JP6124797B2 - 物品並びにその製造及び使用方法 - Google Patents
物品並びにその製造及び使用方法 Download PDFInfo
- Publication number
- JP6124797B2 JP6124797B2 JP2013543224A JP2013543224A JP6124797B2 JP 6124797 B2 JP6124797 B2 JP 6124797B2 JP 2013543224 A JP2013543224 A JP 2013543224A JP 2013543224 A JP2013543224 A JP 2013543224A JP 6124797 B2 JP6124797 B2 JP 6124797B2
- Authority
- JP
- Japan
- Prior art keywords
- weakly bonded
- crystalline material
- substrate
- bonded crystalline
- graphene
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000000034 method Methods 0.000 title claims description 47
- 238000004519 manufacturing process Methods 0.000 title description 7
- 239000002178 crystalline material Substances 0.000 claims description 91
- 239000000758 substrate Substances 0.000 claims description 69
- 238000012546 transfer Methods 0.000 claims description 13
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 67
- 239000010410 layer Substances 0.000 description 39
- 229910021389 graphene Inorganic materials 0.000 description 38
- 229910002804 graphite Inorganic materials 0.000 description 28
- 239000010439 graphite Substances 0.000 description 28
- 239000000463 material Substances 0.000 description 27
- 239000010408 film Substances 0.000 description 11
- 229910052582 BN Inorganic materials 0.000 description 8
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 8
- 239000000853 adhesive Substances 0.000 description 8
- 230000001070 adhesive effect Effects 0.000 description 8
- 239000004927 clay Substances 0.000 description 8
- 229910052570 clay Inorganic materials 0.000 description 8
- 239000010445 mica Substances 0.000 description 8
- 229910052618 mica group Inorganic materials 0.000 description 8
- 229910052723 transition metal Inorganic materials 0.000 description 8
- 150000003624 transition metals Chemical class 0.000 description 8
- 229910052711 selenium Inorganic materials 0.000 description 7
- 229910052717 sulfur Inorganic materials 0.000 description 7
- 229910052714 tellurium Inorganic materials 0.000 description 7
- 229910052750 molybdenum Inorganic materials 0.000 description 6
- 229910052758 niobium Inorganic materials 0.000 description 6
- 229910052721 tungsten Inorganic materials 0.000 description 6
- 125000004429 atom Chemical group 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 238000005229 chemical vapour deposition Methods 0.000 description 4
- 239000002131 composite material Substances 0.000 description 4
- 239000000356 contaminant Substances 0.000 description 4
- -1 etc.) Substances 0.000 description 4
- 239000007788 liquid Substances 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- 230000008901 benefit Effects 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 239000003973 paint Substances 0.000 description 3
- 229920000139 polyethylene terephthalate Polymers 0.000 description 3
- 239000005020 polyethylene terephthalate Substances 0.000 description 3
- 229920000642 polymer Polymers 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 239000002356 single layer Substances 0.000 description 3
- 238000003786 synthesis reaction Methods 0.000 description 3
- 229910052715 tantalum Inorganic materials 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 239000004698 Polyethylene Substances 0.000 description 2
- 239000004743 Polypropylene Substances 0.000 description 2
- 238000000137 annealing Methods 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 2
- 239000013590 bulk material Substances 0.000 description 2
- 125000004432 carbon atom Chemical group C* 0.000 description 2
- 239000003054 catalyst Substances 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 239000011222 crystalline ceramic Substances 0.000 description 2
- 229910002106 crystalline ceramic Inorganic materials 0.000 description 2
- 239000006185 dispersion Substances 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 238000009503 electrostatic coating Methods 0.000 description 2
- 239000000446 fuel Substances 0.000 description 2
- 239000007770 graphite material Substances 0.000 description 2
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 238000000879 optical micrograph Methods 0.000 description 2
- 238000004806 packaging method and process Methods 0.000 description 2
- 239000004033 plastic Substances 0.000 description 2
- 229920003023 plastic Polymers 0.000 description 2
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 2
- 229920000573 polyethylene Polymers 0.000 description 2
- 238000012667 polymer degradation Methods 0.000 description 2
- 239000004926 polymethyl methacrylate Substances 0.000 description 2
- 229920001155 polypropylene Polymers 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- 241000894007 species Species 0.000 description 2
- 230000003068 static effect Effects 0.000 description 2
- 230000008961 swelling Effects 0.000 description 2
- XMWRBQBLMFGWIX-UHFFFAOYSA-N C60 fullerene Chemical compound C12=C3C(C4=C56)=C7C8=C5C5=C9C%10=C6C6=C4C1=C1C4=C6C6=C%10C%10=C9C9=C%11C5=C8C5=C8C7=C3C3=C7C2=C1C1=C2C4=C6C4=C%10C6=C9C9=C%11C5=C5C8=C3C3=C7C1=C1C2=C4C6=C2C9=C5C3=C12 XMWRBQBLMFGWIX-UHFFFAOYSA-N 0.000 description 1
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 238000005411 Van der Waals force Methods 0.000 description 1
- 239000002390 adhesive tape Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000003667 anti-reflective effect Effects 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 229910021387 carbon allotrope Inorganic materials 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 239000006092 crystalline glass-ceramic Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000004299 exfoliation Methods 0.000 description 1
- 230000008713 feedback mechanism Effects 0.000 description 1
- 229910003472 fullerene Inorganic materials 0.000 description 1
- 239000002241 glass-ceramic Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000001451 molecular beam epitaxy Methods 0.000 description 1
- 239000002052 molecular layer Substances 0.000 description 1
- 239000002071 nanotube Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 239000000049 pigment Substances 0.000 description 1
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 229920006254 polymer film Polymers 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 238000005979 thermal decomposition reaction Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 238000007704 wet chemistry method Methods 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/0057—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material where an intermediate transfer member receives the ink before transferring it on the printing material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41C—PROCESSES FOR THE MANUFACTURE OR REPRODUCTION OF PRINTING SURFACES
- B41C1/00—Forme preparation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B32/00—Carbon; Compounds thereof
- C01B32/15—Nano-sized carbon materials
- C01B32/182—Graphene
- C01B32/194—After-treatment
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/04—Coating on selected surface areas, e.g. using masks
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/305—Sulfides, selenides, or tellurides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24802—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.]
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Nanotechnology (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Metallurgy (AREA)
- General Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Inorganic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Composite Materials (AREA)
- Plasma & Fusion (AREA)
- Laminated Bodies (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Carbon And Carbon Compounds (AREA)
Description
本出願は、2010年12月8日出願の米国特許仮出願第61/421017号に基づく利益を主張するものであり、当該出願の開示内容をその全容にわたって本明細書に援用するものである。
[0001]グラフェンは、単一の炭素原子層であり、当該技術分野では周知のものである。時として数層のグラフェンの層が当該技術分野においてグラフェンと呼ばれる場合もある。グラフェンの2次元(2D)構造の炭素シートは、グラファイトの炭素同素体(3次元(3D)材料)、ナノチューブ(1次元(1D)材料)、及びフラーレン(0次元(0D)材料)の基本的な構成単位を提供することが可能である。グラフェンは、高い熱伝導率、優れた機械的特性、及び優れた電子輸送特性などの極めて優れた性質を有するものと推測されている。理論によって束縛されることを望むものではないが、グラフェン内部の電子は線形分散関係に従い、無質量の相対論的粒子として振る舞うものと考えられる。
[0006]一態様では、本開示は、基板の少なくとも1つの表面(例えば主面)上に、第1の弱く結合した結晶性材料(例えばグラファイト又はMoS2)の単一の個別の原子の乾燥した層を有する物品について述べる。
[0010]「乾燥状態の」とは、弱く結合した結晶性材料(グラファイトを含む)が固体状態であり、液体又は気体状媒質中に分散されていないことを示す。特定の弱く結合した結晶性材料は、調製及び取り扱い時に環境から大量の(75体積%以上に達する)水分などの様々な物質種を吸着しうることが知られている。本出願の文脈の範囲内では、最大で75体積%までの吸着した物質種を含む弱く結合した材料は、「乾燥状態」とみなされる。
[0017]例示的な弱く結合した結晶性材料としては、グラファイト、雲母、粘土、六方晶窒化ホウ素、及び式MX2を有する遷移金属ジカルコゲニド(式中、MはMo、W、Nb、Taであり、XはS、Se及びTeである)が挙げられる。複数の弱く結合した結晶層を有する実施形態では、弱く結合した結晶性材料の内の少なくとも2つが同じか又は異なっていてよい。
1.弱く結合した結晶性材料を基板上に提供する方法であって、第1の弱く結合した結晶性材料の第1の単一の個別の原子の乾燥した層の少なくとも一部を、基板の表面上に転写することを含む方法。
[0042]改変した(下記に述べるように)インクジェットプリンター(ヒューレット・パッカード社(Hewlett-Packard Company)(カリフォルニア州パロアルト)より「HP DESKJET 948C」の商品名のものを入手)を使用して、弱く結合した結晶性グラファイトを基材上に転写した。インクジェットプリンターは、ドライカートリッジ(すなわち中にインクがないカートリッジ)とともに使用した。弱く結合した結晶性グラファイト(エス・ピー・アイ・サプライズ社(SPI Supplies)(ペンシルベニア州ウェストチェスター)より入手した10mm×10mm×1mmの高配向性熱分解グラファイト試料)を、接着剤(スリー・エム社(3M Company)(ミネソタ州セントポール)より「SCOTCH−WELD INSTANT ADHESIVE CA100」の商品名のものを入手)を使用してカートリッジのプリンターヘッドに取り付けた。基板は、厚さ0.1mmのA4サイズの透明フィルム(エル・エー・ブイ・ビジュアル・プロダクツ社(LAV Visual Products, Singapore)(シンガポール)より「PVC 7204」の商品名のものを入手)であり、これをプリンターのペーパースロットに導入した。A4基板がローラーによって印刷領域に引き込まれた時点で、弱く結合した結晶性グラファイトと基板とは互いに近接した。印刷しようとするパターンを従来のコンピュータ(ヒューレット・パッカード社(Hewlett-Packard)(カリフォルニア州パロアルト)より「HP COMPAQ 6910P」の商品名のものを入手)によってプリンターに送信した。プリンターが適切な命令を受信すると、弱く結合した結晶性グラファイトと基板とは互いに動き、弱く擦り合うことによってグラフェンの薄層が基板上に転写(成膜)された。このように印刷された試料は、x及びy方向の両方に整列した寸法の異なる一連の長方形の形状を有していた。図1を参照すると、基板11上にグラフェン12(白い部分)が印刷されている様子が示されている。
[0043]実施例2は、弱く結合した結晶性グラファイトが取り付けられたプリンターヘッド以外に、第2のプリンターヘッドに塗料パッド(シュール・ライン社(Shur-Line)(ノースカロライナ州ハンターズビル)より「SHUR−LINE PAINT PAD」の商品名のものを入手)を取り付けたことを除き、実施例1と同様にして行った。塗装ヘッドは、接着剤(「SCOTCH−WELD INSTANT ADHESIVE CA100」)を用いて第2のプリンターヘッドに取り付けた。弱く結合した結晶性グラファイトを保持した第1のプリンターヘッドは、基板に近接した際に(すなわち基板に接触又は擦る状態)グラフェンの薄層を転写した。このプロセスにおいて、塗料パッドブラシを保持する第2のプリンターヘッドによって、グラファイトを薄くし、基板上の他の転写されていない部分に材料を広げることが促された。図2を参照すると、基板21上にグラフェン22(白い部分)が印刷されている様子が示されている。
Claims (2)
- 弱く結合した結晶性材料を基板上に提供する方法であって、第1の弱く結合した結晶性材料の、第1の単一の個別の原子の乾燥した層の少なくとも一部を、基板の表面上に転写することを含み、転写することが、乾燥状態の弱く結合した結晶性材料を有する印刷表面を有する第1の印刷ヘッドを備えかつX軸、Y軸、及びZ軸のそれぞれに沿って印刷表面を動かすように設定されているプリンターを使用して、前記弱く結合した結晶性材料で前記基板をこすることを含む、方法。
- 乾燥状態の弱く結合した結晶性材料を有する印刷表面を有する第1の印刷ヘッドを備えるプリンターであって、前記乾燥状態の弱く結合した結晶性材料をこすることによって基板の表面上に転写するように前記プリンターがX軸、Y軸、及びZ軸のそれぞれに沿って印刷表面を動かすように設定されている、プリンター。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US42101710P | 2010-12-08 | 2010-12-08 | |
US61/421,017 | 2010-12-08 | ||
PCT/US2011/063064 WO2012078464A2 (en) | 2010-12-08 | 2011-12-02 | Article and method of making and using the same |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2014508663A JP2014508663A (ja) | 2014-04-10 |
JP2014508663A5 JP2014508663A5 (ja) | 2015-01-22 |
JP6124797B2 true JP6124797B2 (ja) | 2017-05-10 |
Family
ID=46207657
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2013543224A Active JP6124797B2 (ja) | 2010-12-08 | 2011-12-02 | 物品並びにその製造及び使用方法 |
Country Status (5)
Country | Link |
---|---|
US (2) | US9321254B2 (ja) |
EP (1) | EP2649217A4 (ja) |
JP (1) | JP6124797B2 (ja) |
CN (2) | CN107419241A (ja) |
WO (1) | WO2012078464A2 (ja) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2795628B1 (en) | 2011-12-22 | 2020-02-19 | 3M Innovative Properties Company | Electrically conductive article with high optical transmission |
CN103779576B (zh) * | 2012-10-24 | 2015-12-02 | 清华大学 | 电化学电池集流体的制备方法及电化学电池电极的制备方法 |
GB2508226B (en) * | 2012-11-26 | 2015-08-19 | Selex Es Ltd | Protective housing |
ITTO20150243A1 (it) * | 2015-05-07 | 2016-11-07 | Itt Italia Srl | Materiale di attrito, in particolare per la fabbricazione di una pastiglia freno, e metodo di preparazione associato |
WO2017219125A1 (en) * | 2016-06-10 | 2017-12-28 | Pope Michael A | Method and apparatus for producing large-area monolayer films of solution dispersed nanomaterials |
Family Cites Families (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5389195A (en) | 1991-03-07 | 1995-02-14 | Minnesota Mining And Manufacturing Company | Surface modification by accelerated plasma or ions |
US6203898B1 (en) | 1997-08-29 | 2001-03-20 | 3M Innovatave Properties Company | Article comprising a substrate having a silicone coating |
US5972176A (en) | 1997-10-03 | 1999-10-26 | 3M Innovative Properties Company | Corona treatment of polymers |
KR20030007497A (ko) | 2000-04-06 | 2003-01-23 | 쓰리엠 이노베이티브 프로퍼티즈 캄파니 | 집속 전극장에 의해 정전기적으로 보조되는 코팅 방법 및코팅 장치 |
US20030129305A1 (en) | 2002-01-08 | 2003-07-10 | Yihong Wu | Two-dimensional nano-sized structures and apparatus and methods for their preparation |
US6874699B2 (en) | 2002-10-15 | 2005-04-05 | Wisconsin Alumni Research Foundation | Methods and apparata for precisely dispensing microvolumes of fluids |
US20050250052A1 (en) | 2004-05-10 | 2005-11-10 | Nguyen Khe C | Maskless lithography using UV absorbing nano particle |
US20070138405A1 (en) | 2005-12-16 | 2007-06-21 | 3M Innovative Properties Company | Corona etching |
JP4756548B2 (ja) * | 2006-04-20 | 2011-08-24 | 株式会社リコー | 潤滑剤供給装置、クリーニング装置、プロセスカートリッジ、及び、画像形成装置 |
GB0622150D0 (en) * | 2006-11-06 | 2006-12-20 | Kontrakt Technology Ltd | Anisotropic semiconductor film and method of production thereof |
JP4933287B2 (ja) * | 2007-01-29 | 2012-05-16 | 株式会社リコー | 画像形成装置用潤滑剤塗布装置及びこれを用いたプロセスカートリッジ並びに画像形成装置 |
US7885595B2 (en) * | 2007-09-04 | 2011-02-08 | Ricoh Company Limited | Lubricant applicator, process cartridge including same, and image forming apparatus including same |
EP2195648B1 (en) * | 2007-09-12 | 2019-05-08 | President and Fellows of Harvard College | High-resolution molecular graphene sensor comprising an aperture in the graphene layer |
US8715610B2 (en) | 2007-10-19 | 2014-05-06 | University Of Wollongong | Process for the preparation of graphene |
KR100923304B1 (ko) | 2007-10-29 | 2009-10-23 | 삼성전자주식회사 | 그라펜 시트 및 그의 제조방법 |
CN101442105B (zh) * | 2007-11-21 | 2010-06-09 | 中国科学院化学研究所 | 一种有机场效应晶体管及其专用源漏电极与制备方法 |
KR101344493B1 (ko) | 2007-12-17 | 2013-12-24 | 삼성전자주식회사 | 단결정 그라펜 시트 및 그의 제조방법 |
CN106376174B (zh) | 2008-02-05 | 2019-06-07 | 普林斯顿大学理事会 | 电子器件和形成电子器件的方法 |
FI20085113A0 (fi) * | 2008-02-08 | 2008-02-08 | Valtion Teknillinen | Menetelmä grafiinirakenteiden valmistamiseksi alustoille |
WO2009119641A1 (ja) | 2008-03-26 | 2009-10-01 | 学校法人早稲田大学 | 単原子膜の製造方法 |
CN101285175B (zh) * | 2008-05-29 | 2010-07-21 | 中国科学院化学研究所 | 化学气相沉积法制备石墨烯的方法 |
US20100000441A1 (en) * | 2008-07-01 | 2010-01-07 | Jang Bor Z | Nano graphene platelet-based conductive inks |
US8487296B2 (en) * | 2008-11-26 | 2013-07-16 | New Jersey Institute Of Technology | Graphene deposition and graphenated substrates |
US8057863B2 (en) * | 2008-12-05 | 2011-11-15 | The Regents Of The University Of California | Electrostatic force assisted deposition of graphene |
CN101503174B (zh) * | 2009-03-18 | 2011-01-05 | 北京大学 | 二氧化钛光催化切割石墨烯的方法 |
DE102009022982A1 (de) * | 2009-05-28 | 2010-12-02 | Oerlikon Trading Ag, Trübbach | Verfahren zum Aufbringen eines Hochtemperaturschmiermittels |
CN101648182B (zh) * | 2009-09-07 | 2012-01-11 | 中国科学院化学研究所 | 一种溶液态石墨烯图案化排布方法 |
-
2011
- 2011-12-02 WO PCT/US2011/063064 patent/WO2012078464A2/en active Application Filing
- 2011-12-02 CN CN201710020285.9A patent/CN107419241A/zh active Pending
- 2011-12-02 EP EP11846563.2A patent/EP2649217A4/en not_active Withdrawn
- 2011-12-02 US US13/880,820 patent/US9321254B2/en not_active Expired - Fee Related
- 2011-12-02 CN CN201180059236.7A patent/CN103314133B/zh not_active Expired - Fee Related
- 2011-12-02 JP JP2013543224A patent/JP6124797B2/ja active Active
-
2016
- 2016-03-21 US US15/075,539 patent/US20160200098A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
WO2012078464A9 (en) | 2013-04-25 |
US9321254B2 (en) | 2016-04-26 |
EP2649217A4 (en) | 2014-11-26 |
US20160200098A1 (en) | 2016-07-14 |
WO2012078464A2 (en) | 2012-06-14 |
CN103314133A (zh) | 2013-09-18 |
CN103314133B (zh) | 2017-08-01 |
WO2012078464A3 (en) | 2012-08-16 |
US20130244009A1 (en) | 2013-09-19 |
EP2649217A2 (en) | 2013-10-16 |
CN107419241A (zh) | 2017-12-01 |
JP2014508663A (ja) | 2014-04-10 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6124797B2 (ja) | 物品並びにその製造及び使用方法 | |
Kang et al. | Efficient transfer of large-area graphene films onto rigid substrates by hot pressing | |
Aissa et al. | Recent progress in the growth and applications of graphene as a smart material: a review | |
US20160304352A1 (en) | Graphene tape | |
CN102713025B (zh) | 异质外延生长的石墨烯的脱裂与转移技术及包含其之产品 | |
CN104640808B (zh) | 包含石墨烯的组合物 | |
KR102342005B1 (ko) | 그래핀이 코팅된 전자 부품 | |
US20230337358A1 (en) | Scalable, Printable, Patterned Sheet Of High Mobility Graphene On Flexible Substrates | |
EP2679540A1 (en) | Method of manufacturing a graphene monolayer on insulating substrates | |
Ding et al. | Graphene—vertically aligned carbon nanotube hybrid on PDMS as stretchable electrodes | |
WO2010071858A1 (en) | Inks and coatings containing multi-chain lipids | |
Zhang et al. | Characterization and simulation of liquid phase exfoliated graphene-based films for heat spreading applications | |
Coscia et al. | A new micromechanical approach for the preparation of graphene nanoplatelets deposited on polyethylene | |
Moon et al. | Strain-induced alignment of printed silver nanowires for stretchable electrodes | |
Sinar et al. | Piezoelectric sensors fabricated by depositing solution-grown ZnO nanorods on flexible graphene-derivative electrodes | |
Guo et al. | Vapor phase growth of bismuth telluride nanoplatelets on flexible polyimide films | |
Jabari | Additive Manufacturing of Graphene-based Patterns | |
de Andrade et al. | Optoeletronic and Ferroeletric Applications | |
KR101829836B1 (ko) | 그래핀을 포함하는 전극의 제조 방법 | |
Choi et al. | Enhancing the quality of transferred single-layer graphene with poly (4-vinylphenol) interlayer on flexible substrates | |
KR20210000420A (ko) | 대전방지 하이브리드 코팅용액 및 그 제조방법 | |
Warner Jr | Electrical and Physical Property Characterization of Single Walled Carbon Nanotube Ink for Flexible Printed Electronics | |
Hong et al. | Growth of graphene layers for thin films |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20141125 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20141125 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20151111 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20151117 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20160216 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20160802 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20160914 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20170307 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20170404 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6124797 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |