JP5704672B1 - Surface plate - Google Patents

Abstract

An object of the present invention is to increase the strength of a surface plate having a through hole. A surface plate 10 includes a casing 100 including a top plate 110, a bottom plate 140 facing the top plate 110, and a frame body 170 positioned between the top plate 110 and the bottom plate 140, and the casing 100. A honeycomb structure 200 disposed in the honeycomb structure 200 in which a plurality of structure through holes 220 are formed so that the wall 210 divides the space, and the honeycomb structure 200 is disposed in the housing 100. The rib portion 300 extends from the one side 100a side of the housing 100 to the other side 100b side facing the one side 100a. [Selection] Figure 3

Description

  The present invention relates to a surface plate.

  Patent Document 1 includes a hollow housing having a reference plane as a work or a mounting surface of a mechanical device, and an assembly of substantially closed small spaces having substantially the same shape provided inside the housing. A heat transfer means provided in the honeycomb structure for communicating the small spaces of the honeycomb structure with each other and performing heat transfer between the small spaces; The precision surface plate is described in which the heat transfer between the small spaces of the honeycomb structure is positively performed through the above.

  Patent Document 2 discloses a honeycomb structure formed so that a large number of cells are regularly arranged, and extends along the outer edge of the honeycomb structure in the direction perpendicular to the hole core of each cell. A frame surrounding from the orthogonal direction, an end face plate bonded by an adhesive so as to straddle each end surface of the honeycomb structure and the frame in the hole core direction along the hole core, and the honeycomb structure and the frame A honeycomb plate provided with another end plate bonded by an adhesive so as to straddle each other end surface of the body, and among the outer surfaces of the honeycomb plate, a part or all of only the outer surface is treated with a surface treatment A honeycomb plate characterized in that is formed is described.

JP 2006-315114 A JP 2008-238696 A

  In the conventional technique, the strength of the surface plate having the structure in which the through hole is formed is not sufficient.

  An object of this invention is to raise the intensity | strength of the surface plate which has a structure in which the through-hole is formed.

  The present invention according to claim 1 includes a first plate-shaped portion, a second plate-shaped portion facing the first plate-shaped portion, the first plate-shaped portion, and the second plate-shaped portion. A housing having a side surface portion positioned between and a structure disposed in the housing, wherein a plurality of structure through-holes are formed so that the wall portion divides the space. It is a surface plate which has a structure and the reinforcement part which is arrange | positioned in the said housing | casing and is extended from the one side of the said housing | casing to the other side facing the said one side.

  The present invention according to claim 2 is the surface plate according to claim 1, wherein a through hole for ventilation is formed in the reinforcing portion.

  The present invention according to claim 3 is the surface plate according to claim 1 or 2, wherein a through hole for ventilation is formed in the side surface portion.

  The present invention according to claim 4 is the surface plate according to any one of claims 1 to 3, wherein a through hole for ventilation is formed in the wall portion.

  According to a fifth aspect of the present invention, a plurality of positioning through holes used for positioning an object to be placed with respect to the first plate-like portion are formed in the first plate-like portion. 5. The surface plate according to claim 1, wherein the plurality of positioning through holes are arranged so as to face any one of the plurality of structure through holes.

  According to a sixth aspect of the present invention, in the second plate-like portion, a first ventilation through hole and a second ventilation through hole having a diameter larger than that of the first ventilation through hole. The surface plate according to claim 1, wherein the surface plate is formed.

The present invention according to claim 7 includes a first plate-shaped portion, a second plate-shaped portion facing the first plate-shaped portion, the first plate-shaped portion, and the second plate-shaped portion. A housing having a side surface portion positioned between and a structure disposed in the housing, wherein a plurality of structure through-holes are formed so that the wall portion divides the space. A reinforcing part disposed in the front case, having one end attached to the first plate-like part and the other end attached to the second plate-like part,
Is a surface plate.

  According to an eighth aspect of the present invention, in the second plate-shaped portion, a first ventilation through hole and a second ventilation through hole having a diameter larger than that of the first ventilation through hole. The platen according to claim 7, wherein

  The present invention according to claim 9 is the surface plate according to claim 8, wherein the plate includes a plurality of the reinforcing portions, and the reinforcing portions are arranged so as to surround the second through hole for ventilation.

  The present invention according to claim 10 includes a first plate-shaped portion, a second plate-shaped portion facing the first plate-shaped portion, the first plate-shaped portion, and the second plate-shaped portion. A housing having a side surface portion positioned between and a structure disposed in the housing, wherein a plurality of structure through-holes are formed so that the wall portion divides the space. A structure, a first reinforcing portion that is disposed in the housing and extends from one side of the housing to the other side facing the one side, and is disposed in the front housing, and has one end portion A surface plate having a second reinforcing portion attached to the first plate-like portion and having the other end attached to the second plate-like portion.

  According to the first aspect of the present invention, the strength of the surface plate having the structure in which the through hole is formed can be increased.

  According to the second aspect of the present invention, it is possible to suppress the temperature change of the surface plate as compared with the case where no through hole for ventilation is formed.

  According to the third aspect of the present invention, it is possible to suppress the temperature change of the surface plate as compared with the case where no through hole for ventilation is formed.

  According to the fourth aspect of the present invention, it is possible to suppress the temperature change of the surface plate as compared with the case where no through hole for ventilation is formed.

  According to the fifth aspect of the present invention, a plurality of positioning through-holes that are not used for positioning the mounting object function as ventilation holes, so that temperature change of the surface plate is suppressed. can do.

  According to the sixth aspect of the present invention, the temperature change of the surface plate can be suppressed as compared with the case where the second through hole for ventilation is not formed.

  According to the seventh aspect of the present invention, the strength of the surface plate having the structure in which the through hole is formed can be increased.

  According to the eighth aspect of the present invention, the temperature change of the surface plate can be suppressed as compared with the case where the second through hole for ventilation is not formed.

  According to the ninth aspect of the present invention, it is possible to increase the strength of the surface plate in the vicinity of the second vent hole for which the strength is likely to be lower than at other positions.

  According to the tenth aspect of the present invention, the strength of a surface plate having a structure in which a through hole is formed can be increased.

It is a perspective view which shows the surface plate which concerns on embodiment of this invention. It is a perspective view which shows the frame which the surface plate shown in FIG. 1 has. It is a top view which shows the state which fractured | ruptured a part of top plate of the surface plate shown in FIG. It is a top view which shows the baseplate which the surface plate shown in FIG. 1 has. FIG. 2 is an enlarged plan view showing a part of a honeycomb structure included in the surface plate shown in FIG. 1. It is a 1st perspective view which expands and shows the rib part vicinity which the surface plate shown in FIG. 1 has. It is the 2nd perspective view which expands and shows the rib part vicinity which the surface plate shown in FIG. 1 has. It is a figure which expands and shows a part of surface plate shown in FIG. 1, and is a figure explaining the positional relationship of the top plate and honeycomb structure in the surface plate shown in FIG. It is a top view which expands and shows a part of surface plate shown in FIG. 1 in the state which removed the top plate.

Next, embodiments of the present invention will be described with reference to the drawings.
FIG. 1 shows a surface plate 10 according to an embodiment of the present invention. As shown in FIG. 1, the surface plate 10 has a casing 100, and the casing 100 is a top plate 110 used as a first plate-shaped portion, and a second plate-shaped portion facing the top plate 110. And a frame 170 used as a side surface portion located between the top plate 110 and the bottom plate 140.

  The top plate 110 is formed with a plurality of positioning through holes 112 (hereinafter referred to as through holes 112) used for positioning the mounting object 900 placed on the surface plate 10 with respect to the surface plate 10. Has been. Although the plurality of through holes 112 are arranged, for example, in a lattice pattern on the entire surface of the top plate 110, only some of the through holes 112 are shown in FIG. Not. A screw thread or a thread valley is formed on the side surface of each through hole 112, and the mounting object 900 can be fixed to the top plate 110 by a screw member (not shown). The mounting object 900 can be positioned with respect to.

  Here, only some of the through holes 112 among the plurality of through holes 112 are used for fixing and positioning of the placement object 900, and the other through holes 112 are used for positioning of the placement object 900. I can't. The through-hole 112 that is not used for positioning the mounting object 900 is in a state in which the space inside the housing 100 and the space outside the housing 100 are continuous. For this reason, the through hole 112 that is not used for positioning of the placement object 900 functions as a through hole for ventilation.

  As the mounting object 900, for example, an exposure machine that forms a circuit pattern of an electronic device used in a computer or a communication device, or a three-dimensional shape measurement that reads a highly accurate shape of an optical element that is used for optical measurement using a blue laser. Examples of the apparatus include precision instruments such as devices and electron microscopes used for gene analysis.

  FIG. 2 shows a frame 170. The top plate 110 (see FIG. 1) is attached to the upper opening 172 of the frame 170, and the bottom plate 140 (see FIG. 1) is attached to the lower opening 174 of the frame 170. Thus, the above-described casing 100 (see FIG. 1) is formed. The frame body 170 is formed with a through hole 176 for ventilation so that the space inside the housing 100 and the space outside the housing 100 are continuous. As shown in FIG. 2, for example, a plurality of ventilation through-holes 176 are formed in two rows in the upper and lower directions.

  FIG. 3 shows the surface plate 10 in a state in which a part of the top plate 110 is broken. As shown in FIG. 3, the surface plate 10 includes a honeycomb structure 200 that is used as a structure disposed in the housing 100. Here, the honeycomb structure generally refers to a regular hexagon, a regular hexagonal column, or a structure in which regular hexagonal cylinders are arranged without gaps, but in the present application, not limited to regular hexagonal cylinders, It shall refer to what arranged cylindrical solid figures, such as a square cylinder and a cylinder, without gaps. Details of the honeycomb structure 200 will be described later.

  The surface plate 10 includes a rib portion 300 that is used as a first reinforcing portion as well as being used as a reinforcing portion. The rib part 300 is arrange | positioned in the housing | casing 100, and is arrange | positioned so that it may extend from the one side 100a side of the housing | casing 100 to the other side 100b side of the housing | casing 100 facing the one side 100a. The rib part 300 preferably connects the one end part 300a and the other end part 300b to the frame body 170, respectively.

  In the example shown in FIG. 3, the rib portion 300 is disposed so as to extend from the one side 100 a side to the other side 100 b side of the housing 100, but instead, it faces the side 100 c from the side 100 c side of the housing 100. You may arrange | position the rib part 300 so that it may extend toward the edge | side 100d side of a housing | casing. Moreover, you may make it provide both the rib part 300 extended from the one side 100a side to the other side 100b side, and the rib part 300 extended toward the side 100d side from the side 100c side. 3 shows an example in which one rib portion 300 is provided, a plurality of rib portions 300 such as two, three, etc. may be provided. Details of the rib portion 300 will be described later.

  FIG. 4 shows the bottom plate 140. As shown in FIG. 4, the bottom plate 140 includes a first ventilation through hole 142, and a second ventilation through hole 144 having a diameter larger than that of the first ventilation through hole 142. Is formed. The first ventilation through-hole 142 and the second ventilation through-hole 144 both make the space inside the housing 100 and the space outside the housing 100 continuous. Although the first ventilation through-holes 142 are arranged, for example, in a lattice pattern on the entire surface of the bottom plate 140, only a part of the first ventilation through-holes 142 is shown in FIG. All of the first through holes 142 are not shown.

  In this embodiment, not only the first ventilation through hole 142 but also the second ventilation through hole 144 having a diameter larger than that of the first ventilation through hole 142 is formed as described above. . For this reason, compared with the case where only the 1st through-hole 142 for ventilation | gas_flowing is formed, ventilation between the space inside the housing | casing 100 and the space outside the housing | casing 100 becomes good. On the other hand, by forming the second ventilation through hole 144, the strength of the housing 100 may be reduced as compared with the case where only the first ventilation through hole 142 is formed.

  FIG. 5 shows the honeycomb structure 200 in an enlarged manner. As shown in FIG. 5, the honeycomb structure 200 has a structure in which, for example, a wall portion 210 standing in a substantially vertical direction is formed, and a plurality of structure through-holes 220 are formed so that the wall portion 210 divides the space. Yes. In this embodiment, although the cross-sectional shape of the structure through-hole 220 is a hexagon, the cross-sectional shape of the structure through-hole 220 may be a shape other than a hexagon such as a rectangle or a circle.

  6 and 7 show the vicinity of the rib portion 300 in an enlarged manner. As shown in FIGS. 6 and 7, the rib portion 300 is formed with a through hole 310 for ventilation. A plurality of through holes 310 are formed, for example, and are arranged in, for example, two rows in the vertical direction.

  Further, as shown in FIGS. 6 and 7, a through-hole 214 for ventilation is formed in the wall portion 210 of the honeycomb structure 200. When the cross-sectional shape of the structure through-hole 220 is a polygon, at least one through-hole 214 may be formed in a plane portion that forms each side of the polygon in the wall 210. desirable. More specifically, when the cross-sectional shape of the structure through-hole 220 is a hexagon as in this embodiment, at least one through-hole 214 is formed in a plane portion forming each side of the above-described hexagon of the wall 210. It is desirable to form. In addition, it is desirable to form the ventilation through holes 214 so that all of the adjacent structure through holes 220 are continuous with each other by the ventilation through holes 214.

  In FIG. 8, a part of the surface plate 10 is shown enlarged, and the positional relationship between the top plate 110 and the honeycomb structure 200 is described. As shown in FIG. 8, the top plate 110 and the honeycomb structure 200 include a plurality of through-holes 112 formed in the top plate 110 and a plurality of structure through-holes 220 formed in the honeycomb structure 200. The positional relationship is determined so as to be arranged at a position facing either. In this embodiment, two through holes 112 are opposed to one structure through hole 220.

  FIG. 9 is an enlarged view of a part of the surface plate 10 with the top plate 110 removed. As shown in FIG. 9, the surface plate 10 has a column part 400. The column part 400 is used as a reinforcing part and also as a second reinforcing part, and is disposed in the housing 100. Further, the column part 400 has a lower end part used as one end part attached to the bottom plate 140 and an upper end part used as the other end part attached to the top plate 110. Here, when the lower end portion of the column portion 400 is attached to the bottom plate 140 and the top plate 110 is attached to the frame body 170, the upper end portion may contact the top plate 110.

  It is desirable that a plurality of column portions 400 be provided. When a plurality of column portions 400 are provided, the plurality of column portions 400 are desirably arranged so as to surround the second ventilation through hole 144 formed in the bottom plate 140. In the vicinity of the position where the second through-hole 144 of the bottom plate 140 is formed, the strength is weaker than that of the other positions of the bottom plate 140, but a plurality of column portions 400 are arranged so as to surround the second through-hole 144. By doing so, the vicinity of the second through hole 144 of the bottom plate 140 can be reinforced.

  FIG. 9 shows only the column portion 400 arranged so as to surround one of the plurality of second ventilation through holes 144 (see FIG. 4). The column portion 400 is also arranged around the second ventilation through-hole 144 other than the second ventilation through-hole 144 shown in FIG. 9 so as to surround the second ventilation through-hole 144. Has been.

  A blower (not shown) that blows air so as to send air into the housing 100 or exhausts the air inside the housing 100 to the outside of the housing 100 with respect to the surface plate 10 configured as described above. You may wear. The above-described air blower can be mounted on the bottom plate 140, for example, so as to be fitted into the second ventilation through hole 144, for example.

  As described above, the present invention can be applied to a surface plate.

DESCRIPTION OF SYMBOLS 10 ... Surface plate 100 ... Case 110 ... Top plate 112 ... Positioning through-hole 140 ... Bottom plate 142 ... First ventilation through-hole 144 ... Second Through-holes 170 ... frame body 176 ... through-holes for ventilation 200 ... honeycomb structure 210 ... wall portion 214 ... through-holes for ventilation 220 ... through structure Hole 300 ... Rib part 310 ... Through hole for ventilation 400 ... Column part

Claims (7)

A first plate-like portion, a second plate-like portion facing the first plate-like portion, and a side surface portion located between the first plate-like portion and the second plate-like portion. A housing with
A structure disposed in the housing, wherein the structure is formed with a plurality of structure through-holes such that the wall portion divides the space;
A plurality of reinforcing portions disposed in the front housing, having one end attached to the first plate-like portion and the other end attached to the second plate-like portion;
I have a,
A through hole for ventilation is formed in the second plate-shaped portion,
The plurality of reinforcing portions are disposed so as to surround the ventilation through hole, and each of the reinforcing portions is disposed in any of the plurality of structure through holes . A plurality of through holes for ventilation are formed in the second plate-shaped portion,
The plurality of through holes for ventilation include a first through hole for ventilation and a second through hole for ventilation having a diameter larger than that of the first through hole for ventilation. Surface plate.   The surface plate of Claim 1 or 2 with which the through-hole for ventilation | gas_flowing is formed in the said side part.   The surface plate according to any one of claims 1 to 3, wherein a through hole for ventilation is formed in the wall portion. A plurality of positioning through holes used for positioning the object to be placed with respect to the first plate-like portion are formed in the first plate-like portion,
The surface plate according to any one of claims 1 to 4, wherein the plurality of positioning through holes are disposed so as to face any of the plurality of structure through holes. A first plate-like portion, a second plate-like portion facing the first plate-like portion, and a side surface portion located between the first plate-like portion and the second plate-like portion. A housing with
A structure disposed in the housing, wherein the structure is formed with a plurality of structure through-holes such that the wall portion divides the space;
A first reinforcing portion disposed in the housing and extending from one side of the housing to the other side facing the one side;
A plurality of second reinforcing portions disposed in the front housing, having one end attached to the first plate-like portion and the other end attached to the second plate-like portion;
I have a,
A through hole for ventilation is formed in the second plate-shaped portion,
The plurality of second reinforcing portions are arranged so as to surround the ventilation through hole, and each of the plurality of second reinforcement portions is arranged in any of the plurality of structure through holes . The surface plate according to claim 6, wherein a through hole for ventilation is formed in the first reinforcing portion.

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