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JP6006516B2 - Organic material purification equipment - Google Patents

Organic material purification equipment Download PDF

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JP6006516B2
JP6006516B2 JP2012082487A JP2012082487A JP6006516B2 JP 6006516 B2 JP6006516 B2 JP 6006516B2 JP 2012082487 A JP2012082487 A JP 2012082487A JP 2012082487 A JP2012082487 A JP 2012082487A JP 6006516 B2 JP6006516 B2 JP 6006516B2
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cylinder
organic material
organic
axial direction
refiner
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JP2013209352A (en
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雅温 伊藤
雅温 伊藤
泰憲 門井
泰憲 門井
芳賀 亮
亮 芳賀
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Idemitsu Kosan Co Ltd
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Priority to CN201380027451.8A priority patent/CN104349826A/en
Priority to KR1020147027856A priority patent/KR101710768B1/en
Priority to PCT/JP2013/051713 priority patent/WO2013145833A1/en
Priority to TW102106740A priority patent/TW201338855A/en
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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/12Organic material
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/564Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/311Purifying organic semiconductor materials

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
  • Electroluminescent Light Sources (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)

Description

本発明は、有機材料の精製装置に関する。   The present invention relates to an organic material purification apparatus.

従来、有機材料の精製方法としては、カラムクロマトグラフィー、再結晶、蒸留、昇華などが知られている。電子材料や光学材料として用いられる有機材料は、その純度が性能に大きな影響を与えることがあることから、高純度に精製される。
電子材料の一例としては、近年、研究開発が活発になされている有機エレクトロルミネッセンス素子(以下、有機EL素子という場合がある。)に用いられる材料が挙げられる。有機EL素子に用いられる材料(以下、有機EL素子用材料という場合がある。)の中に不純物が混入していると、その不純物がキャリア(電子や正孔)のトラップになったり、消光の原因になったりし、有機EL素子の発光強度、発光効率および耐久性が低下する。したがって、不純物を少なくするために、有機EL素子用材料を高純度に精製する必要がある。
Conventionally, column chromatography, recrystallization, distillation, sublimation and the like are known as methods for purifying organic materials. An organic material used as an electronic material or an optical material is purified to a high purity because its purity may greatly affect the performance.
As an example of an electronic material, a material used for an organic electroluminescence element (hereinafter sometimes referred to as an organic EL element) which has been actively researched and developed in recent years can be given. If impurities are mixed in a material used for an organic EL element (hereinafter sometimes referred to as a material for an organic EL element), the impurity becomes a trap of carriers (electrons and holes) or quenches. Cause the emission intensity, emission efficiency, and durability of the organic EL element to decrease. Therefore, in order to reduce impurities, it is necessary to purify the organic EL element material with high purity.

有機EL素子用材料を精製するための精製装置としては、例えば、特許文献1に開示されている。特許文献1に記載された精製装置は、隔壁とその略中央に設けられた孔を備える連結部材により複数の区間に分けられた内管を備え、各区間の温度を制御可能に構成されている。そして、特許文献1に記載された精製装置では、内管の一端に真空ポンプを配置し、内管の反対(他端)からキャリアガスを供給する。そして、内管の一番目の区間に精製対象物質(有機電界発光材料)が保持されたセルを配置し、真空ポンプにて装置内を減圧し、キャリアガスを流すとともに、一番目の区間を加熱して、精製対象物質を昇華させる。昇華した精製対象物質のうち不純物は、隔壁および孔により、他の区間に移動することを防止され、精製対象物質は、隔壁の孔を通過して、他の区間に移動することにより、徐々に精製される。   As a refinement | purification apparatus for refine | purifying an organic EL element material, it is disclosed by patent document 1, for example. The refining device described in Patent Literature 1 includes an inner pipe divided into a plurality of sections by a connecting member having a partition wall and a hole provided in the approximate center thereof, and is configured to be able to control the temperature of each section. . And in the refinement | purification apparatus described in patent document 1, a vacuum pump is arrange | positioned at the end of an inner tube, and carrier gas is supplied from the other side (other end) of an inner tube. A cell holding the substance to be purified (organic electroluminescent material) is placed in the first section of the inner tube, the inside of the apparatus is depressurized with a vacuum pump, the carrier gas flows, and the first section is heated. Then, the substance to be purified is sublimated. Impurities of the sublimated purification target substance are prevented from moving to other sections by the partition walls and holes, and the purification target substance gradually passes through the holes of the partition walls and moves to the other sections. Purified.

また、特許文献2に記載された精製装置では、昇華した有機材料が流通する内筒体内に、開口部が互いに軸方向で重ならないように配置した円盤状の整流板が複数箇所に設けられている。有機材料は、曲がりながらこの開口部を流通し、内筒体の内周面および整流板の表裏面に付着する。また、整流板は、下流側の不純物が逆流することを防いでいる。   Moreover, in the refinement | purification apparatus described in patent document 2, the disk-shaped rectification | straightening board arrange | positioned so that an opening part may not mutually overlap in an axial direction is provided in the inner cylinder body where the sublimated organic material distribute | circulates in several places. Yes. The organic material flows through this opening while bending, and adheres to the inner peripheral surface of the inner cylinder and the front and back surfaces of the current plate. Further, the rectifying plate prevents the downstream impurities from flowing backward.

特表2005−511864号公報JP 2005-511864 A 特開2011−50853号公報JP 2011-50853 A

特許文献1に記載された精製装置では、略中央に設けられた孔を備える連結部材によって各区間が区切られているが、内管断面中央部を流通する有機電界発光材料が内管の内面に接触することなく、当該孔を通過して下流側まで流通し、装置外に排出されるおそれがある。その結果、有機材料が捕集されることなく、真空ポンプに吸引され、所望の有機材料の精製量が減少し、精製効率が低下する。特に、有機材料の精製量を増やすために内管の直径を大きくすると、有機電界発光材料は、第二筒体の断面中央部を流れ易くなり、精製効率が低下する。
また、特許文献2に記載された精製装置では、内筒体内部に軸方向にわたって円盤状の整流板が複数箇所に設けられているため、内筒体の断面中央部を流通する有機材料も、整流板に接触する。しかし、特許文献2に記載された精製装置では、下流側の不純物が逆流することを防ぐ目的上、整流板を数多く設ける必要があり、その結果、有機材料は、頻繁に蛇行しながら下流側へと流通することになり、精製に時間がかかり、精製効率が低下する。
In the refining device described in Patent Document 1, each section is divided by a connecting member having a hole provided substantially at the center, but the organic electroluminescent material that circulates in the central portion of the inner tube cross section is formed on the inner surface of the inner tube. Without contact, there is a risk of passing through the hole to the downstream side and being discharged out of the apparatus. As a result, the organic material is not collected but sucked into the vacuum pump, the amount of purification of the desired organic material is reduced, and the purification efficiency is lowered. In particular, when the diameter of the inner tube is increased in order to increase the amount of purification of the organic material, the organic electroluminescent material is likely to flow through the center of the cross section of the second cylinder, and the purification efficiency is reduced.
Further, in the purification apparatus described in Patent Document 2, since the disc-shaped rectifying plate is provided in a plurality of locations in the axial direction inside the inner cylindrical body, the organic material that circulates in the center of the cross section of the inner cylindrical body is also Touch the current plate. However, in the refining device described in Patent Document 2, it is necessary to provide a large number of rectifying plates for the purpose of preventing the downstream impurities from flowing back, and as a result, the organic material frequently flows to the downstream side while meandering. As a result, the purification takes time and the purification efficiency decreases.

本発明の目的は、有機材料の精製効率を向上させることができる有機材料の精製装置を提供することである。   The objective of this invention is providing the refiner | purifier of the organic material which can improve the refinement | purification efficiency of an organic material.

本発明の有機材料の精製装置は、
内部に有機材料が供給される第一筒体、及びこの第一筒体の外側に配置され、供給された有機材料を気化させる加熱ヒータを備えた気化器と、
前記気化器の前記第一筒体と連通する第二筒体、及びこの第二筒体の外側に配置され、前記第二筒体の温度を調整する温度調整ヒータを備え、前記気化器で気化させた気体状の有機材料を前記第二筒体の内面で捕集する捕集器と、
前記第二筒体の内部に配置され、前記第二筒体の軸方向に沿って延びる面を有し、前記気体状の有機材料との接触面積を増加させる捕集面積拡大部材と、
前記捕集器の下流側端部に接続された排気装置と、を備える
ことを特徴とする。
The organic material refining device of the present invention comprises:
A vaporizer including a first cylinder to which an organic material is supplied, and a heater disposed on the outside of the first cylinder to vaporize the supplied organic material;
A second cylinder communicating with the first cylinder of the vaporizer; and a temperature adjusting heater disposed outside the second cylinder for adjusting the temperature of the second cylinder; vaporizing by the vaporizer A collector for collecting the gaseous organic material on the inner surface of the second cylinder;
A collection area expanding member disposed inside the second cylinder, having a surface extending along the axial direction of the second cylinder, and increasing a contact area with the gaseous organic material;
And an exhaust device connected to the downstream end of the collector.

本発明によれば、第二筒体内部に、当該第二筒体の軸方向に沿って延びる面を有する捕集面積拡大部材が配置されている。そして、捕集器の下流側端部には排気装置が接続されている。そのため、排気装置によって第一筒体内部から第二筒体内部へ向かう気流が生じ、気体状の有機材料は、第二筒体の内面および捕集面積拡大部材の表面に接触し、固化または液化して捕集される。つまり、捕集面積拡大部材は、有機材料が捕集される捕集面の面積を拡大させ、第二筒体の断面中央部を流れる有機材料が接触する部位を増やし、捕集され易くするための部材である。
また、本発明によれば、有機材料は、第二筒体の内面と捕集面積拡大部材の表面との間に形成され、第二筒体の軸方向に向かって延びる流路を流れるので排気抵抗が少なく、有機材料を短時間で効率良く下流側へ流通させることができる。
ゆえに、本発明によれば、第二筒体の内面だけでなく、捕集面積拡大部材の表面においても有機材料を捕集でき、有機材料の精製効率を向上させることができる。
According to this invention, the collection area expansion member which has a surface extended along the axial direction of the said 2nd cylinder inside the 2nd cylinder is arrange | positioned. An exhaust device is connected to the downstream end of the collector. Therefore, an air flow from the inside of the first cylinder to the inside of the second cylinder is generated by the exhaust device, and the gaseous organic material comes into contact with the inner surface of the second cylinder and the surface of the collection area expanding member, and is solidified or liquefied. To be collected. In other words, the collection area expanding member enlarges the area of the collection surface where the organic material is collected, and increases the number of sites where the organic material flowing through the central portion of the cross section of the second cylindrical body comes into contact, thereby facilitating collection. It is a member.
Further, according to the present invention, the organic material is formed between the inner surface of the second cylinder and the surface of the collection area enlarging member and flows through the flow path extending in the axial direction of the second cylinder, so that the exhaust gas is exhausted. There is little resistance, and the organic material can be efficiently circulated downstream in a short time.
Therefore, according to the present invention, the organic material can be collected not only on the inner surface of the second cylinder but also on the surface of the collection area expanding member, and the purification efficiency of the organic material can be improved.

本発明の有機材料の精製装置では、前記捕集面積拡大部材は、前記第二筒体の断面中央部に配置されていることが好ましい。   In the organic material refining device according to the present invention, it is preferable that the collection area enlarging member is disposed at the center of the cross section of the second cylinder.

本発明によれば、捕集面積拡大部材は、第二筒体の断面中央部に配置されている。そのため、当該断面中央部を流通しようとする有機材料は、捕集面積拡大部材に接触したり、捕集面積拡大部材を避けて第二筒体内面により近づいて流通したりするようになる。その結果、有機材料は、第二筒体内面や捕集面積拡大部材表面に接触し易くなる。ゆえに、本発明によれば、有機材料の精製効率を向上させることができる。   According to this invention, the collection area expansion member is arrange | positioned in the cross-sectional center part of the 2nd cylinder. Therefore, the organic material which is going to distribute | circulate the said cross-sectional center part comes in contact with a collection area expansion member, or comes closer to the inner surface of a 2nd cylinder body avoiding a collection area expansion member, and distribute | circulates. As a result, the organic material easily comes into contact with the inner surface of the second cylindrical body and the surface of the collection area expanding member. Therefore, according to the present invention, the purification efficiency of the organic material can be improved.

本発明の有機材料の精製装置では、
前記捕集面積拡大部材は、筒状の第三筒体であり、
前記第三筒体の軸方向は、前記第二筒体の軸方向に沿っている
ことが好ましい。
In the organic material purification apparatus of the present invention,
The collection area expanding member is a cylindrical third cylinder,
The axial direction of the third cylinder is preferably along the axial direction of the second cylinder.

本発明によれば、第二筒体の軸方向に沿って第三筒体が配置される。有機材料は、第二筒体内面と第三筒体内面および外面とに接触可能になるので、接触面積が増大する。
ゆえに、本発明によれば、有機材料の精製効率をさらに向上させることができる。
According to the present invention, the third cylinder is disposed along the axial direction of the second cylinder. Since the organic material can contact the inner surface of the second cylinder, the inner surface of the third cylinder, and the outer surface, the contact area increases.
Therefore, according to the present invention, the purification efficiency of the organic material can be further improved.

本発明の有機材料の精製装置では、前記第三筒体の両端の開口が封止されていることが好ましい。   In the organic material refining device of the present invention, it is preferable that the openings at both ends of the third cylinder are sealed.

本発明によれば、第三筒体の両端の開口が封止されているため、有機材料が流通可能な第二筒体内部の空間を小さくすることができる。そして、第一筒体内部から第二筒体内部へ向かう気流は、第三筒体内部を通過せず、第二筒体内面と第三筒体外面との間を通過するようになる。ゆえに、本発明によれば、有機材料が第二筒体内面と第三筒体外面において効率的に捕集できるようになり、精製効率をさらに向上させることができる。
また、本発明によれば、有機材料が第二筒体内面と第三筒体外面とで選択的に捕集されるので、精製後の回収作業が容易になる。
According to the present invention, since the openings at both ends of the third cylinder are sealed, the space inside the second cylinder through which the organic material can circulate can be reduced. And the airflow which goes to the inside of a 2nd cylinder from the inside of a 1st cylinder does not pass the inside of a 3rd cylinder, but comes to pass between the 2nd cylinder inner surface and a 3rd cylinder outer surface. Therefore, according to the present invention, the organic material can be efficiently collected on the inner surface of the second cylinder and the outer surface of the third cylinder, and the purification efficiency can be further improved.
In addition, according to the present invention, since the organic material is selectively collected on the inner surface of the second cylinder and the outer surface of the third cylinder, the recovery operation after purification is facilitated.

本発明の有機材料の精製装置では、前記第三筒体の外面には、前記第三筒体の軸方向にわたって延びる複数のリブが設けられていることが好ましい。   In the organic material refining device of the present invention, it is preferable that a plurality of ribs extending in the axial direction of the third cylinder are provided on the outer surface of the third cylinder.

本発明によれば、第三筒体の外面には、第三筒体の軸方向にわたって延びる複数のリブが設けられている。そのため、本発明によれば、第二筒体の内面と第三筒体の外面との間に形成される有機材料の流路を、軸方向に延びる複数のより小さな流路に分けることができ、すなわち、分割流路を形成することができる。その結果、有機材料は、分割流路を通過しながら第二筒体内面と、第三筒体外面と、リブ表面とで捕集されるようになる。ゆえに、本発明によれば、有機材料の精製効率をさらに向上させることができる。   According to this invention, the some rib extended over the axial direction of a 3rd cylinder is provided in the outer surface of the 3rd cylinder. Therefore, according to the present invention, the organic material channel formed between the inner surface of the second cylinder and the outer surface of the third cylinder can be divided into a plurality of smaller channels extending in the axial direction. That is, a divided flow path can be formed. As a result, the organic material is collected on the inner surface of the second cylinder, the outer surface of the third cylinder, and the rib surface while passing through the divided flow path. Therefore, according to the present invention, the purification efficiency of the organic material can be further improved.

本発明の有機材料の精製装置では、前記複数のリブは、前記第三筒体の外面から前記第二筒体の内面へ向かって突出する方向が、前記第三筒体の上流側から下流側に向かう途中で異なるように設けられていることが好ましい。   In the organic material refining device according to the present invention, the plurality of ribs protrude from the outer surface of the third cylinder toward the inner surface of the second cylinder, from the upstream side to the downstream side of the third cylinder. It is preferable that they are provided differently on the way to.

本発明によれば、複数のリブは、第三筒体の外面から第二筒体の内面へ向かって突出する方向が、第三筒体の上流側から下流側に向かう途中で異なるように設けられているため、分割流路を蛇行させることができる。その結果、有機材料は、当該分割流路を蛇行しながら下流側に向かって流れるため、第二筒体内面と、第三筒体外面と、リブ表面とでさらに捕集され易くなる。ゆえに、本発明によれば、有機材料の精製効率をさらに向上させることができる。   According to the present invention, the plurality of ribs are provided such that the direction in which the rib protrudes from the outer surface of the third cylinder toward the inner surface of the second cylinder is different in the middle from the upstream side to the downstream side of the third cylinder. Therefore, the divided flow path can be meandered. As a result, since the organic material flows toward the downstream side while meandering through the divided flow path, the organic material is further easily collected on the second cylinder inner surface, the third cylinder outer surface, and the rib surface. Therefore, according to the present invention, the purification efficiency of the organic material can be further improved.

本発明の有機材料の精製装置では、前記捕集面積拡大部材は、前記第二筒体の軸方向に沿って延びる複数の板状部材を組み合わせて格子状に形成された格子部材であることが好ましい。   In the organic material refining device of the present invention, the collection area expanding member may be a lattice member formed in a lattice shape by combining a plurality of plate-like members extending along the axial direction of the second cylindrical body. preferable.

本発明によれば、捕集面積拡大部材は、第二筒体の軸方向に沿って延びる複数の板状部材を組み合わせて格子状に形成された格子部材であるため、分割流路をより多く形成することができる。ゆえに、本発明によれば、第二内筒体の内面だけでなく、格子部材の表面においても有機EL素子用材料を捕集でき、精製効率を向上させることができる。   According to the present invention, the collection area enlarging member is a lattice member formed in a lattice shape by combining a plurality of plate-like members extending along the axial direction of the second cylindrical body, so that more divided flow paths are provided. Can be formed. Therefore, according to the present invention, the organic EL element material can be collected not only on the inner surface of the second inner cylinder but also on the surface of the lattice member, and the purification efficiency can be improved.

本発明の有機材料の精製装置では、前記捕集面積拡大部材は、分割可能に形成されていることが好ましい。   In the organic material refining device of the present invention, the collection area expanding member is preferably formed to be separable.

本発明によれば、前記捕集面積拡大部材は、分割可能に形成されている。そのため、本発明によれば、有機材料の捕集面が筒体や格子部材等のままである場合に比べて、有機材料の回収が容易になる。   According to this invention, the said collection area expansion member is formed so that division | segmentation is possible. Therefore, according to the present invention, the organic material can be collected more easily than in the case where the collection surface of the organic material remains a cylinder or a lattice member.

本発明の有機材料の精製装置では、前記第二筒体は、分割可能に形成されていることが好ましい。   In the organic material refining device of the present invention, it is preferable that the second cylinder is formed to be separable.

本発明によれば、第二筒体は、分割可能に形成されている。そのため、本発明によれば、有機材料の捕集面が筒体のままである場合に比べて、有機材料の回収が容易になる。   According to this invention, the 2nd cylinder is formed so that division | segmentation is possible. Therefore, according to this invention, compared with the case where the collection surface of an organic material remains a cylinder, collection | recovery of an organic material becomes easy.

本発明の有機材料の精製装置では、前記第二筒体および前記第三筒体が、不活性金属又はセラミックスで形成されていることが好ましい。   In the organic material refining device of the present invention, it is preferable that the second cylinder and the third cylinder are formed of an inert metal or ceramics.

本発明によれば、第二筒体および第三筒体の材質として、不活性金属又はセラミックスを使用することができる。そのため、有機材料の精製作業に適した材質を選択できるようになり、精製作業が容易になる。不活性金属としては、例えば、ステンレス、タンタル、タングステン、モリブデン、チタンなどが挙げられ、セラミックスとしては、例えば、石英、ジルコニア、アルミナ、窒化ボロン、窒化ケイ素などが挙げられる。例えば、ステンレス製にすれば、第二筒体および第三筒体の破損を防止することができる。また、石英製にすれば、石英は伸縮性が低く、内部の確認が容易になる。   According to the present invention, an inert metal or ceramics can be used as the material of the second cylinder and the third cylinder. Therefore, it becomes possible to select a material suitable for the refining work of the organic material, and the refining work becomes easy. Examples of the inert metal include stainless steel, tantalum, tungsten, molybdenum, and titanium. Examples of the ceramic include quartz, zirconia, alumina, boron nitride, and silicon nitride. For example, if it is made of stainless steel, the second cylinder and the third cylinder can be prevented from being damaged. Further, if made of quartz, quartz has low stretchability, and the inside can be easily confirmed.

本発明の有機材料の精製装置では、
前記第一筒体および前記第二筒体を内部に収容する外筒体を備え、
前記加熱ヒータは、前記第一筒体および前記外筒体の外側に配置され、
前記温度調整ヒータは、前記第二筒体および前記外筒体の外側に配置されている
ことが好ましい。
In the organic material purification apparatus of the present invention,
An outer cylinder that houses the first cylinder and the second cylinder;
The heater is disposed outside the first cylinder and the outer cylinder,
The temperature adjusting heater is preferably disposed outside the second cylinder and the outer cylinder.

本発明によれば、精製装置は、外筒体内部に、第一筒体および第二筒体が収容された二重管式構造となり、このような二重管式構造の精製装置における精製中であっても第二筒体の内部温度をより正確に測定および制御することができる。したがって、本発明によれば、二重管式構造の精製装置においても、第二筒体の内面だけでなく、捕集面積拡大部材の表面においても有機材料を捕集でき、有機材料の精製効率を向上させることができる。
また、精製装置を二重管構造としたことで、第一筒体および第二筒体を装置外部に取り外し、清掃している間に、別の第一筒体および第二筒体を外筒体内部に配置して、精製を開始できる。ゆえに、精製装置の稼働率を向上させることができる。
According to the present invention, the refining device has a double tube structure in which the first tube and the second tube are accommodated inside the outer tube, and the refining device in such a double tube structure is being refined. Even so, the internal temperature of the second cylinder can be measured and controlled more accurately. Therefore, according to the present invention, not only the inner surface of the second cylindrical body but also the surface of the collection area expanding member can be collected in the purification apparatus having a double-pipe structure, and the purification efficiency of the organic material can be improved. Can be improved.
In addition, since the refining device has a double-pipe structure, the first and second cylinders are removed from the outside of the apparatus and cleaned while the other first and second cylinders are removed from the outer cylinder. Place it inside the body and start purification. Therefore, the operating rate of the refiner can be improved.

本発明の第一実施形態に係る有機材料の精製装置の断面概略図である。It is a section schematic diagram of the refining device of the organic material concerning a first embodiment of the present invention. 前記第一実施形態に係る精製装置の気化器の断面概略図である。It is a section schematic diagram of the vaporizer of the refining device concerning the first embodiment. 前記第一実施形態に係る精製装置の捕集器の断面概略図である。It is a section schematic diagram of a collector of a refining device concerning the first embodiment. 前記第一実施形態に係る精製装置の捕集器の断面概略図であって、図3の断面位置よりも下流側における図である。FIG. 4 is a schematic cross-sectional view of the collector of the purification apparatus according to the first embodiment, and is a view on the downstream side of the cross-sectional position of FIG. 3. 前記捕集器の第二筒体を構成する捕集筒体の斜視図である。It is a perspective view of the collection cylinder which comprises the 2nd cylinder of the said collector. 前記捕集器の第二筒体を構成する図5とは別の捕集筒体の斜視図である。It is a perspective view of the collection cylinder different from FIG. 5 which comprises the 2nd cylinder of the said collector. 前記捕集器の上流側端部に取り付けられる封止筒体の斜視図である。It is a perspective view of the sealing cylinder attached to the upstream edge part of the said collector. 第二実施形態に係る第二筒体の斜視図である。It is a perspective view of the 2nd cylinder concerning a second embodiment. 前記第二実施形態に係る第三筒体の斜視図である。It is a perspective view of the 3rd cylinder concerning the second embodiment. 第三実施形態に係る有機材料の精製装置の断面概略図である。It is the cross-sectional schematic of the refiner | purifier of the organic material which concerns on 3rd embodiment. 前記第三実施形態に係る精製装置の捕集器の断面概略図である。It is a section schematic diagram of a collector of a refining device concerning the third embodiment. 実施形態の変形例に係る捕集面積拡大部材の形状を説明する斜視図である。It is a perspective view explaining the shape of the collection area expansion member which concerns on the modification of embodiment. 実施形態の変形例に係る上記捕集面積拡大部材の形状を説明する断面図である。It is sectional drawing explaining the shape of the said collection area expansion member which concerns on the modification of embodiment. 実施形態の変形例に係る別の捕集面積拡大部材の形状を説明する断面図である。It is sectional drawing explaining the shape of another collection area expansion member which concerns on the modification of embodiment.

以下、図面を参照して、本発明の実施形態を説明する。   Hereinafter, embodiments of the present invention will be described with reference to the drawings.

<第一実施形態>
(1)精製装置の構成
図1には、第一実施形態に係る有機材料の精製装置1の長手方向に沿う断面の概略図が示されている。
精製装置1は、有機材料を精製する装置本体2と、装置本体2内部を減圧する排気装置としての真空ポンプ3と、装置本体2の温度を制御する温度コントローラ4と、を備える。以下、有機EL素子用材料を精製する場合を例に挙げて説明する。
<First embodiment>
(1) Structure of refiner | purifier The schematic of the cross section along the longitudinal direction of the refiner | purifier 1 of the organic material which concerns on 1st embodiment is shown by FIG.
The purification device 1 includes a device main body 2 for purifying an organic material, a vacuum pump 3 as an exhaust device for reducing the pressure inside the device main body 2, and a temperature controller 4 for controlling the temperature of the device main body 2. Hereinafter, the case where an organic EL element material is purified will be described as an example.

(1−1)装置本体
装置本体2は、円筒状の内筒体21と、この内筒体21の外側に配置されて内筒体21を内部に収容する円筒状の外筒体22とを備え、外筒体22の両端が蓋部23,24で閉塞された二重管構造である。
装置本体2には、内筒体21および外筒体22の一方側において気化器5が設けられ、内筒体21および外筒体22の他方側において捕集器6が設けられており、気化器5と捕集器6とは、装置本体2の水平方向に連続して設けられている。
また、図1に示すように、装置本体2の捕集器6側の端部に設けられた蓋部24には、真空ポンプ3が接続されている。この真空ポンプ3には、バルブ3aを介して配管部材が設けられ、配管部材は、装置本体2の内部と連通するように蓋部24に接続されている。そのため、真空ポンプ3は、装置本体2の内部を排気可能である。本実施形態では、装置本体2内の圧力を、10−1Pa以下にする。装置本体2と真空ポンプ3との間に、トラップ装置(図示せず)を介在させておくことが好ましい。
(1-1) Device Main Body The device main body 2 includes a cylindrical inner cylinder 21 and a cylindrical outer cylinder 22 that is disposed outside the inner cylinder 21 and accommodates the inner cylinder 21 therein. And a double pipe structure in which both ends of the outer cylinder body 22 are closed by the lid portions 23 and 24.
The apparatus main body 2 is provided with a vaporizer 5 on one side of the inner cylinder body 21 and the outer cylinder body 22, and a collector 6 is provided on the other side of the inner cylinder body 21 and the outer cylinder body 22. The container 5 and the collector 6 are provided continuously in the horizontal direction of the apparatus main body 2.
Moreover, as shown in FIG. 1, the vacuum pump 3 is connected to the cover part 24 provided in the edge part by the side of the collector 6 of the apparatus main body 2. As shown in FIG. The vacuum pump 3 is provided with a piping member via a valve 3 a, and the piping member is connected to the lid portion 24 so as to communicate with the inside of the apparatus main body 2. Therefore, the vacuum pump 3 can exhaust the inside of the apparatus main body 2. In this embodiment, the pressure in the apparatus main body 2 is set to 10 −1 Pa or less. It is preferable that a trap device (not shown) is interposed between the apparatus main body 2 and the vacuum pump 3.

このような装置本体2では、有機EL素子用材料は、気化器5の内部で気化し、気化した気体状の有機EL素子用材料は、真空ポンプ3の吸引により捕集器6に流れ込み、捕集器6の内部で固化されて捕集される。このように、精製される有機EL素子用材料は、気化器5側から捕集器6側へ流れる。以下、有機EL素子用材料の流れ方向に即して、装置本体2の気化器5が配置されている一方側を上流側、装置本体2の捕集器6が配置されている他方側を下流側と称する場合がある。   In such an apparatus main body 2, the organic EL element material is vaporized inside the vaporizer 5, and the vaporized gaseous organic EL element material flows into the collector 6 by suction of the vacuum pump 3 and is collected. It is solidified and collected inside the collector 6. Thus, the organic EL element material to be purified flows from the vaporizer 5 side to the collector 6 side. Hereinafter, in accordance with the flow direction of the organic EL element material, one side where the vaporizer 5 of the apparatus main body 2 is arranged is upstream, and the other side where the collector 6 of the apparatus main body 2 is arranged downstream. Sometimes referred to as the side.

(1−1−1)気化器
気化器5は、装置本体2の上流側に配置される。気化器5は、内筒体21の上流側を構成する第一筒体としての第一内筒体51と、外筒体22の上流側を構成し、第一内筒体51の外側に配置される第一外筒体52と、第一外筒体52の外側に配置される加熱ヒータ53と、第一内筒体51内部に配置される原料容器としての収容部54と、を備える。
(1-1-1) Vaporizer The vaporizer 5 is disposed on the upstream side of the apparatus main body 2. The vaporizer 5 constitutes a first inner cylinder 51 as a first cylinder constituting the upstream side of the inner cylinder 21, and an upstream side of the outer cylinder 22, and is disposed outside the first inner cylinder 51. A first outer cylindrical body 52, a heater 53 disposed outside the first outer cylindrical body 52, and an accommodating portion 54 as a raw material container disposed inside the first inner cylindrical body 51.

図2には、気化器5の第一内筒体51および第一外筒体52の断面図が示されている。
第一内筒体51および第一外筒体52は、円筒状に形成されている。
第一内筒体51の内面には収容部54を支持するための支持突起512が、図2に示すように左右にそれぞれ形成されている。
FIG. 2 shows a cross-sectional view of the first inner cylinder 51 and the first outer cylinder 52 of the vaporizer 5.
The first inner cylinder 51 and the first outer cylinder 52 are formed in a cylindrical shape.
On the inner surface of the first inner cylinder 51, support protrusions 512 for supporting the accommodating portion 54 are formed on the left and right as shown in FIG.

加熱ヒータ53は、赤外線ヒータ等により構成され、第一外筒体52の外側に環状に配置される。
収容部54は、第一内筒体51の内部に配置されている。収容部54は、例えば、四角形板状の底面と、この底面の周縁から面外方向に起立する側面とを備えた皿状に形成され、粉末状など固体の有機EL素子用材料を収容している。
第一内筒体51、第一外筒体52、および収容部54の材質は、有機EL素子用材料に対して不活性な材質で構成されることが好ましく、本実施形態では、石英ガラスで構成されている。
The heater 53 is configured by an infrared heater or the like, and is arranged in an annular shape outside the first outer cylinder 52.
The accommodating portion 54 is disposed inside the first inner cylindrical body 51. The accommodating portion 54 is formed in a dish shape having, for example, a rectangular plate-shaped bottom surface and a side surface rising from the periphery of the bottom surface in the out-of-plane direction, and accommodates solid organic EL element materials such as powder. Yes.
The material of the first inner cylinder 51, the first outer cylinder 52, and the housing portion 54 is preferably made of a material that is inert with respect to the organic EL element material. In the present embodiment, the material is quartz glass. It is configured.

(1−1−2)捕集器
捕集器6は、装置本体2の下流側に配置される。捕集器6は、内筒体21の下流側を構成する第二筒体としての第二内筒体61と、外筒体22の下流側を構成し、第二内筒体61の外側に配置される第二外筒体62と、第二外筒体62の外側に配置される温度調整ヒータ63と、第二内筒体61の内部に配置される捕集面積拡大部材としての第三筒体70と、を備える。
(1-1-2) Collector The collector 6 is disposed on the downstream side of the apparatus main body 2. The collector 6 constitutes a second inner cylinder 61 as a second cylinder constituting the downstream side of the inner cylinder 21 and a downstream side of the outer cylinder 22, and is disposed outside the second inner cylinder 61. The second outer cylinder 62 arranged, the temperature adjusting heater 63 arranged outside the second outer cylinder 62, and the third as a collection area expanding member arranged inside the second inner cylinder 61 A cylindrical body 70.

図3には、捕集器6の第二内筒体61および第二外筒体62の断面図が示されている。図4には、図3の断面の位置よりも下流側における捕集器6の第二内筒体61および第二外筒体62の断面図が示されている。
第二内筒体61、第三筒体70および第二外筒体62は、円筒状に形成されている。第二外筒体62は、本実施形態では、第一外筒体52と、一体の円筒状に形成されている。
FIG. 3 shows a cross-sectional view of the second inner cylinder 61 and the second outer cylinder 62 of the collector 6. 4 shows a cross-sectional view of the second inner cylindrical body 61 and the second outer cylindrical body 62 of the collector 6 on the downstream side of the position of the cross section of FIG.
The second inner cylinder 61, the third cylinder 70, and the second outer cylinder 62 are formed in a cylindrical shape. In the present embodiment, the second outer cylinder 62 is formed in an integral cylindrical shape with the first outer cylinder 52.

第二内筒体61は、本実施形態では、円筒状の捕集筒体が3つ、具体的には、上流側から順に第一捕集筒体61A、第二捕集筒体61Bおよび第三捕集筒体61Cが分割可能に連結されて構成される。第一捕集筒体61Aと第三捕集筒体61Cとは同じ構造である。
第一捕集筒体61Aの内部が、第一捕集室R1とされ、第二捕集筒体61Bの内部が、第二捕集室R2とされ、第三捕集筒体61Cの内部が第三捕集室R3とされ、捕集室R1,R2,R3は、下流側に向かって水平方向に連続して形成され、互いに連通している。
In the present embodiment, the second inner cylinder 61 includes three cylindrical collection cylinders, specifically, the first collection cylinder 61A, the second collection cylinder 61B, and the first collection cylinder in order from the upstream side. The three collecting cylinders 61C are configured to be divided and connected. The first collection cylinder 61A and the third collection cylinder 61C have the same structure.
The inside of the first collection cylinder 61A is the first collection chamber R1, the inside of the second collection cylinder 61B is the second collection chamber R2, and the inside of the third collection cylinder 61C is The third collection chamber R3 is formed, and the collection chambers R1, R2, and R3 are continuously formed in the horizontal direction toward the downstream side and communicate with each other.

第三筒体70は、その軸方向が第二内筒体61の軸方向に沿っており、第二内筒体61内部の断面中央部に配置され、第二内筒体61の内面と第三筒体70の外面との間に有機EL素子用材料の流路を形成し、第二内筒体61の断面中央部を流れる有機材料を当該流路に流れ込み易くする。また、第三筒体70は、円筒状であるため、その表面は、第二内筒体61の軸方向に沿って延びている。   The third cylinder 70 has an axial direction along the axial direction of the second inner cylinder 61, and is disposed at the center of the cross section inside the second inner cylinder 61. A flow path of the organic EL element material is formed between the outer surface of the three-cylinder body 70, and the organic material flowing through the central portion of the cross section of the second inner cylinder body 61 is easily flowed into the flow path. Moreover, since the third cylinder 70 is cylindrical, the surface thereof extends along the axial direction of the second inner cylinder 61.

図5には、捕集筒体61A,61Cの斜視図が示され、図6には、第二捕集筒体61Bの斜視図が示されている。
前述のとおり、第二内筒体61は、3つの捕集筒体に分割可能であることに伴い、第三筒体70も、図5および図6に示されているように、捕集筒体61A,61B,61Cとともに3つの小筒体70A,70B,70Cに分割されている。小筒体70A,70B,70Cは、同じ大きさの円筒状である。
FIG. 5 shows a perspective view of the collection cylinders 61A and 61C, and FIG. 6 shows a perspective view of the second collection cylinder 61B.
As described above, as the second inner cylinder 61 can be divided into three collection cylinders, the third cylinder 70 also has a collection cylinder as shown in FIGS. 5 and 6. It is divided into three small cylinders 70A, 70B and 70C together with the bodies 61A, 61B and 61C. The small cylinders 70A, 70B, and 70C are cylindrical with the same size.

第三筒体70の外面には、図3〜図6に示すように、複数のリブ711,712が設けられている。リブ711,712は、第三筒体の軸方向にわたって延びる板状に形成されている。また、複数のリブ711,712の表面は、第二内筒体61の軸方向に沿って延びている。
リブ711は、図3および図5に示されているように、小筒体70A,70Cの外面(上面、底面、および側面)に4つ設けられ、当該外面から捕集筒体61A,61Cの内面に向かって、上下方向および左右方向に延び、捕集筒体61A,61Cの内面に接続している。
リブ712は、図4および図6に示されているように、小筒体70Bの外面から第二捕集筒体61Bの内面に向かって斜め方向に延び、第二捕集筒体61Bの内面に接続している。
ここで、捕集筒体61A,61B,61Cを連結させた状態で、第二内筒体61を上流側から下流側に向かって見ると、リブ711とリブ712とでは、突出する方向とが異なるように設けられている。図3に示すように、小筒体70A,70Cの上下方向および左右方向に延びるリブ711に対し、二点鎖線で示す小筒体70Bのリブ712は、斜め方向に延びており、小筒体70A,70Cと、隣り合う小筒体70Bでは、リブの突出方向が異なる。また、図4についても同様に、小筒体70Bの斜め方向に延びるリブ712に対して、二点鎖線で示す小筒体70A,70Cのリブ711は、上下方向および左右方向に延びている。
As shown in FIGS. 3 to 6, a plurality of ribs 711 and 712 are provided on the outer surface of the third cylindrical body 70. The ribs 711 and 712 are formed in a plate shape extending over the axial direction of the third cylinder. Further, the surfaces of the plurality of ribs 711 and 712 extend along the axial direction of the second inner cylinder 61.
As shown in FIGS. 3 and 5, four ribs 711 are provided on the outer surfaces (upper surface, bottom surface, and side surfaces) of the small cylinders 70A and 70C, and the collecting cylinders 61A and 61C are formed from the outer surfaces. It extends in the vertical and horizontal directions toward the inner surface, and is connected to the inner surfaces of the collecting cylinders 61A and 61C.
As shown in FIGS. 4 and 6, the rib 712 extends obliquely from the outer surface of the small cylinder 70B toward the inner surface of the second collection cylinder 61B, and the inner surface of the second collection cylinder 61B. Connected to.
Here, when the second inner cylinder 61 is viewed from the upstream side toward the downstream side in a state where the collection cylinders 61A, 61B, 61C are connected, the rib 711 and the rib 712 have a protruding direction. It is provided differently. As shown in FIG. 3, the rib 712 of the small cylinder 70B indicated by a two-dot chain line extends in an oblique direction with respect to the rib 711 extending in the vertical direction and the horizontal direction of the small cylinders 70A and 70C. The protruding directions of the ribs are different between 70A and 70C and the adjacent small cylinder 70B. Similarly in FIG. 4, the ribs 711 of the small cylinders 70A and 70C indicated by the two-dot chain lines extend in the vertical direction and the horizontal direction with respect to the rib 712 extending in the oblique direction of the small cylinder 70B.

第二内筒体61の内面と第三筒体70の外面との間に形成される有機EL素子用材料の流路は、第三筒体70の軸方向にわたって延びる板状のリブ711,712によって、当該軸方向に延びる複数のより小さな流路に分けることができ、すなわち、分割流路を形成することができる。また、捕集室R1,R2,R3も、リブ711,712によって、それぞれ4つの小部屋に区切られる。捕集筒体61A,61B,61Cを連結させれば、4つに区切られた小部屋は、軸方向にわたって連通している。   The flow path of the organic EL element material formed between the inner surface of the second inner cylinder 61 and the outer surface of the third cylinder 70 is a plate-like rib 711, 712 extending in the axial direction of the third cylinder 70. Can be divided into a plurality of smaller channels extending in the axial direction, that is, a divided channel can be formed. The collection chambers R1, R2, and R3 are also divided into four small rooms by ribs 711 and 712, respectively. If the collection cylinders 61A, 61B, 61C are connected, the small chambers divided into four communicate with each other in the axial direction.

第三筒体70(小筒体70A)の上流側の開口部は、第二内筒体61(第一捕集筒体61A)と第一内筒体51との間に設けられる封止筒体65によって封止されている。
図7には、封止筒体65の斜視図が示されている。封止筒体65は、第一捕集筒体61Aと略同様の形状であるが、軸方向の長さ寸法が短く形成されている。また、封止筒体65の断面中央部には、円筒状に形成され、軸方向端部の一方の開口が封止板751によって封止された封止用小筒体75が配置されている。封止用小筒体75の軸方向の長さ寸法は、封止筒体65と同じである。封止用小筒体75の外面からは、リブ711と同様に上下方向および左右方向に延び、封止筒体65に接続しているリブ752が設けられている。
封止筒体65が第一捕集筒体61Aに取り付けられると、小筒体70Aと封止用小筒体75とが重なり、封止板751によって小筒体70Aの上流側の開口部が封止される。
第三筒体70(小筒体70C)の下流側の開口部は、図1に示すように、第二内筒体61(第三捕集筒体61C)の下流側端部に取り付けられる封止部材76によって封止されている。
The opening on the upstream side of the third cylinder 70 (small cylinder 70A) is a sealed cylinder provided between the second inner cylinder 61 (first collection cylinder 61A) and the first inner cylinder 51. The body 65 is sealed.
FIG. 7 shows a perspective view of the sealing cylinder 65. The sealing cylinder 65 has substantially the same shape as the first collection cylinder 61A, but is formed with a short axial length. In addition, a sealing small cylinder 75 that is formed in a cylindrical shape and has one opening at the end in the axial direction sealed by a sealing plate 751 is disposed at the center of the cross section of the sealing cylinder 65. . The axial length of the sealing small cylinder 75 is the same as that of the sealing cylinder 65. Like the rib 711, a rib 752 extending in the vertical direction and the left-right direction and connected to the sealing cylinder 65 is provided from the outer surface of the sealing cylinder 75.
When the sealing cylinder 65 is attached to the first collecting cylinder 61A, the small cylinder 70A and the sealing small cylinder 75 overlap, and the opening on the upstream side of the small cylinder 70A is formed by the sealing plate 751. Sealed.
As shown in FIG. 1, the opening on the downstream side of the third cylinder 70 (small cylinder 70C) is a seal attached to the downstream end of the second inner cylinder 61 (third collection cylinder 61C). The sealing member 76 is sealed.

温度調整ヒータ63は、赤外線ヒータ等により構成され、第二外筒体62の外側に環状に配置される。温度調整ヒータ63は、第一捕集室R1の温度を調整する第一温度調整ヒータ63Aと、第二捕集室R2の温度を調整する第二温度調整ヒータ63Bと、第三捕集室R3の温度を調整する第三温度調整ヒータ63Cと、を備える。これらの温度調整ヒータ63A,63B,63Cは、それぞれ、後述する温度調整ヒータ制御手段としての制御部44により各捕集室R1,R2,R3の内部の温度を独立して調整することができる。   The temperature adjustment heater 63 is configured by an infrared heater or the like, and is arranged in an annular shape outside the second outer cylindrical body 62. The temperature adjustment heater 63 includes a first temperature adjustment heater 63A that adjusts the temperature of the first collection chamber R1, a second temperature adjustment heater 63B that adjusts the temperature of the second collection chamber R2, and a third collection chamber R3. A third temperature adjusting heater 63C for adjusting the temperature of the first temperature adjusting heater 63C. These temperature adjustment heaters 63A, 63B, and 63C can independently adjust the temperatures inside the collection chambers R1, R2, and R3 by a control unit 44 as a temperature adjustment heater control unit, which will be described later.

第二内筒体61、第二外筒体62、第三筒体70、封止筒体65、封止用小筒体75、リブ711,712,752および封止部材76の材質は、有機EL素子用材料に対して不活性な材質で構成されることが好ましい。本実施形態では、第二外筒体62が、石英ガラスで構成され、第二内筒体61、第三筒体70、封止筒体65、封止用小筒体75、リブ711,712,752および封止部材76は、ステンレスで構成されている。   The materials of the second inner cylinder 61, the second outer cylinder 62, the third cylinder 70, the sealing cylinder 65, the sealing small cylinder 75, the ribs 711, 712, 752 and the sealing member 76 are organic. It is preferable to be made of a material that is inert to the EL element material. In the present embodiment, the second outer cylinder 62 is made of quartz glass, and the second inner cylinder 61, the third cylinder 70, the sealing cylinder 65, the sealing small cylinder 75, and the ribs 711, 712. 752 and the sealing member 76 are made of stainless steel.

(1−1−3)温度コントローラ
温度コントローラ4は、気化器5内部の温度を測定する温度センサ41と、温度センサ41で測定した温度情報に基づいて加熱ヒータ53を制御する制御部42と、捕集器6内部の温度を測定する温度センサ43と、温度センサ43で測定した温度情報に基づいて温度調整ヒータ63を制御する制御部44と、を備える。
温度センサ41は、内筒体21の上流側端部から第一内筒体51の内部に挿入された第一筒体用の熱電対412を備える。熱電対412は、装置本体2外部に配置された制御部42と接続されている。熱電対412で測定した温度情報は、制御部42へと送られる。
制御部42は、加熱ヒータ53に接続され、温度センサ41から入力された温度情報に基づいて、加熱ヒータ53による加熱を制御する。
(1-1-3) Temperature Controller The temperature controller 4 includes a temperature sensor 41 that measures the temperature inside the vaporizer 5, a control unit 42 that controls the heater 53 based on the temperature information measured by the temperature sensor 41, and The temperature sensor 43 which measures the temperature inside the collector 6 and the control part 44 which controls the temperature adjustment heater 63 based on the temperature information measured with the temperature sensor 43 are provided.
The temperature sensor 41 includes a thermocouple 412 for the first cylinder inserted into the first inner cylinder 51 from the upstream end of the inner cylinder 21. The thermocouple 412 is connected to the control unit 42 disposed outside the apparatus main body 2. The temperature information measured by the thermocouple 412 is sent to the control unit 42.
The control unit 42 is connected to the heater 53 and controls heating by the heater 53 based on the temperature information input from the temperature sensor 41.

温度センサ43は、内筒体21の下流側端部から第二内筒体61の内部に挿入された第二筒体用の3本の熱電対432A,432B,432Cを備える。熱電対432A,432B,432Cは、装置本体2外部に配置された制御部44と接続されている。温度センサ43の熱電対432A,432B,432Cで測定した温度情報は、制御部44へと送られる。
熱電対432Aは、第一捕集室R1の内部に配置され、熱電対432Bは、第二捕集室R2の内部に配置され、熱電対432Cは、第三捕集室R3の内部に配置されている。
The temperature sensor 43 includes three thermocouples 432A, 432B, and 432C for the second cylinder inserted into the second inner cylinder 61 from the downstream end of the inner cylinder 21. The thermocouples 432A, 432B, and 432C are connected to the control unit 44 disposed outside the apparatus main body 2. The temperature information measured by the thermocouples 432A, 432B, and 432C of the temperature sensor 43 is sent to the control unit 44.
The thermocouple 432A is arranged inside the first collection chamber R1, the thermocouple 432B is arranged inside the second collection chamber R2, and the thermocouple 432C is arranged inside the third collection chamber R3. ing.

制御部44は、温度調整ヒータ63に接続され、温度センサ43から入力された温度情報に基づいて、温度調整ヒータ63による加熱を制御する。本実施形態では、制御部44は、捕集室R1、R2,R3毎の温度調整ヒータ63A,63B,63Cを独立して制御する。例えば、制御部44は、温度が第一捕集室R1側から第三捕集室R3側へ向かって連続的または段階的に異なるように温度調整ヒータ63A,63B,63Cを制御する。   The control unit 44 is connected to the temperature adjustment heater 63 and controls heating by the temperature adjustment heater 63 based on the temperature information input from the temperature sensor 43. In the present embodiment, the control unit 44 independently controls the temperature adjustment heaters 63A, 63B, and 63C for the collection chambers R1, R2, and R3. For example, the control unit 44 controls the temperature adjustment heaters 63A, 63B, and 63C so that the temperature varies continuously or stepwise from the first collection chamber R1 side to the third collection chamber R3 side.

(1−2)有機EL素子用材料
精製対象である有機EL素子用材料は、有機EL素子に用いられる材料であって特に限定されない。
(1-2) Organic EL element material The organic EL element material to be purified is a material used for the organic EL element and is not particularly limited.

(2)精製装置による精製方法
精製装置1を用いて有機EL素子用材料を精製する方法を説明する。
まず、収容部54に固体粉末状の昇華性の有機EL素子用材料を収容する。
次に、蓋部23,24を取り付けて、気化器5および捕集器6内部を密閉する。
次に、気化器5の上流側端部から第一内筒体51内部に温度センサ41(熱電対412)を挿入する。一方、捕集器6の下流側端部から第二内筒体61内部に温度センサ43(熱電対432A,432B,432C)を挿入する。
次いで、装置本体2内部を真空ポンプ3にて10−1Pa以下に減圧する。
減圧後、加熱ヒータ53にて第一内筒体51を加熱し、温度調整ヒータ63にて第二内筒体61を加熱し、温度調整を行う。このとき、温度コントローラ4が、温度センサ41,温度センサ43の測定温度情報に基づいて、加熱ヒータ53及び温度調整ヒータ63による加熱を制御する。具体的には、加熱ヒータ53は、固体粉末状の有機EL素子用材料が昇華(固体から気体に変化)する温度(昇華温度)まで第一内筒体51を加熱し、当該温度に保持する。温度調整ヒータ63A,63B,63Cは、互いに独立に所定温度に加熱して、第一捕集室R1、第二捕集室R2および第三捕集室R3の温度を調整する。本実施形態では、精製対象となる有機EL素子用材料が気体から固体に変化する温度に対して、第一捕集室R1をやや高く温度調整し、第二捕集室R2を同温度より低く温度調整し、第三捕集室R3を第二捕集室R2よりもさらに低く温度調整する。
(2) Purification method using a purification device A method for purifying an organic EL element material using the purification device 1 will be described.
First, a solid powder sublimable organic EL element material is accommodated in the accommodating portion 54.
Next, the cover parts 23 and 24 are attached and the inside of the vaporizer | carburetor 5 and the collector 6 is sealed.
Next, the temperature sensor 41 (thermocouple 412) is inserted into the first inner cylinder 51 from the upstream end of the vaporizer 5. On the other hand, the temperature sensor 43 (thermocouples 432A, 432B, 432C) is inserted into the second inner cylinder 61 from the downstream end of the collector 6.
Next, the inside of the apparatus main body 2 is decompressed to 10 −1 Pa or less by the vacuum pump 3.
After depressurization, the first inner cylinder 51 is heated by the heater 53, and the second inner cylinder 61 is heated by the temperature adjustment heater 63 to adjust the temperature. At this time, the temperature controller 4 controls heating by the heater 53 and the temperature adjusting heater 63 based on the temperature information measured by the temperature sensor 41 and the temperature sensor 43. Specifically, the heater 53 heats the first inner cylinder 51 to a temperature (sublimation temperature) at which the solid powder organic EL element material sublimates (changes from solid to gas) and maintains the temperature. . The temperature adjustment heaters 63A, 63B, and 63C are heated to a predetermined temperature independently of each other to adjust the temperatures of the first collection chamber R1, the second collection chamber R2, and the third collection chamber R3. In the present embodiment, the temperature of the first collection chamber R1 is adjusted slightly higher than the temperature at which the organic EL element material to be purified changes from gas to solid, and the second collection chamber R2 is lower than the same temperature. The temperature is adjusted, and the temperature of the third collection chamber R3 is adjusted to be lower than that of the second collection chamber R2.

収容部54に収容された固体粉末状の有機EL素子用材料は、収容部54が昇華温度まで加熱保持されると気化する。気体状の有機EL素子用材料は、捕集器6側へ移動し、各捕集室R1,R2,R3に対応する第二内筒体61の内表面にて固化させて捕集する。
本実施形態では、各捕集室R1,R2,R3が、精製対象となる有機EL素子用材料の気化(昇華)温度に対して上述のような関係で加熱保持されている。そのため、当該気化(昇華)温度に対して、低めの温度に加熱保持された第二捕集室R2にて、精製対象となる有機EL素子用材料が高い純度で捕集される。第一捕集室R1および第三捕集室R3では、収容部54に供給された有機EL素子用材料に含まれていた不純物成分が濃縮されて捕集される。
The solid-powder organic EL element material accommodated in the accommodating portion 54 is vaporized when the accommodating portion 54 is heated and held to the sublimation temperature. The gaseous organic EL element material moves to the collector 6 side, and is solidified and collected on the inner surface of the second inner cylinder 61 corresponding to each of the collection chambers R1, R2, and R3.
In this embodiment, each collection chamber R1, R2, R3 is heated and held in the above-described relationship with respect to the vaporization (sublimation) temperature of the organic EL element material to be purified. Therefore, the organic EL element material to be purified is collected with high purity in the second collection chamber R2 heated and held at a temperature lower than the vaporization (sublimation) temperature. In the first collection chamber R1 and the third collection chamber R3, the impurity components contained in the organic EL element material supplied to the storage portion 54 are concentrated and collected.

(3)実施形態の効果
第一実施形態に係る精製装置1及び精製装置1を用いた精製方法によれば、次のような効果を奏する。
(3) Effects of the Embodiment According to the purification device 1 and the purification method using the purification device 1 according to the first embodiment, the following effects can be obtained.

精製装置1によれば、捕集面積拡大部材としての第三筒体70が、第二内筒体61の内部に配置されている。そして、捕集器6の下流側端部には真空ポンプ3が接続されている。そのため、真空ポンプ3によって第一内筒体51の内部から第二内筒体61の内部へ向かう気流が生じ、気体状の有機EL素子用材料は、第二内筒体61の内面および第三筒体70の表面に接触し、固化して捕集される。また、有機EL素子用材料は、第二内筒体61の内面と第三筒体70の外面との間に形成され、第二内筒体61の軸方向に向かって延びる流路を流れるので排気抵抗が少なく、有機EL素子用材料を短時間で効率良く下流側へ流通させることができる。
ゆえに、精製装置1によれば、第二内筒体61の内面だけでなく、第三筒体の表面においても有機EL素子用材料を捕集でき、精製効率を向上させることができる。
According to the refining device 1, the third cylinder 70 as the collection area expanding member is disposed inside the second inner cylinder 61. A vacuum pump 3 is connected to the downstream end of the collector 6. Therefore, an air flow is generated from the inside of the first inner cylinder 51 to the inside of the second inner cylinder 61 by the vacuum pump 3, and the gaseous organic EL element material is formed on the inner surface of the second inner cylinder 61 and the third inner cylinder 61. It contacts the surface of the cylindrical body 70 and is solidified and collected. In addition, the organic EL element material is formed between the inner surface of the second inner cylinder 61 and the outer surface of the third cylinder 70, and flows through a flow path extending in the axial direction of the second inner cylinder 61. The exhaust resistance is small, and the organic EL element material can be efficiently distributed downstream in a short time.
Therefore, according to the refiner 1, the organic EL element material can be collected not only on the inner surface of the second inner cylinder 61 but also on the surface of the third cylinder, and the purification efficiency can be improved.

精製装置1によれば、第三筒体70は、第二内筒体61の断面中央部に配置されている。そのため、当該断面中央部を流通しようとする有機EL素子用材料は、第三筒体70に接触したり、第三筒体70を避けて第二内筒体61内面により近づいて流通したりするようになる。その結果、有機EL素子用材料は、第二筒体内面や第三筒体表面に接触し易くなる。ゆえに、本発明によれば、有機EL素子用材料の精製効率を向上させることができる。   According to the refining device 1, the third cylinder 70 is disposed at the center of the cross section of the second inner cylinder 61. Therefore, the organic EL element material to be distributed through the central portion of the cross section contacts the third cylindrical body 70 or flows closer to the inner surface of the second inner cylindrical body 61 while avoiding the third cylindrical body 70. It becomes like this. As a result, the organic EL element material easily comes into contact with the inner surface of the second cylinder or the surface of the third cylinder. Therefore, according to the present invention, the purification efficiency of the organic EL element material can be improved.

精製装置1によれば、第三筒体70(小筒体70A)の上流側の開口部が封止筒体65の封止板751によって封止され、第三筒体70(小筒体70C)の下流側の開口部は、封止部材76によって封止されている。そのため、有機EL素子用材料が流通可能な第二内筒体61内部の空間を小さくすることができる。そして、第一内筒体51内部から第二内筒体61内部へ向かう気流は、第三筒体70内部を通過せず、第二内筒体61の内面と第三筒体70の外面との間を通過するようになる。
ゆえに、精製装置1によれば、有機EL素子用材料が第二内筒体61の内面と第三筒体外面において効率的に捕集できるようになり、精製効率をさらに向上させることができる。
また、精製装置1によれば、有機EL素子用材料が第二内筒体61の内面と第三筒体70の外面とで選択的に捕集されるので、精製後の回収作業が容易になる。
According to the refining device 1, the upstream opening of the third cylinder 70 (small cylinder 70A) is sealed by the sealing plate 751 of the sealing cylinder 65, and the third cylinder 70 (small cylinder 70C). ) On the downstream side is sealed by a sealing member 76. Therefore, the space inside the second inner cylinder 61 through which the organic EL element material can be distributed can be reduced. And the airflow which goes to the inside of the 2nd inner cylinder 61 from the inside of the 1st inner cylinder 51 does not pass the inside of the 3rd cylinder 70, but the inner surface of the 2nd inner cylinder 61, the outer surface of the 3rd cylinder 70, and Pass between.
Therefore, according to the refining device 1, the organic EL element material can be efficiently collected on the inner surface of the second inner cylinder 61 and the outer surface of the third cylinder 61, and the purification efficiency can be further improved.
Moreover, according to the refiner | purifier 1, since the organic EL element material is selectively collected by the inner surface of the 2nd inner cylinder 61, and the outer surface of the 3rd cylinder 70, the collection | recovery operation | work after refinement | purification is easy. Become.

精製装置1によれば、第三筒体の外面に設けられた複数のリブ711,712によって、第二内筒体61の内面と第三筒体70の外面との間に形成される有機EL素子用材料の流路を、軸方向に延びる複数の分割流路とすることができる。その結果、有機EL素子用材料は、分割流路を通過しながら第二内筒体61の内面と、第三筒体70の外面と、リブ711,712の表面とで捕集されるようになる。ゆえに、精製装置1によれば、有機EL素子用材料の精製効率をさらに向上させることができる。   According to the purification apparatus 1, an organic EL formed between the inner surface of the second inner cylinder 61 and the outer surface of the third cylinder 70 by the plurality of ribs 711 and 712 provided on the outer surface of the third cylinder. The flow path of the element material can be a plurality of divided flow paths extending in the axial direction. As a result, the organic EL element material is collected on the inner surface of the second inner cylindrical body 61, the outer surface of the third cylindrical body 70, and the surfaces of the ribs 711 and 712 while passing through the divided flow path. Become. Therefore, according to the purification apparatus 1, the purification efficiency of the organic EL element material can be further improved.

精製装置1によれば、複数のリブ711,712は、第三筒体70の外面から第二内筒体61の内面へ向かって突出する方向が、第三筒体70の上流側から下流側に向かう途中で異なるように設けられているため、分割流路を蛇行させた形状にすることができる。その結果、有機材料は、当該分割流路を蛇行しながら下流側に向かって流れるため、第二内筒体61内面と、第三筒体70外面と、リブ711,712表面とでさらに捕集され易くなる。ゆえに、精製装置1によれば、有機材料の精製効率をさらに向上させることができる。   According to the refining device 1, the plurality of ribs 711 and 712 protrude from the outer surface of the third cylinder 70 toward the inner surface of the second inner cylinder 61 from the upstream side to the downstream side of the third cylinder 70. Since it is provided so as to be different on the way to, the divided flow path can be formed in a meandering shape. As a result, since the organic material flows toward the downstream side while meandering through the divided flow path, the organic material is further collected on the inner surface of the second inner cylinder 61, the outer surface of the third cylinder 70, and the surfaces of the ribs 711 and 712. It becomes easy to be done. Therefore, according to the purification apparatus 1, the purification efficiency of the organic material can be further improved.

<第二実施形態>
次に、本発明の第二実施形態に係る有機EL素子用材料の精製装置について説明する。尚、以下の説明では、既に説明した部分と同一の部分については、同一符号を付してその説明を省略又は簡略する。
<Second embodiment>
Next, the refiner | purifier of the organic EL element material which concerns on 2nd embodiment of this invention is demonstrated. In the following description, the same parts as those already described are denoted by the same reference numerals, and the description thereof is omitted or simplified.

図8には、第二実施形態に係る有機材料の精製装置が備える第二内筒体67の斜視図が示され、図9には、第二内筒体67内部に配置される第三筒体72の斜視図が示されている。
第二内筒体67は、第一実施形態の第二内筒体61と、形状はほぼ同様であるが、第二内筒体67は、二つ割りに分割可能に形成されている点で相違する。
捕集面積拡大部材としての第三筒体72は、第一実施形態の第三筒体70と、形状はほぼ同じであるが、第三筒体72は、二つ割りに分割可能に形成されている点で相違する。
その他の点においては、第一実施形態の精製装置1とほぼ同様であるため、説明を省略又は簡略する。
FIG. 8 shows a perspective view of the second inner cylinder 67 provided in the organic material refining device according to the second embodiment, and FIG. 9 shows a third cylinder arranged inside the second inner cylinder 67. A perspective view of the body 72 is shown.
The second inner cylinder 67 is substantially the same in shape as the second inner cylinder 61 of the first embodiment, but the second inner cylinder 67 is different in that it can be divided into two parts. .
The third cylinder 72 as the collection area expanding member has substantially the same shape as the third cylinder 70 of the first embodiment, but the third cylinder 72 is formed so as to be divided into two. It is different in point.
The other points are almost the same as those of the purification apparatus 1 of the first embodiment, and thus the description is omitted or simplified.

図8に示すように、円筒状の第二内筒体67は、軸方向に沿って二つに分割された半円体671と半円体672とがヒンジ等の連結具673で連結されている。二つの半円体671,672を組み合わせての円筒状にしたときには、連結具673は、第二内筒体67の外面に位置する。
図9に示すように、円筒状の第三筒体72も、同様に、軸方向に沿って二つに分割された半円体721と半円体722とがヒンジ等の連結具723で連結されている。二つの半円体721,722を組み合わせて円筒状にしたときには、連結具723は、第三筒体72の内面に位置する。リブ711は、半円体721,722に対してビス等によって着脱可能に取り付けられている
As shown in FIG. 8, the cylindrical second inner cylindrical body 67 includes a semicircular body 671 and a semicircular body 672 that are divided into two along the axial direction and are connected by a connecting tool 673 such as a hinge. Yes. When the two semicircular bodies 671 and 672 are combined into a cylindrical shape, the connector 673 is positioned on the outer surface of the second inner cylindrical body 67.
As shown in FIG. 9, the cylindrical third cylindrical body 72 is similarly connected to a semicircular body 721 and a semicircular body 722 that are divided into two along the axial direction by a connecting tool 723 such as a hinge. Has been. When the two semicircular bodies 721 and 722 are combined into a cylindrical shape, the connector 723 is positioned on the inner surface of the third cylindrical body 72. The rib 711 is detachably attached to the semicircular bodies 721 and 722 by screws or the like .

有機EL素子用材料を精製する際は、二つの半円体671,672を組み合わせて第二内筒体67とし、二つの半円体721,722を組み合わせて第三筒体72とし、第二内筒体67内部に第三筒体72を挿入し、リブ711の端部を第二内筒体67の内面に図示しないビス等で固定する。   When refining the organic EL element material, the two semicircular bodies 671, 672 are combined to form the second inner cylindrical body 67, the two semicircular bodies 721, 722 are combined to form the third cylindrical body 72, and the second The third cylinder 72 is inserted into the inner cylinder 67 and the end of the rib 711 is fixed to the inner surface of the second inner cylinder 67 with a screw (not shown).

第二実施形態に係る有機EL素子用材料の精製装置によれば、第一実施形態と同様の効果を奏する他に、次のような効果を奏する。
第二実施形態に係る有機EL素子用材料の精製装置によれば、第二内筒体67および第三筒体72は、それぞれに分割することが可能なように、二つ割り可能に形成されている。そのため、捕集面が筒状体のままである場合に比べて、有機EL素子用材料の回収が容易になる。
また、リブ711は、半円体721,722に対してビス等によって着脱可能に取り付けられているため、有機EL素子用材料の回収がさらに容易になる。
According to the organic EL element material refining device according to the second embodiment, in addition to the same effects as those of the first embodiment, the following effects can be obtained.
According to the organic EL element material refining device according to the second embodiment, the second inner cylindrical body 67 and the third cylindrical body 72 are formed so as to be split into two so that they can be divided into each. . Therefore, it becomes easier to collect the organic EL element material as compared with the case where the collection surface remains a cylindrical body.
Further, since the rib 711 is detachably attached to the semicircular bodies 721 and 722 by screws or the like, the recovery of the organic EL element material is further facilitated.

<第三実施形態>
次に、本発明の第三実施形態に係る有機EL素子用材料の精製装置1Aについて説明する。尚、以下の説明では、既に説明した部分と同一の部分については、同一符号を付してその説明を省略又は簡略する。
<Third embodiment>
Next, an organic EL element material purification apparatus 1A according to a third embodiment of the present invention will be described. In the following description, the same parts as those already described are denoted by the same reference numerals, and the description thereof is omitted or simplified.

図10には、第三実施形態に係る有機材料の精製装置の断面概略図が示されている。第三実施形態に係る有機EL素子用材料の精製装置1Aは、第二内筒体61内部に配置される捕集面積拡大部材の形状が、上記実施形態と異なる。それ以外の点については、ほぼ同様であるため、説明を省略又は簡略する。   FIG. 10 is a schematic cross-sectional view of an organic material purification apparatus according to the third embodiment. The refiner | purifier 1A of the organic EL element material which concerns on 3rd embodiment differs in the shape of the collection area expansion member arrange | positioned inside the 2nd inner cylinder 61 from the said embodiment. Since the other points are almost the same, the description is omitted or simplified.

精製装置1Aにて用いられる捕集面積拡大部材は、第二内筒体61の軸方向に沿って延びる複数の板状部材81を格子状に組み合わせた格子部材80である。
図11には、前記第三実施形態に係る精製装置の捕集器6の断面概略図が示されている。
図11に示されているように、格子部材80は、略水平方向にわたって配置された複数の板状部材81と、略垂直方向にわたって配置された複数の板状部材81とが格子状に組み合わされて形成されている。各板状部材81の端部は、第二内筒体61の内面に当接する。
格子部材80によっても、第二内筒体61の内部の有機EL素子用材料の流路は、軸方向に延びる複数の分割流路とすることができる。また、捕集室R1,R2,R3も、格子部材80によって、多数の小部屋(ハニカム状)に区切られる。
なお、上述のとおり、第二内筒体61が、3つの捕集筒体に分割可能であることに伴い、格子部材80も、捕集筒体61A,61B,61Cとともに3つの格子部材に分割可能に形成されている。なお、本実施形態では、格子部材80の上流側には、第一実施形態のような封止筒体65を取り付けず、第二内筒体61の断面中央部を流通する気化した有機EL素子用材料を格子部材80の多数の小部屋内に導入させる。
The collection area expanding member used in the purification apparatus 1A is a lattice member 80 in which a plurality of plate-like members 81 extending in the axial direction of the second inner cylinder 61 are combined in a lattice shape.
FIG. 11 is a schematic cross-sectional view of the collector 6 of the purification apparatus according to the third embodiment.
As shown in FIG. 11, the lattice member 80 includes a plurality of plate-like members 81 arranged in a substantially horizontal direction and a plurality of plate-like members 81 arranged in a substantially vertical direction combined in a lattice shape. Is formed. The end of each plate-like member 81 is in contact with the inner surface of the second inner cylinder 61.
Also by the lattice member 80, the flow path of the organic EL element material inside the second inner cylinder 61 can be a plurality of divided flow paths extending in the axial direction. The collection chambers R1, R2, and R3 are also divided into a large number of small chambers (honeycomb shapes) by the lattice member 80.
As described above, since the second inner cylinder 61 can be divided into three collection cylinders, the grid member 80 is also divided into three grid members together with the collection cylinders 61A, 61B, 61C. It is made possible. In the present embodiment, the vaporized organic EL element that circulates in the central portion of the cross section of the second inner cylinder 61 without attaching the sealing cylinder 65 as in the first embodiment to the upstream side of the lattice member 80. The material is introduced into a number of small chambers of the lattice member 80.

第三実施形態に係る有機EL素子用材料の精製装置1Aによれば、次のような効果を奏する。
精製装置1Aによれば、捕集面積拡大部材としての格子部材80が、第二内筒体61の内部に配置されている。そのため、第二内筒体61の内部の有機EL素子用材料の流路は、軸方向に延びる複数の分割流路とすることができる。その結果、有機EL素子用材料は、第二内筒体61の内面と格子部材80外面との間の流路や、格子部材80の板状部材81同士で囲まれた流路を流れ、第二内筒体61の内面や板状部材81表面で効率良く捕集される。また、第二内筒体61の軸方向に向かって延びる当該流路を通過するので、有機EL素子用材料を短時間で効率良く下流側へ流通させることができる。
ゆえに、精製装置1によれば、第二内筒体61の内面だけでなく、格子部材80の表面においても有機EL素子用材料を捕集でき、精製効率を向上させることができる。
According to the organic EL element material refining device 1A according to the third embodiment, the following effects can be obtained.
According to the purification apparatus 1 </ b> A, the lattice member 80 as a collection area expanding member is disposed inside the second inner cylindrical body 61. Therefore, the flow path of the organic EL element material inside the second inner cylindrical body 61 can be a plurality of divided flow paths extending in the axial direction. As a result, the organic EL element material flows through the flow path between the inner surface of the second inner cylinder 61 and the outer surface of the lattice member 80 or the flow path surrounded by the plate-like members 81 of the lattice member 80, It is efficiently collected on the inner surface of the inner cylinder 61 and the surface of the plate-like member 81. Moreover, since the said flow path extended toward the axial direction of the 2nd inner cylinder 61 passes, the organic EL element material can be distribute | circulated efficiently downstream in a short time.
Therefore, according to the refining device 1, the organic EL element material can be collected not only on the inner surface of the second inner cylinder 61 but also on the surface of the lattice member 80, and the refining efficiency can be improved.

また、精製装置1Aによれば、格子部材80は、板状部材81を組み合わせて構成されているため、有機EL素子用材料の精製後、格子部材80を分解して複数の板状部材81としてから回収すれば、回収作業の効率化を図ることができる。   Further, according to the refining device 1A, the lattice member 80 is configured by combining the plate-like members 81. Therefore, after refining the organic EL element material, the lattice member 80 is disassembled into a plurality of plate-like members 81. If it is recovered from the above, the efficiency of the recovery work can be improved.

<実施形態の変形>
なお、本発明は、上述した実施形態に限定されるものではなく、本発明の目的を達成できる範囲で、以下に示される変形等をも含む。
<Modification of Embodiment>
In addition, this invention is not limited to embodiment mentioned above, In the range which can achieve the objective of this invention, the deformation | transformation etc. which are shown below are included.

捕集面積拡大部材としては、上記実施形態で説明した態様に限定されない。
例えば、上記第三実施形態で説明したような格子部材80の構成を次にように変更しても良い。図12には、実施形態の変形例に係る捕集面積拡大部材としての格子部材80Aの形状を説明する斜視図が示されている。
図12に示すように、格子部材80Aは、略垂直方向にわたって配置された複数の縦板部材82で構成される領域S1と、略水平方向にわたって配置された複数の横板部材83とで構成される領域S2を、第二内筒体61の軸方向において交互に設けた形状としても良い。このような格子部材80Aを第二内筒体61の内部に配置して、第二内筒体61の上流側から下流側に向かって見ると、図13に示す断面図のように、格子状に縦板部材82と横板部材83とが配置されている。
格子部材80Aを第二内筒体61の内部に配置すると、有機EL素子用材料は、第二内筒体61と縦板部材82との間、または縦板部材82同士の間を流通し、領域S1を通過し、その後、領域S2へと流れ込む。領域S2では、有機EL素子用材料は、第二内筒体61と横板部材83との間、または横板部材83同士の間を流通し、領域S2を通過し、その後、次に設けられた領域S1へと流れ込む。そのため、有機EL素子用材料は、領域S1から領域S2へと流れ込む時に蛇行する。その結果、有機EL素子用材料を第二内筒体61の内面や格子部材80Aの表面により接触し易くすることができる。ゆえに、格子部材80Aを配置することで、精製効率を向上させることができる。また、格子部材80Aも縦板部材82と横板部材83とで分割可能に組み立て、精製後に分解して有機EL素子用材料を回収することが好ましい。
As a collection area expansion member, it is not limited to the aspect demonstrated by the said embodiment.
For example, the configuration of the lattice member 80 as described in the third embodiment may be changed as follows. FIG. 12 is a perspective view illustrating the shape of a lattice member 80A as a collection area expanding member according to a modification of the embodiment.
As shown in FIG. 12, the lattice member 80A includes a region S1 composed of a plurality of vertical plate members 82 arranged in a substantially vertical direction and a plurality of horizontal plate members 83 arranged in a substantially horizontal direction. It is good also as the shape which provided alternately area | region S2 in the axial direction of the 2nd inner cylinder 61. As shown in FIG. When such a lattice member 80A is arranged inside the second inner cylinder 61 and viewed from the upstream side to the downstream side of the second inner cylinder 61, as shown in the cross-sectional view of FIG. A vertical plate member 82 and a horizontal plate member 83 are arranged on the upper side.
When the lattice member 80A is disposed inside the second inner cylinder 61, the organic EL element material flows between the second inner cylinder 61 and the vertical plate member 82 or between the vertical plate members 82, It passes through the area S1, and then flows into the area S2. In the region S2, the organic EL element material flows between the second inner cylinder 61 and the horizontal plate member 83 or between the horizontal plate members 83, passes through the region S2, and is then provided. Flow into the area S1. Therefore, the organic EL element material meanders when it flows from the region S1 to the region S2. As a result, the organic EL element material can be more easily brought into contact with the inner surface of the second inner cylinder 61 and the surface of the lattice member 80A. Therefore, the purification efficiency can be improved by arranging the lattice member 80A. Moreover, it is preferable that the lattice member 80A is also assembled so as to be divided by the vertical plate member 82 and the horizontal plate member 83, and is decomposed after purification to recover the organic EL element material.

捕集面積拡大部材としての第三筒体は、上記実施形態で説明したような円筒状体に限定されない。その他、断面楕円状の筒体、断面多角形(三角形、四角形、五角形、八角形等)などの形状とすることができる。
また、捕集面積拡大部材としては、図14に示すように、第二内筒体61の軸方向に沿って延びる板状部材90を交差させた形状でもよい。図14には、第二内筒体61内部の上下方向にわたって配置された縦板部材91と、左右方向にわたって配置された横板部材92とが十字状に交差している板状部材90が示されている。このような板状部材79によっても、有機EL素子用材料の流路を4つの分割流路とすることができるので、上述と同様、精製効率を向上させることができる。
The third cylinder as the collection area expanding member is not limited to the cylindrical body as described in the above embodiment. In addition, it can be a shape such as a cylindrical body having an elliptical cross section, a polygonal cross section (triangle, quadrangle, pentagon, octagon, etc.).
Moreover, as a collection area expansion member, as shown in FIG. 14, the shape which crossed the plate-shaped member 90 extended along the axial direction of the 2nd inner cylinder 61 may be sufficient. FIG. 14 shows a plate-like member 90 in which a vertical plate member 91 arranged in the vertical direction inside the second inner cylinder 61 and a horizontal plate member 92 arranged in the horizontal direction intersect in a cross shape. Has been. Also with such a plate-like member 79, the flow path of the organic EL element material can be made into four divided flow paths, so that the purification efficiency can be improved as described above.

上記実施形態では、内筒体21および外筒体22が、円筒状の場合を例に挙げて説明したが、例えば、箱状、筒状、タンク型、立方体型等の任意の形状が挙げられる。また、内筒体21および外筒体22の断面形状としては円形、四角形、半円形等の形状を挙げることができる。また、その断面形状は、一定であってもよく、また、部分的に断面形状が異なっていても良い。また、内筒体21と外筒体22とが同じ断面形状でなくても良い。   In the above-described embodiment, the inner cylindrical body 21 and the outer cylindrical body 22 have been described by taking a cylindrical shape as an example. However, for example, any shape such as a box shape, a cylindrical shape, a tank shape, a cubic shape, and the like can be given. . In addition, examples of the cross-sectional shapes of the inner cylinder body 21 and the outer cylinder body 22 include shapes such as a circle, a quadrangle, and a semicircle. Moreover, the cross-sectional shape may be constant or the cross-sectional shape may be partially different. Further, the inner cylinder 21 and the outer cylinder 22 do not have to have the same cross-sectional shape.

また、上記実施形態では、第二内筒体61を、3つの捕集筒体で構成する態様を例に挙げて説明したが、このような態様に限定されない。例えば、一体に形成された第二内筒体を用いても良い。
また、上記実施形態では、装置本体2が外筒体22の内部に内筒体21を収容させた構造を例に挙げて説明したが、このような態様に限定されず、外筒体22を設けずに内筒体21の内部に捕集面積拡大部材を配置した態様としても良い。
Moreover, in the said embodiment, although the example which comprises the 2nd inner cylinder 61 by three collection cylinders was mentioned as an example, it was not limited to such an aspect. For example, an integrally formed second inner cylinder may be used.
In the above embodiment, the structure in which the apparatus main body 2 houses the inner cylindrical body 21 inside the outer cylindrical body 22 has been described as an example. However, the present invention is not limited to such a mode. It is good also as an aspect which has arrange | positioned the collection area expansion member inside the inner cylinder 21 without providing.

上記第二実施形態では、第二内筒体67および第三筒体72は、二つ割り可能に形成されているが、これに限定されず、さらに細かく分割可能に形成されていても良い   In the second embodiment, the second inner cylindrical body 67 and the third cylindrical body 72 are formed so as to be split into two, but are not limited thereto, and may be formed so as to be further finely divided.

上記実施形態では、有機EL素子用材料に対して不活性な材質として、主に石英ガラスを挙げて説明したが、これに限定されるものではない。例えば、不活性金属として、ステンレス、タンタル、タングステン、モリブデン、チタンなどを用いることができ、セラミックスとして、石英、ジルコニア、アルミナ、窒化ボロン、窒化ケイ素などを用いることができる。その他、カーボン、テフロン(登録商標)等も用いることができる。
また、装置本体の材質は、全体が有機EL素子用材料に対して不活性な材質である場合に限定されない。有機EL素子用材料が接触する部位について当該不活性な材質で構成し、それ以外の部位については、その他の材質で構成することもできる。
In the above-described embodiment, quartz glass is mainly described as an inactive material with respect to the organic EL element material. However, the present invention is not limited to this. For example, stainless steel, tantalum, tungsten, molybdenum, titanium, or the like can be used as the inert metal, and quartz, zirconia, alumina, boron nitride, silicon nitride, or the like can be used as the ceramic. In addition, carbon, Teflon (registered trademark), or the like can be used.
Further, the material of the apparatus main body is not limited to the case where the whole is an inactive material with respect to the organic EL element material. It can also be comprised with the said inert material about the site | part which an organic EL element material contacts, and it may also comprise with another material about the other site | part.

気化器5及び捕集器6を加熱するための加熱手段や加熱方法は、上記実施形態で説明したものに限定されない。加熱方法としては、抵抗加熱法(金属系、非金属系等)、光加熱法(赤外線加熱法、アーク輻射加熱、レーザー輻射加熱等)、誘導加熱法、プラズマ加熱法、アーク加熱法、フレーム加熱法等を挙げることができる。例えば、誘導加熱法で加熱する場合には、気化器及び捕集器の材質をステンレス等の電磁誘導により発熱する材質で構成する。   The heating means and heating method for heating the vaporizer 5 and the collector 6 are not limited to those described in the above embodiment. As the heating method, resistance heating method (metal type, non-metal type, etc.), light heating method (infrared heating method, arc radiation heating, laser radiation heating, etc.), induction heating method, plasma heating method, arc heating method, flame heating The law etc. can be mentioned. For example, when heating by the induction heating method, the vaporizer and the collector are made of a material that generates heat by electromagnetic induction, such as stainless steel.

上記実施形態では、捕集器6の第二内筒体61が3つの捕集室R1,R2,R3に分かれている例を挙げて説明したが、これに限定されない。装置本体の大きさにもよるが、捕集室の数を増やし、より多段階の温度設定で捕集することで、より高純度の有機EL素子用材料を得易い。   In the said embodiment, although the 2nd inner cylinder 61 of the collector 6 demonstrated and demonstrated the example divided into three collection chamber R1, R2, R3, it is not limited to this. Although it depends on the size of the apparatus main body, it is easy to obtain a higher-purity organic EL element material by increasing the number of collection chambers and collecting at a higher temperature setting.

捕集器6の各捕集室R1,R2,R3に対する加熱温度の設定は、上記実施形態で説明したものに限定されない。   The setting of the heating temperature for each of the collection chambers R1, R2, and R3 of the collector 6 is not limited to that described in the above embodiment.

上記実施形態では、収容部54に粉末状の有機EL素子用材料を収容し、これを気化させて精製したが、収容部54に液体状の材料を収容し、これを気化させて精製してもよい。
本発明の精製装置にて精製される有機材料は、有機EL素子用材料に限定されない。また、本発明の精製装置にて精製された有機材料を、繰り返し精製して、さらに純度を高めても良い。
In the above-described embodiment, the powdery organic EL element material is accommodated in the accommodating portion 54 and is purified by vaporization. However, the liquid material is accommodated in the accommodating portion 54 and is purified by vaporization. Also good.
The organic material purified by the purification apparatus of the present invention is not limited to the organic EL element material. In addition, the organic material purified by the purification apparatus of the present invention may be repeatedly purified to further increase the purity.

本発明は、有機EL素子用材料などの有機材料の精製に利用できる。   The present invention can be used for refining organic materials such as materials for organic EL devices.

1…有機材料の精製装置
3…真空ポンプ(排気装置)
5…気化器
51…第一内筒体(第一筒体)
53…加熱ヒータ
6…捕集器
61…第二内筒体(第二筒体)
63…温度調整ヒータ
70…第三筒体(捕集面積拡大部材)
711,712…リブ
80…格子部材(捕集面積拡大部材)
R1,R2,R3…捕集室
1 ... Organic material purification equipment 3 ... Vacuum pump (exhaust device)
5 ... Vaporizer 51 ... First inner cylinder (first cylinder)
53 ... Heater 6 ... Collector 61 ... Second inner cylinder (second cylinder)
63 ... Temperature adjusting heater 70 ... Third cylinder (collecting area expanding member)
711, 712 ... rib 80 ... lattice member (collecting area expanding member)
R1, R2, R3 ... Collection room

Claims (11)

内部に有機材料が供給される第一筒体、及びこの第一筒体の外側に配置され、供給された有機材料を気化させる加熱ヒータを備えた気化器と、
前記気化器の前記第一筒体と連通する第二筒体、及びこの第二筒体の外側に配置され、前記第二筒体の温度を調整する温度調整ヒータを備え、前記気化器で気化させた気体状の有機材料を前記第二筒体の内面で捕集する捕集器と、
前記第二筒体の内部に配置され、前記第二筒体の軸方向に沿って延びる面を有し、前記気体状の有機材料との接触面積を増加させる捕集面積拡大部材と、
前記捕集器の下流側端部に接続された排気装置と、を備え
前記捕集面積拡大部材は、筒状の第三筒体であり、
前記第三筒体の軸方向は、前記第二筒体の軸方向に沿っており、
前記第三筒体の外面には、前記第三筒体の軸方向にわたって延びる複数のリブが設けられ、
前記複数のリブは、前記第三筒体の外面から前記第二筒体の内面へ向かって突出する方向が、前記第三筒体の上流側から下流側に向かう途中で異なるように設けられている
ことを特徴とする有機材料の精製装置。
A vaporizer including a first cylinder to which an organic material is supplied, and a heater disposed on the outside of the first cylinder to vaporize the supplied organic material;
A second cylinder communicating with the first cylinder of the vaporizer; and a temperature adjusting heater disposed outside the second cylinder for adjusting the temperature of the second cylinder; vaporizing by the vaporizer A collector for collecting the gaseous organic material on the inner surface of the second cylinder;
A collection area expanding member disposed inside the second cylinder, having a surface extending along the axial direction of the second cylinder, and increasing a contact area with the gaseous organic material;
An exhaust device connected to the downstream end of the collector , and
The collection area expanding member is a cylindrical third cylinder,
The axial direction of the third cylinder is along the axial direction of the second cylinder,
A plurality of ribs extending over the axial direction of the third cylinder are provided on the outer surface of the third cylinder,
The plurality of ribs are provided such that a direction protruding from the outer surface of the third cylinder toward the inner surface of the second cylinder is different on the way from the upstream side to the downstream side of the third cylinder. purification device of an organic material characterized in that there.
内部に有機材料が供給される第一筒体、及びこの第一筒体の外側に配置され、供給された有機材料を気化させる加熱ヒータを備えた気化器と、  A vaporizer including a first cylinder to which an organic material is supplied, and a heater disposed on the outside of the first cylinder to vaporize the supplied organic material;
前記気化器の前記第一筒体と連通する第二筒体、及びこの第二筒体の外側に配置され、前記第二筒体の温度を調整する温度調整ヒータを備え、前記気化器で気化させた気体状の有機材料を前記第二筒体の内面で捕集する捕集器と、  A second cylinder communicating with the first cylinder of the vaporizer; and a temperature adjusting heater disposed outside the second cylinder for adjusting the temperature of the second cylinder; vaporizing by the vaporizer A collector for collecting the gaseous organic material on the inner surface of the second cylinder;
前記第二筒体の内部に配置され、前記第二筒体の軸方向に沿って延びる面を有し、前記気体状の有機材料との接触面積を増加させる捕集面積拡大部材と、  A collection area expanding member disposed inside the second cylinder, having a surface extending along the axial direction of the second cylinder, and increasing a contact area with the gaseous organic material;
前記捕集器の下流側端部に接続された排気装置と、を備え、  An exhaust device connected to the downstream end of the collector, and
前記捕集面積拡大部材は、筒状の第三筒体であり、  The collection area expanding member is a cylindrical third cylinder,
前記第三筒体の軸方向は、前記第二筒体の軸方向に沿っており、  The axial direction of the third cylinder is along the axial direction of the second cylinder,
前記第三筒体の両端の開口が封止されている  Openings at both ends of the third cylinder are sealed
ことを特徴とする有機材料の精製装置。  An organic material refining device.
内部に有機材料が供給される第一筒体、及びこの第一筒体の外側に配置され、供給された有機材料を気化させる加熱ヒータを備えた気化器と、  A vaporizer including a first cylinder to which an organic material is supplied, and a heater disposed on the outside of the first cylinder to vaporize the supplied organic material;
前記気化器の前記第一筒体と連通する第二筒体、及びこの第二筒体の外側に配置され、前記第二筒体の温度を調整する温度調整ヒータを備え、前記気化器で気化させた気体状の有機材料を前記第二筒体の内面で捕集する捕集器と、  A second cylinder communicating with the first cylinder of the vaporizer; and a temperature adjusting heater disposed outside the second cylinder for adjusting the temperature of the second cylinder; vaporizing by the vaporizer A collector for collecting the gaseous organic material on the inner surface of the second cylinder;
前記第二筒体の内部に配置され、前記第二筒体の軸方向に沿って延びる面を有し、前記気体状の有機材料との接触面積を増加させる捕集面積拡大部材と、  A collection area expanding member disposed inside the second cylinder, having a surface extending along the axial direction of the second cylinder, and increasing a contact area with the gaseous organic material;
前記捕集器の下流側端部に接続された排気装置と、  An exhaust device connected to the downstream end of the collector;
前記第一筒体および前記第二筒体を内部に収容する外筒体と、を備え、An outer cylinder that houses the first cylinder and the second cylinder,
前記捕集面積拡大部材は、筒状の第三筒体であり、  The collection area expanding member is a cylindrical third cylinder,
前記第三筒体の軸方向は、前記第二筒体の軸方向に沿っており、  The axial direction of the third cylinder is along the axial direction of the second cylinder,
前記加熱ヒータは、前記第一筒体および前記外筒体の外側に配置され、  The heater is disposed outside the first cylinder and the outer cylinder,
前記温度調整ヒータは、前記第二筒体および前記外筒体の外側に配置されている  The temperature adjusting heater is disposed outside the second cylinder and the outer cylinder.
ことを特徴とする有機材料の精製装置。  An organic material refining device.
請求項1または請求項3に記載の有機材料の精製装置において、
前記第三筒体の両端の開口が封止されている
ことを特徴とする有機材料の精製装置。
In the refiner | purifier of the organic material of Claim 1 or Claim 3,
The organic material refining device, wherein openings at both ends of the third cylindrical body are sealed.
請求項または請求項に記載の有機材料の精製装置において、
前記第三筒体の外面には、前記第三筒体の軸方向にわたって延びる複数のリブが設けられている
ことを特徴とする有機材料の精製装置。
In the refiner | purifier of the organic material of Claim 2 or Claim 3 ,
A plurality of ribs extending in the axial direction of the third cylinder are provided on the outer surface of the third cylinder.
請求項5に記載の有機材料の精製装置において、
前記複数のリブは、前記第三筒体の外面から前記第二筒体の内面へ向かって突出する方向が、前記第三筒体の上流側から下流側に向かう途中で異なるように設けられている
ことを特徴とする有機材料の精製装置。
In the refiner | purifier of the organic material of Claim 5,
The plurality of ribs are provided such that a direction protruding from the outer surface of the third cylinder toward the inner surface of the second cylinder is different on the way from the upstream side to the downstream side of the third cylinder. An organic material refining device characterized by that.
請求項1または請求項に記載の有機材料の精製装置において、
前記第一筒体および前記第二筒体を内部に収容する外筒体を備え、
前記加熱ヒータは、前記第一筒体および前記外筒体の外側に配置され、
前記温度調整ヒータは、前記第二筒体および前記外筒体の外側に配置されている
ことを特徴とする有機材料の精製装置。
In the refiner | purifier of the organic material of Claim 1 or Claim 2 ,
An outer cylinder that houses the first cylinder and the second cylinder;
The heater is disposed outside the first cylinder and the outer cylinder,
The said temperature control heater is arrange | positioned on the outer side of said 2nd cylinder and the said outer cylinder. The refiner | purifier of the organic material characterized by the above-mentioned.
請求項1から請求項7までのいずれか一項に記載の有機材料の精製装置において、
前記捕集面積拡大部材は、前記第二筒体の断面中央部に配置されている
ことを特徴とする有機材料の精製装置。
In the refiner | purifier of the organic material as described in any one of Claim 1- Claim 7 ,
The said collection area expansion member is arrange | positioned in the cross-sectional center part of said 2nd cylinder. The refiner | purifier of the organic material characterized by the above-mentioned.
請求項から請求項までのいずれか一項に記載の有機材料の精製装置において、
前記捕集面積拡大部材は、分割可能に形成されている
ことを特徴とする有機材料の精製装置。
In the refiner | purifier of the organic material as described in any one of Claim 1- Claim 8 ,
The said collection area expansion member is formed so that division | segmentation is possible. The refiner | purifier of the organic material characterized by the above-mentioned.
請求項1から請求項までのいずれか一項に記載の有機材料の精製装置において、
前記第二筒体は、分割可能に形成されている
ことを特徴とする有機材料の精製装置。
In the refiner | purifier of the organic material as described in any one of Claim 1- Claim 9 ,
The said 2nd cylinder is formed so that division | segmentation is possible. The refiner | purifier of the organic material characterized by the above-mentioned.
請求項1から請求項10までのいずれか一項に記載の有機材料の精製装置において、
前記第二筒体および前記捕集面積拡大部材が、不活性金属又はセラミックスで形成され
ている
ことを特徴とする有機材料の精製装置。
In the refiner | purifier of the organic material as described in any one of Claim 1- Claim 10 ,
The said 2nd cylinder and the said collection area expansion member are formed with the inert metal or ceramics. The refiner | purifier of the organic material characterized by the above-mentioned.
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