JP5556665B2 - 含フッ素重合体、該含フッ素重合体よりなる硬化性樹脂組成物および反射防止膜 - Google Patents
含フッ素重合体、該含フッ素重合体よりなる硬化性樹脂組成物および反射防止膜 Download PDFInfo
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- JP5556665B2 JP5556665B2 JP2010537744A JP2010537744A JP5556665B2 JP 5556665 B2 JP5556665 B2 JP 5556665B2 JP 2010537744 A JP2010537744 A JP 2010537744A JP 2010537744 A JP2010537744 A JP 2010537744A JP 5556665 B2 JP5556665 B2 JP 5556665B2
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- IRPGOXJVTQTAAN-UHFFFAOYSA-N 2,2,3,3,3-pentafluoropropanal Chemical compound FC(F)(F)C(F)(F)C=O IRPGOXJVTQTAAN-UHFFFAOYSA-N 0.000 description 1
- PIZHFBODNLEQBL-UHFFFAOYSA-N 2,2-diethoxy-1-phenylethanone Chemical compound CCOC(OCC)C(=O)C1=CC=CC=C1 PIZHFBODNLEQBL-UHFFFAOYSA-N 0.000 description 1
- OEPOKWHJYJXUGD-UHFFFAOYSA-N 2-(3-phenylmethoxyphenyl)-1,3-thiazole-4-carbaldehyde Chemical compound O=CC1=CSC(C=2C=C(OCC=3C=CC=CC=3)C=CC=2)=N1 OEPOKWHJYJXUGD-UHFFFAOYSA-N 0.000 description 1
- XNWFRZJHXBZDAG-UHFFFAOYSA-N 2-METHOXYETHANOL Chemical compound COCCO XNWFRZJHXBZDAG-UHFFFAOYSA-N 0.000 description 1
- LCZVSXRMYJUNFX-UHFFFAOYSA-N 2-[2-(2-hydroxypropoxy)propoxy]propan-1-ol Chemical compound CC(O)COC(C)COC(C)CO LCZVSXRMYJUNFX-UHFFFAOYSA-N 0.000 description 1
- TXBCBTDQIULDIA-UHFFFAOYSA-N 2-[[3-hydroxy-2,2-bis(hydroxymethyl)propoxy]methyl]-2-(hydroxymethyl)propane-1,3-diol Chemical compound OCC(CO)(CO)COCC(CO)(CO)CO TXBCBTDQIULDIA-UHFFFAOYSA-N 0.000 description 1
- HEQOJEGTZCTHCF-UHFFFAOYSA-N 2-amino-1-phenylethanone Chemical compound NCC(=O)C1=CC=CC=C1 HEQOJEGTZCTHCF-UHFFFAOYSA-N 0.000 description 1
- FGTYTUFKXYPTML-UHFFFAOYSA-N 2-benzoylbenzoic acid Chemical compound OC(=O)C1=CC=CC=C1C(=O)C1=CC=CC=C1 FGTYTUFKXYPTML-UHFFFAOYSA-N 0.000 description 1
- KMNCBSZOIQAUFX-UHFFFAOYSA-N 2-ethoxy-1,2-diphenylethanone Chemical compound C=1C=CC=CC=1C(OCC)C(=O)C1=CC=CC=C1 KMNCBSZOIQAUFX-UHFFFAOYSA-N 0.000 description 1
- ZNQVEEAIQZEUHB-UHFFFAOYSA-N 2-ethoxyethanol Chemical compound CCOCCO ZNQVEEAIQZEUHB-UHFFFAOYSA-N 0.000 description 1
- SVONRAPFKPVNKG-UHFFFAOYSA-N 2-ethoxyethyl acetate Chemical compound CCOCCOC(C)=O SVONRAPFKPVNKG-UHFFFAOYSA-N 0.000 description 1
- SJEBAWHUJDUKQK-UHFFFAOYSA-N 2-ethylanthraquinone Chemical compound C1=CC=C2C(=O)C3=CC(CC)=CC=C3C(=O)C2=C1 SJEBAWHUJDUKQK-UHFFFAOYSA-N 0.000 description 1
- KRFFWELOYNJROH-UHFFFAOYSA-N 2-hydroxy-1,2-diphenylethanone Chemical compound C=1C=CC=CC=1C(O)C(=O)C1=CC=CC=C1.C=1C=CC=CC=1C(O)C(=O)C1=CC=CC=C1 KRFFWELOYNJROH-UHFFFAOYSA-N 0.000 description 1
- BQZJOQXSCSZQPS-UHFFFAOYSA-N 2-methoxy-1,2-diphenylethanone Chemical compound C=1C=CC=CC=1C(OC)C(=O)C1=CC=CC=C1 BQZJOQXSCSZQPS-UHFFFAOYSA-N 0.000 description 1
- 125000003903 2-propenyl group Chemical group [H]C([*])([H])C([H])=C([H])[H] 0.000 description 1
- VATRWWPJWVCZTA-UHFFFAOYSA-N 3-oxo-n-[2-(trifluoromethyl)phenyl]butanamide Chemical compound CC(=O)CC(=O)NC1=CC=CC=C1C(F)(F)F VATRWWPJWVCZTA-UHFFFAOYSA-N 0.000 description 1
- TXFPEBPIARQUIG-UHFFFAOYSA-N 4'-hydroxyacetophenone Chemical compound CC(=O)C1=CC=C(O)C=C1 TXFPEBPIARQUIG-UHFFFAOYSA-N 0.000 description 1
- CDSULTPOCMWJCM-UHFFFAOYSA-N 4h-chromene-2,3-dione Chemical compound C1=CC=C2OC(=O)C(=O)CC2=C1 CDSULTPOCMWJCM-UHFFFAOYSA-N 0.000 description 1
- JGZVUTYDEVUNMK-UHFFFAOYSA-N 5-carboxy-2',7'-dichlorofluorescein Chemical compound C12=CC(Cl)=C(O)C=C2OC2=CC(O)=C(Cl)C=C2C21OC(=O)C1=CC(C(=O)O)=CC=C21 JGZVUTYDEVUNMK-UHFFFAOYSA-N 0.000 description 1
- LPEKGGXMPWTOCB-UHFFFAOYSA-N 8beta-(2,3-epoxy-2-methylbutyryloxy)-14-acetoxytithifolin Natural products COC(=O)C(C)O LPEKGGXMPWTOCB-UHFFFAOYSA-N 0.000 description 1
- DLFVBJFMPXGRIB-UHFFFAOYSA-N Acetamide Chemical compound CC(N)=O DLFVBJFMPXGRIB-UHFFFAOYSA-N 0.000 description 1
- QTBSBXVTEAMEQO-UHFFFAOYSA-M Acetate Chemical compound CC([O-])=O QTBSBXVTEAMEQO-UHFFFAOYSA-M 0.000 description 1
- KLZUFWVZNOTSEM-UHFFFAOYSA-K Aluminum fluoride Inorganic materials F[Al](F)F KLZUFWVZNOTSEM-UHFFFAOYSA-K 0.000 description 1
- DKPFZGUDAPQIHT-UHFFFAOYSA-N Butyl acetate Natural products CCCCOC(C)=O DKPFZGUDAPQIHT-UHFFFAOYSA-N 0.000 description 1
- FQDXJYBXPOMIBX-UHFFFAOYSA-N CC(C(F)(F)F)(C(F)(F)F)O Chemical compound CC(C(F)(F)F)(C(F)(F)F)O FQDXJYBXPOMIBX-UHFFFAOYSA-N 0.000 description 1
- 229910004261 CaF 2 Inorganic materials 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 239000004641 Diallyl-phthalate Substances 0.000 description 1
- YXHKONLOYHBTNS-UHFFFAOYSA-N Diazomethane Chemical class C=[N+]=[N-] YXHKONLOYHBTNS-UHFFFAOYSA-N 0.000 description 1
- RWSOTUBLDIXVET-UHFFFAOYSA-N Dihydrogen sulfide Chemical class S RWSOTUBLDIXVET-UHFFFAOYSA-N 0.000 description 1
- XXRCUYVCPSWGCC-UHFFFAOYSA-N Ethyl pyruvate Chemical compound CCOC(=O)C(C)=O XXRCUYVCPSWGCC-UHFFFAOYSA-N 0.000 description 1
- 238000005033 Fourier transform infrared spectroscopy Methods 0.000 description 1
- NQSMEZJWJJVYOI-UHFFFAOYSA-N Methyl 2-benzoylbenzoate Chemical compound COC(=O)C1=CC=CC=C1C(=O)C1=CC=CC=C1 NQSMEZJWJJVYOI-UHFFFAOYSA-N 0.000 description 1
- XYVQFUJDGOBPQI-UHFFFAOYSA-N Methyl-2-hydoxyisobutyric acid Chemical compound COC(=O)C(C)(C)O XYVQFUJDGOBPQI-UHFFFAOYSA-N 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- ZJCCRDAZUWHFQH-UHFFFAOYSA-N Trimethylolpropane Chemical compound CCC(CO)(CO)CO ZJCCRDAZUWHFQH-UHFFFAOYSA-N 0.000 description 1
- 229920001807 Urea-formaldehyde Polymers 0.000 description 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
- QKMICJSPUVFVME-UHFFFAOYSA-N [3,3,3-trifluoro-2-hydroxy-2-(trifluoromethyl)propyl] 2-fluoroprop-2-enoate Chemical compound FC(C(=O)OCC(C(F)(F)F)(C(F)(F)F)O)=C QKMICJSPUVFVME-UHFFFAOYSA-N 0.000 description 1
- MPIAGWXWVAHQBB-UHFFFAOYSA-N [3-prop-2-enoyloxy-2-[[3-prop-2-enoyloxy-2,2-bis(prop-2-enoyloxymethyl)propoxy]methyl]-2-(prop-2-enoyloxymethyl)propyl] prop-2-enoate Chemical compound C=CC(=O)OCC(COC(=O)C=C)(COC(=O)C=C)COCC(COC(=O)C=C)(COC(=O)C=C)COC(=O)C=C MPIAGWXWVAHQBB-UHFFFAOYSA-N 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 239000006096 absorbing agent Substances 0.000 description 1
- 150000007513 acids Chemical class 0.000 description 1
- 125000003647 acryloyl group Chemical group O=C([*])C([H])=C([H])[H] 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000005456 alcohol based solvent Substances 0.000 description 1
- 150000004703 alkoxides Chemical class 0.000 description 1
- 229920000180 alkyd Polymers 0.000 description 1
- 150000001412 amines Chemical class 0.000 description 1
- 229920003180 amino resin Polymers 0.000 description 1
- 150000003863 ammonium salts Chemical class 0.000 description 1
- 229940072049 amyl acetate Drugs 0.000 description 1
- PGMYKACGEOXYJE-UHFFFAOYSA-N anhydrous amyl acetate Natural products CCCCCOC(C)=O PGMYKACGEOXYJE-UHFFFAOYSA-N 0.000 description 1
- 125000000129 anionic group Chemical group 0.000 description 1
- PYKYMHQGRFAEBM-UHFFFAOYSA-N anthraquinone Natural products CCC(=O)c1c(O)c2C(=O)C3C(C=CC=C3O)C(=O)c2cc1CC(=O)OC PYKYMHQGRFAEBM-UHFFFAOYSA-N 0.000 description 1
- 150000004056 anthraquinones Chemical class 0.000 description 1
- 230000003667 anti-reflective effect Effects 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 1
- 150000004945 aromatic hydrocarbons Chemical class 0.000 description 1
- 239000003849 aromatic solvent Substances 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000007611 bar coating method Methods 0.000 description 1
- 229920005601 base polymer Polymers 0.000 description 1
- RWCCWEUUXYIKHB-UHFFFAOYSA-N benzophenone Chemical compound C=1C=CC=CC=1C(=O)C1=CC=CC=C1 RWCCWEUUXYIKHB-UHFFFAOYSA-N 0.000 description 1
- 239000012965 benzophenone Substances 0.000 description 1
- 125000001797 benzyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])* 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- QUDWYFHPNIMBFC-UHFFFAOYSA-N bis(prop-2-enyl) benzene-1,2-dicarboxylate Chemical compound C=CCOC(=O)C1=CC=CC=C1C(=O)OCC=C QUDWYFHPNIMBFC-UHFFFAOYSA-N 0.000 description 1
- 229930006711 bornane-2,3-dione Natural products 0.000 description 1
- PVEOYINWKBTPIZ-UHFFFAOYSA-N but-3-enoic acid Chemical compound OC(=O)CC=C PVEOYINWKBTPIZ-UHFFFAOYSA-N 0.000 description 1
- OBNCKNCVKJNDBV-UHFFFAOYSA-N butanoic acid ethyl ester Natural products CCCC(=O)OCC OBNCKNCVKJNDBV-UHFFFAOYSA-N 0.000 description 1
- WUKWITHWXAAZEY-UHFFFAOYSA-L calcium difluoride Chemical compound [F-].[F-].[Ca+2] WUKWITHWXAAZEY-UHFFFAOYSA-L 0.000 description 1
- 229910001634 calcium fluoride Inorganic materials 0.000 description 1
- JHRWWRDRBPCWTF-OLQVQODUSA-N captafol Chemical class C1C=CC[C@H]2C(=O)N(SC(Cl)(Cl)C(Cl)Cl)C(=O)[C@H]21 JHRWWRDRBPCWTF-OLQVQODUSA-N 0.000 description 1
- RBHJBMIOOPYDBQ-UHFFFAOYSA-N carbon dioxide;propan-2-one Chemical compound O=C=O.CC(C)=O RBHJBMIOOPYDBQ-UHFFFAOYSA-N 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 125000002091 cationic group Chemical group 0.000 description 1
- KYKAJFCTULSVSH-UHFFFAOYSA-N chloro(fluoro)methane Chemical compound F[C]Cl KYKAJFCTULSVSH-UHFFFAOYSA-N 0.000 description 1
- 239000004567 concrete Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 125000004093 cyano group Chemical group *C#N 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 238000006392 deoxygenation reaction Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 239000012954 diazonium Substances 0.000 description 1
- 150000001989 diazonium salts Chemical class 0.000 description 1
- 238000007607 die coating method Methods 0.000 description 1
- WYACBZDAHNBPPB-UHFFFAOYSA-N diethyl oxalate Chemical compound CCOC(=O)C(=O)OCC WYACBZDAHNBPPB-UHFFFAOYSA-N 0.000 description 1
- 150000002009 diols Chemical class 0.000 description 1
- 238000003618 dip coating Methods 0.000 description 1
- QPOIJJUKCPCQIV-UHFFFAOYSA-N diphenylmethanone Chemical compound C=1C=CC=CC=1C(=O)C1=CC=CC=C1.C=1C=CC=CC=1C(=O)C1=CC=CC=C1 QPOIJJUKCPCQIV-UHFFFAOYSA-N 0.000 description 1
- 239000002612 dispersion medium Substances 0.000 description 1
- ODQWQRRAPPTVAG-GZTJUZNOSA-N doxepin Chemical compound C1OC2=CC=CC=C2C(=C/CCN(C)C)/C2=CC=CC=C21 ODQWQRRAPPTVAG-GZTJUZNOSA-N 0.000 description 1
- 239000000975 dye Substances 0.000 description 1
- 229920001971 elastomer Polymers 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000003792 electrolyte Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000003759 ester based solvent Substances 0.000 description 1
- GFUIDHWFLMPAGY-UHFFFAOYSA-N ethyl 2-hydroxy-2-methylpropanoate Chemical compound CCOC(=O)C(C)(C)O GFUIDHWFLMPAGY-UHFFFAOYSA-N 0.000 description 1
- KWWOQRSLYPHAMK-UHFFFAOYSA-N ethyl 2-hydroxybutanoate Chemical compound CCOC(=O)C(O)CC KWWOQRSLYPHAMK-UHFFFAOYSA-N 0.000 description 1
- IJUHLFUALMUWOM-UHFFFAOYSA-N ethyl 3-methoxypropanoate Chemical compound CCOC(=O)CCOC IJUHLFUALMUWOM-UHFFFAOYSA-N 0.000 description 1
- XYIBRDXRRQCHLP-UHFFFAOYSA-N ethyl acetoacetate Chemical compound CCOC(=O)CC(C)=O XYIBRDXRRQCHLP-UHFFFAOYSA-N 0.000 description 1
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 1
- 229940116333 ethyl lactate Drugs 0.000 description 1
- 229940117360 ethyl pyruvate Drugs 0.000 description 1
- 239000005357 flat glass Substances 0.000 description 1
- 150000002222 fluorine compounds Chemical class 0.000 description 1
- 125000003709 fluoroalkyl group Chemical group 0.000 description 1
- 239000007849 furan resin Substances 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- MNWFXJYAOYHMED-UHFFFAOYSA-M heptanoate Chemical compound CCCCCCC([O-])=O MNWFXJYAOYHMED-UHFFFAOYSA-M 0.000 description 1
- XXMIOPMDWAUFGU-UHFFFAOYSA-N hexane-1,6-diol Chemical compound OCCCCCCO XXMIOPMDWAUFGU-UHFFFAOYSA-N 0.000 description 1
- FUZZWVXGSFPDMH-UHFFFAOYSA-N hexanoic acid Chemical compound CCCCCC(O)=O FUZZWVXGSFPDMH-UHFFFAOYSA-N 0.000 description 1
- 150000002430 hydrocarbons Chemical group 0.000 description 1
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- 125000003010 ionic group Chemical group 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 230000000670 limiting effect Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- ORUIBWPALBXDOA-UHFFFAOYSA-L magnesium fluoride Chemical compound [F-].[F-].[Mg+2] ORUIBWPALBXDOA-UHFFFAOYSA-L 0.000 description 1
- 229910001635 magnesium fluoride Inorganic materials 0.000 description 1
- BDJSOPWXYLFTNW-UHFFFAOYSA-N methyl 3-methoxypropanoate Chemical compound COCCC(=O)OC BDJSOPWXYLFTNW-UHFFFAOYSA-N 0.000 description 1
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 1
- 229940057867 methyl lactate Drugs 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 125000000896 monocarboxylic acid group Chemical group 0.000 description 1
- 125000004123 n-propyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- 125000003518 norbornenyl group Chemical class C12(C=CC(CC1)C2)* 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 150000007524 organic acids Chemical class 0.000 description 1
- 235000005985 organic acids Nutrition 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 238000010422 painting Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- WXZMFSXDPGVJKK-UHFFFAOYSA-N pentaerythritol Chemical compound OCC(CO)(CO)CO WXZMFSXDPGVJKK-UHFFFAOYSA-N 0.000 description 1
- FYJQJMIEZVMYSD-UHFFFAOYSA-N perfluoro-2-butyltetrahydrofuran Chemical compound FC(F)(F)C(F)(F)C(F)(F)C(F)(F)C1(F)OC(F)(F)C(F)(F)C1(F)F FYJQJMIEZVMYSD-UHFFFAOYSA-N 0.000 description 1
- 125000005010 perfluoroalkyl group Chemical group 0.000 description 1
- 238000005191 phase separation Methods 0.000 description 1
- IMACFCSSMIZSPP-UHFFFAOYSA-N phenacyl chloride Chemical compound ClCC(=O)C1=CC=CC=C1 IMACFCSSMIZSPP-UHFFFAOYSA-N 0.000 description 1
- 239000005011 phenolic resin Substances 0.000 description 1
- LYXOWKPVTCPORE-UHFFFAOYSA-N phenyl-(4-phenylphenyl)methanone Chemical compound C=1C=C(C=2C=CC=CC=2)C=CC=1C(=O)C1=CC=CC=C1 LYXOWKPVTCPORE-UHFFFAOYSA-N 0.000 description 1
- 150000004714 phosphonium salts Chemical class 0.000 description 1
- 239000011941 photocatalyst Substances 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 239000000049 pigment Substances 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 229920005668 polycarbonate resin Polymers 0.000 description 1
- 239000004431 polycarbonate resin Substances 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 239000009719 polyimide resin Substances 0.000 description 1
- 229920001709 polysilazane Polymers 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- BDERNNFJNOPAEC-UHFFFAOYSA-N propan-1-ol Chemical compound CCCO BDERNNFJNOPAEC-UHFFFAOYSA-N 0.000 description 1
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 description 1
- 238000010926 purge Methods 0.000 description 1
- 239000011541 reaction mixture Substances 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 239000012744 reinforcing agent Substances 0.000 description 1
- 238000001226 reprecipitation Methods 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 150000003377 silicon compounds Chemical class 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 239000004575 stone Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 125000001424 substituent group Chemical group 0.000 description 1
- 150000003457 sulfones Chemical class 0.000 description 1
- 150000003458 sulfonic acid derivatives Chemical class 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
- CZDYPVPMEAXLPK-UHFFFAOYSA-N tetramethylsilane Chemical compound C[Si](C)(C)C CZDYPVPMEAXLPK-UHFFFAOYSA-N 0.000 description 1
- 229920002803 thermoplastic polyurethane Polymers 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
- YRHRIQCWCFGUEQ-UHFFFAOYSA-N thioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC=CC=C3SC2=C1 YRHRIQCWCFGUEQ-UHFFFAOYSA-N 0.000 description 1
- MZQZQKZKTGRQCG-UHFFFAOYSA-J thorium tetrafluoride Chemical compound F[Th](F)(F)F MZQZQKZKTGRQCG-UHFFFAOYSA-J 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- IMFACGCPASFAPR-UHFFFAOYSA-N tributylamine Chemical compound CCCCN(CCCC)CCCC IMFACGCPASFAPR-UHFFFAOYSA-N 0.000 description 1
- 229940029284 trichlorofluoromethane Drugs 0.000 description 1
- 150000004072 triols Chemical class 0.000 description 1
- 239000004034 viscosity adjusting agent Substances 0.000 description 1
- 239000002023 wood Substances 0.000 description 1
- 210000002268 wool Anatomy 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
- 239000004711 α-olefin Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F220/00—Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical or a salt, anhydride ester, amide, imide or nitrile thereof
- C08F220/02—Monocarboxylic acids having less than ten carbon atoms; Derivatives thereof
- C08F220/10—Esters
- C08F220/22—Esters containing halogen
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/11—Anti-reflection coatings
- G02B1/111—Anti-reflection coatings using layers comprising organic materials
Landscapes
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Medicinal Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Optics & Photonics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Physics & Mathematics (AREA)
- Polymers & Plastics (AREA)
- Organic Chemistry (AREA)
- Surface Treatment Of Optical Elements (AREA)
- Macromonomer-Based Addition Polymer (AREA)
- Compositions Of Macromolecular Compounds (AREA)
- Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
Description
−(M1)−(M2)−(N)− (I)
(式中、M1は、式(1−1):
M2は式(1−2):
NはM1およびM2を与える単量体と共重合可能な単量体に由来する構造単位)で示され、構造単位M1を0.1〜100モル%、構造単位M2を0〜99.9モル%および構造単位Nを0〜99.9モル%含み、数平均分子量が500〜1000000である新規な含フッ素重合体(I)に関する。
−(M1)−(M2)−(N)− (I)
(式中、M1は、式(1−1):
M2は式(1−2):
NはM1およびM2を与える単量体と共重合可能な単量体に由来する構造単位)で示され、構造単位M1を0.1〜100モル%、構造単位M2を0〜99.9モル%および構造単位Nを0〜99.9モル%含み、数平均分子量が500〜1000000である含フッ素重合体(I)を含む膜形成材料、および
(B)活性エネルギー線硬化開始剤
を含む硬化性樹脂組成物にも関する。
−(M3)−(N1)− (II)
(式中、M3は、式(2):
構造単位M3を0.1〜100モル%、構造単位N1を0〜99.9モル%含み、数平均分子量が500〜1000000である含フッ素重合体(II)を含んでいてもよい。
−(M1)−(M2)−(N)− (I)
(式中、M1は、式(1−1):
M2は式(1−2):
NはM1およびM2を与える単量体と共重合可能な単量体に由来する構造単位)で示され、構造単位M1を0.1〜100モル%、構造単位M2を0〜99.9モル%および構造単位Nを0〜99.9モル%含み、数平均分子量が500〜1000000である含フッ素重合体(I)である。
(i)−C(=O)CF=CH2を有する単量体(m1)を予め合成し、重合して得る方法
(ii)一旦、他の官能基を有する重合体を合成し、その重合体に高分子反応により官能基変換し、−C(=O)CF=CH2を導入する方法
がありいずれの方法も採用できるが、(ii)の方法は、−C(=O)CF=CH2が有する炭素−炭素二重結合の硬化反応に配慮しなくてもよい点、また、硬化反応性の高い炭素−炭素二重結合も側鎖に導入できる点で好ましい方法である。
これらは、含フッ素重合体(I)およびその硬化物の屈折率を低く維持しながら、基材への密着性や溶剤、特に汎用溶剤への溶解性を付与できる点で好ましく、架橋性などの機能を付与できる点で好ましい。
これらは含フッ素重合体(I)またはその硬化物の屈折率を低く維持できる点で、またさらに低屈折率化することができる点で好ましい。また単量体を選択することで含フッ素重合体(I)の機械的特性やガラス転移点などを調整でき、特に構造単位M1およびM2と共重合してガラス転移点を高くすることができ、好ましいものである。
これらの構造単位を導入すると、透明性を高くでき、また、より低屈折率化が可能となり、さらに高ガラス転移点の含フッ素重合体(I)が得られ、硬化物にさらなる高硬度化が期待できる点で好ましい。
屈折率を悪化(高屈折率化)させない範囲でフッ素を含まないエチレン性単量体から誘導される構造単位を導入してもよい。
αオレフィン類:
エチレン、プロピレン、ブテン、塩化ビニル、塩化ビニリデンなど
ビニルエーテル系またはビニルエステル系単量体:
CH2=CHOR、CH2=CHOCOR(R:炭素数1〜20の炭化水素基)など
アリル系単量体:
CH2=CHCH2Cl、CH2=CHCH2OH、CH2=CHCH2COOH、CH2=CHCH2Brなど
アリルエーテル系単量体:
アクリル系またはメタクリル系単量体:
アクリル酸、メタクリル酸、アクリル酸エステル類、メタクリル酸エステル類のほか、無水マレイン酸、マレイン酸、マレイン酸エステル類などがあげられる。
さらなる共重合成分として、より好ましくは構造単位M1およびM2と前述の含フッ素エチレン性単量体または非フッ素エチレン性単量体(前述の(iii)、(iv))の構造単位に加えて、第3成分として脂環式単量体構造単位を導入してもよく、それによって高ガラス転移点化、高硬度化が図られるので好ましい。
(A)含フッ素重合体(Ia)を含む膜形成材料、および
(B)活性エネルギー線硬化開始剤
を含む。
−(M3)−(N1)− (II)
(式中、M3は、式(2):
構造単位M3を0.1〜100モル%、構造単位N1を0〜99.9モル%含み、数平均分子量が500〜1000000である含フッ素重合体(II)を含んでいてもよい。
アセトフェノン、クロロアセトフェノン、ジエトキシアセトフェノン、ヒドロキシアセトフェノン、α−アミノアセトフェノンなど
ベンゾイン系
ベンゾイン、ベンゾインメチルエーテル、ベンゾインエチルエーテル、ベンゾインイソプロピルエーテル、ベンゾインイソブチルエーテル、ベンジルジメチルケタールなど
ベンゾフェノン系
ベンゾフェノン、ベンゾイル安息香酸、ベンゾイル安息香酸メチル、4−フェニルベンゾフェノン、ヒドロキシベンゾフェノン、ヒドロキシ−プロピルベンゾフェノン、アクリル化ベンゾフェノン、ミヒラーケトンなど
チオキサンソン類
チオキサンソン、クロロチオキサンソン、メチルチオキサンソン、ジエチルチオキサンソン、ジメチルチオキサンソンなど
その他
ベンジル、α−アシルオキシムエステル、アシルホスフィンオキサイド、グリオキシエステル、3−ケトクマリン、2−エチルアンスラキノン、カンファーキノン、アンスラキノンなど
また、必要に応じてアミン類、スルホン類、スルフィン類などの光開始助剤を添加してもよい。
ヨードニウム塩、スルホニウム塩、ホスホニウム塩、ジアゾニウム塩、アンモニウム塩、ピリジニウム塩など
スルホン化合物
β−ケトエステル、β−スルホニルスルホンとこれらのα−ジアゾ化合物など
スルホン酸エステル類
アルキルスルホン酸エステル、ハロアルキルスルホン酸エステル、アリールスルホン酸エステル、イミノスルホネートなど
その他
スルホンイミド化合物類、ジアゾメタン化合物類など
ベンゾトリフルオライド、パーフルオロベンゼン、パーフルオロ(トリブチルアミン)、ClCF2CFClCF2CFCl2などがあげられる。
プリズム、レンズシート、偏光板、光学フィルター、レンチキュラーレンズ、フレネルレンズ、背面投写型ディスプレイのスクリーン、光ファイバーや光カプラーなどの光学部品;
ショーウインドーのガラス、ショーケースのガラス、広告用カバー、フォトスタンド用のカバーなどに代表される透明な保護版;
CRT、液晶ディスプレイ、プラズマディスプレイ、背面投写型ディスプレイなどの保護板;
光磁気ディスク、CD・LD・DVDなどのリードオンリー型光ディスク、PDなどの相転移型光ディスク、ホログラム記録などに代表される光記録媒体;
フォトレジスト、フォトマスク、ペリクル、レチクルなどの半導体製造時のフォトリソグラフィー関連部材;
ハロゲンランプ、蛍光灯、白熱電灯などの発光体の保護カバー;
上記物品に貼り付けるためのシートまたはフィルム。
NMR測定装置:BRUKER社製
1H−NMR測定条件:400MHz(テトラメチルシラン=0ppm)
19F−NMR測定条件:376MHz(トリクロロフルオロメタン=0ppm)
PERKIN ELMER社製フーリエ変換赤外分光光度計1760Xで室温にて測定。
ゲルパーミエーションクロマトグラフィ(GPC)により、東ソー(株)製のGPC HLC−8020を用い、Shodex社製のカラム(GPC KF−801を1本、GPC KF−802を1本、GPC KF−806Mを2本直列に接続)を使用し、溶媒としてテトラハイドロフラン(THF)を流速1ml/分で流して測定したデータより算出する。
アッベ屈折計を用いて25℃で550nmの波長の光について屈折率を測定する。
(株)東洋精機製作所製のヘイズカードIIを用い、ASTM D1003に従って測定する。
裏面をスチールウールで削り、黒マジックで塗りつぶした反射防止フィルムを、5°正反射ユニットを装着した可視紫外線分光器にセットし、視感度平均反射率(%)および最低反射率(%)を測定する。測定には(株)日立ハイテクノロジー製のU−4000・SPECTROMETERを使用する。
JIS K5400に従って測定する。
窒素導入管、減圧ライン、温度計、セプタムラバーキャップ、スタラーチップを装着した50ml三つ口フラスコを乾燥し、α−フルオロアクリル酸の1,1,1−トリフルオロ−2−トリフルオロメチル−2−ヒドロキシプロピルエステル:
CH2=CFCOOCH2C(CF3)2OH
3.0g(11mmol)、THF15mlを加えドライアイス−アセトン浴で冷却した。アゾイソブチロニトリル(AIBN)60mg(0.4mmol)を加えた後、撹拌しながら減圧して脱酸素を行った。窒素で置換した後水浴にて70℃に加温し3時間撹拌した。室温に戻して20時間撹拌した後、反応混合物をn−ヘキサン300mlに撹拌しながら投入し、再沈殿にて目的とする含フッ素重合体(Ia)を得た。収量2.7g(収率90%)。
環流冷却器、温度計、撹拌装置、滴下漏斗を備えた50ml三ツ口フラスコに、メチルイソブチルケトン(MIBK)5.0ml、合成例1で得た含フッ素重合体の単独重合体1.0gと、ピリジン320mgを仕込み5℃以下に氷冷した。
α−フルオロアクリル酸フルオライド:CH2=CFCOFを250mg用いた以外は合成例2と同様にして、含フッ素重合体(MIBK溶液)を合成した。
α−フルオロアクリル酸フルオライド:CH2=CFCOFを50mg用いた以外は合成例2と同様にして、含フッ素重合体(MIBK溶液)を合成した。
α−フルオロアクリル酸フルオライド:CH2=CFCOFを350mg用いた以外は合成例2と同様にして、含フッ素重合体(MIBK溶液)を合成した。
撹拌装置および温度計を備えた100mlのガラス製四ツ口フラスコに、パーフルオロ−(1,1,9,9−テトラハイドロ−2,5−ビストリフルオロメチル−3,6−ジオキサノネノール)
(1)硬化性樹脂組成物の調製
合成例2で得たα−フルオロアクリロイル基を有する含フッ素重合体(I−1)のMIBK溶液を乾燥減量により固形分量を測定した後、MIBKで希釈することにより重合体濃度15質量%に調整した。
得られた硬化性樹脂組成物を未処理のトリアセチルセルロース(TAC)上にバーコーター(#7)により室温でコートし、70℃で1分間乾燥した。この際、乾燥後の膜厚が100nmとなるように調整した。
含フッ素重合体(I−1)に代えて合成例3で得たα−フルオロアクリロイル基を有する含フッ素重合体(I−2)を用いた以外は実施例1と同様にして硬化性樹脂組成物の調製、反射防止膜の作製、特性の評価を行なった。結果を表1に示す。
含フッ素重合体(I−1)に代えて合成例5で得たα−フルオロアクリロイル基を有する含フッ素重合体(I−4)を用いた以外は実施例1と同様にして硬化性樹脂組成物の調製、反射防止膜の作製、特性の評価を行なった。結果を表1に示す。
含フッ素重合体(I−1)に代えて、合成例6で得たα−フルオロアクリロイル基を有するフルオロエーテル含有含フッ素重合体(II−1)を用いた以外は実施例1と同様にして硬化性樹脂組成物の調製、反射防止膜の作製、特性の評価を行なった。結果を表1に示す。
(1)硬化性樹脂組成物の調製
合成例2で得たα−フルオロアクリロイル基を有する含フッ素重合体(I−1)のMIBK溶液を乾燥減量により固形分量を測定した後、MIBKで希釈することにより重合体濃度15質量%に調整した。
得られた硬化性樹脂組成物を未処理のTAC上にバーコーター(#7)により室温でコートし、70℃で1分間乾燥した。この際、乾燥後の膜厚が100nmとなるように調整した。
含フッ素重合体(I−1)に代えて合成例3で得たα−フルオロアクリロイル基を有する含フッ素重合体(I−2)を用いた以外は実施例4と同様にして硬化性樹脂組成物の調製、反射防止膜の作製、特性の評価を行なった。結果を表2に示す。
含フッ素重合体(I−1)に代えて合成例5で得たα−フルオロアクリロイル基を有する含フッ素重合体(I−4)を用いた以外は実施例4と同様にして硬化性樹脂組成物の調製、反射防止膜の作製、特性の評価を行なった。結果を表2に示す。
含フッ素重合体(I)に代えて、合成例6で得たα−フルオロアクリロイル基を有するフルオロエーテル含有含フッ素重合体(II−1)を用いた以外は実施例4と同様にして硬化性樹脂組成物の調製、反射防止膜の作製、特性の評価を行なった。結果を表2に示す。
Claims (4)
- 膜形成材料(A)が、さらに式(II):
−(M3)−(N1)− (II)
(式中、M3は、式(2):
構造単位M3を0.1〜100モル%、構造単位N1を0〜99.9モル%含み、数平均分子量が500〜1000000である含フッ素重合体(II)を含む請求項1記載の反射防止膜用硬化性樹脂組成物。 - 溶剤(C)を含む請求項1または2記載の反射防止膜用硬化性樹脂組成物。
- 請求項1〜3のいずれかに記載の硬化性樹脂組成物を光硬化して得られる反射防止膜。
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