JP5988787B2 - Grinding equipment - Google Patents

Description

  The present invention relates to a grinding apparatus that grinds a disk-shaped workpiece and thins it to a predetermined thickness, and particularly relates to a grinding apparatus that thins an edge-trimmed disk-shaped workpiece.

  In recent years, with the reduction in thickness and size of electrical equipment, it has been desired to reduce the thickness of disk-shaped workpieces. When the disk-shaped workpiece is thinly ground, the outer periphery of the disk-shaped workpiece becomes a sharp edge, and a crack may be generated from the outer peripheral portion toward the center portion, and the disk-shaped workpiece may be damaged. For this reason, there has been proposed a method of removing (trimming) an outer peripheral portion that can become a sharp edge after the thinning of the disc-shaped workpiece from the outer peripheral portion of the disc-shaped workpiece prior to grinding (see, for example, Patent Document 1). In this trimming process, the processing time is shortened by leaving a predetermined thickness instead of completely removing the outer peripheral portion of the disk-shaped workpiece.

  In this case, the disk-shaped workpiece is held on the chuck table, and the outer peripheral portion of the disk-shaped workpiece is cut from the surface side by the cutting blade. Then, by rotating the chuck table once, the outer peripheral portion of the disc-shaped workpiece is cut by the cutting blade, and the outer peripheral portion of the disc-shaped workpiece is formed in a step shape. At this time, the surface side of the outer peripheral portion of the disk-shaped workpiece is removed deeper than the target finish thickness. In the subsequent grinding process, the disk-shaped workpiece is ground from the back side to the target finish thickness. For this reason, a sharp edge does not remain in the outer peripheral portion of the disc-shaped workpiece after grinding, and the occurrence of cracks in the outer peripheral portion of the disc-shaped workpiece is prevented.

JP 2012-135853 A

  By the way, in the grinding process of patent document 1, it grinds from the back surface side of a disk-shaped workpiece in the state where the surface side of the trimmed disk-shaped workpiece was adsorbed by a chuck table. In this case, since the outer peripheral portion of the disk-shaped workpiece is formed in a step shape by trimming on the front surface side, the remaining portion at the time of trimming remaining on the back surface side is not held by the chuck table. When the disk-shaped workpiece is thinned in this state, the remaining portion of the disk-shaped workpiece is cracked by the grinding load and scattered as a workpiece fragment around the chuck table. Since the workpiece fragments are thin and adhere to each part of the apparatus with the grinding water, it is difficult to remove the workpiece fragments from within the apparatus.

  This invention is made | formed in view of this point, and it aims at providing the grinding device which can collect | recover the workpiece | work fragments of the disk shaped workpiece | work scattered around the chuck | zipper table easily.

  The grinding apparatus of the present invention includes a chuck table for holding a disk-shaped workpiece, a grinding means for rotatably mounting a grinding wheel having a grinding wheel arranged in an annular shape around the center of the grinding wheel, and grinding on the grinding wheel. In the grinding apparatus, comprising at least a grinding water supply means for supplying water, and a water case surrounding the grinding wheel and the chuck table of the grinding means and receiving the grinding water supplied by the grinding water supply means. The case includes a top plate having a passage opening that allows passage of the grinding means, a first bottom plate that has an opening that allows the chuck table to be disposed and covers the periphery of the chuck table, and the first plate A bottom plate and a side wall connected to the top plate form a box shape, which is disposed on the first bottom plate inside the water case and covers the periphery of the chuck table. And a acquisition box for acquiring workpiece debris generated by the grinding by the grinding means comprises a bottom plate of the.

  According to this configuration, since the grinding is performed inside the water case, the work pieces scattered from the disk-shaped work are not attached to each part of the apparatus outside the water case by the grinding water. In the water case, the workpiece fragments are acquired in the acquisition box, and the workpiece fragments acquired in the acquisition box are deposited on the second bottom plate around the chuck table. For this reason, the work piece can be easily recovered from the grinding device by simply taking out the acquisition box from the water case.

  Further, in the grinding apparatus of the present invention, the water case has a carry-out portion for carrying out the acquisition box for obtaining a work piece out of the water case, and a carry-out for allowing the acquisition box to be carried out from a side wall of the water case. The acquisition box can be carried out by opening the carry-out door.

  According to the present invention, the work pieces of the disk-shaped work scattered around the chuck table can be easily collected by grinding inside the water case provided with the acquisition box.

It is a perspective view of the grinding device concerning this embodiment. It is an upper surface schematic diagram of the water case which concerns on this Embodiment. It is a cross-sectional schematic diagram in alignment with the AA of the water case which concerns on this Embodiment. It is explanatory drawing of the collection | recovery operation | work of the workpiece | work piece in the water case which concerns on this Embodiment.

  Hereinafter, the grinding apparatus according to the present embodiment will be described with reference to the accompanying drawings. FIG. 1 is a perspective view of a grinding apparatus according to the present embodiment. The grinding apparatus is not limited to the configuration shown in FIG. The grinding device may have any configuration as long as it has a water case capable of acquiring a workpiece fragment (end material). In FIG. 1, for convenience of explanation, the water case is indicated by a one-dot chain line.

  As shown in FIG. 1, the grinding apparatus 1 is configured to grind the disc-shaped workpiece W by relatively rotating the chuck table 3 holding the disc-shaped workpiece W and the grinding wheel 47 of the grinding means 4. ing. A circuit such as an IC or LSI is formed on the surface 11 of the disk-shaped workpiece W, and a protective tape (not shown) for protecting the circuit such as the IC is attached. The disk-shaped workpiece W is held on the chuck table 3 with the surface 11 to which the protective tape is attached facing downward. As the disk-shaped workpiece W, for example, a semiconductor wafer, an inorganic material substrate, a WL-CSP (Wafer Level CSP) in which a semiconductor wafer is coated with a resin film, or the like may be used.

  Further, the outer peripheral portion of the disk-shaped workpiece W is trimmed by a predetermined depth from the surface 11 side of the disk-shaped workpiece W in the preceding trimming process (see FIG. 3). The outer peripheral portion of the disk-shaped workpiece W is formed in a step shape over the entire circumference by this trimming leaving the bowl-shaped remaining portion 13. In this case, since the outer peripheral portion of the disk-shaped workpiece W is trimmed deeper than the target finishing thickness of the grinding process, the remaining portion 13 of the disk-shaped workpiece W is completely removed after the grinding and remains in a sharp edge shape. There is nothing.

  The grinding device 1 has a substantially rectangular parallelepiped base 2. On the front side of the upper surface of the base 2, an operation panel 21 that receives instructions for the grinding device 1 is provided. A rectangular opening 22 extending in the X-axis direction is formed on the upper surface of the base 2, and a column 23 for supporting the grinding means 4 is erected on the rear side of the opening 22. The opening 22 is covered with a movable plate 31 that can move together with the chuck table 3 and a bellows-shaped waterproof cover 32. Below the waterproof cover 32, a ball screw type moving mechanism (not shown) for moving the chuck table 3 in the front-rear direction is provided. The chuck table 3 is reciprocated between a transfer position where the disk-like workpiece W is transferred by a moving mechanism and a grinding position facing the grinding means 4.

  The chuck table 3 is formed in a disk shape, and a suction surface 33 for sucking and holding the disk-shaped workpiece W is formed on the upper surface. The suction surface 33 is formed of a porous ceramic material, and is connected to a suction source (not shown) disposed in the base 2. A box-shaped water case 5 is provided at a grinding position on the base 2 to receive the grinding water during grinding. The top plate 51 of the water case 5 is formed with a passage opening 52 through which the grinding means 4 can pass, and the disc-like workpiece W on the chuck table 3 is placed on the water case 5 on the front side wall 53 of the water case 5. An intake port 54 for taking in is formed.

  In the water case 5, a height gauge 25 and a grinding water supply means 26 are provided. The height gauge 25 measures the surface position of the chuck table 3 in advance, and measures the thickness of the disk-shaped workpiece W based on the surface position. The grinding water supply means 26 supplies the grinding water toward the disk-shaped workpiece W during the grinding process. The disc-shaped workpiece W is taken into the water case 5 by moving the chuck table 3 to the grinding position via the take-in port 54. Further, the grinding wheel 47 is accommodated in the water case 5 through the passage opening 52, whereby grinding is performed. In this way, the grinding in the water case 5 prevents the grinding water and workpiece fragments from being scattered outside the water case 5.

  The column 23 is provided with a moving mechanism 41 that moves the grinding means 4 up and down. The moving mechanism 41 includes a pair of guide rails 42 arranged in front of the column 23 and parallel to the Z-axis direction, and a motor-driven Z-axis table 43 slidably installed on the pair of guide rails 42. Yes. The grinding means 4 is supported on the front surface of the Z-axis table 43. On the back surface of the Z-axis table 43, a nut portion protruding rearward is provided. A ball screw provided on the front surface of the column 23 is screwed into the nut portion of the Z-axis table 43. The drive motor 44 connected to one end of the ball screw is driven to rotate, whereby the grinding means 4 is moved along the guide rail 42 in the Z-axis direction.

  The grinding means 4 is provided with a mount 46 at the lower end of a cylindrical spindle 45. The mount 46 is provided with a grinding wheel 47 in which a plurality of grinding wheels 48 are arranged in an annular shape. The grinding wheel 48 is composed of, for example, a diamond wheel in which diamond abrasive grains are hardened with a binder such as a metal bond or a resin bond. The grinding wheel 47 is rotated at a high speed around the Z axis as the spindle 45 is driven. Then, the disk-shaped workpiece W is ground by rotating and contacting the grinding wheel 47 and the disk-shaped workpiece W in a parallel state.

  In the grinding apparatus 1 configured as described above, the grinding wheel 47 of the grinding means 4 is brought close to the chuck table 3 while rotating around the Z axis inside the water case 5. Then, grinding water is supplied to the disk-shaped workpiece W, and the grinding wheel 47 is brought into contact with the back surface 12 of the disk-shaped workpiece W, whereby the disk-shaped workpiece W is ground. During the grinding process, the thickness of the disc-shaped workpiece W is measured in real time by the height gauge 25. The feed amount of the grinding means 4 is controlled so that the measurement result of the height gauge approaches the target finish thickness, and the disc-like workpiece W is ground to the finish thickness by the grinding wheel 47.

  In this grinding process, as the disk-shaped workpiece W is thinned from the back surface 12 side (upper surface side), the remaining portion 13 at the time of trimming the disk-shaped workpiece W is also thinned (see FIG. 4B). Therefore, the bowl-shaped remaining portion 13 of the disk-shaped workpiece W is broken from the disk-shaped workpiece W when a grinding load from the grinding wheel 47 is applied, and is scattered around the chuck table 3 as workpiece fragments P. The water case 5 according to the present embodiment is provided with an acquisition box 6 for acquiring the work piece P, and the work piece P can be easily collected by carrying out the acquisition box 6 to the outside. .

  Hereinafter, with reference to FIG.2 and FIG.3, the detailed structure of a water case is demonstrated. FIG. 2 is a schematic top view of the water case according to the present embodiment. FIG. 3 is a schematic cross-sectional view taken along line AA of the water case according to the present embodiment. The water case is not limited to the configuration shown in FIGS. The water case may have any configuration as long as it is formed so as to be able to take out work pieces by the acquisition box. In FIG. 2, for convenience of explanation, the top plate is omitted, and the grinding means is indicated by a one-dot chain line. 2 and 3 omit the height gauge and the grinding water supply means.

  As shown in FIGS. 2 and 3, the water case 5 is formed in a rectangular parallelepiped box shape in which a top plate 51 and a first bottom plate 55 are connected by a side wall 53. A passage opening 52 is formed in the top plate 51 according to the outer diameter of the grinding wheel 47, and the grinding wheel 47 can pass through the water case 5 through the passage opening 52. An opening 56 is formed in the first bottom plate 55 according to the outer diameter of the chuck table 3, and the chuck table 3 is disposed inside the opening 56 of the first bottom plate 55. With such a configuration, the grinding wheel 47 and the chuck table 3 are opposed to each other in the water case 5 to enable grinding.

  The left and right side walls 53 are formed with an outlet 59 of the acquisition box 6 described later, and the outlet 59 is closed by a carry-out door 57. The carry-out door 57 is attached to the top plate 51 through a hinge portion 58 so as to be opened upward. A handle 50 is provided on the outer surface of the carry-out door 57. By pulling up the handle 50, the carry-out door 57 is opened with the hinge portion 58 as a fulcrum, and the outlet 59 of the water case 5 is opened to the outside. The lower end portion of the carry-out door 57 is in contact with the side wall 53 from the outside so that the carry-out door 57 does not enter the inside of the water case 5. The opening / closing of the carry-out door 57 may be performed manually while holding the handle 50, or may be automatically performed by an air actuator or the like.

  In the water case 5, a pair of acquisition boxes 6 are provided that function as trays for workpiece fragments dropped around the chuck table 3. The pair of acquisition boxes 6 are formed in a mesh shape so as to allow grinding water to pass through, and are arranged on both the left and right sides of the chuck table 3. The pair of acquisition boxes 6 is formed by a second bottom plate 61 positioned above the first bottom plate 55 and side walls 62 erected from the periphery of the second bottom plate 61. The second bottom plate 61 is cut out in a semicircular shape along the outer diameter of the chuck table 3. As a result, the chuck table 3 is sandwiched from the left and right sides by the pair of acquisition boxes 6, and the periphery of the chuck table 3 is covered by the second bottom plate 61.

  The side wall 62 is formed such that an arc-shaped inner wall 62 a surrounding the chuck table 3 is formed low, and an outer wall 62 b positioned outside the inner wall 62 a with respect to the chuck table 3 is formed high. For this reason, the workpiece fragments scattered from the disk-shaped workpiece W are received by the outer wall 62b, and the workpiece fragments are acquired in the acquisition box 6. In this case, the grinding water is also scattered along with the workpiece fragments, but since the entire acquisition box 6 is formed in a mesh shape, the grinding water flows down to the first bottom plate 55 without collecting in the acquisition box 6. Therefore, only workpiece fragments are deposited in the acquisition box 6.

  A work piece discharge port 63 is formed in the outer wall 62 b facing the carry-out door 57, and the discharge port 63 is closed by an opening / closing lid 64. The opening / closing lid 64 is attached to the upper end side of the outer wall 62b through a hinge portion 65 so as to be opened and closed. In addition, the lower end portion of the opening / closing lid 64 is in contact with the outer wall 62b from the outside so that the opening / closing lid 64 does not enter the inside of the acquisition box 6. The pair of acquisition boxes 6 configured in this way is supported by the carry-out portion 67 so as to be turnable so as to be carried out from the carry-out door 57 to the outside. The open / close lid 64 is opened by the turning of the pair of acquisition boxes 6, whereby the work pieces are collected from the discharge port 63. The details of the work piece collection operation will be described later.

  The carry-out part 67 has a turning shaft 68 that is driven by a rotary cylinder or the like, and an arm 69 that turns together with the acquisition box 6 held at the tip by driving the turning shaft 68. The pivot shaft 68 extends along the outer wall 62 b below the second bottom plate 61. The proximal end side of the arm 69 is supported by the turning shaft 68, and the distal end side of the arm 69 is connected to the vicinity of the corner between the outer wall 62 b and the second bottom plate 61. When the turning shaft 68 is driven, the acquisition box 6 is turned toward the outlet 59 together with the arm 69 with the turning shaft 68 as a fulcrum. Then, the acquisition box 6 is carried out to the outside of the water case 5 by turning the tip of the arm 69 to the outside of the outlet 59.

  With reference to FIG. 4, the collection | recovery operation | movement of the workpiece | work piece in a water case is demonstrated. FIG. 4 is an explanatory diagram of the operation of collecting the work pieces in the water case according to the present embodiment. 4A shows a state before the grinding process, FIG. 4B shows a state during the grinding process, and FIG. 4C shows a state when the workpiece fragments are collected after the grinding process is finished.

  As shown in FIG. 4A, before grinding, the grinding wheel 47 is positioned in the water case 5 through the passage opening 52, and the disc-shaped workpiece W on the chuck table 3 passes through the intake port 54. 5 is taken in. Then, the chuck table 3 is positioned below the grinding wheel 47, and the back surface 12 of the disk-shaped workpiece W is ground by the grinding wheel 47. At this time, the outlet 59 of the water case 5 is closed by the carry-out door 57, and the scattering of the grinding water to the outside of the water case 5 is prevented. A pair of acquisition boxes 6 are arranged so as to sandwich the chuck table 3 from the left and right.

  As shown in FIG. 4B, when the thickness of the disk-shaped workpiece W approaches the finished thickness by grinding, the bowl-shaped remaining portion 13 that is the outer peripheral portion of the disk-shaped workpiece W is also thinned. Since the remaining portion 13 is floating from the surface of the chuck table 3, the remaining portion 13 is easily broken when a grinding load is applied from the grinding wheel 47, and the workpiece 13 is scattered around as a work piece P. The workpiece fragments P scattered from the disk-shaped workpiece W are received by the outer wall 62b of the acquisition box 6 and deposited on the second bottom plate 61. When the disc-like workpiece W is ground to the finished thickness, the grinding process is stopped and the grinding wheel 47 is separated from the disc-like workpiece W.

  As shown in FIG. 4C, when the grinding process is completed, the carry-out door 57 is opened upward by lifting the handle 50, and the outlet 59 of the water case 5 is opened to the outside. Next, the carry-out part 67 is driven, and the arm 69 and the acquisition box 6 are turned toward the take-out port 59 around the turning shaft 68. Thus, the acquisition box 6 is carried out of the water case 5 while the acquisition box 6 is raised from the horizontal posture to the vertical posture. When the acquisition box 6 is vertically oriented, the outer wall 62b is tilted sideways, and the second bottom plate 61 is raised vertically. When the outer wall 62b is tilted sideways, the opening / closing lid 64 is opened downward by gravity, and the discharge port 63 of the acquisition box 6 is opened.

  Then, when the second bottom plate 61 is raised vertically, the workpiece debris P deposited on the second bottom plate 61 slides down, and the workpiece debris P is discharged from the acquisition box 6 through the discharge port 63. . In this case, since the second bottom plate 61 is formed in a mesh shape, the contact area between the work pieces P that are easily attached by the grinding water and the second bottom plate 61 is reduced. The fragments P are easily peeled off. Then, by disposing the collection box 27 directly below the discharge port 63, the workpiece fragments P that have slid down from the second bottom plate 61 are collected. Thus, the acquisition box 6 according to the present embodiment can collect the work pieces P without being touched by the operator.

  As described above, according to the grinding apparatus 1 according to the present embodiment, since the grinding is performed inside the water case 5, the work pieces P scattered from the disk-shaped work W adhere to each part of the apparatus outside the water case 5. There is nothing to do. In the water case 5, the workpiece fragments P are acquired in the acquisition box 6, and the workpiece fragments P acquired in the acquisition box 6 are accumulated on the second bottom plate around the chuck table 3. For this reason, the work piece P can be easily recovered from the grinding apparatus 1 simply by taking out the acquisition box from the water case 5.

  In addition, this invention is not limited to the said embodiment, It can change and implement variously. In the above-described embodiment, the size, shape, and the like illustrated in the accompanying drawings are not limited to this, and can be appropriately changed within a range in which the effect of the present invention is exhibited. In addition, various modifications can be made without departing from the scope of the object of the present invention.

  For example, in the above-described embodiment, the disk-shaped workpiece W in which the surface side of the outer peripheral portion is trimmed is described as an example, but the present invention is not limited to this configuration. The disk-shaped workpiece W may be a workpiece that is not trimmed.

  Further, in the above-described embodiment, the entire acquisition box 6 is formed in a mesh shape, but is not limited to this configuration. The acquisition box 6 only needs to have at least the second bottom plate 61 formed in a mesh shape. In addition, the second bottom plate 61 is not limited to a mesh shape, and may be any configuration as long as grinding water does not accumulate in the acquisition box 6.

  Further, in the above-described embodiment, the acquisition box 6 is carried out of the water case 5 by turning the acquisition box 6 by the carry-out unit 67. However, the present invention is not limited to this configuration. The carry-out unit 67 may be configured so that the acquisition box 6 can be carried out of the water case 5. For example, the acquisition box 6 may be slid out of the water case 5.

In the above-described embodiment, the acquisition box 6 is carried out by the carry-out unit 67. However, the present invention is not limited to this configuration. The acquisition box 6 may be configured to be manually carried out of the water case 5.
Applicable to polishing equipment

  As described above, the present invention has an effect that the work pieces of the disk-like work scattered around the chuck table can be easily collected, and particularly the edge-trimmed disk-like work is thinned. Useful for grinding equipment.

DESCRIPTION OF SYMBOLS 1 Grinding device 3 Chuck table 4 Grinding means 5 Water case 6 Acquisition box 26 Grinding water supply means 27 Collection box 47 Grinding wheel 48 Grinding wheel 51 Top plate 52 Passing opening 53 Side wall 55 First bottom plate 56 Opening 57 Unloading door 61 Second bottom plate 67 Unloading part 68 Rotating shaft 69 Arm W Disk-shaped work P Work piece

Claims (2)

A chuck table for holding a disk-shaped workpiece;
A grinding means for rotatably mounting a grinding wheel having a grinding wheel arranged in an annular manner around the center of the grinding wheel;
Grinding water supply means for supplying grinding water to the grinding wheel;
A grinding apparatus comprising at least a water case that surrounds the grinding wheel of the grinding means and the chuck table and receives the grinding water supplied by the grinding water supply means;
The water case includes a top plate having a passage opening through which the grinding means can pass, a first bottom plate having an opening through which the chuck table can be placed, and covering the periphery of the chuck table, The bottom plate of 1 and the side wall connected to the top plate form a box shape,
A grinding apparatus comprising a second bottom plate disposed on the first bottom plate inside the water case and covering the periphery of the chuck table, and having an acquisition box for obtaining workpiece fragments generated by grinding by the grinding means . The water case is provided with a carry-out portion for carrying out the acquisition box for obtaining a work piece out of the water case, and a carry-out door for allowing the acquisition box to be carried out from a side wall of the water case,
The grinding apparatus according to claim 1, wherein the take-out door can be opened to carry out the acquisition box.

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