JP6198627B2 - Wafer unit processing method - Google Patents

Description

  The present invention relates to a method for processing a wafer unit including a wafer having a die-bonding film attached thereto.

  A wafer having a plurality of devices formed on the surface is usually cut or laser processed along a street (division planned line) and divided into a plurality of chips corresponding to each device. An adhesive layer for fixing the chip to a substrate or the like may be provided on the back side of the chip. If a stimulus such as heat or light is applied after the adhesive layer is brought into close contact with the substrate or the like, the adhesive layer can be cured to fix the chip to the substrate or the like.

  The adhesive layer described above is formed, for example, by breaking a die-bonding film attached to the back side of the wafer into the size of each chip (see, for example, Patent Document 1). In this method, an expandable expandable tape is attached to a die bonding film and expanded to give an external force to the die bonding film for breaking to the size of each chip.

JP 2006-49591 A

  However, the above-described method has a problem that the die-bonding film (or the die-bonding film and the wafer) cannot always be appropriately divided. This problem is particularly serious when a wafer is divided into small chips (for example, 1 mm square or less).

  That is, when the wafer is divided into small chips, the bonding area per chip of the die bonding film and the expanding tape is reduced, and the die bonding film and the expanding tape are easily peeled off when the expanding tape is expanded. . Therefore, even if the expanded tape is expanded, a sufficient external force cannot be applied, and the die bonding film cannot be properly divided.

  This invention is made | formed in view of this problem, The place made into the objective is providing the processing method of the wafer unit which can divide | segment appropriately the film for die-bonding stuck to the wafer.

  According to the present invention, a device is formed in each of the regions defined by a plurality of division lines intersecting the front surface, and a wafer having an ultraviolet curable expandable tape attached to the back surface through a die-bonding film, A method of processing a wafer unit in which an outer periphery of the ultraviolet curable expandable tape is attached to a ring frame, wherein the wafer of the wafer unit is formed with a division starting point along the division line. The unit is heated to semi-cure the die-bonding film to improve the fixing force of the die-bonding film to the wafer, and the ultraviolet-curable expanding tape is irradiated with ultraviolet rays, and the ultraviolet-curable expanding tape is used for the die bonding. A pretreatment step for improving the fixing force to the film; After performing the processing step, the ultraviolet curable expandable tape is expanded to apply an external force to the die bonding film and the wafer to divide the wafer and the die bonding film along the division line. And a step of processing a wafer unit.

  In addition, according to the present invention, a wafer in which a device is formed in each of regions divided by a plurality of scheduled division lines intersecting the front surface and an ultraviolet curable expandable tape is attached to the back surface via a die bonding film. A wafer unit processing method in which an outer periphery of the ultraviolet curable expandable tape is attached to a ring frame, wherein the wafer of the wafer unit is divided into a plurality of chips along the division line. The wafer unit is heated to semi-cure the die bonding film to improve the fixing force of the die bonding film to the wafer, and the ultraviolet curable expanding tape is irradiated with ultraviolet rays to A pre-treatment step for improving the fixing force to the die-bonding film And, after the pretreatment step, an expansion step of expanding the ultraviolet curable expanding tape to apply an external force to the die bonding film and dividing the die bonding film along the outer periphery of the chip; A method for processing a wafer unit is provided.

  In the processing method of the wafer unit of the present invention, before the expansion step of expanding the ultraviolet curable expanding tape to divide the die bonding film, the die bonding film is semi-cured to improve the fixing force of the die bonding film to the wafer. At the same time, a pretreatment step is performed to improve the fixing force of the ultraviolet curable expanding tape to the die bonding film by irradiating the ultraviolet curable expanding tape with ultraviolet rays.

  This makes it difficult for the die-bonding film to peel off from the wafer, and the UV curable expandable tape makes it difficult to peel off from the die-bonding film. The film can be divided properly.

3 is a perspective view schematically showing a configuration of a wafer unit processed by the processing method according to Embodiment 1. FIG. FIG. 3 is a partial cross-sectional side view schematically showing a part of the preprocessing step according to the first embodiment. 3 is a partial cross-sectional side view schematically showing an expansion step according to Embodiment 1. FIG. FIG. 10 is a perspective view schematically showing a configuration of a wafer unit processed by the processing method according to the second embodiment. FIG. 10 is a partial cross-sectional side view schematically showing a part of the preprocessing step according to the second embodiment. FIG. 10 is a partial cross-sectional side view schematically showing an expansion step according to the second embodiment.

  Embodiments of the present invention will be described with reference to the accompanying drawings. The wafer unit processing method according to the present invention includes a preprocessing step (see FIGS. 2 and 5) and an expansion step (see FIGS. 3 and 6).

  In the pretreatment step, the die-bonding film is semi-cured to improve the fixing force of the die-bonding film to the wafer, and the UV-curable expanding tape is irradiated with ultraviolet rays to improve the fixing force of the UV-curable expanding tape to the die-bonding film. Let

  In the expansion step, the ultraviolet curable expanding tape is expanded to divide the die bonding film. The wafer unit processing method according to the present invention will be described in detail below. In the first embodiment described below, a method for processing a wafer unit including a wafer on which a modified layer (division starting point) serving as a division starting point is formed will be described. In the second embodiment, a divided wafer is processed. A processing method of the wafer unit including it will be described.

(Embodiment 1)
In the present embodiment, a method for processing a wafer unit including a wafer on which a modified layer (division start point) serving as a division start point is formed will be described. FIG. 1 is a perspective view schematically showing a configuration of a wafer unit processed by the processing method according to the present embodiment.

  As shown in FIG. 1, a wafer unit 1 processed in the present embodiment includes a disk-shaped wafer 11 made of a material such as silicon or sapphire. The front surface 11a side of the wafer 11 is partitioned into a plurality of regions by streets (division lines) arranged in a lattice pattern, and devices 15 such as ICs and light emitting elements are formed in each region.

  On the back surface 11 b side of the wafer 11, the surface 17 a side of the die bonding film 17 is attached. The die-bonding film 17 is made of a material containing a thermosetting resin, and an ultraviolet curable expanding tape 19 is attached to the back surface 17b side. The die-bonding film 17 is sometimes called DAF (Die Attach Film) or the like.

  The ultraviolet curable expandable tape 19 is composed of, for example, a stretchable film-like base material layer and a paste layer containing an ultraviolet curable resin, and the back surface 17b of the die bond film 17 by the adhesive force of the paste layer. It is stuck on the side. An annular ring frame 21 is fixed to the outer peripheral portion of the ultraviolet curable expandable tape 19.

  On the wafer 11 of the wafer unit 1 configured as described above, a modified layer (division starting point) 23 serving as a starting point for division is formed along the street 13. The modified layer 23 can be formed by, for example, condensing a laser beam having a wavelength difficult to be absorbed by the wafer 11 inside the wafer 11 and moving (relatively moving) the laser beam in a direction parallel to the street 13.

  In the present embodiment, first, a preprocessing step is performed on the wafer unit 1 to perform preprocessing before expanding the ultraviolet curable expandable tape 19. This pretreatment step includes a curing step for improving the fixing force of the die bonding film 17 and an ultraviolet irradiation step for improving the fixing force of the ultraviolet curable expanding tape 19.

  First, a curing step for heating the wafer unit 1 and semi-curing the die bonding film 17 is performed. In the curing step, the wafer unit 1 is heat-treated with a heat treatment apparatus (not shown) such as a hot plate. Although conditions, such as temperature and time, differ according to the kind etc. of the film 17 for die bonding, it can be made into about 30 minutes-60 minutes at 60 degreeC, for example.

  The fixing force of the die bonding film 17 to the wafer 11 can be increased by semi-curing the die bonding film 17 in this curing step. As a result, even if the ultraviolet curable expandable tape 19 is expanded later, the die bonding film 17 is difficult to peel off from the wafer 11.

  After the curing step, an ultraviolet irradiation step for improving the fixing force of the ultraviolet curable expandable tape 19 by irradiating the wafer unit 1 with ultraviolet rays is performed. FIG. 2 is a partial cross-sectional side view schematically showing the ultraviolet irradiation step.

  As shown in FIG. 2, the ultraviolet irradiation step is performed by the ultraviolet irradiation device 2. The ultraviolet irradiation device 2 includes a plurality of light sources 4 that emit ultraviolet (ultraviolet light) UV. For example, the wafer unit 1 is disposed above the light source 4 with the ultraviolet curable expandable tape 19 positioned below. Is done.

  In the ultraviolet irradiation step, for example, the ultraviolet light UV from the light source 4 is irradiated to the wafer unit 1 arranged as described above, and the glue layer of the ultraviolet curable expanding tape 19 is cured (or semi-cured). Although conditions such as the amount of irradiation light and irradiation time vary depending on the type of the ultraviolet curable expandable tape 19 and the like, for example, the irradiation time may be as short as about 3 seconds.

  By fixing (or semi-curing) the paste layer of the ultraviolet curable expandable tape 19 in this ultraviolet irradiation step, the fixing force of the ultraviolet curable expandable tape 19 to the die bonding film 17 can be increased. As a result, even if the ultraviolet curable expanding tape 19 is expanded later, the ultraviolet curable expanding tape 19 becomes difficult to peel off from the die bonding film 17.

  In this embodiment, the ultraviolet irradiation step is performed after the curing step, but the curing step may be performed after the ultraviolet irradiation step. Of course, the curing step and the ultraviolet irradiation step can be performed at the same timing. Further, the preprocessing step may include any step other than the curing step and the ultraviolet irradiation step.

  After the pretreatment step described above, an expansion step is performed in which the ultraviolet curable expandable tape 19 is expanded to divide the wafer 11 and the die bonding film 17. FIG. 3 is a partial cross-sectional side view schematically showing the expansion step.

  As shown in FIG. 3, the expansion step is performed by the expanding device 10. The expander 10 includes a wafer unit support mechanism 12 that supports the wafer unit 1 and an expansion drum 14 that expands the ultraviolet curable expandable tape 19 of the wafer unit 1 supported by the wafer unit support mechanism 12.

  The wafer unit support mechanism 12 includes an annular frame support table 16 that supports the ring frame 21 of the wafer unit 1. The upper surface of the frame support table 16 is a mounting surface on which the ring frame 21 is mounted. A plurality of clamps 18 that sandwich and fix the ring frame 21 are provided on the outer peripheral portion of the frame support table 16.

  Below the wafer unit support mechanism 12, an elevating mechanism 20 is provided. The lifting mechanism 20 includes a cylinder case 22 fixed to a base (not shown) and a piston rod 24 inserted through the cylinder case 22. A frame support table 16 is fixed to the upper end portion of the piston rod 24.

  The elevating mechanism 20 moves the upper surface (mounting surface) of the frame support table 16 between a reference position having a height substantially equal to the upper end of the expansion drum 14 and an expansion position below the upper end of the expansion drum 14. As described above, the wafer unit support mechanism 12 is moved up and down.

  In the expansion step, first, as shown in FIG. 3A, the wafer unit 1 is placed on the upper surface of the frame support table 16 positioned at the reference position, and the ring frame 21 is clamped and fixed by the clamp 18. As a result, the upper end of the expansion drum 14 is positioned between the outer periphery of the wafer 11 and the die bonding film 17 and the inner periphery of the ring frame 21 and comes into contact with the ultraviolet curable expanding tape 19.

  Next, the wafer unit support mechanism 12 is lowered by the elevating mechanism 20, and the upper surface of the frame support table 16 is positioned at the extended position below the upper end of the expansion drum 14, as shown in FIG. As a result, the expansion drum 14 rises relative to the frame support table 16, and the ultraviolet curable expanding tape 19 is pushed up by the expansion drum 14 to expand.

  As described above, the adhesive force between the ultraviolet curable expandable tape 19 and the die bond film 17 is increased, and the adhesive force between the die bond film 17 and the wafer 11 is increased. In addition, a modified layer 23 is formed on the wafer 11 as a starting point for fracture.

  Therefore, when the ultraviolet curable expandable tape 19 is expanded, the wafer 11 is divided into a plurality of chips 31 starting from the modified layer 23. The die bonding film 17 is broken to the size of each chip.

  As described above, in the wafer unit processing method according to the present embodiment, the die bonding film 17 is semi-cured before the expanding step of expanding the ultraviolet curable expanding tape 19 to divide the wafer 11 and the die bonding film 17. And a pretreatment step for improving the fixing force of the ultraviolet curable expandable tape 19 to the die bond film 17 by irradiating the ultraviolet curable expandable tape 19 with ultraviolet UV while improving the fixing force of the die bond film 17 to the wafer 11. carry out.

  As a result, the die bonding film 17 is difficult to peel off from the wafer 11 and the UV curable expanding tape 19 is difficult to peel off from the die bonding film 17. 11 can be appropriately divided.

(Embodiment 2)
In the present embodiment, a method for processing a wafer unit including divided wafers will be described. The wafer unit processing method according to the present embodiment is common in many respects to the wafer unit processing method according to the first embodiment. Therefore, in this embodiment, detailed description of common parts is omitted.

  FIG. 4 is a perspective view schematically showing a configuration of a wafer unit processed by the processing method according to the present embodiment. As shown in FIG. 4, a kerf (cut) 25 along each street 13 is formed on the wafer 11 of the wafer unit 1 according to the present embodiment. The wafer 11 is divided into a plurality of chips 31 corresponding to the devices 15 by the plurality of kerfs 25.

  The kerf 25 can be formed, for example, by cutting a rotating annular cutting blade into the wafer 11 and moving (relatively moving) it in a direction parallel to the street 13. Further, the kerf 25 may be formed using ablation by a laser beam.

  The wafer 11 may be processed by a method such as grinding. For example, it is possible to use the wafer 11 that has undergone a so-called DBG (Dicing Before Grinding) process in which the kerf 25 having a depth that does not completely divide the wafer 11 is formed on the front surface 11a side and then the back surface 11b side is ground.

  In the present embodiment, first, a preprocessing step is performed. This pretreatment step includes a curing step for improving the fixing force of the die bonding film 17 and an ultraviolet irradiation step for improving the fixing force of the ultraviolet curable expanding tape 19. FIG. 5 is a partial cross-sectional side view schematically showing the ultraviolet irradiation step.

  After the pretreatment step, an expansion step is performed in which the ultraviolet curable expandable tape 19 is expanded to divide the die bonding film 17. FIG. 6 is a partial cross-sectional side view schematically showing the expansion step.

  In the expansion step, first, as shown in FIG. 6A, the wafer unit 1 is placed on the upper surface of the frame support table 16 positioned at the reference position, and the ring frame 21 is clamped and fixed by the clamp 18. Next, the wafer unit support mechanism 12 is lowered by the elevating mechanism 20, and the upper surface of the frame support table 16 is positioned at the extended position below the upper end of the expansion drum 14, as shown in FIG.

  As a result, the expansion drum 14 rises relative to the frame support table 16, and the ultraviolet curable expandable tape 19 is pushed up by the expansion drum 14 to expand. By the pretreatment step described above, the adhesive force between the ultraviolet curable expanding tape 19 and the die bonding film 17 is increased, and the adhesive force between the die bonding film 17 and the wafer 11 is increased.

  The wafer 11 is divided into a plurality of chips 31 corresponding to each device 15 by the kerf 25. Therefore, the die bonding film 17 can be appropriately divided into the sizes of the respective chips 31 by expanding the ultraviolet curable expanding tape 19 as described above.

  As described above, even in the wafer unit processing method according to the present embodiment, the die-bonding film 17 is semi-cured before the expansion step in which the ultraviolet curable expandable tape 19 is expanded and the die-bonding film 17 is divided. 11 is carried out to improve the fixing force of the ultraviolet curable expandable tape 19 to the die bond film 17 by irradiating the ultraviolet curable expandable tape 19 with ultraviolet UV.

  This makes it difficult for the die bonding film 17 to be peeled off from the wafer 11, and makes it difficult for the ultraviolet curable expanding tape 19 to peel off from the die bonding film 17. The attached die bonding film 17 can be appropriately divided.

  The structures, methods, and the like described in this embodiment can be combined as appropriate with any of the structures, methods, and the like according to the other embodiments.

  In addition, this invention is not limited to description of the said embodiment, A various change can be implemented. For example, in the above embodiment, the die-bonding film 17 made of a material containing a thermosetting resin and the ultraviolet curable expandable tape 19 made of a material containing an ultraviolet curable resin are used. Is not necessarily limited to this embodiment.

  For example, a die bond film made of a material containing a photocurable resin may be used. In this case, instead of the above-described curing step, a light irradiation step of irradiating appropriate light and semi-curing the die bonding film is performed.

  Further, instead of the ultraviolet curable expanding tape 19, for example, an expanding tape made of a material containing a thermosetting resin can be used. In this case, it replaces with the ultraviolet irradiation step mentioned above, and the heat processing step which raises the adhesive force of an expanded tape with a heat | fever is implemented.

  In addition, the configurations, methods, and the like according to the above-described embodiments can be changed as appropriate without departing from the scope of the object of the present invention.

1 Wafer unit 11 Wafer 11a Front surface 11b Back surface 13 Street (Division planned line)
DESCRIPTION OF SYMBOLS 15 Device 17 Die-bonding film 17a Front surface 17b Back surface 19 UV curable expanding tape 21 Ring frame 23 Modified layer (division start point)
25 Calf
2 UV irradiation device 4 Light source 10 Expanding device 12 Wafer unit support mechanism 14 Expansion drum 16 Frame support table 18 Clamp 20 Lifting mechanism 22 Cylinder case 24 Piston rod UV UV (ultraviolet light)

Claims (2)

A UV curable expanding tape comprising a wafer in which devices are formed in regions divided by a plurality of division lines intersecting each other on the front surface and an ultraviolet curable expanding tape is attached to the back surface via a die bonding film. Is a processing method of a wafer unit, the outer periphery of which is attached to a ring frame,
A division starting point along the division line is formed on the wafer of the wafer unit,
The wafer unit is heated to semi-cure the die bonding film to improve the fixing force of the die bonding film to the wafer and to irradiate the ultraviolet curable expanding tape with ultraviolet rays to A pretreatment step for improving the fixing force to the die-bonding film;
After carrying out the pretreatment step, the ultraviolet curable expandable tape is expanded to apply an external force to the die bonding film and the wafer to divide the wafer and the die bonding film along the scheduled dividing line. A wafer unit processing method comprising: an expansion step. A UV curable expanding tape comprising a wafer in which devices are formed in regions divided by a plurality of division lines intersecting each other on the front surface and an ultraviolet curable expanding tape is attached to the back surface via a die bonding film. Is a processing method of a wafer unit, the outer periphery of which is attached to a ring frame,
The wafer of the wafer unit is divided into a plurality of chips along the division line.
The wafer unit is heated to semi-cure the die bonding film to improve the fixing force of the die bonding film to the wafer and to irradiate the ultraviolet curable expanding tape with ultraviolet rays to A pretreatment step for improving the fixing force to the die-bonding film;
After the pretreatment step, the ultraviolet curable expandable tape is expanded to apply an external force to the die bonding film to divide the die bonding film along the outer periphery of the chip. A method for processing a wafer unit, characterized in that:

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