JP5679547B2 - Sheet sticking device and sticking method - Google Patents

Description

  The present invention relates to a sheet sticking apparatus and a sticking method, and more particularly to a sheet sticking apparatus and a sticking method that can apply tension to an adhesive sheet supplied toward an adherend.

  Conventionally, a sheet sticking apparatus for sticking an adhesive sheet to an adherend such as a semiconductor wafer (hereinafter sometimes simply referred to as “wafer”) has been widely used. As such a sheet sticking apparatus, for example, It is disclosed in Patent Document 1. The sheet sticking device of Patent Document 1 is provided so that it can be stuck by pressing an adhesive sheet supplied toward an adherend with a pressing roller. The adhesive sheet before being supplied to the pressing roller is wound around the tension applying roller. By controlling the rotation of the tension applying roller, the adhesive sheet can be applied with the tension within the set range. It has become.

JP 2007-227553 A

  However, the sheet sticking device of Patent Document 1 has a disadvantage that the sticking tension of the adhesive tape T by the feed roller 15 changes with time. This is because the tension of the adhesive tape T falls within a predetermined range by controlling the rotation of the feed roller 15 with respect to the tension of the recovery bobbin 21 that winds up the separator s and the tension due to the position change of the sticking roller 23. It is configured to fit. However, such initial setting is performed in a factory before shipment of the apparatus, and delicate setting is performed by a new feeding roller 15 before use. That is, even if the tension of the adhesive tape T is set by the new feed roller 15, if the sticking operation is actually repeated at the delivery destination of the sheet sticking device, dust or dirt adheres to the feed roller 15, It was found that the resistance force by the feed roller 15 is greatly reduced as compared with the case of a new article. As a result, it is necessary to frequently replace the tension applying roller or to clean it many times in a short period of time, which causes inconvenience that it is difficult to apply the tension of the adhesive sheet within a predetermined range. .

[Object of the invention]
The objective of this invention is providing the sheet sticking apparatus and sticking method which can maintain easily the tension | tensile_strength of the adhesive sheet supplied to a to-be-adhered body within a predetermined range over a long period of time.

In order to achieve the above object, the present invention provides a sheet sticking apparatus for sticking the original adhesive sheet including an adhesive sheet provided with an adhesive layer on one surface of a base sheet to an adherend,
A supply means for supplying the adhesive sheet toward the adherend, and an attaching means capable of pressing and attaching the adhesive sheet supplied from the supply means from the other surface side of the base sheet,
The supply means includes a tension applying roller capable of applying tension to the adhesive sheet attached to the adherend, and the tension applying roller includes a contact area reducing means for reducing the contact area with the original fabric. The structure is adopted.

Further, the present invention provides a sheet sticking apparatus for sticking the adhesive sheet of an original fabric including an adhesive sheet provided with an adhesive layer on one surface of a base sheet to an adherend,
A supply means for supplying the adhesive sheet toward the adherend, and an attaching means capable of pressing and attaching the adhesive sheet supplied from the supply means from the other surface side of the base sheet,
The supply means includes a tension applying roller capable of applying a tension to the adhesive sheet to be adhered to the adherend, and the tension applying roller is coated on the cylindrical surface with a resin or the like capable of reducing a frictional force. and employs a configuration that reduces the frictional force between the raw than a case not employing the low friction means by employing a low friction means and.

Furthermore, the sticking method of the present invention is a sheet sticking method for sticking the adhesive sheet of an original fabric including an adhesive sheet provided with an adhesive layer on one surface of a base sheet to an adherend.
Supplying the adhesive sheet toward the adherend while applying tension to the adhesive sheet to be adhered to the adherend by means of a tension applying roller having a contact area reducing means for reducing the contact area with the adhesive sheet. When,
And a step of pressing and sticking the supplied adhesive sheet from the other surface side of the base sheet.

Moreover, the sticking method of this invention uses the said sheet | seat sticking apparatus of Claim 1 for the said adhesive sheet of the raw fabric containing the adhesive sheet by which the adhesive bond layer was provided in the one surface of the base material sheet to the to-be-adhered body. In the sheet sticking method to stick,
The Tsutomu Cho application roller Ru reduce the frictional force as compared with a case not employing the low friction means by the frictional force between the adhesive sheet employing a low friction means, the adhesive sheet wherein is stuck to the adherend Supplying the adhesive sheet toward the adherend while applying tension; and
And a step of pressing and sticking the supplied adhesive sheet from the other surface side of the base sheet.

According to the present invention, even if the friction coefficient of the tension applying roller is the same, the resistance force of the entire tension applying roller can be reduced by reducing the contact area with the original fabric by the contact area reducing means. That is, since the resistance force when the tension applying roller is new is small from the beginning, even if dust or dust adheres and the resistance force of the entire tension applying roller decreases, the amount of change is small. Therefore, the amount of change in the tension applied to the adhesive sheet between the initial setting and when the pasting operation is repeated is reduced, and the tension of the adhesive sheet supplied to the adherend is kept within a predetermined range for a long time. Can be maintained. In addition, in the tension applying roller, the surface that comes into contact with the original fabric and to which dust or the like adheres can be reduced, and this also contributes to reducing the amount of change in resistance.
In addition, even if the friction coefficient is reduced in advance by the low friction means, the amount of change is reduced between the resistance when a new article and the resistance when dust or dirt adheres, and the same effect as described above can be obtained. is there. This makes it possible to easily maintain the tension applied to the adhesive sheet within a predetermined range over a long period of time while reducing the work burden of replacing or cleaning the tension applying roller.

The schematic front view of the sheet sticking apparatus which concerns on embodiment. (A) is a schematic perspective view showing an example of the contact area reducing means, (B) is a plan view of (A), (C) is a schematic perspective view showing another example of the contact area reducing means, (D ) Is a front view of (C), (E) is a schematic perspective view showing still another example of the contact area reducing means, and (F) is a developed view of line C1 of (E). The schematic perspective view which shows an example of a low friction means.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
In the present specification and claims, “reducing the contact area” means that the cylindrical surface of the tension applying roller is provided with irregularities and the original surface is compared with a cylindrical surface that is not provided with the irregularities. Means to reduce the contact area.

In FIG. 1, a sheet sticking apparatus 10 is supported via a frame (not shown) above a table T that holds a wafer W as an adherend and a ring frame RF on the upper surface in the drawing.
The sheet sticking apparatus 10 includes a supply unit 12 that supplies an adhesive sheet S provided with an adhesive layer on one surface of a base sheet toward the wafer W and the ring frame RF on the table T; The adhesive sheet S is provided with an attaching means 13 capable of pressing the supplied adhesive sheet S against the wafer W and the ring frame RF and attaching them. A protective sheet PS is affixed to the circuit surface (the lower surface in FIG. 1) of the wafer W.

  The table T is provided on the upper surface of the table T so that the wafer W can be sucked and held, and the ring frame RF can be positioned around the table T. The table T is provided so as to be movable in the left-right direction in FIG. 1 via a slider 17 of a linear motion motor 16 as a drive device.

  The supply means 12 includes a support shaft 20 that supports a roll-shaped original fabric R in which an adhesive sheet S is temporarily attached to a strip-shaped release sheet RL at a predetermined interval, and an original fabric R that is fed from the support shaft 20. A feed roller 21 as a tension applying roller wound around the release sheet RL, a first pinch roller 22 as a tension applying roller sandwiching the original fabric R between the feed roller 21, and a first pinch roller 22. A peel plate 25 that folds back the release sheet RL and peels the adhesive sheet S from the release sheet RL, and is wrapped around the release sheet RL after passing through the peel plate 25, and also via a motor M1 as a driving device. A release roller RL is sandwiched between the drive roller 26 that is rotatably provided and the drive roller 26, and the second pinch roller 27 passes through these. And a winding shaft 29 for winding at a predetermined torque by a driving source (not shown) the release sheet RL. The feed roller 21 is rotatably provided via a motor M2 serving as a drive device, and the feed roller 21 is set to have a lower rotation speed than the rotation speed of the drive roller 26 or the conveying speed of the table T, so that the feed roller 21 is rotated. Tension can be applied to the adhesive sheet S by the attaching means 13 via the first pinch roller 22 and the first pinch roller 22. Here, the feed roller 21 and the first pinch roller 22 are each provided with a contact area reducing means 32 on the outer peripheral surface.

  The contact area reducing means 32 is configured by providing irregularities on the outer peripheral surface thereof, and is formed so as to reduce the contact area to the adhesive sheet S and the release sheet RL, compared to a cylindrical surface that is not particularly provided with irregularities. Is done. As a result, even if the friction coefficient is the same, the contact area with the original fabric R is reduced, so that the resistance force applied to the original fabric R by the feed roller 21 or the first pinch roller 22 as a whole is also reduced. Various shapes can be employed for the contact area reducing means 32. Specifically, the configurations shown in FIGS. 2A to 2F can be exemplified. 2 (A) and 2 (B) is formed by a plurality of grooves 33. The grooves 33 are formed so as to extend in the circumferential direction of the rollers 21, 22, respectively. The rollers 21 and 22 are provided at regular intervals in the axial direction. Accordingly, the outer peripheral surfaces of the rollers 21 and 22 in the figure are formed with a plurality of protrusions 34 extending in the circumferential direction. The contact area reducing means 32 in FIGS. 2C and 2D is formed by a plurality of grooves 36 that are formed so as to extend in the axial direction of the rollers 21 and 22, respectively. The rollers 21 and 22 are provided at regular intervals in the circumferential direction. Therefore, the outer peripheral surfaces of the rollers 21 and 22 in the same figure have a shape including a plurality of protrusions 37 extending in the axial direction. The contact area reducing means 32 in FIGS. 2E and 2F form both the groove 33 in FIGS. 2A and 2B and the groove 36 in FIGS. 2C and 2D. On the outer peripheral surfaces of the rollers 21 and 22, the protrusions 39 are provided at predetermined intervals in the circumferential direction and the axial direction. The contact area reducing means 32 may be formed of a sponge-like material, and the contact area may be reduced by the sponge holes.

  The pressing means 13 includes a press roller 41 provided on the tip side of the peel plate 25. The press roller 41 is provided so as to be movable up and down via a drive device such as a cylinder (not shown), and can be applied to the wafer W and the ring frame RF by applying a pressing force to the adhesive sheet S.

  Next, a method for sticking the adhesive sheet S by the sheet sticking apparatus 10 will be described.

  As an initial work, the original fabric R supported by the support shaft 20 is pulled out by a predetermined length, and passes through the original fabric R in the order of the feed roller 21, the first pinch roller 22, the peel plate 25, the driving roller 26, and the second pinch roller 27. Then, the lead end of the original fabric R is fixed to the winding shaft 29. Then, the wafer W and the ring frame RF on which the protective sheet PS is attached to the upper surface of the table T are respectively held via a transport unit (not shown). Next, while moving the table T via the linear motor 16, the linear motor 16 is controlled by a sensor (not shown) so that the left end in FIG. 1 of the ring frame RF stops at a predetermined position below the press roller 43.

  Thereafter, the motors M1 and M2 of the supply means 12 are driven to feed out the original fabric R. In the course of feeding out the original fabric R, the release sheet RL is folded back at the tip of the peel plate 25, and the adhesive sheet S is supplied from the release sheet RL toward the ring frame RF while being peeled off. When it is detected by a sensor (not shown) that the adhesive sheet S has reached a predetermined position, the press roller 41 is lowered and the adhesive sheet S is attached to a predetermined position of the ring frame RF. Then, when the motors M1 and M2 rotate in synchronization with the conveying speed of the table T, the press roller 41 attaches the adhesive sheet S to the ring frame RF and the wafer from the other side (upper surface in FIG. 1) of the base sheet. Affix to W. At this time, since the rotation speed of the feed roller 21 is set slower than the rotation speed of the driving roller 26 and the conveyance speed of the table T, tension is applied to the adhesive sheet S to be attached.

  At the time of applying tension to the adhesive sheet S, the tension applied to the adhesive sheet S changes according to the resistance force between the feed roller 21 and the release sheet RL and the resistance force between the first pinch roller 22 and the adhesive sheet S. When the resistance force is large, the tension applied to the adhesive sheet S is increased, and when the resistance force is small, the tension applied is also decreased. In the present embodiment, the contact area reducing means 32 provided on each of the rollers 21 and 22 is set so that the resistance force is reduced in advance as compared with the cylindrical roller not provided with the unevenness described above. Thereby, each roller 21 and 22 is applied to the adhesive sheet S because the amount of change in the resistance force is small even when compared with when the rollers 21 and 22 are unused and new, and after dust or dirt adheres due to use. The tension can be maintained within a predetermined range over a long period of time.

  The wafer W integrated with the ring frame RF by sticking the adhesive sheet S is transferred to another process via a transfer device (not shown). Then, the adhesive sheet S can be pasted by the same operation thereafter.

  Therefore, according to such an embodiment, not only the amount of change in the resistance force with time can be reduced by the contact area reducing means 32 as described above, but also the ridges 34 and 37 and the protrusions in each roller 21 and 22. Since only the tip of 39 is in contact with the adhesive sheet S or the like, it is possible to make it difficult to change the resistance due to the influence of adhesion of dust or the like. As a result, the tension applied by each of the rollers 21 and 22 is maintained within a predetermined range for a long time, and it is possible to reduce labor for replacing or cleaning the rollers 21 and 22.

As described above, the best configuration, method and the like for carrying out the present invention have been disclosed in the above description, but the present invention is not limited to this.
In other words, the present invention has been illustrated and described mainly with respect to specific embodiments, but without departing from the scope of the technical idea and object of the present invention, the shape, position, or With respect to the arrangement and the like, those skilled in the art can make various changes as necessary.
Therefore, the description limited to the shape disclosed above is an example for easy understanding of the present invention, and does not limit the present invention. The description by the name of the member which remove | excluded one part or all part is included in this invention.

  For example, instead of the contact area reducing means 32, as shown in FIG. 3, a low friction means 43 for reducing the frictional force with the original fabric R may be adopted. As the low friction means 43, the feed roller 21 and the first pinch roller 22 are coated with a material that can reduce frictional force, such as a fluororesin or a urethane resin, on a cylindrical surface that is not particularly provided with irregularities such as a rubber roller. The configuration can be exemplified. As a result, the amount of change between the resistance force when the rollers 21 and 22 are new and the resistance force when dust or dirt adheres is reduced, and the same effect as described above is obtained. “Reducing the frictional force” means reducing the frictional force on the original fabric compared to the case where the cylindrical surface of the tensioning roller is subjected to surface treatment, etc., and the surface is not particularly treated. To do.

  Further, the contact area reducing means 32 or the low friction means 43 may be provided on any one of the feed roller 21 and the first pinch roller 22.

  Moreover, as long as the supply means 12 can supply the adhesive sheet S, various design changes are possible.

In addition, the adherend in the present invention is not limited to a semiconductor wafer or a ring frame, and other adherends such as a glass plate, a steel plate, or a resin plate can also be targeted. May be a silicon semiconductor wafer or a compound semiconductor wafer.
Furthermore, the drive device in the above embodiment employs an electric device such as a rotation motor, a linear motion motor, a single axis robot, an articulated robot, an actuator such as an air cylinder, a hydraulic cylinder, a rodless cylinder, and a rotary cylinder. In addition, a combination of them directly or indirectly can be adopted (some of them overlap with those exemplified in the embodiment).

DESCRIPTION OF SYMBOLS 10 Sheet sticking apparatus 12 Supply means 13 Sticking means 21 Feed roller (tension applying roller)
22 First pinch roller (tensioning roller)
32 Contact area reducing means 43 Low friction means R Original fabric RF Ring frame (adhered body)
S Adhesive sheet W Semiconductor wafer (Substrate)

Claims (2)

In the sheet sticking device for sticking the adhesive sheet of the original fabric including the adhesive sheet provided with the adhesive layer on one surface of the base sheet to the adherend,
A supply means for supplying the adhesive sheet toward the adherend, and an attaching means capable of pressing and attaching the adhesive sheet supplied from the supply means from the other surface side of the base sheet,
The supply means includes a tension applying roller capable of applying a tension to the adhesive sheet to be adhered to the adherend, and the tension applying roller is coated on the cylindrical surface with a resin or the like capable of reducing a frictional force. The sheet sticking device is characterized in that by using the low friction means, the friction force with the original fabric is reduced as compared with the case where the low friction means is not adopted. In the sheet sticking method of sticking the adhesive sheet of the original fabric including the adhesive sheet provided with the adhesive layer on one surface of the base sheet using the sheet sticking device according to claim 1,
By applying a low friction means to the friction force with the adhesive sheet, tension is applied to the adhesive sheet to be adhered to the adherend by a tension applying roller that reduces the friction force compared to the case where the low friction means is not used. Supplying the adhesive sheet toward the adherend while applying,
And a step of sticking the supplied adhesive sheet by pressing it from the other side of the base sheet.

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