JP6129465B2 - Suspension substrate, suspension, suspension with head, hard disk drive, and method for manufacturing suspension substrate - Google Patents

Description

  The present invention relates to a suspension substrate, a suspension, a suspension with a head, a hard disk drive, and a method for manufacturing a suspension substrate, and in particular, a suspension substrate and a suspension capable of improving the reliability of electrical connection with a magnetic head. The present invention relates to a suspension with a head, a hard disk drive, and a method for manufacturing a suspension substrate.

Generally, a hard disk drive (HDD) includes a suspension board on which a magnetic head for writing and reading data to and from a disk on which data is stored is mounted. This magnetic head is electrically connected to a terminal portion extending from the wiring layer of the suspension substrate (see, for example, Patent Documents 1 and 2 ).

Japanese Patent No. 3692314 JP 2008-146817 A

  However, such a terminal portion is exposed without being covered with an insulating layer or the like, and is connected to an external terminal of the magnetic head by a solder ball, a gold bonding wire, or the like. Here, when solder balls are used, the solder balls are irradiated with laser light to heat and melt the solder balls. In this case, thermal stress is generated between the solder ball and the terminal portion, and the mechanical strength of the terminal portion becomes a problem. Further, when a gold bonding wire is used, an ultrasonic vibration is applied to the gold bonding wire for connection, but in this case, the ultrasonic vibration is transmitted to the terminal portion, and the mechanical strength of the terminal portion becomes a problem.

  In order to cope with this, Patent Document 1 proposes that the width of the terminal portion be wider than that of the wiring layer.

  On the other hand, in recent years, there has been a strong demand for increasing the number of wiring layers in order to increase the information processing amount of the HDD and for reducing the size of the magnetic head and suspension. For this purpose, it has been studied to miniaturize the wiring layer.

  However, when the wiring layer is miniaturized, it is difficult to form the wiring layer. Further, making the wiring layer thinner for miniaturization of the wiring layer means that the thickness of the terminal portion is reduced, resulting in a problem that the mechanical strength is lowered.

  The present invention has been made in consideration of such points, and the suspension substrate, suspension, suspension with head, hard disk drive, and suspension that can improve the reliability of the electrical connection with the magnetic head An object is to provide a method for manufacturing a substrate.

  The present invention provides a suspension substrate including a mounting portion on which a magnetic head is mounted and a substrate main body connected to the mounting portion. The mounting portion includes a head mounting region on which the magnetic head is mounted, and the head mounting. A mounting portion main body region surrounding the mounting region, the mounting portion main body region including a spring material layer and a wiring layer laminated on the spring material layer via an insulating layer. An opening is formed between the mounting portion main body region and the conductive pad portion connected to the magnetic head extends from the wiring layer in the mounting portion main body region toward the inside of the opening. The suspension substrate is characterized in that the pad portion is thicker than the wiring layer.

  The present invention is the suspension substrate characterized in that the insulating layer extends toward the distal end side of the conductive pad portion rather than the spring material layer on the proximal end side of the conductive pad portion.

  In the present invention, the mounting portion main body region further includes a protective layer laminated on the wiring layer, and the conductive pad portion extends from the edge of the protective layer toward the inside of the opening. This is a suspension substrate.

  The present invention is a suspension including the above-described suspension substrate.

  The present invention is a suspension with a head including the above-described suspension and a magnetic head mounted on the suspension.

  The present invention is a hard disk drive having the above-described suspension with a head.

  The present invention has a head mounting area on which a magnetic head is mounted, a mounting section main body area surrounding the head mounting area, a mounting section on which the magnetic head is mounted, and a substrate body connected to the mounting section. A suspension substrate in which an opening is formed between the head mounting region and the mounting portion main body region, and the spring material layer and the spring material layer laminated on the spring material layer via an insulating layer. Preparing a laminate having a conductive material layer formed thereon, patterning the conductive material layer to form a wiring layer in the mounting body region, and a first conductive pad extending from the wiring layer to the opening Forming a layer, laminating a second conductive pad layer on the first conductive pad layer, and comprising the first conductive pad layer and the second conductive pad layer, the conductive connected to the magnetic head Forming a conductive pad portion and a spring Forming a spring material layer opening in a region corresponding to the opening of the material layer; forming an insulating layer opening in the insulating layer corresponding to the opening of the spring material layer; And a step of forming an opening between the region and the mounting portion main body region, wherein the conductive pad portion is thicker than the wiring layer. It is.

  In the present invention, when forming the insulating layer opening, the insulating layer is insulated so that the insulating layer extends toward the distal end side of the conductive pad portion rather than the spring material layer on the proximal end side of the conductive pad portion. A method for manufacturing a suspension substrate, wherein a layer opening is formed.

  The present invention further includes a step of forming a protective layer on the wiring layer in the mounting portion main body region. When the second conductive pad layer is laminated, the second conductive pad layer opens from the edge of the protective layer to the opening portion. It is formed so that it may extend toward, and is a manufacturing method of the board | substrate for suspensions characterized by the above-mentioned.

  In the present invention, the step of laminating the second conductive pad layer is performed after the step of forming the protective layer. The second conductive pad layer is formed of a copper layer on the first conductive pad layer using the protective layer as a resist. Suspension substrate manufacturing method characterized by being laminated by plating

  According to the present invention, it is possible to effectively prevent the deformation of the conductive pad in the manufacturing process of the suspension substrate, and it is possible to improve the reliability of the electrical connection with the magnetic head.

FIG. 1 is a plan view showing an example of a suspension substrate according to an embodiment of the present invention. FIG. 2 is a plan view showing a mounting portion of the suspension substrate in the embodiment of the present invention. FIG. 3 is a diagram showing a cross-sectional configuration of the mounting portion of the suspension substrate in the embodiment of the present invention. FIG. 4 is a plan view showing an example of a suspension in the embodiment of the present invention. FIG. 5 is a plan view showing an example of a suspension with a head according to an embodiment of the present invention. FIG. 6 is a plan view showing an example of a hard disk drive according to the embodiment of the present invention. FIGS. 7A, 7B, 7C, 7D, and 7E illustrate etching of the conductive material layer and the spring material layer in the method for manufacturing the suspension substrate according to the embodiment of the present invention. The figure which shows a process. FIGS. 8A, 8B, 8C, 8D, and 8E are views showing a process of forming a cover layer in the suspension substrate manufacturing method according to the embodiment of the present invention. FIG. 9 is a diagram showing a process of forming a conductive pad portion in the method for manufacturing a suspension substrate in the embodiment of the present invention. FIGS. 10A, 10B, 10C, and 10D are views showing a process of etching an insulating layer in the method for manufacturing a suspension substrate in the embodiment of the present invention. FIGS. 11A, 11B, 11C, and 11D are diagrams showing a step of forming a gold plating layer in the method for manufacturing a suspension substrate in the embodiment of the present invention. 12A, 12B, 12C, and 12D are views showing a process of etching a spring material layer in the method for manufacturing a suspension substrate according to the embodiment of the present invention. FIGS. 13A, 13B, 13C, and 13D are diagrams showing a process of forming a conductive pad portion in the suspension board manufacturing method according to the modification of the present invention. 14 (a), (b), (c), (d), and (e) are diagrams showing a process of forming a cover layer in the suspension substrate manufacturing method according to the modification of the present invention.

  Hereinafter, with reference to FIGS. 1 to 12, a suspension substrate, a suspension, a suspension with a head, a hard disk, and a method for manufacturing the suspension substrate according to an embodiment of the present invention will be described.

  As shown in FIG. 1, the suspension substrate 1 includes a mounting portion 2 on which a magnetic head 62 (see FIG. 5) is mounted, and a substrate body 3 connected to the mounting portion 2. In addition, an external substrate connecting portion 4 is coupled to the substrate body 3.

  As shown in FIG. 2, the mounting section 2 has a head mounting area 5 on which the magnetic head 62 is mounted, and a mounting section main body area 6 surrounding the head mounting area 5. Among these, the head mounting area 5 includes a spring material layer 10 and an insulating layer 11 laminated on the spring material layer 10. The insulating layer 11 in the head mounting region 5 is patterned so as to form a gap 8 between the magnetic head 62 and the spring material layer 10 that is filled with an adhesive that joins the magnetic head 62 and the spring material layer 10. . In this case, the magnetic head 62 may be insulated and supported with respect to the spring material layer 10 using an insulating adhesive, or the magnetic head 62 may be attached to the spring material layer 10 using a conductive adhesive. The magnetic head 62 may be supported so as to be grounded.

  As shown in FIGS. 2 and 3, the mounting portion main body region 6 includes a spring material layer 10 and a plurality of wiring layers 12 laminated on the spring material layer 10 with an insulating layer 11 interposed therebetween. Yes. Each wiring layer 12 extends from the external substrate connecting portion 4 through the substrate body 3 to the mounting portion main body region 6 of the mounting portion 2, and one of the wiring layers 12 is one of the head mounting regions 5. It is formed so as to extend from the side (for example, the right side in FIG. 2) to the front end side (upper side in FIG. 2) of the suspension substrate 1 and wrap around the front end side of the head mounting area 5. The other wiring layer 12 extends from the other side of the head mounting area 5 (for example, the left side in FIG. 2) to the front end side of the suspension substrate 1 and wraps around the front end side of the head mounting area 5. Is formed.

  In addition, an opening 7 in which a conductive pad portion 20 described later is disposed is formed between the tip side of the head placement region 5 and the mounting portion main body region 6.

  As shown in FIGS. 2 and 3, the conductive pad portion 20 connected to the magnetic head 62 extends from each wiring layer 12 in the mounting portion main body region 6 toward the inside of the opening portion 7. Each conductive pad portion 20 extends inward of the opening 7 from an edge 13a of a cover layer 13 described later. Each conductive pad portion 20 is thicker than the wiring layer 12 connected thereto. In the present embodiment, each conductive pad portion 20 is laminated on the first conductive pad layer 21 having a thickness substantially the same as that of the wiring layer 12 and the first conductive pad layer 21. The conductive pad layer 21 includes a second conductive pad layer 22 having substantially the same thickness, and is integrally formed mechanically and electrically.

  As shown in FIG. 2, the conductive pad portion 20 has a hole 23 and is electrically connected to the external terminal 63 (see FIG. 5) of the magnetic head 62 in the hole 23. A solder ball (not shown) used at the time is placed. In this way, the solder ball is prevented from rolling. In FIG. 2, the hole portion 23 is shown as a circular shape. However, the hole portion 23 may have any other shape, and the hole portion 23 may not be provided.

  Further, as shown in FIG. 3, a gold plating layer 24 is formed on the conductive pad portion 20. As a result, the surface of the conductive pad portion 20 can be prevented from deteriorating, and the contact resistance with the external terminal 63 of the magnetic head 62 can be reduced. Although not shown, a nickel plating layer may be interposed between the conductive pad portion 20 and the gold plating layer 24.

  In addition, on the proximal end side of the conductive pad portion 20, the insulating layer 11 extends from the spring material layer 10 toward the distal end side of the conductive pad portion 20. In this way, the base end side of the conductive pad portion 20 is supported. Note that the front end side of the back surface of the conductive pad portion 20 is exposed without being supported by the insulating layer 11.

  As shown in FIGS. 2 and 3, a cover layer (protective layer) 13 is laminated on the wiring layer 12 in the mounting portion main body region 6. The cover layer 13 covers each wiring layer 12 and is laminated on the insulating layer 11 in a region where the wiring layer 12 is not present.

  As shown in FIG. 3, a solder connection portion 25 is formed between the conductive pad portion 20 and the external terminal 63 of the mounted magnetic head 62. The solder connection portion 25 is formed by melting the above-described solder ball by, for example, irradiating a laser beam. In this way, the wiring layer 12 is electrically connected to the external terminal 63 of the magnetic head 62 via the conductive pad portion 20. The magnetic head 62 is placed on the insulating layer 11 in the head placement area 5, and an adhesive is formed in the gap portion 8 formed between the magnetic head 62 and the spring material layer 10 in the head placement area 5. Is filled into the spring material layer 10.

  Next, the material of each component will be described.

  The material of the spring material layer 10 is not particularly limited as long as it has desired elasticity and strength. For example, stainless steel, aluminum, beryllium copper, or other copper alloys are used. It is preferable to use stainless steel. The thickness of the spring material layer 10 is preferably 18 μm, for example. Thereby, the elasticity and strength of the spring material layer 10 can be ensured.

  The material of the insulating layer 11 is not particularly limited as long as it is a material having a desired insulating property. For example, it is preferable to use polyimide (PI). Note that the material of the insulating layer 11 can be a photosensitive material or a non-photosensitive material. The thickness of the insulating layer 11 is preferably about 10 μm, for example. As a result, it is possible to ensure the insulation performance between the spring material layer 10 and each wiring layer 12 and to prevent the elasticity of the suspension substrate 1 as a whole from being lost.

The material of each wiring layer 12 and each conductive pad portion 20 is not particularly limited as long as it is a conductive material having desired conductivity, but it is preferable to use copper (Cu). In addition to copper, any material having electrical characteristics similar to pure copper can be used. Here, the thickness of each wiring layer 12 is preferably about 3 μm, for example. As a result, it is possible to ensure the conductivity of each wiring layer 12 and to prevent the elasticity of the entire suspension substrate 1 from being lost. When the thickness of the wiring layer 12 is 3 μm, as described above, the thickness of the first conductive pad layer 21 is 3 μm. For this reason, it is preferable to set the thickness of the second conductive pad layer 22 to 3 μm and the thickness of the conductive pad portion 20 to about 6 μm.

  The thickness of the gold plating layer 24 formed on each conductive pad portion 20 is preferably 2 μm, for example. As a result, the surface of the conductive pad portion 20 can be prevented from deteriorating, and the contact resistance with the external terminal 63 of the magnetic head 62 can be reduced.

  As the material of the cover layer 13, it is preferable to use a resin material, for example, polyimide (PI), like the insulating layer 11. The material of the cover layer 13 can be a photosensitive material or a non-photosensitive material. The thickness of the cover layer 13 is preferably 4 μm, for example.

  Next, the suspension 51 in the present embodiment will be described with reference to FIG. A suspension 51 shown in FIG. 4 is provided on the surface opposite to the surface on which the suspension substrate 1 and the magnetic head 62 of the suspension substrate 1 are mounted, and a magnetic head 62 (see FIG. 5) described later. And a load beam 52 for holding the disk with respect to the disk 73 (see FIG. 6).

  Next, the suspension with head 61 in the present embodiment will be described with reference to FIG. A suspension 61 with a head shown in FIG. 5 includes the suspension 51 described above and a magnetic head 62 mounted on the mounting portion 2 of the suspension substrate 1. Among these, an external terminal 63 is provided on the side surface of the magnetic head 62.

  Next, the hard disk drive 71 in the present embodiment will be described with reference to FIG. A hard disk drive 71 shown in FIG. 6 is attached to a case 72, a disk 73 rotatably attached to the case 72 and storing data, a spindle motor 74 for rotating the disk 73, and a desired flying height on the disk 73. And a suspension 61 with a head including a magnetic head 62 for writing and reading data to and from the disk 73. Of these, the suspension 61 with a head is movably attached to the case 72, and a voice coil motor 75 that moves the magnetic head 62 of the suspension 61 with a head along the disk 73 is attached to the case 72. An arm 76 is connected between the suspension 61 with head and the voice coil motor 75.

  Next, with reference to FIGS. 7 to 12, the operation of the present embodiment having such a configuration, that is, a method for manufacturing a suspension substrate according to the present invention will be described. Here, FIG. 7 to FIG. 12 are diagrams showing processes corresponding to the cross section taken along the line AA of FIG.

  First, as shown in FIG. 7A, a laminate 30 having a spring material layer 10 and a conductive material layer 12 a laminated on the spring material layer 10 via an insulating layer 11 is prepared. In this laminate 30, the spring material layer 10 and the conductive material layer 12a may be formed by plating, or the spring material layer 10 and the conductive material layer 12a are bonded to the insulating layer 11. Also good.

  Next, the conductive material layer 12 a is patterned to form the wiring layer 12 in the mounting portion main body region 6 (see FIGS. 2 and 3), and from the wiring layer 12 toward the inside of the opening 7. A first conductive pad layer 21 of the extending conductive pad portion 20 is formed. In this case, first, resists 31 and 32 are formed on the entire surface of the conductive material layer 12a and the entire surface of the spring material layer 10, as shown in FIG. In this embodiment, a dry film resist is preferably used, but a liquid resist such as casein may be used, and it is preferably formed in a pattern by a photofabrication technique.

  The resist 31 on the conductive material layer 12a and the resist 32 on the spring material layer 10 are patterned as shown in FIG. Next, the exposed portion of the conductive material layer 12a by the patterned resist 31 is etched with a corrosive liquid such as a ferric chloride aqueous solution. As a result, the wiring layer 12 and the first conductive pad layer 21 are formed from the conductive material layer 12a (see FIG. 7D). Subsequently, the exposed portion of the spring material layer 10 by the patterned resist 32 is etched by a corrosive liquid such as an aqueous ferric chloride solution to form the spring material layer opening 10a (FIG. 7D). )reference). Here, the portion where the spring material layer 10 is etched is a portion where the spring property layer 10 is not imparted with a spring property like the spring material layer opening 10a. Thus, in the subsequent process, the mechanical strength of the spring material layer 10 can be secured, and the patterning accuracy by etching or the like can be prevented from being lowered. Thereafter, the resists 31 and 32 are peeled off (see FIG. 7E).

  Next, as shown in FIG. 8, the cover layer 13 is formed. In this case, first, as shown in FIG. 8A, the cover layer 13 is formed on the wiring layer 12 and the insulating layer 11. Next, as shown in FIG. 8B, resists 33 and 34 are formed over the entire surface on the cover layer 13 and the entire region below the spring material layer 10. Next, as shown in FIG. 8C, the resist 33 on the cover layer 13 is patterned. The exposed portion of the cover layer 13 is etched with the patterned resist 33 (see FIG. 8D). Thereby, the cover layer 13 is patterned into a predetermined shape. Thereafter, these resists 33 and 34 are peeled off (see FIG. 8E).

  Next, as shown in FIG. 9, the second conductive pad layer 22 is laminated on the upper surface of the first conductive pad layer 21 by electrolytic copper plating. In this case, copper plating is performed on the first conductive pad layer 21 using the cover layer 13 as a resist. As a result, the second conductive pad layer 22 is formed mechanically and electrically integrally with the first conductive pad layer 21, and the first conductive pad layer 21 and the second conductive pad layer 22 are separated from each other. A conductive pad portion 20 is formed. In this case, the conductive pad portion 20 is formed to be thicker than the wiring layer 12 and to extend from the edge 13 a of the cover layer 13 toward the inside of the opening 7.

  Next, as shown in FIG. 10, the insulating layer 11 is etched to form the opening 7. In this case, first, as shown in FIG. 10A, resists 35 and 36 are formed over the entire region above and below the insulating layer 11, respectively. Next, as shown in FIG. 10B, the resists 35 and 36 are patterned, and the exposed portions of the insulating layer 11 are etched with an etching solution by the patterned resists 35 and 36 (FIG. c)). In this manner, the insulating layer opening 11a is formed in the insulating layer 11. As a result, an opening 7 is formed between the head placement area 5 and the mounting part main body area 6. Thereafter, these resists 35 and 36 are peeled off (see FIG. 10D).

  Next, as shown in FIG. 11, a gold plating layer 24 is formed on the conductive pad portion 20. In this case, first, as shown in FIG. 11A, a resist 37 is formed over the entire region. Next, as shown in FIG. 11B, the resist 37 is patterned so that only the conductive pad portion 20 is exposed. With this patterned resist 37, the conductive pad portion 20 is gold-plated to form a gold-plated layer 24 (see FIG. 11C). Thereafter, the resist 37 is peeled off (see FIG. 11D).

  Next, as shown in FIG. 12, the spring material layer 10 is etched and patterned. In this case, first, as shown in FIG. 12A, a resist 38 is formed over the entire region. Next, as shown in FIG. 12B, the resist 38 is patterned, and the exposed portion of the spring material layer 10 is etched by a corrosive liquid such as ferric chloride aqueous solution. The As a result, a pattern opening 10b for patterning the spring material layer 10 into a predetermined shape is formed in the spring material layer 10 (see FIG. 12C). Thereafter, the resist 38 is peeled off (see FIG. 12D). Note that the portion where the spring material layer 10 is etched in the step shown in FIG. 12 is preferably a portion other than the portion etched in the step shown in FIG.

  Thereafter, the load beam 52 is attached to the lower surface of the suspension substrate 1 obtained in this way, and the suspension 51 shown in FIG. 4 is obtained.

  A magnetic head 62 is mounted on the head placement area 5 of the suspension 51 to obtain a suspension 61 with a head shown in FIG. In this case, first, the magnetic head 62 is bonded to the head placement region 5 of the suspension substrate 1 by filling the gap 8 (see FIG. 3) with an adhesive. Next, a solder ball (not shown) is placed in the hole portion 23 (see FIG. 2) of the conductive pad portion 20, and this solder ball is irradiated with a laser beam to melt the solder ball and connect the solder. Part 25 is formed. As a result, the external terminal 63 of the magnetic head 62 is electrically connected to the conductive pad portion 20. In this way, the external terminal 63 of the magnetic head 62 is electrically connected to the wiring layer 12 of the suspension substrate 1 via the conductive pad portion 20.

  Thereafter, the suspension 61 with the head is attached to the case 72 of the hard disk drive 71 to obtain the hard disk drive 71 shown in FIG.

  When data is read and written in the hard disk drive 71 thus obtained, the magnetic head 62 of the suspension 61 with the head is moved along the disk 73 by the voice coil motor 75 and rotated by the spindle motor 74. A desired flying height is maintained close to the existing disk 73. As a result, data is exchanged between the magnetic head 62 and the disk 73. During this time, electrical signals are transmitted by the wiring layers 12 of the suspension substrate 1.

  As described above, according to the present embodiment, the conductive pad portion 20 is provided from the wiring layer 12 of the mounting portion main body region 6 to the opening 7 formed between the head placement region 5 and the mounting portion main body region 6. The conductive pad portion 20 is thicker than the wiring layer 12. As a result, the mechanical strength of the conductive pad portion 20 can be improved. In particular, when the conductive pad portion 20 and the external terminal 63 of the magnetic head 62 are connected by irradiating a laser beam, the conductive pad portion 20 can be prevented from being deformed by thermal stress. Therefore, deformation of the conductive pad portion 20 in the manufacturing process of the suspension substrate 1 can be effectively prevented, and the reliability of electrical connection with the magnetic head 62 can be improved.

  Further, according to the present embodiment, the insulating layer 11 extends from the spring material layer 10 toward the distal end side of the conductive pad portion 20 on the proximal end side of the conductive pad portion 20. Thereby, the conductive pad portion 20 extending inward of the opening 7 can be supported. For this reason, when connecting the magnetic head 62 by irradiating a laser beam, it can prevent further that the electroconductive pad part 20 deform | transforms.

  Further, according to the present embodiment, as described above, the conductive pad portion 20 extends from the edge 13 a of the cover layer 13 toward the inside of the opening 7, and the back surface of the conductive pad portion 20. The tip end side is exposed without being supported by the insulating layer 11. Thus, the electrical connection between the magnetic head 62 and the wiring layer 12 can be easily inspected from the back surface of the conductive pad portion 20. In addition, the cover layer 13 and the insulating layer 11 can be prevented from being heated by heat generated when the solder ball is melted for connection to the magnetic head 62.

  Further, according to the present embodiment, the thickness of the conductive pad portion 20 is greater than the thickness of the wiring layer 12 and is formed so as to extend from the edge 13 a of the cover layer 13 toward the inside of the opening portion 7. Has been. As a result, the first conductive pad layer 21 is formed from the conductive material layer 12a of the laminate 30, and the cover layer 13 is formed on the wiring layer 12, and then the first conductive pad is formed using the cover layer 13 as a resist. A second conductive pad layer 22 can be stacked on the layer 21. Thus, since the cover layer 13 is also used as a resist, a step of providing a resist for forming the second conductive pad layer 22 can be omitted when the second conductive pad layer 22 is stacked. . For this reason, the second conductive pad layer 22 can be formed in a short time.

  In the present embodiment, the example in which the first conductive pad layer 21 is formed by etching and then the spring material layer opening 10a is formed in the spring material layer 10 by etching has been described. However, the present invention is not limited to this, and the etching for forming the first conductive pad layer 21 and the etching for forming the spring material layer opening 10a may be performed simultaneously.

  In this embodiment, an example in which a solder ball is used, the solder ball is irradiated with a laser beam to melt the solder ball, and the conductive pad portion 20 and the external terminal 63 of the magnetic head 62 are connected is described. did. However, the present invention is not limited to this. A gold bonding wire (not shown) is used, and ultrasonic vibration is applied to the gold bonding wire to connect the conductive pad portion 20 and the external terminal 63 of the magnetic head 62. You may make it connect. Even in this case, it is possible to prevent the conductive pad portion 20 from being deformed by ultrasonic vibration, effectively preventing the deformation of the conductive pad portion 20 in the manufacturing process of the suspension substrate 1, and the magnetic head 62. The reliability of the electrical connection can be improved.

  As described above, the embodiment of the present invention has been described in detail. However, the suspension substrate 1 and the method for manufacturing the suspension substrate according to the present invention are not limited to the above embodiment, and the gist of the present invention is described. Various modifications can be made without departing from the scope.

  For example, in the manufacturing method of the suspension substrate described above, after forming the cover layer 13 as shown in FIG. 8, the cover layer 13 is made to function as a resist, and the first conductive pad layer 21 as shown in FIG. A second conductive pad layer 22 was laminated thereon. However, the present invention is not limited to this, and the second conductive pad layer 22 is laminated on the first conductive pad layer 21 before the cover layer 13 is formed, and then the cover layer 13 is formed. You may do it.

  Specifically, as shown in FIG. 7, after forming the wiring layer 12 and the first conductive pad layer 21 from the conductive material layer 12a, the second conductive pad layer 22 is formed as shown in FIG. To do. In this case, first, resists 39 and 40 are formed over the entire region above and below the insulating layer 11 as shown in FIG. Next, as shown in FIG. 13B, the resist 39 on the wiring layer 12 and the first conductive pad layer 21 is patterned, and the first conductive pad layer 21 is exposed. A second conductive pad layer 22 is stacked on the exposed upper surface of the first conductive pad layer 21 by electrolytic copper plating (see FIG. 13C). In this way, the conductive pad portion 20 composed of the first conductive pad layer 21 and the second conductive pad layer 22 is formed. Thereafter, these resists 39 and 40 are peeled off (see FIG. 13D).

  Next, as shown in FIG. 14, the cover layer 13 is formed. In this case, first, as shown in FIG. 14A, the cover layer 13 is formed on the wiring layer 12, the conductive pad portion 20, and the insulating layer 11. Next, as shown in FIG. 14B, resists 41 and 42 are formed on the entire surface of the cover layer 13 and the lower surfaces of the spring material layer 10 and the insulating layer 11. Next, as shown in FIG. 14C, the resist 41 on the cover layer 13 is patterned. The exposed portion of the cover layer 13 is etched with the patterned resist 41 (see FIG. 14D). Thereby, the cover layer 13 is patterned into a predetermined shape. Thereafter, these resists 41 and 42 are peeled off (see FIG. 14E).

  After the cover layer 13 is formed in this manner, the same steps as those of the embodiment of the present invention described above (formation of the opening 7 shown in FIG. 10, formation of the gold plating layer 24 shown in FIG. 11, and FIG. By performing the etching of the spring material layer 10 shown), the suspension substrate 1 according to the above-described embodiment can be obtained.

  Here, in FIGS. 8 and 9, the second conductive pad layer 22 is formed using the cover layer 13 formed on the wiring layer 12 as a resist. In this case, the thickness of the cover layer 13 depends on the design specification. Therefore, the thickness of the formed second conductive pad layer 22 is limited by the cover layer 13. On the other hand, as shown in FIG. 13, when the second conductive pad layer 22 is formed by forming the resist 39 instead of the cover layer 13 on the wiring layer 12, the thickness of the resist 39 is changed. The thickness of the second conductive pad layer 22 can be further increased. For this reason, according to this modification, the thickness of the electroconductive pad part 20 can be made still thicker, and mechanical strength can be improved further.

DESCRIPTION OF SYMBOLS 1 Suspension board | substrate 2 Mounting part 3 Board | substrate main body 4 External board | substrate connection part 5 Head mounting area | region 6 Mounting part main body area | region 7 Opening part 8 Cavity part 10 Springy material layer 10a Springy material layer opening part 10b Pattern opening part 11 Insulating layer 11a Insulating layer opening 12 Wiring layer 12a Conductive material layer 13 Cover layer 13a Edge 20 Conductive pad portion 21 First conductive pad layer 22 Second conductive pad layer 23 Hole portion 24 Gold plating layer 25 Solder connection portion 30 Laminated bodies 31 to 42 Resist 51 Suspension 52 Load beam 61 Suspension with head 62 Magnetic head 63 External terminal 71 Hard disk drive 72 Case 73 Disk 74 Spindle motor 75 Voice coil motor 76 Arm

Claims (7)

In a suspension substrate comprising a mounting portion on which a magnetic head is mounted and a substrate body connected to the mounting portion,
The mounting unit has a head mounting region on which the magnetic head is mounted, and a mounting unit main body region surrounding the head mounting region.
The mounting portion main body region has a spring material layer, a wiring layer laminated on the spring material layer via an insulating layer, and a protective layer laminated on the wiring layer ,
An opening is formed between the head mounting area and the mounting body area.
A conductive pad portion connected to the magnetic head extends from the wiring layer in the mounting body region toward the inside of the opening,
The thickness of the conductive pad portion is thicker than the thickness of the wiring layer ,
The conductive pad portion includes a first conductive pad layer provided on the insulating layer, and a second conductive pad layer provided on the first conductive pad layer,
The second conductive pad layer extends from the edge of the protective layer toward the inside of the opening,
The suspension substrate, wherein the first conductive pad layer and the second conductive pad layer are made of copper .   2. The suspension substrate according to claim 1, wherein an insulating layer extends toward a distal end side of the conductive pad portion from a spring material layer on a proximal end side of the conductive pad portion. Suspension characterized by having a substrate for suspension according to claim 1 or 2. A suspension with a head comprising the suspension according to claim 3 and a magnetic head mounted on the suspension. A hard disk drive comprising the suspension with a head according to claim 4 . A head mounting region on which the magnetic head is mounted; a mounting unit main body region surrounding the head mounting region; a mounting unit on which the magnetic head is mounted; and a substrate main body connected to the mounting unit. In the manufacturing method of the suspension substrate in which the opening is formed between the head mounting region and the mounting portion main body region,
Preparing a laminate having a spring material layer and a conductive material layer formed of copper laminated on the spring material layer via an insulating layer;
Patterning the conductive material layer to form a wiring layer in the mounting portion main body region and forming a first conductive pad layer extending from the wiring layer toward the inside of the opening;
Forming a protective layer on the wiring layer in the mounting body region;
A step of laminating a second conductive pad layer on the first conductive pad layer, and forming a conductive pad portion composed of the first conductive pad layer and the second conductive pad layer and connected to the magnetic head. When,
Forming a spring material layer opening in a region corresponding to the opening in the spring material layer;
The insulating layer, corresponding to the springy material layer open mouth to form an insulating layer openings, and a step of forming an opening between the head mounting area and the mounting portion main body region,
The thickness of the conductive pad portion is thicker than the thickness of the wiring layer ,
The step of laminating the second conductive pad layer is performed after the step of forming the protective layer,
The second conductive pad layer is laminated on the first conductive pad layer by copper plating using the protective layer as a resist,
When stacking a second conductive pad layer, the second conductive pad layer, formed a manufacturing method of a suspension board according to claim Rukoto to extend from the edge of the protective layer toward the inside of the opening . When forming the insulating layer opening, the insulating layer opening is formed on the base end side of the conductive pad portion so that the insulating layer extends toward the distal end side of the conductive pad portion rather than the spring material layer. The method for manufacturing a suspension substrate according to claim 6 , wherein the suspension substrate is formed.

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