きくなりすぎることがなく、粗化処理後のRaを小さくすることが可能である。また、樹脂の強靭性が低下せず、緻密な粗化形状が得られ、導体層との接着力が向上する。一方、(C)成分の配合割合が30質量部以下の場合、海島構造のドメインサイズが小さくなりすぎることがなく、アンカー効果による接着力は低下せず、めっき銅との良好な接着力が得られる。また、耐熱性が低下を抑制し、粗化工程時の薬液への耐性も向上する。   When the blending ratio of component (C) is 5 parts by mass or more, the domain size of the sea-island structure does not become too large, and Ra after the roughening treatment can be reduced. Further, the toughness of the resin is not lowered, a dense roughened shape is obtained, and the adhesive force with the conductor layer is improved. On the other hand, when the blending ratio of the component (C) is 30 parts by mass or less, the domain size of the sea-island structure does not become too small, the adhesive force due to the anchor effect does not decrease, and good adhesive strength with the plated copper is obtained. It is done. Moreover, heat resistance suppresses a fall and the tolerance to the chemical | medical solution at the time of a roughening process also improves.

なお、(C)成分を用いずにフェノール性水酸基含有ポリアミド樹脂やフェノール性水酸基含有アクリロニトリル−ブタジエン変性ポリアミド樹脂を用いた場合、フェノール性水酸基含有ポリブタジエン変性ポリアミド樹脂と比較してエポキシ樹脂との相溶性が良好であるため、海島構造が形成されず、導体層との接着力を発揮することが困難となる。また、ニトリル基が導入されると吸湿率が高くなり、絶縁性も低下する。また、Bステージ状態のプリプレグ中の樹脂成分の接着補助層への移行が顕著になり、接着補助層中の海島構造のドメインサイズが制御できなくなることや接着補助層とめっき銅との接着力を悪化させる可能性がある。   In addition, when a phenolic hydroxyl group-containing polyamide resin or a phenolic hydroxyl group-containing acrylonitrile-butadiene modified polyamide resin is used without using the component (C), the compatibility with the epoxy resin compared with the phenolic hydroxyl group-containing polybutadiene modified polyamide resin Therefore, the sea-island structure is not formed, and it is difficult to exert an adhesive force with the conductor layer. Moreover, when a nitrile group is introduced, the moisture absorption rate is increased and the insulating properties are also lowered. In addition, the transition of the resin component in the prepreg in the B stage state to the adhesion auxiliary layer becomes remarkable, and the domain size of the sea-island structure in the adhesion auxiliary layer cannot be controlled, and the adhesion force between the adhesion auxiliary layer and the plated copper is reduced. May be exacerbated.

<(D)成分>
本発明に係る接着補助層用樹脂組成物に用いられる(D)リン系硬化促進剤としては、リン原子を含有し、エポキシ樹脂の硬化反応を促進させる硬化促進剤であれば特に制限されるものではない。また、リン系硬化促進剤を単独で用いても、それ以外の硬化促進剤を1種又は2種以上を併用してもよい。リン系硬化促進剤として、例えば、トリフェニルホスフィン、ジフェニル(アルキルフェニル)ホスフィン、トリス(アルキルフェニル)ホスフィン、トリス(アルコキシフェニル)ホスフィン、トリス(アルキルアルコキシフェニル)ホスフィン、トリス(ジアルキルフェニル)ホスフィン、トリス(トリアルキルフェニル)ホスフィン、トリス(テトラアルキルフェニル)ホスフィン、トリス(ジアルコキシフェニル)ホスフィン、トリス(トリアルコキシフェニル)ホスフィン、トリス(テトラアルコキシフェニル)ホスフィン、トリアルキルホスフィン、ジアルキルアリールホスフィン、アルキルジアリールホスフィン等の有機ホスフィン類、これら有機ホスフィン類と有機ボロン類との錯体、及び第三ホスフィンとキノン類との付加物などが挙げられる。
<(D) component>
The (D) phosphorus curing accelerator used in the resin composition for an auxiliary adhesion layer according to the present invention is particularly limited as long as it is a curing accelerator containing a phosphorus atom and accelerating the curing reaction of the epoxy resin. is not. Moreover, even if a phosphorus type hardening accelerator is used independently, you may use together 1 type (s) or 2 or more types of other hardening accelerators. Examples of phosphorus curing accelerators include triphenylphosphine, diphenyl (alkylphenyl) phosphine, tris (alkylphenyl) phosphine, tris (alkoxyphenyl) phosphine, tris (alkylalkoxyphenyl) phosphine, tris (dialkylphenyl) phosphine, and tris. (Trialkylphenyl) phosphine, Tris (tetraalkylphenyl) phosphine, Tris (dialkoxyphenyl) phosphine, Tris (trialkoxyphenyl) phosphine, Tris (tetraalkoxyphenyl) phosphine, Trialkylphosphine, Dialkylarylphosphine, Alkyldiarylphosphine Organic phosphines, complexes of these organic phosphines with organic borons, and addition of tertiary phosphines with quinones. Things and the like.

本発明において用いられる(D)リン系硬化促進剤としては、例えば、めっきプロセス用接着補助層の硬化反応が十分に進むことによって、高い接着性を発揮できる第三ホスフィンとキノン類との付加物が好ましい。第三ホスフィンとしては、特に限定されるものではないが、例えば、ジブチルフェニルホスフィン、ブチルジフェニルホスフィン、エチルジフェニルホスフィン、トリフェニルホスフィン、トリス(4−メチルフェニル)ホスフィン、トリス(4−メトキシフェニル)ホスフィン等のアリール基を有する第三ホスフィンが好ましい。また、キノン類としては、例えば、o−ベンゾキノン、p−ベンゾキノン、ジフェノキノン、1,4−ナフトキノン、アントラキノン等が挙げられる。
これらの中でも、接着性に加えて、耐熱性、及び保存安定性の点から、例えば、トリフェニルホスフィンとp−ベンゾキノンとの付加物が好ましい。
The (D) phosphorus curing accelerator used in the present invention is, for example, an adduct of a tertiary phosphine and a quinone that can exhibit high adhesiveness when the curing reaction of the adhesion auxiliary layer for plating process proceeds sufficiently. Is preferred. Although it does not specifically limit as a tertiary phosphine, For example, dibutylphenyl phosphine, butyl diphenyl phosphine, ethyl diphenyl phosphine, triphenyl phosphine, tris (4-methylphenyl) phosphine, tris (4-methoxyphenyl) phosphine A tertiary phosphine having an aryl group such as is preferred. Examples of quinones include o-benzoquinone, p-benzoquinone, diphenoquinone, 1,4-naphthoquinone, and anthraquinone.
Among these, in addition to adhesiveness, the adduct of triphenylphosphine and p-benzoquinone is preferable from the viewpoint of heat resistance and storage stability.

第三ホスフィンとキノン類との付加物の製造方法としては、例えば、原料となる第三ホスフィンとキノン類がともに溶解する溶媒中で両者を撹拌混合し、付加反応させた後、単離する方法等が挙げられる。この場合の製造条件としては、室温から80℃の範囲で、原料の溶解度が高く生成した付加物の溶解度が低いメチルイソブチルケトン、メチルエチルケトン、アセトン等のケトン類などの溶媒中で、1時間〜12時間撹拌し、付加反応させることが好ましい。   As a method for producing an adduct of a tertiary phosphine and a quinone, for example, a method in which both are stirred and mixed in a solvent in which the tertiary phosphine and the quinone as raw materials are dissolved, followed by addition reaction, and then isolated. Etc. The production conditions in this case are from room temperature to 80 ° C. in a solvent such as methyl isobutyl ketone, methyl ethyl ketone, acetone and other ketones having a high raw material solubility and a low solubility of the resulting adduct for 1 hour to 12 hours. It is preferable to stir for a period of time for the addition reaction.

本発明におけるめっきプロセス用接着補助層は、(D)リン系硬化促進剤を用いることによって、硬化反応が十分に進む。
この理由は、必ずしも明らかではないが、従来のイミダゾールに代表される窒素系硬化促進剤では、窒素系硬化促進剤の窒素原子が銅箔の銅原子の影響を受け、硬化促進が抑制される。これに対して、リン系硬化促進剤は、この影響を受けにくいため、硬化反応が十分に生じるものと推察される。
また、リン系硬化促進剤を用いることにより、硬化反応が十分に進むため、めっきプロセス用接着補助層をプリプレグに積層した際、プリプレグ及びめっきプロセス用接着補助層中の各々の成分が他方へ分散しにくくなるため、プリプレグ及びめっきプロセス用接着補助層の特性を十分に発現することが可能であり、高い接着強度が得られると考えられる。
In the adhesion auxiliary layer for plating process in the present invention, the curing reaction sufficiently proceeds by using (D) a phosphorus-based curing accelerator.
The reason for this is not necessarily clear, but in conventional nitrogen-based curing accelerators typified by imidazole, the nitrogen atoms of the nitrogen-based curing accelerator are affected by the copper atoms of the copper foil, and curing acceleration is suppressed. On the other hand, since a phosphorus hardening accelerator is hard to receive this influence, it is guessed that hardening reaction fully arises.
In addition, since the curing reaction proceeds sufficiently by using a phosphorus curing accelerator, each component in the prepreg and the plating process adhesion auxiliary layer is dispersed to the other when the plating process adhesion auxiliary layer is laminated on the prepreg. Therefore, it is considered that the characteristics of the prepreg and the adhesion auxiliary layer for the plating process can be sufficiently expressed, and high adhesive strength can be obtained.

<充填材>
本発明に係るめっきプロセス用接着補助層は、充填材を含んでもよい。充填材としては、無機充填材、架橋性の有機充填材等が挙げられる。
無機充填材としては、例えば、シリカ、アルミナ、硫酸バリウム、タルク、クレー、雲母粉、水酸化アルミニウム、水酸化マグネシウム、炭酸カルシウム、炭酸マグネシウム、酸化マグネシウム、窒化ホウ素、ホウ酸アルミニウム、チタン酸バリウム、チタン酸ストロンチウム、チタン酸カルシウム、チタン酸ビスマス、酸化チタン、ジルコン酸バリウム、ジルコン酸カルシウム等が挙げられる。これらの中でも、特にシリカが好ましい。無機充填材は、1種のみを用いても2種以上を併用してもよい。
無機充填材は、球形である必要はないが、層間絶縁層上に微細配線を形成する観点から、比表面積が20m2/g以上であることが好ましい。比表面積が20m2/g以上であるような無機充填材を使用すると、めっきプロセスにおける粗化処理後の表面粗さが小さくなる。また、比表面積が20m2/g以上の無機充填材を用いると、接着補助層用樹脂組成物と無機充填材との界面が増大する。このため、少ない配合量でも熱伝導率をガラスクロス基材に近づけることができ、良好なレーザー加工性を得ることができる。
比表面積は、粉体試料表面に、窒素を液体窒素温度で吸着させ、その吸着量から粉体試料の比表面積を求めるBET法で求めることができる。
無機充填材は市販品を使用することができる。市販品としては、例えば、シリカフィラーとしては、AEROSIL R972(日本アエロジル株式会社製、商品名、比表面積:110±20m2/g)、AEROSIL R202(日本アエロジル株式会社製、商品名、比表面積:100±20m2/g)、PL−1(扶桑化学工業株式会社製、商品名、比表面積:181m2/g)、PL−7(扶桑化学工業株式会社製、商品名、比表面積:36m2/g)等が挙げられる。また、アルミナフィラーとしては、例えば、NanoTek(シーアイ化成株式会社製、商品名、比表面積:55m2/g)等が挙げられる。
<Filler>
The adhesion auxiliary layer for plating process according to the present invention may include a filler. Examples of the filler include inorganic fillers and crosslinkable organic fillers.
Examples of the inorganic filler include silica, alumina, barium sulfate, talc, clay, mica powder, aluminum hydroxide, magnesium hydroxide, calcium carbonate, magnesium carbonate, magnesium oxide, boron nitride, aluminum borate, barium titanate, Examples include strontium titanate, calcium titanate, bismuth titanate, titanium oxide, barium zirconate, and calcium zirconate. Among these, silica is particularly preferable. The inorganic filler may be used alone or in combination of two or more.
The inorganic filler need not be spherical, but preferably has a specific surface area of 20 m 2 / g or more from the viewpoint of forming fine wiring on the interlayer insulating layer. When an inorganic filler having a specific surface area of 20 m 2 / g or more is used, the surface roughness after the roughening treatment in the plating process becomes small. In addition, when an inorganic filler having a specific surface area of 20 m 2 / g or more is used, the interface between the adhesion auxiliary layer resin composition and the inorganic filler increases. For this reason, even with a small blending amount, the thermal conductivity can be brought close to the glass cloth substrate, and good laser processability can be obtained.
The specific surface area can be obtained by the BET method in which nitrogen is adsorbed on the surface of the powder sample at the liquid nitrogen temperature and the specific surface area of the powder sample is obtained from the adsorbed amount.
A commercial item can be used for an inorganic filler. As a commercially available product, for example, as a silica filler, AEROSIL R972 (Nippon Aerosil Co., Ltd., trade name, specific surface area: 110 ± 20 m 2 / g), AEROSIL R202 (Nippon Aerosil Co., Ltd., trade name, specific surface area: 100 ± 20 m 2 / g), PL-1 (manufactured by Fuso Chemical Industries, trade name, specific surface area: 181 m 2 / g), PL-7 (manufactured by Fuso Chemical Industries, trade name, specific surface area: 36 m 2 / G) and the like. Examples of the alumina filler include NanoTek (trade name, specific surface area: 55 m 2 / g, manufactured by CII Kasei Co., Ltd.).

また、無機充填材は、耐湿性を向上させるために、シランカップリング剤等の表面処理剤で表面処理されていてもよい。また、接着補助層用樹脂組成物中における無機充填材の分散性を向上させるために、疎水性化処理されていてもよい。   The inorganic filler may be surface-treated with a surface treatment agent such as a silane coupling agent in order to improve moisture resistance. Moreover, in order to improve the dispersibility of the inorganic filler in the resin composition for adhesion auxiliary layers, it may be hydrophobized.

無機充填材の配合量としては、接着補助層用樹脂組成物中に固形分換算で、例えば、1〜10質量%であることが好ましい。配合量が1質量%以上であると、ガラスクロス入り基材との熱伝導率差が小さくなり、良好なレーザー加工性が得られる。また、配合量が10質量%以下であると、粗化処理後に良好な表面形状が形成でき、めっき特性が低下することなく、層間の絶縁信頼性が低下することがないため好ましい。   As a compounding quantity of an inorganic filler, it is preferable that it is 1-10 mass% in conversion of solid content in the resin composition for adhesion auxiliary layers, for example. When the blending amount is 1% by mass or more, the difference in thermal conductivity with the glass cloth-containing substrate becomes small, and good laser processability can be obtained. Further, it is preferable that the blending amount is 10% by mass or less because a good surface shape can be formed after the roughening treatment, the plating characteristics are not deteriorated, and the insulation reliability between the layers is not deteriorated.

さらに、めっきプロセス用接着補助層の伸び性を向上させるために、例えば、架橋有機フィラー等を添加してもよい。架橋有機フィラーとしては、特に制限はされないが、例えば、アクリロニトリルブタジエンの共重合物として、アクリロニトリルとブタジエンとを共重合した架橋NBR粒子や、アクリロニトリルとブタジエンとアクリル酸等のカルボン酸とを共重合したもの、ポリブタジエン、NBR、シリコーンゴムをコアとし、アクリル酸誘導体をシェルとした、いわゆるコア―シェルゴム粒子などが使用可能である。   Furthermore, in order to improve the extensibility of the adhesion auxiliary layer for the plating process, for example, a crosslinked organic filler or the like may be added. The crosslinked organic filler is not particularly limited. For example, as a copolymer of acrylonitrile butadiene, crosslinked NBR particles obtained by copolymerizing acrylonitrile and butadiene, or acrylonitrile, butadiene, and carboxylic acid such as acrylic acid are copolymerized. So-called core-shell rubber particles having polybutadiene, NBR, or silicone rubber as the core and acrylic acid derivatives as the shell can be used.

架橋有機フィラーは市販品を使用することができる。架橋有機フィラーの市販品としては、例えば、ブタジエンゴム−アクリル樹脂のコアシェル粒子であるパラロイドEXL2655(ローム・アンド・ハース・ジャパン株式会社製、商品名)や架橋シリコーンゴム−アクリル樹脂のコア−シェルゴム粒子であるGENIOPERL P52(旭化成ワッカーシリコーン株式会社製、商品名)等が挙げられる。
架橋有機フィラーの配合量は、例えば、接着補助層用樹脂組成物中に固形分換算で10質量%以下であることが好ましい。配合量が10質量%以下の場合、耐薬品性が低下せず、耐熱性等のめっき特性の低下も抑制することができる。
A commercial item can be used for a crosslinked organic filler. Examples of commercially available crosslinked organic fillers include, for example, paraloid EXL2655 (trade name, manufactured by Rohm and Haas Japan Co., Ltd.), which is a core-shell particle of butadiene rubber-acrylic resin, and core-shell rubber particles of crosslinked silicone rubber-acrylic resin. GENIOPERL P52 (trade name, manufactured by Asahi Kasei Wacker Silicone Co., Ltd.) and the like.
It is preferable that the compounding quantity of a bridge | crosslinking organic filler is 10 mass% or less in conversion of solid content in the resin composition for adhesion auxiliary layers, for example. When the blending amount is 10% by mass or less, chemical resistance does not decrease, and deterioration of plating characteristics such as heat resistance can be suppressed.

<接着補助層用樹脂組成物の製造方法>
本発明の接着補助層用樹脂組成物は、(A)成分〜(D)成分のほかに、必要に応じ、通常の樹脂組成物に使用されるチキソ性付与剤、界面活性剤、カップリング剤等の各種添加剤、無機充填材、架橋性の有機充填材などを適宜配合し、これらを混合した後、泡がなくなるまで静置して得られる。また、接着補助層用樹脂組成物に無機充填材等を分散させる方法として、ニーダー、ボールミル、ビーズミル、3本ロール、ナノマイザー等の既知の混練方法及び分散方法を用いることができる。
<Method for producing resin composition for adhesion auxiliary layer>
In addition to the components (A) to (D), the resin composition for an auxiliary adhesion layer of the present invention includes a thixotropic agent, a surfactant, and a coupling agent that are used in ordinary resin compositions as necessary. Various additives such as inorganic fillers, crosslinkable organic fillers, and the like are appropriately blended, mixed, and then allowed to stand until there are no bubbles. In addition, as a method for dispersing the inorganic filler or the like in the resin composition for the auxiliary adhesion layer, known kneading methods and dispersing methods such as a kneader, a ball mill, a bead mill, a three-roll mill, and a nanomizer can be used.

本発明における接着補助層用樹脂組成物は、溶剤と混合若しくは、希釈して、又は溶剤に分散させてワニスの形態とすることが作業性の点で好ましい。この溶剤としては、例えば、メチルエチルケトン、キシレン、トルエン、アセトン、エチレングリコールモノエチルエーテル、シクロヘキサノン、エチルエトキシプロピオネート、N,N−ジメチルホルムアミド、N,N−ジメチルアセトアミド等を使用できる。これらの溶剤は、1種のみを用いても、2種以上を併用してもよい。この溶剤に対する接着補助層用樹脂組成物の割合は、塗膜形成の設備にあわせて適宜調整すればよい。   The resin composition for an auxiliary adhesion layer in the present invention is preferably mixed with a solvent, diluted, or dispersed in a solvent to form a varnish from the viewpoint of workability. As this solvent, for example, methyl ethyl ketone, xylene, toluene, acetone, ethylene glycol monoethyl ether, cyclohexanone, ethyl ethoxypropionate, N, N-dimethylformamide, N, N-dimethylacetamide and the like can be used. These solvents may be used alone or in combination of two or more. What is necessary is just to adjust suitably the ratio of the resin composition for adhesion auxiliary layers with respect to this solvent according to the installation of a coating film.

<めっきプロセス用接着補助層>
本発明に係るめっきプロセス用接着補助層は、前述の接着補助層用樹脂組成物を含むものである。
本発明のめっきプロセス用接着補助層は、例えば、回路層間に積層されるプリプレグや絶縁樹脂層等の上に設けられ、熱硬化した後に、粗化処理及び無電解めっき処理によりめっきプロセス用接着補助層の表面に導体層が形成される。その際、めっきプロセス用接着補助層は、プリプレグや絶縁樹脂層等の表面と導体層との間に存在する。その後、さらに電気めっき処理を施すことにより、めっきプロセス用接着補助層上に回路層を形成することができる。本発明において、「めっきプロセス用」とは、回路層間に積層されるプリプレグや絶縁樹脂層等の上に設けられる接着補助層の表面に、めっき層(導体層及び回路層)を設けるための用途を意味する。
<Adhesion auxiliary layer for plating process>
The adhesion auxiliary layer for plating process according to the present invention includes the above-described resin composition for adhesion auxiliary layer.
The adhesion auxiliary layer for plating process of the present invention is provided on, for example, a prepreg or insulating resin layer laminated between circuit layers, and after thermosetting, the adhesion auxiliary for plating process is performed by roughening treatment and electroless plating treatment. A conductor layer is formed on the surface of the layer. At that time, the adhesion auxiliary layer for the plating process exists between the surface of the prepreg, the insulating resin layer or the like and the conductor layer. Thereafter, a circuit layer can be formed on the adhesion auxiliary layer for plating process by further performing electroplating treatment. In the present invention, “for plating process” means an application for providing a plating layer (conductor layer and circuit layer) on the surface of an adhesion auxiliary layer provided on a prepreg or an insulating resin layer laminated between circuit layers. Means.

本発明に係るめっきプロセス用接着補助層は、配線板用積層板や多層配線板の層の一部とされる前は、支持体上やプリプレグ上等で半硬化状態(いわゆるBステージ状態)で存在することが好ましい。
本発明に係るめっきプロセス用接着補助層の厚みは、配線板用積層板及び多層配線板の形態における全体の厚みを低減する観点から、例えば、1〜10μmであることが好ましい。めっきプロセス用接着補助層の厚みが1μm以上10μm以下であれば、プリプレグや絶縁樹脂層等との良好な接着力が得られる。また、めっきプロセス用接着補助層の表面に形成される導体層との良好な接着力も得られる。
The adhesion auxiliary layer for plating process according to the present invention is in a semi-cured state (so-called B-stage state) on a support or a prepreg before being made a part of a layer of a wiring board laminate or multilayer wiring board. Preferably it is present.
The thickness of the adhesion auxiliary layer for plating process according to the present invention is preferably 1 to 10 μm, for example, from the viewpoint of reducing the total thickness in the form of the laminated board for wiring board and the multilayer wiring board. When the thickness of the adhesion auxiliary layer for plating process is 1 μm or more and 10 μm or less, good adhesive force with a prepreg, an insulating resin layer or the like can be obtained. Moreover, the favorable adhesive force with the conductor layer formed in the surface of the adhesion auxiliary layer for plating processes is also acquired.

また、本発明に係るめっきプロセス用接着補助層の粗化処理後の表面粗さRaは、0.4μm以下であることが好ましい。粗化処理後の表面粗さRaが0.4μm以下であれば、微細配線化に寄与できる。
粗化処理としては、例えば、次の方法等が挙げられる。まず、膨潤液として、ジエチレングリコールモノブチルエーテルとNaOHとの水溶液を70℃に加温し、積層板または多層配線板を5分間浸漬処理する。次に、粗化液として、KMnOとNaOHとの水溶液を80℃に加温して10分間浸漬処理する。引き続き、中和液、例えば塩化第一錫(SnCl2)の塩酸水溶液に室温で5分間浸漬処理して中和する。粗化処理は、通常、めっきプロセス用接着補助層が硬化した状態(いわゆるCステージ状態)で行われる。
Moreover, it is preferable that surface roughness Ra after the roughening process of the adhesion assistance layer for plating processes which concerns on this invention is 0.4 micrometer or less. If the surface roughness Ra after the roughening treatment is 0.4 μm or less, it can contribute to fine wiring.
Examples of the roughening treatment include the following methods. First, as a swelling liquid, an aqueous solution of diethylene glycol monobutyl ether and NaOH is heated to 70 ° C., and the laminate or multilayer wiring board is immersed for 5 minutes. Next, as a roughening solution, an aqueous solution of KMnO and NaOH is heated to 80 ° C. and immersed for 10 minutes. Subsequently, it is neutralized by immersing it in a neutralizing solution, for example, an aqueous hydrochloric acid solution of stannous chloride (SnCl 2 ) at room temperature for 5 minutes. The roughening treatment is usually performed in a state where the adhesion auxiliary layer for plating process is cured (so-called C stage state).

<支持体付きめっきプロセス用接着補助層>
本発明に係る支持体付きめっきプロセス用接着補助層は、上述しためっきプロセス用接着補助層が支持体に配置されたものである。
接着補助層用樹脂組成物を支持体に配置する場合は、溶剤を除く接着補助層用樹脂組成物の固形分が、例えば、ワニス中8〜40質量%となるように溶剤の使用量を調整することが好ましい。
また、ここで使用する支持体は、例えば、粗化されていない無粗化銅箔、離型処理されているポリエチレンテレフタレートフィルム、ポリエチレンナフタレートフィルム、ポリフェニレンサルファイドフィルム、ポリイミドフィルム及びアルミ箔等が好ましい。
また、積層前のBステージ状態のめっきプロセス用接着補助層は、Bステージ状態のプリプレグ等と反応させる必要があるため、硬化度を制御することが重要である。硬化度は示差走査熱量計から測定される反応率により測定することができる。具体的には、Bステージ状態のめっきプロセス用接着補助層の反応率が、50〜99%であることが好ましい。Bステージ状態のめっきプロセス用接着補助層の反応率が50%以上であれば、積層時の加熱硬化中に、めっきプロセス用接着補助層がBステージ状態のプリプレグと混ざることがなく、めっきプロセス用接着補助層のめっき特性が低下しない点で好ましい。一方、99%以下であれば、めっきプロセス用接着補助層とプリプレグとの界面の接着力が低下せず、導体層との接着力が低下しない点で好ましい。
支持体付きめっきプロセス用接着補助層を製造する方法としては、例えば、コンマコータ、グラビアコータ、ダイコータ等を用いて支持体に接着補助層用樹脂組成物を塗布した後、乾燥する方法などが挙げられる。
<Adhesion auxiliary layer for plating process with support>
The adhesion auxiliary layer for a plating process with a support according to the present invention is one in which the adhesion auxiliary layer for a plating process described above is disposed on a support.
When the resin composition for the auxiliary adhesion layer is arranged on the support, the amount of the solvent used is adjusted so that the solid content of the auxiliary auxiliary layer resin composition excluding the solvent is, for example, 8 to 40% by mass in the varnish. It is preferable to do.
The support used here is preferably, for example, an unroughened copper foil, a polyethylene terephthalate film, a polyethylene naphthalate film, a polyphenylene sulfide film, a polyimide film, and an aluminum foil that have been subjected to a release treatment. .
Further, since the adhesion auxiliary layer for the plating process in the B stage state before lamination needs to react with the prepreg in the B stage state, it is important to control the degree of curing. The degree of cure can be measured by the reaction rate measured from a differential scanning calorimeter. Specifically, the reaction rate of the adhesion auxiliary layer for the plating process in the B-stage state is preferably 50 to 99%. If the reaction rate of the adhesion auxiliary layer for the plating process in the B stage state is 50% or more, the adhesion auxiliary layer for the plating process is not mixed with the prepreg in the B stage state during the heat curing at the time of lamination. This is preferable in that the plating characteristics of the adhesion auxiliary layer do not deteriorate. On the other hand, if it is 99% or less, the adhesive strength at the interface between the plating process adhesion auxiliary layer and the prepreg does not decrease, and this is preferable in that the adhesive strength with the conductor layer does not decrease.
Examples of a method for producing an adhesion auxiliary layer for a plating process with a support include a method in which a resin composition for an adhesion auxiliary layer is applied to a support using a comma coater, a gravure coater, a die coater, and the like, and then dried. .

<配線板用積層板>
本発明に係る配線板用積層板は、めっきプロセス用接着補助層と、配線板用プリプレグとを有し、該接着補助層と該配線板用プリプレグの表面とが接するように重ねられてなる。
本発明に係る配線板用積層板は、上記支持体付きめっきプロセス用接着補助層を、前記めっきプロセス用接着補助層と配線板用プリプレグの表面とが接するように重ね、さらに該支持体付きめっきプロセス用接着補助層の支持体に鏡板を重ねてプレス成型し、成型後に該鏡板と該支持体とを除去することにより製造することができる。
また、配線板用積層体の別の製造方法として、上述した支持体付きめっきプロセス用接着補助層を、前記めっきプロセス用接着補助層と配線板用プリプレグの表面とが接するように重ね、耐熱性ゴムシート等を用いたラミネーターで加熱及び加圧して積層し、積層後に硬化させ、硬化後に前記支持体を除去する方法が挙げられる。
本発明の配線板用積層板は,配線板用プリプレグの一方の表面だけでなく、他方の表面、すなわち、配線板用プリプレグの両面に上記方法によってめっきプロセス用接着補助層が形成されてもよい。
また、本発明で用いられる配線板用プリプレグは、配線板を製造する際に用いられるプリプレグであれば、特に制限されるものではなく、市販品を用いることもできる。配線板用プリプレグの市販品としては、例えば、日立化成株式会社製GEA−67N、GEA−679F、GEA−679GT、GEA−700G(R)、GEA−705G等が挙げられる。
<Laminated board for wiring boards>
The laminated board for wiring boards according to the present invention has a plating process adhesion auxiliary layer and a wiring board prepreg, and is laminated so that the adhesion auxiliary layer and the surface of the wiring board prepreg are in contact with each other.
The laminated board for wiring boards according to the present invention is formed by stacking the support auxiliary adhesion layer for plating process with the support so that the adhesion auxiliary layer for plating process and the surface of the prepreg for wiring board are in contact with each other. It can be manufactured by stacking a mirror plate on the support of the process adhesion auxiliary layer, press molding, and removing the mirror plate and the support after molding.
Further, as another method for producing a laminated body for a wiring board, the above-mentioned adhesion auxiliary layer for plating process with a support is stacked so that the adhesion auxiliary layer for plating process and the surface of the prepreg for wiring board are in contact with each other, Examples include a method of laminating by heating and pressurizing with a laminator using a rubber sheet or the like, curing after lamination, and removing the support after curing.
In the laminated board for wiring board of the present invention, the adhesion auxiliary layer for plating process may be formed not only on one surface of the prepreg for wiring board but also on the other surface, that is, on both surfaces of the prepreg for wiring board by the above method. .
Moreover, the prepreg for wiring boards used by this invention will not be restrict | limited especially if it is a prepreg used when manufacturing a wiring board, A commercial item can also be used. As a commercial item of the prepreg for wiring boards, Hitachi Chemical Co., Ltd. GEA-67N, GEA-679F, GEA-679GT, GEA-700G (R), GEA-705G etc. are mentioned, for example.

<多層配線板>
本発明に係る多層配線板は、上述しためっきプロセス用接着補助層と、配線板用プリプレグと、回路加工が施された配線板とがこの順番に配置された層を含む多層配線板である。
本発明に係る多層配線板は、上述した支持体付きめっきプロセス用接着補助層を、前記めっきプロセス用接着補助層と配線板用プリプレグの表面が接するように重ね、前記配線板用プリプレグのめっきプロセス用接着補助層が接していない面(本発明では、「裏面」と称する)を回路加工が施された配線板(内層回路板ともいう)の表面に接するように重ね、さらに支持体付きめっきプロセス用接着補助層の該支持体に鏡板を重ねてプレス成型し、成型後に該鏡板と該支持体とを除去して得られるものである。その後、粗化処理、無電解めっき処理、及び電気めっき処理を順次施して、めっきプロセス用接着補助層上に回路層を形成することにより製造することができる。
多層配線板の別の製造方法としては、上述した支持体付きめっきプロセス用接着補助層を、前記めっきプロセス用接着補助層と配線板用プリプレグの表面が接するように重ね、前記配線板用プリプレグの裏面を、回路加工が施された配線板の表面に接するように重ね、耐熱性ゴムシート等を用いたラミネーターで加熱及び加圧して積層し、積層後に硬化させ、硬化後に前記支持体を除去する方法が挙げられる。その後、粗化処理、無電解めっき処理、及び電気めっき処理を順次施して、めっきプロセス用接着補助層上に回路層を形成することが可能である。
本発明の多層配線板は、両面に上記方法によってめっきプロセス用接着補助層が形成された配線板用プリプレグがあってもよい。
<Multilayer wiring board>
The multilayer wiring board which concerns on this invention is a multilayer wiring board containing the layer by which the adhesion auxiliary layer for plating processes mentioned above, the prepreg for wiring boards, and the wiring board by which circuit processing was performed are arrange | positioned in this order.
In the multilayer wiring board according to the present invention, the above-mentioned adhesion auxiliary layer for plating process with a support is stacked so that the adhesion auxiliary layer for plating process and the surface of the prepreg for wiring board are in contact with each other, and the plating process for the prepreg for wiring board The surface where the adhesion auxiliary layer for contact is not in contact (referred to as “rear surface” in the present invention) is overlapped with the surface of the circuit board that has been subjected to circuit processing (also referred to as the inner layer circuit board), and further the plating process with support A mirror plate is superimposed on the support of the adhesive auxiliary layer for use and press-molded. After molding, the mirror plate and the support are removed. Then, it can manufacture by performing a roughening process, an electroless-plating process, and an electroplating process in order, and forming a circuit layer on the adhesion auxiliary layer for plating processes.
As another method for manufacturing a multilayer wiring board, the above-mentioned adhesion auxiliary layer for plating process with a support is stacked so that the adhesion auxiliary layer for plating process and the surface of the prepreg for wiring board are in contact with each other, The back surface is stacked so as to be in contact with the surface of the circuit board on which circuit processing has been performed, and is laminated by heating and pressing with a laminator using a heat-resistant rubber sheet or the like, cured after lamination, and the support is removed after curing. A method is mentioned. Thereafter, a circuit layer can be formed on the adhesion auxiliary layer for the plating process by sequentially performing a roughening treatment, an electroless plating treatment, and an electroplating treatment.
The multilayer wiring board of the present invention may include a prepreg for wiring board in which an adhesion auxiliary layer for plating process is formed on both surfaces by the above method.

内層回路板は、例えば、第一の回路層(内層配線)が表面に形成された内層基板であり、内層基板として、通常の配線板において用いられている公知の積層板を用いることができる。内層基板としては、例えば、ガラスエポキシ基板、金属基板、ポリエステル基板、ポリイミド基板、BTレジン基板等が挙げられる。   The inner layer circuit board is, for example, an inner layer board having a first circuit layer (inner layer wiring) formed on the surface, and a known laminated board used in a normal wiring board can be used as the inner layer board. Examples of the inner layer substrate include a glass epoxy substrate, a metal substrate, a polyester substrate, a polyimide substrate, and a BT resin substrate.

また、回路を形成するための方法についても特に制限はなく、銅箔と前記内層基板を張り合わせた銅張り積層板を用い、銅箔の不要な部分をエッチング除去するサブトラクティブ法や、前記内層基板の必要な個所に無電解めっきによって回路を形成するアディティブ法等の公知の配線板の製造方法を用いることができる。   Also, there is no particular limitation on the method for forming a circuit, and a subtractive method in which an unnecessary portion of the copper foil is removed by etching using a copper-clad laminate in which a copper foil and the inner layer substrate are bonded, or the inner layer substrate is used. A well-known method for manufacturing a wiring board such as an additive method for forming a circuit by electroless plating can be used.

次に、必要に応じて回路層の表面を接着性に適した状態に表面処理する。この手法も、特に制限はなく、例えば、次亜塩素酸ナトリウムのアルカリ水溶液により回路層の表面に酸化銅の針状結晶を形成し、形成した酸化銅の針状結晶をジメチルアミンボラン水溶液に浸漬して還元する等の公知の製造方法を用いることができる。   Next, if necessary, the surface of the circuit layer is surface-treated in a state suitable for adhesion. This method is also not particularly limited. For example, a copper oxide needle crystal is formed on the surface of the circuit layer with an alkaline aqueous solution of sodium hypochlorite, and the formed copper oxide needle crystal is immersed in a dimethylamine borane aqueous solution. Then, a known production method such as reduction can be used.

本発明の配線板用積層板又は多層配線板のめっきプロセス用接着補助層上にめっき法で回路を形成する際には、粗化処理することが好ましい。粗化液としては、例えば、クロム/硫酸粗化液、アルカリ過マンガン酸粗化液、フッ化ナトリウム/クロム/硫酸粗化液、ホウフッ酸粗化液等の酸化性粗化液を用いることができる。
粗化処理としては、上述の粗化処理が挙げられる。
When forming a circuit by a plating method on the adhesion auxiliary layer for the plating process of the laminated board or multilayer wiring board of the present invention, it is preferable to perform a roughening treatment. As the roughening liquid, for example, an oxidizing roughening liquid such as a chromium / sulfuric acid roughening liquid, an alkali permanganic acid roughening liquid, a sodium fluoride / chromium / sulfuric acid roughening liquid, or a borofluoric acid roughening liquid may be used. it can.
Examples of the roughening treatment include the above-described roughening treatment.

粗化処理後、パラジウムを付着させるめっき触媒付与処理を行う。めっき触媒処理は、塩化パラジウム系のめっき触媒液に浸漬して行われる。次に、無電解めっき液に浸漬して接着補助層の表面全面に厚さが0.1〜1.5μmの無電解めっき層(導体層)を析出させる。必要により、更に電気めっきを行って必要な厚さとする。無電解めっきに使用する無電解めっき液は、公知の無電解めっき液を使用することができ、特に制限はない。また、電気めっきについても公知の方法によることができ特に制限はない。これらのめっきは銅めっきであることが好ましい。さらに不要な箇所をエッチング除去して回路を形成することができる。これらの工程を繰り返すことにより、層数の多い多層配線板を製造できる。   After the roughening treatment, a plating catalyst applying treatment for attaching palladium is performed. The plating catalyst treatment is performed by immersing in a palladium chloride plating catalyst solution. Next, it is immersed in an electroless plating solution to deposit an electroless plating layer (conductor layer) having a thickness of 0.1 to 1.5 μm on the entire surface of the adhesion auxiliary layer. If necessary, further electroplating is performed to obtain a necessary thickness. As the electroless plating solution used for electroless plating, a known electroless plating solution can be used, and there is no particular limitation. Also, electroplating can be performed by a known method and is not particularly limited. These platings are preferably copper platings. Further, unnecessary portions can be removed by etching to form a circuit. By repeating these steps, a multilayer wiring board having a large number of layers can be produced.

次に、実施例により本発明を説明するが、本発明の範囲はこれらの実施例に限定されるものではない。
[接着補助層用樹脂組成物の調製]
(調製例1)
(C)成分であるフェノール性水酸基含有ポリブタジエン変性ポリアミド(BPAM−155、日本化薬株式会社製、商品名)2.7gに、N-メチル-2-ピロリドン(NMP)を70.0g配合した後、(A)成分であるビフェニルアラルキルノボラック型エポキシ樹脂(NC−3000H、日本化薬株式会社製、商品名)10.0g、(B)成分であるビスフェノールAノボラック型フェノール樹脂(YLH129、三菱化学株式会社製、商品名)3.9g、更に(D)成分であるリン系硬化促進剤としてトリフェニルホスフィン0.20gを添加した後、NMP及びメチルエチルケトンからなる混合溶剤で希釈し、無機充填材(AEROSIL R972、日本アエロジル株式会社製、商品名)0.96gを加え、分散機(ナノマイザー、商品名、吉田機械興業株式会社製)を用いて接着補助層用樹脂組成物のワニス(固形分濃度約20質量%)を得た。
(調製例2)
調製例1の(D)成分の代わりに、トリフェニルホスフィンとp−ベンゾキノンとの付加物を配合した以外は、調製例1と同様とした。
(調製例3)
調製例1の(D)成分の代わりに、硬化促進剤としてトリス(4−メチルフェニル)ホスフィンとp−ベンゾキノンとの付加物を配合した以外は、調製例1と同様とした。
(調製例4)
調製例1の(D)成分の代わりに、硬化促進剤としてトリ-n-ブチルホスフィンとp−ベンゾキノンとの付加反応物を配合した以外は、調製例1と同様とした。
EXAMPLES Next, although an Example demonstrates this invention, the scope of the present invention is not limited to these Examples.
[Preparation of resin composition for adhesion auxiliary layer]
(Preparation Example 1)
After blending 70.0 g of N-methyl-2-pyrrolidone (NMP) with 2.7 g of the phenolic hydroxyl group-containing polybutadiene-modified polyamide (BPAM-155, Nippon Kayaku Co., Ltd., trade name) as component (C) , (A) component biphenylaralkyl novolac type epoxy resin (NC-3000H, Nippon Kayaku Co., Ltd., trade name) 10.0 g, (B) component bisphenol A novolak type phenol resin (YLH129, Mitsubishi Chemical Corporation) 3.9 g made by company, trade name) and 0.20 g of triphenylphosphine as a phosphorus-based curing accelerator as component (D), and then diluted with a mixed solvent consisting of NMP and methyl ethyl ketone, and an inorganic filler (AEROSIL) R972, Nippon Aerosil Co., Ltd., trade name) 0.96 g was added, and the disperser (Nanomizer, The varnish (solid content concentration of about 20% by mass) of the resin composition for the adhesion auxiliary layer was obtained using a trade name, manufactured by Yoshida Kikai Kogyo Co., Ltd.
(Preparation Example 2)
Instead of the component (D) of Preparation Example 1, it was the same as Preparation Example 1 except that an adduct of triphenylphosphine and p-benzoquinone was blended.
(Preparation Example 3)
Instead of the component (D) of Preparation Example 1, it was the same as Preparation Example 1 except that an adduct of tris (4-methylphenyl) phosphine and p-benzoquinone was added as a curing accelerator.
(Preparation Example 4)
Instead of the component (D) of Preparation Example 1, it was the same as Preparation Example 1 except that an addition reaction product of tri-n-butylphosphine and p-benzoquinone was added as a curing accelerator.

(比較調製例1)
調製例1の(D)成分の代わりに、硬化促進剤として2−フェニルイミダゾール(2PZ、四国化成工業株式会社製、商品名)を配合した以外は、調製例1と同様とした。
(比較調製例2)
調製例1の(D)成分の代わりに、硬化促進剤として2−エチル−4−メチルイミダゾール(2E4MZ、四国化成工業株式会社製、商品名)を配合した以外は、調製例1と同様とした。
(Comparative Preparation Example 1)
Instead of the component (D) of Preparation Example 1, it was the same as Preparation Example 1 except that 2-phenylimidazole (2PZ, manufactured by Shikoku Kasei Kogyo Co., Ltd., trade name) was blended as a curing accelerator.
(Comparative Preparation Example 2)
It was the same as that of Preparation Example 1 except that 2-ethyl-4-methylimidazole (2E4MZ, manufactured by Shikoku Kasei Kogyo Co., Ltd., trade name) was blended as a curing accelerator instead of the component (D) of Preparation Example 1. .

(実施例1)
上記調整例の接着補助層用樹脂組成物のワニスを表面が未処理である銅箔(NC−WC−10、古河電気工業株式会社製、商品名)の光沢面に、乾燥後3μmになるように塗布し、190℃で3分間乾燥させ、銅箔付きめっきプロセス用接着補助層を得た。
次いで、配線板用積層板は次のようにして製造した。配線板用プリプレグ(GEA−679FG(R)、日立化成株式会社製、商品名)の0.10mm厚4枚を重ね、その両面に銅箔付きめっきプロセス用接着補助層を銅箔が外側になるように重ね、さらに鏡板と、クッション紙を重ねて、プレス機を用いて、4.0MPa、185℃で1時間加熱することによって、接着補助層用樹脂組成物及び配線板用プリプレグを硬化させた。冷却後、銅箔をエッチングして、配線板用積層板を得た。
また、多層配線板は次のようにして製造した。作製した配線板用積層板を化学粗化するために、膨潤液として、ジエチレングリコールモノブチルエーテル:200ml/L、NaOH:5g/Lの水溶液を作製し、80℃に加温して10分間浸漬処理した。次に、粗化液として、KMnO4:60g/L、NaOH:40g/Lの水溶液を作製し、80℃に加温して15分間浸漬処理した。引き続き、中和液(SnCl2:30g/L、HCl:300ml/L)の水溶液を作製し、40℃に加温して5分間浸漬処理し、KMnO4を還元した。
得られた多層配線板に回路層を形成するために、まず、PdCl2を含む無電解めっき用触媒であるアクチベーターネオガント834(アトテックジャパン株式会社製、商品名)を35℃に加温して5分間浸漬処理し、無電解銅めっき用であるめっき液プリントガントMSK−DK(アトテックジャパン株式会社製、商品名)に室温で15分間浸漬し、さらに硫酸銅電解めっきを行った。その後、アニールを180℃で60分間行い、厚さ20μmの回路層を形成した。
Example 1
The glossy surface of the copper foil (NC-WC-10, manufactured by Furukawa Electric Co., Ltd., trade name) whose surface is untreated with the varnish of the resin composition for the adhesion auxiliary layer of the above adjustment example is 3 μm after drying. And dried at 190 ° C. for 3 minutes to obtain an adhesion auxiliary layer for plating process with copper foil.
Subsequently, the laminated board for wiring boards was manufactured as follows. Four 0.10 mm thick prepregs for wiring boards (GEA-679FG (R), manufactured by Hitachi Chemical Co., Ltd., trade name) are stacked, and the copper foil is on the outer side of the adhesion auxiliary layer for the plating process with copper foil on both sides. Then, the end plate and the cushion paper were further stacked, and the resin composition for the adhesion auxiliary layer and the prepreg for the wiring board were cured by heating at 4.0 MPa and 185 ° C. for 1 hour using a press machine. . After cooling, the copper foil was etched to obtain a laminated board for wiring board.
The multilayer wiring board was manufactured as follows. In order to chemically roughen the produced laminated board for wiring boards, an aqueous solution of diethylene glycol monobutyl ether: 200 ml / L, NaOH: 5 g / L was prepared as a swelling liquid, heated to 80 ° C. and immersed for 10 minutes. . Next, an aqueous solution of KMnO 4 : 60 g / L and NaOH: 40 g / L was prepared as a roughening solution, heated to 80 ° C. and immersed for 15 minutes. Subsequently, an aqueous solution of a neutralizing solution (SnCl 2 : 30 g / L, HCl: 300 ml / L) was prepared, heated to 40 ° C. and immersed for 5 minutes to reduce KMnO 4 .
In order to form a circuit layer on the obtained multilayer wiring board, first, activator Neogant 834 (trade name, manufactured by Atotech Japan Co., Ltd.), which is an electroless plating catalyst containing PdCl 2 , is heated to 35 ° C. Then, it was immersed in a plating solution print Gantt MSK-DK (trade name, manufactured by Atotech Japan Co., Ltd.) for electroless copper plating for 15 minutes at room temperature, and further subjected to copper sulfate electrolytic plating. Thereafter, annealing was performed at 180 ° C. for 60 minutes to form a circuit layer having a thickness of 20 μm.

(実施例2)
実施例1の調製例1のワニスの代わりに調製例2を用いた以外は実施例1と同様とした。
(実施例3)
実施例1の調製例1のワニスの代わりに調製例3を用いた以外は実施例1と同様とした。
(実施例4)
実施例1の調製例1のワニスの代わりに調製例4を用いた以外は実施例1と同様とした。
(Example 2)
Example 1 was the same as Example 1 except that Preparation Example 2 was used instead of the varnish of Preparation Example 1.
(Example 3)
Example 1 was the same as Example 1 except that Preparation Example 3 was used instead of the varnish of Preparation Example 1.
Example 4
Example 1 was the same as Example 1 except that Preparation Example 4 was used instead of the varnish of Preparation Example 1.

(比較例1)
実施例1において、比較調製例1のワニスを用いた以外は実施例1と同様とした。
(比較例2)
実施例1において、比較調製例2のワニスを用いた以外は実施例1と同様とした。
(Comparative Example 1)
Example 1 was the same as Example 1 except that the varnish of Comparative Preparation Example 1 was used.
(Comparative Example 2)
Example 1 was the same as Example 1 except that the varnish of Comparative Preparation Example 2 was used.

[評価方法及び結果]
上述の方法により作製した多層配線板について、銅箔付きめっきプロセス用接着補助層のめっきプロセス用接着補助層のBステージ反応性、回路層とめっきプロセス用接着補助層との接着強度、めっきプロセス用接着補助層の表面粗さを測定した。その結果を第1表及び第2表に示す。なお、測定方法は次のとおりである。
<めっきプロセス用接着補助層のBステージ反応性>
めっきプロセス用接着補助層のBステージ反応性は、得られた銅箔付きめっきプロセス用接着補助層の銅箔から、めっきプロセス用接着補助層を10mg削り取り、示差走査熱量計(ティー・エイ・インスツルメント社製、商品名:Q200)を用い、窒素下で昇温速度10℃/分、40〜300℃の測定条件で、発熱量ΔH(J/g)を測定した。発熱量ΔHは、前記測定条件で得られるDSC曲線の低温側のベースラインから発熱ピークが離れる点と、発熱ピークが高温側のベースラインへ戻る点とを直線で結び、囲まれる部分の面積から求められる。また、乾燥条件を140℃5分間に変更して作製した、めっきプロセス用接着補助層についても同様の方法で発熱量ΔH0(J/g)を算出した。発熱量ΔH0及びΔHを用いて、下記式から調製しためっきプロセス用接着補助層のBステージの反応性(反応率α)を算出した。
α={(ΔH0−ΔH)/ΔH0}×100
評価基準としては、反応率αが85%以上を○(良好)とし、85%未満を×(不良)とした。
<回路層(めっき銅)とめっきプロセス用接着補助層との接着強度>
各実施例及び比較例で得た多層配線板の回路層にエッチング処理によって、幅10mm、長さ100mmの部分を形成し、この一端を回路層/めっきプロセス用接着補助層界面で剥がして、つかみ具でつかみ、垂直方向に引張り速度約50mm/分、室温の条件で引き剥がした時の荷重を測定した。なお、測定装置は、株式会社島津製作所製オートグラフAG−100Cを用いた。
<めっきプロセス用接着補助層の表面粗さ>
各実施例及び比較例で得た多層配線板の回路層をエッチング処理で除去し、得られためっきプロセス用接着補助層の表面粗さRaをVeeco社製、WYKO NT9100を用いて測定した。
[Evaluation method and results]
For the multilayer wiring board produced by the above method, the B stage reactivity of the adhesion auxiliary layer for the plating process of the adhesion auxiliary layer for the plating process with copper foil, the adhesive strength between the circuit layer and the adhesion auxiliary layer for the plating process, for the plating process The surface roughness of the adhesion auxiliary layer was measured. The results are shown in Tables 1 and 2. The measurement method is as follows.
<B stage reactivity of adhesion auxiliary layer for plating process>
The B stage reactivity of the adhesion auxiliary layer for the plating process was determined by scraping 10 mg of the adhesion auxiliary layer for the plating process from the obtained copper foil of the adhesion auxiliary layer for the plating process with copper foil, and using a differential scanning calorimeter (TEA-IN). The calorific value ΔH (J / g) was measured under the measurement conditions of a temperature increase rate of 10 ° C./min and 40 to 300 ° C. under a nitrogen atmosphere using a trade name, Q200) manufactured by Strument. The calorific value ΔH is obtained by connecting the point where the exothermic peak separates from the low temperature side baseline of the DSC curve obtained under the above measurement conditions and the point where the exothermic peak returns to the high temperature side baseline by a straight line. Desired. The calorific value ΔH 0 (J / g) was also calculated in the same manner for the adhesion auxiliary layer for plating process produced by changing the drying conditions to 140 ° C. for 5 minutes. Using the calorific values ΔH 0 and ΔH, the reactivity (reaction rate α) of the B stage of the adhesion auxiliary layer for plating process prepared from the following formula was calculated.
α = {(ΔH 0 −ΔH) / ΔH 0 } × 100
As an evaluation standard, a reaction rate α of 85% or more was evaluated as ◯ (good), and less than 85% was evaluated as x (defective).
<Adhesive strength between circuit layer (plated copper) and adhesion auxiliary layer for plating process>
A part having a width of 10 mm and a length of 100 mm is formed on the circuit layer of the multilayer wiring board obtained in each of the examples and comparative examples by etching, and one end thereof is peeled off at the interface of the circuit layer / adhesion auxiliary layer for plating process. The load was measured when it was grabbed with a tool and peeled in the vertical direction at a pulling rate of about 50 mm / min at room temperature. In addition, Shimadzu Corporation autograph AG-100C was used for the measuring apparatus.
<Surface roughness of adhesion auxiliary layer for plating process>
The circuit layer of the multilayer wiring board obtained in each Example and Comparative Example was removed by etching treatment, and the surface roughness Ra of the obtained adhesion auxiliary layer for plating process was measured using WYKO NT9100 manufactured by Veeco.

Figure 0006291742
Figure 0006291742

Figure 0006291742
Figure 0006291742

第1表及び第2表から、本発明に係るめっきプロセス用接着補助層を含まない比較例1及び2の多層配線板は、実施例1と同程度の接着強度を有するが、B−ステージ反応性が悪く、表面粗さRaが大きい。すなわち、本発明に係る多層配線板は、比較例1、2に示す多層配線板に比べて、良好なB−ステージ反応性を有するため、プリプレグ及びプロセス用接着補助層の各々の成分が他方に分散されることがなく、表面粗さRaが0.4μm以下の平滑な樹脂表面が形成され、且つめっき銅との高接着力を示すことが判った。   From Tables 1 and 2, the multilayer wiring boards of Comparative Examples 1 and 2 that do not include the adhesion auxiliary layer for plating process according to the present invention have the same adhesive strength as Example 1, but the B-stage reaction The surface property Ra is large. That is, since the multilayer wiring board according to the present invention has better B-stage reactivity than the multilayer wiring boards shown in Comparative Examples 1 and 2, each component of the prepreg and the process adhesion auxiliary layer is on the other side. It was found that a smooth resin surface having a surface roughness Ra of 0.4 μm or less was formed without being dispersed, and showed high adhesive strength with plated copper.

Claims (14)

(A)多官能エポキシ樹脂、(B)エポキシ樹脂硬化剤、(C)フェノール性水酸基含有ポリブタジエン変性ポリアミド樹脂、及び(D)リン系硬化促進剤を含有する樹脂組成物であって、前記(D)リン系硬化促進剤が第三ホスフィンとキノン類との付加物であるめっきプロセス用接着補助層用樹脂組成物。 (A) a polyfunctional epoxy resin, (B) an epoxy resin curing agent, (C) a phenolic hydroxyl group-containing polybutadiene-modified polyamide resin, and (D) a phosphorus-based curing accelerator, ) A resin composition for an adhesion auxiliary layer for a plating process, wherein the phosphorus curing accelerator is an adduct of a tertiary phosphine and a quinone. 前記(A)多官能エポキシ樹脂がビフェニル構造を有する請求項1に記載のめっきプロセス用接着補助層用樹脂組成物。 The resin composition for an adhesion auxiliary layer for a plating process according to claim 1, wherein the (A) polyfunctional epoxy resin has a biphenyl structure. 前記(A)多官能エポキシ樹脂がアラルキルノボラック型エポキシ樹脂である請求項1又は2に記載のめっきプロセス用接着補助層用樹脂組成物。 The resin composition for an adhesion auxiliary layer for a plating process according to claim 1 or 2, wherein the (A) polyfunctional epoxy resin is an aralkyl novolac type epoxy resin. さらに、無機充填材を含有する、請求項1〜3のいずれか一項に記載のめっきプロセス用接着補助層用樹脂組成物。 Furthermore, the resin composition for adhesion auxiliary layers for plating processes as described in any one of Claims 1-3 containing an inorganic filler. 請求項1〜4のいずれか一項に記載のめっきプロセス用接着補助層用樹脂組成物を含有するめっきプロセス用接着補助層。 The adhesion auxiliary layer for plating processes containing the resin composition for adhesion auxiliary layers for plating processes as described in any one of Claims 1-4. 前記めっきプロセス用接着補助層の厚みが1〜10μmである請求項5に記載のめっきプロセス用接着補助層。   The adhesion auxiliary layer for plating process according to claim 5, wherein the adhesion auxiliary layer for plating process has a thickness of 1 to 10 μm. 前記めっきプロセス用接着補助層の粗化処理後の表面粗さRaが0.4μm以下である請求項5又は6に記載のめっきプロセス用接着補助層。   The adhesion auxiliary layer for plating process according to claim 5 or 6, wherein the surface roughness Ra after the roughening treatment of the adhesion auxiliary layer for plating process is 0.4 µm or less. 請求項5〜7のいずれか一項に記載のめっきプロセス用接着補助層が支持体に配置された支持体付きめっきプロセス用接着補助層。   An adhesion auxiliary layer for a plating process with a support, wherein the adhesion auxiliary layer for a plating process according to any one of claims 5 to 7 is disposed on a support. 請求項5〜7のいずれか一項に記載のめっきプロセス用接着補助層と、配線板用プリプレグとを有し、該接着補助層と該配線板用プリプレグの表面とが接するように重ねられてなる配線板用積層板。   It has the adhesion auxiliary layer for plating processes as described in any one of Claims 5-7, and the prepreg for wiring boards, It is piled up so that this adhesion auxiliary layer and the surface of this prepreg for wiring boards may touch. A laminated board for a wiring board. 請求項8に記載の支持体付きめっきプロセス用接着補助層を、該接着補助層と配線板用プリプレグの表面とが接するように重ね、該支持体と鏡板を重ねてプレス成型し、成型後に該鏡板と該支持体とを除去する配線板用積層板の製造方法。   The adhesion auxiliary layer for a plating process with a support according to claim 8 is overlaid so that the adhesion auxiliary layer and the surface of the prepreg for wiring board are in contact with each other, the support and the end plate are overlaid, press-molded, and after molding, A method for producing a laminated board for wiring board, wherein the end plate and the support are removed. 請求項8に記載の支持体付きめっきプロセス用接着補助層を、該接着補助層と配線板用プリプレグの表面とが接するように重ね、ラミネーターで加熱及び加圧して積層し、積層後に硬化させ、硬化後に前記支持体を除去する配線板用積層板の製造方法。   The adhesion auxiliary layer for a plating process with a support according to claim 8 is laminated so that the adhesion auxiliary layer and the surface of the prepreg for wiring board are in contact with each other, laminated by heating and pressing with a laminator, and cured after lamination, A method for producing a laminated board for a wiring board, wherein the support is removed after curing. 請求項5〜7のいずれか一項に記載のめっきプロセス用接着補助層と、配線板用プリプレグと、回路加工が施された配線板とがこの順番に配置された層を含む多層配線板。   The multilayer wiring board containing the layer by which the adhesion auxiliary layer for plating processes as described in any one of Claims 5-7, the prepreg for wiring boards, and the wiring board by which circuit processing was performed are arrange | positioned in this order. 請求項8に記載の支持体付きめっきプロセス用接着補助層を、該接着補助層と配線板用プリプレグの表面が接するように重ね、前記配線板用プリプレグの裏面を回路加工が施された配線板の表面に接するように重ね、該支持体と鏡板を重ねてプレス成型し、成型後に該鏡板と該支持体を除去する多層配線板の製造方法。   9. A wiring board wherein the support auxiliary layer for plating process with support according to claim 8 is stacked so that the adhesion auxiliary layer and the surface of the prepreg for wiring board are in contact with each other, and the back surface of the prepreg for wiring board is subjected to circuit processing. A method of manufacturing a multilayer wiring board, wherein the substrate and the end plate are stacked so as to be in contact with each other, press-molded, and the end plate and the support are removed after molding. 請求項8に記載の支持体付きめっきプロセス用接着補助層を、該接着補助層と配線板用プリプレグの表面が接するように重ね、前記配線板用プリプレグの裏面を回路加工が施された配線板の表面に接するように重ね、ラミネーターで加熱及び加圧して積層し、積層後に硬化させ、硬化後に前記支持体を除去する多層配線板の製造方法。   9. A wiring board wherein the support auxiliary layer for plating process with support according to claim 8 is stacked so that the adhesion auxiliary layer and the surface of the prepreg for wiring board are in contact with each other, and the back surface of the prepreg for wiring board is subjected to circuit processing. A method for producing a multilayer wiring board, wherein the layers are laminated so as to be in contact with each other, heated and pressurized with a laminator, laminated, cured after lamination, and the support is removed after curing.
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