JP5918003B2 - Vacuum suction sheet for singulation device and method for manufacturing fixing jig using the same - Google Patents

Description

  The present invention relates to a vacuum suction sheet used for a fixing jig for adsorbing and fixing individualized pieces in an individualizing apparatus, and a method for manufacturing a fixing jig using the same.

  A substrate in which a substrate is partitioned into a plurality of lattice-shaped regions, chip-shaped electronic elements are mounted in each region, and the entire substrate is resin-sealed is referred to as a resin sealing body. This resin sealing body is cut using a rotary blade or the like, and is divided into individual regions to form an electronic component.

  An apparatus for manufacturing individual electronic components including individual electronic elements obtained by dividing a resin sealing body in which a large number of electronic elements are integrally sealed was obtained by the resin sealing body cutting step, the cutting step. A plurality of manufacturing units corresponding to each process such as an electronic component cleaning process, a drying process, and an inspection process are connected in the order of processes. In order to deliver the separated electronic parts between the plurality of manufacturing units, fixing jigs for sucking and fixing the separated electronic parts are provided. The fixing jig is composed of a movable and rotatable base and a vacuum suction sheet made of an elastic body such as rubber fixed to the base, and the vacuum suction sheet is used for vacuum suction of electronic components. A hole is formed. Each of the suction holes communicates with an exhaust pump via an intake through passage provided inside the base and an exhaust passage provided outside the base. An exhaust valve is provided in the middle of the exhaust path, and an open valve for opening the inside of the exhaust path to the outside is provided at a position closer to the suction hole than the exhaust valve in the exhaust path. By opening and closing these exhaust valves and release valves, the electronic components can be adsorbed and fixed to the vacuum adsorbing sheet of the fixing jig, or removed from the vacuum adsorbing sheet (Patent Documents 1 and 2). .

In order to suck and fix the electronic component on the vacuum suction sheet of the fixing jig described above, first, the separated electronic component is placed on the vacuum suction sheet so as to cover each suction hole. Next, the above-described open valve is closed and the exhaust valve is opened, so that the suction hole communicates with the exhaust pump. Then, the exhaust pump communicates with the suction hole by vacuum, and the inside of the suction hole is in a reduced pressure state, so that the electronic component is sucked and fixed to the vacuum suction sheet by vacuum suction. On the other hand, in order to release the suction of the electronic component, the inside of the suction hole is opened to the atmosphere by closing the exhaust valve and opening the release valve. As a result, the electronic component can be removed from the vacuum suction sheet.
The suction by the vacuum suction sheet is also used when an electronic component is manufactured by cutting the resin sealing body into each region unit.

Japanese Patent Laid-Open No. 2003-203830 Japanese Unexamined Patent Publication No. 2007-201275

  In the conventional vacuum suction sheet as described above, when the vacuum suction sheet gets wet by the cleaning liquid for cleaning the electronic component, the electronic component and the vacuum suction sheet are not fixed when the electronic component is sucked and fixed to the vacuum suction sheet. A liquid film is formed on the contact surface, and an adsorption force due to surface tension is generated. On the other hand, if the vacuum suction sheet is dry, the vacuum suction sheet may become static while repeatedly holding and releasing the suction of the electronic component. In this case, the contact surface between the electronic component and the vacuum suction sheet may become static. Adsorption force due to is generated. In any case, the generation of such unintentional suction force causes the electronic component to remain sucked on the vacuum suction sheet even though the vacuum suction is released, and the electronic component is not transferred to the next process. There was a problem.

  The present invention has been made in order to solve the above-mentioned problems. The purpose of the present invention is to ensure that when the vacuum adsorption is released, the adsorption of the individualized product is surely released, and the individualized product is subjected to the next step. An object of the present invention is to provide a vacuum suction sheet for a singulation apparatus that can be reliably transferred. Moreover, the manufacturing method of the fixing jig using this sheet | seat is also provided.

The first aspect of the vacuum suction sheet for a singulation apparatus according to the present invention, which has been made to solve the above problems, is a sheet made of an elastic body having suction holes for vacuum-suctioning the singulation. There,
The suction hole, which is formed integrally with the sheet, completely surrounds the suction hole, and is elastically deformed when air is sucked from the suction hole in a state where the individual piece is placed, and contacts with the individual piece. When the suction of the air from the suction hole is released, the protrusion is pushed up by the elastic restoring force to reduce the contact area with the separate piece .

  The above-mentioned “individualized product” includes, for example, various substrates, those in which an electronic element or the like is mounted on the substrate, and those obtained by resin-sealing those substrates.

When the singulated material is placed on the first embodiment of the vacuum suction sheet for the singulation apparatus (hereinafter simply referred to as “vacuum suction sheet”) according to the present invention and the air starts to be discharged from the suction hole, the protrusion Since the part completely surrounds the suction hole, the space above the suction hole is closed by the singulated material and the protrusion, and vacuum suction is performed. When the vacuum suction is continued, the singulated material is pressed against the projecting portion, and the projecting portion is elastically deformed to increase the contact area between the two. As a result, the adhesion between the suction hole and the singulated material becomes more complete, and reliable vacuum suction of the singulated material is performed.
When the vacuum suction is released by introducing air into the suction hole, the projecting portion returns to its original shape due to its elasticity and pushes up the singulated material. In addition, since the contact area between the singulated product and the projecting portion is reduced, even if there is a liquid film between them or an electrostatic force is acting between them, the force is small, and the singulated product is It can be easily removed from the vacuum suction sheet.

Further, the second aspect of the vacuum suction sheet for the singulation apparatus according to the present invention is a sheet made of an elastic body having suction holes for vacuum-suctioning the singulated material,
Wherein a protruding portion provided on the sheet integrally on the sheet surface around the suction holes, the pieces product and the ambient buried from the suction holes on the seat surface of the ambient air is Ru sucked Elastically deforms so that the contact area with the sheet surface increases, and when the suction of air from the suction hole is released, the singulated material is pushed up by the elastic restoring force to reduce the contact area with the singulated material. It has the protrusion part which becomes .

  The protrusion provided on the vacuum suction sheet according to this aspect does not need to completely surround the suction hole, unlike the above-described aspect. It may be a dot shape, a line shape, or a planar shape having a certain size. The number may be one or plural. In addition, as long as it has the above characteristics, you may completely surround an adsorption hole.

In the vacuum suction sheet according to this aspect, when the singulated product is placed on the upper portion of the suction hole, and the vacuum suction is performed by discharging air from the suction hole, the projecting portion is deformed by pressing the singulated product, It is buried in the sheet surface around the suction holes. Thereby, the singulated material comes into contact with the sheet surface around the suction hole, and vacuum suction is completely performed.
When the vacuum suction is released by introducing air into the suction hole, the projecting portion returns to its original shape due to its elasticity and pushes up the singulated material. Further, when the protrusion does not completely surround the suction hole, a gap is formed between the singulated material and the sheet surface around the suction hole, and the vacuum suction is more reliably released. Even when the protruding portion completely surrounds the suction hole, when the vacuum suction is released by the same action as in the first aspect, the singulated material is surrounded by the elastic restoring force of the protruding portion. The separated pieces can be easily removed.

  In the vacuum suction sheet of this embodiment, when the air is first discharged from the suction holes, the protrusions are as low as possible so that the singulated material comes into contact with the sheet surface around the suction holes and is sucked at an early stage. It is desirable that the air hole is slightly provided from the state where the suction hole is completely surrounded.

Using the vacuum suction sheet according to each aspect described above, a fixing jig for adsorbing and fixing individualized products is,
a) a molding step of supplying a room temperature curable liquid resin to the cavity of a mold having a cavity corresponding to the vacuum suction sheet provided with a concave portion having a shape obtained by inverting the protruding portion;
b) an abutting step of positioning and abutting a base having an intake through passage to a mold surface of the mold in which the room temperature curable liquid resin is supplied to the cavity;
c) a curing step for curing the room temperature curable liquid resin at room temperature ;
d) a mold release step of forming the sheet on the base by mold release;
e) a suction hole creating step of creating the suction hole in the sheet by punching the sheet through the intake through-passage;
It can manufacture by the method which has this.

  In the vacuum suction sheet for a singulation apparatus according to the present invention, in any of the first and second aspects described above, when the vacuum suction of the singulated material is released, the protruding portion is separated by its elastic restoring force. The chemicals are pushed up, the contact area between the individualized products and the protrusions is reduced, or the contact between the individualized products and the sheet surface around the protrusions is released, so there is a liquid film between them. Even if an electrostatic force is acting between them, the force is small, and the singulated material can be easily removed from the vacuum suction sheet. In other words, the singulated product does not remain adsorbed to the sheet even though the vacuum suction is released, and the singulated product can be reliably transferred to the next step.

  Further, in the method of manufacturing the fixing jig according to the present invention, the liquid resin is cured in the cavity provided with the concave portion corresponding to the protruding portion of the vacuum suction sheet on the bottom surface, thereby producing the sheet. And the fixing jig using the vacuum suction sheet of each aspect mentioned above can be manufactured easily.

The perspective whole view of the fixing jig provided with the vacuum suction sheet | seat which concerns on Example 1 of this invention. AA 'line sectional drawing in FIG. (A) is a longitudinal cross-sectional enlarged view which shows the state which mounted the electronic component in the vacuum suction sheet | seat which concerns on Example 1, (b) is a longitudinal cross-sectional enlarged view which shows the state which vacuum-sucked the electronic component. (A) is the plane enlarged view which shows the state which mounted the electronic component in the vacuum suction sheet | seat which concerns on Example 1, (b) is the plane enlarged view which shows the state which vacuum-sucked the electronic component. FIG. 6 is an enlarged plan view showing a state where electronic components are placed on a vacuum suction sheet according to a modification of Example 1; The perspective enlarged view of the fixing jig provided with the vacuum suction sheet | seat which concerns on Example 2 of this invention. FIG. 7 is a cross-sectional view taken along line BB ′ in FIG. 6, (a) is an enlarged vertical cross-sectional view showing a state in which an electronic component is placed on a vacuum suction sheet, and (b) is a state in which the electronic component is vacuum-sucked. FIG. FIG. 9 is an enlarged plan view showing a modification of the vacuum suction sheet according to the second embodiment. FIG. 9 is an enlarged plan view showing another modification of the vacuum suction sheet according to the second embodiment. 1 is an overall perspective view of a mold for manufacturing a vacuum suction sheet according to Embodiment 1. FIG. CC 'sectional view taken on the line in FIG. FIG. 3 is a schematic diagram illustrating a process for manufacturing a fixing jig including the vacuum suction sheet according to the first embodiment.

  Embodiments of the vacuum suction sheet according to the present invention will be described below with reference to the drawings.

  With reference to FIG.1 and FIG.2, the structure of the vacuum suction sheet | seat 2 which concerns on the 1st Example (Example 1) of this invention is demonstrated. The vacuum suction sheet 2 of the present embodiment is used by being mounted and fixed on a metal base 3 in a fixing jig 1 used for cleaning, inspecting, etc. a large number of individual electronic components at once. It is what is done. The vacuum suction sheet 2 is provided so as to cover the protruding surface 31 protruding from the upper surface of the base 3.

  The vacuum suction sheet 2 is formed by molding a silicone resin or a fluorine-based resin into a sheet shape, and on the sheet surface, accommodating portions 23 that are spaces having shapes corresponding to the target electronic components are formed in a lattice shape. ing. In the present embodiment, each accommodating portion 23 is provided separated from each other by a lattice-like boundary 26, but is used when individual electronic components are separated by cutting the resin sealing body before separation. This boundary 26 is not provided in the vacuum suction sheet. Obviously, the arrangement and number of the accommodating portions 23 are not limited to those shown in FIG. A suction hole 24 is provided on the bottom surface of each accommodating portion 23, and the vacuum suction sheet 2 protrudes from the protruding surface 31 of the base 3 so that each suction hole 24 coincides with a later-described suction through-passage 32 of the base 3. It is fixed to the adhesive. In the vacuum suction sheet 2 of the present embodiment, a projecting portion 25 having a cross-beam shape and a semicircular cross section is formed on the bottom surface of each housing portion 23 so as to surround the suction hole 24.

  As shown in FIG. 2, each intake through passage 32 of the base 3 is connected to an exhaust pump 50 through an individual exhaust pipe provided in each and an exhaust pipe 51 in which they are collected. An exhaust valve 52 is provided in the exhaust pipe 51, and an open valve 53 is provided on the upstream side (adsorption hole 24) side of the exhaust valve 52.

  The usage pattern of the vacuum suction sheet 2 will be described with reference to FIG. When the electronic component 40 having the flat lower surface 41 is accommodated in each accommodating portion 23 of the vacuum suction sheet 2, the electronic component 40 is placed on the upper portion of the suction hole 24. At this time, since the protrusion 25 completely surrounds the suction hole 24, the space 30 above the suction hole 24 is closed by the lower surface 41 of the electronic component 40 and the cross-shaped protrusion 25 (FIG. 3A). )). In this state, when the exhaust valve 52 is opened and the release valve 53 is closed and the exhaust pump 50 is operated, air is discharged from the space above the suction hole 24 and the electronic component 40 is vacuum-sucked. When the discharge of air (vacuum suction) is continued, the lower surface 41 of the electronic component 40 is pressed against the protrusion 25, and the protrusion 25 is elastically deformed to increase the contact area between them (FIG. 3B). Thereby, the adhesion between the suction hole 24 and the electronic component 40 becomes more complete, and the vacuum suction of the electronic component 40 is performed reliably.

  When releasing the vacuum suction of the electronic component 40, the exhaust valve 52 is closed and the release valve 53 is opened. Thereby, air is introduced into the space above the suction hole 24 and the vacuum suction of the electronic component 40 is released. Then, the protrusion 25 returns to its original shape by the elastic restoring force (that is, returns from the state of FIG. 3B to the state of FIG. 3A), and pushes up the electronic component 40. Therefore, since the contact area between the lower surface 41 of the electronic component 40 and the protruding portion 25 is reduced, even if a liquid film exists between them or an electrostatic force acts between them, the force is The electronic component 40 is small and can be easily detached from the vacuum suction sheet 2. That is, when these electronic components 40 are sucked by using another fixing jig, the single electronic component 40 can be sucked without being left.

  FIG. 4A is an enlarged plan view showing a state where the electronic component 40 is accommodated in the accommodating portion 23 of the vacuum suction sheet 2. The dotted line in the figure shows the outline of the electronic component 40. As described above, since the cross section of the protrusion 25 of the vacuum suction sheet 2 is semicircular, the lower surface 41 of the electronic component 40 is in contact with the top of the protrusion 25 in a state where the electronic component 40 is stored in the storage 23. Both contact portions 70 are linear. On the other hand, when the electronic component 40 is vacuum-sucked, the lower surface 41 of the electronic component 40 is pressed against the protruding portion 25, so that the contact portion 70 of the two linear shapes becomes planar (FIG. 4B).

  In addition, the shape of the protrusion part 25 is not limited to a cross-beam shape, For example, as FIG. 5 shows, it is good also as a cyclic | annular form (protrusion part 25A). Further, the cross section of the protrusions 25, 25A may be a triangle, a trapezoid, or the like in addition to a semicircle.

  FIG. 6 shows an enlarged perspective view of a fixing jig 1A provided with a vacuum suction sheet 2A according to a second embodiment (Example 2) of the present invention. In the vacuum suction sheet 2A according to the present embodiment, one hemispherical protrusion 28 is formed on the bottom surface of the housing 23A. In consideration of the elasticity of the vacuum suction sheet 2A and the strength of vacuum suction, the protrusion 28 is pressed toward the sheet surface within a short time after starting vacuum suction from the suction hole 24A. Keep as low as possible, so as to be buried. The protruding portion 28 may have a polygonal pyramid shape, a polygonal column shape, a cylindrical shape, or the like.

A usage pattern of the vacuum suction sheet 2A will be described with reference to FIG. When the electronic component 40 having the flat lower surface 41 is accommodated in the accommodating portion 23A of the vacuum suction sheet 2A, the lower surface 41 comes into contact with the top of the protruding portion 28, so that the adsorption hole 24A is in a state where the electronic component 40 is inclined. (FIG. 7A). In addition, since the protrusion part 28 is provided low as mentioned above, the clearance gap formed between the lower surface 41 of the electronic component 40 and the sheet | seat surface of the vacuum suction sheet 2A is small. Therefore, when the air is discharged from the suction hole 24A and vacuum suction is performed as in the first embodiment, the lower surface 41 of the electronic component 40 is quickly sucked onto the sheet surface of the vacuum suction sheet 2A. When the electronic component 40 is pressed, the protruding portion 28 is deformed and buried in the sheet surface around the suction hole 24A (FIG. 7B). As a result, the lower surface 41 of the electronic component 40 comes into contact with the sheet surface around the suction hole 24A, and vacuum suction is completely performed.

  When the vacuum suction is released by introducing air into the space above the suction hole 24A, the projecting portion 28 returns to its original shape by its elastic restoring force (that is, from the state of FIG. 7B to FIG. 7A). The electronic component 40 is pushed up. As a result, the vacuum suction is more reliably released, and the electronic component 40 can be easily removed.

FIG. 8 shows another aspect of the vacuum suction sheet of Example 2. In this embodiment, a C-shaped protrusion 28B is provided so as to surround the suction hole 24B. That is, the protruding portion 28B has a shape in which the air escape portion 29 is provided by cutting a part of the ring surrounding the suction hole 24B. Further, similarly to the protrusion 28 of the vacuum suction sheet 2A described above, the protrusion 2 8 B is provided as low as possible. By these, also Oite vacuum suction sheet, the lower surface 41 of the electronic component 40 comes into contact with the sheet surface near the suction holes 24B early when discharging air from the first suction hole 24 B, it is adsorbed The

  FIG. 9 shows still another aspect of the vacuum suction sheet of Example 2. In this embodiment, the protruding portion 28C is very small, and a large number are formed on the entire sheet surface. That is, such a protruding portion 28C can be realized by making the bottom surface of the accommodating portion 23C a satin finish.

  In the first and second embodiments described above, the lower surface 41 of the electronic component 40 is flat. However, the lower surface of the electronic component 40 is not necessarily flat. If the electronic component 40 can be adsorbed to the sheet surface of the vacuum suction sheet 2 and can be elastically pushed up by the protrusion provided on the sheet surface, the lower surface of the electronic component 40 is, for example, a curved surface, You may have a small protrusion.

It will be described below with reference to FIG. 10 to 12 a method for manufacturing a fixture with a vacuum suction sheet 2 of the first embodiment described above. 10 is an overall perspective view of the mold 10 for producing the vacuum suction sheet 2, FIG. 11 is a longitudinal sectional view taken along the line CC ′ of the mold 10, and FIG. FIG. 6 is a diagram illustrating a manufacturing process of the jig 1. In addition, the method of manufacturing the fixing jig provided with the vacuum suction sheet of Example 2 is basically the same as the manufacturing method described below.

  The mold 10 has a cavity 14 corresponding to one vacuum suction sheet 2. A convex portion 11 having a shape corresponding to the accommodating portion 23 is provided on the bottom surface of the cavity 14, and the surface of the convex portion 11 has a semicircular cross section that is a cross-shaped groove corresponding to the protruding portion 25. A recess 12 is formed. The boundary groove 15 between the protrusion 11 and the protrusion 11 corresponds to a lattice-like boundary 26 in the vacuum suction sheet 2. The opening of the cavity 14 has substantially the same rectangular shape as the protruding surface 31 of the base 3.

  First, a silicone-based or fluorine-based room temperature curable liquid resin 20 (hereinafter simply referred to as “resin 20”) is poured into the cavity 14 of the mold 10 (step S1 in FIG. 12). At this time, the liquid level of the resin 20 is set to exceed the mold surface 13 of the mold 10. Next, the mold 10 is placed in the vacuum desiccator 61, and left for 20 minutes at room temperature and about 100 kPa, thereby removing the bubbles 54 inside the resin 20 (step S2). Further, a primer is applied in advance to the projecting surface 31 of the base 3, and the base 3 is brought into contact with the mold surface 13 of the mold 10 while the projecting surface 31 is inserted into the opening of the cavity 14 (step S3). By inserting the protruding surface 31 into the cavity 14, the position of the base 3 with respect to the mold surface 13 is determined.

  When the base 3 is brought into contact with the mold surface 13 of the mold 10 in this way, pressure is applied to the resin 20 inside the cavity 14 by the projecting surface 31, so that the resin 20 enters the intake through passage 32 of the base 3 and the base 3. It overflows to the back side. In this state, the mold 10 and the base 3 are left at room temperature for 24 hours to cure the resin 20 (step S4 in FIG. 12). When the resin 20 is completely cured, the mold 10 and the base 3 are placed in the oven 62 and heated at 100 ° C. for 1 hour (step S5). As a result, the primer applied to the protruding surface 31 of the base 3 is cured, and the resin 20 is firmly bonded to the protruding surface 31. The resin 20 may be bonded to the base 3 as long as sufficient adhesive strength is obtained, and natural bonding caused by curing of the resin 20 may be used. In this case, the primer application and bonding steps are not necessary.

  Thereafter, the resin 20 that has reached the back side of the base 3 is removed, and the mold 10 is removed (step S6 in FIG. 12). Thereby, the vacuum suction sheet 2 appears on the protruding surface 31 of the base 3. Finally, a hole is drilled through the intake through passage 32 to remove the resin 20 cured inside the intake through passage 32 and the suction hole 24 is formed in the vacuum suction sheet 2 (step S7). Thus, the fixing jig 1 including the vacuum suction sheet 2 according to the first embodiment is obtained.

  Even in the case of manufacturing a fixing jig including the vacuum suction sheet of Example 2, a cavity 14 having a concave portion having a shape corresponding to each protruding portion on the bottom surface may be provided in the mold 10 and manufactured by the same method as described above. . When it is desired to provide a large number of small and small protrusions 28 </ b> C as in the vacuum suction sheet shown in FIG. 9, the surface of the protrusions 11 of the cavity 14 of the mold 10 is a satin finish.

  Before supplying the resin 20 to the mold 10, carbon powder may be added to the resin 20 so that the obtained vacuum suction sheet has conductivity. In such a vacuum suction sheet, static electricity generated by repeating the suction fixation and release of the electronic component can be released, so that the static electricity is prevented from damaging the electronic elements inside the electronic component 40. Further, instead of providing the boundary groove 15 on the bottom surface of the cavity 14, the resin sealing body is cut with a rotary blade or the like by providing a cut groove at the position of the vacuum suction sheet corresponding to the groove 15 by machining. It is also possible to manufacture a vacuum suction sheet used when manufacturing electronic components.

DESCRIPTION OF SYMBOLS 1 ... Fixing jig 10 ... Type | mold 11 ... Convex part 12 ... Concave part 13 ... Mold surface 14 ... Cavity 15 ... Boundary groove 2 ... Vacuum adsorption sheet 20 ... Resin 23 ... Accommodating part 24 ... Adsorption hole 25, 28 ... Protrusion part 26 ... Boundary 29 ... Air escape portion 3 ... Base 31 ... Projection surface 32 ... Intake through passage 40 ... Electronic component 50 ... Exhaust pump 51 ... Exhaust pipe 52 ... Exhaust valve 53 ... Open valve 70 ... Contact part

Claims (8)

A sheet made of an elastic body having suction holes for vacuum-splitting individualized pieces,
The suction hole, which is formed integrally with the sheet, completely surrounds the suction hole, and is elastically deformed when air is sucked from the suction hole in a state where the individual piece is placed, and contacts with the individual piece. An individual having a projecting portion that increases in area and reduces the contact area with the individualized product by pushing up the individualized product by elastic restoring force when suction of air from the suction hole is released Vacuum adsorption sheet for singulation device.   The vacuum suction sheet for an individualization device according to claim 1, wherein the individualization has a flat lower surface.   The vacuum suction sheet for a singulation apparatus according to claim 1 or 2, wherein a cross section of the protrusion in a direction perpendicular to the sheet is a semicircular shape. A sheet made of an elastic body having suction holes for vacuum-splitting individualized pieces,
Wherein a protrusion provided on said sheet and integrally on a sheet surface around the suction holes, the pieces product and the ambient buried from the suction holes on the seat surface of the ambient air is Ru sucked Elastically deforms so that the contact area with the sheet surface increases, and when the suction of air from the suction hole is released, the singulated material is pushed up by the elastic restoring force to reduce the contact area with the singulated material. A vacuum suction sheet for a singulation apparatus, characterized by having a protruding portion.   The vacuum adsorption sheet for an individualization device according to claim 4, wherein the individualization product has a flat lower surface. A method for producing a fixing jig for adsorbing and fixing individualized products using the vacuum suction sheet for an individualizing device according to any one of claims 1 to 5,
a) a molding step of supplying a room temperature curable liquid resin to the cavity of a mold having a cavity corresponding to the vacuum suction sheet provided with a concave portion having a shape obtained by inverting the protruding portion;
b) an abutting step of positioning and abutting a base having an intake through passage to a mold surface of the mold in which the room temperature curable liquid resin is supplied to the cavity;
c) a curing step for curing the room temperature curable liquid resin at room temperature ;
d) a mold release step of forming the sheet on the base by mold release;
e) a suction hole creating step of creating the suction hole in the sheet by punching the sheet through the intake through-passage;
A method for manufacturing a fixing jig, comprising:   The method for manufacturing a fixing jig according to claim 6, wherein the concave portion is formed by providing a girder-shaped groove on the bottom surface of the cavity.   The fixing jig manufacturing method according to claim 6, wherein the bottom surface of the cavity is textured.

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