JP6043974B2 - Three-dimensional position measuring device, three-dimensional measuring device, and three-dimensional position measuring program - Google Patents

Description

  The present invention relates to a three-dimensional position measuring device that measures the position of an identification object having a plurality of light emitting devices arranged in a three-dimensional space by a plurality of cameras that image the light emitting device, and a three-dimensional measuring device using the same. And a three-dimensional position measurement program used for them.

  There is known a three-dimensional measurement apparatus that measures three-dimensional coordinates and postures of identification objects arranged in a three-dimensional space, for example, non-contact or contact-type measurement probes, using images captured by a plurality of cameras. In this type of three-dimensional measurement apparatus, a measurement probe that is an identification object includes a detection device that detects a measurement target to be measured by the measurement probe, and a plurality of light emitting devices whose positional relationship with the detection device is fixed, By detecting the position in the horizontal direction perpendicular to the imaging direction of the light emitting device and the position in the vertical direction from images acquired from a plurality of cameras, and detecting the position in the depth direction of the light emitting device by the parallax of the plurality of cameras The three-dimensional coordinate position and orientation of the measurement probe are calculated (Patent Document 1).

JP 2012-57996 A

  In such a three-dimensional position measuring apparatus, the position of the identification target in the depth direction is detected by the parallax of a plurality of cameras. Therefore, every time the object to be measured is moved away from the camera, the positions of the light emitting devices acquired from the plurality of cameras approach each other, and there is a problem that the measurement accuracy is lowered. Further, in the conventional three-dimensional measuring apparatus described above, the position and orientation of the object are calculated after restoring the three-dimensional coordinate values of each light-emitting device, so that only the light-emitting devices visible from all cameras are tertiary. There is a problem that the original coordinate value can be restored, and the degree of freedom of the position and orientation of the identification target is limited.

  The present invention has been made in view of these points, and an object of the present invention is to provide a three-dimensional measurement apparatus that improves measurement accuracy and has a high degree of freedom in arrangement of identification objects.

  A three-dimensional position measurement apparatus according to the present invention includes a plurality of light emitting devices that are provided on an identification object and whose positional relationship is fixed, and images the light emitting devices from a first direction and is orthogonal to the first direction of the light emitting device. A first camera unit that detects a position in a first horizontal direction and a vertical direction, and a second that detects a second horizontal position parallel to the first direction by imaging the light emitting device from the second direction. The first horizontal direction at an arbitrary rotation amount and translation amount of the light emitting device converted by the camera unit and the detected first horizontal position of the light emitting device and the projection matrix of the first camera unit measured in advance Error between the vertical position of the light emitting device and the position of the light emitting device in the vertical direction and the arbitrary rotation amount and translation amount of the light emitting device converted by the projection matrix of the first camera unit measured in advance. Light emitting device Light emission that minimizes an error between the position in the second horizontal direction and the position in the first horizontal direction in an arbitrary rotation amount and translation amount of the light emitting device converted by the projection matrix of the second camera unit measured in advance. Calculation that calculates the rotation amount and parallel movement amount of the device by the nonlinear least square method, and calculates the rotation amount and parallel movement amount of the identification object in the three-dimensional space from the calculated rotation amount and translation amount of the light emitting device. And an apparatus.

  According to the three-dimensional position measurement apparatus according to the present invention, since the first and second horizontal positions are acquired by different camera units, not by parallax, it is possible to improve the measurement accuracy in the depth direction. It is. Further, according to the present invention, the light-emitting device converted from the three-dimensional coordinate to the two-dimensional coordinate via the projection matrix of each camera unit, instead of restoring the three-dimensional coordinate value of the light-emitting device by a plurality of camera units. And the detected position information are compared. Accordingly, unlike the case where the three-dimensional coordinate values of each light emitting device are restored, the rotation amount and the parallel movement amount of the identification object in the three-dimensional space are calculated even when the light emitting device is not captured by some cameras. Thus, the degree of freedom such as the position and posture of the identification object is improved.

  In the three-dimensional position measurement apparatus according to the embodiment of the present invention, the first camera unit includes a first camera and a second camera held by the first holding unit, and the second camera. The unit has a third camera held in the second holding unit, and the first and third cameras acquire one-dimensional image information extending in the horizontal direction, in which the images of the light emitting devices are aggregated in the vertical direction. The second camera obtains one-dimensional image information extending in the vertical direction by collecting the images of the light emitting devices in the horizontal direction.

  Further, in the three-dimensional position measurement apparatus according to another embodiment of the present invention, the arithmetic unit may obtain a relative positional relationship between the first and second camera units by previously imaging a marker at a known measurement position. Ask.

  Further, a three-dimensional measurement apparatus according to the present invention includes the above-described three-dimensional position measurement apparatus and a measurement probe that is an identification object, and the measurement probe includes a detection device that detects a measurement target. The light emitting device is characterized in that the positional relationship with the detection device is fixed and provided in the measurement probe.

  The three-dimensional position measurement program according to the present invention includes a plurality of light emitting devices that are provided on an identification object and whose mutual positional relationship is fixed, and images the light emitting devices from a first direction and is orthogonal to the first direction of the light emitting devices. A first camera unit that detects a position in the first horizontal direction and a vertical direction, and a second that detects the position in the second horizontal direction parallel to the first direction by imaging the light emitting device from the second direction. A three-dimensional camera unit and a computing device that detects the position of the identification object based on the first horizontal position, the vertical position, and the second horizontal position of the detected light emitting device. A program for detecting a three-dimensional position of an identification target using a position measuring device, the light emission converted by the first horizontal position of the detected light emitting device and the projection matrix of the first camera unit measured in advance Arbitrary rotation amount of the device And the amount of rotation of the light emitting device and the amount of parallel movement converted by the projection matrix of the first camera unit measured in advance and the vertical position of the light emitting device. The first horizontal at an arbitrary rotation amount and translation amount of the light emitting device converted by the error from the vertical position and the second horizontal position of the light emitting device and the projection matrix of the second camera unit measured in advance. The step of calculating the rotation amount and the parallel movement amount of the light emitting device that minimizes the error with the position of the direction by the nonlinear least square method, and the three-dimensional of the identification object from the calculated rotation amount and the parallel movement amount of the light emitting device And calculating the amount of rotation and the amount of parallel movement in space.

  ADVANTAGE OF THE INVENTION According to this invention, it becomes possible to provide a three-dimensional measuring apparatus which improves a measurement precision and has high arrangement | positioning freedom degree of an identification target object.

It is a perspective view which shows the structure of the three-dimensional measuring apparatus which concerns on 1st Embodiment of this invention. It is the perspective view and front view of the same three-dimensional measuring apparatus. It is a perspective view which shows the measurement probe of the same three-dimensional measuring apparatus. It is a figure showing an example of the internal structure of the camera of the same three-dimensional measuring apparatus. It is a schematic diagram for demonstrating the three-dimensional position measuring method of the three-dimensional measuring apparatus which concerns on a comparative example. It is a schematic diagram for demonstrating the three-dimensional position measuring method of the three-dimensional measuring apparatus which concerns on 1st Embodiment of this invention. It is a perspective view which shows the external appearance of the marker which concerns on 1st Embodiment of this invention. It is a block diagram which shows the structure of the three-dimensional position measurement program which concerns on 1st Embodiment of this invention. It is a flowchart for demonstrating operation | movement of the same three-dimensional position measurement program. It is a block diagram which shows the structure of the virtual probe position detection part of the same three-dimensional position measurement program. It is a perspective view which shows the structure of the three-dimensional measuring apparatus which concerns on 2nd Embodiment of this invention.

[First Embodiment]
Next, the three-dimensional position measuring apparatus according to the first embodiment of the present invention and the three-dimensional measuring apparatus including the same will be described in detail.

[overall structure]
FIG. 1 is a perspective view of a three-dimensional measuring apparatus according to this embodiment. The three-dimensional measuring apparatus according to the present embodiment includes a probe 1 that detects a measurement target, a first camera unit CU1 that images the probe 1 and identifies it as an identification object, and is independent of the first camera unit CU1. A second camera unit CU2 that is formed and images the probe 1 from an angle different from that of the first camera unit CU1 and is identified as an identification object, and the probe 1, the first camera unit CU1, and the second camera unit CU2 An arithmetic device 7 for driving control, an input device 8 and an output device 9 are provided.

  FIG. 2A is a plan view showing the positional relationship between the first and second camera units CU1 and CU2 of the three-dimensional measuring apparatus, and FIG. 2B is a front view of the same. As shown in the figure, in this embodiment, the camera units CU1 and CU2 are arranged in a positional relationship in which their optical axes are substantially orthogonal.

  As shown in FIG. 3, the probe 1 includes a detection device 11 that detects the measurement target 100 and a plurality of light-emitting devices 12 that are fixed in positional relationship with the detection device 11. As the detection device 11, a contact-type probe or a non-contact type, for example, a laser probe can be applied. FIG. 3 shows an example in which a laser probe is applied. In the present embodiment, the detection apparatus 11 includes a laser irradiation unit 111 that irradiates the surface of the measurement target 100 with a laser, and a laser imaging unit 112 that images the laser irradiated on the surface of the measurement target 100. Further, as the light emitting device 12, for example, a device provided with a plurality of LEDs as shown in FIG. 3 is applicable. The LEDs are turned on one by one in response to a command from the arithmetic unit 7. In the laser probe according to the present embodiment, when the direction in which the detection device 11 is attached is the front surface, several LEDs are arranged on the front upper surface, the lower front surface, both side surfaces, the upper back surface, and the lower back surface, respectively. It is composed.

  The first camera unit CU1 images the light emitting device 12 from the y direction (first direction) and detects the position in the x direction (first horizontal direction) orthogonal to the y direction of the light emitting device. 2. The second imaging device 3 and the first imaging device 2 that image the light emitting device 12 from the y direction (first direction) and detect the position in the z direction (vertical direction) orthogonal to the y direction of the light emitting device. A holding unit 5 that holds the second imaging device 3 is provided. The holding unit 5 includes a tripod 51 and a rail-shaped base 52 supported by the tripod 51. On the base 52, the first imaging device 2 and the third imaging device 3 are arranged in the longitudinal direction of the base 52 so that the respective lenses are directed toward the measurement space and are movable in the longitudinal direction of the base 52. Yes. In addition, the base 52 has a linear encoder 53, which measures the position of the first imaging device 2 and the third imaging device 3 in the longitudinal direction of the base 52.

  The imaging devices 2 and 3 have cameras 21 and 31 and movable bases 22 and 32 that hold the cameras 21 and 31 and are movably mounted on a base 52. The cameras 21 and 31 are mounted on the movable bases 22 and 32 so as to be rotatable in a horizontal plane. Moreover, the movable bases 22 and 32 have a rotary encoder (not shown), and measure the angle of the cameras 21 and 31 from the reference position. The movement and rotation of the cameras 21 and 31 can be manually performed individually, but can also be collectively performed based on control from the arithmetic unit 7 by power such as electric power.

  The second camera unit CU2 includes a third imaging device 4 that images the light emitting device 12 from the x direction (second direction) and detects a position in the y direction, and a holding unit 6 that holds the third imaging device 4. Have. The holding unit 6 has a tripod 61 and a rail-shaped base body 62 supported by the tripod 61. On the base body 62, the second imaging device 4 is disposed in the longitudinal direction of the base body 62 so that the respective lenses are directed toward the measurement space and are movable in the longitudinal direction of the base body 62. In addition, the base 62 has a linear encoder 63, which measures the position of the base 62 of the second imaging device 4 in the longitudinal direction.

  The imaging device 4 includes a camera 41 and a movable base 42 that holds the 41 and is movably mounted on a base 62. The camera 41 is mounted on the movable table 42 so as to be rotatable in a horizontal plane. The movable base 42 has a rotary encoder (not shown) and measures the angle of the camera 41 from the reference position. The movement and rotation of the camera 41 can be manually performed individually, but can also be performed based on control from the calculation means 7 by power such as electric power.

  In this embodiment, the first camera 21 is used to capture a one-dimensional image in the x direction, the second camera 31 is in the z direction, and the third camera 41 is in the y direction. The three-dimensional coordinate value of the probe 1 is calculated from the image information. This can greatly reduce the amount of information.

  FIG. 4 is a diagram illustrating an example of the internal structure of the first camera 21 in the image measurement apparatus according to the present embodiment. 4A is a plan view and FIG. 4B is a side view. The camera 21 has an anamorphic lens 211 and a line CCD (hereinafter, LCCD) sensor 212. The anamorphic lens 211 has cylindrical surfaces C1 to C5 and collects images to be measured in the vertical direction. The images of the measurement target collected in the vertical direction are acquired as one-dimensional image information extending in the horizontal direction by the light receiving unit of the LCCD sensor 212.

  The third camera 41 has the same configuration, but the second camera 31 collects the images to be measured in the horizontal direction and acquires one-dimensional image information extending in the vertical direction (optical system ( An anamorphic lens 211 and an LCCD sensor 212) are arranged in a state of being rotated by 90 ° about the optical axis.

[Three-dimensional position measurement method]
Next, a three-dimensional position measurement method of the three-dimensional measurement apparatus according to the first embodiment of the present invention will be described in comparison with a comparative example. 5A and 5B are schematic diagrams for illustrating a three-dimensional position measurement method according to a comparative example. FIG. 5A shows a plan view and FIG. 5B shows a side view. In the three-dimensional position measurement method according to the comparative example, the x-direction position of the LED is detected by the cameras 20 and 40, the z-direction position of the LED is detected by the camera 30, and the y-direction position of the LED is detected by the camera 20 and the camera 40. The detection is performed by calculation processing based on the difference in the x-direction position of the detected LED, the distance between the camera 20 and the camera 30, the imaging direction, and the like. Therefore, when the LED moves away from the camera 20 and the camera 40, the x-direction position of the LED detected by the camera 20 and the camera 40 approaches, and the resolution of the camera 20 and the camera 40 approaches a region that cannot be ignored with respect to the difference in the x-direction position. The measurement accuracy will be degraded.

  6A and 6B are schematic diagrams for illustrating the three-dimensional position measurement method according to the present embodiment, in which FIG. 6A shows a plan view and FIG. 6B shows a side view. In the present embodiment, the first camera 21 detects the x-direction position of the LED, the third camera 41 detects the y-direction position of the LED, and the second camera 31 detects the z-direction position of the LED. That is, unlike the comparative example, the position in the y direction is obtained by direct imaging. According to such a method, the resolution of the camera 41 does not become a problem, and the measurement accuracy in the y direction is dramatically improved. Note that the most accurate measurement is possible when the angle θ formed by the imaging direction of the first camera 21 and the imaging direction of the second camera 41 is set to 90 °.

[Calibration]
Next, a calibration method for the coordinate measuring apparatus according to the present embodiment will be described. In the three-dimensional measuring apparatus according to this embodiment, calibration is performed in advance prior to measurement, and the projection matrix P of each camera 21 to 41 is acquired and calibrated according to the positional relationship of the cameras 21 to 41, lens parameters, and the like. Do.

The projection matrix P is acquired and calibrated as follows. That is, for example, a marker 101 having a plurality of LEDs as shown in FIG. 7 is installed at a known position in a known posture, the LEDs are sequentially emitted, and the positions of the LEDs are detected by the cameras 21-41. Next, the following calculation is performed by the arithmetic unit 7. First, if the horizontal direction of the planar image acquired by the cameras 21 to 41 is u, the vertical direction is v, and the three-dimensional coordinates of the LEDs are (X, Y, Z), Equations 1 to 4 are established.

The arithmetic unit 7 sets the distortion parameter k, the initial value of the distortion parameter k is k = 0, the image center is kcx, kcy, and a projection matrix P that minimizes the evaluation function C expressed by Equations 5 and 6. The distortion parameter k and the image centers kcx and kcy are obtained by nonlinear optimization.


Next, in Equation 1, A, R, and T are represented by the following Equations 7 to 9, and R and T of the cameras 21 to 41 are calculated by substituting A, R, and T into Equation 1.

[Three-dimensional position measurement program]
Next, the three-dimensional position measurement program according to the first embodiment of the present invention will be described. The three-dimensional position measurement program according to the present embodiment is an arbitrary program of the light emitting device 12 converted by the position of the light emitting device 12 in the x direction acquired by the first camera 21 and the projection matrix P of the first camera 21. The difference between the rotation amount and the translation amount with respect to the position in the x direction, the position in the z direction of the light emitting device 12 acquired by the second camera 31 and the projection matrix P of the second camera 31 of the light emitting device 12 converted. The light emitting device 12 converted by the error with respect to the position in the z direction at an arbitrary amount of rotation and translation, the position in the y direction of the light emitting device 12 acquired by the third camera 41 and the projection matrix P of the third camera. Calculating a rotation amount and a parallel movement amount of the light emitting device 12 to minimize an error from a position in the y direction in an arbitrary rotation amount and a parallel movement amount of The rotation amount and translation amount of the optical device 12, and a step of calculating the amount of rotation and translation of the three-dimensional space of the measuring probe 1 to the arithmetic unit 7.

FIG. 8 is a block diagram showing the configuration of the three-dimensional position measurement program according to this embodiment, and FIG. 9 is a flowchart showing the operation. The three-dimensional position measurement program according to the present invention realizes the following functions by the arithmetic device 7 and the storage device 10 connected to the arithmetic device 7. That is, in step S1, the LED designating unit 71 designates one of the plurality of LEDs included in the light emitting device 12 to emit light, and the cameras 21 to 41 capture the light emitted from the LEDs and capture the image S ( n) (LED position) is output. In step S2, the virtual probe position initial value calculation unit 72 estimates the position of the probe 1 from the images S (n) (LED positions) output from the cameras 21 to 41, and outputs them as virtual probe position initial values Ri and Ti. To do. In step S3, the virtual probe position detection unit 74 obtains the coordinate Model (n) at the reference position of the LED designated from the LED designation unit 71, and the virtual probe position initial values Ri and Ti from the virtual probe position initial value calculation unit 72. The projection matrix P is input from the setting unit 73, and the virtual probe positions R and T are calculated. In step S <b> 4, the work position detection unit 75 receives the virtual probe positions R and T, detects the work position, and outputs the work position to the output device 9.

  Next, each step of the three-dimensional position measurement program according to the present embodiment will be described in detail. In step S1, the LED designating unit 71 designates one of the plurality of LEDs of the light emitting device 12 to emit light. In the present embodiment, the light emitting device 12 has N LEDs, but the LED designating unit 71 designates only the nth LED out of N and sequentially emits light. Further, the position coordinates Model (1) to Model (N) from the reference value are allocated to the N LEDs, respectively, and the position coordinates Model (n) corresponding to the designated nth LED are sequentially output. The

  In step S2, the virtual probe position initial value calculation unit 72 estimates the position of the probe 1 from the images S (n) (LED positions) output from the cameras 21 to 41, and outputs them as virtual probe position initial values Ri and Ti. To do. Note that the virtual probe position initial value is an approximate value Ri of the rotation amount R indicating the rotation (posture) from the initial value of the probe 1 and an approximate value Ti of the movement amount T indicating the parallel movement amount from the initial value of the probe 1. And is represented by

  Various methods can be applied to approximate the virtual probe position initial values Ri and Ti. In this embodiment, the center of gravity is calculated for the obtained position coordinates of some LEDs, and the rotation amount initial value Ri is calculated. Then, the center of gravity is calculated for all the obtained position coordinates of the LEDs, and the movement amount initial value Ti is calculated. For example, the rotation amount initial value Ri is calculated and acquired based on the LEDs arranged on the front upper part, the lower front part, the rear upper part and the lower rear part of the light emitting device 12, and the center of gravity positions of the LEDs arranged on both side faces. It is conceivable that the center-of-gravity positions of all LEDs are set to the movement amount initial value Ti.

Next, the operation of the virtual probe position detection unit 74 in step S3 will be described. FIG. 10 is a block diagram illustrating a configuration of the virtual probe position detection unit 74. The rotation & movement unit 741 rotates the coordinate Model (n) based on the virtual probe position initial values Ri and Ti, translates it, and outputs it as a three-dimensional virtual LED position (n). The correction & two-dimensionalization unit 742 converts the two-dimensional coordinates that will be obtained when the three-dimensional virtual LED position (n) is imaged by the cameras 21 to 41 based on the projection matrix P into the two-dimensional virtual LED position ( n). The comparison unit 743 compares the image S (n) (LED position) with the two-dimensional virtual LED position (n) and outputs an LED position error E (n). The square & integration unit 744 squares the LED position error E (n), integrates the square value of the obtained LED position error E (n), and outputs the result as a probe position error E (R, T). The virtual probe position adjustment unit 745 adjusts and outputs the virtual probe positions R and T so that the probe position error E (R, T) becomes the minimum value.

The probe position error E (R, T) can be expressed by Equation 10.

In Equation 10, N1 to N3 are the numbers of LED position coordinates acquired by the cameras 21 to 41, respectively, and S1i to S3i are images S (i) (LED positions) acquired by the cameras 21 to 41, respectively. P1 to P3 represent projection matrices P of the cameras 21 to 41, respectively. Various methods can be applied as the method of adjusting the virtual probe positions R and T, but in this embodiment, the nonlinear least square method is used.

  In step S <b> 4, the work position detection unit 75 receives the virtual probe positions R and T, detects the work position, and outputs the work position to the output device 9. For example, when the detection device 11 is a contact-type probe, the workpiece position can be calculated based on the positional relationship between the reference positions of the virtual probe positions R and T and the stylus, and is not a non-contact type laser probe. In such a case, the detected coordinate data of the workpiece surface may be moved based on the virtual probe positions R and T.

[Second Embodiment]
Next, the three-dimensional measuring apparatus according to the second embodiment of the present invention will be described in detail. In the first embodiment, the cameras 21 to 41 each capture a one-dimensional image, but it is naturally possible to apply a camera that captures a two-dimensional image. FIG. 11 is a perspective view showing the configuration of the three-dimensional measuring apparatus according to this embodiment. The three-dimensional measuring apparatus according to the present embodiment is basically configured in the same manner as the three-dimensional measuring apparatus according to the first embodiment, but the three-dimensional measuring apparatus according to the present embodiment is an x of the light emitting device 12. The first camera 21 ′ for detecting the position in the direction and the z direction, and the second camera 31 ′ for detecting the position in the y direction and the z direction of the light emitting device 12 are provided. Even with such a configuration, it is possible to detect the y-direction position of the light-emitting device 12 with the same measurement accuracy as in the first embodiment. In the first embodiment, the probe position error E (R, T) is expressed by Equation 1, but in the present embodiment, it can be expressed by Equation 11.

[Other Embodiments]
In the first and second embodiments, the camera units CU1 and CU2 are configured independently. However, for example, if the base 52 is formed in an L shape, the camera units CU1 and CU2 can be integrally formed. It is also possible to fix -41 to the wall of a measurement chamber, for example. Of course, the linear encoders 53 and 63 and the rotary encoders of the movable bases 22 to 42 can be omitted.

  DESCRIPTION OF SYMBOLS 1 ... Probe, 2 ... 1st imaging device, 3 ... 2nd imaging device, 4 ... 3rd imaging device, 5, 6 ... Holding part, 7 ... Arithmetic device, 8 ... Input device, 9 ... Output device.

Claims (5)

A plurality of light emitting devices which are provided on the identification object and whose positional relationship is fixed;
The light emitting device of the first horizontal direction first image information indicating the position of which is perpendicular to the first direction of the light emitting device and the imaging from the first direction, and a second indicating the vertical position of the light emitting device A first camera unit for obtaining image information ;
A second camera unit for acquiring third image information by imaging the light-emitting device from the second direction indicates the position of the first way direction parallel to the second horizontal direction,
In the virtual rotation amount and the parallel movement amount of the identification object converted by the first horizontal position of the light emitting device in the first image information and the projection matrix of the first camera unit measured in advance. error, the converted by projection matrix of the previously measured and the vertical position of the first camera unit the identification of the light emitting device in the second image information of the first horizontal position of the light emitting device error between the vertical position of the light emitting device in a virtual rotation amount and translation of the object, and, measured in advance and the second horizontal position of the light emitting device in the third image information erroneous between the position of the second horizontal direction of the light emitting device in a virtual rotation amount and translation amount of converted the identified object by projection matrix of the second camera unit The virtual rotation amount and translation of virtual rotation amount and translation amount calculated by a nonlinear least-squares method, the identification object is calculated of the identification object to minimize the identification object A three-dimensional position measuring apparatus comprising: an arithmetic unit that calculates a rotation amount and a parallel movement amount in a three-dimensional space. The first camera unit includes a first camera and a second camera held by a first holding unit,
The second camera unit has a third camera held by a second holding unit,
The first and third cameras acquire one-dimensional image information extending in the horizontal direction, in which the images of the light emitting devices are aggregated in the vertical direction,
The three-dimensional position measuring apparatus according to claim 1, wherein the second camera acquires one-dimensional image information extending in a vertical direction in which images of the light emitting device are aggregated in a horizontal direction.   3. The three-dimensional position according to claim 1, wherein the arithmetic unit obtains a relative positional relationship between the first and second camera units by imaging a marker at a known measurement position in advance. measuring device. The three-dimensional position measuring device according to any one of claims 1 to 3,
A measurement probe that is the identification object,
The measurement probe includes a detection device that detects a measurement target;
The light emitting device is provided in the measurement probe with a positional relationship with the detection device being fixed. The three-dimensional measuring device. A plurality of light emitting devices positional relationship of mutual is fixed provided on the identification object, the first horizontal direction position orthogonal to the first direction of the light emitting device by imaging the light-emitting device from a first direction parallel first image information, and a first camera unit for acquiring second image information indicating the vertical position of the light emitting device, the light emitting device and said first hand direction by capturing the second direction it indicated a second camera unit for acquiring third image information indicating a second horizontal direction position, the first image information indicating the position of the first horizontal direction before Symbol emitting device, the position of the vertical direction the second image information representing, and the identification by using the three-dimensional position measuring device and an arithmetic device for detecting the position of the third image the identification object based on the information indicating the second horizontal direction position A program for detecting a three-dimensional position of an object,
In the virtual rotation amount and the parallel movement amount of the identification object converted by the first horizontal position of the light emitting device in the first image information and the projection matrix of the first camera unit measured in advance. error, the converted by projection matrix of the previously measured and the vertical position of the first camera unit the identification of the light emitting device in the second image information of the first horizontal position of the light emitting device error between the vertical position of the light emitting device in a virtual rotation amount and translation of the object, and, measured in advance and the second horizontal position of the light emitting device in the third image information an error between the position of the second horizontal direction of the light emitting device in a virtual rotation amount and translation amount of the converted identification object by projection matrix of the second camera unit Calculating a virtual rotation amount and translation of the identification object of the small non-linear least-squares method,
A three-dimensional position measurement program that causes a computer to execute a step of calculating a rotation amount and a parallel movement amount of the identification object in a three-dimensional space from the calculated virtual rotation amount and translation amount of the identification object. .