JP5608975B2 - Filter and pressure regulating valve incorporating the same - Google Patents

Description

  The present invention relates to a filter used for removing foreign matter from a fluid and a pressure regulating valve incorporating the filter, which is provided in a fluid flow path.

Conventionally, as this type of filter (filter unit), a porous and circular sheet-like filter element (filter element) and a pair of housing pieces supported at the peripheral edge so as to sandwich the filter element are provided. The thing is known (refer patent document 1). This filter is formed as an integral filter by injection-molding a sealing member, which is a thermoplastic material, in a substantially outer periphery of the pair of housing part pieces in a state where the pair of housing part pieces are combined with each other. In addition, this filter is comprised so that a fluid may pass through the inside of a housing part piece with the inflow port formed in one housing part piece, and the outflow port formed in the other housing part piece.
JP 2001-137626 A

  However, in such a filter, since a pair of housing parts are joined by injection molding of a thermoplastic material with a filter element interposed, the molding of the filter is complicated, and a mold used for the injection molding is also required. There was a problem that it became a complicated shape. Furthermore, since it is a structure which consists of a filter element and a pair of housing part piece, there existed a problem that there were many components and it became a complicated structure. Furthermore, when this filter forming method is applied to a filter provided in a fluid flow path, there is a problem that foreign matters such as burrs accompanying molding are mixed.

  An object of the present invention is to provide a filter that can be easily formed with a simple structure and that does not generate foreign matter from the filter itself, and a pressure regulating valve incorporating the filter.

The filter of the present invention is interposed in a functional liquid flow path connecting an ink jet type functional liquid droplet ejection head and a functional liquid tank that supplies functional liquid to the functional liquid droplet ejection head, and has a valve body and a valve seat. A filter that is detachably incorporated into the inflow port of the pressure regulating valve and that removes foreign substances from the functional fluid, and is made of a metal filter element having a number of filter holes and a metal filter element that holds the peripheral edge of the filter element And a holding frame, and the filter element is ultrasonically welded to the surface of the holding frame.

  According to this structure, since it is a structure which consists of a filter element and one holding frame, the number of parts is small and a filter can be made into a simple structure. Further, since the filter element is formed by ultrasonically welding the filter element to a metal holding frame, the filter can be easily formed. Furthermore, burrs or the like are not generated from the filter itself, and the generation of foreign matters can be suppressed.

  In this case, both the filter element and the holding frame are preferably made of stainless steel.

  According to this configuration, corrosion of the filter element can be suppressed by configuring the filter element and the holding frame from stainless steel having high solvent resistance. As a result, since the generation | occurrence | production of the foreign material by corrosion of a filter element can be prevented, generation | occurrence | production of the foreign material from filter itself can further be suppressed.

The pressure regulating valve of the present invention is interposed in a functional liquid flow path that connects an ink jet type functional liquid droplet ejection head and a functional liquid tank that supplies functional liquid to the functional liquid droplet ejection head, and a valve body and a valve. A pressure regulating valve having a seat, wherein the filter is detachably incorporated in an inflow port.

  According to this configuration, it is possible to prevent foreign matter from entering the pressure regulating valve by using a filter that has a simple configuration and does not generate foreign matter at the inflow port of the pressure regulating valve. As a result, the pressure adjustment can be stabilized without causing a leak failure. In addition, the pressure regulating valve can be configured simply.

  Hereinafter, with reference to the accompanying drawings, a droplet discharge device equipped with a pressure regulating valve having a filter of the present invention will be described. This droplet discharge device is incorporated in a flat panel display production line, and uses, for example, a function droplet discharge head into which a special ink or a functional liquid that is a light-emitting resin liquid is introduced, and the color of a liquid crystal display device A light emitting element or the like to be used for each pixel of a filter or an organic EL device is formed.

  As shown in FIG. 1, a droplet discharge device 1 is disposed on an X-axis support base 2 supported by a stone surface plate, extends in the X-axis direction, which is the main scanning direction, and moves a workpiece W to X On the X-axis table 3 to be moved in the axial direction (main scanning direction) and a pair of (two) Y-axis support bases 5 spanned across the X-axis table 3 via a plurality of columns 4 A Y-axis table 6 which is disposed and extends in the Y-axis direction as the sub-scanning direction, and ten carriage units 8 on which a plurality of inkjet-type functional liquid droplet ejection heads 7 (see FIG. 2) are mounted; The ten carriage units 8 are suspended from the Y-axis table 6 so as to be movable. Further, the droplet discharge device 1 includes a chamber 11 that accommodates these devices in an atmosphere in which temperature and humidity are controlled, and the chamber 11 passes through the chamber 11 and passes from the outside of the chamber 11 to the internal functional droplet discharge head 7. And a functional liquid supply unit 12 having three sets of functional liquid supply devices 21 for supplying the functional liquid. The functional liquid droplet discharge head 7 is driven to discharge in synchronization with the driving of the X-axis table 3 and the Y-axis table 6, thereby discharging the R, G, B three-color functional liquid droplets supplied from the functional liquid supply unit 12. A predetermined drawing pattern is drawn on the workpiece W.

  Next, the functional liquid supply unit 12 will be described with reference to FIGS. 1 and 2. The functional liquid supply unit 12 includes three sets of functional liquid supply devices 21 that supply functional liquids of R, G, and B colors. The three sets of functional liquid supply devices 21 are connected to the functional liquid droplet ejection heads 7 corresponding to the R, G, and B colors, respectively. Liquid is supplied.

  As shown in FIG. 2, the functional liquid supply device 21 for each color includes 10 tank units 22 each having two main tanks 36 and 36 that constitute a functional liquid supply source, and 10 corresponding to each carriage unit 8. Sub tanks (functional liquid tanks) 23, upstream functional liquid flow paths 24 connecting the tank units 22 and the ten sub tanks 23, and 10 sets of downstream connecting each sub tank 23 and each functional liquid droplet ejection head 7. Side functional liquid channel 25. Each tank unit 22 is accommodated in a tank cabinet 26 provided on a part of the side wall of the chamber 11, and each sub tank 23 is accommodated in a sub tank case 27 mounted on each corresponding carriage unit 8. (See FIG. 1).

  The functional liquid in each of the main tanks 36 and 36 is pressurized by compressed nitrogen gas from the nitrogen gas supply equipment 31 connected to the main tanks 36, and is selectively supplied to the ten sub tanks 23 via the upstream functional liquid flow path 24. Supplied. At that time, the on / off valves are controlled to open / close by the compressed air of the compressed air supply equipment 32 connected to the various on / off valves. At the same time, each sub tank 23 is opened to the atmosphere via a gas exhaust facility 33 connected thereto, and receives a necessary amount of functional liquid. The functional liquid in each sub tank 23 is supplied to the functional liquid droplet ejection head 7 via the downstream functional liquid flow path 25 by driving the functional liquid droplet ejection head 7 connected thereto.

  The tank unit 22 includes a pair of main tanks 36 and 36 serving as a functional liquid supply source, a pair of weight measuring devices 37 and 37 for measuring the weight of the pair of main tanks 36 and 36, and a pair of main tanks 36 and 36, respectively. 36 and a switching mechanism 38 connected to the upstream-side functional liquid channel 24. Each main tank 36 is connected to a nitrogen gas supply facility 31 so that pressurization can be controlled when the functional liquid is pumped.

  The upstream-side functional liquid channel 24 is divided into 10 directions from the tank-side main channel 41 via the branching portion 42 and the tank-side main channel 41 connected to the tank unit 22 from the upstream side, and the downstream side 10 branch flow paths 43 connected to the sub tank 23. The functional liquid supplied from the tank unit 22 is divided into 10 directions by the branching part 42 and supplied to each sub tank 23.

  In addition, a bubble removing unit 51, a first on-off valve 52, an air vent unit 53, and a second on-off valve 54 are interposed in the tank side main flow path 41 from the upstream side. Further, each branch channel 43 is provided with a third on-off valve 55 located in the vicinity of each sub tank 23.

  Each downstream functional liquid channel 25 includes, from the upstream side, a head-side main channel 61 whose upstream side is connected to each sub-tank 23, a four-branch channel 62 whose upstream side is connected to the head-side main channel 61, and an upstream side And a plurality of head side branch channels 63 connected to the four branch channels 62. Thereby, the functional liquid branches from each sub tank 23 in four directions and is connected to the respective functional liquid droplet ejection heads 7. That is, the functional liquid is supplied to 10 × 4 functional liquid droplet ejection heads 7 by 10 branches of the upstream functional liquid flow path 24 and 4 branches of the downstream functional liquid flow path 25. In addition, since the functional liquid supply unit 12 includes three sets of functional liquid supply devices 21 of R, G, and B, the functional liquid is supplied to 10 × 12 functional liquid droplet ejection heads 7. Further, a fourth on-off valve 66 and a pressure adjustment valve 67 for adjusting the pressure to the functional liquid droplet ejection head 7 are interposed in the head side main flow path 61.

  The sub tank 23 stores the functional liquid supplied to each of the four functional liquid droplet ejection heads 7. The sub tank 23 has a liquid level detection mechanism for detecting the liquid level of the stored functional liquid, and supplies the liquid while maintaining the liquid level of the functional liquid at a constant height. When the liquid level of the functional liquid drops to the lower limit liquid level by the ejection drive of the functional liquid droplet ejection head 7 (liquid reduction state), the third on-off valve 55 is opened to supply the functional liquid from the main tank 36, and the main tank When the liquid level of the functional liquid rises to the upper limit liquid level due to the supply from 36, the third on-off valve 55 is closed and the supply from the main tank 36 is stopped.

  Next, the area around the pressure adjustment valve 67 will be described with reference to FIGS. As shown in FIG. 3, the pressure regulating valve 67 is interposed in the head-side main flow path 61 and constitutes a joint on the inflow side, an inflow connector 71 (union joint) connected to the inflow port 91, and an outflow side. And an outflow connector 72 (union joint) connected to the outflow port 110.

  As shown in FIGS. 3 and 4, the pressure adjustment valve 67 includes a main body casing 81, a lid casing 83 that forms a primary chamber 82 together with the main body casing 81, and a secondary chamber 84 together with the main body casing 81. A valve casing is formed by three members, which are formed and a ring plate 86 for fixing the diaphragm 85 to the main body casing 81, and all are made of a corrosion-resistant material such as stainless steel. The main body casing 81 is formed with a communication channel 87 communicating with the primary chamber 82 and the secondary chamber 84 at the center position.

  The lid casing 83 and the ring plate 86 are assembled to the main body casing 81 by overlapping the ring plate 86 and the lid casing 83 from the front and rear, positioning each with a plurality of stepped parallel pins (not shown), and then screwing. Both have a circular or polygonal (octagonal) appearance that is concentric with an axis passing through the center of the circular diaphragm 85. The lid casing 83 and the main body casing 81 are butt-joined to each other through a packing 89, and the main body casing 81 and the ring plate 86 are air-tight to each other by sandwiching the edge of the diaphragm 85 and the packing 89. Butt-joined.

  The primary chamber 82 formed by the main body casing 81 and the lid casing 83 is formed in a substantially cylindrical shape concentric with the diaphragm 85, and an open end thereof is closed by the lid casing 83. In addition, an inflow port 91 extending obliquely in the radial direction from the primary chamber 82 is formed on the left side of the upper boss portion formed in the upper portion of the back surface of the main body casing 81 on the primary chamber 82 side. The inflow connector 71 is connected to the inflow port 91.

  As shown in FIG. 4, the inflow port 91 includes an inflow port 92 that opens to the outer peripheral surface of the main body casing 81, a filter storage portion 94 that stores the filter 93, and inner peripheral surfaces of the filter storage portion 94 and the primary chamber 82. The inflow path 95 is formed eccentrically toward the primary chamber 82 with respect to the inlet 92. The inflow connector 71 is screwed into the inflow port 92 (tapered screw). Although details will be described later, a filter 93 is accommodated in the filter accommodating portion 94, and a holding spring 96 of the filter 93 is accommodated between the filter 93 and the inflow connector 71 screwed together.

  The flow path formed inside the inflow connector 71 is widened at the downstream end so that no step portion is generated in the flow path and the flow rate of the functional liquid is not greatly changed. Similarly, the upstream end of the inflow path 95 has a tapered shape.

  As shown in FIGS. 4 and 5, the secondary chamber 84 is formed in a truncated cone shape as a whole with the diaphragm 85 as a bottom surface by the diaphragm 85 and the inner wall 101 formed in the main body casing 81. The diaphragm 85 is arranged in a vertical posture and constitutes one surface of the secondary chamber 84. Further, the inner wall 101 constitutes each surface excluding the surface (one surface) of the diaphragm 85 of the secondary chamber 84.

  In addition, a secondary chamber side opening 102 that is concentric with the diaphragm 85 is opened on an end wall 101 a that is a truncated cone-shaped top surface of the inner wall 101, and a truncated cone-shaped tapered surface of the inner wall 101 An outflow opening 104 of an outflow channel 103, which will be described later, is formed at the upper and lower intermediate portions on the lower slope of the peripheral wall 101b. In this case, the secondary chamber side opening 102 also serves as a spring chamber that houses a pressure receiving plate urging spring 105 described later, and is formed to have a larger diameter than the main channel 106 of the communication channel 87.

  As shown in FIG. 5, the outflow port 110 is formed in the inclined boss portion 111 positioned at the lower portion of the main body casing 81, and the outflow port 112 opened at the lower portion of the inclined boss portion 111 and the outflow opening of the secondary chamber 84. The unit 104 includes an outflow channel 103 that communicates with the unit 104. The outflow channel 103 extends obliquely from the peripheral wall 101 b of the inner wall 101 and communicates with the downward outlet 112. The outflow connector 72 is screwed into the outflow port 112 from the axial direction of the outflow channel 103. The flow path formed inside the outflow connector 72 is formed so as to expand at the upstream end, so that a step portion does not occur in the flow path and a large change in the flow rate of the functional liquid does not occur. The functional liquid flowing out from the secondary chamber 84 flows obliquely from the outflow opening 104 according to the gradient of the outflow channel 103 and flows out to the functional liquid droplet ejection head 7 side.

  As shown in FIGS. 4 and 5, the main body casing 81 is formed with a communication channel 87 that communicates the primary chamber 82 and the secondary chamber 84. The communication flow path 87 includes a main flow path 106 and a secondary chamber side opening 102 connected to the main flow path 106. The primary chamber 82, the secondary chamber 84, and the communication flow path 87 all have a circular cross section concentric with the diaphragm 85. However, the main flow path 106 includes a circular cross-section axial insertion section 115 in which a shaft section 114 of a valve body 113 described later is slidably accommodated, and a cross-shaped cross-section flow path extending in four radial directions from the shaft free insertion section 115. Part 116 (see FIG. 3B).

  The diaphragm 85 includes a diaphragm main body 121 made of a resin film and a resin pressure receiving plate 122 attached to the inside of the diaphragm main body 121. The pressure receiving plate 122 is formed in a disk shape concentric with the diaphragm main body 121 and has a sufficiently small diameter with respect to the diaphragm main body 121, and a shaft portion 114 of a valve body 113 described later contacts the center thereof. The diaphragm main body 121 is formed by laminating heat-resistant PP (polypropylene), special PP, and PET (polyethylene terephthalate) on which silica is vapor-deposited, and is formed in a circular shape having the same diameter as the front surface of the main body casing 81.

  The valve body 113 includes a disc-shaped valve body main body 124, a shaft portion 114 extending in one direction so as to form a transverse “T” shape from the center of the valve body main body 124, and a base end side of the shaft portion 114. It is comprised with the cyclic | annular O-ring 125 provided (attached) on the (valve body main body 124 side). The valve body main body 124 and the shaft portion 114 are integrally formed of a corrosion resistant material such as stainless steel. The O-ring 125 is formed in an annular shape with, for example, soft silicon rubber. For this reason, when the valve body 113 is closed, the O-ring 125 strongly contacts the opening edge of the communication flow path 87 serving as a valve seat, and the communication flow path 87 is liquid-tightly closed from the primary chamber 82 side.

  The shaft portion 114 is slidably fitted in the communication flow path 87 (the main flow path 106), and abuts against the pressure receiving plate 122 of the diaphragm 85 whose front end (front end) is in the neutral position in the valve-closed state. That is, in the state of plus deformation in which the diaphragm 85 bulges toward the outside, a predetermined gap is generated between the front end of the shaft portion 114 and the pressure receiving plate 122, and the diaphragm 85 is deformed to the minus side from this state. As a result, when the front end of the shaft portion 114 and the pressure receiving plate 122 come into contact with each other in a neutral state, and the diaphragm 85 is further deformed negatively, the pressure receiving plate 122 pushes and opens the valve body main body 124 via the shaft portion 114. It will be. Therefore, of the volume of the secondary chamber 84, the volume of the diaphragm 85 in which the diaphragm 85 becomes neutral from the plus deformation is supplied with the functional liquid without receiving any pressure on the primary chamber 82 side.

  Between the back surface of the valve body 113 and the wall body 126 of the primary chamber 82, a valve body biasing spring 127 that biases the valve body 113 in the secondary chamber 84 side, that is, in the valve closing direction is interposed. . Similarly, a pressure receiving plate urging spring 105 that urges the diaphragm main body 121 toward the outside via the pressure receiving plate 122 is interposed between the pressure receiving plate 122 and the inner wall 101. In this case, the valve body biasing spring 127 complements the head of the sub tank 23 applied to the back surface of the valve body 113, and the valve body 113 is caused by the head of the sub tank 23 and the spring force of the valve body biasing spring 127. It is pressed in the closing direction. On the other hand, the pressure receiving plate urging spring 105 complements the positive deformation of the diaphragm 85, and acts so that the secondary chamber 84 becomes a negative pressure with respect to the atmospheric pressure.

  The pressure regulating valve 67 opens and closes when the diaphragm 85 (and the valve body 113 with which the diaphragm 85 abuts) deforms (advances and retreats) due to the pressure balance between the atmospheric pressure and the secondary chamber 84 connected to the functional liquid droplet ejection head 7. The chamber 84 side is depressurized to a predetermined pressure. At that time, force acts on the valve body urging spring 127 and the pressure receiving plate urging spring 105 in a distributed manner, and the valve body 113 opens and closes very slowly by the O-ring 125 (elastic force) of soft silicone rubber. For this reason, pressure fluctuation (cavitation) due to opening and closing of the valve body 113 is suppressed, and the ejection drive of the functional liquid droplet ejection head 7 is not affected. Of course, the pulsation and the like generated on the sub tank 23 side (primary chamber 82 side) are also edged by the valve body 113 and can be absorbed (damper function).

  Next, the area around the inflow port 91 will be described with reference to FIG. As described above, the inflow port 91 includes the inflow port 92, the filter housing portion 94, and the inflow path 95. The flow path from the sub tank 23 is connected by screwing and connecting the inflow connector 71 which is a union joint to the thread part formed in the inner peripheral surface of the inflow port 92. A filter 93 for removing (filtering) foreign matter mixed in the functional liquid from the upstream side is accommodated in the filter accommodating portion 94, and a presser spring 96 that holds the filter 93 between the filter 93 and the inflow connector 71. Is housed.

  The filter accommodating portion 94 has a counterbore shape formed in the main body casing 81 and is formed in a cylindrical shape so that the cylindrical filter 93 is engaged therewith. That is, the outer peripheral surface of the cylindrical filter 93 is engaged with the inner peripheral surface of the filter housing portion 94, and becomes a step portion with respect to the inflow path 95 so that the peripheral edge portion of one end of the cylindrical filter 93 abuts. A peripheral contact portion 94a is formed. Although details will be described later, the filter 93 is brought into contact with the peripheral contact portion 94a by the pressing of the presser spring 96 and is fixed by pressing.

  The presser spring 96 is configured by a coil spring, one end of which is in contact with the expanded portion 71 a that is expanded toward the main body casing 81 in the flow path formed inside the inflow connector 71, and the other end of the filter 93. Abuts against the end face. When the inflow connector 71 is screw-joined, the filter 93 is pressed against the peripheral contact portion 94a through the presser spring 96 and set.

  As shown in FIG. 7, the filter 93 includes a circular sheet-like filter element 131 and a ring-shaped element holder (holding frame) 132 that holds the filter element 131 at the peripheral edge.

  The filter element 131 is made of a stainless steel metal sheet having a large number of openings (film holes). The filter element 131 has a thickness of about 15 μm. Each opening is formed in a circular shape or a square shape, and is formed so that the diameter of the circumscribed circle is 30 μm or less so that foreign matter of 30 μm or more can be captured.

  The element holder 132 is made of a stainless steel metal ring. The filter element 131 is ultrasonically welded to one end face of the element holder 132, and the other end face is formed with a predetermined flatness. The filter 93 is accommodated in the filter accommodating portion 94 in a state where the other end surface is in contact with the peripheral abutting portion 94a of the filter accommodating portion 94 (see FIG. 6). In addition, because of the problem of liquid tightness, the filter 93 is accommodated with the other end surface formed with a predetermined flatness as the peripheral contact portion 94a side, but the opposite end surface (filter element 131 side) is the peripheral end. The filter 93 may be accommodated on the abutment portion 94a side.

  Here, with reference to FIG. 6, the attachment method and the removal method of the inflow connector 71 and the filter 93 are demonstrated. In attaching the inflow connector 71 and the filter 93, first, the filter 93 is put into the filter housing portion 94, and then the presser spring 96 is put into the filter housing portion 94 (the presser spring 96 is introduced from the filter housing portion 94 into the inlet. 92). Thereafter, the inflow connector 71 is screwed into and connected to the inflow port 92. When the inflow connector 71 is screwed, the presser spring 96 that is in contact with the inflow connector 71 and the filter 93 presses the filter 93 against the peripheral contact portion 94a to fix the filter 93. That is, the inflow connector 71 presses and fixes the filter 93 through the presser spring 96. Thus, since the filter 93 is attached using the tightening of the inflow connector 71, the filter 93 can be removed together by removing the inflow connector 71.

  Next, a method for creating the filter 93 will be described with reference to FIG. As shown in FIG. 8, the filter 93 is produced by creating the filter 93 by ultrasonically welding the filter element 131 to the element holder 132 using an ultrasonic welding apparatus 141. The ultrasonic welding apparatus 141 includes a set stage 142 for setting the filter element 131 and the element holder 132, a welding head 143 disposed immediately above the set filter element 131 and the element holder 132, and the welding head 143 can be moved up and down. And an elevating mechanism 144 to support.

  The set stage 142 sets the filter element 131 in a state where the filter element 131 is superposed on the element holder 132, and the filter element 131 is positioned on the element holder 132.

  The welding head 143 includes a welding horn 145 that contacts the filter element 131 from directly above, and a head main body 146 that ultrasonically vibrates the welding horn 145. The welding horn 145 has a tip formed in a ring shape that follows the welded portion between the filter element 131 and the element holder 132. In addition, although illustration is omitted, it is preferable that the contact end of the tip end portion is a point contact at a plurality of points such as a shape in which minute protrusions are arranged or a sword mountain shape. The elevating mechanism 144 raises and lowers the welding head 143 to bring the welding horn 145 into contact with the filter element 131 and presses the filter element 131 against the element holder 132.

  As shown in FIG. 8, when creating the filter 93, the elevating mechanism 144 is lowered to bring the welding horn 145 into contact with the filter element 131 (see FIG. 8B). Thereafter, the lifting mechanism 144 presses the filter element 131 against the element holder 132 via the welding horn 145 and drives the head body 146 to vibrate the welding horn 145 ultrasonically. At this time, the energy of ultrasonic vibration (welding time, pressure, amplitude) is adjusted to such an extent that no foreign matter is generated. Thereby, the filter element 131 is welded to the element holder 132. Thereby, the filter 93 is created.

  According to the above configuration, since the filter 93 is configured by the filter element 131 and the single element holder 132, the number of parts is small and the filter 93 can be simplified. Further, since the filter element 131 is ultrasonically welded to the metal element holder 132 to form the filter 93, the filter 93 can be easily formed. Further, burrs or the like are not generated from the filter 93 itself, and the generation of foreign matters can be suppressed.

  Further, the filter element 131 and the element holder 132 are made of stainless steel having high solvent resistance, so that corrosion of the filter element 131 can be suppressed. As a result, since the generation | occurrence | production of the foreign material by corrosion of the filter element 131 can be prevented, generation | occurrence | production of the foreign material from filter 93 itself can further be suppressed. Only one of the filter element 131 and the element holder 132 may be made of stainless steel.

  Further, by providing the filter 93 at the inflow port 91 of the pressure regulating valve 67, foreign matter is present at the contact portion (contact portion) between the O-ring 125 that performs the main function of the pressure regulating valve 67 and the opening edge of the communication flow path 87. Can be prevented from biting. As a result, the pressure regulating valve 67 can be stably operated, and as a result, the accuracy of the droplet discharge amount in the functional droplet discharge head 7 can be improved.

It is a perspective view of the droplet discharge device concerning an embodiment. It is a piping system diagram of a functional liquid supply device. It is the rear view (a) and front view (b) of a pressure regulation valve. It is the longitudinal cross-sectional view which cut | disconnected the pressure regulation valve in the axial direction of the inflow port. It is the longitudinal cross-sectional view which cut | disconnected the pressure regulation valve in the axial direction of the outflow port. It is sectional drawing shown about the inflow port. It is sectional drawing of a filter. It is explanatory drawing for demonstrating the production method of a filter.

Explanation of symbols

  7: Functional droplet discharge head, 23: Sub tank, 67: Pressure adjusting valve, 91: Inflow port, 93: Filter, 131: Filter element, 132: Element holder

Claims (3)

An ink jet type functional liquid droplet ejection head and a functional liquid tank that supplies a functional liquid to the functional liquid droplet ejection head are interposed in a functional liquid flow path, and a pressure regulating valve having a valve body and a valve seat A filter that is detachably incorporated in the inflow port and removes foreign substances from the functional liquid ,
A metal filter element having a number of filter holes;
A metal holding frame for holding the peripheral edge of the filter element,
The filter, wherein the filter element is ultrasonically welded to the surface of the holding frame.   The filter according to claim 1, wherein the filter element and the holding frame are both made of stainless steel. A pressure regulating valve that is interposed in a functional liquid flow path connecting an ink jet type functional liquid droplet ejection head and a functional liquid tank that supplies functional liquid to the functional liquid droplet ejection head and that has a valve body and a valve seat; There,
A pressure regulating valve in which the filter according to claim 1 or 2 is detachably incorporated in an inflow port.

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