JP6285232B2 - Heat treatment furnace - Google Patents

Description

  The present invention relates to a heat treatment furnace provided with an electrothermal heater.

  Patent Document 1 discloses a hybrid heating furnace. The hybrid heating furnace heats a workpiece by using a large number of electric heaters and a microwave generator in combination. Many heaters each include a heating element that generates heat when energized. A number of heating elements are arranged in the heating chamber. A large number of heating elements are arranged on both upper and lower sides of a large number of rollers that convey the workpiece. A large number of upper and lower two heating elements are arranged in the workpiece conveyance direction. Further, the number of heating elements arranged in the lower stage is set larger than that in the upper stage.

  Further, the heating element extends in the horizontal direction and in a direction orthogonal to the transport direction. Both ends in the horizontal direction (axial direction) of the heating element are electrically connected to a power source. The heating element is electrically insulated from the housing of the hybrid heating furnace.

JP 2011-9164 A

  However, depending on the component of the workpiece and the atmosphere in the heating chamber, soot (carbon fine particles) may be generated in the heating chamber. The bag has conductivity. Soot is likely to be deposited near both ends in the horizontal direction of the heating element, that is, near the electrodes and on the outer surface of the heating element. For this reason, a discharge phenomenon may occur due to the heater voltage. Therefore, an object of the present invention is to provide a heat treatment furnace in which a discharge phenomenon is unlikely to occur.

  (1) In order to solve the above-described problem, a heat treatment furnace of the present invention includes a conductor housing, a heating chamber that is partitioned inside the housing, heats a workpiece, and is vertically inserted into the heating chamber. And an electrothermal heater having a heating element that is electrically grounded through a housing.

  As described above, conventionally, the heating element has been arranged horizontally in two stages, upper and lower, in order to reduce the temperature gradient in the vertical direction in the heating chamber. On the other hand, the heating element of the heat treatment furnace of the present invention extends in the vertical direction (specifically, the direction intersecting the horizontal direction) in the heating chamber. The bag easily moves to the lower part of the heating chamber due to its own weight. For this reason, soot is unlikely to accumulate near the upper end of the heating element. Therefore, a discharge phenomenon is unlikely to occur near the upper end of the heating element. Further, since the heating element extends in the vertical direction, soot is unlikely to accumulate on the outer surface of the heating element. For this reason, the discharge phenomenon hardly occurs near the outer surface of the heating element.

  However, soot tends to accumulate near the lower end of the heating element due to its own weight. In this respect, the heating element is not electrically insulated from the housing. That is, the heating element is electrically connected to the housing. The heating element is grounded via the housing. For this reason, even though soot is likely to accumulate, a discharge phenomenon is unlikely to occur near the lower end of the heating element. Thus, according to the heat treatment furnace of the present invention, the discharge phenomenon is less likely to occur.

  According to the present invention, it is possible to provide a heat treatment furnace in which a discharge phenomenon is unlikely to occur.

1 is a cross-sectional view in the front-rear direction of a vacuum carburizing furnace as an embodiment of a heat treatment furnace of the present invention. It is a left-right direction sectional view of the cooling part of the vacuum carburizing furnace. It is a left-right direction sectional view of the heating part of the vacuum carburizing furnace. FIG. 4 is an enlarged view in a circle IV in FIG. 3. It is an enlarged view in the circle V of FIG. FIG. 4 is an enlarged view in a circle VI in FIG. 3. It is a wiring diagram of the heater of the vacuum carburizing furnace.

  Hereinafter, an embodiment in which the heat treatment furnace of the present invention is embodied as a vacuum carburizing furnace will be described.

<Configuration of vacuum carburizing furnace>
First, the structure of the vacuum carburizing furnace of this embodiment will be described. In FIG. 1, the front-back direction sectional drawing of the vacuum carburizing furnace of this embodiment is shown. FIG. 2 shows a cross-sectional view in the left-right direction of the cooling part of the vacuum carburizing furnace. In FIG. 3, the left-right direction sectional drawing of the heating part of the vacuum carburizing furnace is shown. FIG. 4 shows an enlarged view in a circle IV in FIG. FIG. 5 shows an enlarged view in the circle V of FIG. FIG. 6 shows an enlarged view in the circle VI of FIG. FIG. 7 shows a wiring diagram of the heater of the vacuum carburizing furnace.

  As shown in FIGS. 1 to 7, the vacuum carburizing furnace 1 of the present embodiment includes a heating unit 2, a cooling unit 3, a base unit 4, a transport unit 5, a ground unit 6, a front door 70, and an intermediate unit. The door 71, the tray 72, and the piping part 9 are provided.

[Base part 4, heating part 2]
The base 4 accommodates equipment such as a transformer (not shown). The heating unit 2 is disposed on the upper side of the base 4. In the heating unit 2, the workpiece W is subjected to carburizing treatment. The heating unit 2 includes an outer housing 20, an inner housing 21, a plurality of heaters 22, a plurality of heater mounting portions 23, a heat insulating door 24, a plurality of sealing heat insulating materials 25, a plurality of electrodes 26, and left and right A pair of hearths 27, a heating fan 28, and a plurality of thermocouples 29 are provided. The outer housing 20 is included in the “housing” concept of the present invention.

  The outer housing 20 is made of steel and has a box shape. The outer housing 20 has conductivity. A pair of left and right guide rails 200 are laid on the floor surface of the outer housing 20. The guide rail 200 extends in the front-rear direction (the conveyance direction of the workpiece W).

  The inner housing 21 includes an outer shell 210, a heat insulating material 211, a plurality of gas vent holes 212, a front opening 213, and a plurality of wheels 214. The inner housing 21 is accommodated in the outer housing 20. The outer shell 210 is made of punching metal and has a box shape. The heat insulating material 211 is made of ceramic fiber. The heat insulating material 211 is laminated on the inner surface of the outer shell 210. A heating chamber R <b> 1 is defined inside the heat insulating material 211. The plurality of vent holes 212 are formed in the bottom wall of the inner housing 21. The front opening 213 is formed in the front wall of the inner housing 21. The plurality of wheels 214 are disposed on the bottom wall of the inner housing 21. The plurality of wheels 214 can roll in the front-rear direction with respect to the pair of left and right guide rails 200. For this reason, the inner housing 21 is movable in the front-rear direction with respect to the outer housing 20.

  Each of the plurality of heaters 22 penetrates the inner housing 21 in the vertical direction (vertical direction). The heater 22 is a so-called electric heater that generates heat when energized. The heater 22 is exposed to the heating chamber R1. The heater 22 includes a heating element 220 and a protective tube 221. The heating element 220 is made of recrystallized silicon carbide (that is, made of nonmetal) and has a long round bar shape in the vertical direction. The protective tube 221 is made of ceramic and has a long cylindrical shape in the vertical direction. A heating element 220 is accommodated inside the protective tube 221 in the radial direction. As shown in FIG. 5, both ends in the vertical direction (both ends in the axial direction) of the heating element 220 protrude from both ends in the axial direction of the protective tube 221 to both sides in the vertical direction.

  The plurality of heater mounting portions 23 are disposed at both ends of the plurality of heaters 22 in the vertical direction. The heater mounting portion 23 fixes the heater 22 to the inner housing 21. As shown in FIG. 5, the heater attachment portion 23 on the lower side of the heater 22 includes a holder 230, a clamp 232, and a heater receiver 233. The holder 230 has a cup shape that opens upward. The lower end of the protective tube 221 is accommodated inside the holder 230. The lower end of the heating element 220 protrudes downward from the holder 230. The lower end of the heating element 220 is supported by the heater receiver 233. The clamp 232 is attached to the lower end of the heating element 220.

  As shown in FIG. 6, the configuration of the heater mounting portion 23 on the upper side of the heater 22 includes a holder 230, a refractory heat insulating brick 231, and a clamp 232. The holder 230 has a short-axis cylindrical shape. The upper end of the protective tube 221 is accommodated in the holder 230. Inside the holder 230, a fireproof and heat insulating brick 231 having insulating properties is disposed. The refractory heat insulating brick 231 holds the heating element 220. For this reason, the insulation between the holder 230 and the heating element 220 is ensured.

  The heat insulating door 24 covers the front opening 213 of the inner housing 21 from the front side (outside). The heat insulating door 24 can slide in the left-right direction. The sealing heat insulating material 25 covers the gas vent hole 212 of the inner housing 21 from the lower side (outer side). A vent hole 250 is formed in the sealing heat insulating material 25. The gas vent hole 250 communicates with the gas vent hole 212.

  Each of the plurality of electrodes 26 is electrically connected to a clamp 232 of the heater mounting portion 23 on the upper side of the heater 22. The electrode 26 is electrically connected to the secondary side of the transformer. The electrode 26 applies a three-phase (R-phase, S-phase, T-phase) AC voltage to the plurality of heating elements 220.

  The pair of left and right hearths 27 are disposed on the bottom wall of the inner housing 21. The hearth 27 includes a hearth main body 270 and a pair of front and rear columns 271. The support column 271 is fixed to the bottom wall of the inner housing 21. The hearth main body 270 is made of a silicon carbide refractory and has a prismatic shape that is long in the front-rear direction. The hearth main body 270 is installed between a pair of front and rear columns 271. The hearth main body 270 and the column 271 are fixed by a wire 272 made of Nichrome wire (trademark). The heating fan 28 is disposed in the upper part of the heating chamber R1. The plurality of thermocouples 29 are arranged in the upper part of the heating chamber R1.

[Cooling unit 3, front door 70, intermediate door 71]
The cooling unit 3 is disposed on the front side of the base unit 4 and the heating unit 2. In the cooling unit 3, the workpiece W is quenched. The cooling unit 3 includes a housing 30, a cooling fan 31, an oil tank 32, an oil fan 33, and a pair of left and right oil heaters 34. The housing 30 is made of steel and has a box shape. A front opening 300 is formed in the front wall of the housing 30. A cooling chamber R <b> 2 is defined inside the housing 30. The cooling fan 31 is disposed in the upper part of the cooling chamber R2. The oil tank 32 is disposed in the lower part of the cooling chamber R2. The oil tank 32 stores quenching oil. The oil fan 33 is disposed inside the oil tank 32. The pair of left and right oil heaters 34 can heat the oil in the oil tank 32.

  The front door 70 covers the front opening 300 of the housing 30 from the front side (outside). The front door 70 can slide in the vertical direction. An intermediate opening 730 is formed in the partition wall 73 between the outer housing 20 of the heating unit 2 and the housing 30 of the cooling unit 3. The intermediate door 71 covers the intermediate opening 730 from the front side (outside as viewed from the heating chamber R1). The intermediate door 71 is slidable in the left-right direction.

[Conveying unit 5, tray 72]
The transport unit 5 includes a vertical transport unit 50 and a horizontal transport unit 51. The vertical conveyance unit 50 includes an elevator 500, a hydraulic cylinder 501, a chain 502, a movable sprocket 503, and a fixed sprocket 504. The elevator 500 is disposed inside the cooling chamber R2. The cylinder 501 is attached to the rear surface (outer surface) of the rear wall of the housing 30. One end of the chain 502 is fixed to the front surface (inner surface) of the rear wall of the housing 30. The other end of the chain 502 is fixed to the elevator 500. The movable sprocket 503 is disposed at the front end of the rod 501a of the cylinder 501. The fixed sprocket 504 is fixed to the housing 30. The chain 502 is wound around a movable sprocket 503 and a fixed sprocket 504. When the rod 501a is moved in the front-rear direction, the distance between the movable sprocket 503 and the fixed sprocket 504 changes. For this reason, the elevator 500 can be moved up and down.

  As shown in FIG. 2, the horizontal conveyance unit 51 includes a pair of left and right forks 510, two pairs of left and right outer rollers 511, a pair of left and right movable guide rails 512, a pair of left and right inner rollers 513, and a pair of left and right sides. A fixed guide rail 514.

  The configurations on the left and right sides of the horizontal transport unit 51 are the same. Moreover, the arrangement | positioning of the right-and-left both sides of the horizontal direction conveyance part 51 is left-right symmetric. Hereinafter, as a representative, the configuration and arrangement on the right side of the horizontal conveyance unit 51 will be described.

  The fixed guide rail 514 is fixed to the elevator 500. The pair of upper and lower outer rollers 511 are rotatably supported by the fixed guide rail 514. The movable guide rail 512 has a C-shaped cross section. The pair of upper and lower outer rollers 511 sandwich the movable guide rail 512 from the outer side in the vertical direction. The inner roller 513 is accommodated in the C shape of the movable guide rail 512. The inner roller 513 is rotatably supported on the fork 510.

  When the pair of upper and lower outer rollers 511 rotate, the movable guide rail 512 can move in the front-rear direction with respect to the fixed guide rail 514. By rotating the inner roller 513, the fork 510 can move in the front-rear direction with respect to the movable guide rail 512. Thus, the fork 510 can move in the front-rear direction in two stages (the first stage is the movement of the movable guide rail 512 relative to the fixed guide rail 514 and the second stage is the movement of the fork 510 relative to the movable guide rail 512). .

  A work W is mounted on the tray 72. The workpiece W is a steel material. The tray 72 is transported in the vertical direction by the vertical transport unit 50 while being placed on the pair of left and right forks 510. The tray 72 is transported in the front-rear direction by the horizontal transport unit 51 while being placed on the pair of left and right forks 510.

[Piping part 9]
The piping unit 9 includes a decompression unit 90, a carburizing gas supply unit 91, a cooling chamber nitrogen gas supply unit 92, a heating chamber nitrogen gas supply unit 93, and an air / nitrogen gas supply unit 94. . The decompression unit 90 includes a vacuum pump 900 and a mechanical booster pump 901. The inside of the outer housing 20, that is, the heating chamber R1, can be decompressed by the vacuum pump 900. The cooling chamber R2 can be depressurized by a vacuum pump 900. Nitrogen gas can be supplied to the secondary side (discharge side) of the vacuum pump 900. For this reason, nitrogen gas can be mixed with exhaust.

  The carburizing gas supply unit 91 includes a plurality of nozzles 910. The nozzle 910 is inserted into the heating chamber R1. Carburizing gas and nitrogen gas can be supplied to the nozzle 910. A mass flow meter (mass flow meter) for adjusting the flow rates of the carburizing gas and the nitrogen gas is disposed on the upstream side of the nozzle 910. A plurality of injection holes 910 a are formed at the tip (downstream end) of the nozzle 910. The injection hole 910a extends in the radial direction.

  The cooling chamber nitrogen gas supply unit 92 can supply nitrogen to the cooling chamber R2. The heating chamber nitrogen gas supply unit 93 can supply nitrogen to the heating chamber R1. As shown in FIG. 5, the atmosphere / nitrogen gas supply unit 94 passes the internal space of the heater receiver 233 into the gap between the heating element 220 of the heater 22 and the protective tube 221 and supplies the atmosphere (air) and nitrogen gas. At least one of them can be supplied.

[Earth part 6]
The ground portion 6 includes an inner ground wire 60 and an outer ground wire 61. As shown in FIG. 5, the inner ground wire 60 electrically connects the clamp 232 of the heater mounting portion 23 on the lower side of the heater 22 and the outer housing 20. Similarly, the heater receiver 233 electrically connects the lower end of the heater 22 and the outer housing 20. The inner ground wire 60 is electrically connected to the outer housing 20. For this reason, the neutral point O of the three-phase alternating current becomes the outer housing 20. As shown in FIG. 3, the outer ground wire 61 electrically grounds the outer housing 20. For this reason, the lower end of the heating element 220 of the heater 22 is electrically grounded via the inner ground wire 60 (and the heater receiver 233), the outer housing (neutral point O) 20, and the outer ground wire 61. .

<The movement of the vacuum carburizing furnace>
Next, the movement of the vacuum carburizing furnace of this embodiment will be described. First, as shown in FIG. 2, nitrogen gas for returning pressure (returning the pressure from less than atmospheric pressure to atmospheric pressure) is supplied to the cooling chamber R <b> 2 via the cooling chamber nitrogen gas supply unit 92. Next, when the pressure in the cooling chamber R2 reaches atmospheric pressure, the front door 70 is opened as shown in FIG. Subsequently, the tray 72 on which the workpiece W is mounted is carried into the cooling chamber R2 through the front opening 300. That is, the tray 72 is placed on a pair of left and right forks 510. Then, the front door 70 is closed.

  Subsequently, the cooling chamber R <b> 2 is decompressed via the decompression unit 90. Thereafter, when the pressure in the cooling chamber R2 reaches the pressure in the heating chamber R1, the intermediate door 71 and the heat insulating door 24 are opened. Then, the tray 72 on which the work W is mounted is carried into the heating chamber R <b> 1 by the horizontal conveyance unit 51 through the intermediate opening 730 and the front opening 213. That is, the tray 72 is placed on the hearth 27. Subsequently, the intermediate door 71 and the heat insulating door 24 are closed.

  Then, the heating chamber R1 is decompressed through the decompression unit 90. Further, the work W is heated to about 950 ° C. to 1050 ° C. by the plurality of heaters 22 while reducing the pressure in the heating chamber R1. The temperature of the heating chamber R1 is detected by the thermocouple 29. Subsequently, when the temperature of the workpiece W becomes uniform, the carburizing gas is supplied to the heating chamber R1 through the carburizing gas supply unit 91 as shown in FIG. As shown in FIG. 4, the carburizing gas is injected into the heating chamber R <b> 1 from the injection hole 910 a at the tip of the nozzle 910. Here, the injection hole 910a extends in the radial direction of the nozzle 910 (vertical front-rear direction). For this reason, the cold carburizing gas blown into the heating chamber R1 does not directly collide with the workpiece W. The carburizing gas diffuses in the heating chamber R <b> 1 in the vertical direction along the heater 22. At this time, the carburized gas is heated by the heater 22. The heated carburizing gas collides with the workpiece W. For this reason, temperature variations are unlikely to occur on the surface of the workpiece W. When a predetermined time has elapsed, the carburizing gas injection is stopped. The heating chamber R1 is held at a predetermined temperature for a predetermined time. At this time, carbon diffuses from the surface of the workpiece W to the inside. In this manner, the workpiece W is carburized in the heating chamber R1.

  Subsequently, the temperature of the heating chamber R1 is lowered to about 850 ° C. When the temperature of the workpiece W becomes uniform, nitrogen gas is supplied to the cooling chamber R2 via the cooling chamber nitrogen gas supply unit 92 as shown in FIG. The cooling chamber R2 is adjusted to a reduced pressure value during quenching. As shown in FIG. 3, a nitrogen gas for returning pressure is supplied to the heating chamber R <b> 1 via the heating chamber nitrogen gas supply unit 93. When the pressures in the cooling chamber R2 and the heating chamber R1 reach the same pressure, the intermediate door 71 and the heat insulating door 24 are opened as shown in FIG. Then, the tray 72 on which the work W is mounted is carried into the cooling chamber R <b> 2 by the horizontal conveyance unit 51 through the intermediate opening 730 and the front opening 213. Subsequently, the intermediate door 71 and the heat insulating door 24 are closed. Then, the tray 72 on which the workpiece W is mounted is lowered together with the elevator 500 by the vertical conveyance unit 50. Then, the work W is immersed in the oil in the oil tank 32. When the predetermined time has elapsed, the tray 72 is raised by the vertical conveyance unit 50, the cooling chamber R <b> 2 is brought to atmospheric pressure, and the tray 72 is taken out through the front opening 300. In this manner, the workpiece W is quenched in the cooling chamber R2.

<Effect>
Next, the effect of the vacuum carburizing furnace of this embodiment is demonstrated. As shown in FIGS. 3 and 5, the heater 22 extends in the vertical direction (direction orthogonal to the horizontal direction) in the heating chamber R <b> 1. The soot generated during carburizing tends to move downward due to its own weight. For this reason, soot hardly accumulates near the upper end of the heating element 220. Accordingly, a discharge phenomenon is unlikely to occur near the upper end of the heating element 220. Further, since the heating element 220 extends in the vertical direction, soot is unlikely to accumulate on the outer peripheral surface of the heating element 220. For this reason, a discharge phenomenon hardly occurs near the outer peripheral surface of the heating element 220.

  As shown in FIG. 7, all the heating elements 220 are grounded via the inner ground wire 60 (and the heater receiver 233), the outer housing (neutral point O) 20, and the outer ground wire 61. For this reason, in the vicinity of the lower end of the heating element 220, the discharge phenomenon is unlikely to occur although the soot easily accumulates. Thus, according to the vacuum carburizing furnace 1 of the present embodiment, the discharge phenomenon is less likely to occur.

  Further, as shown in FIG. 3, the heat insulating material 211 is made of ceramic fiber. The hearth body 270 is made of a silicon carbide refractory. The heating element 220 of the heater 22 is made of recrystallized silicon carbide. The protective tube 221 is made of ceramic. For this reason, at the time of burnout for burning the soot accumulated in the heating chamber R1, these members are not easily oxidized.

  In addition, the heating element 220 is covered with a protective tube 221 in the heating chamber R1. For this reason, the soot does not easily adhere to the heating element 220 in the heating chamber R1. Therefore, the discharge phenomenon is less likely to occur in the heating chamber R1.

  As shown in FIG. 3, at the time of carburizing, the atmosphere and nitrogen gas are introduced into the gap between the heating element 220 and the protective tube 221 via the atmosphere / nitrogen gas supply unit 94. Further, nitrogen gas is introduced near the upper end of the heating element 220. Further, as shown in FIG. 1, the electrode 26 is disposed outside the heating chamber R1. For this reason, it becomes difficult for the discharge phenomenon to occur in the heating chamber R1.

  As shown in FIG. 6, the upper end of the heating element 220 is supported by a refractory heat insulating brick 231. For this reason, the heating element 220 can be positioned with respect to the holder 230 while ensuring insulation. The voltage applied to the heating element 220 is set to 200V or less. For this reason, the discharge phenomenon is less likely to occur.

  At the time of burnout, the introduction of the atmosphere is performed at a position close to the heating element 220. For this reason, the soot of the location which needs to ensure insulation can be burned reliably. Further, a metal member is prevented from being exposed as much as possible inside the heating chamber R1. For example, as shown in FIG. 1, the support column 271 is embedded in the heat insulating material 211. For this reason, the oxidation of a metal member can be suppressed.

  In addition, if the hearth main body 270 and the tray 72 shown in FIG. 1 are attached to each other, the hearth main body 270 is lifted when the tray 72 is unloaded from the hearth main body 270. In this regard, the hearth main body 270 is fixed to the support column 271 with a wire 272. The support column 271 is fixed to the heat insulating material 211. For this reason, when carrying out the tray 72 from the hearth main body 270, the hearth main body 270 does not easily float.

  Further, as shown in FIG. 3, a heating fan 28 is disposed in the heating chamber R1. For this reason, in addition to the radiant heat transfer from the heater 22, the work W can be rapidly heated by the convection heat transfer. Further, the accuracy of temperature control inside the heating chamber R1 can be improved. In addition, the heating fan 28 is made of heat-resistant cast steel. For this reason, the heating fan 28 has high heat resistance and oxidation resistance.

  The thermocouple 29 is inserted vertically into the heating chamber R1 from above. For this reason, compared with the case where the thermocouple 29 is inserted into the heating chamber R1 from the horizontal direction, the thermocouple 29 is not easily deformed (for example, bent) by the heat of the heating chamber R1. Therefore, the durability of the thermocouple 29 can be improved.

  Further, the flow rate of the carburizing gas is managed by a mass flow meter. For this reason, the flow rate of the carburizing gas can be controlled with high accuracy regardless of the pressure fluctuation of the heating chamber R1. Further, the pressure in the heating chamber R1 during carburization is controlled by a capacitance manometer (not shown). For this reason, the pressure of the heating chamber R1 can be controlled with high accuracy regardless of the nature of the carburizing gas.

  The carburizing gas is introduced into the heating chamber R1 in a vacuum. For this reason, the carburizing gas is likely to diffuse into the heating chamber R1. Therefore, the number of nozzles 910 can be reduced. Further, as shown in FIGS. 1 and 3, gas vent holes 212 and 250 are set separately from the nozzle 910. For this reason, carburizing gas tends to spread in heating chamber R1. That is, the carburizing gas easily comes into contact with the surface of the workpiece W.

  Further, as shown in FIGS. 1 and 3, the gas vent hole 212 is covered with a sealing heat insulating material 25. For this reason, leakage of heat from the heating chamber R1 can be suppressed. Moreover, as shown in FIG. 1, nitrogen gas is supplied to the secondary side (discharge side) of the vacuum pump 900 at the time of carburizing. For this reason, combustible gas can be discharge | released outside, diluting with nitrogen gas.

  Further, at the time of carburizing, the flow rate of the necessary carburizing gas decreases with time. In this regard, the flow rate of the carburizing gas is managed by a mass flow meter. For this reason, the flow rate of the carburizing gas can be automatically reduced with the passage of time. Further, as shown in FIG. 4, the injection hole 910 a extends in the radial direction (vertical front-rear direction) of the nozzle 910. For this reason, the cold carburizing gas blown into the heating chamber R1 does not directly collide with the workpiece W. Therefore, the temperature of the workpiece W is unlikely to decrease locally.

  Further, as shown in FIG. 3, when the pressure in the heating chamber R1 is restored, nitrogen gas is ejected from the nozzle 910. For this reason, it is possible to suppress the soot from flowing backward from the heating chamber R1 to the nozzle 910 during the return pressure. Therefore, equipment on the upstream side of the nozzle 910 such as a mass flow meter can be protected from soot. In addition, clogging of the nozzle 910 can be suppressed.

  As shown in FIG. 1, the hearth 27 is integrated with the inner housing 21. For this reason, the hearth 27 can be pulled out from the outer housing 20 at the same time as the inner housing 21 is pulled out from the outer housing 20. Therefore, maintenance is easy.

  As shown in FIG. 2, the pair of left and right forks 510 has two stages (the first stage is the movement of the movable guide rail 512 with respect to the fixed guide rail 514, and the second stage is the movement of the fork 510 with respect to the movable guide rail 512). It can move in the front-rear direction. For this reason, the horizontal direction conveyance part 51 can be reduced in size.

  Further, the moving speed of the fork 510 can be adjusted. For this reason, the conveyance speed of the workpiece | work W can be adjusted. In addition, the collapse of the workpiece W can be suppressed. Further, when the cooling chamber R2 is depressurized, the front door 70 shown in FIG. 1 is adsorbed around the front opening 300 due to a pressure difference between the outside and the cooling chamber R2. For this reason, the holding mechanism of the front door 70 is unnecessary.

  Moreover, the outer shell 210 of the inner housing 21 shown in FIG. 3 is made of punching metal. For this reason, the heat insulating material 211 can be fixed easily. Moreover, collapse of the heat insulating material 211 due to the wind pressure at the time of decompression can be suppressed. Moreover, at the time of carburizing, the heat insulation door 24 shown in FIG. 1 is pressed from the front side with the roller (not shown). For this reason, leakage of heat from the heating chamber R1 can be suppressed. On the other hand, the volume expansion of the heating chamber R <b> 1 due to heating can be absorbed by the heat insulating door 24.

  As shown in FIG. 1, the exhaust pipe at the time of burnout communicates between the mechanical booster pump 901 and the vacuum pump 900 and the inside of the outer housing 20. For this reason, high temperature gas can be prevented from entering the mechanical booster pump 901. Further, the exhaust pipe at the time of burnout is water-cooled. For this reason, high temperature gas can be cooled in exhaust piping.

  Moreover, as shown in FIG. 1, the cylinder 501 for the elevator 500 is placed horizontally (placed in the horizontal direction). For this reason, the vacuum carburizing furnace 1 can be reduced in size. Further, the chain 502 for the elevator 500 is doubled. For this reason, the stroke of the cylinder 501 with respect to the moving distance of the elevator 500 can be made small.

  Further, a water cooling jacket (not shown) is disposed at the seal portion of the intermediate door 71. For this reason, the deterioration by the heat | fever of a seal | sticker part (for example, O-ring) can be suppressed. Moreover, the oil surface pressure of the oil tank 32 shown in FIG. 2 can be controlled at the time of quenching. For this reason, the quality of quenching can be improved.

  Further, the outer housing 20, the inner housing 21, and the housing 30 each have a simple box shape. For this reason, the manufacturing cost of these housings can be reduced. The transformer is housed in the base 4 shown in FIG. For this reason, the vacuum carburizing furnace 1 can be reduced in size. Further, the wiring for the heater 22 can be shortened.

  Further, at the time of carburizing, the intermediate door 71 is pressed by the fork 510 from the cooling chamber R2 side. For this reason, it is not necessary to arrange | position the member which presses the intermediate door 71 separately. The work W in the heating chamber R1 is confirmed by a photoelectric switch. For this reason, the workpiece | work W can be confirmed, ensuring the vacuum state of heating chamber R1. Further, the surface of the heating element 220 is coated with a non-oxidizing agent. For this reason, the lifetime of the heater 22 can be extended while suppressing a change in the electrical resistance of the heating element 220.

<Others>
The embodiment of the heat treatment furnace of the present invention has been described above. However, the embodiment is not particularly limited to the above embodiment. Various modifications and improvements that can be made by those skilled in the art are also possible.

  The type of carburizing gas is not particularly limited. For example, acetylene gas or propane gas may be used. That is, any hydrocarbon gas may be used. The extending direction of the heating element 220 may not be 90 ° with respect to the horizontal direction. For example, it may be 80 ° or 60 °.

  The type of gas supplied to the heating chamber R1 and the cooling chamber R2 at the time of return pressure is not particularly limited. An inert gas may be used. The pressure in the heating chamber R1 and the cooling chamber R2 at the time of decompression is not particularly limited. Any pressure lower than atmospheric pressure may be used. The method for cooling the workpiece W in the cooling chamber R2 is not particularly limited. You may cool the workpiece | work W with gas (nitrogen gas etc.).

  The temperature of heating chamber R1 at the time of carburizing is not particularly limited. For example, it may be 950 ° C to 1050 ° C. The temperature of the cooling chamber R2 during cooling is not particularly limited. For example, the temperature may be from room temperature (20 ° C.) to 150 ° C. The kind of heat treatment furnace is not particularly limited. The heat treatment furnace of the present invention can be embodied as any heat treatment furnace including an electric heater such as a rotary kiln and a roller hearth kiln.

1: Vacuum carburizing furnace (heat treatment furnace).
2: heating unit, 20: outer housing (housing), 200: guide rail, 21: inner housing, 210: outer shell, 211: heat insulating material, 212: vent hole, 213: front opening, 214: wheel, 22: Heater, 220: heating element, 221: protective tube, 23: heater mounting portion, 230: holder, 231: fireproof heat insulating brick, 232: clamp, 233: heater receiver, 24: heat insulating door, 25: sealing heat insulating material, 250 : Vent hole, 26: electrode, 27: hearth, 270: hearth body, 271: support, 272: wire, 28: heating fan, 29: thermocouple.
3: Cooling unit, 30: Housing, 300: Front opening, 31: Cooling fan, 32: Oil tank, 33: Oil fan, 34: Oil heater.
4: Base.
5: transport unit, 50: vertical transport unit, 500: elevator, 501: cylinder, 501a: rod, 502: chain, 503: movable sprocket, 504: fixed sprocket, 51: horizontal transport unit, 510: fork, 511 : Outer roller, 512: movable guide rail, 513: inner roller, 514: fixed guide rail.
6: Earth part, 60: Inner ground wire, 61: Outer ground wire.
70: front door, 71: intermediate door, 72: tray, 73: partition, 730: intermediate opening.
9: Piping section, 90: Decompression section, 900: Vacuum pump, 901: Mechanical booster pump, 91: Carburizing gas supply section, 910: Nozzle, 910a: Injection hole, 92: Nitrogen gas supply section for cooling chamber, 93: Heating Nitrogen gas supply unit for room, 94: Air / nitrogen gas supply unit.
O: neutral point, R1: heating chamber, R2: cooling chamber, W: workpiece.

Claims (1)

A conductor housing;
A heating chamber that is partitioned inside the housing and heats the workpiece;
An electric heater having a heating element that is vertically inserted into the heating chamber and electrically grounded through the housing;
A heat treatment furnace comprising:

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