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JP6135485B2 - High frequency module - Google Patents

High frequency module Download PDF

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Publication number
JP6135485B2
JP6135485B2 JP2013251578A JP2013251578A JP6135485B2 JP 6135485 B2 JP6135485 B2 JP 6135485B2 JP 2013251578 A JP2013251578 A JP 2013251578A JP 2013251578 A JP2013251578 A JP 2013251578A JP 6135485 B2 JP6135485 B2 JP 6135485B2
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substrate
resin substrate
antenna
resin
converter
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JP2015109570A (en
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剛 長塚
剛 長塚
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Mitsubishi Electric Corp
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Mitsubishi Electric Corp
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10Bump connectors; Manufacturing methods related thereto
    • H01L2224/15Structure, shape, material or disposition of the bump connectors after the connecting process
    • H01L2224/16Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
    • H01L2224/161Disposition
    • H01L2224/16151Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/16221Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/16225Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732Location after the connecting process
    • H01L2224/73251Location after the connecting process on different surfaces
    • H01L2224/73253Bump and layer connectors

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Description

この発明は、高周波モジュールに関するものである。   The present invention relates to a high frequency module.

従来、樹脂基材の一方面に半導体素子を実装し、樹脂基材の他方面をスティフナに載せて、アルミニウム製の導波管アダプタを介し、樹脂基材の一方面をアンテナモジュールに接続した高周波モジュールが知られている(例えば特許文献1参照)。   Conventionally, a semiconductor element is mounted on one side of a resin base, the other side of the resin base is placed on a stiffener, and one side of the resin base is connected to an antenna module via an aluminum waveguide adapter. Modules are known (see, for example, Patent Document 1).

また、ミキサ、発振器等の半導体素子が実装されたRF基板をRFシャーシの一方面に面接続し、RFシャーシの他方面をアンテナシャーシおよびアンテナ基板に面接続したレーダ装置用の高周波モジュールがある(例えば特許文献2参照)。   Further, there is a high-frequency module for a radar apparatus in which an RF substrate on which semiconductor elements such as a mixer and an oscillator are mounted is surface-connected to one surface of the RF chassis, and the other surface of the RF chassis is surface-connected to the antenna chassis and the antenna substrate ( For example, see Patent Document 2).

特開2006−261767号公報JP 2006-261767 A 特開2013−79890号公報JP 2013-79890 A

従来の高周波モジュールは、半導体素子の実装された樹脂基板(樹脂基材またはRF基板からなる基板)をアンテナに接続するため、樹脂基板とアンテナの間に、樹脂基板およびアンテナとは別体となる金属製の導波管アダプタまたはRFシャーシ等の金属板を配置していた。この種の金属板は、アルミダイカスト、切削加工等により金属を機械加工した金属加工部品から形成される。一般に、この種の金属板は部品価格が高価になるので、それに応じて高周波モジュールの部品価格も高くなるという問題があった。   Since the conventional high-frequency module connects a resin substrate (a substrate made of a resin base material or an RF substrate) on which a semiconductor element is mounted to an antenna, the resin substrate and the antenna are separated from each other between the resin substrate and the antenna. A metal plate such as a metal waveguide adapter or an RF chassis has been disposed. This type of metal plate is formed from a metal processed part obtained by machining a metal by aluminum die casting, cutting or the like. In general, this type of metal plate has a high component price, and accordingly, there is a problem that the component price of the high-frequency module increases accordingly.

また、金属板と樹脂基板の接合面に隙間を生じると、金属板に形成された導波管から電波が漏洩する。この電波の漏洩を防ぐように、樹脂基板の表面に実装される半導体素子および複数の導波管を覆う電磁遮蔽空間を形成し、当該電磁遮蔽空間の外壁にて金属板を樹脂基板の接合面に密着させる。このためには、樹脂基板の裏面から樹脂基板を金属板に押し当てるためのゴム部材、ねじ、接着剤等の特別な機構を設ける必要があり、特別な機構を設けることで部品価格がさらに高くなるという問題があった。加えて、特許文献2に記載の高周波モジュールは、金属板の上面にアンテナ基板を取り付けるとともに、金属板の裏面に樹脂基板を取り付ける構造となっている。ここで所要利得のアンテナを得るようにアンテナ基板の外形寸法が大きくなることから、アンテナ基板に応じて金属板の外形寸法が大きくなる。金属板の外形部分はねじで固定し、半導体素子を収納する電磁遮蔽空間の外壁は樹脂基板との接合面をゴム部材により押圧して、金属板と樹脂基板を密着する。このとき、ねじ固定される金属板の外形寸法が半導体素子を収納する電磁遮蔽空間の外壁の寸法よりも大きく、かつ電磁遮蔽空間の外壁がゴム部材で押圧されることから、電磁遮蔽空間の外壁と樹脂基板との接合面の密着力が弱くなり、電波漏洩を抑える性能が劣化し、延いては高周波モジュールの電気特性が劣化するという問題があった。   Further, when a gap is generated in the joint surface between the metal plate and the resin substrate, radio waves leak from the waveguide formed on the metal plate. In order to prevent leakage of the radio wave, an electromagnetic shielding space is formed to cover the semiconductor element and the plurality of waveguides mounted on the surface of the resin substrate, and the metal plate is bonded to the resin substrate on the outer wall of the electromagnetic shielding space. Adhere to. For this purpose, it is necessary to provide a special mechanism such as a rubber member, a screw, and an adhesive for pressing the resin substrate against the metal plate from the back side of the resin substrate. There was a problem of becoming. In addition, the high-frequency module described in Patent Document 2 has a structure in which an antenna substrate is attached to the upper surface of a metal plate and a resin substrate is attached to the back surface of the metal plate. Here, since the outer dimension of the antenna substrate is increased so as to obtain an antenna having a required gain, the outer dimension of the metal plate is increased in accordance with the antenna substrate. The outer portion of the metal plate is fixed with a screw, and the outer wall of the electromagnetic shielding space for housing the semiconductor element presses the joint surface with the resin substrate with a rubber member, thereby bringing the metal plate and the resin substrate into close contact with each other. At this time, since the outer dimension of the metal plate to be screwed is larger than the dimension of the outer wall of the electromagnetic shielding space that houses the semiconductor element, and the outer wall of the electromagnetic shielding space is pressed by the rubber member, the outer wall of the electromagnetic shielding space There is a problem that the adhesion strength between the resin substrate and the resin substrate is weakened, the performance of suppressing radio wave leakage is deteriorated, and the electrical characteristics of the high-frequency module are deteriorated.

この発明は係る課題を解決するためになされたものであり、半導体素子を収納する電磁遮蔽空間が形成された別体の金属板を、樹脂基板に実装された半導体素子とアンテナとの間に挟み込まない構造で、高周波モジュールを構成することを目的とする。   The present invention has been made to solve such problems, and a separate metal plate in which an electromagnetic shielding space for housing a semiconductor element is formed is sandwiched between a semiconductor element mounted on a resin substrate and an antenna. The object is to construct a high-frequency module with no structure.

この発明による高周波モジュールは、半導体素子と、複数配列されたアンテナ素子と、当該アンテナ素子に接続されたマイクロストリップ線路と、当該マイクロストリップ線路と導波管の間で信号接続を行う変換器とを有したアンテナ基板と、上記アンテナ基板が表面に接合され、上記半導体素子が裏面に接合されるとともに、内層に導波管が形成されて、裏面にマイクロストリップ線路と当該マイクロストリップ線路と導波管の間で信号接続を行う変換器が設けられた樹脂基板と、上記樹脂基板の裏面に接合され、上記樹脂基板とともに上記半導体素子を収納するカバー基板と、を備え、上記樹脂基板の導波管は、上記樹脂基板の変換器と上記アンテナ基板の変換器との間を、基板面に垂直に接続するように配置されたものである。   A high-frequency module according to the present invention includes a semiconductor element, a plurality of antenna elements, a microstrip line connected to the antenna element, and a converter that performs signal connection between the microstrip line and the waveguide. An antenna substrate having the antenna substrate is bonded to the front surface, the semiconductor element is bonded to the back surface, and a waveguide is formed on the inner layer. The microstrip line and the microstrip line and the waveguide are formed on the back surface. A resin substrate provided with a converter for performing signal connection between the resin substrate and a cover substrate bonded to the back surface of the resin substrate and containing the semiconductor element together with the resin substrate, and a waveguide of the resin substrate Are arranged so as to connect the converter of the resin substrate and the converter of the antenna substrate vertically to the substrate surface.

この発明によれば、半導体素子を収納する電磁遮蔽空間が形成された別体の金属板を、樹脂基板に実装された半導体素子とアンテナとの間に挟み込まないより安価な構造で、半導体素子またはマイクロストリップ線路から生じる電波の外部漏洩を遮蔽することができる。   According to the present invention, a separate metal plate in which an electromagnetic shielding space for housing a semiconductor element is formed is provided with a cheaper structure that is not sandwiched between a semiconductor element mounted on a resin substrate and an antenna. External leakage of radio waves generated from the microstrip line can be shielded.

実施の形態1による高周波モジュールの構成を示す図である。1 is a diagram showing a configuration of a high-frequency module according to Embodiment 1. FIG. 実施の形態1による高周波モジュールの構成を示す断面図である。1 is a cross-sectional view illustrating a configuration of a high frequency module according to Embodiment 1. FIG. 実施の形態1による金属で形成したカバー基板を樹脂基板に接合した構成例を示す図である。It is a figure which shows the structural example which joined the cover board | substrate formed with the metal by Embodiment 1 to the resin substrate. 実施の形態1による金属で形成したカバー基板を樹脂基板に接合した他の構成例を示す図である。It is a figure which shows the other structural example which joined the cover board | substrate formed with the metal by Embodiment 1 to the resin substrate.

実施の形態1.
図1は、本発明に係る実施の形態1による高周波モジュールの構成を示す図であって、(a)は高周波モジュールの上面図、(b)は高周波モジュールの下面図である。図2は、実施の形態1による高周波モジュールの構成を示す図であって、(a)は高周波モジュールのAA断面図、(b)は高周波モジュールのBB断面図、(c)は高周波モジュールのCC断面図である。
Embodiment 1 FIG.
1A and 1B are diagrams showing the configuration of a high-frequency module according to Embodiment 1 of the present invention, in which FIG. 1A is a top view of the high-frequency module, and FIG. 1B is a bottom view of the high-frequency module. 2A and 2B are diagrams showing the configuration of the high-frequency module according to Embodiment 1, wherein FIG. 2A is a cross-sectional view taken along line AA of the high-frequency module, FIG. It is sectional drawing.

図1、2において、実施の形態1の高周波モジュールは、樹脂基板1と、アンテナ基板2と、カバー基板3と、導電性接続部材50と、半導体素子からなる半導体部品6と、電子部品7を備えて構成される。アンテナ基板2は、接着剤により裏面(下面)が樹脂基板1の表面(上面)に接合される。カバー基板3は、複数の導電性接合部材50により、樹脂基板1の裏面(下面)に接合される。半導体部品6および電子部品7は、樹脂基板1の裏面(下面)に取り付けられ、当該裏面上に実装されている。導電性接続部材50は、半田バンプ、金バンプ等からなる。樹脂基板1とカバー基板3は、複数の導電性接続部材50によりバンプ接合される。   1 and 2, the high-frequency module according to the first embodiment includes a resin substrate 1, an antenna substrate 2, a cover substrate 3, a conductive connection member 50, a semiconductor component 6 made of semiconductor elements, and an electronic component 7. It is prepared for. The antenna substrate 2 is bonded to the front surface (upper surface) of the resin substrate 1 by an adhesive. The cover substrate 3 is bonded to the back surface (lower surface) of the resin substrate 1 by a plurality of conductive bonding members 50. The semiconductor component 6 and the electronic component 7 are attached to the back surface (lower surface) of the resin substrate 1 and mounted on the back surface. The conductive connection member 50 is made of a solder bump, a gold bump, or the like. The resin substrate 1 and the cover substrate 3 are bump-bonded by a plurality of conductive connection members 50.

樹脂基板1は、ガラスエポキシ樹脂、ポリィミド樹脂等の樹脂製の多層プリント配線基板からなる。樹脂基板1表面側の誘電体20の表面は接地導体27,71が形成されている。樹脂基板1裏面側の誘電体11の表面には、半導体部品6および電子部品7が接続される配線回路パターンと、接地導体52が形成されている。また、樹脂基板1の内層には、接地導体70が形成されている。半導体部品6は、ミリ波、マイクロ波等の高周波のRF(Radio Frequency)信号を処理する高周波半導体素子からなり、例えばSiGe(シリコンゲルマン)半導体により回路が形成される。半導体部品6は、受信用(RX)、送信用(TX)のチップがある。受信用の半導体部品6(RX)は、アンプ、ミキサ(周波数混合回路)等の高周波半導体素子からなる。送信用の半導体部品6(TX)は、アンプ、電力分配器、発振器等の高周波半導体素子からなる。電子部品7は、マイコン、メモリ、システムIC、ADコンバータ、DAコンバータ、コンデンサ、抵抗等から構成される。電子部品7は、FFT(高速フーリエ変換)、レーダ信号処理、電源変圧処理等を行う。樹脂基板1は、樹脂基板1の表面側の接地導体27と裏面側の誘電体11裏面の間で、内層に複数の導波管13が形成されている。すなわち、導波管13上方の開口穴はアンテナ基板2により塞がれ、導波管13下方の開口穴は誘電体11によって塞がれている。樹脂基板1の裏面側には、変換器14と、伝送線路18,19が形成されている。伝送線路18,19は、それぞれマイクロストリップ線路により構成される。伝送線路19は変換器14に接続され、また半導体部品6に接続されている。半導体部品6は、複数の導電性接続部材61を介したフリップチップ接続により、配線パターン17に接続されている。導電性接続部材61は、金バンプからなる。送信用の半導体部品6(TX)と受信用の半導体部品6(RX)の間は、伝送線路18により接続されている。樹脂基板1の接地導体52上には、複数の導電性接続部材50が配置される。導電性接続部材50が接触する接地導体52の周囲は、半田密着性の悪い半田非接合領域が形成されている。複数の導電性接続部材50は、変換器14の周囲を取り囲むように配置される。導波管13を伝送するRF信号は、変換器14に接続される。樹脂基板1表面の接地導体27と樹脂基板1内層の接地導体70と裏面の接地導体52は、導体ビア12により接続されている。   The resin substrate 1 is composed of a multilayer printed wiring board made of resin such as glass epoxy resin or polyimide resin. Ground conductors 27 and 71 are formed on the surface of the dielectric 20 on the surface side of the resin substrate 1. A wiring circuit pattern to which the semiconductor component 6 and the electronic component 7 are connected and a ground conductor 52 are formed on the surface of the dielectric 11 on the back surface side of the resin substrate 1. A ground conductor 70 is formed on the inner layer of the resin substrate 1. The semiconductor component 6 includes a high-frequency semiconductor element that processes a high-frequency RF (Radio Frequency) signal such as a millimeter wave or a microwave, and a circuit is formed of, for example, a SiGe (silicon germane) semiconductor. The semiconductor component 6 includes a receiving (RX) chip and a transmitting (TX) chip. The receiving semiconductor component 6 (RX) is composed of a high-frequency semiconductor element such as an amplifier or a mixer (frequency mixing circuit). The semiconductor component 6 (TX) for transmission is composed of high-frequency semiconductor elements such as an amplifier, a power distributor, and an oscillator. The electronic component 7 includes a microcomputer, a memory, a system IC, an AD converter, a DA converter, a capacitor, a resistor, and the like. The electronic component 7 performs FFT (Fast Fourier Transform), radar signal processing, power transformation processing, and the like. In the resin substrate 1, a plurality of waveguides 13 are formed in the inner layer between the ground conductor 27 on the front surface side of the resin substrate 1 and the back surface of the dielectric 11 on the back surface side. That is, the opening hole above the waveguide 13 is blocked by the antenna substrate 2, and the opening hole below the waveguide 13 is blocked by the dielectric 11. A converter 14 and transmission lines 18 and 19 are formed on the back side of the resin substrate 1. The transmission lines 18 and 19 are each constituted by a microstrip line. The transmission line 19 is connected to the converter 14 and to the semiconductor component 6. The semiconductor component 6 is connected to the wiring pattern 17 by flip chip connection via a plurality of conductive connection members 61. The conductive connection member 61 is made of a gold bump. The transmission semiconductor component 6 (TX) and the reception semiconductor component 6 (RX) are connected by a transmission line 18. A plurality of conductive connection members 50 are disposed on the ground conductor 52 of the resin substrate 1. A solder non-joining region with poor solder adhesion is formed around the ground conductor 52 with which the conductive connecting member 50 contacts. The plurality of conductive connection members 50 are arranged so as to surround the converter 14. The RF signal transmitted through the waveguide 13 is connected to the converter 14. The ground conductor 27 on the surface of the resin substrate 1, the ground conductor 70 on the inner layer of the resin substrate 1, and the ground conductor 52 on the back surface are connected by the conductor via 12.

アンテナ基板2は、例えばポリテトラフルオロエチレン(PTFE)からなるフッ素樹脂基板、液晶ポリマ(Liquid Crystal Polymer)基板等の誘電体20から形成される。複数のアンテナ素子21、複数の給電線路23および複数の変換器25は、アンテナ基板2の誘電体20の表面(上面)に形成されて、複数のサブアレーアンテナ26からなるアレーアンテナを構成している。サブアレーアンテナ26は、送信用に1つまたは複数チャンネル、受信用に複数チャンネル設けられている。図1は、送信用に1チャンネル、受信用に2チャンネルの給電系統を設けた例を示している。例えば、送信用のサブアレーアンテナ26からレーダの送信電波が放射される。また、2チャンネル分の受信用のサブアレーアンテナ26は、レーダから送信され、目標で反射されて返ってきた電波をそれぞれ受信し、導波管13を介して変換器14に受信信号を伝送する。変換器14に伝送された受信信号は、受信用の半導体部品6(RX)で低雑音増幅、フィルタリング、周波数混合処理等の信号処理が施された後、レーダ信号処理用の電子部品7にて検波処理され、検波された信号について測距処理、測角処理等のレーダ信号処理が行われる。複数のアンテナ素子21はそれぞれ給電線路23に接続される。給電線路23は変換器25に接続される。複数のアンテナ素子21は、給電線路23を介して変換器25に接続される。給電線路23は、マイクロストリップ線路により構成される。変換器25は送信用のチャンネル数分、および受信用のチャンネル数分だけ設けられている。変換器25は、給電端子24と、シールド板22から構成される。給電端子24は、給電線路23の末端に形成される。シールド板22は、凹形状の切れ込みが形成された導体板で形成される。給電端子24は、シールド板22の切れ込みの内側に非接触で配置され、周囲がシールド板22の導電面に囲まれる。給電端子24は、シールド板22の切れ込みを介して導波管13に電磁気的に結合する。これにより、導波管13は、樹脂基板1裏面の変換器14とアンテナ基板2表面の変換器25との間を、基板面(樹脂基板1の表面または裏面)に垂直に接続する。すなわち、導波管13を介して、変換器14と変換器25の間でRF信号が伝送される。アンテナ基板2表面の接地導体22と裏面の接地導体27は、導体ビア28により接続されている。   The antenna substrate 2 is formed of a dielectric 20 such as a fluororesin substrate made of polytetrafluoroethylene (PTFE) or a liquid crystal polymer (Liquid Crystal Polymer) substrate. The plurality of antenna elements 21, the plurality of feed lines 23, and the plurality of converters 25 are formed on the surface (upper surface) of the dielectric 20 of the antenna substrate 2 to constitute an array antenna including a plurality of subarray antennas 26. . The subarray antenna 26 is provided with one or a plurality of channels for transmission and a plurality of channels for reception. FIG. 1 shows an example in which a power supply system of one channel for transmission and two channels for reception is provided. For example, a radar transmission radio wave is radiated from the transmission subarray antenna 26. In addition, the reception subarray antennas 26 for two channels receive the radio waves transmitted from the radar, reflected by the target, and transmitted back to the converter 14 via the waveguide 13. The received signal transmitted to the converter 14 is subjected to signal processing such as low noise amplification, filtering, frequency mixing processing, etc. in the receiving semiconductor component 6 (RX), and then in the radar signal processing electronic component 7. The detected signal is subjected to radar signal processing such as distance measurement processing and angle measurement processing. Each of the plurality of antenna elements 21 is connected to the feed line 23. The feed line 23 is connected to the converter 25. The plurality of antenna elements 21 are connected to the converter 25 via the feed line 23. The feed line 23 is configured by a microstrip line. The converters 25 are provided for the number of transmission channels and the number of reception channels. The converter 25 includes a power supply terminal 24 and a shield plate 22. The feed terminal 24 is formed at the end of the feed line 23. The shield plate 22 is formed of a conductor plate in which a concave cut is formed. The power supply terminal 24 is disposed in a non-contact manner inside the cutout of the shield plate 22, and the periphery is surrounded by the conductive surface of the shield plate 22. The power supply terminal 24 is electromagnetically coupled to the waveguide 13 through the notch of the shield plate 22. Thereby, the waveguide 13 connects between the converter 14 on the back surface of the resin substrate 1 and the converter 25 on the surface of the antenna substrate 2 perpendicularly to the substrate surface (the front surface or the back surface of the resin substrate 1). That is, an RF signal is transmitted between the converter 14 and the converter 25 via the waveguide 13. The ground conductor 22 on the front surface of the antenna substrate 2 and the ground conductor 27 on the back surface are connected by a conductor via 28.

カバー基板3は、ガラスエポキシ樹脂、ポリィミド樹脂等の樹脂製の誘電体30から構成される。カバー基板3の誘電体30の表面は、接地導体32が形成されている。カバー基板3の誘電体30の裏面は、接地導体31が形成されている。カバー基板3表面の接地導体32と裏面の接地導体31は、導体ビア33により接続されている。複数の導電性接続部材50を介して樹脂基板1の裏面(下面)にカバー基板3の表面(上面)を接続することで、樹脂基板1とカバー基板3と複数の導電性接続部材50により、グランド面で取り囲まれた電磁遮蔽空間100が形成される。これによって、樹脂基板1とカバー基板3の間で、グランド面で囲まれた電磁遮蔽空間100の中に、半導体部品6を収納することができるので、半導体部品6から生じる電波の外部漏洩を遮蔽することができる。   The cover substrate 3 is composed of a dielectric 30 made of resin such as glass epoxy resin or polyimide resin. A ground conductor 32 is formed on the surface of the dielectric 30 of the cover substrate 3. A ground conductor 31 is formed on the back surface of the dielectric 30 of the cover substrate 3. The ground conductor 32 on the front surface of the cover substrate 3 and the ground conductor 31 on the back surface are connected by a conductor via 33. By connecting the front surface (upper surface) of the cover substrate 3 to the back surface (lower surface) of the resin substrate 1 through the plurality of conductive connection members 50, the resin substrate 1, the cover substrate 3, and the plurality of conductive connection members 50, An electromagnetic shielding space 100 surrounded by the ground plane is formed. As a result, the semiconductor component 6 can be housed in the electromagnetic shielding space 100 surrounded by the ground surface between the resin substrate 1 and the cover substrate 3, so that external leakage of radio waves generated from the semiconductor component 6 is shielded. can do.

また、複数の導電性接続部材50は、送信用の半導体部品6(TX)と受信用の半導体部品6(RX)の間に配列されることで、送信用の半導体部品6(TX)と受信用の半導体部品6(RX)の間の電磁干渉を防ぐことができる。このとき、一部の2つの導電性接続部材50(導電性接続部材501,導電性接続部材502)は、それらの間に、送信用の半導体部品6(TX)と受信用の半導体部品6(RX)の間を接続する伝送線路18を配置している。この導電性接続部材501と導電性接続部材502の距離は、伝送線路18におけるRF信号の信号伝搬波長λの4分の1よりも小さくなっている。   In addition, the plurality of conductive connection members 50 are arranged between the semiconductor component 6 (TX) for transmission and the semiconductor component 6 (RX) for reception, so that the semiconductor component 6 (TX) for transmission and the reception are received. Electromagnetic interference between the semiconductor components 6 (RX) can be prevented. At this time, some of the two conductive connection members 50 (the conductive connection member 501 and the conductive connection member 502) have a transmission semiconductor component 6 (TX) and a reception semiconductor component 6 ( RX) is connected. The distance between the conductive connecting member 501 and the conductive connecting member 502 is smaller than a quarter of the signal propagation wavelength λ of the RF signal in the transmission line 18.

このようにして、図1、図2に示す高周波モジュールは、樹脂基板1に実装された半導体素子とアンテナ基板2の間に、樹脂基板1およびアンテナ基板2とは別体の金属板を設けることなく、半導体素子を電磁遮蔽空間100内に収納することができる。このため部品価格の高価な別体の金属板がないので、特許文献1、2に示す従来の高周波モジュールに比べて、高周波モジュール全体の部品価格をより安くすることができる。加えて、樹脂基板1とカバー基板3のバンプ接合により半導体素子を取り囲む電磁遮蔽空間が形成されるので、当該接合面の密着力が強固になり、接合面からの電波漏洩を抑えることができるので、高周波モジュールの電気特性劣化を防止することができる。   As described above, in the high-frequency module shown in FIGS. 1 and 2, a metal plate separate from the resin substrate 1 and the antenna substrate 2 is provided between the semiconductor element mounted on the resin substrate 1 and the antenna substrate 2. The semiconductor element can be accommodated in the electromagnetic shielding space 100. For this reason, since there is no separate metal plate having a high component price, the component price of the entire high-frequency module can be further reduced as compared with the conventional high-frequency modules disclosed in Patent Documents 1 and 2. In addition, since the electromagnetic shielding space surrounding the semiconductor element is formed by the bump bonding of the resin substrate 1 and the cover substrate 3, the adhesion force of the bonding surface becomes strong, and radio wave leakage from the bonding surface can be suppressed. Therefore, it is possible to prevent deterioration of electrical characteristics of the high frequency module.

なお、カバー基板は、金属を機械加工して形成した金属板で構成しても良い。
図3は、金属素材で形成したカバー基板301を樹脂基板1に接合した他の態様の構成例を示す図である。図3において、カバー基板301は、樹脂基板と線膨張係数差の小さい金属素材により形成される。カバー基板301は、半田密着性を良くした半田接合部302が形成されている。隣接する半田接合部302の間には、溝もしくは半田密着性の悪い半田非接合領域が形成されている。カバー基板301の半田接合部302は導電性接続部材50に接続されて、導電性接続部材50を介して樹脂基板1に接合される。カバー基板301と複数の導電性接続部材50と樹脂基板1の接地導体70によって、半導体部品6を取り囲む電磁遮蔽空間105が形成される。これによって、図1、図2に示したカバー基板3と同様に、樹脂基板1およびアンテナ基板2とは別体の金属板を設けることなく、半導体部品6を電磁遮蔽空間105内に収納することができる。
The cover substrate may be composed of a metal plate formed by machining a metal.
FIG. 3 is a diagram illustrating a configuration example of another aspect in which a cover substrate 301 formed of a metal material is bonded to the resin substrate 1. In FIG. 3, the cover substrate 301 is formed of a metal material having a small difference in linear expansion coefficient from the resin substrate. The cover substrate 301 is formed with a solder joint portion 302 with improved solder adhesion. Between adjacent solder joints 302, a groove or a solder non-joint region with poor solder adhesion is formed. The solder joint portion 302 of the cover substrate 301 is connected to the conductive connection member 50 and joined to the resin substrate 1 via the conductive connection member 50. An electromagnetic shielding space 105 surrounding the semiconductor component 6 is formed by the cover substrate 301, the plurality of conductive connection members 50, and the ground conductor 70 of the resin substrate 1. As a result, like the cover substrate 3 shown in FIGS. 1 and 2, the semiconductor component 6 is accommodated in the electromagnetic shielding space 105 without providing a metal plate separate from the resin substrate 1 and the antenna substrate 2. Can do.

図4は、金属で形成したカバー基板310を樹脂基板1に接合した他の態様の別の構成例を示す図である。図4において、カバー基板310は、板金加工、押出し成型、または切削加工、アルミダイカスト等により構成された金属ケースをなし、例えば一面に開口を有した六面体から構成される。カバー基板310は、半導体部品6を収納する電磁遮蔽空間110の一部を形成する外壁を有している。カバー基板310と樹脂基板1の接地導体70によって、半導体部品6を取り囲む電磁遮蔽空間105が形成される。カバー基板310は、半田接合により、樹脂基板1の接地導体52に接合される。これによって、図1、図2に示したカバー基板3と同様に、樹脂基板1およびアンテナ基板2とは別体の金属板を、樹脂基板1とびアンテナ基板2の間に挿入することなく、半導体部品6を電磁遮蔽空間105内に収納することができる。また、特許文献2に示したRFシャーシに比べて、カバー基板310をより小型な金属ケースで構成することができる。   FIG. 4 is a diagram showing another configuration example of another aspect in which the cover substrate 310 formed of metal is bonded to the resin substrate 1. In FIG. 4, a cover substrate 310 is a metal case formed by sheet metal processing, extrusion molding, cutting processing, aluminum die casting, or the like, and is formed of, for example, a hexahedron having an opening on one surface. The cover substrate 310 has an outer wall that forms a part of the electromagnetic shielding space 110 that houses the semiconductor component 6. An electromagnetic shielding space 105 surrounding the semiconductor component 6 is formed by the cover substrate 310 and the ground conductor 70 of the resin substrate 1. The cover substrate 310 is bonded to the ground conductor 52 of the resin substrate 1 by solder bonding. Thus, like the cover substrate 3 shown in FIG. 1 and FIG. 2, the metal plate separate from the resin substrate 1 and the antenna substrate 2 is inserted between the resin substrate 1 and the antenna substrate 2 without being inserted between the semiconductor substrate 1 and the antenna substrate 2. The component 6 can be stored in the electromagnetic shielding space 105. Compared to the RF chassis disclosed in Patent Document 2, the cover substrate 310 can be configured with a smaller metal case.

以上説明した通り、実施の形態1による高周波モジュールは、半導体素子(半導体部品6)と、複数配列されたアンテナ素子21と、当該アンテナ素子21に接続されたマイクロストリップ線路(伝送線路23)と、当該マイクロストリップ線路(伝送線路23)と導波管13の間で信号接続を行う変換器25とを有したアンテナ基板2と、上記アンテナ基板2が表面に接合され、上記半導体素子(半導体部品6)が裏面に接合されるとともに、内層に導波管13が形成されて、裏面にマイクロストリップ線路(伝送線路23)と当該マイクロストリップ線路(伝送線路23)と導波管13の間で信号接続を行う変換器14が設けられた樹脂基板1と、上記樹脂基板1の裏面に接合され、上記樹脂基板1とともに上記半導体素子(半導体部品6)を収納するカバー基板3と、を備え、上記樹脂基板1の導波管13は、上記樹脂基板1の変換器14と上記アンテナ基板2の変換器25との間を、基板面に垂直に接続するように配置されたことを特徴とする。   As described above, the high-frequency module according to Embodiment 1 includes a semiconductor element (semiconductor component 6), a plurality of antenna elements 21, and a microstrip line (transmission line 23) connected to the antenna element 21. The antenna substrate 2 having a converter 25 that performs signal connection between the microstrip line (transmission line 23) and the waveguide 13 and the antenna substrate 2 are joined to the surface, and the semiconductor element (semiconductor component 6). ) Is bonded to the back surface, and a waveguide 13 is formed on the inner layer, and a signal connection is made between the microstrip line (transmission line 23) and the microstrip line (transmission line 23) and the waveguide 13 on the back surface. And the semiconductor element (semiconductor component) together with the resin substrate 1 and bonded to the back surface of the resin substrate 1. ), And the waveguide 13 of the resin substrate 1 is perpendicular to the substrate surface between the converter 14 of the resin substrate 1 and the converter 25 of the antenna substrate 2. It is arranged to be connected.

これによって、半導体素子を収納する電磁遮蔽空間が形成された別体の金属板を、樹脂基板に実装された半導体素子とアンテナとの間に挟み込まないより安価な構造で、半導体素子またはマイクロストリップ線路から生じる電波の外部漏洩を遮蔽することができる。また、半導体素子が樹脂基板1の裏面に実装され、カバー基板3に実装されないことから、カバー基板3の配線回路パターンをより簡易にかつ安価に構成することができる。   As a result, a separate metal plate in which an electromagnetic shielding space for housing a semiconductor element is formed is a less expensive structure that does not sandwich the semiconductor element mounted on the resin substrate and the antenna, and the semiconductor element or microstrip line It is possible to shield the external leakage of radio waves generated from the. Further, since the semiconductor element is mounted on the back surface of the resin substrate 1 and is not mounted on the cover substrate 3, the wiring circuit pattern of the cover substrate 3 can be configured more easily and inexpensively.

また、カバー基板は、複数の導電性接合部材50により上記樹脂基板1の裏面に接合されても良い。   Further, the cover substrate may be bonded to the back surface of the resin substrate 1 by a plurality of conductive bonding members 50.

また、カバー基板は、金属素材により形成されたカバー基板301、310により構成されても良い。   Further, the cover substrate may be constituted by cover substrates 301 and 310 formed of a metal material.

1 樹脂基板、2 アンテナ基板、3 カバー基板、6 半導体部品、7 電気部品、13 導波管、14 変換器、23 伝送線路、25 変換器、50 導電性接続部材、61 導電性接続部材、301 カバー基板、310 カバー基板。   DESCRIPTION OF SYMBOLS 1 Resin board | substrate, 2 Antenna board | substrate, 3 Cover board | substrate, 6 Semiconductor component, 7 Electrical component, 13 Waveguide, 14 Converter, 23 Transmission line, 25 Converter, 50 Conductive connection member, 61 Conductive connection member, 301 Cover substrate, 310 cover substrate.

Claims (2)

半導体素子と、
上記半導体素子が裏面に接合されるとともに、内層に導波管が形成されて、裏面にマイクロストリップ線路と当該マイクロストリップ線路と当該導波管の間で信号接続を行う変換器が設けられた樹脂基板と、
上記樹脂基板の表面に接合され、複数配列されたアンテナ素子と、当該アンテナ素子に接続されたマイクロストリップ線路と、当該マイクロストリップ線路と上記樹脂基板の導波管の間で信号接続を行う変換器とを有したアンテナ基板と、
上記樹脂基板の裏面に接合され、上記樹脂基板とともに上記半導体素子を収納する、金属素材により形成されたカバー基板と、を備え、
上記樹脂基板の導波管は、上記樹脂基板の変換器と上記アンテナ基板の変換器との間を垂直に接続するように配置された高周波モジュール。
A semiconductor element;
Resin in which the semiconductor element is bonded to the back surface, a waveguide is formed in the inner layer, and a microstrip line and a converter for signal connection between the microstrip line and the waveguide are provided on the back surface A substrate,
A plurality of arrayed antenna elements joined to the surface of the resin substrate, a microstrip line connected to the antenna element, and a converter for performing signal connection between the microstrip line and the waveguide of the resin substrate An antenna substrate having
A cover substrate formed of a metal material, which is bonded to the back surface of the resin substrate and houses the semiconductor element together with the resin substrate;
The waveguide of the resin substrate is a high-frequency module arranged so as to vertically connect between the converter of the resin substrate and the converter of the antenna substrate.
上記カバー基板は、複数の導電性接合部材により上記樹脂基板の裏面に接合された請求項1記載の高周波モジュール。   The high frequency module according to claim 1, wherein the cover substrate is bonded to the back surface of the resin substrate by a plurality of conductive bonding members.
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