JP5803478B2 - Drawing apparatus and drawing method - Google Patents

Description

  The present invention relates to a drawing apparatus, a drawing method, and the like.

  2. Description of the Related Art Conventionally, a method (drawing method) for forming an image using ink that is cured by being irradiated with ultraviolet light is known. In such an ink, the degree of ink curing can be grasped by measuring the ink absorbance using an infrared spectrophotometer (see, for example, Patent Document 1).

JP 2004-306591 A

By the way, in the recording apparatus (drawing apparatus) described in Patent Document 1, the amount of ultraviolet light applied to the ink may differ depending on the conveyance speed of the recording medium. When the conveyance speed of the recording medium is high, the irradiation amount of ultraviolet light received by the ink is smaller than when the conveyance speed is low. For this reason, it is conceivable that the degree of ink curing is lower when the conveyance speed of the recording medium is higher than when the conveyance speed is low.
In addition to this, it is conceivable that the degree of ink curing also varies depending on the resolution of the image and the thickness of the ink on the recording medium. That is, it is considered that the degree of ink curing varies depending on various conditions in image formation. If the degree of ink curing varies, the quality of the formed image varies.

For this reason, it is desired to grasp the degree of ink curing in the process of forming an image. For example, in the process of forming an image, if it is determined that the degree of curing of the ink is low, the intensity of ultraviolet light is increased or the ink constituting the image is repeatedly irradiated with ultraviolet light. , Image quality can be maintained. Thereby, it is possible to easily improve the quality of the image.
Therefore, it is conceivable to apply the method described in Patent Document 1. That is, it is conceivable to form an image with a recording apparatus equipped with an infrared spectrophotometer. This makes it possible to grasp the degree of ink curing in the process of forming an image.
However, in general, in the analysis of an infrared spectrum using an infrared spectrophotometer, the time required for analysis tends to be longer than the time required for forming an image with a recording apparatus. Also, the cost for the infrared spectrophotometer is high. For this reason, it is not practical to form an image with a recording apparatus equipped with an infrared spectrophotometer.

  From the above, it is difficult to grasp the degree of ink curing in the process of forming an image. Therefore, the conventional drawing apparatus has a problem that it is difficult to improve image quality.

  SUMMARY An advantage of some aspects of the invention is to solve at least a part of the problems described above, and the invention can be implemented as the following forms or application examples.

  Application Example 1 From a discharge head that faces a work and discharges a liquid toward the work, a displacement device that displaces the relative position of the work with respect to the discharge head, and the liquid applied to the work A light irradiation device that irradiates light toward the formed pattern, and a light irradiation device that is transmitted from the light irradiation device toward the pattern and is provided in a path of light that has passed through the pattern, and transmits the pattern. A first optical element that divides the light into a plurality of wavelength ranges of light having different wavelength ranges, and a light path of the plurality of wavelength ranges of the split light; A second optical element that transmits light in a part of the wavelength range; and a path of light in the part of wavelength range that is transmitted through the second optical element; receives light in the part of wavelength range; A signal with a value corresponding to the amount of light received Has a force receiving element, the drawing apparatus characterized by.

The drawing device of this application example includes an ejection head, a displacement device, a light irradiation device, a first optical element, a second optical element, and a light receiving element.
The discharge head faces the work and discharges the liquid material toward the work.
The displacement device displaces the relative position of the workpiece with respect to the ejection head.
A light irradiation apparatus irradiates light toward the pattern formed from the liquid body apply | coated to the workpiece | work.
The 1st optical element is provided in the course of the light which permeate | transmitted the pattern among the lights irradiated toward the pattern from the light irradiation apparatus. The first optical element splits the light transmitted through the pattern into light having a plurality of wavelength ranges different from each other.
The second optical element is provided in the path of the divided light in a plurality of wavelength regions. A 2nd optical element permeate | transmits the light of the one part wavelength range among the light of a several wavelength range.
The light receiving element is provided in the path of light in a part of the wavelength range that has passed through the second optical element. The light receiving element receives light in a partial wavelength region and outputs a signal having a value corresponding to the received light amount.
With the above configuration, it is possible to detect the amount of light in a part of the wavelength range included in the light transmitted through the pattern. Thereby, for example, by setting the light in a part of the wavelength range as the light in the wavelength range in which the amount of light transmitted through the pattern varies depending on the degree of curing of the liquid material, Pass / fail can be determined for the degree.
In this drawing apparatus, since the light irradiation device, the first optical element, the second optical element, and the light receiving element are provided, it is possible to determine whether or not the liquid material is cured in the drawing process. it can. As a result, the drawing quality can be easily improved.

  Application Example 2 In the above drawing apparatus, the liquid material has a property of being cured by being irradiated with ultraviolet light, and the ultraviolet material is directed toward the liquid material applied to the workpiece. A drawing apparatus comprising an ultraviolet light irradiation device for irradiating light including light.

  In this application example, the liquid applied to the workpiece can be cured by irradiation with ultraviolet light.

  Application Example 3 In the above drawing apparatus, the light irradiation device irradiates light including infrared light toward the pattern, and the first optical element applies light transmitted through the pattern to red light. The second optical element transmits light in the infrared wavelength range as light in the partial wavelength range, and the light receiving element is split into light in the plurality of wavelength ranges including an outer wavelength range. A drawing apparatus that receives light in the infrared wavelength region and outputs a signal having a value corresponding to the received light amount.

  In this application example, it is possible to detect the amount of light in the infrared wavelength region included in the light transmitted through the pattern.

  Application Example 4 In the above drawing apparatus, the displacement device includes a carriage that holds the ejection head and a carriage transport device that transports the carriage, and the ultraviolet light irradiation device includes the carriage A drawing apparatus, characterized in that the drawing apparatus is provided.

In this application example, the displacement device includes a carriage that holds the ejection head and a carriage transport device that transports the carriage. In this drawing apparatus, the ultraviolet light irradiation device is provided on the carriage.
With the above configuration, the ultraviolet light irradiation device can follow the displacement of the ejection head.

  Application Example 5 In the above drawing apparatus, the drawing apparatus includes a control unit that determines whether the pattern is cured based on the signal output from the light receiving element.

  In this application example, whether or not the liquid is cured can be determined in the drawing process. As a result, the drawing quality can be easily improved.

  [Application Example 6] After applying a liquid material to a work, a drawing step of drawing a pattern with the liquid material on the work, a hardening step of hardening the liquid material constituting the pattern, and after the hardening step A determination step of irradiating the pattern with light and determining pass / fail of the degree of curing of the pattern based on the amount of light transmitted through the pattern among the irradiated light. Drawing method.

The drawing method of this application example includes a drawing process, a curing process, and a determination process.
In the drawing step, a liquid is applied to the work, thereby drawing a pattern on the work with the liquid.
In the curing step, the liquid constituting the pattern is cured.
After the curing step, the determination step irradiates the pattern with light, and determines whether the pattern is cured based on the amount of light transmitted through the pattern.
In this drawing method, it is possible to determine whether or not the liquid is cured in the drawing process. As a result, the drawing quality can be easily improved.

  Application Example 7 In the above drawing method, the hardening method is performed after the determination step when the determination result in the determination step is unacceptable.

  In this application example, when the determination result in the determination step is unacceptable, the curing step is performed after the determination step. Therefore, the degree of curing of the liquid can be easily increased to a pass level.

  Application Example 8 In the above drawing method, the liquid material has a property of being cured by being irradiated with ultraviolet light, and in the curing step, the liquid material is irradiated with the ultraviolet light. A drawing method characterized by that.

  In this application example, in the curing step, the liquid can be cured by irradiating the liquid with ultraviolet light.

  Application Example 9 In the above drawing method, in the determination step, the light transmitted through the pattern is split into light having a plurality of wavelength ranges including different wavelength ranges and including an infrared wavelength range. A drawing method, wherein pass / fail is determined with respect to the degree of curing of the pattern based on the amount of infrared light among the divided light in the plurality of wavelength regions.

  In this application example, whether the pattern is cured or not can be determined based on the amount of infrared light included in the light transmitted through the pattern.

FIG. 2 is a perspective view illustrating a schematic configuration of a droplet discharge device according to the present embodiment. Sectional drawing in the AA in FIG. FIG. 6 is a bottom view of the ejection head in the present embodiment. Sectional drawing in the BB line in FIG. FIG. 2 is a block diagram illustrating a schematic configuration of a droplet discharge device according to the present embodiment. The figure which shows the flow of the recording process in this embodiment. FIG. 6 is a diagram illustrating another configuration example of the droplet discharge device according to the present embodiment.

  Embodiments will be described with reference to the drawings, taking as an example a droplet discharge device that is one of the drawing devices. In addition, in each drawing, in order to make each structure the size which can be recognized, the structure and the scale of a member may differ.

As shown in FIG. 1, which is a perspective view showing a schematic configuration, a droplet discharge device 1 in the present embodiment includes a work transfer device 3, a carriage 7, and a carriage transfer device 11.
The carriage 7 is provided with a head unit 13 and two irradiation devices 15.
Further, the droplet discharge device 1 includes an irradiation device 17 and a light receiving device 19 as shown in FIG. 2 which is a cross-sectional view taken along line AA in FIG.
In the droplet discharge device 1 shown in FIG. 1, the work W is discharged by discharging a liquid material as droplets from the head unit 13 while changing the relative position of the head unit 13 and the workpiece W such as a substrate in plan view. In addition, a desired pattern can be drawn (recorded) with a liquid material. In the figure, the Y direction indicates the moving direction of the workpiece W, and the X direction indicates a direction orthogonal to the Y direction in plan view. A direction orthogonal to the XY plane defined by the X direction and the Y direction is defined as the Z direction.

Such a droplet discharge device 1 can be applied to drawing (recording) on a workpiece W, such as a resin film, in which a liquid material is difficult to penetrate.
The droplet discharge device 1 can also be applied to, for example, the manufacture of color filters used for liquid crystal display panels and the like, and the manufacture of organic EL devices.
In the case of a color filter having three color filter elements of red, green, and blue, the droplet discharge device 1 can be suitably used, for example, in a process of forming red, green, and blue colored layers on a substrate. In this case, each liquid corresponding to each colored layer is ejected as droplets from the head unit 13 to the work W, whereby the patterns of the red, green, and blue filter elements are drawn on the work W.
Further, in the manufacture of an organic EL device, for example, it can be suitably used in a step of forming a functional layer (organic layer) corresponding to each color for each of red, green and blue pixels. In this case, the liquids corresponding to the functional layers of the respective colors are ejected as droplets from the head unit 13 onto the work W, whereby red, green, and blue functional layer patterns are drawn on the work W. .
The work W as the recording medium is not limited to the above-described substrate or resin film, and various recording media such as paper, cloth, and metal foil may be employed.

Here, the details of each component of the droplet discharge device 1 will be described.
As illustrated in FIG. 1, the work transfer device 3 includes a surface plate 21, a guide rail 23 a, a guide rail 23 b, and a work table 25.
The surface plate 21 is made of a material having a small coefficient of thermal expansion, such as stone, and is placed so as to extend along the Y direction. The guide rail 23 a and the guide rail 23 b are disposed on the upper surface 21 a of the surface plate 21. Each of the guide rail 23a and the guide rail 23b extends along the Y direction. The guide rail 23a and the guide rail 23b are arranged in a state where there is a gap in the X direction.

  The work table 25 is provided in a state facing the upper surface 21a of the surface plate 21 with the guide rail 23a and the guide rail 23b interposed therebetween. The work table 25 is placed on the guide rail 23a and the guide rail 23b in a state of floating from the surface plate 21. The work table 25 has a placement surface 25a that is a surface on which the workpiece W is placed. The placement surface 25a is directed to the side (upper side) opposite to the surface plate 21 side. The work table 25 is guided along the Y direction by the guide rail 23a and the guide rail 23b, and is configured to be able to reciprocate on the surface plate 21 along the Y direction.

The work table 25 is configured to reciprocate in the Y direction by a moving mechanism and a power source (not shown). As the moving mechanism, for example, a mechanism combining a ball screw and a ball nut, a linear guide mechanism, or the like may be employed. In the present embodiment, a work transfer motor described later is employed as a power source for moving the work table 25 along the Y direction. As the work transfer motor, various motors such as a stepping motor, a servo motor, and a linear motor can be adopted.
The power from the work transport motor is transmitted to the work table 25 through the moving mechanism. Thereby, the work table 25 can reciprocate along the guide rail 23a and the guide rail 23b, that is, along the Y direction. That is, the workpiece transfer device 3 can reciprocate the workpiece W placed on the placement surface 25a of the workpiece table 25 along the Y direction.

As shown in FIG. 2, the head unit 13 includes a head plate 31 and an ejection head 33.
As shown in FIG. 3 which is a bottom view, the discharge head 33 has a nozzle surface 35. A plurality of nozzles 37 are formed on the nozzle surface 35. In FIG. 3, the nozzles 37 are exaggerated and the number of the nozzles 37 is reduced in order to easily show the nozzles 37.
In the ejection head 33, the plurality of nozzles 37 constitute four nozzle rows 39 arranged along the Y direction. The four nozzle rows 39 are arranged in a state where there is a gap in the X direction. In each nozzle row 39, the plurality of nozzles 37 are formed at a predetermined nozzle interval P along the Y direction.
Hereinafter, when each of the four nozzle rows 39 is identified, the notation of the nozzle row 39a, the nozzle row 39b, the nozzle row 39c, and the nozzle row 39d is used.
In the ejection head 33, the nozzle row 39a and the nozzle row 39b are shifted from each other by a distance of P / 2 in the Y direction. The nozzle row 39c and the nozzle row 39d are also shifted from each other by a distance of P / 2 in the Y direction.

As shown in FIG. 2, the two irradiation devices 15 are provided at positions facing each other with the head unit 13 interposed therebetween in the X direction. Hereinafter, when identifying each of the two irradiation devices 15, the notation of the irradiation device 15a and the irradiation device 15b is used.
Each of the irradiation device 15 a and the irradiation device 15 b includes a light source 43 that emits ultraviolet light 41. The ultraviolet light 41 from the light source 43 promotes curing of the functional liquid 53 (liquid material) discharged from the discharge head 33. When the functional liquid 53 is irradiated with the ultraviolet light 41, curing is promoted.
As the light source 43, various light sources 43, such as LED, LD, a mercury lamp, a metal halide lamp, a xenon lamp, an excimer lamp, can be employ | adopted, for example.
In the present embodiment, the length of the light source 43 in the Y direction is set to a length that covers the nozzle row 39 of the ejection head 33.
In addition, the light source 43 of the irradiation device 15a and the light source 43 of the irradiation device 15b respectively overlap with a locus drawn by the nozzle surface 35 of the ejection head 33 along the X direction in a plan view.

The ejection head 33 includes a nozzle plate 46, a cavity plate 47, a diaphragm 48, and a plurality of piezoelectric elements 49, as shown in FIG. 4 which is a cross-sectional view taken along the line BB in FIG. doing.
The nozzle plate 46 has a nozzle surface 35. The plurality of nozzles 37 are provided on the nozzle plate 46.
The cavity plate 47 is provided on the surface opposite to the nozzle surface 35 of the nozzle plate 46. A plurality of cavities 51 are formed in the cavity plate 47. Each cavity 51 is provided corresponding to each nozzle 37 and communicates with each corresponding nozzle 37. The functional liquid 53 is supplied to each cavity 51 from a tank (not shown).

The diaphragm 48 is provided on the surface of the cavity plate 47 opposite to the nozzle plate 46 side. The vibration plate 48 vibrates in the Z direction (longitudinal vibration), thereby enlarging or reducing the volume in the cavity 51.
The plurality of piezoelectric elements 49 are respectively provided on the surface of the diaphragm 48 opposite to the cavity plate 47 side. Each piezoelectric element 49 is provided corresponding to each cavity 51 and faces each cavity 51 with the diaphragm 48 interposed therebetween. Each piezoelectric element 49 expands based on the drive signal. Thereby, the diaphragm 48 reduces the volume in the cavity 51. At this time, pressure is applied to the functional liquid 53 in the cavity 51. As a result, the functional liquid 53 is discharged as droplets 55 from the nozzle 37. The method of discharging the droplet 55 by the discharge head 33 is one of ink jet methods. The ink jet method is one of coating methods.

As shown in FIG. 2, the ejection head 33 having the above configuration is supported by the head plate 31 with the nozzle surface 35 protruding from the head plate 31.
As shown in FIG. 2, the carriage 7 supports the head unit 13. Here, the head unit 13 is supported by the carriage 7 with the nozzle surface 35 facing downward in the Z direction.
As described above, the functional liquid 53 can be applied to the workpiece W from the ejection head 33.
In the present embodiment, the longitudinal vibration type piezoelectric element 49 is adopted, but the pressurizing means for applying pressure to the functional liquid 53 is not limited to this, and for example, the lower electrode and the piezoelectric layer A flexural deformation type piezoelectric element in which an electrode and an upper electrode are laminated may be employed. Further, as the pressurizing means, a so-called electrostatic actuator that generates static electricity between the diaphragm and the electrode, deforms the diaphragm by electrostatic force, and ejects droplets from the nozzles can be employed. Furthermore, the structure which generate | occur | produces a bubble in a nozzle using a heat generating body, and gives a pressure to a functional liquid with the bubble may be employ | adopted.

In the present embodiment, a functional liquid 53 that is cured by being irradiated with light is used as the functional liquid 53. In the present embodiment, ultraviolet light 41 is employed as light that promotes curing of the functional liquid 53.
The functional liquid 53 contains a resin material, a photopolymerization initiator, and a solvent as components. By adding functional materials such as pigments, dyes such as dyes, and surface modifying materials such as lyophilicity and liquid repellency to these components, a functional liquid 53 having a specific function can be generated. . The functional liquid 53 containing a pigment such as a pigment or a dye can be employed as the functional liquid 53 for forming an image to be recorded on the workpiece W, for example. Hereinafter, the functional liquid 53 for forming an image to be recorded on the workpiece W is referred to as image paint.

Further, by adopting a light-transmissive resin material such as an acrylic resin material as the resin material as a component of the functional liquid 53, the light-transmissive functional liquid 53 can be configured. Such a light-transmitting functional liquid 53 may be used as a clear ink, for example. Hereinafter, the functional liquid 53 having light transmittance is referred to as a light-transmitting paint.
As the use of the clear ink, for example, a use as an overcoat layer for covering an image, a use as a base layer before forming an image, and the like can be considered. In the following, the functional liquid 53 applied as a base layer is referred to as a base paint.
As the base paint, not only the translucent paint but also a functional liquid 53 in which various pigments are added to the translucent paint can be employed. For example, a functional liquid 53 that exhibits white color, a functional liquid 53 that exhibits metallic gloss (metallic), and the like can also be employed as the base paint.

The resin material in the functional liquid 53 is a material that forms a resin film. Such a resin material is not particularly limited as long as it is a liquid material at room temperature and becomes a polymer by being polymerized. The resin material preferably has a low viscosity, and is preferably in the form of an oligomer. Furthermore, the resin material is more preferably in the form of a monomer.
The photopolymerization initiator is an additive that acts on the crosslinkable group of the polymer to advance the crosslinking reaction. As the photopolymerization initiator, for example, benzyldimethyl ketal can be employed. In this embodiment, a radical photopolymerization initiator is employed as the photopolymerization initiator. As the radical type photopolymerization initiator, for example, Irgacure 819 manufactured by Ciba Japan Co., Ltd. may be employed.
The solvent is for adjusting the viscosity of the resin material.

As shown in FIG. 1, the carriage transport device 11 includes a gantry 61 and a guide rail 63.
The gantry 61 extends in the X direction and straddles the work transfer device 3 in the X direction. The gantry 61 faces the work transfer device 3 on the side opposite to the surface plate 21 side of the work table 25. The gantry 61 is supported by a pair of support columns 65. A pair of support | pillars 65 are provided in the position which mutually opposes in the X direction on both sides of the surface plate 21. FIG.
In the following, when identifying each of the pair of columns 65, the notation of columns 65a and columns 65b is used. The support 65a and the support 65b protrude above the work table 25 in the Z direction. Thereby, a gap is maintained between the gantry 61 and the work table 25.

The guide rail 63 is provided on the surface plate 21 side of the gantry 61. The guide rail 63 extends along the X direction, and is provided across the width of the gantry 61 in the X direction.
The carriage 7 described above is supported by the guide rail 63. In a state where the carriage 7 is supported by the guide rail 63, the nozzle surface 35 of the discharge head 33 faces the work table 25 side in the Z direction. The carriage 7 is guided along the X direction by the guide rail 63, and is supported by the guide rail 63 so as to be able to reciprocate in the X direction. In a plan view, in a state where the carriage 7 overlaps the work table 25, the nozzle surface 35 and the mounting surface 25a of the work table 25 face each other with a gap therebetween.

The carriage 7 is configured to reciprocate in the X direction by a moving mechanism and a power source (not shown). As the moving mechanism, for example, a mechanism combining a ball screw and a ball nut, a linear guide mechanism, or the like may be employed. Further, the carriage transport device 11 has a carriage transport motor (not shown) as a power source for moving the carriage 7 along the X direction. As the carriage conveyance motor, various motors such as a stepping motor, a servo motor, and a linear motor can be employed.
The power from the carriage transport motor is transmitted to the carriage 7 through the moving mechanism. Thus, the carriage 7 can reciprocate along the guide rail 63, that is, along the X direction. That is, the carriage conveyance device 11 can reciprocate the head unit 13 supported by the carriage 7 along the X direction.
In the droplet discharge device 1 having the above-described configuration, the droplet 55 is discharged from the discharge head 33 while the discharge head 33 and the workpiece W are relatively reciprocated while the discharge head 33 is opposed to the workpiece W. By doing so, the pattern is recorded (drawn) on the workpiece W.

As shown in FIG. 1, the irradiation device 17 is supported by a support plate 71 provided on the gantry 61. The irradiation device 17 is directed to the surface plate 21 while being supported by the support plate 71.
Here, the work W is set with a permission area 73 that is an area where drawing of a pattern as a product is permitted, and a blank area 75 that is set outside the permission area 73. The permission area 73 and the margin area 75 are arranged in the X direction. In the present embodiment, the permission area 73 and the margin area 75 are adjacent to each other in the X direction. In this embodiment, in the X direction, the permission area 73 is set on the column 65a side, and the margin area 75 is set on the column 65b side.

In the present embodiment, the irradiation device 17 faces the blank area 75 of the workpiece W as shown in FIG.
The carriage 7 can move over an area that spans the work table 25 in the X direction. For this reason, the irradiation device 15 a provided in the carriage 7 can face the blank area 75. At this time, in a state where the irradiation device 15 a faces the blank area 75, a gap is left in the Z direction between the irradiation device 17 and the carriage 7. This avoids contact between the carriage 7 and the irradiation device 17. Therefore, the movement of the carriage 7 is not hindered by the irradiation device 17 over the movement region of the carriage 7 in the X direction.

The work table 25 is provided with an opening 77 in an area where a blank area 75 of the work W overlaps. The blank area 75 can also be regarded as an area overlapping the opening 77. Further, the irradiation device 17 described above faces the opening 77.
The irradiation device 17 has a light source 78 that emits infrared light 18. The irradiation device 17 irradiates the infrared light 18 toward the blank area 75 overlapping the opening 77. In addition, as the light source 78 which emits the infrared light 18, an infrared lamp etc. are mentioned, for example.
The opening 77 penetrates between the placement surface 25 a and the bottom surface 25 b directed to the surface plate 21. The mounting surface 25a side of the opening 77 is closed by a light-transmitting lid 79.

The platen 21 is provided with an opening 81 at a portion where the irradiation device 17 faces. The opening 81 is provided on the work table 25 side of the surface plate 21. The opening 81 is dug from the work table 25 side of the surface plate 21 toward the side opposite to the work table 25 side.
The work table 25 side of the opening 81 is closed by a light-transmitting lid 82.
In a state where the irradiation device 17 and the opening 77 of the work table 25 face each other, the opening 81 of the surface plate 21 overlaps the opening 77 of the work table 25 in plan view. For this reason, in a state where the irradiation device 17 and the opening 77 of the work table 25 face each other, the infrared light 18 from the irradiation device 17 can reach the opening 81 of the surface plate 21.

The light receiving device 19 is provided in the opening 81 of the surface plate 21.
The light receiving device 19 includes a spectroscopic element 85, an optical filter 87, and a light receiving element 89.
The spectroscopic element 85 is provided in the path of the infrared light 18 that has passed through the blank area 75, the lid 79, the opening 77, and the lid 82 out of the infrared light 18 irradiated toward the blank area 75. The infrared light 18 that has passed through the lid 82 and entered the opening 81 is applied to the spectroscopic element 85. The spectroscopic element 85 splits the irradiated infrared light 18 into light 91 having a plurality of wavelength ranges different from each other. As the spectroscopic element 85, for example, an optical element such as a prism or a diffraction grating may be employed.

The optical filter 87 is provided in the path of the light 91 that is spectrally divided for each wavelength region. The light 91 split by the spectroscopic element 85 is applied to the optical filter 87.
The optical filter 87 is an optical element that can transmit light 92 in a part of the wavelength region of the irradiated light 91. The optical filter 87 is an optical filter that absorbs or reflects light other than light 92 in a part of the wavelength region of the irradiated light 91, or passes the light 92 through a film that does not transmit the light 91. Those having pinholes to be formed may be employed.
The light receiving element 89 is provided in the path of the light 92. The light receiving element 89 receives the light 92 and outputs a signal having a value corresponding to the received light amount. As the light receiving element 89, for example, a photodiode or a phototransistor can be employed.

In the present embodiment, light 92 having a wavelength range in which the amount of light transmitted through the functional liquid 53 changes according to the degree of curing of the functional liquid 53 is used as the light 92.
Accordingly, the degree of curing of the functional liquid 53 can be grasped based on the signal output from the light receiving element 89.
In the present embodiment, the degree of curing of the functional liquid 53 applied to the blank area 75 can be grasped. First, the infrared light 18 is irradiated toward the functional liquid 53 applied to the blank area 75. Of the infrared light 18 irradiated to the functional liquid 53, the infrared light 18 transmitted through the functional liquid 53 reaches the spectroscopic element 85 through the lid 79, the opening 77, and the lid 82. The infrared light 18 reaching the spectroscopic element 85 is split into light 91. The split light 91 is applied to the optical filter 87. The optical filter 87 transmits the light 92 of the light 91. The light 92 that has passed through the optical filter 87 reaches the light receiving element 89. The light receiving element 89 outputs a signal having a value corresponding to the amount of light 92 received. Based on the value of the signal output from the light receiving element 89, the degree of curing of the functional liquid 53 applied to the blank area 75 can be grasped.

As shown in FIG. 5, the droplet discharge device 1 includes a control unit 111 that controls the operation of each of the above-described configurations. The control unit 111 includes a CPU (Central Processing Unit) 113, a drive control unit 115, and a memory unit 117. The drive control unit 115 and the memory unit 117 are connected to the CPU 113 via the bus 119.
The droplet discharge device 1 includes a carriage transport motor 121, a work transport motor 123, an input device 129, and a display device 131.
The carriage transport motor 121 and the work transport motor 123 are connected to the control unit 111 via an input / output interface 133 and a bus 119, respectively. The input device 129 and the display device 131 are also connected to the control unit 111 via the input / output interface 133 and the bus 119, respectively.

The carriage transport motor 121 generates power for driving the carriage 7. The work conveyance motor 123 generates power for driving the work table 25.
The input device 129 is a device for inputting various processing conditions. The display device 131 is a device that displays processing conditions and work status. An operator who operates the droplet discharge device 1 can input various information via the input device 129 while confirming information displayed on the display device 131.
The ejection head 33, the irradiation device 15a, and the irradiation device 15b are also connected to the control unit 111 via the input / output interface 133 and the bus 119, respectively. The irradiation device 17 and the light receiving element 89 are also connected to the control unit 111 via the input / output interface 133 and the bus 119, respectively.

The CPU 113 performs various arithmetic processes as a processor. The drive control unit 115 controls driving of each component. The memory unit 117 includes a RAM (Random Access Memory), a ROM (Read Only Memory), and the like. In the memory unit 117, an area for storing the program software 135 in which the operation control procedure in the droplet discharge device 1 is described, a data development unit 137 that is an area for temporarily developing various data, and the like are set. Yes. Examples of data developed in the data development unit 137 include recording data indicating a pattern to be recorded, program data such as recording processing, and the like.
The drive control unit 115 includes a motor control unit 141, a discharge control unit 145, an irradiation control unit 147, an irradiation control unit 149, and a display control unit 151.

The motor control unit 141 individually controls the drive of the carriage transport motor 121 and the drive of the work transport motor 123 based on a command from the CPU 113.
The discharge controller 145 controls the driving of the discharge head 33 based on a command from the CPU 113.
The irradiation control unit 147 individually controls the light emission state of the light source 43 in each of the irradiation device 15a and the irradiation device 15b based on a command from the CPU 113.
The irradiation control unit 149 individually controls the light emission state of the light source 78 of the irradiation device 17 based on a command from the CPU 113.
The display control unit 151 controls driving of the display device 131 based on a command from the CPU 113.

A recording process in the droplet discharge device 1 will be described.
In the droplet discharge device 1, when the control unit 111 receives print data from the input device 129 via the input / output interface 133 and the bus 119, the CPU 113 starts the print processing shown in FIG. 6.
Here, the recording data indicates a pattern to be recorded on the workpiece W with the functional liquid 53 (liquid material), and dots to be formed with the droplets 55 are expressed in a bitmap shape. The pattern recorded on the work W is expressed as a set of a plurality of dots formed by the droplets 55. For recording the pattern on the workpiece W, the droplets 55 are ejected from the ejection head 33 at a predetermined cycle while the ejection head 33 and the workpiece W are relatively reciprocated while the ejection head 33 is opposed to the workpiece W. Is done by letting

In the recording process, the CPU 113 first outputs a carriage conveyance command to the motor control unit 141 (FIG. 5) in step S1. At this time, the motor control unit 141 controls the drive of the carriage transport motor 121 to move the carriage 7 to the forward path start position of the drawing area.
Here, in the droplet discharge device 1, a drawing area is set. The drawing area is an area where the locus drawn along the Y direction by the work table 25 shown in FIG. 1 and the locus drawn along the X direction by the ejection head 33 overlap.
The forward path start position is a position where the forward path when the carriage 7 is reciprocated is started. In the present embodiment, the forward path start position is located outside the drawing area in plan view. In the present embodiment, the forward path start position is located on the column 65a side of the drawing area in plan view.
Next, in step S2, the CPU 113 outputs a workpiece conveyance command to the motor control unit 141 (FIG. 5). At this time, the motor control unit 141 controls the drive of the work transport motor 123 to move the work W to the drawing area.

Next, in step S3, the CPU 113 outputs a carriage scanning command to the motor control unit 141 (FIG. 5). At this time, the motor control unit 141 controls the drive of the carriage transport motor 121 to start the reciprocation of the carriage 7.
Here, in the reciprocating movement of the carriage 7, the carriage 7 reciprocates between the forward path start position and the backward path start position described above. That is, the path that returns from the forward path start position to the forward path start position and returns to the forward path start position is one round trip of the carriage 7. For this reason, in this embodiment, the path from the forward path start position to the return path start position is the forward path of the carriage 7. On the other hand, the path from the return path start position to the forward path start position is the return path of the carriage 7.
The return path start position is a position facing the forward path start position across the drawing area in the X direction. The return path start position is located outside the drawing area in plan view. For this reason, the forward path start position and the backward path start position are opposed to each other across the drawing area in the X direction in plan view. In the present embodiment, the return path start position is located on the column 65b side of the drawing area in plan view.

Next, in step S4, the CPU 113 outputs an irradiation command for the irradiation device 15a to the irradiation controller 147 (FIG. 5). At this time, the irradiation control unit 147 controls the driving of the light source 43 of the irradiation device 15a to turn on the light source 43 of the irradiation device 15a.
Next, in step S5, the CPU 113 determines whether or not the position of the ejection head 33 has reached the recording start position in the forward path.
Here, the recording start position is a position where the discharge of the droplet 55 from the discharge head 33 is started in the drawing area.
At this time, if it is determined that the position of the ejection head 33 has reached the recording start position (Yes), the process proceeds to step S6. On the other hand, if it is determined that the position of the ejection head 33 has not reached the recording start position (No), the process waits until the position of the ejection head 33 reaches the recording start position.

Next, in step S6, the CPU 113 outputs a discharge command to the discharge control unit 145 (FIG. 5). At this time, the discharge controller 145 controls the drive of the discharge head 33 and discharges the droplet 55 from each nozzle 37 based on the recording data. As a result, recording on the permitted area 73 in the forward path is started.
Next, in step S <b> 7, the CPU 113 determines whether or not the position of the ejection head 33 has reached the recording stop position with respect to the permission area 73.
Here, the recording stop position is a position where the discharge of the droplet 55 from the discharge head 33 is stopped in the permission area 73.
At this time, if it is determined that the position of the ejection head 33 has reached the recording stop position (Yes), the process proceeds to step S8. On the other hand, if it is determined that the position of the ejection head 33 has not reached the recording stop position (No), the process waits until the position of the ejection head 33 reaches the recording stop position.

Next, in step S8, the CPU 113 outputs a discharge stop command to the discharge control unit 145 (FIG. 5). At this time, the ejection control unit 145 stops driving the ejection head 33 and stops ejection of the droplet 55 from each nozzle 37. Thereby, the recording on the permitted area 73 in the outward path is completed.
Next, in step S <b> 9, the CPU 113 determines whether or not the position of the ejection head 33 has reached the test recording start position in the blank area 75.
Here, the test recording is to record a test pattern for grasping the degree of curing of the functional liquid 53 in the blank area 75. The test recording start position is a position where the discharge of the droplet 55 from the discharge head 33 is started in the blank area 75.
If it is determined in step S9 that the position of the ejection head 33 has reached the test recording start position (Yes), the process proceeds to step S10. On the other hand, if it is determined that the position of the ejection head 33 has not reached the test recording start position (No), the process waits until the position of the ejection head 33 reaches the test recording start position.

Next, in step S10, the CPU 113 outputs a discharge command to the discharge control unit 145 (FIG. 5). At this time, the discharge controller 145 controls the drive of the discharge head 33 and discharges the droplet 55 from each nozzle 37 based on the test recording data. Thereby, test recording for the blank area 75 in the forward path is started.
In the test recording, the test pattern is recorded under the conditions equivalent to the strictest conditions for the curing of the functional liquid 53 among the recording conditions for the permission area 73 in the immediately preceding outbound path. As strict conditions for the curing of the functional liquid 53, for example, when the discharge amount of the functional liquid 53 from the nozzle 37 is larger than others, or when the application density of the functional liquid 53 is high, the moving speed of the carriage 7 is increased. The case where is fast. When the moving speed of the carriage 7 is fast, the light quantity (integrated light quantity) of the ultraviolet light 41 received by the functional liquid 53 is reduced, so that the conditions for curing become severe.

Following step S <b> 10, in step S <b> 11, the CPU 113 determines whether or not the position of the ejection head 33 has reached the test recording stop position for the blank area 75.
Here, the test recording stop position is a position where the discharge of the droplet 55 from the discharge head 33 is stopped in the blank area 75.
At this time, if it is determined that the position of the ejection head 33 has reached the test recording stop position (Yes), the process proceeds to step S12. On the other hand, if it is determined that the position of the ejection head 33 has not reached the test recording stop position (No), the process waits until the position of the ejection head 33 reaches the test recording stop position.

Next, in step S12, the CPU 113 outputs a discharge stop command to the discharge control unit 145 (FIG. 5). At this time, the ejection control unit 145 stops driving the ejection head 33 and stops ejection of the droplet 55 from each nozzle 37. Thereby, the test recording for the blank area 75 in the forward path is completed.
Next, in step S13, the CPU 113 determines whether or not the position of the carriage 7 has reached the retracted position.
Here, as shown in FIG. 2, the retracted position is a position where the carriage 7 straddles the workpiece W in the X direction from the column 65a side and retracts to the column 65b side from the workpiece W. By retracting the carriage 7 to this retracted position, the carriage 7 can be retracted from the optical path of the infrared light 18.

If it is determined in step S13 that the position of the carriage 7 has reached the retracted position (Yes), the process proceeds to step S14. On the other hand, if it is determined that the position of the carriage 7 has not reached the retracted position (No), the process waits until the position of the carriage 7 reaches the retracted position.
Next, in step S14, the CPU 113 outputs a carriage stop command to the motor control unit 141 (FIG. 5). At this time, the motor control unit 141 controls the drive of the carriage transport motor 121 to stop the movement of the carriage 7.
Next, in step S15, the CPU 113 outputs an irradiation stop command for the irradiation device 15a to the irradiation control unit 147 (FIG. 5). At this time, the irradiation control unit 147 controls the driving of the light source 43 of the irradiation device 15a to turn off the light source 43 of the irradiation device 15a.

Next, in step S <b> 16, the CPU 113 outputs an irradiation command for the irradiation device 17 to the irradiation control unit 149 (FIG. 5). At this time, the irradiation controller 149 controls the driving of the light source 78 of the irradiation device 17 to turn on the light source 78 of the irradiation device 17.
Next, in step S <b> 17, the CPU 113 receives a signal output from the light receiving element 89 shown in FIG. 2 and acquires the value of the received signal from the light receiving element 89 as light amount data of the light 92. Note that the light amount data indicates a magnitude corresponding to the amount of light 92 received by the light receiving element 89.
Next, in step S <b> 18, the CPU 113 determines whether the acquired light amount data is acceptable. Here, the pass / fail determination is performed by determining whether or not the light amount data is below the acceptance reference value. In the present embodiment, if the light amount data is below the acceptance reference value, the acceptance is determined. On the other hand, when the light quantity data is greater than or equal to the acceptance reference value, a failure determination is made. If it is determined in step S18 that the light amount data is acceptable (Yes), the process proceeds to step S20. On the other hand, if it is determined that the light amount data is unacceptable (No), the process proceeds to step S19.

In step S19, CPU113 outputs the irradiation command with respect to the irradiation apparatus 15b to the irradiation control part 147 (FIG. 5), and then transfers a process to step S20. At this time, in step S19, the irradiation control unit 147 controls the driving of the light source 43 of the irradiation device 15b to turn on the light source 43 of the irradiation device 15b.
In step S20, the CPU 113 outputs a carriage drive command to the motor control unit 141 (FIG. 5). At this time, the motor control unit 141 controls driving of the carriage transport motor 121 to start the return path of the carriage 7.
Next, in step S21, the CPU 113 determines whether or not the position of the carriage 7 has reached the forward path start position. At this time, if it is determined that the position of the carriage 7 has reached the forward path start position (Yes), the process proceeds to step S22. On the other hand, if it is determined that the position of the carriage 7 has not reached the forward path start position (No), the process waits until the position of the carriage 7 reaches the forward path start position.

Next, in step S22, the CPU 113 outputs a carriage stop command to the motor control unit 141 (FIG. 5). At this time, the motor control unit 141 controls the drive of the carriage transport motor 121 to stop the movement of the carriage 7.
Next, in step S23, the CPU 113 determines whether or not the light source 43 of the irradiation device 15b is turned on. At this time, if it is determined that the light source 43 of the irradiation device 15b is turned on (Yes), the process proceeds to step S24. On the other hand, if it is determined that the light source 43 of the irradiation device 15b is not turned on (No), the process proceeds to step S25.
In step S24, the CPU 113 outputs an irradiation stop command for the irradiation device 15b to the irradiation control unit 147 (FIG. 5), and then shifts the processing to step S25. At this time, in step S24, the irradiation control unit 147 controls the driving of the light source 43 of the irradiation device 15b to turn off the light source 43 of the irradiation device 15b.

Next, in step S25, the CPU 113 determines whether the recording data has been completed. At this time, if it is determined that the recording data has ended (Yes), the recording process ends. On the other hand, if it is determined that the recording data has not ended (No), the process proceeds to step S26.
In step S26, the CPU 113 outputs a line feed command to the motor control unit 141 (FIG. 5), and then shifts the process to step S3. At this time, in step S26, the motor control unit 141 that has received the line feed command controls the drive of the work transport motor 123 to move the work W in the Y direction (new line) and to record a new pattern on the work W. Move the appropriate area to the drawing area.
As described above, recording on the workpiece W can be performed.

In this embodiment, the droplet discharge device 1 corresponds to a drawing device, the carriage transport device 11 corresponds to a displacement device, the irradiation device 17 corresponds to a light irradiation device, and the spectroscopic element 85 corresponds to a first optical element. The optical filter 87 corresponds to the second optical element, the irradiation device 15 corresponds to the ultraviolet light irradiation device, and the test pattern corresponds to the pattern.
In addition, each process of step S6 and step S10 corresponds to a drawing process. Moreover, the process of step S3 and step S4 and the process of step S19 and step S20 respond | correspond to the hardening process. Moreover, the process of step S16, step S17, and step S18 respond | corresponds to the determination process.

In the present embodiment, it is possible to detect the amount of light 92 in a part of the wavelength range included in the infrared light 18 that has passed through the test pattern recorded in the blank area 75. As a result, the degree of curing of the functional liquid 53 can be grasped, and whether or not the functional liquid 53 is cured can be determined.
In this embodiment, since the irradiation device 17 and the light receiving device 19 are provided in the droplet discharge device 1, it is possible to determine whether or not the functional liquid 53 is cured in the course of recording (drawing). As a result, the drawing quality can be easily improved.
In the present embodiment, whether or not the light amount data is acceptable is determined in step S18 of the recording process. If it is determined in step S18 that the light quantity data is unacceptable, that is, the degree of curing of the functional liquid 53 is insufficient, the functional liquid 53 is irradiated with the ultraviolet light 41 in the return path of the carriage 7. Thereby, since the degree of hardening of the functional liquid 53 can be increased, the quality of drawing can be easily improved.

  In the present embodiment, an example in which the margin area 75 is provided only on one side of the workpiece W in the X direction is shown, but the configuration of the workpiece W is not limited to this. As the configuration of the workpiece W, a configuration in which blank areas 75 are provided on both sides of the workpiece W in the X direction may be employed. Accordingly, as the configuration of the droplet discharge device 1, a configuration in which the irradiation device 17 and the light receiving device 19 are provided on both sides of the permission area 73 may be employed. With this configuration, it is possible to easily perform recording in the permission area 73 in both the forward path and the backward path of the carriage 7, so that it is possible to easily increase the efficiency of the recording operation.

Further, in the present embodiment, a configuration in which one set of light receiving devices 19 is provided in the droplet discharge device 1 is shown, but the configuration of the droplet discharge device 1 is not limited to this. As a configuration of the droplet discharge device 1, a configuration in which a plurality of sets of light receiving devices 19 are provided may be employed.
As a configuration in which a plurality of sets of light receiving devices 19 are provided, for example, as illustrated in FIG. 7, a configuration in which the light receiving devices 19 are provided for each pattern region 95 of the plurality of pattern regions 95 set in one blank region 75. Can be mentioned.
The wavelength range of the light 92 can be made different between the plurality of sets of light receiving devices 19. Such a configuration is suitable for the droplet discharge device 1 that can apply a plurality of types of functional liquids 53 to the workpiece W, for example. It is conceivable that the wavelength range in which the amount of light transmitted through the functional liquid 53 changes depending on the degree of curing of the functional liquid 53 differs depending on the type of the functional liquid 53. For this reason, the structure which provides the light-receiving device 19 for every kind of functional liquid 53 is preferable.
In addition, as a kind of the functional liquid 53, the color of the functional liquid 53 etc. are mentioned, for example. By providing the light receiving device 19 for each color of the functional liquids 53 of a plurality of colors, it is possible to easily determine the pass / fail regarding the degree of curing between the functional liquids 53 of different colors.

  DESCRIPTION OF SYMBOLS 1 ... Droplet discharge device, 3 ... Work conveying apparatus, 7 ... Carriage, 11 ... Carriage conveying apparatus, 15 ... Irradiation apparatus, 15a ... Irradiation apparatus, 15b ... Irradiation apparatus, 17 ... Irradiation apparatus, 18 ... Infrared light, 19 DESCRIPTION OF SYMBOLS ... Light receiving device, 25 ... Work table, 33 ... Discharge head, 35 ... Nozzle surface, 37 ... Nozzle, 41 ... Ultraviolet light, 43 ... Light source, 53 ... Functional liquid, 55 ... Droplet, 73 ... Permitted area, 75 ... Blank Region 78: Light source 85: Spectroscopic element 87 ... Optical filter 89 ... Light receiving element 91 ... Light 92 ... Light 111 ... Control unit 113 CPU

Claims (7)

A table having a light transmission part and supporting a workpiece;
A discharge head that discharges a liquid material that has a property of facing the work supported by the table and being cured by being irradiated with ultraviolet light toward the work,
An ultraviolet light irradiation device that irradiates light containing the ultraviolet light toward the liquid material discharged to the workpiece;
A displacement device for displacing the relative position of the workpiece with respect to the ejection head and the ultraviolet irradiation device ;
A light irradiation device for irradiating light toward the pattern formed from the liquid material discharged on said workpiece,
Of the light irradiated toward the pattern from the light irradiation device, provided in the path of the light transmitted through the pattern, the light transmitted through the pattern is converted into light in a plurality of wavelength ranges different from each other. A first optical element for spectroscopic analysis;
A second optical element that is provided in a path of the divided light in the plurality of wavelength regions and transmits light in a part of the plurality of wavelength regions;
A light receiving element that is provided in a path of light in the partial wavelength range that has passed through the second optical element, receives light in the partial wavelength range, and outputs a signal having a value corresponding to the received light amount; I have a,
The workpiece is disposed on the table such that a blank area of the workpiece overlaps the light transmission portion of the table,
When the discharge head, the ultraviolet irradiation device, and the workpiece are relatively moved by the displacement device,
The discharge head discharges the liquid material to the work according to recording data to form a drawing pattern, and discharges the liquid material to the blank area of the work to form a test pattern,
The ultraviolet irradiation device irradiates the ultraviolet light to the drawing pattern and the test pattern,
The light irradiation device irradiates the light toward the test pattern irradiated with the ultraviolet light,
The light receiving element receives the light emitted from the light irradiation device via the test pattern, the light transmission unit, the first optical element, and the second optical element,
A drawing apparatus characterized by that. The light irradiation device irradiates the light including infrared light toward the test pattern,
The first optical element splits the light transmitted through the test pattern into light of the plurality of wavelength ranges including an infrared wavelength range,
The second optical element transmits light in the infrared wavelength range as light in the partial wavelength range,
The light receiving element receives light in the infrared wavelength region and outputs a signal having a value corresponding to the received light amount.
The drawing apparatus according to claim 1 . The displacement device is:
A carriage for holding the ejection head;
A carriage conveying device for conveying the carriage;
Have
The ultraviolet light irradiation device is provided on the carriage,
The drawing apparatus according to claim 2. Based on the signal output from the light receiving element, a control unit that determines pass / fail for the degree of curing of the drawing pattern,
The drawing apparatus according to any one of claims 1 to 3 , wherein By discharging a liquid material having a property of being cured by irradiation of ultraviolet light to a work supported so that a blank area overlaps the light transmissive part on a table having a light transmissive part, the liquid material is applied to the work. in a drawing pattern forming step of forming a drawing pattern,
A test pattern forming step of forming a test pattern by discharging the liquid material in the blank area;
A curing step of irradiating and curing the light including the ultraviolet light toward the liquid material constituting the drawing pattern and the test pattern ;
After the curing step, the test pattern is irradiated with light, and the degree of curing of the drawing pattern based on the amount of light received through the light transmission portion of the irradiated light that has passed through the pattern A determination step of determining pass / fail for
A drawing method characterized by that. When the determination result in the determination step is rejected, the curing step is performed again after the determination step.
The drawing method according to claim 5 . In the determination step, the light transmitted through the test pattern is spectrally separated into light having a plurality of wavelength ranges including wavelength ranges different from each other and including the infrared wavelength range. Based on the amount of infrared light, it is determined whether the drawing pattern is cured or not.
The drawing method according to claim 6 .

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