JP5757174B2 - Sensor device and manufacturing method thereof - Google Patents

Description

  The present invention relates to a sensor device and a manufacturing method thereof, and more particularly to a sensor device in which a detection axis of a sensor element is inclined and a manufacturing method thereof.

  Conventionally, the detection axis of the physical quantity sensor is tilted. The structure in which the detection axis of the physical quantity sensor is inclined is, for example, Japanese Patent Application Laid-Open No. 2008-96420 (Patent Document 1), Japanese Patent No. 3823954 (Patent Document 2) and Japanese Patent Application Laid-Open No. 2007-17225 (Patent Document 3). It is described in.

  In Patent Document 1, after the gyro sensor is mounted on the lead frame, the detection axis of the gyro sensor is inclined according to the bent shape of the lead terminal.

  In Patent Document 2, after mounting a magnetic sensor on a lead frame, the detection axis of the magnetic sensor is tilted by pushing and bending a portion of the lead frame where the magnetic sensor is mounted.

  In Patent Document 3, the detection axis of the physical quantity sensor is inclined by die-bonding a chip to an inclined pedestal.

JP 2008-96420 A Japanese Patent No. 3823954 JP 2007-17225 A

  The sensor device described in Patent Document 1 requires a process of bending a long lead frame in a complicated manner, and it is necessary to add an advanced processing process. As a result, the manufacturing cost increases. In addition, there are concerns that the position accuracy, terminal parallelism, terminal coplanarity, angular accuracy, and the like may be deteriorated by subjecting the lead frame made of metal to complicated bending processing in multiple stages.

  Furthermore, in the sensor device described in Patent Document 1, the amount of resin in the mold tends to increase, and the manufacturing cost including the material cost increases. Further, deformation of the sensor element due to the stress of the mold resin is easily induced, and the sensor characteristics become unstable.

  In the sensor device described in Patent Document 2, when the lead frame is deformed, the wire is also deformed, which may affect the sensor characteristics due to deterioration of bonding reliability, deformation contact, change in wire spacing, and the like. Concerned. Further, since the lead frame made of metal is deformed, the amount of deformation is not stable, and the accuracy of the tilt angle is low.

  Furthermore, in the sensor device described in Patent Document 2, a manufacturing method based on lead frame mounting and a resin mold package is adopted, but stress generated due to pressure during molding or a difference in linear expansion coefficient from resin. The manufacturing method described in Patent Document 2 cannot be applied to devices that are not suitable for resin mold packaging, such as elements that are easily affected by the above.

  In the sensor device described in Patent Document 3, wire bonding is performed on a chip mounted on an inclined pedestal. In this case, ultrasonic waves and pressing force are not ideally transmitted to the bonding surface, and bonding is performed. It becomes insufficient. Further, the bump shape, neck shape, and loop shape are unstable, and the bonding reliability is deteriorated. Further, when the bonding position is recognized in an inclined state, the position accuracy of the wire bonding is significantly lowered due to the influence of the depth of focus of the image recognition camera. In order to prevent them, special equipment is required, which increases the manufacturing cost.

  The present invention has been made in view of the above problems, and an object of the present invention is to provide high accuracy of the inclination angle of the sensor element, to suppress the manufacturing cost, and to provide a sensor element and other elements. An object of the present invention is to provide a sensor device with high reliability of electrical connection and a method of manufacturing the same.

  A sensor device according to the present invention includes a pedestal having an upper surface and a lower surface, and a sensor element mounted on the upper surface of the pedestal. The upper surface of the pedestal has an inclined portion that is inclined with respect to the lower surface. Mounted on the inclined portion, the sensor element has a fixed surface fixed to the inclined portion of the pedestal, a top surface located on the opposite side of the fixed surface, and an electrode formed on the top surface, At least a part of the top surface is inclined with respect to the fixed surface so that an inclination angle with respect to the lower surface of the pedestal is small, and an electrode is formed on a portion of the top surface that is inclined with respect to the fixed surface.

  In one embodiment, in the sensor device, the upper surface of the pedestal has a horizontal portion parallel to the lower surface. In this embodiment, the sensor device electrically connects the integrated circuit element mounted on the horizontal portion, the external electrode formed on the top surface of the integrated circuit element, the electrode of the sensor element, and the external electrode of the integrated circuit element. And a connecting wire.

The manufacturing method of the sensor device according to the present invention includes a step of preparing an aggregate substrate constituting a plurality of sensor elements, a step of forming an inclined surface inclined with respect to the extending direction of the aggregate substrate on the surface of the aggregate substrate, The step of dividing the collective substrate into individual sensor elements, the step of preparing a pedestal having a lower surface and an upper surface including an inclined portion inclined with respect to the lower surface, and the inclination angle of the inclined surface with respect to the lower surface of the pedestal are And a step of mounting the sensor element on the inclined portion on the upper surface of the pedestal so as to be smaller .

  In one embodiment, the manufacturing method of the sensor device further includes a step of forming a mask pattern on the collective substrate, and the inclined surface is formed by sandblasting the collective substrate using the mask pattern as a mask.

In one embodiment, in the manufacturing method of the sensor device, the inclined surface is formed by processing the collective substrate using a dicing blade.

  According to the present invention, in the sensor device, the accuracy of the inclination angle of the sensor element can be improved, the manufacturing cost can be suppressed, and the reliability of electrical connection between the sensor element and another element can be improved.

It is sectional drawing which shows the sensor apparatus which concerns on one embodiment of this invention. It is a figure which shows the sensor element contained in the sensor apparatus shown in FIG. 1, (a) is a top view, (b) is sectional drawing. FIG. 3 is a plan view showing a structure of a vibrator substrate used in the sensor element shown in FIG. 2. It is a figure which shows each process in the method of manufacturing the sensor apparatus shown in FIG.

  Embodiments of the present invention will be described below. Note that the same or corresponding portions are denoted by the same reference numerals, and the description thereof may not be repeated.

  Note that in the embodiments described below, when referring to the number, amount, and the like, the scope of the present invention is not necessarily limited to the number, amount, and the like unless otherwise specified. In the following embodiments, each component is not necessarily essential for the present invention unless otherwise specified.

(Structure of sensor device)
FIG. 1 is a cross-sectional view showing a sensor device according to the present embodiment. As shown in FIG. 1, the sensor device according to the present embodiment includes an angular velocity sensor element 1, an integrated circuit element 2, a wire 3 that electrically connects the angular velocity sensor element 1 and the integrated circuit element 2, and an angular velocity sensor. A pedestal 4 on which the element 1 and the integrated circuit element 2 are mounted, and a die bond material 5 that adheres and fixes the angular velocity sensor element 1 and the integrated circuit element 2 to the pedestal 4 are included. Note that the Z-axis shown in FIG. 1 is the angular velocity detection axis of the angular velocity sensor element 1.

  FIG. 2 is a diagram showing an angular velocity sensor element 1 included in the sensor device shown in FIG. As shown in FIG. 2, the angular velocity sensor element 1 includes a rectangular vibrator substrate 10 and a pair of protective substrates 20 that are also rectangular, and the pair of protective substrates 20 are provided on both main surfaces of the vibrator substrate 10. By being bonded together, they are configured integrally. Of the pair of protective substrates 20, the protective substrate 20 on the top surface side of the angular velocity sensor element 1 has an inclined surface 20A formed so as to cut out one side of the top surface. A plurality of electrodes 30 are formed on the inclined surface 20A.

  The vibrator substrate 10 is made of, for example, a low-resistance silicon material that forms a single crystal or a polycrystal. The protective substrate 20 is made of, for example, a high resistance silicon material or glass material. In the present embodiment, the protective substrate 20 is made of a glass material.

  The vibrator substrate 10 and the protective substrate 20 are bonded to each other by a bonding method such as anodic bonding. Here, a recess (not shown) is formed on the protective substrate 20 on the joint surface with the vibrator substrate 10. A cavity (not shown) for securing a vibration space of the vibrator substrate 10 is formed inside the angular velocity sensor element 1 by arranging the recess so as to seal the movable part of the vibrator substrate 10. . Further, the inside of the cavity is kept in a vacuum state or a low pressure state in order to reduce vibration damping.

  Referring to FIG. 1 again, in the sensor device according to the present embodiment, a plurality of electrodes 30 formed on inclined surface 20A of angular velocity sensor element 1 and formed on the top surface of integrated circuit element 2 as external electrodes. The angular velocity sensor element 1 and the integrated circuit element 2 are electrically connected by connecting the formed pad 2A with the wire 3.

  The base 4 is made of a resin material, and has an inclined surface 4A and a horizontal surface 4B. The angular velocity sensor element 1 is mounted on the inclined surface 4A, and the integrated circuit element 2 is mounted on the horizontal plane 4B.

  The top surface of the angular velocity sensor element 1 is parallel to the inclined surface 4A of the pedestal 4, but the inclined surface 20A is inclined with respect to the inclined surface 4A. The inclination angle of the inclined surface 4A with respect to the horizontal plane 4B in the pedestal 4 and the inclination angle of the inclined surface 20A with respect to the point surface in the angular velocity sensor element 1 are substantially the same. Therefore, the horizontal surface 4B of the base 4 and the inclined surface 20A of the angular velocity sensor element 1 are substantially parallel. As a result, the electrode 30 of the angular velocity sensor element 1 and the pad 2A of the integrated circuit element 2 are parallel to each other.

(Structure of vibrator substrate 10)
Next, the structure of the vibrator substrate 10 will be described with reference to FIG.

  As shown in FIG. 3, the vibrator substrate 10 is formed with first to fourth mass portions 71 to 74, a driving beam 80, and fixing portions 181 and 182 by performing fine processing such as etching. ing. Also, first and second monitor electrodes 91 and 92, first to fourth drive electrodes 101 to 104, first to fourth detection electrodes 161 to 164, and the like are formed.

  Here, in FIG. 3, the longitudinal direction of the vibrator substrate 10 is defined as the Y-axis direction, the transverse direction perpendicular thereto is defined as the X-axis direction, and the direction perpendicular to the paper surface perpendicular to both axes is defined as the Z-axis direction. The first to fourth mass parts 71 to 74 are supported in series along the Y-axis direction by the drive beam 80, whereby the first to fourth mass parts 71 to 74 are arranged in the X-axis direction. It is possible to vibrate along. That is, the first to fourth mass parts 71 to 74 are movable parts, and the first and second monitor electrodes 91 and 92 and the first to fourth drive electrodes 101 to 104 are fixed parts. Yes.

  The first mass portion 71 includes a comb-like movable side electrode that protrudes left and right so as to face the first monitor electrode 91 and the comb-like portions of the first and second drive electrodes 101 and 102. 111a, 111b, and 111c are provided.

  The second mass unit 72 includes a first detection frame 141 having a shape in which a rectangular first drive frame 121 supported by the drive beam 80 and two rectangles supported by the upper and lower first detection beams 131 are connected to each other. And have. On the outside of the first drive frame 121, comb-shaped movable electrodes 151a and 151b that are close to the first mass portion 71 and face the comb-shaped portions of the first and second drive electrodes 101 and 102 described above. Is formed. In addition, comb-shaped movable side electrodes 171 are formed on the inner sides of the two quadrangular portions of the first detection frame 141 so as to face the comb-shaped first and second detection electrodes 161 and 162, respectively. Yes. As a result, the first detection frame 141 can be vibrated along the Y-axis direction by the first detection beam 131 together with the movable electrode 171.

  The fourth mass portion 74 includes a comb-like movable side electrode that protrudes left and right so as to face the comb-like portions of the second monitor electrode 92 and the third and fourth drive electrodes 103 and 104. 112a, 112b, and 112c are provided.

  The third mass portion 73 includes a rectangular second drive frame 122 supported by the drive beam 80 and a second detection frame 142 having a shape in which two squares supported by the upper and lower second detection beams 132 are connected to each other inside the second detection frame 142. And have. On the outside of the second drive frame 122, comb-shaped movable electrodes 152a and 152b that are close to the fourth mass portion 74 and face the comb-shaped portions of the third and fourth drive electrodes 103 and 104 described above. Is formed. In addition, comb-shaped movable side electrodes 172 are formed inside the two quadrangular portions of the second detection frame 142 so as to face the comb-shaped third and fourth detection electrodes 163 and 164, respectively. Yes. As a result, the second detection frame 142 can be vibrated along the Y-axis direction by the second detection beam 132 together with the movable electrode 172.

  The Z axis perpendicular to the plane of the transducer substrate 10 is the angular velocity detection axis. The angular velocity around the detection axis (Z axis) perpendicular to the transducer substrate 10 can be detected by the displacement of the transducer substrate 10 due to the vibration in the Y-axis direction. That is, the angular velocity sensor element 1 outputs an output signal (capacity change) according to the rotational angular velocity with the Z-axis direction shown in FIG.

(Manufacturing method of sensor device)
Next, a manufacturing method of the sensor device according to the present embodiment will be described with reference to FIG.

  First, as shown in FIG. 4A, two glass substrates 20B in which concave portions of a plurality of protective substrates 20 are formed on both surfaces of a silicon wafer 10A on which a plurality of transducer substrates 10 are formed are respectively provided. A laminated substrate is prepared by bonding. The laminated substrate is an assembly that is later separated into a plurality of angular velocity sensor elements 1. Then, a dry film resist is attached on one glass substrate 20B of the laminated substrate, and the dry film resist is exposed and developed to form a sandblast mask 20C.

  Next, as shown in FIG. 4 (b1), the sandblast nozzle is tilted or the wafer on which the mask 20C is formed is tilted and fixed (in short, the work surface is inclined with respect to the nozzle injection direction). And cross-cut to) and perform sandblasting. At that time, the material of the sand, the particle size, the nozzle-substrate distance, the processing pressure, the scanning speed, the discharge amount, etc. are optimized so as to optimize the state of the surface to be processed and the chipping state.

  By the sandblasting, the inclined surface 20A is formed on the glass substrate 20B. As a method of forming the inclined surface 20A, a method of cutting with a dicing blade 20D as shown in FIG. 4 (b2) may be used instead of the method shown in FIG. 4 (b1).

  Next, an electrode film is formed on the surface of the processed laminated substrate using vacuum deposition, sputtering film formation, or the like. After the formation of the electrode film, a desired pattern is protected with a resist or the like, and then patterned by etching to form the electrode 30 shown in FIG.

  As a method for forming the electrode 30, instead of the above-described method, a method may be used in which a resist is first patterned, an electrode film is formed thereon, and patterning is performed by lift-off. A patterning method may be used, or a method such as printing may be used.

  After the electrode 30 is formed, the plurality of angular velocity sensor elements 1 are separated into pieces by dicing the laminated substrate.

  Next, as shown in FIG. 4D, a pedestal 4 having an inclined upper surface is prepared. As the pedestal 4, the pedestal 4 having the inclined surface 4 </ b> A having an accurate inclination angle can be produced at low cost by using a resin mold and a resin mold.

  The angular velocity sensor element 1 is die-bonded on the inclined surface 4A of the base 4. On the horizontal plane 4B, an integrated circuit element 2 (ASIC) for driving the angular velocity sensor element 1 and performing signal processing is die-bonded. Here, since the inclination angle of the inclined surface 20A of the glass substrate 20 with respect to the top surface of the angular velocity sensor element 1 is formed at substantially the same angle as the inclination angle of the inclined surface 4A with respect to the horizontal surface 4B of the base 4, the inclined surface 20A is It is substantially parallel to the horizontal plane 4B.

  Next, as shown in FIG. 4 (e), the electrode 30 formed on the inclined surface 20A substantially parallel to the horizontal plane 4B and the electrode of the integrated circuit element 2 are electrically connected by the wire 3. To do.

  Generally speaking, if both electrode surfaces connected by wire bonding cross obliquely, the position accuracy of wire bonding tends to be lowered due to the influence of the depth of focus of the image recognition camera. Since the crossing angle at which this influence starts to occur is about ± 10 degrees, the inclined surface 20A does not necessarily need to be substantially parallel to the horizontal plane 4B, and may cross within a range of about ± 10 degrees. For example, when the inclination angle of the inclined surface 20A with respect to the lower surface of the angular velocity sensor element 1 is about 20 degrees, the inclination angle of the inclined surface 4A with respect to the horizontal plane 4B corresponds to the pedestal 4 in the range of about 10 degrees to about 30 degrees. Can do.

  Next, as shown in FIG. 4F, the pedestal 4 is mounted on the printed board 6, and the pedestal 4 is sealed with a metallic cap 7. Thereby, an inexpensive package is realizable.

(Function and effect)
According to the sensor device according to the present embodiment, the detection axis of the angular velocity sensor element 1 can be tilted regardless of the bending shape of the lead frame, compared with the sensor device described in Patent Document 1 above. Is easy.

  Further, by using a resin base as the pedestal 4, an inexpensive pedestal 4 having a highly accurate inclination angle can be obtained with good reproducibility. Then, the inclined mounting of the angular velocity sensor element 1 can be realized on the inexpensive base 4. Therefore, it is not necessary to fix the angular velocity sensor element 1 with a resin mold, and deformation of the angular velocity sensor element 1 due to resin stress can be suppressed.

  Further, since the wire 3 is not deformed after the wire 3 is provided, it is possible to ensure the bonding reliability and to suppress the influence on the characteristics due to the contact of the wire 3 and the change in the interval.

  Further, since the plurality of electrodes 30 formed on the inclined surface 20A of the angular velocity sensor element 1 are substantially horizontal like the pad 2A formed on the top surface of the integrated circuit element 2, the angular velocity sensor element 1 is mounted in an inclined manner. Even in this case, the wire bonding can be performed in a substantially horizontal state as in the case of normal wire bonding. Therefore, it is possible to suppress deterioration of the bonding reliability.

  Furthermore, since the angular velocity sensor element 1 is simply tilt-mounted by simply die-bonding to the inclined surface 4A of the pedestal 4, no special equipment is required for tilt mounting, and the same production line as the horizontal mounting model can be used. As a result, the cost is reduced.

  As described above, according to the sensor device of the present embodiment, the accuracy of the inclination angle of the angular velocity sensor element 1 is improved, the manufacturing cost is suppressed, and the electrical connection between the angular velocity sensor element 1 and the integrated circuit element 2 is achieved. Reliability can be improved.

(Summary)
The above contents are summarized as follows. That is, the sensor device according to the present embodiment includes a pedestal 4 and an angular velocity sensor element 1 mounted on the upper surface of the pedestal 4. The upper surface of the pedestal 4 has an inclined surface 4A that is inclined with respect to the lower surface. The angular velocity sensor element 1 is mounted on the inclined surface 4A and has an electrode 30 formed on the top surface thereof. The inclined surface 20A on the top surface of the angular velocity sensor element 1 is inclined so that the inclination angle with respect to the lower surface of the pedestal 4 is small, and the electrode 30 is formed on the inclined surface 20A. Further, the upper surface of the base 4 has a horizontal surface 4B in addition to the inclined surface 4A. The integrated circuit element 2 is mounted on the horizontal plane 4B. The electrode 30 of the angular velocity sensor element 1 and the pad 2 A of the integrated circuit element 2 are electrically connected by a wire 3.

  The manufacturing method of the sensor device according to the present embodiment includes a step of preparing a collective substrate constituting a plurality of angular velocity sensor elements 1 (FIG. 4A), and an inclined surface that is inclined with respect to the extending direction of the collective substrate. A step of forming 20A on the surface of the collective substrate (FIG. 4 (b1), FIG. 4 (b2)), a step of dividing the collective substrate to separate the angular velocity sensor elements 1 (FIG. 4 (c)), A step of mounting the angular velocity sensor element 1 on the inclined surface 4A on the upper surface of the pedestal 4 (FIGS. 4D and 4E).

  In the present embodiment, the angular velocity sensor element 1 has been described as an example of the “sensor element”. However, the sensor element (sensor chip) of the present invention is not limited to the angular velocity sensor element 1, and for example, an acceleration sensor element or the like. The physical quantity sensor element having the same problem may be used.

  Although the embodiments of the present invention have been described above, the embodiments disclosed this time should be considered as illustrative in all points and not restrictive. The scope of the present invention is defined by the terms of the claims, and is intended to include any modifications within the scope and meaning equivalent to the terms of the claims.

  DESCRIPTION OF SYMBOLS 1 Angular velocity sensor element, 2 Integrated circuit element, 2A pad, 3 wire, 4 base, 4A inclined surface, 4B horizontal surface, 5 Die bond material, 6 Printed circuit board, 7 Cap, 10 Vibrator substrate, 20 Protection substrate, 20A Inclined surface, 30 electrodes, 71, 72, 73, 74 parts by mass, 80 drive beams, 91, 92 monitor electrodes, 101, 102, 103, 104 drive electrodes, 111a, 111b, 111c, 112a, 112b, 112c movable electrodes, 121, 122 drive frame, 131, 132 detection beam, 141, 142 detection frame, 151a, 151b, 152a, 152b, 171, 172 movable side electrode, 161, 162, 163, 164 detection electrode, 181, 182 fixed part.

Claims (5)

A pedestal having an upper surface and a lower surface;
A sensor element mounted on the upper surface of the pedestal,
The upper surface of the pedestal has an inclined portion inclined with respect to the lower surface, and the sensor element is mounted on the inclined portion,
The sensor element has a fixed surface fixed to the inclined portion of the pedestal, a top surface located on the opposite side of the fixed surface, and an electrode formed on the top surface,
At least a part of the top surface is inclined with respect to the fixed surface so that an inclination angle with respect to the lower surface of the pedestal is small,
The sensor device, wherein the electrode is formed on a portion of the top surface that is inclined with respect to the fixed surface. The upper surface of the pedestal has a horizontal portion parallel to the lower surface,
An integrated circuit element mounted on the horizontal portion;
An external electrode formed on the top surface of the integrated circuit element;
The sensor device according to claim 1, further comprising a wire that electrically connects the electrode of the sensor element and the external electrode of the integrated circuit element. Preparing a collective substrate constituting a plurality of sensor elements;
Forming an inclined surface inclined with respect to the extending direction of the aggregate substrate on the surface of the aggregate substrate;
Dividing the collective substrate to separate the sensor elements;
Providing a pedestal having a lower surface and an upper surface including an inclined portion inclined with respect to the lower surface ;
Mounting the sensor element on the inclined portion of the upper surface of the pedestal so that an inclination angle of the inclined surface with respect to the lower surface of the pedestal is reduced . Further comprising forming a mask pattern on the aggregate substrate;
The method of manufacturing a sensor device according to claim 3, wherein the inclined surface is formed by sandblasting the collective substrate using the mask pattern as a mask. The method for manufacturing a sensor device according to claim 3, wherein the inclined surface is formed by processing the collective substrate using a dicing blade.

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