JP5819357B2 - Substrate transfer device and substrate transfer robot - Google Patents

Description

  The present invention relates to a substrate transfer robot for transferring a substrate such as a wafer.

  A semiconductor processing facility that is a substrate processing facility includes a wafer processing device that is a substrate processing device that processes a semiconductor wafer that is a substrate (hereinafter simply referred to as a “wafer”), a hoop that is a container that accommodates the wafer, and a wafer processing device. And a wafer transfer device which is a substrate transfer device for transferring a wafer between them. The hoop contains a wafer before or after processing. As processing for the wafer, process processing such as heat treatment, impurity introduction processing, thin film formation processing, lithography processing, cleaning processing, and planarization processing is assumed.

  The wafer transfer apparatus includes a preparation space forming unit in which a preparation space is formed, a hoop opener, and a substrate transfer robot. The preparation space is filled with a clean atmosphere gas. The hoop opener opens and closes each door provided in the hoop and the preparation space forming part. The substrate transfer robot is arranged in the preparation space and transfers the wafer across the hoop and the wafer processing apparatus.

  FIG. 13 is a diagram showing a simplified configuration of the substrate transfer robot 1 according to the first prior art. A technique similar to this conventional technique is disclosed in Patent Document 1. The substrate transfer robot 1 is realized by a scalar horizontal articulated robot. The substrate transfer robot 1 includes a robot arm 2, a base 3 to which the base end portion of the robot arm 2 is connected, and a robot hand 4 to which the tip end portion of the robot arm 2 is connected and holds a wafer. The robot arm 2 has first and second arm portions 5 and 6.

  A first arm portion 5 is provided on the base 3 so as to be able to turn around the first turning axis L1, and a second arm portion 6 is provided on the first arm portion 5 so as to be able to turn around the second turning axis L2. The robot arm 4 is provided on the second arm portion 6 so as to be able to turn around the third turning axis L3. The second arm unit 6 is pivotally driven by the first motor 7. The first arm unit 5 and the robot hand 4 are driven to turn by the second motor 8. The first and second motors 7 and 8 are provided on the base 3.

  A power transmission unit 10 having a belt 9 and the like is interposed between the second arm unit 6 and the first motor 7, and the power of the first motor 7 is transmitted to the robot hand 4 through the power transmission unit 10. Thus, the second arm portion 6 is driven to turn. Further, another power transmission unit 12 having another belt 11 or the like is interposed between the robot hand 4 and the second motor 8, and the power of the second motor 8 is transmitted to the robot via the other power transmission unit 12. This is transmitted to the hand 4, whereby the robot hand 4 is driven to turn. A large number of gears may be used in place of the belt 9 and the other belt 11.

  In such a substrate transfer robot 1, the distance from the joint between the first and second arm portions 5, 6 to the first motor 7 is increased, and accordingly, the number of parts of the power transmission unit 10 is increased, and the power transmission unit 10 is increased. Accumulation of errors in increases. As a result, the positioning accuracy of the tip of the robot arm 2 is lowered, and as a result, the positioning accuracy of the robot hand 4 is lowered. In addition, the distance from the joint between the second arm unit 6 and the robot hand 4 to the second motor 8 is increased, so that the number of parts of the other power transmission unit 12 is increased, and the accumulation of errors in the other power transmission unit 12 is increased. growing. This causes a problem that the accuracy of the posture of the robot hand 4 is lowered.

  FIG. 14 is a diagram showing a simplified configuration of the substrate transfer robot 16 according to the second prior art. Since this substrate transfer robot 16 is similar to the substrate transfer robot 1 described above, the corresponding parts are denoted by the same reference numerals, and only different points will be described.

  The first arm unit 5 is rotationally driven by the first motor 17. The first motor 17 is provided on the base 3. The second arm unit 6 is pivotally driven by the second motor 18. The second motor 18 is provided on the first arm unit 5. The robot hand 4 is driven to turn by the third motor 19. The third motor 19 is provided on the second arm unit 6.

  The first motor 17 has a fixed portion fixed to the base 3 and a rotating portion that rotates around a rotation axis L5 parallel to the first turning axis L1 with respect to the fixed portion. Between the 1st arm part 5 and the 1st motor 17, the 1st power transmission part 20 used as a deceleration unit is interposed, and the power of the 1st motor 17 is the 1st power transmission part 20 via the 1st power transmission part 20. This is transmitted to the arm portion 5, whereby the first arm portion 5 is driven to turn.

  The second motor 18 has a fixed portion fixed to the first arm portion 5 and a rotating portion that rotates around a rotation axis L6 parallel to the second turning axis L2 with respect to the fixed portion. Between the 2nd arm part 6 and the 2nd motor 18, the 2nd power transmission part 21 used as a deceleration unit is interposed, and the motive power of the 2nd motor 18 is 2nd via the 2nd power transmission part 21. This is transmitted to the arm portion 6, whereby the second arm portion 6 is driven to turn.

  The third motor 19 has a fixed portion fixed to the second arm portion 6 and a rotating portion that rotates around a rotation axis L7 parallel to the third turning axis L3 with respect to the fixed portion. Between the robot hand 4 and the third motor 19, a third power transmission unit 22 serving as a deceleration unit is interposed, and the power of the third motor 19 is transmitted to the robot hand 4 via the third power transmission unit 22. As a result, the robot hand 4 is driven to turn.

  In such a substrate transport robot 16, the second motor 18 is arranged such that the rotating part rotates around the rotation axis L <b> 6 parallel to the second turning axis L <b> 2, so that the arrangement space of the second motor 18 is reduced. In order to ensure, it is necessary to make a part of the 1st arm part 5 project in the extension direction. Therefore, the first arm portion 5 is enlarged, and this causes a problem of interference between the first arm portion 5 and an external object. Further, since the third motor 19 is arranged such that the rotating portion rotates around the rotation axis L7 parallel to the third turning axis L3, the second arm is secured in order to secure an arrangement space for the third motor 19. It is necessary to project a part of the part 6 in the extending direction. Therefore, the second arm portion 6 becomes large, and this causes a problem of interference between the second arm portion 6 and an external object.

  As a third conventional technique, Patent Document 2 discloses a technique related to a wrist mechanism of an industrial robot. In this conventional wrist mechanism, a wrist is tiltably connected to the tip of the rotating arm, and the wrist is tilted by a tilting motor. The tilting motor is installed in the inside of the rotating arm in parallel with the axis of the arm, whereby the distance from the tilting motor to the wrist can be shortened.

  Such a conventional technique aims at lowering inertia and improving rigidity in driving the wrist, and does not consider each problem occurring in the first and second conventional techniques.

Japanese Patent Application Laid-Open No. 11-10576 JP-A-1-92087

  An object of the present invention is to provide a substrate transfer robot capable of improving positioning accuracy and preventing interference with an external object.

The present invention comprises a base,
A robot hand that holds a substrate;
It has a plurality of hollow arm portions formed to extend, each arm portion is connected in series, one arm portion is connected to the base, the other arm portion is connected to the robot hand, Two arm portions connected to each other are provided so as to be pivotable relative to each other;
A swivel driving means that is provided for each joint between two arm portions that are coupled to each other and that pivotally drives the two arm portions that are coupled to each other;
The turning drive means
A fixed portion fixed to one of the two arm portions connected to each other; and a rotating portion that rotates about a rotation axis substantially parallel to the extending direction of the one arm portion with respect to the fixed portion; A motor housed in the internal space of the one arm part;
The motor is housed in an internal space of the one arm part and interposed between the motor and the other of the two arm parts connected to each other, and transmits the power of the motor from the rotating part of the motor to the other arm part. A substrate transfer robot including a power transmission unit.

  In the invention, it is preferable that the one arm portion is a base side arm portion.

  According to the present invention, the power transmission unit transmits the power of the motor from the rotation unit of the motor to the other arm unit by a plurality of gears.

In the present invention, the power transmission unit is
A first gear fixed to the rotating part of the motor coaxially with the rotation axis of the rotating part;
A second gear fixed to the other arm portion coaxially with the pivot axis of the one and other arm portions;
A plurality of intermediate gears interposed between the first and second gears;
It is fixed to said one arm part, Each intermediate gear has a gear accommodation box accommodated in the state which can be rotated around the rotating shaft line of each intermediate gear.

Further, the present invention is a substrate transfer robot provided with a robot hand that can turn relative to the arm portion of the one end,
Including other turning driving means for driving the robot hand to turn relative to the arm portion at the one end;
Other swivel drive means
A fixing portion provided on the arm portion at the one end; and a rotating portion that rotates about a rotation axis substantially parallel to an extending direction of the arm portion at the one end with respect to the fixing portion. With other motors housed in the internal space,
Another power transmission unit housed in the internal space of the arm part of the one end, interposed between another motor and the robot hand, and transmitting the power of the other motor from the rotating part of the other motor to the robot hand; It is characterized by including.

The present invention is also a substrate transfer robot for transferring a semiconductor wafer as a substrate,
The semiconductor wafer is transported between a container in which the semiconductor wafer is accommodated and a treatment apparatus for processing the semiconductor wafer.

  According to the present invention, the robot arm is configured by connecting a plurality of arm portions in series. Each arm part is hollow and formed to extend. The arm portion at one end is connected to the base, and the arm portion at the other end is connected to the robot hand. The two arm portions connected to each other are provided so as to be rotatable relative to each other. A turning drive means is provided at the joint between the two arm portions connected to each other. A turning drive means is provided for each joint. The turning drive means turns the two arm portions connected to each other relatively. As a result, the robot hand is moved, and the substrate held by the robot hand is moved.

  The turning drive means includes a motor and a power transmission unit. The motor includes a fixed portion fixed to one arm portion and a rotating portion that rotates with respect to the fixed portion. The power transmission unit is interposed between the motor and the other arm unit, and transmits the power of the motor from the rotating unit of the motor to the other arm unit. As a result, the one and other arm portions are driven to pivot relative to each other.

  Since the motor is provided on one arm portion, the distance from the joint to the motor between the one arm portion and the other arm portion is shorter than that provided on the base. Therefore, the structure of the power transmission unit can be simplified and accumulation of errors in the power transmission unit can be prevented. As a result, the positioning accuracy of the tip of the robot arm can be improved, and consequently the positioning accuracy of the robot hand can be improved.

  In the motor, the dimension in the direction parallel to the rotation axis of the rotating part is larger than the dimension in the direction perpendicular to the rotating axis of the rotating part. In consideration of this point, the motor is arranged such that the rotating portion rotates around a rotation axis substantially parallel to the extending direction of one arm portion. Since the motor is arranged in this way, it is not necessary to project a part of one arm portion in a direction perpendicular to the extending direction in order to secure a motor arrangement space. Accordingly, the one arm portion can be prevented from being enlarged, and thereby interference between the one arm portion and an external object can be prevented.

  Further, according to the present invention, the one arm portion is the arm portion on the base side, and therefore the motor is provided on the arm portion on the base side. Therefore, the mass of the arm part on the robot hand side can be reduced as compared with the case where the motor is provided on the arm part on the robot hand side. Accordingly, the arm part on the robot hand side can be driven to rotate with respect to the arm part on the base side with a small force.

  According to the invention, the power of the motor is transmitted from the rotating part of the motor to the other arm part by a plurality of gears. Therefore, the positioning accuracy of the tip of the robot arm can be improved as compared with the case where a belt is used for power transmission.

  Further, according to the present invention, the first gear is fixed to the rotating portion of the motor coaxially with the rotation axis of the rotating portion, and the second gear is turned to the other arm portion and the one and other arm portions are turned. A plurality of intermediate gears are interposed between the first and second gears and are fixed coaxially with the axis. As a result, the power of the motor is transmitted from the rotating part of the motor to the other arm part.

  Each intermediate gear is housed in a gear housing box in a state of being rotatable about the rotation axis of each intermediate gear. The gear housing box is fixed to one arm portion. Therefore, compared with the case where each intermediate gear is individually positioned and attached to one arm portion, the attaching operation can be facilitated.

  According to the invention, the robot hand is provided so as to be able to turn relative to the arm portion at one end. The other turning driving means drives the robot hand to turn relative to the arm portion at one end. Thereby, the posture of the robot hand can be changed.

  Another turning drive means includes another motor and another power transmission unit. Another motor has a fixed part fixed to an arm part at one end and a rotating part that rotates relative to the fixed part. The other power transmission unit is interposed between the other motor and the robot hand, and transmits the power of the other motor from the rotating unit of the other motor to the robot hand. As a result, the robot hand is driven to rotate relative to the arm portion at one end.

  Since the other motor is provided at the arm portion at one end, the distance from the joint between the arm portion at one end and the robot hand to the other motor is shorter than when provided at the base. Therefore, the configuration of the other power transmission unit can be simplified, and accumulation of errors in the other power transmission unit can be prevented. As a result, the accuracy of the posture of the robot hand can be improved.

  In other motors, the dimension in the direction parallel to the rotation axis of the rotating part is larger than the dimension in the direction perpendicular to the rotating axis of the rotating part. In consideration of this point, the other motors are arranged such that the rotating part rotates around a rotation axis substantially parallel to the extending direction of the arm part at one end. Since the other motors are arranged in this way, it is not necessary to project a part of the arm portion at one end in a direction perpendicular to the extending direction in order to secure an arrangement space for the other motors. Accordingly, it is possible to prevent the arm portion at one end from becoming large, and thus it is possible to prevent interference between the arm portion at one end and an external object.

  According to the invention, the substrate is a semiconductor wafer, and the substrate transfer robot transfers the semiconductor wafer between a container in which the semiconductor wafer is accommodated and a treatment apparatus that processes the semiconductor wafer. In this case, the substrate transfer robot is disposed in a space that is maintained at a predetermined cleanliness. Since this space is made as small as possible in order to easily achieve a predetermined cleanliness, there is a tendency for interference to occur when the semiconductor wafer is transferred. The substrate transfer robot can be suitably used for transferring a semiconductor wafer because interference is prevented as described above.

FIG. 3 is a cross-sectional view showing a simplified configuration of the substrate transfer robot 31 according to the first embodiment of the present invention. FIG. 2 is a plan view of a substrate transfer robot 31 as viewed from above in FIG. 1. 7 is a cross-sectional view showing a configuration of a second power transmission unit 77. FIG. FIG. 3 is a plan view showing a part of a semiconductor processing facility 101 including a substrate transfer robot 31. It is sectional drawing which cut | disconnects and shows a part of semiconductor processing equipment. It is sectional drawing which simplifies and shows the structure of the board | substrate conveyance robot 161 which is 2nd Embodiment of this invention. FIG. 7 is a plan view of the substrate transfer robot 161 as viewed from above in FIG. 6. It is sectional drawing which simplifies and shows the structure of the substrate conveyance robot 171 which is 3rd Embodiment of this invention. FIG. 9 is a plan view of the substrate transfer robot 171 as viewed from above in FIG. 8. It is sectional drawing which simplifies and shows the structure of the board | substrate conveyance robot 181 which is 4th Embodiment of this invention. FIG. 11 is a plan view of the substrate transport robot 181 viewed from above in FIG. 10. It is sectional drawing which shows the structure of the 2nd power transmission part 186 in the board | substrate conveyance robot which is 5th Embodiment of this invention. It is a figure which simplifies and shows the structure of the board | substrate conveyance robot 1 which is a 1st prior art. It is a figure which simplifies and shows the structure of the board | substrate conveyance robot 16 which is a 2nd prior art.

  FIG. 1 is a cross-sectional view showing a simplified configuration of a substrate transfer robot 31 according to a first embodiment of the present invention. FIG. 2 is a plan view of the substrate transfer robot 31 viewed from above in FIG. The substrate transfer robot 31 of the present embodiment is used to transfer a semiconductor wafer (hereinafter simply referred to as “wafer”) 32 as a substrate.

  The substrate transfer robot 31 is realized by a horizontal articulated robot of a SCARA (Selective Compliance Assembly Robot Arm, abbreviated as SCARA) type. The substrate transfer robot 31 includes a robot arm 33, a base 34 to which the base end portion 33 a of the robot arm 33 is connected, and a robot hand 35 to which the tip end portion 33 b of the robot arm 33 is connected and holds the wafer 32. .

  The robot arm 33 has first and second arm portions 36 and 37. The first and second arm portions 36 and 37 are hollow. The first and second arm portions 36 and 37 are formed so as to extend, in other words, are formed in a longitudinal shape. Such 1st and 2nd arm parts 36 and 37 are connected in series. A first arm portion 36 that is an arm portion at one end in the connecting direction is connected to the base 34, and a second arm portion 37 that is an arm portion at the other end in the connecting direction is connected to the robot hand 35.

  The robot hand 35 has a structure capable of gripping the wafer 32. Holding the wafer 32 means holding or grasping the wafer 32, and holding includes forms such as adsorption, receiving, and hanging, and grasping includes forms such as a knob, scissors, and a pinch. In the present embodiment, the robot hand 35 holds the wafer 32 by the receptacle. The robot hand 35 is formed in a plate shape, and the shape seen from the thickness direction is substantially Y-shaped. The robot hand 35 includes a hand main body 38 whose shape viewed from the thickness direction is substantially U-shaped, and an extending portion 39 that extends from the hand main body 38 and extends.

  The first and second arm portions 36 and 37 and the robot hand 35 are provided horizontally. The base 34 and the first arm portion 36 are provided so as to be rotatable relative to each other. Specifically, an upper end 34 a of the base 34 is provided with one end portion 36 a in the extending direction of the first arm portion 36 in the vertical direction Z. Is provided so as to be able to turn around a first turning axis L11 extending in the direction. The first and second arm portions 36 and 37 are provided so as to be rotatable relative to each other. Specifically, the other end portion 36 b of the first arm portion 36 extends to the extending direction of the second arm portion 37. One end portion 37a is provided so as to be able to turn around a second turning axis L12 parallel to the first turning axis L11. The second arm portion 37 and the robot hand 35 are provided so as to be able to turn relative to each other. One end portion 39a in the extending direction opposite to the side continuous with the main body 38 is provided so as to be able to turn around a third turning axis L13 parallel to the first and second turning axes L11 and L12. Swivel refers to a movement that relatively changes the axial direction of each member between two members.

  The first and second arm portions 36 and 37 and the robot hand 35 are provided so as to be shifted in the vertical direction Z. The second arm portion 37 is disposed above the first arm portion 36. As a result, the first arm portion 36 and the second arm portion 37 are prevented from interfering with each other. Therefore, the second arm portion 37 can be moved to a position overlapping with the first arm portion 36 in the vertical direction Z. . The robot hand 35 is disposed above the second arm unit 37. This prevents the second arm portion 37 and the robot hand 35 from interfering with each other, so that the robot hand 35 can move to a position overlapping with the second arm portion 37 in the vertical direction Z.

  A first turning drive means 41 is provided at the joint between the base 34 and the first arm portion 36. The first turning drive means 41 drives the base 34 and the first arm portion 36 to turn relative to each other. Specifically, the first arm portion 36 is relative to the base 34 around the first turning axis L11. Rotating drive.

  The joint between the first and second arm portions 36 and 37 is provided with a second turning drive means 42 which is a turning drive means. The second turning drive means 42 drives the first and second arm portions 36 and 37 to turn relative to each other. Specifically, the second arm portion 37 is driven with respect to the first arm portion 36 by the second turning axis L12. Rotating drive relatively around.

  The joint between the second arm portion 37 and the robot hand 35 is provided with third turning drive means 43 which is another turning drive means. The third turning drive means 43 drives the second arm part 37 and the robot hand 35 to turn relative to each other. Specifically, the robot hand 35 is moved relative to the second arm part 37 around the third turning axis L13. Rotating drive.

  The first and second turning drive means 41, 42 drive the turning of the first and second arm portions 36, 37, whereby the position of the distal end portion 33b of the robot arm 33 changes in a horizontal virtual plane, and consequently The position of the robot hand 35 changes in a horizontal virtual plane. Further, the robot hand 35 is driven to turn by the third turning drive means 43, whereby the posture of the robot hand 35 changes.

  The base 34 includes a base portion 46 fixed to a predetermined installation surface 45, a movable portion 47 provided to be displaceable in the vertical direction Z with respect to the base portion 46, and the movable portion 47 in the vertical direction Z with respect to the base portion 46. Elevating and lowering driving means 48 for driving displacement (see FIG. 5). The movable portion 47 is formed in a cylindrical shape, and is provided such that its axis extends in the vertical direction Z. The upper part of the movable part 47 becomes the upper part 34 a of the base 34. The movable part 47 is displaced and driven by the raising / lowering driving means 48, whereby the position of the tip 33b of the robot arm 33 changes up and down, and as a result, the position of the robot hand 35 changes up and down.

  A cylindrical one end side communication hole 52 that communicates with the internal space 51 of the first arm portion 36 is formed in a portion of the first arm portion 36 near the one end portion 36 a in the extending direction. The axis of the one end side communication hole 52 extends in a direction perpendicular to the extending direction of the first arm portion 36. A cylindrical other end side communication hole 53 that communicates with the internal space 51 of the first arm portion 36 is formed in a portion near the other end portion 36 b in the extending direction of the first arm portion 36. The axis of the other end side communication hole 53 is parallel to the axis of the one end side communication hole 52. The other end side communication hole 53 is opened facing the opposite side to the one end side communication hole 52.

  A cylindrical end communicating hole 55 communicating with the internal space 54 of the second arm portion 37 is formed in a portion of the second arm portion 37 near the one end portion 37a in the extending direction, and a cylindrical shape protruding outward. Projecting portion 56 is formed. The axis of the one end side communication hole 55 extends in a direction perpendicular to the extending direction of the second arm portion 37. The inner hole 57 of the protruding portion 56 is coaxial with the one end side communication hole 55 and communicates with the inner space 54 of the second arm portion 37 through the one end side communication hole 55. A cylindrical other end side communication hole 58 that communicates with the internal space 54 of the second arm portion 37 is formed in a portion near the other end portion 37 b of the second arm portion 37 in the extending direction. The axis of the other end side communication hole 58 is parallel to the axis of the one end side communication hole 55. The other end side communication hole 58 is opened facing the side opposite to the one end side communication hole 55.

  The extending part 39 of the robot hand 35 is hollow. A cylindrical end communicating hole 62 communicating with the internal space 61 of the extending portion 39 is formed in a portion of the extending portion 39 near the extending direction one end portion 39a, and the cylindrical protruding projecting outward is formed. A portion 63 is formed. The axis of the one end side communication hole 62 extends in a direction parallel to the thickness direction of the robot hand 35. The inner hole 64 of the projecting portion 63 is coaxial with the one end side communication hole 62 and communicates with the internal space 61 of the extending portion 39 via the one end side communication hole 62.

  The upper end of the movable portion 47 that is the upper portion 34a of the base 34 is gently and coaxially inserted into the one end side communication hole 52 of the first arm portion 36, whereby the base 34 and the first arm portion 36 are connected to the first arm portion 36. Around the turning axis L11, they are connected so as to be able to turn relative to each other. The axis lines of the one end side communication hole 52 and the movable portion 47 form a straight line common to the first turning axis line L11. Between the upper part 34a of the base 34 and the formation part 52a of the one end side communication hole 52 of the first arm part 36, there is a bearing means, thereby smoothly turning the first arm part 36 relative to the base 34. can do.

  The projecting portion 56 of the second arm portion 37 is gently and coaxially inserted into the other end side communication hole 53 of the first arm portion 36, whereby the first and second arm portions 36 and 37 are connected to the second pivot axis. Around L12, they are connected so as to be able to turn relative to each other. Each axis of the other end side communication hole 53 and the protrusion 56 forms a straight line common to the second turning axis L12. A bearing means is interposed between the protruding portion 56 of the second arm portion 37 and the forming portion 53 a of the other end side communication hole 53 of the first arm portion 36, thereby the second arm portion with respect to the first arm portion 36. 37 can be smoothly turned.

  The projecting portion 63 of the extending portion 39 of the robot hand 35 is gently and coaxially inserted into the other end side communication hole 58 of the second arm portion 37, whereby the second arm portion 37 and the robot hand 35 are connected to the third arm portion 37. Around the turning axis L13, they are connected so as to be able to turn relative to each other. Each axis of the other end side communication hole 58 and the protrusion 63 forms a straight line in common with the third turning axis L13. A bearing means is interposed between the protruding portion 63 of the extending portion 39 of the robot hand 35 and the forming portion 58 a of the other end side communication hole 58 of the second arm portion 37, whereby the robot with respect to the second arm portion 37 is interposed. The hand 35 can be smoothly turned.

  The first turning drive unit 41 includes a first motor 71 and a first power transmission unit 72. The first motor 71 and the first power transmission unit 72 are accommodated in the internal space 51 of the first arm unit 36. Therefore, even if dust is generated from the first motor 71 and the first power transmission unit 72, it is possible to prevent the dust from diffusing around the substrate transport robot 31, and thereby the cleanliness around the substrate transport robot 31. Can be prevented from decreasing.

  The first motor 71 includes a fixed portion 73 that is fixed to the first arm portion 36, and a rotating portion 74 that rotates around a rotation axis L <b> 21 that is substantially parallel to the extending direction of the first arm portion 36 with respect to the fixed portion 73. And have. The first motor 71 is realized by an electric motor, specifically, a servo motor. The first motor 71 is provided with a first encoder 75 that detects the amount of rotation of the rotating unit 74 relative to the fixed unit 73. The first power transmission unit 72 is interposed between the first motor 71 and the base 34, and transmits the power of the first motor 71 from the rotating unit 74 of the first motor 71 to the base 34. By such first turning drive means 41, the base 34 and the first arm portion 36 are driven to turn relative to each other.

  The second turning drive means 42 includes a second motor 76 that is a motor and a second power transmission unit 77 that is a power transmission unit. The second motor 76 and the second power transmission unit 77 are accommodated in the internal space 51 of the first arm unit 36. Therefore, even if dust is generated from the second motor 76 and the second power transmission unit 77, it is possible to prevent the dust from diffusing around the substrate transport robot 31, and thereby the cleanliness around the substrate transport robot 31. Can be prevented from decreasing.

  The second motor 76 includes a fixed portion 78 fixed to the first arm portion 36, and a rotating portion 79 that rotates around the rotation axis L 22 substantially parallel to the extending direction of the first arm portion 36 with respect to the fixed portion 78. And have. The second motor 76 is realized by an electric motor, specifically, a servo motor. The second motor 76 is provided with a second encoder 80 that detects the amount of rotation of the rotating unit 79 relative to the fixed unit 78. The second power transmission unit 77 is interposed between the second motor 76 and the second arm unit 37, and transmits the power of the second motor 76 from the rotating unit 79 of the second motor 76 to the second arm unit 37. . By such a second turning drive means 42, the first and second arm portions 36, 37 are driven to turn relative to each other.

  The 3rd turning drive means 43 has the 3rd motor 81 which is another motor, and the 3rd power transmission part 82 which is another power transmission part. The third motor 81 and the third power transmission unit 82 are accommodated in the internal space 54 of the second arm unit 37. Therefore, even if dust is generated from the third motor 81 and the third power transmission unit 82, it is possible to prevent the dust from diffusing around the substrate transport robot 31, thereby cleanliness around the substrate transport robot 31. Can be prevented from decreasing.

  The third motor 81 includes a fixed portion 83 fixed to the second arm portion 37, and a rotating portion 84 that rotates about a rotation axis L 23 that is substantially parallel to the extending direction of the second arm portion 37 with respect to the fixed portion 83. And have. The third motor 81 is realized by an electric motor, specifically, a servo motor. The third motor 81 is provided with a third encoder 85 that detects the amount of rotation of the rotating portion 84 relative to the fixed portion 83. The third power transmission unit 82 is interposed between the third motor 81 and the robot hand 35, and transmits the power of the third motor 81 from the rotating unit 84 of the third motor 81 to the robot hand 35. The second arm unit 37 and the robot hand 35 are driven to turn relative to each other by such third turning drive means 43.

  The raising / lowering drive means 48 has a 4th motor and a 4th power transmission part. The fourth motor has a fixed portion fixed to the base portion 46 of the base 34 and a rotating portion that rotates with respect to the fixed portion. The fourth motor is realized by an electric motor, specifically, a servo motor. The fourth motor is provided with a fourth encoder that detects the amount of rotation of the rotating part relative to the fixed part. The fourth power transmission unit is interposed between the fourth motor and the movable part 47 of the base 34, and transmits the power of the fourth motor from the rotating part of the fourth motor to the movable part 47 of the base 34. The fourth power transmission unit converts the rotational motion of the rotating unit of the fourth motor into a linear motion in the vertical direction Z.

  The first to fourth power transmission units 72, 77, and 82 also function as a speed reducer. Therefore, it is not necessary to provide a separate speed reducer, thereby reducing the number of parts.

  FIG. 3 is a cross-sectional view showing the configuration of the second power transmission unit 77. In FIG. 3, in order to prevent complication, the configuration of the second power transmission unit 77 is simplified. Since the configurations of the first to third power transmission units 72, 77, and 82 are similar, only the configuration of the second power transmission unit 77 will be described, and the first and third power transmission units 72 and 82 are avoided from overlapping. The description is omitted.

  The second power transmission unit 77 transmits the power of the second motor 76 from the rotating unit 79 of the second motor 76 to the protrusion 56 of the second arm unit 37 by a plurality of gears 91, 92, 93. Therefore, the positioning accuracy of the tip 33b of the robot arm 33 can be improved as compared with the case where a belt is used for power transmission. Further, since there is no deformation like a belt, vibration due to a sudden stop is prevented, and thus the operation of the robot arm 33 can be speeded up.

  Specifically, the second power transmission portion 77 is connected to the rotating portion 79 of the second motor 76, the first gear 91 fixed coaxially with the rotation axis L 22 of the rotating portion 79, and the protruding portion 56 of the second arm portion 37. The second gear 92 fixed coaxially with the second turning axis L12, a plurality of intermediate gears 93 interposed between the first and second gears 91 and 92, and fixed to the first arm portion 36, each intermediate gear 93 has a gear box 94 that is a gear housing box that is housed in a state of being rotatable around the rotation axis of each intermediate gear 93.

  Thus, the first gear 91 is fixed to the rotating portion 79 of the second motor 76 coaxially with the rotation axis L22 of the rotating portion 79, and the second gear 92 is connected to the protruding portion 56 of the second arm portion 37. The second pivot axis L12 is fixed coaxially, and a plurality of intermediate gears 93 are interposed between the first and second gears 91 and 92. As a result, the power of the second motor 76 is transmitted from the rotating portion 79 of the second motor 76 to the protruding portion 56 of the second arm portion 37.

  Each intermediate gear 93 is housed in a gear box 94 in a state of being rotatable around the rotation axis of each intermediate gear 93. The gear box 94 is fixed to the first arm portion 36. Therefore, compared with the case where each intermediate gear 93 is individually positioned and attached to the first arm portion 36, the attaching operation can be facilitated.

  Two gears that mesh with each other among the plurality of gears 91 to 93 are realized by bevel gears. Accordingly, the rotation around the rotation axis L22 of the rotating portion 79 of the second motor 76 or the rotation axis parallel to the rotation axis L22 is converted into the rotation around the second rotation axis L12 or the rotation axis parallel to the second rotation axis L12. Accordingly, the power of the second motor 76 can be transmitted from the rotating portion 79 of the second motor 76 to the protruding portion 56 of the second arm portion 37. In the present embodiment, the first gear 91 and the intermediate gear 93 a that meshes with the first gear 91 among the intermediate gears 93 are realized by bevel gears.

  FIG. 4 is a plan view showing a part of the semiconductor processing equipment 101 including the substrate transfer robot 31. FIG. 5 is a cross-sectional view showing a part of the semiconductor processing equipment 101 by cutting. 4 and 5, an example of the operation state of the substrate transport robot 31 is indicated by a solid line, and another example of the operation state is indicated by a two-dot chain line. The semiconductor processing facility 101 is a facility for processing the wafer 32.

  The semiconductor processing equipment 101 is defined in advance by, for example, SEMI (Semiconductor Equipment and Materials International) standard. In this case, the hoop 102 and the hoop opener 118 described later comply with specifications such as SEMI standards E47.1, E15.1, E57, E62, E63, and E84. The configuration of the semiconductor processing equipment 101 may be a configuration outside the SEMI standard.

  The wafer 32 before and after processing is accommodated in a container (hereinafter referred to as “hoop”) 102 called a FOUP 102 (Front Opening Unified Pod, abbreviated as FOUP). The FOUP 102 is a substrate container for mini-environment in a clean environment, with regard to a technique for cleaning an extreme place. A plurality of wafers 32 are accommodated in the hoop 102. The wafers 32 accommodated in the FOUP 102 are arranged at equal intervals in the vertical direction Z in a horizontal state.

  The hoop 102 includes a hoop main body 103 that is a container main body, and a hoop side door 104 that is a container side door provided to be removable from the hoop main body 103. The hoop main body 103 is formed in a substantially box shape, and a hoop internal space 105 which is a wafer accommodating space is formed. The hoop inner space 105 is opened to one side. When the hoop side door 104 is attached to the hoop main body 103, the hoop inner space 105 is closed, and when the hoop side door 104 is detached from the hoop main body 103, the hoop inner space 105 is opened.

  The semiconductor processing equipment 101 includes a wafer processing apparatus 106 that processes the wafer 32 and a wafer transfer apparatus 107 that is a front end module apparatus (abbreviated as EFEM) that transfers the wafer 32 between the FOUP 102 and the wafer processing apparatus 106. Including. As processing for the wafer 32, process processing such as heat treatment, impurity introduction processing, thin film formation processing, lithography processing, cleaning processing, and planarization processing is assumed. In the wafer processing apparatus 106, processes other than the above-described processes may be performed.

  The wafer processing apparatus 106 includes a processing space forming unit 112 in which the processing space 111 is formed, a processing apparatus main body that is disposed in the processing space 111 and processes the wafer 32 in the processing space 111, and an atmospheric gas that fills the processing space 111. And a processing space adjustment device for adjusting the processing space. The processing space adjustment device is realized by a fan filter unit or the like.

  The wafer transfer device 107 includes a preparation space forming unit 117 in which a preparation space 116 is formed, the substrate transfer robot 31 disposed in the preparation space 116, and a FOUP opener 118 that is an opening / closing device that opens and closes the hoop 102. And an aligner 119 arranged in the preparation space 116 for adjusting the orientation of the wafer 32 and a preparation space adjusting device 120 for adjusting the atmospheric gas filled in the preparation space 116. The preparation space adjusting device 120 is realized by a fan filter unit or the like.

The processing space 111 and the preparation space 116 are filled with an atmosphere gas having a high cleanliness. The treatment space 111 and the preparation space 116 are spaces in which contamination control is performed, and the suspended fine particles in the air are managed to be below a limited cleanliness level, and if necessary, the temperature, humidity, pressure, etc. It is a space where environmental conditions are also managed. In the present embodiment, the processing space 111 and the preparation space 116 are kept clean so as not to adversely affect the processing of the wafer 32. As the cleanliness, for example, CLASS1 defined by the International Organization for Standardization (abbreviated as ISO) is adopted.

  The processing space forming part 112 and the preparation space forming part 117 are arranged side by side in the front-rear direction X orthogonal to the up-down direction Z. Hereinafter, in the front-rear direction X, a direction from the processing space forming unit 112 toward the preparation space forming unit 117 is referred to as a front X1, and the opposite direction is referred to as a rear X2. A direction orthogonal to the up-down direction Z and the front-rear direction X is referred to as a left-right direction Y.

  The preparation space forming part 117 is formed in a rectangular parallelepiped box shape, and a rectangular parallelepiped preparation space 116 is formed. The preparation space forming unit 117 includes a front wall 121 and a back wall 122. The front wall 121 and the back wall 122 are arranged with an interval in the front-rear direction X. The back wall 122 is arranged behind the front wall 121 and separates the preparation space 116 and the processing space 111.

  A front-side opening 131 that penetrates in the front-rear direction X that is the thickness direction of the front wall 121 is formed in the front wall 121. The front side opening 131 is formed so that the wafer 32 can pass therethrough. The wafer 32 is moved from the inner space 105 to the preparation space 116 or from the preparation space 116 to the inner space 105 through the front opening 131. In the present embodiment, four front side openings 131 are provided. Each front side opening 131 is arranged at equal intervals in the left-right direction Y.

  A rear side opening 132 is formed in the rear wall 122 so as to penetrate in the front-rear direction X which is the thickness direction of the rear wall 122. The back side opening 132 is formed so that the wafer 32 can pass therethrough. The wafer 32 is moved from the preparation space 116 to the processing space 111 or from the processing space 111 to the preparation space 116 through the back side opening 132. In the present embodiment, two back side openings 132 are provided. Each back side opening 132 is arranged at intervals in the left-right direction Y.

  The hoop opener 118 is disposed on the front X1 side of the preparation space forming portion 117. The hoop opener 118 constitutes a part of the front wall 121 of the preparation space forming portion 117, and includes a front plate 141 in which the front side opening 131 is formed, and an opener side door 142 that is detachably attached to the front plate 141. And a hoop support part 143 that is disposed in front X1 of the preparation space 116 and supports the hoop 102 from below, and a door opening / closing mechanism 144 that opens and closes the opener side door 142 and the hoop side door 104. When the opener door 142 is attached to the front plate 141, the front opening 131 is closed, and when the opener door 142 is detached from the front plate 141, the front opening 131 is opened.

  The hoop 102 is positioned and installed on the hoop support portion 143. In the installation state in which the hoop 102 is installed on the hoop support portion 143, the opening 103a of the hoop body 103 and the opening 141a of the front plate 141 are in contact with each other over the entire circumference. Therefore, in the installed state, even if the opener side door 142 and the hoop side door 104 are detached from the openings 141a and 103a, outside air can be prevented from entering the hoop inner space 105 and the preparation space 116.

  The door opening / closing mechanism 144 grips the opener side door 142 and the hoop side door 104 directly or indirectly. The door opening / closing mechanism 144 moves the doors 142 and 104 between the mounting position and the opening position. In the mounting position, the doors 142 and 104 are mounted in the openings 141a and 103a, respectively, thereby preventing communication between the hoop inner space 105 and the preparation space 116. In the open position, the doors 142 and 104 are disengaged from the openings 141a and 103a, whereby the hoop inner space 105 and the preparation space 116 are communicated with each other. In the open position, the doors 142 and 104 are arranged in the rear X2 and the lower Z2 in the preparation space 116 with respect to the openings 141a and 103a. In the preparation space 116, a movable region 145 for moving the doors 142 and 104 between the mounting position and the opening position is set.

  In the present embodiment, four hoop openers 118 are provided. The hoop openers 118 are arranged at equal intervals in the left-right direction Y. Each hoop opener 118 is configured to be individually operable. FIG. 4 shows a state in which the front side opening located at the left end of the front side opening 131 is opened, and the remaining front side opening except the front side opening located at the left end of the front side opening 131 is closed.

  The preparation space forming part 117 further includes a bottom wall part 126. The bottom wall 126 is connected to the lower ends of the front wall 121 and the back wall 122. The aligner 119 and the substrate transfer robot 31 are fixed to such a bottom wall portion 126. The aligner 119 and the substrate transfer robot 31 are arranged at intervals in the left-right direction Y.

  The aligner 119 has a holding unit that holds the wafer 32. The aligner 119 rotates the wafer 32 held by the holding unit, and thereby adjusts the orientation of the wafer 32 so that a notch or an orientation flat formed in the wafer 32 faces a predetermined direction.

  The substrate transfer robot 31 is disposed near the back wall 122 in the preparation space 116. Further, the substrate transfer robot 31 is arranged at a central position between the hoop opener 118 at one end position in the left-right direction and the hoop opener 118 at the other end position in the left-right direction. In the substrate transport robot 31, the base 46 of the base 34 is fixed to the bottom wall 126 of the preparation space forming unit 117. The upper surface of the bottom wall portion 126 becomes the predetermined installation surface 45.

  The substrate transfer robot 31 further includes a controller 151. The controller 151 includes first to third turning drive units 41 to 43 based on a predetermined operation program or a movement command input from a user and detection results from the first to fourth encoders 75, 80, 85. And the raising / lowering drive means 48 is controlled, and the robot hand 35 is moved. The controller 151 includes a storage circuit that stores a predetermined program, an arithmetic circuit that calculates the program stored in the storage circuit, and a signal indicating a calculation result of the arithmetic circuit as the first to third turning drive units 41 to 43. And output means for giving to the lift drive means 48. The storage circuit is realized by a RAM (Random Access Memory) and a ROM (Read Only Memory), and the arithmetic circuit is realized by a CPU (Central Processing Unit).

  In the substrate transfer robot 31, the first to third turning driving means 41 to 43 and the raising / lowering driving means 48 are controlled by the controller 151. It is moved to an arbitrary position in the direction Z. By moving the robot hand 35 in this way, the wafer 32 held by the robot hand 35 can be moved.

  In such a semiconductor processing equipment 101, the substrate transfer robot 31 moves the wafer 32 mainly in the preparation space 116. The substrate transfer robot 31 takes out the wafer 32 from the hoop inner space 105 through the front opening 131 and inserts the wafer 32 into the hoop inner space 105 through the front opening 131. The substrate transfer robot 31 takes out the wafer 32 from the processing space 111 through the back side opening 132 and inserts the wafer 32 into the processing space 111 through the back side opening 132.

  When the substrate transfer robot 31 transfers the wafer 32 from the FOUP 102 to the wafer processing apparatus 106, first, the robot hand 35 enters the FOUP inner space 105 through the front side opening 131. The wafer 32 placed at the wafer accommodation position in the hoop inner space 105 is held by the robot hand 35. Next, in a state where the wafer 32 is held by the robot hand 35, the robot hand 35 enters the processing space 111 through the preparation space 116 and further through the back side opening 132. Then, the wafer 32 held by the robot hand 35 is placed on the wafer placement position 156 in the processing space 111.

  Further, when the substrate transfer robot 31 transfers the wafer 32 from the wafer processing apparatus 106 to the FOUP 102, first, the robot hand 35 enters the processing space 111 through the back side opening 132. Then, the robot hand 35 holds the wafer 32 placed at the wafer placement position 156 in the processing space 111. Next, in a state where the wafer 32 is held by the robot hand 35, the robot hand 35 is caused to enter the hoop internal space 105 through the preparation space 116 and further through the front opening 131. Then, the wafer 32 held by the robot hand 35 is placed at the wafer accommodation position in the hoop inner space 105.

  When the wafer 32 is transferred from the FOUP 102 to the wafer processing apparatus 106, the substrate transfer robot 31 once transfers the wafer 32 taken out from the FOUP 102 to the aligner 119. The orientation of the wafer 32 transferred to the aligner 119 is adjusted by the aligner 119. Therefore, the wafers 32 can be inserted into the wafer processing apparatus 106 with the orientation adjusted, whereby the directions of the wafers 32 can be made the same during the processing by the wafer processing apparatus 106.

  According to the present embodiment as described above, the first motor 71 is disposed such that the rotating portion 74 rotates around the rotation axis L21 substantially parallel to the extending direction of the first arm portion 36. In consideration of the fact that the dimension of the first motor 71 in the direction parallel to the rotation axis L21 of the rotation unit 74 is larger than the dimension of the rotation unit 74 in the direction perpendicular to the rotation axis L21, as described above. Since 71 is arranged, it is not necessary to project a part of the first arm portion 36 in a direction perpendicular to the extending direction in order to secure the arrangement space of the first motor 71. Accordingly, it is possible to prevent the first arm portion 36 from becoming large, and thus it is possible to prevent interference between the first arm portion 36 and an external object.

  The second motor 76 is arranged such that the rotating portion 79 rotates around the rotation axis L22 substantially parallel to the extending direction of the first arm portion 36. In consideration of the fact that the dimension of the second motor 76 in the direction parallel to the rotation axis L22 of the rotation unit 79 is larger than the dimension of the rotation unit 79 in the direction perpendicular to the rotation axis L22, as described above. Since 76 is disposed, it is not necessary to project a part of the first arm portion 36 in a direction perpendicular to the extending direction in order to secure an arrangement space for the second motor 76. Accordingly, it is possible to prevent the first arm portion 36 from becoming large, and thus it is possible to prevent interference between the first arm portion 36 and an external object.

  Further, the third motor 81 is arranged such that the rotating portion 84 rotates around the rotation axis L23 substantially parallel to the extending direction of the second arm portion 37. In consideration of the fact that the dimension of the third motor 81 in the direction parallel to the rotation axis L23 of the rotation unit 84 is larger than the dimension of the rotation unit 84 in the direction perpendicular to the rotation axis L23, as described above, Since 81 is arranged, in order to secure the arrangement space of the third motor 81, it is not necessary to project a part of the second arm portion 37 in a direction perpendicular to the extending direction. Accordingly, it is possible to prevent the second arm portion 37 from becoming large, and thus it is possible to prevent interference between the second arm portion 37 and an external object.

  In the present embodiment, the substrate transfer robot 31 is used in the semiconductor processing equipment 101 as described above. In this case, examples of the external object include the front wall 121 and the back wall 122, and the hoop opener 118. Since the preparation space 116 is made as small as possible in order to easily achieve a predetermined cleanliness, an interference problem tends to occur when the wafer 32 is transferred. The substrate transfer robot 31 of the present embodiment can be suitably used for transferring the wafer 32 in the semiconductor processing equipment 101 because interference is prevented as described above.

  Further, according to the present embodiment, since the second motor 76 is provided in the first arm portion 36, compared to the case where it is provided in the base 34, the second motor 76 is separated from the joint between the first and second arm portions 36 and 37. The distance to the second motor 76 is shortened. Therefore, the configuration of the second power transmission unit 77 can be simplified and accumulation of errors in the second power transmission unit 77 can be prevented. As a result, the positioning accuracy of the distal end portion 33b of the robot arm 33 can be improved, and as a result, the positioning accuracy of the robot hand 35 can be improved. Further, the hysteresis can be reduced.

  Further, since the third motor 81 is provided on the second arm portion 37, the distance from the joint between the second arm portion 37 and the robot hand 35 to the third motor 81 is shorter than that provided on the base 34. Become. Therefore, the configuration of the third power transmission unit 82 can be simplified and accumulation of errors in the third power transmission unit 82 can be prevented. As a result, the accuracy of the posture of the robot hand 35 can be improved. Further, the hysteresis can be reduced.

  In the present embodiment, the substrate transfer robot 31 is used in the semiconductor processing equipment 101 as described above, and transfers the wafer 32 between the FOUP 102 and the wafer processing apparatus 106. In this case, it is necessary to increase the positioning accuracy and posture accuracy of the robot hand 35. For example, when the robot hand 35 enters the hoop 102, it is necessary to prevent the robot hand 35 from undesirably contacting the wafer 32 in the hoop 102 and damaging the wafer 32. The substrate transfer robot 31 of the present embodiment can be suitably used for transferring the wafer 32 in the semiconductor processing equipment 101 because the positioning accuracy and posture accuracy of the robot hand 35 are improved as described above.

  Further, according to the present embodiment, the second motor 76 is provided in the first arm portion 36 that is the arm portion on the base 34 side among the first and second arm portions 36 and 37. Therefore, the mass of the second arm portion 37 can be reduced as compared with the case where the second motor 76 is provided in the second arm portion 37 that is the arm portion on the robot hand 35 side. Accordingly, the second arm portion 37 can be driven to rotate with respect to the first arm portion 36 with a small force.

  FIG. 6 is a cross-sectional view showing a simplified configuration of the substrate transfer robot 161 according to the second embodiment of the present invention. FIG. 7 is a plan view of the substrate transfer robot 161 viewed from above in FIG. Since the substrate transfer robot 161 of the present embodiment is similar to the substrate transfer robot 31 of the first embodiment, the same reference numerals are given to corresponding portions, and only different points will be described.

  A cylindrical other end side communication hole 162 communicating with the internal space 51 of the first arm portion 36 is formed in a portion near the other end portion 36b in the extending direction of the first arm portion 36, and protrudes outward. A cylindrical protrusion 163 is formed. The axis of the other end side communication hole 162 is parallel to the axis of the one end side communication hole 52 of the first arm portion 36. The inner hole 164 of the protruding portion 163 is coaxial with the other end side communication hole 162 and communicates with the internal space 51 of the first arm portion 36 through the other end side communication hole 162.

  A cylindrical one end side communication hole 165 that communicates with the internal space 54 of the second arm portion 37 is formed in a portion of the second arm portion 37 near the one end portion 37 a in the extending direction. The axis of the one end side communication hole 165 extends in a direction perpendicular to the extending direction of the second arm portion 37.

  The projecting portion 163 of the first arm portion 36 is gently and coaxially inserted into the one end side communication hole 165 of the second arm portion 37, whereby the first and second arm portions 36 and 37 are connected to the second turning axis L12. Around each other, they are pivotably connected to each other. Each axis of the one end side communication hole 165 and the protrusion 163 forms a straight line common to the second turning axis L12. A bearing means is interposed between the protruding portion 163 of the first arm portion 36 and the forming portion 165 a of the one end side communication hole 165 of the second arm portion 37, and thereby the second arm portion 37 with respect to the first arm portion 36. Can be smoothly turned.

  In the second motor 76, the fixing portion 78 is fixed to the second arm portion 37, and the rotating portion 79 rotates about the rotation axis L <b> 22 substantially parallel to the extending direction of the second arm portion 37 with respect to the fixing portion 78. To do. The second power transmission unit 77 is interposed between the second motor 76 and the first arm unit 36, and transmits the power of the second motor 76 from the rotating unit 79 of the second motor 76 to the first arm unit 36. . The second turning drive unit 166 includes the second motor 76 and the second power transmission unit 77. By such second turning drive means 166, the first and second arm portions 36, 37 are driven to turn relative to each other.

  The second motor 76 and the second power transmission unit 77 are accommodated in the internal space 54 of the second arm unit 37. Even in this case, it is possible to prevent the degree of cleanliness around the substrate transfer robot 161 from being lowered as in the first embodiment.

  According to the present embodiment, the second motor 76 is arranged so that the rotating portion 79 rotates around the rotation axis L22 substantially parallel to the extending direction of the second arm portion 37. In order to secure the arrangement space 76, it is not necessary to project a part of the second arm portion 37 in a direction perpendicular to the extending direction. Accordingly, it is possible to prevent the second arm portion 37 from becoming large, and thus it is possible to prevent interference between the second arm portion 37 and an external object.

  Further, according to the present embodiment, since the second motor 76 is provided on the second arm portion 37, compared to the case where it is provided on the base 34, the second motor 76 is separated from the joint between the first and second arm portions 36 and 37. The distance to the second motor 76 is shortened. Therefore, the configuration of the second power transmission unit 77 can be simplified and accumulation of errors in the second power transmission unit 77 can be prevented. As a result, as in the first embodiment described above, the positioning accuracy of the tip 33b of the robot arm 33 can be improved, and consequently the positioning accuracy of the robot hand 35 can be improved. Further, the hysteresis can be reduced.

  FIG. 8 is a cross-sectional view showing a simplified configuration of a substrate transfer robot 171 according to the third embodiment of the present invention. FIG. 9 is a plan view of the substrate transfer robot 171 viewed from above in FIG. Since the substrate transfer robot 171 of this embodiment is similar to the substrate transfer robot 31 of the first embodiment described above, the corresponding parts are denoted by the same reference numerals, and only different points will be described.

  A cylindrical one end side communication hole 172 communicating with the internal space 51 of the first arm portion 36 is formed in a portion near the one end portion 36a in the extending direction of the first arm portion 36, and a cylindrical shape protruding outward. Projecting portion 173 is formed. The axis of the one end side communication hole 172 is perpendicular to the extending direction of the first arm portion 36. The inner hole 174 of the protrusion 173 is coaxial with the one end side communication hole 172 and communicates with the internal space 51 of the first arm portion 36 via the one end side communication hole 172.

  A cylindrical communication hole 176 that communicates with the inner hole 175 of the movable part 47 is formed in the upper part of the movable part 47 that is the upper part 34 a of the base 34. The communication hole 176 is coaxial with the inner hole 175 of the movable portion 47. The communication hole 176 is opened facing upward.

  The projecting portion 173 of the first arm portion 36 is gently and coaxially inserted into the communication hole 176 of the movable portion 47 so that the base 34 and the first arm portion 36 are relatively relative to each other around the first turning axis L11. To be pivotally connected. The axes of the communication hole 176 and the protrusion 173 form a straight line that is common to the first turning axis L11. A bearing means is interposed between the projecting portion 173 of the first arm portion 36 and the forming portion 176a of the communication hole 176 of the movable portion 47, thereby smoothly turning the first arm portion 36 relative to the base 34. be able to.

  In the first motor 71, the fixed portion 73 is fixed to the movable portion 47 of the base 34, and the rotating portion 74 rotates around the rotation axis L21 parallel to the first turning axis L11 with respect to the fixed portion 73. The first power transmission unit 72 is interposed between the first motor 71 and the first arm unit 36, and transmits the power of the first motor 71 from the rotating unit 74 of the first motor 71 to the first arm unit 36. . The first turning driving means 177 is configured including the first motor 71 and the first power transmission unit 72. The base 34 and the first arm 36 are driven to turn relative to each other by the first turning drive unit 177.

  The first motor 71 and the first power transmission unit 72 are accommodated in the inner hole 175 of the movable unit 47 of the base 34. Even in this case, it is possible to prevent the degree of cleanliness around the substrate transfer robot 171 from being lowered, as in the first embodiment.

  FIG. 10 is a cross-sectional view showing a simplified configuration of the substrate transfer robot 181 according to the fourth embodiment of the present invention. FIG. 11 is a plan view of the substrate transport robot 181 viewed from above in FIG. Since the substrate transfer robot 181 of the present embodiment is similar to the substrate transfer robot 31 of the first to third embodiments described above, the corresponding parts are denoted by the same reference numerals, and only different points will be described.

  The substrate transfer robot 181 of the present embodiment has basically the same configuration as the substrate transfer robot 31 of the first embodiment described above, and the joint between the first and second arm portions 36 and 37 is the same as described above. The second embodiment of the substrate transfer robot 161 has the same configuration, and the joint between the base 34 and the first arm portion 36 has the same configuration as the third embodiment of the substrate transfer robot 171 described above.

  FIG. 12 is a cross-sectional view showing the configuration of the second power transmission unit 186 in the substrate transfer robot according to the fifth embodiment of the present invention. In FIG. 12, in order to prevent complication, the configuration of the second power transmission unit 186 is shown in a simplified manner. Since the substrate transfer robot of the present embodiment is similar to the substrate transfer robot 31 of the first embodiment described above, the corresponding parts are denoted by the same reference numerals, and only different points will be described.

  In the present embodiment, the second gear 92 and the intermediate gear 93 b that meshes with the second gear 92 among the intermediate gears 93 are realized by bevel gears. In this embodiment as well, the power of the second motor 76 can be transmitted from the rotating portion 79 of the second motor 76 to the protruding portion 56 of the second arm portion 37 as in the first embodiment. .

  In the present embodiment, the second gear 92 and the intermediate gear 93b that meshes with the second gear 92 among the intermediate gears 93 are realized by bevel gears. Two intermediate gears that mesh with each other may be realized by bevel gears. Even in this case, the power of the second motor 76 can be transmitted from the rotating portion 79 of the second motor 76 to the protruding portion 56 of the second arm portion 37.

  Each of the embodiments described above is merely an example of the present invention, and the configuration can be changed within the scope of the present invention. For example, the robot arm 33 may be composed of a plurality of arm portions, and therefore the number of arm portions is not limited to two, and may be three or more. In this case, the two arm portions connected to each other are provided so as to be able to turn relative to each other, and the turning drive means is provided for each joint between the two arm portions connected to each other.

  In the second power transmission unit 77, two gears that mesh with each other among the plurality of gears 91 to 93 may be realized by worm gears instead of bevel gears.

  The second power transmission unit 77 may transmit the power of the second motor 76 from the rotating unit 79 of the second motor 76 to the protrusion 56 of the second arm unit 37 via a belt. In this case, the rotation around the rotation axis L22 of the rotating portion 79 of the second motor 76 or the rotation axis parallel to the rotation axis L22 by the belt is changed to the second rotation axis L12 or the rotation axis parallel to the second rotation axis L12. You may comprise so that it may convert into rotation around.

  The second arm unit 37 may be provided with a plurality of robot hands. In this case, the number of wafers 32 that can be transferred at a time can be increased, and the working efficiency can be improved. Each robot hand is provided so as to be able to turn relative to the second arm portion 37. The other turning driving means is provided for each robot hand, and each robot hand is individually turned by each other turning driving means. Each robot hand is provided so as to be shifted in the up-down direction Z, thereby preventing the robot hands from interfering with each other even if the robot hands are individually swiveled.

  The substrate transfer robot can also be used in a substrate processing facility for processing a substrate other than the wafer 32. The substrate transfer robot transfers the substrate from the substrate storage container to the substrate processing apparatus via the preparation space in which the atmospheric gas is adjusted, and from the substrate processing apparatus to the substrate storage container via the preparation space. Transport the substrate. The substrate may be a glass substrate used for a liquid crystal display device or the like in addition to a semiconductor substrate. The substrate transfer robot is preferably used in a clean room.

  In the present invention, substantially parallel includes parallel.

31, 161, 171, 181 Substrate transfer robot 33 Semiconductor wafer 34 Base 35 Robot hand 36 First arm portion 37 Second arm portion 41, 177 First turning drive means 42, 166 Second turning drive means 43 Third turning drive Means 71 First motor 72 First power transmission unit 76 Second motor 77, 186 Second power transmission unit 81 Third motor 82 Third power transmission unit

Claims (4)

A substrate transfer device,
A first wall and a second wall arranged at an interval;
A substrate transfer robot disposed between the first wall and the second wall;
A plurality of openings are formed in one of the first wall and the second wall;
At least one opening is formed in the other of the first wall and the second wall;
The substrate transfer robot is
A base on which the first pivot axis is set;
A first arm portion connected to the base and capable of turning about the first turning axis, wherein a second turning axis parallel to the first turning axis is set;
A second arm part connected to the first arm part and capable of turning around the second turning axis, wherein a third turning axis parallel to the second turning axis is set;
A robot hand connected to the second arm part, capable of turning around the third turning axis, and holding a substrate;
Driving means for driving the first arm part, the second arm part and the robot hand;
When viewed from above, the distance between a portion of the first arm portion and the first pivot axis that is closest to the first pivot axis in the first wall and the first pivot axis. The substrate transfer robot is arranged closer to the first wall to a greater extent,
The length of each of the first arm part, the second arm part, and the robot hand including the gripped substrate is smaller than the distance between the first wall and the second wall, and The distance between the first wall and the second wall is substantially the same as the robot hand can transport the substrate through the opening formed in the first wall and the second wall,
Transporting the substrate through the openings formed in the first wall and the second wall;
The plurality of openings are four openings. A controller for moving the robot hand by controlling the driving means;
The controller includes the first arm unit, the second arm unit, the robot hand, and the robot held by the robot hand without causing the substrate to interfere with any of the first wall and the second wall. The driving means is controlled so that the substrate held by a hand passes through the opening formed in the first wall and the opening formed in the second wall. The board | substrate conveyance apparatus of description.   The substrate transport according to claim 1, wherein the driving unit includes a motor and a power transmission unit, and at least one of the motors is fixed to the first arm unit or the second arm unit. apparatus. A substrate transfer robot mounted on the substrate transfer apparatus according to claim 1.

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