JP6056079B2 - Heat treatment equipment - Google Patents

Description

  The present invention relates to a heat treatment apparatus that heat-treats a workpiece.

  Electronic components such as a crystal resonator are manufactured by seam welding a lid (hereinafter, package and lid are collectively referred to as a workpiece) to the opening of the package. In the process, the workpiece is baked (heat treated) in a vacuum atmosphere (substantially vacuum) in a baking furnace (heat treatment apparatus) to remove moisture and the like (for example, see Patent Document 1). Thus, the quality of the electronic component is improved by baking the workpiece.

Japanese Patent No. 4450529

  Electronic parts tend to be lower in price, and as a result, it is desired to shorten the time required for manufacturing. However, baking in a vacuum atmosphere takes time because the heat transfer is poor. In order to suppress this effect, batch processing is performed on a large amount of workpieces. In the case of batch processing, there is a problem that energy is wasted because the temperature inside the baking furnace changes each time.

  This invention is made | formed in view of the said subject, and it aims at providing the heat processing apparatus which implement | achieved energy saving.

  The above-mentioned object is achieved by the following means based on the earnest research of the present inventors.

  (1) The present invention is a heat treatment apparatus that heat-treats a plurality of workpieces while continuously conveying the workpiece, and has an inlet through which the workpiece is carried in and an outlet through which the workpiece is carried out. A chamber for maintaining the inside of the chamber in a vacuum atmosphere, transport means for transporting the work from the inlet to the outlet in the chamber, and a plurality of blocks arranged in the chamber along the transport direction of the work. A plurality of heating blocks that heat the workpiece while the plurality of blocks are maintained at a constant temperature in time, and the workpiece is heated by passing by the plurality of heating blocks This is a heat treatment apparatus.

  (2) The present invention also includes one or a plurality of cooling blocks that are provided in the chamber and closer to the outlet than the heating block closest to the outlet, and cool the workpiece. The heat treatment apparatus according to (1) above, wherein

  According to the present invention, it is possible to achieve an excellent effect that energy saving can be realized.

It is a top view which shows the structure of the heat processing apparatus which concerns on embodiment of this invention. It is a left view which shows the structure in a vacuum chamber. It is a rear view which shows the structure in a vacuum chamber. It is a right view which shows the structure in a vacuum chamber.

  Hereinafter, an example of an embodiment of the present invention will be described in detail with reference to the drawings. In the following description, directions are described with reference to the X, Y, and Z axes shown in the drawings. The X and Y axes are horizontal axes perpendicular to each other, and the Z axis is a vertical axis perpendicular to the X and Y axes. In each of the drawings, illustration of some components is omitted as appropriate, and the drawings are simplified.

  First, the structure of the heat processing apparatus 1 is demonstrated using FIGS. FIG. 1 is a plan view showing a configuration of a heat treatment apparatus 1 according to an embodiment of the present invention. FIG. 2 is a left side view showing the configuration inside the vacuum chamber 100. FIG. 3 is a rear view showing the configuration inside the vacuum chamber 100. FIG. 4 is a right side view showing the configuration inside the vacuum chamber 100.

  A heat treatment apparatus 1 shown in FIG. 1 is installed in a line for manufacturing electronic components, and is used when heat-treating a workpiece 10. The heat treatment apparatus 1 performs heat treatment on the workpiece 10 while conveying the workpiece 10. The heat treatment by the heat treatment apparatus 1 also serves as baking or annealing.

  The workpieces 10 are arranged on the workpiece tray 20 with a lid serving as a lid temporarily attached to the opening of the package. On the work tray 20, a plurality of recesses for accommodating the work 10 are formed in a matrix in the X and Y axis directions, and the plurality of works 10 are arranged in a matrix in the X and Y axis directions.

  Specifically, the heat treatment apparatus 1 includes a vacuum chamber (chamber) 100 that keeps the inside thereof in a vacuum atmosphere, a plurality of heating blocks 200 provided in the vacuum chamber 100, and one provided in the vacuum chamber 100. Alternatively, a plurality of cooling blocks 300, a preparation chamber (load lock) 400 arranged in parallel on the upstream side of the vacuum chamber 100, an extraction chamber (unload lock) 500 arranged in parallel on the downstream side of the vacuum chamber 100, and a vacuum An upstream transfer unit 600 that feeds the workpiece 10 into the chamber 100, an in-chamber transfer unit (transfer means) 700 that transfers the workpiece 10 in the vacuum chamber 100, a downstream transfer unit 800 that sends the workpiece 10 out of the vacuum chamber 100, A control unit (not shown), and the like.

  Each part of these heat processing apparatuses 1 is controlled centrally by the control unit. The control unit includes a CPU, a RAM, a ROM, and the like, and executes various controls. The CPU is a so-called central processing unit, and implements various functions (for example, a function for counting the number of weldings) by executing various programs. The RAM is used as a work area for the CPU. The ROM stores a program executed by the CPU.

  The vacuum chamber 100 includes a chamber body 110 that is a substantially hexahedral box-shaped container, a vacuum pump 120, an air release valve 130, and the like. The chamber main body 110 has a first opening 112 communicating with the preparation chamber 400 on the upstream side wall and a second opening 114 communicating with the take-out chamber 500 on the downstream side wall. The first opening 112 is opened and closed by an upstream partition door 415 of the preparation chamber 400 described later. The 2nd opening 114 is opened and closed by the downstream partition door 515 of the extraction chamber 500 mentioned later. The vacuum chamber 100 in a state where the first opening 112 and the second opening 114 are closed controls the air pressure in the chamber body 110 to an arbitrary pressure from atmospheric pressure to a vacuum atmosphere by the operation of the vacuum pump 120. The air release valve 130 is used during maintenance.

  The plurality of heating blocks 200 are arranged in the order of 200A, 200B, 200C, 200D, 200E, 200F, 200G, 200H, 200I, and 200J along the conveyance direction of the workpiece 10. Each of the plurality of heating blocks 200 is kept at a constant temperature (for example, a constant temperature within a range of 230 ° C. to 250 ° C.) in order to heat the workpiece 10.

  One or a plurality of cooling blocks 300 are provided closer to the second opening 114 than the heating block 200J closest to the second opening 114. Specifically, in the present embodiment, the plurality of cooling blocks 300 are arranged in the order of 300 </ b> A and 300 </ b> B along the conveyance direction of the workpiece 10. Each of the plurality of cooling blocks 300 cools the workpiece 10 by, for example, water cooling.

  The preparation chamber 400 has a function of feeding a plurality of workpieces 10 from the atmosphere to the vacuum chamber 100 while keeping the vacuum chamber 100 in a vacuum atmosphere. Specifically, the charging chamber 400 includes a charging chamber main body 410 that is a substantially hexahedral box-shaped container, a vacuum pump 420 for a charging chamber main body, an atmosphere opening valve 430 for the charging chamber main body, and the like. The charging chamber main body 410 is provided with a charging chamber main body external door 413 that is formed on the upstream side wall with an external opening 412 for a charging chamber main body that communicates with the outside, and opens and closes the external opening 412 for the charging chamber main body. . In addition, the charging chamber main body 410 is provided with a charging chamber main body communication port 414 communicating with the vacuum chamber 100 through the first opening 112 on the side wall on the vacuum chamber 100 side. An upstream charging door 415 that opens and closes is provided. The charging chamber 400 in a state where the external opening 612 for the charging chamber main body and the communication port 414 for the charging chamber main body are closed is operated by operating the vacuum pump 420 for the charging chamber main body to change the air pressure in the charging chamber main body 410 from the atmospheric pressure to the vacuum atmosphere. Control to any pressure up to. The charging chamber 400 can be configured to also serve as the vacuum pump 120 as the charging chamber main body vacuum pump 420, and the charging chamber main body vacuum pump 420 can be omitted.

  The take-out chamber 500 has a function of sending a plurality of workpieces 10 from the vacuum chamber 100 to the atmosphere while keeping the vacuum chamber 100 in a vacuum atmosphere. Specifically, the take-out chamber 500 includes a take-out chamber main body 510 that is a substantially hexahedral box-shaped container, a vacuum pump 520 for the take-out chamber main body, an air release valve 530 for the take-out chamber main body, a buffer rack 540, and the like. ing. The take-out chamber main body 510 is provided with a take-out chamber main body external door 513 that is formed on the downstream side wall with an external opening 512 for the take-out chamber main body that communicates with the outside. . The extraction chamber main body 510 is formed with an extraction chamber main body communication port 514 communicating with the vacuum chamber 100 through the second opening 114 on the side wall on the vacuum chamber 100 side. A downstream partition door 515 that opens and closes is provided. The extraction chamber 500 in a state where the external opening 512 for the extraction chamber main body and the communication port 514 for the extraction chamber main body are closed is operated by the operation of the vacuum pump 520 for the extraction chamber main body to change the air pressure in the extraction chamber main body 510 from the atmospheric pressure to the vacuum atmosphere. Control to any pressure up to. The take-out chamber 500 can also be configured to serve as the vacuum pump 120 as the take-out chamber main body vacuum pump 520, and the take-out chamber main body vacuum pump 520 can be omitted.

  The buffer rack 540 is disposed adjacent to a downstream second transport mechanism 820 described later. Specifically, the buffer rack 540 is positioned in a plurality of shelf plates (not shown) arranged above and below, an elevating mechanism (not shown) that raises and lowers the plurality of shelf plates, and the downstream second transport mechanism 820. A tray moving mechanism (not shown) that moves the work tray 20 to the shelf and moves the work tray 20 positioned on the shelf to the downstream second transport mechanism 20 is provided. The buffer rack 540 temporarily waits the workpiece 10 that has been heat-treated in the vacuum chamber 100 together with the workpiece tray 20. Thereby, the flow of the workpiece | work 10 can be adjusted according to the process condition of a post process.

  The upstream transport unit 600 includes an upstream first transport mechanism 610, an upstream second transport mechanism 620, and an upstream third transport mechanism 630, which are arranged in order from the upstream side. The upstream first transport mechanism 610 is disposed in the vicinity of the external door 413 for the preparation chamber body on the outer bottom surface of the preparation chamber body 410, and conveys the work tray 20 from the outside to the inside of the preparation chamber body 410. Specifically, the upstream first transport mechanism 610 includes a plurality of upstream first transport rollers 612 arranged continuously in the X-axis direction. The plurality of first upstream conveying rollers 612 are arranged so as to be rotatable around the Y axis, and convey the work tray 20 in the X axis direction. The upstream second transfer mechanism 620 is disposed on the inner bottom surface of the preparation chamber main body 410 and transfers the work tray 20 from the preparation chamber main body 410 toward the chamber main body 110. Specifically, the upstream second transport mechanism 620 includes a plurality of upstream second transport rollers 622 disposed continuously in the X-axis direction. Each of the plurality of second upstream-side transport rollers 622 is rotatably arranged around the Y axis, and transports the work tray 20 in the X-axis direction. The upstream third transport mechanism 630 is disposed in the vicinity of the first opening 112 on the inner bottom surface of the chamber body 110, and transports the work tray 20 upstream of the chamber body 110 when receiving the work tray 20 into the chamber body 110. Specifically, the upstream third transport mechanism 630 includes a plurality of upstream third transport rollers 632 arranged continuously in the X-axis direction. Each of the plurality of upstream third transport rollers 632 is disposed so as to be rotatable around the Y axis, and transports the work tray 20 in the X axis direction.

  The in-chamber transport unit 700 shown in FIGS. 2 to 4 includes a first in-chamber transport mechanism 710, a second in-chamber transport mechanism 720, and a third in-chamber transport mechanism 730, which are arranged from the upstream side. They are arranged in order.

  The first in-chamber transport mechanism 710 shown in FIGS. 2 (A) to 2 (D) is a pair of upper and lower chambers in the first chamber disposed above the heating blocks 200A to 200F along the Y-axis direction. A drive shaft 711, a plurality of first chamber transfer arms 712 mounted at equal intervals on the first transfer drive shaft 711 in the chamber, and a first transfer chamber in the chamber for moving the plurality of first transfer arms 712 in the chamber up and down. An arm elevating mechanism 713 and an in-chamber first transport drive mechanism 716 for moving the first transport drive shaft 711 in the chamber forward and backward are provided. The in-chamber first transport driving shaft 711 is advanced and retracted in the Y-axis direction by the in-chamber first transport driving mechanism 716, so that the plurality of first in-chamber transport arms 712 are advanced and retracted in the Y-axis direction. The plurality of first in-chamber transfer arms 712 all advance and retreat simultaneously in the Y-axis direction together with the in-chamber first transfer drive shaft 711 as the first in-chamber transfer drive shaft 711 advances and retreats in the Y-axis direction. The plurality of first in-chamber transfer arms 712 are all moved up and down simultaneously with the operation of the in-chamber first transfer arm lifting mechanism 713. The in-chamber first transfer arm raising / lowering mechanism 713 is above the heating blocks 200A to 200F and below the both sides of the in-chamber first transfer drive shaft 711 along a Y-axis direction. A first in-chamber elevating shaft 714 (shown in the figure is one in-chamber first elevating shaft 714) and a first in-chamber elevating cam 715 attached to each of the pair of first in-chamber elevating shafts 714. I have. The pair of in-chamber first elevating shafts 714 rotate around the Y axis by a power source (not shown) to rotate the in-chamber first elevating cam 715 around the Y axis. The pair of first lift cams 715 in the chamber rotate around the Y axis together with the first lift shaft 714 in the chamber by rotating the first lift shaft 714 around the Y axis. One transfer arm 712 is raised and lowered simultaneously.

  The in-chamber first transfer driving mechanism 716 includes a pair of first vacuum pipes covering one end of the pair of in-chamber first transfer driving shafts 711, and a first screw shaft disposed in parallel to the pair of first vacuum pipes. A first slider that moves in the Y-axis direction along the pair of first vacuum pipes and the first screw axis, and a first pinion and a first pinion that moves the first slider in the Y-axis direction along the first screw axis A motor, a first magnet that moves the in-chamber first transport drive shaft 711 in the Y-axis direction integrally with the first slider, and the like are provided (all omitted or not shown). The pair of first vacuum pipes and the chamber main body 110 form a vacuum atmosphere space. In the pair of first vacuum pipes, an in-chamber first transport drive shaft 711 is slidably provided. A first motor is fixed to the first slider. A first pinion that meshes with the first screw shaft is attached to the first motor. As the first pinion rotates by the power of the first motor, the first slider moves in the Y-axis direction. A first magnet is fixed to each of the first slider and the first conveyance drive shaft 711 in the chamber, and a magnetic force attracting each other is generated. By this magnetic force, the first slider moves in the Y-axis direction, so that the in-chamber first transport drive shaft 711 moves integrally in the Y-axis direction.

  As shown in FIG. 2A, the in-chamber first transfer mechanism 710 in the initial position is brought to the upstream side (right side in the drawing) with the plurality of in-chamber first transfer arms 712 lowered. It is in a state. Then, as shown in FIG. 2A to FIG. 2B, the in-chamber first transport drive shaft 711 and the plurality of in-chamber first transport arms 712 move toward the downstream (left side in the drawing). Each of the plurality of first chamber transfer arms 712 simultaneously pushes the work tray 20 to move to the adjacent heating block 200. Further, as shown in FIGS. 2B to 2C, the first in-chamber transfer arm raising / lowering mechanism 713 operates to raise the plurality of in-chamber first transfer arms 712 at the same time. Thereafter, as shown in FIGS. 2C to 2D, the in-chamber first transport drive shaft 711 and the plurality of in-chamber first transport arms 712 move toward the upstream (right side in the drawing). Return to the initial position.

  The second in-chamber transport mechanism 720 shown in FIGS. 3A and 3B has a pair of upper and lower chamber second transports disposed along the X-axis direction above the heating blocks 200F and 200G. A drive shaft 721, a second in-chamber transfer arm 722 attached to the second in-chamber transfer drive shaft 721, an in-chamber second transfer drive mechanism 723 that moves the pair of in-chamber second transfer drive shafts 721 forward and backward, It has. The in-chamber second transport drive shaft 721 is advanced and retracted in the X-axis direction by the in-chamber second transport drive mechanism 723, thereby moving the in-chamber second transport drive shaft 721 in the X-axis direction. The in-chamber second transfer arm 722 advances and retreats in the X-axis direction together with the in-chamber second transfer drive shaft 721 as the in-chamber second transfer drive shaft 721 advances and retreats in the X-axis direction.

  The in-chamber second transport driving mechanism 723 includes a pair of second vacuum pipes covering one end of the pair of in-chamber second transport driving shafts 721, and a second screw shaft disposed in parallel with the pair of second vacuum pipes. A second slider that moves in the X-axis direction along the pair of second vacuum pipes and the second screw shaft, and a second pinion and a second pinion that move the second slider in the X-axis direction along the second screw shaft A motor, a second magnet that moves the second conveyance drive shaft 721 in the chamber in the X-axis direction, and the like integrated with the second slider, and the like (all omitted or not shown). The pair of second vacuum pipes form a vacuum atmosphere space together with the chamber body 110. In the pair of second vacuum pipes, an in-chamber second transport drive shaft 721 is slidably provided. A second motor is fixed to the second slider. A second pinion that meshes with the second screw shaft is attached to the second motor. When the second pinion is rotated by the power of the second motor, the second slider moves in the X-axis direction. A second magnet is fixed to each of the second slider and the second conveyance drive shaft 721 in the chamber, and a magnetic force attracting each other is generated. Due to this magnetic force, the second slider moves in the X-axis direction, so that the in-chamber second transport drive shaft 721 moves integrally in the X-axis direction.

  As shown in FIG. 3A, the in-chamber second transfer mechanism 720 in the initial position is in a state in which the in-chamber second transfer arm 722 is moved to the upstream side (the right side in the drawing). Then, as shown in FIGS. 3A to 3B, the second in-chamber transfer drive shaft 721 and the second in-chamber transfer arm 722 move toward the downstream (left side in the drawing), so that the chamber The inner second transfer arm 722 pushes the work tray 20 to move from the heating block 200F to the heating block 200G.

  The in-chamber third transport mechanism 730 shown in FIGS. 4A to 4D is a pair of upper and lower portions disposed along the Y-axis direction above the heating blocks 200G to 200J and the cooling blocks 300A and 300B. The third transfer drive shaft 731 in the chamber, the plurality of third transfer arms 732 in the chamber attached at equal intervals to the third transfer drive shaft 731 in the chamber, and the third transfer arms 732 in the plurality of chambers are moved up and down. An in-chamber third transport arm raising / lowering mechanism 733 and a third in-chamber third transport drive mechanism 736 for moving the pair of third in-chamber third transport drive shafts 731 forward and backward. The in-chamber third transport drive shaft 731 is advanced / retracted in the Y-axis direction by the in-chamber third transport drive mechanism 736 to advance / retreat the plurality of third in-chamber transport arms 732 in the Y-axis direction. The plurality of third in-chamber transfer arms 732 simultaneously advance and retreat in the Y axis direction together with the in-chamber third transfer drive shaft 731 as the in-chamber third transfer drive shaft 731 advances and retreats in the Y axis direction. The plurality of third in-chamber transfer arms 732 are all moved up and down simultaneously with the operation of the in-chamber third transfer arm lifting mechanism 733. The in-chamber third transfer arm elevating mechanism 733 is above the heating blocks 200G to 200J and the cooling blocks 300A and 300B, and below both sides of the in-chamber third transfer drive shaft 731 along the Y-axis direction. A pair of third in-chamber elevating shafts 734 (shown in the figure is one in-chamber third elevating shaft 734) and a third in-chamber chamber attached to each of the pair of in-chamber third elevating shafts 734. Elevating cam 735. The pair of third in-chamber elevating shafts 734 are rotated around the Y axis by a power source (not shown) to rotate the in-chamber third elevating cam 735 around the Y axis. The pair of third in-chamber elevating cams 735 rotate around the Y axis together with the third in-chamber elevating shaft 734 by rotating the third in-chamber elevating shaft 734 around the Y axis. The three transfer arms 732 are moved up and down simultaneously.

  The in-chamber third transport driving mechanism 736 includes a pair of third vacuum pipes covering one end of the pair of in-chamber third transport driving shafts 731, and a third screw shaft disposed in parallel with the pair of third vacuum pipes. A third slider that moves in the Y-axis direction along the pair of third vacuum pipes and the third screw shaft, and a third pinion and a third pinion that moves the third slider in the Y-axis direction along the third screw shaft A motor, a third magnet that moves the in-chamber third transport drive shaft 731 in the Y-axis direction, and the like are integrated with the third slider (all omitted or not shown). The pair of third vacuum pipes is integrated with the chamber body 110 to form a space in a vacuum atmosphere. In the pair of third vacuum pipes, an in-chamber third transport drive shaft 731 is slidably provided. A third motor is fixed to the third slider. A third pinion that meshes with the third screw shaft is attached to the third motor. As the third pinion rotates by the power of the third motor, the third slider moves in the Y-axis direction. A third magnet is fixed to the third slider and the third transfer driving shaft 731 in the chamber, and a magnetic force attracting each other is generated. By this magnetic force, the third slider moves in the Y-axis direction, so that the in-chamber third transport drive shaft 731 moves in the Y-axis direction as a unit.

  As shown in FIG. 4A, the in-chamber third transfer mechanism 730 in the initial position is brought to the upstream side (the right side in the drawing) with the plurality of in-chamber third transfer arms 732 lowered. It is in a state. Then, as shown in FIG. 4A to FIG. 4B, the in-chamber third transport driving shaft 731 and the plurality of in-chamber third transport arms 732 move toward the downstream (left in the drawing). Each of the plurality of third transfer arms 732 in the chamber pushes the work tray 20 at the same time to move to the adjacent heating block 200 or cooling block 300. Further, as shown in FIGS. 4B to 4C, the third in-chamber transfer arm lifting mechanism 733 operates to raise the plurality of in-chamber third transfer arms 732 at the same time. Thereafter, as shown in FIGS. 4C to 4D, the in-chamber third transport driving shaft 731 and the plurality of in-chamber third transport arms 732 move toward the upstream (right side in the drawing). Return to the initial position.

  Returning to FIG. The downstream side transport unit 800 includes a downstream side first transport mechanism 810, a downstream side second transport mechanism 820, and a downstream side third transport mechanism 830, which are arranged in this order on the downstream side. The downstream first transport mechanism 810 is disposed near the second opening 114 on the inner bottom surface of the chamber body 110 and transports the work tray 20 downstream of the chamber body 110 when the work tray 20 is sent out from the chamber body 110. Specifically, the downstream first transport mechanism 810 includes a plurality of downstream first transport rollers 812 that are continuously disposed in the X-axis direction. Each of the plurality of downstream first transport rollers 812 is disposed to be rotatable around the Y axis, and transports the work tray 20 in the X axis direction. The downstream second transport mechanism 820 is disposed on the inner bottom surface of the take-out chamber body 510 and transports the work tray 20 from the inside to the outside of the take-out chamber body 510. Specifically, the downstream second transport mechanism 820 includes a plurality of downstream second transport rollers 822 that are continuously disposed in the X-axis direction. The plurality of downstream second transport rollers 822 are each disposed so as to be rotatable around the Y axis, and transport the work tray 20 in the X axis direction. The downstream third transport mechanism 830 is disposed in the vicinity of the external door 713 for the extraction chamber main body on the outer bottom surface of the extraction chamber main body 510, and conveys the work tray 20 so as to move away from the outside of the extraction chamber main body 510. Specifically, the downstream third transport mechanism 830 includes a plurality of downstream third transport rollers 832 that are continuously disposed in the X-axis direction. Each of the plurality of downstream third transport rollers 832 is rotatably arranged around the Y axis, and transports the work tray 20 in the X axis direction.

  Next, a heat treatment procedure by the heat treatment apparatus 1 will be described with reference to FIG.

  As shown in FIG. 1, the work 10 is placed on the work tray 20 in a vacuum chamber 100 maintained in a vacuum atmosphere, and sequentially on the heating blocks 200 </ b> A to 200 </ b> J and the cooling blocks 300 </ b> A and 300 </ b> B. It is conveyed to.

  As shown in FIG. 1, each of the heating blocks 200A to 200J is maintained at a constant temperature in time (for example, a constant temperature within a range of 230 ° C. to 250 ° C.), but in a vacuum atmosphere. Since there is no air convection, the temperature of the workpiece 10 conveyed over (near) them is gradually increased. In addition, the workpiece | work 10 is finally heated from 230 degreeC to about 250 degreeC, for example. Thereafter, the workpiece 10 is cooled by the cooling blocks 300A and 300B.

  As described above, since the heat treatment apparatus 1 according to the present embodiment can perform real-time processing instead of batch processing, the workpiece 10 can be sequentially heated by the heating blocks 200A to 200J. Then, the temperature of the workpiece 10 can be lowered sequentially by the cooling blocks 300A and 300B.

  In the case of batch processing, the temperature inside the vacuum chamber 100 changes each time, and there is a problem that energy is wasted. On the other hand, since the heat treatment apparatus 1 according to the present embodiment performs real-time processing, the temperature in the entire vacuum chamber 100 (each block) can be kept constant over time, and as a result, energy saving can be realized. .

  The present invention is not limited to the above-described embodiment, and various modifications can be made without departing from the spirit and technical idea thereof. That is, in the above embodiment, the position, size, length, shape, material, orientation, quantity, temperature, and the like of each component can be changed as appropriate. For example, the quantity of the heating block 200 and the cooling block 300 is mentioned.

  The welding apparatus of the present invention can be used in the field of manufacturing electronic equipment, electronic components, or other various articles.

1 Heat treatment apparatus 10 Work 100 Vacuum chamber (chamber)
112 First opening (entrance)
114 Second opening (exit)
200, 200A to 200J Heating block 300, 300A, 300B Cooling block 700 In-chamber transport unit (transport means)

Claims (1)

A heat treatment apparatus that heat-treats a plurality of workpieces while sequentially conveying the workpieces,
An outlet to inlet, and the work is carried out in the order the work is carried in sequence, the inlet and the outlet are arranged so as to line up in the X-axis direction, maintain the interior of the own vacuum A chamber;
Conveying means for conveying the workpiece from the inlet to the outlet in the chamber;
Within said chamber, said a plurality of blocks arranged along a conveying path of the workpiece, and a plurality of heating blocks for heating the workpiece each of the plurality of blocks is maintained at a constant temperature,
One or a plurality of cooling blocks that are provided in the chamber and further downstream of the heating block on the most downstream side along the transfer path, and cool the workpiece;
With
The conveying means is
A first in-chamber mechanism for transporting the work carried into the chamber from the inlet in one direction in the Y-axis direction that is orthogonal to and horizontal to the X-axis direction;
The second transport mechanism in the chamber that transports the workpiece transported by the first transport mechanism in the chamber in the X-axis direction;
The third transport mechanism in the chamber that transports the workpiece transported by the second transport mechanism in the chamber to the outlet along the other direction in the Y-axis direction;
The workpiece is heated by passing through a side of said plurality of heating blocks and, characterized by Rukoto is cooled by passing through the side of the cooling block,
Heat treatment equipment.

Images