JP6150283B2 - Work fitting device and fitting method - Google Patents

Description

  The present invention relates to a workpiece fitting device for fitting a workpiece into a carrier hole of a workpiece carrier and a fitting method using the workpiece fitting device.

  Double-side polishing equipment (including lapping and polishing) automates the loading work of unprocessed workpieces into the double-side polishing equipment and the work collection work after processing, thereby reducing the processing cost by stabilizing the quality and saving labor. There is an active movement for reduction.

  However, there are various problems that hinder automation. For example, the workpiece is often a thin workpiece such as a semiconductor wafer, a glass disk, or a quartz wafer, and there is a problem that the workpiece is likely to be damaged when the thin workpiece is handled. In addition, the thin work is likely to stick to the upper and lower surface plates, and there is a problem that the work is interrupted due to the trouble of peeling the attached thin work.

  The most important problem in the automation process is the work loading / fitting work to the work carrier. This is because, in a polishing method using free abrasive grains, water and abrasive grains adhere to and stay on the work and the work carrier, so that it is difficult to monitor with a visual sensor such as an optical sensor or a camera. Furthermore, because water may accumulate in the carrier hole, it is difficult to detect the edge of the workpiece.

  If the workpiece is loaded and mated, and the workpiece is mounted on the workpiece carrier and then ground and polished, the sandwiched workpiece will be damaged and the broken pieces will be damaged. The upper surface of the workpiece may enter the upper surface of the workpiece, or the entire upper surface plate may vibrate abnormally (crash), damaging not only the workpiece but also the work carrier and surface plate.

Therefore, it is necessary to reliably perform the work loading and fitting work. Specifically, it is important to take the following means.
(A) Ensure repeatable positioning accuracy of the work carrier.
(B) Repetitive positioning accuracy is ensured at the position where the robot that grips and handles the workpiece places the workpiece.
(C) Applying assistance or auxiliary means for making the fitting more reliable. Alternatively, after loading and fitting the workpiece into the carrier hole, the fitting state is confirmed.
(D) When a fitting failure occurs, the fitting operation is performed again.
(E) When the upper surface plate is placed, a poor fitting is detected (working on the carrier surface is detected).

  First, the above (A) will be examined. In order to ensure the repeated positioning accuracy of the work carrier, the positioning accuracy of the internal gear and the sun gear for rotating and revolving the work carrier is important in the planar polishing apparatus. In general, the positioning accuracy is determined by the performance of a servo motor or the like that is generally applied to high-accuracy positioning and the like, and the backlash of an intermediate drive transmission system. Factors that cause errors include wear of both the work carrier and the meshing portion of each drive gear, misalignment due to a change in the state of attachment between the work carrier and the lower surface plate, and the like. However, achieving the required accuracy as an automated device is a design matter and can be realized relatively easily.

  Subsequently, the above (B) will be examined. For example, a robot represented by a 6-axis articulated robot is expected to be used in order to ensure the repeated positioning accuracy of the position where the robot that grips and handles the workpiece places the workpiece. The target level can be easily achieved.

  Subsequently, the above (C) will be examined. Conventionally, development has been attempted on the means of applying support and auxiliary means to make the fitting more reliable, or checking the fitting state after loading / fitting the workpiece into the carrier hole. Many patents have been filed for patent applications.

  For example, what is disclosed in Patent Document 1 (Japanese Patent Publication No. 5-5632, title of the invention “planar lapping device”) is known. This prior art performs positioning by a camera. The position of the work carrier or the position of the carrier hole (work loading hole) in the work carrier is obtained using a plurality of visual sensors, and the amount of deviation from the predetermined position is corrected on the work handling device side to load and fit the work. Make sure the match. Further, the position of the workpiece being handled is also obtained with a visual sensor, and positioning with higher accuracy is performed.

  However, in order to position with high accuracy using the plurality of visual sensors, the loose abrasive particles are scattered as described above and the environment is bad, so that the detection accuracy is expected to deteriorate. Therefore, it is necessary to detect a fitting failure and perform a recovery operation. The positioning means using a visual sensor is only an auxiliary means for increasing the fitting probability, and it is difficult to check after fitting with the same visual sensor, and at the same time, it is possible to detect the climbing of the workpiece. However, since there is no means for recovery, the automation process cannot continue.

  Moreover, what was disclosed by patent document 2 (Unexamined-Japanese-Patent No. 11-333715, the name of invention "the workpiece | work attachment-detachment apparatus in a 4-way planetary gear system parallel plane processing board") is known. This prior art is a method of assisting fitting with a sweep pin. A plurality of pins project downward on the outer periphery of a loaded workpiece, and after the workpiece is detached into a carrier hole, these are lowered to swing the whole in a horizontal plane. In this method, the end of the work is pushed with one of the pins and dropped into the carrier hole. Without using a plurality of visual sensors as in the prior art described in Patent Document 1, it can be configured with an inexpensive system.

  However, there are problems such as being unable to handle when the displacement of the workpiece is larger than expected, and having no means for confirming the fitting, so that the process proceeds even if the workpiece is on board. Also, as a practical problem, if the workpiece has a large area or the workpiece and the surface plate are sticking together, the workpiece end will be pushed with a single pin. There is a problem that there is a concern about damage, the pin escapes upward even without damage, and the workpiece cannot be pushed.

  Moreover, what was disclosed by patent document 3 (Unexamined-Japanese-Patent No. 62-114871, the name "invention work detection method in all carriers") is known. This prior art detects the loading of a workpiece during its own revolution by detecting a loaded workpiece. This is based on the premise that there is no work loading / fitting, and according to the means of the present invention, it is possible to detect the work on any stage.

  Since this prior art is a means using a workpiece abnormality detection device provided separately from the loading device, it is necessary to separately provide a workpiece abnormality detection step after loading the workpiece, which increases the overall process time. End up. Furthermore, since there is a need to manually perform all processing operations (recovery operations) when there is an abnormal workpiece after inspection, the automation process cannot be continued.

  Thus, it is appropriate to apply the support and auxiliary means for ensuring the fitting of (C) above, or to check the fitting state after loading / fitting the workpiece into the carrier hole. There was nothing.

  Subsequently, the above (D) will be examined. There is no example in which various automation systems have attempted to perform the fitting operation again when a fitting failure occurs. Normally, an operator call is made when a workpiece abnormality is detected, and it is manually restored. Therefore, it becomes a big obstacle when trying to save labor.

  Subsequently, the above (E) will be examined. A fitting failure is detected when the upper surface plate is placed (detection of the workpiece on the carrier surface is detected), and can be detected only after the work is sandwiched by the upper surface plate. Therefore, the sandwiched workpiece may be damaged, and even if it is not damaged, the subsequent work cannot be continued, so that it is difficult to continue the automation. Note that this is a problem that can be solved if the above (C) and (D) are realized.

Japanese Patent Publication No. 5-5632 JP-A-11-333715 JP-A-62-114871

  As a result of investigations by the inventors, it was concluded that the automation can be continued without damaging the workpiece by first reliably performing the above item (D). Therefore, there is a demand for the construction of a system that can perform the above (C) and (D), which has not been realized in the past, at low cost and with certainty.

  Accordingly, the present invention has been made in view of the above-described problems, and an object of the present invention is to provide a work fitting device that securely fits a work into a carrier hole of a work carrier, and a work using the work fitting device. It is providing the fitting method which fits reliably.

In order to solve the above-mentioned problem, the work fitting apparatus according to claim 1 is a work fitting apparatus for fitting a work into a carrier hole of a work carrier on a lower surface plate of a polishing apparatus,
A transfer robot,
A robot hand that is moved by a transfer robot and sucks a workpiece;
Wherein mounted on the robot hand, comprising a plurality of riding detection device for detecting whether the outer peripheral portion of the workpiece rides on the inner periphery of the carrier hole, the Rutotomoni,
The ride detection device includes:
A pressing member made of a soft material that presses a part of the outer peripheral part of the workpiece and a part of the inner peripheral part of the carrier hole;
A cylinder for raising and lowering the pressing member;
A proximity sensor that detects whether the workpiece carrier or the lower surface plate is in proximity;
With
The robot hand is determined to work on the carrier hole is not engaged when the proximity sensor detects that no proximity state pressed against said pressed member put work into the carrier hole, It is determined that a workpiece is fitted in the carrier hole when it is detected that the proximity sensor is in a proximity state with the pressing member pressed .

Workpiece engaging device according to 請 Motomeko 2, the determination in the work fitting device according to claim 1, comprising a force sensor provided at the connection portion between the robot and the robot hand, and not fitted When performing the re-fitting operation of the workpiece, it is determined that the workpiece is fitted when the reaction force generated when the moving workpiece hits the inner peripheral surface of the carrier hole is detected by the force sensor. It is characterized by .

Fitting method according to 請 Motomeko 3 determines that a fitting method using a workpiece engaging device according to claim 1, wherein the riding detecting device is not the work is fitted to the carrier hole Sometimes the suction by the robot hand is maintained, and the transfer robot moves the workpiece together with the robot hand, and the sum of the vectors connecting the positions of the proximity sensors riding from the center of the hand in the plane constituting the workpiece; The workpiece is re-fitted to the carrier hole by moving it in the opposite direction at a low speed, and at the same time, the stop and the operation for judging the fitting of the workpiece by the ride-up detection device are intermittent for each arbitrary movement amount. And the workpiece is detached by stopping the suction by the robot hand when determining the fitting of the workpiece .

Fitting method according to 請 Motomeko 4 is a fitting method using a workpiece engaging device according to claim 2, when the riding detector is not word over click is fitted on the carrier hole maintaining the adsorption by the robot hand in determining the sum over click the transfer robot in together with the robot hand, in a plane which constitutes the workpiece, the position of each proximity sensor that rides from the hand center at the same time to re-fitting operation of the workpiece against the front Symbol carrier hole by moving at a low speed in the opposite direction to the sum of each vector connecting, during movement of the workpiece, the workpiece strikes the inner circumferential surface of the carrier hole When the reaction force at that time is detected by the force sensor, the workpiece re-fitting operation is terminated and the workpiece is detached by stopping the suction by the robot hand .

  According to the present invention as described above, a work fitting device for reliably fitting a workpiece into the carrier hole of the work carrier and a fitting method for reliably fitting the workpiece using the workpiece fitting device are provided. be able to.

1 is an overall view of a polishing system. It is explanatory drawing of a work carrier. It is a plain view of the robot hand of a workpiece fitting apparatus. 4A and 4B are explanatory views of the robot hand of the workpiece fitting device, in which FIG. 4A is a front view of the robot hand, and FIG. It is explanatory drawing of the state which the robot hand of a workpiece | work fitting apparatus fits a workpiece | work to a carrier hole. 6A and 6B are explanatory diagrams of a workpiece fitting device, in which FIG. 6A is an explanatory diagram of an initial state, FIG. 6B is an explanatory diagram of a workpiece fitting state, and FIG. is there. FIGS. 7A and 7B are explanatory views for explaining a displacement direction of the robot hand of the workpiece fitting device, FIG. 7A is an overall view of the robot hand, and FIG. 7B is an enlarged plan view of a riding part. FIGS. 8A and 8B are explanatory views for explaining the direction of displacement of the robot hand of the work fitting device, FIG. 8A is an overall view of the robot hand, and FIG. 8B is an enlarged view of a riding part. It is explanatory drawing of the state which the workpiece | work of the robot hand of the workpiece fitting apparatus got on the carrier hole. It is explanatory drawing of the state which a workpiece | work collides with a carrier hole. It is explanatory drawing of another work carrier. It is explanatory drawing of the robot hand of the workpiece | work fitting apparatus of the other form for implementing this invention, Fig.12 (a) is a plain view of a robot hand, FIG.12 (b) is a side view of a robot hand. It is explanatory drawing of the fitting state of the workpiece | work by the robot hand of the workpiece fitting apparatus of the other form for implementing this invention.

  Then, the workpiece | work fitting apparatus and fitting method of the form for implementing this invention are demonstrated, referring FIGS. 1-10. FIG. 1 is an overall view of a polishing system 1 including a workpiece fitting device according to the present invention, and includes a workpiece fitting device 10, a workpiece feeding / discharging device 20, and a double-side polishing device 30, and a system for polishing a large number of workpieces 40. is there. The work fitting apparatus 10 in FIG. 1 constitutes a single (single-wafer type) work handling system.

  As shown in FIG. 1, the work fitting device 10 includes a transfer robot 11 and a robot hand 12. The transfer robot 11 is a six-axis articulated robot that can move in three directions around each of three axes (X axis, Y axis, Z axis) and each of the three axes in a three-dimensional space. A robot hand 12 is provided at the tip of the transfer robot 11. The operation of the workpiece fitting device 10 will be described in detail later.

  As shown in FIG. 1, the workpiece supply / discharge device 20 includes a loading table 21, a first loading cassette 22 that stores a plurality of unprocessed workpieces 40, and a second load that stores a plurality of unprocessed workpieces 40. Cassette 23, unloading table 24, first unloading cassette 25 for storing a plurality of processed workpieces 40, second unloading cassette 26 for storing a plurality of processed workpieces 40, and workpieces 40 A work handling robot 27 for carrying in / out is provided.

  In FIG. 1, the double-side polishing apparatus 30 shows a state where the upper surface plate is raised and the inside can be seen. In addition to the upper surface plate (not shown), a lower surface plate 31, a work carrier 32, an internal gear 33 and a sun gear 34 are provided. Prepare. The work carrier 32 further includes a carrier hole 32a as shown in FIG. 2, and the work 40 is disposed in the carrier hole 32a. Then, the upper surface plate is lowered, and the work carrier is moved by the internal gear 33 and the sun gear 34 in a state where the front and back surfaces of the work 40 arranged in the carrier hole 32a of the work carrier 32 are in contact with the upper surface plate and the lower surface plate 31. The front and back surfaces of the work 40 are polished by moving the planet 32.

  In this polishing system 1, the workpiece fitting device 10 conveys the workpiece 40 between the workpiece feeding / discharging device 20 and the double-side polishing device 30, and the loading and unloading of the workpiece by the following series of operations. Is made.

First, the loading of the workpiece 40 onto the double-side polishing apparatus 30 will be described.
(A) The workpiece handling robot 27 of the workpiece supply / discharge device 20 takes the unprocessed workpiece 40 from the first loading cassette 22 (or the second loading cassette 23) and places the workpiece 40 on the loading table 21.

(B) The transfer robot 11 of the workpiece fitting apparatus 10 moves the robot hand 12 to the loading table 21 and sucks the workpiece 40 onto the robot hand 12.

(C) The transfer robot 11 of the workpiece fitting apparatus 10 moves the robot hand 12 and the workpiece 40 to the carrier hole 32a of the workpiece carrier 32 at the loading position, causes the robot hand 12 to remove the workpiece 40, and removes the workpiece 40. The work carrier 32 is placed in the carrier hole 32a.
In this way, the workpiece 40 is loaded.

Next, unloading of the workpiece 40 from the double-side polishing apparatus 30 will be described.
(A) The transfer robot 11 of the workpiece fitting apparatus 10 moves the robot hand 12 to the carrier hole 32a of the workpiece carrier 32 in the unloading position, and the processed workpiece 40 is attracted to the robot hand 12.

(B) The transfer robot 11 of the workpiece fitting apparatus 10 moves the robot hand 12 and the workpiece 40 to the unloading table 24, causes the robot hand 12 to detach the workpiece 40, and removes the workpiece 40 from the unloading table 24. Put it on.

(C) The workpiece handling robot 27 of the workpiece supply / discharge device 20 takes out the workpiece 40 from the unloading table 24 and stores the workpiece 40 in the first unloading cassette 25 (or the second unloading cassette 26).
The loading and unloading of the workpiece 40 in the polishing system 1 is performed in this way.

  Such a workpiece fitting apparatus 10 has a function of detecting whether or not the workpiece 40 is fitted in the carrier hole 32a of the workpiece carrier 32. 3 and 4 are diagrams for explaining the robot hand 12 at the tip of the transfer robot 11. The robot hand 12 further includes a boarding detection device 121, a suction pad 122, a force sensor (see particularly FIG. 4A) 123, and a pad plate 124. A force sensor 123 is provided at the tip of the transfer robot 11. A plurality (specifically, five) of suction pads 122 are applied when a workpiece having a large area is used as in this embodiment. Then, a plurality (specifically, six) of ride-up detection devices 121 are arranged so as to be positioned at the outer peripheral end of the workpiece 40.

  The ride-up detection device 121 detects whether or not the workpiece 40 is riding near the circumferential edge of the carrier hole 32a of the workpiece carrier 32, in other words, whether or not the workpiece 40 is fitted. As shown in FIG. 4B, a pressing member 121a, a proximity sensor 121b, and a cylinder 121c are provided.

  Since the pressing member 121a comes into contact with the workpiece 40 when descending, a somewhat flexible material such as urethane rubber is used, and a load acting on the workpiece 40 when the pressing member 121a comes into contact with the workpiece 40 is used. Disperse and minimize. Further, the pressing member 121a is disposed so as to be directly above the end of the outer periphery of the carrier hole 32a. This position is an optimum position where the pressing member 121a is surely brought into contact with the riding portion when the workpiece 40 rides on.

  The proximity sensor 121b is disposed outside the carrier hole 32a of the pressing member 121a (on the work carrier 32). In FIG. 4B, the proximity sensor 121b is embedded in the rubber base material constituting the pressing member 121a, and the vertical position of the proximity sensor 121b is held constant with respect to the pressing member 121a. However, the same material as the pressing member 121a is disposed on the lower surface of the proximity sensor 121b so that the work carrier 32 or the work 40 is not affected even if it contacts the work sensor 32b.

  As described above, the pressing member 121a and the proximity sensor 121b have an integral structure, which is held by the cylinder rod of the cylinder 121c. Usually, the cylinder rod of the cylinder 121c is pulled up, and the cylinder rod of the cylinder 121c is extended downward at the time of detection for confirming workpiece fitting, and the pressing member 121a is lightly pressed onto the surface of the workpiece 40 or the workpiece carrier 32. The working pressure at this time is set small.

  Comparing the case where the workpiece 40 rides on the workpiece carrier 32 and the case where the workpiece 40 is fitted without climbing, the distance between the proximity sensor 121b and the surface of the workpiece carrier 32 is equal to the thickness of the workpiece 40. Since it changes, the presence or absence of riding is determined by detecting this change. The determination threshold value may be an intermediate value (representing an intermediate position) obtained by dividing the sum of the distance detected when there is no ride and the distance detected when there is a ride by 2. If the distance is larger than the threshold value, it is determined that there is no boarding because it is not close, and if the distance is smaller than the threshold value, it is determined that there is no boarding because it is close. Follow these criteria.

Here, the reason why the proximity sensor 121b is particularly adopted in the present invention will be described. As can be seen from the operation diagram of FIG. 6, in order to detect the climbing of the workpiece 40, it is only necessary to measure the amount of the gap left on the lower surface of the pressing member 121 a. Even a contact type sensor is applicable. However, since there is a concern that there is an inclusion such as a water film or abrasive on the lower surface of the pressing member, the distance to the metal carrier surface or lower surface plate surface is not affected by these inclusions. A proximity sensor that can measure stably is applied.
The ride detection device 121 is like this.

  Returning to FIG. 3 and FIG. 4A, the suction pad 122 is connected to a suction part such as a vacuum pump via an air tube (not shown), and the suction part sucks in a state where the workpiece 40 is in contact. The work 40 is adsorbed. The suction pads 122 are arranged as a single piece or a plurality of pieces depending on the size and weight of the work 40, and the single work piece 40 is sucked up at a single place or at a plurality of locations so as to be reliably sucked.

  As shown in FIG. 4A, the force sensor 123 is installed at a connection point between the transfer robot 11 and the robot hand 12. The force sensor 123 is a sensor that can detect a total of six component forces of three moments in the three directions around each of the three axes (X axis, Y axis, Z axis) and each of the three axes in the three-dimensional space. is there. By installing this force sensor 123 at the tip of the transfer robot 11, it is possible to detect six component forces acting on the robot hand 12 with high sensitivity.

  The pad plate 124 is a plate corresponding to the shape of the workpiece 40, and a plurality of ride detection devices 121 and a single or a plurality of suction pads 122 are mechanically attached thereto. The configuration of the robot hand 12 is as described above.

  Next, the fitting of the workpiece 40 into the carrier hole 32a by the workpiece fitting device 10 will be described. First, the case where a workpiece | work is correctly fitted is demonstrated. As shown in FIG. 5, the transfer robot 11 of the workpiece fitting apparatus 10 moves the robot hand 12 and the workpiece 40 to the carrier hole 32a of the workpiece carrier 32 in the loading position, and the workpiece 40 is moved to the carrier hole 32a of the workpiece carrier 32. Put in. Here, it is assumed that there was no boarding and entered correctly.

  Subsequently, the boarding detection device 121 performs boarding detection for detecting whether or not the work 40 is riding on the work carrier 32. Whether the workpiece 40 is riding on the upper surface of the work carrier 32 by lowering the module of the pressing member 121a and the proximity sensor 121b by the cylinder 121c from the initial state shown in FIG. Is detected.

  The pressing member 121a is lowered by the cylinder 121c, and the pressing member 121a presses the work 40 and the work carrier 32 from above as shown in FIGS. If the work carrier 32 is a metal body, the proximity sensor 121b detects whether or not the proximity sensor 121b is closer to the distance from the lowermost end of the proximity sensor 121b to the upper surface of the work carrier 32. If the work carrier 32 is a non-metallic material such as resin, the proximity sensor 121b detects whether or not the proximity sensor 121b is closer to the polishing surface of the lower surface plate 31 from the lowermost end of the proximity sensor 121b.

  Then, the detection result is sent to a control calculation unit (not shown). The control calculation unit determines that the workpiece 40 is not riding on the workpiece carrier 32 at the location from the detection result indicating that it is close according to the determination process. Then, even when the climbing detection device 121 at another location detects whether or not the control calculation unit is approaching based on the distance, it is determined that the workpiece 40 is not riding on the workpiece carrier 32 at any location. It is determined that the work 40 is fitted. Then, the control calculation unit controls the suction unit so as to stop the suction of the suction pad 122, and the workpiece 40 is detached from the suction pad 122. Since the workpiece 40 has already been transferred to the position in the carrier hole 32a, the workpiece 40 is fitted into the carrier hole 32a when the workpiece 40 is detached. Subsequently, the transfer robot 11 returns the robot hand 12 to a predetermined position. This is done when the workpiece 40 is accurately fitted.

  Next, a case where there is a ride and the workpiece is not fitted will be described. As shown in FIG. 5, the transfer robot 11 of the workpiece fitting apparatus 10 moves the robot hand 12 and the workpiece 40 to the carrier hole 32a of the workpiece carrier 32 in the loading position, and the workpiece 40 is moved to the carrier hole 32a of the workpiece carrier 32. Put in. However, it is assumed that boarding has occurred.

  Subsequently, the boarding detection device 121 detects whether or not the workpiece 40 is riding on the workpiece carrier 32. From the initial state shown in FIG. 6A, the pressing member 121a is lowered by the cylinder 121c, and the pressing member 121a presses the work 40 and the work carrier 32 from above as shown in FIG. 6C. . If the work carrier 32 is a metal body, the proximity sensor 121b detects whether or not the proximity sensor 121b is closer to the distance from the lowermost end of the proximity sensor 121b to the upper surface of the work carrier 32. If the work carrier 32 is a non-metallic material such as resin, the proximity sensor 121b detects whether or not the proximity sensor 121b is closer to the polishing surface of the lower surface plate 31 from the lowermost end of the proximity sensor 121b.

  The detected distance is sent to a control calculation unit (not shown). The control calculation unit determines that the work 40 is riding on the work carrier 32 at the relevant location from the detection result that it is not close according to the determination process. Then, the riding detection device 121 at another location also detects whether or not the control calculation unit is approaching based on the distance, and determines the location where the other workpiece 40 is riding on the workpiece carrier 32. Then, after the suction of the suction pad 122 is maintained and the robot hand 12 is moved, a re-fitting process for putting the workpiece 40 into the carrier hole 32 again is performed. The work 40 that has been ridden is re-fitted in this way.

Although the position shift occurs in the state where the workpiece is mounted, it is necessary to detect the position shift. The detection of this displacement will be described.
FIGS. 7A and 7B are schematic views showing a state in which the work 40 rides on a plurality of positions on the surface of the work carrier 32 and the work 40 is not accurately fitted in the carrier hole 32a. FIGS. 7A and 7B show an example where the three ride detection devices 121 detect the ride.

  In the assumption figure when the work 40 is displaced upward in the drawing, the boarding detection devices 121 at the upper three positions detect the boarding, and the boarding state is determined. In addition, since the lower three places are lowered to the lower side when the pressing member 121a comes into contact, the ride-up is not detected. Next, the sum of the vectors from the starting point that is the center axis of the hand to each riding-up detection device 121 that is on the road is the “work shift direction” in the figure, so if the work 40 is moved in the opposite direction, It is the direction to fit. This is the “hand movement direction” in the figure. Of course, the larger the number of sensors arranged and the smaller the arrangement interval, the more accurately the workpiece displacement direction can be obtained.

  Another example will be described. FIGS. 8A and 8B are schematic views showing a state in which the work 40 rides on a plurality of positions on the upper surface of the work carrier 32 and the work 40 is not accurately fitted in the carrier hole 32a. FIGS. 8A and 8B show an example in which the two ride detection devices 121 detect the ride.

  It is an assumption diagram when the work 40 is displaced obliquely upward to the right in the figure, and the boarding detection devices 121 at the two upper positions detect the boarding, and are determined to be in the boarding state. Note that the other four places go down when the pressing member 121a comes into contact, so that the ride is not detected. Next, the sum of the vectors from the starting point that is the center axis of the hand to each riding-up detection device 121 that is on the road is the “work shift direction” in the figure, so if the work 40 is moved in the opposite direction, It is the direction to fit. This is the “hand movement direction” in the figure. Needless to say, the displacement direction of the workpiece 40 can be obtained more accurately as the number of sensors arranged is larger and the arrangement interval is smaller. In this way, the “hand movement direction” can be easily determined.

  Next, a description will be given of the re-fitting of the workpiece after detecting “fitting failure” and determining the “hand movement direction”. FIG. 9 is a state diagram showing a re-fitting operation after the workpiece is not fitted and the workpiece has been detected. It is assumed that the ride is detected and the “hand movement direction” is determined by the above method. In this case, the boarding detection device 121 is raised, and the transfer robot 11 moves the robot hand 12 in the workpiece suction state in the “hand movement direction” at a low speed parallel to the upper surface of the work carrier 32. If the workpiece 40 is moved in a direction opposite to the “work displacement direction” (“hand movement direction”), the fitting direction is obtained. In this way, the robot hand 12 is moved in parallel to the upper surface of the work carrier 32 (within a horizontal plane) in the “hand movement direction” to cancel the ride. At this time, the edge part of the work 40 on the opposite side of the riding part on the non-fitted side keeps the posture in the carrier hole 32a and continues to move until it contacts the inner peripheral surface of the carrier hole 32a.

  Subsequently, it is assumed that the edge portion of the work 40 abuts against the inner peripheral surface of the carrier hole 32a. FIG. 10 shows a state diagram when the edge portion of the workpiece 40 abuts against the inner peripheral surface of the carrier hole 32a. When the workpiece 40 is moved in the horizontal direction at a low speed, there is a position where the outer circumferential surface of the workpiece 40 abuts against the inner circumferential surface of the carrier hole 32a.

  When the workpiece 40 strikes the inner peripheral surface of the carrier hole 32a, a reaction force is generated in the direction opposite to the hand feeding direction. This force sensor 123 installed on the upper side as a moment or reaction force in the arrow direction in the figure. Can be detected. At this time, since a bending moment is generated in the force sensor 123 on the transfer robot 11 in the direction of the arrow in the figure, the fitting position of the workpiece 40 can be known in the shortest time. When this reaction force is detected, the movement of the robot hand 12 of the transfer robot 11 is stopped and the engagement detection device 121 confirms the fitting again. If the fitting state is confirmed, the control operation unit (not shown) releases the work 40 and releases the work 40, and the transfer robot 11 returns the robot hand 12 to the next predetermined operation position. Let

  In addition, in order to detect the fitting position without applying the force sensor 123, the movement is stopped every minute amount (for example, every 1 mm of hand movement amount) in the direction to cancel the lifting of the workpiece, Although it is possible to perform the method for detecting the raising, it takes time to perform the operation until the fitting position is specified. On the other hand, since the fitting end position of the workpiece 40 can be directly detected by applying the force sensor 123, the reliability of a series of operations can be ensured and the fitting operation itself can be performed smoothly and quickly. So that productivity is not significantly impaired.

  Next, another embodiment will be described. In FIG. 11, four carrier holes 52 a are formed in one workpiece carrier 52, and four workpieces 40 can be inserted as shown in the four-piece workpiece handling diagram. The work fitting device 60 includes a transfer robot 11 and a robot hand 61. As shown in FIGS. 12A and 12B, the robot hand 61 further includes the above-described ride-up detection device 121, the suction pad 122 described above, and the force sensor 123 described above. In the robot hand 61, as shown in FIG. 2, four ride detection devices 121 and four suction pads 122 are arranged for one workpiece 40 so that four workpieces can be sucked. I have to. And as shown in FIG. 13, the four workpiece | works 40 are arrange | positioned to the workpiece | work carrier 52 at once. Such a form may be adopted.

  The work fitting device and the fitting method of the present invention have been described above. In this embodiment, a plurality of suction pads are applied to a workpiece having a large area. However, a robot hand having one suction pad may be used for a workpiece having a relatively small area. Depending on the shape and size of the workpiece, the suction pad has various configurations from single to multiple. Usually, the adsorption function and arrangement are determined in consideration of the peeling operation after polishing. A plurality of “climbing detection devices” are arranged around the suctioned workpiece. This arrangement is also determined in consideration of the size of the workpiece, the fitting accuracy with the carrier hole, and the like. If the workpiece is large, the number of ride-up detection devices is increased to maintain the detection sensitivity. If the gap between the workpiece and the carrier hole (which is affected by the required fitting accuracy) is small, the number of the ride detection devices is increased to increase the detection sensitivity, and the direction of the recovery operation is set more accurately.

  Such a workpiece fitting apparatus and fitting method can be applied to a 3-way type or 4-way type planetary gear type double-side polishing apparatus or the like.

  The workpiece fitting apparatus and fitting method according to the present invention as described above are particularly suitable for mounting on a polishing system that performs polishing by automation.

1: Polishing system 10, 60: Work fitting device 11: Transfer robot 12, 61: Robot hand 121: Raising detection device 121a: Pushing member 121b: Proximity sensor 121c: Cylinder 122: Suction pad 123: Force sensor 124: pad plate 20: work feeding / discharging device 21: loading table 22: first loading cassette 23: second loading cassette 24: unloading mounting table 25: first unloading cassette 26: second unloading Loading cassette 27: Work handling robot 30: Double-side polishing device 31: Lower surface plate 32: Work carrier 32a: Carrier hole 33: Internal gear 34: Sun gear 40: Work

Claims (4)

A workpiece fitting device for fitting a workpiece into a carrier hole of a workpiece carrier on a lower surface plate of a polishing device,
A transfer robot,
A robot hand that is moved by a transfer robot and sucks a workpiece;
Wherein mounted on the robot hand, comprising a plurality of riding detection device for detecting whether the outer peripheral portion of the workpiece rides on the inner periphery of the carrier hole, the Rutotomoni,
The ride detection device includes:
A pressing member made of a soft material that presses a part of the outer peripheral part of the workpiece and a part of the inner peripheral part of the carrier hole;
A cylinder for raising and lowering the pressing member;
A proximity sensor that detects whether the workpiece carrier or the lower surface plate is in proximity;
With
The robot hand is determined to work on the carrier hole is not engaged when the proximity sensor detects that no proximity state pressed against said pressed member put work into the carrier hole, A workpiece fitting device , wherein when it is detected that the proximity sensor is in a proximity state with the pressing member being pressed, it is determined that a workpiece is fitted in the carrier hole . In the workpiece fitting apparatus according to claim 1,
A force sensor provided at a connection portion between the robot and the robot hand;
When performing a re-fitting operation on a workpiece that has been determined not to be fitted , the workpiece is fitted when the reaction force generated by the moving workpiece hitting the inner peripheral surface of the carrier hole is detected by the force sensor. It is determined that the workpiece is fitted. A fitting method using the workpiece fitting device according to claim 1 ,
Maintaining the suction by the robot hand when the ride detection device determines that a workpiece is not fitted in the carrier hole,
The transfer robot moves the workpiece together with the robot hand at a low speed in a direction opposite to the sum of the vectors connecting the positions of the proximity sensors riding on the center of the hand in the plane constituting the workpiece. At the same time as re-fitting operation of the workpiece with respect to the hole, the operation of stopping the workpiece and determining the fitting of the workpiece by the ride-up detection device is intermittently repeated for each movement amount to determine the fitting of the workpiece. A fitting method characterized in that the workpiece is detached by sometimes stopping the suction by the robot hand . A fitting method using the workpiece fitting device according to claim 2,
Maintaining the adsorption by the robot hand in determining with the riding detector is not word over click is fitted into the carrier hole,
Moving said transfer robot word over click on together with the robot hand, in a plane which constitutes the workpiece, the sums in the opposite direction of the vector connecting the position of each proximity sensor that rides from the hand center at a low speed time and at the same time to re-fitting operation of the work, that during movement of the workpiece, detects a reaction force when the work abuts against the inner circumferential surface of the carrier hole by the force sensor against the the allowed by prior Symbol carrier hole The workpiece is detached by terminating the workpiece re-fitting operation and stopping the suction by the robot hand.

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