JP5728288B2 - Supply / exhaust adjustment device, supply / exhaust adjustment system - Google Patents

Description

  The present invention relates to a supply / exhaust adjustment device including a main body portion in which a main flow path communicating with a first port and a second port is formed, and a speed controller that allows exhaust flowing through the main flow path to the main body portion to be adjusted by a needle valve. And an air supply / exhaust adjustment system having an air supply / exhaust adjustment device.

2. Description of the Related Art Conventionally, for example, in a semiconductor manufacturing apparatus, an air supply / exhaust adjustment device is used as a device for supplying / pressurizing or adjusting air supply / supply pressure, such as an air operated valve for controlling a chemical solution. Further, it is used as an apparatus for adjusting supply / supply pressure or exhaust of air such as an air cylinder.
About an air operated valve etc., a valve body can be contacted or separated from a valve seat by supplying and pressurizing or exhausting air. For example, an air operated valve generally may cause a water hammer phenomenon when the valve is closed.

Here, the water hammer phenomenon will be briefly described.
In the air operated valve, if the fluid flowing through the flow path toward the output port side closes the valve body suddenly, even after the valve is closed, the fluid is still output from the valve body by the inertial force of the fluid. It tries to flow to the fluid flow path on the side. Then, the fluid has a negative pressure in the flow path on the output port side, and a water hammer phenomenon occurs that generates an impact when the pressure returns to the positive pressure.
When a water hammer phenomenon occurs, the piping connected to the fluid control valve may vibrate, causing damage or malfunction to the air operated valve itself, piping members around this valve, measuring instruments on the piping, etc. is there.
In view of this, various devices have been disclosed in order to suppress or prevent the occurrence of such a water hammer phenomenon (see, for example, Patent Documents 1 and 2).

Patent Document 1 describes a check valve that operates by operating pressure and an air operated valve that includes a needle valve. In the first exhaust state where the valve closing operation is started because the main valve body of the air operated valve of Patent Document 1 is brought into contact with the main valve seat, the check valve is in the valve open state. Therefore, the air inserted through the check valve is released to the atmosphere. As a result, the main valve body of the air operated valve descends in the main valve seat direction.
Subsequently, in the second exhaust state in which the main valve body of the air operated valve is close to the main valve seat, the check valve is closed. The air is exhausted little by little through the needle valve.
Therefore, according to the air operated valve of Patent Document 1, when the second exhaust state close to the valve closed state is reached, air is exhausted little by little through the needle valve. Therefore, the main valve body slowly comes into contact with the main valve seat. Therefore, it is possible to suppress the occurrence of water hammer by slowly contacting.

  In Patent Document 2, a relief valve is formed on the air operated valve, so that the second exhaust state is exhausted by the relief valve. Therefore, it is described that water hammer can be suppressed.

JP 2000-120921 A JP 2009-180338 A

However, the prior art has the following problems.
That is, the air operated valve of Patent Document 1 is integrally formed with a check valve. If the check valve is integrally formed, the exhaust in the first exhaust state cannot be adjusted according to the use situation.
With the air operated valve of Patent Document 2, the exhaust in the first exhaust state cannot be adjusted.
Therefore, when the size of the air operated valve is different, or when the conditions for using multiple air pressures differ depending on the usage conditions or specifications, a dedicated air operated valve must be prepared each time. Become. In addition, individually designing the air operated valve in accordance with various specifications increases costs and becomes a problem.
In addition, as for the air cylinder, there is a case where it is desired to adjust the exhaust time and adjust the opening / closing time depending on the use situation or specifications.

  Accordingly, the present invention has been made to solve the above-described problems, and an object thereof is to provide a supply / exhaust adjustment device and a supply / exhaust adjustment system capable of adjusting exhaust according to use conditions. Objective.

In order to achieve the above object, an air supply / exhaust adjustment device and an air supply / exhaust adjustment system according to an aspect of the present invention have the following configurations.
(1) Supply / exhaust adjustment comprising a main body part in which a main flow path communicating with the first port and the second port is formed, and a speed controller that enables the exhaust gas flowing through the main flow path to be adjusted with respect to the main body part by a needle valve. In the apparatus, a bypass flow path is formed with respect to the main flow path, a relief valve that enables adjustment of exhaust flowing through the bypass flow path is provided, and the needle valve is formed inside the body of the speed controller. A packing is fixed to the outer periphery of the body, and the packing is formed with a deformable portion that expands radially in the shape of an umbrella and can be elastically deformed, and the fluid flows from the first port. when flowing into the main channel, wherein the deformable portion is elastically deformed to be closed, that the main channel communicates, outside periphery of the relief valve itself is convex periphery Portion is formed, the outer circumference portion is, the valve body portion formed at the distal end of the bypass flow path and the relief valve is located between the abutting valve seat, the peripheral circle portion is Receiving exhaust pressure .
(2) In the air supply / exhaust regulating device described in (1), it is preferable that the relief valve has a cylindrical portion.
(3) In the air supply / exhaust adjustment device described in (1) or (2), an operating part is formed in the speed controller, and a handle for positioning the position of the relief valve is formed in the relief valve. It is preferable that the operation unit and the handle can be operated from the same direction.

(4) In the air supply / exhaust adjustment device described in any one of (1) to (3), it is preferable that water hammer can be suppressed.

(5) In the air supply / exhaust adjustment system having the air supply / exhaust adjustment device according to any one of (1) to (4) , a plurality of the air supply / exhaust adjustment devices are provided, and the plurality of air supply / exhaust adjustments are provided. It is preferred that the devices are arranged in series or in parallel.

The operation and effect of the air supply / exhaust adjustment device and the air supply / exhaust adjustment system will be described.
(1) It has a needle valve that adjusts the exhaust gas flowing through the main flow path, and a relief valve that makes it possible to adjust the exhaust gas flowing through the bypass flow path formed with respect to the main flow path. Further, since both the needle valve and the relief valve can adjust the exhaust, the exhaust to the device having the piston can be adjusted according to the use situation.
Since the exhaust gas can be adjusted according to the use situation, the valve closing time of the air operated valve or the like can be shortened. By shortening the valve closing time, more semiconductors can be produced in the semiconductor manufacturing apparatus than before, and the productivity can be improved. Furthermore, by shortening the valve closing time, it is possible to accurately supply a chemical solution or the like, so that the quality of the semiconductor can be improved.
In addition, since it has a relief valve and a needle valve, the valve closing time of the air operated valve can be reduced even when the size of the air operated valve is different, or when conditions such as the use of multiple air pressures differ from site to site. It can be adjusted and shortened. For this reason, it is not necessary to prepare a dedicated product for the air operated valve or the like, so that the cost can be reduced.
Further, since the exhaust gas can be adjusted according to the use situation, the operation time of the air cylinder can be shortened.

(2) In addition to the effects described in (1) above, a large amount of exhaust air can be obtained by exhausting in the first exhaust state using a relief valve and a needle valve. Therefore, when this air supply / exhaust adjustment device is used for an air operated valve or the like, the main valve body can be quickly moved in the main valve seat direction. Further, the exhaust valve can be made small by closing the relief valve and exhausting in the second exhaust state using the needle valve. For this reason, the moving speed of the main valve body is reduced from before the main valve body such as an air operated valve comes into contact with the main valve seat, and the main valve body can be slowly closed with respect to the main valve seat.
That is, a portion where the main valve body is desired to be closed quickly becomes the first exhaust state, and a large amount of exhaust air can be obtained, and a portion where the main valve body is desired to be closed slowly is the second exhaust state where the exhaust air can be reduced.
In addition, when a large amount of exhaust air is desired in the first exhaust state, the relief valve can be adjusted to lengthen the time during which the exhaust amount is large. The main valve body can be quickly moved in the main valve seat direction by adjusting the relief valve and lengthening the time during which the exhaust amount is large.

(3) In addition to the effects described in (1) or (2), by adjusting the valve opening of the relief valve and the needle valve, adjusting the exhaust time of the exhaust discharged from the first port Can do. That is, since the exhaust opening can be adjusted by adjusting the valve openings of the relief valve and the needle valve, the exhaust time required for the exhaust to contact the main valve body and the main valve seat can be adjusted. By adjusting the exhaust time of the exhaust, it is possible to adjust the time for the main valve body of the air operated valve to contact the main valve seat, so the air operated valve can be quickly closed without causing water hammer. Can be made. Further, since the exhaust time of exhaust can be adjusted, the operation time can be adjusted when an air cylinder or the like is used.

(4) In addition to the function and effect described in (2), the first exhaust state and the second exhaust state can be provided to exhaust in a multistage manner. That is, the flow rate of exhaust differs between the first exhaust state and the second exhaust state. Therefore, the opening / closing speed of the air operated valve can be changed in multiple steps between the first exhaust state and the second exhaust state. Alternatively, the operating speed of the air cylinder can be changed in multiple steps.

(5) In addition to the effects described in (1) to (4), water hammer can be suppressed. That is, since exhaust can be performed in multiple stages, the speed of the valve body when the valve is closed can be reduced by performing a large amount of exhaust in the first exhaust state and performing a small amount of exhaust in the second exhaust state. . Thereby, a water hammer can be suppressed.

(6) In addition to the effects described in (1) to (5), since the air supply / exhaust adjustment device can be used as a normal open type or a normal close type, it can be used flexibly at the work site.

(7) In addition to the effects described in (1) to (6), the valve closing time of the air operated valve in the first exhaust state and the second exhaust state is adjusted by integrating the air operated valve. be able to. Further, since the piping connecting the air operated valve and the air supply / exhaust adjustment device is not necessary, space saving can be achieved.

(8) In addition to the functions and effects described in (1) to (6), when the solenoid valve is integrated, a pipe connecting the solenoid valve and the air supply / exhaust adjustment device is not required, and thus space saving can be achieved.

(9) In addition to the effects described in (1) to (8), a plurality of supply / exhaust adjustment devices are provided, and a plurality of supply / exhaust adjustment devices are arranged in series or in parallel. The operation of the air operated valve can be varied in multiple steps. That is, the first air supply / exhaust adjustment device can adjust the fluid supply amount to the second air supply / exhaust adjustment device, and the second air supply / exhaust adjustment device adjusts the fluid supply amount to the air operated valve or the like. Therefore, the operation can be varied in multiple steps.

It is sectional drawing at the time of air supply of the air supply / exhaust adjustment apparatus which concerns on this invention. It is sectional drawing at the time of air exhaustion (1st exhaust state) of the air supply / exhaust adjustment apparatus which concerns on this invention. It is sectional drawing at the time of air exhaustion (2nd exhaust state) of the air supply / exhaust adjustment apparatus which concerns on this invention. 1 is an overall configuration diagram of a supply / exhaust adjustment system according to the present invention. It is a figure showing the relationship between the operating pressure (exhaust pressure) of an air operated valve at the time of using the air supply / exhaust adjustment apparatus which concerns on this invention, and time. It is a figure showing the relationship between the operating pressure (exhaust pressure) of an air operated valve at the time of using the speed controller which concerns on a prior art, and time. It is a whole block diagram of the modification 1 of the supply / exhaust adjustment system which concerns on this invention. It is a whole block diagram of the modification 2 of the supply / exhaust adjustment system which concerns on this invention.

  Next, an embodiment of an air supply / exhaust adjustment device according to the present invention will be described with reference to the drawings.

<Overall configuration of supply / exhaust adjustment system>
FIG. 4 shows an overall configuration diagram of the supply / exhaust adjustment system 1.
The air supply / exhaust adjustment system 1 is a system for opening and closing the air operated valve 2. As shown in FIG. 4, the air supply / exhaust adjustment system 1 includes an air operated valve 2, an air supply / exhaust adjustment device 3, and a solenoid valve 4. The air operated valve 2 and the solenoid valve 4 are connected by a flow path, and the air supply / exhaust adjustment device 3 is connected to the flow path.
Since the air operated valve 2 and the solenoid valve 4 are not different from the prior art, a detailed description is omitted.
In the present embodiment, the air supply / exhaust of the air operated valve 2 is adjusted. However, as long as the piston slides by supplying or exhausting air, it can be incorporated into the air supply / exhaust adjustment system 1. . For example, there is an air cylinder in which a piston slides.

<Overall configuration of air supply / exhaust adjustment device>
FIG. 1 is a cross-sectional view of the air supply / exhaust adjustment device 3 during air supply. FIG. 2 shows a cross-sectional view of the air supply / exhaust adjustment device 3 during air exhaust (first exhaust state). FIG. 3 shows a cross-sectional view of the air supply / exhaust adjustment device 3 during air exhaust (second exhaust state).
1 has a speed controller main body 5, a relief valve main body 6, and an apparatus main body 30. The speed controller body 5 and the relief valve body 6 are fixedly attached to the apparatus body 30.

  As shown in FIG. 1, a first port 31 and a second port 32 are formed in the apparatus main body 30, and the first port 31 and the second port 32 communicate with each other through a flow path 33. The flow path 33 has a main flow path 331 that communicates with the second port 32 through the first port 31 and the first storage hole 34. Further, a bypass channel 332 that communicates with the main channel 331 through the first accommodation hole 34 and the second accommodation hole 35 is provided.

<Configuration of speed controller body>
As shown in FIG. 1, the speed controller body 5 adjusts the flow rate of air flowing through the main flow path 331. The speed controller body 5 is detachably accommodated in a first accommodation hole 34 formed in the apparatus body 30.
The speed controller main body 5 includes a body 51, a rotatable rotating portion 52 that is in contact with the upper portion of the body 51, and an outer cylinder portion 54 and an outer cylinder portion 54 on the outer periphery of the body 51 and the rotating portion 52. An operation portion 55 is formed on the outer periphery.

A needle valve hole 58 for inserting the needle valve 7 is formed in the center of the body 51 and the rotating part 52 and in the axial center. The needle valve hole 58 includes a small diameter hole 58a and a large diameter hole 58b. A valve seat 51a is formed at the circumferential end of the contact portion where the small diameter hole 58a contacts the large diameter hole 58b. The large diameter hole 58 b communicates with an outer peripheral communication channel 58 d that communicates with a main channel 331 formed in the outer peripheral portion of the body 51.
A female screw 58c is formed in a portion of the needle valve hole 58 where the large diameter hole 58b and the needle valve 7 abut. A male screw 52 a is formed in a portion of the outer peripheral portion of the rotating unit 52 that contacts the female screw 55 b of the operation unit 55.

The body 51 shown in FIG. 1 has a large diameter portion 51c having a diameter substantially the same as the diameter of the first accommodation hole 34, and a small diameter portion 51d having a smaller diameter than the diameter hole of the first accommodation hole 34 at the tip of the large diameter portion 51c. Have Since the large diameter portion 51c and the first storage hole 34 have substantially the same diameter, the first storage hole 34 can be sealed.
A storage recess 51e for storing packing 510, which is an elastic member, is formed on the outer periphery of the tip of the small diameter portion 51d. The packing 510 is fixed by being fitted into the storage recess 51e. The packing 510 has a hollow cylindrical portion 511 and a deformable portion 512 that spreads in an umbrella shape in the outer circumferential direction with respect to the cylindrical portion 511 and can be elastically deformed. Since the deformable portion 512 spreads in an umbrella shape in the lower direction in FIG. 1, when air flows out from the upper direction, the deformable portion 512 is elastically deformed and the main flow path 331 is inserted. On the other hand, as shown in FIGS. 2 and 3, when air flows out from the direction of the main flow path 331, the deformed portion 512 flows into the umbrella-shaped inside, and the deformed portion 512 spreads to block the main flow path 331.

The needle valve 7 adjusts the flow path area by inserting the needle portion 71 of the needle valve 7 into the small diameter hole 58a and adjusting the depth of insertion. The needle valve 7 has a main body portion 72 and a needle portion 71 fixed to the tip of the main body portion 72 and formed in a tapered shape. A male screw 74 is formed in a portion of the main body 72 that contacts the large-diameter hole 58b. The male screw 74 is screwed with a female screw 58 c formed in the needle valve hole 58. In addition, a guide hole 73 that is a hollow portion having a substantially rectangular parallelepiped shape is formed in the main body 72. The guide hole 73 is guided by a guide bar 57 fixed to the outer cylinder 54. Thereby, the needle valve 7 is restricted from moving in the rotational direction, and can move only in the axial direction.
In the present embodiment, the needle portion 71 is in a state slightly separated from the valve seat 51a. Therefore, air can flow in and out from the small diameter hole 58a in the gap between the needle portion 71 and the valve seat 51a.

  The outer cylinder 54 is for fixing the positions of the body 51 and the rotating part 52. An outer cylinder hollow part 54a for inserting the body 51 and the rotating part 52 is formed at the center of the outer cylinder 54 and in the axial direction. The position of the body 51 and the rotating part 52 is fixed by being inserted into the outer cylinder hollow part 54a, and the body 51 and the rotating part 52 do not move in the axial direction and the radial direction. In addition, since the rotation part 52 is inserted so that rotation is possible, it can be rotated.

  The operation unit 55 is for operating the needle valve 7, and by operating the operation unit 55, the needle valve 7 can be moved in the direction of the valve seat 51a. An operation hollow portion 55 a for inserting the rotating portion 52 and the outer cylinder 54 is formed at the center of the operation portion 55. A female screw 55b is formed in a portion of the inner wall surface of the operation hollow portion 55a that contacts the male screw 52a of the rotating portion 52.

<Configuration of relief valve body>
As shown in FIG. 1, the relief valve body 6 adjusts the flow rate of air flowing through the bypass flow path 332. The relief valve body 6 is housed in a second housing hole 35 formed in the apparatus body portion 30.
In the relief valve main body 6, a relief valve 61 and a positioning member 63 are formed from the side closer to the center.

The relief valve 61 is for adjusting the flow rate of the bypass flow path 332 by contacting and separating from the second storage hole valve seat 37. The relief valve 61 has a cylindrical portion 612 on the inner side, and a valve body portion 614 is formed at the tip of the cylindrical portion 612. A bypass channel communication hole 616 is formed in an intermediate portion of the cylindrical portion 612. An outer circumferential circular portion 617 is formed in the outer circumferential direction of a portion near the valve body portion 614 in the cylindrical portion 612. The diameter of the outer peripheral circular portion 617 is substantially the same as the diameter of the second storage hole 35, so that it can receive an operating pressure (exhaust pressure).
An internal flow path 618 is formed inside the cylindrical portion 612, and the internal flow path 618 extends to a portion in contact with the valve body portion 614. A communication internal flow path 613 that communicates with the internal flow path 618 is formed in a cross shape on the lower surface of the outer peripheral circular portion 617.
The valve body portion 614 has a tapered shape at the tip, and an O-ring 615 is fixed in the middle of the tapered portion. Since the O-ring 615 contacts the second storage hole valve seat 37, the second storage hole valve seat 37 can be reliably sealed.

  A positioning hollow hole 631 for inserting the relief valve 61 is formed in the center of the positioning member 63 and in the axial direction. The upper end portion of the cylindrical portion 612 of the relief valve 61 is inserted into the positioning hollow hole 631. One end of the elastic member 62 is fixed to the lower end surface of the positioning member 63, and the other end of the elastic member 62 is fixed to the upper surface of the outer peripheral circular portion 617 of the relief valve 61. In FIG. 1, since the relief valve 61 is urged away from the positioning member 63 by the elastic member 62, the relief valve 61 is in contact with the second storage hole valve seat 37.

A relief valve fixing body 64 that includes the positioning member 63 and is integrally formed with the apparatus main body 30 is formed on the outer peripheral portion of the positioning member 63. A fixed body hole 641 for inserting the positioning member 63 is formed at the center of the relief valve fixed body 64 and inside the axial center. The fixed body hole 641 communicates with the second storage hole 35.
A male screw 632 is formed on the outer periphery of the positioning member 63. A female screw 642 is formed on the inner peripheral surface of the fixed body hole 641. The male screw 632 and the female screw 642 are screwed together. A handle 65 is integrally formed at the upper end of the positioning member 63. Therefore, in this embodiment, when the handle 65 is rotated clockwise, the positioning member 63 is similarly rotated, and the positioning member 63 moves downward (valve closing). On the contrary, when the handle 65 is rotated counterclockwise, the positioning member 63 moves in the upward (valve opening) direction. As the positioning member 63 moves, the relief valve 61 moves in the same manner, and the position of the relief valve 61 can be determined.

<Effect of supply / exhaust adjustment system>
Then, the effect of the air supply / exhaust adjustment system 1 is demonstrated using FIG. 1 thru | or FIG.
FIG. 5 is a graph showing the relationship between the valve closing time of the air operated valve 2 and the operating pressure (exhaust pressure) when the air supply / exhaust adjustment device 3 is used. In FIG. 5, the vertical axis represents the air pressure (KPa) in the air operated valve 2 and the valve stroke amount of the air operated valve 2, and the horizontal axis represents time (msec). A solid line X indicates the value of the operating pressure (exhaust pressure), and a solid line Y indicates the valve stroke of the air operated valve 2.
A state where air is supplied by the speed controller 5 is referred to as an air supply state T0. The state exhausted by the relief valve 61 and the needle valve 7 is defined as a first exhaust state T1. The state where the relief valve 61 is closed and the needle valve 7 is exhausted is referred to as a second exhaust state T2.

<Air supply to the air operated valve>
Air is supplied to the air operated valve 2 from the solenoid valve 4 of FIG. As shown in FIG. 1, the air supplied from the solenoid valve 4 flows from the first port 31 to the second port 32. The air pressure during supply is a constant 500 KPa in the supply state T0 as indicated by the solid line X in FIG. As shown in FIG. 1, the air that has flowed out of the first port 31 presses the packing 510 from above in FIG. Since the packing 510 spreads in an umbrella shape in the outer peripheral direction, the air elastically deforms the deforming portion 512 and is in a state of being inserted through the main flow path 331. Therefore, a large amount of air can flow through the main channel 331.
In the present embodiment, the needle valve 7 is slightly separated from the valve seat 51a. Therefore, in addition to the main flow path 331, air slightly flows out of the small diameter hole 58 a of the needle valve hole 58 and flows out into the main flow path 331.

On the other hand, in the state shown in FIG. 1, the air pressure is as high as 500 KPa. And since the air with a high pressure has spread to all the flow paths 33, the pressure in the flow path 33 is constant. Therefore, since the urging force of the elastic member 62 works normally, the relief valve 61 comes into contact with the second storage hole valve seat 37 and the second storage hole valve seat 37 is closed. The bypass channel 332 is closed, and air does not flow from the bypass channel 332.
Therefore, when supplying air to the air operated valve 2, as shown in FIG. 1, the air flowing out from the first port 31 is limited to the fluid flowing through the main flow path 331 and flowing into the second port 32. When supplying air, the packing 510 is elastically deformed to form a large volume flow path in the main flow path 331, so that air can be sufficiently supplied. As shown in FIG. 5, in the air supply state T <b> 0, the valve stroke of the air operated valve 2 is fully opened as indicated by the solid line Y. Further, the operation pressure (exhaust pressure) is a constant high value as indicated by the solid line X.

<Exhaust from the air operated valve>
(First exhaust state)
First, the air supply / exhaust adjustment device 3 during air exhaust (first exhaust state) will be described with reference to FIGS. 2 and 5.
Air is exhausted from the air operated valve 2 of FIG. 4 to the solenoid valve 4 via the air supply / exhaust adjustment device 3.
First, the supply of air from the first port 31 is stopped. By stopping the supply of air, the umbrella portion of the packing 510 that has been elastically deformed by the air spreads, and the main flow path 331 is closed. Since the main flow path 331 is closed by the packing 510 and the bypass flow path 332 is closed by the relief valve 61, the air on the first port 31 side flows and the pressure on the first port 31 side decreases.

  Secondly, air at a high operating pressure (exhaust pressure) of 500 KPa is held on the second port 32 side as it is. The reason is that the main flow path 331 is closed by the packing 510, and further, the bypass flow path 332 is closed by the relief valve 61. This is because air with a high operating pressure (exhaust pressure) is retained. When the flow path on the second port 32 side is filled with high-pressure air and the pressure on the flow path on the first port 31 side is reduced, a pressure difference is generated there. Therefore, the relief valve 61 is pressed upward in FIG. 2 by the air pressure on the second port 32 side. Since the pressure of the air that presses the relief valve 61 upward is larger than the urging force of the elastic member 62, the relief valve 61 is raised and the relief valve body 6 is opened as shown in FIG. Become. When the relief valve main body 6 is in the valve open state, air flows out from the communication internal flow path 619 through the internal flow path 618 to the bypass flow path communication hole 616 to the bypass flow path 332. Therefore, the air exhausted from the second port 32 passes through the bypass flow path 332 via the relief valve body 6 and is exhausted to the first port 31.

  On the other hand, in this embodiment, the needle valve 7 is in a state slightly separated from the valve seat 51a. Therefore, air slightly flows out from the small diameter hole 58 a in the needle valve hole 58 and flows out to the first port 31 via the main flow path 331. Note that the amount of air flowing out from the needle valve 7 is very small and does not affect the pressure difference between the air in the flow path on the first port 31 side and the second port 32 side.

  Third, a certain amount of exhaust pressure of 500 KPa, which is the pressure X1 indicated by the solid line X shown in FIG. 5, on the second port 32 side is exhausted to the first port 31 via the relief valve body 6. Thereby, the pressure of the flow path on the second port 32 side becomes the value of the pressure X2. On the other hand, the pressure on the flow path on the first port 31 side is increased by the exhaust pressure of the pressure X3 that has flowed. As a result, the pressure in the flow path on the first port 31 side and the pressure in the flow path on the second port 32 side both become the pressure X3. Therefore, the pressure difference in the air supply / exhaust adjustment device 3 disappears, and the relief valve 61 is pressed downward in FIG. 3 by the urging force of the elastic member 62. The relief valve 61 contacts the second storage hole valve seat 37 to close the bypass flow path 332. Accordingly, a large amount of air cannot flow out of the bypass channel 332.

  Also in the third case, the needle valve 7 is slightly separated from the valve seat 51a. Therefore, air slightly flows out from the small diameter hole 58 a of the needle valve hole 58 and flows out to the first port 31 via the main flow path 331.

  In the first exhaust state, a flow path having a large volume is formed in the bypass flow path 332 in the relief valve body 6, so that air can be exhausted sufficiently. Therefore, air can be exhausted quickly. Therefore, the valve stroke can be sharply lowered from the stroke Y1 to Y2 of the solid line Y shown in FIG.

  Further, in the present embodiment, the start of the first exhaust state T1 starts from the pressure X1 at which the solid line X shown in FIG. 5 starts to decrease, and the end of the first exhaust state T1 is the pressure at which the solid line X exceeds about 250 KPa. Up to a gentle pressure X2. The time until the operating pressure (exhaust pressure) exceeds the pressure X2 is 100 msec. When the pressure X2 is exceeded, the pressure difference between the flow path on the first port 31 side and the flow path on the second port 32 side becomes small, and the relief valve 61 closes, so the solid line X becomes gentle after the pressure X2. . Therefore, since the relief valve 61 opens and closes abruptly in a short time of 100 msec, the valve stroke of the air operated valve 2 can be moved directly from the stroke Y1 to Y2 as shown in FIG. Stroke Y2 is a state in which about half of the operation is performed from the valve open state to the valve open state. By shortening the valve closing time, more semiconductors can be produced in the semiconductor manufacturing apparatus than in the past, so that productivity can be improved.

(Second exhaust state)
Subsequently, a description will be given of the air supply / exhaust adjustment device 3 during air exhaust (second exhaust state).
Fourth, air cannot flow out of the bypass flow path 332. Therefore, the air flows out to the main flow path 331 through the small diameter hole 58 a and the outer peripheral communication flow path 58 d of the needle valve hole 58, and only flows out to the first port 31.
Therefore, since the operation pressure (exhaust pressure) is reduced, the valve stroke is slow and slow from the stroke Y2 to Y3 after the second exhaust state T2 as shown by the solid line Y in FIG. In the present embodiment, the strokes Y2 to Y3 after the second exhaust state T2 take 100 msec to 200 msec. Therefore, the time is delayed until the main valve body of the air operated valve 2 comes into contact with the main valve seat. Since the valve stroke until the main valve body of the air operated valve 2 comes into contact with the main valve seat can be slowed, the water hammer generated when the main valve body and the main valve seat collide (rapidly contact) is reduced. Can be suppressed.

  That is, instead of abruptly reducing the operating pressure (exhaust pressure) of the air operated valve 2, the water is caused by a rapid decrease in the operating pressure (exhaust pressure) by flowing the air little by little using the needle valve 7. Hammer can be suppressed. By reducing the water hammer, particles can be reduced. Moreover, since the sudden closing of the air operated valve 2 can be prevented, the durability of the air operated valve 2 can be improved.

  According to the present embodiment, the needle valve 7 shown in FIGS. 1 to 3 can be moved in the axial direction by rotating the operation portion 55. That is, the female screw 55a of the operation unit 55 and the male screw 52a of the rotating unit 52 are screwed together, and the female screw 55b of the rotating unit 52 and the male screw 74 of the needle valve 7 are screwed together to function as a differential screw. . By functioning as a differential screw, the axial direction of the needle valve 7 can be adjusted. By adjusting the axial direction of the needle valve 7, the exhaust flow rate flowing through the main flow path 331 in the second exhaust state can be adjusted. Therefore, the exhaust time in the second exhaust state can be adjusted. Since the exhaust time in the second exhaust state can be adjusted, the air operated valve 2 can be quickly closed without causing water hammer.

  Further, according to this embodiment, the relief valve 61 shown in FIGS. 1 to 3 can move in the axial direction by rotating the handle 65. That is, by rotating the handle 65, the male screw 632 of the positioning member 63 can be screwed with the female screw 642 of the relief valve fixing body 64 and moved in the axial direction. When the positioning member 63 moves in the axial direction, the position of the relief valve 61 can be moved. Therefore, the exhaust flowing through the bypass channel 332 in the first exhaust state can be adjusted. Since the exhaust time in the first exhaust state can be adjusted, the air operated valve 2 can be quickly closed. Therefore, more semiconductors can be produced in the semiconductor manufacturing apparatus than before, and productivity can be improved.

  Further, according to the present embodiment, the needle valve 7 and the relief valve 61 shown in FIGS. 1 to 3 can be adjusted, thereby adjusting the operation pressure (exhaust pressure) in the first exhaust state and the second exhaust state. be able to. The needle valve 7 and the relief valve 61 are mounted on a supply / exhaust adjustment device 3 that can be retrofitted to an existing air operated valve. For this reason, the valve closing time can be adjusted by the air supply / exhaust adjustment device 3 in which the existing air operated valve is installed later, so that various air operated valves can be handled. In other words, even when the size of the air operated valve is different or when the conditions for using multiple air pressures vary depending on the site, the valve closing time of the air operated valve can be adjusted. There is no need to prepare individual air operated valves. Therefore, the cost for the individual design of the air operated valve can be reduced.

  Moreover, according to this embodiment, it can exhaust in multistage by having the 1st exhaust state T1 and the 2nd exhaust state T2. That is, the flow rate of exhaust differs between the first exhaust state T1 and the second exhaust state T2. Therefore, the opening / closing speed of the air operated valve 2 can be changed in multiple steps between the first exhaust state T1 and the second exhaust state T2. Alternatively, the operating speed of the air cylinder can be changed in multiple steps.

According to this embodiment, the following effects can be obtained.
(1) A needle valve 7 that adjusts the operating pressure (exhaust pressure) that flows through the main flow path 331, and a relief valve that makes it possible to adjust the operating pressure (exhaust pressure) that flows through the bypass flow path 332 formed with respect to the main flow path 331. 61. Further, since both the needle valve 7 and the relief valve 61 can adjust the operating pressure (exhaust pressure), the operating pressure (exhaust pressure) for the air operated valve 2 can be adjusted according to the use situation.
Since the operating pressure (exhaust pressure) can be adjusted according to the use situation, the valve closing time of the air operated valve 2 can be shortened. In the present embodiment, as shown in FIGS. 5 and 6, when the air operated valve 2 is used using only the conventional speed controller, it takes 1400 msec to close the valve in the exhaust state S1. Compared to that case, the valve can be closed in 300 msec including the first exhaust state T1 and the second exhaust state T2. In other words, the valve can be closed in about 21% of the time while suppressing the water hammer as compared with the prior art. By shortening the valve closing time, more semiconductors can be produced in the semiconductor manufacturing apparatus than before, and the productivity can be improved. Furthermore, by shortening the valve closing time, the transient state is shortened, and an accurate chemical solution can be supplied, so that the quality of the semiconductor can be improved.

Further, since the relief valve 61 and the needle valve 7 are provided, the air operated valve 2 is closed even when the size of the air operated valve 2 is different or when the conditions for using a plurality of air pressures are different depending on the site. Time can be adjusted and shortened. For this reason, it is not necessary to prepare a dedicated product for the air operated valve 2, so that the cost can be reduced.
Further, since the water hammer can be suppressed, the impact generated in the air operated valve can be suppressed, so that the particles can be reduced and the durability of the air operated valve can be improved.
In addition, since the relief valve 61 and the speed controller 2 are fixedly installed and manifolded, the air supply / exhaust adjustment device 3 can be installed even in a space that is smaller than the conventional one.

(2) Exhaust air can be increased by exhausting in the first exhaust state T1 using the relief valve 61 and the needle valve 7. Therefore, as shown in FIG. 5, when the air supply / exhaust adjustment device 3 is used for the air operated valve 2, the main valve body can be moved in about 100 msec to a position where the main valve body is operated approximately half toward the valve closed state. . Further, by closing the relief valve 61 and using the needle valve 7 to exhaust in the second exhaust state T2, the amount of exhaust air can be reduced. For this reason, the moving speed of the main valve body is slowed before the main valve body of the air operated valve 2 comes into contact with the main valve seat, and the main valve body is slowly closed with respect to the main valve seat in a time of 100 msec to 200 msec. be able to.

That is, when the main valve body is desired to be closed quickly, the first exhaust state T1 can be obtained, and a large amount of exhaust air can be obtained. When the main valve body is desired to be closed slowly, the second exhaust state T2 can be obtained, and the exhaust air can be reduced. it can.
Further, when it is desired to increase the amount of exhaust air in the first exhaust state T1, the relief valve 61 can be adjusted to increase the operating pressure (exhaust pressure). By adjusting the relief valve 61 and increasing the operating pressure (exhaust pressure), the main valve body can be quickly moved in the main valve seat direction.

(3) Since the valve opening degree of the relief valve 61 and the needle valve 7 can be adjusted, the exhaust time can be adjusted. That is, since the operating pressure (exhaust pressure) can be adjusted by adjusting the valve openings of the relief valve 61 and the needle valve 7, the time required for the main valve body and the main valve seat to contact each other can be adjusted. . Therefore, the exhaust time can be adjusted. Since the exhaust time can be adjusted, the air operated valve 2 can be quickly closed without causing water hammer.

Note that the present invention is not limited to the above-described embodiment, and various applications are possible without departing from the spirit of the invention.
For example, in the present embodiment, the air supply / exhaust adjustment device 3 is of a normally closed type, but can be of a normally open type by connecting the air supply port and the exhaust port in reverse. Since one air supply / exhaust adjustment device 3 has both functions of a normal open type and a normal close type, it is not necessary to have both of the air supply / exhaust adjustment devices 3 as stock, so that the cost can be reduced.

  For example, in the present embodiment, the connection method of the air supply / exhaust adjustment device shown in FIG. 4 is shown, but various connection methods other than the connection method of the air supply / exhaust adjustment device shown in FIG.

  For example, in the present embodiment, the air supply / exhaust adjustment device is used for the air operated valve, but the air operated valve can be changed to an air cylinder. By using this air supply / exhaust adjustment device for the air cylinder, it is possible to suppress the absorption of shock and water hammer that occur when the air cylinder is closed.

  For example, in the present embodiment, the air supply / exhaust adjustment device is provided separately from the air operated valve, but a structure integrated with the air operated valve may be employed. By integrating with the air operated valve, the valve closing time of the air operated valve in the first exhaust state and the second exhaust state can be adjusted. Moreover, space saving can be achieved.

  For example, in the present embodiment, the air supply / exhaust adjustment device is provided separately from the solenoid valve. However, a structure integrated with the solenoid valve may be employed. Space integration can be achieved by integrating them.

For example, an overall configuration diagram of the air supply / exhaust adjustment system 10 is shown in FIG. 7 according to the first modification of the present embodiment.
The air supply / exhaust adjustment system 10 is a system for opening and closing the air operated valve 2. As shown in FIG. 7, the supply / exhaust adjustment system 10 includes an air operated valve 2, two supply / exhaust adjustment devices 3 </ b> A, 3 </ b> B, and a solenoid valve 4. The air operated valve 2 and the solenoid valve 4 are connected by a flow path, and the two air supply / exhaust adjustment devices 3A and 3B are connected to the flow path. The supply / exhaust adjustment devices 3A and 3B are connected in series to the flow path.
Since the two air supply / exhaust adjustment devices 3A and 3B are connected, the operation of the air operated valve 2 can be varied in multiple stages. That is, the supply / exhaust adjustment device 3B can adjust the amount of fluid supplied to the supply / exhaust adjustment device 3A, and the supply / exhaust adjustment device 3A can adjust the supply amount of fluid to the air operated valve 2. Therefore, the operation can be varied in multiple steps.
In this modification, the number of the air supply / exhaust adjustment devices is two. However, by using two or more, the operation can be varied in multiple steps.

For example, an overall configuration diagram of the air supply / exhaust adjustment system 20 is shown in FIG. 8 according to the second modification of the present embodiment.
In the first modification, two air supply / exhaust adjustment devices are connected in series, but in the second modification, as shown in FIG. 8, two air supply / exhaust adjustment devices 3D and 3E are connected in parallel. In the second modification, the configuration other than the connection of the air supply / exhaust adjustment devices 3D and 3E in parallel is the same as that in the first modification. In addition, since there is no change in the operational effects, a detailed description is omitted.
In this modification, the number of the air supply / exhaust adjustment devices is two, but the operation can be varied in more stages by using two or more.

  For example, in the present embodiment, it is described that the exhaust is performed from the air supply port to the exhaust port. However, the air may be exhausted from the exhaust port to the air supply port. The air operated valve 2 shown in FIG. 4 can be exhausted to the solenoid valve 4, and the solenoid valve 4 can be exhausted to the air operated valve 2.

For example, in the present embodiment, the speed when the air operated valve is closed is decreased, but the speed when the valve is opened can also be decreased. For that purpose, it can be changed by replacing the air supply port and the exhaust port to the air operated valve.
In addition, it can be used even if the flow of the exhaust gas is changed from that of the present embodiment and reversed.

3 Supply / Exhaust Adjustment Device 30 Body 31 First Port 32 Second Port 331 Main Flow Path 332 Bypass Flow Path 5 Speed Controller 6 Relief Valve 7 Needle Valve

Claims (5)

A main body part in which a main flow path communicating with the first port and the second port is formed, and a supply / exhaust adjustment device comprising a speed controller that can adjust an exhaust amount of fluid flowing in the main flow path of the main body part by a needle valve In
A bypass channel is formed with respect to the main channel;
Having a relief valve that allows adjustment of the exhaust flowing through the bypass flow path;
The needle valve is formed inside the body of the speed controller, and a packing is fixed to the outer periphery of the body, and the packing spreads radially outward and forms an elastically deformable deformable portion. is being done,
When the fluid flows from the first port into the main flow path, the deformation portion is elastically deformed so as to be closed, and the main flow path is communicated;
Outside circumference of the relief valve itself, convex peripheral circle portion is formed, the outer circumference portion is, the valve body portion formed at the distal end of the bypass flow path and the relief valve is in contact Located between the valve seat and the outer peripheral circular portion receiving exhaust pressure ;
An air supply / exhaust adjustment device characterized by the above. In the air supply and exhaust adjustment device according to claim 1,
The relief valve has a cylindrical portion;
An air supply / exhaust adjustment device characterized by the above. In the air supply and exhaust adjustment apparatus according to claim 1 or 2,
The speed controller is formed with an operation unit,
A handle is formed on the relief valve;
The operation portion and the handle can be operated from the same direction;
An air supply / exhaust adjustment device characterized by the above. In the air supply and exhaust adjustment device according to any one of claims 1 to 3,
Being able to suppress water hammer,
An air supply / exhaust adjustment device characterized by the above. A supply / exhaust adjustment system comprising the supply / exhaust adjustment device according to any one of claims 1 to 4,
A plurality of the air supply and exhaust adjustment devices are provided;
The plurality of air supply and exhaust adjustment devices are arranged in series or in parallel;
Supply and exhaust adjustment system characterized by.

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